Laser processing apparatus and laser processing method

Abstract

To provide a laser processing device capable of efficiently recovering a product even when a laser head is moved back and forth.SOLUTION: This laser processing device comprises: a laser head that irradiates a workpiece with laser light; and a recovery mechanism that recovers a product by emission of the laser light. The recovery mechanism comprises: a first recovery unit provided with a first air supply nozzle that supplies a scavenging gas, and a first suction duct provided facing the first air supply nozzle; and a second recovery unit provided with a second air supply nozzle that supplies a scavenging gas, and a second suction duct provided facing the second air supply nozzle.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to a laser processing apparatus having a function of collecting products such as fume and spatter that are inevitably generated by irradiation with laser light (Light Amplification by Stimulated Emission of Radiation).

Background Art

[0002] When processing a workpiece by irradiating it with laser light, dust and smoke called fume and spatter are inevitably generated. Since such products as fume are an obstacle to laser processing, the products such as fume are collected. In order to collect the products such as fume, as disclosed in Patent Document 1 and Patent Document 2, air and other gases are supplied to the processing site, and the site is depressurized and suctioned.

[0003] When irradiating laser light to cut, for example, a workpiece to be processed, the laser head that emits the laser light is moved along the required trajectory. When the dimension in the thickness direction of the workpiece to be processed is large, if the laser light is irradiated along the trajectory only once, it cannot be cut completely, so it is irradiated multiple times In order to irradiate the laser light along the trajectory, the laser head may be reciprocated.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] The present disclosure aims to provide a laser processing apparatus that can efficiently recover products even when the laser head is reciprocated.

Means for Solving the Problems

[0006] The laser processing apparatus according to the present disclosure includes a laser head that irradiates a processing object with laser light, and a recovery mechanism that recovers products generated by the irradiation of the laser light. This recovery mechanism includes a first recovery unit and a second recovery unit. The first recovery unit has a first air supply nozzle that supplies scavenging gas, and a first suction duct provided facing the first air supply nozzle. The second recovery unit has a second air supply nozzle that supplies scavenging gas, and a second suction duct provided facing the second air supply nozzle.

[0007] In the laser processing method of irradiating a processing object with laser light from the laser head of the present disclosure, a first recovery step and a second recovery step are selectively performed. In the first recovery step, scavenging gas is supplied from the first air supply nozzle, and the scavenging gas containing the product generated by the irradiation of the laser light is sucked by the first suction duct. In the second recovery step, scavenging gas is supplied from the second air supply nozzle, and the scavenging gas containing the product is sucked by the second suction duct.

Advantages of the Invention

[0008] The present disclosure includes a first recovery unit having a first air supply nozzle and a first suction duct, and a second recovery unit having a second air supply nozzle and a second suction duct. According to the present disclosure, for example, the first recovery unit is used for recovering products in the forward path, and the second recovery unit is used for recovering products in the return path. Thus, since there are recovery units that function in each of the forward path and the return path, products can be recovered efficiently.

Brief Description of the Drawings

[0009]

Figure 1

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Mode for Carrying Out the Invention

[0010] Hereinafter, an embodiment of a laser processing apparatus 1 according to the present disclosure will be described with reference to the accompanying drawings. The laser processing apparatus 1 includes a laser head 10 that emits laser light and a recovery mechanism 30 that recovers products such as fumes. The recovery mechanism 30 includes a set of a first air supply nozzle 32 and a first suction duct 33 and a set of a second air supply nozzle 36 and a second suction duct 37. When the laser head 10 reciprocates in the forward and return paths to process the workpiece W, for example, when moving in the forward path, a set of one first air supply nozzle 32 and the first suction duct 33 functions, and when moving in the return path, a set of the other second air supply nozzle 36 and the second suction duct 37 functions. Hereinafter, the laser processing apparatus 1 will be described in the order of configuration, operation, and effect.

[0011] [Configuration Example of Laser Processing Apparatus 1: Refer to FIGS. 1 and 2] As shown in FIGS. 1 and 2, the laser processing apparatus 1 includes a laser head 10 and a recovery mechanism 30.

[0012] [Laser head 10: Refer to FIG. 1] The laser head 10 emits the laser beam LB generated by a laser oscillator (not shown) so as to form a focus on the surface of the workpiece W. As the laser oscillator, for example, a fiber laser output device that outputs a laser using an optical fiber as a medium, or a short pulse laser output device that outputs a short pulse laser, etc. are used. Further, between the laser transmitter and the laser head 10, an optical system including lenses and prisms, and other devices are applied.

[0013] [Recovery mechanism 30: Refer to FIGS. 1 and 2] The recovery mechanism 30 includes, for example, a first recovery unit 31 that functions during machining in the forward path, and a second recovery unit 35 that functions during machining in the return path, for example. The first recovery unit 31 and the second recovery unit 35 have the same components, but the arrangement of the components is different by 180 degrees. The recovery mechanism 30 includes a scavenging unit 40 that supplies scavenging gas to the first recovery unit 31 and the second recovery unit 35 and discharges the supplied scavenging gas from the machining site together with products such as fumes.

[0014] The first recovery unit 31 includes a first air supply nozzle 32 that supplies scavenging gas such as inert gas to the machining site, and a first suction duct 33 that discharges the scavenging gas containing products from the machining site. The first air supply nozzle 32 and the first suction duct 33 are arranged with the laser head 10 in between and at symmetric positions with respect to the axis C, that is, positions where the phases are shifted by 180 degrees. This arrangement is an example of the most preferable opposed arrangement, but even when the scavenging can be performed, for example, when the phase is shifted by about 150 degrees, it is included in the opposed arrangement of the present disclosure.

[0015] The first air supply nozzle 32 is provided with an air supply port 32A at its tip, and the first suction duct 33 is provided with a suction port 33A at its tip. Further, a bent portion 32B is formed near the tip of the first air supply nozzle 32, and a bent portion 33B is formed near the tip of the first suction duct 33. The bent portion 32B and the bent portion 33B bend toward the axis C so that the air supply port 32A of the first air supply nozzle 32 and the suction port 33A of the first suction duct 33 face each other.

[0016] The second recovery unit 35 includes a second air supply nozzle 36 that supplies scavenging gas such as inert gas to the processing site, and a second suction duct 37 that discharges the scavenging gas containing the product from the processing site. The second air supply nozzle 36 and the second suction duct 37 are arranged with the laser head 10 interposed therebetween and at symmetric positions with respect to the axis C, that is, positions where the phases are shifted by 180 degrees.

[0017] The second air supply nozzle 36 is provided with an air supply port 36A at its tip, and the second suction duct 37 is provided with a suction port 37A at its tip. Further, a bent portion 36B is formed near the tip of the second air supply nozzle 36, and a bent portion 37B is formed near the tip of the second suction duct 37. The bent portion 36B and the bent portion 37B bend toward the axis C so that the air supply port 36A of the second air supply nozzle 36 and the suction port 37A of the second suction duct 37 face each other.

[0018] The first air supply nozzle 32 and the second suction duct 37 are arranged side by side with the first air supply nozzle 32 on the inner side in the radial direction and the second suction duct 37 on the outer side in the radial direction. The second air supply nozzle 36 and the first suction duct 33 are arranged side by side with the second air supply nozzle 36 on the inner side in the radial direction and the first suction duct 33 on the outer side in the radial direction. The radial direction referred to here is with respect to a virtual circle centered on the axis C.

[0019] The first recovery unit 31 and the second recovery unit 35 are supported by a support cylinder 38 fixed to the laser head 10. The laser head 10 is arranged in a laser passage 39 formed by a gap occupying the center of the support cylinder 38, and the laser beam LB emitted from its tip is irradiated onto a workpiece W (not shown) through the laser passage 39. The first recovery unit 31 (the first air supply nozzle 32, the first suction duct 33) and the second recovery unit 35 (the second air supply nozzle 36, the second suction duct 37) are, as an example, suspended from the lower end of the support cylinder 38. The first air supply nozzle 32, the first suction duct 33, the second air supply nozzle 36, and the second suction duct 37 are connected to a first air supply pipe 46A, a first suction pipe 46C, a second air supply pipe 47A, and a second suction pipe 47C that constitute the scavenging unit 40 via the support cylinder 38.

[0020] [Scavenging section 40: Refer to FIGS. 2 and 1] The scavenging section 40 scavenges air containing products such as fumes and other gases using the recovery mechanism 30. Here, scavenging means performing both air supply for supplying gas and suction of the gas. Hereinafter, an example in which compressed air is used as the scavenging gas will be described, but other gases such as inert gases can also be used as the scavenging gas. The scavenging section 40 includes a compressor 41, a first solenoid valve 43 and a second solenoid valve 45 that supply and stop the compressed air supplied from the compressor 41. The compressor 41 is connected to the first solenoid valve 43 and the second solenoid valve 45 by a basic pipe 42 that branches into a branch pipe 42A and a branch pipe 42B midway, and the compressed air from the compressor 41 reaches the first solenoid valve 43 and the second solenoid valve 45 through the basic pipe 42.

[0021] One end of a first scavenging pipe 46 is connected to the first solenoid valve 43, and one end of a second scavenging pipe 47 is connected to the second solenoid valve 45. The other end of the first scavenging pipe 46 is connected to the first recovery section 31, and the other end of the second scavenging pipe 47 is connected to the second recovery section 35.

[0022] The first scavenging pipe 46 branches into a first air supply pipe 46A and a first compressed air supply pipe 46B. The first air supply pipe 46A is connected to the first air supply nozzle 32, and the first compressed air supply pipe 46B is connected to the first ejector 48. An ejector is a mechanical element that forms a decompressed (vacuum) space by flowing compressed air inside. When the compressed air from the compressor 41 is supplied to the first air supply pipe 46A via the first solenoid valve 43, the compressed air is discharged from the air supply port 32A of the first air supply nozzle 32 toward the processing site. One end of the first suction pipe 46C is connected to the first ejector 48, and the other end of the first suction pipe 46C is connected to the first suction duct 33. When compressed air from the compressor 41 is supplied to the first ejector 48, the interior of the first suction pipe 46C connected to the depressurized first ejector 48 is brought into a decompressed atmosphere, whereby the first suction duct 33 sucks ambient air containing products such as fumes from the suction port 33A. The air containing the sucked products is collected via the first ejector 48 into a container such as a tank (not shown).

[0023] The second scavenging pipe 47 branches into a second air supply pipe 47A and a second compressed air supply pipe 47B. The second air supply pipe 47A is connected to the second air supply nozzle 36, and the second compressed air supply pipe 47B is connected to the second ejector 49. When compressed air from the compressor 41 is supplied to the second air supply pipe 47A via the second solenoid valve 45, the compressed air is discharged from the air supply port 36A of the second air supply nozzle 36. One end of the second suction pipe 47C is connected to the second ejector 49, and the other end of the second suction pipe 47C is connected to the second suction duct 37. When compressed air from the compressor 41 is supplied to the second ejector 49, the interior of the second suction pipe 47C connected to the depressurized second ejector 49 is brought into a decompressed atmosphere, whereby the second suction duct 37 sucks ambient air containing products such as fumes from the suction port 37A. The air containing the sucked products is collected via the second ejector 49 into a container such as a tank (not shown).

[0024] In the scavenging section 40, the opening and closing of the first solenoid valve 43 and the second solenoid valve 45 are selectively performed according to whether the processing of the workpiece W by the laser head 10 is for the forward path or the return path. That is, when processing the forward path, for example, the first solenoid valve 43 is opened (ON) and the second solenoid valve 45 is closed (OFF). Then, compressed air is supplied to the first air supply nozzle 32 through the first air supply pipe 46A, and compressed air is supplied to the first ejector 48 through the first compressed air supply pipe 46B, and scavenging is performed. Also, when processing the return path, the second solenoid valve 45 is opened (ON) and the first solenoid valve 43 is closed (OFF). Then, compressed air is supplied to the second air supply nozzle 36 through the second air supply pipe 47A, and compressed air is supplied to the second ejector 49 through the first compressed air supply pipe 46B, and scavenging is performed.

[0025] [Reciprocating movement: Refer to FIGS. 3 and 4] The processing of the workpiece W while the laser head 10 reciprocates will be described with reference to FIGS. 3 and 4. In FIG. 3, the thick solid line is the processing locus MT in the workpiece W viewed in plan. Processing is performed while moving the laser head 10 that emits the laser beam LB along the processing locus MT. Even if the laser beam LB follows the processing locus MT only once, it may not be possible to complete the processing of the workpiece W. For example, in the case of cutting the workpiece W along the processing locus MT. In this case, if the laser head 10 is moved from the starting point SP to the ending point EP of the processing locus MT (FIG. 3 1st), the laser head 10 is moved in the reverse direction from the ending point EP to the starting point SP (FIG. 3 2nd). This operation is a reciprocating movement. Further, if irradiation of the laser beam LB is required, if the laser head 10 is moved from the starting point SP to the ending point EP of the processing locus MT (FIG. 3 3rd), the laser head 10 is moved in the reverse direction from the ending point EP to the starting point SP (FIG. 3 4th). In FIG. 3, the reciprocating movement locus indicated by the dashed arrow showing the laser beam LB is drawn shifted from the processing locus MT respectively, but this is for the purpose of being able to recognize the reciprocating movement.

[0026] FIG. 4 shows the operation of the scavenging section 40 in the forward path (O-B) and the operation of the scavenging section 40 in the return path (I-B). Note that the open first solenoid valve 43 or second solenoid valve 45 is represented in white, and the closed first solenoid valve 43 or second solenoid valve 45 is painted black. Further, the pipes through which air is flowing are drawn thickly.

[0027] In the forward path (O-B), the first solenoid valve 43 is open while the second solenoid valve 45 is closed. The compressed air from the compressor 41 is discharged from the air supply port 32A through the first air supply pipe 46A and the first air supply nozzle 32. Also, the compressed air from the compressor 41 passes through the first compressed air supply pipe 46B and the first ejector 48 to decompress the inside of the first suction pipe 46C and the first suction duct 33, and suck the ambient air from the suction port 33A. In this way, products such as fumes by scavenging in the forward path are recovered.

[0028] In the return path (I-B), the first solenoid valve 43 is closed while the second solenoid valve 45 is open. The compressed air from the compressor 41 is discharged from the air supply port 36A through the second air supply pipe 47A and the second air supply nozzle 36. Also, the compressed air from the compressor 41 passes through the second compressed air supply pipe 47B and the second ejector 49 to make the inside of the second suction pipe 47C and the second suction duct 37 a decompressed atmosphere, and suck the air containing ambient products from the suction port 37A. In this way, products such as fumes by scavenging in the forward path are recovered.

[0029] [Effect] According to the recovery mechanism 30, it includes a first recovery section 31 and a second recovery section 35 both capable of recovering products such as fumes by scavenging, and the first recovery section 31 and the second recovery section 35 are arranged facing each other. Therefore, when processing the workpiece W while reciprocating the laser head 10, products such as fumes can be recovered without changing the arrangement of the first recovery section 31 and the second recovery section 35.

[0030] The scavenging section 40 connects the first air supply pipe 46A to the first air supply nozzle 32, interposes the first ejector 48 in the middle of the first compressed air supply pipe 46B, and connects the first ejector 48 and the first suction duct 33 with the first suction pipe 46C. Further, the scavenging section 40 connects the second air supply pipe 47A to the second air supply nozzle 36, interposes the second ejector 49 in the middle of the second compressed air supply pipe 47B, and connects the second ejector 49 and the second suction duct 37 with the second suction pipe 47C. Therefore, according to the scavenging section 40, by providing only one compressor 41, it is possible to selectively recover products such as fumes by the first recovery section 31 and products such as fumes by the second recovery section 35.

[0031] Although the preferred embodiments have been described, in addition to the above, it is possible to select and discard the configurations described in the above embodiments or to appropriately change them to other configurations.

[0032] [First Modification Example: See FIG. 5] For example, as shown in FIG. 5, the first recovery section 31 including the first air supply nozzle 32 and the first suction duct 33 and the second recovery section 35 including the second air supply nozzle 36 and the second suction duct 37 can be arranged with a phase shift. Even with this arrangement of the first recovery section 31 and the second recovery section 35, if they are reciprocally moved along the processing locus MT, products can be recovered. Moreover, the first air supply nozzle 32 and the second suction duct 37 are arranged apart from each other in the radial direction, and the first suction duct 33 and the second air supply nozzle 36 are arranged apart from each other. Therefore, even if the opening dimensions of the suction port 33A of the first suction duct 33 and the suction port 37A of the second suction duct 37 are increased, interference between the first air supply nozzle 32 and the second air supply nozzle 36 can be avoided respectively, so that the efficiency of recovering products such as fumes can be improved. In FIG. 5, the opening diameters of the suction port 33A and the suction port 37A remain the same as before.

[0033] [Second Modification Example: See FIGS. 6 and 7] Also, as shown in FIG. 6, a drive mechanism 50 for the laser head 10 can be provided. The drive mechanism 50 includes, for example, a fluid pressure cylinder 51 that moves the laser head 10 up and down, and an electric motor 53 that rotatably supports the fluid pressure cylinder 51.

[0034] For example, there are undulations on the surface WS of the workpiece W, and information regarding these undulations is acquired. Then, as shown in FIG. 7, based on this undulation information, the fluid pressure cylinder 51 is moved up and down so that the distance L between the laser head 10 and the surface WS of the workpiece W becomes constant. In this way, while preventing interference between the first recovery unit 31 and the second recovery unit 35 and the workpiece W, stable machining of the workpiece W is achieved.

[0035] Although not shown here, the machining locus MT on the surface WS of the workpiece W may vary in the planar direction where there are not only straight portions but also curved portions and bent portions. In this case, not only the fluid pressure cylinder 51 but also by rotationally driving the electric motor 53, the laser head 10 can be moved corresponding to the machining locus MT. Also in this case, if information regarding the machining locus MT that varies in the planar direction is acquired, the laser head 10 can be moved along the machining locus MT. Including the up and down movement of the fluid pressure cylinder 51, it is possible to correspond to a three-dimensional shaped machining locus MT.

[0036] [Third Modification Example: Refer to FIGS. 8 and 9] Next, as shown in FIG. 8, in addition to the first recovery unit 31 including the first air supply nozzle 32 and the first suction duct 33, and the second recovery unit 35 including the second air supply nozzle 36 and the second suction duct 37, a third air supply nozzle 34 can be provided. The third air supply nozzle 34 is provided between the first suction duct 33 and the second suction duct 37. While it is assumed that the first recovery unit 31 and the second recovery unit 35 process the surface WS along the horizontal direction H, a third air supply nozzle 34 with a different discharge angle of compressed air from the first air supply nozzle 32 and the second air supply nozzle 36 is provided for processing in the vertical direction V. This difference in the discharge angle is for delivering the compressed air from the third air supply nozzle 34 to the irradiation position of the laser beam LB. Thereby, the surface WS along the vertical direction V can also be processed smoothly.

[0037] When performing laser processing in the vertical direction V, as shown in STEP1 of FIG. 9, the phase is adjusted by the electric motor 53 so that the third air supply nozzle 34 follows the processing locus MT. At this time, the laser head 10 is inclined by 45° with respect to the horizontal direction H as an example.

[0038] While maintaining the above posture, the laser head 10 and the recovery mechanism 30 are advanced toward the corner portion, which is the intersection of the horizontal direction H and the vertical direction V of the surface WS, and then processed while moving upward in the vertical direction V from the corner portion as shown in STEP2 of FIG. 9. In the process of processing according to this third modification, the supply of compressed air from the first air supply nozzle 32 and the second air supply nozzle 36 is not performed, but the suction of products such as fumes from the first suction duct 33 and the second suction duct 37 is performed. The recovery of fumes and the like can also be performed by an external dust collector in the vicinity of the corner portion. Also, although STEP2 of FIG. 9 shows only upward processing, in the third modification, laser processing can also be performed by repeatedly raising and lowering the laser head 10 and the recovery mechanism 30 so as to move downward in the reverse direction of STEP2 of FIG. 9.

[0039] [Arrangement examples of the first recovery unit and the second recovery unit included in the present disclosure: FIG. 10] For the first air supply nozzle 32, the first suction duct 33 that constitutes the first recovery unit 31, the second air supply nozzle 36 that constitutes the second recovery unit 35, and the first suction duct 33, three arrangement examples were shown in the embodiment and the modification example. The three arrangement examples are shown in FIG. 10. In FIG. 10, the upper row corresponds to the arrangement example of the embodiment, the middle row corresponds to the arrangement example of the first modification example, and the lower row corresponds to the arrangement example of the third modification example.

[0040] In the arrangement example of the embodiment, the first line segment L1 connecting the first air supply nozzle 32 and the first suction duct 33 and the second line segment L2 connecting the second air supply nozzle 36 and the second suction duct 37 overlap. That is, the first air supply nozzle 32, the first suction duct 33, the second air supply nozzle 36, and the second suction duct 37 are arranged in a straight line. In the arrangement example of the first modification example, the first line segment L1 connecting the first air supply nozzle 32 and the first suction duct 33 and the second line segment L2 connecting the second air supply nozzle 36 and the second suction duct 37 intersect. In the arrangement example of the embodiment, if the first line segment L1 and the second line segment L2 are reciprocally moved while being aligned each time by the electric motor 53 in the direction along the processing locus MT, the product can be recovered most efficiently. On the other hand, in the arrangement example of the third modification example, since the suction duct corresponding to the third air supply nozzle 34 is not provided, although the efficiency of recovering the product may be inferior to that of the arrangement example of the embodiment, by combining with an external dust collector installed around the surface WS in the vertical direction V of the workpiece W to suck fumes and the like, the product can be sufficiently recovered.

[0041] As described above, not only when the first line segment L1 and the second line segment L2 overlap, but also when the first line segment L1 and the second line segment L2 intersect, they are included in the arrangement examples of the first recovery unit 31 and the second recovery unit 35 of the present disclosure. [Appendix] [Appendix 1] The laser processing apparatus (1) includes a laser head (10) that irradiates a workpiece (W) with a laser beam (LB) and a recovery mechanism (30) that recovers a product generated by the irradiation of the laser beam (LB). The recovery mechanism (30) includes a first recovery unit (31) having a first air supply nozzle (32) for supplying scavenging gas, and a first suction duct (33) provided opposite to the first air supply nozzle (32), and a second recovery unit (35) having a second air supply nozzle (36) for supplying scavenging gas, and a second suction duct (37) provided opposite to the second air supply nozzle (36).

[0042] <Appendix 2> In Appendix 1, preferably, the first air supply nozzle (32) and the second suction duct (37) are arranged side by side in the radial direction of a circle centered on the axis (C) of the laser head (10), and the second air supply nozzle (36) and the first suction duct (33) are arranged side by side in the radial direction. According to this arrangement, the first air supply nozzle (32), the second suction duct (37), the second air supply nozzle (36), and the first suction duct (33) are arranged in a straight line. By reciprocating along this straight line, the product can be efficiently recovered.

[0043] <Appendix 3> In Appendix 1 or Appendix 2, preferably, the first air supply nozzle (32) is provided inside the second suction duct (37) in the radial direction, and the second air supply nozzle (36) is provided inside the first suction duct (33) in the radial direction. According to this arrangement, the scavenging gas discharged from the first air supply nozzle (32) is supplied toward the processing site without being blocked by the second suction duct (37). Also, the scavenging gas discharged from the second air supply nozzle (36) is supplied toward the processing site without being blocked by the first suction duct (33).

[0044] <Appendix 4> In Appendices 1 to 3, preferably, a first line segment (L1) connecting the first air supply nozzle (32) and the first suction duct (33) and a second line segment (L2) connecting the second air supply nozzle (36) and the second suction duct (37) intersect. In this way, even in an arrangement where the first line segment (L1) and the second line segment (L2) intersect, by selecting the processing locus (MT), the product can be sufficiently recovered.

[0045] <Appendix 5> In Appendices 1 to 4, preferably, the recovery mechanism (30) includes a third air supply nozzle (34) for supplying scavenging gas. By providing the third air supply nozzle (34), machining can be performed not only in the planar direction but also in the vertical direction.

[0046] <Appendix 6> In Appendices 1 to 5, preferably, the laser head (10) machines the workpiece (W) while reciprocating between the forward path and the return path, and in the forward path, the first recovery unit (31) recovers the product, and in the return path, the second recovery unit (35) recovers the product. By providing the first recovery unit (31) and the second recovery unit (35), even in machining involving reciprocating movement, the product can be recovered without rotating the equipment including the laser head (10).

[0047] <Appendix 7> In Appendices 1 to 6, preferably, the recovery mechanism (30) selectively supplies scavenging gas to the first recovery unit (31) and the second recovery unit (35), and includes a scavenging unit (40) for sucking the scavenging gas containing the product. The scavenging unit (40) includes a compressor (41) for generating compressed air as scavenging gas, air supply pipes (46A, 47A) for supplying the compressed air to the first air supply nozzle (32) or the second air supply nozzle (36), ejectors (48, 49) for generating a decompressed atmosphere when the compressed air is supplied, and suction pipes (46C, 47C) connecting to the first suction duct (33) or the second suction duct (37). According to this scavenging unit (40), by providing only one compressor (41), selective recovery of the product by the first recovery unit (31) and recovery of the product by the second recovery unit (35) can be performed.

[0048] <Appendix 8> In Supplementary Note 7, preferably, compressed air is supplied from a compressor (41), and it includes a first solenoid valve (43) and a second solenoid valve (45) that are each independently opened and closed. When the first solenoid valve (43) is open and the second solenoid valve (45) is closed, compressed air is supplied to the first air supply nozzle (32) through the air supply pipe (46A), and a reduced-pressure atmosphere acts on the first suction duct (33) through the suction pipe (46C). When the first solenoid valve (43) is closed and the second solenoid valve (45) is open, compressed air is supplied to the second air supply nozzle (36) through the air supply pipe (47A), and a reduced-pressure atmosphere acts on the second suction duct (37) through the suction pipe (47C). By controlling the opening and closing of the first solenoid valve (43) and the second solenoid valve (45), the recovery of the product by the first recovery unit (31) and the recovery of the product by the second recovery unit (35) can be selectively performed.

[0049] <Supplementary Note 9> In Supplementary Notes 1 to 8, preferably, there is provided a drive mechanism (50) for raising and lowering the laser head (10), the first recovery unit (31), and the second recovery unit (35), and rotating them around the axis (C) of the laser head (10). By providing this drive mechanism (50), it is possible to cope with the processing of a workpiece (W) whose surface (WS) changes three-dimensionally.

[0050] <Supplementary Note 10> A laser processing method for irradiating a workpiece (W) with laser light (LB) from a laser head (10), which includes a first recovery step (31) of supplying scavenging gas from the first air supply nozzle (32) and sucking the scavenging gas containing the product generated by the irradiation of the laser light (LB) with the first suction duct (33), and a second recovery step (35) of supplying scavenging gas from the second air supply nozzle (36) and sucking the scavenging gas containing the product with the second suction duct (37), are selectively performed.

Explanation of Reference Numerals

[0051] 1 Laser processing apparatus 10 Laser head 30 Recovery mechanism 31st Recovery Section 32nd Air Supply Nozzle Air Supply Port Bending Section 33rd Suction Duct Suction Port Bending Section 34th Air Supply Nozzle 35th Recovery Section 36th Air Supply Nozzle Air Supply Port Bending Section 37th Suction Duct Suction Port Bending Section Support Cylinder Laser Passage Scavenging Section Compressor Basic Pipe Branch Pipe Branch Pipe 43rd First Electromagnetic Valve 45th Second Electromagnetic Valve 46th First Scavenging Pipe 46A First Air Supply Pipe 46B First Compressed Air Supply Pipe 46C First Suction Pipe 47th Second Scavenging Pipe 47A Second Air Supply Pipe 47B Second Compressed Air Supply Pipe 47C Second Suction Pipe 48th First Ejector 49th Second Ejector 50th Driving Mechanism 51st Fluid Pressure Cylinder 53rd Electric Motor LB Laser Light MT Machining Locus SP Starting Point EP End Point C Axis H Horizontal Direction V Vertical Direction W Workpiece WS Surface

Claims

1. A laser processing method for irradiating a workpiece with a laser beam from a laser head, comprising: a first recovery step of supplying scavenging gas from a first air supply nozzle and sucking the scavenging gas containing the product formed by the irradiation of the laser beam with a first suction duct; a second recovery step of supplying the scavenging gas from a second air supply nozzle and sucking the scavenging gas containing the product with a second suction duct; a third recovery step of supplying the scavenging gas from a third air supply nozzle and sucking the scavenging gas containing the product with the first suction duct and the second suction duct, wherein the first, second, and third recovery steps are selectively performed.

2. The discharge angle of the scavenging gas from the third air supply nozzle is different from the discharge angles of the scavenging gas from the first air supply nozzle and the second air supply nozzle, and is an angle that allows the scavenging gas to reach the irradiation position of the laser beam. In the first and second recovery steps, horizontal processing of the surface of the workpiece is performed. The laser processing method according to claim 1, wherein in the third recovery step, vertical processing is performed following the horizontal processing.

3. The laser processing method according to claim 2, wherein when performing the vertical processing, the supply of the scavenging gas from the first air supply nozzle and the second air supply nozzle is not performed.

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