Pump Module

Abstract

A pump module for a vacuum device comprises a flange capable of being vacuum-tightly coupled to the vacuum device, at least one ion getter pump, and at least one volume getter pump (NEG), wherein the ion getter pump is directly coupled to the flange, the NEG is directly coupled to the ion getter pump, and the NEG and the flange are spaced apart from each other.

Description

[Technical Field]

[0001] The present invention relates to a pump module for a vacuum device and to such a vacuum device. [Background technology]

[0002] Many industrial and scientific instruments and systems use 10 -7 Ultra-high vacuums of less than 100 mbar are required. To generate such a vacuum in a vacuum system, a combination of different types of pumps is usually used. Therefore, a main pump (roughing pump or backing pump) is usually provided, which is -1 from less than mbar to 10 -3 The main vacuum pump generates a rough vacuum down to 10 mbar. -1 from less than mbar to 10 -8 Combined with a high vacuum pump to generate pressures up to 10 mbar, in some cases -7 To generate pressures below mbar, they are combined with ultra-high vacuum pumps (UHV pumps). In such cases, the UHV pumps include adsorption pumps to achieve the pressures required for ultra-high vacuum. Of course, adsorption pumps include ion getter pumps and volume getter vacuum pumps, and volume getter vacuum pumps are also called getter pumps or volume getter pumps.

[0003] Ion getter pumps can also pump a variety of gases. Generally, ion getter pumps have two cathodes and one anode, across which a high voltage is applied. The high voltage accelerates electrons from the cathode toward the anode, ionizing the gas particles. The ionized gas particles then accelerate toward the cathode, where they are either adsorbed or reach the anode, where their kinetic energy causes them to be injected into the anode, without contributing to the gas pressure. An external magnetic field applied by a permanent magnet increases the likelihood of ionizing the gas particles. The pumping capacity of an ion getter pump is limited by the size of the anode and cathode, and is therefore limited by the available installation space within the vacuum system.

[0004] Known volume getter pumps operate on the principle of chemisorption, particularly for reactive gaseous media such as oxygen, nitrogen, and hydrogen, whereas physisorption predominates for hydrogen. Known volume getter pumps also have "non-evaporable getter materials" (NEGs). These volume getter pumps are designated as NEGs based on their getter materials. These pumps have high adsorption rates and consequently high pumping speeds, typically higher than ion getter pumps of the same size. An additional advantage of volume getter pumps is their ability to pump hydrogen more efficiently. However, the pumping efficiency of NEGs for hydrogen-carbon compounds is low, and NEGs, in particular, cannot pump noble gases. Summary of the Invention [Problem to be solved by the invention]

[0005] The technical object of the present invention is to create a pump module for a vacuum system having an ion getter pump and a volume getter pump, which has a compact design and is easy to connect to the vacuum system. [Means for solving the problem]

[0006] This problem is solved by a pump module according to claim 1 and a vacuum device according to claim 11.

[0007] A pump module for a vacuum device according to the present invention has a flange that can be vacuum-tightly coupled to the vacuum device. According to the present invention, the pump module further includes at least one ion getter pump and at least one volume getter pump (non-evaporable getter pump (NEG)). In this case, the ion getter pump is directly coupled to the flange. Furthermore, the NEG is directly coupled to the ion getter pump, and the NEG and the flange are spaced apart from each other. Therefore, the NEG and the flange are positioned on opposite sides of the ion getter pump and coupled to the ion getter pump. As a result, a stacked or layered structure is formed starting from the flange in the order flange-ion getter pump-NEG. Specifically, the ion getter pump and the NEG are not coupled at different positions on the flange. As a result, it is not necessary to select a flange diameter that allows the ion getter pump and the NEG to be arranged side by side, and it is not necessary to provide two flanges for the ion getter pump and the NEG, resulting in a pump module with a small diameter. Due to the fact that a small number and a small diameter can be selected, the vacuum device or flange is highly airtight. Therefore, the occurrence of leakage in the vacuum device is suppressed. As a result, the ion getter pump and NEG can be arranged in a space-saving manner using a small flange for the pump module, which can be welded to the vacuum system easily and at low cost.

[0008] Preferably, the ion getter pump and the NEG are arranged within the surface of the flange, i.e., the flange has a surface that is larger than the base area of the NEG and the base area of the ion getter pump. In this way, the pump module with the ion getter pump and the NEG can be introduced into the flange and screwed together with the flange onto the vacuum device in a vacuum-tight state.

[0009] Preferably, the ion getter pump and the NEG protrude into the vacuum system when installed. This ensures efficient pumping performance. In particular, the ion getter pump and the NEG are not attached or coupled to the side of the flange facing away from the vacuum system. This prevents the ion getter pump and / or the NEG from protruding from the vacuum system, and can keep the installation space required for the entire vacuum system small.

[0010] A common outlet is preferably provided through the flange for the supply lines to the NEG and ion getter pump. The stacked structure makes it particularly easy to integrate the supply lines into the vacuum system, with the supply lines leading out through the common outlet. The common outlet means that any leakage is reduced, in particular reducing the number of potential sources of failure and / or vulnerability to leakage that would otherwise prevent the efficient achievement of ultra-high vacuum.

[0011] Preferably, the flange has a first side and an opposite second side, and the NEG and ion getter pump are disposed on the first side, specifically coupled to the first side so as to protrude from the first side. In this case, the NEG is further coupled to the flange merely indirectly via the ion getter pump. Therefore, the ion getter pump and the NEG are disposed on the same side of the flange. Specifically, the first side is disposed within a vacuum device in the installed state, and therefore is in a vacuum. On the other hand, the second side is disposed outside the vacuum device in the installed state, and therefore is typically exposed to atmospheric pressure.

[0012] Preferably, two or more ion getter pumps are provided, each directly coupled to the flange. To increase the pumping capacity of the pump module, it may be necessary to provide two or more ion getter pumps, which may then also be coupled to the flange, so that the ion getter pumps are arranged, for example, side by side.

[0013] It is also preferred to provide two or more NEGs, each of which is directly coupled to an ion getter pump and each of which is separated from the flange by one of the ion getter pumps. In this pump module configuration, the number of NEGs provided is always less than or equal to the number of ion getter pumps, so that for each combination of NEG and ion getter pump, a series or stacked structure according to the invention is selected to further develop a compact design of the pump module.

[0014] Alternatively, two or more NEGs may be provided in such a way that at least one NEG is directly coupled to the flange.

[0015] Preferably, at least one ion getter pump is permanently coupled to the flange, in particular, integrally coupled to the flange, for example, by welding. Alternatively or additionally, at least one ion getter pump is permanently coupled to the NEG, in particular, integrally coupled to the NEG, for example, by welding. Also, it is preferred that the ion getter pump is permanently coupled to both the flange and the NEG, in particular, essentially integrally coupled to them, for example, by welding. In particular, it is preferred that all provided ion getter pumps are coupled to the flange and / or the NEG in the same way.

[0016] Preferably, at least one ion getter pump is detachably coupled to the flange. Alternatively or additionally, at least one ion getter pump is detachably coupled to the NEG. In particular, the ion getter pumps are detachably coupled to both the flange and the NEG. It is preferred if all ion getter pumps are detachably coupled to the flange and / or the NEG. Such detachable coupling can be achieved, for example, by a screw coupling, a snap fit, a bayonet coupling or similar means.

[0017] Alternatively, removable and permanent connections can be used between the flange, the ion getter pump, and the NEG, depending on the specific requirements of the relevant application. For example, a permanent connection between the ion getter pump and the flange can ensure a particularly simple and secure pump module construction. However, a removable connection allows the NEG to be removed and replaced independently from the ion getter pump, for example, if the provided NEG material is consumed.

[0018] The present invention further relates to a vacuum device having a flange, to which the above-described pump module is coupled. Preferably, both the ion getter pump and the NEG project into the vacuum system. The present invention will now be described in more detail based on preferred embodiments with reference to the accompanying drawings. [Brief explanation of the drawings]

[0019] [Figure 1] 1 is a first embodiment of a pump module according to the present invention. [Figure 2] 2 is a second embodiment of a pump module according to the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0020] A pump module 10 according to the present invention includes a flange 12 having a first side 14 and a second side 16 opposite the first side. When the flange 12 is coupled to a vacuum device (not shown), the first side 14 faces the vacuum device and is particularly exposed to the vacuum created within the vacuum device. The second side 16 is exposed to atmospheric pressure and is located outside the vacuum device. The flange 12 can be vacuum-tightly coupled to the vacuum device using known means, such as screws and seals.

[0021] The ion getter pump 18 is coupled to the first side 14 of the flange 12. The volume getter pump (NEG) 20 is disposed on the opposite side of the ion getter pump 18 from the flange 12 side. Thus, the flange 12 and the NEG 20 are disposed at opposite ends of the ion getter pump. That is, the NEG 20 is not directly coupled to the flange 12, but is indirectly coupled thereto via the ion getter pump 18. Thus, in an installed state, the ion getter pump 18 and the NEG 20 are disposed to protrude into the vacuum system and pump gas therein.

[0022] The flange 12 further has a common lead-through 22 which leads in the high voltage for operation of the ion getter pump 18 as well as the low voltage for the heating element for regeneration of the NEG, meaning that only one lead-through is required, reducing potential leak points in the ultra-high vacuum system.

[0023] Due to the stacked or serial structure of the NEG 20, the ion getter pump 18, and the flange 12, the diameter of the flange, i.e., the diameter of the flange surface 24 that is directly positioned in the vacuum, is exactly the same as or slightly larger than the base area of the ion getter pump 18 or the NEG 20, so that the diameter of the flange 12 can be kept small. Therefore, during installation, the NEG 20 and the ion getter pump 18 are introduced through the flange openings and are firmly attached to the vacuum system by attaching the flange 12 to the vacuum system.

[0024] FIG. 2 shows a further embodiment. Here, a first ion getter pump 18.1 and a second ion getter pump 18.2 are arranged on the first side 14 of the flange 12. In this case, the ion getter pumps 18 are directly coupled to the flange. NEGs 20.1 and 20.2 are arranged on the side of each ion getter pump 18.1 and 18.2 opposite the flange 12 side. This means that the pumping capacity of the pump module can be easily doubled. At the same time, a compact structure is maintained due to the stacked or serial arrangement of the ion getter pump 18 and the NEG. In this way, a pump module combining an ion getter pump and a NEG with a compact design is created. [Explanation of symbols]

[0025] 12 flange 18 Ion getter pump 20 Volume Getter Pump (NEG)

Claims

1. a flange (12) that can be vacuum-tightly coupled to a vacuum device; at least one ion getter pump (18); At least one volume getter pump (NEG) (20); A pump module for a vacuum device comprising: the ion getter pump (18) is directly coupled to the flange (12), and the NEG (20) is directly coupled to the ion getter pump (18), such that the NEG (20) and the flange (12) are disposed on opposite sides of the ion getter pump (18); The NEG (20) and the flange (12) are spaced apart from each other; the flange (12) has a surface area larger than the base area of the NEG (20) and the base area of the ion getter pump (18); The ion getter pump (18) is removably coupled to the NEG (20). Pump module.

2. a common outlet (22) for supply lines to the NEG (20) and the ion getter pump (18) is provided through the flange; The pump module of claim 1 .

3. The flange (12) has a first side (14) and an opposite second side (16), and the NEG (20) and the ion getter pump (18) are disposed on the first side (14) and protrude from the first side (14).

3. The pump module according to claim 1 or 2.

4. The first side (14) is located inside a vacuum device in an installed state, and the second side (16) is located outside the vacuum device in an installed state. The pump module of claim 3 .

5. two or more ion getter pumps (18.1, 18.2) are provided, each ion getter pump (18.1, 18.2) being directly coupled to the flange (12); 5. A pump module according to claim 1.

6. Two or more NEGs (20.1, 20.2) are provided, each NEG (20.1, 20.2) is directly coupled to the ion getter pump (18.1, 18.2), and each NEG (20.1, 20.2) and the flange (12) are spaced apart from each other. The pump module of claim 5 .

7. A vacuum device having a flange, wherein a pump module (10) according to any one of claims 1 to 6 is coupled to said flange.

8. Both the ion getter pump (18) and the NEG (20) project into the vacuum system; 8. The vacuum device of claim 7.

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