Mapping mechanism, load port, and mapping processing method

Abstract

To provide a mapping mechanism that can detect the environmental atmosphere (gas state) in an internal space of a transport container that does not have a purge port, and can detect the environmental atmosphere (gas state) of an internal space of a transport container that has a purge port without requiring that the gas in the transport container flows through a discharge port.SOLUTION: In a mapping mechanism M that maps information on the placement state of a plurality of objects W to be transferred in an internal space 3S of a transport container 3 that can accommodate the objects W to be transferred in multiple stages, a sensor S capable of detecting information on the environmental atmosphere in the transport container 3 is provided at a portion of the mapping mechanism M that can enter the internal space 3S of the transport container 3.SELECTED DRAWING: Figure 8

Description

[Technical Field]

[0001] The present invention relates to a mapping mechanism that maps information regarding the status of a FOUP, which is a transport container capable of storing multiple transport objects such as wafers in multi-stage slots, including the presence or absence of an object in each slot of the FOUP, a load port equipped with the mapping mechanism, and a mapping processing method using the mapping mechanism. [Background technology]

[0002] Regarding transport containers such as FOUPs (Front-Opening Unified Pods) that house wafers, which are used to make semiconductor devices, it is important to understand the environmental atmosphere (temperature, humidity (moisture concentration), gas conditions such as the concentration of various contained gases) within the transport container from the perspectives of preventing wafer contamination, maintaining quality, and improving takt time. For example, Patent Document 1 discloses a configuration for detecting the internal state of a transport container in a purge device that performs a purge process with a purge nozzle formed with a gas flow path abutted against the bottom of the transport container and the gas flow path communicating with an opening (port) formed in the bottom of the transport container. The internal state of the transport container is detected based on the composition of exhaust gas exhausted from an exhaust port of the transport container when gas is supplied into the interior of the transport container through the purge nozzle. More specifically, the patent document discloses a configuration in which a sensor is installed in a pipe connecting the exhaust nozzle to a purge gas exhaust path (gas exhaust), and the sensor detects the moisture or oxygen concentration in the exhaust gas, and the internal state of the transport container is detected based on the detection result. With this configuration, the amount of purge gas to be supplied to the transport vessel can be determined based on the detected moisture or oxygen concentration in the exhaust gas, which is expected to reduce the amount of wasted purge gas required to perform appropriate purging while saving purge gas. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6562078 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the above-described configuration requires that a transfer container such as a FOUP have a purge port on its bottom surface, and therefore it is impossible to detect the internal state of a transfer container that does not have a purge port. Furthermore, even if the above-described configuration is used to detect the internal state of a transfer container that has a purge port, the internal state cannot be detected unless a purge process is performed and gas within the transfer container flows through the exhaust port. Therefore, in a situation where natural exhaust must be prioritized because creating a negative pressure within the transfer container through the exhaust port has an adverse effect on the inside of the transfer container, gas within the transfer container is likely to leak out from near the container door of the transfer container, but is difficult to exhaust through the exhaust port. This creates a problem in that the internal state of the transfer container cannot be properly detected by a sensor associated with the exhaust port.

[0005] The present invention has been made in light of these problems, and its main object is to provide a mapping mechanism, a load port equipped with a mapping mechanism, and a mapping method that are capable of detecting the environmental atmosphere (gas status) of the internal space of a transfer container even if it does not have a purge port, and that are capable of detecting the environmental atmosphere (gas status) of the internal space of a transfer container that has a purge port without requiring that gas inside the transfer container circulate through the discharge port. Note that the present invention is a technology that can be used with transfer containers other than FOUPs, transfer container mounting devices other than load ports, and various other devices that require mapping of objects to be transferred inside a transfer container, such as dedicated stocker devices for transfer containers. [Means for solving the problem]

[0006] That is, the mapping mechanism according to the present invention maps information relating to the placement state of the transport objects in the internal space of a transport container capable of accommodating multiple transport objects in multiple stages, a mapper having a mapping sensor at its tip, and a mapping movement unit that supports the mapper and moves the mapper to a mapping position where the mapping sensor can detect that the object to be transported is contained in the transport container, The part of the mapping mechanism that can enter the internal space of the transport container A part of either the mapper or the mapping translation part The present invention is characterized in that a sensor capable of detecting information relating to the environmental atmosphere inside the transfer container is provided.

[0007] Here, examples of "information related to the environmental atmosphere" in the present invention include temperature, humidity, oxygen concentration, nitrogen concentration, concentrations of other specific pollutants, particles, etc. The number of sensors capable of detecting information related to the environmental atmosphere is not particularly limited, and the type of sensor (e.g., thermometer, hygrometer, oxygen concentration meter, etc.) is not limited to one type, but may be multiple types.

[0008] With such a mapping mechanism according to the present invention, information about the environmental atmosphere inside the transfer container can be detected by a sensor provided at a position of the mapping mechanism that can enter the transfer container, and it is possible to detect information about the environmental atmosphere inside the transfer container even for a transfer container that does not have a purge port on the bottom. Furthermore, even for a transfer container that has a purge port on the bottom, information about the environmental atmosphere inside the transfer container can be detected regardless of whether a purge process is performed or not. For example, by measuring information about the environmental atmosphere inside the transfer container even without performing a purge process, it is possible to shorten the takt time. Even when a purge process is performed, the mapping mechanism of the present invention can accurately measure information about the environmental atmosphere compared to using an exhaust port, which has a relatively low exhaust efficiency.

[0009] Furthermore, a load port according to the present invention comprises a flat frame that is arranged in an upright position and has an opening through which an object to be transported can pass; a loading table on which a transport container that can accommodate a plurality of objects to be transported in multiple stages can be placed; a load port door that can engage with a door of the transport container and can open and close the opening of the frame; a door opening / closing mechanism that opens the opening of the frame by moving the load port door to a door open position; and a mapping mechanism that maps information relating to the placement state of the object to be transported when the opening is in the open state by the door opening / closing mechanism, The mapping mechanism is configured to include a mapper having a mapping sensor at its tip, and a mapping movement unit that supports the mapper and moves the mapper to a mapping position where the mapping sensor can detect that the object to be transported is contained in the transport container, The part of the mapping mechanism that can enter the internal space of the transport container A part of either the mapper or the mapping translation part The present invention is characterized in that a sensor capable of detecting information relating to the environmental atmosphere inside the transfer container is provided.

[0010] With such a load port according to the present invention, information about the environmental atmosphere inside a transfer pod can be detected by a sensor provided at a position of the mapping mechanism that can enter the transfer pod, making it possible to detect information about the environmental atmosphere inside the transfer pod even for transfer pods that do not have a purge port on their bottom.Furthermore, with the load port according to the present invention, information about the environmental atmosphere inside a transfer pod can be detected even for transfer pods that have a purge port on their bottom, regardless of whether a purging process has been performed.For example, by measuring information about the environmental atmosphere inside a transfer pod even without performing a purging process, it is possible to shorten the takt time.

[0011] In particular, the load port according to the present invention includes a bottom purge unit capable of replacing the gas atmosphere inside a transfer container placed on a loading table with environmental gas, and a control unit that controls at least the bottom purge process performed by the bottom purge unit, and the control unit determines the time for performing the bottom purge process based on sensing information from a sensor (a sensor capable of detecting information about the environmental atmosphere inside the transfer container) at the time when the opening of the transfer container is opened by the door opening / closing mechanism (at the time when the door of the transfer container is opened) or immediately after the opening is performed (immediately after the door of the transfer container is opened). With this configuration, the control unit adjusts or changes the bottom purge process execution time based on the sensing information at the time when the door of the transfer container is opened or immediately after the door is opened, so that the bottom purge process can be performed for an appropriate time depending on the state of the environmental atmosphere inside the transfer container, and it is possible to avoid, for example, wasting environmental gas (purge gas) by continuing to perform the bottom purge process excessively.

[0012] Furthermore, the mapping processing method according to the present invention is a mapping processing method using a mapping mechanism that maps information about the placement state of a plurality of objects to be transported in the internal space of a transport container that can accommodate multiple objects in multiple stages, and the mapping mechanism includes a mapper having a mapping sensor at its tip, and a mapping movement unit that supports the mapper and moves the mapper to a mapping position where the mapping sensor can detect that the objects to be transported are accommodated in the transport container, and includes a mapping processing by the mapping mechanism with the mapper positioned at the mapping position, and a portion of the mapping mechanism that can enter the internal space of the transport container when the mapper is positioned at the mapping position. A part of either the mapper or the mapping translation part and a sensing process by a sensor that is provided in the transport container and that is capable of detecting information about the environmental atmosphere inside the transport container, are performed simultaneously or with a time lag.

[0013] With the mapping processing method of the present invention, by performing a sensing process to detect information about the environmental atmosphere inside the transfer container simultaneously with or with a time lag during the mapping process performed with the mapper positioned at the mapping position, it is possible to measure information about the environmental atmosphere inside the transfer container regardless of whether or not there is an exhaust port, and it is also possible to shorten the takt time. [Effects of the Invention]

[0014] According to the present invention, it is possible to detect the internal state (information regarding the environmental atmosphere inside the transport container) of a transport container that does not have a purge port by using a sensor installed in a portion of the mapping mechanism that can enter the transport container, and it is possible to provide a mapping mechanism, a load port equipped with a mapping mechanism, and a mapping method that can detect the internal state of a transport container that does have a purge port without requiring that gas inside the transport container circulate through the discharge port. [Brief explanation of the drawings]

[0015] [Figure 1] FIG. 1 is a side view showing a schematic diagram illustrating the relative positional relationship between an EFEM equipped with a load port according to an embodiment of the present invention and its peripheral devices. [Figure 2] FIG. 2 is a simplified plan view of the relative positional relationship shown in FIG. 1. [Figure 3] FIG. 2 is a perspective view showing the load port according to the embodiment with some parts omitted. [Figure 4] FIG. 2 is a front view showing the load port according to the embodiment with some parts omitted. [Figure 5] 5A to 5C are diagrams schematically showing a processing procedure of a load port in the present embodiment. [Figure 6] 5A to 5C are diagrams schematically showing a processing procedure of a load port in the present embodiment. [Figure 7] 5A to 5C are diagrams schematically showing a processing procedure of a load port in the present embodiment. [Figure 8]10A and 10B are diagrams illustrating the mapping process operation of the mapping mechanism for the transport object accommodated in the slot in the FOUP and the mounting positions of the sensors. [Figure 9] 4 is a flowchart showing the operation procedure of the load port in the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0016] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0017] The mapping mechanism M according to this embodiment is applicable to a load port 1, as shown in Fig. 1. The load port 1 is used, for example, in the semiconductor manufacturing process, and as shown in Figs. 1 and 2, constitutes part of the wall of a transfer chamber 2 in a clean room, and is used to load and unload objects to be transferred, such as wafers W, between the transfer chamber 2 and a transfer container 3, such as a FOUP. The load port 1, together with the transfer chamber 2, constitutes part of an Equipment Front End Module (EFEM), and functions as an interface between the transfer container 3 and the transfer chamber 2.

[0018] 1, the FOUP 3 in this embodiment includes a FOUP body 32 that can open the internal space 3S only rearward through a loading / unloading port 31, and a FOUP door 33 that can open and close the loading / unloading port 31. The FOUP 3 is a known structure that has multiple slots 34 formed therein, each of which can accommodate a wafer W, which is an object to be transported, and that allows these wafers W to be loaded and unloaded through the loading / unloading port 31. FIG. 8, which will be described later, schematically shows the state in which wafers W are accommodated in the slots 34 in the FOUP 3. The upward surface of the FOUP body 32 is provided with a flange 35 that can be gripped by a device (e.g., an overhead transport (OHT)) that automatically transports the transport container 3.

[0019] 1 to 5 , the load port 1 comprises: a plate-shaped frame 4 that forms part of the wall of the transfer chamber 2 and has an opening 41 formed therein for opening the internal space 2S of the transfer chamber 2; a loading table 5 that protrudes forward relative to the frame 4 and is positioned in a substantially horizontal position; a seating and holding mechanism 6 that holds a FOUP 3 that has been transferred from outside on the loading table 5; a traction mechanism 7 that moves the FOUP 3 on the loading table 5 in the forward and backward directions D between a seating position and a transfer object delivery position; a load port door 8 that opens and closes the opening 41 in the frame 4; a door opening and closing mechanism 9 that moves the load port door 8 to a door open position retracted toward the transfer chamber 2, thereby opening the opening 41 in the frame 4; and a mapping mechanism M that, when the opening 41 in the frame 4 is in the open state by the door opening and closing mechanism 9, maps information regarding the placement status of the wafers W, including the presence or absence of wafers W in each slot 34 in the FOUP 3 at the transfer object delivery position.

[0020] The frame 4 is arranged in an upright position and is a generally rectangular plate-like structure having an opening 41 large enough to communicate with the loading / unloading entrance of the FOUP 3 placed on the loading table 5. FIG. 1 shows a schematic diagram of the opening 41 of the frame 4. In the load port 1 of this embodiment, the frame 4 forms part of the wall of the transfer chamber 2. The lower end of the frame 4 is provided with legs 42 having casters and installation legs.

[0021] The loading table 5 is provided on top of a horizontal base 50 (support base) that is disposed in a substantially horizontal position at a position slightly above the center of the frame 4 in the height direction, and is capable of loading the FOUP 3 with the FOUP body 32 facing the frame 4. As shown in FIG. 4, the loading table 5 is provided with a plurality of protrusions 51 that protrude upward, and these protrusions 51 are engaged with holes (not shown) formed in the bottom surface of the FOUP 3 to position the FOUP 3 on the loading table 5.

[0022] The seating retention mechanism 6 holds the FOUP 3 on the loading table 5 by hooking a locking claw 61 (see FIG. 6(b)) provided on the loading table 5 onto a locked portion (not shown) provided on the bottom surface of the FOUP 3 to secure it in a locked state. Furthermore, in the load port 1 of this embodiment, the FOUP 3 can be placed in a state where it can be separated from the loading table 5 by releasing the locking state of the locking claw 61 relative to the locked portion.

[0023] The traction mechanism 7 moves the FOUP 3 on the loading table 5 in the front-to-rear direction D between a seating position where the FOUP body 32 is a predetermined distance away from the load port door 8, and a transfer object delivery position where the FOUP body 32 is in close contact with the load port door 8. The traction mechanism 7 is configured using slide rails (not shown) or the like that move the loading table 5 back and forth. The seating holding mechanism 6 and the traction mechanism 7 can also be considered as mechanisms that the loading table 5 is equipped with.

[0024] 1, the state in which the FOUP 3 is placed on the loading table 5 is simply shown as a state in which the bottom surface of the FOUP 3 is in contact with the top surface of the loading table 5. However, in reality, the FOUP 3 is supported by a plurality of protrusions 51 that protrude above the top surface of the loading table 5 and engage with bottomed holes formed in the bottom surface of the FOUP 3, and the top surface of the loading table 5 and the bottom surface of the FOUP 3 do not come into contact with each other, but a predetermined gap is formed between the top surface of the loading table 5 and the bottom surface of the FOUP 3.

[0025] In this embodiment, in the front-rear direction D (see FIG. 1 etc.) in which the FOUP 3 placed on the loading table 5 and the frame 4 are aligned, the FOUP 3 side is defined as the front, and the frame 4 side is defined as the rear.

[0026] The load port door 8 is movable between a fully closed position (see FIG. 1 ), which seals the opening 41 of the frame 4; a door open position (see FIG. 6 ), which is retreated toward the transfer chamber 2 from the fully closed position; and a fully open position (see FIG. 7(i)), which fully opens the opening space of the opening 41 backward. The load port door 8 is equipped with an engagement portion 81 (see FIG. 4 ) that can adsorb and hold the FOUP door 33, and is configured to be movable integrally with the FOUP door 33 between the fully closed position, the door open position, and the fully open position while maintaining an engaged state with the FOUP door 33. In this embodiment, the posture of the load port door 8 is set to the same posture when positioned at the fully closed position and the door open position. The movement path of the load port door 8 between the fully open and fully closed positions consists of a path (horizontal path) along which the load port door 8, when in the fully closed position, moves toward the transfer chamber 2 while maintaining its height position, and a path (vertical path) along which the load port door 8, when in the door open position, moves downward to the fully open position while maintaining its longitudinal position. In order to allow the load port door 8 positioned in the door open position to move both vertically and horizontally, the FOUP door 33 held by the load port door 8 positioned in the door open position is positioned together with the load port door 8 at a position rearward of the frame 4 (a position completely separated from the FOUP body 32 and positioned in the internal space 2S of the transport chamber 2).

[0027] Such movement of the load port door 8 is achieved by a door opening / closing mechanism 9 provided on the load port 1. The door opening / closing mechanism 9 moves the load port door 8 to the door open position or the fully open position, thereby connecting the internal space 3S of the FOUP 3 to the transfer chamber 2 through the opening 41 in the open frame 4. The door opening / closing mechanism 9 is configured using, for example, a movable block (not shown) that supports the support frame 80 that supports the load port door 8 so that it can move in the forward / backward direction D, and a slide rail (not shown) that supports the movable block so that it can move in the up / down direction H, and operates a drive source (not shown) such as an actuator to move the load port door 8 in the forward / backward direction D and the up / down direction H. Note that while a configuration in which separate actuators for forward / backward movement and up / down movement are provided may be used, a configuration in which a common actuator is used as the drive source to move the load port door 8 forward / backward and up / down is advantageous in terms of reducing the number of parts.

[0028] The load port door 8 of this embodiment is equipped with a connection switching mechanism 82 that releases the engagement state (latched state) between the FOUP door 33 and the FOUP body 32 to make the FOUP door 33 removable from the FOUP body 32 (unlatched state) (see FIG. 4).

[0029] 1, 3, 8, etc., the mapping mechanism M includes a mapper M2 having at its tip a mapping sensor M1 (transmitter M11, receiver M12) that can detect the presence or absence of transport objects W stored in multiple stages in the height direction H by multi-stage slots 34 provided in the FOUP 3, and a mapping arm M3 (mapping movement unit) that supports the mapper M2, and is capable of detecting the presence or absence and storage orientation of the transport objects W in the FOUP 3. Figure 8 schematically shows the storage state of wafers W placed in the slots 34 in the FOUP 3.

[0030] As shown in FIG. 8, the mappers M2 are arranged side by side in a pair on the left and right sides, spaced a predetermined distance apart in the width direction, protruding forward from a predetermined position on the mapping arm M3. A mapping sensor M1 is attached to the tip of the mapper M2. The mapping sensor M1 is composed of a transmitter M11 (light-emitting sensor) that emits a signal beam (ray of light) and a receiver M12 (light-receiving sensor) that receives the signal emitted from the transmitter M11. The mapping sensor M1 may also be composed of a transmitter and a reflector that reflects the ray of light emitted from the transmitter toward the transmitter. In this case, the transmitter also functions as a receiver. As shown in FIG. 8, the mapping sensors M1 (M11, M12) have optical axes ML oriented horizontally to the left and right. To prevent the mapping sensors M1 (M11, M12) from interfering with the transported object W, which is the detection target, during mapping processing, the left-right span between the mapping sensors M1 (M11, M12) is set to an appropriate value depending on the planar dimensions of the transported object W.

[0031] The mapping arm M3 moves the position of the mapper M2 in the forward / backward direction D between the positions shown in Figures 6(f) and 7(g), i.e., the mapping position (P1) where the mapping sensor M1 can detect that a wafer W is contained in the FOUP3 through the opening 41 in the open state, and the position shown in Figures 3 and 5, i.e., the wafer mapping impossible position (P2) where the mapping sensor M1 cannot detect that a wafer W is contained in the FOUP3. As shown in FIG. 3, the mapping arm M3 of this embodiment is in the form of a frame having an upper frame portion M31, a pair of left and right side frame portions M32 extending downward from both ends of the upper frame portion M31, and a lower frame portion M33 provided between the lower ends of the both frame portions M32, either integrally or as a single unit. The internal space MS of the mapping arm M3, which is surrounded by the upper frame portion M31, the both frame portions M32, and the lower frame portion M33 and is open in the front-to-rear direction D, is configured to be able to accommodate the load port door 8 itself, as well as a door cover 83 that covers the peripheral parts of the load port door 8 from the transfer chamber 2 side.

[0032] In this embodiment, as shown in FIG. 3 , the mapper M2 is supported on the upper frame M31 of the mapping arm M3 in a position that protrudes forward. Therefore, the mapping sensor M1 provided at the tip of the mapper M2 is positioned in a position that protrudes further forward than the mapping arm M3. In the load port 1 of this embodiment, the lower frame M33 of the mapping arm M3 is attached to a part that constitutes the door opening / closing mechanism 9. Specifically, the lower frame M33 is attached to the support frame 80 that supports the load port door 8. Therefore, when the door opening / closing mechanism 9 raises or lowers the load port door 8, the mapping arm M3 also moves integrally. As a result, the entire mapping mechanism M moves up and down in the same direction as the load port door 8. Note that, although this embodiment employs a configuration in which the mapping mechanism M and the door 8 operate integrally, a dedicated lifting mechanism (a mechanism that raises or lowers only the mapping mechanism M) may be provided for the mapping mechanism M so that the mapping mechanism M can rise and lower independently of the door 8.

[0033] The mapping mechanism M of this embodiment is equipped with a tilting mechanism M4 that tilts the entire mapping arm M3 around a pivot point at the attachment portion of the mapping arm M3 and the door opening / closing mechanism 9. As shown in Fig. 3, the tilting mechanism M4 is equipped with a tilting crank M41 connected to the lower frame portion M33, a connecting shaft M42 (corresponding to a pivot point) that is arranged in an orientation where its axial direction coincides with the longitudinal direction and the width direction of the load port 1 and that connects the tilting crank M41 and the door support frame 80 to each other, an advancing / retreating movable part M43 that is arranged in an orientation where it passes through a slit-shaped insertion hole formed in the frame 4 in the front-rear direction D and is movable forward and backward in the front-rear direction D, and a pivot shaft M44 that pivots the lower end of the tilting crank M41 to the rear end of the advancing / retreating movable part M43.

[0034] 3 is positioned at the wafer mapping disabled position (P2), the tilting mechanism M4 moves the forward / backward movable part M43 rearward (toward the transfer chamber 2) using a drive source (not shown), thereby pushing the lower end of the tilting crank M41 rearward and rotating (tilting) the entire tilting crank M41 about the pivot shaft M44. As a result, the tilting crank M41 rotates in a direction that moves the upper end forward (toward the FOUP 3), and the mapping arm M3 connected to the tilting crank M41 tilts in the same direction as the tilting crank M41. As a result, upper end regions of the side frame parts M32 of the mapping arm M3 and the entire upper frame part M31 protrude through the opening 41 into the space forward of the rearmost surface 4B of the frame 4 (the space on the FOUP 3 side). As a result, the mapper M2 is positioned at a mapping position (P1) where the mapping sensor M1 protrudes through the opening 41 into the space forward of the rearmost surface 4B of the frame 4, as shown in FIG. 6(f).

[0035] The mapping mechanism M is configured to be able to move up and down integrally with the vertical movement of the door opening and closing mechanism 9 while maintaining the position of the mapper M2 in the front-to-rear direction at the mapping position (P1) or the wafer non-mapping position (P2). As described above, the mapping arm M3 in this embodiment moves in the front-to-rear and up-and-down directions together with the load port door 8 by the door opening and closing mechanism 9, and also moves independently of the door opening and closing mechanism 9 by the tilting mechanism M4.

[0036] 3 and 8, the mapping mechanism M according to this embodiment is provided with a sensor S capable of detecting information about the environmental atmosphere of the internal space 3S of the FOUP 3, at a portion of the mapping mechanism M that can enter the internal space 3S of the FOUP 3, which is a transfer container, in other words, at a portion that can protrude through the opening 41 of the frame 4 into the space forward of the rearmost surface 4B of the frame 4 (the space on the FOUP 3 side). Note that the sensor S is omitted in FIGS. 5 to 7.

[0037] In this embodiment, the sensor S is provided on the upper frame M31 of the mapping arm M3 of the mapping mechanism M. As described above, when the mapper M2 is positioned at the mapping position (P1), the entire upper frame M31 of the mapping arm M3 enters the space (the space on the FOUP 3 side) forward of the rearmost surface 4B of the frame 4 through the opening 41, and the sensor S also enters the internal space 3S of the FOUP 3. The sensor can be attached and fixed to the upper frame M31 by any appropriate means, such as screws or a dedicated sensor holder. In this embodiment, the sensors S are provided at two predetermined locations on the upper frame M31 that are spaced apart in the width direction. The two sensors may be the same type or different types. In this embodiment, an oxygen concentration meter is used as one sensor S, and a thermometer is used as the other sensor S. Therefore, by positioning the mapper M2 at the mapping position (P1), the oxygen concentration and temperature of the internal space 3S of the FOUP 3 can be measured simultaneously using these two sensors S. It is also possible to use a single sensor S that has the function of being able to perform multiple types of measurements.

[0038] The load port 1 of this embodiment may include a bottom purge unit that is provided on the loading table 5 and that can inject an environmental gas (also referred to as a purge gas; in this embodiment, nitrogen gas or dry air is primarily used) into the FOUP 3 from the bottom side of the FOUP 3 to replace the gaseous atmosphere inside the FOUP 3 with the environmental gas. The bottom purge unit is primarily composed of a plurality of nozzles (not shown) provided at predetermined locations on the loading table 5. The plurality of nozzles function as bottom purge injection nozzles that inject the predetermined environmental gas and bottom purge exhaust nozzles that exhaust the gaseous atmosphere inside the FOUP 3. These nozzles can be connected by fitting to an inlet (injection port) and an outlet (exhaust port) (not shown) provided at the bottom of the FOUP 3. The purging process can be performed by supplying environmental gas from the bottom purge injection nozzle through the inlet into the internal space 3S of the FOUP3, and discharging the gas atmosphere of the internal space 3S of the FOUP3 from the bottom purge discharge nozzle through the outlet (this gas atmosphere is air or a low-purity environmental gas other than air for a predetermined time from the start of the purging process, and after the predetermined time has elapsed it is a high-purity environmental gas filled in the internal space 3S of the FOUP3).

[0039] Such a load port 1 constitutes an EFEM together with a transfer chamber 2 equipped with a transfer robot 21 inside. In this embodiment, as shown in FIG. 2, a plurality of load ports 1 (for example, three) are arranged side by side on the front surface (front wall surface) 2F of the transfer chamber 2. The operation of the EFEM is controlled by a controller of the load port 1 (controller 1C shown in FIG. 2) and a controller for the entire EFEM (controller C shown in FIG. 1).

[0040] A transfer robot 21 is provided in the internal space 2S of the transfer chamber 2, capable of transferring objects such as wafers W between a FOUP 3 on the load port 1 and the processing chamber R. As shown in FIGS. 1 and 2 , the transfer robot 21 includes, for example, an arm 212 formed by connecting multiple link elements to each other so as to be horizontally rotatable, the arm 212 having an object-holding unit 211 (hand) at its tip, and a traveling unit that rotatably supports an arm base constituting the base end of the arm 212 and travels in the width direction of the transfer chamber 2 (the parallel direction of the load port 1). The transfer robot 21 has a link structure (multi-joint structure) whose shape changes between a folded state in which the arm length is minimized and an extended state in which the arm length is longer than in the folded state. A transfer robot 21 having multiple individually controllable hands 211 arranged in multiple stages in the height direction at the tip of the arm 212 may be used.

[0041] The transfer chamber 2 is configured so that the internal space 2S is substantially sealed by connecting the load port 1 and the processing chamber R. As shown in FIG. 1, a downflow, which is an airflow from above to below, is formed in the internal space 2S of the transfer chamber 2. Therefore, even if particles that could contaminate the surface of the wafer W are present in the internal space 2S of the transfer chamber 2, the downflow pushes the particles downward, preventing them from adhering to the surface of the wafer W during transfer. In FIG. 1, arrows schematically indicate the flow of gas within the transfer chamber 2 that forms the downflow. It is also possible to configure an EFEM by arranging appropriate stations, such as a buffer station or an aligner, on the side of the transfer chamber 2 or in the internal space 2S of the transfer chamber 2.

[0042] In this embodiment, a plurality of processing chambers R (semiconductor processing equipment) (three in the illustrated example) are arranged side by side in the width direction on the wall 2B (rear wall) of the transfer chamber 2, which faces the wall 2F (front wall) on which the load port 1 is located, and each processing chamber R is configured to perform a different appropriate process. Examples of processes performed in the intermediate and post-processing stages of the semiconductor manufacturing process include a back-lapping process, a wafer stacking process, and a dicing process. The operation of the processing chamber R is controlled by its controller (controller RC shown in FIG. 1). Here, the controller for the entire processing chamber R (controller RC) and the controller for the entire EFEM (controller C) are higher-level controllers of the controller 1C of the load port 1.

[0043] The internal space RS of each processing chamber R, the internal space 2S of the transfer chamber 2, and the internal space 3S of the FOUP 3 placed on each load port 1 are maintained at a high level of cleanliness. On the other hand, the space in which the load port 1 is located, in other words, the outside of the processing chamber and the outside of the EFEM, has a relatively low level of cleanliness. Figures 1 and 2 are schematic diagrams showing the relative positional relationship between the load port 1 and the transfer chamber 2, and the relative positional relationship between the EFEM equipped with these load ports 1 and the transfer chamber 2 and the processing chamber R.

[0044] The load port 1 according to this embodiment is characterized in that the controller 1C can execute a mapping process by the mapping mechanism M with the mapper M2 positioned at the mapping position (P1) through the opening 41 in an open state, and a sensing process by the sensor S provided on the mapping mechanism M, and the mapping process and the sensing process are executed simultaneously or with a time lag. The mapping process in this embodiment is a process in which information about the transport object is acquired for each slot 34 in the transport container (each slot 34 in the FOUP) by raising and lowering the mapping arm M3 with the mapper M2 positioned at the mapping position (P1).

[0045] Here, the mapping sensor M1 emits a beam (ray of light) as a signal and detects the presence or absence of the transport object W based on whether or not the signal is received, and the trajectory of the beam (ray of light) can be regarded as the detection line ML. That is, the detection line ML during the mapping process performed with the mapper M2 positioned at the first mapping position (P1) is a line that crosses the wafers W contained in the FOUP 3 (see FIG. 8(ii)).

[0046] During the mapping process, a signal is emitted from the transmitter M11 to the receiver M12, and the signal path formed between the transmitter M11 and the receiver M12 is interrupted where a wafer W is present, but reaches the receiver M12 uninterrupted where no wafer W is present. This makes it possible to sequentially detect the presence or absence of wafers W stored in a row in the height direction H and their storage postures (whether the wafers W are held in slots 34 at different heights on the left and right and are not tilted). In this way, information regarding the presence or absence of wafers W and their storage postures can be obtained for all slots 34 in the FOUP 3 (transport object detection information).

[0047] The sensing process in this embodiment is a process of detecting (measuring, acquiring) information about the environmental atmosphere of the internal space 3S of the FOUP 3 by the sensor S with the mapper M2 positioned at the mapping position (P1).

[0048] The load port 1 according to this embodiment executes predetermined operations by issuing drive commands to each part and mechanism from the control unit 1C. The control unit 1C is configured to include a storage unit, ROM, RAM, I / O ports, a CPU, an input / output interface (IF) for inputting and outputting data to and from an external display device (not shown), and a bus interconnecting these to transmit information between each part.

[0049] The storage unit stores control procedures (operation sequences) according to the type of processing to be executed by the load port 1. In other words, the storage unit stores predetermined operation programs. In this embodiment, the programs are stored as executable programs on a non-transitory computer-readable recording medium (such as a hard disk).

[0050] ROM is a recording medium that consists of a hard disk, EEPROM, flash memory, etc., and stores the CPU's operating program, etc. RAM functions as the CPU's work area, etc. I / O ports, for example, output control signals from the CPU to each part and mechanism, and supply information from sensors to the CPU.

[0051] The CPU constitutes the core of the control unit 1C and executes the operation program stored in the ROM, controlling the operation of the load port 1 in accordance with the program stored in the storage unit.

[0052] Next, the method of use (particularly the mapping processing method) and operation of the load port 1 according to this embodiment will be described with reference to FIG. 9 showing an operational flow.

[0053] First, a FOUP 3 is transported above the load port 1 by an automated transport device such as an OHT, which operates on a linear transport line (traffic line) extending along the common wall surface 3A of the transport chamber 2 on which the load port 1 is located, and placed on the loading table 5. In the load port 1 according to this embodiment, the controller 1C executes a seating retention process St1, which uses the seating retention mechanism 6 to retain the FOUP on the loading table 5 (see FIG. 9 ). Specifically, the seating retention process St1 in this embodiment involves locking the FOUP 3 by engaging the locking claws 61 on the loading table 5 with the lockable portions (not shown) on the bottom surface of the FOUP 3. This allows the FOUP 3 to be placed and fixed at a predetermined seating position on the loading table 5. When the FOUP 3 is placed on the loading table 5, the positioning protrusions 51 on the loading table 5 fit into the positioning recesses on the FOUP 3. 5(a) shows the state immediately after the FOUP 3 has been placed on the placement table 5, and FIG. 5(b) shows the state immediately after the seating retention process St1 has been performed. In this embodiment, it is possible to place a FOUP 3 on each of the placement tables 5 of the three load ports 1 arranged side by side in the width direction of the transfer chamber 2, and it is also possible to provide a seating sensor (not shown) that detects whether the FOUP 3 is placed in a predetermined position on the placement table 5.

[0054] Following the seating and holding process St1, in the load port 1 of this embodiment, the control unit 1C causes the traction mechanism 7 to move the loading table 5 backward toward the frame 4 from the seating position to the transfer position for the transported object (rearward traction process St2). This rearward traction process St2 allows the FOUP door 33 to be docked with the load port door 8, which has been previously placed in the fully closed position, and to be held in a tightly contacted state. In this embodiment, the FOUP door 33 is docked with the load port door 8 by the engaging portion 81 provided on the load port door 8, and held in a tightly contacted state. FIG. 5(c) schematically shows the state immediately after the rearward traction process St2 is performed. Note that in FIGS. 5(b) and 5(c), only parts that have changed compared to FIGS. 5(a) and 5(b), respectively, are labeled; other parts are not labeled. However, even parts not labeled in FIGS. 5(b) and 5(c) can easily be identified by the omitted labels based on FIG. 5(a).

[0055] In the load port 1 of this embodiment, when a FOUP 3 is placed in a seating position on the loading table 5, the control unit 1C detects that the bottom surface of the FOUP 3 has pressed against, for example, a pressure sensor provided on the loading table 5, and this triggers the control unit 1C to issue a drive command (signal) to advance the bottom purge injection nozzle and bottom purge discharge nozzle provided on the loading table 5 above the upper surface of the loading table 5. As a result, these nozzles (bottom purge injection nozzle, bottom purge discharge nozzle) are connected to the injection inlet (injection port) and discharge outlet (exhaust port) of the FOUP 3, respectively, and the FOUP 3 becomes ready to perform the purging process.

[0056] In the load port 1 of this embodiment, the control unit 1C issues a drive command to perform a purging process St3 on the internal space 3S of the FOUP 3. This purging process St3 is a process in which a predetermined environmental gas is supplied from the bottom purge injection nozzle via the injection port into the internal space 3S of the FOUP 3, and gas that had previously remained in the internal space 3S of the FOUP 3 is discharged from the bottom purge discharge nozzle via the discharge port. This purging process St3 fills the internal space 3S of the FOUP 3 with the environmental gas, reducing the moisture concentration and oxygen concentration within the FOUP 3 to below predetermined values ​​in a short period of time, thereby creating a low-humidity and low-oxygen environment around the transport target object W within the FOUP 3.

[0057] It is possible to apply a FOUP3 that has been subjected to a purging process before being placed on the loading table 5, and the purging process St3 may be performed on such a FOUP3, or it is also possible to choose not to perform the purging process St3.

[0058] Next, in the load port 1 of this embodiment, the control unit 1C performs a process (unlatch process St4) in which the connection switching mechanism 82 releases the engagement between the FOUP door 33 and the FOUP body 32, thereby placing the FOUP door 33 in an unlatched state in which it can be removed from the FOUP body 32.

[0059] Following the unlatching process St4, the control unit 1C of the load port 1 of this embodiment executes a process (door opening process St5) in which the door opening / closing mechanism 9 moves the load port door 8 backward from the fully closed position to the door open position, thereby opening the opening 41 in the frame 4. Specifically, the control unit 1C controls the door opening / closing mechanism 9 to move the load port door 8 a predetermined distance along the horizontal path described above from the fully closed position to the door open position. During this movement, the load port door 8 moves while integrally holding the FOUP door 33 by the engaging portion 81. Therefore, the door opening process St5 opens the loading / unloading entrance 31 for the FOUP 3, as well as the opening 41 in the frame 4. The state immediately after the door opening process St5 is executed is shown schematically in FIG. 6(d).

[0060] Next, in the load port 1 of this embodiment, the control unit 1C performs a mapping process St6 using the mapping mechanism M. In the mapping process St6 of this embodiment, the door opening / closing mechanism 9 moves the load port door 8 downward a predetermined distance from the door open position (see FIG. 6(e)), and then the tilting mechanism M4 moves the mapper M2, which is in the mapping disabled position (P2), to the mapping position (P1), positioning the mapper M2 at a height position (mapping start height position) where the mapping sensor M1 is positioned slightly above the uppermost slot 34 in the FOUP 3 (see FIG. 6(f)). When the door opening / closing mechanism 9 then moves the load port door 8 downward from the door open position toward the fully open position, the entire mapping mechanism M also moves downward (see FIG. 7(g)). As a result, the mapper M2 moves from the first mapping start height position to a position lower than the lowermost slot 34 (mapping end height position) while maintaining its front-to-rear position at the mapping position (P1). Through the above-described procedures, the control unit 1C detects whether the signal path formed between the mapping sensors M1 is blocked, and executes a mapping process St6 to obtain information (transport object detection information) relating to the presence or absence of a wafer W and its storage attitude for each slot 34. Based on the results of the transport object detection information obtained by the mapping process St6, it is possible to identify the storage status of the wafers 3, which are the transport objects, within the FOUP 3, specifically, whether or not a wafer W is stored in the slot 34 and whether or not the stored wafers are in the normal attitude.

[0061] In the load port 1 of this embodiment, the control unit 1C performs a sensing process St7 using the sensor S simultaneously with or after a time lag from the mapping process St6 performed by the mapping mechanism M. Specifically, after the mapper M2 is moved to the mapping position (P1), the sensor S provided on the upper frame portion M31 of the mapping arm M3 is positioned in the internal space 3S of the FOUP 3 (see FIG. 6(f)), and this sensor S can detect information about the environmental atmosphere of the internal space 3S of the FOUP 3. In this embodiment, an oxygen concentration meter and a thermometer are used as the sensor S, so the oxygen concentration and temperature of the internal space 3S of the FOUP 3 can be measured by the sensing process St7.

[0062] In the load port 1 according to this embodiment, when the mapper M2 has been lowered to the mapping end height position, the controller 1C moves the mapper M2 from the mapping position (P1) to the non-mapping position (P2) (see FIG. 7(h)), and then executes a process of lowering the load port door 8 to the fully open position using the door opening / closing mechanism 9. As a result, the mapping mechanism M moves downward together with the load port door 8, which is moving to the fully open position (see FIG. 7(i)). In the load port 1 according to this embodiment, when the controller 1C determines based on the detection results of the mapping process that the wafer W is properly accommodated, it executes a process of transporting the transport target (wafer W) from the FOUP 3 on the loading table 5 by the transport robot 21 in sequence to a predetermined destination (processing chamber R (specifically, a load lock chamber), a buffer station, an aligner, etc.).

[0063] On the other hand, if it is determined based on the detection results of the mapping process St6 that the wafer W is not properly accommodated, the FOUP 3 on the loading table 5 is moved from the loading table 5 to another space by the automatic transport container transfer device, and a new FOUP 3 is placed on the loading table 5 by the automatic transport container transfer device, and the above-mentioned operation sequence is performed.

[0064] The load port 1 according to the present embodiment described above makes it possible to execute a sensing process St7 that detects information about the environmental atmosphere of the internal space 3S of the FOUP 3, using the mapping mechanism M that maps information about the state, including the presence or absence of a transfer target object (wafer W), in each slot 34 in the FOUP 3. In particular, the load port 1 according to the present embodiment makes it possible to measure information about the environmental atmosphere of the internal space 3S of the FOUP 3, regardless of whether a purging process has been performed, for a FOUP 3 that has purge ports (injection port, exhaust port) at its bottom. Even for a FOUP 3 that does not require a purging process, measuring information about the environmental atmosphere of the internal space 3S using the sensor S provided in the mapping mechanism M makes it possible to shorten the takt time.

[0065] Furthermore, according to the load port 1 of this embodiment, it is possible to detect information regarding the environmental atmosphere of the internal space of a FOUP (not shown) that does not have a purge port at the bottom using the sensor S provided in the mapping mechanism M.

[0066] In addition, with the mapping processing method according to this embodiment, by performing a sensing process St7 to detect information about the environmental atmosphere of the internal space 3S of the FOUP3 simultaneously with or with a time lag from the mapping process St6, which is performed with the mapper M2 positioned at the mapping position (P1), it is possible to measure information about the environmental atmosphere of the internal space 3S of the FOUP3 regardless of whether or not there are purge ports (injection ports, exhaust ports). Furthermore, by performing the sensing process St7 simultaneously with the mapping process St6, it is possible to shorten the takt time for a FOUP3 that does not require purging processing compared to a mode in which purging processing must be performed in order to measure information about the environmental atmosphere of the internal space 3S of the FOUP3, thereby improving the operating rate in semiconductor manufacturing.

[0067] The present invention is not limited to the above-described embodiments. For example, although an oxygen concentration meter and a thermometer are exemplified as sensors in the above-described embodiments, a hygrometer can also be applied. Furthermore, the number and types of sensors can be selected and changed as appropriate.

[0068] The sensor may be any mapping sensor provided at a location that can enter the internal space of the transport container, and may be provided at a location other than the upper frame portion M31 of the mapping arm, for example, at the upper end of a pair of left and right side frame portions M32 extending downward from both ends of the upper frame portion M31, or on the mapper.

[0069] In addition, the sensing process by the sensor can be performed continuously for a predetermined period of time (for example, from immediately after the opening of the transport container is opened to immediately before it is closed) between the time the opening of the transport container is opened and the time the opening of the transport container is closed, or can be performed intermittently at an appropriate timing.

[0070] If the sensor is an oxygen concentration meter, it is possible to configure the purge process to end when the value measured by the oxygen concentration meter falls below a threshold value during execution of the purge process.

[0071] The sensors may be configured to measure outgassing from the wafer, or they may be configured to measure ammonia, silane, bromine, etc.

[0072] The order of the mapping process performed by the mapper at the mapping position and the sensing process performed by the sensor can be changed as appropriate.

[0073] In the above-described embodiment, the mapping mechanism's mapping movement unit (mapping arm) is moved forward and backward and up and down together with the load port door by the door opening / closing mechanism, and operates independently of the door opening / closing mechanism. However, the mapping mechanism may satisfy only one of these conditions. For example, a mapping mechanism may be applied that includes a slide mechanism for horizontally moving the mapping movement unit forward and backward, and that moves the mapper forward and backward between a mapping position and a non-mapping position using the slide mechanism. Alternatively, a configuration may be adopted in which the mapping mechanism is moved vertically by a movement mechanism separate from the door opening / closing mechanism. Furthermore, the mapping mechanism may be any mechanism capable of performing mapping processing when the frame opening is opened by the door opening / closing mechanism. In the present invention, the "frame opening is opened" concept in the above-described embodiment encompasses both the load port door in the door open position and the load port door in the fully open position.

[0074] In addition, the present invention may employ a mapping mechanism including a mapper having a mapping sensor at its tip, and a mapping movement unit that supports the mapper at or near its base end so that it can pivot horizontally or approximately horizontally and moves the mapper to a mapping position where the mapping sensor can detect the presence of an object being transported in a FOUP through an opening in an open frame. In this case, for example, the mapping movement unit may include a pair of left and right pivot shafts that serve as the pivot centers of the mapping sensor, a drive unit that synchronously rotates the pivot shafts in appropriate forward and reverse directions, and a housing that accommodates at least some or all of the pivot shafts and the drive unit, and the housing may be attached to an appropriate location on the load port door, so that the mapper can be moved about the pivot shafts between a mapping position and a non-mapping position. With this configuration, the mapping arm and tilting mechanism of the above-described embodiment are unnecessary, and the same effects as those described above can be achieved by providing a sensor in the mapping mechanism at an appropriate position that can enter the internal space of the pod.

[0075] Furthermore, if the load port is configured not to have a mapping mechanism, for example, a mapping mechanism according to the present invention can be provided in a transfer chamber so as to enable access to the inside of the transfer container, and a sensor (a sensor capable of detecting information regarding the environmental atmosphere inside the transfer container) can be provided at an appropriate position on this mapping mechanism that can enter the internal space of the transfer container, or if a robot provided in the transfer chamber is equipped with a mapping mechanism, a sensor (a sensor capable of detecting information regarding the environmental atmosphere inside the transfer container) can be provided at an appropriate position on the robot.

[0076] According to the present invention, by detecting information about the environmental atmosphere inside the transfer container with a sensor while performing a mapping process using the mapping mechanism, it is possible to investigate (understand, identify) the distribution of temperature and oxygen concentration inside the transfer container. Furthermore, the control unit can be configured to determine the bottom purge process time to be performed with the internal space of the transfer container open based on sensing information from a sensor (a sensor capable of detecting information about the environmental atmosphere inside the transfer container) at the time the internal space of the transfer container is opened (at the time the door of the transfer container is opened) or immediately after the internal space of the transfer container is opened (immediately after the door of the transfer container is opened). In this way, the bottom purge process time can be adjusted or changed depending on the state of the environmental atmosphere inside the transfer container at the time the door of the transfer container is opened or immediately after it is opened. This makes it possible to efficiently use the environmental gas (purge gas) required for the bottom purge process and avoid waste of environmental gas by, for example, shortening the bottom purge process time beyond a predetermined time within a range that does not adversely affect the state of the environmental atmosphere inside the transfer container.

[0077] In addition, a mapping mechanism can be provided on a transport container loading device such as a stocker table whose main purpose is to stock transport containers, or a sorter device whose main purpose is to replace transport containers, and a sensor (a sensor that can detect information about the environmental atmosphere inside the transport container) can be provided at an appropriate position on this mapping mechanism that can enter the internal space of the transport container.

[0078] The "transport container" in the present invention is not limited to a FOUP, and containers other than a FOUP, such as a cassette, are also included in the transport container of the present invention.

[0079] As described above, the load port according to the present invention can be used as part of an EFEM, and can also be applied to transport devices other than EFEMs.

[0080] In the above-described embodiment, a wafer is used as an example of the object to be transported, but the object to be transported may also be a reticle, a liquid crystal object, a glass object, a culture plate, a culture vessel, a dish, or a petri dish.

[0081] In the above-described embodiment, the load port is equipped with a control unit, and the control unit controls the operation of each unit, such as the movement of the load port door, but it is also possible to configure the load port so that the operation of the load port is also controlled by a control unit (the control unit for the entire EFEM or the control unit for the processing chamber, which is a higher-level controller) that controls the operation of the higher-level device of the load port (the EFEM or the processing chamber in the above-described embodiment).

[0082] Furthermore, the above-mentioned control unit can be realized using a normal computer system, not a dedicated system. For example, a control unit that executes the above-mentioned processes can be configured by installing a program for executing the above-mentioned processes from a recording medium (such as a flexible disk or CD-ROM) storing the program into a general-purpose computer. The means for supplying these programs is arbitrary. As described above, the programs can be supplied via a predetermined recording medium, or, for example, via a communication line, a communication network, a communication system, etc. In this case, for example, the program can be posted on a bulletin board (BBS) on a communication network and provided via the network by superimposing it on a carrier wave. The program thus provided can then be started and executed under the control of the OS in the same way as other application programs, thereby executing the above-described processing.

[0083] Furthermore, the specific configuration of each part is not limited to the above embodiment, and various modifications are possible within the scope of the present invention. [Explanation of symbols]

[0084] 1. Loading port 1C...Control unit 4...Frame 41...Opening 3...FOUP 5...Placement table 8...Load port door 9...Door opening and closing mechanism M...mapping mechanism W: Transport object (wafer)

Claims

1. a mapping mechanism that maps information about the placement state of a plurality of objects to be transported in an internal space of a transport container that can accommodate the objects in multiple stages, a mapper having a mapping sensor at its tip, and a mapping movement unit that supports the mapper and moves the mapper to a mapping position where the mapping sensor can detect that the object to be transported is contained in the transport container, A mapping mechanism characterized in that a sensor capable of detecting information regarding the environmental atmosphere inside the transport container is provided in a part of either the mapper or the mapping moving part, which is a part of the mapping mechanism that can enter the internal space of the transport container.

2. A load port that constitutes an EFEM together with a transfer chamber equipped with a transfer robot therein, a flat frame provided in an upright position adjacent to the transfer chamber and having an opening through which the object to be transferred can pass; a loading table on which a transport container capable of accommodating a plurality of the transport objects in a multi-tiered manner can be placed; a load port door that can be engaged with a door of the transport container and that can open and close the opening of the frame; a door opening / closing mechanism that opens the opening of the frame by moving the load port door to a door open position retracted toward the transfer chamber; a mapping mechanism that maps information about a placement state of the transport object when the opening is in an open state by the door opening / closing mechanism, The mapping mechanism includes a mapper having a mapping sensor at its tip, and a mapping movement unit that supports the mapper and moves the mapper to a mapping position where the mapping sensor can detect that the object to be transported is contained in the transport container, A load port characterized in that a sensor capable of detecting information regarding the environmental atmosphere inside the transport container is provided in a part of either the mapper or the mapping movement part, which is a part of the mapping mechanism that can enter the internal space of the transport container.

3. a bottom purge unit capable of replacing a gas atmosphere in the transfer container placed on the placement table with an environmental gas; a control unit that controls at least the bottom purge process by the bottom purge unit, 3. The load port according to claim 2, wherein the control unit determines a time for executing the bottom purge process based on sensing information from the sensor at the time when the opening is opened by the door opening / closing mechanism or immediately after the opening is opened.

4. A mapping processing method using a mapping mechanism that maps information regarding a placement state of a plurality of objects to be transported in an internal space of a transport container that can accommodate the objects in multiple stages, the mapping mechanism includes a mapper having a mapping sensor at its tip, and a mapping movement unit that supports the mapper and moves the mapper to a mapping position where the mapping sensor can detect that the object to be transported is contained in the transport container, a mapping process by the mapping mechanism with the mapper positioned at the mapping position; A mapping processing method characterized by simultaneously or with a time lag, and sensing processing by a sensor that is provided in either the mapper or the mapping moving part, which is a part of the mapping mechanism that can enter the internal space of the transport container, and is capable of detecting information regarding the environmental atmosphere inside the transport container.

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