cassette

Abstract

To provide a cassette that can suppress its size and weight when conveying a small number of processing objects.SOLUTION: A cassette 1 for storing and conveying a plate-shaped processing object 200 comprises: a box body 2 which has an opening 7 in its lateral side; and a drawer type tray 10 which is configured such that the processing object 200 can be taken out therefrom / put thereto from above and which is stored in the box body 2 via the opening 7. When the tray 10 is stored in the box body 2, the opening 7 of the box body 2 is closed by a side wall 12 of the tray 10. The processing object 200 is placed on the tray 10 in a state of a frame unit 210 attached to a sheet 206 that blocks the opening 207 of an annular frame 205.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a cassette for containing workpieces. [Background technology]

[0002] Various plate-shaped workpieces, such as semiconductor wafers, resin package substrates, glass substrates, and ceramic substrates, are ground thinly or divided into individual chips, and are then placed one by one in a cassette and transported to each process. Typically, a cassette has many paired guide rails formed on the inner surfaces of the opposing side walls, and the workpieces are placed in the cassette so that the left and right ends of the frame unit, to which the workpieces are fixed with adhesive tape or the like, are supported by the guide rails (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Special Publication No. 05-071180 Summary of the Invention [Problem to be solved by the invention]

[0004] Because cassettes are designed to transport 10 or more workpieces at a time, they are often unnecessarily large or excessively heavy for transporting just a few workpieces. Furthermore, open cassettes can become contaminated with dust during transport. Furthermore, foreign objects can fall from the workpieces stored above and land on the workpieces below.

[0005] SUMMARY OF THE INVENTION An object of the present invention is to provide a cassette that can reduce the size and weight when transporting a small number of workpieces. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, the cassette of the present invention is a cassette for storing and transporting plate-shaped workpieces, and comprises a box body having an opening on one side, and a drawer-like tray configured to allow workpieces to be put in and taken out from above and stored in the box body through the opening, and when the tray is stored in the box body, the opening of the box body is closed by the side wall of the tray. The box is provided with a positioning portion inside that contacts the workpiece supported on the tray and positions the workpiece at a predetermined position on the tray. It is characterized by:

[0007] In the cassette, the workpiece may be placed on the tray in the form of a frame unit attached to a sheet that closes the opening of an annular frame.

[0008] In the cassette, the tray may support one workpiece, and the box may be a single-unit type that accommodates one tray.

[0009] The cassettes may be configured to be stackable with one another, and may have connecting units arranged on the sides thereof for securing the cassettes together when stacked.

[0011] In the cassette, the tray may have a gripping portion that is gripped when the tray is pulled out from the box body, and when the gripping portion is gripped, the locking mechanism that prevents the tray from being removed from the box body is released from engagement with the box body, allowing the tray to be removed from the box body. [Effects of the Invention]

[0012] The present invention has the effect of reducing the size and weight of workpieces when transporting a small number of workpieces. [Brief explanation of the drawings]

[0013] [Figure 1] FIG. 1 is a perspective view showing an example of the configuration of a processing device in which a cassette according to a first embodiment is installed. [Figure 2] FIG. 2 is a perspective view schematically illustrating an example of the configuration of a cassette according to the first embodiment. [Figure 3]FIG. 3 is a schematic plan view, partly in cross section, of the cassette shown in FIG. [Figure 4] FIG. 4 is a side view, partly in cross section, of the cassette shown in FIG. [Figure 5] FIG. 5 is a cross-sectional view schematically showing a locking mechanism of the cassette shown in FIG. [Figure 6] FIG. 6 is a cross-sectional view schematically showing a state in which the locking mechanism shown in FIG. 5 is disengaged. [Figure 7] FIG. 7 is a plan view of a docking unit for securing the cassettes shown in FIG. 2 together. [Figure 8] 8 is a plan view, partly in section, schematically showing a state in which the clamping portion of the cutting device shown in FIG. 1 grips the gripping portion of the cassette. [Figure 9] FIG. 9 is a side view, partly in section, showing a state in which the tray of the cassette shown in FIG. 8 is being pulled out from the box. [Figure 10] FIG. 10 is a schematic plan view, partly in section, showing the cassette shown in FIG. 9 with the tray pulled out from the box. [Figure 11] FIG. 11 is a plan view, partially in cross section, showing a schematic view of a cassette according to a modified example of the first embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0014] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by a person skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the configuration can be made within the scope of the gist of the present invention.

[0015] [Embodiment 1] A cassette according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing an example of the configuration of a processing device in which a cassette according to the first embodiment is installed. FIG. 2 is a perspective view schematically showing an example of the configuration of a cassette according to the first embodiment. FIG. 3 is a plan view, partially in cross section, showing the cassette shown in FIG. 2. FIG. 4 is a side view, partially in cross section, showing the cassette shown in FIG. 2. FIG. 5 is a cross-sectional view schematically showing a locking mechanism of the cassette shown in FIG. 2. FIG. 6 is a cross-sectional view schematically showing a state in which the locking mechanism shown in FIG. 5 is disengaged. FIG. 7 is a plan view of a connecting unit that secures the cassettes shown in FIG. 2 to each other.

[0016] (Workpiece) The cassette 1 according to the first embodiment is used to store a workpiece 200 shown in Fig. 1 and transport the workpiece 200 between processing apparatuses 100 illustrated in Fig. 1. The workpiece 200 to be transported by the cassette 1 according to the first embodiment is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, which has a base material such as silicon, gallium arsenide, SiC (silicon carbide), or sapphire. The workpiece 200 has devices 203 formed in areas partitioned in a grid pattern by a plurality of planned division lines 202 formed in a grid pattern on a surface 201.

[0017] The device 203 is, for example, an integrated circuit such as an IC (Integrated Circuit) or an LSI (Large Scale Integration), an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor), a MEMS (Micro Electro Mechanical Systems), or various types of memory (semiconductor memory device).

[0018] Furthermore, the workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer in which the central portion is thinned and a thick portion is formed on the periphery, or, in addition to a wafer, may be a resin package substrate such as a rectangular QFN (Quad Flat No leaded) package substrate having multiple devices sealed with resin, a ceramic substrate, a ferrite substrate, a substrate containing at least one of nickel and iron, a glass substrate, or the like.

[0019] In the first embodiment, the workpiece 200 has a sheet 206 attached to its back surface 204, with a ring-shaped frame 205 attached to its outer periphery, and is supported within an opening 207 of the ring-shaped frame 205, and is housed in the cassette 1 in the form of a frame unit 210. The frame unit 210 is housed in the cassette 1 in the form of a frame unit 210, with the back surface 204 of the workpiece 200 attached to the sheet 206 that closes the opening 207 of the frame 205.

[0020] (Processing equipment) The processing device 100 shown in Figure 1 is a cutting device in which a cassette 1 containing a workpiece 200 is installed, the workpiece 200 contained in the cassette 1 is held on a holding table 110, and the workpiece 200 is cut along a planned division line 202 with a cutting blade 121 to divide the workpiece 200 into individual devices 203.

[0021] 1, the processing apparatus 100 includes a holding table 110 that holds a workpiece 200 by suction on a holding surface 111, a cutting unit 120 that is a processing unit that cuts the workpiece 200 held on the holding table 110, an imaging unit 130 that takes an image of the workpiece 200 held on the holding table 110, and a control unit 190. As shown in FIG. 1, the processing apparatus 100 includes a pair of cutting units 120, i.e., a two-spindle dicer, a so-called facing dual type cutting apparatus.

[0022] The processing apparatus 100 also includes a moving unit 140 that moves the holding table 110 and the cutting unit 120 relative to one another. The moving unit 140 includes at least a processing feed unit 144 that performs processing feed on the holding table 110 in the X-axis direction parallel to the horizontal direction, an indexing feed unit 145 that performs indexing feed on the cutting unit 120 in the Y-axis direction parallel to the horizontal direction and perpendicular to the X-axis direction, a cutting feed unit 146 that performs cutting feed on the cutting unit 120 in the Z-axis direction parallel to the vertical direction perpendicular to both the X-axis direction and the Y-axis direction, and a rotational moving unit 147 that rotates the holding table 110 around an axis parallel to the Z-axis direction. That is, the moving unit 140 moves the holding table 110 and the cutting unit 120 relatively in the X-axis direction, the Y-axis direction, and the Z-axis direction and around the axis.

[0023] The processing feed unit 144 is installed on the device body 101, and moves the holding table 110 and the rotational movement unit in the X-axis direction, which is the processing feed direction, thereby moving the cutting unit 120 and the holding table 110 relatively along the X-axis direction. The indexing feed unit 145 is installed on the support frame 102 that stands upright from the device body 101, and moves the cutting unit 120 in the Y-axis direction, which is the indexing feed direction, thereby moving the cutting unit 120 and the holding table 110 relatively along the Y-axis direction.

[0024] The cutting feed unit 146 is installed on a support frame 102 that stands upright from the device body 101, and moves the cutting unit 120 in the Z-axis direction, which is the cutting feed direction, thereby moving the cutting unit 120 and the holding table 110 relatively along the Z-axis direction. The rotational movement unit 147 is supported by the processing feed unit, supports the holding table 110, and is disposed so as to be movable together with the holding table 110 in the X-axis direction.

[0025] The processing feed unit 144, the indexing feed unit 145, and the cutting feed unit 146 each include a well-known ball screw rotatably mounted about its axis, a well-known motor for rotating the ball screw about its axis, and a well-known guide rail for supporting the holding table 110 or the cutting unit 120 movably in the X-axis, Y-axis, or Z-axis direction. The rotation transfer unit 147 also includes a motor for rotating the holding table 110 about its axis.

[0026] The holding table 110 is disk-shaped, and a holding surface 111 that holds the workpiece 200 is formed from porous ceramic or the like. The holding table 110 is provided so as to be movable by a processing feed unit 144 between a processing region below the cutting unit 120 and a carry-in / out region that is spaced from below the cutting unit 120 and where the workpiece 200 is carried in and out, thereby being provided so as to be movable in the X-axis direction. The holding table 110 is provided so as to be rotatable about an axis parallel to the Z-axis direction by a rotation movement unit 147.

[0027] The holding table 110 has a holding surface 111 connected to a suction source (not shown), and is sucked by the suction source to suck and hold the workpiece 200 placed on the holding surface 111. In the first embodiment, the holding table 110 sucks and holds the back surface 204 of the workpiece 200 via a sheet 206. Also, as shown in FIG. 1, a plurality of clamps 112 for clamping a frame 205 are provided around the periphery of the holding table 110.

[0028] The cutting units 120 are processing units in which cutting blades 121 are attached to spindles 123 and which cut the workpiece 200 held on the holding table 110. The cutting units 120 are each provided so as to be movable in the Y-axis direction by an indexing feed unit 145 and so as to be movable in the Z-axis direction by a cutting feed unit 146 relative to the workpiece 200 held on the holding table 110.

[0029] The cutting unit 120 is provided on a support frame 102 that stands upright from the device main body 101 via an indexing feed unit, a notching feed unit, etc. The cutting unit 120 can position the cutting blade 121 at any position on the holding surface 111 of the holding table 110 by an indexing feed unit 145 and a notching feed unit 146.

[0030] The cutting unit 120 includes a cutting blade 121, a spindle housing 122 that is movable in the Y-axis and Z-axis directions by an indexing feed unit 145 and a cutting feed unit 146, a spindle 123 that is rotatable about its axis on the spindle housing 122 and has the cutting blade 121 attached to its tip, and a spindle motor (not shown) that rotates the spindle 123 about its axis.

[0031] The cutting blade 121 is an extremely thin cutting grindstone having a substantially ring shape. The cutting blade 121 is fixed to the tip of the spindle 123. In the first embodiment, the cutting blade 121 is a so-called hub blade that includes an annular circular base and an annular cutting blade that is disposed on the outer periphery of the circular base and cuts the workpiece 200. The cutting blade is made of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bonding material such as metal or resin, and is formed to a predetermined thickness. In the present invention, the cutting blade 121 may be a so-called washer blade that is made of only the cutting blade.

[0032] The axes of the cutting blade 121 and spindle 123 of the cutting unit 120 are set parallel to the Y-axis direction.

[0033] The imaging unit 130 is fixed to one of the cutting units 120 so as to move integrally with the cutting unit 120. The imaging unit 130 is equipped with an imaging element that captures an image of an area to be divided of the workpiece 200 held on the holding table 110 before cutting. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. The imaging unit 130 captures an image of the workpiece 200 held on the holding table 110 to obtain an image for performing alignment between the workpiece 200 and the cutting blade 121, and outputs the obtained image to the control unit 190.

[0034] The processing apparatus 100 also includes an X-axis position detection unit (not shown) for detecting the position of the holding table 110 in the X-axis direction, a Y-axis position detection unit (not shown) for detecting the position of the cutting unit 120 in the Y-axis direction, and a Z-axis position detection unit for detecting the position of the cutting unit 120 in the Z-axis direction. The X-axis position detection unit and the Y-axis position detection unit may be configured with a linear scale parallel to the X-axis direction or the Y-axis direction, and a read head. The Z-axis position detection unit detects the position of the cutting unit 120 in the Z-axis direction using motor pulses. The X-axis position detection unit, the Y-axis position detection unit, and the Z-axis position detection unit output the position of the holding table 110 in the X-axis direction and the position of the lower end of the cutting blade of the cutting unit 120 in the Y-axis direction or the Z-axis direction to the control unit 190.

[0035] In the first embodiment, the positions in the X-axis direction, the Y-axis direction, and the Z-axis direction of the holding table 110 and the cutting unit 120 of the processing apparatus 100 are determined based on a predetermined reference position (not shown). In the first embodiment, the positions in the X-axis direction, the Y-axis direction, and the Z-axis direction are determined by the distances in the X-axis direction, the Y-axis direction, and the Z-axis direction from the reference position. In the first embodiment, the XY coordinates represented by the X-axis direction and the Y-axis direction of the processing apparatus 100 (coordinates indicated by the distance in the X-axis direction from the reference position indicating the position in the X-axis direction and the distance in the Y-axis direction from the reference position indicating the position in the Y-axis direction) may indicate any position of the workpiece 200 held on the holding surface 111 of the holding table 110.

[0036] The processing device 100 also includes a cassette elevator 150 on which a cassette 1 containing a workpiece 200 before and after cutting is placed, and which moves the cassette 1 up and down along the Z-axis direction, a cleaning unit 160 which cleans the workpiece 200 after cutting, a pair of guide rails 170 which position the workpiece 200 before and after cutting, a carry-in / out unit 180 (shown in Figure 6) which moves the workpiece 200 into and out of the cassette 1, a first conveying unit 182 which transports the workpiece 200 positioned by the pair of guide rails 170 to the holding table 110 and transports the workpiece 200 after cleaning to the pair of guide rails 170, and a second conveying unit 184 which transports the workpiece 200 after cutting from the holding table 110 to the cleaning unit 160.

[0037] The pair of guide rails 170 are arranged adjacent to the cassette elevator 150 in the Y-axis direction and above the holding table 110 positioned in the carry-in / out area, and are spaced apart from each other in the X-axis direction. The pair of guide rails 170 are formed in a straight line parallel to the Y-axis direction and include a placement surface 171 on which the frame 205 is placed, and positioning walls 172 erected from edges on opposite sides of the placement surface 171. The pair of guide rails 170 are provided so as to be movable in the X-axis direction by a drive mechanism (not shown), and are moved by the movement mechanism in directions away from each other or directions toward each other.

[0038] The loading / unloading unit 180 is provided so as to be movable in the Y-axis direction by a moving mechanism (not shown). The loading / unloading unit 180 includes a clamp portion 181 (shown in FIG. 6) that grips a tray 10 of the cassette 1, which will be described later.

[0039] The first transport unit 182 is provided so as to be movable in the Y-axis direction by a movement mechanism (not shown) and so as to be movable up and down along the Z-axis direction. The first transport unit 182 includes a suction portion 183 that suctions a frame 205 that supports the workpiece 200 in an opening 207.

[0040] The second transport unit 184 is provided so as to be movable in the Y-axis direction by a movement mechanism (not shown) and so as to be movable up and down along the Z-axis direction. The second transport unit 184 includes a suction portion 185 that suctions a frame 205 that supports the workpiece 200 in an opening 207.

[0041] The control unit 190 controls each component of the machining apparatus 100 to cause the machining apparatus 100 to perform a machining operation on the workpiece 200. The control unit 190 is a computer having an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or RAM (random access memory), and an input / output interface device. The arithmetic processing device of the control unit 190 performs arithmetic processing in accordance with a computer program stored in the storage device, and outputs control signals for controlling the machining apparatus 100 to each component of the machining apparatus 100 via the input / output interface device.

[0042] The control unit 190 is connected to a display unit (not shown) configured with a liquid crystal display device or the like that displays the status of the machining operation, images, etc., and an input unit (not shown) that the operator uses to register machining content information, etc. The input unit is configured with at least one of a touch panel provided on the display unit and an external input device such as a keyboard.

[0043] (cassette) The cassette 1 is a single-sheet type that accommodates a single workpiece 200 in the form of a frame unit 210, and is transported between processing devices 100 to transport the accommodated workpiece 200 between processing devices 100. As shown in Figures 2, 3, and 4, the cassette 1 includes a flat box-shaped box body 2 and a tray 10. The box body 2 and the tray 10 are made of resin or metal, and are preferably made of a conductive material as a countermeasure against static electricity. Note that the device 203 is omitted from Figure 3.

[0044] The box body 2 comprises a bottom plate 3 which is rectangular in plan view and parallel to the horizontal direction and which is installed on the cassette elevator 150, a pair of side plates 4 which stand upright from the outer edge of the bottom plate 3 installed on the cassette elevator 150 and are spaced apart along the X-axis direction, a rear plate 5 which stands upright from the outer edge of the bottom plate 3 installed on the cassette elevator 150 on the side away from the pair of guide rails 170 along the Y-axis direction, and a ceiling plate 6 which is connected to the upper ends of the pair of side plates 4 and the rear plate 5 and is parallel to the horizontal direction.

[0045] When the box body 2 is installed in the cassette elevator 150, an opening 7 is formed that faces the pair of guide rails 170. The opening 7 is surrounded by the bottom plate 3, the pair of side plates 4, and the ceiling plate 6, and communicates with the inside and outside of the box body 2. Thus, the box body 2 has the opening 7 on the side that faces the pair of guide rails 170. One tray 10 can be freely inserted and removed through the opening 7 in the box body 2, and one tray 10 is stored therein.

[0046] The tray 10 is formed in a drawer shape and can be inserted into and removed from the box body 2 through the opening 7. The tray 10 includes a flat support plate 11 that is placed on the bottom plate 3 when housed in the box body 2, and side walls 12 that stand upright from the outer edge of the support plate 11 and close the opening 7 when the support plate 11 is housed in the box body 2. In the first embodiment, the width of the side walls 12 is equal to the width of the support plate 11. A buffer sheet 13 is attached to the upper surface of the support plate 11, on which the workpiece 200 is placed.

[0047] The support plate 11 is configured so that the workpiece 200 is placed on the upper surface thereof in the form of a frame unit 210 via a buffer sheet 13, and the workpiece 200 can be taken in and out from above. For this reason, the tray 10 supports one workpiece 200. The support plate 11 is housed in the box body 2 through the opening 7. When the support plate 11 is housed in the box body 2, the side wall 12 closes the opening 7, thereby being housed in the box body 2. In this way, when the tray 10 is housed in the box body 2, the opening 7 of the box body 2 is closed by the side wall 12 of the tray 10.

[0048] 5 and 6, the tray 10 has a gripping portion 14 that is gripped when the tray 10 is pulled out from the box body 2. The gripping portion 14 is disposed in a recess 15 provided in the center in the thickness direction and width direction of the side wall 12. The recess 15 is recessed from the outer surface of the side wall 12.

[0049] The gripping unit 14 includes a fixed gripping member 141, a movable gripping member 142, and an urging member 143. The fixed gripping member 141 is fixed within the recess 15 and is formed like a plate with its upper and lower surfaces parallel to the horizontal direction, and is disposed with a gap between the upper and lower surfaces and the inner surface of the recess 15. The movable gripping member 142 is formed like a plate with its upper and lower surfaces parallel to the horizontal direction, and is disposed above and parallel to the fixed gripping member 141. The movable gripping member 142 is supported by a support mechanism (not shown) so that it can move up and down vertically. The support mechanism supports the movable gripping member 142 so that it can move up and down while keeping it parallel to the fixed gripping member 141. The urging member 143 is formed by an elastically deformable spring and is disposed between the fixed gripping member 141 and the movable gripping member 142 to urge the movable gripping member 142 upward.

[0050] The cassette 1 also has a locking mechanism 16 shown in Figures 5 and 6. The locking mechanism 16 has a locking hole 161 provided in the top panel 6 and a locking protrusion 162 provided on the movable gripping member 142. The locking hole 161 is provided at the end of the top panel 6 closer to the opening 7, and is recessed from the inner surface of the top panel 6. The locking protrusion 162 is protruded from the movable gripping member 142 toward the inner surface of the top panel 6.

[0051] 5, when the side wall 12 closes the opening 7 and the movable gripping member 142 is biased by the biasing member 143, the locking mechanism 16 engages the locking protrusion 162 with the locking hole 161, thereby restricting the tray 10 from being removed from the box body 2. Also, when the locking mechanism 16 is gripped by the clamping portion 181 of the processing device 100 and the movable gripping member 142 is brought closer to the fixed gripping member 141 against the biasing force of the biasing member 143, the locking protrusion 162 comes out of the locking hole 161, the engagement of the locking mechanism 16 with the box body 2 is released, and the tray 10 is allowed to be removed from the box body 2.

[0052] In the present invention, the locking mechanism 16 may be provided with a locking protrusion 162 protruding toward the movable gripping member 142 on the inner surface of the ceiling panel 6 of the box body 2, and a locking hole 161 recessed from the upper surface and capable of engaging with the locking protrusion 162 on the upper surface of the movable gripping member 142.

[0053] The cassette 1 also includes a positioning unit 20 inside the box body 2, as shown in FIGS. 3 and 4. The positioning unit 20 is made of an elastic resin such as sponge or rubber. The positioning unit 20 is preferably made of a conductive material as a countermeasure against static electricity. In the first embodiment, the positioning unit 20 is attached to the inner surfaces of the pair of side plates 4 and the inner surface of the rear plate 5. In the first embodiment, the positioning unit 20 contacts the outer edge of the frame 205 of the frame unit 210 supported by the tray 10 housed in the box body 2, elastically deforms in a direction approaching the inner surfaces of the side plates 4 and the rear plate 5, and positions the frame 205, i.e., the workpiece 200, at a predetermined center position on the support plate 11 of the tray 10 by its elastic restoring force.

[0054] The positioning portion 20 contacts the outer edge of the frame 205 of the frame unit 210 supported by the tray 10 housed in the box body 2, and thereby contacts the outer edge of the workpiece 200 via the frame 205. In the first embodiment, the positioning portion 20 attached to the inner surface of the pair of side plates 4 includes an inclined surface 21 against which the frame 205 abuts, which is gradually inclined in a direction away from the inner surface of the side plate 4 as it extends from the opening 7 toward the rear plate 5. In the present invention, it is also preferable that the positioning portion 20 restricts the workpiece 200 from moving up and down within the box body 2 by an elastic restoring force when elastically deformed.

[0055] 2, the cassettes 1 are configured to be stackable, and are provided with positioning protrusions 30 and positioning recesses 31 that position the side panels 4 and rear panels 5 on the same plane when stacked on top of each other. In the first embodiment, the cassettes 1 are provided with concave positioning recesses 31 at the four corners of the bottom panel 3 extending from the underside of the bottom panel 3, and convex positioning protrusions 30 at the four corners of the top panel 6 extending from the upper surface of the top panel 6, and the positioning protrusions 30 engage with the positioning recesses 31, thereby positioning the cassettes relative to each other when stacked on top of each other.

[0056] 2, the cassettes 1 are provided with fixing protrusions 40 for fixing the cassettes 1 to each other in a stacked state. The fixing protrusions 40 include an upper fixing protrusion 41 and a lower fixing protrusion 42 provided on the outer surface of each side plate 4. In the first embodiment, the upper fixing protrusion 41 and the lower fixing protrusion 42 are arranged side by side in the thickness direction of the box body 2. The upper fixing protrusion 41 is used to fix the cassette 1 stacked above, and the lower fixing protrusion 42 is used to fix the cassette 1 stacked below.

[0057] The upper fixed protrusions 41 and the lower fixed protrusions 42 have the same configuration, and therefore the same parts will be described with the same reference numerals. The upper fixed protrusions 41 and the lower fixed protrusions 42 each have a cylindrical small diameter portion 43 that protrudes from the outer surface of the side plate 4 toward the side of the box body 2, and a large diameter portion 44 that is connected to the tip of the small diameter portion 43 and has a larger diameter than the small diameter portion 43. The small diameter portion 43 and the large diameter portion 44 are arranged coaxially. Furthermore, two upper fixed protrusions 41 and two lower fixed protrusions 42 are provided on each side plate 4 at a distance along the longitudinal direction.

[0058] 2, a connecting unit 50 that secures multiple cassettes 1 together when stacked on top of each other is placed on the outer surface of the side plate 4, which is the side surface. In the first embodiment, the connecting unit 50 includes a connecting portion 51 that is placed on the outer surface of the side plate 4, and a gripping portion 52 that is bent from the upper end of the connecting portion 51, as shown in FIG. 7. The thickness of the connecting portion 51 is equal to or less than the length of the small diameter portion 43.

[0059] The connecting portion 51 is formed into a rectangular plate-like shape in plan view, and has an upper fixing hole 53 and a lower fixing hole 54 formed at intervals along the longitudinal direction. The upper fixing hole 53 is used to fix the cassette 1 stacked above, and the lower fixing hole 54 is used to fix the cassette 1 stacked below. The upper fixing hole 53 and the lower fixing hole 54 have the same configuration, and therefore the same parts will be described with the same reference numerals.

[0060] The upper fixing hole 53 and the lower fixing hole 54 penetrate the connecting part 51. As shown in Fig. 7 , the upper fixing hole 53 and the lower fixing hole 54 each include a large diameter hole 55 that allows the large diameter part 44 to pass through to the inside, and a small diameter hole 56 that is continuous with the inner edge of the large diameter hole 55 and allows the small diameter part 43 to pass through to the inside but prevents the large diameter part 44 from passing through. Two small diameter holes 56 are provided for the large diameter hole 55, and are arranged in positions aligned with the large diameter holes 55 in the longitudinal direction of the connecting part 51.

[0061] The connecting unit 50 is placed on the outer surface of the side plate 4 with its large diameter portion 44 passing through the large diameter hole 55 of the fixing holes 53, 54, and moves downward relative to the cassettes 1 to position its small diameter portion 43 in the upper small diameter hole 56 as shown by the solid line in Fig. 7, thereby fixing the multiple cassettes 1 to one another in a stacked state. Furthermore, even if only the upper cassette 1 of the multiple cassettes 1 fixed to one another in a stacked state is lifted, the connecting unit 50 moves upward relative to the cassettes 1 to position its small diameter portion 43 in the lower small diameter hole 56 as shown by the dotted line in Fig. 7, thereby preventing the multiple cassettes 1 from being released from being fixed to one another.

[0062] (Machining operation) Next, the processing operation of the processing device 100 will be described. Fig. 8 is a plan view, partially in section, showing a state in which the clamping portion of the cutting device shown in Fig. 1 is gripping the gripping portion of the cassette. Fig. 9 is a side view, partially in section, showing a state in which the tray of the cassette shown in Fig. 8 is being pulled out from the box. Fig. 10 is a plan view, partially in section, showing a state in which the tray of the cassette shown in Fig. 9 is being pulled out from the box. Note that device 203 is omitted from Figs. 8 and 10.

[0063] In the processing apparatus 100 having the above-described configuration, processing conditions are set in the control unit 190, and a cassette 1 containing workpieces 200 is placed in the cassette elevator 150. The processing apparatus 100 starts processing operations when the control unit 190 receives a command to start the processing operations from an operator or the like. When the processing operations start, the control unit 190 controls the loading / unloading unit 180 to grip the gripping portion 14 of the cassette 1 with the clamping portion 181, as shown in Figures 6 and 8, and releases the engagement of the locking mechanism 16.

[0064] In the processing operation, the control unit 190 of the processing apparatus 100 controls the processing feed unit 144 to position the holding table 110 in the carry-in / out area, and controls the movement mechanism to move the pair of guide rails 170 away from each other. In the processing operation, the control unit 190 of the processing apparatus 100 controls the carry-in / out unit 180 to pull out the tray 10 from inside the box body 2 onto the placement surfaces 171 of the pair of guide rails 170, as shown in FIG.

[0065] 10 , in the processing operation, the processing apparatus 100 pulls out the entire tray 10 from the box 2 onto the placement surface 171 of the pair of guide rails 170, and then the control unit 190 controls the movement mechanism to move the pair of guide rails 170 closer to each other, thereby positioning the tray, i.e., the workpiece 200, in the X-axis direction. In the processing operation, the control unit 190 controls the first transport unit 182 to cause the suction portion 183 to adsorb the frame 205 on the tray 10, and causes the first transport unit 182 to lift the workpiece 200. In the processing apparatus 100, the control unit 190 controls the carry-in / out unit 180 to place the tray 10 on the guide rails 170 into the cassette 1, and then the control unit 190 controls the first transport unit 182 to place the workpiece 200 on the holding surface 111 of the holding table 110 in the carry-in / out area via the sheet 206.

[0066] In the processing operation, the control unit 190 of the processing apparatus 100 controls the holding table 110 to suck and hold the workpiece 200 on the holding surface 111 via the sheet 206, and clamps the frame 205 with the clamp section 112. The control unit 190 of the processing apparatus 100 controls the moving unit 140 to move the holding table 110 to below the imaging unit 130, and the imaging unit 130 captures an image of the workpiece 200 sucked and held on the holding table 110, thereby performing alignment.

[0067] In the processing operation, the control unit 190 of the processing apparatus 100 controls the moving unit 140 and the like based on the processing conditions, and while rotating the spindle 123 around its axis, the cutting blade 121 and the workpiece 200 are moved relatively along the planned dividing lines 202, and the cutting blade 121 is caused to cut into the planned dividing lines 202 of the workpiece 200 until it reaches the sheet 206, thereby performing cutting processing. The processing apparatus 100 cuts the planned dividing lines 202 of the workpiece 200 in accordance with the processing conditions, and divides the workpiece 200 into individual devices 203. When all the planned dividing lines 202 of the workpiece 200 have been cut, the processing apparatus 100 moves the holding table 110 from the processing area toward the carry-in / out area.

[0068] In the processing apparatus 100, the control unit 190 controls the moving unit 140 to stop the movement of the holding table 110 in the carry-in / out area, and the control unit 190 controls the holding table 110 to stop the suction holding of the workpiece 200 on the holding surface 111, and releases the clamping of the clamping section 112. In the processing apparatus 100, the control unit 190 controls the second transport unit 184 to transport the workpiece 200 from the holding table 110 to the cleaning unit 160. In the processing apparatus 100, the control unit 190 controls the cleaning unit 160 to clean the workpiece 200.

[0069] Furthermore, in the processing operation, the control unit 190 of the processing apparatus 100 controls the carry-in / out unit 180 to pull out the tray 10 onto the guide rails 170, and controls the first transport unit 182 to transport the cleaned workpiece 200 from the cleaning unit 160 to the tray 10 on the pair of guide rails 170. In the processing apparatus 100, the control unit 190 controls the carry-in / out unit 180 to store the tray 10 on the guide rails 170 inside the box body 2, thereby completing the processing operation.

[0070] The cassette 1 of the embodiment 1 described above has a tray 10 that supports one workpiece 200 and is formed in the shape of a drawer that can be easily inserted and removed from the box body 2, making it possible to transport a small number of workpieces 200 in a manufacturing process for small lots of a wide variety of workpieces, and also making it possible to prevent foreign matter such as dust from adhering to the workpieces 200 while they are stored in the cassette 1.

[0071] Furthermore, the cassette 1 has a tray 10 that supports one workpiece 200 and is formed in a drawer shape that can be freely inserted and removed from the box body 2, which makes it possible to reduce the size and weight of the cassette 1 itself. As a result, the cassette 1 according to the first embodiment has the effect of being able to reduce the size and weight when transporting a small number of workpieces 200.

[0072] Furthermore, the cassettes 1 are configured to be stackable on top of each other and are secured in a stacked state by the connecting unit 50, so that the number of cassettes 1 can be set according to the required number of workpieces 200 to be transported, thereby preventing the cassettes 1 from becoming excessive in size and weight.

[0073] Furthermore, the cassette 1 is provided with a locking mechanism 16 that prevents the tray 10 from being separated from the box body 2 during transport, so there is no risk of the workpiece 200 falling during transport. Also, because the cassette 1 is provided with the locking mechanism 16, the engagement of the locking mechanism 16 can be released by gripping the gripping portion 14 of the tray 10, so the engagement of the locking mechanism 16 can be released without any unnecessary operation.

[0074] [Modification] A cassette according to a modified example of the first embodiment of the present invention will be described with reference to the drawings. Fig. 11 is a plan view showing a schematic partial cross section of a cassette according to a modified example of the first embodiment. In Fig. 11, the same parts as those in the first embodiment are designated by the same reference numerals and their description will be omitted. In Fig. 11, the device 203 is omitted.

[0075] As shown in Fig. 11 , the cassette 1 according to the modified example is the same as that of the first embodiment, except that the width of the side wall 12 of the tray 10 is wider than the width of the support plate 11. In the modified example, it is desirable that the width of the side wall 12 of the tray 10 be as narrow as possible. Also, in the modified example, the movement distance of the guide rails 170 and the installation area between the guide rails 170 and the tray 10 may be changed as appropriate. In the modified example, it is desirable that the processing device 100 move the pair of guide rails 170 closer to each other to position the tray 10, i.e., the workpiece 200, when the side wall 12 of the tray 10 pulled out of the box body 2 is no longer positioned between the pair of guide rails 170.

[0076] The present invention is not limited to the above-described embodiment. In other words, various modifications can be made without departing from the gist of the present invention. In the present invention, for example, a packing such as an O-ring may be provided on the outer periphery of the side wall 12 of the tray 10 to seal the inside of the tray 10. In this case, an exhaust port with a filter may be formed in the box 2. In this way, even if the atmosphere inside the processing apparatus 100 is clean and the cleanliness level outside the processing apparatus 100 is low, the atmosphere inside the cassette 1 during transport can be kept clean. Furthermore, an exhaust port that can exhaust the internal atmosphere through a filter may be provided in the box 2.

[0077] In the present invention, a tag such as an RFID (radio frequency identifier) ​​may be attached to the cassette 1 so that the cassette 1 can be individually identified.

[0078] Furthermore, in the first embodiment, the processing apparatus 100 is a cutting apparatus, but the present invention is not limited to a cutting apparatus, and may be various processing apparatuses, such as a grinding apparatus that grinds the workpiece 200, a polishing apparatus that polishes the workpiece, or a laser processing apparatus that laser processes the workpiece 200. Furthermore, in the present invention, by stacking and installing a plurality of cassettes 1 in the cassette elevator 150, a plurality of workpieces 200 may be carried into the processing apparatus 100, and the plurality of workpieces 200 may be processed continuously, similar to the case where a cassette having a plurality of stages of guide rails is used. [Explanation of symbols]

[0079] 1 cassette 2 box body 7 aperture 10 trays 12 Side wall 14 Gripping part 16 Locking mechanism 20 Positioning section 50 Connecting Unit 200 Workpiece 205 frames 206 seats 207 Aperture 210 Frame Unit

Claims

1. A cassette for storing and transporting plate-shaped workpieces, A box body having an opening on a side thereof; a drawer-like tray configured to allow workpieces to be put in and taken out from above and accommodated in the box body through the opening, When the tray is housed in the box, the opening of the box is closed by the side wall of the tray, The cassette is characterized in that the box is provided with a positioning portion inside the box that comes into contact with the workpiece supported on the tray and positions the workpiece at a predetermined position on the tray.

2. 2. A cassette according to claim 1, wherein the workpiece is placed on said tray in the form of a frame unit attached to a sheet that closes the opening of the annular frame.

3. 3. A cassette according to claim 1, wherein said tray supports one workpiece, and said box is a single-piece type that accommodates one said tray.

4. 4. The cassette according to claim 1, wherein the cassettes are configured to be stackable on one another and have connecting units arranged on the sides thereof for securing the cassettes together when stacked.

5. 5. A cassette as claimed in any one of claims 1 to 4, wherein the tray has a gripping portion that is gripped when the tray is pulled out of the box body, and when the gripping portion is gripped, the engagement of a locking mechanism that prevents the tray from being removed from the box body with the box body is released, allowing the tray to be removed from the box body.

Images