Ferroelectric nanoparticle capacitors for non-binary logic and methods of operation

Abstract

To provide a ferroelectric nanoparticle capacitor-device with a limited number of ferroelectric nanoparticles to provide discrete remanent ferroelectric polarization states.SOLUTION: A ferroelectric nanoparticle capacitor-device 100 comprises a pair of conductive elements 102, 112 electrically insulated from each other, and ferroelectric nanoparticles 104a, 104b arranged between the conductive elements of the pair. The ferroelectric nanoparticles are adapted to provide at least three polarization states 106 with different total ferroelectric polarizations. The ferroelectric nanoparticle capacitor-device may be adapted to receive a preselected voltage or a preselected charge at one of the conductive elements of the pair to selectively set the ferroelectric nanoparticles to any of the at least three polarization states, and in particular, the other conductive element of the pair is adapted to carry a constant electrical charge. In other words, the polarization states of the ferroelectric nanoparticles can be individually addressed and the ferroelectric nanoparticles are set to the respective polarization state.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates particularly to ferroelectric nanoparticle capacitor devices having a limited number of ferroelectric nanoparticles to provide discrete remanent ferroelectric polarization states that can be individually addressed. In particular, each of the nanoparticles can be in a monodomain ferroelectric state. The present disclosure also relates to methods for setting the polarization states of ferroelectric nanoparticles. The methods further relate to the use of ferroelectric nanoparticle capacitor devices in reservoir computing. [Background technology]

[0002] The computer industry strives for the continuous miniaturization of devices to reduce the energy required to store or switch information, such as logic bits. To this end, existing computing circuits use standard binary logic to store and process information. These circuits are reaching fundamental limits set by atomic miniaturization and the fundamental Landauer principle of energy dissipation per bit processed. Summary of the Invention

[0003] In view of the above technical problems, there is a need for a multi-valued logic device.

[0004] In the context of this disclosure, the term multi-valued logic device can refer to a device that provides at least three states, such as at least three switchable and / or individually addressable logic states or at least three switchable and / or individually addressable polarization states. In other words, a multi-valued logic device can be considered a non-binary logic device. Thus, a multi-valued logic device differs from a binary logic device that provides two states (i.e., two switchable and / or individually addressable logic states or polarization states).

[0005] The use of multiple-valued logic devices may reduce energy losses and enable unprecedentedly high information densities in devices, thus overcoming the binary dominance of conventional devices. Exploring multiple-valued logic is important for realizing non-von Neumann computation.

[0006] Despite the active search for systems capable of realizing switchable multi-valued logic, a practically viable physical implementation of multi-valued logic devices has so far remained an unsolved and challenging task.

[0007] Existing implementations of pseudo-multilevel logic units currently used in solid-state drives and flash memory actually involve combinations of individual binary (i.e., bit) logic devices, and therefore require analog methods of bit writing, which can result in erratic behavior of the logic cells due to the probabilistic loss of information.

[0008] In a first aspect of the present disclosure, a ferroelectric nanoparticle capacitor device includes a pair of electrically isolated conductive elements and ferroelectric nanoparticles disposed between the pair of conductive elements, the ferroelectric nanoparticles adapted to provide at least three polarization states having different total ferroelectric polarizations.

[0009] The ferroelectric nanoparticle capacitor device according to the first aspect therefore provides a multi-valued logic device, or an implementation of multi-valued logic, respectively.

[0010] The ferroelectric nanoparticle capacitor device can be adapted to selectively set the ferroelectric nanoparticles to one of at least three polarization states. For example, the ferroelectric nanoparticle capacitor device can be adapted to receive a preselected voltage or a preselected charge on one of a pair of conductive elements to selectively set the ferroelectric nanoparticles to one of at least three polarization states, and in particular, the other conductive element of the pair is adapted to carry a constant charge. In other words, the polarization states of the ferroelectric nanoparticles can be individually addressed. Addressing the polarization states can refer to setting the ferroelectric nanoparticles to their respective polarization states.

[0011] Thus, the ferroelectric nanoparticle capacitor device constitutes a multi-valued logic device, where each polarization state acts as a multi-valued logic state (e.g., a memory level), and switching by application of charge represents a transition between states or memory levels, respectively.

[0012] The ferroelectric nanoparticles may be adapted to provide up to 64 discrete polarization states with different total ferroelectric polarizations, in particular up to 32 discrete polarization states with different total ferroelectric polarizations, in particular up to 16 discrete polarization states with different total ferroelectric polarizations, in particular up to 8 discrete polarization states with different total ferroelectric polarizations, in particular up to 4 discrete polarization states with different total ferroelectric polarizations.

[0013] To address any of the polarization states individually or to switch between any pair of polarization states, the ferroelectric nanoparticle capacitor device can provide respective pathways, each well-defined and specific to the polarization state to be addressed or pair of polarization states to be switched between. In the context of the present disclosure, the term pathway can refer to a charge applied to at least one of the conductive elements or to charges applied sequentially (i.e., differing by total value and / or sign, etc.) to at least one of the conductive elements.

[0014] The at least three polarization states may be at least three remanent polarization states, in other words, the ferroelectric nanoparticles may be adapted to maintain any of the at least three polarization states and / or to store a set one of the at least three polarization states, particularly when no charge or voltage is applied to the conductive element.

[0015] This allows realization of multi-valued logic memory levels.

[0016] The polarization state may refer to the overall polarization state of the ferroelectric nanoparticle, or in other words, the polarization state of the ferroelectric nanoparticle as a whole, as opposed to the individual polarization states of, for example, individual ferroelectric nanoparticles.

[0017] The polarization state may refer to a ferroelectric polarization state.

[0018] The polarization states may be discrete polarization states, for example, the at least three polarization states may be at least three discrete polarization states.

[0019] The ferroelectric nanoparticles may be adapted to provide respective individual polarization states, in particular respective discrete polarization states, for example respective individual polarization up states and respective individual polarization down states.

[0020] The individual polarization states may refer to individual ferroelectric polarization states.

[0021] The ferroelectric nanoparticle capacitor device can be adapted to switch the individual polarization states of the individual ferroelectric nanoparticles. The ferroelectric nanoparticle capacitor device can be adapted to switch the individual polarization states of the individual ferroelectric nanoparticles while maintaining the individual polarization states of the remaining ferroelectric nanoparticles.

[0022] The ferroelectric nanoparticles can have the same material composition.

[0023] This can facilitate economical manufacturing of the device.

[0024] A conductive element can refer to an electrically conductive element.

[0025] The conductive element may be a conductive layer and / or a conductive plate.

[0026] The ferroelectric nanoparticles (particularly each ferroelectric nanoparticle) may be disposed between first sections of the conductive elements. In other words, the first sections of the conductive elements may correspond to projections of the ferroelectric nanoparticles onto the conductive elements. The ferroelectric nanoparticles (or each of the plurality of ferroelectric nanoparticles) and the (respective) first sections of the conductive elements may define a ferroelectric capacitor (or a plurality of ferroelectric capacitors, respectively).

[0027] Up to 10 ferroelectric nanoparticles may be disposed between the pair of conductive elements, or up to 5 ferroelectric nanoparticles, or up to 3 ferroelectric nanoparticles, or exactly 3 ferroelectric nanoparticles, or exactly 2 ferroelectric nanoparticles.

[0028] A limited number of nanoparticles each can improve the reliability of switching between polarization states.

[0029] The sections of the conductive element that sandwich one of the ferroelectric nanoparticles can define a respective ferroelectric capacitor, or in other words, the ferroelectric nanoparticle and the sections of the conductive element that sandwich the ferroelectric nanoparticle can define a ferroelectric capacitor.

[0030] The pair of conductive elements may include respective surfaces that face each other, and the respective surface areas of the respective surfaces may each exceed the total projected surface area of the ferroelectric nanoparticle.

[0031] In other words, the conductive elements may include excess portions of each that do not include ferroelectric nanoparticles therebetween.

[0032] In a corresponding embodiment, the surface area of the conductive element over the total surface area projected by the ferroelectric nanoparticles (or the portions of their respective surfaces that do not have ferroelectric nanoparticles therebetween, or the remaining portions of the conductive element, respectively) can define the dielectric capacitor or the capacitance of the dielectric capacitor. The dielectric capacitor can be adapted to provide the dielectric capacitance. The section of each surface between which there are no ferroelectric nanoparticles can refer to a section of each surface where the ferroelectric nanoparticles fill less than 50%, particularly less than 40%, particularly less than 30%, particularly less than 20%, or particularly less than 10% of the distance between the respective surfaces.

[0033] The dielectric capacitor may be arranged electrically in parallel and / or in series with the ferroelectric capacitor, and the dielectric capacitor and the ferroelectric capacitor (or the capacitance of the dielectric capacitor and the capacitance of the ferroelectric capacitor, respectively) may be adapted to together define paths between at least three polarization states and / or to define several remanent polarization states.

[0034] The total surface projected area of the ferroelectric nanoparticles can correspond to the projected area of the ferroelectric nanoparticles onto one of the respective surfaces.

[0035] The surfaces of each of the conductive elements of the pair may be contiguous, for example having a circular, elliptical, rectangular, polygonal or rounded polygonal shape.

[0036] Ferroelectric nanoparticles can be disposed between the respective surfaces.

[0037] Each surface may include and / or define a lateral direction parallel to the respective surface, in other words, each surface may extend in a lateral direction.

[0038] Each of the respective surface areas can exceed the total projected surface area of the ferroelectric nanoparticles by at least 5%, or at least 10%, or at least 30%, or at least 50%, or at least two times.

[0039] The ferroelectric nanoparticles may be spaced apart from one another and / or a dielectric separator material may be disposed between the ferroelectric nanoparticles.

[0040] Corresponding embodiments can ensure discrete polarization states and / or discrete individual polarization states.

[0041] In corresponding embodiments, the dielectric separator material may be included in and / or provide the dielectric of a dielectric capacitor.

[0042] At least one section of the dielectric separator material can be disposed between second sections of the conductive elements. In other words, the second sections of the conductive elements can correspond to a projection of the at least one section of the dielectric separator material onto the conductive elements. The at least one section of the dielectric separator material and the second sections of the conductive elements can define a dielectric capacitor (i.e., according to an alternative definition).

[0043] The dielectric separator material may be adapted to separate the conductive elements and / or to electrically insulate the conductive elements from one another.

[0044] The dielectric separator material may surround at least one of the ferroelectric nanoparticles, or may particularly surround the ferroelectric nanoparticles laterally (ie, along the lateral direction).

[0045] The conductive elements of the pair may have respective surfaces. The respective surfaces may be spaced apart by a distance. The ferroelectric nanoparticles may extend along at least 60% of the distance, or along at least 75% of the distance, or along at least 90% of the distance, or along the entire distance. Alternatively or additionally, the respective surfaces may be connected by a reference line, and the ferroelectric nanoparticles may extend along the reference line. The distance may correspond to the length of the reference line.

[0046] The ferroelectric nanoparticles can be laterally (ie, along the lateral direction) spaced apart from one another.

[0047] A first one of the ferroelectric nanoparticles can have a first size. A second one of the ferroelectric nanoparticles can have a second size. The first size can be at least 10%, or at least 30%, or at least 50%, or at least two times larger than the second size.

[0048] The first size (or second size, respectively) can refer to the maximum extension of the first ferroelectric nanoparticle (or second ferroelectric nanoparticle, respectively). In other words, the first size (or second size, respectively) can refer to the size of the first ferroelectric nanoparticle (or second ferroelectric nanoparticle, respectively) along the direction in which it is largest.

[0049] Alternatively, the first size (or second size, respectively) can refer to the volume of the first ferroelectric nanoparticle (or second ferroelectric nanoparticle, respectively).

[0050] The first (and / or second) ferroelectric nanoparticles may be disposed between the first (and / or second) first sections of the conductive element. In other words, the first (and / or second) first sections of the conductive element may correspond to projections of the first (and / or second) ferroelectric nanoparticles onto the conductive element. The first (and / or second) ferroelectric nanoparticles and the first (and / or second) first sections of the conductive element may define first (and / or second) ferroelectric capacitors. The first (and / or second) ferroelectric capacitors may be adapted to provide respective capacitances.

[0051] According to an embodiment, the size of each of the ferroelectric nanoparticles along any direction does not exceed 100 nm, in particular does not exceed 50 nm, or does not exceed 30 nm, or does not exceed 20 nm, or does not exceed 10 nm, or does not exceed 5 nm. In the context of the present disclosure, ferroelectric nanoparticles having a size of up to 20 nm may also be referred to as ferroelectric nanodots.

[0052] The size of each ferroelectric nanoparticle can be beneficial in ensuring the monodomain ferroelectric state of the ferroelectric nanoparticles. In particular, defining the size of the ferroelectric nanoparticles can result in a controlled coercivity of each nanoparticle, and thus controlling the size provides control over the pathway for addressing or switching between polarization states. This is an advantage of using ferroelectric nanoparticles over, for example, using ferroelectric films, in which ferroelectric domains form randomly without good control over their size distribution. With ferroelectric nanoparticles, narrow size tolerances or narrow size distributions can be achieved.

[0053] Each size can correspond to the size of the ferroelectric nanoparticle along a direction of greatest elongation or greatest, as described above in the context of the first size and the second size.

[0054] The minimum size of each of the ferroelectric nanoparticles along any direction may be 4 nm or more, may be 3 nm or more, may be 2 nm or more, or may be 1 nm or more.

[0055] The ferroelectric nanoparticles can comprise respective monodomain ferroelectric states.

[0056] At least three polarization states can correspond to combinations of the monodomain ferroelectric states of each of the ferroelectric nanoparticles.

[0057] Each monodomain ferroelectric state of the ferroelectric nanoparticles can be a remanent polarization state and / or a discrete polarization state.

[0058] The first conductive element of the pair may be adapted to carry a constant charge and / or may be electrically insulating and / or electrically floating.

[0059] The ferroelectric nanoparticle capacitor device may further comprise a charge control device adapted to control and / or vary the charge on the second conductive element of the pair.

[0060] The charge control device may be adapted to apply a pulse sequence to the second conductive element of the pair. Alternatively or additionally, the charge control device may be adapted to apply a pulse having a duration of less than 1 μs to the second conductive element of the pair.

[0061] The pulse sequence can include pulses each having a duration of less than 1 μs.

[0062] The ferroelectric nanoparticle capacitor device can further comprise a transistor, the channel of the transistor forming the first conductive element or the second conductive element.

[0063] The charge control device can include an additional conductive element electrically isolated from the pair of conductive elements, and the charge control device can be adapted to apply a voltage between the additional conductive element and the second conductive element.

[0064] The additional conductive element and the second conductive element may be disposed on either side of the first conductive element.

[0065] The additional conductive element may be separated from the first conductive element by a dielectric spacer.

[0066] The dielectric spacers may form the gate dielectric of the transistor.

[0067] The conductive element and / or the additional conductive element may comprise or consist of a metallic material or a semiconductor material.

[0068] The ferroelectric nanoparticle capacitor device can include a plurality of respective additional conductive elements, each of which can be adapted to control the polarization state of a respective ferroelectric nanoparticle or a respective plurality of ferroelectric nanoparticles of the ferroelectric nanoparticle capacitor device.

[0069] At least three polarization states may be associated with each voltage level.

[0070] The respective voltage levels may refer to the voltage levels of the first conductive element and / or the second conductive element, or the voltage difference between the first conductive element and the second conductive element.

[0071] The ferroelectric nanoparticle capacitor device may further comprise a voltage readout element adapted to determine the voltage of the first conductive element and / or the voltage of the second conductive element, or the voltage difference between the first conductive element and the second conductive element, such as to identify respective voltage levels associated with the at least three polarization states.

[0072] The ferroelectric nanoparticle capacitor device may further comprise a sensing electrode disposed adjacent the paired conductive elements and / or adjacent the ferroelectric nanoparticles of the ferroelectric nanoparticle capacitor device.

[0073] The sensing electrode may include or be made of a conductive material, or the sensing electrode may include or be made of a semiconductor material.

[0074] The sensing electrode may be in physical contact with the dielectric spacer or may be embedded in the dielectric spacer.

[0075] The sensing electrode may be electrically isolated from the paired conductive element and / or the additional conductive element.

[0076] A sensing electrode may be disposed on the pair of conductive elements.

[0077] The ferroelectric nanoparticle capacitor device may further comprise a spatially resolved input / output device, which may be adapted to change and / or read out the individual polarization states of the ferroelectric nanoparticles.

[0078] The spatially resolved input / output device may comprise or be a source of a focused light beam, such as a laser source adapted to generate a focused laser beam, or may comprise or be a metal tip having a sub-micrometer radius.

[0079] The spatially resolved input / output device may comprise a scanning device.

[0080] The spatially resolved input / output device can comprise a scanning device adapted to scan a focused light beam or a metal tip from a ferroelectric nanoparticle of the ferroelectric nanoparticle capacitor device to a preselected ferroelectric nanoparticle.

[0081] The spatially resolved input / output device may be adapted to change and / or read out the individual polarization state of only one of the ferroelectric nanoparticles of the ferroelectric nanoparticle capacitor device.

[0082] The ferroelectric nanoparticle capacitor device may further comprise a temperature control element adapted to control and / or vary the temperature of the ferroelectric nanoparticles. Alternatively or additionally, the ferroelectric nanoparticle capacitor device may comprise a force control element adapted to control and / or vary the mechanical force applied to the ferroelectric nanoparticles.

[0083] The temperature control element and / or the force control element can enable post-adjustment of the pathway to address and / or switch polarization states. For example, the temperature control element and / or the force control element can enable addressing polarization states, such as a polarization state of zero net polarization, which cannot be addressed by applying a charge or voltage to at least one of the conductive elements, for example, at ambient temperature or without a force applied by the force control element.

[0084] The ferroelectric nanoparticle capacitor device may further comprise an artificial neural network adapted to receive as input a time-dependent electrical signal at a conductive element of the ferroelectric nanoparticle capacitor device or a sensing electrode of the ferroelectric nanoparticle capacitor device, or a signal determined by an optical readout device.

[0085] The artificial neural network may comprise up to five layers, or up to three layers, or up to two layers. The artificial neural network (or each of said layers) may comprise an input layer and an output layer.

[0086] The time-dependent electrical signal may be a time-dependent voltage signal or a time-dependent charge signal or a time-dependent current signal.

[0087] According to one example, the description relates to the use of the above-described ferroelectric nanoparticle capacitor device as a multi-logic level data storage device.

[0088] According to one example, the present description relates to a method for operating a ferroelectric nanoparticle capacitor device. The ferroelectric nanoparticle capacitor device includes a pair of electrically insulated conductive elements and a ferroelectric nanoparticle disposed between the conductive elements of the pair. The ferroelectric nanoparticle is adapted to provide at least three polarization states with different total ferroelectric polarizations, including a minimum ferroelectric polarization state, a maximum ferroelectric polarization state, and at least one intermediate ferroelectric polarization state. The method includes selecting an intermediate ferroelectric polarization state, selecting a first voltage or charge according to the selected intermediate ferroelectric polarization state, and applying the first voltage or charge to the conductive elements of the pair to set the ferroelectric nanoparticle to the selected intermediate ferroelectric polarization state.

[0089] The method may implement multi-valued logic.

[0090] The method may further include maintaining the other conductive element of the pair (ie, the first conductive element) at a constant charge.

[0091] Preferably, the first voltage or charge refers to a charge. In other words, the method can refer to selecting a first charge according to a selected intermediate ferroelectric polarization state and applying the first charge.

[0092] Selecting an intermediate ferroelectric polarization state can refer to selecting an intermediate ferroelectric polarization state of at least one intermediate ferroelectric polarization state.

[0093] The maximum ferroelectric polarization state can provide the maximum ferroelectric polarization of the at least three polarization states, i.e., none of the at least three polarization states can have a ferroelectric polarization greater than the maximum ferroelectric polarization state.

[0094] The minimum ferroelectric polarization state can provide the minimum ferroelectric polarization of the at least three polarization states, i.e., none of the at least three polarization states can have a ferroelectric polarization smaller than the maximum ferroelectric polarization state.

[0095] The ferroelectric polarization of the intermediate ferroelectric polarization state may be greater than the minimum ferroelectric polarization and less than the maximum ferroelectric polarization.

[0096] In the context of the present disclosure, the magnitude of the ferroelectric polarization may be determined by the component of the respective ferroelectric polarization along the reference axis. In other words, a negative (e.g., relative to the reference axis) ferroelectric polarization may be considered to be less than a zero ferroelectric polarization. The reference axis may intersect at least one of the conductive element and the ferroelectric nanoparticle.

[0097] The conductive element of the pair to which the first voltage or charge is applied can correspond to the second conductive element of the pair described above in the context of the ferroelectric nanoparticle capacitor device, and the other conductive element of the method can correspond to the first conductive element of the pair described above in the context of the ferroelectric nanoparticle capacitor device.

[0098] The ferroelectric nanoparticle capacitor device can further include an additional conductive element electrically isolated from the pair of conductive elements. Applying a first voltage or charge to the pair of conductive elements (i.e., the second conductive element) can include applying a voltage between the additional conductive element and the pair of conductive elements (i.e., the second conductive element). The additional conductive element can be included in a charge control device of the ferroelectric nanoparticle capacitor device.

[0099] The method may further include providing the ferroelectric nanoparticles in a first of at least three polarization states before applying a first voltage or charge to set the ferroelectric nanoparticles to a selected intermediate ferroelectric polarization state, selecting a second voltage or charge according to the selected intermediate ferroelectric polarization state and / or the first polarization state, and applying the second voltage or charge to the pair of conductive elements to set the ferroelectric nanoparticles from the first to a second of the at least three polarization states. The first polarization state may be different from the selected intermediate ferroelectric polarization state. The second polarization state may be different from both the first and selected intermediate ferroelectric polarization states.

[0100] The second voltage or charge can exceed the first voltage or charge in terms of their respective absolute values.

[0101] The sign of the second voltage or charge may be opposite to the sign of the first voltage or charge.

[0102] The method may further include, before applying a second voltage or charge to set the ferroelectric nanoparticles to the selected intermediate ferroelectric polarization state, providing the ferroelectric nanoparticles in a third of the at least three polarization states, selecting the third voltage or charge according to the selected intermediate ferroelectric polarization state and / or the first polarization state, and applying the third voltage or charge to the pair of conductive elements to set the ferroelectric nanoparticles from the first to the third of the at least three polarization states. The third polarization state may be different from the first, second, and selected intermediate ferroelectric polarization states.

[0103] The third voltage or charge can exceed the second voltage or charge in terms of their respective absolute values.

[0104] The sign of the third voltage or charge may be opposite to the sign of the second voltage or charge.

[0105] The selected intermediate ferroelectric polarization state may be a remanent state. Alternatively or additionally, the method may include reducing the voltage or charge applied to the conductive element, in particular reducing the voltage by at least 30%, by at least a factor of 2, by at least a factor of 3, by at least a factor of 5, by at least a factor of 10, or by at least a factor of 100, thereby maintaining the set intermediate ferroelectric polarization state.

[0106] The method may further include heating the ferroelectric nanoparticles and / or applying a mechanical force to the ferroelectric nanoparticles, e.g., to change their polarization state and / or to modify the relationship between the selected intermediate ferroelectric polarization state and the applied voltage or charge.

[0107] The method can include heating the ferroelectric nanoparticles to change their polarization state to a polarization state having a ferroelectric polarization of zero.

[0108] The method may further include detecting a current polarization state of the ferroelectric nanoparticles based on the voltage of at least one of the conductive elements.

[0109] The method can include detecting a current polarization state of the ferroelectric nanoparticles based on a change in the voltage of at least one of the conductive elements, such as by counting jumps in the voltage of at least one of the conductive elements.

[0110] The first polarization state and / or the second polarization state may be a remanent state.

[0111] According to another aspect, there is provided a method for operating a ferroelectric nanoparticle capacitor device, the ferroelectric nanoparticle capacitor device comprising a pair of electrically isolated conductive elements and a ferroelectric nanoparticle disposed between the conductive elements of the pair. According to a first alternative, the method includes applying pulses and / or pulse sequences having a duration of less than 1 μs to the conductive elements of the ferroelectric nanoparticle capacitor device. According to a second alternative, the method includes addressing the polarization state of the ferroelectric nanoparticle using a spatially resolved input / output device.

[0112] Pulses and / or pulse sequences having a duration of less than 1 μs may be applied to paired or additional conductive elements (ie, similar to the conductive elements described above).

[0113] In embodiments having multiple additional conductive elements, the method may include applying a pulse or pulse sequence to several of the additional conductive elements, for example in parallel and / or in series.

[0114] In the context of the method, addressing the polarization state can refer to changing the polarization state of the ferroelectric nanoparticles. In some embodiments, the single individual polarization state of one of the ferroelectric nanoparticles is changed, while the individual polarization states of other ferroelectric nanoparticles are not changed.

[0115] Alternatively, addressing the polarization state can refer to reading out the polarization state of the ferroelectric nanoparticles.

[0116] The method can further include receiving an output of the ferroelectric nanoparticle capacitor device. The output of the ferroelectric nanoparticle capacitor device can correspond to a time-dependent electrical signal at a pair of conductive elements or sensing electrodes of the ferroelectric nanoparticle capacitor device. Alternatively, the output of the ferroelectric nanoparticle capacitor device can correspond to a signal determined by an optical readout device. Alternatively, the output of the ferroelectric nanoparticle capacitor device can correspond to a signal determined by a spatially resolved input / output device.

[0117] The output of the ferroelectric nanoparticle capacitor device may be received by an artificial neural network. Alternatively or additionally, the artificial neural network may be trained according to the received output of the ferroelectric nanoparticle capacitor device, e.g., the artificial neural network from which the output of the ferroelectric nanoparticle capacitor device was received.

[0118] The method may further include setting the individual polarization states of the ferroelectric nanoparticles to preselected individual polarization states and / or setting the polarization states of the ferroelectric nanoparticles to preselected polarization states prior to applying the pulses and / or pulse sequences having durations of less than 1 μs to the pair of conductive elements.

[0119] In some embodiments, the method further comprises applying a reset to the ferroelectric nanoparticle capacitor device prior to the above process steps.

[0120] A reset can set the ferroelectric nanoparticle capacitor device to a polarization state having a preselected total polarization, for example, zero total polarization.

[0121] Applying a reset can include applying a high intensity pulse to a conductive element of the ferroelectric nanoparticle capacitor device.

[0122] The high-intensity pulse can have an amplitude or power that exceeds, for example, one and / or pulse sequence of pulses having a duration of less than 1 μs by at least 1.2 times, or at least 1.5 times, or at least 2 times, or at least 3 times.

[0123] The amplitude can refer to charge, voltage, or current amplitude.

[0124] Applying the reset can include heating the ferroelectric nanoparticles using, for example, the temperature control elements described above.

[0125] Applying a reset can include irradiating the ferroelectric nanoparticle capacitor device with light or electromagnetic radiation, for example at high intensity. [Brief explanation of the drawings]

[0126] The techniques of the present disclosure and their associated advantages will be best apparent from a description of exemplary embodiments taken in conjunction with the accompanying drawings. [Figure 1] 1A and 1B illustrate a ferroelectric nanoparticle capacitor device according to a first embodiment. [Figure 2a] FIG. 1 illustrates the electrostatic energy of and switching between individual polarization states of a ferroelectric nanoparticle between conductive elements. [Figure 2b] FIG. 2b shows charge-voltage hysteresis loops illustrating switching between the individual polarization states of the ferroelectric nanoparticles of FIG. 2a. [Figure 3] FIG. 2 shows an equivalent electrical circuit of the ferroelectric nanoparticle capacitor device of FIG. 1 connected to a charge control device. [Figure 4a] 2 illustrates the electrostatic energy of the polarization states of a ferroelectric nanoparticle capacitor device according to an embodiment corresponding to FIG. 1, as well as pathways for managing and / or switching the polarization states. [Figure 4b]4b shows charge-voltage hysteresis loops associated with the polarization states of ferroelectric nanoparticles according to the embodiment of FIG. 4a, as well as pathways for addressing and / or switching the polarization states. [Figure 5a] 2A and 2B illustrate electrostatic energies of polarization states of a ferroelectric nanoparticle capacitor device according to another embodiment corresponding to FIG. 1, and pathways for managing and / or switching polarization states. [Figure 5b] 5b shows charge-voltage hysteresis loops associated with the polarization states of ferroelectric nanoparticles according to the embodiment of FIG. 5a, as well as pathways for addressing and / or switching the polarization states. [Figure 6a] 2A and 2B illustrate electrostatic energies of polarization states of a ferroelectric nanoparticle capacitor device according to another embodiment corresponding to FIG. 1, and pathways for managing and / or switching polarization states. [Figure 6b] 6b shows charge-voltage hysteresis loops associated with the polarization states of ferroelectric nanoparticles according to the embodiment of FIG. 6a, as well as pathways for addressing and / or switching the polarization states. [Figure 7a] FIG. 1 illustrates a ferroelectric nanoparticle capacitor device according to one embodiment having a temperature control element and a force control element. [Figure 7b] FIG. 7b shows an equivalent electrical circuit for the ferroelectric nanoparticle capacitor device of FIG. 7a. [Figure 8a] FIG. 1 illustrates a ferroelectric nanoparticle capacitor device according to an embodiment in which the channel of a transistor forms the conductive element of the ferroelectric nanoparticle capacitor device. [Figure 8b] FIG. 8b shows an equivalent electrical circuit for the ferroelectric nanoparticle capacitor device of FIG. 8a. [Figure 9a] FIG. 10 illustrates a ferroelectric nanoparticle capacitor device according to another embodiment, in which the ferroelectric nanoparticles provide four polarization states. [Figure 9b] FIG. 9b shows the four polarization states of the ferroelectric nanoparticles of FIG. 9a. [Figure 9c]FIG. 10 illustrates a ferroelectric nanoparticle capacitor device according to another embodiment, in which the ferroelectric nanoparticles provide four polarization states. [Figure 9d] FIG. 9c shows the four polarization states of the ferroelectric nanoparticles of FIG. [Figure 10a] 9a or 9c show charge-voltage hysteresis loops associated with the polarization states of ferroelectric nanoparticles and pathways for addressing and / or switching the polarization states according to embodiments corresponding to FIG. 9a or FIG. 9c. [Figure 10b] 9a or 9c, showing charge-voltage hysteresis loops associated with the polarization states of ferroelectric nanoparticles according to another embodiment, and pathways for addressing and / or switching the respective polarization states. [Figure 10c] 9a or 9c, showing charge-voltage hysteresis loops associated with the polarization states of ferroelectric nanoparticles according to another embodiment, and pathways for addressing and / or switching the respective polarization states. [Figure 10d] 9a or 9c, showing charge-voltage hysteresis loops associated with the polarization states of ferroelectric nanoparticles according to another embodiment, and pathways for addressing and / or switching the respective polarization states. [Figure 10e] 9a or 9c, showing charge-voltage hysteresis loops associated with the polarization states of ferroelectric nanoparticles according to another embodiment, and pathways for addressing and / or switching the respective polarization states. [Figure 10f] 9a or 9c, showing charge-voltage hysteresis loops associated with the polarization states of ferroelectric nanoparticles according to another embodiment, and pathways for addressing and / or switching the respective polarization states. [Figure 10g] 9a or 9c, showing charge-voltage hysteresis loops associated with the polarization states of ferroelectric nanoparticles according to another embodiment, and pathways for addressing and / or switching the respective polarization states. [Figure 10h]9a or 9c, showing charge-voltage hysteresis loops associated with the polarization states of ferroelectric nanoparticles according to another embodiment, and pathways for addressing and / or switching the respective polarization states. [Figure 11] FIG. 1 illustrates a method according to one embodiment. [Figure 12a] 1A-1D illustrate ferroelectric nanoparticle capacitor devices according to different embodiments. [Figure 12b] 1A-1C illustrate another diagram of a ferroelectric nanoparticle capacitor device according to a different embodiment. [Figure 13] 1A-1C illustrate another diagram of a ferroelectric nanoparticle capacitor device according to a different embodiment. [Figure 14a] 1A-1C illustrate another diagram of a ferroelectric nanoparticle capacitor device according to a different embodiment. [Figure 14b] 1A-1C illustrate another diagram of a ferroelectric nanoparticle capacitor device according to a different embodiment. [Figure 15a] 10A-10C illustrate process steps for applying pulses and / or pulse sequences having durations of less than 1 μs to a conductive element according to different embodiments. [Figure 15b] 10A-10C illustrate another process step of applying pulses and / or pulse sequences having durations of less than 1 μs to a conductive element according to different embodiments. [Figure 16a] 10A-10C illustrate another process step of applying pulses and / or pulse sequences having durations of less than 1 μs to a conductive element according to different embodiments. [Figure 16b] 10A-10C illustrate another process step of applying pulses and / or pulse sequences having durations of less than 1 μs to a conductive element according to different embodiments. [Figure 17a] 10A-10C illustrate another process step of applying pulses and / or pulse sequences having durations of less than 1 μs to a conductive element according to different embodiments. [Figure 17b]10A-10C illustrate another process step of applying pulses and / or pulse sequences having durations of less than 1 μs to a conductive element according to different embodiments. [Figure 17c] 10A-10C illustrate another process step of applying pulses and / or pulse sequences having durations of less than 1 μs to a conductive element according to different embodiments. [Figure 18a] 10A-10C illustrate another process step of applying pulses and / or pulse sequences having durations of less than 1 μs to a conductive element according to different embodiments. [Figure 18b] 10A-10C illustrate another process step of applying pulses and / or pulse sequences having durations of less than 1 μs to a conductive element according to different embodiments. [Figure 18c] 10A-10C illustrate another process step of applying pulses and / or pulse sequences having durations of less than 1 μs to a conductive element according to different embodiments. [Figure 19a] 1A-1D illustrate methods for operating ferroelectric nanoparticle capacitor devices according to different embodiments. [Figure 19b] 5A-5C are other diagrams illustrating methods for operating ferroelectric nanoparticle capacitor devices according to different embodiments. [Figure 20] 5A-5C are other diagrams illustrating methods for operating ferroelectric nanoparticle capacitor devices according to different embodiments. DETAILED DESCRIPTION OF THE INVENTION

[0127] FIG. 1 is a schematic diagram of a ferroelectric nanoparticle capacitor device 100 according to a first embodiment.

[0128] The ferroelectric nanoparticle capacitor device 100 comprises two conductive elements 102, 112 in the form of conductive layers 102, 112 and ferroelectric nanoparticles 104a, 104b therebetween.

[0129] The conductive layers 102, 112 or their respective surfaces 108, 118 extend along horizontal and lateral directions x, y, respectively, and are therefore parallel to each other along those directions x, y.

[0130] Along the vertical longitudinal direction z, the conductive layers 102, 112 or their respective surfaces 108, 118 are spaced apart from each other by a distance d of 1 nm to 100 nm.

[0131] The conductive layer may comprise a noble metal (such as Cu or Au) as well as tantalum and / or titanium or their respective nitrides, and / or other metallic or semiconductor materials.

[0132] The ferroelectric nanoparticles 104a, 104b are each made of a ferroelectric material. In the illustrated embodiment, the ferroelectric nanoparticles 104a, 104b are made of the same ferroelectric material.

[0133] Ferroelectric materials have a nonlinear dependence of their polarization on the electric field, P=±P s +ε0ε f E, where ±P s is the spontaneous polarization, oriented parallel or antiparallel to the electric field E, respectively, ε0 is the vacuum permittivity, and ε f is the dielectric constant of the ferroelectric material. The switching between different spontaneous polarization directions in a ferroelectric material is achieved by the coercive field E c For simplicity, the coercive field is also called the coercive force.

[0134] The ferroelectric material of the ferroelectric nanoparticles includes Pb(Zr,Ti)O3, PbTiO3, or other ferroelectric oxides, HfO2, particularly doped HfO2, for example with zirconium, BaTiO3, Ba(Sr,Ti)O3, or other ferroelectric oxides, such as P(VDF-TrFE). Alternatively or additionally, this includes superferroelectric materials, such as LiZnAs, LiBeSb, NaZnSb, and LiBeBi. In superferroelectric materials, the coercivity can achieve values substantially greater than the depolarizing field, which enables easy selection of the desired relative magnitudes of Qc and Qs, for example, by controlling temperature and strain to tune the system.

[0135] Each of the ferroelectric nanoparticles 104a, 104b is small enough to support a monodomain ferroelectric state. To this end, the ferroelectric nanoparticles 104a, 104b are formed with their maximum extension (i.e., bulk diagonal) of 100 nm, 50 nm, 30 nm, 20 nm, or 10 nm or less, depending on the ferroelectric material of the ferroelectric nanoparticles 104a, 104b. Typical sizes of the ferroelectric nanoparticles 104a, 104b are 1 nm, 5 nm, 10 nm, 50 nm, or 100 nm.

[0136] The ferroelectric nanoparticles 104a, 104b shown are in one of three possible ferroelectric polarization states 106, also referred to as polarization states 106 below for brevity.

[0137] The polarization state 106 refers to the overall polarization state 106 of the ferroelectric nanoparticles 104a, 104b, ie, the combination of the individual (ie, ferroelectric) polarization states of the ferroelectric nanoparticles 104a, 104b.

[0138] More specifically, the polarization state 106 refers to the projection of the total (i.e., net, overall) polarization of the ferroelectric nanoparticles 104a, 104b onto the z axis. In other words, the polarization state 106 refers to the z component of the total polarization.

[0139] Correspondingly, the individual polarization states refer to the projection of the individual polarizations of the ferroelectric nanoparticles 104a, 104b onto the axis z.

[0140] The illustrated polarization state 106 is characterized by antiparallel individual polarization states of the ferroelectric nanoparticles 104a, 104b, with the individual polarization of the ferroelectric nanoparticles 104a along the z axis (i.e., parallel) and the individual polarization of the ferroelectric nanoparticles 104b antiparallel to the z axis. The same polarization state, i.e., a state having the same z component of the total polarization, is achieved when the individual polarization of the ferroelectric nanoparticles 104b is along the z axis and the individual polarization of the ferroelectric nanoparticles 104a is antiparallel to the z axis. In the illustrated embodiment, these two configurations are equivalent because the ferroelectric nanoparticles 104a are equivalent, i.e., have the same individual polarization. Thus, the two configurations establish a first of the polarization states 106.

[0141] The second polarization state 106 is achieved when the individual polarizations of the ferroelectric nanoparticles 104a, 104b are both along the axis z.

[0142] The third polarization state 106 is achieved when the individual polarizations of the ferroelectric nanoparticles 104a, 104b are both antiparallel to the axis z.

[0143] The ferroelectric nanoparticle 104a is sandwiched between the first sections 110a, 120a of the conductive layers 102, 112. Conversely, the first sections 110a, 120a of the conductive layers 102, 112 or of their corresponding surfaces correspond to the projection of the ferroelectric nanoparticle 104a onto the conductive layers 102, 108, respectively.

[0144] The first sections 110 a , 120 a of the conductive layers 102 , 112 and the ferroelectric nanoparticles 104 a form a first ferroelectric capacitor 124 .

[0145] Correspondingly, the second first sections 110b, 120b of the conductive layers 102, 112 are associated with the ferroelectric nanoparticles 104b. The second first sections 110b, 120b of the conductive layers 102, 112 and the ferroelectric nanoparticles 104b form a second ferroelectric capacitor 126.

[0146] The first sections 110a, 110b of the first conductive layer 102 have a total area 110 that corresponds to the projection of the ferroelectric nanoparticles 104a, 104b, respectively, onto the first conductive layer 102 or onto its surface 118. In the context of the present disclosure, this area 110 is referred to as the total surface projected area of the ferroelectric nanoparticles 104a, 104b.

[0147] Alternatively, the total surface projected area 110, 120 of the ferroelectric nanoparticles 104a, 104b is defined by the projection 120 of the ferroelectric nanoparticles 104a, 104b onto the second conductive layer 112. Alternatively, the surface projected area 110, 120 of the ferroelectric nanoparticles 104a, 104b is defined by the sum of the areas of the ferroelectric capacitors 124, 126 defined by the ferroelectric nanoparticles 104a, 104b.

[0148] The area of each of the conductive layers 102, 122 exceeds the total surface projected area 110, 120 of the ferroelectric nanoparticles 104a, 104b. As a result, excess portions 102', 112' of the conductive layers 102, 122 extend beyond the first sections 110a, 110b, 120a, 110b.

[0149] These excess portions 102', 112' form a dielectric capacitor 130, ie a capacitor with a linear charge-voltage characteristic or without (significant) hysteresis.

[0150] In the illustrated embodiment, the dielectric capacitor 130 includes a dielectric material 122 disposed between the second portions 102′, 112′ of the conductive layers 102, 112. In the illustrated embodiment, the dielectric material 122 fills the entire space between the excess portions 102′, 112′ of the conductive layers 102, 112 such that the second portions 102′, 112′ are identical to the excess portions 102′, 112′ of the conductive layers 102, 112.

[0151] The dielectric material 122 is subjected to an applied electric field, P=ε0ε d It is characterized by a linear dependence of its polarization on E, where ε d is the dielectric constant of the dielectric material 122. According to an embodiment, the dielectric material includes a high-κ dielectric such as Al2O3, Li2O, HfSiO4, Sc2O3, SrO, ZrO2, YO3, BaO, Ta2O5, BaO, WO3, MoO3, TiO2, SrTiO3, or DyScO3. The dielectric material 122 may also include a low-κ dielectric such as SiO2 or an organic dielectric. In an alternative embodiment, the dielectric material 122 is implemented as an air gap that can be filled with a displacement gas or vacuum.

[0152] In the illustrated embodiment, the dielectric material 122 serves as a dielectric separator material 122 for separating the ferroelectric nanoparticles 104 a, 104 b from one another. To this end, the dielectric material 122 is disposed between the ferroelectric nanoparticles 104 a, 104 b and surrounds the ferroelectric nanoparticles 104 a, 104 b individually in the horizontal / lateral plane x, y.

[0153] The ferroelectric nanoparticle capacitor device 100 is fabricated using existing nanofabrication procedures, particularly those developed in the semiconductor industry. These procedures enable the fabrication of complex designs with increased precision and reliability. For example, advances in manufacturing enable the creation of three-dimensional designs of the ferroelectric nanoparticle capacitor device 100 on a suitable substrate support. Exemplary single-crystal semiconductor substrates, each with a selected type of doping or conductivity (e.g., n-conductivity), are commercially available from a variety of sources. The appropriate geometric design is achieved by appropriate lithography and etching techniques, such as electron beam lithography and ion etching. The conductive elements 102, 112 are produced by CVD and PVD methods and / or other suitable processes. After deposition of the first conductive elements 102, 112, a ferroelectric layer is disposed thereon, for example, using ALD methods and / or other suitable processes. The constituent ferroelectric nanoparticles 104a, 104b are structured from the ferroelectric layer individually or together, for example, in a single structuring step. In the former case, the geometric configuration at each stage is designed using appropriate lithography techniques, such as extreme ultraviolet or electron beam lithography. A dielectric material 122 is grown on the first conductive elements 102, 112, for example, by ALD methods. The second conductive elements 102, 112 are deposited. Optional interconnect structures are formed on or in the substrate to form gate, source, and drain wiring connections, for example, by CVD and PVD methods. The patterning and architecture of device 100 should be implemented, for example, by the Cadence Allegro software package and / or other suitable packages.

[0154] To explain the mechanism of action of the ferroelectric nanoparticle capacitor device 100, Figures 2a and 2b refer to the situation of a single ferroelectric nanoparticle 104a between conductive elements 102, 112, with a charge control device 114 electrically connected to one of the conductive elements 102, 112.

[0155] As shown in Figure 2a, a ferroelectric nanoparticle 104a is uniformly polarized and confined between two conductive elements 102, 112, carrying an electric charge 132. It can reside in one of two individual (ferroelectric) polarization states 106a: a state (+1) with polarization oriented "up" along the z-axis, and a state (-1) with polarization oriented "down." Thus, a single ferroelectric nanoparticle 104a between conductive elements 102, 112 implements two corresponding logic levels: |+1) and |-1).

[0156] As a result, the individual polarization states 106a can be controlled by the charge applied to the conductive elements 102, 112. Thus, a single ferroelectric nanoparticle 104a of Figure 2a confined between the conductive elements 102, 112 implements a binary (i.e., two-level) logic device with logic levels |+1) and |-1).

[0157] Hereinafter, a charge control device 114 having an electrical connection 114a to at least one of the conductive elements 102, 112 is used to control the charge on each conductive element 102, 112, and therefore the individual polarization states 106a of the ferroelectric nanoparticles 104a, or polarization states 106 of FIG. 1. This approach differs from conventional techniques that control the voltage on the conductive elements. Advantageously, the charge control and charge control device 114 address the nanoparticles 104a or nanoparticles 104a, 104b of FIG. 1 and their respective polarization states 106a, 106a much more reliably than conventional techniques based on voltage control.

[0158] Importantly, the effective electric field E that drives the polarization of the ferroelectric nanoparticle 104a is not only the electric field induced by the charge 132 on the conductive plate, but also the bound charge Q that appears at the termination point of the polarizing magnetic field lines located at the interface between the ferroelectric nanoparticle 104a and the conductive elements 102, 112. s =SP s This also includes the depolarizing electric field induced by P s refers to the spontaneous polarization of the ferroelectric nanoparticle associated with the polarization state 106a. The voltage-charge relationship of a single ferroelectric nanoparticle capacitor is Cf V=Q±Q s where V is the voltage and C f =ε0ε f S / d is the capacitance of the ferroelectric material, and the sign ± corresponds to the "up" (+1) or "down" (-1) orientation of the polarization 106a.

[0159] FIG. 2b shows the electrostatic energy W corresponding to the (+1) and (−1) polarization states 106a of FIG. 2a as a function of applied charge Q. ± =(Q±Q s ) 2 / 2C f They are ±Q with respect to Q=0. s The minimum corresponds to the situation where the charge on the conductive elements 102, 112 exactly compensates for the bound charge, resulting in a zero internal electric field. 1,2 The critical charge N0 corresponding to the switching from (-1) to (+1) and from (+1) to (-1) corresponds to the situation where the polarization state 106a in a certain polarization direction becomes unstable with respect to switching the polarization state 106a to the opposite polarization direction. 1,2 =±(Q s -Q c ) respectively, where Q c =C f E c d. This energy profile results in a charge-voltage 2 branch with upper and lower branches corresponding to polarization states 106a, or logic levels |+1) and |-1), respectively.

number

[0160] Figure 3 shows the effective electrical circuit of the ferroelectric nanoparticle capacitor device 100 of Figure 1. The ferroelectric nanoparticle capacitor device 100 includes two ferroelectric capacitors 124, 126, each having a capacitance Cf. It further includes a dielectric capacitor 130, having a capacitance Cd, connected in parallel to the ferroelectric capacitors 124, 126.

[0161] The effective electrical circuit further comprises a charge control element 114 in electrical contact 114a with at least one of the conductive elements 102, 112. The charge control element 114 is adapted to apply a charge Q to the conductive element 102, 112 to which it is connected.

[0162] Importantly, the charge Q applied to the conductive elements 102, 112 can be distributed non-uniformly across the conductive elements 102, 112, with the charge Q being distributed non-uniformly across the conductive elements 102, 112, such that the charge Q is distributed non-uniformly across the region of the first ferroelectric nanoparticle 104a (or on the first sections 110a, 120a of the conductive elements 102, 112, respectively, corresponding to the first ferroelectric capacitor 124). a , forming a charge Q in the region of the second ferroelectric nanoparticle 104b (or on the sections 110b, 120b of the conductive elements 102, 112, respectively, corresponding to the second ferroelectric capacitor 126). b , and the region of the dielectric material 130 (or on the second or excess portion 102′, 112′ of the conductive layers 102, 112, respectively, corresponding to the dielectric capacitor 130) d Form.

[0163] The charge on the corresponding capacitors 124, 126, and 130, Q a , Q b , and Q d is determined by the equivalence of the potentials at the plates of the capacitor, and Q a +Q b +Q d Taking into account the condition =Q,

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[0164] FIG. 4a shows the emerging polarization states 106 and their total energy W.

[0165] In the following, the term "level" refers to a logical level, and the two terms are used equivalently.

[0166] The levels are represented by the polarization states 106 of the ferroelectric nanoparticles 104a, 104b, and vice versa. In other words, the polarization states 106 provide the levels. For this reason, the terms "level" and "polarization state" may be used interchangeably.

[0167] The polarization states 106 are preferentially discrete polarization states 106, e.g., in the sense that switching between two different polarization states 106 is characterized by a subtle abrupt change in the ferroelectric polarization. In other words, the ferroelectric nanoparticles 104a, 104b are adapted not to assume any stable ferroelectric polarization between one of the discrete polarization states 106.

[0168] The polarization state 106 is a total energy that provides the energy corresponding to one of the three states 106, |-1), |0), and |+1), that define the logic levels.

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[0169] 4a, 5a, and 6a show the above-mentioned energy profiles W for polarization states 106, |-1), |0), and |+1). +1 (Q), W0(Q), W -1 (Q). Figures 4b, 5b, and 6b respectively show the corresponding three-branch hysteresis loop and the paths for addressing or switching between polarization states 106, |-1), |0), and |+1). The polarization states 106, |-1), |0), and |+1), are the three branches of the charge-voltage characteristic.

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[0170] Figures 4a, 4b, 5a, 5b, 6a, and 6b represent the three existing different regimes of hysteresis loop topology, determined by the relative strengths of the effective charge parameters Qc and Qs.

[0171] The energy profiles and transition orders of polarization states 106, |-1), |0), and |+1) are s >Q c >2Q s 4a and 4b for the case of N. The end point N corresponds to the switching instability of one of the ferroelectric nanoparticles 104a, 104b towards the lowest energy state with opposite polarization 106. The corresponding hysteresis loop with sequential switching between logic levels |-1), |0), and |+1) at the critical charges Q1, Q2, Q3, and Q4 is shown in FIG.

[0172] Figures 5a and 5b show this condition Q c >3Q s The energy profile and charge-voltage characteristics realized below are shown. It has three logic levels, |-1), |0), and |+1), realized at Q=0. However, the intermediate ferroelectric polarization state |0) is topologically unstable in the sense that once switching from this logic level to either |-1) or |+1) occurs, the system cannot be returned to the |0) logic level, and a two-branch hysteresis loop involving switching between the minimum ferroelectric polarization state |-1) and the maximum ferroelectric polarization state |+1) becomes the only valid regime. However, switching the system to the "hidden" logic level |0) can be achieved by changing external parameters other than charging, for example, by thermal cycling, which involves passing through a high-temperature paraelectric state.

[0173] Figures 6a and 6b show this condition Q c <2Q sThe energy profile and charge-voltage characteristics achieved are shown below. At zero charge there is only one logic level (|0), but hysteretic switching occurs at finite charge, thus implementing a three-position relay element, also known as a Schmitt trigger.

[0174] Importantly, the hysteresis loops shown in Figures 4b (Figure 4a), 5b (Figure 5a), and 6b (Figure 6a) realize the full set of topologically possible switching in three-level logic [Baudry, L., Lukyanchuk, I., and Vinokur, V. Sci. Rep. 7, 42196 (2017)]. In our embodiment, it is the relationship between the key material-dependent parameters Qs and Qc that determines which type of logic is realized. Specific switching characteristics / protocols can be achieved by selecting the desired ratio between the parameters Qs and Qc or by appropriately selecting the size and material composition of the ferroelectric nanoparticles 104a and 104b, respectively.

[0175] FIG. 7a shows an embodiment of a ferroelectric nanoparticle capacitor device 100 similar to that of FIG. 1, which alternatively implements the hysteresis loops shown in FIG. 4b (FIG. 4a), FIG. 5b (FIG. 5a), and FIG. 6b (FIG. 6a).

[0176] 1, the ferroelectric nanoparticle capacitor device 100 of FIG. 7a is formed with various modifications and includes a charge control device 104 consisting of an additional conductive element 202 and a dielectric spacer 204. Additionally, the ferroelectric nanoparticle capacitor device 100 of FIG. 7a includes a temperature control element 206. It also includes a force control element 210. According to various embodiments (not shown), the ferroelectric nanoparticle capacitor device 100 is formed with any, any combination, or all of the described modifications (charge control device 104 and / or temperature control element 206 and / or force control element 210).

[0177] The charge control device 104 includes an additional conductive element 202 disposed below the first conductive element 102, opposite the second conductive element 112 disposed above the first conductive element 102.

[0178] The charge control device 104 further comprises a dielectric spacer 204 formed as a layer 204 of dielectric material between the first conductive element 102 and the additional conductive element 202 to electrically insulate them from each other. The dielectric spacer 204 is made of any of the dielectric materials mentioned above, preferentially including SrTiO3, SiO2, Si3N4, or HfO2.

[0179] The charge control device 104 is operated by applying a voltage between the additional conductive element 202 and the second conductive element 112, while the first conductive element 102 is held at a fixed charge (e.g., electrically floating), thereby applying a charge to the second conductive element 112.

[0180] The temperature control element 206 is implemented as a heater 206, more specifically, an ohmic heater 206. The heater 206 is disposed below the conductive elements 102, 112 and heats the respective conductive elements 102, 112 and therefore the ferroelectric nanoparticles 104a, 104b. The temperature change of the ferroelectric nanoparticles 104a, 104b can be in the range of 10 to 300 Kelvin.

[0181] The ferroelectric nanoparticle capacitor device 100 of FIG. 7 a further comprises a substrate 208 for supporting the ferroelectric nanoparticle capacitor device 100 .

[0182] The substrate is disposed below the conductive elements 102, 112 and, if present, below the additional conductive element 202. The substrate is in thermal contact with one of the (first, second, or additional) conductive elements 102, 112, 202 by direct physical contact or indirect contact, for example, via a thermally conductive material such as a metal or a sufficiently thin (<100 nm or <20 nm) intermediate layer.

[0183] Heating the substrate 208 using a heater 223 results in mechanical deformation 212 in the form of expansion 212, which induces strain in the ferroelectric nanoparticles 104a, 104b. Alternatively, strain can be induced by the piezoelectric effect that occurs when an electric field is applied to the substrate 208. For example, the induced strain can be in the range of 0.001-0.1% of the crystal lattice constant.

[0184] The temperature control element 206 and / or the force control element 210 allow for tuning of the interrelationship between the parameters Qs and Qc via external stimuli, temperature and / or strain. They therefore allow for on-the-fly modification of the switching logic of the device 100. This tuning can be achieved by taking into account the different temperature and strain dependencies of these parameters. So-called superelastic materials, such as LiZnAs, LiBeSb, NaZnSb, and LiBeBi, are particularly interesting for implementing ferroelectric nanoparticles 104a, 104b because in these materials, the coercive field can achieve values substantially greater than the depolarizing field, and the relative magnitudes of the parameters Qs and Qc can be varied over a fairly wide range.

[0185] FIG. 7b shows an equivalent electrical circuit of the ferroelectric nanoparticle capacitor device 100 of FIG. 7a. The additional conductive element 202 and the dielectric spacer 204 form an additional capacitor 214 having a capacitance Ci. The additional capacitor 214 shares the first conductive element 102 with the capacitors 124, 126, and 130. Thus, the equivalent electrical circuit comprises the series-connected capacitors 124, 126, and 130 (defined by the conductive elements 102 and 112) and the additional capacitor 214 (defined by the conductive elements 102 and 202). The second conductive element 112 and the additional conductive element 202 receive an input voltage Vin between them. The charge on the conductive elements 102 and 112 induced by the voltage Vin is given by the equation Vin = Q / Ci + V(Q), where V(Q) is the voltage determined by the charge-voltage characteristics as illustrated in FIGS. 4b, 5b, and 6b. This relationship becomes particularly simple and transforms to Q≈CiVin when the effective capacitance of the parallel arrangement of capacitors 124, 126, 130 substantially exceeds the capacitance of the additional capacitor 214. The charge controlling the polarization state 106 of the ferroelectric nanoparticles 104a, 104b is directly regulated by the voltage Vin applied to the second conductive element 112 and the additional conductive element 202.

[0186] Figure 8a shows the integration of a ferroelectric nanoparticle capacitor device 100 into a field effect transistor 300, which alternatively implements the hysteresis loops shown in Figures 4b (Figure 4a), 5b (Figure 5a) and 6b (Figure 6a). Figure 8b shows the equivalent electrical circuit of the device 100 of Figure 8a.

[0187] The field effect transistor 300 comprises source / drain regions 304, 306, a channel 302 extending between the source / drain regions 304, 306, and a gate stack 308 disposed above the channel 302. The field effect transistor 300 further comprises a grounded body electrode 312.

[0188] The channel 302 functions as the additional conductive element 202 described in the context of FIG. 8a.

[0189] The gate dielectric 204 is a high-κ dielectric layer that prevents charge leakage between the first conductive element 102 and the channel 302 .

[0190] The gate stack comprises a gate dielectric 204 provided by dielectric spacers 204 and at least one electrode. In the illustrated embodiment, at least one electrode of the gate stack 308 is provided by a ferroelectric nanoparticle capacitor device 100 similar to that of FIG. 1. More specifically, the second conductive element 112 of the ferroelectric nanoparticle capacitor device 100 serves as the gate electrode of the transistor 300 and is connected to a driving voltage V in Preferably, the drive voltage V in is applied between the second conductive element 112 and the additional conductive elements (channels) 202, 302 to implement the charge control device 114 described above in the context of FIG. 7a.

[0191] As discussed above in the context of the previous embodiment, the first conductive element 102 is held at a constant charge, e.g., remains electrically isolated and floating. This therefore serves to stabilize the polarization 106 of the ferroelectric nanoparticles 104 a, 104 b. Furthermore, the floating first conductive element 102 homogenizes the potential along the interface between the ferroelectric nanoparticles 104 a, 104 b and the first conductive element 102, thus maintaining a uniform electric field across the gate stack 308 and the substrate 304.

[0192] Drive voltage V in Under the appropriate protocol for the variation of the voltage V operating the current in channel 302 out The gradual switching of realizes a multilevel logic switching sequence corresponding to one of the topologically possible hysteresis loops (see FIGS. 4a-6b). The logic level switching sequence can be modified by external stimuli, e.g., temperature or strain, as described above in the context of FIGS. 7a-7b, allowing for on-the-fly modification of the switching logic of the ferroelectric nanoparticle capacitor device 100.

[0193] According to a different embodiment, the ferroelectric nanoparticle capacitor device 100 is formed using the temperature control element 206 and / or the force control element 210 described above in the context of Figure 7a, for example integrated in or below the substrate 312 instead of the substrate 312. In the latter embodiment, a substrate 312 with high thermal conductivity is applied.

[0194] Figures 9a and 9c show an embodiment of a ferroelectric nanoparticle capacitor device 100 for implementing a topologically configurable four-level logic unit, and Figures 9b and 9d show the respective polarization states 106 representing the four logic levels.

[0195] 9a shows a ferroelectric nanoparticle capacitor device 100 having three identical, e.g., cylindrical, ferroelectric nanoparticles 104a, 104b, 104c between conductive elements 102, 112. The ferroelectric nanoparticles 104a, 104b, 104c provide equal coercive fields and equal cross-sectional areas.

[0196] In the illustrated embodiment, a dielectric separator material 122 fills the remaining space between the conductive elements 102,114.

[0197] The system is driven and controlled by a charge Q placed on at least one of the conductive elements 102, 114 using a charge control element 114 as described above.

[0198] As shown in FIG. 9b, the ferroelectric nanoparticle capacitor device 100 of FIG. 9a provides polarization states ((+++), (++-) (or equivalently, (+-+) and (-++), (+--)), or equivalently (-+-) and (--+), and finally (---), where the downward arrow (or upward arrow) in FIG. 9b represents a negative "-" or positive "+" polarization relative to the z-axis.

[0199] As a result, the ferroelectric nanoparticle capacitor device 100 of FIG. 9a implements four-level logic characterized by logic levels |+2), |+1), |-1), and |-2), respectively.

[0200] 9c shows another embodiment of a ferroelectric nanoparticle capacitor device 100 for implementing a four-level logic device, in which two unequal ferroelectric nanoparticles 104a, 104b are disposed between conductive elements 102, 112 and coated with a dielectric separator material 122. The ferroelectric nanoparticles 104a, 104b can be made from different ferroelectric materials and can have different sizes.

[0201] Figure 9d shows the polarization states 106 of the ferroelectric nanoparticles 104a, 104b of Figure 9c, which are similar to the polarization states 106 of Figure 4a associated with the ferroelectric nanoparticles 104a, 104b, 104c of Figure 1. However, in Figure 9d, the states (+-) and (-+) are not equivalent, so the four polarization states 106 implement the logic levels of a four-level logic unit: (--)⇔|-2), (-+)⇔|-1), (+-)⇔|+1), and (++)⇔|+2).

[0202] Except for the number or size / material composition of the ferroelectric nanoparticles 104a, 104b, 104c, the embodiment of Figures 9a, 9c is similar to the embodiment of Figure 1. In an alternative embodiment (not shown), the ferroelectric nanoparticles 104a, 104b, 104c (i.e., in their respective numbers or with their respective sizes / material compositions) described in the context of Figures 9a or 9c are applied to a ferroelectric nanoparticle capacitor device 100 similar to the embodiment of Figure 7a or 8a.

[0203] Figures 10a, 10b, 10c, 10d, 10e, 10f, 10g, and 10h show charge-voltage hysteresis loops associated with the polarization states 106 of a ferroelectric nanoparticle capacitor device 100 similar to those of Figure 9a or 9c.

[0204] Similar considerations as those described above for the three-level logic unit indicate that the hysteresis loop V(Q) of the four-level configuration of ferroelectric nanoparticles 104a, 104b has four branches corresponding to the logic levels 116, |+2), |+1), |-1), and |-2). Figures 10a, 10b, 10c, 10d, 10e, 10f, 10g, and 10h show all possible hysteresis loops with different switching sequences in four-level logic [Baudry, L., Lukyanchuk, I., and Vinokur, V. Sci. Rep. 7, 42196 (2017)].

[0205] FIG. 10a shows a charge-voltage hysteresis loop with sequential switching between logic levels / polarization states 106, |+2), |+1), |-1), and |-2), driven by varying the charge Q in the conductive elements 102, 112.

[0206] The charge-voltage hysteresis loops of Figures 10a, 10b, 10c, and 10d correspond to the design of a four-level logic memory or other processing protocol having different switching sequences between the available logic levels / polarization states 106, |+2), |+1), |-1), and |-2), or different topological ways of accessing the information stored in these logic levels / polarization states 106, |+2), |+1), |-1), and |-2).

[0207] The charge-voltage hysteresis loops of Figures 10e and 10f include "hidden" logic levels |-1), |1). Such protocols can be used when information stored in the "hidden levels" |-1), |1) needs to be protected from unwanted changes and other interference. Any attempt to access these levels |-1), |1) immediately switches the corresponding information unit to another level |-2), |2) and cannot be restored. Thus, the charge-voltage hysteresis loops provide security for the ferroelectric nanoparticle capacitor device 100, a particularly novel feature of our disclosure.

[0208] The charge-voltage hysteresis loops of Figures 10g and 10h implement a multilevel Schmitt trigger, which is required for multiple applications in electronics.

[0209] The ferroelectric nanoparticle capacitor device 100 of Figure 9a or 9c is enabled to implement any preselected charge-voltage hysteresis loop of those represented in Figures 10a, 10b, 10c, 10d, 10e, 10f, 10g, and 10h by selecting the appropriate size and material composition of the ferroelectric nanoparticles 104a, 104b, 104c.

[0210] Control of the external stimuli, e.g., temperature or strain as described above in the context of Figures 7a and 8b, the charge-voltage hysteresis loop, and the switching sequence between logic levels / polarization states 106, |+2), |+1), |-1), and |-2), can be selected and modified on the fly, i.e., after fabrication of the ferroelectric nanoparticle capacitor device 100 with a given size and material composition of the ferroelectric nanoparticles 104a, 104b, 104c.

[0211] Similarly, the charge-voltage hysteresis loop can be controlled for ferroelectric nanoparticle capacitor devices 100 containing more than three ferroelectric nanoparticles 104a, 104b, 104c, e.g., four, five, or any greater number. The charge-voltage hysteresis loop can be initially controlled by selecting the appropriate number of suitable ferroelectric nanoparticles 104a, 104b, 104c and their size and material composition. Subsequent on-the-fly control is achieved by incorporating temperature control elements 206 or force control elements, as described above. A smaller number of ferroelectric nanoparticles 104a, 104b, 104c, such as 10, 5, 4, or up to 3 ferroelectric nanoparticles 104a, 104b, 104c, is preferred to ensure sufficient spacing between polarization states 106 in terms of total energy W, voltage V, and / or charge Q. In other words, the number of polarization states 106 must be limited, e.g., to a maximum of 64, 32, 16, 8, or 5 polarization states 106. The fewer the number of ferroelectric nanoparticles 104a, 104b, 104c and / or the number of polarization states 106, the more reliable the switching and reading of the polarization states 106.

[0212] Embodiments having more than three ferroelectric nanoparticles 104a, 104b, 104c use the (ferroelectric and / or dielectric) materials and temperature and / or strain ranges described above. The remaining device parameters are similar to those described above. Devices including any other number of nanoparticles and their configurations realize multilevel logic units with more complex paths for the charge-voltage hysteresis loop, thus enabling even higher levels of neuromorphic computing.

[0213] FIG. 11 shows a method 400 for operating the ferroelectric nanoparticle capacitor device 100 .

[0214] The ferroelectric nanoparticle capacitor device 100 is similar to one of the ferroelectric nanoparticle capacitor devices 100 described above in the context of Figures 1, 7a, 8a, 9a, or 9c. Any of these ferroelectric nanoparticle capacitor devices 100 provide a maximum ferroelectric polarization state (and a minimum ferroelectric polarization state) having a maximum (and minimum) ferroelectric polarization, such that none of the at least three polarization states has a ferroelectric polarization greater than (or less than, respectively) the maximum ferroelectric polarization state (or the minimum ferroelectric polarization state). Additionally, any of these ferroelectric nanoparticle capacitor devices 100 provide intermediate ferroelectric polarization states having a polarization between the minimum and maximum ferroelectric polarization.

[0215] In step 402, the method 400 includes selecting an intermediate ferroelectric polarization state.

[0216] In step 404, the method 400 includes selecting a first voltage or charge according to the selected intermediate ferroelectric polarization state.

[0217] In step 406, the method 400 includes applying a first voltage or charge to the pair of conductive elements 102, 112 to set the ferroelectric nanoparticles 104a, 104b, 104c to a selected intermediate ferroelectric polarization state.

[0218] Preferentially, the current polarization state 106 of the ferroelectric nanoparticles 104a, 104b, 104c is detected based on the voltage of at least one of the conductive elements 102, 112. For this purpose, the voltage between the conductive elements 102, 112 is measured, which corresponds to a voltage in the charge-voltage hysteresis loop described above. Thus, for a given device, the measured voltage is directly related to the polarization state 106.

[0219] Alternatively, the current polarization state 106 of the ferroelectric nanoparticles 104a, 104b, 104c is detected based on a change in the voltage of at least one of the conductive elements 102, 112, such as by counting jumps in the voltage of at least one of the conductive elements 102, 112. To this end, voltage measurements are performed continuously to identify changes in the voltage.

[0220] Of the two options for selecting the first voltage or charge, it is preferable to select the first charge, and correspondingly, it is preferable to apply the first charge.

[0221] The other conductive element 102, 112 of the pair is held at a constant charge.

[0222] Preferably, a first voltage or charge is applied between one of the conductive elements (i.e., the second conductive element 112 described above) and the additional conductive element 202, 302, preferably using the charge control device 114 described above.

[0223] When applied to a ferroelectric nanoparticle capacitor device 100 having a charge-voltage hysteresis loop such as that shown in Figure 10a, the voltage or charge applied to the conductive elements 102, 112 increases continuously until a first voltage or charge is reached. To reach a polarization state 106 having a greater or lesser (i.e., more negative) polarization, a greater or lesser voltage or charge is applied to the conductive elements 102, 112.

[0224] The voltage or charge applied to the conductive elements 102, 112 may then be reduced to zero, at which point the polarization state 106 remains maintained. Thus, the ferroelectric nanoparticle capacitor device 100 implements a non-volatile memory that can be used to store information without the support of external power, voltage, or charge.

[0225] When applied to a ferroelectric nanoparticle capacitor device 100 having a charge-voltage hysteresis loop such as that shown in Figure 10b, to reach the intermediate ferroelectric polarization state |+1), the voltage or charge applied to the conductive elements 102, 112 must first be increased to a value positive enough to reach state |+2). The applied voltage is then reduced until a negative first voltage or charge is reached, setting the polarization to state |+1). A reverse voltage or charge sequence is applied to the conductive elements 102, 112 to reach the intermediate ferroelectric polarization state |-1).

[0226] When applied to a ferroelectric nanoparticle capacitor device 100 having a charge-voltage hysteresis loop such as that shown in FIG. 10c, to reach the intermediate ferroelectric polarization state |+1), the voltage or charge applied to the conductive elements 102, 112 must first be increased to a value positive enough to reach state |+2). The applied voltage is then reduced until the ferroelectric nanoparticles 104a, 104b, 104c switch to the |-1) state. The applied voltage is then increased until a positive first voltage or charge is reached, setting the polarization 106 to state |+1). A reverse voltage or charge sequence is applied to the conductive elements 102, 112 to reach the intermediate ferroelectric polarization state |-1).

[0227] In a ferroelectric nanoparticle capacitor device 100 having a "hidden state" as shown in the context of Figures 5b, 10e, and 10f, the polarization state 106 of the ferroelectric nanoparticles 104a, 104b, and 104c can be set to the hidden state using heating the ferroelectric nanoparticles 104a, 104b, and 104c and / or applying a mechanical force to the ferroelectric nanoparticles 104a, 104b, and 104c.

[0228] Alternatively, heating the ferroelectric nanoparticles 104a, 104b, 104c and / or applying a mechanical force to the ferroelectric nanoparticles 104a, 104b, 104c may be used to modify the charge-voltage hysteresis loop of the ferroelectric nanoparticle capacitor device 100.

[0229] FIG. 12a shows a ferroelectric nanoparticle capacitor device 100 according to another embodiment.

[0230] In the embodiment of Figure 12a, the first conductive element 102 comprises several sections 102a, 102b, 102c, 102d that are spatially separated from one another and electrically connected by conductive wires 502. The second conductive element 112 comprises several sections 112a, 112b, 112c, 112d that are spatially separated from one another and electrically connected by conductive wires 502. According to various embodiments (not shown), the first and / or second conductive elements 102 of the ferroelectric nanoparticle capacitor device 100 of Figure 1, 7a, 8a, 9a, 9c, 12b, 14a, or 14b are formed accordingly.

[0231] FIG. 12b shows a ferroelectric nanoparticle capacitor device 100 according to another embodiment.

[0232] In the embodiment of Figure 12b, the ferroelectric nanoparticles 104a, 104b, 104c, 104d, 104e, 104f are arranged between the conductive elements 112 in a two-dimensional lateral array. According to various embodiments (not shown), the ferroelectric nanoparticle capacitor device 100 of Figure 7a, 8a, or 12a is formed with a corresponding two-dimensional lateral array.

[0233] FIG. 13 shows a ferroelectric nanoparticle capacitor device 100 according to another embodiment.

[0234] According to a first variant, the ferroelectric nanoparticle capacitor device 100 comprises a sensing electrode 504 disposed in the vicinity of the first conductive element 102 and the ferroelectric nanoparticles 104a, 104b, and 104c. The sensing electrode 504 is used to detect the response of the ferroelectric nanoparticle capacitor device 100 when a charge or voltage is applied to the conductive elements 102, 112, and 202. For this purpose, a time-dependent electrical (e.g., voltage, charge, or current) signal at the sensing electrode 504 is transmitted via conductive lines to an additional component and received by the additional component for further analysis and / or processing. When the sensing electrode 504 is disposed in the vicinity of the conductive elements and the ferroelectric nanoparticles 104a, 104b, and 104c, the potential at the sensing electrode 504 is affected by the polarization states 106, 106a, 106b, 106c, and so on, and the time-dependent electrical signal reflects the polarization states 106, 106a, 106b, 106c, and so on, or a change therein, respectively. In embodiments without a sensing electrode 504, instead, a time-dependent electrical (eg, voltage, charge, or current) signal in one of the conductive elements 102, 112, 202 is used accordingly.

[0235] Preferably, the sensing electrodes 504 are made from a semiconductor material to minimize shielding of the electric field by the sensing electrodes 504. Alternatively, they are made from a conductive material.

[0236] The sensing electrodes are in contact with or embedded within the dielectric spacers 204 to ensure sufficient proximity to the conductive elements 102, 202.

[0237] In the illustrated embodiment, the ferroelectric nanoparticle capacitor device 100 includes multiple sensing electrodes 504. However, in an alternative embodiment (not shown), a single sensing electrode 504 is provided.

[0238] According to an alternative embodiment (not shown), one or more sensing electrodes 504 are formed in a ferroelectric nanoparticle capacitor device 100 similar to that of Figure 1, 7a, 8a, 9a, 9c, 12a, 12b, 14a, or 14b.

[0239] According to a second variant, the ferroelectric nanoparticle capacitor device 100 of FIG. 13 is formed with a plurality of additional conductive elements 202. The additional conductive elements 202 are electrically isolated from one another. As a result, a voltage or charge, such as a voltage or charge sequence or a voltage or charge pulse, can be applied individually to each of the additional conductive elements 202. According to an alternative embodiment (not shown), a corresponding plurality of additional conductive elements 202 is formed in the ferroelectric nanoparticle capacitor device 100 similar to that of FIG. 1, 7a, 8a, 9a, 9c, 12a, 12b, 14a, or 14b.

[0240] According to an alternative embodiment (not shown), the ferroelectric nanoparticle capacitor device 100 correspondingly comprises a plurality of first conductive elements 102 and / or a plurality of second conductive elements 112, whereby a voltage or charge can be applied individually to each of the respective plurality of conductive elements. Each plurality / plurality is optionally formed in each of the described embodiments of the ferroelectric nanoparticle capacitor device 100.

[0241] According to different embodiments, a ferroelectric nanoparticle capacitor device 100 similar to that of FIG. 13 is formed with only the first or second variant of FIG. 13 described above.

[0242] 14a and 14b show a ferroelectric nanoparticle capacitor device 100 with a spatially resolved input / output device 506 according to two different embodiments.

[0243] Each of the spatially resolved input / output devices 506 is adapted to address (i.e., change and / or read) the polarization state of an individual one of the ferroelectric nanoparticles 104 a, 104 b. A scanner is provided for scanning the spatially resolved input / output device 506 over preselected ones of the ferroelectric nanoparticles 104 a, 104 b.

[0244] Additionally, the spatially resolved input / output device 506 is adapted to address (i.e., change and / or read) the polarization states 106 of the ferroelectric nanoparticles 104 a, 104 b (i.e., their overall polarization states). In some embodiments, this is done using a scanner that sequentially scans the spatially resolved input / output device 506 over the individual ferroelectric nanoparticles 104 a, 104 b. In the embodiment of FIG. 14 a, an unfocused or collimated light beam is alternatively used to synchronously illuminate the ferroelectric nanoparticles 104 a, 104 b to change their polarization states 106 (i.e., synchronously change their individual polarization states 106 a, 106 b).

[0245] In Figure 14a, a spatially resolved input / output device 506 is provided in the form of a laser that provides a focused beam of light.

[0246] In an alternative embodiment (not shown), an optical readout device is provided that includes a light source 506 (e.g., a laser or diode) as shown in Figure 14a. The light source 506 illuminates some or even all of the ferroelectric nanoparticles 104a, 104b. The optical readout device performs an optical measurement using light from the laser (e.g., using transmitted light, reflected light, scattered light, or fluorescence) and determines / generates an output signal based on the optical measurement.

[0247] The light source, in some embodiments, is used to perform a reset of the polarization states 106, 106a, 106b by irradiating the ferroelectric nanoparticles 104a, 104b with a high enough intensity to change the respective polarization states 106, 106a, 106b.

[0248] In Figure 14b, a spatially resolved input / output device 506 is provided in the form of a conductive tip 506, such as a conductive STM or AFM tip, with a sub-micrometer radius at the end facing the ferroelectric nanoparticles 104a, 104b.

[0249] In some embodiments, a spatially resolved input / output device 506, such as the conductive tip 506 in FIG. 14b, provides / determines a signal that can be used to reflect the output of the ferroelectric nanoparticle capacitor device 100.

[0250] Advantageously, the embodiment of Figures 14a, 14b allows for contactless control and / or readout of the polarization states 106, 106a, 106b.

[0251] 15a and 15b show how a pulse 508 having a duration of less than 1 μs or a pulse sequence 510 is applied to the conductive elements 102, 112, 202 of a ferroelectric nanoparticle capacitor device 100 according to different embodiments.

[0252] In Figure 15a, a pulse 508 or pulse sequence 510, respectively, is applied to conductive element 102. The other conductive element 112 serves as a reference and is grounded in the illustrated embodiment.

[0253] 15a and 15b, pulse 508 or pulse sequence 510, respectively, refers to a voltage pulse. In the embodiment shown in FIG. 15a, the voltage of the pulse corresponds to the voltage across the conductive elements 102, 112.

[0254] In an alternative embodiment (not shown), pulse 508 or pulse sequence 510 refer to a current pulse or charge pulse, respectively.

[0255] Preferably, the pulse sequence 510 includes pulses 508 having a duration of less than 1 μs.

[0256] 15b, pulse 508 or pulse sequence 510, respectively, is applied to an additional conductive element 202 separated from the first conductive element 102 by a dielectric spacer 204. The second conductive element 112 serves as a reference and is grounded in the illustrated embodiment.

[0257] Pulse 508 or pulse sequence 510 each refer to a voltage pulse for the voltage between additional conductive element 202 and second conductive element 112 .

[0258] Each of these pulses 508 or this sequence of pulses 510 provides a charge pulse to the first conductive element 102, as described in detail above in the context of the charge control device 104 according to the embodiment of Figure 7a. In summary, when a voltage V is applied in the embodiment of Figure 15b in the form of pulses 508, this is converted into a charge Q applied to the conductive element 112 as Q = C * V, where C is the capacitance provided by the components 102, 202, 204.

[0259] In embodiments having an additional conductive element 202, the ferroelectric nanoparticle capacitor device 100 can provide output particularly efficiently (i.e., with little perturbation by the pulse 508 or pulse sequence 510) at the first conductive element 102.

[0260] 16a-18c show how a pulse 508 having a duration of less than 1 μs or a pulse sequence 510 is applied to the conductive elements 102, 112, 202 of a ferroelectric nanoparticle capacitor device 100 according to different embodiments. Figures 16a-18c also show the response of the ferroelectric nanoparticle capacitor device 100 to the pulse 508 or pulse sequence 510, respectively.

[0261] As shown in Figures 16a and 16b, the response of the ferroelectric nanoparticle capacitor device 100 to pulses 508 is not commutative with respect to the order of the pulses 508 within the pulse sequence 510. This is already evident from the hysteresis loops of Figures 2b, 4b, 5b, 6b, and 10a-10h.

[0262] As an example, as shown in Figure 16a, pulses 508 are applied to the ferroelectric nanoparticle capacitor device 100 according to a sequence 510, initially with polarization 106a "up" and polarization 106b "down." Application of a positive pulse 508 switches polarization 106a to "down" in an intermediate state (not shown). Then, application of a negative pulse 508 switches polarization 106a back to "up." The final polarization state 106 is the same as the initial polarization state 106.

[0263] As shown in Figure 16b, applying the pulses 508 in the reverse order results in a different final polarization state 106. First, application of a negative pulse 508 switches the polarization 106b to "up" at an intermediate state (not shown). Then, application of a positive pulse 508 switches the polarization 106a back to "down." The final polarization state 106 is different from the initial polarization state 106 in Figure 16b and the final polarization state 106 in Figure 16a.

[0264] In Figures 17a to 17c, the response of a ferroelectric nanoparticle capacitor device 100 having four ferroelectric nanoparticles 104a, 104b, 104c, and 104d is shown as a pulse 508 and pulse sequence 510, each having a duration of less than 1 μs, applied to the conductive elements 102, 112, and 202 of the ferroelectric nanoparticle capacitor device 100.

[0265] The response of the polarization state 106 of each of the ferroelectric nanoparticles 104a, 104b, 104c, 104d or ferroelectric nanoparticle capacitor device 100 can be predicted by extending the approach presented in the context of Figures 10a-10h (here, for a ferroelectric nanoparticle capacitor device 100 having three ferroelectric nanoparticles 104a, 104b, 104c) to a ferroelectric nanoparticle capacitor device 100 having four ferroelectric nanoparticles 104a, 104b, 104c, 104d.

[0266] In conclusion, the pulse sequence 510 for switching a given initial polarization state 106 to a preselected final polarization state 106 can be designed for any preselected final polarization state 106 .

[0267] Any one of the individual polarization states 106a, 106b, 106c, and 106d can be switched using an appropriate pulse sequence 510. In particular, each polarization state can be switched individually, i.e., with the other individual polarization states 106a, 106b, 106c, and 106d remaining the same after application of the pulse sequence 510. However, this does not mean that the other individual polarization states 106a, 106b, 106c, and 106d remain unchanged during the switching process; however, after application of the pulse sequence 510, those other individual polarization states 106a, 106b, 106c, and 106d remain the same.

[0268] In particular, which of the individual polarization states 106a, 106b of the ferroelectric nanoparticles 104a, 104b, 104c, 104d changes first under the pulse 508 depends on the detailed configuration of the coercive forces of the ferroelectric nanoparticles 104a, 104b. As the applied charge / voltage / current increases, the individual polarization states 106a, 106b switch to the "down" state for the ferroelectric nanoparticles 104a, 104b with the smallest coercive force among the set of ferroelectric nanoparticles 104a, 104b with the "down" individual polarization states. Similarly, as the applied charge / voltage / current decreases, the individual polarization states 106a, 106b switch to the "up" state for the ferroelectric nanoparticles 104a, 104b with the smallest coercive force among the set of ferroelectric nanoparticles 104a, 104b with the "up" individual polarization states.

[0269] In the embodiment of Figures 17a, 17b and 17c, the coercivity of ferroelectric nanoparticle 104d exceeds the coercivity of ferroelectric nanoparticle 104c which exceeds the coercivity of ferroelectric nanoparticle 104b which exceeds the coercivity of ferroelectric nanoparticle 104a.

[0270] In the embodiment of Figures 16a, 16b presented above, the coercivity of the ferroelectric nanoparticles 104b exceeds the coercivity of the ferroelectric nanoparticles 104a.

[0271] In conclusion, for ferroelectric nanoparticle capacitor devices 100 having lateral arrays containing a larger number of ferroelectric nanoparticles 104a, 104b, many known methods can be used to design pulse sequences 510 for switching a given initial polarization state 106 to a preselected final polarization state 106.

[0272] 19a, 19b, and 20 illustrate a method 600 and its process steps for operating a ferroelectric nanoparticle capacitor device 100. In the exemplary embodiment shown, the method 600 uses the ferroelectric nanoparticle capacitor device 100 as a data reservoir 602 in reservoir computing, and is therefore also referred to as reservoir computing 600 or reservoir computing method 600. However, the illustrated process steps may alternatively be used in other applications, for example, using the ferroelectric nanoparticle capacitor device 100 as a storage device, or storage method 600, respectively.

[0273] Further details on reservoir computing are provided in Matteo Cucchi, Steven Abreu, Giuseppe Ciccone, Daniel Brunner, and Hans Kleemann, "Hands-on reservoir computing: a tutorial for practical implementation," Neuromorphic Computing and Engineering 2 (2022) 032002, particularly Figure 1 and sections 2.1 and 2.2 therein, which are incorporated herein by reference.

[0274] 19a, 19b, a pulse 508 or pulse sequence 510, respectively, is applied to the conductive elements 102, 112, 202 of the ferroelectric nanoparticle capacitor device 100. The pulse 508 or pulse sequence 510, respectively, is similar to those described above, for example, in the context of FIGS.

[0275] The output 606 of the ferroelectric nanoparticle capacitor device 100 is obtained as a time-dependent electrical signal from the conductive elements 102, 112, 202 or sensing electrodes 504 of the ferroelectric nanoparticle capacitor device 100, for example as described in the context of FIG.

[0276] In the embodiment of Figures 19a and 19b, the ferroelectric nanoparticle capacitor device 100 serves as a data reservoir 602 for reservoir computing 600. The output 606 is fed to an artificial neural network 608 that includes only an input layer and an output layer.

[0277] The pulse 508 or pulse sequence 510 is used as an input for reservoir computing 600. The output 610 of the artificial neural network 608 is used as an output of reservoir computing 600.

[0278] Training is achieved by training an artificial neural network 608. Due to the nonlinearity of the ferroelectric nanoparticle capacitor device 100 or reservoir 602, respectively, the artificial neural network 608 can be small (e.g., only input and output layers, or only a few layers). Training is particularly efficient, as with reservoir computing 600 using the ferroelectric nanoparticle capacitor device 100.

[0279] The method 600 of FIG. 20 includes, in step 620, applying pulses and / or pulse sequences having durations of less than 1 μs to the conductive elements 102, 112, 202 of the ferroelectric nanoparticle capacitor device 100 or using the spatially resolved input / output device 506 to address the polarization state of the ferroelectric nanoparticles.

[0280] The present invention exploits the striking similarities between the described frustrated Ising model and brain-inspired neuromorphic circuits, because both systems exhibit similar characteristics and are capable of performing information processing tasks. The activity of neurons in the brain can be statistically modeled. Each neuron is either active or inactive at any time, as described by the states m = +1 and m = -1 in the Ising model. An active neuron is one that sends an action potential down its axon in any given time window, while an inactive neuron is one that does not. A neuromorphic reservoir based on a frustrated Ising system is a type of neuromorphic computing system that uses a frustrated Ising model to simulate the behavior of a complex network of neurons. In such a system, a large number of binary variables {m} are arranged in a network with a structure similar to that of a neural network. As the system evolves, it exhibits complex behavior similar to that of a neural network. In particular, this system can be used to perform information processing tasks such as pattern recognition and classification, and is particularly effective for tasks requiring a high-dimensional input space.

[0281] Overall, the system is e The local field h driven by the fluctuations of i A particular feature of the considered Ising system is that switching the local polarization at every site is achieved by the local coercive force h ci =(Q ci / ε0ε f )(S i / S), where Q ci is the coercive charge corresponding to this nanodot, as discussed above. The hysteretic behavior of switching the local polarization further complicates the dynamic behavior of the system.

[0282] In Reservoir Computing 600, data processing (and training / learning) is separated into two stages: first in a reservoir 602, and then in an artificial neural network 608. The reservoir 602 is a fixed, randomly initialized system that acts as a dynamic processor, transforming the data at its input 604 into a higher-dimensional data space to generate complex spatiotemporal representations. The outputs 606 of the data reservoir 606 are passed to a trainable artificial neural network 608, which maps them to a desired final output 610. Separating the data processing (and training / learning) in this way makes Reservoir Computing 600 particularly efficient.

[0283] A reservoir is typically implemented as a recurrent neural network with a large number of interconnected nodes or units with efficient communication and synchronization protocols. Each node can exhibit switchable states with at least two switchable logical states. Predicting the collective response of the nodes in a reservoir to an input signal is a complex task due to their highly nonlinear behavior. Furthermore, the connections between nodes and the configuration of their states must be dynamically adjusted based on the input data, requiring the implication of sophisticated synaptic plasticity mechanisms. The advantage of reservoir computing is its computational efficiency. The use of a fixed, randomly initialized reservoir enables parallel processing of input data, resulting in significant acceleration of training compared to conventional neuronal networks. Furthermore, separating the learning process into reservoir dynamics and training of the artificial neural network 608 results in a simplification of the training procedure. However, known implementations of data reservoirs 602, such as field-programmable gate arrays, digital signal processors, and neuromorphic chips, consume significant amounts of power, limiting their scalability and suitability for large-scale systems. They also suffer from limitations in processing speed, scalability, power, and an inability to handle large, complex data sets.

[0284] Advantages of using the ferroelectric nanoparticle capacitor device 100 (particularly, but not limited to, as a data reservoir 602 for reservoir computing 600) include:

[0285] 1. The dimensions of the high capacitance ferroelectric nanoparticle capacitor device 100 (or the number of polarization states 106, respectively) grow rapidly as 2^N (where N is the number of ferroelectric nanoparticles 104, 104a, 104b, respectively), providing a large capacity storage device or data reservoir 602 even for reasonably large N.

[0286] 2. Fading Memory: To create a robust data reservoir 602, it is desirable to have long-duration echoes that require the system to operate at a rate exceeding its relaxation time. The response of the ferroelectric nanoparticle capacitor device 100 to an external stimulus depends heavily on its initial polarization state 106. The response will be different if the ferroelectric nanoparticles 104, 104a, 104b are not in equilibrium due to a prior input from which they are still recovering. In the ferroelectric nanoparticle capacitor device 100, this dwell effect can persist for a duration much longer than the input clock frequency in the reservoir computing 600 due to the significant delay in the relaxation of the individual ferroelectric nanoparticles 104, 104a, 104b.

[0287] 3. Efficient Input and Readout The ferroelectric nanoparticle capacitor device 100 allows different modes of signal input and readout, including time and spatial multiplexing and combinations thereof. This enables efficient interconnection of the ferroelectric nanoparticle capacitor device 100 with other parts of a neuromorphic circuit. Furthermore, the flexibility in selecting input and readout modes enables optimal scalability of data flow intensity to the internal dynamics of the data reservoir 602.

[0288] 4. High Nonlinearity The high nonlinearity in the ferroelectric nanoparticle capacitor device 100 is naturally caused by the hysteresis effect in the switching of the ferroelectric nanoparticles 104, 104a, 104b. The presence of nonlinearity enhances computational power, enables the processing of complex and transient information, and facilitates tasks such as pattern recognition, feature extraction, and nonlinear computing.

[0289] 5. Also, the number of degenerate states (same total polarization, e.g., 0) grows exponentially with the number N of ferroelectric nanoparticles 104, 104a, 104b.

[0290] The remaining challenges can be related to the dynamic adjustment of the configuration of connections between nodes and their states based on input data, which requires the implication of sophisticated synaptic plasticity mechanisms.

[0291] The description of the embodiments and drawings merely serves to illustrate the technology of the present disclosure and its associated beneficial effects, and does not imply any limitations. The scope of the present disclosure should be determined from the appended claims. [Explanation of symbols]

[0292] 100 Ferroelectric Nanoparticle Capacitor Devices 102, 112 (pair) of conductive elements 104a, 104b Ferroelectric nanoparticles 106 Polarization state 108, 118 Opposing surfaces of conductive elements 110a, 120a: First section of the conductive element associated with the ferroelectric nanoparticle 104a (first section) 110b, 120b: First section portion (second first section) of the conductive element associated with the ferroelectric nanoparticle 104b 110, 120 Total surface projected area of ferroelectric nanoparticles 114 Charge Control Device 114a Electrical Connection 122 Dielectric separator material 124, 126, 128 First, second, and third ferroelectric capacitors 130 Dielectric Capacitor 132 Charge Cf is the capacitance of the (first) ferroelectric capacitor Cd Capacitance of a dielectric capacitor 102', 112' Sections of conductive element above and below dielectric separator material 202 Additional conductive elements 204 Dielectric Spacer 206 Heater, temperature control element 208 PCB 210 Force control element 212 Mechanical Deformation 214 Charge Control Devices, Series Capacitors 300 transistors 302 channels 304 Semiconductor substrate 306 Source / Drain Region 308 Gate Stack 310 Gate electrode 312 Bottom electrode 502 Conductor 504 Detection electrode 506 Spatial Resolution Input / Output Device 508 Pulse 510 Pulse Sequence 600 ways 602 Data Reservoir 604 Data Reservoir Input 606 Data Reservoir Output 608 Artificial Neural Networks 610 Artificial Neural Network Output

Claims

1. A ferroelectric nanoparticle capacitor device (100), comprising: a pair of electrically insulated conductive elements (102, 112); more than three ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f), the ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f) being disposed between the conductive elements (102, 112) of the pair; a spatially resolved input / output device (506) adapted to read out individual polarization states (106a, 106b) of the ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f) of the ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f), the ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f) are adapted to provide at least three polarization states (106) with different total ferroelectric polarizations; Ferroelectric nanoparticle capacitor devices.

2. the ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f) are spaced apart from one another, and / or a dielectric separator material (122) is disposed between said ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f); and / or the size of each of said ferroelectric nanoparticles along any direction does not exceed 50 nm, or does not exceed 30 nm; The ferroelectric nanoparticle capacitor device (100) of claim 1.

3. the conductive elements (102, 112) of the pair have respective surfaces (108, 118) spaced apart by a distance (d), and the ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f) extend along at least 90% of the distance (d) or along the entire distance (d), The ferroelectric nanoparticle capacitor device (100) of claim 1 or 2.

4. further comprising a sensing electrode (504) disposed adjacent to the conductive elements (102, 112) of the pair and / or adjacent to the ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f) of the ferroelectric nanoparticle capacitor device (100), The ferroelectric nanoparticle capacitor device (100) of claim 1 or 2.

5. the first conductive element (102) of said pair (102, 112) is adapted to carry a constant charge and / or is electrically isolated and / or is electrically floating; The ferroelectric nanoparticle capacitor device (100) of claim 1 or 2.

6. a charge control device (114) adapted to control and / or vary the charge on the second conductive element (112) of the pair; The ferroelectric nanoparticle capacitor device (100) of claim 1 or 2.

7. the charge control device (114) is adapted to apply a pulse sequence (510) to the second conductive element (112) of the pair; and / or the charge control device (114) is adapted to apply a pulse (508) having a duration of less than 1 μs to the second conductive element (112) of the pair; The ferroelectric nanoparticle capacitor device (100) of claim 6.

8. the charge control device comprises an additional conductive element (202) electrically isolated from the pair of conductive elements (102, 112), and the charge control device (114) is adapted to apply a voltage between the additional conductive element (202) and the second conductive element (112); The ferroelectric nanoparticle capacitor device (100) of claim 6.

9. The spatially resolved input / output device comprises a scanning device adapted to scan from the ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f) of the ferroelectric nanoparticle capacitor device (100) to a preselected ferroelectric nanoparticle, The ferroelectric nanoparticle capacitor device (100) of claim 1 or 2.

10. an artificial neural network (608) adapted to receive as input a time-dependent electrical signal at a conductive element (102, 112, 202) of said ferroelectric nanoparticle capacitor device (100) or a sensing electrode (504) of said ferroelectric nanoparticle capacitor device (100), or a signal determined by an optical readout device; The ferroelectric nanoparticle capacitor device (100) of claim 1 or 2.

11. As a data reservoir for reservoir computing, Use of a ferroelectric nanoparticle capacitor device (100) according to claim 1 or 2.

12. A method for operating a ferroelectric nanoparticle capacitor device (100), the ferroelectric nanoparticle capacitor device (100) comprising: a pair of electrically insulated conductive elements (102, 112); more than three ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f), the ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f) being disposed between the pair of conductive elements (102, 112, 202), The method comprises: applying (620) a pulse sequence (510) to a conductive element (102, 112, 202) of the ferroelectric nanoparticle capacitor device (100) to switch the initial polarization state (106) of the ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f) to a final polarization state (106) of the ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f); and reading out the individual polarization states (106a, 106b) of the ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f) of said ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f) using a spatially resolved input / output device (506). method.

13. further comprising receiving an output of the ferroelectric nanoparticle capacitor device (100); the output of the ferroelectric nanoparticle capacitor device (100) corresponds to a signal determined by the spatially resolved input / output device (506); The method of claim 12.

14. the output of the ferroelectric nanoparticle capacitor device (100) is received by an artificial neural network (608); and / or an artificial neural network (608) is trained according to the received output of the ferroelectric nanoparticle capacitor device (100); The method of claim 13.

15. before applying a pulse (508) having a duration of less than 1 μs and / or said pulse sequence to said pair of conductive elements (102, 112), setting the individual polarization states (106a, 106b) of the individual ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f) to preselected individual polarization states; and / or setting the polarization state (106) of the ferroelectric nanoparticles (104a, 104b, 104c, 104d; 104a, 104b, 104c, 104d, 104e, 104f) to a preselected polarization state; 15. The method according to any one of claims 12 to 14.

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