Work transfer device, cylindrical grinding device, and deviation amount correction method

Abstract

To provide a workpiece conveyance apparatus capable of automatically clamping a workpiece between a spindle unit (spindle pipe sleeve) and a tail unit (tail pipe sleeve) in a state in which the crystal axis of the workpiece and the rotation axis of a cylindrical grinding apparatus coincide.SOLUTION: The workpiece conveyance apparatus includes: a clamp mechanism 250 including a pair of claw sections 261a, 261b that clamps a workpiece; a turning mechanism configured to turn the clamp mechanism in a state of clamping the workpiece; and an X-ray apparatus configured to measure a crystal plane orientation of the workpiece clamped between a spindle pipe sleeve and a tail pipe sleeve of a cylindrical grinding apparatus main body in a state in which a center axis of the workpiece and a rotation axis of the cylindrical grinding apparatus main body coincide, and output a correction value for correcting a deviation amount of a crystal axis of the workpiece with respect to the rotation axis of the cylindrical grinding apparatus main body.SELECTED DRAWING: Figure 11

Description

Technical Field

[0001] The present disclosure relates to a work transfer device, a cylindrical grinding device, and a deviation amount correction method.

Background Art

[0002] A cylindrical grinding device for grinding a cylindrical work is known (see, for example, Patent Document 1). Also, a method for measuring a crystal orientation is known (see, for example, Patent Document 2). In contrast, the present inventors have considered a cylindrical grinding device capable of performing predetermined processing (for example, grinding the outer peripheral surface of a work, additional processing such as a cut (notch) in a flat surface (OF) or a V-shape, etc.) so as to satisfy predetermined processing conditions for cylindrical works having various diameters and various lengths (lengths in the central axis direction). In a factory where a cylindrical grinding device is installed, cylindrical works having various diameters and various lengths (lengths in the central axis direction) are stored, and the corresponding work taken out from the storage location as needed is clamped between the spindle unit (spindle base) and the tail unit (tail base) of the cylindrical grinding device, and it is required to perform predetermined processing on the clamped work so as to satisfy predetermined processing conditions. At that time, it is desirable that the work be clamped between the spindle unit (spindle base) and the tail unit (tail base) in a state where the crystal axis of the work coincides with the rotation axis of the cylindrical grinding device.

[0003] Therefore, conventionally, a crystal orientation measuring device (for example, model SU-021 manufactured by Toshiba IT Control Systems Co., Ltd.) has been used as an X-ray device to measure the crystal axis of a work, and after correcting the deviation amount between the measured crystal axis and the rotation axis of the cylindrical grinding device, the corrected work is reclamped between the spindle unit (spindle base) and the tail unit (tail base) of the cylindrical grinding device.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

[0005] However, the measurement of the crystal axis of the workpiece, the correction of the deviation amount, and the re-clamping have to be performed manually, and there is a problem that the work load is large.

[0006] The present disclosure has been made to solve such problems, and an object thereof is to provide a workpiece transfer device, a cylindrical grinding device, and a deviation amount correction method capable of automatically clamping a workpiece between a spindle unit (spindle base) and a tailstock unit (tailstock base) in a state where the crystal axis of the workpiece coincides with the rotation axis of the cylindrical grinding device. [Means for Solving the Problems]

[0007] The workpiece transfer device according to the present disclosure is a workpiece transfer device that transfers a cylindrical workpiece to be processed to a cylindrical grinding device main body, a clamping mechanism including a pair of claw portions that clamp the workpiece, a turning mechanism that turns the clamping mechanism in a state where the workpiece is clamped, an X-ray device that measures the crystal plane orientation of the workpiece clamped between the spindle base and the tailstock of the cylindrical grinding device main body in a state where the central axis of the workpiece coincides with the rotation axis of the cylindrical grinding device main body, and outputs a correction value for correcting the deviation amount of the crystal axis of the workpiece with respect to the rotation axis of the cylindrical grinding device main body, and when the rotation axis of the cylindrical grinding device main body is defined as the X-axis, an axis orthogonal to the X-axis is defined as the Y-axis, and an axis orthogonal to the plane including the X-axis and the Y-axis is defined as the Z-axis, The turning mechanism rotates the clamping mechanism in a state where the workpiece is clamped by an angle corresponding to the correction value about a θ-axis that passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction.

[0008] With such a configuration, it is possible to provide a workpiece transfer device that can automatically clamp a workpiece between a spindle unit (spindle base) and a tailstock unit (tailstock base) in a state where the crystal axis of the workpiece coincides with the rotation axis of the cylindrical grinding device.

[0009] This is because the clamping mechanism in a state where the workpiece is clamped is provided with a turning mechanism that turns about a θ-axis (which passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction).

[0010] Further, in the above workpiece transfer device, The claw movement mechanism may move the pair of claw portions in a direction approaching each other with respect to the Y-axis direction, and abut the pair of claw portions against the outer peripheral surface of the workpiece to clamp the workpiece.

[0011] Further, in the above workpiece transfer device, The movement mechanism includes a first movement mechanism that moves the clamping mechanism in the Z-axis direction, a second movement mechanism that moves the clamping mechanism and the first movement mechanism in the Y-axis direction, and a third movement mechanism that moves the clamping mechanism, the first movement mechanism, and the second movement mechanism in the X-axis direction.

[0012] Further, in the above workpiece transfer device, The movement mechanism includes a first movement mechanism that moves the clamping mechanism in the Z-axis direction, a second movement mechanism that moves the clamping mechanism and the first movement mechanism in the X-axis direction, It may also include a third moving mechanism for moving the clamping mechanism, the first moving mechanism, and the second moving mechanism in the Y-axis direction.

[0013] Further, in the above workpiece transfer device, Each of the pair of claw portions may have a first contact portion that contacts the lower portion of the workpiece and a second contact portion that contacts the upper portion of the workpiece when the pair of claw portions move in a direction in which they approach each other.

[0014] Further, in the above workpiece transfer device, Each of the pair of claw portions may have tapered surfaces that open in a V shape toward each other and function as the first contact portion and the second contact portion.

[0015] Further, in the above workpiece transfer device, The moving mechanism may move the clamping mechanism that clamps the workpiece until the central axis of the workpiece coincides with the rotation axis of the cylindrical grinding device main body between the main shaft and the tail of the cylindrical grinding device main body.

[0016] Further, in the above workpiece transfer device, The moving mechanism may further move the clamping mechanism that clamps the workpiece until one end face of the workpiece abuts against the main shaft.

[0017] Further, in the above workpiece transfer device, The pair of claw portions may clamp the center of the workpiece.

[0018] The cylindrical grinding device according to the present disclosure is A cylindrical grinding device main body, A workpiece transfer device for transferring a cylindrical workpiece to be processed to the cylindrical grinding device main body, and The workpiece transfer device is A clamping mechanism including a pair of claw portions for clamping the workpiece, A swiveling mechanism for swiveling the clamping mechanism with the workpiece clamped, An X-ray device that measures the crystal plane orientation of the workpiece clamped between the spindle base and the tailstock of the cylindrical grinding device body in a state where the central axis of the workpiece coincides with the rotation axis of the cylindrical grinding device body, and outputs a correction value for correcting the deviation amount of the crystal axis of the workpiece with respect to the rotation axis of the cylindrical grinding device body, When the rotation axis of the cylindrical grinding device body is defined as the X-axis, an axis orthogonal to the X-axis is defined as the Y-axis, and an axis orthogonal to the plane including the X-axis and the Y-axis is defined as the Z-axis, The swiveling mechanism swivels the clamping mechanism with the workpiece clamped by an angle corresponding to the correction value about a θ-axis that passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction.

[0019] With such a configuration, it is possible to provide a cylindrical grinding device capable of automatically clamping a workpiece between a spindle unit (spindle base) and a tailstock unit (tailstock) in a state where the crystal axis of the workpiece coincides with the rotation axis of the cylindrical grinding device.

[0020] This is because it is provided with a swiveling mechanism that swivels the clamping mechanism with the workpiece clamped about a θ-axis (which passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction).

[0021] The deviation amount correction method according to the present disclosure is, A deviation amount correction method for correcting the deviation amount of the clamped workpiece with respect to the rotation axis of the cylindrical grinding device body using the workpiece transfer device, With the spindle base of the cylindrical grinding device body in contact with the top end surface of the cylindrical workpiece to be machined, and the tailstock of the cylindrical grinding device body in contact with the bottom end surface of the workpiece, the workpiece is clamped and positioned at the reference position, and the crystal plane orientation of the workpiece and the crystal plane orientation of the workpiece rotated by a predetermined angle from the reference position are measured, and a correction value for correcting the deviation amount of the crystal axis of the workpiece with respect to the rotation axis of the cylindrical grinding device body is output. A measurement step; A deviation amount correction step of controlling the turning mechanism so that the deviation amount is eliminated.

[0022] With such a configuration, it is possible to provide a deviation amount correction method capable of automatically clamping a workpiece between a spindle unit (spindle base) and a tailstock unit (tailstock) in a state where the crystal axis of the workpiece coincides with the rotation axis of the cylindrical grinding device.

[0023] This is because a turning mechanism is provided for turning the clamping mechanism in a clamped state of the workpiece about the θ axis (passing through the center of the workpiece clamped by the clamping mechanism and extending in the Z-axis direction).

[0024] Further, in the above deviation amount correction method, The first measurement step, the second measurement step, the deviation amount calculation step, and the deviation amount correction step may be repeatedly executed until the deviation amount of the workpiece after the deviation amount correction step becomes equal to or less than a set value.

[0025] Further, in the above deviation amount correction method, The deviation amount is the deviation angle of the central axis of the workpiece with respect to the rotation axis of the cylindrical grinding device body, In the deviation amount correction step, the turning mechanism may be controlled so that the clamping mechanism that has clamped the workpiece turns by the deviation angle.

Effects of the Invention

[0026] According to the present disclosure, there can be provided a workpiece transfer device, a cylindrical grinding device, and a deviation amount correction method capable of automatically clamping a workpiece between a spindle unit (spindle base) and a tailstock unit (tailstock base) in a state where the crystal axis of the workpiece coincides with the rotation axis of the cylindrical grinding device.

Brief Description of the Drawings

[0027]

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Embodiments for Carrying Out the Invention

[0028] (Embodiment 1) Hereinafter, the cylindrical grinding apparatus 1 according to Embodiment 1 of the present disclosure will be described with reference to the accompanying drawings. In each figure, the corresponding components are denoted by the same reference numerals, and redundant descriptions are omitted. <Cylindrical Grinding Apparatus 1> FIG. 1 is a perspective view of the cylindrical grinding apparatus 1.

[0029] As shown in FIG. 1, the cylindrical grinding apparatus 1 includes a cylindrical grinding apparatus main body 100, a workpiece transfer apparatus 200, and a control apparatus 300 that controls the cylindrical grinding apparatus main body 100 and the workpiece transfer apparatus 200. In FIG. 1, the symbol AX 100 indicates the rotation axis (processing axis) of the cylindrical grinding apparatus main body 100. Hereinafter, it will be referred to as the rotation axis AX 100 . <Workpiece W> First, a configuration example of the cylindrical workpiece W to be processed will be described.

[0030] FIG. 2 is a perspective view of the workpiece W.

[0031] The workpiece W is, for example, a single-crystal silicon ingot (for example, a cylindrical ground silicon ingot) or a cylindrical workpiece (also called a block) obtained by cutting the single-crystal silicon ingot. The workpiece W has a top-side end face Wt and a bottom-side end face Wb that are perpendicular to its central axis AX W . Note that as the workpiece W, those having various diameters D and various lengths L (the length in the direction of the central axis AX W of the workpiece W) can be used. <Cylindrical Grinding Apparatus Main Body 100> Next, a configuration example of the cylindrical grinding apparatus main body 100 will be described.

[0032] Figure 3 is a schematic configuration diagram of the cylindrical grinding apparatus main body 100.

[0033] Hereinafter, for convenience of explanation, as shown in FIG. 1 and the like, the XYZ axes are defined. The X axis extends in the same direction as the rotation axis AX that the cylindrical grinding apparatus main body 100 has (horizontal axis). 100 The Y axis extends in a direction orthogonal to the X axis (horizontal axis). The Z axis extends in a direction orthogonal to the plane including the X axis and the Y axis (vertical axis).

[0034] The cylindrical grinding apparatus main body 100 is a known cylindrical grinding apparatus that can perform a predetermined process so as to satisfy predetermined processing conditions for the workpiece W. The processing conditions are, for example, conditions such as the grinding amount of the outer peripheral surface of the workpiece W, whether to perform additional processing such as a flat surface (OF) or a notch such as a V shape, and are input by an operator via, for example, the operation device 400. The predetermined process is, for example, grinding of the outer peripheral surface of the workpiece, and additional processing such as a flat surface (OF) or a notch such as a V shape.

[0035] As shown in FIG. 3, the cylindrical grinding apparatus main body 100 includes a spindle unit 110, a tailstock unit 120, a circular grinding unit 130, a notch unit 140, an X-ray device 150, and the like.

[0036] The spindle unit 110 is installed in a state fixed to the floor surface. On the other hand, the tailstock unit 120 is installed in a state movable in the X-axis direction.

[0037] FIG. 4(a) shows a state in which the workpiece W is clamped between the spindle unit 110 (spindle base 111) and the tailstock unit 120 (tailstock base 121) (when the central axis AX of the workpiece W W coincides with the rotation axis AX 100 ). FIG. 4(b) shows a state in which the workpiece W is clamped between the spindle unit 110 (spindle base 111) and the tailstock unit 120 (tailstock base 121) (when the central axis AX of the workpiece W W is deviated from the rotation axis AX 100 by an angle θ).

[0038] As shown in FIG. 4(a), the workpiece W is clamped between the spindle unit 110 (spindle base 111) and the tailstock unit 120 (tailstock base 121).

[0039] At this time, the mating surface between the spindle base 111 and the rotating shaft rotated by the spindle motor 113 is spherical (see FIG. 4(a)). Therefore, as shown in FIG. 4(b), even when the central axis AX of the workpiece W W is inclined at an angle θ with respect to the rotating shaft AX 100 the spindle base 111 rotates following the top-side end face Wt of the workpiece W and abuts (adheres closely) against the top-side end face Wt.

[0040] Similarly, the mating surface between the tailstock base 121 and the rotating shaft rotated by the tailstock motor 123 is spherical (see FIG. 4(a)). Therefore, as shown in FIG. 4(b), even when the central axis AX of the workpiece W W is inclined at an angle θ with respect to the rotating shaft AX 100 the tailstock base 121 rotates following the bottom-side end face Wb of the workpiece W and abuts (adheres closely) against the bottom-side end face Wb.

[0041] As shown in FIG. 3, the spindle unit 110 includes a spindle base 111, a spindle body 112, and a spindle motor 113. The spindle base 111 is attached to a rotating shaft that is rotated about the rotating shaft AX 100 by the spindle motor 113. The spindle motor 113 is, for example, a servo motor.

[0042] The tailstock unit 120 includes a tailstock base 121, a tailstock body 122, and a tailstock motor 123. The tailstock base 121 is attached to a rotating shaft that is rotated about the rotating shaft AX 100 by the tailstock motor 123. The tailstock motor 123 is, for example, a servo motor. The spindle motor 113 and the tailstock motor 123 are controlled to rotate in synchronization with each other.

[0043] The workpiece W has its central axis AXW and the rotation axis AX 100 is preferably clamped between the spindle base 111 and the tailstock base 121 in a state where it coincides with the rotation axis AX (see Fig. 5(a)). However, there are cases where it is clamped between the spindle base 111 and the tailstock base 121 in a state where the central axis AX W and the rotation axis AX 100 do not coincide (see Figs. 5(b) and 5(c)).

[0044] Fig. 5(a) shows a state where the workpiece W is clamped between the spindle base 111 and the tailstock base 121 in a state where its central axis AX W and the rotation axis AX 100 coincide. Fig. 5(b) shows a state where the workpiece W is clamped between the spindle base 111 and the tailstock base 121 in a state where its central axis AX W is displaced by an angle θ with respect to the rotation axis AX 100 . Fig. 5(b) shows that the center point CP (the center point on the central axis AX W ) of the workpiece W is on the rotation axis AX 100 and is displaced by an angle θ around this center point CP. This displacement angle θ is corrected as described later. Note that the rectangle A1 drawn with a dotted line in Fig. 5(b) represents the workpiece W in Fig. 5(a).

[0045] Similarly, Fig. 5(c) shows a state where the workpiece W is clamped between the spindle base 111 and the tailstock base 121 in a state where its central axis AX W is displaced by an angle θ with respect to the rotation axis AX 100 . Fig. 5(c) shows that the center point CP (the center point on the central axis AX W ) of the workpiece W is not on the rotation axis AX 100 but is displaced by ΔY in the Y-axis direction from the rotation axis AX 100 and is displaced by an angle θ around this center point CP. This displacement angle θ and displacement distance ΔY are corrected as described later. Note that the rectangle A2 drawn with a dotted line in Fig. 5(c) represents the workpiece W in Fig. 5(b).

[0046] Note that in Figs. 5(b) and 5(c), Δct is the center of the top-side end face Wt and the rotation axis AX 100represents the distance to. On the other hand, Δcb represents the distance between the center of the bottom-side end face Wb and the rotation axis AX 100 represents the distance to. ΔY can be calculated from Δct - Δcb. In the case of Fig. 5(b), that is, when the center point CP (the center point on the central axis AX W of the workpiece W) is on the rotation axis AX 100 (that is, when the center point CP of the workpiece W is the true center), there is a relationship of Δct = Δcb. On the other hand, in the case of Fig. 5(c), that is, when the center point CP (the center point on the central axis AX W of the workpiece W) is not on the rotation axis AX 100 there is a relationship of Δct > Δcb (or Δct < Δcb).

[0047] The circular grinding unit 130 is a device for performing circular grinding or orifla (orientation flat) machining on the workpiece W clamped between the spindle base 111 and the tailstock 121, and is held by the circular grinding base 132. The circular grinding unit 130 includes a circular grinding wheel 131 and a circular grinding motor 133 for rotating the circular grinding wheel 131.

[0048] Fig. 6(a) is a diagram showing the state where the circular grinding unit 130 is performing circular grinding or orifla (orientation flat) machining on the workpiece W.

[0049] The circular grinding wheel 131 rotated by the circular grinding motor 133 cuts into the rotating workpiece W by the grinding amount x1 instructed as input to perform circular grinding (cylindrical grinding mode). On the other hand, the circular grinding unit 130 cuts into the non-rotating workpiece W by the grinding amount x1 instructed as input to perform orifla (orientation flat) machining (orifla grinding mode).

[0050] The notch unit 140 is a device for performing notch machining on the workpiece W clamped between the spindle base 111 and the tailstock 121, and is held by the notch frame 142. The notch unit 140 includes a notch grinding wheel 141, a notch motor 143 for rotating the notch grinding wheel 141, etc.

[0051] FIG. 6(b) is a diagram showing a state in which the notch unit 140 is performing a notching process on the workpiece W. The notch grindstone 141 rotated by the notch motor 143 cuts into the non-rotating workpiece W by the grinding amount x2 indicated by an input instruction, and performs an orientation flat (ori flat) process.

[0052] The X-ray device 150 is a device for measuring the crystal plane orientation of the workpiece W, and is provided so as to be movable in the X-axis direction. As the X-ray device 150, for example, a crystal orientation measuring device (manufactured by Toshiba IT Control Systems Corporation, model SU-021) can be used. This crystal orientation measuring device simultaneously measures the axis orientation of the workpiece W before the cut surface orientation (axis orientation) wafer process and the crystal orientation of the V-notch. <Workpiece transfer device 200> Next, a configuration example of the workpiece transfer device 200 will be described.

[0053] FIG. 7 is a perspective view of the workpiece transfer device 200.

[0054] As shown in FIG. 7, the workpiece transfer device 200 includes a fixed frame 210 supported by four vertical columns 201 extending in the Z-axis direction, a first movable frame 220 attached to the fixed frame 210 so as to be movable in the X-axis direction, a second movable frame 230 attached to the first movable frame 220 so as to be movable in the Y-axis direction, a third movable frame 240 attached to the second movable frame 230 so as to be movable in the Z-axis direction, and a clamp mechanism 250 fixed to the third movable frame 240. <Fixed frame 210> The fixed frame 210 is a rectangular frame configured by combining a pair of first frames 211a and 211b extending in the X-axis direction and a pair of second frames 212a and 212b extending in the Y-axis direction.

[0055] The four vertical columns 201 that support the fixed frame 210 are each fixed to the floor surface by an anchor (not shown) in a state where the length in the Z-axis direction is adjusted by an adjuster (not shown) provided at the bottom of the vertical column so that the fixed frame 210 is horizontal. Each vertical column 201 is fixed to the cylindrical grinding apparatus main body 100 by a fastening member such as a bolt. <First movable frame 220> As shown in FIG. 7, the first movable frame 220 is a rectangular frame configured by combining a pair of third frames 221a and 221b extending in the X-axis direction and a pair of fourth frames 222a and 222b extending in the Y-axis direction.

[0056] The first movable frame 220 is attached to the fixed frame 210 so as to be slidable in the X-axis direction. Specifically, the first movable frame 220 is slidably attached to guide rails 223a and 223b extending in the X-axis direction provided on the upper surface of the fixed frame 210 (first frames 211a and 211b).

[0057] The first movable frame 220 moves in the X-axis direction along the guide rails 223a and 223b when a ball screw 224 extending in the X-axis direction connected to the first movable frame 220 is rotated forward and backward by a drive motor 225 (for example, a servo motor) attached to the fixed frame 210 (first frame 211a).

[0058] Mainly, the guide rails 223a and 223b, the ball screw 224, and the drive motor 225 constitute a movable frame moving mechanism M 220 for moving the first movable frame 220 in the X-axis direction. The movable frame moving mechanism M 220 is an example of the first moving mechanism of the present disclosure. <Outer diameter measuring mechanism 270> FIG. 8 is a perspective view of the first movable frame 220 (including the outer diameter measuring mechanism 270) extracted from FIG. 7 and the accompanying configuration (the second movable frame 230, etc.).

[0059] As shown in FIG. 8, an outer diameter measuring mechanism 270 is provided on the first movable frame 220 (the fourth frame 222a).

[0060] The outer diameter measuring mechanism 270 is a device that measures the outer diameter of a workpiece W (the outer diameters of the top-side end surface Wt and the bottom-side end surface Wb respectively) clamped between the spindle base 111 and the tailstock base 121.

[0061] The outer diameter measuring mechanism 270 includes a lifting frame 271, measuring arms 272a and 272b, measuring elements 273a and 273b, and a carriage 274 to which these are attached.

[0062] The carriage 274 is slidably attached to a guide rail 275 extending in the Z-axis direction provided on the first movable frame 220 (the fourth frame 222a).

[0063] The outer diameter measuring mechanism 270 (the measuring elements 273a, 273b, etc.) moves (lifts and lowers) in the Z-axis direction along the guide rail 275 by the forward and reverse rotation of a ball screw (not shown) extending in the Z-axis direction and connected to the outer diameter measuring mechanism 270, which is attached to a drive motor 276 (for example, a servo motor) on the first movable frame 220 (the third frame 221a).

[0064] Although not shown, the outer diameter measuring mechanism 270 includes a first measuring element moving mechanism that moves one measuring arm 272a (and the measuring element 273a) in the Y-axis direction, and a second measuring element moving mechanism that moves the other measuring arm 272b (and the measuring element 273b) in the Y-axis direction. The first measuring element moving mechanism and the second measuring element moving mechanism each include a measuring element drive motor (for example, a servo motor). By controlling each measuring element drive motor, the respective measuring elements 273a and 273b move individually in the Y-axis direction.

[0065] According to the outer diameter measurement mechanism 270, each of the measuring elements 273a and 273b moves individually in the Y-axis direction and contacts the outer peripheral surface of the workpiece W, so that the positions (position data) of the respective contact points can be obtained. Then, based on this position (position data), the control device 300 executes a predetermined calculation to measure (calculate) the outer diameter of the workpiece W clamped between the spindle base 111 and the tailstock 121 (the outer diameters of the top-side end surface Wt and the bottom-side end surface Wb of the workpiece W), etc. <Second movable frame 230> FIG. 9 is a perspective view (a perspective view from another angle of FIG. 8) of the first movable frame 220 extracted from FIG. 7 and the associated configuration (such as the second movable frame 230).

[0066] As shown in FIG. 9, the second movable frame 230 is a rectangular cylindrical frame extending in the Z-axis direction.

[0067] The second movable frame 230 is attached to the first movable frame 220 so as to be slidable in the Y-axis direction. Specifically, the second movable frame 230 is slidably attached to guide rails 231a and 231b extending in the Y-axis direction provided on the upper surface of the first movable frame 220 (the fourth frames 222a and 222b).

[0068] The second movable frame 230 moves in the Y-axis direction along the guide rails 231a and 231b when a ball screw 232 extending in the Y-axis direction connected to the second movable frame 230 is rotated forward and backward by a drive motor 233 (for example, a servo motor) attached to the first movable frame 220 (the fourth frame 222b).

[0069] Primarily, the guide rails 231a and 231b, the ball screw 232, and the drive motor 233 constitute a movable frame moving mechanism M 230 for moving the second movable frame 230 in the Y-axis direction. The movable frame moving mechanism M 230 is an example of the second moving mechanism of the present disclosure. <Third movable frame 240> FIG. 10 is a perspective view of a third movable frame 240 extracted from FIG. 7 and its associated configuration (such as a clamping mechanism 250).

[0070] The third movable frame 240 is a rectangular tubular frame extending in the Z-axis direction and is disposed within a second movable frame 230 which is also a rectangular tubular frame extending in the Z-axis direction.

[0071] The third movable frame 240 is attached to the second movable frame 230 so as to be slidable in the Z-axis direction. Specifically, the third movable frame 240 is slidably attached to guide rails 241a, 241b (see FIG. 10) extending in the Z-axis direction attached to one inner surface of the second movable frame 230 and a guide rail (not shown) attached to the other inner surface.

[0072] The third movable frame 240 (and the clamping mechanism 250 attached thereto) moves in the Z-axis direction along the guide rails 241a, 241b, etc. by the forward and reverse rotation of a ball screw (not shown) extending in the Z-axis direction connected to the third movable frame 240 by a drive motor 242 (for example, a servo motor) attached to the second movable frame 230.

[0073] Mainly, the guide rails 241a, 241b, the ball screw (not shown), and the drive motor 242 constitute a movable frame moving mechanism M 240 for moving the third movable frame 240 (and the clamping mechanism 250 attached thereto) in the Z-axis direction. The movable frame moving mechanism M 240 is an example of the third moving mechanism of the present disclosure. <Clamping mechanism 250> As shown in FIG. 10, a clamping mechanism 250 is attached to the lower end portion of the third movable frame 240 via a turning mechanism (a turning motor 260).

[0074] The clamping mechanism 250 is attached to a buffer shaft mounting base 245 so as to be turnable about the θ-axis AX θ (see FIG. 11). The θ-axis AX θAs will be described later, it passes through the center (central axis AX W on the center) of the work W clamped by the clamp mechanism 250 and extends in the Z-axis direction. FIG. 11 is an example of a turning mechanism (turning motor 260) for turning the clamp mechanism 250.

[0075] Specifically, the clamp mechanism 250 is attached in a state where the rotation axis of a turning motor 260 (for example, a hollow shaft motor) fixed to its top plate 262 is fixed to the buffer shaft base base 245. Thereby, when the turning motor 260 fixed to the top plate 262 rotates forward and backward, the clamp mechanism 250 rotates around the θ-axis AX θ by a predetermined angle (for example, angle θ. Refer to FIGS. 5(b) and 5(c)) with respect to the buffer shaft base base 245. The turning motor 260 is an example of the turning mechanism of the present disclosure. As the turning mechanism, other drive mechanisms such as a worm gear, a wheel gear, and a general-purpose motor may be used instead of the turning motor 260 (for example, a hollow shaft motor).

[0076] The buffer shaft base base 245 to which the clamp mechanism 250 is attached as described above is attached to the Z-axis base base 243 so as to be slidable in the X-axis direction. Specifically, a slide rail 244 extending in the X-axis direction provided on the upper surface of the buffer shaft base base 245 is slidably engaged with the lower surface of the Z-axis base base 243 fixed to the third movable frame 240. Thereby, as will be described later, when the work W (top side end face Wt) clamped by the clamp mechanism 250 (pair of claw portions 251a, 251b) is pressed against the spindle base 111, the buffer shaft base base 245 (and the clamp mechanism 250 attached thereto) slides in the X-axis direction with respect to the Z-axis base base 243. Thereby, when the work W (top side end face Wt) clamped by the clamp mechanism 250 (pair of claw portions 251a, 251b) is pressed against the spindle base 111, excessive force is prevented from being applied to the clamp mechanism 250.

[0077] FIG. 12 is a perspective view of the clamp mechanism 250.

[0078] As shown in FIG. 12, the clamp mechanism 250 includes a pair of claw portions 251a and 251b that clamp the workpiece W, and a claw movement mechanism M that moves the pair of claw portions 251a and 251b in a direction approaching each other or a direction away from each other. 250 It is provided with.

[0079] One of the claw portions 251a is attached to the lower end portion of the third movable frame 240 so as to be slidable in the Y-axis direction. Specifically, one of the claw portions 251a is slidably attached to the lower surfaces of guide rails 253a and 253b extending in the Y-axis direction provided on the lower surface of a frame 252 fixed to the lower end portion of the third movable frame 240, and is fixed to the lower surface of one movable frame 254a.

[0080] Similarly, the other claw portion 251b is also attached to the lower end portion of the third movable frame 240 so as to be slidable in the Y-axis direction. Specifically, the other claw portion 251b is slidably attached to the lower surfaces of guide rails 253a and 253b extending in the Y-axis direction provided on the lower surface of a frame 252 fixed to the lower end portion of the third movable frame 240, and is fixed to the lower surface of the other movable frame 254b.

[0081] The pair of claw portions 251a and 251b move in a direction approaching each other (Y-axis direction) along the guide rails 253a and 253b together with the movable frames 254a and 254b when a left and right coaxial ball screw (not shown) extending in the Y-axis direction and connected to the movable frames 254a and 254b to which the pair of claw portions 251a and 251b are fixed is rotated forward by a drive motor 255 attached to the frame 252. Further, the pair of claw portions 251a and 251b move in a direction away from each other (Y-axis direction) along the guide rails 253a and 253b together with the movable frames 254a and 254b when a left and right coaxial ball screw (not shown) connected to the movable frames 254a and 254b to which the pair of claw portions 251a and 251b are fixed is rotated reversely by the drive motor 255.

[0082] Mainly, a guide rail 253a, 253b, a pair of coaxial ball screws (not shown), and a drive motor 255 constitute a claw moving mechanism M that moves a pair of claw portions 251a, 251b in a direction approaching each other or a direction away from each other. 250 constitute it.

[0083] FIG. 13 is a schematic diagram showing a state in which a workpiece W is clamped by a pair of claw portions 251a, 251b.

[0084] As shown in FIG. 13, a pair of claw portions 251a, 251b each have a first contact portion 256a that contacts the lower part of the workpiece W and a second contact portion 256b that contacts the upper part of the workpiece W. Specifically, a pair of claw portions 251a, 251b each have a tapered surface that opens in a V shape (the cross-sectional shape in the YZ plane is V-shaped) toward each other. This tapered surface functions as the first contact portion 256a and the second contact portion 256b. Hereinafter, the first contact portion 256a and the second contact portion 256b are also referred to as tapered surfaces 256a, 256b.

[0085] A pair of claw portions 251a, 251b are each made of synthetic resin or metal with the tapered surfaces 256a, 256b covered with synthetic resin. When the workpiece W is a cylindrical workpiece other than a silicon ingot, a pair of claw portions 251a, 251b may be made of metal without the tapered surfaces 256a, 256b being covered with synthetic resin.

[0086] A pair of claw portions 251a, 251b move in a direction approaching each other and clamp the workpiece W in a state where the tapered surfaces 256a, 256b are each in contact with the outer peripheral surface of the workpiece W (see FIG. 13).

[0087] According to a pair of claw portions 251a, 251b, regardless of the size of the diameter of the workpiece W, the workpiece W can always be clamped in a state where the central axis AX W of the workpiece W is positioned at the same position.

[0088] FIG. 14 is a perspective view of a sensor attached to a pair of claw portions 251a, 251b.

[0089] Further, a sensor for measuring the length L (see FIG. 2) of the workpiece W is attached to the pair of claw portions 251a and 251b. As shown in FIG. 14, this sensor is composed of a light emitter 257a attached to the lower part of one claw portion 251a and a light receiver 257b attached to the lower part of the other claw portion 251b. Conversely, the light emitter 257a may be attached to the lower part of the other claw portion 251a, and the light receiver 257b may be attached to the lower part of one claw portion 251a.

[0090] FIG. 15 is a schematic diagram showing a state in which the length L of the workpiece W is measured by sensors attached to the pair of claw portions 251a and 251b.

[0091] According to this sensor, for example, as shown in FIG. 15, the clamp mechanism 250 (the light emitter 257a and the light receiver 257b) is moved in the direction of the thick arrow (X-axis direction) above the workpiece W, and the workpiece W is at the position p1 (coordinate position in the three-dimensional coordinate system of the workpiece transfer device 200) where the light Ray (see FIG. 14) from the light emitter 257a received by the light receiver 257b is blocked, and the position p2 (coordinate position in the three-dimensional coordinate system of the workpiece transfer device 200) where the light receiver 257b receives the light Ray (see FIG. 14) from the light emitter 257a are calculated respectively, so that the length L of the workpiece W can be measured. <Control device 300> Next, the control device 300 will be described.

[0092] FIG. 16 is a system configuration diagram including the control device 300.

[0093] Although not shown, the control device 300 includes a processor, a RAM, a ROM, etc. As shown in FIG. 16, the control device 300 is provided with a drive motor 225 that constitutes a movable frame moving mechanism M for moving the first movable frame 220 in the X-axis direction, and a movable frame moving mechanism M for moving the second movable frame 230 in the Y-axis direction 220 constituting the drive motor 225, and a movable frame moving mechanism M for moving the second movable frame 230 in the Y-axis direction 230The movable frame moving mechanism M that moves the drive motor 233 and the third movable frame 240 (and the clamping mechanism 250 attached thereto) that constitute it in the Z-axis direction 240 The claw moving mechanism M that moves the drive motor 242 and the pair of claw portions 251a and 251b that constitute it in the direction of approaching each other or separating from each other 250 The drive motor 255 that constitutes it, the turning motor 260 that turns the clamping mechanism 250, the spindle unit 110 (spindle motor 113), the tail unit 120 (tail motor 123), the cylindrical grinding unit 130 (cylindrical grinding motor 133), the notch unit 140 (notch motor 143), the X-ray device 150, the turning motor 260, the outer diameter measuring mechanism 270 (drive motor 276, measuring element drive motor), the operation device 400, the pallet loader 500, and the sensors (light projector 257a, light receiver 257b) are electrically connected.

[0094] The processor is, for example, a CPU. The processor may be one or multiple. For example, the processor functions as control means for controlling each drive motor 225, 233, 242, 255, the spindle unit 110 (spindle motor 113), the tail unit 120 (tail motor 123), the cylindrical grinding unit 130 (cylindrical grinding motor 133), the notch unit 140 (notch motor 143), the X-ray device 150, the turning motor 260, the outer diameter measuring mechanism 270 (drive motor 276, measuring element drive motor), etc. by executing a program read from the ROM to the RAM.

[0095] Next, an operation example of the cylindrical grinding device 1 having the above configuration will be described.

[0096] FIG. 17 is a flowchart of an operation example of the cylindrical grinding device 1. FIG. 18 is a perspective view of the cylindrical grinding device 1 installed in the factory. FIGS. 19 and 20 are diagrams for explaining the operation of the clamping mechanism 250. FIGS. 21, 22(a), and 22(b) are diagrams for explaining the operation of the spindle unit 110 and the tail unit 120.

[0097] In Fig. 18, the symbols AGV1 and AGV2 indicate Automated Guided Vehicles, and the symbol 500 indicates a pallet loader. Hereinafter, they will be referred to as the Automated Guided Vehicles AGV1 and AGV2 and the pallet loader 500.

[0098] The Automated Guided Vehicle AGV1 transports a pallet P1 on which a work piece W to be processed (work piece W1 in Fig. 18) is placed from a predetermined location in a factory where cylindrical work pieces of various diameters and various lengths (length in the central axis direction) are stored to the pallet loader 500 installed adjacent to the cylindrical grinding device 1, and delivers the entire pallet P1 to the pallet loader 500 by known means (work piece W2 and pallet P2 in Fig. 18).

[0099] The pallet loader 500 transports the pallet P2 delivered from the Automated Guided Vehicle AGV1 to a predetermined standby position (work piece W3 and pallet P3 in Fig. 18). The central axis AX of the work piece W (work piece W3 in Fig. 18) placed on the pallet P3 transported to the standby position W extends in the X-axis direction.

[0100] Hereinafter, an operation example of the cylindrical grinding device 1 installed in the factory will be described with reference to Fig. 17 and the like.

[0101] First, information regarding the work piece W to be processed is acquired (step S10). Information regarding the work piece W to be processed is, for example, the diameter D of the work piece W to be processed (see Fig. 2), which is attached as a barcode to a predetermined location on the pallet. For example, information (barcode) regarding the work piece W to be processed is read by a barcode reading device (not shown) attached to a predetermined location of the pallet loader 500 at the timing of delivering the pallet P1 to the pallet loader 500. The control device 300 acquires this read information regarding the work piece W to be processed. Note that the control device 300 may also acquire information regarding the work piece W to be processed transmitted from another device.

[0102] Next, machining conditions for the workpiece W to be machined (for example, the grinding amount of the outer peripheral surface of the workpiece W, whether to perform additional machining such as a cut (notch) on the flat surface (OF) or V-groove, etc.) are acquired (step S11). The machining conditions are input by the operator via the operation device 400, for example. The control device 300 acquires the input machining conditions. Note that the control device 300 may also acquire machining conditions transmitted from another device.

[0103] Next, the length L of the workpiece W (see FIG. 2) is measured (step S11A). For example, as shown in FIG. 15, the clamp mechanism 250 (the light projector 257a and the light receiver 257b) is moved in the direction of the thick arrow (X-axis direction) above the workpiece W. As a result, the workpiece W (workpiece W3 in FIG. 18) conveyed to the standby position blocks the light Ray (see FIG. 14) from the light projector 257a received by the light receiver 257b at the position p1 (coordinate position in the three-dimensional coordinate system of the workpiece conveying device 200), and the light receiver 257b receives the light Ray (see FIG. 14) from the light projector 257a at the position p2 (coordinate position in the three-dimensional coordinate system of the workpiece conveying device 200). By calculating these positions respectively, the length L of the workpiece W is measured. This is realized by the control device 300 (processor) executing a program read from the ROM to the RAM.

[0104] Next, as shown in FIGS. 19(a) and 19(b), the clamp mechanism 250 is moved above the workpiece W (workpiece W3 in FIG. 18) conveyed to the standby position (step S12).

[0105] Specifically, as shown in FIG. 19(a), with respect to the Y-axis direction, the center Pa between one claw portion 251a and the other claw portion 251b coincides with the vertical line V1 passing through the central axis AX of the workpiece W. W And, as shown in FIG. 19(b), with respect to the X-axis direction, the clamp mechanism 250 is moved until the center Pb of the pair of claw portions 251a and 251b coincides with the vertical line V2 passing through the center Pc of the workpiece W (the center of the length L of the workpiece W to be machined automatically measured in step S11A). This is realized by the control device 300 controlling each control motor (servo motor) 225, 233, 242.

[0106] Next, as shown in Fig. 20(a), with respect to the Z-axis direction, the center Pa between one claw portion 251a and the other claw portion 251b is moved (lowered) until it coincides with the central axis AX of the workpiece W by the clamp mechanism 250 (step S13). This is achieved by the control device 300 controlling the drive motor 242. The moving distance d (lowering distance; refer to Fig. 20(a)) of the clamp mechanism 250 at that time can be calculated based on the diameter D of the workpiece W to be processed obtained in step S10 and the like. W Next, as shown in Fig. 20(b), with respect to the Y-axis direction, the pair of claw portions 251a and 251b are moved in a direction approaching each other, and the pair of claw portions 251a and 251b (the respective tapered surfaces 256a and 256b) are brought into contact with the outer peripheral surface of the workpiece W to clamp the workpiece W (step S14). This is achieved by the control device 300 controlling the control motor (servo motor) 255.

[0107] Next, the workpiece W clamped as described above is conveyed to the cylindrical grinding device main body 100 (between the spindle base 111 and the tailstock 121) (step S15).

[0108] At that time, in the cylindrical grinding device 1, for example, before the process of step S10, by performing the same processes as steps S12 to S15 on a master workpiece (not shown), the central axis AX of the master workpiece is between the spindle base 111 and the tailstock 121 of the cylindrical grinding device main body 100.

[0109] It is set to move the clamp mechanism 250 that clamps the master workpiece so that it coincides with the rotation axis AX of the cylindrical grinding device main body 100. MW and the rotation axis AX of the cylindrical grinding device main body 100 100 coincide.

[0110] Therefore, in step S15, as shown in Fig. 21, first, between the spindle base 111 and the tailstock 121 of the cylindrical grinding device main body 100, the central axis AX of the master workpiece set as described above MW and the rotation axis AX of the cylindrical grinding device main body 100100 The clamping mechanism 250 that clamps the workpiece W is moved so as to match. This is realized by the control device 300 controlling each control motor (servo motor) 225, 233, 242. Next, as shown in FIG. 22(b), the central axis AX of the set master workpiece MW and the rotation axis AX of the cylindrical grinding device main body 100 100 The workpiece W in a state where they coincide is clamped between the spindle 101 (spindle base 111) and the tailstock 102 (tailstock base 121) (step S16).

[0111] Specifically, first, as shown in FIG. 22(a), the clamping mechanism 250 that clamps the workpiece W is moved in the X-axis direction until the top-side end face Wt of the workpiece W abuts against the spindle base 111. This is realized by the control device 300 controlling the control motor (servo motor) 225.

[0112] Next, as shown in FIG. 22(b), the tailstock unit 120 is moved in the X-axis direction so that the tailstock base 121 abuts against the bottom-side end face Wb of the workpiece W and presses with sufficient force against the workpiece weight and machining external force. This is realized by the control device 300 controlling the tailstock motor 123. At that time, the control device 300 measures (calculates) the length L of the workpiece W based on the position when the tailstock base 121 contacts the bottom-side end face Wb of the workpiece W. The length L of the workpiece W measured here is measured with higher accuracy than the length L of the workpiece W measured in step S11A. In the following description, the length L measured with this high accuracy is used as the length L of the workpiece W.

[0113] Next, the clamping of the pair of claw portions 251a, 251b to the workpiece W is released (step S17). This is realized by the control device 300 controlling the control motor (servo motor) 255.

[0114] Next, the control device 300 executes a deviation amount measurement process (step S17A).

[0115] FIG. 23 is a flowchart of the deviation measurement process.

[0116] The deviation measurement process measures (calculates) the deviation amount (deviation angle θ and deviation distance ΔY; see FIGS. 5(b) and 5(c)) of the clamped workpiece W with respect to the rotation axis AX of the cylindrical grinding apparatus main body 100. 100

[0117] The deviation measurement process (steps S17A1 to S17A3) is executed n times for the workpiece W. Hereinafter, the case where n = 2 will be described as an example. n (the number of measurements) is input by the operator via the operation device 400, for example. n is input at any timing before the deviation measurement process is executed. Note that n stored in a predetermined storage unit in advance may be used. Note that n may be an integer of 2 or more. That is, the minimum value of n is 2. Also, considering practicality, the maximum value of n is about 16.

[0118] When n = 2, the deviation measurement process (steps S17A1 to S17A3) is performed for the workpiece W in the state of FIG. 24(a) (hereinafter, also referred to as the origin state or origin position) (hereinafter, referred to as workpiece W W3-W1 ), and the workpiece W in the state rotated counterclockwise by 180 degrees / n (here, 90 degrees) from the origin state (see FIG. 24(b); hereinafter, referred to as workpiece W W2-W4 ). (A total of 2 times).

[0119] First, the following processing of step S17A1 and subsequent steps is executed for the workpiece W in the origin state W3-W1 (see FIG. 24(a)).

[0120] That is, the outer diameter of the top side end face Wt is measured (step S17A1). Specifically, regarding the Z-axis direction, the center between one measuring element 273a and the other measuring element 273b is near the top side end face Wt of the workpiece W W3-W1 in the vicinity of the rotation axis AX 100 ​Lower the outer diameter measuring mechanism 270 until it matches. Next, move the measuring arms 272a and 272b in a direction approaching each other (Y-axis direction). Thereby, the measuring elements 273a and 273b are brought into contact with the outer peripheral surface near the top side end surface Wt of the work W W3-W1 . Thereby, the positions (position data) of the respective contact points are acquired. Based on this position (position data), the control device 300 determines the center position of the top side end surface Wt of the work W W3-W1 , and calculates the distance Δct between the center position and the rotation axis AX 100 .

[0121] Next, measure the outer diameter of the bottom side end surface Wb (step S17A2). FIG. 25 shows a state in which the outer diameter measuring mechanism 270 is measuring the outer diameter of the bottom side end surface Wb. In FIG. 25, for convenience of explanation, the work W in an unclamped state is depicted, but actually, the outer diameter measuring mechanism 270 measures the outer diameter of the top side end surface Wt and the outer diameter of the bottom side end surface Wb of the work W W3-W1 in a state where the spindle base 111 is in contact with the top side end surface Wt and the tailstock base 121 is in contact with the bottom side end surface Wb (that is, in a clamped state).

[0122] Specifically, with respect to the Z-axis direction, lower the outer diameter measuring mechanism 270 until the center between one measuring element 273a and the other measuring element 273b coincides with the rotation axis AX W3-W1 near the bottom side end surface Wb of the work W (see FIG. 25). Next, move the measuring arms 272a and 272b in a direction approaching each other (Y-axis direction) (see FIG. 25). Thereby, the measuring elements 273a and 273b are brought into contact with the outer peripheral surface near the bottom side end surface Wb of the work W 100 . Thereby, the positions (position data) of the respective contact points are acquired. Based on this position (position data), the control device 300 determines the center position of the bottom side end surface Wb of the work W W3-W1 , and calculates the distance Δcb between the center position and the rotation axis AX W3-W1 . 100

[0123] ​Next, the control device 300 calculates the deviation amount based on the measured value (position data) (step S17A3). Specifically, the control device 300 calculates the deviation angle θ and the deviation distance ΔY (see FIGS. 5(b) and 5(c)) as the deviation amount.

[0124] The angle θ is the deviation angle of the central axis AX of the workpiece W with respect to the rotation axis AX 100 (see FIGS. 5(b) and 5(c)). ΔY is the distance between the center point CP of the workpiece W (the center point on the central axis AX W ) and the rotation axis AX W (see FIG. 5(c)). 100

[0125] The deviation angle θ can be calculated as follows.

[0126] As shown in FIG. 5(a), when the central axis AX of the workpiece W W coincides with the rotation axis AX 100 , the relationship Δct = Δcb = 0 holds.

[0127] On the other hand, as shown in FIG. 5(b), when the central axis AX of the workpiece W 100 is inclined by an angle θ with respect to the rotation axis AX W (when the center point CP is on the rotation axis AX 100 ), the relationship Δct = Δcb ≠ 0 holds. In this case, the deviation angle θ can be calculated by the following equation (1). TIFF0007711973000001.tif15113 As shown in FIG. 5(c), when the central axis AX of the workpiece W 100 is inclined by an angle θ with respect to the rotation axis AX W (when the center point CP is not on the rotation axis AX 100 ), the relationship Δct > Δcb (or Δct < Δcb) holds. Also in this case, the deviation angle θ can be calculated in the same manner as above.

[0128] Next, it is determined whether steps S17A1 to S17A3 have been executed n times (here, n = 2 times) (step S17A4). If they have not been executed n times (step S17A4: No), the work W is rotated by 180 degrees / n (here, 90 degrees) (S17A5), and the work W W2-W4 (see Fig. 24(b)), and steps S17A1 to S17A3 are executed in the same manner as above (second execution).

[0129] And when steps S17A1 to S17A3 have been executed n times (here, n = 2 times) (step S17A4: Yes), the process of Fig. 23 is terminated.

[0130] Fig. 26 is a table summarizing the measured values Δct, Δcb, θ, ΔY (stored in a predetermined storage unit) of each work W W3-W1 、W W2-W4 measured as a result of the process of Fig. 23. In Fig. 26, the measured value Δct W3-W1 、Δcb W3-W1 、θ W3-W1 、ΔY W3-W1 represents the measured values obtained by measuring the work W W3-W1 . Similarly, the measured values Δct W2-W4 、Δcb W2-W4 、θ W2-W4 、ΔY W2-W4 represent the measured values obtained by measuring the work W W2-W4 .

[0131] Next, returning to Fig. 17, it is determined whether the deviation amount measured in step S17A is ≤ a set value (a predetermined threshold value) (step S17B).

[0132] If the determination result of step S17B is No, the control device 300 executes deviation amount correction processing (step S17C).

[0133] Fig. 27 is a flowchart of the deviation amount correction processing.

[0134] The deviation amount correction processing is the rotation axis AX of the cylindrical grinding apparatus main body 100 measured in step S17A 100This is a process for correcting the amount of deviation (deviation angle θ and deviation distance ΔY; refer to FIGS. 5(b) and 5(c)) of the clamped workpiece W with respect to

[0135] Hereinafter, specific examples 1 to 6 of the deviation amount correction process will be described. <Specific Example 1> FIG. 29 is a diagram for explaining Specific Example 1 of the deviation amount correction process.

[0136] In Specific Example 1, the workpiece W to be subjected to the deviation amount measurement process (step S17A) and the deviation amount correction process (step S17c) is clamped between the spindle base 111 and the tailstock base 121 as shown in FIG. 29(a). At this time, when viewed from the direction of arrow Ar1 (refer to FIG. 29(b)), the central axis AX of the workpiece W W is deviated from the rotation axis AX 100 by an angle θ (θ W3-W1 ). Also, the center point CP (the center point on the central axis AX W ) of the workpiece W is on the rotation axis AX 100 .

[0137] On the other hand, when viewed from the direction of arrow Ar2 (refer to FIG. 29(b)), the central axis AX of the workpiece W W coincides with the rotation axis AX 100 .

[0138] As a result of performing the deviation amount measurement process (step S17A) on the workpiece W clamped as described above, the measured values shown in FIG. 29(c) are obtained. In FIG. 29(c), the measured value θ surrounded by a circle W3-W1 represents a non-zero numerical value.

[0139] First, regarding the Y-axis direction, the pair of claw portions 251a and 251b are moved in a direction approaching each other, and the pair of claw portions 251a and 251b (the respective tapered surfaces 256a and 256b) are brought into contact with the outer peripheral surface of the workpiece W W3-W1 (refer to FIGS. 29(a) and 29(b)) to clamp the workpiece W W3-W1 (step S17C1). In this way, the clamping mechanism 250 (the pair of claw portions 251a and 251b) clamps the workpiece WW3-W1 With the clamp in the clamped state, the θ-axis AX θ is the center (central axis AX W3-W1 on the center) of the work W clamped by the clamp mechanism 250 W and extends in the Z-axis direction.

[0140] Next, the clamping of the spindle headstock 111 and the tailstock 121 to the work W W3-W1 is released (step S17C2).

[0141] Next, reloading is executed (step S17C3). That is, the clamp mechanism 250 that clamps the work W W3-W1 is rotated about the θ-axis AX by the deviation angle θ (θ W3-W1 ) calculated in step S17A3 and enclosed by the circle in FIG. 29(c) so that the deviation angle θ (θ θ ) is eliminated. This is achieved by the control device 300 controlling the rotation motor 260. Thereby, the angle θ (θ W3-W1 ) is corrected. W3-W1 ) is corrected.

[0142] Next, as shown in FIG. 22(b), the work W W3-W1 is clamped between the spindle headstock 111 and the tailstock 121 (step S17C4). That is, first, the center axis AX of the work W after the correction of the angle θ (θ W3-W1 ) between the spindle headstock 111 and the tailstock 121 of the cylindrical grinding apparatus main body 100 W and the rotation axis AX of the cylindrical grinding apparatus main body 100 100 are made to coincide, and the clamp mechanism 250 that clamps the work W is moved. Next, with the center axis AX of the work W after the correction of the angle θ (θ W3-W1 ) and the rotation axis AX of the cylindrical grinding apparatus main body 100 W coinciding, the moved work W is clamped between the spindle 101 (spindle headstock 111) and the tail 102 (tailstock 121). 100 coinciding, the moved work W is clamped between the spindle 101 (spindle headstock 111) and the tail 102 (tailstock 121).

[0143] Next, the pair of claw portions 251a, 251b of the work WW3-W1 Release the clamp for it (step S17C5).

[0144] Next, returning to FIG. 17, execute the processes of steps S17A and 17B again.

[0145] And when the determination result in step S17B is Yes, that is, when the deviation amount re-measured in step S17A for the workpiece W W3-W1 becomes ≤ the set value, since it means that the central axis AX of the workpiece W W and the rotation axis AX of the cylindrical grinding apparatus main body 100 100 coincide (substantially coincide), execute the processes from step S18 and below. On the other hand, when the determination result in step S17B is No, the processes of steps S17C and 17A are repeatedly executed until the determination result in step S17B becomes Yes. <Specific Example 2> FIG. 30 is a diagram for explaining Specific Example 2 of the deviation amount correction process.

[0146] In Specific Example 2, the workpiece W targeted for the deviation amount measurement process (step S17A) and the deviation amount correction process (step S17c) is clamped between the spindle base 111 and the tailstock 121 as shown in FIG. 30(a). At this time, when viewed from the direction of arrow Ar1 (see FIG. 30(b)), the central axis AX of the workpiece W W and the rotation axis AX 100 coincide.

[0147] On the other hand, when viewed from the direction of arrow Ar2 (see FIG. 30(b)), the central axis AX of the workpiece W W is deviated from the rotation axis AX 100 by an angle θ (θ W2-W4 ). Also, the center point CP of the workpiece W (the center point on the central axis AX W ) is on the rotation axis AX 100 .

[0148] As a result of executing the deviation amount measurement process (step S17A) on the workpiece W clamped as described above, the measured values shown in FIG. 30(c) are obtained. In FIG. 30(c), the measured value θ surrounded by a circleW2-W4 represents a non-zero numerical value.

[0149] First, the workpiece W W3-W1 is rotated counterclockwise by 180 degrees / n (here, 90 degrees) from the origin state (see Fig. 30(b)) to the state of the workpiece W W2-W4 shown in Fig. 30(d). This is achieved by the control device 300 controlling the spindle motor 113 and the tailstock motor 123.

[0150] Next, regarding the Y-axis direction, the pair of claw portions 251a, 251b are moved in a direction approaching each other, and the pair of claw portions 251a, 251b (each taper surface 256a, 256b) are brought into contact with the outer peripheral surface of the workpiece W W2-W4 (see Fig. 30(d)) to clamp the workpiece W W2-W4 (step S17C1). In this way, with the clamp mechanism 250 (the pair of claw portions 251a, 251b) clamping the workpiece W W2-W4 , the θ-axis AX θ passes through the center of the workpiece W clamped by the clamp mechanism 250 W2-W4 (the center on the central axis AX W ) and extends in the Z-axis direction.

[0151] Next, the clamping of the spindle base 111 and the tailstock base 121 to the workpiece W W2-W4 is released (step S17C2).

[0152] Next, reloading is executed (step S17C3). That is, the clamp mechanism 250 that has clamped the workpiece W W2-W4 is rotated about the θ-axis AX W2-W4 by the deviation angle θ (θ θ ) calculated in step S17A3 so that the deviation angle θ (θ W2-W4 ) enclosed by the circle in Fig. 30(c) is eliminated. This is achieved by the control device 300 controlling the turning motor 260. As a result, the angle θ (θ W2-W4 ) is corrected.

[0153] Next, as shown in Fig. 22(b), the workpiece W W2-W4 is clamped between the spindle base 111 and the tailstock 121 (step S17C4). That is, first, between the spindle base 111 and the tailstock 121 of the cylindrical grinding apparatus main body 100, the central axis AX W2-W4 of the workpiece W after the correction of the angle θ (θ W ) and the rotation axis AX 100 of the cylindrical grinding apparatus main body 100 are made to coincide, and the clamping mechanism 250 that clamps the workpiece W is moved. Next, with the central axis AX W2-W4 of the workpiece W after the correction of the angle θ (θ W ) and the rotation axis AX 100 of the cylindrical grinding apparatus main body 100 being in coincidence, the moved workpiece W is clamped between the spindle 101 (spindle base 111) and the tailstock 102 (tailstock 121).

[0154] Next, the clamping of the pair of claw portions 251a, 251b with respect to the workpiece W W2-W4 is released (step S17C5).

[0155] Next, returning to Fig. 17, the processes of steps S17A and 17B are executed again.

[0156] And when the determination result of step S17B is Yes, that is, when the deviation amount re-measured in step S17A for the workpiece W W2-W4 is ≤ the set value, it means that the central axis AX W of the workpiece W and the rotation axis AX 100 of the cylindrical grinding apparatus main body 100 are in coincidence (substantially in coincidence), and thus the processes from step S18 onward are executed. On the other hand, when the determination result of step S17B is No, that is, when the deviation amount re-measured in step S17A for the workpiece W W2-W4 is not ≤ the set value, the processes of steps S17C and 17A are repeatedly executed until the determination result of step S17B becomes Yes. <Specific Example 3> Fig. 31 is a diagram for explaining Specific Example 3 of the deviation amount correction process.

[0157] In the specific example 3, the workpiece W to be subjected to the misalignment amount measurement process (step S17A) and the misalignment amount correction process (step S17c) is clamped between the spindle jaw 111 and the tail jaw 121 as shown in FIG. 31(a). At that time, when viewed from the direction of the arrow Ar1 (see FIG. 31(b)), the central axis AX W is the axis of rotation AX 100 With respect to the angle θ(θ W3-W1 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100 Not on top, but on the axis of rotation AX 100 in the Y-axis direction from W3-W1 ) is in the wrong position.

[0158] On the other hand, when viewed from the direction of the arrow Ar2 (see FIG. 31(b)), the central axis AX W and rotation axis AX 100 It is consistent with.

[0159] As a result of executing the deviation amount measurement process (step S17A) on the clamped workpiece W as described above, the measurement values shown in FIG. 31(c) are obtained. In FIG. 31(c), the measurement values θ W3-W1 , ΔY W3-W1 represents a number other than 0.

[0160] First, in the Y-axis direction, the pair of claws 251a, 251b are moved in a direction approaching each other, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the workpiece W. W3-W1 (See Fig. 31(a) and Fig. 31(b)) W3-W1 In this manner, the clamping mechanism 250 (the pair of claws 251a, 251b) clamps the workpiece W (step S17C1). W3-W1 With the clamped, the θ axis AX θ is the workpiece W clamped by the clamping mechanism 250. W3-W1 Center (center axis AX W The axis passes through the center of the top of the screen and extends in the Z-axis direction.

[0161] Next, the clamps of the spindle headstock 111 and the tailstock 121 for the workpiece W are released (step S17C2). W3-W1 are released for the workpiece W (step S17C2).

[0162] Next, reloading is performed (step S17C3). That is, the clamping mechanism 250 that clamps the workpiece W is rotated about the θ-axis AX by the deviation angle θ (θ W3-W1 ) enclosed by the circle in FIG. 31(c) calculated in step S17A3 so that the deviation angle θ (θ W3-W1 ) is eliminated. This is realized by the control device 300 controlling the turning motor 260. Thereby, the angle θ (θ θ ) is corrected. W3-W1 ) is eliminated. This is realized by the control device 300 controlling the turning motor 260. Thereby, the angle θ (θ W3-W1 ) is corrected.

[0163] At the same time, the clamping mechanism 250 that clamps the workpiece W is moved by the deviation distance ΔY (ΔY W3-W1 ) enclosed by the circle in FIG. 31(c) so that the deviation distance ΔY (ΔY W3-W1 ) is eliminated. This is realized by the control device 300 controlling the drive motor 233. Thereby, the distance ΔY (ΔY W3-W1 ) is corrected. W3-W1 ) is eliminated. This is realized by the control device 300 controlling the drive motor 233. Thereby, the distance ΔY (ΔY

[0164] Next, as shown in FIG. 22(b), the workpiece W is clamped between the spindle headstock 111 and the tailstock 121 (step S17C4). That is, first, the clamping mechanism 250 that clamps the workpiece W is moved so that the central axis AX W3-W1 of the workpiece W after the correction of the angle θ (θ W3-W1 ) coincides with the rotation axis AX W of the cylindrical grinding apparatus main body 100 between the spindle headstock 111 and the tailstock 121 of the cylindrical grinding apparatus main body 100. Next, the central axis AX 100 of the workpiece W after the correction of the angle θ (θ W3-W1 ) coincides with the rotation axis AX W of the cylindrical grinding apparatus main body 100 between the spindle headstock 111 and the tailstock 121 of the cylindrical grinding apparatus main body 100. Next, the central axis AX 100In a state where they match, the workpiece W after the movement is clamped between the main shaft 101 (main shaft base 111) and the tail 102 (tail base 121).

[0165] Next, the clamping of the pair of claw portions 251a and 251b to the workpiece W W3-W1 is released (step S17C5).

[0166] Next, returning to FIG. 17, the processes of steps S17A and 17B are executed again.

[0167] And, when the determination result of step S17B is Yes, that is, when the deviation amount measured again in step S17A for the workpiece W W3-W1 is ≤ the set value, since it means that the central axis AX of the workpiece W W and the rotation axis AX of the cylindrical grinding apparatus main body 100 100 match (substantially match), the processes of step S18 and below are executed. On the other hand, when the determination result of step S17B is No, the processes of steps S17C and 17A are repeatedly executed until the determination result of step S17B becomes Yes. <Specific Example 4> FIG. 32 is a diagram for explaining Specific Example 4 of the deviation amount correction process.

[0168] In Specific Example 4, the workpiece W targeted for the deviation amount measurement process (step S17A) and the deviation amount correction process (step S17c) is clamped between the main shaft base 111 and the tail base 121 as shown in FIG. 32(a). At that time, when viewed from the direction of arrow Ar1 (see FIG. 32(b)), the central axis AX of the workpiece W W and the rotation axis AX 100 match.

[0169] On the other hand, when viewed from the direction of arrow Ar2 (see FIG. 32(b)), the central axis AX of the workpiece W W is deviated from the rotation axis AX 100 by an angle θ (θ W2-W4 ). Also, the center point CP of the workpiece W (the center point on the central axis AX W ) is the rotation axis AX 100Rather than the above, the rotation axis AX 100 is displaced by ΔY (ΔY W2-W4 ) in the Z-axis direction.

[0170] As a result of performing the deviation measurement process (step S17A) on the workpiece W clamped as described above, the measurement values shown in FIG. 32(c) are obtained. In FIG. 32(c), the measured values θ W2-W4 , ΔY W2-W4 represent non-zero numerical values.

[0171] First, the workpiece W W3-W1 is rotated counterclockwise by 180 degrees / n (here, 90 degrees) from the origin state (see FIG. 32(b)) to the state of the workpiece W W2-W4 shown in FIG. 32(d). This is realized by the control device 300 controlling the spindle motor 113 and the tailstock motor 123.

[0172] Next, with respect to the Y-axis direction, the pair of claw portions 251a, 251b are moved in a direction approaching each other, and the pair of claw portions 251a, 251b (the respective tapered surfaces 256a, 256b) are brought into contact with the outer peripheral surface of the workpiece W W2-W4 (see FIG. 32(d)) to clamp the workpiece W W2-W4 (step S17C1). In this way, in the state where the clamping mechanism 250 (the pair of claw portions 251a, 251b) clamps the workpiece W W2-W4 , the θ-axis AX θ passes through the center of the workpiece W clamped by the clamping mechanism 250 (the center on the central axis AX W2-W4 ) and extends in the Z-axis direction. W

[0173] Next, the clamping of the spindle base 111 and the tailstock base 121 with respect to the workpiece W W2-W4 is released (step S17C2).

[0174] Next, reloading is performed (step S17C3). That is, the workpiece W W2-W4The clamping mechanism 250 that has clamped is rotated about the θ-axis AX by the deviation angle θ (θ W2-W4 ) so that the deviation angle θ (θ θ ) enclosed by the circle in FIG. 32(c) calculated in step S17A3 is eliminated. This is realized by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ W2-W4 ) is corrected. W2-W4 ) is corrected.

[0175] At the same time, the clamping mechanism 250 that has clamped the workpiece W W2-W4 is moved by the deviation distance ΔY (ΔY W2-W4 ) so that the deviation distance ΔY (ΔY W2-W4 ) enclosed by the circle in FIG. 32(c) is eliminated. This is realized by the control device 300 controlling the drive motor 233. As a result, the distance ΔY (ΔY W2-W4 ) is corrected.

[0176] Next, as shown in FIG. 22(b), the workpiece W W2-W4 is clamped between the spindle headstock 111 and the tailstock 121 (step S17C4). That is, first, the center axis AX W2-W4 of the workpiece W after the correction of the angle θ (θ W ) coincides with the rotation axis AX 100 of the cylindrical grinding device main body 100 between the spindle headstock 111 and the tailstock 121 that the cylindrical grinding device main body 100 has, and the clamping mechanism 250 that has clamped the workpiece W is moved. Next, with the center axis AX W2-W4 of the workpiece W after the correction of the angle θ (θ W ) and the rotation axis AX 100 of the cylindrical grinding device main body 100 coinciding, the moved workpiece W is clamped between the spindle 101 (spindle headstock 111) and the tail 102 (tailstock 121).

[0177] Next, the clamping of the pair of claw portions 251a, 251b to the workpiece W W2-W4 is released (step S17C5).

[0178] Next, referring back to FIG. 17, the processes of steps S17A and 17B are executed again.

[0179] And when the determination result in step S17B is Yes, that is, when the deviation amount measured in step S17A for the work W W2-W4 is ≤ the set value, since it means that the central axis AX W of the work W and the rotation axis AX 100 of the cylindrical grinding apparatus main body 100 coincide (substantially coincide), the processes from step S18 onward are executed. On the other hand, when the determination result in step S17B is No, the processes of steps S17C and 17A are repeatedly executed until the determination result in step S17B becomes Yes. <Specific Example 5> FIG. 33 is a diagram for explaining Specific Example 5 of the deviation amount correction process.

[0180] In Specific Example 5, the work W subject to the deviation amount measurement process (step S17A) and the deviation amount correction process (step S17c) is clamped between the spindle base 111 and the tailstock 121 as shown in FIG. 33(a). At that time, when viewed from the direction of arrow Ar1 (see FIG. 33(b)), the central axis AX W of the work W is 100 deviated by an angle θ (θ W3-W1 ) with respect to the rotation axis AX. Also, the center point CP (the center point on the central axis AX W ) of the work W is on the rotation axis AX 100 .

[0181] On the other hand, when viewed from the direction of arrow Ar2 (see FIG. 33(b)), the central axis AX W of the work W is 100 deviated by an angle θ (θ W2-W4 ) with respect to the rotation axis AX. Also, the center point CP (the center point on the central axis AX W ) of the work W is on the rotation axis AX 100 .

[0182] As a result of performing the deviation measurement process (step S17A) on the work W clamped as described above, the measurement values shown in FIG. 33(c) are obtained. In FIG. 33(c), the measured values θ W3-W1 , θ W2-W4 represent non-zero numerical values.

[0183] First, with respect to the Y-axis direction, the pair of claw portions 251a and 251b are moved in a direction approaching each other, and the pair of claw portions 251a and 251b (the respective tapered surfaces 256a and 256b) are brought into contact with the outer peripheral surface of the work W W3-W1 (see FIGS. 33(a) and 33(b)) to clamp the work W W3-W1 (step S17C1). In this way, with the clamping mechanism 250 (the pair of claw portions 251a and 251b) clamping the work W W3-W1 , the θ-axis AX θ passes through the center of the work W clamped by the clamping mechanism 250 W3-W1 (the center on the central axis AX W ) and extends in the Z-axis direction.

[0184] Next, the clamping of the spindle headstock 111 and the tailstock 121 with respect to the work W W3-W1 is released (step S17C2).

[0185] Next, reloading is performed (step S17C3). That is, the clamping mechanism 250 that has clamped the work W is rotated about the θ-axis AX W3-W1 so that the deviation angle θ (θ W3-W1 ) enclosed by the circle in FIG. 33(c) calculated in step S17A3 is eliminated. This is realized by the control device 300 controlling the rotation motor 260. As a result, as shown in FIG. 33(d), the angle θ (θ θ ) is corrected. W3-W1 ) W3-W1 )

[0186] Next, as shown in FIG. 22(b), the work W W3-W1Clamp it between the spindle base 111 and the tailstock base 121 (step S17C4). That is, first, between the spindle base 111 and the tailstock base 121 of the cylindrical grinding device main body 100, the center axis AX of the workpiece W after the correction of the angle θ (θ W3-W1 ) and the rotation axis AX W of the cylindrical grinding device main body 100 coincide, and move the clamping mechanism 250 that clamps the workpiece W. Next, with the center axis AX of the workpiece W after the correction of the angle θ (θ 100 ) and the rotation axis AX W3-W1 of the cylindrical grinding device main body 100 coincide, clamp the moved workpiece W between the spindle 101 (spindle base 111) and the tailstock 102 (tailstock base 121). W and the rotation axis AX 100 of the cylindrical grinding device main body 100 coincide, and clamp the moved workpiece W between the spindle 101 (spindle base 111) and the tailstock 102 (tailstock base 121).

[0187] Next, release the clamping of the pair of claw portions 251a and 251b with respect to the workpiece W (step S17C5). W3-W1

[0188] Next, rotate the workpiece W W3-W1 180 degrees / n (here, 90 degrees) counterclockwise from the state of FIG. 33(d) to make it the state of the workpiece W W2-W4 shown in FIG. 33(e).

[0189] Next, in the same manner as in step S17C1, clamp the workpiece W with the clamping mechanism 250. Then, rotate the clamping mechanism 250 that clamps the workpiece W about the deviation angle θ (θ W2-W4 ) calculated in step S17A3 and surrounded by a circle in FIG. 33(c) so that the deviation angle θ (θ W2-W4 ) is eliminated about the θ axis AX W2-W4 . This is realized by the control device 300 controlling the turning motor 260. Thereby, the angle θ (θ θ ) is corrected. W2-W4 ) is rotated. This is realized by the control device 300 controlling the turning motor 260. Thereby, the angle θ (θ W2-W4 ) is corrected.

[0190] Next, as shown in FIG. 22(b), the workpiece W W2-W4 ​is clamped between the spindle jaw 111 and the tail jaw 121 (step S17C4). That is, first, the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100 Next, the clamp mechanism 250 that clamps the workpiece W is moved so that the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding device main body 100. 100 In a state where these positions are aligned, the moved workpiece W is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0191] Next, the pair of claws 251a and 251b W2-W4 The clamp on is released (step S17C5).

[0192] Next, returning to FIG. 17, the processes of steps S17A and S17B are executed again.

[0193] If the result of the determination in step S17B is Yes, that is, if the workpiece W W3-W1 If the deviation amount measured again in step S17A is less than or equal to the set value, and the work W W2-W4 If the deviation measured again in step S17A is less than or equal to the set value, the central axis AX W and the rotation axis AX of the cylindrical grinding device main body 100 100 This means that the two match (approximately match), so the processes in and after step S18 are executed. On the other hand, if the decision result in step S17B is No, the processes in steps S17C and S17A are repeatedly executed until the decision result in step S17B becomes Yes. <Example 6> FIG. 34 is a diagram for explaining a sixth specific example of the misalignment amount correction process.

[0194] In Specific Example 6, as shown in Fig. 34(a), the workpiece W subject to the deviation amount measurement process (step S17A) and the deviation amount correction process (step S17c) is clamped between the spindle base 111 and the tailstock base 121. At this time, when viewed from the direction of arrow Ar1 (see Fig. 34(b)), the central axis AX of the workpiece W W is deviated by an angle θ (θ 100 ) with respect to the rotation axis AX W3-W1 . Further, the center point CP of the workpiece W (the center point on the central axis AX W ) is not on the rotation axis AX 100 , but is deviated by ΔY (ΔY 100 ) in the Y-axis direction from the rotation axis AX W3-W1 .

[0195] On the other hand, when viewed from the direction of arrow Ar2 (see Fig. 34(b)), the central axis AX of the workpiece W W is deviated by an angle θ (θ 100 ) with respect to the rotation axis AX W2-W4 . Further, the center point CP of the workpiece W (the center point on the central axis AX W ) is not on the rotation axis AX 100 , but is deviated by ΔY (ΔY 100 ) in the Z-axis direction from the rotation axis AX W2-W4 .

[0196] As a result of performing the deviation amount measurement process (step S17A) on the workpiece W clamped as described above, the measurement values shown in Fig. 34(c) are obtained. In Fig. 34(c), the measured values θ W3-W1 , θ W2-W4 , ΔY W3-W1 , ΔY W2-W4 represent non-zero numerical values.

[0197] First, regarding the Y-axis direction, the pair of claw portions 251a and 251b are moved in a direction approaching each other, and the pair of claw portions 251a and 251b (the respective tapered surfaces 256a and 256b) are brought into contact with the outer peripheral surface of the workpiece W W3-W1 (see Figs. 34(a) and 34(b)), so that the workpiece W W3-W1Clamp it (step S17C1). In this way, the clamping mechanism 250 (pair of claw portions 251a, 251b) clamps the workpiece W W3-W1 In the state where the θ-axis AX θ is such that the clamping mechanism 250 clamps the workpiece W W3-W1 passes through the center of the workpiece W (the center on the central axis AX W ) clamped by the clamping mechanism 250 and extends in the Z-axis direction.

[0198] Next, release the clamping of the spindle headstock 111 and the tailstock 121 with respect to the workpiece W W3-W1 (step S17C2).

[0199] Next, perform reloading (step S17C3). That is, the clamping mechanism 250 that clamps the workpiece W W3-W1 is rotated about the θ-axis AX W3-W1 so that the deviation angle θ (θ θ ) surrounded by the circle in FIG. 34(c) calculated in step S17A3 is eliminated. This is realized by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ W3-W1 ) is corrected. W3-W1 ) is corrected.

[0200] At the same time, the clamping mechanism 250 that clamps the workpiece W W3-W1 is moved by the deviation distance ΔY (ΔY W3-W1 ) so that the deviation distance ΔY (ΔY W3-W1 ) surrounded by the circle in FIG. 34(c) is eliminated. This is realized by the control device 300 controlling the drive motor 233. As a result, the distance ΔY (ΔY W3-W1 ) is corrected.

[0201] Next, as shown in FIG. 22(b), clamp the workpiece W W3-W1 between the spindle headstock 111 and the tailstock 121 (step S17C4). That is, first, between the spindle headstock 111 and the tailstock 121 of the cylindrical grinding apparatus main body 100, the central axis AX W3-W1 ) of the workpiece W after the angle θ (θ Wand the rotation axis AX of the cylindrical grinding apparatus main body 100 100 The clamping mechanism 250 that clamps the workpiece W is moved so as to coincide. Next, the central axis AX of the workpiece W after correcting the above angle θ (θ W3-W1 ) W and the rotation axis AX of the cylindrical grinding apparatus main body 100 100 In a state where they coincide, the moved workpiece W is clamped between the main shaft 101 (main shaft base 111) and the tailstock 102 (tailstock base 121).

[0202] Next, the clamping of the pair of claw portions 251a and 251b to the workpiece W W3-W1 is released (step S17C5).

[0203] Next, the workpiece W W3-W1 is rotated counterclockwise by 180 degrees / n (here, 90 degrees) from the state of FIG. 34(d), and the workpiece W is set in the state shown in FIG. 34(e). W2-W4

[0204] Next, in the same manner as in step S17C1, the workpiece W is clamped by the clamping mechanism 250. Then, the clamping mechanism 250 that clamps the workpiece W is rotated about the θ axis AX so that the deviation angle θ (θ W2-W4 ) calculated in step S17A3 and surrounded by the circle in FIG. 34(c) is eliminated. This is realized by the control device 300 controlling the turning motor 260. As a result, the angle θ (θ W2-W4 ) is corrected. W2-W4 ) θ about the deviation angle θ (θ W2-W4 ). W2-W4 )

[0205] At the same time, the clamping mechanism 250 that clamps the workpiece W is moved by the deviation distance ΔY (ΔY W2-W4 ) surrounded by the circle in FIG. 34(c) so that the deviation distance ΔY (ΔY W2-W4 ) is eliminated. This is realized by the control device 300 controlling the drive motor 233. As a result, the distance ΔY (ΔY W2-W4 ) is corrected. W2-W4 ) ​

[0206] Next, as shown in FIG. 22(b), the workpiece W W3-W1 is clamped between the spindle base 111 and the tailstock 121 (step S17C4). That is, first, between the spindle base 111 and the tailstock 121 of the cylindrical grinding apparatus main body 100, the central axis AX of the workpiece W after correction of the angle θ (θ W2-W4 ) W and the rotation axis AX of the cylindrical grinding apparatus main body 100 100 are made to coincide, and the clamping mechanism 250 that clamps the workpiece W is moved. Next, with the central axis AX of the workpiece W after correction of the angle θ (θ W2-W4 ) W and the rotation axis AX of the cylindrical grinding apparatus main body 100 100 coinciding, the moved workpiece W is clamped between the spindle 101 (spindle base 111) and the tailstock 102 (tailstock 121).

[0207] Next, the clamping of the pair of claw portions 251a, 251b with respect to the workpiece W W2-W4 is released (step S17C5).

[0208] Next, returning to FIG. 17, the processes of steps S17A and 17B are executed again.

[0209] And when the determination result of step S17B is Yes, that is, when the deviation amount re-measured in step S17A for the workpiece W W3-W1 is ≦ the set value, and when the deviation amount re-measured in step S17A for the workpiece W W2-W4 is ≦ the set value, it means that the central axis AX of the workpiece W W and the rotation axis AX of the cylindrical grinding apparatus main body 100 100 coincide (substantially coincide), so the processes from step S18 onward are executed. On the other hand, when the determination result of step S17B is No, the processes of steps S17C and 17A are repeatedly executed until the determination result of step S17B becomes Yes.

[0210] Next, the processes from step S18 onward will be described.

[0211] That is, when the determination result in step S17B is Yes, predetermined processing is performed on the work W clamped between the spindle base 111 and the tailstock base 121 so as to satisfy the processing conditions obtained in step S11 (step S18). For example, the outer peripheral surface of the work W clamped between the spindle base 111 and the tailstock base 121 is ground.

[0212] And when the predetermined processing on the work W to be processed (for example, grinding of the outer peripheral surface of the work, additional processing such as a flat surface (OF) or a notch such as a V-groove) is completed (step S19: Yes), the processed work W is clamped by the clamping mechanism 250 in the same manner as described above, and the clamped processed work W is conveyed to a predetermined position (for example, pallet P4 in FIG. 18) (step S20).

[0213] The pallet P4 on which the processed work W (work W4 in FIG. 18) is placed is delivered to the automatic guided vehicle AGV2 together with the pallet P4 by known means (work W5 and pallet P5 in FIG. 18).

[0214] And the automatic guided vehicle AGV2 conveys the pallet P5 on which the processed work W (work W5 in FIG. 18) is placed to the next process.

[0215] As described above, according to the present embodiment, with its central axis AX W and the rotation axis AX of the cylindrical grinding apparatus main body 100 100 the work W can be clamped between the spindle unit 110 (spindle base 111) and the tailstock unit 120 (tailstock base 121) in a state where they coincide.

[0216] This is because the clamping mechanism 250 in the state of clamping the work W is provided with a turning mechanism (turning motor 260) that turns about the θ-axis AX θ (passing through the center of the work W clamped by the clamping mechanism 250 and extending in the Z-axis direction).

[0217] Moreover, according to the present embodiment, workpieces W of various lengths can always be conveyed in a stable state.

[0218] This is because, with respect to the Y-axis direction, the clamp mechanism 250 moves until the center Pb of the pair of claw portions 251a and 251b coincides with the vertical line V2 passing through the center Pc of the workpiece W (the center of the length L of the workpiece W to be machined automatically measured in step S11A) (see step S12, FIG. 19(b)), and the clamp mechanism 250 (the pair of claw portions 251a and 251b) clamps the center of the workpiece W in the Y-axis direction.

[0219] Next, a modified example will be described.

[0220] FIG. 28(a) is a diagram for explaining the moving directions of the respective movable frames 220, 230, and 240 of the cylindrical grinding apparatus 1, and FIG. 28(b) is a diagram for explaining the moving directions of the respective movable frames 220, 230, and 240 of the modified example of the cylindrical grinding apparatus 1.

[0221] In the above embodiment, as shown in FIG. 28(a), as the moving mechanism of the present disclosure, a movable frame moving mechanism M attached to the second movable frame 230 that moves the third movable frame 240 (and the clamp mechanism 250 attached thereto) in the Z-axis direction 240 (an example of the first moving mechanism of the present disclosure), and a movable frame moving mechanism M attached to the first movable frame 220 that moves the second movable frame 230 (the clamp mechanism 250 and the movable frame moving mechanism M 240 ) in the Y-axis direction 230 (an example of the second moving mechanism of the present disclosure), and a movable frame moving mechanism M attached to the fixed frame 210 that moves the first movable frame 220 (the clamp mechanism 250, the movable frame moving mechanism M 230 and the movable frame moving mechanism M 240 ) in the X-axis direction 220 (an example of the third moving mechanism of the present disclosure) were used for the description, but the present disclosure is not limited thereto.

[0222] For example, as shown in FIG. 28(b), as a moving mechanism of the present disclosure, a moving frame moving mechanism M attached to the second moving frame 230 that moves the third moving frame 240 (and the clamp mechanism 250 attached thereto) in the Z-axis direction 240 (an example of the first moving mechanism of the present disclosure), and the second moving frame 230 (the clamp mechanism 250 and the moving frame moving mechanism M 240 ) that moves the second moving frame 230 (the clamp mechanism 250 and the moving frame moving mechanism M 230 (an example of the second moving mechanism of the present disclosure), and the first moving frame 220 (the clamp mechanism 250, the moving frame moving mechanism M 230 and the moving frame moving mechanism M 240 ) that moves the first moving frame 220 (the clamp mechanism 250, the moving frame moving mechanism M 220 (an example of the third moving mechanism of the present disclosure), and the moving frame moving mechanism M attached to the fixed frame 210 that moves the first moving frame 220 (the clamp mechanism 250, the moving frame moving mechanism M

[0223] Hereinafter, with reference to FIG. 35 and the like, another operation example of the cylindrical grinding apparatus 1 will be described

[0224] FIG. 35 is a flowchart of another operation example of the cylindrical grinding apparatus 1. FIG. 36 is a perspective view showing a state in which the workpiece W is clamped between the spindle base 111 (spindle 101) and the tailstock base 121 (tailstock 102) when the central axis AX W of the workpiece W coincides with the rotation axis AX 100 of the cylindrical grinding apparatus main body 100

[0225] In FIG. 36, the symbol AX C indicates the crystal axis of the workpiece W which is a silicon crystal (single crystal). Hereinafter, it will be referred to as the crystal axis AX C . Note that the crystal plane and the crystal axis AX C have the meanings as described within the rectangle in FIG. 36

[0226] As a result of steps S10 to S17C shown in FIG. 17, the central axis AX W of the workpiece W and the rotation axis AX 100When the workpiece W is clamped between the spindle base 111 (spindle 101) and the tailstock 121 (tail 102) in a state where they are aligned (see Fig. 36), usually, the crystal axis AX C is offset with respect to the rotation axis AX 100 that the cylindrical grinding apparatus main body 100 has. Therefore, in order to correct this offset, that is, to align (substantially align) the crystal axis AX C and the rotation axis AX 100 that the cylindrical grinding apparatus main body 100 has, the process of Fig. 35 is executed.

[0227] The process of Fig. 35 is executed when the steps S10 to S17C shown in Fig. 17 are executed, the determination result in step S17B is Yes, and the workpiece W is clamped between the spindle base 111 (spindle 101) and the tailstock 121 (tail 102) in a state where the central axis AX W of the workpiece W and the rotation axis AX 100 that the cylindrical grinding apparatus main body 100 has are aligned (substantially aligned) (see Fig. 36).

[0228] First, it is determined whether there is a provisional notch (step S30). This is realized, for example, by irradiating the workpiece W with a laser from a laser sensor (not shown) and rotating the workpiece 360° to search for the presence or absence of a provisional notch (notch groove). If the determination result in step S30 is No, provisional notch machining is performed on the workpiece W (step S31). Note that the location where the provisional notch machining is performed is automatically determined based on the measurement result of the X-ray device 150. The provisional notch machining is realized by the notch unit 140.

[0229] Next, the control device 300 executes surface orientation measurement processing (step S32).

[0230] Fig. 37 is a flowchart of the surface orientation measurement processing.

[0231] The surface orientation measurement processing is a process of measuring (calculating) the amount of offset (offset rotation angle Δδ and wobble angle Δφ) of the crystal axis AX 100 with respect to the rotation axis AX C of the cylindrical grinding apparatus main body 100.

[0232] The surface orientation measurement process (steps S321 to S324) is executed n times for the workpiece W. Hereinafter, the case where n is 2 will be described as an example. n (the number of measurements) is input by the operator via the operation device 400, for example. n is input at any timing before the surface orientation measurement process is executed. Note that n stored in a predetermined storage unit in advance may be used. Note that n may be an integer of 2 or more. That is, the minimum value of n is 2.

[0233] First, the control device 300 rotates the workpiece W until the temporary notch N1 is located at the reference position (step S321).

[0234] Next, the surface orientation is measured (step S322). This is realized by the X-ray device 150. The X-ray device 150 irradiates the A surface (see FIG. 36) of the workpiece W located at the reference position as described above with X-rays (toward the workpiece center Wc) to perform surface orientation measurement. The leftmost figure in FIG. 38 and FIG. 40 are diagrams showing a state where the X-ray device 150 irradiates the workpiece W with X-rays and performs surface orientation measurement. Measuring the surface orientation with respect to the workpiece center Wc is because the workpiece center Wc is on the θ axis AX θ For this reason, when performing correction described later, even if the clamp mechanism 250 in a state where the workpiece W is clamped is rotated about the θ axis AX θ the distance from the X-ray device 150 does not change. The X-ray device 150 outputs the surface orientation and correction values (the surface orientation and correction values of the C surface with respect to the notch reference) as measurement values for the A surface.

[0235] Next, it is determined whether step S322 has been executed n times (here, n = 2 times) (step S323). If it has not been executed n times (step S323: No), the workpiece W is rotated by a predetermined angle (for example, 90 degrees) (S324), and the B surface (see FIG. 36) of the workpiece W after the rotation by the predetermined angle (for example, 90 degrees) is irradiated with X-rays (see the middle figure in FIG. 38) toward the workpiece center Wc to perform surface orientation measurement (step S322) (second execution). The X-ray device 150 outputs the surface orientation and correction values (the surface orientation and correction values of the C surface with respect to the notch reference) as measurement values for the B surface.

[0236] And when step S322 is executed n times (here, n = 2 times) (step S323: Yes), the axis misalignment rotation angle Δδ and the swing angle Δφ are calculated based on the measurement values in step S322 (step S325). The X-ray apparatus 150 outputs the calculated axis misalignment rotation angle Δδ and swing angle Δφ. The axis misalignment rotation angle Δδ is the angle formed by the central axis AX of the workpiece W W and the straight line L1 passing through the temporary notch N1 and the central axis AX of the workpiece W W and the straight line L2 passing through the main notch (the planned main notch location N2) (see FIG. 38). On the other hand, the workpiece W to be subjected to the swing angle correction process (step S34) is clamped between the spindle base 111 and the tailstock base 121. When viewed from the direction of the arrow Ar3 (see FIG. 38), the crystal axis AX of the workpiece W C is misaligned by the swing angle Δφ with respect to the rotation axis AX 100 (see FIG. 35).

[0237] Next, referring back to FIG. 35, it is determined whether the misalignment amount (swing angle Δφ) measured in step S32 is less than or equal to a set value (a predetermined threshold value) (step S33).

[0238] If the determination result of step S33 is No, the control device 300 executes the rotation angle and swing angle correction process (step S34).

[0239] The rotation angle and swing angle correction process is a process of correcting the misalignment amount (misalignment rotation angle Δδ and swing angle Δφ) of the crystal axis AX with respect to the rotation axis AX of the cylindrical grinding apparatus main body 100 measured (calculated) in step S32. 100 with respect to C the crystal axis AX.

[0240] FIG. 39 is a flowchart of the rotation angle and swing angle correction process.

[0241] First, the control device 300 rotates the workpiece W until the deviation rotation angle of the surface orientation becomes horizontal (step S341). That is, as shown at the right end in FIG. 38, the control device 300 rotates the workpiece W by a predetermined angle (270° ± deviation rotation angle Δδ) until this notch (the planned notch location N2) reaches the reference position. The deviation rotation angle Δδ is a correction value for correcting the deviation amount of this notch (the planned notch location N2) with respect to the reference position.

[0242] Next, a pair of claw portions clamp the workpiece (step S342). Specifically, in the Y-axis direction, the pair of claw portions 251a and 251b are moved in a direction approaching each other, and the pair of claw portions 251a and 251b (their respective tapered surfaces 256a and 256b) are brought into contact with the outer peripheral surface of the workpiece W to clamp the workpiece W. In this way, with the clamping mechanism 250 (the pair of claw portions 251a and 251b) clamping the workpiece W, the θ-axis AX θ passes through the workpiece W (the center on the central axis AX W clamped by the clamping mechanism 250) and extends in the Z-axis direction.

[0243] Next, the clamping of the spindle headstock 111 and the tailstock 121 with respect to the workpiece W is released (step S343).

[0244] Next, it moves to a position for correcting the angle of the surface orientation (step S344). Specifically, the clamping mechanism 250 that has clamped the workpiece W is swung around the θ-axis AX so that the swing angle Δφ calculated in step S325 is eliminated. This is realized by the control device 300 controlling the swing motor 260. As a result, the deviation amount (swing angle Δφ) is corrected. The swing angle Δφ is a correction value for correcting the deviation amount of the AX θ of the crystal axis of the workpiece W with respect to the rotation axis AX C of the cylindrical grinding apparatus main body 100. 100

[0245] Next, the work W whose deviation amount (swing angle Δφ) has been corrected as described above is clamped between the spindle headstock 111 and the tailstock 121 (step S345). As a result, the work W has its crystal axis AX C coincide with the rotation axis AX 100 of the cylindrical grinding apparatus main body 100, and is clamped between the spindle headstock 111 (spindle 101) and the tailstock 121 (tail 102) in a state of coincidence.

[0246] Next, the clamping of the pair of claw portions 251a and 251b with respect to the work W is released (step S346).

[0247] Next, returning to FIG. 35, the processes of steps S32 and S33 are executed again.

[0248] And when the determination result of step S33 is Yes, that is, when the deviation amount (swing angle Δφ) re-measured in step S32 for the work W is ≤ the set value (predetermined threshold value), since it means that the crystal axis AX C coincides (substantially coincides) with the rotation axis AX 100 of the cylindrical grinding apparatus main body 100, the processes from step S35 onward are executed. On the other hand, when the determination result of step S33 is No, the processes of steps S34 and 32 are repeatedly executed until the determination result of step S33 becomes Yes.

[0249] Next, the processes from step S35 onward will be described.

[0250] That is, when the determination result of step S33 is Yes, cylindrical grinding is performed on the work W clamped between the spindle headstock 111 and the tailstock 121 so as to satisfy the machining conditions acquired in step S11 (step S35). That is, the outer peripheral surface of the work W clamped between the spindle headstock 111 and the tailstock 121 is ground. In FIG. 35, the hatched area in "cylindrical grinding" represents the area to be cylindrically ground (ground). This is realized by the cylindrical grinding unit 130 (see FIG. 6(a)).

[0251] Next, notch machining (this notch machining) is performed on the workpiece (step S36). Note that the location where the notch machining is to be performed (this notch planned location N2) is determined based on the measurement results of the X-ray device 150. The notch machining is realized by the notch unit 140. Specifically, the workpiece W is further rotated by 90° from the state at the right end of FIG. 38, and after the location where the notch machining is to be performed (this notch planned location N2) is opposed to the notch unit 140, the notch unit 140 performs this notch on this notch planned location N2 (see FIG. 6(b)). As a result, this notch can be accurately formed on the workpiece W along the crystal axis AX c (in a direction perpendicular to the crystal planes at both ends of the crystal axis AX c ).

[0252] And when the cylindrical grinding and notch machining (this notch machining) of the workpiece W are completed, the machined workpiece W is clamped by the clamping mechanism 250 in the same manner as above, and the clamped machined workpiece W is conveyed to a predetermined location (for example, pallet P4 in FIG. 18) (step S37).

[0253] All the numerical values shown in the above embodiments are merely examples, and it goes without saying that appropriate different numerical values can be used instead.

[0254] The above embodiments are merely illustrative in every respect. The present invention is not to be construed in a limiting sense by the description of the above embodiments. The present invention can be implemented in various other forms without departing from its spirit or main features.

Description of Reference Numerals

[0255] 1... Cylindrical grinding device 100... Cylindrical grinding device main body 110... Spindle unit 111... Spindle base 112... Spindle body 113... Spindle motor 120... Tail unit 121... Tail base 122... Tail body 123... Tail motor 130…Circular grinding unit 131…Circular grinding wheel 132…Circular grinding base 133…Circular grinding motor 140…Notch unit 141…Notch grinding wheel 142…Notch frame 143…Notch motor 150…X-ray device 200…Work transfer device 201…Vertical column 210…Fixed frame 211a…First frame 211b…First frame 212a…Second frame 212b…Second frame 220…First movable frame 221a…Third frame 221b…Third frame 222a…Fourth frame 222b…Fourth frame 223a…Guide rail 223b…Guide rail 224…Ball screw 225…Drive motor 230…Second movable frame 231a…Guide rail 231b…Guide rail 232…Ball screw 233…Drive motor 240…Third movable frame 241a, 241b…Guide rail 242…Drive motor 243…Z-axis gantry base 244…Slide rail 245…Buffer gantry base 250…Clamping mechanism 251a, 251b…Claw part 252…Frame 253a…Guide rail 253b…Guide rail 254a…Movable frame 254b... Movable frame 255... Driving motor 256a... First contact part (tapered surface) 256b...... First contact part (tapered surface) 257a... Light projector 257b... Light receiver 260... Rotary motor 262... Top plate 270... Outer diameter measuring mechanism 271... Lifting frame 272a, 272b... Measuring arms 273a, 273b... Measuring elements 274... Carriage 275... Guide rail 276... Driving motor 300... Control device 400... Operating device 500... Pallet loader A1, A2... Rectangle AGV1, AGV2... Automated guided vehicle AX 100 … Rotation axis AX W … Central axis AX θ … θ axis AX MW … Master workpiece central axis CP… Center point M 220 … Movable frame moving mechanism M 230 … Movable frame moving mechanism M 240 … Movable frame moving mechanism M 250 … Claw part moving mechanism P1~P5… Pallets W… Workpiece Wt… Top side end face Wb… Bottom side end face d… Moving distance x1, x2… Grinding amount θ… Deviation angle ΔY… Deviation distance

Claims

1. A work transfer device that transfers a cylindrical work having a crystal plane orientation and a crystal axis, which is a workpiece to be processed and has been transferred to a standby position, to a position between a main spindle and a tailstock of a cylindrical grinding device body that clamps the work, a clamping mechanism including a pair of claw portions that clamp the work, and a claw portion moving mechanism that moves the pair of claw portions in a direction approaching each other or a direction away from each other, a moving mechanism that moves the clamping mechanism, a turning mechanism that turns the clamping mechanism in a state where the work is clamped, an X-ray device that measures the crystal plane orientation of the work clamped between the main spindle base and the tailstock base of the cylindrical grinding device body in a state where the central axis of the work coincides with the rotation axis, which is the processing axis of the cylindrical grinding device body, and outputs a correction value for correcting the deviation amount of the crystal axis of the work with respect to the rotation axis of the cylindrical grinding device body, when the rotation axis of the cylindrical grinding device body is an X-axis that is a horizontal axis, an axis orthogonal to the X-axis is a Y-axis that is a horizontal axis, and an axis orthogonal to the plane including the X-axis and the Y-axis is a Z-axis that is a vertical axis, the moving mechanism moves the clamping mechanism at least in the X-axis direction, the Y-axis direction, and the Z-axis direction, a fixed frame, a vertical column that supports the fixed frame, a first movable frame attached to the fixed frame so as to be slidable in the X-axis direction, a second movable frame attached to the first movable frame so as to be slidable in the Y-axis direction, further including a third movable frame attached to the second movable frame so as to be slidable in the Z-axis direction, the clamping mechanism is attached to the third movable frame via the turning mechanism, the moving mechanism, a first moving mechanism that moves the third movable frame in the Z-axis direction, a second moving mechanism that moves the second movable frame in the Y-axis direction, and a third moving mechanism that moves the first movable frame in the X-axis direction, the turning mechanism turns the clamping mechanism in a state where the work is clamped by an angle corresponding to the correction value about a θ-axis that passes through the center on the central axis of the work clamped by the clamping mechanism and extends in the Z-axis direction with respect to the third movable frame, A work transfer device that clamps the work after turning between the spindle headstock and the tailstock in a state where the central axis of the work coincides with the rotation axis of the cylindrical grinding device body.

2. A work transfer device that transfers a cylindrical work having a crystal plane orientation and a crystal axis as a processing target, which has been transferred to a standby position, to between the spindle and the tail of a cylindrical grinding device body having a spindle and a tail for clamping the work, A clamping mechanism including a pair of claw portions for clamping the work, and a claw portion moving mechanism for moving the pair of claw portions in a direction approaching each other or a direction away from each other; A moving mechanism for moving the clamping mechanism; A turning mechanism for turning the clamping mechanism in a state where the work is clamped; An X-ray device that measures the crystal plane orientation of the work clamped between the spindle headstock and the tailstock of the cylindrical grinding device body in a state where the central axis of the work coincides with the rotation axis, which is the processing axis of the cylindrical grinding device body, and outputs a correction value for correcting the deviation amount of the crystal axis of the work with respect to the rotation axis of the cylindrical grinding device body; When the rotation axis of the cylindrical grinding device body is an X axis that is a horizontal axis, an axis orthogonal to the X axis is a Y axis that is a horizontal axis, and an axis orthogonal to the plane including the X axis and the Y axis is a Z axis that is a vertical axis, The moving mechanism moves the clamping mechanism at least in the X-axis direction, the Y-axis direction, and the Z-axis direction; A fixed frame; A vertical column that supports the fixed frame; A first movable frame attached to the fixed frame so as to be slidable in the Y-axis direction; A second movable frame attached to the first movable frame so as to be slidable in the X-axis direction; Further comprising a third movable frame attached to the second movable frame so as to be slidable in the Z-axis direction; The clamping mechanism is attached to the third movable frame via the turning mechanism; The moving mechanism is A first moving mechanism for moving the third movable frame in the Z-axis direction; A second moving mechanism for moving the second movable frame in the X-axis direction; A third moving mechanism for moving the first movable frame in the Y-axis direction; The turning mechanism rotates the clamping mechanism in a state where the workpiece is clamped about an angle corresponding to the correction value about a θ axis passing through the center on the central axis of the workpiece clamped by the clamping mechanism and extending in the Z-axis direction with respect to the third movable frame. A workpiece transfer device that clamps the workpiece after turning between the spindle base and the tailstock in a state where the central axis of the workpiece coincides with the rotation axis of the cylindrical grinding device body. **Claim 3** The claw portion moving mechanism moves the pair of claw portions in a direction approaching each other with respect to the Y-axis direction, and clamps the workpiece by bringing the pair of claw portions into contact with the outer peripheral surface of the workpiece. The workpiece transfer device according to claim 1 or 2. **Claim 4** Each of the pair of claw portions has a first contact portion that contacts the lower portion of the workpiece and a second contact portion that contacts the upper portion of the workpiece when the pair of claw portions move in a direction approaching each other. The workpiece transfer device according to claim 1. **Claim 5** Each of the pair of claw portions has a tapered surface that functions as the first contact portion and the second contact portion and is open in a V shape facing each other. The workpiece transfer device according to claim 4. **Claim 6** The moving mechanism moves the clamping mechanism that has clamped the workpiece until the central axis of the workpiece coincides with the rotation axis of the cylindrical grinding device body between the spindle and the tail of the cylindrical grinding device body. The workpiece transfer device according to claim 1. **Claim 7** The moving mechanism further moves the clamping mechanism that has clamped the workpiece until one end face of the workpiece abuts against the spindle. The workpiece transfer device according to claim 6. **Claim 8** The clamping mechanism further includes a projector and a light receiver that are sensors for measuring the length of the workpiece, The clamping mechanism is moved in the X-axis direction above the workpiece, and the length of the workpiece is measured by calculating a position where the light receiver blocks the light from the projector and a position where the light receiver receives the light from the projector, respectively. The workpiece length measuring means, and further includes The pair of claw portions clamp the center of the length of the workpiece. The workpiece transfer device according to claim 1. **Claim 9** A cylindrical grinding device body, A cylindrical grinding apparatus comprising: a work transfer device configured to transfer a workpiece having a cylindrical shape, a crystal plane orientation, and a crystal axis, which has been transferred to a standby position, to a position between a spindle and a tailstock of the cylindrical grinding apparatus main body that clamp the workpiece. The work transfer device includes: a clamping mechanism including a pair of claw portions that clamp the workpiece, and a claw portion movement mechanism that moves the pair of claw portions in a direction approaching each other or a direction away from each other; a movement mechanism that moves the clamping mechanism; a turning mechanism that turns the clamping mechanism with the workpiece clamped; an X-ray device configured to measure a crystal plane orientation of the workpiece clamped between a spindle base and a tailstock of the cylindrical grinding apparatus main body in a state where a central axis of the workpiece coincides with a rotation axis that is a processing axis of the cylindrical grinding apparatus main body, and output a correction value for correcting a deviation amount of the crystal axis of the workpiece with respect to the rotation axis of the cylindrical grinding apparatus main body. When a rotation axis of the cylindrical grinding apparatus main body is defined as an X-axis that is a horizontal axis, an axis orthogonal to the X-axis is defined as a Y-axis that is a horizontal axis, and an axis orthogonal to a plane including the X-axis and the Y-axis is defined as a Z-axis that is a vertical axis, the movement mechanism moves the clamping mechanism at least in the X-axis direction, the Y-axis direction, and the Z-axis direction. a fixed frame; a vertical column that supports the fixed frame; a first movable frame attached to the fixed frame so as to be slidable in the X-axis direction; a second movable frame attached to the first movable frame so as to be slidable in the Y-axis direction; further including a third movable frame attached to the second movable frame so as to be slidable in the Z-axis direction. The clamping mechanism is attached to the third movable frame via the turning mechanism. The movement mechanism includes: a first movement mechanism that moves the third movable frame in the Z-axis direction; a second movement mechanism that moves the second movable frame in the Y-axis direction; a third movement mechanism that moves the first movable frame in the X-axis direction. The turning mechanism turns the clamping mechanism with the workpiece clamped about an angle corresponding to the correction value around a θ-axis that passes through the center on the central axis of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction with respect to the third movable frame. The cylindrical grinding device in which the workpiece after turning is clamped between the spindle base and the tailstock in a state where the central axis of the workpiece coincides with the rotation axis of the cylindrical grinding device body.

10. A deviation amount correction method for correcting the deviation amount of the clamped workpiece with respect to the rotation axis of the cylindrical grinding device body using the workpiece transfer device according to Claim 1, a measurement step of measuring the crystal plane orientation of the workpiece having a cylindrical shape, a crystal plane orientation, and a crystal axis to be machined, with the spindle base of the cylindrical grinding device body in contact with the top-side end face of the workpiece, and with the tailstock of the cylindrical grinding device body in contact with the bottom-side end face of the workpiece, and measuring the crystal plane orientation of the workpiece clamped and positioned at the reference position and the crystal plane orientation of the workpiece rotated by a predetermined angle from the reference position, and outputting a correction value for correcting the deviation amount of the crystal axis of the workpiece with respect to the rotation axis of the cylindrical grinding device body; a deviation amount correction step of controlling the turning mechanism so as to eliminate the deviation amount. A deviation amount correction method comprising the steps of:

11. The deviation amount correction method according to Claim 10, wherein the measurement step and the deviation amount correction step are repeatedly executed until the deviation amount of the workpiece after the deviation amount correction step becomes equal to or less than a set value.

12. The deviation amount is the deviation angle of the crystal axis of the workpiece with respect to the rotation axis of the cylindrical grinding device body, The deviation amount correction step is the deviation amount correction method according to Claim 11, wherein the turning mechanism is controlled so that the clamping mechanism clamping the workpiece turns by the deviation angle.

Images