Flow path device

Abstract

To provide a flow channel device capable of increasing a capacity of a flow channel per unit volume of a flow channel structure even when the arrangement of confluent flow channels connected to confluent parts is restricted due to the arrangement of the plurality of confluent parts in the flow channel structure.SOLUTION: A flow channel structure 2 of a flow channel device 1 is such that: first flow channel confluent flow channels 30 of a plurality of first flow channels 21 include the plurality of first flow channel confluent flow channels 30 aligned along a second substrate surface 18a of each second substrate 18; first flow channel confluent parts 28 of the plurality of first flow channels 21 comprise a plurality of first flow channel confluent part open holes 28b penetrating into each first substrate 16; and second flow channel first introduction paths 32 and second flow channel second introduction paths 34 of a plurality of second flow channels 22 are aligned along the second substrate surface 18a of the second substrate 18, and are arranged in an area where the first channel confluent flow channels 30 do not exist when viewed in a direction along a lamination direction of the first substrate 16 and the second substrate 18.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a flow path device.

Background Art

[0002] Conventionally, a flow path device having a plurality of microchannels (fine flow paths) inside is known. Patent Document 1 below discloses, as an example of such a flow path device, a microfluidic device for emulsification for obtaining an emulsion.

[0003] The microfluidic device for emulsification disclosed in Patent Document 1 below is composed of four laminates: a liquid introduction part, a dispersed phase distribution part, a continuous phase distribution part, and a liquid discharge part, which are laminated on each other.

[0004] The liquid introduction part has a continuous phase port into which the liquid of the continuous phase is introduced, a continuous phase supply port connected to the continuous phase port and discharging the liquid of the continuous phase to the dispersed phase distribution part on the upper layer, a dispersed phase port into which the liquid of the dispersed phase is introduced, and a dispersed phase supply port connected to the dispersed phase port and discharging the liquid of the dispersed phase to the dispersed phase distribution part on the upper layer.

[0005] The dispersed phase distribution part has a meandering dispersed phase main flow path on the lower surface in contact with the liquid introduction part. The dispersed phase main flow path is connected to the dispersed phase supply port. The liquid of the dispersed phase discharged from the dispersed phase supply port flows into this dispersed phase main flow path. Further, the dispersed phase distribution part has a plurality of dispersed phase treatment flow paths arranged at intervals along the dispersed phase main flow path. Each of these plurality of dispersed phase treatment flow paths is a fine opening extending from the dispersed phase main flow path to the upper surface of the dispersed phase distribution part. Further, the dispersed phase distribution part is connected to the continuous phase supply port and has a continuous phase passage port penetrating the dispersed phase distribution part in the vertical direction.

[0006] The continuous phase distribution section has a meandering continuous phase main flow path on the lower surface in contact with the dispersed phase distribution section. The continuous phase main flow path is connected to the continuous phase passage port. The liquid of the continuous phase discharged from the continuous phase supply port and passing through the continuous phase passage port flows into this continuous phase main flow path. The continuous phase main flow path is arranged so as to sandwich the dispersed phase treatment flow path in the left-right direction orthogonal to the vertical direction and has two flow path portions extending parallel to each other. Further, the continuous phase distribution section has a plurality of minute continuous phase treatment flow paths that connect the two flow path portions to each other and communicate with each of the plurality of dispersed phase treatment flow paths. The liquid of the dispersed phase flowing in from each dispersed phase treatment flow path merges with the liquid of the continuous phase flowing into each continuous phase treatment flow path from the continuous phase main flow path. Further, the continuous phase distribution section has a plurality of minute droplet generation flow paths that extend from each continuous phase treatment flow path to the upper surface of the continuous phase distribution section at positions directly above the respective dispersed phase treatment flow paths. In each of these droplet generation flow paths, the merged liquid of the continuous phase and the liquid of the dispersed phase flow in a sheath flow state, and droplets of the dispersed phase are formed in each of these droplet generation flow paths, and an emulsion composed of the droplets of the dispersed phase and the liquid of the continuous phase is generated.

[0007] The liquid discharge section has a meandering emulsion main flow path on the lower surface in contact with the continuous phase distribution section. This emulsion main flow path is connected to the plurality of droplet generation flow paths. The emulsion generated in each of the plurality of droplet generation flow paths flows into this emulsion main flow path from those droplet generation flow paths, the flowing-in emulsions merge in the emulsion main flow path, and are discharged from the emulsion main flow path.

Prior Art Documents

Patent Documents

[0008]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0009] By the way, in the microfluidic device disclosed in Patent Document 1, in order to increase the number of locations where the liquid of the dispersed phase is joined to the liquid of the continuous phase, a large number of dispersed phase treatment channels are provided along the dispersed phase channel. However, in this configuration, in order to avoid a change in the flow rate of the liquid of the dispersed phase flowing into the continuous phase treatment channel through the dispersed phase treatment channel between the upstream side and the downstream side of the dispersed phase channel, it is necessary to make the diameter of the dispersed phase treatment channel significantly smaller than the diameter of the dispersed phase channel. In such a configuration, there is a risk of blockage occurring in the dispersed phase treatment channel when foreign matter is mixed in the liquid of the dispersed phase or the like. Therefore, such a configuration is difficult to adopt.

[0010] In order to increase the number of locations where the first liquid and the second liquid are joined while avoiding the above-mentioned blockage and increase the processing amount of the interaction between the first liquid and the second liquid, for example, in a laminated channel structure, a plurality of joining portions penetrating from the front surface to the back surface are provided on the first substrate, and along the front surface of the first substrate, a plurality of first introduction channels into which the first liquid is introduced and a plurality of second introduction channels into which the second liquid is introduced are arranged so as to be connected to the corresponding ones of the plurality of joining portions, respectively. Further, along the front surface of another second substrate joined to the back surface of the first substrate, a plurality of joining channels through which the joined liquid of the first liquid and the second liquid joined at each of the joining portions flows are arranged so as to be connected to the corresponding ones of the plurality of joining portions, respectively. It is conceivable to repeatedly provide such a laminated structure of two substrates.

[0011] However, in this case, since the arrangement of the plurality of joining channels arranged along the front surface of the second substrate is restricted by the arrangement of the plurality of joining portions provided on the first substrate, a wasted space where channels cannot be arranged is generated in the region along the front surface of the second substrate. As a result, there is a problem that the capacity of the channels per unit volume of the channel structure decreases.

[0012] An object of the present invention is to provide a channel device capable of increasing the capacity of the channels per unit volume of the channel structure even when the arrangement of the joining channels connected to the plurality of joining portions is restricted by the arrangement of the plurality of joining portions in the channel structure.

Means for Solving the Problem

[0013] The flow path device provided by the present invention is a flow path device including a plurality of first flow paths and a plurality of second flow paths for respectively merging and flowing a first liquid and a second liquid. This flow path device includes a flow path structure in which the plurality of first flow paths and the plurality of second flow paths are provided inside. The plurality of first flow paths include a first flow path first introduction path into which the first liquid is introduced, a first flow path second introduction path into which the second liquid is introduced, an end portion on the downstream side of the first flow path first introduction path, and an end portion on the downstream side of the first flow path second introduction path, a first flow path confluence portion that connects the first liquid flowing through the first flow path first introduction path and the second liquid flowing through the first flow path second introduction path, and a first flow path confluence flow path that connects to the downstream side of the first flow path confluence portion and through which the confluent liquid of the first liquid and the second liquid confluent at the first flow path confluence portion flows. The plurality of second flow paths include a second flow path first introduction path into which the first liquid is introduced, a second flow path second introduction path into which the second liquid is introduced, an end portion on the downstream side of the second flow path first introduction path, and an end portion on the downstream side of the second flow path second introduction path, a second flow path confluence portion that connects the first liquid flowing through the second flow path first introduction path and the second liquid flowing through the second flow path second introduction path, and a second flow path confluence flow path that connects to the downstream side of the second flow path confluence portion and through which the confluent liquid of the first liquid and the second liquid confluent at the second flow path confluence portion flows. The flow path structure includes a plurality of first substrates and a plurality of second substrates that are alternately laminated along their plate thickness directions. Each of the plurality of first substrates has a first substrate surface that is one surface in its plate thickness direction and a first substrate back surface that is a surface opposite to the first substrate surface. Each of the plurality of second substrates has a second substrate surface that is one surface in its plate thickness direction and is in close contact with the first substrate back surface of the first substrate laminated on the second substrate, and a second substrate back surface that is a surface opposite to the second substrate surface and is in close contact with the first substrate surface of the first substrate on which the second substrate is laminated. The first flow path first introduction paths of the plurality of first flow paths include a plurality of first flow path first introduction paths arranged along the first substrate surfaces of the plurality of first substrates.The first flow path second introduction paths of the plurality of first flow paths include a plurality of first flow path second introduction paths arranged along the surface of each of the plurality of first substrates. The first flow path confluence paths of the plurality of first flow paths include a plurality of first flow path confluence paths arranged along the surface of each of the plurality of second substrates. The first flow path confluence portions of the plurality of first flow paths are composed of a plurality of first flow path confluence portion through holes that penetrate each of the plurality of first substrates in their plate thickness directions. The second flow path first introduction paths of the plurality of second flow paths and the second flow path second introduction paths of the plurality of second flow paths are arranged along the surface of each of the plurality of second substrates, and are arranged in a region where there are no first flow path confluence paths when viewed from a direction along the stacking direction of the first substrate and the second substrate.

[0014] In this flow path device, since the plurality of second flow path first introduction paths and the plurality of second flow path second introduction paths arranged along the second substrate surface are arranged in a region where there are no first flow path confluence paths in the region along the second substrate surface, the arrangement of the plurality of first flow path confluence paths arranged along the second substrate surface is restricted by the arrangement of the plurality of first flow path confluence portions provided on the first substrate, so that a space where the first flow path confluence paths cannot be arranged in the region along the second substrate surface is effectively utilized as a space for arranging the plurality of second flow path first introduction paths and the plurality of second flow path second introduction paths. Therefore, even when the arrangement of the first flow path confluence paths connected to those first flow path confluence portions is restricted by the arrangement of the plurality of first flow path confluence portions, it is possible to reduce the wasted space where no flow paths are arranged in the flow path structure and increase the capacity of the flow paths per unit volume of the flow path structure.

[0015] The confluence portion of the plurality of second flow paths is composed of a plurality of second flow path confluence through-holes that penetrate each of the plurality of first substrates in their plate thickness directions. The confluence flow paths of the plurality of second flow paths include a plurality of second flow path confluence flow paths arranged along the surface of each of the plurality of first substrates. The plurality of second flow path confluence flow paths arranged along the surface of the first substrate are preferably arranged in a region where the plurality of first flow path first introduction flow paths and the plurality of first flow path second introduction flow paths do not exist when viewed from a direction along the stacking direction.

[0016] In this configuration, since the plurality of second flow path confluence flow paths arranged along the surface of the first substrate are arranged in a region where the plurality of first flow path first introduction paths and the plurality of first flow path second introduction paths do not exist in the region along the surface of the first substrate, the space where the first flow path first introduction path and the first flow path second introduction path are not arranged in the region along the surface of the first substrate can be effectively utilized as the space for arranging the plurality of second flow path confluence flow paths. Therefore, it is possible to further reduce the wasted space where no flow path is arranged in the flow path structure, and it is possible to further increase the capacity of the flow path per unit volume of the flow path structure.

[0017] The plurality of first flow path first introduction paths arranged along each of the first substrate surfaces of the plurality of first substrates are composed of a plurality of first flow path first introduction grooves formed on at least one of the first substrate surface and the back surface of the second substrate in close contact with the first substrate surface. The plurality of first flow path second introduction paths arranged along each of the first substrate surfaces of the plurality of first substrates are composed of a plurality of first flow path second introduction grooves formed on at least one of the first substrate surface and the back surface of the second substrate in close contact with the first substrate surface. The plurality of first flow path confluence paths arranged along each of the second substrate surfaces of the plurality of second substrates are composed of a plurality of first flow path confluence grooves formed on at least one of the second substrate surface and the back surface of the first substrate in close contact with the second substrate surface. The plurality of second flow path first introduction paths arranged along each of the second substrate surfaces of the plurality of second substrates are composed of a plurality of second flow path first introduction grooves formed on at least one of the second substrate surface and the back surface of the first substrate in close contact with the second substrate surface. The plurality of second flow path second introduction paths arranged along each of the second substrate surfaces of the plurality of second substrates are composed of a plurality of second flow path second introduction grooves formed on at least one of the second substrate surface and the back surface of the first substrate in close contact with the second substrate surface. It is preferable that the plurality of second flow path confluence paths arranged along each of the first substrate surfaces of the plurality of first substrates are composed of a plurality of second flow path confluence grooves formed on at least one of the first substrate surface and the back surface of the second substrate in close contact with the first substrate surface.

[0018] According to this configuration, each first substrate having a plurality of grooves formed on the first substrate surface and / or the first substrate back surface and each second substrate having a plurality of grooves formed on the second substrate surface and / or the second substrate back surface are alternately laminated, and the second substrate surface is brought into close contact with the first substrate back surface of each first substrate and the first substrate surface is brought into close contact with the second substrate back surface of each second substrate. In this simple operation, a plurality of first flow path first introduction paths, a plurality of first flow path second introduction paths, a plurality of first flow path confluence paths, a plurality of second flow path first introduction paths, a plurality of second flow path second introduction paths, and a plurality of second flow path confluence paths can be formed in the flow path structure.

[0019] The first introduction groove of the first flow path that constitutes the first introduction path of the first flow path is provided only on either one of the first substrate surface and the back surface of the second substrate that is in close contact with the first substrate surface. The first introduction groove of the first flow path that constitutes the second introduction path of the first flow path is provided only on either one of the first substrate surface and the back surface of the second substrate that is in close contact with the first substrate surface. The first confluence groove of the first flow path that constitutes the first flow path confluence path is provided only on either one of the second substrate surface and the back surface of the first substrate that is in close contact with the second substrate surface. The second introduction groove of the second flow path that constitutes the first introduction path of the second flow path is provided only on either one of the second substrate surface and the back surface of the first substrate that is in close contact with the second substrate surface. The second introduction groove of the second flow path that constitutes the second introduction path of the second flow path is provided only on either one of the second substrate surface and the back surface of the first substrate that is in close contact with the second substrate surface. The second confluence groove of the second flow path that constitutes the second flow path confluence path is preferably provided only on either one of the first substrate surface and the back surface of the second substrate that is in close contact with the first substrate surface.

[0020] According to this configuration, the first introduction groove of the first flow path, the second introduction groove of the first flow path, and the second confluence groove of the second flow path are provided on both the first substrate surface and the second substrate back surface. When laminating the first substrate and the second substrate to form a flow path structure as in the case where the first introduction groove of the second flow path, the second introduction groove of the second flow path, and the first confluence groove of the first flow path are provided on both the first substrate back surface and the second substrate surface, it is not necessary to align the first introduction grooves of the first flow path provided on both surfaces, the second introduction grooves of the first flow path provided on both surfaces, and the second confluence grooves provided on both surfaces. Also, it is not necessary to align the first introduction grooves of the second flow path provided on both surfaces, the second introduction grooves of the second flow path provided on both surfaces, and the first confluence grooves provided on both surfaces. Therefore, the work when creating the flow path structure can be simplified.

[0021] For each specific number of the first substrates in the lamination direction of the first substrate and the second substrate, it is preferable that the first introduction path of the first flow path, the second introduction path of the first flow path, and the second flow path confluence path are arranged along the first substrate surface in the same arrangement pattern.

[0022] According to this configuration, since the same arrangement pattern of the first flow path first introduction path, the first flow path second introduction path, and the second flow path confluence path can be applied for each specific number of the first substrates, compared with the case where the arrangement patterns of the first flow path first introduction path, the first flow path second introduction path, and the second flow path confluence path arranged along the first substrate surface are different for each first substrate, the productivity in producing the flow path structure can be improved.

[0023] The arrangement patterns of the first flow path first introduction path, the first flow path second introduction path, and the second flow path confluence path arranged along the respective first substrate surfaces of the plurality of first substrates are preferably the same.

[0024] According to this configuration, the productivity in producing the flow path structure can be further improved.

[0025] For each specific number of the second substrates in the stacking direction, it is preferable that the second flow path first introduction path, the second flow path second introduction path, and the first flow path confluence path are arranged along the second substrate surface in the same arrangement pattern.

[0026] According to this configuration, since the same arrangement pattern of the second flow path first introduction path, the second flow path second introduction path, and the first flow path confluence path can be applied for each specific number of the second substrates, compared with the case where the arrangement patterns of the second flow path first introduction path, the second flow path second introduction path, and the first flow path confluence path arranged along the second substrate surface are different for each second substrate, the productivity in producing the flow path structure can be improved.

[0027] The arrangement patterns of the second flow path first introduction path, the second flow path second introduction path, and the first flow path confluence path arranged along the respective second substrate surfaces of the plurality of second substrates are preferably the same.

[0028] According to this configuration, the productivity in producing the flow path structure can be further improved.

[0029] The first introduction path of the first flow path has a first inlet of the first flow path, which is a location for receiving the first liquid. The second introduction path of the first flow path has a second inlet of the first flow path, which is a location for receiving the second liquid. The first introduction path of the second flow path has a first inlet of the second flow path, which is a location for receiving the first liquid. The second introduction path of the second flow path has a second inlet of the second flow path, which is a location for receiving the second liquid. The first inlets of the plurality of first flow paths are concentrated and arranged in a specific region on any side surface of the flow path structure. The second inlets of the plurality of first flow paths are concentrated and arranged in a specific region on any side surface of the flow path structure. The first inlets of the plurality of second flow paths are concentrated and arranged in a specific region on any side surface of the flow path structure. The second inlets of the plurality of second flow paths may be concentrated and arranged in a specific region on any side surface of the flow path structure.

[0030] According to this configuration, compared with the case where the plurality of first inlets of the first flow paths are dispersedly arranged, the connection of the device for distributing the first liquid to the plurality of first inlets of the first flow paths becomes easier, and compared with the case where the plurality of second inlets of the first flow paths are dispersedly arranged, the connection of the device for distributing the second liquid to the plurality of second inlets of the first flow paths becomes easier. Also, compared with the case where the plurality of first inlets of the second flow paths are dispersedly arranged, the connection of the device for distributing the first liquid to the plurality of first inlets of the second flow paths becomes easier, and compared with the case where the plurality of second inlets of the second flow paths are dispersedly arranged, the connection of the device for distributing the second liquid to the plurality of second inlets of the second flow paths becomes easier.

[0031] The flow path device is preferably further provided with a first flow path first distribution header that is attached to the flow path structure so as to collectively cover the first flow path first inlets of the plurality of first flow paths and distributes the first liquid to the first flow path first inlets thereof, a first flow path second distribution header that is attached to the flow path structure so as to collectively cover the first flow path second inlets of the plurality of first flow paths and distributes the second liquid to the first flow path second inlets thereof, a second flow path first distribution header that is attached to the flow path structure so as to collectively cover the second flow path first inlets of the plurality of second flow paths and distributes the first liquid to the second flow path first inlets thereof, and a second flow path second distribution header that is attached to the flow path structure so as to collectively cover the second flow path second inlets of the plurality of second flow paths and distributes the second liquid to the second flow path second inlets thereof.

[0032] According to this configuration, compared with the case where a first liquid supply unit that supplies the first liquid to each of the plurality of first flow path first inlets is individually connected and a second liquid supply unit that supplies the second liquid to each of the plurality of first flow path second inlets is individually connected, with a simple configuration, the first liquid can be distributed and supplied to each first flow path first inlet and the second liquid can be distributed and supplied to each first flow path second inlet. Similarly, compared with the case where a first liquid supply unit that supplies the first liquid to each of the plurality of second flow path first inlets is individually connected and a second liquid supply unit that supplies the second liquid to each of the plurality of second flow path second inlets is individually connected, with a simple configuration, the first liquid can be distributed and supplied to each second flow path first inlet and the second liquid can be distributed and supplied to each second flow path second inlet.

[0033] The first flow path confluence flow path has a first flow path outlet, which is a location where the confluent liquid flowing through the first flow path confluence flow path flows out. The second flow path confluence flow path has a second flow path outlet, which is a location where the confluent liquid flowing through the second flow path confluence flow path flows out. The first flow path outlets of the plurality of first flow paths are preferably concentrated and arranged in a specific region on an arbitrary side surface of the flow path structure, and the second flow path outlets of the plurality of second flow paths are preferably concentrated and arranged in a specific region on an arbitrary side surface of the flow path structure.

[0034] The flow path device is preferably further provided with a first flow path recovery header that is attached to the flow path structure so as to collectively cover the first flow path outlets of the plurality of first flow paths, and receives and recovers the combined liquid flowing out from those first flow path outlets, and a second flow path recovery header that is attached to the flow path structure so as to collectively cover the second flow path outlets of the plurality of second flow paths, and receives and recovers the combined liquid flowing out from those second flow path outlets.

[0035] According to this configuration, compared with the case of connecting a recovery part for individually recovering the combined liquid to each of the plurality of first flow path outlets, it has a simpler configuration and can recover the combined liquid flowing out from each first flow path outlet. Also, compared with the case of connecting a recovery part for individually recovering the combined liquid to each of the plurality of second flow path outlets, it has a simpler configuration and can recover the combined liquid flowing out from each second flow path outlet.

[0036] Each of the first flow path confluence flow paths of the plurality of first flow paths is configured such that the flow rate of the combined liquid per unit time in those first flow path confluence flow paths is equal. Each of the Second second flow path confluence flow paths of the plurality of flow paths is preferably configured such that the flow rate of the combined liquid per unit time in those second flow path confluence flow paths is equal.

[0037] According to this configuration, it is possible to make the conditions under which the combined liquid flows in each first flow path confluence flow path approach the same conditions, and it is also possible to make the conditions under which the combined liquid flows in each second flow path confluence flow path approach the same conditions.

[0038] Each of the first confluence channels of the plurality of first channels has a first confluence channel cross-section which is a cross-section in a direction orthogonal to the flow direction of the confluent liquid in the first confluence channel, and the areas of the first confluence channel cross-sections of those first confluence channels are the same. Each of the second confluence channels of the plurality of second channels has a second confluence channel cross-section which is a cross-section in a direction orthogonal to the flow direction of the confluent liquid in the second confluence channel, and it is preferable that the areas of the second confluence channel cross-sections of those second confluence channels are the same.

[0039] According to this configuration, it is possible to prevent a difference in the flow rate of the confluent liquid per unit time due to a difference in the area of the first confluence channel cross-section in each first confluence channel, and it is also possible to prevent a difference in the flow rate of the confluent liquid per unit time due to a difference in the area of the second confluence channel cross-section in each second confluence channel.

[0040] The shapes of the first confluence channel cross-sections of the first confluence channels of the plurality of first channels are preferably the same, and the shapes of the second confluence channel cross-sections of the second confluence channels of the plurality of second channels are preferably the same.

[0041] According to this configuration, it is possible to prevent a difference in the flow rate of the confluent liquid per unit time due to a difference in the shape of the first confluence channel cross-section in each first confluence channel, and it is also possible to prevent a difference in the flow rate of the confluent liquid per unit time due to a difference in the shape of the second confluence channel cross-section in each second confluence channel.

[0042] The channel lengths of the first confluence channels of the plurality of first channels are preferably the same, and the channel lengths of the second confluence channels of the plurality of second channels are preferably the same.

[0043] According to this configuration, it is possible to prevent a difference in the flow-through time of the confluent liquid due to a difference in the channel length in each first confluence channel, and it is also possible to prevent a difference in the flow-through time of the confluent liquid due to a difference in the channel length in each second confluence channel.

[0044] Each of the first flow path merging flow paths of the plurality of first flow paths has at least one first merging flow path bending portion which is a bent portion for changing the direction in which the merged liquid flows in the first flow path merging flow path, and the number of the first merging flow path bending portions in those first flow path merging flow paths is the same. Each of the second flow path merging flow paths of the plurality of second flow paths has at least one second merging flow path bending portion which is a bent portion for changing the direction in which the merged liquid flows in the second flow path merging flow path, and it is preferable that the number of the second merging flow path bending portions in those second flow path merging flow paths is the same.

[0045] According to this configuration, since each first flow path merging flow path has at least one first merging flow path bending portion, the flow path length of each first flow path merging flow path can be expanded as compared with the case where the whole of each first flow path merging flow path extends linearly. Also, since each second flow path merging flow path has at least one second merging flow path bending portion, the flow path length of each second flow path merging flow path can be expanded as compared with the case where the whole of each second flow path merging flow path extends linearly. For this reason, it is possible to ensure a longer flow time of the merged liquid in each first flow path merging flow path and each second flow path merging flow path, and it is possible to further increase the capacity of the flow path per unit volume of the flow path structure. Moreover, in this configuration, since the number of the first merging flow path bending portions in each first flow path merging flow path is the same, it is possible to prevent a difference in the flow rate of the merged liquid per unit time due to the difference in the number of the first merging flow path bending portions in each first flow path merging flow path. Also, since the number of the second merging flow path bending portions in each second flow path merging flow path is the same, it is possible to prevent a difference in the flow rate of the merged liquid per unit time due to the difference in the number of the second merging flow path bending portions in each second flow path merging flow path.

Effect of the Invention

[0046] As described above, according to the present invention, even when the arrangement of the plurality of confluence portions in the flow path structure restricts the arrangement of the confluence flow paths connected to those confluence portions, a flow path device capable of increasing the capacity of the flow paths per unit volume of the flow path structure is provided.

Brief Description of the Drawings

[0047]

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[0048] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0049] FIG. 24 is a perspective view of a flow path device 1 according to an embodiment of the present invention. The flow path device 1 according to the present embodiment is a device including a plurality of first flow paths 21 (see FIG. 3) and a plurality of second flow paths 22 (see FIG. 3) for merging and flowing a first liquid and a second liquid. Each of the first flow paths 21 and each of the second flow paths 22 is a microchannel having a minute flow path. This flow path device 1 is used for various processes of merging and interacting a first liquid and a second liquid. For example, the flow path device 1 is used for a process of generating an emulsion by merging a first liquid as a continuous phase and a second liquid as a dispersed phase, a process of causing a chemical reaction between a first liquid and a second liquid that can cause a chemical reaction with each other, or an extraction process of extracting an extraction target substance from a first liquid containing the extraction target substance and a second liquid as an extractant and moving the extraction target substance into the second liquid.

[0050] As shown in FIG. 3, each of the plurality of first flow paths 21 has a first flow path first introduction path 24, a first flow path second introduction path 26, a first flow path confluence part 28, and a first flow path confluence flow path 30.

[0051] The first flow path first introduction path 24 is a flow path portion into which the first liquid is distributed and introduced. This first flow path first introduction path 24 has a first flow path first inlet 24a that is located at the upstream end thereof and is a location where the first liquid flows in.

[0052] The first flow path second introduction path 26 is a flow path portion into which the second liquid is distributed and introduced. This first flow path second introduction path 26 has a first flow path second inlet 26a that is located at the upstream end thereof and is a location where the second liquid flows in.

[0053] The first flow path confluence part 28 is a location where the first liquid flowing through the first flow path first introduction path 24 and the second liquid flowing through the first flow path second introduction path 26 are confluent. The first flow path confluence part 28 is connected to the downstream ends thereof such that the first liquid flows in from the downstream end of the first flow path first introduction path 24 and the second liquid flows in from the downstream end of the first flow path second introduction path 26.

[0054] The first flow path confluence flow path 30 is a flow path portion through which the confluent liquid of the first liquid and the second liquid confluent at the first flow path confluence part 28 flows. This first flow path confluence flow path 30 is connected to the downstream side of the first flow path confluence part 28. In this first flow path confluence flow path 30, while the confluent liquid flows downstream, processing between the first liquid and the second liquid in the confluent liquid is performed. The first flow path confluence flow path 30 has a first flow path outlet 30a that is located at the downstream end thereof and is a location where the confluent liquid flows out.

[0055] Also, as shown in FIG. 3, each of the plurality of second flow paths 22 has a second flow path first introduction path 32, a second flow path second introduction path 34, a second flow path confluence part 36, and a second flow path confluence flow path 38.

[0056] The second flow path first introduction path 32 is a flow path portion into which the first liquid is distributed and introduced. This second flow path first introduction path 32 has a second flow path first inlet 32a that is located at the upstream end thereof and is the location where the first liquid flows in.

[0057] The second flow path second introduction path 34 is a flow path portion into which the second liquid is distributed and introduced. This second flow path second introduction path 34 has a second flow path second inlet 34a that is located at the upstream end thereof and is the location where the second liquid flows in.

[0058] The second flow path confluence portion 36 is a location where the first liquid flowing through the second flow path first introduction path 32 and the second liquid flowing through the second flow path second introduction path 34 are combined. The second flow path confluence portion 36 is connected to the downstream ends of the second flow path first introduction path 32 and the second flow path second introduction path 34 such that the first liquid flows in from the downstream end of the second flow path first introduction path 32 and the second liquid flows in from the downstream end of the second flow path second introduction path 34.

[0059] The second flow path combined flow path 38 is a flow path portion through which the combined liquid of the first liquid and the second liquid combined at the second flow path confluence portion 36 flows. This second flow path combined flow path 38 is connected to the downstream side of the second flow path confluence portion 36. In this second flow path combined flow path 38, while the combined liquid flows downstream, processing between the first liquid and the second liquid in the combined liquid is performed. The second flow path combined flow path 38 has a second flow path outlet 38a that is located at the downstream end thereof and is the location where the combined liquid flows out.

[0060] And, as shown in FIG. 1, the flow path device 1 according to the present embodiment includes a flow path structure 2, a first flow path first distribution header 4, a first flow path second distribution header 6, a first flow path recovery header 8, a second flow path first distribution header 10, a second flow path second distribution header 12, and a second flow path recovery header 14.

[0061] The flow path structure 2 is a block-shaped (rectangular parallelepiped-shaped) structure in which the plurality of first flow paths 21 and the plurality of second flow paths 22 are provided inside thereof. This flow path structure 2 has a plurality of first substrates 16, a plurality of second substrates 18, and a sealing substrate 19 that are laminated on each other.

[0062] As shown in FIGS. 1 and 2, the first substrate 16 and the second substrate 18 are alternately laminated in the direction along their plate thickness directions. A sealing substrate 19 is laminated on the first substrate 16 disposed at one end in the lamination direction. The plurality of laminated first substrates 16, the plurality of second substrates 18, and the sealing substrate 19 are integrated by bringing into close contact the surfaces of these substrates that contact each other, and the flow path structure 2 is formed by the plurality of laminated and integrated first substrates 16, the plurality of second substrates 18, and the sealing substrate 19.

[0063] As a method for bringing into close contact the surfaces of the first substrate 16, the plurality of second substrates 18, and the sealing substrate 19 that contact each other, various methods are adopted. For example, a method of bringing the surfaces into close contact by diffusion bonding, a method of bonding and bringing the surfaces into close contact by sintering, a method of bonding and bringing the surfaces into close contact with an adhesive, or a method in which the flow path device 1 has a pressing tool (not shown) that presses the plurality of laminated first substrates 16, the plurality of second substrates 18, and the sealing substrate 19 from both sides in the lamination direction, and bringing the surfaces into close contact by the pressing. When bringing the surfaces into close contact by pressing, the sealing property between the surfaces may be enhanced by sandwiching a gasket disposed at the peripheral portion of the surfaces and bringing the surfaces into close contact.

[0064] In each first substrate 16, a first flow path first introduction path 24, a first flow path second introduction path 26, and a first flow path confluence portion 28 of a plurality of first flow paths 21, and a second flow path confluence portion 36 and a second flow path confluence flow path 38 of a plurality of second flow paths 22 are formed.

[0065] Specifically, each first substrate 16 (see FIG. 4) has a rectangular shape when viewed from a direction along the thickness direction of the first substrate 16. Each first substrate 16 has a first substrate surface 16a which is a surface facing one side in the direction along the thickness direction of the first substrate 16, and a first substrate back surface 16b (see FIGS. 6 and 7) which is a surface facing the side opposite to the first substrate surface 16a. On each first substrate surface 16a (see FIG. 4), a plurality of first flow path first introduction grooves 24b constituting a plurality of first flow path first introduction paths 24, a plurality of first flow path second introduction grooves 26b constituting a plurality of first flow path second introduction paths 26, and a plurality of second flow path confluence grooves 38b constituting a plurality of second flow path confluence flow paths 38 are formed. Further, in each first substrate 16, a plurality of first flow path confluence part through holes 28b (see FIGS. 4 and 6) constituting a plurality of first flow path confluence parts 28 and a plurality of second flow path confluence part through holes 36b (see FIGS. 4 and 7) constituting a plurality of second flow path confluence parts 36 are formed so as to penetrate the first substrate 16 in the thickness direction from the first substrate surface 16a to the first substrate back surface.

[0066] The plurality of first flow path first introduction grooves 24b linearly extend from one side of the rectangular first substrate surface 16a in a direction perpendicular to that side and reach the central portion of the first substrate 16 in that direction. These first flow path first introduction grooves 24b are arranged adjacent to each other in parallel.

[0067] The plurality of first flow path second introduction grooves 26b linearly extend from the side opposite to the one side of the first substrate surface 16a in a direction perpendicular to that side and reach the central portion of the first substrate 16 in that direction. These first flow path second introduction grooves 26b are arranged adjacent to each other in parallel. Further, each first flow path second introduction groove 26b is arranged on an extension line of the corresponding first flow path first introduction groove 24b and extends in the same direction as that of the first flow path first introduction groove 24b. The plurality of first flow path first introduction grooves 24b and the plurality of first flow path second introduction grooves 26b are arranged in a region half of the first substrate surface 16a in a direction perpendicular to their extending directions.

[0068] Each of the plurality of first flow path confluence portion through holes 28b is provided at a location where each of the plurality of first flow path first introduction grooves 24b and the corresponding ones of the plurality of first flow path second introduction grooves 26b are connected. Each first flow path confluence portion through hole 28b is a round hole and has a hole diameter equal to the width in a direction orthogonal to the extending direction of the first flow path first introduction path 24 and the width in a direction orthogonal to the extending direction of the first flow path second introduction path 26. In other words, each first flow path confluence portion through hole 28b has a hole diameter equal to the width in a direction orthogonal to the extending direction of the first flow path first introduction groove 24b and the width in a direction orthogonal to the extending direction of the first flow path second introduction groove 26b.

[0069] The plurality of second flow path confluence grooves 38b are arranged in the remaining half region of the first substrate surface 16a other than the half region where the plurality of first flow path first introduction grooves 24b and the plurality of first flow path second introduction grooves 26b are arranged. These second flow path confluence grooves 38b extend obliquely with respect to the extending directions of the first flow path first introduction groove 24b and the first flow path second introduction groove 26b from the side of the remaining two sides of the first substrate surface 16a that are orthogonal to the two sides where one end of the first flow path first introduction groove 24b and one end of the first flow path second introduction groove 26b are respectively provided and where the first flow path first introduction groove 24b and the first flow path second introduction groove 26b are not arranged. These second flow path confluence grooves 38b are arranged adjacent to each other in parallel.

[0070] Each of the plurality of second flow path confluence portion through holes 36b is provided at a location corresponding to the end portion of each of the plurality of second flow path confluence grooves 38b in the first substrate 16. Each second flow path confluence portion through hole 36b is a round hole and has a hole diameter equal to the width in a direction orthogonal to the extending direction of the second flow path first introduction path 32 and the width in a direction orthogonal to the extending direction of the second flow path second introduction path 34. In other words, each second flow path confluence portion through hole 36b has a hole diameter equal to the width in a direction orthogonal to the extending direction of a later-described second flow path first introduction groove 32b and the width in a direction orthogonal to the extending direction of a later-described second flow path second introduction groove 34b.

[0071] On the first substrate surface 16a of the first substrate 16 disposed at one end in the stacking direction among the stack formed of the plurality of first substrates 16 and the plurality of second substrates 18, a sealing substrate 19 is adhered. By this sealing substrate 19, the openings of the plurality of first flow path first introduction grooves 24b, the openings of the plurality of first flow path second introduction grooves 26b, and the openings of the plurality of second flow path confluence grooves 38b formed on the first substrate surface 16a of the first substrate 16 disposed at the one end are sealed. Further, the openings of the plurality of first flow path first introduction grooves 24b, the openings of the plurality of first flow path second introduction grooves 26b, and the openings of the plurality of second flow path confluence grooves 38b formed on the first substrate surface 16a of each first substrate 16 disposed other than one end in the stacking direction of the stack are sealed by the second substrate 18 adhered to each first substrate surface 16a.

[0072] As described above, a plurality of first flow path first introduction paths 24 arranged along each first substrate surface 16a are formed by the plurality of first flow path first introduction grooves 24b in which each opening on each first substrate surface 16a is sealed. Similarly, a plurality of first flow path second introduction paths 26 arranged along each first substrate surface 16a are formed by the plurality of first flow path second introduction grooves 26b in which each opening on each first substrate surface 16a is sealed. Further, a plurality of first flow path confluence portions 28 that connect the plurality of first flow path first introduction paths 24 and the plurality of first flow path second introduction paths 26 formed on the first substrate 16 are formed by the plurality of first flow path confluence portion through holes 28b formed in each first substrate 16.

[0073] Further, a plurality of second flow path confluence channels 38b in which each opening on each first substrate surface 16a is sealed form a plurality of second flow path confluence channels 38 arranged along each first substrate surface 16a. Further, a plurality of second flow path confluence portions 36 are formed at the upstream ends of the plurality of second flow path confluence channels 38 formed in the first substrate 16 by a plurality of second flow path confluence portion through holes 36b formed in the first substrate 16. The plurality of second flow path confluence channels 38 thus formed are located in a region where the plurality of first flow path first introduction channels 24, the plurality of first flow path second introduction channels 26, and the plurality of first flow path confluence portions 28 do not exist, that is, in a region other than the region where the plurality of first flow path first introduction channels 24, the plurality of first flow path second introduction channels 26, and the plurality of first flow path confluence portions 28 are arranged, when viewed from the direction along the stacking direction.

[0074] The plurality of second flow path confluence channels 38 arranged along each first substrate surface 16a are configured such that the flow rate per unit time of the confluent liquid in these second flow path confluence channels 38 is equal. Therefore, each second flow path confluence channel 38 of all the second flow paths 22 provided in the flow path structure 2 is configured such that the flow rate per unit time of the confluent liquid in these second flow path confluence channels 38 is equal.

[0075] Further, each of the plurality of second flow path confluence channels 38 arranged along each first substrate surface 16a has a cross section in a direction orthogonal to the flow direction of the confluent liquid in the second flow path confluence channel 38. The cross-sectional shapes of these second flow path confluence channels 38 are the same, and as a result, the cross-sectional areas of these second flow path confluence channels 38 are the same. Therefore, the cross-sectional shapes in the direction orthogonal to the flow direction of the confluent liquid of each second flow path confluence channel 38 of all the second flow paths 22 provided in the flow path structure 2 are the same, and the cross-sectional areas are the same. Also, the channel lengths of the plurality of second flow path confluence channels 38 arranged along each first substrate surface 16a are the same. Therefore, the channel lengths of each second flow path confluence channel 38 of all the second flow paths 22 provided in the flow path structure 2 are the same.

[0076] On each second substrate 18, a first-channel confluence channel 30 of a plurality of first channels 21, a first second-channel introduction path 32 and a second second-channel introduction path 34 of a plurality of second channels 22 are formed.

[0077] Specifically, each second substrate 18 (see FIG. 5) has a rectangular shape similar to that of the first substrate 16 when viewed from a direction along the thickness direction of the second substrate 18. Each second substrate 18 has a second-substrate front surface 18a which is a surface facing one side in the direction along the thickness direction of the second substrate 18 and which is in close contact with the first-substrate back surface 16b (see FIG. 6) of the first substrate 16 laminated on the second substrate 18, and a second-substrate back surface (see FIG. 6) which is a surface facing the side opposite to the second-substrate front surface 18a. On each second-substrate front surface 18a (see FIG. 5), a plurality of second-channel first-introduction grooves 32b constituting a plurality of second-channel first-introduction paths 32, a plurality of second-channel second-introduction grooves 34b constituting a plurality of second-channel second-introduction paths 34, and a plurality of first-channel confluence grooves 30b constituting a plurality of first-channel confluence channels 30 are formed.

[0078] The plurality of second-channel first-introduction grooves 32b linearly extend from one side of the rectangular second-substrate front surface 18a in a direction perpendicular to the one side and reach the central portion of the second substrate 18 in that direction. These second-channel first-introduction grooves 32b are arranged so as to be adjacent to each other in parallel.

[0079] The plurality of second-channel second-introduction grooves 34b extend linearly from the side opposite to the one side of the second substrate surface 18a in a direction perpendicular to that side and reach the central portion of the second substrate 18 in that direction. These second-channel second-introduction grooves 34b are arranged so as to be adjacent to each other in parallel. Further, each second-channel second-introduction groove 34b is arranged on the extension line of the corresponding second-channel first-introduction groove 32b and extends in the same direction as that of the second-channel first-introduction groove 32b. The plurality of second-channel first-introduction grooves 32b and the plurality of second-channel second-introduction grooves 34b are arranged in a region that is half of the second substrate surface 18a in a direction perpendicular to their extending direction. Also, when viewed from the stacking direction, each second-channel first-introduction groove 32b and each second-channel second-introduction groove 34b extend in a direction perpendicular to each first-channel first-introduction groove 24b and each first-channel second-introduction groove 26b.

[0080] The plurality of first-channel confluence grooves 30b are arranged in the remaining half region of the second substrate surface 18a other than the half region where the plurality of second-channel first-introduction grooves 32b and the plurality of second-channel second-introduction grooves 34b are arranged. These first-channel confluence grooves 30b extend obliquely from the side of the remaining two sides of the second substrate surface 18a that are perpendicular to the two sides where one end of the second-channel first-introduction groove 32b and one end of the second-channel second-introduction groove 34b are respectively provided and that is the side where the second-channel first-introduction groove 32b and the second-channel second-introduction groove 34b are not arranged, in the extending direction of the second-channel first-introduction groove 32b and the second-channel second-introduction groove 34b. These first-channel confluence grooves 30b are arranged so as to be adjacent to each other in parallel.

[0081] The openings of the plurality of second flow path first introduction grooves 32b, the openings of the plurality of second flow path second introduction grooves 34b, and the openings of the plurality of first flow path confluence grooves 30b formed on the second substrate surface 18a of each second substrate 18 are sealed by the first substrate 16 in close contact with the second substrate surface 18a. Thus, a plurality of second flow path first introduction paths 32 arranged along each second substrate surface 18a are formed by the plurality of second flow path first introduction grooves 32b in which each opening on each second substrate surface 18a is sealed. Similarly, a plurality of second flow path second introduction paths 34 arranged along each second substrate surface 18a are formed by the plurality of second flow path second introduction grooves 34b in which each opening on each second substrate surface 18a is sealed. Further, a plurality of first flow path confluence flow paths 30 arranged along each second substrate surface 18a are formed by the plurality of first flow path confluence grooves 30b in which each opening on each second substrate surface 18a is sealed. The plurality of second flow path first introduction paths 32 and the plurality of second flow path second introduction paths 34 formed as described above are arranged in a region where the plurality of first flow path confluence flow paths 30 do not exist, that is, in a region other than the region where the plurality of first flow path confluence flow paths 30 are arranged, when viewed from the direction along the lamination direction.

[0082] The plurality of first flow path confluence flow paths 30 arranged along each second substrate surface 18a are configured such that the flow rate per unit time of the confluent liquid in those first flow path confluence flow paths 30 is equal. Therefore, each of the first flow path confluence flow paths 30 of all the first flow paths 21 provided in the flow path structure 2 is configured such that the flow rate per unit time of the confluent liquid in those first flow path confluence flow paths 30 is equal.

[0083] Further, each of the plurality of first flow path confluence flow paths 30 arranged along each second substrate surface 18a has a cross-section in a direction orthogonal to the flow direction of the confluent liquid in the first flow path confluence flow path 30. The cross-sectional shapes of the respective first flow path confluence flow paths 30 are the same, and as a result, the cross-sectional areas of the respective first flow path confluence flow paths 30 are the same. Therefore, the cross-sectional shapes in the direction orthogonal to the flow direction of the confluent liquid of the respective first flow path confluence flow paths 30 of all the first flow paths 21 provided in the flow path structure 2 are the same, and the cross-sectional areas are the same. Also, the flow path lengths of the plurality of first flow path confluence flow paths 30 arranged along each second substrate surface 18a are the same. Therefore, the flow path lengths of the respective first flow path confluence flow paths 30 of all the first flow paths 21 provided in the flow path structure 2 are the same.

[0084] Further, the flow path structure 2 has four side surfaces respectively facing in each direction orthogonal to the stacking direction of the first substrate 16 and the second substrate 18. The first flow path first inlets 24a of the respective first flow paths 21, the first flow path second inlets 26a of the respective first flow paths 21, the first flow path outlets 30a of the respective first flow paths 21, the second flow path first inlets 32a of the respective second flow paths 22, the second flow path second inlets 34a of the respective second flow paths 22, and the second flow path outlets 38a of the respective second flow paths 22 are respectively concentrated and arranged in an arbitrary region among the four side surfaces of the flow path structure 2.

[0085] Specifically, the first flow inlet 24a of each first flow path 21 is provided on one of the four side surfaces of the flow path structure 2, and is concentratedly arranged in a region on one side from the center in the direction orthogonal to the stacking direction on that one side surface. Further, the second flow inlet 26a of each first flow path 21 is provided on the side surface opposite to the side surface on which the first flow inlet 24a of the first flow path 21 is provided among the four side surfaces of the flow path structure 2, and is concentratedly arranged in a region on the same side as the side where the first flow inlet 24a of the first flow path 21 is concentratedly arranged from the center in the direction orthogonal to the stacking direction on that side surface. Further, the flow outlet 30a of each first flow path 21 is provided on the same side surface as the side surface on which the first flow inlet 24a of the first flow path 21 is provided, and is concentratedly arranged in a region on the opposite side to the side where the first flow inlet 24a of the first flow path 21 is concentratedly arranged on that side surface.

[0086] Further, the first flow inlet 32a of each second flow path 22 is provided on one of the remaining two side surfaces other than the side surface on which the first flow inlet 24a of the first flow path 21 is provided and the side surface on which the second flow inlet 26a of the first flow path 21 is provided among the four side surfaces of the flow path structure 2, and is concentratedly arranged in a region closer to the second flow inlet 26a of the first flow path 21 from the center in the direction orthogonal to the stacking direction on that side surface. Further, the second flow inlet 34a of each second flow path 22 is provided on the side surface opposite to the side surface on which the first flow inlet 32a of the second flow path 22 is provided among the remaining two side surfaces of the flow path structure 2, and is concentratedly arranged in a region on the same side as the side where the first flow inlet 32a of the second flow path 22 is concentratedly arranged from the center in the direction orthogonal to the stacking direction on that side surface. Further, the flow outlet 38a of each second flow path 22 is provided on the same side surface as the side surface on which the first flow inlet 32a of the second flow path 22 is provided, and is concentratedly arranged in a region on the opposite side to the side where the first flow inlet 32a of the second flow path 22 is concentratedly arranged on that side surface.

[0087] Therefore, in the flow path structure 2, the regions where the first flow path first inlets 24a are concentrated, the regions where the first flow path second inlets 26a are concentrated, the regions where the first flow path outlets 30a are concentrated, the regions where the second flow path first inlets 32a are concentrated, the regions where the second flow path second inlets 34a are concentrated, and the regions where the second flow path outlets 38a are concentrated are at separate positions so as not to overlap.

[0088] The first flow path first distribution header 4 distributes the first liquid to the first flow path first inlets 24a of all the first flow paths 21 that the flow path structure 2 has. This first flow path first distribution header 4 is attached to the side surface of the flow path structure 2 where the first flow path first inlets 24a are formed so as to collectively cover the first flow path first inlets 24a of all the first flow paths 21 that the flow path structure 2 has. Thereby, the space inside the first flow path first distribution header 4 communicates with each first flow path first inlet 24a. A schematic first liquid supply pipe for supplying the first liquid to the first flow path first distribution header 4 is connected to the first flow path first distribution header 4. The first liquid supplied to the first flow path first distribution header 4 through the first liquid supply pipe is distributed from the space inside the first flow path first distribution header 4 to each first flow path first inlet 24a and flows into each first flow path first introduction path 24 from the first flow path first inlet 24a.

[0089] The first flow path second distribution header 6 distributes the second liquid to the first flow path second inlets 26a of all the first flow paths 21 that the flow path structure 2 has. This first flow path second distribution header 6 is attached to the side surface of the flow path structure 2 where the first flow path second inlets 26a are formed so as to collectively cover the first flow path second inlets 26a of all the first flow paths 21 that the flow path structure 2 has. Thereby, the space inside the first flow path second distribution header 6 communicates with each first flow path second inlet 26a. A schematic second liquid supply pipe for supplying the second liquid to the first flow path second distribution header 6 is connected to the first flow path second distribution header 6. The second liquid supplied to the first flow path second distribution header 6 through the second liquid supply pipe is distributed from the space inside the first flow path second distribution header 6 to each first flow path second inlet 26a and flows into each first flow path second introduction path 26 from the first flow path second inlet 26a. Note that the side surface of the flow path structure 2 to which the first flow path second distribution header 6 is attached is the side surface opposite to the side surface to which the first flow path first distribution header 4 is attached.

[0090] The first flow path recovery header 8 receives and recovers the combined liquid of the first liquid and the second liquid flowing out from the first flow path outlets 30a of all the first flow paths 21 that the flow path structure 2 has. This first flow path recovery header 8 is attached to the side surface of the flow path structure 2 where the first flow path outlets 30a are formed so as to collectively cover the first flow path outlets 30a of all the first flow paths 21 that the flow path structure 2 has. Thereby, the space inside the first flow path recovery header 8 communicates with each first flow path outlet 30a, and the combined liquid flowing through the first flow path combined flow path 30 of each first flow path 21 flows out from each first flow path outlet 30a into the space inside the first flow path recovery header 8. A schematic first discharge pipe is connected to the first flow path recovery header 8, and the combined liquid that has flowed out from each first flow path outlet 30a into the space inside the first flow path recovery header 8 and is recovered is discharged through this first discharge pipe. The side surface of the flow path structure 2 to which the first flow path recovery header 8 is attached is the same side surface as the side surface to which the first flow path first distribution header 4 is attached. On that side surface, the first flow path first distribution header 4 and the first flow path recovery header 8 are arranged side by side so as not to interfere with each other.

[0091] The second flow path first distribution header 10 distributes the first liquid to the second flow path first inlets 32a of all the second flow paths 22 that the flow path structure 2 has. This second flow path first distribution header 10 is attached to the side surface of the flow path structure 2 on which the second flow path first inlets 32a are formed so as to collectively cover the second flow path first inlets 32a of all the second flow paths 22 that the flow path structure 2 has. Thereby, the space inside the second flow path first distribution header 10 communicates with each second flow path first inlet 32a. A schematic first liquid supply pipe for supplying the first liquid to the second flow path first distribution header 10 is connected to the second flow path first distribution header 10. The first liquid supplied to the second flow path first distribution header 10 through the first liquid supply pipe is distributed from the space inside the second flow path first distribution header 10 to each second flow path first inlet 32a and flows into each second flow path first introduction path 32 from the second flow path first inlet 32a. The side surface of the flow path structure 2 to which the second flow path first distribution header 10 is attached is another side surface perpendicular to the side surface to which the first flow path first distribution header 4 is attached and the side surface to which the first flow path second distribution header 6 is attached.

[0092] The second flow path second distribution header 12 distributes the second liquid to the second flow path second inlets 34a of all the second flow paths 22 that the flow path structure 2 has. This second flow path second distribution header 12 is attached to the side surface of the flow path structure 2 on which the second flow path second inlets 34a are formed so as to collectively cover the second flow path second inlets 34a of all the second flow paths 22 that the flow path structure 2 has. As a result, the space inside the second flow path second distribution header 12 communicates with each second flow path second inlet 34a. A schematic second liquid supply pipe for supplying the second liquid to the second flow path second distribution header 12 is connected to the second flow path second distribution header 12. The second liquid supplied to the second flow path second distribution header 12 through the second liquid supply pipe is distributed from the space inside the second flow path second distribution header 12 to each second flow path second inlet 34a and flows into each second flow path second introduction path 34 from the second flow path second inlet 34a. The side surface of the flow path structure 2 to which the second flow path second distribution header 12 is attached is the side surface opposite to the side surface to which the second flow path first distribution header 10 is attached.

[0093] The second flow path recovery header 14 receives and recovers the combined liquid of the first liquid and the second liquid flowing out from the second flow path outlets 38a of all the second flow paths 22 that the flow path structure 2 has. This second flow path recovery header 14 is attached to the side surface of the flow path structure 2 where the second flow path outlets 38a are formed so as to collectively cover the second flow path outlets 38a of all the second flow paths 22 that the flow path structure 2 has. Thereby, the space inside the second flow path recovery header 14 communicates with each second flow path outlet 38a, and the combined liquid flowing through the second flow path combined flow path 38 of each second flow path 22 flows out from each second flow path outlet 38a into the space inside the second flow path recovery header 14. A second discharge pipe (not shown in the figure) is connected to the second flow path recovery header 14, and the combined liquid that flows out into the space inside the second flow path recovery header 14 from each second flow path outlet 38a and is recovered is discharged through this second discharge pipe. The side surface of the flow path structure 2 to which the second flow path recovery header 14 is attached is the same side surface as the side surface to which the second flow path first distribution header 10 is attached. On that side surface, the second flow path first distribution header 10 and the second flow path recovery header 14 are arranged side by side so as not to interfere with each other.

[0094] In the present embodiment, since the plurality of second flow path first introduction paths 32 and the plurality of second flow path second introduction paths 34 arranged along the second substrate surface 18a are arranged in a region where there are no plurality of first flow path combined flow paths 30 along the second substrate surface 18a, the arrangement of the plurality of first flow path combined flow paths 30 arranged along the second substrate surface 18a is restricted by the arrangement of the plurality of first flow path merging portions 28 provided on the first substrate 16, and thus a space where the first flow path combined flow paths 30 cannot be arranged in the region along the second substrate surface 18a is effectively utilized as a space for arranging the plurality of second flow path first introduction paths 32 and the plurality of second flow path second introduction paths 34. Therefore, even when the arrangement of the plurality of first flow path combined flow paths 30 connected to those first flow path merging portions 28 is restricted by the arrangement of the plurality of first flow path merging portions 28, it is possible to reduce the wasted space where no flow paths are arranged in the flow path structure 2 and increase the flow path capacity per unit volume of the flow path structure 2.

[0095] Further, in the present embodiment, since the plurality of second-channel confluence channels 38 arranged along the first substrate surface 16a are arranged in a region along the first substrate surface 16a where the plurality of first-channel first introduction channels 24 and the plurality of first-channel second introduction channels 26 do not exist, the space where the first-channel first introduction channel 24 and the first-channel second introduction channel 26 are not arranged in the region along the first substrate surface 16a is effectively utilized as the space for arranging the plurality of second-channel confluence channels 38. Therefore, the wasted space where no channels are arranged in the channel structure 2 can be further reduced, and the channel capacity per unit volume of the channel structure 2 can be further increased.

[0096] Furthermore, in the present embodiment, in the channel structure 2, a plurality of first-channel first introduction channels 24, a plurality of first-channel second introduction channels 26, and a plurality of second-channel confluence channels 38 are arranged along the first substrate surface 16a of each first substrate 16, and a plurality of second-channel first introduction channels 32, a plurality of second-channel second introduction channels 34, and a plurality of first-channel confluence channels 30 are arranged along the second substrate surface 18a of each second substrate 18. Therefore, the channel capacity per unit volume of the channel structure 2 can be increased.

[0097] Specifically, for example, in the comparative example shown in FIGS. 8 to 10, only the first introduction channels 104 and the second introduction channels 106 of the plurality of channels 103 are arranged along the first substrate surface 101a of the first substrate 101, and only the confluence channels 110 of the plurality of channels 103 are arranged along the second substrate surface 102a of the second substrate 102. In the configuration where the plurality of confluence portions 108 connecting the corresponding ones of each first introduction channel 104, each second introduction channel 106, and each confluence channel 110 penetrate the first substrate 101 in the plate thickness direction, there are many wasted regions where the channels 103 are not provided in the first substrate 101 and the second substrate 102. Therefore, in the configuration of such a comparative example, the channel capacity per unit volume of the channel structure is reduced.

[0098] In contrast, in the present embodiment, as described above, in addition to the plurality of first flow path first introduction paths 24 and the plurality of first flow path second introduction paths 26 along the first substrate surface 16a of each first substrate 16, a plurality of second flow path confluence paths 38 are arranged, and in addition to the plurality of second flow path first introduction paths 32 and the plurality of second flow path second introduction paths 34 along the second substrate surface 18a of each second substrate 18, a plurality of first flow path confluence paths 30 are arranged. Therefore, it is possible to reduce the wasted areas in which neither the first flow path 21 nor the second flow path 22 is arranged in each of the first substrate 16 and the second substrate 18. For this reason, the capacity of the flow path per unit volume of the flow path structure 2 can be increased.

[0099] Also, in the present embodiment, the first flow path first introduction groove 24b, the first flow path second introduction groove 26b, and the second flow path confluence groove 38b are provided only on the first substrate surface 16a, and the second flow path first introduction groove 32b, the second flow path second introduction groove 34b, and the first flow path confluence groove 30b are provided only on the second substrate surface 18a. If the first flow path first introduction groove, the first flow path second introduction groove, and the second flow path confluence groove are provided on both the first substrate surface and the second substrate back surface, and the second flow path first introduction groove, the second flow path second introduction groove, and the first flow path confluence groove are provided on both the first substrate back surface and the second substrate surface, when laminating the first substrate and the second substrate to form the flow path structure, it is necessary to align the first flow path first introduction grooves provided on both surfaces, the first flow path second introduction grooves provided on both surfaces, and the second flow path confluence grooves provided on both surfaces, and it is also necessary to align the second flow path first introduction grooves provided on both surfaces, the second flow path second introduction grooves provided on both surfaces, and the first flow path confluence grooves provided on both surfaces. In contrast, in the present embodiment, since it is not necessary to perform the operation of aligning the grooves provided on both surfaces in this way, the operation for forming the flow path structure 2 can be simplified.

[0100] In addition, in the present embodiment, the flow path device 1 has the first flow path first distribution header 4, the first flow path second distribution header 6, the first flow path recovery header 8, the second flow path first distribution header 10, the second flow path second distribution header 12, and the second flow path recovery header 14 attached to the flow path structure 2 as described above. Therefore, compared with the case where a first liquid supply unit that individually supplies the first liquid to each first flow path first inlet 24a of all the first flow paths 21 provided in the flow path structure 2 and a second liquid supply unit that individually supplies the second liquid to each first flow path second inlet 26a of all the first flow paths 21 are individually connected, the first liquid can be distributed and supplied to each first flow path first inlet 24a and the second liquid can be distributed and supplied to each first flow path second inlet 26a with a simple configuration. Similarly, compared with the case where a first liquid supply unit that individually supplies the first liquid to each second flow path first inlet 32a of all the second flow paths 22 provided in the flow path structure 2 and a second liquid supply unit that individually supplies the second liquid to each second flow path second inlet 34a of all the second flow paths 22 are individually connected, the first liquid can be distributed and supplied to each second flow path first inlet 32a and the second liquid can be distributed and supplied to each second flow path second inlet 34a with a simple configuration. Further, compared with the case where a recovery unit for individually recovering the combined liquid is connected to each first flow path outlet 30a of all the first flow paths 21 provided in the flow path structure 2, the combined liquid flowing out from each first flow path outlet 30a can be recovered with a simple configuration, and compared with the case where a recovery unit for individually recovering the combined liquid is connected to each second flow path outlet 38a of all the second flow paths 22 provided in the flow path structure 2, the combined liquid flowing out from each second flow path outlet 38a can be recovered with a simple configuration.

[0101] In addition, in the present embodiment, a plurality of first channel confluence channels 30 arranged in parallel along the second substrate surface 18a of each second substrate 18 are configured such that the flow rate per unit time of the confluent liquid in these first channel confluence channels 30 is equal. At the same time, a plurality of second channel confluence channels 38 arranged in parallel along the first substrate surface 16a of each first substrate 16 are configured such that the flow rate per unit time of the confluent liquid in these second channel confluence channels 38 is equal. For this reason, it is possible to prevent a difference in the processing time due to the interaction between the first liquid and the second liquid in the plurality of first channel confluence channels 30 arranged in parallel along the second substrate surface 18a of each second substrate 18, and it is possible to prevent a difference in the processing time due to the interaction between the first liquid and the second liquid in the plurality of second channel confluence channels 38 arranged in parallel along the first substrate surface 16a of each first substrate 16.

[0102] (Modification example) The flow path device according to the present invention is not necessarily limited to the one as in the above embodiment. For the flow path device according to the present invention, for example, the following techniques can be adopted.

[0103] (1) Each first channel confluence channel of the first channel may have at least one first confluence channel bending portion which is a bent portion for changing the direction in which the confluent liquid flows in the first confluence channel, and each second channel confluence channel of the second channel may have at least one second confluence channel bending portion which is a bent portion for changing the direction in which the confluent liquid flows in the second channel confluence channel. FIGS. 11 to 13 show the arrangement of the first channel and the second channel in the flow path device according to the first modification example of the present invention to which such a technique is applied.

[0104] Except for the first flow path merging flow path 30 of each first flow path 21 and the second flow path merging flow path 38 of each second flow path 22 in the flow path device 1 according to this first modification example, the configuration is the same as that of the flow path device 1 according to the above embodiment. In this first modification example, the first flow path merging flow path 30 of each first flow path 21 has two first merging flow path bending portions 31, and the second flow path merging flow path 38 of each second flow path 22 has a second merging flow path bending portion 39.

[0105] Each first merging flow path bending portion 31 is a portion bent in the first flow path merging flow path 30 so as to change the direction in which the merged liquid of the first liquid and the second liquid flows. Also, each second merging flow path bending portion 39 is a portion bent in the second flow path merging flow path 38 so as to change the direction in which the merged liquid of the first liquid and the second liquid flows. In this first modification example, the number of the first merging flow path bending portions 31 in the plurality of first flow path merging flow paths 30 arranged along the second substrate surface 18a of each second substrate 18 is the same, and the number of the second merging flow path bending portions 39 in the plurality of second flow path merging flow paths 38 arranged along the first substrate surface 16a of each first substrate 16 is the same. The first flow path merging flow path 30 of each first flow path 21 meanders by having two first merging flow path bending portions 31, and the second flow path merging flow path 38 of each second flow path 22 meanders by having two second merging flow path bending portions 39.

[0106] In this first modification example, since each first flow path merging flow path 30 has two first merging flow path bending portions 31, the flow path length of each first flow path merging flow path 30 can be expanded compared to the case where the whole of each first flow path merging flow path 30 extends linearly. Also, since each second flow path merging flow path 38 has two second merging flow path bending portions 39, the flow path length of each second flow path merging flow path 38 can be expanded compared to the case where the whole of each second flow path merging flow path 38 extends linearly. For this reason, the flow time of the merged liquid in each first flow path merging flow path 30 and each second flow path merging flow path 38 can be ensured to be larger. As a result, the processing time due to the interaction between the first liquid and the second liquid in each first flow path merging flow path 30 and each second flow path merging flow path 38 can be ensured to be larger.

[0107] Moreover, in this first modification example, since the number of the first confluence channel bent portions 31 in each of the first channel confluence channels 30 is the same, it is possible to prevent a difference in the flow rate of the confluent liquid per unit time from occurring due to the presence of the first confluence channel bent portions 31 in each of the first channel confluence channels 30. Further, since the number of the second confluence channel bent portions 39 in each of the second channel confluence channels 38 is the same, it is possible to prevent a difference in the flow rate of the confluent liquid per unit time from occurring due to the presence of the second confluence channel bent portions 39 in each of the second channel confluence channels 38.

[0108] Note that the number of the first confluence channel bent portions 31 included in each of the first channel confluence channels 30 and the number of the second confluence channel bent portions 39 included in each of the second channel confluence channels 38 may be arbitrarily set respectively.

[0109] (2) Also, the arrangement pattern of the first channel first introduction path, the first channel second introduction path, and the second channel confluence channel arranged along the first substrate surface may be the same for each number of two or more sheets of the first substrate in the stacking direction. FIGS. 14 and 15 show the arrangement pattern of the channels in the channel device according to the second modification example of the present invention to which such a technique is applied.

[0110] In this second modification example, the first channel first introduction path 24, the first channel second introduction path 26, and the second channel confluence channel 38 are arranged along the first substrate surface 16a in the same arrangement pattern for every two sheets of the first substrates 16 in the stacking direction among the plurality of first substrates 16 included in the channel structure body.

[0111] Specifically, among the plurality of first substrates 16 in the stacking direction, the first channel first introduction path 24, the first channel second introduction path 26, and the second channel confluence channel 38 are arranged in the same arrangement pattern in the first first substrate 16 and, although illustration is omitted, in every second sheet (the third sheet, the fifth sheet, ···) of the subsequent first substrates 16.

[0112] Among the plurality of first substrates 16 in the stacking direction, for the second first substrate 16 and, although not shown, for every second first substrate 16 thereafter (the fourth, sixth, ···), the first flow path first introduction path 24, the first flow path second introduction path 26, and the second flow path confluence flow path 38 are arranged in the same arrangement pattern. This arrangement pattern is different from the arrangement pattern of the first flow path first introduction path 24, the first flow path second introduction path 26, and the second flow path confluence flow path 38 in the first substrate 16 for every other one starting from the first one. Specifically, in this arrangement pattern, the second flow path confluence flow path 38 extends from the second flow path confluence portion 36 at a steeper angle compared to the second flow path confluence flow path 38 in the arrangement pattern in the first substrate 16 for every other one starting from the first one, and reaches the side where the first flow path first inlet 24a of the first substrate 16 is provided, and the second flow path outlet 38a is provided on that side.

[0113] In this second modification, since the same arrangement pattern of the first flow path first introduction path 24, the first flow path second introduction path 26, and the second flow path confluence flow path 38 can be applied for every specific number of the first substrates 16, the productivity when producing the flow path structure 2 can be improved compared to the case where the arrangement patterns of the first flow path first introduction path 24, the first flow path second introduction path 26, and the second flow path confluence flow path 38 are different for each first substrate 16.

[0114] In this second modification, the second flow path outlets 38a of the plurality of second flow path confluence flow paths 38 arranged in the second first substrate 16 and every second first substrate 16 thereafter among the plurality of first substrates 16 in the stacking direction are concentrated in a region overlapping with the region where the first flow path outlets 30a of the plurality of first flow paths 21 are concentrated when viewed from the direction along the stacking direction. For this reason, in addition to the first flow path outlets 30a of the plurality of first flow paths 21, the second flow path outlets 38a of the plurality of second flow path confluence flow paths 38 arranged in the second first substrate 16 and every second first substrate 16 thereafter are also collectively covered by the first flow path recovery header 8, and the confluent liquid flowing out from those second flow path outlets 38a may be recovered by the first flow path recovery header 8 together with the confluent liquid flowing out from each first flow path outlet 30a.

[0115] Also, applying a concept similar to the arrangement pattern of the first flow path first introduction path, the first flow path second introduction path, and the second flow path confluence flow path arranged along the surface of the first substrate, the arrangement pattern of the second flow path first introduction path, the second flow path second introduction path, and the first flow path confluence flow path arranged along the surface of the second substrate may be the same for each of two or more sheets of the second substrate in the stacking direction. In that case, a plurality of different arrangement patterns may be adopted as the arrangement pattern of the second flow path first introduction path, the second flow path second introduction path, and the first flow path confluence flow path.

[0116] (3) Further, the second flow path confluence flow path of the second flow path does not necessarily have to be arranged on the first substrate surface of the first substrate that is in close contact with the surface of the second substrate on which the second flow path first introduction path and the second flow path second introduction path of the second flow path are arranged, and may be arranged along the first substrate surface of the first substrate that is in close contact with the back surface of the second substrate on the opposite side of the surface of the second substrate on which the second flow path confluence flow path is arranged.

[0117] (4) The first flow path first introduction groove constituting the first flow path first introduction path may be formed on the back surface of the second substrate, or may be formed on both the first substrate surface and the back surface of the second substrate. When the first flow path first introduction groove is formed on both the first substrate surface and the back surface of the second substrate, the first flow path first introduction grooves formed on both the first substrate surface and the back surface of the second substrate are joined together by the close contact of the first substrate surface and the back surface of the second substrate, and the first flow path first introduction path is constituted by the joined first flow path first introduction groove.

[0118] (5) Also, the first flow path second introduction groove constituting the first flow path second introduction path may be formed on the back surface of the second substrate, or may be formed on both the first substrate surface and the back surface of the second substrate. When the first flow path second introduction groove is formed on both the first substrate surface and the back surface of the second substrate, the first flow path second introduction grooves formed on both the first substrate surface and the back surface of the second substrate are joined together by the close contact of the first substrate surface and the back surface of the second substrate, and the first flow path second introduction path is constituted by the joined first flow path second introduction groove.

[0119] (6) Further, the first flow path merging groove that constitutes the first flow path merging flow path may be formed on the back surface of the first substrate, or may be formed on both the back surface of the first substrate and the front surface of the second substrate. When the first flow path merging grooves are formed on both the back surface of the first substrate and the front surface of the second substrate, the first flow path merging grooves formed on both the back surface of the first substrate and the front surface of the second substrate are joined together by the back surface of the first substrate and the front surface of the second substrate being in close contact with each other, and the first flow path merging flow path is constituted by the joined first flow path merging grooves.

[0120] (7) Further, the second flow path first introduction groove that constitutes the second flow path first introduction path may be formed on the back surface of the first substrate, or may be formed on both the back surface of the first substrate and the front surface of the second substrate. When the second flow path first introduction grooves are formed on both the back surface of the first substrate and the front surface of the second substrate, the second flow path first introduction grooves formed on both the back surface of the first substrate and the front surface of the second substrate are joined together by the back surface of the first substrate and the front surface of the second substrate being in close contact with each other, and the second flow path first introduction path is constituted by the joined second flow path first introduction grooves.

[0121] (8) Further, the second flow path second introduction groove that constitutes the second flow path second introduction path may be formed on the back surface of the first substrate, or may be formed on both the back surface of the first substrate and the front surface of the second substrate. When the second flow path second introduction grooves are formed on both the back surface of the first substrate and the front surface of the second substrate, the second flow path second introduction grooves formed on both the back surface of the first substrate and the front surface of the second substrate are joined together by the back surface of the first substrate and the front surface of the second substrate being in close contact with each other, and the second flow path second introduction path is constituted by the joined second flow path second introduction grooves.

[0122] (9) Further, in the present invention, the regions where a plurality of first flow path first inlets are concentrated and arranged for each first substrate may be shifted from each other when viewed from the direction along the stacking direction. Also, the regions where a plurality of first flow path second inlets are concentrated and arranged for each first substrate may be shifted from each other when viewed from the direction along the stacking direction. Also, the regions where a plurality of second flow path outlets are concentrated and arranged for each first substrate may be shifted from each other when viewed from the direction along the stacking direction.

[0123] (10) Further, in the present invention, the regions where a plurality of second flow path first inlets are concentrated and arranged for each second substrate may be displaced from each other when viewed in the direction along the stacking direction. Also, the regions where a plurality of second flow path second inlets are concentrated and arranged for each second substrate may be displaced from each other when viewed in the direction along the stacking direction. Also, the regions where a plurality of first flow path outlets are concentrated and arranged for each second substrate may be displaced from each other when viewed in the direction along the stacking direction.

[0124] (11) Further, in the present invention, each first substrate may be composed of two substrates divided in the plate thickness direction and stacked and integrated. In this case, on one of the two substrates that constitutes the first substrate surface, a plurality of first flow path first introduction slits for forming a plurality of first flow path first introduction grooves, a plurality of first flow path second introduction slits for forming a plurality of first flow path second introduction grooves, and a plurality of second flow path confluence slits for forming a plurality of second flow path confluence grooves are provided so as to penetrate the one substrate in the plate thickness direction. At each position corresponding to the installation positions of the plurality of first flow path confluence portions among the other substrate that constitutes the back surface of the first substrate, a plurality of through holes for forming a plurality of first flow path confluence portion through holes are provided so as to penetrate the other substrate in the plate thickness direction. Also, at each position corresponding to the installation positions of the plurality of second flow path confluence portions among the other substrate, a plurality of through holes for forming a plurality of second flow path confluence portion through holes may be provided so as to penetrate the other substrate in the plate thickness direction.

[0125] In this configuration, openings on the back side of a plurality of first-channel first-introduction slits provided on the one substrate are sealed by the other substrate, thereby forming a plurality of first-channel first-introduction grooves. Also, openings on the back side of a plurality of first-channel second-introduction slits provided on the one substrate are sealed by the other substrate, thereby forming a plurality of first-channel second-introduction grooves. Further, openings on the back side of a plurality of second-channel confluence slits provided on the one substrate are sealed by the other substrate, thereby forming a plurality of second-channel confluence grooves. Also, each of a plurality of through-holes for forming a plurality of first-channel confluence-section through-holes provided on the other substrate is connected to the ends of corresponding ones of the plurality of first-channel first-introduction slits and the ends of corresponding ones of the plurality of first-channel second-introduction slits provided on the one substrate, thereby forming a plurality of first-channel confluence-section through-holes. Further, each of a plurality of through-holes for forming a plurality of second-channel confluence-section through-holes provided on the other substrate is connected to the ends of corresponding ones of the plurality of second-channel confluence slits provided on the one substrate, thereby forming a plurality of first-channel confluence-section through-holes.

[0126] (12) Also, in the present invention, each second substrate may be formed by laminating and integrating two substrates divided in the thickness direction thereof. In this case, on one of the two substrates that constitutes the second-substrate surface, a plurality of second-channel first-introduction slits for forming a plurality of second-channel first-introduction grooves, a plurality of second-channel second-introduction slits for forming a plurality of second-channel second-introduction grooves, and a plurality of first-channel confluence slits for forming a plurality of first-channel confluence grooves may be provided so as to penetrate the one substrate in the thickness direction.

[0127] In this configuration, openings on the back side of a plurality of second-channel first-introduction slits provided in the one substrate are sealed by the other substrate that constitutes the back surface of the second substrate among the two substrates, thereby forming a plurality of second-channel first-introduction grooves. Openings on the back side of a plurality of second-channel second-introduction slits provided in the one substrate are sealed by the other substrate, thereby forming a plurality of second-channel second-introduction grooves. Also, openings on the back side of a plurality of first-channel confluence slits provided in the one substrate are sealed by the other substrate, thereby forming a plurality of first-channel confluence grooves.

Explanation of Reference Numerals

[0128] 1 Channel device 2 Channel structure 4 First-channel first-distribution header 6 First-channel second-distribution header 8 First-channel recovery header 10 Second-channel first-distribution header 12 Second-channel second-distribution header 14 Second-channel recovery header 16 First substrate 16a First-substrate surface 16b First-substrate back surface 18 Second substrate 18a Second-substrate surface 18b Second-substrate back surface 21 First channel 22 Second channel 24 First-channel first-introduction path 24a First-channel first-inlet 24b First-channel first-introduction groove 26 First-channel second-introduction path 26a First-channel second-inlet 26b First-channel second-introduction groove 28 First-channel confluence section 28b First-channel confluence-section through-hole 30 First-channel confluence channel 30a First-channel outlet 30b First-channel confluence groove 31 First-confluence-channel bending point 32 Second Flow Path First Introduction Path 32a Second Flow Path First Inlet 32b Second Flow Path First Introduction Groove 34 Second Flow Path Second Introduction Path 34a Second Flow Path Second Inlet 34b Second Flow Path Second Introduction Groove 36 Second Flow Path Confluence 36b Second Flow Path Confluence Through-Hole 38 Second Flow Path Confluent Flow Path 38a Second Flow Path Outlet 38b Second Flow Path Confluence Groove 39 Second Confluent Flow Path Bend Location

Claims

1. A flow path device comprising a plurality of first flow paths and a plurality of second flow paths for respectively merging and flowing a first liquid and a second liquid, comprising a flow path structure in which the plurality of first flow paths and the plurality of second flow paths are provided inside, the plurality of first flow paths include a first flow path first introduction path into which the first liquid is introduced, a first flow path second introduction path into which the second liquid is introduced, and a downstream end of the first flow path first introduction path and a downstream end of the first flow path second introduction path, and a first flow path merging portion that merges the first liquid flowing through the first flow path first introduction path and the second liquid flowing through the first flow path second introduction path, and a first flow path merging flow path that is connected to the downstream side of the first flow path merging portion and through which the merged liquid of the first liquid and the second liquid merged at the first flow path merging portion flows, respectively, the plurality of second flow paths include a second flow path first introduction path into which the first liquid is introduced, a second flow path second introduction path into which the second liquid is introduced, and a downstream end of the second flow path first introduction path and a downstream end of the second flow path second introduction path, and a second flow path merging portion that merges the first liquid flowing through the second flow path first introduction path and the second liquid flowing through the second flow path second introduction path, and a second flow path merging flow path that is connected to the downstream side of the second flow path merging portion and through which the merged liquid of the first liquid and the second liquid merged at the second flow path merging portion flows, respectively, the flow path structure has a plurality of first substrates and a plurality of second substrates that are alternately laminated along their plate thickness directions, each of the plurality of first substrates has a first substrate surface that is one surface in its plate thickness direction and a first substrate back surface that is the surface opposite to the first substrate surface, each of the plurality of second substrates has a second substrate surface that is one surface in its plate thickness direction and is in close contact with the first substrate back surface of the first substrate laminated on the second substrate, and a second substrate back surface that is the surface opposite to the second substrate surface and is in close contact with the first substrate surface of the first substrate on which the second substrate is laminated, the first flow path first introduction path of the plurality of first flow paths includes a plurality of first flow path first introduction paths arranged along the first substrate surfaces of the plurality of first substrates, the first flow path second introduction path of the plurality of first flow paths includes a plurality of first flow path second introduction paths arranged along the first substrate surfaces of the plurality of first substrates, The first flow path merging flow path of the plurality of first flow paths includes a plurality of first flow path merging flow paths arranged along the surface of each of the plurality of second substrates. The first flow path merging portion of the plurality of first flow paths consists of a plurality of first flow path merging portion through holes that penetrate each of the plurality of first substrates in their plate thickness directions. The first introduction path of the second flow path and the second introduction path of the second flow path of the plurality of second flow paths are arranged along the surface of each of the plurality of second substrates, and are arranged in a region where there are no such plurality of first flow path merging flow paths when viewed from a direction along the stacking direction of the first substrate and the second substrate. The second flow path merging portion of the plurality of second flow paths consists of a plurality of second flow path merging portion through holes that penetrate each of the plurality of first substrates in their plate thickness directions. The second flow path merging flow path of the plurality of second flow paths includes a plurality of second flow path merging flow paths arranged along the surface of each of the plurality of first substrates. The plurality of second flow path merging flow paths arranged along the surface of the first substrate are arranged in a region where there are no such plurality of first flow path first introduction flow paths and the plurality of first flow path second introduction flow paths when viewed from a direction along the stacking direction, the flow path device.

2. The plurality of first flow path first introduction paths arranged along the surface of each of the plurality of first substrates consist of a plurality of first flow path first introduction grooves formed on at least one of the surface of the first substrate and the back surface of the second substrate in close contact with the surface of the first substrate. The plurality of first flow path second introduction paths arranged along the surface of each of the plurality of first substrates consist of a plurality of first flow path second introduction grooves formed on at least one of the surface of the first substrate and the back surface of the second substrate in close contact with the surface of the first substrate. The plurality of first flow path merging flow paths arranged along the surface of each of the plurality of second substrates consist of a plurality of first flow path merging grooves formed on at least one of the surface of the second substrate and the back surface of the first substrate in close contact with the surface of the second substrate. The plurality of second flow path first introduction paths arranged along the surface of each of the plurality of second substrates consist of a plurality of second flow path first introduction grooves formed on at least one of the surface of the second substrate and the back surface of the first substrate in close contact with the surface of the second substrate. The plurality of second flow path second introduction paths arranged along each of the second substrate surfaces of the plurality of second substrates are composed of a plurality of second flow path second introduction grooves formed on at least one of the second substrate surface and the back surface of the first substrate in close contact with the second substrate surface. The plurality of second flow path confluence paths arranged along each of the first substrate surfaces of the plurality of first substrates are composed of a plurality of second flow path confluence grooves formed on at least one of the first substrate surface and the back surface of the second substrate in close contact with the first substrate surface. The flow path device according to claim 1.

3. The first flow path first introduction groove constituting the first flow path first introduction path is provided only on either one of the first substrate surface and the back surface of the second substrate in close contact with the first substrate surface. The first flow path second introduction groove constituting the first flow path second introduction path is provided only on either one of the first substrate surface and the back surface of the second substrate in close contact with the first substrate surface. The first flow path confluence groove constituting the first flow path confluence path is provided only on either one of the second substrate surface and the back surface of the first substrate in close contact with the second substrate surface. The second flow path first introduction groove constituting the second flow path first introduction path is provided only on either one of the second substrate surface and the back surface of the first substrate in close contact with the second substrate surface. The second flow path second introduction groove constituting the second flow path second introduction path is provided only on either one of the second substrate surface and the back surface of the first substrate in close contact with the second substrate surface. The second flow path confluence groove constituting the second flow path confluence path is provided only on either one of the first substrate surface and the back surface of the second substrate in close contact with the first substrate surface. The flow path device according to claim 2.

4. For each specific number of the first substrates in the stacking direction of the first substrate and the second substrate, the first flow path first introduction path, the first flow path second introduction path, and the second flow path confluence path are arranged along the first substrate surface in the same arrangement pattern. The flow path device according to any one of claims 1 to 3.

5. The arrangement patterns of the first flow path first introduction path, the first flow path second introduction path, and the second flow path confluence path arranged along each of the first substrate surfaces of the plurality of first substrates are the same. The flow path device according to claim 4.

6. For each specific number of the second substrates in the stacking direction, the second flow path first introduction path, the second flow path second introduction path, and the first flow path confluence flow path are arranged along the surface of the second substrate in the same arrangement pattern. The flow path device according to any one of claims 1 to 5.

7. The arrangement patterns of the second flow path first introduction path, the second flow path second introduction path, and the first flow path confluence flow path arranged along the surface of each of the plurality of second substrates are the same. The flow path device according to claim 6.

8. The first flow path first introduction path has a first flow path first inlet which is a location for receiving the first liquid. The first flow path second introduction path has a first flow path second inlet which is a location for receiving the second liquid. and has The second flow path first introduction path has a second flow path first inlet which is a location for receiving the first liquid. The second flow path second introduction path has a second flow path second inlet which is a location for receiving the second liquid. The first flow path first inlets of the plurality of first flow paths are concentrated and arranged in a specific region on any side surface of the flow path structure. The first flow path second inlets of the plurality of first flow paths are concentrated and arranged in a specific region on any side surface of the flow path structure. The second flow path first inlets of the plurality of second flow paths are concentrated and arranged in a specific region on any side surface of the flow path structure. The second flow path second inlets of the plurality of second flow paths are concentrated and arranged in a specific region on any side surface of the flow path structure. The flow path device according to any one of claims 1 to 7.

9. A first flow path first distribution header attached to the flow path structure so as to collectively cover the first flow path first inlets of the plurality of first flow paths and distributing the first liquid to those first flow path first inlets. A first flow path second distribution header attached to the flow path structure so as to collectively cover the first flow path second inlets of the plurality of first flow paths and distributing the second liquid to those first flow path second inlets. A second flow path first distribution header attached to the flow path structure so as to collectively cover the second flow path first inlets of the plurality of second flow paths and distributing the first liquid to those second flow path first inlets. A second flow path second distribution header that is attached to the flow path structure so as to collectively cover the second flow path second inlets of the plurality of second flow paths and distributes the second liquid to those second flow path second inlets, and the flow path device according to claim 8, further comprising.

10. The first flow path confluence flow path has a first flow path outlet which is a location where the confluent liquid flowing through the first flow path confluence flow path flows out. The second flow path confluence flow path has a second flow path outlet which is a location where the confluent liquid flowing through the second flow path confluence flow path flows out. The first flow path outlets of the plurality of first flow paths are concentrated and arranged in a specific area on an arbitrary side surface of the flow path structure. The second flow path outlets of the plurality of second flow paths are concentrated and arranged in a specific area on an arbitrary side surface of the flow path structure. The flow path device according to any one of claims 1 to 9.

11. A first flow path recovery header that is attached to the flow path structure so as to collectively cover the first flow path outlets of the plurality of first flow paths and receives and recovers the confluent liquid flowing out from those first flow path outlets. A second flow path recovery header that is attached to the flow path structure so as to collectively cover the second flow path outlets of the plurality of second flow paths and receives and recovers the confluent liquid flowing out from those second flow path outlets. The flow path device according to claim 10, further comprising.

12. Each of the first flow path confluence flow paths of the plurality of first flow paths is configured such that the flow rate per unit time of the confluent liquid in those first flow path confluence flow paths is equal. Each of the second flow path confluence flow paths of the plurality of second flow paths is configured such that the flow rate per unit time of the confluent liquid in those second flow path confluence flow paths is equal. The flow path device according to any one of claims 1 to 11.

13. Each of the first flow path confluence flow paths of the plurality of first flow paths has a first confluence flow path cross section which is a cross section in a direction orthogonal to the flow direction of the confluent liquid in that first flow path confluence flow path, and the areas of the first confluence flow path cross sections of those first flow path confluence flow paths are the same. Each of the second flow path confluence flow paths of the plurality of second flow paths has a second confluence flow path cross section which is a cross section in a direction orthogonal to the flow direction of the confluent liquid in that second flow path confluence flow path, and the areas of the second confluence flow path cross sections of those second flow path confluence flow paths are the same. The flow path device according to claim 12.

14. The shape of the cross-section of each of the first confluence channels of the plurality of first channels is the same. The shape of the cross-section of each of the second confluence channels of the plurality of second channels is the same. The flow path device according to claim 13.

15. The flow path lengths of the first confluence channels of the plurality of first channels are the same. The flow path lengths of the second confluence channels of the plurality of second channels are the same. The flow path device according to any one of claims 12 to 14.

16. Each of the first confluence channels of the plurality of first channels has at least one first confluence channel bending point, which is a bent portion for changing the direction in which the confluent liquid flows in the first confluence channel, and the number of the first confluence channel bending points in those first confluence channels is the same. Each of the second confluence channels of the plurality of second channels has at least one second confluence channel bending point, which is a bent portion for changing the direction in which the confluent liquid flows in the second confluence channel, and the number of the second confluence channel bending points in those second confluence channels is the same. The flow path device according to any one of claims 12 to 15.

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