Displacement meter and method for manufacturing an article

Abstract

To provide a displacement meter advantageous in determining an installation position.SOLUTION: A displacement meter measures the displacement of an object to be measured, and has: an illumination system that illuminates the object to be measured with light emitted from a light source; a light receiving system including a detection section that detects light reflected on the object to be measured, and a light receiving lens that collects light to the detection section; and a unit including a light shielding member that is arranged between the illumination system and the object to be measured and has a first light transmission section and a second light transmission section, and a condenser lens that collects light from the first light transmission section and the second light transmission section. The distance between an image of the light from the first light transmission section and an image of the light from the second light transmission section collected by the condenser lens changes according to a position in a direction parallel to an optical axis of the illumination system.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a displacement meter and a method for manufacturing an article. [Background technology]

[0002] In production lines that manufacture goods, errors in the amount and speed of materials or parts being transported can have a negative impact on downstream manufacturing processes. For example, even a slight error in the amount and speed of parts such as metal coils being transported on a belt within a device can result in defective parts or damage to molds during press processing.

[0003] Therefore, displacement meters that can measure displacement amounts such as the movement amount and speed of transported materials and parts are used at production sites. Contact-type and non-contact-type displacement meters have been proposed as displacement meters for use at production sites, but by using a non-contact-type displacement meter that does not come into contact with the goods, it is possible to measure displacement amounts such as the movement amount and speed without damaging or staining the goods.

[0004] Patent Document 1 discloses a non-contact displacement meter that detects a speckle pattern that occurs when a laser beam is irradiated onto an object to be measured, and measures the displacement of the object by identifying distortion in the shape of the speckle pattern. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 8-14824 Summary of the Invention [Problem to be solved by the invention]

[0006] When installing such a displacement meter on a production line, the user installs it according to the catalog specifications of the displacement meter. However, since the user cannot directly recognize the appropriate position of the displacement meter relative to the object to be measured, there is a risk that the displacement meter will not be installed in the correct position.

[0007] Furthermore, in order to install the displacement gauge in an accurate position, it is possible to align the displacement gauge by providing a light source for alignment that is separate from the light source for displacement measurement. However, providing an additional light source can pose problems such as increased cost and size. Therefore, there is a need for a displacement gauge that can accurately align the displacement gauge without using an additional light source.

[0008] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a displacement meter that is advantageous in determining the installation position. [Means for solving the problem]

[0009] In order to achieve the above object, one aspect of the present invention provides a displacement meter for measuring the displacement of a measurement object, the displacement meter comprising: an illumination system for illuminating the measurement object with light emitted from a light source; a light-receiving system including a detection unit for detecting light reflected from the measurement object; and a light-receiving lens for condensing the light onto the detection unit; and a unit disposed between the illumination system and the measurement object, the unit including: a light-blocking member having a first light-transmitting portion and a second light-transmitting portion; and a condensing lens for condensing the light from the first light-transmitting portion and the second light-transmitting portion, wherein a distance between an image of the first light-transmitting portion and an image of the second light-transmitting portion condensed by the condensing lens changes depending on a position in a direction parallel to an optical axis of the illumination system. The displacement meter measures the displacement of the measurement object when the unit is not disposed between the illumination system and the measurement object. It is characterized by: [Effects of the Invention]

[0010] According to the present invention, it is possible to provide a displacement meter that is advantageous in determining the installation position. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 2 is a schematic diagram showing the configuration of a displacement meter. [Figure 2] FIG. 2 is a diagram illustrating a configuration of a displacement meter according to the first embodiment. [Figure 3] 10A and 10B are diagrams illustrating the shape of a light transmitting portion of a light blocking member. [Figure 4] FIG. 3 is a diagram showing an image projected onto a measurement object in the first embodiment. [Figure 5] FIG. 10 is a diagram showing a Scheimpflug relationship between the condenser lens and the light blocking member. [Figure 6] FIG. 10 is a diagram showing an example of an image projected onto a measurement object in the second embodiment. [Figure 7] FIG. 10 is a diagram showing an example of an image projected onto a measurement object in the second embodiment. [Figure 8] FIG. 10 is a diagram showing an example of an image projected onto a measurement object in the second embodiment. [Figure 9] FIG. 2 is a diagram showing a mounting structure of the unit. DETAILED DESCRIPTION OF THE INVENTION

[0012] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are used to designate the same components, and redundant explanations will be omitted.

[0013] First Embodiment FIG. 1 is a diagram showing the configuration of a displacement meter in this embodiment. In this embodiment, a so-called non-contact type displacement meter will be described as the displacement meter. As shown in FIG. 1, the displacement meter 1 measures the relative displacement of a measurement object 2 moving in the direction of the arrow in FIG. 1 in a non-contact manner. Specifically, a so-called pattern matching type displacement meter is assumed, which can acquire position information of the measurement object 2 at different times and calculate the amount of movement and changes in speed based on the difference between the acquired position information. A pattern matching type displacement meter can acquire, for example, several thousand images per second and calculate the amount of displacement of the measurement object 2 at different times, thereby measuring slight errors in the amount of movement and speed of the measurement object 2.

[0014] The displacement meter 1 in this embodiment has an illumination system 15 that includes a light source 3 and a lens 4 and illuminates the measurement object 2, and a light-receiving system 16 that includes a light-receiving lens 5 and a detection unit 6. The light source 3 can be selected as appropriate from a laser diode, an LED, a halogen lamp, etc. When a laser diode is selected, the image obtained by the detection unit 6 will be an image composed of speckles. When an LED or halogen lamp is selected, the image obtained by the detection unit 6 will be an image that reflects the pattern on the surface of the measurement object 2. The light emitted from the light source 3 is collected by the lens 4 and illuminates the measurement object 2.

[0015] In this embodiment, the lens 4 is shown in Fig. 1 as being configured to focus the light emitted from the light source 3 using a single lens, but this is not limiting and the lens 4 may be configured to focus the light using a group of multiple lenses. When a laser diode is used as the light source 3, it is desirable to perform aberration correction so that the light can be focused using a plane wave. Furthermore, when an LED or halogen lamp is used as the light source 3, aberrations and the like do not pose any particular problems.

[0016] A portion of the light diffused and reflected by the measurement object 2 is collected by the light receiving lens 5 and enters the detection unit 6. In this embodiment, the light receiving lens 5 is illustrated in FIG. 1 as collecting light using a single lens, but this is not limiting and the light may be collected using a group of multiple lenses. The detection unit 6 is composed of an array of photoelectric conversion elements such as CCD elements or CMOS elements. The detection unit 6 may be an area sensor in which elements are arranged two-dimensionally, or a line sensor in which elements are arranged one-dimensionally in a predetermined direction.

[0017] The magnification of the light receiving system 16 is determined based on the installation distance of the light receiving lens 5 relative to the measurement object 2, the focal length of the lens used in the light receiving lens 5, and the installation position of the detection unit 6. In addition, the converted pixel length, which serves as the basis for measurement, i.e., the resolution, is determined from the magnification of the light receiving system 16 and the size of the pixels that make up the detection unit 6. The light that enters the detection unit 6 is converted into an electrical signal and then output to a signal processing unit. The signal processing unit is configured using an FPGA, a microcomputer, etc., and calculates the amount of displacement of the measurement object 2 based on the output information (e.g., an image) of the detection unit 6.

[0018] When installing the above-described displacement meter 1 on a production line, the user installs the displacement meter according to the catalog specifications of the displacement meter. However, the user cannot directly recognize the appropriate position of the displacement meter 1 relative to the measurement object 2. As a result, there is a risk that the displacement meter will not be installed in the correct position. Furthermore, to install the displacement meter 1 in the correct position, it is possible to assist in the alignment of the displacement meter 1 by providing an alignment light source separate from the light source 3 used for displacement measurement. However, configuring an additional light source can pose issues such as increased costs and increased size. Therefore, in this embodiment, a unit 7 is used so that the user can visually recognize the position where the displacement meter 1 should be installed.

[0019] FIG. 2 is a diagram showing the displacement meter 1 with the unit 7 installed. The unit 7 is a unit that can be attached to and detached from the displacement meter 1, and is installed by the user when determining the position where the displacement meter 1 will be installed. After the displacement meter 1 is installed, it is assumed that the user will remove the unit when the displacement meter 1 measures the displacement of the measurement object 2. Therefore, it is preferable that the unit 7 be easily attached and detached to and from the displacement meter.

[0020] The unit 7 is disposed between the illumination system 15 and the measurement object 2. The unit 7 includes a light-blocking member 8 having a first light-transmitting portion 9a and a second light-transmitting portion 9b, a condenser lens 10a that condenses light from the first light-transmitting portion 9a, and a condenser lens 10b that condenses light from the second light-transmitting portion 9b. The unit 7 is an optical system into which light from the light source 3 configured in the displacement meter 1 is incident, and since the unit 7 does not include a light source separate from the light source 3, it is advantageous in terms of cost and size compared to a case in which a separate light source is provided in the unit 7.

[0021] The light-shielding member 8 is a member that blocks a portion of the light from the light source 3. The first light-transmitting portion 9a and the second light-transmitting portion 9b of the light-shielding member 8 are, for example, openings that allow light from the light source 3 to pass through, and the area of ​​the light-shielding member 8 other than the first light-transmitting portion 9a and the second light-transmitting portion 9b is a light-shielding portion that blocks the light from the light source 3. Furthermore, the light-shielding member 8 may be a member (for example, a glass member) processed so that the transmittance of the first light-transmitting portion 9a and the second light-transmitting portion 9b is higher than the transmittance of the light-shielding portion. In other words, the transmittance of the first light-transmitting portion 9a and the second light-transmitting portion 9b does not have to be 100%, and the transmittance of the light-shielding portion does not have to be 0%.

[0022] In this embodiment, the first light transmitting portion 9a and the second light transmitting portion 9b each have the same shape and are rectangular patterns. In this embodiment, the light-shielding member 8 has been described as having two transmitting portions, the first light transmitting portion 9a and the second light transmitting portion 9b. However, the light-shielding member 8 may have three or more light transmitting portions as long as there are two or more light transmitting portions. The following description will be given assuming that the first light transmitting portion 9a and the second light transmitting portion 9b of the light-shielding member 8 are separated from each other as shown in FIG. 3(a), but this is not limited thereto. For example, as shown in FIGS. 3(b) and 3(c), the two light transmitting portions do not have to be completely separated. In the cases of FIGS. 3(b) and 3(c), the areas surrounded by the wavy lines in the figures are the first light transmitting portion 9a and the second light transmitting portion 9b, respectively. Even if the light-transmitting portions are not completely separated from each other, if there are multiple light-transmitting portions extending in a predetermined direction as shown in Figure 3(b) or Figure 3(c), it is acceptable to have multiple light-transmitting portions separated by each region of the light-transmitting portion.

[0023] The condenser lenses 10a and 10b are arranged to correspond to the first light transmitting portion 9a and the second light transmitting portion 9b, respectively. In this embodiment, an example in which there are multiple condenser lenses as shown by the condenser lenses 10a and 10b will be described, but this is not limiting, and one condenser lens may be arranged to condense light from the first light transmitting portion 9a and the second light transmitting portion 9b.

[0024] Light emitted from the light source 3 passes through the first light transmitting portion 9a and the second light transmitting portion 9b of the light blocking member 8, and the light from the first light transmitting portion 9a and the light from the second light transmitting portion 9b enter the condenser lenses 10a and 10b. The light condensed by the condenser lenses 10a and 10b is imaged on the measurement object 2. At this time, the distance between the image of the first light transmitting portion and the image of the second light transmitting portion condensed by the condenser lenses 10a and 10b changes depending on the position in the direction parallel to the optical axis of the illumination system 15. By installing the displacement meter 1 while checking the image-forming positions of the images of the first light transmitting portion and the second light transmitting portion on the surface on which the measurement object 2 is placed, the user can visually recognize the accurate installation position of the displacement meter 1.

[0025] In this embodiment, it is preferable that the image of the first light transmitting portion 9a and the image of the second light transmitting portion 9b coincide with each other at a position where the position of the object to be measured 2 is conjugate with the position of the detection portion 6 via the light receiving lens 5. Alternatively, even if they do not coincide completely, they are arranged so that at least a part of each image overlaps.

[0026] Therefore, the user can install the displacement meter 1 in an appropriate position by installing the displacement meter 1 so that the image of the first light transmitting portion 9a and the image of the second light transmitting portion 9b coincide with each other. The relative distance between the displacement meter 1 and the measurement object 2 in the height direction of the displacement meter 1 (the optical axis direction of the illumination system 15) at this time is hereinafter referred to as the design value. Furthermore, if the design value between the displacement meter 1 and the measurement object 2 is misaligned, the greater the amount of deviation between the distance between the displacement meter 1 and the measurement object 2 and the design value, the longer the distance between the image of the first light transmitting portion and the image of the second light transmitting portion. The user can estimate the magnitude of the positional deviation of the displacement meter 1 based on the distance between the image of the first light transmitting portion and the image of the second light transmitting portion.

[0027] FIG. 4 is a diagram showing the state in which an image of the first light transmitting portion 9a and an image of the second light transmitting portion 9b are projected onto the measurement object 2 (or the surface on which the measurement object 2 is placed). The area indicated by the dashed line in the figure shows a virtual illumination area when the unit 7 is not placed. FIG. 4(a) shows the state in which an image is projected onto the measurement object 2 when the distance between the displacement meter 1 and the measurement object 2 is shorter than the design value. FIG. 4(b) shows the state in which an image is projected onto the measurement object 2 when the distance between the displacement meter 1 and the measurement object 2 is the design value. FIG. 4(c) shows the state in which an image is projected onto the measurement object 2 when the distance between the displacement meter 1 and the measurement object 2 is longer than the design value. When the distance between the displacement meter 1 and the measurement object 2 is the design value, the two images overlap and appear as a single image, as shown in FIG. 4(b). On the other hand, if the distance between the displacement meter 1 and the measurement object 2 is not the design value, the two images will not overlap, as shown in Figure 4(a) or 4(c). The user can visually check the image to see if it is as shown in Figure 4(b), and then install the displacement meter 1 so that it matches the design value.

[0028] Furthermore, the condensing lens 10 and the light blocking member 8 may be arranged so as to satisfy the Scheimpflug condition with respect to the measurement object 2. FIG. 5 is a diagram showing a displacement meter 1 in which the condensing lens 10 and the light blocking member 8 are arranged so as to satisfy the Scheimpflug condition. An arrangement that satisfies the Scheimpflug condition is an arrangement in which the surface on which the light blocking member 8 is arranged, the principal surface of the condensing lens 10, and the surface on which the measurement object 2 is arranged intersect on the same line. In FIG. 2, the light blocking member 8 and the measurement object 2 are parallel to each other, but in FIG. 5, the surface of the light blocking member 8 and the surface of the measurement object 2 are arranged at an inclination. Furthermore, the angle formed between the surface of the light blocking member 8 and the surface of the measurement object 2 is larger than the angle formed between the principal surface of the condensing lens 10 and the surface of the measurement object 2. When the focusing lens 10 and the light-shielding member 8 are positioned so as to satisfy the Scheimpflug condition for the measurement object 2, the entire image is in focus when the displacement meter 1 is positioned according to the design value, which is advantageous in that it improves user visibility compared to the configuration shown in Figure 2.

[0029] As described above, in this embodiment, by incorporating the unit 7 into the displacement meter 1 when installing the displacement meter 1, the user can determine the position of the displacement meter 1 according to the design value while visually checking.

[0030] Second Embodiment In the first embodiment, a case was described in which the shapes of the first light transmitting portion 9a and the second light transmitting portion 9b of the light blocking member 8 are both rectangular patterns. In this embodiment, an example will be described in which the shapes of the first light transmitting portion 9a and the second light transmitting portion 9b of the light blocking member 8 are different. Note that the configurations of the displacement meter 1 and the unit 7 are the same as in the first embodiment, and therefore description thereof will be omitted. Furthermore, matters not mentioned in this embodiment follow the first embodiment.

[0031] FIG. 6 is a diagram showing an example of an image of the measurement object 2 in this embodiment. The first light-transmitting portion 9a and the second light-transmitting portion 9b of the light-shielding member 8 in FIG. 6 have a rectangular shape with a triangle formed at one end. FIG. 6(a) shows an image projected onto the measurement object 2 when the distance between the displacement meter 1 and the measurement object 2 is shorter than the design value. FIG. 6(b) shows an image projected onto the measurement object 2 when the distance between the displacement meter 1 and the measurement object 2 is the design value. FIG. 6(c) shows an image projected onto the measurement object 2 when the distance between the displacement meter 1 and the measurement object 2 is longer than the design value. When the distance between the displacement meter 1 and the measurement object 2 is the design value, the two images join together to form a single arrow image, as shown in FIG. 6(b). On the other hand, when the distance between the displacement meter 1 and the measurement object 2 is not the design value, the two images do not join together, as shown in FIG. 6(a) and FIG. 6(c).

[0032] As shown in FIGS. 6(a) to 6(c), the orientation of the triangles in the images differs between the image at the first light transmitting portion 9a and the image at the second light transmitting portion 9b. Therefore, the user can determine whether the distance between the displacement meter 1 and the measurement object 2 is longer or shorter than the design value based on whether the triangles in the images are facing inward or outward relative to each other. In this embodiment, when the triangles in the images are facing outward relative to each other as shown in FIG. 6(a), the user can determine that the distance between the displacement meter 1 and the measurement object 2 is shorter than the design value. When the triangles in the images are facing inward relative to each other as shown in FIG. 6(c), the user can determine that the distance between the displacement meter 1 and the measurement object 2 is longer than the design value. This is advantageous over the first embodiment in that the user can determine in which direction to move the installation position of the displacement meter 1 by checking the shapes of the two images.

[0033] FIG. 7 is a diagram showing another example of an image of the measurement object 2 in this embodiment. The first light-transmitting portion 9a of the light-shielding member 8 in FIG. 7 has a cross shape. The second light-transmitting portion 9b of the light-shielding member 8 in FIG. 7 has a rectangular shape. FIG. 7(a) shows an image projected onto the measurement object 2 when the distance between the displacement meter 1 and the measurement object 2 is shorter than the design value. FIG. 7(b) shows an image projected onto the measurement object 2 when the distance between the displacement meter 1 and the measurement object 2 is the design value. FIG. 7(c) shows an image projected onto the measurement object 2 when the distance between the displacement meter 1 and the measurement object 2 is longer than the design value. When the distance between the displacement meter 1 and the measurement object 2 is the design value, as shown in FIG. 7(b), at least a portion of the two images overlap to form a single cross-shaped image. On the other hand, when the distance between the displacement meter 1 and the measurement object 2 is not the design value, the two images do not overlap, as shown in FIGS. 7(a) and 7(c).

[0034] As in Figure 6, in the case of Figure 7, the user can determine which direction to move the installation position of the displacement meter 1 by checking the shapes of the two images. Furthermore, both the first light-transmitting portion 9a and the second light-transmitting portion 9b may be cross-shaped. The above description assumes adjustment of the installation position of the displacement meter 1 relative to the measurement object 2 in the height direction. However, position adjustment within a plane parallel to the surface on which the measurement object 2 is placed is also possible. That is, by adjusting the installation position of the displacement meter 1 so that the two cross-shaped images coincide, the position adjustment of the displacement meter 1 relative to the measurement object 2 in the height direction and within a plane parallel to the surface on which the measurement object 2 is placed can be achieved. In this case, the center position of the cross-shaped image is the center position of the illumination range illuminated when displacement measurement is performed with the unit 7 removed. This has the advantage that the user can easily adjust the center position of the illumination range during displacement measurement to coincide with the center position of the measurement object 2.

[0035] 8 is a diagram showing yet another example of an image of the measurement object 2 in this embodiment. In FIG. 8, the shape of the first light transmitting portion 9a and the shape of the second light transmitting portion 9b of the light blocking member 8 are S-shaped. FIG. 8(a) shows an image projected onto the measurement object 2 when the distance between the displacement meter 1 and the measurement object 2 is shorter than the design value. FIG. 8(c) shows an image projected onto the measurement object 2 when the distance between the displacement meter 1 and the measurement object 2 is as designed.

[0036] FIG. 8(e) shows an image projected onto the object to be measured 2 when the distance between the displacement meter 1 and the object to be measured 2 is longer than the design value. FIG. 8(d) shows an image projected when the distance between the displacement meter 1 and the object to be measured 2 approaches the design value from the state of FIG. 8(e). FIG. 8(b) shows an image projected when the distance between the displacement meter 1 and the object to be measured 2 approaches the design value from the state of FIG. 8(a). When the distance between the displacement meter 1 and the object to be measured 2 is the design value, the two images appear to partially overlap to form a single H-shaped image, as shown in FIG. 8(c). In this way, the position where the two images partially overlap may be set to be the design value.

[0037] As described above, in this embodiment, as in the first embodiment, by incorporating unit 7 into displacement meter 1 when installing displacement meter 1, the user can determine the position of displacement meter 1 according to the design value while visually checking.

[0038] <Third embodiment> In this embodiment, a description will be given of the mounting structure of the unit 7 to the displacement meter 1. Note that the configurations of the displacement meter 1 and the unit 7 are the same as those in the first embodiment, and therefore description thereof will be omitted. Furthermore, matters not mentioned in this embodiment will follow those of the first embodiment.

[0039] figure 9is a diagram showing the mounting structure of unit 7. A groove 12 is provided in housing 11, and unit 7 can be inserted along groove 12 into the mounting position of displacement meter 1. By inserting unit 7 into the mounting position, the Z direction position of unit 7 is determined. By abutting unit 7 against X reference position 13 of housing 11, the X direction position of unit 7 is determined. Furthermore, by fastening unit 7 to housing 11 with screws 14, the Y direction position of unit 7 can be determined and maintained.

[0040] As described above, the unit 7 can be positioned and held in place easily. In this embodiment, the unit 7 is held in place by screw fastening, but a magnet may be used instead. By arranging a magnet in the displacement meter 1 and making the unit 7 a magnetic body, holding can be easily achieved by the magnetic force of the magnet. In addition, the unit 7 may be held in place by using a leaf spring. By arranging a leaf spring in the unit 7 and pressing the displacement meter 1, holding can be easily achieved.

[0041] <Embodiments of manufacturing methods of articles> Next, we will explain a manufacturing method for an article (metal plate, pressed product, paper, fiber, etc.) using the above-mentioned displacement meter 1. The article is manufactured through a process of conveying an object (target object) with a conveying device, a measurement process of measuring the conveyance amount of the conveyed object as a displacement using the above-mentioned displacement meter, and a processing process of cutting, pressing, or other processing of the conveyed object when the desired conveyance amount is detected. Alternatively, it is also possible to detect a deviation of the conveyance amount from a predetermined value and stop the processing.

[0042] The present method for manufacturing an article offers improved convenience for users and is more advantageous than conventional methods in at least one of the performance, quality, productivity, and production costs of the article.

[0043] Although the preferred embodiments of the present invention have been described above, it goes without saying that the present invention is not limited to these embodiments, and various modifications and changes are possible within the scope of the gist of the present invention. [Explanation of symbols]

[0044] 1. Displacement meter 2. Measurement object 3 light source 5. Receiving lens 6. Detection unit 7 units 8 Light blocking material 9a 1st light transmitting part 9b 2nd light transmitting part 10a, 10b Condenser lenses 15 Lighting system 16 Light receiving system

Claims

1. A displacement meter that measures the displacement of a measurement object, an illumination system that illuminates the measurement object with light emitted from a light source; a light receiving system including a detection unit that detects light reflected from the measurement object and a light receiving lens that focuses the light on the detection unit; a unit disposed between the illumination system and the measurement object, the unit including: a light-blocking member having a first light-transmitting portion and a second light-transmitting portion; and a condenser lens that condenses light from the first light-transmitting portion and the second light-transmitting portion; a distance between an image of the first light transmitting portion and an image of the second light transmitting portion, which are focused by the focusing lens, changes depending on a position in a direction parallel to an optical axis of the illumination system; 10. A displacement meter according to claim 9, wherein the displacement meter measures the displacement of the measurement object when the unit is not disposed between the illumination system and the measurement object.

2. 2. The displacement meter according to claim 1, wherein an image of the first light transmitting portion and an image of the second light transmitting portion at least partially overlap each other at a position conjugate with the detecting portion via the light receiving lens.

3. 3. The displacement meter according to claim 1, wherein the unit is detachable from the displacement meter.

4. 4. The displacement meter according to claim 1, wherein the first light transmitting portion has a shape different from that of the second light transmitting portion.

5. 5. The displacement meter according to claim 1, wherein at least one of the first light transmitting portion and the second light transmitting portion has a rectangular pattern.

6. 5. The displacement meter according to claim 1, wherein at least one of the first light transmitting portion and the second light transmitting portion has a cross-shaped pattern.

7. 7. The displacement meter according to claim 1, wherein the condenser lens and the light blocking member are arranged so as to satisfy the Scheimpflug condition for the object to be measured.

8. 8. The displacement meter according to claim 1, wherein the unit can be positioned by being inserted into a groove provided in the displacement meter.

9. 9. The displacement meter according to claim 1, wherein the unit is held by being screwed into a screw hole provided in the displacement meter.

10. 9. The displacement meter according to claim 1, wherein the unit is made of a magnetic material and is held by the magnetic force of a magnet provided in the displacement meter.

11. 9. The displacement meter according to claim 1, wherein the unit has a leaf spring and is held by pressing the displacement meter.

12. a measuring step of measuring a displacement of a measurement object using the displacement meter according to any one of claims 1 to 11; and a processing step of processing the measurement object based on the measured displacement. A method for manufacturing an article.

Images