Processing liquid supply device

Abstract

To notify a worker of the suitability of a replaced storage container so as to allow the worker in the replacement work to immediately perform visual recognition at the time of replacement of a storage container for processing liquid in a processing liquid supply device.SOLUTION: A storage device 201 includes: a shelf 210 which has a plurality of compartments K where storage containers storing processing liquid are installed from one side surface side; RFID readers 230, 231 which are respectively provided in the compartments and acquire identification information on the storage containers from RFID tags attached to the side surfaces of the storage containers installed in the corresponding compartments; and notification units 240, 241 which are respectively provided in the compartments and notify of the installation states of the storage containers in the compartments using the light emission states of light-emitting elements 250, 251 on the basis of the acquisition results from the RFID readers in the corresponding compartments. The light-emitting elements emit light toward one side surface side. The shelf includes first and second installation platforms 220, 221 each having the compartments. The second installation platform is positioned lower than the first installation platform, and the height position of notification unit 241 is lower than the height position of the notification unit 240.SELECTED DRAWING: Figure 8

Description

Technical Field

[0001] The present disclosure relates to a processing liquid supply device.

Background Art

[0002] Patent Document 1 discloses a method for replacing a chemical liquid storage container. In this method, an LED display unit in which each LED is arranged so as to be substantially the same as the arrangement form of the container is used. When the chemical liquid in the container becomes empty, the LED of the corresponding LED display unit lights up. Prior to the operation of replacing the container 71, the operator reads the barcode of the unused container using a barcode reader. The barcode reader collator collates the barcode data of the unused container with the barcode data of the container corresponding to the lit LED registered in the database. When it is determined by the barcode reader collator that the chemical liquid types of both containers are the same, the display of the LED is shifted from the lit display to the blinking display.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The technology according to the present disclosure notifies an operator during an exchange operation of the suitability of a replaced storage container of a processing liquid in a processing liquid supply device so that the operator can immediately visually recognize it when replacing the storage container of the processing liquid.

Means for Solving the Problems

[0005] One aspect of the present disclosure is a processing liquid supply device that supplies a processing liquid to a substrate processing device that processes a substrate using the processing liquid, and includes a storage container that stores the processing liquid An installation base on which it is installed, a fixing member fixed to the installation base, a container holding portion for holding the storage container, a moving member having the container holding portion fixed to the tip side and supported by the fixing member at the base end side and configured to be foldable, wherein when the moving member is folded, the position of the container holding portion becomes a supply position which is a position on the installation base, and when the moving member is extended, the position of the container holding portion becomes an exchange position of the storage container .

Effects of the Invention

[0006] According to the present disclosure, when replacing the storage container of the processing liquid in the processing liquid supply device, it is possible to notify the operator during the replacement operation whether the replaced storage container is appropriate so that the operator can immediately visually confirm it.

Brief Description of the Drawings

[0007]

Figure 1

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Figure 12

Embodiments for Carrying Out the Invention

[0008] In the manufacturing process of semiconductor devices and the like, in order to form a resist pattern on a semiconductor wafer (hereinafter referred to as "wafer"), various liquid treatments are performed, such as a process of applying a resist solution on the wafer to form a resist film, and a process of supplying a developer solution on the wafer to develop the resist film. These liquid treatments are performed by a substrate processing system equipped with various liquid treatment apparatuses and a transfer mechanism for transferring the wafer between the apparatuses.

[0009] In such a substrate processing system, various processing liquids are supplied from a storage container that stores the processing liquid to various liquid treatment apparatuses. In addition, a plurality of types of processing liquids are used, such as a resist solution and a developer solution, and furthermore, a plurality of types of the resist solution itself are used. Therefore, a large number of storage containers for processing liquids are arranged in the substrate processing system.

[0010] One method of replacing the storage container for the processing liquid in such a state where a large number are arranged is the method disclosed in Patent Document 1 described above. However, in the method disclosed in Patent Document 1, when an operator installs an unused storage container whose barcode has been read by a barcode reader in the wrong place, the operator cannot know this, so there is a possibility that the wrong processing liquid may be supplied. And it is preferable that the operator can immediately (that is, on the spot) recognize that the unused storage container has been installed in the wrong place as described above. This is to minimize the replacement work time.

[0011] Therefore, the technology according to the present disclosure notifies the operator during the replacement of the storage container for the processing liquid so that the operator can immediately visually recognize the suitability of the storage container after replacement.

[0012] Hereinafter, the processing liquid supply device and the notification method according to the present embodiment will be described with reference to the drawings. In this specification, elements having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

[0013] <Wafer processing system> FIG. 1 is an explanatory diagram showing an outline of the internal configuration of a wafer processing system 1 including a processing liquid supply device according to the present embodiment. FIGS. 2 and 3 are diagrams schematically showing outlines of the internal configurations of the front side and the back side of the wafer processing system 1, respectively. FIG. 4 is a front view showing an outline of the appearance of the wafer processing system 1. FIG. 5 is a diagram showing an example of a display screen displayed on a touch panel described later. FIG. 6 is a perspective view showing an outline of the configuration of a storage container for a processing liquid. In the following example, the wafer processing system 1 is a coating and developing processing system that performs coating and developing processing on a wafer W.

[0014] As shown in FIG. 1, the wafer processing system 1 includes a cassette station 10 into and out of which a cassette C containing a plurality of wafers W is carried, and a processing station 11 including a plurality of various processing devices that perform predetermined processing on the wafer W. The wafer processing system 1 has a configuration in which an interface station 13 that transfers the wafer W between the cassette station 10, the processing station 11, and an exposure device 12 adjacent to the processing station 11 is integrally connected.

[0015] The cassette station 10 is provided with a cassette mounting table 20. The cassette mounting table 20 is provided with a plurality of cassette mounting plates 21 on which the cassette C is mounted when the cassette C is carried into and out of the wafer processing system 1.

[0016] The cassette station 10 is provided with a wafer transfer device 23 that is movable on a transfer path 22 extending in the X direction. The wafer transfer device 23 is also movable in the vertical direction and around a vertical axis (θ direction), and can transfer the wafer W between the cassette C on each cassette mounting plate 21 and a transfer device of a third block G3 of the processing station 11 described later.

[0017] The processing station 11 is provided with a plurality of, for example, four blocks G1, G2, G3, and G4 each equipped with various devices. For example, a first block G1 is provided on the front side of the processing station 11 (the negative X-direction side in FIG. 1), and a second block G2 is provided on the back side of the processing station 11 (the positive X-direction side in FIG. 1). Also, a third block G3 is provided on the cassette station 10 side of the processing station 11 (the negative Y-direction side in FIG. 1), and a fourth block G4 is provided on the interface station 13 side of the processing station 11 (the positive Y-direction side in FIG. 1).

[0018] In the first block G1, as shown in FIG. 2, a plurality of liquid processing devices, for example, a development processing device 30, a lower antireflection film forming device 31, a resist coating device 32, and an upper antireflection film forming device 33 are arranged in this order from the bottom. The development processing device 30 develops the wafer W, and the lower antireflection film forming device 31 forms an antireflection film (hereinafter referred to as "lower antireflection film") on the lower layer of the resist film of the wafer W. The resist coating device 32 applies a resist solution to the wafer W to form a resist film, and the upper antireflection film forming device 33 forms an antireflection film (hereinafter referred to as "upper antireflection film") on the upper layer of the resist film of the wafer W.

[0019] For example, three of each of the development processing device 30, the lower antireflection film forming device 31, the resist coating device 32, and the upper antireflection film forming device 33 are arranged side by side in the horizontal direction. Note that the number and arrangement of these development processing device 30, lower antireflection film forming device 31, resist coating device 32, and upper antireflection film forming device 33 can be arbitrarily selected.

[0020] In these development processing device 30, lower antireflection film forming device 31, resist coating device 32, and upper antireflection film forming device 33, for example, a predetermined processing liquid is supplied onto the wafer W by a spin coating method. In the spin coating method, for example, the processing liquid is discharged onto the wafer W from a discharge nozzle, and the wafer W is rotated to spread the processing liquid on the surface of the wafer W.

[0021] In the second block G2, as shown in FIG. 3, there are provided a heat treatment apparatus 40 for performing heat treatment such as heating and cooling of the wafer W, an adhesion apparatus 41 for enhancing the fixing property between the resist liquid and the wafer W, and a peripheral exposure apparatus 42 for exposing the outer peripheral portion of the wafer W. These heat treatment apparatus 40, adhesion apparatus 41, and peripheral exposure apparatus 42 are arranged side by side in the vertical and horizontal directions, and the number and arrangement thereof can be arbitrarily selected.

[0022] For example, in the third block G3, a plurality of transfer apparatuses 50, 51, 52, 53, 54, 55 are provided in order from the bottom. Further, in the fourth block G4, a plurality of transfer apparatuses 60, 61, 62 are provided in order from the bottom.

[0023] As shown in FIG. 1, in the region surrounded by the first block G1 to the fourth block G4, a wafer transfer region D as a substrate transfer region is formed. In the wafer transfer region D, a wafer transfer apparatus 70 as a substrate transfer apparatus is arranged.

[0024] The wafer transfer apparatus 70 has, for example, a transfer arm 70a that is movable in the Y direction, X direction, θ direction, and vertical direction. The wafer transfer apparatus 70 moves within the wafer transfer region D and can transfer the wafer W to a predetermined apparatus within the surrounding first block G1, second block G2, third block G3, and fourth block G4. The wafer transfer apparatus 70 is arranged, for example, in a plurality of units vertically as shown in FIG. 3, and can transfer the wafer W to a predetermined apparatus at approximately the same height in each block G1 to G4.

[0025] In addition, in the wafer transfer region D, a shuttle transfer apparatus 80 for linearly transferring the wafer W between the third block G3 and the fourth block G4 is provided.

[0026] The shuttle transfer apparatus 80 is linearly movable, for example, in the Y direction of FIG. 3. The shuttle transfer apparatus 80 moves in the Y direction while supporting the wafer W and can transfer the wafer W between the transfer apparatus 52 in the third block G3 and the transfer apparatus 62 in the fourth block G4.

[0027] As shown in FIG. 1, a wafer transfer device 90 is provided adjacent to the positive X-direction side of the third block G3. The wafer transfer device 90 has a transfer arm 90a that is movable in, for example, the X direction, θ direction, and vertical direction. The wafer transfer device 90 can move vertically while supporting the wafer W and transfer the wafer W to each transfer device within the third block G3.

[0028] An interface station 13 is provided with a wafer transfer device 100 and a transfer device 101. The wafer transfer device 100 has a transfer arm 100a that is movable in, for example, the Y direction, θ direction, and vertical direction. The wafer transfer device 100 can support the wafer W on the transfer arm 100a, for example, and transfer the wafer W among each transfer device within the fourth block G4, the transfer device 101, and the exposure device 12.

[0029] As shown in FIG. 4, the aforementioned cassette station 10 is provided with a touch panel 110 that also functions as a display device for displaying a screen showing various information. The touch panel 110 has a display device composed of, for example, a liquid crystal panel, an organic EL panel, or the like. Further, the touch panel 110 is provided on the processing station 11 side of the cassette station 10 such that its display surface faces the front side (the negative X-direction side in FIG. 4).

[0030] The display screen displayed by the touch panel 110 is, for example, a display screen P having regions R1 and R2 shown for each RFID reader that indicates whether an RFID tag described later is detected by an RFID reader described later with "●" and "〇" as shown in FIG. 5. For example, "●" indicates that it has been detected, and "〇" indicates that it has not been detected. In the display screen P, the region R1 located on the upper side shows information about the RFID readers located above among the plurality of RFID readers. Also, in the display screen P, the region R2 located on the lower side shows information about the RFID readers located below among the plurality of RFID readers.

[0031] In addition to the display screen P in FIG. 5, the touch panel 110 can also display a setting screen for setting the RFID tag described later, an error screen for displaying information on errors currently occurring in the wafer processing system 1, and the like.

[0032] Furthermore, as shown in FIGS. 1 and 4, the processing station 11 is provided with a storage device 201 included in the processing liquid supply device 200. The storage device 201 houses a storage container B (see FIG. 6) for storing the processing liquid, and is provided, for example, at a position closer to the lower side on the cassette station 10 side of the processing station 11 as shown in FIGS. 1 and 4.

[0033] The storage device 201 is configured to be movable along a rail (not shown) extending in the front-rear direction (X direction in FIGS. 1 and 4), and thus is movable along the front-rear direction. The storage device 201 is normally housed within the processing station 11, but when replacing the storage container B, it is pulled out to the front side from the processing station 11, which enables an operator to remove the storage container B from the storage device 201 or install the storage container B in the storage device 201.

[0034] The storage container B housed in the storage device 201 stores, for example, a resist solution as the processing liquid. Further, as shown in FIG. 6, the storage container B is attached with an RFID tag B1 as an identification information holding unit. Specifically, the RFID tag B1 is attached, for example, to the side surface of the storage container B. This RFID tag B1 holds the identification information of the storage container B to which the RFID tag B1 is attached. The identification information of the storage container B held by the RFID tag B1 is, for example, information on the product name of the storage container.

[0035] In the wafer processing system 1 having the above-described components, as shown in FIG. 1, a control device U is provided. The control device U is constituted by a computer including, for example, a CPU and a memory, and has a program storage unit (not shown). The program storage unit stores a program for controlling wafer processing described later in the wafer processing system 1 and a program for notifying the propriety of the replaced storage container B described later. Further, a PLC (Programmable Logic Controller) may perform part or all of the control performed by the control device U. Note that the above program may be recorded on a computer-readable storage medium H and installed from the storage medium H to the control device U. Part or all of the program may be realized by dedicated hardware (circuit board).

[0036] <Wafer processing> Next, the wafer processing performed using the wafer processing system 1 will be described.

[0037] First, a cassette C storing a plurality of wafers W is placed on a predetermined cassette mounting plate 21 of the cassette station 10. Thereafter, each wafer W in the cassette C is sequentially taken out by the wafer transfer device 23 and transferred to, for example, a transfer device 52 in the third block G3 of the processing station 11.

[0038] Next, the wafer W is transferred by the wafer transfer device 70 to, for example, a lower antireflection film forming device 31 in the first block G1, and a lower antireflection film is formed on the wafer W. Thereafter, the wafer W is transferred by the wafer transfer device 70 to a heat treatment device 40 in the second block G2, and heat treatment is performed.

[0039] Next, the wafer W is transported by the wafer transfer device 70 to the resist coating device 32, and a resist film is formed on the wafer W. Thereafter, the wafer W is transported by the wafer transfer device 70 to the heat treatment device 40 and subjected to pre-baking. Note that, also in the pre-baking, the same treatment as the heat treatment after the formation of the lower antireflection film is performed, and the same treatment is also performed in the heat treatment after the formation of the antireflection film, the PEB treatment, and the post-baking treatment described later. However, the heat treatment devices 40 used for each heat treatment are different from each other.

[0040] Next, the wafer W is transported by the wafer transfer device 70 to the upper antireflection film forming device 33, and an upper antireflection film is formed on the wafer W. Thereafter, the wafer W is transported to the heat treatment device 40 and subjected to heat treatment. Thereafter, the wafer W is transported by the wafer transfer device 70 to the peripheral exposure device 42, and peripheral exposure processing is performed.

[0041] Next, the wafer W is transported by the wafer transfer device 70 to the delivery device 52, and is transported by the shuttle transfer device 80 to the delivery device 62 of the fourth block G4. Thereafter, the wafer W is transported by the wafer transfer device 100 of the interface station 13 to the exposure device 12 and subjected to exposure processing with a predetermined pattern. Next, the wafer W is transported by the wafer transfer device 100 to the delivery device 60 of the fourth block G4. Thereafter, the wafer W is transported by the wafer transfer device 70 to the heat treatment device 40 and subjected to PEB treatment.

[0042] Next, the wafer W is transported by the wafer transfer device 70 to the development processing device 30, and development processing is performed. After the development processing, the wafer W is transported by the wafer transfer device 70 to the heat treatment device 40 and subjected to post-baking.

[0043] Next, the wafer W is transported by the wafer transfer device 70 to the transfer device 50 of the third block G3. Thereafter, the wafer W is transported by the wafer transfer device 23 of the cassette station 10 to the cassette C on a predetermined cassette mounting plate 21, and a series of photolithography processes are completed. Then, this series of photolithography processes are also carried out for subsequent wafers W within the same cassette C.

[0044] <Storage device> Subsequently, the configuration of the storage device 201 will be described. FIGS. 7 and 8 are side views showing the outline of the configuration of the storage device 201. FIG. 7 shows a state in which the storage container B is installed, and FIG. 8 shows a state in which the storage container B is not installed. FIGS. 9 and 10 are perspective views respectively showing the outline of the configuration of a holder, which will be described later, that the storage device 201 has.

[0045] As shown in FIGS. 7 and 8, the storage device 201 includes a shelf 210 as a storage unit having a plurality of compartments (hereinafter sometimes referred to as "installation compartments") K in which the storage container B is installed from one side (the positive Y direction side in the figure).

[0046] The shelf 210 has a first installation table 220 and a second installation table 221 each having an installation compartment K, and the second installation table 221 is located on the bottom side, that is, at a lower position than the first installation table 220. The space inside the shelf 210 is divided into three in the vertical direction by shelf boards 211 and 212. For example, the upper shelf board 211 constitutes the first installation table 220, and the lower shelf board 212 constitutes the second installation table 221. The height position of the second installation table 221 is, for example, 80 cm to 105 cm, while the height position of the first installation table 220 is, for example, 140 to 165 cm and is relatively high.

[0047] In addition, the first mounting table 220 and the second mounting table 221 each have a plurality (three in the example of the figure) of mounting sections K arranged in the horizontal direction (the X direction in the figure). Hereinafter, the three mounting sections K of the first mounting table 220 may be referred to as mounting section K11, mounting section K12, and mounting section K13 in order from the negative side in the X direction of the figure, and the three mounting sections K of the second mounting table 221 may be referred to as mounting section K21, mounting section K22, and mounting section K23 in order from the negative side in the X direction of the figure.

[0048] In addition, the storage device 201 includes RFID readers 230 and 231 as acquisition units that read (i.e., acquire) the identification information of the storage container B from the RFID tag B1 attached to the side surface of the storage container B. The RFID readers 230 and 231 are provided for each mounting section K. Specifically, the RFID reader 230 as the first acquisition unit is provided for each mounting section K of the first mounting table 220, and the RFID reader 231 as the second acquisition unit is provided for each mounting section K of the second mounting table 221. The acquisition results by the RFID readers 230 and 231 are output to the control device U (see FIG. 1) by at least one of wireless communication and wired communication. Part or all of the communication between the RFID readers 230 and 231 and the control device U may be performed via an IO-Link master.

[0049] The control device U determines the installation state of the storage container B in the corresponding mounting section K based on the acquisition results for each of the RFID readers 230 and 231. The above determination performed by the control device U includes, for example, the following. (1) Determination as to whether the storage container B installed in the corresponding mounting section K is the one to be installed in the mounting section K (2) Determination as to whether the RFID tag of the storage container B is detected

[0050] The determination in (1) above is performed, for example, based on the acquisition results by the RFID readers 230 and 231, by referring to a table in which the identification information of each installation section K and the appropriate storage container B are associated and stored in advance in a storage section (not shown). The identification information of the appropriate storage container B is registered in the above table, for example, in the registration mode of the identification information prepared in the wafer processing system 1. Specifically, when the registration mode is selected from a selection screen (not shown) displayed on the touch panel by an operator and the appropriate storage container B is installed in the appropriate installation section K, the result read by the RFID reader 230 (or RFID reader 231) corresponding to the installation section K is registered in the above table as the identification information of the appropriate storage container B. This registration is performed, for example, at the startup of the wafer processing system 1 or when changing the processing recipe involving a change in the processing liquid. Also, the above registration may be performed each time the storage container B is replaced.

[0051] Furthermore, the housing device 201 is also provided with notification units 240 and 241 for each installation section K. Specifically, notification units (hereinafter sometimes referred to as "first notification units") 240 are also provided for each installation section K of the first installation table 220, and notification units (hereinafter sometimes referred to as "second notification units") 241 are also provided for each installation section K of the second installation table 221.

[0052] Each of the notification units 240 and 241 notifies the installation state of the storage container B in the corresponding installation section K in the light emission states of two light emitting elements 250 and 251 based on the acquisition results by the RFID readers 230 and 231 of the corresponding installation section K. The light emitting elements 250 and 251 are, for example, LEDs. The light emitting elements 250 and 251 of the notification units 240 and 241 are arranged to emit light toward the one side surface side (positive side in the Y direction in the figure), which is the side where the operator is located during the replacement operation of the storage container B.

[0053] The light emitting element 250 and the light emitting element 251 emit light in different colors from each other. For example, the light emitting element 250 emits green light, and the light emitting element 251 emits red light.

[0054] The light emission of the light emitting elements 250 and 251 is controlled by the control device U. For example, when the storage container B installed in the corresponding installation section K is the one to be installed in the installation section K, that is, when it is appropriate, the green light emitting element 250 is turned on, and when it is inappropriate, the red light emitting element 251 is turned on.

[0055] Also, for example, after the RFID readers 230 and 231 provided in the corresponding installation section K detect the RFID tag B1, until the determination of the suitability of the storage container B installed in the corresponding installation section K is completed, both the green light emitting element 250 and the red light emitting element 251 blink simultaneously at short intervals. Thereby, the notification units 240 and 241 notify that the above determination is in progress. Furthermore, for example, when the RFID tag B1 is not detected by the RFID readers 230 and 231 provided in the corresponding installation section K, that is, when the storage container B is not installed in the corresponding installation section K (or when the way of installing the storage container B in the corresponding installation section K is bad), both the light emitting elements 250 and 251 blink simultaneously at long intervals. Thereby, the notification units 240 and 241 notify that the RFID tag B1 is not detected as described above.

[0056] The notification units 240 and 241 can also notify information other than the installation state of the storage container B installed in the corresponding installation section K by the light emission states of the light emitting elements 250 and 251. For example, when an abnormality occurs in the RFID readers 230 and 231, both the light emitting elements 250 and 251 of the notification units 240 and 241 blink alternately at short intervals so as to notify that fact. For example, when an abnormality occurs in a device (for example, an IO-Link master) that controls the communication between the notification units 240 and 241 and the control device U, both the light emitting elements 250 and 251 of the notification units 240 and 241 that use the device blink alternately at short intervals so as to notify that fact. Further, for example, when an abnormality occurs in the control portion related to the processing liquid supply device 200 of the control device U, both the light emitting elements 250 and 251 of all the notification units 240 and 241 are turned off so as to notify the occurrence of the abnormality.

[0057] In this way, the notification units 240 and 241 can notify various information based on the light emission states of the light emitting elements 250 and 251 that emit light in different colors.

[0058] In addition, the determination as to whether an abnormality has occurred in the RFID readers 230 and 231, the determination as to whether an abnormality has occurred in the device that controls the communication between the notification units 240 and 241 and the control device U, and the determination as to whether an abnormality has occurred in the control portion related to the processing liquid supply device 200 of the control device U are performed by the control device U.

[0059] Also, the height positions of the first notification unit 240 and the second notification unit 241 are as follows. That is, the height position of the first notification unit 240 based on the height position of the first installation base 220 is lower than the height position of the second notification unit 241 based on the height position of the second installation base 221. Specifically, the relative height position of the first notification unit 240 provided for the installation section K with reference to the position of the storage container B installed in the installation section K of the first installation base 220 is lower than the relative height position of the second notification unit 241 provided for the installation section K with reference to the position of the storage container B installed in the installation section K of the second installation base 221. Therefore, even when the height position of the first installation base 220 is relatively high as described above, an operator with a not-so-tall height (for example, an operator with an average height of an Asian woman) can visually recognize the light emission states of the light emitting elements 250 and 251 of the first notification unit 240 and can grasp the installation state of the storage container B in the corresponding installation section K.

[0060] In addition, the first notification unit 240 is collectively arranged on the side of the first installation base 220, while the second notification unit 241 is provided around the corresponding installation section K for each installation section K in the second installation base 221. The first notification unit 240 is provided on the front side (the positive Y direction in FIG. 7), and the second notification unit 241 is provided on the back side (the negative Y direction in FIG. 7). The reasons why the positions of the first notification unit 240 and the second notification unit 241 are different in the depth direction (the Y direction in the figure) are as follows, for example. That is, for the second notification unit 241 provided around the corresponding installation section K for each installation section K, if it is provided on the front side (the positive Y direction in the figure), there is a risk that wiring or the like for the notification unit 241 will interfere with the replacement operation of the storage container B.

[0061] Note that the first notification unit 240 is provided, for example, so as to be arranged in the vertical direction. The upper first notification unit 240 corresponds to the installation section K11, the central first notification unit 240 corresponds to the installation section K12, and the lower first notification unit 240 corresponds to the installation section K13.

[0062] Furthermore, for each installation section K, the housing device 201 is provided with a holder 260 or a holder 261. The configuration of the holder 260 provided in the installation section K of the first installation base 220 is different from that of the holder 261 provided in the installation section K of the second installation base 221.

[0063] As shown in FIG. 9, the holder 261 has an individual housing portion 300 for individually housing the storage container B, and the individual housing portion 300 is fixed to the second installation base 221 (see FIG. 7). The individual housing portion 300 has a bottom plate 301 that supports the bottom surface of the storage container B, and side plates 302, 303, a front plate 304, and a back plate 305 that surround the lateral periphery of the storage container B supported by the bottom plate 301.

[0064] An RFID reader 231 is provided on the front side (the positive Y direction in FIG. 9) of the back plate 305 provided on the back side (the negative Y direction in FIG. 9). In addition, a support member 310 that supports the light emitting elements 250, 251 of the notification unit 241 is connected to the back plate 305.

[0065] Similar to this holder 261, the holder 260 has an individual storage part 400 for individually storing the storage container B as shown in FIG. 10. However, the individual storage part 400 is not fixed to the first installation table 220 (see FIG. 7), and is movable between a supply position which is a position on the first installation table 220 and an exchange position which is a position below the first installation table 220 where the replacement operation of the storage container B is performed. Specifically, the above-mentioned exchange position is a position obliquely downward on the front side (the positive Y direction side in FIG. 10) of the above-mentioned supply position.

[0066] In order to enable the above-mentioned movement, the holder 260 has a lifting member 410. The lifting member 410 is a member for lifting the individual storage part 400 between the above-mentioned supply position and the above-mentioned exchange position. This lifting member 410 is, for example, configured to be foldable, with the individual storage part 400 fixed to the tip side and the base end side pivotally supported by a fixing member 420. When the lifting member 410 is folded, the position of the individual storage part 400 becomes the above-mentioned supply position, and when the lifting member 410 is extended, the position of the individual storage part 400 becomes the above-mentioned exchange position. The fixing member 420 itself is fixed to the first installation table 220. Also, an RFID reader 230 is fixed to the fixing member 420.

[0067] When replacing the storage container B held by the holder 260, the operator moves the individual storage part 400 from the above-mentioned supply position to the above-mentioned exchange position, and then replaces the storage container B in the individual storage part 400. After the replacement, the operator returns the individual storage part 400 to the above-mentioned supply position.

[0068] As described above, by configuring the holder 260 with respect to the first installation table 220 having a relatively high height position as described above, even an operator with a relatively short height (for example, an operator with an average height of an Asian woman) can easily replace the storage container B on the first installation table 220.

[0069] In addition, a lock mechanism for maintaining the position of the individual storage unit 400 at the supply position or the replacement position, and a lock release mechanism for releasing the lock by the lock mechanism may be provided in the holder 260. Further, a handle may be provided below a surface on the front side (positive side in the Y direction in FIG. 10) of the individual storage unit 400 or the like so that an operator can easily move the individual storage unit 400 between the supply position and the replacement position.

[0070] The individual storage unit 400 includes a bottom plate 401 that supports the bottom surface of the storage container B, a cylindrical wall 402 that surrounds the lower part of the storage container B supported by the bottom plate 401, and an upper back plate 403 that faces the upper part on the back side (negative side in the Y direction in the figure) of the storage container B. Further, notches 404 and 405 are provided at the center of the upper end of the part on the back side (negative side in the Y direction in the figure) of the cylindrical wall 402 and at the center of the lower end of the upper back plate 403, respectively. When the individual storage unit 400 is located at the supply position, the RFID reader 230 fixed to the fixing member 420 fits into these notches 404 and 405. Therefore, the reading of the RFID tag B1 attached to the storage container B accommodated in the individual storage unit 400 at the supply position by the RFID reader 230 is not obstructed by the cylindrical wall 402 and the upper back plate 403.

[0071] <Supply mechanism from the storage container B> FIG. 11 is an explanatory diagram showing an outline of the configuration of a mechanism for supplying a processing liquid from the storage container B installed in the storage device 201.

[0072] After the storage container B is installed in the storage device 201 (see FIG. 7), a cap B2 that closes the opening at the upper part of the storage container B is attached. The cap B2 is provided with a supply pipe 501 for a pressurized gas such as nitrogen gas and a supply pipe 502 for the processing liquid. When the pressurized gas is supplied into the storage container B through the supply pipe 501, the processing liquid in the storage container B flows into the supply pipe 502 and is pumped to the buffer tank 503. The processing liquid is supplied from this buffer tank 503 to each liquid processing device of the wafer processing system 1.

[0073] In addition, the supply pipe 501 is provided with an on-off valve 510 that switches between the supply and stop of the pressurized gas through the supply pipe 501. The on-off valve 510 is provided with a solenoid 511 for executing the opening and closing operation of the supply pipe 501 by the on-off valve 510. A control circuit 512 for controlling the solenoid 511 is connected to the solenoid 511 via a wiring 513.

[0074] And in this embodiment, a relay 514 that cuts off the communication between the control circuit 512 and the solenoid 511 is provided in the wiring 513. The relay 514 may be provided so as to be able to cut off the power supply from the control circuit 512 to the solenoid 511. By providing the relay 514 in this way, an interlock can be performed to disable the operation of supplying the pressurized gas to the storage container B, that is, the operation of supplying the processing liquid from the storage container B. That is, the relay 514 is a mechanism that performs the above interlock.

[0075] The above interlock is made effective, for example, when the storage container B installed in the installation section K is not the one to be installed in the installation section K.

[0076] Note that the control circuit 512 and the relay 514 operate under the control of the control device U.

[0077] <Replacement method> Subsequently, an example of a replacement method for the storage container B including a method for notifying the suitability of the storage container B when the storage container B is replaced will be described. FIG. 12 is a flowchart showing the flow of the replacement method for the storage container B.

[0078] When the control device U determines that the storage container B has become empty, a screen indicating a warning that the storage container B has become empty, for example, is displayed on the touch panel 110 so as to prompt the replacement of the storage container B (step S1). In addition to the above warning, the above screen shows, for example, the position of the storage container B in the storage device 201 to be replaced, information on the new storage container B to be prepared, and the like. Hereinafter, it will be described assuming that the storage container B in the installation section K11 has become empty. Whether the storage container B is empty or not is determined as follows, for example. That is, when the amount of the processing liquid in the buffer tank 503 decreases due to the liquid level sensor (not shown) provided in the buffer tank 503, pressurized gas is supplied to the corresponding storage container B through the supply pipe 501 for replenishing the processing liquid. When there is no change in the detection result of the liquid level sensor even after a predetermined time has elapsed since the start of the supply of the pressurized gas, it is determined that the corresponding storage container B has become empty.

[0079] After that, when the storage container B installed in the installation section K11 is removed, the RFID tag B1 is no longer detected by the RFID reader 230 in the installation section K11. When it is no longer detected in this way, the relay 514 operates and the aforementioned interlock is enabled (step S2).

[0080] Also, when the RFID tag B1 is no longer detected by the RFID reader 230 in the installation section K11, both the light emitting elements 250 and 251 of the notification unit 240 in the installation section K11 are set to blink simultaneously at long intervals so that the fact is notified from the notification unit 240 in the installation section K11 (step S3).

[0081] When a new storage container B is installed in the installation section K11 by an operator, since the RFID tag B1 is detected by the RFID reader 230 in the installation section K11, after step S3, the control device U determines whether the RFID tag B1 is detected by the RFID reader 230 in the installation section K11 (step S4). This determination is repeated until the RFID tag B1 is detected. Specifically, it is repeated until the replaced storage container B is installed in the installation section K11 and the identification information of the replaced storage container B is acquired by the RFID reader 230 provided in the installation section K11. When the readable range of the RFID reader 230 is narrow, it may be necessary to face the RFID reader 230 and the RFID tag B1 of the new storage container B when installing the new storage container B. In this case, a message prompting to face the RFID reader 230 and the RFID tag B1 of the new storage container B may be displayed on the display screen displayed in step S1.

[0082] When a new storage container B is installed in the installation section K11 and the RFID tag B1 is detected by the RFID reader 230 in the installation section K11 (in the case of YES in step S4), the control device U determines whether the storage container B installed in the installation section K11 is appropriate (step S5). Specifically, for example, based on the identification information of the new storage container B held in the RFID tag B1 acquired by the RFID reader 230 in the installation section K11, the control device U determines whether the new storage container B is appropriate. More specifically, for example, the control device U determines whether the identification information of the new storage container B held in the RFID tag B1 acquired by the RFID reader 230 in the installation section K11 matches the identification information of the appropriate storage container B for the installation section K11 registered in the above-mentioned table. In addition, when determining whether there is a match, the above-mentioned identification information acquired by the RFID reader 230 in the installation section K11 is converted into a predetermined character code by the control device U as necessary.

[0083] As will be described below, the result of the determination in step S4 is notified by the notification unit 240 in the installation section K11.

[0084] If the result of the determination in step S5 is appropriate, that is, if the identification information matches (YES), only the green light-emitting element 250 among the light-emitting elements 250 and 251 of the notification unit 240 in the installation section K11 is turned on so that it is notified from the notification unit 240 that it is appropriate (step S6).

[0085] Also, the relay 514 operates and the above-mentioned interlock is released (invalidated) (step S7).

[0086] Then, the display of the screen indicating a warning or the like that the storage container B in the installation section K11 is empty is cancelled (step S8). This cancellation may be performed at the following timing. That is, after the interlock is released, the supply of the pressurized gas to the storage container B in the installation section K11 is restarted, an appropriate processing liquid is supplied from the storage container B, and when a predetermined amount is replenished to the corresponding buffer tank 503, the display of the warning screen in step S8 may be cancelled.

[0087] In step S5, when the identification information of the storage container B installed in the installation section K11 does not match the information registered in the above-mentioned table and the storage container B is not appropriate (NO case), only the red light-emitting element 251 among the light-emitting elements 250 and 251 of the notification unit 240 in the installation section K11 is turned on so that the fact is notified from the notification unit 240 (step S9). Thereafter, when the inappropriate storage container B installed in the installation section K11 is removed by the operator who received the above notification, the RFID tag B1 is no longer detected by the RFID reader 230 in the installation section K11, so the process returns to step S3 so that the fact is notified again.

[0088] As described above, in the present embodiment, the processing liquid supply device 200 includes a shelf 210 having a plurality of sections K in which the storage container B is installed from one side surface side. The processing liquid supply device 200 also includes RFID readers 230 and 231 provided for each section K and configured to acquire the identification information of the storage container B from the RFID tag B1 of the storage container B installed in the corresponding section K. Further, the processing liquid supply device 200 includes notification units 240 and 241 provided for each section K and configured to notify the installation state of the storage container B in the corresponding section K in the light-emitting state of the light-emitting elements 250 and 251 based on the acquisition results by the RFID readers 230 and 231 in the corresponding section K. Therefore, according to the processing liquid supply device 200, when replacing the storage container B, an operator during the replacement operation can visually recognize whether the replaced storage container B is appropriate. And in the processing liquid supply device 200, the light-emitting elements 250 and 251 of the notification units 240 and 241 emit light toward the one side surface, that is, the operator side. Therefore, the following effects are obtained. As a technology different from the technology according to the present disclosure (alternative technology), a technology in which the information notified by the notification unit 240 in the present embodiment is notified by being displayed on the touch panel 110 can be considered. In the above alternative technology, the operator needs to move to the touch panel 110 to check the notified content. On the other hand, in the present embodiment, since the light-emitting elements 250 and 251 emit light toward the operator side as described above, the operator can immediately check the notified content by the light-emitting elements 250 and 251 without moving. That is, according to the processing liquid supply device 200, when replacing the storage container B, it is possible to notify the operator during the replacement operation so that the suitability of the replaced storage container B can be immediately visually recognized.

[0089] In particular, according to the present embodiment, regardless of the skill level of the operator, the operator can determine on the spot whether the storage container B installed in the partition K is suitable.

[0090] Also, in the present embodiment, the notification unit 240 for the first installation table 220 is collectively arranged on the side of the first installation table 220. Therefore, even if the notification unit 240 is provided on the front side (the positive Y direction side in FIG. 7 etc.), that is, the operator side, the replacement operation of the storage container B in the installation partition K of the first installation table 220 is not hindered by the wiring etc. for the notification unit 240. Further, since the notification unit 240 is on the front side, the operator can more easily visually recognize the notification by the notification unit 240. In particular, when the height of the operator is low, if the notification unit 240 for the first installation table 220 with a high height position is located on the back side, there is a possibility that the operator cannot visually recognize the notification by the notification unit 240, but this can be prevented because the notification unit 240 is on the front side.

[0091] Furthermore, in the present embodiment, for the notification unit 241 with respect to the second installation base 221, it is arranged around the corresponding installation section K for each installation section K. Thereby, the operator can more easily grasp the correspondence relationship between the notification unit 241 and the installation section K. Also, the notification unit 241 is provided at a position on the back side (negative side in the Y direction in FIG. 7 etc.), that is, a position farther from the operator. Therefore, wiring etc. for the notification unit 241 does not interfere with the replacement operation of the storage container B in the installation section K of the second installation base 221 where the notification unit 241 is provided. Also, since the height position of the second installation base 221 where the notification unit 241 is provided is low, even an operator with a short stature can visually recognize the notification by the notification unit 241 provided on the back side.

[0092] Also, in the present embodiment, the notification units 240 and 241 have a simple configuration consisting of two light emitting elements 250 and 251 that emit light in different colors. And in the light emitting states of these two light emitting elements 250 and 251, a number of states related to the processing liquid supply device 200, including the propriety of the storage container B installed in each section K, can be notified. That is, in the present embodiment, the notification units 240 and 241 can notify a number of states related to the processing liquid supply device 200 with a simple configuration.

[0093] Furthermore, in the present embodiment, a relay 514 for performing an interlock that disables the operation of supplying the processing liquid from the storage container B is provided, and the above interlock becomes effective when the storage container B installed in the installation section K is not appropriate. Therefore, it is possible to prevent the supply of an inappropriate processing liquid. As a result, it is possible to prevent the mixing of an appropriate processing liquid and an inappropriate processing liquid in the buffer tank 503 and the occurrence of product defects.

[0094] <Modification Example> Note that the number of light emitting elements included in each of the notification units 240 and 241 is not limited to two, and may be one, or may be three or more.

[0095] In the above example, information on the product name of the storage container B installed in the installation section K was used to determine the suitability of the storage container B at the time of replacement. The RFID tag B1 may hold other identification information of the storage container B (for example, information on the type of processing liquid, lot number, etc.) instead of or in addition to the above product name information. In this case, the above other identification information may be used for the above suitability determination. Also, the above suitability determination may be made based on a plurality of the identification information of the storage container B held by the RFID tag B1. Regarding which of the identification information of the storage container B held by the RFID tag B1 is used for the above suitability determination, for example, an operator views the setting screen displayed on the touch panel 110 and operates the touch panel 110 to make the setting.

[0096] In the above example, the suitability of the storage container B installed in the installation section K was notified only by the light emission state by the notification units 240 and 241. In addition to this, the suitability of the storage container B installed in the installation section K may be notified by sound via the sound output means or voice via the voice output means.

[0097] Also, in the above example, a warning indicating that the storage container B has become empty was notified by a screen display via the touch panel 110. Instead of or in addition to this, the above warning may be notified by sound via the sound output means or voice via the voice output means. This can prevent oversight.

[0098] In the above example, only one row of storage containers B was installed in the depth direction (Y direction in FIG. 7 etc.) of the shelf 210, but two rows of storage containers B may be installed in the depth direction. In this case, regarding the storage container B on the back side (negative side in the Y direction in FIG. 7 etc.), it is installed from the back side of the shelf 210, and the notification units 240 and 241 for the storage container B emit light toward the back side. In the above example, the shelf 210 had two installation platforms, namely the first installation platform 220 and the second installation platform 221, arranged in the height direction. However, it may have three or more installation platforms arranged in the height direction. In this case, for the installation platform at a position higher than the first installation platform 220, an RFID reader 230, a notification unit 240, and a holder 260 are provided in the same manner as the first installation platform 220. For the installation platform at a position lower than the second installation platform 221, an RFID reader 231, a notification unit 241, and a holder 261 are provided in the same manner as the second installation platform 221.

[0099] The disclosed embodiments should be considered as illustrative in all respects and not restrictive. The above embodiments may be omitted, replaced, or changed in various forms without departing from the scope and gist of the appended claims.

Description of Reference Numerals

[0100] 30 Developing Processing Apparatus 31 Lower Anti-Reflection Film Forming Apparatus 32 Resist Coating Apparatus 33 Upper Anti-Reflection Film Forming Apparatus 200 Processing Liquid Supply Apparatus 210 Shelf 230, 231 RFID Readers 231 RFID Reader 240, 241 Notification Units 250, 251 Light-Emitting Elements B Storage Container B1 RFID Tag H Storage Medium K Compartment W Wafer Based on

Claims

1. A processing liquid supply device that supplies a processing liquid to a substrate processing apparatus that processes a substrate using the processing liquid, an installation stand on which a storage container storing a processing liquid is installed; a fixing member fixed to the installation base; a container holder that holds the storage container; a movable member having a tip end side to which the container holding portion is fixed and a base end side supported by the fixed member, and configured to be foldable; A processing liquid supply device in which, when the movable member is folded, the position of the container holding part becomes a supply position which is a position on the installation table, and when the movable member is extended, the position of the container holding part becomes a replacement position for the storage container.

2. The storage container further includes a shelf having a plurality of said installation stands for installing a plurality of said storage containers, 2. The processing liquid supplying apparatus according to claim 1, wherein a direction in which the installation tables are arranged on the shelf and a direction in which the movable member moves when folded are perpendicular to each other.

3. The storage container further includes a reader fixed to the fixing member and configured to read identification information of the storage container from a tag carried by the storage container; 3. The processing liquid supplying device according to claim 1, wherein the reader reads the identification information of the storage container when the moving member is folded and the container holding part is located on the installation table.

4. A processing liquid supply device described in any one of claims 1 to 3, further comprising a locking mechanism for maintaining the position of the container holding portion at the supply position or the exchange position, and an unlocking mechanism for releasing the lock imposed by the locking mechanism.

5. A processing liquid supply device described in any one of claims 1 to 4, wherein the container holding portion is provided with a handle.

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