Nozzle adjustment jig

Abstract

To provide a new nozzle adjustment jig that is able to adjust the position of a cutting-water nozzle without requiring a measuring device such as a scale.SOLUTION: A nozzle adjustment jig 90 is used in a cutting device including a pair of cutting-water nozzles 72a, 72b which are disposed on front and rear surface sides of a cutting blade fixed to a spindle 23 and supply cutting water to the cutting blade, and adjusts height positions of the cutting-water nozzles 72a, 72b. The nozzle adjustment jig 90 has: a to-be-fixed portion 92 that is fixed to a tip of the spindle so as to be freely detached detached; and a positioning portion that positions height positions of the cutting-water nozzles 72a, 72b at predetermined positions. Adjusting the height positions of the cutting-water nozzles 72a, 72b to heights at which lower ends of the cutting-water nozzles 72a, 72b abut on the positioning portion, makes an adjustment so that the cutting-water nozzles 72a, 72b are positioned at specific distances from an axial center of the spindle 23.SELECTED DRAWING: Figure 9

Description

[Technical Field]

[0001] The present invention relates to a nozzle adjustment jig for adjusting the height position of a nozzle that supplies cutting water to a cutting blade in a cutting device that cuts a workpiece. [Background technology]

[0002] Conventionally, in cutting machines such as those disclosed in Patent Document 1, cutting water is supplied from a cutting water nozzle to a cutting blade while cutting a workpiece. This supply of cutting water is very important in terms of cooling the heat generated during cutting and washing away chips generated during cutting from the top surface of the workpiece.

[0003] If the cutting water nozzle is adjusted to an incorrect position and water is not supplied to the appropriate position on the cutting blade, the heat generated during processing will not be sufficiently cooled, causing abnormal wear and burning of the cutting blade, which will not only significantly deteriorate the processing quality but also cause damage to the cutting blade and the workpiece.

[0004] Furthermore, if the cutting water nozzle is not positioned properly, the cutting chips will not be discharged from the top surface of the workpiece and will remain attached to the top surface of the workpiece. After machining, it is difficult to remove the dried cutting chips by washing, and additional washing will be required, such as removing them using a separate washing means.

[0005] As described above, setting the position of the cutting water nozzle is important, and Patent Document 1 discloses a blade cover device that allows the position of the cutting water nozzle to be adjusted. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2006-187849 Summary of the Invention [Problem to be solved by the invention]

[0007] It is desirable to set the position of the cutting water nozzle so that the distance between the lowest point of the outer periphery of the flange that secures the cutting blade and the lowest point of the cutting water nozzle is approximately 0.5 to 3 mm. Therefore, when using cutting blades with different outer diameters or thicknesses, it is necessary to adjust the cutting water nozzle according to the outer diameter of the flange that secures the cutting blade.

[0008] To achieve precise adjustment when adjusting the position of the cutting water nozzle, it is desirable to adjust it from the front of the cutting blade using a scale, etc. However, from the perspective of ensuring the safety of the device, cutting means such as the cutting blade are generally covered by a housing or door, which makes it difficult to work with.

[0009] In particular, with cutting devices known as dual dicers (opposing dual dicers), which have been widely used in recent years and have two cutting means arranged opposite each other, precise adjustment is extremely difficult because the operator must reach into the narrow space between each cutting blade to make adjustments.

[0010] In this regard, the configuration of Patent Document 1 has the problem that it is not suitable for an opposed dual dicer because it requires position adjustment while checking the position of the cutting blade.

[0011] In view of the above problems, the present invention proposes a new nozzle adjustment jig that enables the position of a cutting water nozzle to be adjusted without the need for a measuring device such as a scale. [Means for solving the problem]

[0012] The problem to be solved by the present invention is as described above, and the means for solving this problem will now be described.

[0013] According to one aspect of the present invention, a nozzle adjustment jig is provided for use in a cutting device comprising a holding table for holding a workpiece, a spindle to which a cutting blade for cutting the workpiece held by the holding table is removably fixed while being clamped by a mounting flange, and a pair of cutting water nozzles arranged on the front and back sides of the cutting blade fixed to the spindle and supplying cutting water to the cutting blade, the nozzle adjustment jig having a fixed part that is removably fixed to the tip of the spindle and a positioning part that positions the height position of the cutting water nozzle at a predetermined position, and the height position of the cutting water nozzle is adjusted to a height at which the lower end of the cutting water nozzle abuts the positioning part, thereby adjusting the cutting water nozzle to be positioned at a specific distance from the axis of the spindle.

[0014] According to one aspect of the present invention, the positioning portion has a base portion and a plate of a predetermined thickness that is removably arranged on the base portion, and the thickness of the plate is set so that the cutting water nozzle is positioned at a specific distance from the axis of the spindle. [Effects of the Invention]

[0015] The present invention has the following effects.

[0016] That is, according to one aspect of the present invention, it is possible to configure a nozzle adjustment jig that allows for easy position adjustment of the cutting water nozzle without the need for a measuring device such as a scale. When adjusting the position, the cutting water nozzle can be positioned by abutting it against the positioning part, which makes it easy to work even in a small space and improves work efficiency.

[0017] Furthermore, according to one aspect of the present invention, by providing a plate having a predetermined thickness in a removable manner in the positioning portion, the height position of the cutting water nozzle can be set according to the thickness of the plate. [Brief explanation of the drawings]

[0018] [Figure 1] FIG. 2 is a diagram illustrating one side of an embodiment of a cutting device. [Figure 2] FIG. 4 is a diagram showing the other side of the embodiment of the cutting device. [Figure 3] FIG. 2 is a diagram showing the configuration of a cutting unit equipped with a hub blade. [Figure 4] FIG. 10 is a diagram showing the configuration of a cutting unit equipped with a washer blade. [Figure 5] FIG. 2 is a diagram showing the configuration of a cutting unit. [Figure 6] FIG. 4 is a diagram showing the arrangement of cutting water nozzles, etc. [Figure 7] FIG. [Figure 8] FIG. [Figure 9] (A) is a diagram illustrating how to fix the nozzle adjustment jig to the spindle, and (B) is a diagram illustrating how to adjust the position of the cutting water nozzle using the nozzle adjustment jig. DETAILED DESCRIPTION OF THE INVENTION

[0019] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will now be described in detail with reference to the accompanying drawings, in which: Figures 1 and 2 are perspective views showing the appearance of a cutting device 2 to which the present invention is applied.

[0020] As shown in FIGS. 1 and 2, the mechanical section of the cutting device 2 is housed in an exterior cover 4 formed by combining a plurality of panels.

[0021] The cutting device 2 has a holding table 6 that holds the workpiece. The holding table 6 is rotatable in the θ direction about the Z axis by a rotary drive mechanism (not shown) provided below the holding table 6. The holding table 6 is also configured to be movable in the X axis direction, which is the processing feed direction, by a processing feed mechanism (not shown) provided below the holding table 6. A clamping mechanism 7 that clamps the annular frame F of the wafer unit U is provided around the holding table 6.

[0022] The cutting device 2 has two cutting units 10, 20 that serve as processing units for machining a workpiece held on the holding table 6. The two cutting units 10, 20 are arranged opposite each other in the Y-axis direction to form an opposed cutting mechanism, and the cutting device 2 is configured as a dual dicer. The cutting units 10, 20 are movable in the Y-axis direction as well as in the Z-axis direction. Note that the present invention is also applicable to a configuration having only one cutting unit as a processing unit.

[0023] The cutting units 10 and 20 are configured with a spindle that is rotated by a motor, a cutting blade fixed to the tip of the spindle, a machining fluid nozzle for supplying machining fluid to the machining point by the cutting blade during machining, and perform cutting processing along the planned division line set on the workpiece.

[0024] The cutting device 2 has a cassette table 14 on which a cassette 13 containing a plurality of wafers W is placed. The cassette table 14 is configured to be movable in the vertical direction (Z-axis direction).

[0025] A wafer unit U, which is a workpiece housed in the cassette 13, is configured to include a wafer W, a tape T to which the wafer W is attached, and an annular frame F attached to the tape T so as to surround the wafer W. The wafer W may be a semiconductor wafer, an optical device wafer, or the like, but is not particularly limited.

[0026] The cutting device 2 has a first transport mechanism 40 that includes a clamping mechanism 42 and a holding mechanism 44 mounted on an L-shaped lower arm 45. The clamping mechanism 42 grips the frame F of the wafer unit U and transports the wafer unit U between the cassette 13 and the guide rail 12. The holding mechanism 44 moves the unprocessed wafer unit U on the guide rail 12 onto the holding table 6, and also moves the cleaned wafer unit U in the cleaning mechanism 60 onto the guide rail 12.

[0027] The cutting device 2 has a second transfer mechanism 50 having a holding mechanism 54 attached to an L-shaped upper arm 55. The holding mechanism 54 is used to move the processed wafer unit U on the holding table 6 to a cleaning mechanism 60.

[0028] The cutting device 2 has a touch panel display monitor 8. An operator can input operation commands for the device through the display monitor 8, and the operating status of the device is also displayed on the display monitor 8.

[0029] The cutting device 2 includes a controller 80 for automatically controlling the various devices described above. Under the control of the controller 80, the wafer unit U accommodated in the cassette 13 is gripped by the clamping mechanism 42 of the first transport mechanism 40 and carried onto the guide rail 12, and is then held by the holding mechanism 44 of the first transport mechanism 40 and carried onto the holding table 6. The wafer unit U held by the holding table 6 is cut by the cutting units 10 and 20 while a machining fluid is supplied from a machining fluid nozzle (not shown).

[0030] After cutting, the wafer unit U is held by the holding mechanism 54 of the second transport mechanism 50 and moved to the cleaning mechanism 60 where it is cleaned. Thereafter, the wafer unit U is held by the holding mechanism 44 of the first transport mechanism 40 and moved onto the guide rails 12, and is gripped by the clamp mechanism 42 of the first transport mechanism 40 and carried out to the cassette 13.

[0031] 3 is a diagram showing the configuration of the cutting unit 20. The other cutting unit 10 (FIG. 1) has the same configuration.

[0032] The cutting unit 20 comprises a spindle housing 22, a spindle 23 that protrudes from the spindle housing 22 and is rotated by a motor (not shown), a mount flange 24 attached to the tip of the spindle 23, and a blade cover 70 provided at the tip of the spindle housing 22.

[0033] The cutting unit 20 comprises a mount fixing bolt 25 that fixes the mount flange 24 to the tip of the spindle 23, a cutting blade 21 that is attached to the mount flange 24, and a blade fixing nut 26 that is a fixing device for clamping and fixing the cutting blade 21 between the mount flange 24.

[0034] The mount flange 24 includes a cylindrical boss portion 241 and a flange portion 242 provided at one end of the boss portion 241 on the spindle housing 22 side. The flange portion 242 is formed in an annular shape with a diameter larger than the outer diameter of the boss portion 241, and is formed with an annular end surface 244 for abutting against the rear surface of the hub base 212 of the cutting blade 21. A male thread 243 is formed on the outer periphery of the other end of the boss portion 241 of the mount flange 24.

[0035] The cutting blade 21 shown in Fig. 3 is configured as a so-called hub blade, and includes an annular hub base 212 made of a metal such as an aluminum alloy, and an annular cutting blade 213 formed to surround the outer periphery of the hub base 212. A fitting hole 214 is provided in the center of the hub base 212 for attachment to a boss portion 241 of the mount flange 24. The boss portion 241 of the mount flange 24 is inserted into the fitting hole 214. The cutting blade 213 is made of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bonding material such as metal or resin, and is formed to a predetermined thickness.

[0036] The cutting blade 21 is fixed to the mount flange 24 by fitting the fitting hole 214 of the hub base 212 into the boss outer peripheral surface 246 of the cylindrical boss portion 241 of the mount flange 24 and fastening the blade fixing nut 26 to the male thread 243 of the boss portion 241. In this state, the cutting blade 21 is sandwiched between the blade fixing nut 26 and the mount flange 24, and the rear surface of the hub base 212 is supported by abutting against the annular end surface 244 formed on the mount flange 24.

[0037] A fixing hole 23a is formed at the tip of the spindle 23, coaxially with the spindle 23. With the mount flange 24 attached to the spindle 23, the mount flange 24 is fixed to the spindle 23 by fastening a mount fixing bolt 25 into the fixing hole 23a.

[0038] 4 shows an example of the configuration of a cutting unit 20A equipped with a cutting blade 21A configured as a washer blade made of a ring-shaped grinding stone. The cutting blade 21A is clamped between a mount flange 24 and a fixture consisting of a blade fixing nut 26 and a front flange 27. The other configurations are the same as those in FIG. 3.

[0039] As shown in FIG. 4, when the cutting blade 21A is configured as a washer blade, the rear surface of the cutting blade 21A abuts against the annular end surface 244 of the mount flange 24, and the fitting hole 274 of the front flange 27 fits into the outer peripheral surface 246 of the boss.

[0040] 3, the blade cover 70 provided at the tip of the spindle housing 22 has a cover body 71, a cutting water nozzle assembly 72, and a nozzle block 73. The cutting water nozzle assembly 72 is fixed to a mounting plate 74a that is fixed to the tip of a rod 74 of an air cylinder, and moves to a replacement position away from the cover body 71 when replacing the cutting blade.

[0041] As shown in Figures 5 and 6, the cutting water nozzle assembly 72 is fixed to the mounting plate 74a (Figure 3) with a height adjustment screw 72n. A long vertical hole 72z is formed in the cutting water nozzle assembly 72, and the up-down position of the cutting water nozzle assembly 72 is adjusted by loosening the height adjustment screw 72n. A connector 72c to which a hose 82 is connected is attached to the top of the cutting water nozzle assembly 72. A pair of cutting water nozzles 72a, 72b are connected to the bottom of the cutting water nozzle assembly 72. A flow path (not shown) is formed inside the cutting water nozzle assembly 72, connecting the connector 72c to the cutting water nozzles 72a, 72b. A splash cover 72e is provided to surround the outside of the cutting water nozzles 72a, 72b.

[0042] The cutting water nozzles 72a, 72b are made of approximately L-shaped pipe members and are arranged so that the lower end of the cutting blade is located between the horizontal parts of the nozzles 72a, 72b. In the horizontal parts of the cutting water nozzles 72a, 72b, cooling water injection ports 72d are provided at multiple locations spaced apart horizontally in positions facing the cutting blade.

[0043] As shown in FIG. 5, the nozzle block 73 is provided with a connector 73c to which a hose 84 is connected, and a shower nozzle 73a that supplies cooling water toward the outer periphery of the cutting blade.

[0044] Next, a nozzle adjustment jig for adjusting the height position of the cutting water nozzle will be described. As shown in Figures 7 to 9(A)(B), the nozzle adjustment jig 90 has a fixed part 92 that is removably fixed to the tip of the spindle 23 when the cutting blade is removed, and a positioning part 94 that positions the height position of the cutting water nozzles 72a, 72b at a predetermined position.

[0045] As shown in FIG. 7, the nozzle adjustment jig 90 of this embodiment has an arm portion 91, a positioning portion 94 extending parallel to the arm portion 91, and a connecting portion 96 connecting the ends of the arm portion 91 and the positioning portion 94, and has an overall appearance that is roughly U-shaped.

[0046] 7, a fixed portion 92 protrudes from the tip of the arm portion 91 along the longitudinal direction of the arm portion 91. The fixed portion 92 is made of a rod-shaped member that is inserted into the fixing hole 23a at the tip of the spindle 23. Note that instead of being made of a rod-shaped member, the fixed portion 92 may be made of, for example, a cylindrical member into which the spindle 23 is inserted, so that it is fixed to the spindle 23.

[0047] 7 and 8, the positioning unit 94 is configured to include a base unit 95 and a plate 97 having a predetermined thickness that is detachably disposed on the base unit 95. A plurality of plates 97 each having a different thickness are prepared and are selectively used.

[0048] The upper surface of the plate 97 abuts against the lower end portions (lowest points 72u of the horizontal portions) of the cutting water nozzles 72a, 72b (Fig. 9(A)), thereby forming an abutment surface 97a for determining the height position of the cutting water nozzles 72a, 72b (Fig. 9(A)). As a result, when a thick plate 97 is used, the position of the abutment surface 97a becomes higher, and the positions of the cutting water nozzles 72a, 72b (Fig. 9(A)) are set higher. Conversely, when a thin plate 97 is used, the position of the abutment surface 97a becomes lower, and the positions of the cutting water nozzles 72a, 72b (Fig. 9(A)) are set lower.

[0049] The thickness of the plate 97 is set according to, for example, the outer diameter of the mount flange 24 (FIG. 3). In this embodiment, four types of plates 97 with different thicknesses are prepared to accommodate four types of mount flanges with different outer diameters. The plates 97 are provided with a size indicator 97b (FIG. 7) that indicates the outer diameter of the corresponding mount flange. By selecting the plate 97 that corresponds to the outer diameter of the mount flange, it is possible to adjust the distance between the lowest point of the mount flange's outer periphery and the lowest point of the cutting water nozzles 72a, 72b to a specified distance.

[0050] 8, the base portion 95 is made of a plate-like member, and a horizontal fixing portion 95a is formed on the upper surface thereof, which is one step lower than the other portions. One end of the plate 97 in the longitudinal direction abuts against a step 95b formed in the horizontal fixing portion 95a, thereby positioning the plate 97.

[0051] Furthermore, a magnet is provided on either or both of the plate 97 and the horizontal fixing portion 95a, and they are fixed together by magnetic force. Furthermore, the plate 97 can be removed from the horizontal fixing portion 95a and replaced.

[0052] Next, the height adjustment of the cutting water nozzles 72a, 72b using the nozzle adjustment jig 90 will be described. First, as shown in FIG. 9(A), the cutting blade and the mount flange are removed from the tip of the spindle 23, and the fixing hole 23a at the tip of the spindle 23 is exposed.

[0053] Next, as shown in FIG. 9(A), the height adjustment screw 72n is loosened to allow the cutting water nozzle assembly 72 to move up and down, thereby making it possible to adjust the vertical positions of the cutting water nozzles 72a and 72b.

[0054] Also, as shown in FIG. 9(A), a plate 97 having a thickness for positioning the cutting water nozzles 72a, 72b at predetermined vertical positions is selected for the nozzle adjustment jig 90, and the plate 97 is fixed to the horizontal fixing portion 95a.

[0055] 9(B), the fixed portion 92 of the nozzle adjusting jig 90 is inserted into the fixing hole 23a at the tip of the spindle 23, and the lower ends (lowest points 72u of the horizontal portions) of the cutting water nozzles 72a, 72b are brought into contact with the contact surface 97a of the plate 97. This allows the distance from the axis C of the spindle 23 to the cooling water jetting ports 72d of the cutting water nozzles 72a, 72b to be set to a specific distance H.

[0056] Next, the height adjustment screw 72n is tightened to fix the cutting water nozzle assembly 72, and then the nozzle adjustment jig 90 is removed from the spindle 23.

[0057] In this way, as shown in Figures 9(A) and (B), the lower ends (lowest points 72u of the horizontal parts) of the cutting water nozzles 72a and 72b are adjusted to a height at which they abut against the positioning portion 94, and the cooling water outlets 72d of the cutting water nozzles 72a and 72b are positioned at a specific distance H from the axis of the spindle 23.

[0058] According to the above embodiment, it is possible to configure a nozzle adjustment jig that allows for easy position adjustment of the cutting water nozzle without the need for measuring instruments such as a scale. When adjusting the position, the cutting water nozzle can be positioned by abutting it against the positioning part, which makes it easy to work even in a small space and improves work efficiency.

[0059] Furthermore, by providing a detachable plate having a predetermined thickness in the positioning portion, the height position of the cutting water nozzle can be set according to the thickness of the plate. [Explanation of symbols]

[0060] 2 Cutting equipment 6 Holding table 10 Cutting unit 20 Cutting unit 21 Cutting blade 22 Spindle housing 23 Spindle 23a Fixing hole 24 Mounting flange 25 Mount fixing bolt 26 Blade fixing nut 27 Front flange 70 Blade Cover 71 Cover body 72 Cutting water nozzle assembly 72a Cutting water nozzle 72b Cutting water nozzle 72c connector 72d Cooling water nozzle 72u lowest point 72n Adjustment screw 72z long hole 72 73 Nozzle Block 73a Shower nozzle 90 Nozzle adjustment jig 91 Arm 92 Fixed part 94 Positioning part 95 Base 95a Horizontal fixing part 95b Step 96 Connecting part 97 Plate 97a Contact surface 97b size display

Claims

1. a holding table for holding the workpiece; a spindle to which a cutting blade for cutting a workpiece held by the holding table is detachably fixed while being clamped by a mount flange; a pair of cutting water nozzles disposed on the front and back sides of the cutting blade fixed to the spindle to supply cutting water to the cutting blade; A nozzle adjustment jig for adjusting the height position of the cutting water nozzle in a cutting device equipped with the a fixed portion that is detachably fixed to the tip of the spindle; a positioning unit that positions the height position of the cutting water nozzle at a predetermined position, The height position of the cutting water nozzle is adjusted to a height at which the lower end of the cutting water nozzle abuts on the positioning portion, and the cutting water nozzle is adjusted to be positioned at a specific distance from the axis of the spindle, The fixed portion is directly fixed to the tip of the spindle. Nozzle adjustment jig.

2. The positioning portion is A base portion and a plate having a predetermined thickness that is detachably disposed on the base portion, 2. The nozzle adjusting jig according to claim 1, wherein the thickness of the plate is set so that the cutting water nozzle is positioned at a specific distance from the axis of the spindle.

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