Submerged laser processing equipment

Abstract

To improve processing performance by preventing liquid from infiltrating into a processed part to which laser is emitted, from the surroundings.SOLUTION: An in-liquid laser processing device processes an object to be processed by emitting laser to the object while supplying assist gas in liquid. The device comprises a nozzle and an attachment member. The nozzle has a main body part and a tip part. The attachment member is mounted on the tip part of the nozzle and is configured to surround a space between the tip part and the object to be processed, which can move or deform along an axial direction with respect to the nozzle.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a submerged laser processing device. [Background technology]

[0002] For example, in the demolition of nuclear reactor internals, where the workpiece is submerged (submerged in liquid), a laser is irradiated onto the workpiece underwater to perform processing (such as cutting). In the submerged laser processing equipment used for such processing, an assist gas is supplied to the processing location from the nozzle through which the laser is irradiated, in order to suppress laser attenuation due to passing through water, and a cavity where no liquid is present is formed on the front or back surface of the processing location, thereby improving processing performance. For example, Patent Document 1 discloses a laser processing head (nozzle) for performing laser surface modification processing on the workpiece, which is a nuclear reactor internal, in which the head shape is configured to maintain a constant distance between the focusing lens for irradiating the laser and the workpiece. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2004-42113 Summary of the Invention [Problem to be solved by the invention]

[0004] In the above Patent Document 1, processing is performed while the nozzle that irradiates the laser is brought into contact with the surface of the workpiece, but if the surface of the workpiece is uneven, a gap will form between the nozzle and the surface of the workpiece, and surrounding water (liquid) will enter through this gap, making it difficult to form a stable cavity.

[0005] At least one aspect of the present disclosure has been made in consideration of the above-mentioned circumstances, and aims to provide a submerged laser processing device that can achieve excellent processing performance by preventing liquid from entering from the surrounding area into the processing area where the laser is irradiated. [Means for solving the problem]

[0006] In order to solve the above problems, the in-liquid laser processing apparatus according to at least one aspect of the present disclosure includes: A submerged laser processing apparatus for processing an object by irradiating a laser while supplying an assist gas in liquid, comprising: a nozzle having a main body extending along an axial direction and a tip end through which the assist gas can be supplied and the laser can be irradiated; an attachment member attached to the tip portion and configured to surround a space between the tip portion and the workpiece when the nozzle is disposed opposite the workpiece; Equipped with The attachment member is movable or deformable along the axial direction relative to the nozzle. [Effects of the Invention]

[0007] According to at least one aspect of the present disclosure, it is possible to provide a submerged laser processing device that can achieve excellent processing performance by preventing liquid from entering from the surroundings into the processing location where the laser is irradiated. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is an overall configuration diagram of an in-liquid laser processing device according to an embodiment; [Figure 2] FIG. 2 is an enlarged cross-sectional view of the vicinity of the tip portion of FIG. [Figure 3] 3 is a diagram showing the attachment member of FIG. 2 divided into a plurality of members. FIG. [Figure 4] FIG. 3 is a cross-sectional view schematically showing a first modified example of FIG. 2. [Figure 5] FIG. 3 is a cross-sectional view schematically showing a second modified example of FIG. 2. [Figure 6] FIG. 3 is a cross-sectional view schematically showing a third modified example of FIG. 2. [Figure 7] FIG. 7 is a perspective view showing the attachment member extracted from FIG. 6. [Figure 8] FIG. 3 is a cross-sectional view schematically showing a fourth modified example of FIG. 2. [Figure 9] FIG. 10 is a cross-sectional view schematically showing a fifth modified example of FIG. 2. [Figure 10] FIG. 10 is a perspective view showing the attachment member of FIG. 9 together with a nozzle. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, several embodiments will be described with reference to the accompanying drawings. However, the dimensions, materials, shapes, relative arrangements, etc. of components described as embodiments or shown in the drawings are merely illustrative examples and are not intended to limit the scope of the invention.

[0010] The configuration of a submerged laser processing device 1 according to one embodiment will be described with reference to Figures 1 and 2. Figure 1 is an overall configuration diagram of the submerged laser processing device 1 according to one embodiment, and Figure 2 is an enlarged cross-sectional view showing the vicinity of the tip 4b in Figure 1.

[0011] The submerged laser processing apparatus 1 is an apparatus for processing a workpiece 2 submerged in liquid by irradiating the workpiece 2 with a laser L while supplying an assist gas G to the workpiece 2. In this embodiment, a nuclear reactor internal structure submerged in water is used as the workpiece 2 of the submerged laser processing apparatus 1. The nuclear reactor internal structure is composed of a metal material and is submerged to a depth of approximately 5 to 10 m. The shape of the nuclear reactor internal structure may be arbitrary, and in this embodiment, a plate-shaped test piece is used as an example. In this embodiment, water is used as an example of the liquid in which the workpiece is immersed, but the type of liquid is not limited.

[0012] The submerged laser processing device 1 is equipped with a nozzle 4 for supplying an assist gas G to the workpiece 2 and irradiating the workpiece 2 with a laser beam L. The nozzle 4 is equipped with a main body 4a and a tip 4b (head) that is positioned so as to face the workpiece 2 during processing. A laser oscillator 8 is connected to the nozzle 4 via a transmission fiber 6, and the laser beam L generated by the laser oscillator 8 is transmitted via the transmission fiber 6, focused by a focusing lens (not shown), and then emitted from the tip 4b of the nozzle 4 in the axial direction C, whereby it is irradiated onto the workpiece 2.

[0013] The submerged laser processing apparatus 1 also has an assist gas supply system 10 for supplying assist gas G. The assist gas G is, for example, compressed air. The assist gas supply system 10 includes a compressor 12, a filter 14, an air distribution panel 16, and a supply pipe 18. The compressor 12 generates compressed air by compressing outside air. The compressed air generated by the compressor 12 passes through the filter 14, where foreign matter such as dust is removed. The compressed air that has passed through the filter 14 is supplied as assist gas G from the air distribution panel 16 via the supply pipe 18 to the tip 4b of the nozzle 4.

[0014] The submerged laser processing device 1 having such a configuration processes the workpiece 2 by irradiating it with a laser L while supplying an assist gas G from the nozzle 4 to the workpiece 2, thereby imparting energy to the workpiece 2 with the laser L to melt it. The nozzle 4 moves relative to the workpiece 2 while supplying the assist gas G and irradiating it with the laser L, thereby processing the workpiece 2 according to a predetermined pattern. In the following description, cutting work will be described as an example of processing.

[0015] An attachment member 20 is attached to the tip 4b of the nozzle 4. As mentioned above, the workpiece 2, such as a furnace internal structure, is located at a depth of several meters, and a large amount of bubbles is generated by the assist gas supplied into the liquid, making it difficult to visually check and maintain a constant distance between the tip 4b of the nozzle 4 and the surface of the workpiece 2 during operation; however, by attaching such an attachment member 20 to the tip 4b, these problems can be suitably solved.

[0016] The attachment member 20 is configured so that when the tip 4b of the nozzle 4 is placed opposite the workpiece 2, it surrounds a space S (i.e., a cavity formed by supplying an assist gas G) between the tip 4b and the workpiece 2. Specifically, as shown in FIG. 2, during processing, the nozzle 4 is operated so that the attachment member 20 comes into contact with the surface of the workpiece 2, and the space S is formed by the attachment member 20, the tip 4b of the nozzle 4, and the surface of the workpiece 2. As described above, the assist gas G is supplied from the tip 4b, and the space S is filled with the assist gas G.

[0017] The attachment member 20 comes into contact with the surface of the workpiece 2, thereby preventing water from entering the space S from the surroundings. Preferably, no gap is formed between the attachment member 20 and the surface of the workpiece 2, but even if a gap is formed to some extent, compressed air is supplied from the tip 4b of the nozzle 4 as assist gas G, and the pressure in the space S effectively prevents water from entering from the surroundings. The laser L emitted from the tip 4b passes through the space S filled with assist gas G in this way and reaches the surface of the workpiece 2, so that the laser does not pass through water and does not attenuate. 2 shows a cutting groove 25 formed in the workpiece 2 by irradiation with the laser L. Also shown is a state in which a portion of the assist gas G filled in the space S passes through the cutting groove 25 and blows through to the back side of the workpiece 2.

[0018] Furthermore, the nozzle 4 is operated so that the axial direction C is inclined relative to the surface of the workpiece 2. This is to prevent the laser L emitted from the tip 4b along the axial direction C from reflecting off the surface of the workpiece 2 and the tip 4b from directly receiving the reflected light. Correspondingly, the end face of the attachment member 20 facing the workpiece 2 is formed so as to be inclined relative to the axial direction C. This reduces the occurrence of a gap between the attachment member 20 and the surface of the workpiece 2 when the nozzle 4 is operated at an angle for the above-mentioned reason, and effectively prevents water from entering the space from the surroundings.

[0019] The attachment member 20 shown in FIG. 2 has a sidewall 22 that surrounds a space S in the circumferential direction. The sidewall 22 has at least one opening 24 that connects the space S to the outside. In this embodiment, a plurality of openings 24 are provided in the sidewall 22 in the circumferential direction near the end face. If the pressure in the space S becomes excessive, the pressure in the space S may cause the end face of the attachment member 20 to rise above the surface of the workpiece 2, which may allow water to enter the space S from the surrounding area. In contrast, in this embodiment, by providing the openings 24 in the sidewall 22 in this manner, a portion of the assist gas G supplied to the space S can escape to the outside through the openings 24, thereby maintaining an appropriate pressure in the space S.

[0020] Furthermore, in cutting using the laser L, dross generated when the workpiece 2 is melted by irradiating the laser L must be properly discharged into the external liquid through the kerf 25 (if the dross is not properly discharged, a good cutting speed cannot be achieved even if a gas phase of the assist gas G is stably formed in the space S). In this embodiment, by supplying the assist gas G to the space S, the fluid force (pressure) in the space S can be appropriately applied. In particular, by appropriately designing the pressure loss resistance due to the opening 24 provided in the side wall 22, the amount of assist gas G escaping from the space S can be optimized, a sufficient flow rate penetrating to the back surface can be ensured, and the fluid force (pressure) in the space S can be appropriately maintained. In this way, the assist gas G prevents liquid from entering the space S from the surroundings and stably forms a gas phase, thereby forming a stable space S. As a result, the assist gas passes through the kerf 25 with high momentum (high speed) and acts to blow away the dross with its momentum, allowing the dross to be properly discharged from the kerf 25.

[0021] The number, size, arrangement and shape of the openings 24 provided in the side wall 22 can be appropriately changed in design depending on the pressure of the assist gas G supplied to the space S, for example.

[0022] The attachment member 20 is also configured to be movable along the axial direction C relative to the nozzle 4 (see arrow a in FIG. 2). Therefore, even if the surface of the workpiece 2 is uneven or the operation of the nozzle 4 is shifted up or down, the attachment member 20 is allowed to move along the axial direction C, which prevents the attachment member 20 from moving away from the surface of the workpiece 2, creating a gap and preventing water from entering the space from the surroundings (or assist gas G from leaking from the space).

[0023] The tip portion 4b of the nozzle 4 is configured so that one end has a larger outer diameter than the other end. Specifically, the tip portion 4b is configured to include a small diameter portion 4b1 located on the main body portion 4a side and a large diameter portion 4b2 that is larger in radial size than the small diameter portion 4b1. A step portion 4b3 is formed between the small diameter portion 4b1 and the large diameter portion 4b2 to correspond to the difference in radial size between the small diameter portion 4b1 and the large diameter portion 4b2.

[0024] The attachment member 20 is attached to the tip portion 4b having such a structure so as to be movable along the axial direction C. The attachment member 20 is formed so that the inner diameter of the small diameter portion 4b1 side (other end side) of the tip portion 4b is smaller than the outer diameter of the large diameter portion 4b2 side (one end side). This restricts the movement range of the attachment member 20 so that it can move along the axial direction C until it abuts against the step portion 4b3. This effectively prevents the attachment member 20 from falling off the tip portion 4b of the nozzle 4 while allowing it to move along the axial direction C.

[0025] Furthermore, the attachment member 20 may be formed from a material (such as metal or ceramics) that has low sliding resistance relative to the tip portion 4b and excellent heat resistance, so that it can move smoothly along the axial direction C relative to the tip portion 4b. The attachment member 20 may also be made of a material with a relatively high specific gravity. For example, the attachment member 20 is made of a material with a higher specific gravity than the liquid in which the workpiece 2 is immersed. In this case, when the space S is filled with the assist gas G, the attachment member 20 is prevented from floating up from the surface of the workpiece 2, and good contact between the attachment member 20 and the surface of the workpiece 2 can be ensured.

[0026] Furthermore, the end portion on the end face side of the attachment member 20 may be formed into a curved surface in a cross section along the axial direction C. As a result, even if the surface of the workpiece 2 that the attachment member 20 comes into contact with has unevenness when moving in the cutting direction over the surface of the workpiece 2, the curved end portion of the attachment member 20 prevents the end portion from getting caught on the unevenness, allowing the attachment member 20 to move smoothly along the axial direction C and absorb the effect of the unevenness.

[0027] The attachment member 20 having such a configuration may be configured by combining multiple members 20a, 20b that can be separated along the axial direction C, as shown in Fig. 3. In Fig. 3, the multiple members 20a, 20b each have a semi-cylindrical shape, and are combined with each other by fastening members (not shown) such as bolts to achieve the configuration shown in Fig. 2 (fastening holes 26 into which the fastening members are inserted are shown in Fig. 3). By configuring the attachment member 20 as a combination of the multiple members 20a, 20b in this way, it is possible to easily attach and detach the attachment member 20 to and from the nozzle 4.

[0028] Fig. 4 is a cross-sectional view schematically showing a first modified example of Fig. 2. In Fig. 4, in order to clearly show the configuration of the attachment member 20, the end face of the attachment member 20 on the side of the workpiece 2 is made substantially perpendicular to the axial direction C, but it may be made to be inclined with respect to the axial direction C, as in Fig. 2.

[0029] In the first modified example, the attachment member 20 is supported by the nozzle 4 via a biasing member 30 provided along the axial direction C. As described above, the tip end 4b of the nozzle 4 has a stepped portion 4b3 formed by the small diameter portion 4b1 and the large diameter portion 4b2, and the biasing member 30 is provided between the stepped portion 4b3 and the attachment member 20.

[0030] As a result, when the surface of the workpiece 2 is uneven, the attachment member 20 is allowed to move along the axial direction C against the biasing force of the biasing member 30, thereby flexibly absorbing the effects of the unevenness. Furthermore, because the biasing force of the biasing member 30 presses the attachment member 20 against the surface of the workpiece 2, good contact between the two is maintained, and water can be prevented from entering the space from the surroundings.

[0031] 4 illustrates a spring mechanism as an example of the biasing member 30, but is not limited to this. Also, in FIG. 4, the flow of the assist gas G supplied from the nozzle 4 to the space S is indicated by arrow b, and the assist gas G is shown being introduced into the space S along the axial direction C inside the main body 4a of the nozzle 4 and escaping to the outside through an opening 24 provided in the side wall 22 of the attachment member 20.

[0032] Fig. 5 is a cross-sectional view schematically showing a second modified example of Fig. 2. In Fig. 5, in order to clearly show the configuration of the attachment member 20, the end face of the attachment member 20 on the side of the workpiece 2 is made substantially perpendicular to the axial direction C, but it may be made to be inclined with respect to the axial direction C, as in Fig. 2.

[0033] In the second modified example, at least a portion of the side wall 22 of the attachment member 20 is configured as a mesh member 40 having a predetermined opening ratio. The mesh member 40 may be a net-like member or a porous body with openings formed in a predetermined pattern, and like the attachment member 20 having the openings 24 as shown in Fig. 2, it is possible to maintain an appropriate pressure in the space by allowing a portion of the assist gas G supplied to the space to escape to the outside.

[0034] Fig. 6 is a cross-sectional view that schematically shows the third modified example of Fig. 2, and Fig. 7 is a perspective view that extracts and shows the attachment member 20 of Fig. 6. Note that in Fig. 6 and Fig. 7, in order to clearly show the configuration of the attachment member 20, the end face of the attachment member 20 that faces the workpiece 2 is made substantially perpendicular to the axial direction C, but it may be configured to be inclined with respect to the axial direction C, as in Fig. 2.

[0035] In the third modified example, as shown in FIG. 6, the attachment member 20 has, in a cross section along the axial direction C, a communication passage 50 that connects the space to the outside and has a labyrinth structure in which the extension direction changes at least once.

[0036] In this modified example, the attachment member 20 includes an outer member 52 and an inner member 54, and the communication passage 50 is configured as a gap between the outer member 52 and the inner member 54. The outer member 52 extends toward the workpiece 2 along the edge of the tip portion 4b of the nozzle 4 and has a flange portion 56 extending radially inward on its end surface facing the workpiece 2. When viewed from the axial direction C, the inner member 54 is disposed radially inward from the outer member 52. The inner member 54 has a generally cylindrical shape with a smaller diameter than the flange portion 56 of the outer member 52 and extending along the axial direction C, and has a protrusion 58 at its end on the tip portion 4b side of the nozzle 4 that partially extends radially outward. As shown in FIG. 7 , the protrusions 58 are provided at 90-degree intervals along the circumferential direction. The intervals at which the protrusions 58 are provided in the circumferential direction may be set to, for example, 45 degrees, 60 degrees, 120 degrees, 180 degrees, etc., in addition to the aforementioned 90 degrees.

[0037] In the attachment member 20 having such a configuration, the end of the inner member 54 protrudes outward from the outer member 52, and the inner member 54 is allowed to move along the axial direction C relative to the outer member 52, which is fixed to the tip 4b of the nozzle 4, in accordance with the force received from the surface of the workpiece 2. The range of movement of the inner member 54 is restricted by the protruding portion 58 of the inner member 54 abutting against the flange portion 56 of the outer member 52, thereby preventing the inner member 54 from falling off the outer member 52.

[0038] The communicating passage 50 is configured as a gap between the outer member 52 and the inner member 54, and as shown in Fig. 6, has a labyrinth structure in which the extension direction changes at least once. This labyrinth structure is one example, and the assist gas G flowing through the communicating passage 50 experiences flow resistance depending on the structure. In Fig. 6, the flow of assist gas G introduced into the space S through the inside of the tip portion 4b of the nozzle 4 is indicated by arrow c, and the flow of assist gas G escaping from the space S to the outside via the labyrinth structure is indicated by arrow d. As a result, the labyrinth structure of the communicating passage 50 allows the assist gas G supplied to the space surrounded by the attachment member to escape appropriately, similar to the opening 24 in the above-described embodiment, thereby maintaining the pressure in the space S at an appropriate value and effectively preventing water from entering from the outside.

[0039] Fig. 8 is a cross-sectional view showing a fourth modified example of Fig. 2. In Fig. 8, in order to clearly show the configuration of the attachment member 20, the end face of the attachment member 20 on the side of the workpiece 2 is made substantially perpendicular to the axial direction C, but it may be made to be inclined with respect to the axial direction C, as in Fig. 2.

[0040] The fourth variant differs from the third variant in that the inner member 54 constituting the attachment member 20 is supported on the nozzle 4 via a biasing member 30 arranged along the axial direction C (the other configurations are the same as those of the third variant, so detailed description will be omitted here).

[0041] As a result, if the surface of the workpiece 2 is uneven or if a support member (not shown) that supports the nozzle 4 moves up and down, the inner member 54 of the attachment member 20 is allowed to move along the axial direction C against the biasing force of the biasing member 30, making it possible to flexibly absorb the effects of the unevenness. Furthermore, because the biasing force of the biasing member 30 presses the inner member 54 of the attachment member 20 against the surface of the workpiece 2, good contact between the two is maintained, preventing water from entering the space from the surroundings.

[0042] Fig. 9 is a cross-sectional view schematically showing the fifth modified example of Fig. 2, and Fig. 10 is a perspective view showing the attachment member 20 of Fig. 9 together with the nozzle 4. Note that in Figs. 9 and 10, in order to clearly show the configuration of the attachment member 20, the end face of the attachment member 20 on the side of the workpiece 2 is made substantially perpendicular to the axial direction C, but it may be configured to be inclined with respect to the axial direction C, as in Fig. 2.

[0043] In the fifth modified example, the attachment member 20 is configured as an elastic body provided so as to at least partially cover the tip portion 4b of the nozzle 4.

[0044] Because the elastic body is deformable in response to the force it receives, when the attachment member 20 comes into contact with the surface of the workpiece 2, it deforms along the axial direction C due to the force it receives from the surface. This allows the attachment member 20 to make good contact with the surface of the workpiece 2, preventing a gap from forming between the two and effectively suppressing the intrusion of water from the surroundings into the space. Furthermore, even if the surface of the workpiece 2 is uneven, the elastic body can absorb the effect of the unevenness by deforming along the axial direction due to the force it receives from the unevenness.

[0045] The elastic body forming the attachment member 20 may have, for example, a predetermined opening ratio. In this case, similar to the apertures 24 and mesh member 40 in the above-described embodiment, the assist gas G supplied to the space surrounded by the attachment member 20 can be appropriately released, thereby maintaining the pressure in the space at an appropriate value and suitably preventing the intrusion of water from the outside. In Fig. 9, the flow of assist gas G introduced into the space S through the inside of the tip 4b of the nozzle 4 is indicated by arrow c, and the flow of assist gas G escaping from the space S to the outside through the elastic body is indicated by arrow e.

[0046] Such an elastic body may be made of a porous material having a predetermined opening ratio, as shown in Fig. 9. Alternatively, as shown in Fig. 10, a mesh member 40 may be formed into a shape of, for example, a life ring, and then formed into a ring shape along the tip 4b of the nozzle 4.

[0047] As described above, according to each of the above embodiments, it is possible to provide an in-liquid laser processing device 1 that can stably secure assist gas G in the space between the tip 4b of the nozzle 4 surrounded by the attachment member 20 and the workpiece 2, and that can maintain good processing performance using the laser L.

[0048] In addition, within the scope of the present disclosure, the components in the above-described embodiments may be replaced with well-known components as appropriate, and the above-described embodiments may be combined as appropriate.

[0049] The contents described in each of the above embodiments can be understood, for example, as follows.

[0050] (1) A submerged laser processing apparatus according to one embodiment includes: A submerged laser processing device (1) for processing a workpiece (2) by irradiating the workpiece with a laser (L) while supplying an assist gas (G) in the liquid, a nozzle (4) having a main body (4a) extending along an axial direction (C) and a tip (4b) through which the assist gas can be supplied and from which the laser can be irradiated; an attachment member (20) attached to the tip portion and configured to surround a space (S) between the tip portion and the workpiece when the nozzle is positioned opposite the workpiece; Equipped with The attachment member is movable or deformable along the axial direction relative to the nozzle.

[0051] According to the above aspect (1), an attachment member is attached to the tip of the nozzle. The attachment member is configured to be able to move or deform along the axial direction relative to the nozzle. Therefore, when the attachment member is moved laterally while in contact with the workpiece, even if the surface of the workpiece is uneven, the attachment member can be prevented from moving away from the surface and causing assist gas to leak into the surrounding area through gaps. Therefore, a stable supply of assist gas can be secured in the space between the tip of the nozzle and the workpiece, which is surrounded by the attachment member, and good laser processing performance can be maintained.

[0052] (2) In another embodiment, in the above embodiment (1), The attachment member has a side wall (22) that surrounds the space, The side wall is provided with at least one opening (24) that connects the space to the outside.

[0053] According to the above aspect (2), the attachment member has a side wall surrounding the space between the tip of the nozzle and the workpiece, and this side wall has at least one opening through which a portion of the assist gas supplied from the nozzle to the space can escape to the outside, effectively preventing the attachment member from floating up from the surface of the workpiece due to an increase in pressure in the space caused by excessive accumulation of assist gas in the space.

[0054] (3) In another embodiment, in the above embodiment (2), The attachment member is formed so that, when the nozzle is disposed facing the workpiece, the end face facing the workpiece is inclined with respect to the axial direction.

[0055] According to the above aspect (3), even when the nozzle is inclined relative to the workpiece, the inclined end face of the attachment member can prevent a gap from occurring between the attachment member and the workpiece.

[0056] (4) In another aspect, in the above aspect (2) or (3), the nozzle is configured so that one end where the tip portion is provided has a larger outer diameter than the other end, The attachment member is formed so that the inner diameter of the other end side is smaller than the outer diameter of the one end side of the nozzle, thereby restricting the range of movement of the attachment member along the axial direction relative to the nozzle.

[0057] According to the above aspect (4), for a nozzle configured so that one end has a larger outer diameter than the other end, the inner diameter of the other end of the attachment member is smaller than the outer diameter of the one end of the nozzle, thereby restricting the range of movement of the attachment member along the axial direction relative to the nozzle and preventing the attachment member from falling off the nozzle.

[0058] (5) In another embodiment, in the above embodiment (2), The attachment member has, in a cross section along the axial direction, a communication passage (50) that connects the space to the outside and has a labyrinth structure in which the extending direction changes at least once.

[0059] According to the above aspect (5), the attachment member has a communication passage that connects the space to the outside. The communication passage has a labyrinth structure in which the extension direction changes at least once, so that the assist gas supplied to the space surrounded by the attachment member can escape to the outside with an appropriate flow resistance.

[0060] (6) In another embodiment, in any one of the above (2) to (5), The attachment member is supported by the nozzle via a biasing member (30) provided along the axial direction.

[0061] According to the above aspect (6), the attachment member is supported by the nozzle via the biasing member. As a result, when the surface of the workpiece is uneven, the attachment member moves in the axial direction against the biasing force of the biasing member, thereby flexibly absorbing the effect of the unevenness, and the biasing force of the biasing member can maintain good contact between the attachment member and the surface of the workpiece.

[0062] (7) In another embodiment, in any one of the above (2) to (6), The attachment member is configured by combining a plurality of members (20a, 20b) that can be separated along the axial direction.

[0063] According to the above aspect (7), the attachment member attached to the tip of the nozzle is configured by combining a plurality of members, which makes it easy to attach and detach from the nozzle.

[0064] (8) In another embodiment, in the above embodiment (1), The attachment member is an elastic body provided so as to at least partially cover the tip portion.

[0065] According to the above aspect (8), the attachment member is made of an elastic body. When the surface of the workpiece with which the attachment member comes into contact is uneven, the elastic body deforms along the axial direction due to the force from the unevenness, thereby absorbing the influence of the unevenness and effectively preventing liquid from entering the space through the gap between the attachment member and the workpiece.

[0066] (9) In another embodiment, in the above embodiment (8), The elastic body is a porous body having a predetermined porosity.

[0067] According to the above aspect (9), the elastic body of the attachment member is configured as a porous body, which allows a portion of the assist gas supplied from the nozzle into the space to escape to the outside through the pores in the elastic body, effectively preventing the attachment member from floating up from the surface of the workpiece due to an increase in pressure in the space caused by excessive accumulation of assist gas in the space.

[0068] (10) In another embodiment, in any one of the above (1) to (9), In a cross section along the axial direction, the end of the attachment member is formed into a curved surface.

[0069] According to the above aspect (10), when the surface of the workpiece that the attachment member comes into contact with is uneven, the end of the attachment member is formed into a curved shape, so that the end can move or deform smoothly along the axial direction without getting caught on the unevenness.

[0070] (11) In another embodiment, in any one of the above (1) to (10), The nozzle irradiates the laser to cut the workpiece.

[0071] According to the above aspect (11), it is possible to realize a submerged laser processing device that can effectively perform so-called laser cutting work, in which an object to be processed is cut in liquid with a laser. [Explanation of symbols]

[0072] 1. Submerged laser processing equipment 2. Processing object 4 nozzles 4a Main body 4b1 Small diameter section 4b2 Large diameter part 4b3 Step 4b Tip 6 Transmission Fiber 8 Laser Oscillator 10 Assist gas supply system 12 Compressor 14 Filters 16 Empty board 18 Supply pipe 20 Attachment member 20a Parts 22 Side wall 24 Open hole 26 volts 30 biasing member 40 Mesh material 50 communication path 52 Outer member 54 Inner member 56 Flange 58 Protrusion C-axis direction G Assist Gas L Laser S space

Claims

1. A submerged laser processing apparatus for processing an object by irradiating a laser while supplying an assist gas in liquid, comprising: a nozzle having a main body extending along an axial direction and a tip end through which the assist gas can be supplied and the laser can be irradiated along the axial direction; an attachment member attached to the tip portion and configured to surround a space between the tip portion and the workpiece when the nozzle is disposed opposite the workpiece; Equipped with The attachment member is movable relative to the nozzle in a direction parallel to the axial direction, and an end face facing the workpiece is formed so as to be inclined with respect to a plane perpendicular to the axial direction.

2. A submerged laser processing apparatus for processing an object by irradiating a laser while supplying an assist gas in liquid, comprising: a nozzle having a main body extending along an axial direction and a tip end through which the assist gas can be supplied and the laser can be irradiated along the axial direction; an attachment member attached to the tip portion and configured to surround a space between the tip portion and the workpiece when the nozzle is disposed opposite the workpiece; Equipped with the attachment member is movable along the axial direction relative to the nozzle and has a sidewall surrounding the space; An in-liquid laser processing device in which a plurality of openings are partially provided on the end face of the side wall facing the workpiece, connecting the space to the outside along the circumferential direction relative to the axial direction, thereby allowing a portion of the assist gas supplied to the space to escape to the outside.

3. An in-liquid laser processing apparatus as described in Claim 2, wherein the multiple openings are arranged in a row along the end face of the side wall facing the object to be processed.

4. The attachment member has a side wall that surrounds the space, The liquid laser processing device of claim 1, wherein the end face side of the side wall has a plurality of openings formed to connect the space to the outside along a circumferential direction relative to the axial direction, thereby allowing a portion of the assist gas supplied to the space to escape to the outside.

5. the nozzle is configured so that one end where the tip portion is provided has a larger outer diameter than the other end, 5. The submerged laser processing device according to claim 1, wherein the inner diameter of the attachment member on the other end side is smaller than the outer diameter of the one end side of the nozzle, thereby restricting the range of movement of the attachment member along the axial direction relative to the nozzle.

6. 6. The submerged laser processing device according to claim 1, wherein the attachment member has, in a cross section along the axial direction, a communication passage that connects the space to the outside and has a labyrinth structure whose extension direction changes at least once.

7. The submerged laser processing device according to claim 1 , wherein the attachment member is supported by the nozzle via a biasing member provided along the axial direction.

8. The submerged laser processing device according to claim 1 , wherein the attachment member is configured by combining a plurality of members that can be separated along the axial direction.

9. The submerged laser processing device according to claim 1 , wherein the attachment member is an elastic body provided so as to at least partially cover the tip portion.

10. 10. The submerged laser processing device according to claim 9, wherein the elastic body is a porous body having a predetermined porosity.

11. The submerged laser processing device according to claim 1 , wherein an end of the attachment member is formed into a curved surface in a cross section along the axial direction.

12. The submerged laser processing device according to claim 1 , wherein the nozzle irradiates the laser to cut the workpiece.

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