Sensor and Electronic Device

Abstract

To provide a sensor and an electronic device capable of stable detection.SOLUTION: A sensor includes a base body, a support part, and a first member. A gap is provided between the base body and a part of the first member. The first member includes a supported region, a first movable region, a first structure, a first support structure, a first connection structure, a first connection part, and a first beam. The first beam extends along a second direction. The first beam has a first end connected to the first connection structure. The first beam has a first other end connected to the supported region. The first structure includes a first part, a first other part, and a first intermediate part. A third direction from the first part to the first other part intersects with a plane including a first direction and the second direction. The first part is connected to the first connection structure. The first other part is connected to the first movable region. The first intermediate part is connected to the first support structure. The first connection part has the first connection structure connected to the first support structure.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] Embodiments of the present invention relate to sensors and electronic devices.

Background Art

[0002] For example, there are sensors that utilize MEMS structures. In sensors, stable detection is desired.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Embodiments provide a sensor and an electronic device capable of stable detection.

Means for Solving the Problems

[0005] According to an embodiment, the sensor includes a substrate, a support portion fixed to the substrate, and a first member supported by the support portion. A gap is provided between the substrate and a part of the first member. The first member includes a supported region, a first movable region, a first structure, a first support structure, a first connection structure, a first connection portion, and a first beam. The support portion is located between the substrate and the supported region in a first direction from the substrate to the support portion. The first beam extends along a second direction intersecting the first direction. A first beam position of the first beam in the second direction is between a first movable region position of the first movable region in the second direction and a support portion position of the support portion in the second direction. A first end of the first beam is connected to the first connection structure. A first other end of the first beam is connected to the supported region. A first structure position of the first structure in the second direction is between the first movable region position and the first beam position. A first connection structure position of the first connection structure in the second direction is between the first structure position and the first beam position. A first support structure position of the first support structure in the second direction is between the first structure position and the support portion position. The first structure includes a first portion, a first other portion, and a first intermediate portion. A third direction from the first portion to the first other portion intersects a plane including the first direction and the second direction. The first intermediate portion is between the first portion and the first other portion. The first portion is connected to the first connection structure. The first other portion is connected to the first movable region. The first intermediate portion is connected to the first support structure. The first connection portion connects the first connection structure to the first support structure.

Brief Description of the Drawings

[0006]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

BEST MODE FOR CARRYING OUT THE INVENTION

[0007] Hereinafter, each embodiment of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the ratio of the sizes between parts, etc. are not necessarily the same as those in reality. Even when representing the same part, the dimensions and ratios may be represented differently in the drawings. In the present specification and each figure, the same reference numerals are given to the same elements as those described above with respect to the already shown figures, and the detailed description is omitted as appropriate.

[0008] (First Embodiment) FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. FIG. 2 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. FIG. 2 is a cross-sectional view taken along line A1 - A2 of FIG. 1.

[0009] As shown in FIGS. 1 and 2, the sensor 110 according to the embodiment includes a base 50S, a support portion 10S, and a first member 10M.

[0010] As shown in FIG. 2, the support portion 10S is fixed to the base 50S. The first member 10M is supported by the support portion 10S. A gap g1 is provided between the base 50S and a part of the first member 10M. At least a part of the first member 10M is preferably conductive.

[0011] The first direction D1 from the base body 50S to the support portion 10S is the Z-axis direction. One direction perpendicular to the Z-axis direction is the X-axis direction. The direction perpendicular to the Z-axis direction and the X-axis direction is the Y-axis direction.

[0012] As shown in FIG. 1, the first member 10M includes a supported region 10Ms, a first movable region 10Ma, a first structure 21, a first support structure 11S, a first connection structure 21c, a first connection portion 11c, and a first beam 31.

[0013] As shown in FIG. 2, the support portion 10S is between the base body 50S and the supported region 10Ms in the first direction D1.

[0014] The first beam 31 extends along a second direction D2. The second direction D2 intersects the first direction D1. The second direction D2 is, for example, the X-axis direction.

[0015] The first beam position of the first beam 31 in the second direction D2 is between the first movable region position of the first movable region 10Ma in the second direction D2 and the support portion position of the support portion 10S in the second direction D2.

[0016] The first end 31e of the first beam 31 is connected to the first connection structure 21c. The first other end 31f of the first beam 31 is connected to the supported region 10Ms.

[0017] The first structure position of the first structure 21 in the second direction D2 is between the first movable region position (the position of the first movable region 10Ma in the second direction D2) and the first beam position (the position of the first beam 31 in the second direction D2). The first connection structure position of the first connection structure 21c in the second direction D2 is between the first structure position and the first beam position. The first support structure position of the first support structure 11S in the second direction D2 is between the first structure position and the support portion position.

[0018] The first structure 21 includes a first portion 21e, a first other portion 21f, and a first intermediate portion 21m. The third direction D3 from the first portion 21e to the first other portion 21f intersects a plane including the first direction D1 and the second direction D2. The first intermediate portion 21m is between the first portion 21e and the first other portion 21f.

[0019] The first portion 21e is connected to the first connection structure 21c. The first other portion 21f is connected to the first movable region 10Ma. The first intermediate portion 21m is connected to the first support structure 11S.

[0020] For example, the first member 10M includes a first portion connection part 21ec, a first other portion connection part 21fc, and a first intermediate portion connection part 21mc. The first portion connection part 21ec connects the first portion 21e to the first connection structure 21c. The first other portion connection part 21fc connects the first other portion 21f to the first movable region 10Ma. The first intermediate portion connection part 21mc connects the first intermediate portion 21m to the first support structure 11S.

[0021] The first connection part 11c connects the first connection structure 21c to the first support structure 11S.

[0022] For example, the first member 10M can move along the X-axis direction. In response to an external force, for example, the first movable region 10Ma moves along the X-axis direction. The movement of the first movable region 10Ma is transmitted to the first connection structure 21c by the first structure 21. The first structure 21 is, for example, a lever. The first portion 21e is, for example, the point of application. The first other portion 21f is, for example, the point of force. The first intermediate portion 21m is, for example, the fulcrum.

[0023] For example, a stress along the X-axis direction is applied to the first connection structure 21c. As a result, a compressive stress or a tensile stress is applied to the first beam 31. As will be described later, the first beam 31 vibrates when an alternating current signal is applied. The resonance frequency of the first beam 31 changes according to the stress applied to the first beam 31. By detecting the change in the resonance frequency of the first beam 31, an external force (for example, acceleration) applied can be detected.

[0024] In an embodiment, the first connection structure 21c is connected to the first support structure 11S by the first connection portion 11c. As a result, compared with a reference example in which the first connection structure 21c is not connected to the first support structure 11S, the movement of the first connection structure 21c becomes stable. Thereby, compared with the reference example, stable detection becomes possible. A sensor capable of improving detection accuracy can be provided.

[0025] As shown in FIG. 1, in this example, the first member 10M includes a second structure 22, a second support structure 12S, and a second connection portion 12c.

[0026] The position of the second structure 22 in the second direction D2 is between the first movable region position and the first beam position. The position of the second support structure 12S in the second direction D2 is between the position of the second structure and the position of the support portion.

[0027] The second structure 22 includes a second portion 22e, a second other portion 22f, and a second intermediate portion 22m. The direction from the second other portion 22f to the second portion 22e is along the third direction D3. The second intermediate portion 22m is between the second other portion 22f and the second portion 22e. The second portion 22e is connected to the first connection structure 21c. The second other portion 22f is connected to the first movable region 10Ma. The second intermediate portion 22m is connected to the second support structure 12S.

[0028] For example, the first member 10M includes a second portion connection portion 22ec, a second other portion connection portion 22fc, and a second intermediate portion connection portion 22mc. The second portion connection portion 22ec connects the second portion 22e to the first connection structure 21c. The second other portion connection portion 22fc connects the second other portion 22f to the first movable region 10Ma. The second intermediate portion connection portion 22mc connects the second intermediate portion 22m to the second support structure 12S.

[0029] The second connection portion 12c connects the first connection structure 21c to the second support structure 12S. By connecting the first connection structure 21c to the second support structure 12S, the first connection structure 21c becomes stable.

[0030] In the third direction D3, the first connection structure 21c is between at least a part of the second support structure 12S and at least a part of the first support structure 11S. In the third direction D3, the first connection portion 11c is between the first connection structure 21c and at least a part of the first support structure 11S. In the third direction D3, the second connection portion 12c is between at least a part of the second support structure 12S and the first connection structure 21c.

[0031] For example, the movement of the first movable region 10Ma is transmitted to the first connection structure 21c by the second structure 22. The second structure 22 is, for example, a lever. The second part 22e is, for example, the point of application. The second other part 22f is, for example, the force point. The second intermediate part 22m is, for example, the fulcrum.

[0032] By providing the second structure 22 and the second support structure 12S, the first connection structure 21c is stabilized. More stable detection becomes possible.

[0033] As shown in FIG. 1, in this example, the first member 10M includes a second movable region 10Mb, a third structure 23, a third support structure 13S, a second connection structure 22c, a third connection portion 13c, and a second beam 32. In the second direction D2, the supported region 10Ms is between the first movable region 10Ma and the second movable region 10Mb.

[0034] The second beam 32 extends along the second direction D2. The second beam position of the second beam 32 in the second direction D2 is between the support portion position and the second movable region position of the second movable region 10Mb in the second direction D2. The second end 32e of the second beam 32 is connected to the second connection structure 22c. The second other end 32f of the second beam 32 is connected to the supported region 10Ms.

[0035] The position of the third structure 23 in the second direction D2 is between the second beam position and the second movable region position. The position of the second connection structure 22c in the second direction D2 is between the second beam position and the third structure position. The position of the third support structure 13S in the second direction D2 is between the support portion position and the third structure position.

[0036] The third structure 23 includes a third portion 23e, a third other portion 23f, and a third intermediate portion 23m. The direction from the third portion 23e to the third other portion 23f is along the third direction D3. The third intermediate portion 23m is between the third portion 23e and the third other portion 23f.

[0037] The third portion 23e is connected to the second connection structure 22c. The third other portion 23f is connected to the second movable region 10Mb. The third intermediate portion 23m is connected to the third support structure 13S.

[0038] For example, the first member 10M includes a third portion connection part 23ec, a third other portion connection part 23fc, and a third intermediate portion connection part 23mc. The third portion connection part 23ec connects the third portion 23e to the second connection structure 22c. The third other portion connection part 23fc connects the third other portion 23f to the second movable region 10Mb. The third intermediate portion connection part 23mc connects the third intermediate portion 23m to the third support structure 13S.

[0039] The third connection part 13c connects the second connection structure 22c to the third support structure 13S. By connecting the second connection structure 22c to the third support structure 13S, the second connection structure 22c is stabilized.

[0040] For example, the movement of the second movable region 10Mb is transmitted to the second connection structure 22c by the third structure 23. The third structure 23 is, for example, a lever. The third portion 23e is, for example, the point of application of force. The third other portion 23f is, for example, the point of effort. The third intermediate portion 23m is, for example, the fulcrum.

[0041] As shown in FIG. 1, in this example, the first member 10M includes a fourth structure 24, a fourth support structure 14S, and a fourth connection portion 14c. The position of the fourth structure 24 in the second direction D2 is between the second beam position and the second movable region position. The position of the fourth support structure 14S in the second direction D2 is between the support portion position and the fourth structure position.

[0042] The fourth structure 24 includes a fourth portion 24e, a fourth other portion 24f, and a fourth intermediate portion 24m. The direction from the fourth other portion 24f to the fourth portion 24e is along the third direction D3. The fourth intermediate portion 24m is between the fourth other portion 24f and the fourth portion 24e. The fourth portion 24e is connected to the second connection structure 22c. The fourth other portion 24f is connected to the second movable region 10Mb. The fourth intermediate portion 24m is connected to the fourth support structure 14S.

[0043] For example, the first member 10M includes a fourth portion connection portion 24ec, a fourth other portion connection portion 24fc, and a fourth intermediate portion connection portion 24mc. The fourth portion connection portion 24ec connects the fourth portion 24e to the second connection structure 22c. The fourth other portion connection portion 24fc connects the fourth other portion 24f to the second movable region 10Mb. The fourth intermediate portion connection portion 24mc connects the fourth intermediate portion 24m to the fourth support structure 14S.

[0044] The fourth connection portion 14c connects the second connection structure 22c to the fourth support structure 14S. By connecting the second connection structure 22c to the fourth support structure 14S, the second connection structure 22c is stabilized.

[0045] In the third direction D3, the second connection structure 22c is between at least a part of the fourth support structure 14S and at least a part of the third support structure 13S. In the third direction D3, the third connection portion 13c is between the second connection structure 22c and at least a part of the third support structure 13S. In the third direction D3, the fourth connection portion 14c is between at least a part of the fourth support structure 14S and the second connection structure 22c.

[0046] For example, the movement of the second movable region 10 Mb is transmitted to the second connection structure 22c by the fourth structure 24. The fourth structure 24 is, for example, a lever. The fourth part 24e is, for example, the point of application. The fourth other part 24f is, for example, the effort point. The fourth intermediate part 24m is, for example, the fulcrum.

[0047] FIG. 3 is a schematic plan view illustrating a part of the sensor according to the first embodiment. In FIG. 3, a part of FIG. 1 is shown enlarged. As shown in FIG. 3, the sensor 110 may include a first electrode 51 and a first counter electrode 51A. The first electrode 51 is fixed to the substrate 50S. The first counter electrode 51A is fixed to the substrate 50S.

[0048] The first member 10M further includes a first beam electrode 31E connected to the first beam 31 and a first counter beam electrode 31AE connected to the first beam 31. For example, in the third direction D3, the first beam 31 is between the first counter beam electrode 31AE and the first beam electrode 31E. The first electrode 51 faces the first beam electrode 31E. The first counter electrode 51A faces the first counter beam electrode 31AE.

[0049] As shown in FIG. 3, a control unit 70 may be provided. The control unit 70 may be included in the sensor 110. The control unit 70 may be provided separately from the sensor 110.

[0050] The control unit 70 is electrically connected to the first electrode 51, the first counter electrode 51A, the first beam electrode 31E, and the first counter beam electrode 31AE. For example, the first beam electrode 31E and the first counter beam electrode 31AE are electrically connected to the first member 10M (for example, the supported region 10Ms).

[0051] The control unit 70 can apply a drive signal including an AC component between the first electrode 51 and the first beam electrode 31E. The control unit 70 can detect an electrical signal generated between the first counter electrode 51A and the first counter beam electrode 31AE. By detecting a change in the electrical signal generated between the first counter electrode 51A and the first counter beam electrode 31AE, an external force can be detected.

[0052] As shown in FIG. 3, the sensor 110 may include a second electrode 52 and a second counter electrode 52A. The second electrode 52 is fixed to the substrate 50S. The second counter electrode 52A is fixed to the substrate 50S.

[0053] The first member 10M may further include a second beam electrode 32E connected to the second beam 32 and a second counter beam electrode 32AE connected to the second beam 32. In the third direction D3, the second beam 32 is between the second counter beam electrode 32AE and the second beam electrode 32E. The second electrode 52 faces the second beam electrode 32E. The second counter electrode 52A faces the second counter beam electrode 32AE. For example, the second beam electrode 32E and the second counter beam electrode 32AE are electrically connected to the first member 10M (e.g., the supported region 10Ms).

[0054] The control unit 70 can apply a drive signal including an AC component between the second electrode 52 and the second beam electrode 32E. The control unit 70 can detect an electrical signal generated between the second counter electrode 52A and the second counter beam electrode 32AE.

[0055] As shown in FIG. 1, the first member 10M may include a third movable region 10Mc and a fourth movable region 10Md. The direction from the fourth movable region 10Md to the third movable region 10Mc is along the third direction D3. The third movable region 10Mc and the fourth movable region 10Md are continuous with the first movable region 10Ma and the second movable region 10Mb. There is a supported region 10Ms between the third movable region 10Mc and the fourth movable region 10Md.

[0056] As shown in FIG. 3, the first member 10M may further include a first movable region connection portion 11A. The position of the first support structure 11S in the third direction D3 is between the position of the supported region 10Ms in the third direction D3 and the position of the third movable region 10Mc in the third direction D3. The first movable region connection portion 11A connects the first support structure 11S to the third movable region 10Mc. By providing the first movable region connection portion 11A, the displacement of the first member 10M along the second direction D2 becomes stable.

[0057] As shown in FIG. 3, the first member 10M may further include a second movable region connection portion 12A. The position of the second support structure 12S in the third direction D3 is between the position of the fourth movable region 10Md in the third direction D3 and the position of the supported region 10Ms in the third direction D3. The second movable region connection portion 12A connects the second support structure 12S to the fourth movable region 10Md. By providing the second movable region connection portion 12A, the displacement of the first member 10M along the second direction D2 becomes stable.

[0058] As shown in FIG. 3, the first member 10M may further include a third movable region connection portion 13A. The position of the third support structure 13S in the third direction D3 is between the position of the supported region 10Ms in the third direction D3 and the position of the third movable region 10Mc in the third direction D3. The third movable region connection portion 13A connects the third support structure 13S to the third movable region 10Mc. By providing the third movable region connection portion 13A, the displacement of the first member 10M along the second direction D2 becomes stable.

[0059] As shown in FIG. 3, the first member 10M may further include a fourth movable region connection portion 14A. The position of the fourth support structure 14S in the third direction D3 is between the position of the fourth movable region 10Md in the third direction D3 and the position of the supported region 10Ms in the third direction D3. The fourth movable region connection portion 14A connects the fourth support structure 14S to the fourth movable region 10Md. By providing the fourth movable region connection portion 14A, the displacement of the first member 10M along the second direction D2 becomes stable.

[0060] FIG. 4 is a schematic plan view illustrating the sensor according to the first embodiment. In FIG. 4, a part of FIG. 1 is shown enlarged. As shown in FIG. 4, let the length of the first connection portion 11c along the third direction D3 be the first length L1. Let the length of the first connection portion 11c along the second direction D2 be the second length L2. For example, the first length L1 is longer than the second length L2. The first connection structure 21c connected to the first connection portion 11c can be easily displaced along the second direction D2. The position of the first connection structure 21c in the third direction D3 becomes stable.

[0061] As shown in FIG. 4, let the distance along the third direction D3 between the first portion 21e and the first intermediate portion 21m be the first distance d1. Let the distance along the third direction D3 between the first intermediate portion 21m and the first other portion 21f be the second distance d2. The first distance d1 is shorter than the second distance d2. With such a first structure 21, for example, the displacement along the second direction D2 of the first movable region 10Ma is efficiently transmitted to the first connection structure 21c.

[0062] The configuration regarding the first connection portion 11c is applicable to the second connection portion 12c, the third connection portion 13c, and the fourth connection portion 14c. The configuration regarding the first structure 21 is applicable to the second structure 22, the third structure 23, and the fourth structure 24.

[0063] FIG. 5 is a schematic plan view illustrating the sensor according to the first embodiment. As shown in FIG. 5, the sensor 111 according to the embodiment also includes a base 50S, a support portion 10S, and a first member 10M. In the sensor 111, the first member 10M includes a first opposed beam 31A and a second opposed beam 32A. The configuration of the sensor 111 except for this may be the same as the configuration of the sensor 110.

[0064] The configurations of the first structure 21, the first support structure 11S, the first connection structure 21c, the first connection portion 11c, and the first beam 31 in the sensor 111 may be the same as those in the sensor 110.

[0065] In sensor 111, the first member 10M includes a second structure 22, a second support structure 12S, a second connection portion 12c, and a first opposing beam 31A. The first opposing beam 31A extends along the second direction D2. The position of the second structure 22 in the second direction D2 is between the first movable region position and the position of the first opposing beam 31A in the second direction D2. The first opposing beam end 31Ae of the first opposing beam 31A is connected to the first connection structure 21c. The other end 31Af of the first opposing beam 31A is connected to the supported region 10Ms. The position of the second support structure 12S in the second direction D2 is between the position of the second structure and the position of the support portion.

[0066] The second structure 22 includes a second portion 22e, a second other portion 22f, and a second intermediate portion 22m. The direction from the second other portion 22f to the second portion 22e is along the third direction D3. The second intermediate portion 22m is between the second other portion 22f and the second portion 22e. The second portion 22e is connected to the first connection structure 21c. The second other portion 22f is connected to the first movable region 10Ma. The second intermediate portion 22m is connected to the second support structure 12S.

[0067] The second connection portion 12c connects the first connection structure 21c to the second support structure 12S. In the third direction D3, the first connection structure 21c is between at least a part of the second support structure 12S and at least a part of the first support structure 11S. In the third direction D3, the first connection portion 11c is between the first connection structure 21c and at least a part of the first support structure 11S. In the third direction D3, the second connection portion 12c is between at least a part of the second support structure 12S and the first connection structure 21c. In the third direction D3, the first opposing beam 31A is between the second support structure 12S and the first beam 31.

[0068] As shown in FIG. 5, the sensor 111 may include a first electrode 51 and a first counter electrode 51A. The first electrode 51 and the first counter electrode 51A are fixed to the substrate 50S. The first member 10M may include a first beam electrode 31E connected to the first beam 31 and a first counter beam electrode 31AE connected to the first counter beam 31A. The first electrode 51 faces the first beam electrode 31E. The first counter electrode 51A faces the first counter beam electrode 31AE.

[0069] As described with reference to FIG. 3, a control unit 70 may be provided. The control unit 70 can apply a drive signal including an AC component between the first electrode 51 and the first beam electrode 31E. The control unit 70 can detect an electrical signal generated between the first counter electrode 51A and the first counter beam electrode 31AE.

[0070] As shown in FIG. 5, the first member 10M may include a second movable region 10Mb, a third structure 23, a third support structure 13S, a second connection structure 22c, a third connection portion 13c, and a second beam 32. In the second direction D2, the supported region 10Ms is between the first movable region 10Ma and the second movable region 10Mb.

[0071] The second beam 32 extends along the second direction D2. The second beam position of the second beam 32 in the second direction D2 is between the support portion position and the second movable region position of the second movable region 10Mb in the second direction D2. The second end 32e of the second beam 32 is connected to the second connection structure 22c. The second other end 32f of the second beam 32 is connected to the supported region 10Ms.

[0072] The third structure position of the third structure 23 in the second direction D2 is between the second beam position and the second movable region position. The second connection structure position of the second connection structure 22c in the second direction D2 is between the second beam position and the third structure position. The third support structure position of the third support structure 13S in the second direction D2 is between the support portion position and the third structure position.

[0073] The third structure 23 includes a third portion 23e, a third other portion 23f, and a third intermediate portion 23m. The direction from the third portion 23e to the third other portion 23f is along the third direction D3. The third intermediate portion 23m is between the third portion 23e and the third other portion 23f. The third portion 23e is connected to the second connection structure 22c. The third other portion 23f is connected to the second movable region 10Mb. The third intermediate portion 23m is connected to the third support structure 13S. The third connection portion 13c connects the second connection structure 22c to the third support structure 13S.

[0074] As shown in FIG. 5, the first member 10M includes a fourth structure 24, a fourth support structure 14S, a fourth connection portion 14c, and a second opposing beam 32A. The second opposing beam 32A extends along the second direction D2. The position of the fourth structure 24 in the second direction D2 is between the position of the second opposing beam 32A in the second direction D2 and the position of the second movable region. The second opposing beam end 32Ae of the second opposing beam 32A is connected to the second connection structure 22c. The second opposing beam other end 32Af of the second opposing beam 32A is connected to the supported region 10Ms. The position of the fourth support structure 14S in the second direction D2 is between the support portion position and the position of the fourth structure.

[0075] The fourth structure 24 includes a fourth portion 24e, a fourth other portion 24f, and a fourth intermediate portion 24m. The direction from the fourth other portion 24f to the fourth portion 24e is along the third direction D3. The fourth intermediate portion 24m is between the fourth other portion 24f and the fourth portion 24e. The fourth portion 24e is connected to the second connection structure 22c. The fourth other portion 24f is connected to the second movable region 10Mb. The fourth intermediate portion 24m is connected to the fourth support structure 14S.

[0076] The fourth connection part 14c connects the second connection structure 22c to the fourth support structure 14S. In the third direction D3, the second connection structure 22c is between at least a part of the fourth support structure 14S and at least a part of the third support structure 13S. In the third direction D3, the third connection part 13c is between the second connection structure 22c and at least a part of the third support structure 13S. In the third direction D3, the fourth connection part 14c is between at least a part of the fourth support structure 14S and the second connection structure 22c. In the third direction D3, the second opposed beam 32A is between the fourth support structure 14S and the second beam 32.

[0077] As shown in FIG. 5, the sensor 111 may include a second electrode 52 and a second opposed electrode 52A. The second electrode 52 and the second opposed electrode 52A are fixed to the base body 50S. The first member 10M may include a second beam electrode 32E connected to the second beam 32 and a second opposed beam electrode 32AE connected to the second opposed beam 32A. The second electrode 52 faces the second beam electrode 32E. The second opposed electrode 52A faces the second opposed beam electrode 32AE.

[0078] As described with reference to FIG. 3, a control unit 70 may be provided. The control unit 70 can apply a drive signal including an AC component between the second electrode 52 and the second beam electrode 32E. The control unit 70 can detect an electrical signal generated between the second opposed electrode 52A and the second opposed beam electrode 32AE.

[0079] In the sensor 111, the first beam 31 and the first opposed beam 31A form one pair. The second beam 32 and the second opposed beam 32A form another pair. For example, the vibration amplitude at the resonance frequency in the anti-phase mode increases. The mechanical Q value (quality factor) increases. High-precision detection becomes possible.

[0080] As already described, at least a part of the first member 10M may be highly conductive. The first member 10M may include, for example, conductive silicon or the like. For example, at least any one of the supported region 10Ms, the first support structure 11S, the second support structure 12S, the third support structure 13S, and the first support structure 11S may include a metal layer. For example, high thermal conductivity can be obtained.

[0081] (Second Embodiment) The second embodiment relates to an electronic device. FIG. 6 is a schematic diagram illustrating an electronic device according to the second embodiment. As shown in FIG. 6, the electronic device 310 according to the embodiment includes the sensor according to the first embodiment and a circuit control unit 170. In the example of FIG. 6, a sensor 110 is depicted as the sensor. The circuit control unit 170 can control the circuit 180 based on the signal S1 obtained from the sensor. The circuit 180 is, for example, a control circuit of the driving device 185 or the like. According to the embodiment, for example, the circuit 180 for controlling the driving device 185 or the like can be controlled with high precision.

[0082] FIGS. 7(a) to 7(h) are schematic diagrams illustrating applications of the electronic device according to the embodiment. As shown in FIG. 7(a), the electronic device 310 may be at least a part of a robot. As shown in FIG. 7(b), the electronic device 310 may be at least a part of a machine robot provided in a manufacturing factory or the like. As shown in FIG. 7(c), the electronic device 310 may be at least a part of an automatic guided vehicle inside a factory or the like. As shown in FIG. 7(d), the electronic device 310 may be at least a part of a drone (unmanned aerial vehicle). As shown in FIG. 7(e), the electronic device 310 may be at least a part of an airplane. As shown in FIG. 7(f), the electronic device 310 may be at least a part of a ship. As shown in FIG. 7(g), the electronic device 310 may be at least a part of a submarine. As shown in FIG. 7(h), the electronic device 310 may be at least a part of an automobile. The electronic device 310 may include, for example, at least any one of a robot and a moving body.

[0083] Figs. 8(a) and 8(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. As shown in Fig. 8(a), the sensor 430 according to the embodiment includes the sensor according to the first embodiment and a transceiver unit 420. In the example of Fig. 8(a), the sensor 110 is depicted as the sensor. The transceiver unit 420 can transmit the signal obtained from the sensor 110 by, for example, at least one of wireless and wired methods. The sensor 430 is provided, for example, on a slope surface 410 such as a road 400. The sensor 430 can monitor the state of, for example, a facility (such as infrastructure). The sensor 430 may be, for example, a state monitoring device.

[0084] For example, the sensor 430 can detect changes in the state of the slope surface 410 of the road 400 with high precision. The change in the state of the slope surface 410 includes, for example, at least one of a change in the inclination angle and a change in the vibration state. The signal (inspection result) obtained from the sensor 110 is transmitted by the transceiver unit 420. The state of a facility (such as infrastructure) can be monitored, for example, continuously.

[0085] As shown in Fig. 8(b), the sensor 430 is provided, for example, on a part of a bridge 460. The bridge 460 is provided over a river 470. For example, the bridge 460 includes at least one of a main girder 450 and bridge piers 440. The sensor 430 is provided on at least one of the main girder 450 and the bridge piers 440. For example, due to deterioration or the like, the angle of at least one of the main girder 450 and the bridge piers 440 may change. For example, the vibration state may change in at least one of the main girder 450 and the bridge piers 440. These changes are detected with high precision by the sensor 430. The detection result can be transmitted to an arbitrary location by the transceiver unit 420. Abnormalities can be effectively detected.

[0086] The embodiment includes the following configurations (for example, technical solutions). (Configuration 1) A base body, A support portion fixed to the base body, A first member supported by the support portion, comprising a gap is provided between the base body and a part of the first member, the first member includes a supported region, a first movable region, a first structure, a first support structure, a first connection structure, a first connection portion, and a first beam, the support portion is between the base body and the supported region in a first direction from the base body to the support portion, the first beam extends along a second direction intersecting the first direction, a first beam position of the first beam in the second direction is between a first movable region position of the first movable region in the second direction and a support portion position of the support portion in the second direction, a first end of the first beam is connected to the first connection structure, a first other end of the first beam is connected to the supported region, a first structure position of the first structure in the second direction is between the first movable region position and the first beam position, a first connection structure position of the first connection structure in the second direction is between the first structure position and the first beam position, a first support structure position of the first support structure in the second direction is between the first structure position and the support portion position, the first structure includes a first part, a first other part, and a first intermediate part, a third direction from the first part to the first other part intersects a plane including the first direction and the second direction, the first intermediate part is between the first part and the first other part, the first part is connected to the first connection structure, the first other part is connected to the first movable region, the first intermediate part is connected to the first support structure, the first connection portion is a sensor that connects the first connection structure and the first support structure.

[0087] (Configuration 2) The sensor according to Configuration 1, wherein a first length of the first connection portion along the third direction is longer than a second length of the first connection portion along the second direction.

[0088] (Configuration 3) The sensor according to Configuration 1 or 2, wherein a first distance along the third direction between the first portion and the first intermediate portion is shorter than a second distance along the third direction between the first intermediate portion and the first other portion.

[0089] (Configuration 4) The first member includes a first portion connection portion that connects the first portion to the first connection structure, a first other portion connection portion that connects the first other portion to the first movable region, and a first intermediate portion connection portion that connects the first intermediate portion to the first support structure, and is the sensor according to any one of Configurations 1 to 3.

[0090] (Configuration 5) The first member includes a second structure, a second support structure, and a second connection portion, a second structure position of the second structure in the second direction is between the first movable region position and the first beam position, a second support structure position of the second support structure in the second direction is between the second structure position and the support portion position, the second structure includes a second portion, a second other portion, and a second intermediate portion, a direction from the second other portion to the second portion is along the third direction, the second intermediate portion is between the second other portion and the second portion, the second portion is connected to the first connection structure, the second other portion is connected to the first movable region, the second intermediate portion is connected to the second support structure, the second connection portion connects the first connection structure to the second support structure, In the third direction, the first connection structure is located between at least a part of the second support structure and at least a part of the first support structure. In the third direction, the first connection portion is located between the first connection structure and at least a part of the first support structure. The sensor according to any one of Configurations 1 to 4, wherein in the third direction, the second connection portion is located between at least a part of the second support structure and the first connection structure.

[0091] (Configuration 6) A first electrode fixed to the base body, A first counter electrode fixed to the base body, further comprising, The first member further includes a first beam electrode connected to the first beam and a first counter beam electrode connected to the first beam, In the third direction, the first beam is located between the first counter beam electrode and the first beam electrode, The first electrode faces the first beam electrode, The sensor according to Configuration 5, wherein the first counter electrode faces the first counter beam electrode.

[0092] (Configuration 7) further comprising a control unit, The control unit is capable of applying a drive signal including an alternating component between the first electrode and the first beam electrode, The sensor according to Configuration 6, wherein the control unit is capable of detecting an electrical signal generated between the first counter electrode and the first counter beam electrode.

[0093] (Configuration 8) The first member includes a second movable region, a third structure, a third support structure, a second connection structure, a third connection portion, and a second beam, In the second direction, the supported region is located between the first movable region and the second movable region, The second beam extends along the second direction, The second beam position of the second beam in the second direction is between the support portion position and the second movable region position in the second direction of the second movable region. The second end of the second beam is connected to the second connection structure. The second other end of the second beam is connected to the supported region. The third structure position of the third structure in the second direction is between the second beam position and the second movable region position. The second connection structure position of the second connection structure in the second direction is between the second beam position and the third structure position. The third support structure position of the third support structure in the second direction is between the support portion position and the third structure position. The third structure includes a third portion, a third other portion, and a third intermediate portion. The direction from the third portion to the third other portion is along the third direction. The third intermediate portion is between the third portion and the third other portion. The third portion is connected to the second connection structure. The third other portion is connected to the second movable region. The third intermediate portion is connected to the third support structure. The third connection portion is the sensor according to Configuration 5 that connects the second connection structure to the third support structure.

[0094] (Configuration 9) The first member includes a fourth structure, a fourth support structure, and a fourth connection portion. The fourth structure position of the fourth structure in the second direction is between the second beam position and the second movable region position. The fourth support structure position of the fourth support structure in the second direction is between the support portion position and the fourth structure position. The fourth structure includes a fourth portion, a fourth other portion, and a fourth intermediate portion. The direction from the fourth other portion to the fourth portion is along the third direction. The fourth intermediate portion is between the fourth other portion and the fourth portion, The fourth portion is connected to the second connection structure, The fourth other portion is connected to the second movable region, The fourth intermediate portion is connected to the fourth support structure, The fourth connection portion connects the second connection structure to the fourth support structure, In the third direction, the second connection structure is between at least a part of the fourth support structure and at least a part of the third support structure, In the third direction, the third connection portion is between the second connection structure and at least a part of the third support structure, In the third direction, the fourth connection portion is between at least a part of the fourth support structure and the second connection structure, the sensor according to Configuration 8.

[0095] (Configuration 10) A second electrode fixed to the base, A second counter electrode fixed to the base, Further comprising, The first member further includes a second beam electrode connected to the second beam and a second counter beam electrode connected to the second beam, In the third direction, the second beam is between the second counter beam electrode and the second beam electrode, The second electrode faces the second beam electrode, The second counter electrode faces the second counter beam electrode, the sensor according to Configuration 9.

[0096] (Configuration 11) Further comprising a control unit, The control unit can apply a drive signal including an AC component between the second electrode and the second beam electrode, The control unit can detect an electrical signal generated between the second counter electrode and the second counter beam electrode, the sensor according to Configuration 10.

[0097] (Configuration 12) The first member includes a second structure, a second support structure, a second connection portion, and a first opposing beam. The first opposing beam extends along the second direction. The second structure position of the second structure in the second direction is between the first movable region position and the first opposing beam position of the first opposing beam in the second direction. One end of the first opposing beam is connected to the first connection structure. The other end of the first opposing beam is connected to the supported region. The second support structure position of the second support structure in the second direction is between the second structure position and the support portion position. The second structure includes a second portion, a second other portion, and a second intermediate portion. The direction from the second other portion to the second portion is along the third direction. The second intermediate portion is between the second other portion and the second portion. The second portion is connected to the first connection structure. The second other portion is connected to the first movable region. The second intermediate portion is connected to the second support structure. The second connection portion connects the first connection structure and the second support structure. In the third direction, the first connection structure is between at least a part of the second support structure and at least a part of the first support structure. In the third direction, the first connection portion is between the first connection structure and at least a part of the first support structure. In the third direction, the second connection portion is between at least a part of the second support structure and the first connection structure. In the third direction, the first opposing beam is between the second support structure and the first beam. The sensor according to any one of Configurations 1 to 4.

[0098] (Configuration 13) A first electrode fixed to the base, The first counter electrode fixed to the substrate, further comprising, The first member further includes a first beam electrode connected to the first beam and a first counter beam electrode connected to the first counter beam, The first electrode faces the first beam electrode, The first counter electrode faces the first counter beam electrode, the sensor according to Configuration 12.

[0099] (Configuration 14) further comprising a control unit, The control unit can apply a drive signal including an AC component between the first electrode and the first beam electrode, The control unit can detect an electrical signal generated between the first counter electrode and the first counter beam electrode, the sensor according to Configuration 13.

[0100] (Configuration 15) The first member includes a second movable region, a third structure, a third support structure, a second connection structure, a third connection portion, and a second beam, In the second direction, the supported region is between the first movable region and the second movable region, The second beam extends along the second direction, The second beam position of the second beam in the second direction is between the support portion position and the second movable region position of the second movable region, The second end of the second beam is connected to the second connection structure, The second other end of the second beam is connected to the supported region, The third structure position of the third structure in the second direction is between the second beam position and the second movable region position, The second connection structure position of the second connection structure in the second direction is between the second beam position and the third structure position, The third support structure position of the third support structure in the second direction is between the support portion position and the third structure position, The third structure includes a third portion, a third other portion, and a third intermediate portion, The direction from the third part to the third other part is along the third direction, The third intermediate part is between the third part and the third other part, The third part is connected to the second connection structure, The third other part is connected to the second movable region, The third intermediate part is connected to the third support structure, The third connection part connects the second connection structure to the third support structure, The first member includes a fourth structure, a fourth support structure, a fourth connection part, and a second opposing beam, The second opposing beam extends along the second direction, The position of the fourth structure in the second direction of the fourth structure is between the position of the second opposing beam in the second direction of the second opposing beam and the position of the second movable region, The end of the second opposing beam is connected to the second connection structure, The other end of the second opposing beam is connected to the supported region, The position of the fourth support structure in the second direction of the fourth support structure is between the position of the support part and the position of the fourth structure, The fourth structure includes a fourth part, a fourth other part, and a fourth intermediate part, The direction from the fourth other part to the fourth part is along the third direction, The fourth intermediate part is between the fourth other part and the fourth part, The fourth part is connected to the second connection structure, The fourth other part is connected to the second movable region, The fourth intermediate part is connected to the fourth support structure, The fourth connection part connects the second connection structure to the fourth support structure, In the third direction, the second connection structure is between at least a part of the fourth support structure and at least a part of the third support structure, In the third direction, the third connection portion is between the second connection structure and at least a part of the third support structure. In the third direction, the fourth connection portion is between at least a part of the fourth support structure and the second connection structure. The sensor according to any one of Configurations 12 to 14, wherein in the third direction, the second opposing beam is between the fourth support structure and the second beam.

[0101] (Configuration 16) The first member further includes a fourth movable region and a fourth movable region connection portion. The position of the fourth support structure in the third direction is between the position of the fourth movable region in the third direction and the position of the supported region in the third direction. The sensor according to Configuration 15, wherein the fourth movable region connection portion connects the fourth support structure to the fourth movable region.

[0102] (Configuration 17) The first member further includes a third movable region and a third movable region connection portion. The position of the third support structure in the third direction is between the position of the supported region in the third direction and the position of the third movable region in the third direction. The sensor according to Configuration 8, wherein the third movable region connection portion connects the third support structure to the third movable region.

[0103] (Configuration 18) The first member further includes a fourth movable region and a second movable region connection portion. The position of the second support structure in the third direction is between the position of the fourth movable region in the third direction and the position of the supported region in the third direction. The sensor according to Configuration 5, wherein the second movable region connection portion connects the second support structure to the fourth movable region.

[0104] (Configuration 19) The first member further includes a third movable region and a first movable region connection part. The position of the first support structure in the third direction is between the position of the supported region in the third direction and the position of the third movable region in the third direction. The first movable region connection part connects the first support structure to the third movable region, and the sensor according to Configuration 1.

[0105] (Configuration 20) The sensor according to any one of Configurations 1 to 19, A circuit control unit capable of controlling a circuit based on a signal obtained from the sensor, An electronic device including the same.

[0106] According to the embodiment, a sensor and an electronic device capable of stable detection can be provided.

[0107] As described above, the embodiments of the present invention have been described with reference to specific examples. However, the present invention is not limited to these specific examples. For example, regarding the specific configurations of each element such as the substrate, support part, first member, and control part included in the sensor, those skilled in the art can appropriately select from the known range to implement the present invention in the same manner, and as long as the same effects can be obtained, it is included in the scope of the present invention.

[0108] Also, combinations of any two or more elements of each specific example within a technically possible range are also included in the scope of the present invention as long as they include the gist of the present invention.

[0109] In addition, based on the sensors and electronic devices described above as embodiments of the present invention, all sensors and electronic devices that those skilled in the art can appropriately design and modify and implement also belong to the scope of the present invention as long as they include the gist of the present invention.

[0110] In addition, within the scope of the idea of the present invention, those skilled in the art can conceive various modification examples and correction examples, and it is understood that those modification examples and correction examples also belong to the scope of the present invention.

[0111] Although some embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the gist of the invention. These embodiments and their modifications are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalent scope thereof.

Explanation of Reference Numerals

[0112] 10M: First member, 10Ma - 10Md: First to fourth movable regions, 10Ms: Supported region, 10S: Support part, 11A - 14A: First to fourth movable region connection parts, 11S - 14S: First to fourth support structures, 11c - 14c: First to fourth connection parts, 21 - 24: First to fourth structures, 21c, 22: First and second connection structures, 21e - 24e: First to fourth parts, 21ec - 24ec: First to fourth part connection parts, 21f - 24f: First to fourth other parts, 21fc - 24fc: First to fourth other part connection parts, 21m - 24m: First to fourth intermediate parts, 21mc - 24mc: First to fourth intermediate part connection parts, 31, 32: First and second beams, 31A, 32A: First and second opposing beams, 31AE, 32AE: First and second opposing beam electrodes, 31Ae, 32Ae: First and second opposing beam ends, 31Af, 32Af: First and second opposing beam other ends, 31E, 32E: First and second beam electrodes, 31e, 32e: First and second ends, 31f, 32f: First and second other ends, 50S: Substrate, 51, 52: First and second electrodes, 51A, 52A: First and second opposing electrodes, 70: Control unit, 110, 111: Sensors, 170: Circuit control unit, 180: Circuit, 185: Driving device, 310: Electronic device, 400: Road, 410: Slope surface, 420: Transceiver, 430: Sensor, 440: Pier, 450: Main girder, 460: Bridge, 470: River, D1~D3: First to third directions, L1, L2: First and second lengths, S1: Signal, d1, d2: First and second distances, g1: Gap

Claims

1. a base body, a support portion fixed to the base body, a first member supported by the support portion, comprising: a gap is provided between the base body and a part of the first member, the first member includes a supported region, a first movable region, a first structure, a first support structure, a first connection structure, a first connection portion, and a first beam, the support portion is located between the base body and the supported region in a first direction from the base body to the support portion, the first beam extends along a second direction intersecting the first direction, a first beam position of the first beam in the second direction is between a first movable region position of the first movable region in the second direction and a support portion position of the support portion in the second direction, a first end of the first beam is connected to the first connection structure, a first other end of the first beam is connected to the supported region, a first structure position of the first structure in the second direction is between the first movable region position and the first beam position, a first connection structure position of the first connection structure in the second direction is between the first structure position and the first beam position, a first support structure position of the first support structure in the second direction is between the first structure position and the support portion position, the first structure includes a first part, a first other part, and a first intermediate part, a third direction from the first part to the first other part intersects a plane including the first direction and the second direction, the first intermediate part is between the first part and the first other part, the first part is connected to the first connection structure, the first other part is connected to the first movable region, the first intermediate part is connected to the first support structure, the first connection portion is a sensor that connects the first connection structure to the first support structure.

2. The sensor according to claim 1, wherein a first length of the first connection portion along the third direction is longer than a second length of the first connection portion along the second direction.

3. the first member includes a second structure, a second support structure, and a second connection portion, a second structure position of the second structure in the second direction is between the first movable region position and the first beam position, a second support structure position of the second support structure in the second direction is between the second structure position and the support portion position, the second structure includes a second part, a second other part, and a second intermediate part, The direction from the second other part to the second part is along the third direction, The second intermediate part is between the second other part and the second part, The second part is connected to the first connection structure, The second other part is connected to the first movable region, The second intermediate part is connected to the second support structure, The second connection part connects the first connection structure to the second support structure, In the third direction, the first connection structure is between at least a part of the second support structure and at least a part of the first support structure, In the third direction, the first connection part is between the first connection structure and at least a part of the first support structure, In the third direction, the second connection part is between at least a part of the second support structure and the first connection structure. The sensor according to claim 1.

4. A first electrode fixed to the substrate, A first counter electrode fixed to the substrate, Further comprising, The first member further includes a first beam electrode connected to the first beam and a first counter beam electrode connected to the first beam, In the third direction, the first beam is between the first counter beam electrode and the first beam electrode, The first electrode faces the first beam electrode, The first counter electrode faces the first counter beam electrode. The sensor according to claim 3.

5. Further comprising a control unit, The control unit can apply a drive signal including an alternating component between the first electrode and the first beam electrode, The control unit can detect an electrical signal generated between the first counter electrode and the first counter beam electrode. The sensor according to claim 4.

6. The first member includes a second movable region, a third structure, a third support structure, a second connection structure, a third connection part and a second beam, In the second direction, the supported region is between the first movable region and the second movable region, The second beam extends along the second direction, The second beam position of the second beam in the second direction is between the support part position and the second movable region position of the second movable region in the second direction, The second end of the second beam is connected to the second connection structure, The second other end of the second beam is connected to the supported region, The third structure position of the third structure in the second direction is between the second beam position and the second movable region position, The position of the second connection structure in the second direction is between the second beam position and the third structure position. The position of the third support structure in the second direction is between the support portion position and the third structure position. The third structure includes a third portion, a third other portion, and a third intermediate portion. The direction from the third portion to the third other portion is along the third direction. The third intermediate portion is between the third portion and the third other portion. The third portion is connected to the second connection structure. The third other portion is connected to the second movable region. The third intermediate portion is connected to the third support structure. The third connection portion connects the second connection structure to the third support structure, the sensor according to claim 3.

7. The first member includes a fourth structure, a fourth support structure, and a fourth connection portion. The position of the fourth structure in the second direction is between the second beam position and the second movable region position. The position of the fourth support structure in the second direction is between the support portion position and the fourth structure position. The fourth structure includes a fourth portion, a fourth other portion, and a fourth intermediate portion. The direction from the fourth other portion to the fourth portion is along the third direction. The fourth intermediate portion is between the fourth other portion and the fourth portion. The fourth portion is connected to the second connection structure. The fourth other portion is connected to the second movable region. The fourth intermediate portion is connected to the fourth support structure. The fourth connection portion connects the second connection structure to the fourth support structure. In the third direction, the second connection structure is between at least a part of the fourth support structure and at least a part of the third support structure. In the third direction, the third connection portion is between the second connection structure and at least a part of the third support structure. In the third direction, the fourth connection portion is between at least a part of the fourth support structure and the second connection structure, the sensor according to claim 6.

8. The first member includes a second structure, a second support structure, a second connection portion, and a first opposing beam. The first opposing beam extends along the second direction. The second structure position of the second structure in the second direction is between the first movable region position and the first opposing beam position of the first opposing beam in the second direction. The first opposing beam end of the first opposing beam is connected to the first connection structure. The other end of the first opposing beam of the first opposing beam is connected to the supported region. The second support structure position of the second support structure in the second direction is between the second structure position and the support portion position. The second structure includes a second portion, a second other portion, and a second intermediate portion. The direction from the second other portion to the second portion is along the third direction. The second intermediate portion is between the second other portion and the second portion. The second portion is connected to the first connection structure. The second other portion is connected to the first movable region. The second intermediate portion is connected to the second support structure. The second connection portion connects the first connection structure to the second support structure. In the third direction, the first connection structure is between at least a part of the second support structure and at least a part of the first support structure. In the third direction, the first connection portion is between the first connection structure and at least a part of the first support structure. In the third direction, the second connection portion is between at least a part of the second support structure and the first connection structure. In the third direction, the first opposing beam is between the second support structure and the first beam. The sensor according to claim 1.

9. The first member includes a second movable region, a third structure, a third support structure, a second connection structure, a third connection portion, and a second beam. In the second direction, the supported region is between the first movable region and the second movable region. The second beam extends along the second direction. The second beam position of the second beam in the second direction is between the support portion position and the second movable region position of the second movable region. The second end of the second beam is connected to the second connection structure. The other second end of the second beam is connected to the supported region. The third structure position of the third structure in the second direction is between the second beam position and the second movable region position. The second connection structure position of the second connection structure in the second direction is between the second beam position and the third structure position. The position of the third support structure in the second direction of the third support structure is between the support part position and the third structure position. The third structure includes a third part, a third other part, and a third intermediate part. The direction from the third part to the third other part is along the third direction. The third intermediate part is between the third part and the third other part. The third part is connected to the second connection structure. The third other part is connected to the second movable region. The third intermediate part is connected to the third support structure. The third connection part connects the second connection structure to the third support structure. The first member includes a fourth structure, a fourth support structure, a fourth connection part, and a second opposing beam. The second opposing beam extends along the second direction. The position of the fourth structure in the second direction of the fourth structure is between the position of the second opposing beam in the second direction of the second opposing beam and the position of the second movable region. The end of the second opposing beam is connected to the second connection structure. The other end of the second opposing beam is connected to the supported region. The position of the fourth support structure in the second direction of the fourth support structure is between the support part position and the fourth structure position. The fourth structure includes a fourth part, a fourth other part, and a fourth intermediate part. The direction from the fourth other part to the fourth part is along the third direction. The fourth intermediate part is between the fourth other part and the fourth part. The fourth part is connected to the second connection structure. The fourth other part is connected to the second movable region. The fourth intermediate part is connected to the fourth support structure. The fourth connection part connects the second connection structure to the fourth support structure. In the third direction, the second connection structure is between at least a part of the fourth support structure and at least a part of the third support structure. In the third direction, the third connection part is between the second connection structure and at least a part of the third support structure. In the third direction, the fourth connection part is between at least a part of the fourth support structure and the second connection structure. In the third direction, the second opposing beam is between the fourth support structure and the second beam. The sensor according to claim 8.

10. The sensor according to any one of claims 1 to 9, and A circuit control unit capable of controlling a circuit based on a signal obtained from the sensor. An electronic device provided with

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