Thin Film Sensor

Abstract

To provide a thin film sensor capable of being easily and directly manufactured even on a curved surface or at a recess.SOLUTION: A thin film sensor 1 includes: an insulating layer 3 provided on a surface of a measured body; and a sensor layer 4 which is laid on the insulating layer 3 and which includes a plurality of regions walled by grooves 6 formed in a manner to penetrate in a thickness direction by irradiation of a laser. At least one of the plurality of regions is a sensor region for sensing a pressure against the measured body and the others are non-sensor regions not sensing the pressure against the measured body.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to thin film sensors. [Background technology]

[0002] Conventionally, when manufacturing a thin-film sensor directly on a flat installation surface, lithography has been used to transfer a predetermined pattern onto the installation surface (for example, Patent Document 1). In this lithography, a resist layer is exposed to light through a mask on which a pattern is drawn, and then the exposed resist layer is developed to form the predetermined pattern on the installation surface.

[0003] The surface on which the thin-film sensor is installed is not limited to a flat surface, but may also be a curved surface. Patent Document 2 discloses that a sensor is directly manufactured on a curved surface (the inner peripheral surface of the outer ring of a bearing) using lithography. In this case, too, light is irradiated through a mask, just as in the case where the installation surface is flat. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 5-4464 [Patent Document 2] Japanese Patent Application Laid-Open No. 2008-196956 Summary of the Invention [Problem to be solved by the invention]

[0005] When manufacturing a sensor directly on a curved surface, the mask must be fitted to the curved surface. However, this requires the mask to fit the curved surface with high precision, which is not easy to achieve. This is particularly noticeable when the diameter of the curved surface is small. Also, it is difficult to fix the mask in a recessed location.

[0006] An object of the present invention is to provide a thin film sensor that can be easily and directly manufactured even on a curved surface or in a recessed location. [Means for solving the problem]

[0007] (1) The present invention comprises an insulating layer provided on the surface of a measured object, and a sensor layer laminated on the insulating layer and having a plurality of regions partitioned by grooves formed by laser irradiation to penetrate the insulating layer in the thickness direction, at least one of the plurality of regions being a sensor region that senses the pressure or temperature of the measured object, and the remaining regions being non-sensor regions that do not sense the pressure or temperature of the measured object.

[0008] (2) In the present invention described above in (1), the grooves may be formed by irradiating the surface of the sensor layer with a laser beam of a duration of picoseconds or less.

[0009] (3) In the present invention described above in (1), the grooves may be formed by irradiating the surface of the sensor layer with a laser while the surface of the sensor layer is cooled. [Effects of the Invention]

[0010] According to the present invention, it is possible to provide a thin film sensor that can be easily and directly manufactured even on a curved surface or in a recessed location. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a schematic perspective view showing a state in which a thin-film sensor according to a first embodiment of the present invention is used. [Figure 2] FIG. 2 is a schematic top view showing the thin-film sensor of FIG. 1. [Figure 3] 3 is a cross-sectional view taken along the line AA in FIG. 2. [Figure 4] FIG. 4 is a schematic top view showing a thin-film sensor according to a second embodiment of the present invention. [Figure 5] 5 is a cross-sectional view of FIG. 4 taken along line B-B. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings.

[0013] 1 to 3 are diagrams showing a thin-film sensor according to a first embodiment of the present invention, in which Fig. 1 is a schematic perspective view showing the state of use, Fig. 2 is a schematic top view, and Fig. 3 is a cross-sectional view taken along line AA in Fig. 2. Note that in Fig. 1, some of the gear teeth are cut away for ease of explanation.

[0014] The thin-film sensor 1 of the first embodiment is a pressure sensor that includes an insulating layer 3 provided on the surface of a measurement object 2, a sensor layer 4 laminated on the insulating layer 3, and a protective layer 5 laminated on the sensor layer 4, and detects pressure acting on the measurement object 2. In this example, the measurement object 2 is a gear, and the thin-film sensor 1 is provided on the tooth surface of the gear. However, the measurement object 2 is not limited to a gear.

[0015] The insulating layer 3 has a generally rectangular plate shape when viewed from above and is provided on one tooth surface of the gear 2. In this case, the insulating layer 3 is provided on the tooth surface so that its longitudinal direction is along the tooth width direction. Sputtering, for example, is used to provide the insulating layer 3 on the tooth surface. The insulating layer 3 may be made of any insulating material, such as alumina, ceramic, or glass.

[0016] The sensor layer 4 has a generally rectangular plate shape when viewed from above, and is provided on the insulating layer 3. The sensor layer 4 is provided on the insulating layer 3 so that the longitudinal direction of the sensor layer 4 is aligned with the longitudinal direction of the insulating layer 3. Sputtering, for example, is used to provide the sensor layer 4 on the insulating layer 3. The sensor layer 4 is made of a copper-manganese-nickel alloy, a copper-nickel alloy, a nickel-chromium alloy, or the like.

[0017] The sensor layer 4 has multiple regions partitioned by grooves 6 formed by laser irradiation to penetrate the sensor layer 4 in the thickness direction. At least one of these multiple regions is a sensor region that senses pressure applied to the tooth surface of the gear 2, and the remaining regions are non-sensor regions that do not sense pressure applied to the tooth surface of the gear 2. In this embodiment 1, multiple grooves 7 to 16 are formed in the sensor layer 4. Because the grooves 7 to 16 are formed to penetrate the sensor layer 4 in the thickness direction, the insulating layer 3 serves as the bottom.

[0018] The groove 7 is formed in approximately the center of the sensor layer 4 in the longitudinal direction and on one end side in the lateral direction of the sensor layer 4. The groove 7 has a first groove portion 17 extending from one end side in the lateral direction of the sensor layer 4 toward the other end side in the lateral direction of the sensor layer 4, a second groove portion 18 extending from the other end side of the first groove portion 17 in the lateral direction of the sensor layer 4 toward the other end side in the longitudinal direction of the sensor layer 4, and a third groove portion 19 extending from the other end side of the second groove portion 18 in the longitudinal direction of the sensor layer 4 toward one end side in the lateral direction of the sensor layer 4. The one end side in the lateral direction of the first groove portion 17 of the sensor layer 4 and the one end side in the lateral direction of the sensor layer 4 of the third groove portion 19 are formed in a substantially arc shape so that the distance between them gradually increases toward the one end side in the lateral direction of the sensor layer 4.

[0019] The first groove 17 is connected to a first shaved-off portion 20 formed at one end in the lateral direction of the sensor layer 4. The first shaved-off portion 20 is formed by shaving off one edge in the lateral direction of the sensor layer 4 on the side of one end in the longitudinal direction of the sensor layer 4. The other end in the longitudinal direction of the sensor layer 4 of the first shaved-off portion 20 and one end in the lateral direction of the sensor layer 4 of the first groove 17 are smoothly and continuously connected.

[0020] A second shaved-off portion 21 formed at one short-side end of the sensor layer 4 is connected to the third groove portion 19. The second shaved-off portion 21 is formed by shaving off one short-side edge of the sensor layer 4 on the other long-side end side of the sensor layer 4. One long-side end of the second shaved-off portion 21 and one short-side end of the sensor layer 4 of the third groove portion 19 are smoothly and continuously connected.

[0021] The groove 8 is formed closer to the other end in the lateral direction of the sensor layer 4 than the groove 7. The groove 8 includes a first groove portion 22 extending from one end in the longitudinal direction of the sensor layer 4 to the other end in the longitudinal direction of the sensor layer 4, a second groove portion 23 extending from the other end in the longitudinal direction of the sensor layer 4 of the first groove portion 22 to the one end in the lateral direction of the sensor layer 4, a third groove portion 24 extending from the one end in the lateral direction of the sensor layer 4 of the second groove portion 23 to the other end in the longitudinal direction of the sensor layer 4, a fourth groove portion 25 extending at an angle from the other end in the longitudinal direction of the sensor layer 4 of the third groove portion 24 to the other end in the lateral direction of the sensor layer 4, and a fourth groove portion 25 extending from the other end in the lateral direction of the sensor layer 4 of the fourth groove portion 25 to the other end in the longitudinal direction of the sensor layer 4. The groove 7 has a fifth groove 26 extending toward the other longitudinal end of the sensor layer 4, a sixth groove 27 extending at an angle from the other longitudinal end of the fifth groove 26 toward one lateral end of the sensor layer 4, a seventh groove 28 extending from the one lateral end of the sixth groove 27 toward the other longitudinal end of the sensor layer 4, an eighth groove 29 extending from the other longitudinal end of the seventh groove 28 toward the other lateral end of the sensor layer 4, and a ninth groove 30 extending from the other lateral end of the eighth groove 29 toward the other longitudinal end of the sensor layer 4. The first groove 22 opens toward the one longitudinal end of the sensor layer 4. The ninth groove 30 opens toward the other longitudinal end of the sensor layer 4. The fifth groove 26 is formed with a gap between it and the second groove 18 of the groove 7.

[0022] The groove 9 is formed closer to the other end of the sensor layer 4 in the short direction than the groove 8. The groove 9 has a first groove portion 31 extending from one end of the sensor layer 4 in the longitudinal direction toward the other end of the sensor layer 4 in the long direction, a second groove portion 32 and a third groove portion 33 branching from the other end of the first groove portion 31 in the longitudinal direction of the sensor layer 4, and a fourth groove portion 34 connecting the second groove portion 32 and the third groove portion 33. The second groove portion 32 extends at an incline toward the other end of the sensor layer 4 in the long direction from the other end of the first groove portion 31 in the longitudinal direction of the sensor layer 4 toward the one end of the sensor layer 4 in the short direction. The third groove portion 33 extends from the other end of the first groove portion 31 in the longitudinal direction of the sensor layer 4 toward the other end of the sensor layer 4 in the long direction, and then extends at an incline toward the other end of the sensor layer 4 in the long direction toward the one end of the sensor layer 4 in the short direction. The fourth groove 34 connects one end of the second groove 32 in the short side direction of the sensor layer 4 to one end of the third groove 33 in the short side direction of the sensor layer 4. The first groove 31 opens to one end side of the sensor layer 4 in the long side direction.

[0023] The groove 10 is formed to surround the groove 9. The groove 10 has a first groove portion 35 extending from one longitudinal end of the sensor layer 4 toward the other longitudinal end of the sensor layer 4, a second groove portion 36 extending at an inclination toward the other longitudinal end of the sensor layer 4 from the other longitudinal end of the first groove portion 35 toward one lateral end of the sensor layer 4, a third groove portion 37 extending from one lateral end of the second groove portion 36 toward the other longitudinal end of the sensor layer 4, a fourth groove portion 38 extending at an inclination toward the one longitudinal end of the sensor layer 4 from the other longitudinal end of the third groove portion 37 toward the other lateral end of the sensor layer 4, and a fifth groove portion 39 extending from the other lateral end of the fourth groove portion 38 toward one longitudinal end of the sensor layer 4. The first groove portion 35 and the fifth groove portion 39 are open on the one longitudinal end side of the sensor layer 4. The third groove portion 37 is formed with a gap provided between it and the fourth groove portion 34 of the groove 9. In the first embodiment, one end portion in the longitudinal direction of the sensor layer 4 of the first groove portion 35 of the groove 10 and the first groove portion 22 of the groove 8 are common to each other.

[0024] The groove 11 is formed closer to the other end of the sensor layer 4 in the short direction than the groove 9. The groove 11 includes a first groove portion 40 extending from one end of the sensor layer 4 in the longitudinal direction toward the other end of the sensor layer 4 in the long direction, a second groove portion 41 and a third groove portion 42 branching from the other end of the first groove portion 40 in the longitudinal direction of the sensor layer 4, and a fourth groove portion 43 connecting the second groove portion 41 and the third groove portion 42. The second groove portion 41 extends at an incline toward the other end of the sensor layer 4 in the long direction as it moves from the other end of the first groove portion 40 in the longitudinal direction of the sensor layer 4 toward the one end of the sensor layer 4 in the short direction. The third groove portion 42 extends from the other end of the first groove portion 40 in the longitudinal direction of the sensor layer 4 toward the other end of the sensor layer 4 in the long direction, and then extends at an incline toward the other end of the sensor layer 4 in the long direction as it moves toward the one end of the sensor layer 4 in the short direction. The fourth groove 43 connects one end of the second groove 41 in the lateral direction of the sensor layer 4 to one end of the third groove 42 in the lateral direction of the sensor layer 4. The first groove 40 opens to one end of the sensor layer 4 in the longitudinal direction.

[0025] The groove 12 is formed to surround the groove 11. The groove 12 includes a first groove portion 44 extending from one longitudinal end of the sensor layer 4 toward the other longitudinal end of the sensor layer 4; a second groove portion 45 extending from the other longitudinal end of the first groove portion 44 toward the one lateral end of the sensor layer 4 at an inclination; a third groove portion 46 extending from the one lateral end of the second groove portion 45 toward the other longitudinal end of the sensor layer 4; and a fourth groove portion 47 extending from the other longitudinal end of the third groove portion 46 toward the one longitudinal end of the sensor layer 4 at an inclination toward the one lateral end of the sensor layer 4 as it extends from the other longitudinal end of the third groove portion 46 toward the other lateral end of the sensor layer 4. The first groove portion 44 opens toward the one longitudinal end of the sensor layer 4. The fourth groove portion 47 is connected to a third scraped-out portion 48 formed at the other lateral end of the sensor layer 4. The third scraped-off portion 48 is formed by scraping off the other short-side edge of the sensor layer 4 on one longitudinal end side of the sensor layer 4. The other longitudinal end of the sensor layer 4 of the third scraped-off portion 48 and the other short-side end of the sensor layer 4 of the fourth groove portion 47 are smoothly connected. In the first embodiment, one longitudinal end of the sensor layer 4 of the first groove portion 44 of the groove 12 and the fifth groove portion 39 of the groove 10 are common to each other.

[0026] The groove 13 is formed closer to the other end of the sensor layer 4 in the short direction than the groove 8. The groove 13 includes a first groove portion 49 extending from the other end of the sensor layer 4 in the long direction toward one end of the sensor layer 4 in the long direction, a second groove portion 50 and a third groove portion 51 branching from one end of the first groove portion 49 in the long direction of the sensor layer 4, and a fourth groove portion 52 connecting the second groove portion 50 and the third groove portion 51. The second groove portion 50 extends at an incline toward the one end of the sensor layer 4 in the long direction from the one end of the first groove portion 49 in the long direction of the sensor layer 4 toward the one end of the sensor layer 4 in the short direction. The third groove portion 51 extends from the one end of the first groove portion 49 in the long direction of the sensor layer 4 toward the one end of the sensor layer 4 in the long direction, and then extends at an incline toward the one end of the sensor layer 4 in the long direction toward the one end of the sensor layer 4 in the short direction. The fourth groove 52 connects one end of the second groove 50 in the short side direction of the sensor layer 4 to one end of the third groove 51 in the short side direction of the sensor layer 4. The first groove 49 opens to the other end side of the sensor layer 4 in the long side direction.

[0027] The groove 14 is formed so as to surround the groove 13. The groove 14 has a first groove portion 53 extending from the other longitudinal end of the sensor layer 4 toward one longitudinal end of the sensor layer 4, a second groove portion 54 extending at an incline toward the one longitudinal end of the sensor layer 4 from the one longitudinal end of the first groove portion 53 toward the one lateral end of the sensor layer 4, a third groove portion 55 extending from the one lateral end of the second groove portion 54 toward the one longitudinal end of the sensor layer 4, a fourth groove portion 56 extending at an incline toward the other longitudinal end of the sensor layer 4 from the one longitudinal end of the third groove portion 55 toward the other lateral end of the sensor layer 4, and a fifth groove portion 57 extending from the other lateral end of the fourth groove portion 56 toward the other longitudinal end of the sensor layer 4. The first groove portion 53 and the fifth groove portion 57 are open to the other longitudinal end side of the sensor layer 4. The third groove portion 55 is formed with a gap between it and the fourth groove portion 52 of the groove 13. In the first embodiment, the other longitudinal end side of the sensor layer 4 of the first groove portion 53 of the groove 14 and the ninth groove portion 30 of the groove 8 are common to each other.

[0028] The groove 15 is formed closer to the other end of the sensor layer 4 in the short direction than the groove 13. The groove 15 has a first groove portion 58 extending from the other end of the sensor layer 4 in the long direction toward one end of the sensor layer 4 in the long direction, a second groove portion 59 and a third groove portion 60 branching from one end of the first groove portion 58 in the long direction of the sensor layer 4, and a fourth groove portion 61 connecting the second groove portion 59 and the third groove portion 60. The second groove portion 59 extends at an incline toward the one end of the sensor layer 4 in the long direction from the one end of the first groove portion 58 in the long direction of the sensor layer 4 toward the one end of the sensor layer 4 in the short direction. The third groove portion 60 extends from the one end of the first groove portion 58 in the long direction of the sensor layer 4 toward the one end of the sensor layer 4 in the long direction, and then extends at an incline toward the one end of the sensor layer 4 in the long direction toward the one end of the sensor layer 4 in the short direction. The fourth groove 61 connects one end of the second groove 59 in the short side direction of the sensor layer 4 to one end of the third groove 60 in the short side direction of the sensor layer 4. The first groove 58 opens to the other end side of the sensor layer 4 in the long side direction.

[0029] The groove 16 is formed to surround the groove 15. The groove 16 includes a first groove portion 62 extending from the other longitudinal end of the sensor layer 4 toward one longitudinal end of the sensor layer 4; a second groove portion 63 extending at an angle toward one longitudinal end of the sensor layer 4 as it extends from the one longitudinal end of the first groove portion 62 toward one lateral end of the sensor layer 4; a third groove portion 64 extending from the one lateral end of the second groove portion 63 toward one longitudinal end of the sensor layer 4; and a fourth groove portion 65 extending at an angle toward the other longitudinal end of the sensor layer 4 as it extends from the one longitudinal end of the third groove portion 64 toward the other lateral end of the sensor layer 4. The first groove portion 62 opens toward the other longitudinal end of the sensor layer 4. The fourth groove portion 65 is connected to a fourth scraped-out portion 66 formed at the other lateral end of the sensor layer 4. The fourth scraped-off portion 66 is formed by scraping off the other edge in the short direction of the sensor layer 4 on the other end side in the long direction of the sensor layer 4. One end of the fourth scraped-off portion 66 in the long direction of the sensor layer 4 and the other end of the fourth groove portion 65 in the short direction of the sensor layer 4 are smoothly connected. In the first embodiment, the other end of the first groove portion 62 of the groove 16 in the long direction of the sensor layer 4 and the fifth groove portion 57 of the groove 14 are common to each other.

[0030] By forming the grooves 7 to 16 in this manner, the sensor layer 4 is divided into a plurality of regions. Specifically, the sensor layer 4 has a first region 67 surrounded by groove 7, a second region 68 bounded by groove 7 and groove 8, a third region 69 surrounded by grooves 8, 10, 12, 14, and 16, a fourth region 70 between grooves 9 and 10, a fifth region 71 surrounded by the second groove portion 32, the third groove portion 33, and the fourth groove portion 34 of groove 9, a sixth region 72 between grooves 11 and 12, a seventh region 73 surrounded by the second groove portion 41, the third groove portion 42, and the fourth groove portion 43 of groove 11, an eighth region 74 between grooves 13 and 14, a ninth region 75 surrounded by the second groove portion 50, the third groove portion 51, and the fourth groove portion 52 of groove 13, a tenth region 76 between grooves 15 and 16, and an eleventh region 77 surrounded by the second groove portion 59, the third groove portion 60, and the fourth groove portion 61 of groove 15. Of these regions, the second region 68, the fourth region 70, the sixth region 72, the eighth region 74, and the tenth region 76 are sensor regions, and the first region 67, the third region 69, the fifth region 71, the seventh region 73, the ninth region 75, and the eleventh region 77 are non-sensor regions. In the first embodiment, the sensor layer 4 is formed symmetrically with respect to a line passing through the center of the sensor layer 4 in the longitudinal direction.

[0031] The second region 68, which is the sensor region, includes a sensor portion 78 that receives pressure and a lead wire connection portion 79 to which a lead wire (not shown) is connected. The sensor portion 78 is located between the second groove portion 18 of groove 7 and the fifth groove portion 26 of groove 8. The lead wire connection portions 79 are connected to both longitudinal ends of the sensor portion 78. One longitudinal edge of the lead wire connection portion 79, located at one longitudinal end of the sensor layer 4, is an open edge exposed to the outside. Meanwhile, the other longitudinal edge of the lead wire connection portion 79, located at the other longitudinal end of the sensor layer 4, is an open edge exposed to the outside. This configuration allows the thin-film sensor 1 to function like a strain gauge and detect pressure applied to the gear 2 on which the thin-film sensor 1 is mounted. Specifically, when a force is applied to the sensor portion 78, the sensor portion 78 deforms, and the deformation is detected as an electrical signal.

[0032] Like the second region 68, the fourth region 70 also has a sensor section 80 and a lead wire connection section 81. In the fourth region 70, the portion between the fourth groove section 34 of groove 9 and the third groove section 37 of groove 10 is the sensor section 80, and the portions of this sensor section 80 connected to both longitudinal ends of the sensor layer 4 are the lead wire connection sections 81. One longitudinal end edge of each of the lead wire connection sections 81 is an open edge exposed to the outside. Pressure detection in the fourth region 70 is performed in the same manner as in the second region 68.

[0033] Like the second region 68, the sixth region 72 also has a sensor section 82 and a lead wire connection section 83. In the sixth region 72, the portion between the fourth groove section 43 of groove 11 and the third groove section 46 of groove 12 is the sensor section 82, and the portions of this sensor section 82 connected to both longitudinal end sections of the sensor layer 4 are the lead wire connection sections 83. One longitudinal end edge of each of the lead wire connection sections 83 is an open edge exposed to the outside. Pressure detection in the sixth region 72 is performed in the same manner as in the second region 68.

[0034] Like the second region 68, the eighth region 74 also has a sensor portion 84 and a lead wire connection portion 85. In the eighth region 74, the portion between the fourth groove portion 52 of groove 13 and the third groove portion 55 of groove 14 is the sensor portion 84, and the portions of this sensor portion 84 connected to both longitudinal ends of the sensor layer 4 are lead wire connection portions 85. The other longitudinal end edge of each lead wire connection portion 85 of the sensor layer 4 is an open edge exposed to the outside. Pressure detection in the eighth region 74 is performed in the same manner as in the second region 68.

[0035] Like the second region 68, the tenth region 76 also has a sensor portion 86 and a lead wire connection portion 87. In the tenth region 76, the portion between the fourth groove portion 61 of the groove 15 and the third groove portion 64 of the groove 16 is the sensor portion 86, and the portions of this sensor portion 86 connected to both longitudinal ends of the sensor layer 4 are lead wire connection portions 87. The other longitudinal end edge of each of the lead wire connection portions 87 is an open edge exposed to the outside. Pressure detection in the tenth region 76 is performed in the same manner as in the second region 68.

[0036] The protective layer 5 is a film that protects the sensor layer 4. The protective layer 5 has a generally rectangular plate shape when viewed from above, and is provided on the sensor layer 4. In this case, the protective layer 5 is provided on the sensor layer 4 so that the longitudinal direction of the protective layer 5 is aligned with the longitudinal direction of the sensor layer 4. The protective layer 5 is provided on the sensor layer 4 by, for example, sputtering. The protective layer 5 is made of, for example, diamond-like carbon.

[0037] When providing the thin-film sensor 1 of the first embodiment on the tooth surface of the gear 2, first, an insulating layer 3 is formed on the tooth surface, followed by the formation of the sensor layer 4. Then, grooves 7 to 16 are formed in the sensor layer 4 by laser irradiation, thereby defining a sensor region. The grooves 7 to 16 are preferably formed by irradiating the surface of the sensor layer 4 with a laser of picoseconds or less. After the grooves 7 to 16 are formed in the sensor layer 4, a protective layer 5 is formed on the sensor layer 4. Thus, according to the thin-film sensor 1 of the first embodiment, the sensor region is defined by forming the grooves 6 by laser irradiation, so that the sensor 1 can be easily directly manufactured even on a curved surface or in a recessed location, such as the tooth surface of the gear 2. Furthermore, according to the thin-film sensor 1 of the first embodiment, the grooves 6 are formed by irradiating the sensor layer 4 with a laser of picoseconds or less, thereby preventing burrs from being generated during the formation of the grooves 6.

[0038] 4 and 5 are diagrams showing a thin-film sensor according to a second embodiment of the present invention, with Fig. 4 being a schematic top view and Fig. 5 being a cross-sectional view taken along the line BB in Fig. 4. Note that in this second embodiment, only the characteristic features will be explained, and the matters explained in the first embodiment will not be explained again.

[0039] In the first embodiment, the thin-film sensor 1 is a pressure sensor, but in the second embodiment, it is a temperature sensor. In this case, the thin-film sensor 1a also includes an insulating layer 3, a sensor layer 4, and a protective layer 5, similar to the first embodiment. The insulating layer 3 and the protective layer 5 are made of the same materials as in the first embodiment, and are formed by sputtering, similar to the first embodiment.

[0040] The sensor layer 4 is formed by, for example, sputtering. The sensor layer 4 has multiple regions partitioned by grooves 6 formed by laser irradiation to penetrate the layer in the thickness direction. At least one of these multiple regions is a sensor region that senses the temperature of the gear 2, and the remaining regions are non-sensor regions that do not sense the temperature of the gear 2. Specifically, this is as follows.

[0041] In the second embodiment, a continuous groove 6 is formed in the sensor layer 4. The groove 6 has a first groove portion 89 that defines a first region 88 that is generally rectangular in top view, a second groove portion 91 that defines a second region 90 that is generally triangular in top view and connected to the first region 88, a third groove portion 93 that defines a third region 92 that is generally rectangular in top view, and a fourth groove portion 95 that defines a fourth region 94 that is generally triangular in top view and connected to the third region 92.

[0042] As shown in FIG. 4 , the first region 88 and the third region 92 are spaced apart from each other. The first region 88 and the third region 92 are spaced apart from each other such that the long sides of the first region 88 correspond to the long sides of the third region 92. The second region 90 and the fourth region 94 extend in a triangular shape from one longitudinal end of the first region 88 and the third region 92, respectively, so as to approach each other. The tip of the second region 90 and the tip of the fourth region 94 are connected to each other. A continuous groove 6, consisting of the first groove portion 89 to the fourth groove portion 95, is formed in the sensor layer 4 to define a sensor region formed by the first region 88 to the fourth region 94.

[0043] In the second embodiment, the region surrounded by the groove 6 is the sensor region. That is, the sensor region, which is the region inside the groove 6 as a boundary, is made up of a first region 88, a second region 90, a third region 92, and a fourth region 94. Of the sensor region, the first region 88 and the second region 90 are made of alumel, and the third region 92 and the fourth region 94 are made of chromel. Therefore, the sensor layer 4 has a portion made of alumel and a portion made of chromel. Lead wires (not shown) are connected to the first region 88 and the third region 92 of the sensor region, respectively. With the above configuration, it is possible to detect temperature by utilizing the Seebeck effect.

[0044] The present invention is not limited to the above-described embodiments, and includes modifications and improvements within the scope of achieving the object of the present invention.

[0045] For example, in each of the above embodiments, the grooves 6 are formed by irradiating the surface of the sensor layer 4 with a picosecond or shorter laser, but this is not limiting. For example, the grooves may be formed with a nanosecond laser, which is prone to generating burrs during laser irradiation. In this case, the grooves are formed by irradiating the surface of the sensor layer with a laser while the surface of the sensor layer is cooled. This makes it possible to suppress burrs when forming grooves using a semiconductor laser, which is prone to generating burrs. In each of the above embodiments, the shape of the sensor region can be changed as appropriate. That is, the grooves can be formed in the sensor layer 4 as appropriate. [Explanation of symbols]

[0046] 1,1a Thin film sensor 2 Object to be measured 3. Insulation layer 4 Sensor Layer 6 grooves

Claims

1. an insulating layer provided on the surface of the object to be measured; a sensor layer laminated on the insulating layer, the sensor layer having a plurality of regions partitioned by grooves formed by irradiating a laser to penetrate the sensor layer in a thickness direction; A thin film sensor, wherein at least one of the plurality of regions is a sensor region that senses the pressure applied to the measured body or the temperature of the measured body, and the other regions are non-sensor regions that do not sense the pressure applied to the measured body or the temperature of the measured body.

2. 2. The method for manufacturing a thin-film sensor according to claim 1, wherein the grooves are formed by irradiating the surface of the sensor layer with a laser beam of a duration of picoseconds or less.

3. 2. The method for manufacturing a thin-film sensor according to claim 1, wherein the grooves are formed by irradiating the surface of the sensor layer with a laser while the surface of the sensor layer is cooled.

Images