Liquid Coating Method and Liquid Coating Apparatus

Abstract

[Problem] To solve the problem of degradation of coating quality that occurs when the width of a concave coating region changes between a start point and an end point of a coating path. [Solution] Provided is a liquid coating method for filling a liquid material into a coating region comprising a gap between an inner wall surface of a concave section (201) of a workpiece (111) and outer peripheries of components (202, 203) disposed in the concave section (201). The liquid coating method comprises: a position acquisition step in which positional coordinates of the components (202, 203) are acquired on the basis of a captured image that includes characteristic portions of the components (202, 203); a coating path setting step in which the coating region and a coating path for coating by a discharge device (102) are set on the basis of the positional coordinates; a coating parameter setting step in which the coating path of the discharge device (102) is divided on the basis of the positional coordinates and a coating quantity is set for each section of the divided coating path; and a coating step in which the discharge device (102) is moved along the coating path to coat the coating region with the liquid material. Also provided is a liquid coating method device for executing the liquid coating method.

Description

Technical Field

[0001] The present invention relates to a liquid coating method and a liquid coating apparatus. In particular, the present invention relates to a liquid coating method and a liquid coating apparatus for filling a liquid material into a coating region formed by a gap between an inner wall surface of a recess and an outer periphery of a component.

Background Art

[0002] There is a step of filling a liquid material around a plurality of electronic components (for example, semiconductor elements) installed in a recess provided in a substrate and curing the liquid material to fix the components (see, for example, FIG. 17). In such a step, there is a problem that the liquid material cannot be appropriately filled due to variations in the installation positions of the electronic components.

[0003] As an apparatus for performing coating corresponding to variations in the installation positions of electronic components, for example, Patent Document 1 discloses a paste coating apparatus that recognizes the positional relationship between a substrate and an electronic component and controls a nozzle to apply paste to a paste pattern having a desired shape based on the positional relationship.

[0004] As an apparatus for performing filling according to the shape of a filling portion, for example, Patent Document 2 discloses a filling apparatus that includes means for measuring a joint width by a CCD camera and means for changing the discharge amount of a caulking agent according to the change amount of the joint width, and fills the caulking agent while moving along the joint of a wall material.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0006] When the width of the concave coating region changes between the starting point and the ending point of the coating path, if the liquid material is discharged under the same conditions, there is a problem that an excessive or insufficient amount of coating occurs, leading to a deterioration in quality. Neither Patent Document 1 nor Patent Document 2 discloses a coating method when the width of the coating region changes between the starting point and the ending point of the coating path.

[0007] An object of the present invention is to provide a liquid coating method and a liquid coating apparatus that can fill an appropriate amount of liquid material even when the width of the concave coating region changes between the starting point and the ending point of the coating path. [Means for Solving the Problems]

[0008] [1] The coating method of the present invention is a coating method for filling a liquid material into a coating region formed by a gap between the inner wall surface of a recess of a workpiece and the outer periphery of a component disposed in the recess, including a position acquisition step of acquiring the position coordinates of the component based on an imaging image including a characteristic portion of the component, a coating path setting step of setting a coating path for coating by the coating region and a discharge device based on the position coordinates, a coating parameter setting step of dividing the coating path of the discharge device based on the position coordinates and setting a coating amount for each divided coating path, and a coating step of moving the discharge device along the coating path to apply a liquid material to the coating region. [2] In the coating method of [1] above, in the coating path setting step, it may be characterized in that the coating region is divided into divided coating regions, and the divided coating paths are set for each divided coating region. [3] In the coating method of [2] above, the component may be composed of a plurality of components arranged with a space provided in the same recess, and the coating region may include a portion between the plurality of components. [4] In the coating method of [2] or [3] above, the recess may be polygonal in a top view, the component may be polygonal in a top view, and in the position acquisition step, it may be characterized in that the position coordinates of all the corner portions of the component and the position coordinates of the corner portions of the recess adjacent to each corner portion of the component are acquired. [5] In the coating method of [4] above, in the coating path setting step, it may be characterized in that the coating area is divided into divided coating areas including the corners of the component as vertices. [6] In the coating method of [4] or [5] above, in the coating path setting step, it may be characterized in that the coating area is divided into divided coating areas composed of a plurality of quadrilaterals. [7] In any of the coating methods of [4] to [6] above, in the coating path setting step, it may be characterized in that the coating path is set by a linear path passing through the midpoint of the width in the direction orthogonal to the advancing direction of the coating path of the divided coating area. [8] In any of the coating methods of [2] to [7] above, including an initial setting step of setting an initial coating area, an initial coating path, an initial coating amount, and a reference correction amount, which is executed before the position acquisition step, the coating parameter setting step may be characterized in that the coating amount is set for each divided coating area based on the shape of the divided coating area and the coating amount calculated based on the reference correction amount. [9] In any of the coating methods of [2] to [8] above, when the width of the divided coating area in the direction orthogonal to the advancing direction of the coating path is different between the starting point and the ending point in the coating parameter setting step, the divided coating area is divided into secondary divided coating areas, and the coating amount is set for each secondary divided coating area, which may be characterized.

[10] In any of the coating methods of [2] to [9] above, in the coating parameter setting step, the coating amount may be set by keeping the discharge amount per unit time of the discharge device constant and setting the relative movement speed between the discharge device and the workpiece for each divided coating area.

[11] In any of the coating methods of [2] to

[10] above, the coating parameter setting step may be characterized in that the coating amount is set by setting any one or more of the following [A] to [D]. [A] When the discharge device is a jet discharge device, the number of discharges per unit time [B] When the discharge device is a screw discharge device, the rotation speed of the screw [C] When the discharge device is a plunger type discharge device, the moving speed of the plunger [D] When the discharge device is an air type discharge device, the pressure application time

[12] In any of the coating methods of the above [2] to

[11] , the component may be a semiconductor element.

[13] In any of the coating methods of the above [2] to

[12] , in the coating path setting step, it may be characterized in that a coating height that does not reach any upper end of the concave portion and the component is set.

[14] In any of the coating methods of the above [1] to

[13] , in the position acquisition step, further, based on the captured image including the characteristic portion of the concave portion, the position coordinates of the concave portion are acquired, and in the coating parameter setting step, based on the position coordinates of the concave portion and the component, the coating path of the discharge device is divided, and the coating amount is set for each divided coating path.

[0009]

[15] The coating apparatus of the present invention includes a discharge device that discharges a liquid material, a work table on which a work having a concave portion is placed, a relative drive device that relatively moves the discharge device and the work table, an imaging device that captures an imaging image including a characteristic portion of a component disposed with a gap in the concave portion of the work, and a control device that controls the operations of the discharge device, the relative drive device, and the imaging device. The control device includes a position acquisition means for acquiring the position coordinates of the component based on the captured image, a coating path setting means for setting the coating path of the discharge device based on the position coordinates, a coating parameter setting means for dividing the coating path of the discharge device based on the position coordinates and setting the coating amount for each divided coating path, and a coating means for moving the discharge device along the coating path and applying the liquid material to the gap.

[16] In the coating apparatus of the above

[15] , the coating path setting means may be characterized in that the coating area set based on the position coordinates is divided into divided coating areas, and the divided coating paths are set for each divided coating area.

[17] In the coating apparatus of

[16] above, when the width in the direction orthogonal to the traveling direction of the coating path of the divided coating area is different between the starting point and the ending point, the divided coating area may be further divided into secondary divided coating areas, and the coating amount may be set for each secondary divided coating area.

[18] The coating apparatus according to any one of

[15] to

[17] above may further include a length measuring device that measures the distance to the workpiece or the component.

[19] The coating apparatus according to any one of

[15] to

[18] above may further include a calibration device that includes a trial coating area and a measuring instrument.

Advantages of the Invention

[0010] According to the present invention, even when the width of the concave coating area changes between the starting point and the ending point of the coating path, it is possible to fill an appropriate amount of liquid material.

Brief Description of the Drawings

[0011]

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Figure 17

Embodiments for Carrying Out the Invention

[0012] The embodiments of the present invention will be described below. The liquid coating method of the present invention is performed on a workpiece including a member having a recess and one or more components disposed in the recess. The member having a recess is, for example, a substrate or a block-shaped member, and the recess has a shape such as a triangle, a polygon with four or more sides, a circle, or an ellipse in a top view. The components disposed in the recess are, for example, electronic components having a shape such as a triangle, a polygon with four or more sides, a circle, or an ellipse in a top view.

[0013] An embodiment of the present invention will be described by taking as an example a case where two rectangular components (202, 203) (for example, semiconductor elements) are installed in a rectangular recess 201 provided in a substrate 111 as shown in FIG. 10.

[0014] <Coating Method> The coating method according to the present embodiment first performs an initial setting step and then executes a coating step. Details will be described below. (1) Initial Setting Step Prior to the execution of coating, perform the initial settings required for coating. As shown in FIG. 1, the initial setting process mainly consists of setting the reference image and imaging position coordinates (S101), setting the initial coating path (S102), setting the initial coating parameters (S103), and setting the reference correction amount (S104). The details of each process will be described below.

[0015] (1-1) Setting the reference image and imaging position coordinates (S101) The coating area Q in this embodiment is an area surrounding the entire outer circumference of the components 202 and 203 when viewed from above. As shown in FIG. 10, it is an area with hatching between the recess 201 of the substrate 111 and the components 202 and 203. To define this coating area Q, the characteristic portions of the outer shapes of the recess 201 of the substrate 111 and the components 202 and 203 are extracted by image processing. Specifically, an image including the four corner portions A1 to A4 of the recess 201 of the substrate 111, the four corner portions B1 to B4 of the first component 202, and the four corner portions C1 to C4 of the second component 203, which are the characteristic portions of the outer shape, is captured, and their coordinate values are specified by image processing.

[0016] With reference to FIG. 2, the procedure for setting the reference image and imaging position coordinates (S101) will be described. (S201) Place the uncoated substrate 111 on which the components 202 and 203 are properly installed in the recess 201 on the worktable. (S202) Move the imaging device (camera) 122 to the initial imaging position so that the selected corner of the recess 201 or the components 202 and 203 is located at the center of the screen. Note that the imaging of the corner of the recess 201 or the components 202 and 203 may be performed in any order. (S203) Acquire an image of the substrate 111 by the imaging device 122, and store the coordinate values (X, Y) at which the target corner is at the center of the screen in the storage device of the control device 113. (S204) Repeat the above S202 to S203 until the acquisition of images and coordinates for all the corner portions of the recess 201 and the components 202 and 203 is completed. The image with the corner portion obtained in S202 to 204 located at the center and the coordinate values of the imaging device serve as the reference image used in the subsequent image recognition and the imaging position coordinates when imaging the substrate 111 to be the object of the coating operation by the imaging device 122.

[0017] Note that the substrate 111 used in S101 may be the substrate actually used in production or a dedicated dummy substrate. Also, the coordinate values of the corners of the concave portion 201 or the components 202, 203 may be calculated and set using the dimensional data at the time of design.

[0018] (1-2) Setting of the initial coating path (S102) As shown in FIG. 10, taking the corners of the concave portion 201 of the substrate 111 initially set in S101 as A1 to A4, the corners of the left component 202 as B1 to B4, and the corners of the right component 203 as C1 to C4, among the portion surrounded by A1 - A2 - A3 - A4, the portion excluding the portions surrounded by B1 - B2 - B3 - B4 and C1 - C2 - C3 - C4 (the hatched portion) becomes the coating region Q. The coating path of the discharge device 102 is set for this coating region.

[0019] The procedure for setting the initial coating path will be described with reference to FIG. 3. (S301) Straight lines are drawn respectively between the corners on the non-facing sides of each component, that is, the outer corners (B1, B4, C2, C3), and the corners of the concave portion 201 closest to those corners (A1, A2, A3, A4). In the example of FIG. 11, four straight lines shown by dotted lines are drawn between A1 - B1, A2 - C2, A3 - C3, and A4 - B4 to divide the coating region Q into a plurality of divided coating regions. (S302) Straight lines are drawn respectively between the two closest adjacent corners among the adjacent corners of each component, that is, the inner corners (B2, B3, C1, C4). In the example of FIG. 11, two straight lines shown by dotted lines are drawn between B2 - C1 and B3 - C4 to divide the coating region Q into a plurality of divided coating regions.

[0020] (S303) From the four inner corner portions (B2, B3, C1, C4) where the straight line was drawn in the above S302, draw perpendicular lines respectively toward the two sides (A1 - A2, A3 - A4) of the recess 201 that are the closest. In the example of FIG. 11, four straight lines shown by dotted lines are drawn between B2 - A5, C1 - A6, C4 - A7, and B3 - A8 to divide the coating region Q into a plurality of divided coating regions. In FIG. 11, the intersection points of each perpendicular line and the sides of the recess 201 are set as A5, A6, A7, and A8.

[0021] (S304) Calculate the points at the intermediate positions of each straight line (A1 - B1, A2 - C2, A3 - C3, A4 - B4, B2 - C1, B3 - C4, B2 - A5, C1 - A6, C4 - A7, B3 - A8) drawn in the above S301 to S303 (hereinafter referred to as "midpoints"). In the example of FIG. 11, ten midpoints D1 to D10 are set. (S305) Draw straight lines between the midpoints calculated in the above S304 to set unit coating paths. In the present embodiment, nine unit coating paths shown by dashed - dotted lines in FIG. 11 are set. Also, a plurality of unit coating paths on the same straight line are grouped together, and the following five divided coating paths are set.

[0022] · The first divided coating path consisting of straight lines E1, E2, E3 connecting midpoints D1, D2, D3, D4 · The second divided coating path consisting of straight line E4 connecting midpoints D4, D5 · The third divided coating path consisting of straight lines E5, E6, E7 connecting midpoints D5, D6, D7, D8 · The fourth divided coating path consisting of straight line E8 connecting midpoints D8, D1 · The fifth divided coating path consisting of straight line E9 connecting midpoints D9 and D10

[0023] In the present embodiment, for each divided coating path, the starting point and the ending point are set as follows. · The first divided coating path (E1 - E2 - E3) has D1 as the starting point and D4 as the ending point. · The second divided coating path (E4) has D4 as the starting point and D5 as the ending point. · The third divided coating path (E5 - E6 - E7) starts from D8 and ends at D5. · The fourth divided coating path (E8) starts from D1 and ends at D8. · The fifth divided coating path (E9) starts from D9 and ends at D10. The above-described setting procedure of the coating path can be explained as dividing a large coating area into divided coating areas composed of a plurality of rectangles and setting the coating path for each divided coating area.

[0024] In this embodiment, the unit coating paths arranged side by side in the same direction (for example, the X direction) are collectively set as divided coating paths, but divided coating paths having arbitrary start points and end points different from this may be set. For example, start points and end points may be set for each of the unit coating paths E1, E2, and E3, or a divided coating path corresponding to a rectangular divided coating area composed of regions Q2, Q9, and Q6 may be set. Also, start points and end points may be set so that all the unit coating paths are connected to form a single stroke.

[0025] The method of dividing the coating area into divided coating areas is not limited to the division rules defined in the above S301 to S303, and divided coating areas of arbitrary shapes can be set. For example, instead of the division rule of S301, perpendicular lines may be drawn from each corner of parts 202 and 203 toward the sides of recess 201, and the divided coating areas may be set so that all the divided coating areas are rectangles.

[0026] (1 - 3) Setting of initial coating parameters (S103) Initial coating parameters for performing coating along the coating path set in the above S102 are set. The setting of the initial coating parameters is preferably performed for each of the divided coating paths set above. The coating areas corresponding to the unit coating paths E1 to E9 are referred to as divided coating areas Q1 to Q9. The procedure for setting the initial coating parameters will be described with reference to FIG. 4. (S401) Set the coating height H. As shown in FIG. 17, the coating height H is set to be equal to or less than the depth of the recess 201 and equal to or less than the heights of the components 202 and 203. Note that the coating height H is the same for the divided coating regions Q1 to Q9. (S402) Set the discharge amount (e.g., volume) per unit time of the discharge device 102. Here, the discharge amount per unit time may be set by measuring the discharge amount when a trial discharge is performed by the discharge device 102. (S403) Calculate the top surface projected area of the target divided coating region from the coordinate values of the recess 201 and the corner portions of the components 202 and 203 that constitute the vertices of the selected one or more divided coating regions. (S404) Calculate the volume (coating amount) of the selected divided coating region from the coating height set in S401 and the area calculated in S403. (S405) Calculate the moving speed of the discharge device 102 in the unit coating path from the discharge amount per unit time set in S402, the volume (coating amount) calculated in S404, and the length of the unit coating path corresponding to the selected divided coating region. Note that the moving speed of the discharge device 102 refers to the relative moving speed between the discharge device 102 and the substrate 111. By adjusting the moving speed of the discharge device 102 with a constant discharge amount per unit time, a desired coating amount is realized. (S406) Execute the above S403 to S405 for all the divided coating regions.

[0027] The setting process of the initial coating parameters in S403 to 405 will be described by taking the examples of the straight lines E1 to E9. · The first divided coating path (E1 - E2 - E3) After calculating the top surface projected area from the coordinate values of the corner portions A1, A2, B1, and C2 of the trapezoidal coating region (Q1 + Q2 + Q3) corresponding to the first divided coating path, calculate the volume of the region obtained by adding the divided coating regions Q1 to Q3 using the coating height H. Calculate the moving speed of the discharge device 102 from the total volume of the divided coating regions Q1 to Q3, the preset discharge amount per unit time, and the length of the first divided coating path (distance between the midpoints D1 - D4), and set the initial coating parameters.

[0028] · Second divided coating path (E4) After calculating the top surface projected area from the coordinate values of the corners A2, A3, C2, and C3 of the trapezoidal coating region Q4 corresponding to the second divided coating path, the volume of the divided coating region Q4 is calculated using the coating height H. The moving speed of the discharge device 102 is calculated from the volume of the divided coating region Q4, the preset discharge amount per unit time, and the length of the second divided coating path (distance between D4 and D5), and the initial coating parameters are set.

[0029] · Third divided coating path (E5 - E6 - E7) After calculating the top surface projected area from the coordinate values of the corners A3, A4, B4, and C3 of the trapezoidal coating region (Q5 + Q6 + Q7) corresponding to the third divided coating path, the volume of the region obtained by adding the divided coating regions Q5 to Q7 is calculated using the coating height H. The moving speed of the discharge device 102 is calculated from the total volume of the divided coating regions Q5 to Q7, the preset discharge amount per unit time, and the length of the third divided coating path (distance between D5 and D8), and the initial coating parameters are set.

[0030] · Fourth divided coating path (E8) After calculating the top surface projected area from the coordinate values of the corners A1, A4, B1, and B4 of the trapezoidal coating region Q8 corresponding to the fourth divided coating path, the volume of the divided coating region Q8 is calculated using the coating height H. The moving speed of the discharge device 102 is calculated from the volume of the divided coating region Q8, the preset discharge amount per unit time, and the length of the fourth divided coating path (distance between D1 and D8), and the initial coating parameters are set.

[0031] · Fifth divided coating path (E9) After calculating the top surface projected area from the coordinate values of the corners B2, B3, C1, and C4 of the rectangular coating region Q9 corresponding to the fifth divided coating path, the volume of the divided coating region Q9 is calculated using the coating height H. The moving speed of the discharge device 102 is calculated from the volume of the divided coating region Q9, the preset discharge amount per unit time, and the length of the fifth divided coating path (distance between D9 and D10), and the initial coating parameters are set.

[0032] The calculation procedure for the moving speed of the ejection device 102 can be described as dividing a large coating area into a plurality of small divided coating areas, calculating the amount of liquid material required for each divided coating area, and setting parameters (the moving speed of the ejection device and the ejection amount per unit time) for applying that amount.

[0033] In this embodiment, the straight lines E1 - E2 - E3 and E5 - E6 - E7 are considered to be one straight line without bends (in other words, with no change in width) at the initial setting, so they are treated as one divided coating path as a whole. However, each of the straight lines connecting the two midpoints may be set as a divided coating path.

[0034] In this embodiment, the volume per unit time of the ejection device 102 is used as the ejection amount per unit time, but mass (or weight) may be used instead of volume. If the density of the liquid material is known, it is also possible to convert volume and mass into each other. Also, instead of the ejection amount per unit time, the ejection amount per unit length of the ejection device 102 may be used. In this embodiment, the coating height H is set in advance as a default value, but the depth of the recess 201 of the substrate 111 and the height of the components may be actually measured and the setting may be performed based on the measured values. The coating height H is set to a height such that the liquid material does not climb onto the upper surfaces of the substrate and the components. In other words, it is set to a height that does not exceed either the depth of the recess 201 or the heights of the components 202, 203 (see FIG. 17). Preferably, the coating height H is set to a height obtained by subtracting a buffer height (for example, 10% or 20% of the lower value of either the depth of the recess 201 or the heights of the components 202, 203) from the lower of the depth of the recess 201 and the heights of the components 202, 203.

[0035] In this embodiment, the moving speed of the ejection device 102 for each divided coating path is calculated. However, the moving speed may be set as a default value (a constant value), and the ejection amount per unit time of the ejection device 102 for realizing a desired coating may be calculated for each divided coating path.

[0036] (1 - 4) Setting of reference correction amount (S104) The setting of the initial coating parameters is valid when the components 202 and 203 are arranged without displacement. However, in reality, there may be a displacement in the installation positions of the components 202 and 203. Therefore, in this embodiment, a reference correction amount for performing correction corresponding to the variation in the installation positions of the components 202 and 203 is set in advance. In this embodiment, a reference correction amount of the coating amount with respect to the increase or decrease in the width of the coating area is set. The reference correction amount of the coating amount is set such that, for example, when the width of the coating area increases or decreases by 0.5 mm, the coating amount increases or decreases by 0.1 mg. When set in this way, for example, when the width of the coating area becomes 2 mm larger than the initial set value, the coating amount is increased by 0.4 mg, and when the width becomes 1 mm smaller than the initial set value, the coating amount is decreased by 0.2 mg.

[0037] (2) Execution of coating process After finishing the initial settings (S101 - S104) in (1) above, the coating process is started. As shown in FIG. 5, the execution of the coating process mainly consists of detection of component displacement (S501), determination of component displacement (S502), correction of coating path (S503), correction of coating parameters (S504), and execution of coating operation (S505). Each procedure described below is a procedure executed by the control device 113 by executing a coating program.

[0038] (2 - 1) Detection of component displacement (S501) Before starting the coating on the substrate 111, it is detected by image - processing the image acquired by the imaging device 122 whether there is a displacement in the installation positions of the components 202 and 203. For example, as shown in FIG. 12, assume that the left - hand component 202 is installed displaced, with the corners B1 - B4 at the positions B5 - B8, and the right - hand component 203 is installed displaced, with the corners C1 - C4 at the positions C5 - C8. Thus, when there is a displacement in the installation positions of the components 202 and 203, since the width of the coating area becomes non - constant, it is necessary to correct the coating path.

[0039] With reference to FIGS. 6 and 12, the detection processing procedure (S501) for component misalignment will be described. It is assumed that the substrate 111 to be coated is in a state of being carried into the coating apparatus 101. (S601) Move the imaging device 122 to one of the imaging position coordinates set in S101 and image one of the corners (e.g., B5) of the recess 201 or components 202, 203. (S602) Compare the image of the corner imaged in S601 with the reference image (e.g., B1) set in S101 to identify the corresponding corner (e.g., B5). (S603) When the corresponding corner (e.g., B5) is identified in S602, obtain its coordinate values (X, Y) and store them in the storage device of the control device 113. (S604) Repeat S601 to S603 for all the remaining corners of the recess 201 and components 202, 203. (S605) From the obtained coordinate values of the corners of the recess 201 and components 202, 203, specify the relative positional relationship between the recess 201 and components 202, 203 and store it in the storage device. Here, since there may be a deviation in the installation position not only for components 202, 203 but also for the recess 201, the relative positional relationship between the recess 201 and components 202, 203 is specified.

[0040] (2 - 2) Determination of misalignment (S502) Based on the detection result of S501, determine whether the deviation in the relative positional relationship between the recess 201 and components 202, 203 is a misalignment that exceeds the preset allowable range. If the misalignment exceeds the allowable range, proceed to S503. If the misalignment does not exceed the allowable range, proceed to S505. Note that if the misalignment is so large that correction is impossible, the process may be stopped and an alarm may be issued.

[0041] (2 - 3) Correction of coating path (S503) When there is a displacement of the components 202 and 203 beyond the allowable range as shown in FIG. 12, it is necessary to correct the coating path. This is because, as shown in FIG. 13, the width of the coating area formed by the corner parts B5 to B8 of the component 202, the corner parts C5 to C8 of the component 203, and the corner parts A1 to A4 of the recess 201 of the substrate 111 is not constant with respect to each side of the recess 201. That is, it is necessary to correct the initial set coating path (E1 to E8) in FIG. 11 to the coating path (E10 to E17) shown in FIG. 13 according to the displacement of the components 202 and 203.

[0042] With reference to FIG. 7, the correction procedure (S503) of the coating path will be described. Note that the setting procedure of the corrected unit coating path (hereinafter referred to as "corrected unit coating path") is the same as the setting procedure of the initial coating path shown in FIG. 3. (S701) Draw straight lines respectively between the corner parts on the non-facing sides of the components 202 and 203, that is, the outer corner parts (B5, B8, C6, C7), and the corner parts of the recess 201 closest to those corner parts (A1, A2, A3, A4). In the example of FIG. 13, four straight lines shown by dotted lines are drawn between A1 - B5, A2 - C6, A3 - C7, and A4 - B8 to divide the coating area Q into a plurality of divided coating areas. (S702) Draw straight lines respectively between the closest ones among the adjacent corner parts (B6, B7, C5, C8) of each component. In the example of FIG. 13, two straight lines shown by dotted lines are drawn between B6 - C5 and B7 - C8 to divide the coating area Q into a plurality of divided coating areas.

[0043] (S703) Draw perpendicular lines respectively from the four inner corner parts (B6, B7, C5, C8) where the straight lines were drawn in S702 to the two sides (A1 - A2, A3 - A4) of the recess closest to them. In the example of FIG. 13, four straight lines shown by dotted lines are drawn between B6 - A9, C5 - A10, C8 - A11, and B7 - A12 to divide the coating area Q into a plurality of divided coating areas. In FIG. 13, the intersection points of each perpendicular line and the sides of the recess 201 are set as A9, A10, A11, and A12.

[0044] (S704) Calculate the points (midpoints) that are at the intermediate positions of each of the straight lines (A1 - B5, A2 - C6, A3 - C7, A4 - B8, B6 - C5, B7 - C8, B6 - A9, C5 - A10, C8 - A11, B7 - A12) drawn in S701 to S703 above. In the example of FIG. 13, 10 midpoints of D11 to D20 are set. (S705) Draw a straight line between each of the midpoints calculated in S704 to set the correction unit application path. In the present embodiment, 9 correction unit application paths shown by dashed - dotted lines in FIG. 13 are set. Also, the following 5 correction divided application paths are set, where a plurality of correction unit application paths arranged in substantially the same direction are grouped together.

[0045] · The first correction divided application path consisting of straight lines E10, E11, E12 connecting midpoints D11, D12, D13, D14 · The second correction divided application path consisting of straight line E13 connecting midpoints D14, D15 · The third correction divided application path consisting of straight lines E14, E15, E16 connecting midpoints D15, D16, D17, D18 · The fourth correction divided application path consisting of straight line E17 connecting midpoints D18, D11 · The fifth correction divided application path consisting of straight line E18 connecting midpoints D19 and D20

[0046] Also, in the present embodiment, for each correction divided application path, the start point and the end point are set as follows. · The first correction divided application path (E10 - E11 - E12) has D11 as the start point and D14 as the end point. · The second correction divided application path (E13) has D14 as the start point and D15 as the end point. · The third correction divided application path (E14 - E15 - E16) has D18 as the start point and D15 as the end point. · The fourth correction divided application path (E17) has D11 as the start point and D18 as the end point. · The fifth correction divided application path (E18) has D19 as the start point and D20 as the end point. The correction procedure for the above coating path can be described as dividing a large coating area into a plurality of small divided coating areas and correcting the coating path for each divided coating area unit.

[0047] According to the above procedure, even if there are bends or width variations in the coating area due to misalignment of the installation positions or outer shape tolerances of parts 202 and 203, by setting a coating path that conforms to the shape of the coating area, the liquid material can be filled without excess or deficiency. Also, by connecting the midpoints between the lines dividing the coating area to form the coating path, the coating path will pass through approximately the center of the coating area, so the liquid material can be filled into the coating area formed by the gap between the recess 201 and parts 202 and 203 without bias.

[0048] In this embodiment, the coating path is set as shown in FIG. 13, but similar to the initial setting (refer to the above S102), it is not limited to this and other arbitrary coating paths may be set. Also, the start point and end point may be set arbitrarily in the same way. Also, the straight lines connecting the sides or corners of the recess 201 and the corners of parts 202 and 203 (in other words, the straight lines dividing the coating area) can adopt any drawing method, not limited to the above S701 to S703, similar to the initial setting (refer to the above S102).

[0049] (2-4) Correction of Coating Parameters (S504) The procedure for correcting the coating parameters initially set with reference to FIG. 8 will be described. (S801) Calculate the width in the direction orthogonal to the correction unit coating path of the corresponding divided coating area from the coordinate values of the corners of the divided coating area included in the selected one correction unit coating path. Here, the selection of the correction unit coating path may be any arbitrary correction unit coating path. (S802) If the width at the start point and the width at the end point of the selected one correction unit coating path are the same, proceed to S803; if they are different, proceed to the process A shown in FIG. 9. (S803) Calculate the difference value between the width of the divided coating area calculated in S801 and the width of the corresponding divided coating area at the initial setting. (S804) Based on the difference value of the width of the divided coating area calculated in S803 and the reference correction amount set in S104 above, correct the coating amount initially set for the divided coating area. (S805) Calculate the moving speed of the ejection device 102 from the coating amount corrected in S804, the ejection amount per unit time set in S402 above, and the length of the selected correction unit coating path, and correct the coating parameters. The coating parameters to be corrected may be only the parameters related to the moving speed of the ejection device 102, or may include the correction of the ejection adjustment parameters according to the type of the ejection device described later. (S806) Repeat S801 to S805 for all correction unit coating paths.

[0050] The correction process of the coating parameters in S801 to 805 will be described by taking the examples of the paths E10, 12 to 14, 16 to 18 shown in FIG. 13. In the following, the notation X( ) represents the X coordinate, and Y( ) represents the Y coordinate.

[0051] · Correction unit coating path E10 Calculate the width Y(A9) - Y(B6) in the direction perpendicular to the correction unit coating path E10 of the divided coating area Q10 including the correction unit coating path E10, and calculate the difference value from the width Y(A5) - Y(B2) (see FIG. 11) of the divided coating area Q1 at the corresponding initial setting. Based on this difference value and the reference correction amount set in S104 above, correct the coating amount initially set in S103. Calculate the moving speed of the ejection device 102 from the corrected coating amount, the ejection amount per unit time set in S103 above, and the length X(D12) - X(D11) of the correction unit coating path E10, and reset the coating parameters for the correction unit coating path E10.

[0052] · Correction unit coating path E12 Calculate the width Y(A10) - Y(C5) in the direction perpendicular to the correction unit application path E12 of the divided application area Q12 including the correction unit application path E12, and calculate the difference value from the width Y(A6) - Y(C1) of the divided application area Q3 at the corresponding initial setting (see FIG. 11). Based on this difference value and the reference correction amount set in S104, correct the application amount initially set in S103. Calculate the moving speed of the discharge device 102 from the corrected application amount, the discharge amount per unit time set in S103, and the length X(D14) - X(D13) of the correction unit application path E12, and reset the application parameters for the correction unit application path E12.

[0053] ·Correction unit application path E13 Calculate the width X(A2) - X(C6) in the direction perpendicular to the correction unit application path E13 of the divided application area Q13 including the correction unit application path E13, and calculate the difference value from the width X(A2) - X(C2) of the divided application area Q4 at the corresponding initial setting (see FIG. 11). Based on this difference value and the reference correction amount set in S104, correct the application amount initially set in S103. Calculate the moving speed of the discharge device 102 from the corrected application amount, the discharge amount per unit time set in S103, and the length Y(D14) - Y(D15) of the correction unit application path E13, and reset the application parameters for the correction unit application path E13.

[0054] ·Correction unit application path E14 Calculate the width Y(C8) - Y(A11) in the direction perpendicular to the correction unit application path E14 of the divided application area Q14 including the correction unit application path E14, and calculate the difference value from the width Y(C4) - Y(A7) of the divided application area Q5 at the corresponding initial setting (see FIG. 11). Based on this difference value and the reference correction amount set in S104, correct the application amount initially set in S103. Calculate the moving speed of the discharge device 102 from the corrected application amount, the discharge amount per unit time set in S103, and the length X(D15) - X(D16) of the correction unit application path E14, and reset the application parameters for the correction unit application path E14.

[0055] ·Correction unit application path E16 Calculate the width Y(B7) - Y(A12) in the direction perpendicular to the correction unit application path E16 of the divided application area Q16 including the correction unit application path E16, and calculate the difference value from the width Y(B3) - Y(A8) (see FIG. 11) of the divided application area Q7 at the corresponding initial setting. Based on this difference value and the reference correction amount set in S104, correct the application amount initially set in S103. Calculate the moving speed of the discharge device 102 from the corrected application amount, the discharge amount per unit time set in S103, and the length X(D17) - X(D18) of the correction unit application path E16, and reset the application parameters for the correction unit application path E16.

[0056] · Correction unit application path E17 Calculate the width X(B8) - X(A4) in the direction perpendicular to the correction unit application path E17 of the divided application area Q17 including the correction unit application path E17, and calculate the difference value from the width X(B4) - X(A4) (see FIG. 11) of the divided application area Q8 at the corresponding initial setting. Based on this difference value and the reference correction amount set in S104, correct the application amount initially set in S103. Calculate the moving speed of the discharge device 102 from the corrected application amount, the discharge amount per unit time set in S103, and the length Y(D11) - Y(D18) of the correction unit application path E17, and reset the application parameters for the correction unit application path E17.

[0057] · Correction unit application path E18 Calculate the width X(C5) - X(B6) in the direction perpendicular to the correction unit application path E18 of the divided application area Q18 including the correction unit application path E18, and calculate the difference value from the width X(C1) - X(B2) (see FIG. 11) of the divided application area Q9 at the corresponding initial setting. Based on this difference value and the reference correction amount set in S104, correct the application amount initially set in S103. Calculate the moving speed of the discharge device 102 from the corrected application amount, the discharge amount per unit time set in S103, and the length Y(D19) - Y(D20) of the correction unit application path E18, and reset the application parameters for the correction unit application path E18.

[0058] Referring to FIG. 9, a correction procedure when the width in the direction orthogonal to the coating path of the divided coating region is not constant will be described. (S901) Further divide the selected one divided coating region into several smaller regions (hereinafter referred to as "secondary divided coating regions"). (S902) Calculate the difference value between the width of the start side and the width of the end side of the selected one secondary divided coating region. (S903) Calculate the correction amount of the coating amount for the selected secondary divided coating region based on the difference value calculated in S902 and the reference correction amount set in S104 above. (S904) From the coating amount obtained by adding the correction amount calculated in S903 to the coating amount of the secondary divided coating region assuming that the width of the start side does not change and is constant, the discharge amount per unit time set in S103 above, and the length of the corrected divided coating path, calculate the moving speed of the discharge device 102 and correct the coating parameters. (S905) Execute the above S902 to 904 for all the secondary divided coating regions. When the correction of the coating parameters is completed for all the secondary divided coating regions, return to S806.

[0059] Referring to FIG. 14, the re - setting process of the coating parameters in S901 to 905 will be described by taking the examples of the correction unit coating paths E11 and 15. · Correction unit coating path E11 FIG. 14 is an enlarged view of the divided coating region Q11 corresponding to the correction unit coating path E11. Divide the divided coating region Q11 in the direction perpendicular to the side A9 - A10 of the concave portion 201 so that the width in the X direction is the same, into four parts. The four divided regions are taken as secondary divided coating regions Q111 to Q114. At this time, the intersection points of the side A9 - A10 of the concave portion 201 and the dividing lines of the secondary divided coating regions Q111 to Q114 are taken as A13, A14, A15, the intersection points of the correction unit coating path E11 and the dividing lines of the secondary divided coating regions Q111 to Q114 are taken as G1, G2, G3, and the intersection points of the straight line B6 - C5 and the dividing lines of the secondary divided coating regions Q111 to Q114 are taken as F1, F2, F3.

[0060] Calculate the difference value between the width Y(A9)-Y(B6) on the start side and the width Y(A13)-Y(F1) on the end side of the first secondary divided coating area Q111 on the start side. Calculate the correction amount from this difference value and the reference correction amount set in S104 above. Then, taking into account the correction amount calculated, calculate the coating amount for the case where the width Y(A9)-Y(B6) on the start side of the secondary divided coating area Q111 remains constant without changing from the start point D12 to the end point G1 ((Y(A9)-Y(B6))*(X(A13)-X(A9))*(coating height H)). Calculate the moving speed of the discharge device 102 in the secondary divided coating area Q111 from this calculated coating amount, the discharge amount per unit time set in S103 above, and the length D12-G1 of the coating path. Similarly, calculate the moving speed of the discharge device 102 for the second secondary divided coating area Q112, the third secondary divided coating area Q113, and the fourth secondary divided coating area Q114, and correct the coating parameters. Adjust the coating parameters so that the moving speed of the discharge device 102 calculated for each of the above secondary divided coating areas Q111 to 114 is realized.

[0061] ·Correction unit coating path E15 FIG. 15 is an enlarged view of the divided coating area Q15 corresponding to the correction unit coating path E15. The divided coating area Q15 is divided into four equal parts in a direction perpendicular to the sides A11 - A12 of the concave portion so that the widths in the X direction are the same. The four divided areas are defined as secondary divided coating areas Q151 to Q154. At this time, the intersections of the sides A11 - A12 of the concave portion 201 and the respective dividing lines are set as A16, A17, and A18, the intersections of the correction unit coating path E15 and the dividing lines of the secondary divided coating areas Q151 to Q154 are set as G4, G5, and G6, and the intersections of the straight line B7 - C8 and the dividing lines of the secondary divided coating areas Q151 to Q154 are set as F4, F5, and F6. Calculate the difference value between the width Y(B7) - Y(A12) on the start side and the width Y(F4) - Y(A16) on the end side of the start side of the first secondary divided coating area Q151. Calculate the correction amount from this difference value and the reference correction amount set in the above 104. Then, when the width Y(B7) - Y(A12) on the start side of the secondary divided coating area Q151 is constant without changing from the start point D17 to the end point G4, calculate the coating amount by adding the calculated correction amount to the coating amount ((Y(B7) - Y(A12)) * (X(A16) - X(A12)) * (coating height H)). Calculate the moving speed of the discharge device 102 in the secondary divided coating area Q151 from the calculated coating amount, the discharge amount per unit time set in the above S103, and the length D17 - G4 of the coating path, and correct the coating parameters. Similarly, calculate the moving speed of the discharge device 102 and correct the coating parameters for the second secondary divided coating area Q152, the third secondary divided coating area Q153, and the fourth secondary divided coating area Q154. Adjust the coating parameters so that the moving speeds of the discharge device 102 calculated for each of the above secondary divided coating areas Q151 to Q154 are realized.

[0062] In this embodiment, the divided coating area is divided into four equal parts to form secondary divided coating areas, but the number of secondary divided coating areas can be arbitrary. Also, instead of equally dividing the width in the X direction, the width in the X direction may be changed in each secondary divided coating area for division.

[0063] The correction procedure for the coating path can be described as dividing one divided coating area into a plurality of secondary divided coating areas, calculating the amount of liquid material required for each secondary divided coating area, and setting coating parameters (such as the moving speed of the ejection device and the ejection amount per unit time) for applying that amount.

[0064] According to the above procedure, even if there is a deviation in the installation positions of parts 202 and 203, or there are variations in the width of the coating area, by setting the coating amount in units of the divided coating area and the secondary divided coating area, it is possible to perform coating that fills the coating area composed of gaps with a complex shape with the liquid material without excess or deficiency.

[0065] (2-5) Execution of the coating operation (S505) While moving the ejection device 102 at the moving speed corrected in S504 along the coating path corrected in S503, the coating operation is executed. As a result, even if there is a deviation in the installation positions of parts 202 and 203 and a change in the width of the divided coating area, the liquid material can be filled without excess or deficiency.

[0066] (2-6) Execution of the coating operation on the uncoated workpiece (S506) Until the coating operation on all substrates (workpieces) 111 to be worked is completed, the procedures from S501 to S505 are executed for each substrate. When the type of substrate or the type of liquid material changes, it is executed again from the initial setting in (1) above.

[0067] According to the present invention described above, even when the coating area has a complex shape such as a bend or a varying width due to the positional deviation of parts 202 and 203 installed in the recess 201 of the substrate 111 or the outer shape tolerance of parts 202 and 203 or the recess 201, the liquid material can be filled without excess or deficiency. From another perspective, even if the parts are installed with a deviation in the recess, the liquid material can be filled accordingly, so a high-precision component mounting device is not required, and the cost of equipment can be suppressed. In addition, since it is possible to reduce the number of products regarded as defective due to the occurrence of a deviation in the installation position of the parts, it is possible to improve the yield.

[0068] In this embodiment, an example in which two components are installed in the recess of the substrate is shown. However, even if there are three or more components to be installed, coating can be similarly performed by setting and correcting.

[0069] In this embodiment, the type of the ejection device is not particularly limited. For example, a jet type that ejects by the action of a rod reciprocating in the liquid chamber, a screw type that ejects by the action of a screw rotating in the liquid chamber, a plunger type that ejects by the action of a plunger sliding in the metering section, an air type that ejects by the action of compressed gas, etc. can be used. In these ejection devices, when setting or adjusting the ejection amount per unit time, for the jet type, the ejection frequency per unit time (or the reciprocation frequency of the rod, which may be referred to as "frequency"), for the screw type, the rotation speed of the screw, for the plunger type, the moving speed of the plunger, and for the air type, the pressure application time may be used as the ejection adjustment parameters, respectively.

[0070] <Coating device> The coating device 101 for implementing the liquid coating method of this embodiment will be described. As shown in FIG. 16, the coating device 101 of this embodiment includes an ejection device 102 that ejects a liquid material, a work table 110 on which a substrate 111 is placed, and a relative drive device 103 that relatively moves the ejection device 102 and the work table 110.

[0071] The relative drive device 103 includes an X drive device 104 that relatively moves the ejection device 102 and the work table 110 in the X direction 107, a Y drive device 105 that relatively moves the ejection device 102 and the work table 110 in the Y direction 108, and a Z drive device 106 that relatively moves the ejection device 102 and the work table 110 in the Z direction 109. In this embodiment, the Y drive device 105 is provided on the upper surface of the housing 112 so as to extend in the Y direction 108, and the X drive device 104 is provided on the Y drive device 105 so as to extend in the X direction 107. The Z drive device 106 is provided on the X drive device 104, and the ejection device 102 is provided on the Z drive device 106. Thus, the ejection device 102 and the substrate 111 on the work table 110 can relatively move in the X direction 107, the Y direction 108, and the Z direction 109. The relative drive device 103 is controlled by the control device 113 to move the nozzle tip of the ejection device 102 to an arbitrary position on the substrate 111 at an arbitrary speed. As the relative drive device 103, for example, a device combining an electric motor such as a servo motor or a stepping motor and a ball screw, a device using a linear motor, a device transmitting power with a belt or a chain, or the like can be used.

[0072] The ejection device 102 includes a nozzle (not shown) having a discharge port for discharging a liquid material at its tip, and its operation is controlled by the control device 113. The control device 113 can control the ejection device 102 in association with the operation of the relative drive device 103. The ejection device 102 is moved by the relative drive device 103 so that the nozzle is positioned above the recess 201 of the work 111, and discharges the liquid material from the discharge port opening downward toward the recess 201. Details of the control device 113 will be described later.

[0073] The coating apparatus 101 of this embodiment includes a conveying device 118. The conveying device 118 is composed of a rail 119, a transmission element (not shown), and a conveying drive device 120. The rail 119 consists of two members extending parallel to the Y direction 108. The rail 119 is installed such that the distance between the two members is the same as the distance of one side of the substrate 111. The rail 119 is provided with a transmission element that functions to convey the substrate 111 along the extending direction of the rail 119. As the transmission element, a belt, a chain, or the like can be used. The transmission element is driven by the conveying drive device 120. As the conveying drive device 120, an electric motor such as a servo motor or a stepping motor can be used. By the action of the transmission element driven by the conveying drive device 120, the substrate 111 is carried in the conveying direction 121 along the rail 119. The conveying device 118 is connected to the control device 113 and is controlled for the conveying speed, the start and stop of conveying, and the like.

[0074] The worktable 110 is composed of a rectangular parallelepiped member and can move up and down by a lifting device (not shown). The worktable 110 is installed so as to be sandwiched between the rails 119 of the conveying device 118. The width of the worktable 110 in the X direction 107 is slightly smaller than the distance between the rails 119 of the conveying device 118 so as not to contact the rails 119 of the conveying device 118. When conveying the substrate 111, the worktable 110 descends to a position where it does not contact the substrate 111. When performing a coating operation on the substrate 111, the worktable 110 ascends to sandwich and fix the substrate 111 between itself and a pressing plate (not shown) provided on the rail 119. To more securely fix the substrate 111, for example, a mechanism that adsorbs the substrate 111 by opening a plurality of holes leading from the inside of the worktable 110 to the upper surface and sucking air through the holes may be used in combination.

[0075] The coating apparatus 101 of this embodiment includes an imaging device 122. The imaging device 122 is provided on the Z drive device 106 together with the ejection device 102 and can move relative to the substrate 111 on the work table 110. The imaging device 122 can image the identification marks on the substrate 111 and the images of the liquid material applied thereto, in addition to the characteristic portions of the substrate 111 (i.e., the concave portions 201 of the substrate 111 and the corners of the components 202 and 203). As the imaging device 122, for example, a CCD camera, a CMOS camera, or the like can be used. The imaging device 122 is connected to the control device 113 and can control its operation, store and process the imaging results.

[0076] In addition to this, a length measuring device (not shown) for distance measurement may be provided. The length measuring device can measure the distance to the surface of the substrate 111, the surface of the components installed on the substrate 111, or the surface of the liquid material applied to the substrate 111. From these measured values, the height of the components and the applied liquid material can be determined. As the length measuring device, for example, a laser displacement meter, an ultrasonic distance meter, or the like can be used. The imaging device 122 and the length measuring device may be integrally provided by a mounting plate and configured to be movable relative to the substrate 111. The length measuring device is connected to the control device 113, and the control device 113 can control its operation, store and perform arithmetic processing on the measurement results.

[0077] The coating apparatus 101 of this embodiment includes a calibration device 114. The calibration device 114 is installed near the work table 110 on the upper surface of the housing 112 within the range where the relative drive device 103 can move. The calibration device 114 is composed of a calibration table 115 and a measuring instrument 116. The calibration table 115 has a trial coating area where a liquid material can be coated. A liquid material is coated on this trial coating area, and the shape and dimensions of the coated liquid material are confirmed by the above-described imaging device and length measuring device. From the results, adjustment can be made so that the liquid material to be coated on the substrate 111 has a desired shape and dimensions. Instead of the calibration table 115, a plate-like body having a trial coating area where a liquid material can be coated may be separately prepared, and the trial coating area may be configured by fixing the plate-like body by the mechanism of sucking and fixing described above. The measuring instrument 116 can measure the mass / weight of the liquid material coated on the measuring dish. As the measuring instrument 116, a weighing scale, an electronic balance, or the like can be used. The measuring instrument 116 is connected to the control device 113 and can have its operation controlled by the control device 113, and can store and perform arithmetic processing on the measurement results. The measuring instrument 116 can measure the discharge amount per unit time of the discharge device 102.

[0078] The control device 113 is an information processing device (computer) including a processing device, a storage device for storing a coating program and the like, and a communication device, and is communicably connected to an input device and an output device. In this embodiment, the input device and the output device are combined using a touch panel (not shown). The control device 113 can use a personal computer (PC), a programmable logic controller (PLC), or the like, and as the input device and the output device, a keyboard, a mouse, a display, or the like can be used.

[0079] The coating device 101 of the present embodiment can be connected to an instruction terminal (not shown). From the instruction terminal, it is possible to instruct the position of the relative drive device 103, the operation of the discharge device 102, etc. The coating device 101 can arrange a plurality of related instruction contents in order and reproduce them as one unit. In other words, the coating device 101 can operate the discharge device 102 and the relative drive device 103 according to the instruction contents. As the instruction terminal, for example, a dedicated terminal equipped with a simple display device and a plurality of switches, or a personal computer installed with dedicated software can be used. From the instruction terminal, it is possible to start and stop the operation of the coating device 101 based on the coating program stored in the control device 113. Instead of the instruction terminal, teaching can also be performed using the above-described control device 113 and a touch panel.

[0080] Furthermore, the coating program includes means or steps for setting / correcting the coating path (S102, S503), setting / correcting the coating parameters (S103, S504), and performing the coating operation (S505). By executing the coating program, the control device 113 realizes a position acquisition means (or position acquisition step) for acquiring the position coordinates of the components 202 and 203 arranged with a gap in the recess 201, a coating path setting means (or coating path setting step) for setting a coating path for coating based on the acquired position coordinates and the discharge device 102, a coating parameter setting means (or coating parameter setting step) for dividing the coating path and setting the coating amount for each divided coating path, and a coating means (or coating step) for moving the discharge device 102 along the coating path and coating the liquid material in the coating area.

[0081] The upper part of the housing 112 where the ejection device 102, the relative drive device 103, the work table 110, etc. are provided is covered with a cover 117 shown by a dotted line. In Fig. 16, for the convenience of explanation, the line is partially interrupted. By providing the cover 117, it is possible to prevent dust from entering the coating device 101 and to prevent accidental contact between the operator and the moving parts such as the relative drive device 103. Although not shown, the cover 117 may be provided with an openable and closable door to facilitate the operator's access to the coating device 101. Also, the above-described touch panel may be provided on the cover 117 so that it can be operated from outside the cover 117. Further, a hole for loading the substrate 111 into the coating device 101 or unloading the substrate 111 from the coating device 101 may be provided in the cover 117.

[0082] In the above coating device, the coating process is executed as follows. (a) Load an uncoated substrate having a plurality of components installed in the recesses into the coating device and fix it to the work table 110. (b) Execute the coating according to the above coating method. (c) Unload the substrate on which the coating has been performed from the coating device. Taking the above as a basic cycle, if there is an uncoated substrate, repeat the above (a) to (c). The following steps may be added during the above cycle. For example, after the coating operation is executed, an inspection step of imaging the state of the coated liquid material to determine whether it is good or not may be added.

[0083] According to the coating device 101 of the embodiment described above, even if there are bends or width variations in the concave coating area due to deviations in the installation positions of the components 202 and 203 or the outer shape tolerances of the components 202 and 203 or the concave portion 201, it is possible to set a coating path that conforms to the shape of the coating area, and perform coating to fill the coating area formed by a gap having a complex shape with a liquid material without excess or deficiency. For example, in the manufacturing process of a camera module mounted on a smartphone, due to variations in the installation position of a semiconductor element as a component, wide and narrow areas can occur in the gap (coating area) between the inner wall surface of the concave portion provided on the substrate and the outer periphery of the component (see FIG. 12). When filling these gaps (coating areas) with a liquid material, there are problems that if the liquid material is insufficient, the fixing of the component becomes insufficient, and if the liquid material is excessive, it will have an adverse effect on the component. Since the overflow of the liquid material onto the upper surfaces of the substrate and the component affects the quality, it is necessary to avoid it. In particular, in the camera module, if the liquid material overflows and adheres to the upper surface of the semiconductor element, it will also have an adverse effect on the lens and the like to be mounted later. According to the present invention, since an appropriate amount of liquid material can be filled into the coating area formed by the gap between the inner wall surface of the concave portion and the outer periphery of the component, it is possible to solve these problems.

[0084] As described above, the preferred embodiment examples of the present invention have been explained, but the technical scope of the present invention is not limited to the description of the above embodiment examples. Various changes and improvements can be made without departing from the technical idea of the present invention, and forms with such changes or improvements are also included in the technical scope of the present invention.

[0085] In the above embodiment, the reference correction amount is set (S104), and correction is performed in consideration of the correction amount in the correction of the coating parameters (S504). However, it is not always necessary to set the reference correction amount. That is, without setting the reference correction amount, the same procedure as in the setting of the initial coating parameters (S103) may be performed in the correction of the coating parameters (S504) to calculate the moving speed of the discharge device 102.

[0086] In the above embodiment, in the correction of the coating path (S503), the discharge amount per unit time of the discharge device was set to a constant value, and the moving speed of the discharge device 102 was corrected. However, differently, the moving speed of the discharge device 102 may be set to a constant value, and the discharge amount per unit time of the discharge device 102 may be corrected. In particular, when the discharge device is a jet type, instead of the discharge amount per unit time, the volume or mass / weight of one drop may be adjusted.

[0087] Also, in a part of the divided coating region, the liquid material may be filled by so-called spot coating in which the movement of the discharge device 102 is stopped at a specific coating position and coating is performed. In this case, it is disclosed that the coating amount is corrected using the time during which the discharge device 102 stops moving at a specific coating position as a discharge adjustment parameter.

Explanation of Reference Numerals

[0088] 101: Coating device, 102: Discharge device, 103: Relative drive device, 104: X drive device, 105: Y drive device, 106: Z drive device, 107: X movement direction, 108: Y movement direction, 109: Z movement direction, 110: Work table, 111: Substrate (workpiece), 112: Housing, 113: Control device, 114: Calibration device, 115: Calibration table, 116: Meter, 117: Cover, 118: Conveying device, 119: Rail, 120: Conveying drive device, 121: Conveying direction, 122: Imaging device (camera), 201: Recess, 202: First component, 203: Second component, 204: Liquid material, A, B, C, D, F, G: Feature points (corners, midpoints, intersection points), E: Coating path, Q: Coating region, H: Coating height

Claims

1. A coating method for filling a liquid material into a coating area formed by a gap between an inner wall surface of a recess of a workpiece and an outer periphery of a component disposed in the recess, comprising: a position acquisition step of acquiring position coordinates of the component based on an imaging image including a characteristic portion of the component; a coating path setting step of setting a coating area and a coating path for coating by a discharge device based on the position coordinates; a coating parameter setting step of dividing the coating path of the discharge device based on the position coordinates and setting a coating amount for each divided coating path; a coating step of moving the discharge device along the coating path to apply a liquid material to the coating area. The coating method comprising the above steps.

2. The coating method according to claim 1, wherein in the coating path setting step, the coating area is divided into divided coating areas, and a divided coating path is set for each divided coating area.

3. The component comprises a plurality of components arranged with a space therebetween in the same recess, and the coating area includes a portion between the plurality of components. The coating method according to claim 2.

4. The recess is polygonal in a top view, the component is polygonal in a top view, and in the position acquisition step, position coordinates of all corner portions of the component and position coordinates of corner portions of the recess adjacent to each corner portion of the component are acquired. The coating method according to claim 2.

5. The coating method according to claim 4, wherein in the coating path setting step, the coating area is divided into divided coating areas having the corner portions of the component as vertices.

6. The coating method according to claim 4, wherein in the coating path setting step, the coating area is divided into divided coating areas formed of a plurality of quadrilaterals.

7. The coating method according to claim 4, wherein in the coating path setting step, the coating path is set by a straight path passing through a midpoint of a width in a direction orthogonal to a traveling direction of the coating path of the divided coating area.

8. An initial setting step of setting an initial coating area, an initial coating path, an initial coating amount, and a reference correction amount, which is executed before the position acquisition step, is included, and the coating parameter setting step sets the coating amount for each divided coating area based on a coating amount calculated based on the shape of the divided coating area and the reference correction amount. The coating method according to claim 2.

9. In the coating parameter setting step, when the width in the direction orthogonal to the traveling direction of the coating path of the divided coating region is different between the starting point and the ending point, the divided coating region is divided into secondary divided coating regions, and the coating amount is set for each secondary divided coating region. The coating method according to any one of claims 2 to 8, characterized in that.

10. In the coating parameter setting step, the coating amount is set by setting the discharge amount per unit time of the discharge device to be constant and setting the relative movement speed between the discharge device and the workpiece for each divided coating region. The coating method according to any one of claims 2 to 8, characterized in that.

11. The coating parameter setting step sets the coating amount by setting any one or more of the following [A] to [D]. The coating method according to any one of claims 2 to 8, characterized in that. [A] When the discharge device is a jet type discharge device, the number of discharges per unit time [B] When the discharge device is a screw type discharge device, the rotation speed of the screw [C] When the discharge device is a plunger type discharge device, the moving speed of the plunger [D] When the discharge device is an air type discharge device, the pressure application time

12. The component is a semiconductor element. The coating method according to any one of claims 2 to 8, characterized in that.

13. In the coating path setting step, a coating height that does not reach the upper end of either the concave portion or the component is set. The coating method according to any one of claims 2 to 8, characterized in that.

14. In the position acquisition step, further, the position coordinates of the concave portion are acquired based on an imaging image including a characteristic portion of the concave portion, In the coating parameter setting step, the coating path of the discharge device is divided based on the position coordinates of the concave portion and the component, and the coating amount is set for each divided coating path. The coating method according to any one of claims 1 to 8, characterized in that.

15. A discharge device that discharges a liquid material, A work table on which a workpiece having a concave portion is placed, A relative drive device that relatively moves the discharge device and the work table, An imaging device that images an imaging image including a characteristic portion of a component disposed with a gap in the concave portion of the workpiece, A control device that controls the operations of the discharge device, the relative drive device, and the imaging device, Position acquisition means for the control device to acquire the position coordinates of the component based on the captured image; Coating path setting means for setting the coating path of the discharge device based on the position coordinates; Coating parameter setting means for dividing the coating path of the discharge device based on the position coordinates and setting the coating amount for each divided coating path; Coating means for moving the discharge device along the coating path to apply a liquid material to the gap; A coating device, characterized by comprising the above.

16. The coating device according to claim 15, wherein the coating path setting means divides the coating area set based on the position coordinates into divided coating areas and sets the divided coating path for each divided coating area.

17. The coating device according to claim 16, wherein when the width in the direction orthogonal to the traveling direction of the coating path in the divided coating area is different between the start point and the end point, the coating parameter setting means divides the divided coating area into secondary divided coating areas and sets the coating amount for each secondary divided coating area.

18. The coating device according to any one of claims 15 to 17, further comprising a length measuring device for measuring the distance to the workpiece or the component.

19. The coating device according to any one of claims 15 to 17, further comprising a calibration device comprising a trial application area and a measuring instrument.

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