Substrate Transfer System and Substrate Transfer Method

Abstract

Obtain information regarding the substrate to be transported. 【Solution means】The substrate transfer system 1 includes a horizontal articulated robot 2 that has a hand 3 for holding the substrate 9 and transfers the substrate, a camera 5 for photographing the substrate, and controllers 18, 20 that receive the photographed data of the camera and detect the color, temperature, or surface wetness of the substrate.

Description

Technical Field

[0001] The technology disclosed herein relates to a substrate transfer system and a substrate transfer method and is related thereto.

Background Art

[0002] Patent Document 1 describes a conventional substrate transfer system. The substrate transfer system includes a horizontally articulated robot. The hand of the robot holds the substrate. The robot transfers the substrate held by the hand.

[0003] The substrate transfer system has a camera. The camera is fixed to the hand. The camera takes a picture of the hand when the hand is not holding the substrate. A diagnostic device including a computer determines whether the hand is deformed based on the image taken by the camera.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Information regarding the substrate can be used in a substrate transfer system including a robot. However, the conventional system cannot acquire information regarding the substrate.

Means for Solving the Problems

[0006] The technology disclosed herein relates to a substrate transfer system. The substrate transfer system includes a horizontally articulated robot having a hand for holding the substrate and transferring the substrate, a camera for photographing the substrate, and a controller that receives the photographing data of the camera and detects wetness on the surface of the substrate. Comprising 、 The hand is an edge grip hand having an edge guide that engages with the outer peripheral edge of the substrate and a second guide that approaches and separates from the substrate on the side opposite to the edge guide with the substrate interposed therebetween. When the detected surface of the substrate is wet, the controller changes the approach operation of the second guide to the substrate. thereof.

Advantages of the Invention

[0007] Since the substrate transfer system described above allows a camera to capture an image of a substrate, information regarding the substrate can be obtained.

Brief Description of the Drawings

[0008]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Modes for Carrying Out the Invention

[0009] Hereinafter, embodiments of the substrate transfer system will be described with reference to the drawings. The substrate transfer system described here is an example.

[0010] (Substrate Transfer System) FIG. 1 is a plan view of the substrate transfer system 1. FIG. 2 is a block diagram of the substrate transfer system 1. The substrate transfer system 1 transfers a substrate 9. The substrate 9 is a semiconductor wafer or a glass substrate. The substrate transfer system 1 is, for example, an EFEM (Equipment Front End Module). The substrate transfer system 1 is, for example, a sorter. The substrate transfer system 1 is, for example, a stocker. The robot system 6 is incorporated in the substrate transfer system 1.

[0011] The substrate transfer system 1 includes a housing 10. The housing 10 has a first wall 11, a second wall 12, a third wall 13, and a fourth wall 14. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 are each a wall perpendicular to the floor. The first wall 11 and the third wall 13 face each other in a first direction. The second wall 12 and the fourth wall 14 face each other in a second direction. The second direction is perpendicular to the first direction. The first wall 11 is connected to the second wall 12 and the first wall 11 is connected to the fourth wall 14, and the third wall 13 is connected to the second wall 12 and the third wall 13 is connected to the fourth wall 14. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 form a closed transfer space 15.

[0012] The housing 10 also has a ceiling wall. The ceiling wall is connected to the first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 and closes the upper end of the transfer space 15. An aligner 42 is located in the transfer space 15. The aligner 42 aligns the substrate 9. The aligner 42 is not an essential element of the substrate transfer system 1 or the robot system 6.

[0013] The illustrated substrate transfer system 1 is incorporated into the substrate processing equipment 4. Note that the substrate processing equipment 4 is not an essential element of the substrate transfer system 1 or the robot system 6. The substrate processing equipment 4 performs, for example, heat treatment, impurity introduction treatment, thin film formation treatment, lithography treatment, cleaning treatment, and planarization treatment on the substrate 9. Alternatively, the substrate processing equipment 4 inspects the appearance or dimensions of the substrate 9. Alternatively, the process performed by the substrate processing equipment 4 may be a temporary storage for delivering the substrate 9. Here, the substrate processing equipment 4 accommodating the substrate 9 is also included in the processing of the substrate 9. The third wall 13 separates the transfer space 15 and the substrate processing equipment 4. The third wall 13 has an opening 16. The opening 16 is openable and closable. When the opening 16 opens, the transfer space 15 and the substrate processing equipment 4 communicate with each other, and when the opening 16 closes, the communication between the transfer space 15 and the substrate processing equipment 4 is blocked.

[0014] The substrate processing equipment 4 has a front opening unified pod (FOUP) 41. The FOUP 41 accommodates the substrate 9. The substrate processing equipment 4 has a plurality of FOUPs 41. The plurality of FOUPs 41 are arranged along the first wall 11. The first wall 11 has an opening 17 corresponding to the FOUP 41. The FOUP opener opens and closes the opening 17. The FOUP opener switches the communication and blockage between the transfer space 15 and the FOUP 41.

[0015] The substrate transfer system 1 includes a robot 2. The robot 2 transfers the substrate 9 between the FOUP 41, the aligner 42, and the substrate processing equipment 4 (see the solid line and two-dot chain line in FIG. 1). The robot 2 is located inside the transfer space 15. The robot 2 is a horizontal articulated robot. The structure of the robot 2 will be described later.

[0016] The substrate transfer system 1 has a system controller 18. Note that the system controller 18 is not an essential element of the substrate transfer system 1 or the robot system 6. The system controller 18 performs overall control of the substrate transfer system 1.

[0017] The robot controller 20 is electrically connected to the system controller 18. The electrical connection includes a wired or wireless connection. The robot controller 20 is also electrically connected to the robot 2. The robot controller 20 and the robot 2 constitute the robot system 6. The robot controller 20 controls the robot 2. More specifically, the robot controller 20 receives a control signal from the system controller 18 and outputs a control signal to the robot 2. The robot 2 receives a control signal from the robot controller 20 and here, conveys the substrate 9. Note that the robot controller 20 is not an essential element of the substrate conveyance system 1 or the robot system 6.

[0018] Also, the aligner 42 is electrically connected to the robot controller 20. The electrical connection includes a wired or wireless connection. The aligner 42 is controlled by the robot controller 20.

[0019] (Structure of the robot) As described above, the robot 2 is a horizontal articulated robot. As shown in FIG. 1, the robot 2 has a base 21. The base 21 is installed in the conveyance space 15. The robot 2 has a manipulator 200. The manipulator 200 includes an arm 22 and a hand 3.

[0020] The base 21 supports the arm 22. The arm 22 is movable up and down with respect to the base 21. The arm 22 has links 221, 222. The arm 22 has a plurality of links 221, 222. The arm 22 of the illustrated robot 2 has two links, the link 221 and the link 222. Note that the number of links forming the arm 22 is not limited to two.

[0021] The first end of link 221 is supported by base 21. Base 21 supports the first end of link 221. Link 221 is rotatable about a first axis X1 extending in the vertical direction with respect to base 21. The second end of link 221 is connected to the first end of link 222. Link 222 is rotatable about a second axis X2 extending in the vertical direction with respect to link 221.

[0022] Hand 3 is connected to the second end of link 222. Hand 3 and the second end of link 222 are connected. Hand 3 is rotatable about a third axis X3 extending in the vertical direction with respect to link 222.

[0023] Figure 3 shows hand 3. Hand 3 is an end effector that holds substrate 9. Hand 3 has a main body 31 and a holding portion 32. Main body 31 supports holding portion 32. Main body 31 is rotatably connected to the second end of link 222.

[0024] As shown in the upper figure of Figure 3, holding portion 32 is substantially Y-shaped in plan view and, as shown in the lower figure of Figure 3, is in the form of a thin plate.

[0025] The hand 3 generally holds the substrate 9 in various ways such as gripping, suction, placement, or fitting. The hand 3 in the illustrated example is an edge grip hand. The hand 3 has an edge guide 33, a second guide 34, and an actuator 35. The edge guide 33, the second guide 34, and the actuator 35 constitute the grip 30 of the hand 3. The edge guide 33 is located at the tip of the holding portion 32 and engages with the outer peripheral edge of the substrate 9. The second guide 34 is located at the proximal end of the holding portion 32. The second guide 34 is located on the opposite side of the edge guide 33 with the substrate 9 interposed therebetween. The actuator 35 is, for example, a telescopic air cylinder. The actuator 35 displaces the second guide 34 so as to approach and separate from the substrate 9 (see the arrow in the upper figure of FIG. 3). As the second guide 34 approaches the substrate 9, the edge guide 33 and the second guide 34 sandwich the substrate 9. The hand 3 grips the substrate 9. As the second guide 34 moves away from the substrate 9, the substrate 9 is released from being clamped by the edge guide 33 and the second guide 34. The hand 3 releases the grip on the substrate 9.

[0026] The robot 2 has a sensor 36. The sensor 36 detects the substrate 9 held by the hand 3. The sensor 36 is attached to the hand 3 as shown enlarged in the lower figure of FIG. 3. The sensor 36 is, for example, an optical sensor. The sensor 36 detects the substrate 9 held by the hand 3. More specifically, the sensor 36 projects light onto the substrate 9 and receives the reflected light reflected on the surface of the substrate 9. When the hand 3 is not holding the substrate 9, the sensor 36 does not receive the reflected light, so the sensor 36 can detect that the substrate 9 is not held by the hand 3.

[0027] (Camera for substrate photography) The robot system 6 includes a camera 5. The camera 5 photographs the substrate 9. The camera 5 is fixed to the hand 3 of the robot 2 as shown in FIG. 3. More specifically, the camera 5 is fixed to the upper surface of the main body 31 of the hand 3. The camera 5 photographs the substrate 9 held by the hand 3 in the transport space 15. The camera 5 photographs the substrate 9, for example, while the robot 2 is transporting the substrate 9.

[0028] The camera 5 has, as an example, an image sensor and a lens. The lens causes light to be condensed on the image sensor. The image sensor outputs a signal corresponding to the amount of received light. The image sensor is a CCD (Charge Coupled Device) sensor or a CMOS (Complementary Metal Oxide Semiconductor) sensor.

[0029] FIG. 4 is an illustration of an image 50 captured by the camera 5. The camera 5 is fixed to the hand 3 so that substantially the entire surface of the substrate 9 held by the hand 3 can be captured, and the lens has an angle of view capable of capturing the entire surface of the substrate 9 held by the hand 3. The distance between the camera 5 and the substrate 9 held by the hand 3 is short. The angle of view of the lens is relatively wide. The image 50 captured by the camera 5 is a color image. Note that it is not excluded that the image captured by the camera 5 is a black-and-white image.

[0030] The robot controller 20 or the system controller 18 receives the data of the image 50 captured by the camera 5. The robot controller 20 may receive the data of the image 50 captured by the camera 5, or the system controller 18 may receive the data of the image 50 captured by the camera 5. Both the robot controller 20 and the system controller 18 may receive the data of the image 50 captured by the camera 5.

[0031] Since the camera 5 is fixed to the hand 3, the pixel positions occupied by the surface of the substrate 9 in the image 50 captured by the camera 5 are predetermined. Note that the robot controller 20 or the system controller 18 may identify the substrate 9 in the image 50 by extracting an edge in the image 50 captured by the camera 5.

[0032] Inside the transfer space 15, there is sufficient brightness for the image sensor to photograph the substrate 9. The substrate transfer system 1 may have a light source for photography in the transfer space 15, for example. The light quantity of the light source is set according to the light reception sensitivity of the image sensor. As will be described later, the light source may be white light so that the color of the substrate 9 can be determined based on the image photographed by the camera.

[0033] (Detection of the color of the substrate using the shooting data of the camera) As described above, the robot controller 20 or the system controller 18 receives the data photographed by the camera 5. The robot controller 20 or the system controller 18 detects the color of the substrate 9 based on the image 50 of the substrate 9 photographed by the camera 5 (see Fig. 4).

[0034] The color of the substrate 9 changes according to the type or thickness of the film formed on the surface of the substrate 9. The robot controller 20 or the system controller 18 determines the type of the substrate 9 held by the hand 3 based on the color of the substrate 9. The robot controller 20 or the system controller 18 stores in advance the correspondence information between the color of the substrate 9 and the type of the substrate 9.

[0035] The sensor 36 of the hand 3 determines the presence or absence of the substrate 9 based on the amount of received light of the light reflected on the surface of the substrate 9. That is, if the amount of the reflected light received by the sensor 36 exceeds the determination threshold value, the sensor 36 determines that the hand 3 is holding the substrate 9. If the amount of the reflected light received by the sensor 36 is equal to or less than the determination threshold value, the sensor 36 determines that the hand 3 is not holding the substrate 9.

[0036] Depending on the color of the substrate 9, the intensity of the light reflected from the surface of the substrate 9 changes. The determination threshold value of the sensor 36 is generally preset to a certain value corresponding to the color on the surface of the substrate 9 held by the hand 3. However, when the color of the substrate 9 held by the hand 3 changes, if the determination threshold value is a fixed value, there is a risk of misjudging that the hand 3 is not holding the substrate 9 because the intensity of the reflected light is relatively low even though the hand 3 is holding the substrate 9. The fact that the robot system 6 or the substrate transfer system 1 stops due to the misjudgment of the sensor 36 reduces the efficiency of the robot system 6 or the substrate transfer system 1.

[0037] Therefore, the robot controller 20 or the system controller 18 adjusts the determination threshold value of the sensor 36 according to the color of the substrate 9 determined based on the image 50 captured by the camera 5. Since the determination threshold value of the sensor 36 matches the color of the substrate 9, misjudgment of the sensor 36 is suppressed. The reduction in the efficiency of the robot system 6 or the substrate transfer system 1 caused by the misjudgment of the sensor 36 is suppressed.

[0038] Instead of adjusting the determination threshold value of the sensor 36, the amount of light projected by the sensor 36 onto the substrate 9 may be adjusted according to the color of the substrate 9.

[0039] Note that the color information obtained based on the image 50 captured by the camera 5 is not limited to the use of the adjustment of the sensor 36.

[0040] (Detection of wetness on the surface of the substrate using camera imaging data) The robot controller 20 or the system controller 18 detects wetting of the surface of the substrate 9 due to the liquid adhering to the surface of the substrate 9 based on the image 50 of the substrate 9 captured by the camera 5 (see the upper figure in FIG. 5). Due to the difference in the refractive index of the substrate 9 and the refractive index of the liquid, the reflectance of the surface of the substrate 9 is different from the reflectance of the liquid adhering to the surface. Based on the image 50 of the substrate 9 captured by the camera 5, the robot controller 20 or the system controller 18 can detect wetting of the surface of the substrate 9. The robot controller 20 or the system controller 18 may perform machine learning so as to enhance the detection accuracy of wetting.

[0041] The robot controller 20 or the system controller 18 can determine, based on the image 50 of the substrate 9 captured by the camera 5, for example, that cleaning liquid remains on the surface of the substrate 9 after the cleaning process. Alternatively, the robot controller 20 or the system controller 18 can determine the amount of cleaning liquid remaining on the surface of the substrate 9, for example, whether droplets remain on the surface of the substrate 9 or whether the cleaning liquid has spread over the entire surface of the substrate 9. When the robot controller 20 or the system controller 18 determines that the surface of the substrate 9 is wet, it may perform error processing in the substrate transfer system 1.

[0042] Also, the robot controller 20 or the system controller 18 can determine, based on the image 50 of the substrate 9 captured by the camera 5, for example, that developing liquid has been applied to the surface of the substrate 9 before the developing process. When the robot controller 20 or the system controller 18 determines that developing liquid has not been applied to the surface of the substrate 9, it may perform error processing in the substrate transfer system 1. Further, for example, after the developing process, the robot controller 20 or the system controller 18 can determine, based on the image 50 of the substrate 9 captured by the camera 5, whether the development has been appropriately completed. When the robot controller 20 or the system controller 18 determines that the development has not been appropriately completed, it may perform error processing in the substrate transfer system 1.

[0043] Note that the information on wetness obtained based on the image 50 captured by the camera 5 can be used for purposes other than those described above.

[0044] (Detection of the temperature of a substrate using camera imaging data) The camera 5 may be a thermography camera. The robot controller 20 or the system controller 18 can detect the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 based on the image 50 of the substrate 9 captured by the camera 5 (see the lower figure in Fig. 5). The image data captured by the camera 5 may include temperature information together with the image 50. Further, the robot controller 20 or the system controller 18 may estimate the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 based on the color of the image 50. The robot controller 20 or the system controller 18 may determine that there is an abnormality when the temperature of the substrate 9 is equal to or higher than a predetermined value, and perform error processing in the substrate transfer system 1.

[0045] Note that the information on the temperature or temperature distribution of the substrate 9 obtained based on the image 50 can be used for various purposes.

[0046] (Advantages) The substrate transfer system 1 or the robot system 6 includes a camera 5 that captures an image of the substrate 9 held by the hand 3. Based on the image 50 captured by the camera 5, the substrate transfer system 1 or the robot system 6 can obtain information on the substrate 9.

[0047] Since the camera 5 is fixed to the hand 3, the camera 5 can capture an image of the substrate 9 while the robot 2 is transporting the substrate 9. For the purpose of capturing an image by the camera 5, the robot 2 does not stop operating, so the transfer efficiency of the substrate transfer system 1 or the robot system 6 is increased. Further, since the camera 5 is fixed to the hand 3, the camera 5 also has the advantage of being able to capture an image of the substrate 9 for a long period of time. Fixing the camera 5 to the hand 3 is advantageous for capturing an image of the substrate 9.

[0048] Incidentally, the camera 5 may capture an image of the substrate 9 while the robot 2 has stopped transporting the substrate 9. For example, immediately after the robot 2 takes out the substrate 9 from the hopper 41, the robot 2 may temporarily stop transporting the substrate 9, and the camera 5 may capture an image of the substrate 9. Also, immediately before, during, or immediately after the robot 2 sets the substrate 9 on the aligner 42, the robot 2 may temporarily stop transporting the substrate 9, and the camera 5 may capture an image of the substrate 9. Capturing an image while the transport of the substrate 9 is stopped improves the quality of the captured image 50. For example, a light source for imaging may be installed at a location where the transport of the substrate 9 is stopped for imaging by the camera 5.

[0049] Since the camera 5 is fixed to the hand 3, the substrate transport system 1 or the robot system 6 can capture an image of the substrate 9 held by the hand 3 with a single camera 5. That is, in the substrate transport system 1, a plurality of cameras 5 installed at various locations in the transport space 15 are unnecessary. The substrate transport system 1 is simple.

[0050] The camera 5 has an angle of view that captures the entire surface of the substrate 9. The image 50 captured by the camera 5 includes the entire surface of the substrate 9. The robot controller 20 or the system controller 18 can accurately obtain information about the substrate 9.

[0051] The robot controller 20 or the system controller 18 receives the imaging data of the camera 5 and detects the color of the substrate 9. The robot controller 20 or the system controller 18 can determine the type of the substrate 9 held by the hand 3 based on the color of the substrate 9.

[0052] Also, the robot controller 20 or the system controller 18 sets a determination threshold value related to the light reception amount of the sensor 36 based on the detected color of the substrate 9. False determination of the sensor 36 is suppressed.

[0053] The robot controller 20 or the system controller 18 receives the imaging data of the camera 5 and detects the wetness of the surface of the substrate 9. The robot controller 20 or the system controller 18 can accurately determine the state of the substrate 9 before or after the processing of the substrate 9. The robot controller 20 or the system controller 18 can promptly execute error processing in the robot system 6 or the substrate transfer system 1 as necessary.

[0054] The robot controller 20 or the system controller 18 receives the imaging data of the camera 5 and detects the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9. The robot controller 20 or the system controller 18 can promptly detect an abnormal temperature of the substrate 9.

[0055] As described above, the substrate transfer system 1 or the robot system 6 can acquire information regarding the substrate 9 and utilize the acquired information regarding the substrate 9 for various purposes.

[0056] (Modification example regarding imaging of the substrate) The camera 5 fixed to the hand 3 may image the substrate 9 in the substrate processing facility 4 through the opening 16. The robot controller 20 or the system controller 18 can detect the color of the substrate 9 when taking out the substrate 9 from the substrate processing facility 4 based on the imaging data of the camera 5.

[0057] Also, the robot controller 20 or the system controller 18 can detect the wetness of the surface of the substrate 9 when taking out the substrate 9 from the substrate processing facility 4 based on the imaging data of the camera 5.

[0058] Here, when the surface of the substrate 9 is wet, there is a risk that the grip 30 of the hand 3 may slip when gripping the substrate 9. When the robot controller 20 or the system controller 18 detects that the surface of the substrate 9 is wet, the operation of the actuator 35 when gripping the substrate 9 may be slowed down. Slowing down the operation of the actuator 35 enhances the stability of holding the substrate 9 by the hand 3. Since the robot 2 can stably hold the substrate 9, for example, it is suppressed that the robot system 6 or the substrate transfer system 1 stops because the robot 2 cannot hold the substrate 9.

[0059] Also, the robot controller 20 or the system controller 18 can detect the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 when taking out the substrate 9 from the substrate processing facility 4 based on the imaging data of the camera 5.

[0060] The robot controller 20 or the system controller 18 may determine whether the temperature at the location where the edge guide 33 or the second guide 34 contacts the substrate 9 is equal to or lower than the allowable temperature based on the temperature distribution on the surface of the substrate 9. The allowable temperature is the temperature at which the edge guide 33 or the second guide 34 is allowed to hold the substrate 9. The allowable temperature is set according to, for example, the heat-resistant temperature of the edge guide 33 or the second guide 34. When the temperature at a specific location on the substrate 9 is equal to or lower than the allowable temperature, the robot controller 20 or the system controller 18 allows the hand 3 to hold the substrate 9. When the temperature at a specific location on the substrate 9 exceeds the allowable temperature, the robot controller 20 or the system controller 18 prohibits the hand 3 from holding the substrate 9 and waits for the temperature of the substrate 9 to decrease.

[0061] Based on the detected temperature distribution on the surface of the substrate 9, if the temperature at a specific location on the substrate 9 is below the allowable temperature, the robot controller 20 or the system controller 18 causes the hand 3 of the robot 2 to grip the substrate 9. The robot 2 can promptly start transporting the substrate 2. For example, considering the decrease in the temperature of the substrate 9, the waiting time of the robot 2 is shortened compared to the case of starting the transportation of the substrate 2 after waiting for a preset set time to elapse. Detecting the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 improves the transportation efficiency of the substrate transportation system 1 or the robot system 6 by reducing unnecessary waiting time.

[0062] The camera 5 fixed to the hand 3 enables detection of the color, temperature, or surface wetness of the substrate 9. Using the information of the substrate 9 obtained based on the image 50, it is possible to prevent the substrate transportation system 1 or the robot system 6 from stopping due to misjudgment or occurrence of an abnormality in the substrate transportation system 1. Also, the use of the information of the substrate 9 improves the transportation efficiency of the substrate transportation system 1 or the robot system 6 by reducing unnecessary waiting time.

[0063] (Modification example of the substrate transportation system) FIG. 6 shows a substrate transportation system 100 according to a modification example. FIG. 7 is a block diagram of the substrate transportation system 100. In the substrate transportation system 100, the camera 5 is not fixed to the robot 2. The camera 5 is fixed to, for example, the ceiling wall of the housing 10. More specifically, as shown in FIG. 6, the camera 5 is located in the vicinity of the aligner 42 in the transportation space 15. The camera 5 photographs the substrate 9 set on the aligner 42.

[0064] The camera 5 is electrically connected to the system controller 18. The system controller 18 detects the color of the substrate 9 based on the photographed data of the camera 5. The system controller 18 also detects the surface wetness of the substrate 9 based on the photographed data of the camera 5. The system controller 18 also detects the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 based on the photographed data of the camera 5.

[0065] In addition to being located near the aligner 42, the camera 5 may be located near the opening 16, for example, as indicated by the dashed line in FIG. 6, and may photograph the substrate 9 in the substrate processing equipment 4. The system controller 18 can detect the color of the substrate 9 when taking out the substrate 9 from the substrate processing equipment 4 based on the imaging data of the camera 5. The system controller 18 can also detect the wetness of the surface of the substrate 9 when taking out the substrate 9 from the substrate processing equipment 4 based on the imaging data of the camera 5. The system controller 18 can also detect the temperature of the substrate 9 or the temperature distribution of the surface of the substrate 9 when taking out the substrate 9 from the substrate processing equipment 4 based on the imaging data of the camera 5.

[0066] Note that the position of the camera 5 is not limited to a specific position. The position of the camera 5 can be set at various positions in the transfer space 15.

[0067] The aligner 42 may be connected to the system controller 18 and controlled by the system controller 18.

[0068] In the hand 3, a mounting member may be interposed between the main body 31 and the holding portion 32. The holding portion 32 is fixed to the main body 31 via the mounting member. When the camera 5 is fixed to the hand 3, the camera 5 may be fixed to the main body 31. The camera 5 may also be fixed to the mounting member.

[0069] The functions of the elements disclosed in this specification can be executed using a circuit or processing circuit including a general-purpose processor, a dedicated processor, an integrated circuit, an ASIC (Application Specific Integrated Circuits), a conventional circuit, and / or a combination thereof that is configured or programmed to execute the disclosed functions. Since a processor includes transistors and other circuits, it is regarded as a processing circuit or a circuit. In the present disclosure, a circuit, a unit, or a means is hardware that executes the listed functions, or is hardware programmed to execute the listed functions. The hardware may be the hardware disclosed in this specification, or may be other known hardware that is programmed or configured to execute the listed functions. When the hardware is a processor considered to be a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used for configuring the hardware and / or the processor.

[0070] (Aspect) The above-described embodiments are specific examples of the following aspects.

[0071] (Aspect 1) A horizontal articulated robot (2) having a hand (3) for holding a substrate (9) and transporting the substrate (9), A camera (5) for photographing the substrate (9), A controller (18, 20) that receives the photographed data of the camera (5) and detects the color of the substrate (9), A substrate transfer system (1, 100) comprising the same.

[0072] Based on the photographed data of the substrate (9) by the camera (5), the controller (18, 20) can acquire information on the color of the substrate (9). The substrate transfer system (1, 100) can utilize the information on the color of the substrate (9) for various purposes.

[0073] (Aspect 2) The horizontal articulated robot (2) has an optical substrate detection sensor (36) that receives the reflected light of the light irradiated on the substrate (9) held by the hand (3). The substrate transfer system (1, 100) according to aspect 1, wherein the controller (18, 20) sets a threshold value related to the light reception amount of the substrate detection sensor (36) based on the color of the substrate (9) detected based on the imaging data.

[0074] Changing the threshold value related to the detection of the substrate detection sensor (36) based on the color of the substrate (9) suppresses the false detection of the substrate detection sensor (36). The substrate transfer system (1, 100) can suppress a decrease in transfer efficiency caused by false detection of the substrate detection sensor (36).

[0075] (Aspect 3) A horizontal articulated robot (2) having a hand (3) for holding the substrate (9) and transferring the substrate (9), A camera (5) for photographing the substrate (9), A controller (18, 20) that receives the imaging data of the camera (5) and detects the temperature of the substrate (9), The substrate transfer system (1, 100) comprising:

[0076] Based on the imaging data of the substrate (9) by the camera (5), the controller (18, 20) can acquire information on the temperature of the substrate (9). The substrate transfer system (1, 100) can use the information on the temperature of the substrate (9) for various purposes.

[0077] (Aspect 4) The substrate transfer system (1, 100) according to aspect 3, wherein the controller (18, 20) determines that it is abnormal when the temperature of the substrate (9) is equal to or higher than a predetermined value.

[0078] The controller (18, 20) can quickly detect a temperature abnormality of the substrate (9) based on the temperature information of the substrate (9) photographed by the camera (5).

[0079] (Aspect 5) The camera (5) is a thermography camera, The controller (18, 20) receives the imaging data of the camera (5) and detects the temperature distribution on the surface of the substrate (9). The substrate transfer system (1, 100) according to Aspect 3 or 4.

[0080] The substrate transfer system (1, 100) can utilize the information on the temperature distribution on the surface of the substrate (9) for various purposes.

[0081] (Aspect 6) The hand (3) is an edge grip hand having an edge guide (33) that engages with the outer peripheral edge of the substrate (9), Based on the detected temperature distribution on the surface of the substrate (9), when the temperature at the location where the edge guide (33) engages with the substrate (9) is equal to or lower than the allowable temperature, the controller (18, 20) permits the horizontal articulated robot (2) to hold the substrate (9), and when the temperature exceeds the allowable temperature, prohibits the horizontal articulated robot (2) from holding the substrate (9). The substrate transfer system (1, 100) according to Aspect 5.

[0082] Based on the detected temperature distribution, if the temperature at the location where the edge guide (33) engages is equal to or lower than the allowable temperature, the horizontal articulated robot (2) can hold the substrate (9). Since the wasted waiting time for waiting for the temperature of the substrate (9) to drop is reduced, the transfer efficiency of the substrate transfer system (1, 100) is increased.

[0083] (Aspect 7) A horizontal articulated robot (2) having a hand (3) for holding the substrate (9) and transferring the substrate (9), A camera (5) for imaging the substrate (9), A controller (18, 20) that receives the imaging data of the camera (5) and detects the wetness on the surface of the substrate (9), The substrate transfer system (1, 100) comprising.

[0084] Based on the imaging data of the substrate (9) by the camera (5), the controllers (18, 20) can obtain information on the wetness of the surface of the substrate (9). The substrate transfer system (1, 100) can utilize the information on the wetness of the surface of the substrate (9) for various purposes.

[0085] (Aspect 8) The substrate transfer system (1, 100) according to aspect 7, wherein the controllers (18, 20) determine an abnormality when the surface of the substrate (9) is wet.

[0086] Based on the information on the wetness of the surface of the substrate (9) photographed by the camera (5), the controllers (18, 20) can quickly detect an abnormality of the substrate (9).

[0087] (Aspect 9) The hand (3) is an edge grip hand having an edge guide (33) that engages with the outer peripheral edge of the substrate (9) and a second guide (34) that approaches and separates from the substrate (9) on the side opposite to the edge guide (33) with the substrate (9) sandwiched therebetween. The substrate transfer system (1, 100) according to aspect 7 or 8, wherein the controllers (18, 20) change the approaching operation of the second guide (34) to the substrate (9) when it is detected that the surface of the substrate (9) is wet.

[0088] When the approaching operation of the second guide (34) to the substrate (9) is changed when the surface of the substrate (9) is wet, the hand (3) can stably hold the substrate (9).

[0089] (Aspect 10) The substrate transfer system (1, 100) according to any one of aspects 1 to 9, wherein the camera (5) photographs the substrate (9) held by the hand (3).

[0090] (Aspect 11) The camera (5) photographs the substrate (9) set on the aligner (42) that adjusts the orientation of the substrate (9) in the substrate transfer system (1, 100) according to any one of Aspects 1 to 10.

[0091] (Aspect 12) The camera (5) photographs the substrate (9) set on the substrate processing equipment (4) that processes the substrate (9) in the substrate transfer system (1, 100) according to any one of Aspects 1 to 11.

[0092] The camera (5) can photograph the substrate (9) at various timings.

[0093] (Aspect 13) The camera (5) is located at the ceiling of the space (15) where the manipulator (200) of the horizontally articulated robot (2) moves in the substrate transfer system (1, 100) according to any one of Aspects 1 to 12.

[0094] The camera (5) located at the ceiling is suitable for photographing the substrate (9).

[0095] (Aspect 14) The camera (5) is fixed to the hand (3) in the substrate transfer system (1, 100) according to any one of Aspects 1 to 12.

[0096] The camera (5) fixed to the hand (3) can photograph the substrate (9) near the substrate (9).

[0097] (Aspect 15) The substrate (9) is transported by the horizontally articulated robot (2), the substrate (9) is photographed by the camera (5), and the color of the substrate (9) is detected based on the photographed data of the substrate (9). A substrate transfer method.

[0098] (Aspect 16) The substrate (9) is transported by the horizontally articulated robot (2), The substrate (9) is photographed by the camera (5), A substrate transfer method in which the temperature of the substrate (9) is detected based on the photographed data of the substrate (9).

[0099] (Aspect 17) The substrate (9) is transferred by the horizontally articulated robot (2), The substrate (9) is photographed by the camera (5), A substrate transfer method in which wetness on the surface of the substrate (9) is detected based on the photographed data of the substrate (9).

[0100] (Aspect 18) A horizontally articulated robot (2) having a hand (3) for holding the substrate (9) and transferring the substrate (9), A camera (5) fixed to the hand (3) and photographing the substrate (9) held by the hand (3), A substrate transfer system (1, 100) comprising the same.

[0101] Since the camera (5) photographs the substrate (9), the substrate transfer system (1, 100) can acquire information on the substrate (9). Also, since the camera (5) moves to various positions together with the hand (3), a plurality of substrates (9) can be photographed by one camera (5). Further, since the camera (5) can photograph the substrate (9) while the horizontally articulated robot (2) is transferring the substrate (9), the transfer efficiency of the horizontally articulated robot (2) is increased.

[0102] (Aspect 19) The substrate transfer system (1, 100) according to Aspect 18, wherein the camera (5) photographs the surface of the substrate (9).

[0103] Various processes can be executed based on the image of the surface of the substrate (9) photographed by the camera (5).

[0104] (Aspect 20) The camera (5) has a field of view that captures the entire surface of the substrate (9), and is the substrate transfer system (1, 100) according to Embodiment 19.

[0105] Since the entire surface of the substrate (9) is imaged, more information about the substrate (9) can be obtained.

[0106] (Embodiment 21) The camera (5) captures the substrate (9) while the horizontally articulated robot (2) is transferring the substrate (9), and is the substrate transfer system (1, 100) according to any one of Embodiments 18 to 20.

[0107] Since the transfer of the substrate (9) is not stopped for imaging by the camera (5), the transfer efficiency of the substrate transfer system (1, 100) is increased.

[0108] (Embodiment 22) The camera (5) captures the substrate (9) while the horizontally articulated robot (2) has stopped transferring the substrate (9), and is the substrate transfer system (1, 100) according to any one of Embodiments 18 to 20.

[0109] When the camera (5) captures the surface of the substrate (9) while the transfer of the substrate (9) is stopped, the substrate transfer system (1, 100) can acquire a high-quality image (50).

[0110] (Embodiment 23) The camera (5) captures the substrate (9) at the timing when the horizontally articulated robot (2) takes out the substrate (9) from the hoop (41), and is the substrate transfer system (1, 100) according to Embodiment 22.

[0111] The camera (5) can capture the substrate (9) at an appropriate timing.

[0112] (Embodiment 24) The camera (5) photographs the substrate (9) at the timing when the horizontally articulated robot (2) sets the substrate (9) on the aligner (42) in the substrate transfer system (1, 100) according to Embodiment 22.

[0113] The camera (5) can photograph the substrate (9) at an appropriate timing.

[0114] (Embodiment 25) The substrate transfer system (1, 100) according to any one of Embodiments 18 to 24, wherein the color of the substrate (9) is detected based on the imaging data of the camera (5).

[0115] If the color of the substrate (9) is detected, the substrate transfer system (1, 100) can determine the type of the film formed on the substrate (9).

[0116] (Embodiment 26) The substrate transfer system (1, 100) according to any one of Embodiments 18 to 24, wherein the temperature of the substrate (9) is detected based on the imaging data of the camera (5).

[0117] If the temperature of the substrate (9) is detected, the substrate transfer system (1, 100) can determine an abnormality of the substrate (9).

[0118] (Embodiment 27) The substrate transfer system (1, 100) according to Embodiment 26, wherein the temperature distribution on the surface of the substrate (9) is detected based on the imaging data of the camera (5).

[0119] If the temperature distribution on the surface of the substrate (9) is detected, the horizontally articulated robot (2) can quickly hold the substrate (9), and the waiting time for waiting for the temperature drop of the substrate (9) is reduced.

[0120] (Embodiment 28) The substrate transfer system (1, 100) according to any one of Embodiments 18 to 24, wherein the wetness on the surface of the substrate (9) is detected based on the imaging data of the camera (5).

[0121] If the wetting of the surface of the substrate (9) is detected, the substrate transfer system (1, 100) can determine the state of the surface of the substrate (9).

Explanation of Signs

[0122] 1 Substrate transfer system 100 Substrate transfer system 2 Horizontal articulated robot 3 Hand 41 Hoop 42 Aligner 5 Camera 6 Robot system 9 Substrate

Claims

1. A horizontal articulated robot having a hand for holding a substrate and transporting the substrate, a camera for photographing the substrate, and a controller that receives the photographed data of the camera and detects wetness on the surface of the substrate, comprising: The hand is an edge grip hand having an edge guide that engages with the outer peripheral edge of the substrate and a second guide that approaches and separates from the substrate on the side opposite to the edge guide with the substrate interposed therebetween, The controller changes the approaching operation of the second guide to the substrate when it detects that the surface of the detected substrate is wet. A substrate transfer system.

2. In the substrate transfer system according to Claim 1, The controller determines that it is abnormal when the surface of the substrate is wet. A substrate transfer system.

3. In the substrate transfer system according to Claim 1 or 2, The camera photographs the substrate held by the hand. A substrate transfer system.

4. In the substrate transfer system according to Claim 1 or 2, The camera photographs the substrate set in an aligner that adjusts the orientation of the substrate. A substrate transfer system.

5. In the substrate transfer system according to Claim 1 or 2, The camera photographs the substrate set in a substrate processing facility that performs processing on the substrate. A substrate transfer system.

6. In the substrate transfer system according to Claim 1 or 2, The camera is located at the ceiling of the space where the manipulator of the horizontal articulated robot moves. A substrate transfer system.

7. In the substrate transfer system according to Claim 1 or 2, The camera is fixed to the hand. A substrate transfer system.

8. In the substrate transfer system according to Claim 3, The horizontal articulated robot temporarily stops the transfer of the substrate for the photographing by the camera, The camera photographs the substrate while the horizontal articulated robot temporarily stops the transfer of the substrate. A substrate transfer system.

9. A camera photographs a substrate, a controller receives the photographed data of the camera and detects wetness on the surface of the substrate, When the controller detects that the surface of the substrate is wet, the horizontal articulated robot changes the approaching operation of the second guide, which approaches and separates from the substrate on the side opposite to the edge guide with the substrate interposed therebetween in the edge grip hand, to the substrate. A substrate transfer method in which the horizontal articulated robot transfers a substrate held by the edge grip hand by being sandwiched between the edge guide and the second guide.

Images