Processing equipment

Abstract

To provide a processing device that can fasten a nut with sufficient torque in a short time.SOLUTION: A processing device 2 positively rotates a nut holding part 114 at a first rotation speed to screw a nut 64 to a male screw 58a of a boss part 58, reversely rotates the nut holding part 114 when torque reaches a threshold, then positively rotates the nut holding part 114 at a second rotation speed lower than the first rotation speed to screw the nut 64 to the male screw 58a of the boss part 58, and stops the screwing of the nut 64 thereto to complete fastening thereof when the torque reaches the threshold.SELECTED DRAWING: Figure 23

Description

[Technical Field]

[0001] The present invention relates to a processing device including a holding means for holding a workpiece, a cutting means equipped with a cutting blade for cutting the workpiece held by the holding means, and a cutting blade attachment means for attaching the cutting blade to the cutting means. [Background technology]

[0002] A wafer, on whose surface a plurality of devices such as ICs and LSIs are formed along planned dividing lines, is divided into individual device chips by a processing machine equipped with a cutting blade, and each of the divided device chips is used in electrical equipment such as mobile phones and personal computers.

[0003] The present applicant has proposed a processing device equipped with cutting blade mounting means for automatically replacing cutting blades (see, for example, Patent Document 1).

[0004] The cutting means of this processing device comprises a rotating shaft, a fixed flange disposed at the tip of the rotating shaft and supporting the back of the cutting blade, a boss portion protruding from the center of the fixed flange and fitting into an opening formed in the center of the cutting blade, and a male screw formed at the tip of the boss portion.

[0005] The cutting blade attachment means also has a nut holding portion that detachably holds a nut that clamps the cutting blade fitted into the boss portion with the fixed flange, allowing the cutting blade to be automatically attached to the cutting means. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2007-98536 Summary of the Invention [Problem to be solved by the invention]

[0007] However, if the nut is tightened by rotating the nut holding part at a relatively high speed until the torque (load current value) of the nut holding part reaches a predetermined value, the tightening force may be insufficient and the nut may loosen during processing, even though the torque has reached the predetermined value.

[0008] On the other hand, if the nut holding portion is rotated at a relatively slow speed and the nut is tightened until the torque of the nut holding portion reaches a predetermined value, the tightening force will be sufficient and the problem of the nut loosening during processing will be solved, but there is a problem that it takes time to tighten the nut and productivity will be reduced.

[0009] An object of the present invention is to provide a processing device that can tighten a nut with sufficient torque in a short time. [Means for solving the problem]

[0010] According to the present invention, there is provided the following processing device that solves the above-mentioned problems. "A processing device including a holding means for holding a workpiece, a cutting means equipped with a cutting blade for cutting the workpiece held by the holding means, and a cutting blade attachment means for attaching the cutting blade to the cutting means, The cutting means comprises a rotary shaft, a fixed flange disposed at the tip of the rotary shaft and supporting the back of the cutting blade, a boss portion protruding from the center of the fixed flange and fitting into an opening formed in the center of the cutting blade, and a male screw formed at the tip of the boss portion, the cutting blade mounting means includes a nut holding portion that detachably holds a nut that clamps the cutting blade fitted to the boss portion between the nut and the fixing flange, The nut holding portion is rotated forward at a first rotation speed to screw the nut onto the male screw, and when the torque reaches a threshold value, the nut holding portion is rotated backward, and then the nut holding portion is rotated forward at a second rotation speed slower than the first rotation speed to screw the nut onto the male screw, and when the torque reaches a threshold value, the rotation of the nut holding portion is stopped to complete fastening. [Effects of the Invention]

[0011] The processing device of the present invention comprises: A processing device including: a holding means for holding a workpiece; a cutting means having a cutting blade attached thereto for cutting the workpiece held by the holding means; and a cutting blade attachment means for attaching the cutting blade to the cutting means, The cutting means comprises a rotary shaft, a fixed flange disposed at the tip of the rotary shaft and supporting the back of the cutting blade, a boss portion protruding from the center of the fixed flange and fitting into an opening formed in the center of the cutting blade, and a male screw formed at the tip of the boss portion, the cutting blade mounting means includes a nut holding portion that detachably holds a nut that clamps the cutting blade fitted to the boss portion between the nut and the fixing flange, The nut holding portion is rotated forward at a first rotational speed to screw the nut onto the male thread, and when the torque reaches a threshold value, the nut holding portion is rotated reversely, and then the nut holding portion is rotated forward at a second rotational speed slower than the first rotational speed to screw the nut onto the male thread, and when the torque reaches the threshold value, the rotation of the nut holding portion is stopped and fastening is completed, so that the nut can be fastened with sufficient torque in a short time. [Brief explanation of the drawings]

[0012] [Figure 1] 1 is a perspective view of a processing device constructed in accordance with the present invention; [Figure 2] FIG. 2 is a perspective view of the holding means and cutting means shown in FIG. 1. [Figure 3] FIG. 2 is a perspective view of the holding means shown in FIG. 1; [Figure 4] FIG. 2 is a perspective view of the cutting means shown in FIG. 1; [Figure 5] FIG. 5 is a perspective view of the cutting means shown in FIG. 4 with the blade cover open. [Figure 6] FIG. 5 is an exploded perspective view of the cutting means shown in FIG. 4. [Figure 7] FIG. 2 is a perspective view of the cutting blade attachment means shown in FIG. 1; [Figure 8] FIG. 8 is an exploded perspective view of the cutting blade storage means shown in FIG. 7; [Figure 9]FIG. 9 is a perspective view of the support shaft shown in FIG. 8 . [Figure 10] FIG. 9 is a cross-sectional view of the support shaft shown in FIG. 8 . [Figure 11] FIG. 8 is a perspective view of the loading / unloading means shown in FIG. 7. [Figure 12] 12 is a schematic diagram showing a state in which the nut holding portion shown in FIG. 11 is used to attach and detach a nut to and from the cutting means. FIG. [Figure 13] FIG. 8 is an exploded perspective view of the frame, the lift-up table, and the base frame shown in FIG. 7. [Figure 14] FIG. 8 is an exploded perspective view of the frame shown in FIG. 7. [Figure 15] 8 is a perspective view showing a state in which the cutting blade storage means and the carrying-in / out means shown in FIG. 7 face each other. FIG. [Figure 16] 16 is a perspective view showing a state in which the frame body has advanced from the state shown in FIG. 15 toward the cutting blade storage means. FIG. [Figure 17] 17 is a perspective view showing a state in which the frame body has retracted from the state shown in FIG. 16 and the lift table has risen. [Figure 18] 18 is a perspective view showing a state in which the first moving body has advanced from the state shown in FIG. 17 toward the cutting means. FIG. [Figure 19] 19 is a perspective view showing a state in which the second moving body has advanced from the state shown in FIG. 18 toward the cutting means. FIG. [Figure 20] FIG. 10 is a perspective view showing a state in which the nut holding portion holding the nut faces the boss portion. [Figure 21] FIG. 10 is a perspective view showing a state in which the nut holding portion is rotated forward at a first rotation speed. [Figure 22] FIG. 10 is a perspective view showing a state in which the nut holding portion is rotated in the reverse direction. [Figure 23] FIG. 10 is a perspective view showing a state in which the nut holding portion is rotated forward at a second rotation speed. [Figure 24] FIG. 10 is a perspective view showing a state in which the cutting blade is fastened to a rotary shaft. DETAILED DESCRIPTION OF THE INVENTION

[0013] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a processing apparatus constructed according to the present invention will now be described with reference to the drawings.

[0014] (Processing equipment 2) As shown in FIG. 1, the processing device, generally designated by the reference numeral 2, includes a holding means 4 for holding a workpiece, a cutting means 6 equipped with a cutting blade for cutting the workpiece held by the holding means 4, and a cutting blade attachment means 8 for attaching the cutting blade to the cutting means 6.

[0015] (Holding means 4) 2 and 3, the holding means 4 includes an X-axis movable plate 12 provided on the upper surface of a base 10 (see FIG. 2) so as to be movable in the X-axis direction, a support column 14 fixed to the upper surface of the X-axis movable plate 12, and a cover plate 16 fixed to the upper end of the support column 14. A circular opening 16a is formed in the cover plate 16, and a chuck table 18 extending upward through the circular opening 16a is rotatably attached to the upper end of the support column 14.

[0016] The X-axis direction is the direction indicated by the arrow X in Fig. 1. The Y-axis direction indicated by the arrow Y in Fig. 1 is the direction perpendicular to the X-axis direction, and the Z-axis direction indicated by the arrow Z in Fig. 1 is the up-down direction perpendicular to the X-axis and Y-axis directions. The XY plane defined by the X-axis and Y-axis directions is substantially horizontal.

[0017] A circular porous suction chuck 20 connected to suction means (not shown) is disposed on the upper end portion of the chuck table 18. A plurality of clamps 22 are provided on the periphery of the chuck table 18 at intervals in the circumferential direction.

[0018] In the holding means 4, a suction force is generated by the suction means on the upper surface of the suction chuck 20, thereby suction-holding the workpiece placed on the upper surface of the suction chuck 20. In this manner, the upper surface of the suction chuck 20 serves as a holding surface for holding the workpiece, and the holding surface is positioned on the XY plane.

[0019] In addition, the chuck table 18 of the holding means 4 is rotated around its axis in the Z-axis direction by a chuck table motor (not shown) built into the support 14, and is fed for processing in the X-axis direction by the X-axis feed means 24.

[0020] X-axis feed means 24 has a ball screw 26 that is connected to X-axis movable plate 12 and extends in the X-axis direction, and a motor 28 that rotates ball screw 26. X-axis feed means 24 converts the rotational motion of motor 28 into linear motion using ball screw 26 and transmits it to X-axis movable plate 12, moving X-axis movable plate 12 in the X-axis direction along guide rails 10a on base 10 and feeding chuck table 18 for processing in the X-axis direction.

[0021] 2, the processing device 2 includes a gate-shaped frame 30 arranged across the holding means 4. The frame 30 has a pair of support columns 32 spaced apart in the Y-axis direction and extending upward from the upper surface of the base 10, and a beam 34 spanning between the upper ends of the pair of support columns 32 and extending in the Y-axis direction.

[0022] (Cutting means 6) A pair of cutting means 6 are provided on one side surface of the beam 34 (the side surface on the rear side in FIG. 2) at a distance in the Y-axis direction. In the illustrated embodiment, the pair of cutting means 6 are provided so that the cutting blades face each other, and the workpiece held by the holding means 4 can be simultaneously cut by the pair of cutting blades. Note that the number of cutting means 6 may be one.

[0023] As shown in Figure 4, the cutting means 6 includes a rectangular Y-axis movable member 36 supported on one side of the beam 34 so as to be freely movable in the Y-axis direction, a Y-axis feed means 38 that indexes and feeds the Y-axis movable member 36 in the Y-axis direction, a Z-axis movable member 40 with an L-shaped cross section that is supported on the Y-axis movable member 36 so as to be freely raised and lowered in the Z-axis direction, a Z-axis feed means 42 that cuts and feeds the Z-axis movable member 40 in the Z-axis direction, and a housing 44 fixed to the lower end of the Z-axis movable member 40.

[0024] A pair of guided grooves 36a extending in the Y-axis direction and spaced apart in the Z-axis direction are formed on one side surface of the Y-axis movable member 36 (the side surface on the near side in Figure 4), and the guided grooves 36a are slidably connected to a pair of guide rails (not shown) extending in the Y-axis direction and spaced apart in the Z-axis direction on one side surface of the beam 34.

[0025] Y-axis feed means 38 has a ball screw 46 that is connected to Y-axis movable member 36 and extends in the Y-axis direction, and a motor 48 that rotates ball screw 46. Y-axis feed means 38 converts the rotational motion of motor 48 into linear motion using ball screw 46 and transmits it to Y-axis movable member 36, indexing and feeding Y-axis movable member 36 in the Y-axis direction along a guide rail attached to one side surface of beam 34.

[0026] A pair of guide rails (not shown) extending in the Z-axis direction and spaced apart in the Y-axis direction are formed on the other side of the Y-axis movable member 36 (the side on the back side in Figure 4), and the Z-axis movable member 40 has a pair of guided grooves (not shown) that are slidably connected to the pair of guide rails of the Y-axis movable member 36.

[0027] Z-axis feed means 42 has a ball screw (not shown) that is connected to Z-axis movable member 40 and extends in the Z-axis direction, and a motor 50 that rotates this ball screw. Z-axis feed means 42 converts the rotational motion of motor 50 into linear motion using the ball screw and transmits it to Z-axis movable member 40, and feeds Z-axis movable member 40 in the Z-axis direction along the guide rail of Y-axis movable member 36.

[0028] Referring to Figures 5 and 6, the cutting means 6 further includes a rotating shaft 52, a fixed flange 56 (see Figure 6) disposed at the tip of the rotating shaft 52 and supporting the back of the cutting blade 54, a boss portion 58 (see Figure 6) protruding from the center of the fixed flange 56 and fitting into an opening 54a formed in the center of the cutting blade 54, and a male screw 58a (see Figure 6) formed at the tip of the boss portion 58.

[0029] (rotation axis 52) The rotary shaft 52 is supported by the housing 44 so as to be rotatable about the Y-axis direction. The housing 44 also accommodates a motor (not shown) that rotates the rotary shaft 52.

[0030] (Cutting blade 54) As shown in Figure 6, the cutting blade 54 has an annular base 60 and an annular cutting blade 62 fixed to the outer periphery of the base 60. The base 60 can be made of an appropriate metal material such as an aluminum alloy. The opening 54a of the cutting blade 54 is circular and located in the center of the base 60. The cutting blade 62 is formed to a predetermined thickness (for example, approximately 10 to 30 µm) from abrasive grains such as diamond and a binder such as metal or resin, and protrudes radially outward from the outer periphery of the base 60.

[0031] (Fixed flange 56) The fixed flange 56 has an annular shape and protrudes radially outward from the outer circumferential surface of the rotary shaft 52. An annular recess 56a is formed in the radially inner portion of the tip surface of the fixed flange 56. The outer circumferential portion of the tip surface of the fixed flange 56 forms an annular receiving portion 56b that protrudes in the axial direction.

[0032] Continuing the explanation with reference to Figure 6, the opening 54a of the cutting blade 54 is fitted into the boss portion 58, and a nut 64 is attached to the male thread 58a of the boss portion 58, whereby the cutting blade 54 is sandwiched between the receiving portion 56b of the fixing flange 56 and the nut 64 and detachably fixed to the boss portion 58. Note that a plurality of pin holes 64a, into which pins 138 of a nut holding portion 116 described later are inserted, are formed on the side surface of the nut 64 at equal intervals in the circumferential direction.

[0033] As shown in Fig. 5, a blade cover 66 that covers the cutting blade 54 is attached to the tip of the housing 44. The blade cover 66 has a first cover member 66a fixed to the tip of the housing 44 and a second cover member 66b movably attached to the tip of the first cover member 66a. The second cover member 66b is adapted to be moved in the X-axis direction by an appropriate actuator (not shown), such as an air cylinder, and is positioned in the open position shown in Fig. 5 when replacing the cutting blade 54, and in the closed position shown in Fig. 4 when performing cutting processing.

[0034] Also, as shown in Figure 2, on the other side of the beam 34 (the side facing the front in Figure 2), a pair of imaging means 68 for imaging the workpiece held by the holding means 4 is provided so as to be movable in the Y-axis direction, and a pair of moving means 70 for moving the imaging means 68 in the Y-axis direction is attached.

[0035] The moving means 70 has a ball screw 72 connected to the imaging means 68 and extending in the Y-axis direction, and a motor 74 that rotates the ball screw 72. The moving means 70 converts the rotational motion of the motor 74 into linear motion and transmits it to the imaging means 68, moving the imaging means 68 in the Y-axis direction along a guide rail 34a attached to the other side surface of the beam 34. Note that the number of imaging means 68 may be one.

[0036] (Cutting blade attachment means 8) As shown in Figure 7, the cutting blade mounting means 8 comprises a cutting blade storage means 76 for storing a plurality of cutting blades 54, a loading / unloading means 78 for loading and unloading cutting blades 54 from the cutting blade storage means 76, a Y-axis positioning means 80 for positioning the loading / unloading means 78 in an active position and a retracted position in the Y-axis direction relative to the cutting blade storage means 76, a Z-axis moving means 82 for moving the loading / unloading means 78 in the Z-axis direction, and an X-axis moving means 84 for moving the loading / unloading means 78 in the X-axis direction to act on the cutting blades 54 attached to the rotation shaft 52 of the cutting means 6.

[0037] (Cutting blade storage means 76) Referring to Figure 8, the cutting blade storage means 76 includes a drive gear 88 having a rotation axis 86 extending in the Y-axis direction, a driven gear 92 having a rotation axis 90 spaced apart from the drive gear 88 in the Z-axis direction and extending in the Y-axis direction, an endless track 94 wound around the drive gear 88 and the driven gear 92, and a support shaft 96 extending in the Y-axis direction, which is arranged at a predetermined interval on the endless track 94 and fits into the opening 54a of the cutting blade 54 to support the cutting blade 54.

[0038] 7 and 8, the cutting blade storage means 76 of the illustrated embodiment includes a base plate 98 (see FIG. 7), a support wall 100 extending upward from the upper surface of the base plate 98, and a motor 102 fixed to one surface of the support wall 100. As shown in FIG. 8, the motor 102 is connected to the rotation shaft 86 of the drive gear 88, and the motor 102 rotates the drive gear 88 about its axis in the Y-axis direction.

[0039] The driven gear 92 is disposed above the drive gear 88, and the rotation shaft 90 of the driven gear 92 is supported by a support wall 100 so as to be rotatable about the Y-axis direction and movable up and down in the Z-axis direction. The support wall 100 is provided with an elevating means (not shown) for elevating the driven gear 92 in the Z-axis direction. The elevating means may include a ball screw connected to the rotation shaft 90 of the driven gear 92 and extending in the Z-axis direction, and a motor for rotating the ball screw.

[0040] The endless track 94 is made up of a number of interconnected link pieces (reference numerals omitted) and is wound around the drive gear 88 and the driven gear 92. The endless track 94 rotates in response to the rotation of the drive gear 88 by the motor 102.

[0041] A plurality of support shafts 96 are arranged at predetermined intervals on the endless track 94. As can be understood by referring to Figure 9 together with Figure 8, the support shaft 96 has a cylindrical base 104 connected to the endless track 94 and a cylindrical shaft portion 106 extending in the Y-axis direction from the end face of the base 104.

[0042] In the support shaft 96, the openings 54a of the cutting blades 54 are fitted into the shaft portion 106, and multiple (e.g., five) cutting blades 54 are supported by the shaft portion 106. In the illustrated embodiment, as can be understood by referring to Fig. 8, cutting blades 54 are supported on half of the multiple support shafts 96. Also, as shown in Fig. 9, multiple ball plungers 108 are attached at intervals in the circumferential direction to the tip side of the shaft portion 106 to prevent the cutting blades 54 supported by the shaft portion 106 from jumping out.

[0043] 10, a flow path 104a is formed inside each base portion 104 of the support shaft 96, and a plurality of flow paths 94a communicating with one end of each flow path 104a are formed in the endless track 94. The other end of each flow path 104a opens at the end face of the base portion 104 radially outward from the shaft portion 106, as shown in FIG.

[0044] 8, an air nozzle 110 is provided on the support wall 100, protruding in the Y-axis direction below the drive gear 88. The air nozzle 110 is connected to a high-pressure air supply means (not shown). In the illustrated embodiment, the tip of the air nozzle 110 faces the support shaft 96, which is located at the lowest end of the orbit of the support shaft 96 that accompanies the rotation of the endless track 94.

[0045] When the cutting blade 54 located at the tip side of the shaft 106 is carried out, high-pressure air is supplied from the air nozzle 110 to the flow path 104a of the base 104 of the support shaft 96 located at the lowest end via the flow path 94a of the endless track 94, thereby pushing the cutting blade 54 remaining on the shaft 106 toward the tip side of the shaft 106. However, the action of the ball plunger 108 prevents the cutting blade 54 from falling from the shaft 106.

[0046] (Carrying in / out means 78) Referring to Figure 11, the loading / unloading means 78 comprises a Z rotation shaft 112 extending in the Z-axis direction, a blade holding portion 114 radially connected to the Z rotation shaft 112 and holding the cutting blade 54 by suction, and a nut holding portion 116 that detachably holds the nut 64 that clamps the cutting blade 54 fitted into the boss portion 58 of the cutting means 6 between the fixing flange 56.

[0047] The loading / unloading means 78 in the illustrated embodiment further includes a casing 118. The casing 118 has a regular hexagonal top plate 120 and six rectangular side walls 122 hanging down from the periphery of the top plate 120. The Z rotation shaft 112 protrudes from the upper surface of the top plate 120. A motor (not shown) connected to the Z rotation shaft 112 is housed inside the casing 118.

[0048] In the illustrated embodiment, blade holding portions 114 are attached to four of the six side walls 122 of the casing 118, and nut holding portions 116 are attached to two of the side walls 122. The two nut holding portions 116 are provided on a pair of opposing side walls 122. In this way, the loading / unloading means 78 has two blade holding portions 114 for one nut holding portion 116.

[0049] (Blade holding part 114) The blade holding portion 114 is formed in a cylindrical shape, and an end surface 124 of the blade holding portion 114 is provided with a circular central opening 126 capable of receiving the shaft portion 106 of the support shaft 96 and the boss portion 58 of the cutting means 6, and a plurality of suction holes 128 arranged at equal intervals in the circumferential direction around the central opening 126. The suction holes 128 are connected to suction means (not shown).

[0050] Then, when the blade holding portion 114 is positioned at a position where the end face 124 of the blade holding portion 114 contacts the base 60 of the cutting blade 54 stored in the cutting blade storage means 76, the suction means generates suction force in the suction hole 128 to suction-hold the cutting blade 54.

[0051] (Nut holding portion 116) Continuing the explanation with reference to Figures 11 and 12, the nut holding portion 116 includes a cylindrical housing 130 (see Figure 11) fixed to the side wall 122 of the casing 118, an annular rotating body 132 (see Figure 11) rotatably accommodated inside the housing 130, and a motor 133 (see Figure 12) that rotates the rotating body 132.

[0052] The rotor 132 has a central opening 134 that can receive the boss portion 58 of the cutting means 6. A plurality of suction holes 136 and a plurality of pins 138 are alternately provided at intervals in the circumferential direction on the end surface 132a of the rotor 132. The suction holes 136 are connected to a suction means (not shown). The pins 138 are positioned by a spring (not shown) built into the rotor 132 at a position where they protrude from the end surface 132a of the rotor 132 (the position shown in FIG. 11). When the pins 138 are pushed toward the inside of the rotor 132, the spring contracts and they are accommodated inside the rotor 132. The pins 138 are also positioned to correspond to the positions of the pin holes 64a formed in the nut 64.

[0053] As shown in Figure 12, in the nut holding portion 116, a suction force is generated in the suction hole 136 by the suction means to hold the nut 64 by suction, and with a pin 138 inserted into the pin hole 64a of the nut 64, the rotating body 132 is rotated by the motor 133, so that the nut 64 for fixing the cutting blade 54 to the boss portion 58 of the cutting means 6 can be fastened to and detached from the male thread 58a of the boss portion 58.

[0054] Furthermore, even if the position of pin 138 of nut holding portion 116 and the position of pin hole 64a of nut 64 are misaligned when removing nut 64 from boss portion 58, by bringing end face 132a of rotating body 132 close to the end face of nut 64 attached to boss portion 58 and storing pin 138 inside rotating body 132, and then rotating rotating body 132 with motor 133, when the position of pin 138 aligns with the position of pin hole 64a, pin 138 is pushed out by the spring and inserted into pin hole 64a.

[0055] The carry-in / out means 78, which may be configured as described above, is disposed inside a frame 140 in the illustrated embodiment, as shown in Fig. 7. The frame 140 is supported on a lift table 142 so as to be movable in the Y-axis direction, and the lift table 142 is supported on a base stand 144 so as to be movable up and down in the Z-axis direction.

[0056] 7 and 13, frame 140 includes a rectangular plate-shaped bottom 146, four support posts 148 extending upward from the four corners of the upper surface of bottom 146, and a plate-shaped ceiling 150 (see FIG. 7) fixed to the upper ends of each support post 148. A pair of guided members 152, each having a groove 152a extending in the Y-axis direction, are provided on the lower surface of bottom 146 at a distance in the X-axis direction.

[0057] 13 , the lift table 142 includes a rectangular top plate 154 and four cylindrical legs 156 extending downward from the four corners of the bottom surface of the top plate 154. A pair of guide rails 158 extending in the Y-axis direction and spaced apart in the X-axis direction are provided on the top surface of the top plate 154. The pair of guide rails 158 slidably engage with grooves 152 a of a pair of guided members 152 of the frame body 140.

[0058] (Y-axis direction positioning means 80) A Y-axis direction positioning means 80 is provided on the upper surface of the top plate 154 of the lift table 142. The Y-axis direction positioning means 80 has a ball screw 160 extending in the Y-axis direction between a pair of guide rails 158, and a motor 162 that rotates the ball screw 160. A nut portion (not shown) of the ball screw 160 is fixed to the lower surface of the bottom portion 146 of the frame body 140.

[0059] The Y-axis direction positioning means 80 converts the rotational motion of the motor 162 into linear motion using the ball screw 160 and transmits it to the frame body 140, moving the frame body 140 in the Y-axis direction along a pair of guide rails 158. In this way, the frame body 140 on which the carry-in / out means 78 is disposed is slidably supported on the guide rails 158 that extend in the Y-axis direction and are disposed on the lift table 142, and can be positioned by the Y-axis direction positioning means 80 at an operating position and a retracted position in the Y-axis direction with respect to the cutting blade storage means 76.

[0060] The operating position is a position where the blade holding portion 114 of the carrying-in / out means 78 is close to the cutting blade storage means 76 and where the cutting blade 54 supported by the cutting blade storage means 76 can be sucked and held by the blade holding portion 114. The retracted position is a position where the blade holding portion 114 of the carrying-in / out means 78 is farther away from the cutting blade storage means 76 than the operating position.

[0061] 13, the base stand 144 includes a frame 164 and a rectangular base plate 166 fixed to the upper part of the frame 164. Four circular holes 168 are formed in the four corners of the base plate 166, into which the legs 156 of the lift table 142 are slidably inserted. In addition, a female screw 170 is formed in the center of the base plate 166.

[0062] (Z-axis moving means 82) Continuing the explanation with reference to Figure 13, Z-axis movement means 82 is connected to lift-up table 142 and base frame 144. Z-axis movement means 82 includes a ball screw 172 extending in the Z-axis direction, a motor 174 that rotates ball screw 172, and a connecting plate 176 fixed to the upper end of motor 174. Ball screw 172 is threadedly engaged with female thread 170 of base plate 166. Connecting plate 176 is fixed to the underside of top plate 154 of lift-up table 142 by appropriate connecting means such as bolts (not shown).

[0063] The Z-axis moving means 82 converts the rotational motion of the motor 174 into linear motion using the ball screw 172, and moves the lifting table 142 up and down relative to the base stand 144, thereby moving the frame 140 in which the loading / unloading means 78 is arranged in the Z-axis direction.

[0064] Referring to Figure 14, the loading / unloading means 78 is disposed on a first movable body 178 disposed inside the frame body 140, the first movable body 178 is suspended from a first guide rail 182 disposed below a second movable body 180 and extending in the X-axis direction, and is slidably supported thereon, and the second movable body 180 is suspended from a second guide rail 184 disposed on the ceiling portion 150 of the frame body 140 and extending in the X-axis direction, and is slidably supported thereon.

[0065] First moving body 178 has a rectangular plate-shaped main body 186. A circular hole 188 is formed in the center of main body 186. Z rotation shaft 112 of load / unload means 78 is inserted into circular hole 188, and Z rotation shaft 112 is fixed to main body 186 so as not to rotate. When the motor of load / unload means 78, which is connected to Z rotation shaft 112, is driven, casing 118 of load / unload means 78 rotates relative to first moving body 178, and blade holding portion 114 and nut holding portion 116 can be positioned in any orientation.

[0066] A pair of guided members 190, each having a groove 190a extending in the X-axis direction, are provided on the upper surface of the main body 186 of the first moving body 178 at intervals in the Y-axis direction, and a block 192, each having a through hole 192a extending in the X-axis direction, is fixed to the upper surface.

[0067] The second moving body 180 has a rectangular plate-shaped main body 194, and a pair of first guide rails 182 are provided on the underside of the main body 194 at a distance in the Y-axis direction. The first guide rails 182 slidably engage with grooves 190a of a pair of guided members 190 of the first moving body 178, and the first moving body 178 is slidably supported in a state where it is suspended from the first guide rails 182 arranged on the second moving body 180.

[0068] (X-axis moving means 84) Below the main body 194 of the second moving body 180, there is provided a first X-axis moving means for moving the first moving body 178 in the X-axis direction relative to the second moving body 180. In the illustrated embodiment, the first X-axis moving means is composed of an air cylinder 196. A cylinder tube 196a of the air cylinder 196 is fixed to the underside of the main body 194 and extends in the X-axis direction between the pair of first guide rails 182. The tip of a piston rod 196b of the air cylinder 196 is engaged and connected to a through-hole 192a in the block 192 of the first moving body 178.

[0069] Air cylinder 196 as first X-axis moving means moves first moving body 178 in the X-axis direction relative to second moving body 180 along first guide rail 182 by advancing and retracting piston rod 196b.

[0070] A pair of guided members 198, each having a groove 198a extending in the X-axis direction, are provided on the upper surface of the main body 194 of the second moving body 180 at intervals in the Y-axis direction, and a block 200, each having a female screw 200a extending in the X-axis direction, is fixed to the upper surface.

[0071] A pair of second guide rails 184 are provided at a distance in the Y-axis direction on the underside of the ceiling portion 150 of the frame body 140. The second guide rails 184 slidably engage with grooves 198a of a pair of guided members 198 of the second moving body 180, and the second moving body 180 is slidably supported in a state where it is suspended from the second guide rails 184 arranged on the ceiling portion 150 of the frame body 140.

[0072] A second X-axis moving means 202 is provided below the ceiling portion 150 of the frame 140, which moves the second moving body 180 in the X-axis direction relative to the ceiling portion 150. The second X-axis moving means 202 in the illustrated embodiment has a ball screw 204 extending in the X-axis direction between the pair of second guide rails 184, and a motor 206 that rotates the ball screw 204. The ball screw 204 is threadedly engaged with the female screw 200a of the block 200 of the second moving body 180. The motor 206 is fixed to the underside of the ceiling portion 150.

[0073] The second X-axis moving means 202 converts the rotational motion of the motor 206 into linear motion using a ball screw 204 and transmits it to the second moving body 180, moving the second moving body 180 in the X-axis direction along the second guide rail 184 relative to the ceiling portion 150.

[0074] X-axis moving means 84 in the illustrated embodiment includes an air cylinder 196 as first X-axis moving means, and second X-axis moving means 202 having a ball screw 204 and a motor 206. In the illustrated embodiment, by moving first moving body 178 with air cylinder 196 as first X-axis moving means, carry-in / out means 78 can be quickly advanced in the X-axis direction, and by moving second moving body 180 with second X-axis moving means 202, the position of carry-in / out means 78 in the X-axis direction can be easily fine-tuned. In this way, carry-in / out means 78 is configured to be freely advanced and retracted in the X-axis direction by first moving body 178 and second moving body 180.

[0075] 1, the processing device 2 is equipped with a control means 208 that controls the operation of the processing device 2. The control means 208 is composed of a computer having a central processing unit (CPU) that performs calculations according to a control program, a read-only memory (ROM) that stores the control program and the like, and a readable and writable random access memory (RAM) that stores the calculation results and the like.

[0076] (cutting) When cutting a workpiece such as a wafer using the processing device 2, the workpiece is first sucked onto the chuck table 18. Next, the X-axis feed means 24 moves the chuck table 18 below the imaging means 68, and the moving means 70 adjusts the position of the imaging means 68 in the Y-axis direction. Next, the imaging means 68 captures an image of the workpiece from above, and the cutting region of the workpiece is detected.

[0077] Next, based on the cutting area of the workpiece detected by the imaging means 68, the chuck table 18 is rotated to adjust the orientation of the cutting area of the workpiece relative to the cutting blades 54 of the cutting means 6. Next, the chuck table 18 is moved in the X-axis direction by the X-axis feed means 24, and the cutting means 6 is moved in the Y-axis direction by the Y-axis feed means 38, so that the pair of cutting blades 54 is positioned above the cutting area of the workpiece.

[0078] Next, the cutting means 6 is lowered by the Z-axis feed means 42, and the cutting edge 62 of the cutting blade 54, which is rotating at high speed, is caused to cut into the cutting area of the workpiece. At the same time, cutting water is supplied to the part where the cutting edge 62 of the cutting blade 54 is to cut, and the chuck table 18 is fed in the X-axis direction for processing, thereby performing a predetermined cutting process on the cutting area of the workpiece. The cutting means 6 is indexed and fed in the Y-axis direction by the Y-axis feed means 38, and the above cutting process is suitably repeated until the entire cutting area of the workpiece is cut. After the cutting process is completed, the cut-processed workpiece is transported to the next process.

[0079] (Replacing the cutting blade 54) When the cutting process is repeatedly performed, the cutting blade 54 wears, and when the wear of the cutting blade 54 reaches a predetermined amount, the cutting accuracy cannot be maintained, so the cutting blade 54 attached to the cutting means 6 needs to be replaced with a new cutting blade 54. Even if the wear of the cutting blade 54 attached to the cutting means 6 has not reached a predetermined amount, when cutting a workpiece made of a material different from that of the workpiece previously cut, it may be necessary to replace the cutting blade 54 with one that suits the material of the workpiece.

[0080] When replacing the cutting blade 54 attached to the cutting means 6, first rotate the endless track 94 of the cutting blade storage means 76 and position the support shaft 96 supporting the new cutting blade 54 to be loaded into the cutting means 6 at a predetermined position (for example, the lowest position on the track of the support shaft 96).

[0081] 15, the casing 118 is rotated by a motor connected to the Z rotation shaft 112 of the loading / unloading means 78, and the side wall 122 of the casing 118 to which the blade holding part 114 is attached is aligned in the X-axis direction, so that the blade holding part 114 faces the cutting blade storage means 76. In addition, the X-axis moving means 84 and the Z-axis moving means 82 are operated to adjust the X-axis and Z-axis positions of the blade holding part 114 so that the shaft part 106 of the support shaft 96 in the predetermined position can be inserted into the central opening 126 of the blade holding part 114.

[0082] 16 , the frame 140 is moved in the Y-axis direction by the Y-axis positioning means 80, and the loading / unloading means 78 is positioned at an operating position where the cutting blade 54 supported by the support shaft 96 can be held by the blade holding part 114. As a result, the shaft 106 of the support shaft 96 in the predetermined position is inserted into the central opening 126 of the blade holding part 114, and the end face 124 of the blade holding part 114 is brought into contact with the end face of the cutting blade 54 located on the tip side of the shaft 106. Next, suction force is generated in the suction hole 128 of the blade holding part 114, and the cutting blade 54 located on the tip side of the shaft 106 is suction-held by the blade holding part 114.

[0083] Next, the Y-axis direction positioning means 80 is operated to move the loading / unloading means 78 away from the cutting blade storage means 76 in the Y-axis direction and position it at the retracted position. Next, the casing 118 of the loading / unloading means 78 is rotated 180 degrees so that the blade holding part 114 opposite to the blade holding part 114 that suction-holds the cutting blade 54 faces the cutting blade storage means 76.

[0084] Next, the Y-axis positioning means 80 is operated to position the loading / unloading means 78 at an operating position where the cutting blade 54 on the support shaft 96 can be held by the opposite blade holding part 114. Next, suction force is generated in the suction hole 128 of the opposite blade holding part 114, and the cutting blade 54 located on the tip side of the shaft part 106 is held by suction by the blade holding part 114. As a result, a new cutting blade 54 is held by suction by a pair of opposing blade holding parts 114 out of the four blade holding parts 114.

[0085] 17, the frame 140 is moved in the Y-axis direction by the Y-axis positioning means 80, and the lifting table 142 is moved in the Z-axis direction by the Z-axis moving means 82. As a result, the carry-in / out means 78 is moved away from the cutting blade storage means 76 to be positioned at the retracted position, and the Y-axis and Z-axis positions of the carry-in / out means 78 relative to the cutting means 6 are adjusted. After the position adjustment, the Y-axis position of the carry-in / out means 78 is between the pair of cutting means 6, and the Z-axis position of the carry-in / out means 78 after the position adjustment is above the holding surface of the chuck table 18.

[0086] 18, first moving body 178 is moved in the X-axis direction by air cylinder 196 as first X-axis moving means, and carry-in / out means 78 is advanced toward between the pair of cutting means 6. Next, as shown in FIG. 19, second X-axis moving means 202 moves second moving body 180 in the X-axis direction, and the position of carry-in / out means 78 relative to the pair of cutting means 6 is adjusted in the X-axis direction.

[0087] Specifically, the X-axis position of the center of the new pair of cutting blades 54 held by suction by the pair of blade holding parts 114 of the carry-in / out means 78 is aligned with the X-axis position of the center of the pair of cutting blades 54 attached to the pair of cutting means 6. In addition, the Z-axis movement means 82 of the cutting blade attachment means 8 or the Z-axis feed means 42 of the cutting means 6 is operated to align the Z-axis position of the center of the cutting blades 54 on the blade holding parts 114 with the Z-axis position of the center of the cutting blades 54 on the cutting means 6.

[0088] Next, the casing 118 of the loading / unloading means 78 is rotated 60° so that the pair of nut holding parts 116 face the cutting blades 54 of the pair of cutting means 6. Note that the casing 118 may be rotated 60° before the first and second moving bodies 178, 180 are moved forward.

[0089] Next, the second cover member 66b of each blade cover 66 of the pair of cutting means 6 is positioned in the open position (see FIG. 5). Next, the cutting means 6 is moved in the Y-axis direction by the Y-axis feed means 38, and the nut 64 that secures the cutting blade 54 to the boss portion 58 is brought into contact with the end surface 132a of the rotating body 132 of the nut holding part 116 (see FIG. 12). As a result, the pin 138 of the nut holding part 116 is pressed by the nut 64 and accommodated inside the rotating body 132, and the boss portion 58 is accommodated in the central opening 134 of the rotating body 132.

[0090] Next, when the motor 133 of the nut holding part 116 rotates the rotor 132, the pin 138 fits into the pin hole 64a of the nut 64 when it aligns with the pin hole 64a, and the rotational motion of the rotor 132 is transmitted to the nut 64 via the pin 138, loosening the nut 64. This allows the nut 64 to be removed from the male thread 58a of the boss part 58 of the cutting means 6. Furthermore, suction force is generated in the suction hole 136 of the nut holding part 116, and the removed nut 64 is sucked and held by the nut holding part 116.

[0091] Next, the cutting means 6 is moved away from the transport means 78 by the Y-axis feed means 38, and the casing 118 of the transport means 78 is rotated 60 degrees so that the empty blade holding portion 114 that is not holding the cutting blade 54 by suction faces the cutting blade 54 of the cutting means 6.

[0092] Next, the Y-axis feed means 38 moves the cutting means 6 closer to the carry-in / out means 78, and the boss portion 58 of the cutting means 6 is inserted into the central opening 126 of the blade holding portion 114, while the end face of the cutting blade 54 of the cutting means 6 is brought into contact with the end face 124 of the empty blade holding portion 114. Next, suction force is generated in the suction hole 128 of the blade holding portion 114, and the cutting blade 54 of the cutting means 6 is held by suction with the blade holding portion 114.

[0093] Next, the cutting means 6 is moved away from the transport means 78 by the Y-axis feed means 38, and the casing 118 of the transport means 78 is rotated 60 degrees so that the blade holding portion 114 that is suction-holding the new cutting blade 54 faces the boss portion 58 of the cutting means 6.

[0094] Next, the cutting means 6 is brought closer to the carry-in / out means 78 by the Y-axis feed means 38, and the boss portion 58 is inserted into the opening 54a of the new cutting blade 54, and the end face of the cutting blade 54 is brought into contact with the receiving portion 56b of the fixed flange 56 of the rotating shaft 52. Next, the suction force of the blade holding portion 114 is released, and the new cutting blade 54 is handed over from the blade holding portion 114 to the cutting means 6.

[0095] Next, the cutting means 6 is moved away from the loading / unloading means 78 by the Y-axis feed means 38, and the casing 118 of the loading / unloading means 78 is rotated 60° so that the nut holding portion 116, which is holding the removed nut 64 by suction, faces the boss portion 58 of the cutting means 6 (see Figure 20).

[0096] Next, the cutting means 6 is moved closer to the carry-in / out means 78 by the Y-axis feed means 38, and the nut 64 held by suction by the nut holding portion 116 is positioned at the tip of the boss portion 58. Next, as shown in Figure 21, the nut holding portion 116 is rotated forward at a first rotational speed (for example, 150 degrees / second) to screw the nut 64 onto the male thread 58a of the boss portion 58. Note that forward rotation in the illustrated embodiment refers to rotation in the direction indicated by arrow R1 in Figure 21.

[0097] Then, when the tightening torque of the nut 64 reaches a predetermined threshold value (for example, about 4.3 N·m), the nut holding part 116 is rotated in the reverse direction to loosen the nut 64, as shown in FIG. 22. The reverse rotation is in the direction indicated by arrow R2 in FIG. 22. The rotation angle when the nut holding part 116 is rotated in the reverse direction may be, for example, about 50 degrees. The tightening torque of the nut 64 can be calculated from the current value of the motor 133 of the nut holding part 116.

[0098] Thereafter, as shown in FIG. 23, the nut holding portion 116 is rotated forward in the R1 direction at a second rotational speed (for example, 5 degrees / second) that is slower than the first rotational speed, and the nut 64 is threaded onto the male thread 58a of the boss portion 58. When the torque reaches a threshold value (which may be approximately 4.3 N·m as above), the rotation of the nut holding portion 116 is stopped and the fastening is completed.

[0099] This allows the nut 64 to be tightened with sufficient torque in a short time, and as shown in Figure 24, the new cutting blade 54 to be attached to the cutting means 6 can be clamped between the receiving portion 56b of the fixing flange 56 of the rotating shaft 52 and the nut 64 and fixed to the boss portion 58.

[0100] In the illustrated embodiment, the initial tightening of the nut 64 is performed at a relatively high first rotational speed, thereby shortening the tightening time, and the final tightening of the nut 64 is performed at a relatively low second rotational speed, thereby allowing the nut 64 to be attached to the male thread 58a of the boss portion 58 with sufficient tightening torque.

[0101] Next, after releasing the suction force of the nut holding portion 116, the second cover member 66b of the blade cover 66 of the cutting means 6 is positioned in the closed position. Note that the detachment and attachment of the nut 64 and the cutting blade 54 as described above may be performed simultaneously for the pair of cutting means 6 or separately.

[0102] Next, the first and second movable bodies 178, 180 are retracted, and the casing 118 of the loading / unloading means 78 is rotated 60° so that one of the pair of removed cutting blades 54 faces the cutting blade storage means 76. In addition, the endless track 94 of the cutting blade storage means 76 is rotated, and the empty support shaft 96 that does not support a cutting blade 54 is positioned at a predetermined position (for example, the lowest position in the track of the support shaft 96).

[0103] Next, the X-axis moving means 84 and the Z-axis moving means 82 are operated to adjust the X-axis and Z-axis positions of the blade holding portion 114 so that the shaft portion 106 of the support shaft 96 at the specified position can be inserted into the opening 54a of one of the cutting blades 54 held by suction by the blade holding portion 114.

[0104] Next, the frame 140 is moved in the Y-axis direction by the Y-axis positioning means 80, and the shaft portion 106 of the support shaft 96 in the predetermined position is inserted into the opening 54a of one of the cutting blades 54 held by suction by the blade holding portion 114, and the end face of one of the cutting blades 54 is brought into contact with the end face of the base portion 104 of the support shaft 96. Next, the suction force of the blade holding portion 114 is released, and one of the removed pair of cutting blades 54 is handed over to the support shaft 96.

[0105] In addition, the Y-axis positioning means 80 moves the transporting / unloading means 78 away from the cutting blade storage means 76, and the casing 118 of the transporting / unloading means 78 is rotated 180 degrees so that the opposite blade holding portion 114, which holds the other of the removed pair of cutting blades 54 by suction, faces the cutting blade storage means 76.

[0106] Next, the frame 140 is moved in the Y-axis direction by the Y-axis positioning means 80, and the shaft portion 106 of the support shaft 96 in the predetermined position is inserted into the opening 54a of the other cutting blade 54 held by suction by the blade holding portion 114 on the opposite side, and the end face of the other cutting blade 54 is brought into contact with the end face of the cutting blade 54 supported by the support shaft 96. Next, the suction force of the blade holding portion 114 is released, and the other of the removed pair of cutting blades 54 is handed over to the support shaft 96.

[0107] As described above, in the processing device 2 of the illustrated embodiment, the nut holding portion 116 is rotated forward at a first rotational speed to screw the nut 64 onto the male thread 58a of the boss portion 58, and when the torque reaches a threshold value, the nut holding portion 116 is rotated backward, and thereafter the nut holding portion 116 is rotated forward at a second rotational speed slower than the first rotational speed to screw the nut 64 onto the male thread 58a, and when the torque reaches the threshold value, the rotation of the nut holding portion 116 is stopped and fastening is completed, so that the nut 64 can be fastened with sufficient torque in a short time. [Explanation of symbols]

[0108] 2: Processing equipment 4: Holding means 6:Cutting means 8: Cutting blade attachment means 52: Rotation axis 54: Cutting blade 54a: Cutting blade opening 56: Fixed flange 58: Boss Club 58a: Male thread 64: Nut 116: Nut holder

Claims

[Claim 1] A processing device including: a holding means for holding a workpiece; a cutting means having a cutting blade attached thereto for cutting the workpiece held by the holding means; and a cutting blade attachment means for attaching the cutting blade to the cutting means, The cutting means comprises a rotary shaft, a fixed flange disposed at the tip of the rotary shaft and supporting the back of the cutting blade, a boss portion protruding from the center of the fixed flange and fitting into an opening formed in the center of the cutting blade, and a male screw formed at the tip of the boss portion, the cutting blade mounting means includes a nut holding portion that detachably holds a nut that clamps the cutting blade fitted to the boss portion between the nut and the fixing flange, The processing device rotates the nut holding portion forward at a first rotational speed to screw the nut onto the male screw, and when the torque reaches a threshold value, rotates the nut holding portion backward, and then rotates the nut holding portion forward at a second rotational speed slower than the first rotational speed to screw the nut onto the male screw, and when the torque reaches the threshold value, stops the rotation of the nut holding portion to complete fastening.

Images