Fluid curtain supply device and etching device equipped with the same

Abstract

To suppress a fluid split state of a fluid that is discharged from a slit-like opening.SOLUTION: A fluid curtain supply device (1) includes: a carrier line (2) for carrying a substrate (20); a fluid knife (3) for discharging a chemical liquid (14) like a curtain toward the carrier line (2) from a slit-like opening (13) extending along a width direction of the carrier line (2); and a pressure-sensitive sheet (4) for detecting a fluid split (15) in which the chemical liquid (14) discharged like a curtain from the opening (13) of the fluid knife (3) and proceeding toward the carrier line (2) splits along a discharge direction.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present disclosure relates to a fluid curtain supply device that discharges a fluid in a curtain shape, and an etching device including the same.

Background Art

[0002] A fluid curtain supply device that discharges a chemical solution in a curtain shape toward a transfer line from a slit-shaped opening extending along the width direction of a transfer line for transferring a substrate is known as a conventional technique (Patent Document 1). This fluid curtain supply device aims to reduce the state of liquid breakage in which the chemical solution discharged in a curtain shape is split along the discharge direction by making the structure on the chemical solution supply side a plurality of chemical solution supply pipes with pressure management.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, even when using the structure on the chemical solution supply side as described above, there is still a possibility that further liquid breakage may occur.

[0005] One aspect of the present disclosure aims to realize a fluid curtain supply device that can suppress a fluid breakage state in which a fluid discharged in a curtain shape from a slit-shaped opening is split along the discharge direction, and an etching device including the same.

Means for Solving the Problems

[0006] To solve the above problems, a fluid curtain supply device according to an aspect of the present disclosure includes a conveyance line for conveying a substrate, a fluid knife that discharges fluid in a curtain shape toward the conveyance line from a slit-shaped opening extending along the width direction of the conveyance line, and a fluid break detection member that detects a fluid break state in which the fluid discharged in a curtain shape from the opening of the fluid knife is split along the discharge direction toward the conveyance line.

[0007] To solve the above problems, an etching apparatus according to an aspect of the present disclosure includes a fluid curtain supply device according to an aspect of the present disclosure, wherein the fluid contains a chemical solution, and further includes a shower device that is disposed downstream of the fluid curtain supply device and etches the substrate coated with the chemical solution discharged in a curtain shape from the opening by a shower.

Effect of the Invention

[0008] According to an aspect of the present disclosure, it is possible to provide a fluid curtain supply device that can suppress a fluid break state in which fluid discharged in a curtain shape from a slit-shaped opening is split along the discharge direction, and an etching apparatus including the same.

Brief Description of the Drawings

[0009]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

MODE FOR CARRYING OUT THE INVENTION

[0010] 〔Embodiment 1〕 Hereinafter, an embodiment of the present disclosure will be described in detail. FIG. 1 is a front view of the fluid curtain supply device 1 according to Embodiment 1. FIG. 2 is a side view of the etching device 11 provided with the fluid curtain supply device 1.

[0011] The etching device 11 includes a fluid curtain supply device 1 and a shower device 12 disposed downstream of the fluid curtain supply device 1.

[0012] The fluid curtain supply device 1 includes a transport line 2 for transporting the substrate 20, and a liquid knife 3 (fluid knife) that discharges the chemical solution 14 (fluid) in a curtain shape toward the transport line 2 from a slit-shaped opening 13 extending along the width direction of the transport line 2. The transport line 2 includes a plurality of rollers 17 that rotate to transport the substrate 20 and a shaft 16 that supports the plurality of rollers 17.

[0013] The shower device 12 of the etching device 11 etches the substrate 20 coated with the chemical solution 14 discharged in a curtain shape from the opening 13 of the liquid knife 3 by a shower. The transport line 2 and the liquid knife 3 are arranged obliquely along the width direction of the transport line 2.

[0014] In this way, the substrate 20 is transported into the etching device 11 from the dry area by the transport line 2. Then, after uniformly wetting the substrate 20 with the chemical solution 14 by the liquid knife 3 of the fluid curtain supply device 1 arranged at the entrance of the etching device 11, the etching process of the substrate 20 is carried out by the shower from the shower device 12.

[0015] FIG. 3 is a front view of a main part of a fluid curtain supply device according to a comparative example. FIG. 4 is a front view of a fluid curtain supply device according to a comparative example. FIG. 5 is a side view of an etching device provided with a fluid curtain supply device according to a comparative example. The same components as those described above are denoted by the same reference numerals. The detailed description of these components will not be repeated.

[0016] When applying the chemical solution 14 to the substrate 20 with the liquid knife 3, if the way the chemical solution 14 is applied to the substrate 20 by the liquid knife 3 is non-uniform, the portion of the substrate 20 where the chemical solution 14 does not hit will be under-etched, and defects such as step breaks due to taper will occur.

[0017] Due to the decrease in the flow rate of the liquid knife 3 caused by the clogging of the filter in the etching device 11 and the fact that the etching device 11 is inclined and transported at about 20°, a liquid break 15 is likely to occur in which the chemical solution 14 discharged in a curtain shape from the slit-like opening 13 of the liquid knife 3 toward the transport line 2 is split along the discharge direction. The chemical solution 14 is supplied to the liquid knife 3 from three locations through the liquid supply pipe 19. As shown in FIG. 3, when the chemical solution 14 flows in the width direction in the liquid knife 3, due to the influence of the inclination along the width direction of the liquid knife 3, the chemical solution 14 flows along the inclination direction in the liquid knife 3 according to the action of gravity. For this reason, the discharge on the upstream side of the chemical solution 14 flowing in the liquid knife 3 becomes weak, and the liquid break 15 is likely to occur. Also, while liquid breakage 15 is less likely to occur at the location of the opening 13 directly below the three supply ports from the liquid supply pipe 19 to the liquid knife 3, liquid breakage 15 is likely to occur at the location of the opening 13 between the supply ports because the chemical liquid 14 is difficult to discharge. And when foreign matter bites into the liquid supply pipe 19 and the slit-shaped opening 13, liquid breakage 15 occurs. In this case, liquid breakage 15 occurs regardless of the location in the width direction of the opening 13. The width of this liquid breakage 15 is, for example, about 3 cm to 5 cm. Therefore, even if liquid breakage 15 occurs in a part of the chemical liquid 14 discharged from the liquid knife 3, it cannot be captured only by controlling the flow rate of the chemical liquid 14 to the liquid knife 3.

[0018] The presence or absence of liquid breakage 15 of the chemical liquid 14 is visually confirmed once a day for a short time. However, since shower discharge is also performed by the shower device 12 in the etching device 11 of the same tank, it is difficult to accurately judge the presence or absence of liquid breakage 15. Also, even if liquid breakage 15 occurs in a part of the chemical liquid 14, the reaction to the flow rate of the chemical liquid 14 is slow, and it is difficult to judge by visual inspection for a short time. For this reason, when some problem occurs and the discharge state of the chemical liquid 14 is carefully visually inspected, it often happens that liquid breakage 15 has occurred.

[0019] Therefore, in the present embodiment, as shown in FIGS. 1 and 2, a plate-shaped support member 5 that has nothing to do with the conveyance of the substrate 20 is installed at the discharge destination of the chemical liquid 14 from the liquid knife 3, and a pressure-sensitive sheet 4 that reacts to pressure is provided on the support member 5. The pressure-sensitive sheet 4 and the support member 5 are combined to make visual inspection easier. This pressure-sensitive sheet 4 is a sheet that colors according to pressure.

[0020] The liquid knife 3 does not have a configuration like an air knife for liquid cutting, but discharges the chemical liquid 14 in a curtain shape in order to uniformly apply the chemical liquid 14 on the substrate 20. If this discharge is non-uniform, the amount of the chemical liquid 14 applied in the plane of the substrate 20 becomes non-uniform, and there is a difference in the etching rate in the plane of the substrate 20.

[0021] The etching apparatus 11 further includes a pressure-sensitive sheet 4 (fluid break detection member) that detects a fluid break 15 (fluid break state, fluid split state) in which the chemical solution 14 discharged curtain-like from the opening 13 of the liquid knife 3 splits along the discharge direction toward the transport line 2.

[0022] Therefore, by visually observing the state of the pressure-sensitive sheet 4 that the chemical solution 14 discharged curtain-like from the slit-shaped opening 13 of the liquid knife 3 hits, the fluid break 15 in which the chemical solution 14 splits along the discharge direction can be easily confirmed in a short time. As a result, the fluid break state of the chemical solution 14 can be easily suppressed.

[0023] This pressure-sensitive sheet 4 is arranged along the width direction of the transport line 2 at the discharge destination of the chemical solution 14 discharged from the slit-shaped opening 13 of the liquid knife 3, and is colored according to the pressure of the chemical solution 14 discharged from the opening 13.

[0024] As a result, the portion in the width direction of the pressure-sensitive sheet 4 that the chemical solution 14 discharged from the opening 13 hits is colored. The coloring of the portion in the width direction of the pressure-sensitive sheet 4 where the chemical solution 14 does not hit is suppressed. Therefore, the fluid break 15 in which the chemical solution 14 splits along the discharge direction can be easily confirmed in a short time.

[0025] The fluid curtain supply device 1 further includes a support member 5 (fluid break detection member) provided with the pressure-sensitive sheet 4 on the liquid knife 3 side.

[0026] As a result, the pressure-sensitive sheet 4 facing the chemical solution 14 discharged from the opening 13 of the liquid knife 3 is supported by the support member 5. In this way, a support member 5 provided with a pressure-sensitive sheet 4 that is colored in response to the pressure of the chemical solution 14 is installed at the discharge destination of the liquid knife 3, making it easy to visually confirm the discharge state of the liquid knife 3 in a short time.

[0027] The support member 5 is arranged in parallel with the liquid knife 3, so that the distance between the support member 5 and the liquid knife 3 is constant along the width direction, and no pressure difference of the pressure-sensitive sheet 4 based on the distance between the support member 5 and the liquid knife 3 occurs.

[0028] The pressure-sensitive sheet 4 is disposed on the opposite side of the liquid knife 3 with respect to the conveyance line 2.

[0029] Thereby, before or after the substrate 20 is conveyed under the liquid knife 3, the chemical solution 14 discharged from the liquid knife 3 passes through the conveyance line 2 and reaches the pressure-sensitive sheet 4.

[0030] The coloring of the pressure-sensitive sheet 4 is suppressed at a location along the width direction of the conveyance line 2 where the liquid break 15 occurs, and the coloring is promoted at a location along the width direction where the liquid break 15 does not occur.

[0031] Therefore, by visually observing the coloring state of the pressure-sensitive sheet 4, the liquid break state of the chemical solution 14 can be easily confirmed in a short time.

[0032] The conveyance line 2, the liquid knife 3, and the pressure-sensitive sheet 4 are disposed inclined along the width direction of the conveyance line 2.

[0033] The liquid break state that is likely to occur due to being disposed inclined along the width direction can be easily confirmed. Further, when disposed inclined in the width direction, the installation space of the conveyance line 2, the liquid knife 3, and the pressure-sensitive sheet 4 can be reduced compared to being disposed flat. Also, since the substrate 20 on the conveyance line 2 is also inclined in the width direction, the chemical solution 14 discharged from the liquid knife 3 to the substrate 20 flows along the inclined direction of the substrate 20 according to the action of gravity. For this reason, the chemical solution 14 is uniformly applied onto the substrate 20, and the substrate 20 can be etched without unevenness.

[0034] Also, since the support member 5 provided with the pressure-sensitive sheet 4 is inclined in the width direction, the chemical solution 14 discharged from the liquid knife 3 does not stay on the support member 5, and it does not happen that the pressure-sensitive sheet 4 is colored by the own weight of the chemical solution 14. The support member 5 may include a chemical-resistant sheet 7 (fluid break detection member) that has resistance to the chemical solution 14 and covers the pressure-sensitive sheet 4.

[0035] As a result, the pressure-sensitive sheet 4 can be protected from the action of the chemical solution 14 discharged in a curtain shape from the opening 13 of the liquid knife 3 toward the pressure-sensitive sheet 4. By covering the pressure-sensitive sheet 4 with the chemical-resistant sheet 7, it is possible to prevent the pressure-sensitive sheet 4 from deteriorating due to the chemical solution 14. Note that since the pressure-sensitive sheet 4 cannot respond to the pressure of the chemical solution 14 if the chemical-resistant sheet 7 is hard, the chemical-resistant sheet 7 needs to have a certain degree of flexibility.

[0036] FIG. 6 is a front view of the fluid curtain supply device 1 in a normal state. FIG. 7 is a front view of the fluid curtain supply device 1 when liquid breakage occurs. The same components as those described above are denoted by the same reference numerals. Detailed descriptions of these components will not be repeated.

[0037] When the chemical solution 14 is normally discharged from the liquid knife 3, as shown in FIG. 6, the flow rate of the chemical solution 14 discharged in a curtain shape from the slit-shaped opening 13 extending along the width direction of the liquid knife 3 is uniform along the width direction. For this reason, the pressure-sensitive sheet 4 provided on the support member 5 is uniformly colored in the width direction, and it can be visually confirmed in a short time that no liquid breakage 15 of the chemical solution 14 has occurred.

[0038] When an abnormality occurs in which a liquid breakage 15 occurs in the chemical solution 14 discharged from the liquid knife 3, as shown in FIG. 7, the portion in the width direction of the pressure-sensitive sheet 4 where the liquid breakage 15 of the chemical solution 14 has occurred is not hit by the chemical solution 14, and the pressure based on the chemical solution 14 is weak, so it is not colored or the coloring becomes lighter. Also, when the flow rate of the chemical solution 14 is non-uniform in the width direction, the coloring at the portion in the width direction where the flow rate of the pressure-sensitive sheet 4 is small becomes lighter. In the example shown in FIG. 7, the flow rate of the chemical solution 14 discharged from the liquid knife 3 inclined in the width direction is smaller on the ascending side than on the descending side with respect to the position where the liquid breakage 15 has occurred. For this reason, the pressure-sensitive sheet 4 inclined in the width direction is less colored on the ascending side than on the descending side with respect to the position where the liquid breakage 15 has occurred.

[0039] The pressure-sensitive sheet 4 is a sheet that can visualize pressure and is also referred to as a pressure measurement film. The pressure-sensitive sheet 4 is a sensor that measures pressure across the entire sheet, allowing the pressure distribution and surface pressure across the entire surface to be confirmed at a glance. When the pressure-sensitive sheet 4 receives pressure, it turns red, for example. The color density changes according to the magnitude of the pressure.

[0040] If the pressure-sensitive sheet 4 does not lose its color even after the pressure is removed after coloring according to the pressure, it cannot be used repeatedly. Therefore, it is necessary to replace the pressure-sensitive sheet 4 for each visual inspection. It is desirable that the pressure-sensitive sheet 4 be a sheet that can be repeatedly used because it loses its color when the pressure is removed, in which case replacement is not required.

[0041] As described above, according to the present embodiment, it is possible to reduce the visual inspection leakage of the liquid break 15 of the chemical solution 14 applied to the substrate 20 by discharge in a short time and reduce the defects caused by etching.

[0042] FIG. 8 is a front view of the fluid curtain supply device 1A according to the modified example. The same components as those described above are denoted by the same reference numerals. Detailed descriptions of these components will not be repeated.

[0043] The fluid curtain supply device 1A includes a pressure line sensor 6 (fluid break detection member) that is arranged along the width direction at the discharge destination of the chemical solution 14 discharged from the slit-shaped opening 13 and detects the pressure of the chemical solution 14 discharged from the opening 13.

[0044] Therefore, by detecting the output of the pressure line sensor 6 against which the chemical solution 14 discharged in a curtain shape from the opening 13 of the liquid knife 3 hits, it is possible to easily confirm the liquid break 15 in which the chemical solution 14 breaks along the discharge direction. As a result, the liquid break state of the chemical solution 14 can be easily suppressed.

[0045] The pressure line sensor 6 includes a plurality of pressure sensors arranged along the width direction of the transport line 2. The pressure line sensor 6 may be configured by arranging the pressure sensors linearly on the support member 5A arranged along the width direction of the transport line 2.

[0046] The fluid curtain supply device 1A may further include a chemical-resistant sheet 7 (fluid break detection member) shown in FIG. 1 that has resistance to the chemical solution 14 and covers the pressure line sensor 6.

[0047] Thereby, the pressure line sensor 6 can be protected from the action of the chemical solution 14 that is discharged in a curtain shape from the opening 13 of the liquid knife 3 and heads toward the pressure line sensor 6.

[0048] By covering the pressure line sensor 6 with the chemical-resistant sheet, it is possible to prevent the pressure line sensor 6 from deteriorating due to the chemical solution 14. Note that if the chemical-resistant sheet is hard, the pressure line sensor 6 cannot sense the pressure of the chemical solution 14, so the chemical-resistant sheet needs to have a certain degree of flexibility.

[0049] The sensing result of the pressure line sensor 6 can be displayed on a monitor or the like to confirm the presence or absence and flow rate of the liquid break 15 of the chemical solution 14. Further, instead of displaying the sensing result of the pressure line sensor 6 on a monitor or the like, when the pressure line sensor 6 senses the liquid break 15 of the chemical solution 14, an abnormal alarm may be sounded, or feedback may be given to the device that supplies the chemical solution 14 to the liquid knife 3, and the device may be configured to automatically recover to eliminate the liquid break 15 of the chemical solution 14. FIG. 9 is a flowchart showing a feedback operation related to the fluid curtain supply device 1A. The same reference numerals are given to the same components as those described above. Detailed descriptions of these components will not be repeated. The fluid curtain supply device 1A may include a feedback unit 21 that monitors and feeds back the output of the pressure line sensor 6. First, the feedback unit 21 monitors the output of the pressure line sensor 6 to monitor the liquid breakage 15 (step S1). Then, the feedback unit 21 determines whether the liquid breakage 15 has occurred based on the output of the pressure line sensor 6 (step S2). When the feedback unit 21 determines that the liquid breakage 15 has occurred (YES in step S2), the feedback unit 21 generates an abnormal alarm signal (step S3). Then, based on the abnormal alarm signal generated by the feedback unit 21, the liquid knife 3 stops the discharge of the chemical solution 14 from the slit-shaped opening 13 (step S4). Thereafter, measures for the liquid breakage 15 are taken manually or automatically (step S5). Then, the liquid knife 3 discharges the chemical solution 14 from the slit-shaped opening 13 (step S6). When the feedback unit 21 determines that the liquid breakage 15 has not occurred (NO in step S2), it proceeds to step S6. The liquid knife 3 may discharge not only the chemical solution 14 but also a liquid such as water or a gas such as air. In this case, the pressure-sensitive sheet 4 is colored according to the pressure based on a liquid such as water or a gas such as air. The pressure line sensor 6 detects the pressure based on a liquid such as water or a gas such as air.

[0050] 〔Embodiment 2〕 FIG. 10 is a side view of an etching apparatus 11B provided with a fluid curtain supply apparatus 1B according to Embodiment 2. The same components as those described above are denoted by the same reference numerals. Detailed descriptions of these components will not be repeated.

[0051] The etching apparatus 11B includes a fluid curtain supply apparatus 1B and a shower apparatus 12 disposed downstream of the fluid curtain supply apparatus 1B.

[0052] The etching apparatus 11B includes an optical line sensor 8 (fluid breakage detection member) disposed along the width direction facing the side surface of the chemical solution 14 discharged in a curtain shape from a slit-shaped opening 13 extending along the width direction of the liquid knife 3.

[0053] Based on the output from the optical line sensor 8 arranged along the width direction facing the side surface of the chemical solution 14 discharged in a curtain shape from the opening 13 of the liquid knife 3, it is possible to detect the liquid break 15 where the chemical solution 14 splits along the discharge direction.

[0054] The optical line sensor 8 includes a light source 9 that irradiates light along the width direction toward the side surface of the chemical solution 14 discharged in a curtain shape from the opening 13 of the liquid knife 3, and a light receiving unit 10 that is arranged along the width direction and receives the light reflected by the side surface of the chemical solution 14.

[0055] Based on the output from the light receiving unit 10 that has received the light reflected by the side surface of the chemical solution 14 discharged in a curtain shape from the opening 13 of the liquid knife 3, it is possible to detect the state of the liquid break 15 where the chemical solution 14 splits along the discharge direction.

[0056] In this way, the light from the light source 9 is applied to the chemical solution 14 discharged from the liquid knife 3 and reflected by the side surface of the chemical solution 14. Since the reflectance of the light from the light source 9 is different between the part with the chemical solution 14 and the part without it, the difference in the reflectance is sensed to confirm the presence or absence of the liquid break 15 of the chemical solution 14.

[0057] In the configuration of Embodiment 1, while the chemical solution 14 discharged from the liquid knife 3 is being applied to the substrate 20, the chemical solution does not pass through the conveyance line 2 and reach the pressure-sensitive sheet 4 etc., so it is difficult to constantly monitor the liquid break 15 of the chemical solution 14 with the pressure-sensitive sheet 4. However, in the configuration of this Embodiment 2, even while the chemical solution 14 discharged from the liquid knife 3 is being applied to the substrate 20, the optical line sensor 8 can receive the light reflected by the side surface of the chemical solution 14, so the liquid break 15 of the chemical solution 14 can be constantly monitored.

[0058] The positions of the light source 9 and the light receiving unit 10 shown in FIG. 10 may be configured in reverse positions.

[0059] FIG. 11 is a front view of a fluid curtain supply device 1C according to a modified example. The same components as those described above are denoted by the same reference numerals, and detailed descriptions of these components will not be repeated.

[0060] The etching apparatus 11C includes a fluid curtain supply device 1C and a shower device 12 disposed downstream of the fluid curtain supply device 1C.

[0061] The optical line sensor 8 may include a light source 9 that irradiates light along the width direction toward the side surface of the chemical solution 14 discharged in a curtain shape from the opening 13 of the liquid knife 3, and a light receiving unit 10 that is disposed along the width direction and receives the light transmitted through the side surface of the chemical solution 14.

[0062] In this case, the light source 9 and the light receiving unit 10 are disposed on both sides sandwiching the chemical solution 14. In FIG. 11, the light receiving unit 10 is disposed below the transport line 2, but it may also be disposed between the transport line 2 and the liquid knife 3.

[0063] Similarly, for the etching apparatus 11C, the sensing result of the optical line sensor 8 can be displayed on a monitor or the like to check the presence or absence and flow rate of the liquid break 15 of the chemical solution 14. Further, instead of displaying the sensing result of the optical line sensor 8 on a monitor or the like, when the optical line sensor 8 senses the liquid break 15 of the chemical solution 14, an abnormal alarm may be sounded, or feedback may be given to the device that supplies the chemical solution 14 to the liquid knife 3, and the device may be configured to automatically recover to eliminate the liquid break 15 of the chemical solution 14.

[0064] 〔Embodiment 3〕 FIG. 12 is a perspective view of a fluid curtain supply device 1D according to Embodiment 3. FIG. 13 is a side view of an etching apparatus 11D provided with the fluid curtain supply device 1D. The same components as those described above are denoted by the same reference numerals, and detailed descriptions of these components will not be repeated.

[0065] The etching apparatus 11D includes a fluid curtain supply device 1D and a shower device 12 disposed downstream of the fluid curtain supply device 1D.

[0066] The fluid curtain supply device 1D includes an optical line sensor 8D (fluid break detection member) disposed along the width direction facing a substrate 20 coated with a chemical solution 14 discharged in a curtain shape from a slit-shaped opening 13 extending along the width direction of the transfer line 2. Thereby, based on the output from the optical line sensor 8D disposed along the width direction facing the substrate 20 coated with the chemical solution 14 discharged from the opening 13, a fluid break region 15C caused by a fluid break 15 in which the chemical solution 14 discharged from the liquid knife 3 breaks along the discharge direction can be detected.

[0067] The optical line sensor 8D includes a light source 9D that irradiates light along the width direction toward the substrate 20 coated with the chemical solution 14 discharged in a curtain shape from the opening 13, and a light receiving portion 10D that is disposed along the width direction and receives the light reflected by the substrate 20. Thereby, based on the output from the light receiving portion 10D reflected by the substrate 20 coated with the chemical solution 14 discharged from the opening 13, a fluid break region 15C based on the fluid break 15 in which the chemical solution 14 discharged from the liquid knife 3 breaks along the discharge direction can be detected.

[0068] In this way, the light from the light source 9D is reflected by the chemical solution 14 on the substrate 20. Since the reflectance of light is different between the portion with the chemical solution 14 and the portion without it (fluid break region 15C), the difference is sensed to confirm the presence or absence of the fluid break region 15C based on the fluid break. In the configuration of this Embodiment 3, the state where the chemical solution 14 discharged from the liquid knife 3 is applied to the substrate 20 can be detected by the optical line sensor 8D receiving the light reflected by the surface of the substrate 20 coated with the chemical solution 14, so that the fluid break 15 of the chemical solution 14 can be monitored.

[0069] When there is a problem with the change in reflectance due to a metal pattern or the like in the substrate actually used for production, the liquid breakage region 15C caused by the liquid break 15 of the chemical solution 14 may be confirmed using a test substrate without a metal pattern or with a metal pattern formed over the entire surface. Alternatively, the angle between the light traveling from the light source 9D toward the substrate 20 and the light traveling toward the light receiving part 10D reflected by the substrate 20 may be adjusted, and by setting the angle to be equal to or less than the critical angle, the light traveling from the light source 9D toward the substrate 20 is totally reflected on the surface of the chemical solution 14 applied to the substrate 20, and the liquid breakage region 15C may be confirmed.

[0070] The sensing result of the optical line sensor 8D can be displayed on a monitor or the like to confirm the presence or absence and the flow rate of the liquid break 15 of the chemical solution 14. Further, instead of displaying the sensing result of the optical line sensor 8D on a monitor or the like, when the optical line sensor 8D senses the liquid break 15 of the chemical solution 14, an abnormal alarm may be sounded, or feedback may be provided to the device that supplies the chemical solution 14 to the liquid knife 3, and the device may be configured to automatically recover to eliminate the liquid break 15 of the chemical solution 14. As in Embodiments 1 to 3, there are two methods for monitoring the state of the liquid break 15 of the chemical solution 14: monitoring the state of the discharged chemical solution 14 and monitoring the state on the substrate 20 to which the discharged chemical solution 14 is applied.

[0071] 〔Summary〕 The fluid curtain supply device 1, 1A, 1B, 1C, 1D according to Aspect 1 of the present disclosure includes a conveyance line 2 that conveys a substrate 20, a fluid knife (liquid knife 3) that discharges a fluid (chemical solution 14) in a curtain shape toward the conveyance line 2 from a slit-shaped opening 13 that extends along the width direction of the conveyance line 2, and a fluid break detection member (pressure sensitive sheet 4, pressure line sensor 6, optical line sensor 8, 8D) that detects a fluid break state in which the fluid discharged in a curtain shape from the opening 13 of the fluid knife breaks along the discharge direction toward the conveyance line 2.

[0072] According to the above configuration, by checking the state of the fluid breakage detection member that the fluid discharged in a curtain shape from the opening of the fluid knife hits, it is possible to easily check the fluid breakage state in which the fluid breaks along the discharge direction in a short time.

[0073] In the fluid curtain supply device 1 according to the aspect 2 of the present disclosure, in the above aspect 1, the fluid breakage detection member may include a pressure-sensitive sheet 4 that is arranged along the width direction at the discharge destination of the fluid (chemical solution 14) discharged from the slit-shaped opening 13 and that is colored according to the pressure of the fluid discharged from the opening 13.

[0074] According to the above configuration, the portion in the width direction of the pressure-sensitive sheet that the fluid discharged from the slit-shaped opening hits is colored. The coloring of the portion in the width direction of the pressure-sensitive sheet where the fluid does not hit is suppressed.

[0075] In the fluid curtain supply device 1 according to the aspect 3 of the present disclosure, in the above aspect 2, it may further include a support member 5 provided with the pressure-sensitive sheet 4 on the fluid knife (liquid knife 3) side.

[0076] According to the above configuration, the pressure-sensitive sheet facing the fluid discharged from the opening of the fluid knife is supported by the support member.

[0077] In the fluid curtain supply device 1 according to the aspect 4 of the present disclosure, in the above aspect 2, the pressure-sensitive sheet 4 may be arranged on the opposite side of the fluid knife (liquid knife 3) with respect to the conveyance line 2.

[0078] According to the above configuration, before or after the substrate is conveyed under the fluid knife, the fluid discharged from the fluid knife passes through the conveyance line and reaches the pressure-sensitive sheet.

[0079] In the fluid curtain supply device 1 according to the aspect 5 of the present disclosure, in the above aspect 2, the coloring of the pressure-sensitive sheet 4 is suppressed at the portion along the width direction where the fluid breakage state occurs. According to the above configuration, by visually observing the coloring mode of the pressure-sensitive sheet, the fluid breakage state of the fluid can be easily confirmed in a short time.

[0080] In the fluid curtain supply device 1 according to aspect 6 of the present disclosure, in the above aspect 2, the transport line 2, the fluid knife (liquid knife 3), and the pressure-sensitive sheet 4 may be arranged obliquely along the width direction.

[0081] According to the above configuration, it is possible to easily confirm the fluid breakage state that is likely to occur due to being arranged obliquely along the width direction.

[0082] In the fluid curtain supply device 1 according to aspect 7 of the present disclosure, in the above aspect 2, the fluid may include the chemical solution 14, and may further include a chemical-resistant sheet that has resistance to the chemical solution 14 and covers the pressure-sensitive sheet 4.

[0083] According to the above configuration, it is possible to protect the pressure-sensitive sheet from the action of the chemical solution discharged in a curtain shape from the opening of the fluid knife and directed toward the pressure-sensitive sheet.

[0084] In the fluid curtain supply device 1A according to aspect 8 of the present disclosure, in the above aspect 1, the fluid breakage detection member may be arranged along the width direction at the discharge destination of the fluid (chemical solution 14) discharged from the slit-shaped opening 13, and may include a pressure line sensor 6 that detects the pressure of the fluid discharged from the opening 13.

[0085] According to the above configuration, by detecting the output of the pressure line sensor against which the fluid discharged in a curtain shape from the opening of the fluid knife hits, it is possible to easily confirm the fluid breakage state in which the fluid breaks along the discharge direction. As a result, the fluid breakage state of the fluid can be easily suppressed.

[0086] In the fluid curtain supply device 1A according to aspect 9 of the present disclosure, in the above aspect 8, the fluid may include the chemical solution 14, and may further include a chemical-resistant sheet that has resistance to the chemical solution 14 and covers the pressure line sensor 6.

[0087] According to the above configuration, the pressure line sensor can be protected from the action of the fluid discharged in a curtain shape from the opening of the fluid knife and heading toward the pressure line sensor.

[0088] In the fluid curtain supply devices 1B and 1C according to Embodiment 10 of the present disclosure, in the above Embodiment 1, the fluid may include a liquid (chemical solution 14), and the fluid breakage detection member may include an optical line sensor 8 disposed along the width direction facing the side surface of the liquid discharged in a curtain shape from the opening 13.

[0089] According to the above configuration, based on the output from the optical line sensor disposed along the width direction facing the side surface of the liquid discharged in a curtain shape from the opening of the fluid knife, it is possible to detect the state of liquid breakage in which the liquid breaks along the discharge direction.

[0090] In the fluid curtain supply device 1B according to Embodiment 11 of the present disclosure, in the above Embodiment 10, the optical line sensor 8 may include a light source 9 that irradiates light along the width direction toward the side surface of the liquid (chemical solution 14) discharged in a curtain shape from the opening 13, and a light receiving unit 10 that is disposed along the width direction and receives the light reflected by the side surface of the liquid.

[0091] According to the above configuration, based on the output from the light receiving unit that receives the light reflected by the side surface of the liquid discharged in a curtain shape from the opening of the fluid knife, it is possible to detect the state of liquid breakage in which the liquid breaks along the discharge direction.

[0092] In the fluid curtain supply device 1D according to Embodiment 12 of the present disclosure, in the above Embodiment 1, the fluid includes a chemical solution 14, and the fluid breakage detection member may include an optical line sensor 8D disposed along the width direction facing the substrate 20 coated with the chemical solution 14 discharged in a curtain shape from the opening 13.

[0093] According to the above configuration, based on the output from the optical line sensor arranged along the width direction facing the substrate coated with the chemical solution discharged from the opening of the fluid knife, it is possible to detect the state of liquid breakage in which the chemical solution discharged from the fluid knife breaks along the discharge direction.

[0094] In the fluid curtain supply device 1D according to aspect 13 of the present disclosure, in the above aspect 12, the optical line sensor 8D may include a light source 9D that irradiates light along the width direction toward the substrate 20 coated with the chemical solution 14 discharged in a curtain shape from the opening 13, and a light receiving unit 10D that is arranged along the width direction and receives the light reflected by the substrate 20.

[0095] According to the above configuration, based on the output from the light receiving unit reflected by the substrate coated with the chemical solution discharged from the opening of the fluid knife, it is possible to detect the state of liquid breakage in which the chemical solution discharged from the fluid knife breaks along the discharge direction.

[0096] The etching device 11·11B·11C·11D according to aspect 14 of the present disclosure includes the fluid curtain supply device 1·1A·1B·1C·1D described in any one of aspects 1 to 13 of the present disclosure, the fluid contains the chemical solution 14, and further includes a shower device 12 that is arranged on the downstream side of the fluid curtain supply device 1·1A·1B·1C·1D and etches the substrate 20 coated with the chemical solution 14 discharged in a curtain shape from the opening 13 by a shower.

[0097] The present disclosure is not limited to the above-described embodiments, and various modifications are possible within the scope shown in the claims. Embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of the present disclosure. Furthermore, by combining the technical means disclosed in each embodiment, new technical features can be formed.

Description of Reference Numerals

[0098] 1 Fluid curtain supply device 2 Transfer Line 3 Liquid Knife (Fluid Knife) 4 Pressure Sensitive Sheet (Fluid Leak Detection Member) 5 Support Member 6 Pressure Line Sensor (Fluid Leak Detection Member) 7 Chemical Resistant Sheet 8 Optical Line Sensor (Fluid Leak Detection Member) 9 Light Source (Optical Line Sensor, Fluid Leak Detection Member) 10 Light Receiving Part (Optical Line Sensor, Fluid Leak Detection Member) 11 Etching Device 12 Shower Device 13 Opening 14 Chemical Solution (Fluid) 15 Liquid Leak (Fluid Leak)

Claims

1. A conveyance line for conveying a substrate, a fluid knife that discharges fluid in a curtain shape toward the conveyance line from a slit-shaped opening extending along the width direction of the conveyance line, a fluid break detection member that detects a fluid break state in which the fluid discharged in a curtain shape from the opening of the fluid knife breaks along the discharge direction toward the conveyance line, and a fluid curtain supply device, wherein the fluid break detection member includes a pressure-sensitive sheet that is disposed along the width direction at the discharge destination of the fluid discharged from the slit-shaped opening and colors according to the pressure of the fluid discharged from the opening.

2. The fluid curtain supply device according to claim 1, further including a support member provided with the pressure-sensitive sheet on the fluid knife side.

3. The fluid curtain supply device according to claim 1, wherein the pressure-sensitive sheet is disposed on the side opposite to the fluid knife with respect to the conveyance line.

4. The fluid curtain supply device according to any one of claims 1 to 3, wherein coloring of the pressure-sensitive sheet is suppressed at a location along the width direction where the fluid break state occurs.

5. The fluid curtain supply device according to any one of claims 1 to 3, wherein the conveyance line, the fluid knife, and the pressure-sensitive sheet are disposed inclined along the width direction.

6. The fluid includes a chemical solution, and the fluid curtain supply device according to any one of claims 1 to 3, further including a chemical-resistant sheet that has resistance to the chemical solution and covers the pressure-sensitive sheet.

7. A conveyance line for conveying a substrate, a fluid knife that discharges fluid in a curtain shape toward the conveyance line from a slit-shaped opening extending along the width direction of the conveyance line, a fluid break detection member that detects a fluid break state in which the fluid discharged in a curtain shape from the opening of the fluid knife breaks along the discharge direction toward the conveyance line, and a fluid curtain supply device, wherein the fluid break detection member includes a pressure line sensor that is disposed along the width direction at the discharge destination of the fluid discharged from the slit-shaped opening and detects the pressure of the fluid discharged from the opening.

8. The fluid includes a chemical solution, and the fluid curtain supply device further includes a chemical-resistant sheet that has resistance to the chemical solution and covers the pressure line sensor.

9. The fluid curtain supply device according to claim 1 or 7 is provided, and the fluid includes a chemical solution, An etching apparatus further comprising a shower apparatus that is disposed downstream of the fluid curtain supply apparatus and etches the substrate coated with the chemical solution discharged in a curtain shape from the opening by a shower.

Images