Substrate transfer device including multi-layer EFEM

Abstract

To provide a substrate transfer device including an EFEM capable of moving a multi-layer.SOLUTION: The substrate transfer device according to the invention of the present application includes: a first moving plate; a second moving plate located below the first moving plate; and an EFEM connected to the first moving plate and the second moving plate to provide the substrate to one of the first moving plate and the second moving plate through a first robot, the EFEM having a first rail, a first mobile body moving on the first rail, a second rail arranged on a surface of the first moving body, and the first robot for transferring the substrate by moving on the second rail.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a substrate transfer apparatus, and more particularly to a substrate transfer apparatus including a multi-layer Equipment Front End Module (EFEM). [Background technology]

[0002] Reducing the area occupied by equipment used in semiconductor or display processes is extremely important. For example, by reducing the area occupied by substrate transfer devices, more equipment can be installed and operated within a factory, thereby improving productivity and production capacity. Furthermore, by optimizing the use of space within a factory through reduced area, space utilization efficiency increases, which is advantageous for cost reduction. By shortening transfer paths, production lines can be optimized by reducing transfer time during the production process. To achieve this, technology is needed to increase the throughput per unit area of ​​equipment used in semiconductor processes. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Korean Patent Publication No. 10-2007-0099185 Summary of the Invention [Problem to be solved by the invention]

[0004] One object of the present invention is to provide a substrate transfer device including an EFEM capable of multi-layer movement. [Means for solving the problem]

[0005] According to one embodiment, the substrate transfer device may include a first moving plate, a second moving plate positioned below the first moving plate, a first rail, a first moving body that moves on the first rail, and a first robot connected to the first moving body to transport a substrate, and may include an EFEM connected to the first moving plate and the second moving plate to provide a substrate to the first moving plate or the second moving plate through the first robot.

[0006] Here, the EFEM may include a second rail disposed on one surface of the first moving body, and the first robot may be configured to move on the second rail.

[0007] Here, the first rail and the second rail are arranged perpendicular to each other, the first moving body can move left and right on the first rail, and the first robot can move up and down on the second rail.

[0008] Here, the EFEM includes a third rail, a second moving body that moves on the third rail, a fourth rail disposed on one side of the second moving body, and a second robot that moves on the fourth rail to transport a substrate, the third rail and the fourth rail being disposed perpendicular to each other, the second moving body being able to move left and right on the third rail, and the second robot being able to move up and down on the fourth rail.

[0009] Here, when viewed from above, the first rail and the third rail do not need to overlap each other.

[0010] Here, the first robot moves along a first path on the first rail, and the second robot moves along a second path on the third rail, and the first path and the second path may not overlap each other when viewed from above.

[0011] Here, the first robot may transfer the substrate to the second robot using a rotatable first robot arm.

[0012] Here, the system further includes a shuttle configured to move on the first moving plate or the second moving plate and to accommodate a substrate, and the first robot can transport the substrate to the shuttle.

[0013] Here, the height from the ground to the first rail may be higher than the height from the ground to the third rail.

[0014] Here, the EFEM may include a first auxiliary rail that is arranged parallel to the first rail to improve stability and that can move the first moving body.

[0015] Here, the EFEM may include a fifth rail arranged on the other surface of the first movable body so that the first robot moves on the one surface of the first movable body and the second robot moves on the other surface opposite to the one surface.

[0016] Here, the first rail and the second rail may be connected so that the first robot can move on the first rail.

[0017] Here, the first moving body may include a first sub-body and a second sub-body, and the second sub-body may be connected to the first robot and configured to be retractable into the first sub-body to adjust the position of the first robot.

[0018] Here, the EFEM includes a third rail, a second moving body that moves on the third rail, and a second robot that is connected to the second moving body and transports the substrate, and when viewed from above, the first rail and the third rail may at least partially overlap. [Effects of the Invention]

[0019] According to one embodiment of the present invention, a substrate transfer device including an EFEM capable of multi-layer movement can be provided. [Brief explanation of the drawings]

[0020] [Figure 1] 1 is a view illustrating a substrate transfer apparatus according to an embodiment; [Figure 2] FIG. 1 is a cross-sectional view illustrating an EFEM according to an embodiment. [Figure 3] FIG. 10 is a cross-sectional view illustrating an EFEM according to another embodiment. [Figure 4] 4 is a diagram for explaining the EFEM of FIG. 3. [Figure 5] 10 is a diagram illustrating an EFEM according to another embodiment. [Figure 6] 10 is a diagram illustrating an EFEM according to another embodiment. [Figure 7] 7 is a diagram for explaining the EFEM of FIG. 5 or FIG. 6. DETAILED DESCRIPTION OF THE INVENTION

[0021] The embodiments described in this specification are intended to clearly explain the concept of the present invention to those having ordinary skill in the art to which the present invention pertains, and therefore the present invention is not limited to the embodiments described in this specification, and the scope of the present invention should be interpreted as including modifications or variations that do not deviate from the concept of the present invention.

[0022] The terms used in this specification are currently widely used and general terms that are selected in consideration of their functions in the present invention, but these terms may change depending on the intentions of those skilled in the art to which the present invention pertains, precedents, the emergence of new technologies, etc. However, when a specific term is defined and used with an arbitrary meaning, the meaning of the term will be separately described. Therefore, the terms used in this specification should be defined based on the substantive meaning of the term and the overall content of this specification, rather than simply by the name of the term.

[0023] The drawings attached to this specification are intended to facilitate the explanation of the present invention, and the shapes illustrated in the drawings are exaggerated as necessary to facilitate understanding of the present invention, and therefore the present invention is not limited by the drawings.

[0024] In this specification, if it is determined that a detailed description of a known structure or function related to the present invention may obscure the gist of the present invention, the detailed description thereof will be omitted as necessary.

[0025] FIG. 1 is a view illustrating a substrate transfer apparatus according to an embodiment.

[0026] 1, a substrate transfer apparatus according to one embodiment may include a first moving plate 100, a second moving plate 101, a load lock chamber 150, and an EFEM 200. Additionally, the substrate transfer apparatus may include multiple processing chambers, multiple arms, multiple shuttles, and rails for the shuttles.

[0027] A second moving plate 101 may be disposed below the first moving plate 100. The first moving plate 100 and the second moving plate 101 may be disposed at the top and bottom, respectively, so that the substrate transfer device may have a multi-layer structure.

[0028] In the multi-layer substrate transfer device, a substrate can be transferred on a first moving plate 100 or a second moving plate 101. The substrate can be transferred to an upper layer or a lower layer through the EFEM 200. Therefore, in the multi-layer substrate transfer device, if a processing chamber adjacent to one moving plate fails, the substrate can be transferred to a processing chamber adjacent to another moving plate.

[0029] A load lock chamber 150 may be connected to the first moving plate 100 and the second moving plate 101. The load lock chamber 150 is a module that moves substrates while alternating between atmospheric and vacuum pressures between the moving plates and the EFEM. The load lock chamber 150 may be a chamber for maintaining a vacuum or atmospheric condition for a substrate being transported to the EFEM 200 by the first moving plate 100 or the second moving plate 101, or vice versa.

[0030] For example, when a substrate is moved to a moving plate in the EFEM, the load lock chamber 150 can acquire the substrate in atmospheric conditions from the EFEM, adjust the pressure to ATM to plate the substrate, then adjust the pressure back to vacuum and then open the gate of the moving plate to transfer the substrate to the moving plate. Similarly, when a substrate is moved from the moving plate to the EFEM, the load lock chamber 150 can acquire the substrate in vacuum conditions from the moving plate, adjust the pressure to atmospheric conditions, then open the gate of the EFEM to transfer the substrate to the EFEM.

[0031] The Equipment Front End Module (EFEM) can be equipment that performs pre-processing tasks such as transferring substrates. The EFEM 200 can include components such as a robot arm, an aligner for setting the orientation of the substrate, a side storage for removing fumes, a load port where a FOUP (Front Open Unified Pod) is placed, a sensor for detecting the position of the substrate, a vacuum pump, and modules for additional functions.

[0032] The present invention relates to a substrate transfer device that can move a substrate from one of a first moving plate 100 and a second moving plate 101 to the other using a robot included in an EFEM. Conventionally, additional hardware devices such as escalators or elevators are required in an EFEM to move a substrate. However, these are vulnerable to vibrations caused by the elevator itself, and have problems related to the possibility of particle generation due to pressure changes caused by vibrations and movement. Furthermore, designing these devices requires a great deal of effort and expense.

[0033] The present invention is characterized by an EFEM including a robot that transports a substrate on fixed rails to compensate for the vulnerability to vibration and the possibility of particle generation, even though it is simple. Below, a substrate transfer device including an EFEM capable of layer movement will be described in detail with reference to Figures 2 to 6.

[0034] FIG. 2 is a cross-sectional view illustrating an EFEM according to an embodiment.

[0035] 2, an EFEM according to one embodiment may include a first rail 211, a first moving body 241, a second rail 221 disposed on the first moving body, a first auxiliary rail 231, and a first robot 10. While FIG. 2 illustrates an I-shaped structure in which the first rail 211 and the first auxiliary rail 231 are disposed horizontally with the ground and the second rail 221 is disposed vertically with the ground, the structure is not limited thereto, and an H-shaped structure is also possible. For example, the first rail 211 and the first auxiliary rail 231 may be disposed vertically with the ground and the second rail 221 may be disposed horizontally with the ground.

[0036] The first rail 211 and the first auxiliary rail 231 may be rails whose positions are fixed inside the EFEM, and the second rail 221 may be a rail whose position is fixed on the first moving body 241. However, the position of the second rail 221 may be variable inside the EFEM according to the movement of the first moving body 241.

[0037] The first rail 211 may be configured to allow the first moving body 241 to move. The first moving body 241 can change the left / right position of the first robot 10 by moving on the first rail 211. Although not shown in FIG. 2 , the first robot 10 may move not only on the second rail 221 on the first moving body 241 but also on the first rail 211. In this case, the first rail 211 and the second rail 221 may be connected so that the first robot 10 can move on the first rail 211.

[0038] The first moving body 241 may be disposed perpendicular to and connected to the first rail 211. The first moving body 241 may move on the first rail 211 to provide left and right movement of the first robot 10. The first moving body 241 may have various shapes such as a cylinder, a polygonal pillar, etc. The first moving body 241 may include a second rail 221 disposed on one surface.

[0039] Depending on the vertical length of the first moving body 241, air resistance during movement, etc., problems such as strength and stability may arise when the first moving body 241 moves on the first rail 211. Therefore, the EFEM can improve the stability of the first moving body 241 during movement by using the first auxiliary rail 231.

[0040] Specifically, the first auxiliary rail 231 may be connected to a region of the first moving body 241. While FIG. 2 illustrates the first auxiliary rail 231 being connected to the center of the first moving body 241, the present invention is not limited thereto and the connection point of the first auxiliary rail 231 may be various. The first moving body 241 may move left and right along the rails using not only the first rail 211 but also the first auxiliary rail 231. Therefore, even if the first moving body 241 is long or moves at a high speed, the use of two rails can improve the stability and strength of the movement of the first moving body 241 within the EFEM. Although FIG. 2 illustrates an example in which one auxiliary rail is used, the present invention is not limited thereto and multiple auxiliary rails may be used as needed.

[0041] The second rail 221 may be disposed on one surface of the first moving body 241. The second rail 221 may be configured to enable the first robot 10 to move. For example, the first robot 10 may move on the second rail 221 using wheels. However, without being limited thereto, the second rail 221 may be embodied in various forms such as a sliding rail, a fixed rail, etc.

[0042] The first moving body 241 may include other rails in addition to the second rail 221. Specifically, the second rail 221 may be disposed on one side of the first moving body 241, and another rail (not shown) may be disposed on the other side opposite the first side. Therefore, the first robot 10 may move using the second rail 221 on one side of the first moving body 241, and another robot may move using another rail (e.g., a fifth rail) on the other side. That is, the first moving body 241 may include two or more rails to provide movement for two or more robots.

[0043] The first robot 10 may include a robot arm capable of grasping a substrate. The first robot 10 may transport the substrate by moving on the second rail 221. In addition, the first robot 10 may also move on the first rail 211 or the first auxiliary rail 231, depending on the situation.

[0044] Specifically, the first moving body 241 moves left and right on the first rail 211, and the first robot 10 can grasp and transport a substrate on the same layer as the first moving plate 100. In addition, the first robot 10 moves up and down on the second rail 221, allowing the substrate to be moved from one of the first moving plate 100 and the second moving plate 101 onto the other, thereby providing layer change of the substrate.

[0045] 2 illustrates the second rail 221 disposed perpendicular to the first rail 211 and the first auxiliary rail 231, but is not limited thereto, and the angle formed between the second rail 221 and the first rail 211 or the first auxiliary rail 231 may vary. For example, one end of the second rail 221 may be connected to the left end of the first rail 211, and the other end of the second rail 221 may be connected to the right end of the first auxiliary rail 231. Therefore, the EFEM may include rails in a Z-structure or an inverted Z-structure.

[0046] FIG. 3 is a cross-sectional view illustrating an EFEM according to another embodiment.

[0047] 3, an EFEM according to another embodiment may include a first rail 211, a first moving body 241, a second rail 221 disposed on the first moving body 241, a first auxiliary rail 231, a first robot 10, a third rail 212, a second moving body 242, a fourth rail 222 disposed on the second moving body 242, a second auxiliary rail 232, and a second robot 20. The EFEM in FIG. 3 is an example using two moving bodies and two robots.

[0048] The EFEM may include multiple robots to move and transport substrates. The multiple robots may transport substrates independently, or one robot may transfer a substrate to another robot. The multiple robots may move independently. Specifically, the first robot 10 may move left and right via the first rail 211 and first moving body 241 and up and down via the second rail 221. The second robot 20 may move left and right via the third rail 212 and second moving body 242 and up and down via the fourth rail 222. Furthermore, the first robot 10 and the second robot 20 may be able to move to various positions not only left and right and up and down but also by changing their position and rotating using multiple rails, moving bodies, rotating bodies, robot arms, etc.

[0049] The third rail 212 and the second auxiliary rail 232 may be rails whose positions are fixed inside the EFEM, and the fourth rail 222 may be a rail whose position is fixed on the second moving body 242. However, the position of the fourth rail 222 may be variable inside the EFEM according to the movement of the second moving body 242.

[0050] The third rail 212 may be configured to allow the second mobile body 242 to move. The second mobile body 242 can change the left / right position of the second robot 20 by moving on the third rail 212. Although not shown in FIG. 3 , the second robot 20 can move not only on the fourth rail 222 on the second mobile body 242 but also on the third rail 212. In this case, the third rail 212 and the fourth rail 222 may be connected so that the second robot 20 can move on the third rail 212.

[0051] The second moving body 242 may be disposed perpendicular to and connected to the third rail 212. The second moving body 242 may move on the third rail 212 to provide left and right movement of the second robot 20. The second moving body 242 may have various shapes such as a cylinder, a polygonal pillar, etc. The second moving body 242 may include a fourth rail 222 disposed on one surface.

[0052] Depending on the vertical length of the second moving body 242, air resistance during movement, etc., problems such as strength and stability may arise when the second moving body 242 moves on the third rail 212. Therefore, the EFEM can improve the stability of the second moving body 242 during movement by using the second auxiliary rail 232.

[0053] Specifically, the second auxiliary rail 232 may be connected to a region of the second moving body 242. While FIG. 3 illustrates the second auxiliary rail 232 being connected to the center of the second moving body 242, the present invention is not limited thereto and the connection point of the second auxiliary rail 232 may be various. The second moving body 242 may move left and right along the rails using not only the third rail 212 but also the second auxiliary rail 232. Therefore, even if the second moving body 242 is long or moves quickly, the use of two rails can improve the stability and strength of the movement of the second moving body 242 within the EFEM. While FIG. 3 illustrates an example using one auxiliary rail, the present invention is not limited thereto and the number of auxiliary rails may be multiple as needed. In addition, the first auxiliary rail 231 and the second auxiliary rail 232 may be integrated into a single auxiliary rail as needed.

[0054] The first auxiliary rail 231 and the second auxiliary rail 232 may be disposed at a position where they will not be obstructed when the first robot 10 and the second robot 20 transport substrates to the load lock chamber. For example, the first auxiliary rail 231 and the second auxiliary rail 232 may be disposed so as to be connected to a surface of the first movable body 241 and the second movable body 242 that is not close to the load lock chamber.

[0055] The fourth rail 222 may be disposed on one surface of the second moving body 242. The fourth rail 222 may be configured to enable the second robot 20 to move. For example, the second robot 20 may move on the fourth rail 222 using wheels. However, without being limited thereto, the fourth rail 222 may be embodied in various forms such as a sliding rail, a fixed rail, etc.

[0056] The second moving body 242 may include other rails in addition to the fourth rail 222. Specifically, the fourth rail 222 may be disposed on one side of the second moving body 242, and another rail (not shown) may be disposed on the other side opposite the first side. Therefore, the second robot 20 may move using the fourth rail 222 on one side of the second moving body 242, and another robot may move using another rail on the other side. That is, the second moving body 242 may include two or more rails to provide movement for two or more robots.

[0057] The first moving body 241 and the second moving body 242 may be spaced apart to prevent collision when the first robot 10 and the second robot 20 move left and right. Therefore, the first rail 211 and the third rail 212 may be spaced apart to allow for the spacing between the first moving body 241 and the second moving body 242. For example, when viewed from above, the first rail 211 and the third rail 212 may be spaced apart by a certain distance.

[0058] Alternatively, in order to prevent a collision between the first robot 10 and the second robot 20, the first moving body 241 and the second moving body 242 may be configured with a structure other than the first rail 211 and the third rail 212. For example, when viewed from above, the first rail 211 and the third rail 212 may be arranged overlapping each other, with the first moving body 241 being arranged on the left side of the first rail 211 and the third rail 212, and the second moving body 242 being arranged on the right side of the first rail 211 and the third rail 212. However, this is not limited thereto, and various rail and moving body arrangement structures may be applied to prevent a collision between the first robot 10 and the second robot 20.

[0059] The first robot 10 can transport a substrate positioned on the upper layer or transport a substrate to the upper layer through the movement of the first moving body 241 on the first rail 211 and / or the first auxiliary rail 231 and the movement of the first robot 10 on the second rail 221. Furthermore, the second robot 20 can transport a substrate positioned on the upper layer or transport a substrate to the upper layer through the movement of the second moving body 242 on the third rail 212 and / or the second auxiliary rail 232 and the movement of the second robot 20 on the fourth rail 222.

[0060] The first robot 10 may transfer a substrate to or be transferred to the second robot 20. In this case, the first robot 10 may transfer a substrate to or be transferred to the second robot 20 on the second rail 221 using the first robot arm, but is not limited thereto, and may transfer or be transferred to the second robot 20 on the first rail 211.

[0061] The second robot 20 may transfer a substrate to or be transferred to the first robot 10. In this case, the second robot 20 may transfer a substrate to or be transferred to the first robot 10 using the second robot arm on the fourth rail 222, but is not limited thereto, and may transfer a substrate to or be transferred to the first robot 10 on the third rail 212.

[0062] The first robot 10 or the second robot 20 can transport a substrate to the shuttle. The shuttle is a device configured to accommodate a substrate and can include a space inside in which the substrate can be accommodated. Specifically, the shuttle can move into a load lock chamber 150 connected to the EFEM 200 to transfer or receive a substrate. The first robot 10 or the second robot 20 can transfer a substrate to the shuttle in the load lock chamber 150 or remove a substrate from the shuttle. Therefore, the shuttle can move again to the first moving plate 100 or the second moving plate 101.

[0063] The first rail 211 may be located above the third rail 212. Specifically, the height from the ground to the first rail 211 may be higher than the height from the ground to the third rail 212. For example, the first rail 211 may be located on the ceiling of the EFEM, and the third rail 212 may be located on the floor of the EFEM, but is not limited to this. The heights of the first rail 211 and the third rail 212 may be set to be different to improve the efficiency of movement between the moving bodies and reduce the size occupied by the rails and moving bodies inside the EFEM.

[0064] 3 illustrates that the first rail 211 to which the first moving body 241 is connected and the third rail 212 to which the second moving body 242 is connected are disposed at the upper and lower parts, respectively, inside the EFEM. However, the first rail 211 and the third rail 212 are not limited thereto and may have various arrangement shapes.

[0065] For example, the first rail 211 may be disposed on the top of the EFEM, and the third rail 212 may be disposed on the left or right side of the EFEM. Therefore, the second moving body 242 may move up and down on the third rail 212, and the second robot 20 may move left and right on the second moving body 242. In this case, when viewed from above, the first rail 211 and the third rail 212 may overlap in at least one area.

[0066] Furthermore, for example, the first rail 211 may be disposed on the left or right side of the EFEM, and the third rail 212 may be disposed below the EFEM. Therefore, the first moving body 241 may move up and down on the first rail 211, and the first robot 10 may move left and right on the first moving body 241. In this case, when viewed from above, the first rail 211 and the third rail 212 may overlap in at least one area.

[0067] Furthermore, for example, the first rail 211 may be disposed on the left side of the EFEM, and the third rail 212 may be disposed on the right side of the EFEM. Therefore, the first moving body 241 may move up and down on the first rail 211, and the first robot 10 may move left and right on the first moving body 241. Furthermore, the second moving body 242 may move up and down on the third rail 212, and the second robot 20 may move left and right on the second moving body 242. In this case, the first rail 211 and the third rail 212 may not overlap in at least one area when viewed from above.

[0068] The various arrangements of the first rail 211 and the third rail 212 described above can be applied not only to the embodiment of FIG. 3 but also to the embodiments of FIGS.

[0069] Fig. 4 is a diagram for explaining the EFEM of Fig. 3. Specifically, Fig. 4 is a diagram showing the shape of the substrate transfer device or EFEM of Fig. 3 projected from above.

[0070] 4, the EFEM may include rails configured to allow only the first robot 10 and the second robot 20 to move independently without interfering with each other. For example, the EFEM may include a first rail 211 configured to allow only the first robot 10 to move and a third rail 212 configured to allow only the second robot 20 to move.

[0071] In this case, the first rail 211 and the third rail 212 may be spaced apart from each other by a certain distance d when viewed from above. Specifically, the first rail 211 and the third rail 212 are parallel to each other and spaced apart by a certain distance d in a direction perpendicular to the axis of the rail. Since the rails are spaced apart from each other, the first robot 10 and the second robot 20 can move freely without colliding with each other.

[0072] 4, other arrangements may be applied that prevent the paths of the first robot 10 and the second robot 20 from overlapping. Specifically, when viewed from above, the first robot 10 may move along a first path along a first axis a1, and the second robot 20 may move along a second path along a second axis a2. Therefore, the first rail 211 and the third rail 212 may be arranged so that the first path and the second path do not overlap each other.

[0073] For example, the first rail 211 and the third rail 212 are arranged so as to overlap when viewed from above. JPEG0007736325000001.jpg13168, the first path and the second path may not overlap. Therefore, the first rail 211 and the third rail 212 may be spaced apart when viewed from above, but are not limited to this. The first rail 211 and the third rail 212 may overlap each other or may be arranged so that the movement paths of the first robot 10 and the second robot 20 do not overlap each other (so that there are no more than one points of contact).

[0074] FIG. 5 is a diagram for explaining an EFEM according to another embodiment.

[0075] 5, an EFEM according to another embodiment may include a first rail 211, a first moving body 251, a first robot 10, a third rail 212, a second moving body 242, a fourth rail 222 disposed on the second moving body 242, and a second robot 20. The EFEM of FIG. 5 differs from the EFEM of FIG. 3 in the shape of the first moving body 251.

[0076] Specifically, the first moving body 251 in Fig. 5 does not include a rail, unlike the second moving body 242. The first moving body 251 can change the left and right position of the first robot 10 by moving on the first rail 211. However, unlike the embodiment in Fig. 3, the first moving body 251 can be configured in a form that can be extended up and down in order to change the up and down position of the first robot 10.

[0077] The first moving body 251 may include multiple sub-bodies. Specifically, the first moving body 251 may include a first sub-body 261, a second sub-body 262, a third sub-body 263, and a fourth sub-body 264. Although FIG. 5 illustrates the first moving body 251 including four sub-bodies, the number of sub-bodies is not limited thereto and may vary depending on the size of the EFEM.

[0078] The first sub-body 261 is located above the first moving body 251 and can move left and right on the first rail 211. The first sub-body 261 is connected to the second to fourth sub-bodies 262 to 264 and can accommodate them. Specifically, the second to fourth sub-bodies 262 to 264 can be retracted into the first sub-body 261. Also, the second to fourth sub-bodies 262 to 264 can be retracted out of the first sub-body 261 by control.

[0079] The first to fourth sub-bodies 261 to 264 may all have different sizes. Specifically, the fourth sub-body 264 may be smaller than the third sub-body 263 because it is retracted into the third sub-body 263. The third sub-body 263 may be smaller than the second sub-body 262 because it is retracted into the second sub-body 262. The second sub-body 262 may be smaller than the first sub-body 261 because it is retracted into the first sub-body 261.

[0080] The fourth sub-body 264 may be connected to the first robot 10 as the distal sub-body of the first moving body 251. The height of the first robot 10 may be adjusted by retracting or extending the second to fourth sub-bodies 262 to 264.

[0081] The first to fourth sub-bodies 261 to 264 are connected to each other, and the overall length can be extended. For example, in the basic state (where the second to fourth sub-bodies 262 to 264 are all retracted into the first sub-body 261), the fourth sub-body 264 can be retracted from the third sub-body 263 to reduce the height of the first robot 10 by about a first length.

[0082] Also, for example, in order to lower the height of the first robot 10 in the base state by a second length greater than the first length, the fourth sub-body 264 can be extended from the third sub-body 263, and the third sub-body 263 can be extended from the second sub-body 262. In this manner, in order to adjust the height of the first robot 10, the second to fourth sub-bodies 262 to 264 can be sequentially retracted or extended.

[0083] Unlike the first moving body 251, the second moving body 242 may be configured in the same shape as the EFEM of Fig. 3. In the EFEM of Fig. 5, the vertical length of the first moving body 251 or the height of the first robot 10 from the ground can be adjusted, so the first rail 211 and the third rail 212 may appear to overlap when viewed from above. That is, while the EFEM of Fig. 3 includes the first rail 211 and the third rail 212 that are spaced apart when viewed from above as in Fig. 4, the EFEM of Fig. 5 may include the first rail 211 and the third rail 212 that at least partially overlap when viewed from above. This will be described in detail with reference to Fig. 7.

[0084] FIG. 6 is a diagram for explaining an EFEM according to another embodiment.

[0085] 6, an EFEM according to another embodiment may include a first rail 211, a first moving body 251, a first robot 10, a third rail 212, a second moving body 252, and a second robot 20. In the EFEM of FIG. 6, the shape of the second moving body 252 may be the same as the shape of the first moving body 251 of FIG.

[0086] Specifically, the first moving body 251 and the second moving body 252 in Fig. 6 may include a plurality of sub-bodies. The first moving body 251 and the second moving body 252 may include a plurality of sub-bodies that are extendable up and down, thereby adjusting the height of the first robot 10 and the second robot 20. A detailed description of the first moving body 251 will be omitted as it overlaps with the description of Fig. 5.

[0087] The second moving body 252 may include multiple sub-bodies. Specifically, the second moving body 252 may include a fifth sub-body 266, a sixth sub-body 267, a seventh sub-body 268, and an eighth sub-body 269. Although Fig. 6 illustrates the second moving body 252 including four sub-bodies, the number of sub-bodies is not limited thereto and may vary depending on the size of the EFEM.

[0088] The fifth sub-body 266 is located below the second moving body 252 and can move left and right on the third rail 212. The fifth sub-body 266 is connected to the sixth to eighth sub-bodies 267 to 269 and can accommodate them. Specifically, the sixth to eighth sub-bodies 267 to 269 can be retracted into the fifth sub-body 266. In addition, the sixth to eighth sub-bodies 267 to 269 can be extended out of the fifth sub-body 266 by control. The sub-bodies of the second moving body 252 can be retracted or extended in the opposite direction to the sub-bodies of the first moving body 251.

[0089] The fifth to eighth sub-bodies 266 to 269 may all have different sizes. Specifically, the eighth sub-body 269 may be smaller than the seventh sub-body 268 because it is retracted into the seventh sub-body 268. The seventh sub-body 268 may be smaller than the sixth sub-body 267 because it is retracted into the sixth sub-body 267. The sixth sub-body 267 may be smaller than the fifth sub-body 266 because it is retracted into the fifth sub-body 266.

[0090] The eighth sub-body 269 may be connected to the second robot 20 as the distal sub-body of the second moving body 252. The height of the second robot 20 may be adjusted by retracting or extending the sixth to eighth sub-bodies 267 to 269.

[0091] The fifth to eighth sub-bodies 266 to 269 are connected to each other, and the overall length can be extended. For example, in the basic state (where the sixth to eighth sub-bodies 267 to 269 are all retracted into the fifth sub-body 266), the eighth sub-body 269 can be retracted from the seventh sub-body 268 to increase the height of the second robot 20 by about a third length.

[0092] Also, for example, to increase the height of the second robot 20 from the base state by a fourth length greater than the third length, the eighth sub-body 269 can be extended from the seventh sub-body 268, and the seventh sub-body 268 can be extended from the sixth sub-body 267. In this way, to adjust the height of the second robot 20, the sixth to eighth sub-bodies 267 to 269 can be sequentially retracted or extended.

[0093] In the EFEM of Figure 6, the vertical length of the first moving body 251 and the second moving body 252 or the height of the first robot 10 and the second robot 20 from the ground can be adjusted, so the first rail 211 and the third rail 212 may appear to overlap when viewed from above. That is, while the EFEM of Figure 3 includes the first rail 211 and the third rail 212 that are spaced apart when viewed from above as in Figure 4, the EFEM of Figure 6 can include the first rail 211 and the third rail 212 that at least partially overlap when viewed from above. This will be described in detail with reference to Figure 7.

[0094] Fig. 7 is a diagram for explaining the EFEM of Fig. 5 or Fig. 6. Specifically, Fig. 7 is a diagram showing the shape of the substrate transfer device or EFEM of Fig. 5 or Fig. 6 projected from above.

[0095] 7, the EFEM may include rails configured to allow only the first robot 10 and the second robot 20 to move independently without interfering with each other. For example, the EFEM may include a first rail 211 configured to allow only the first robot 10 to move and a third rail 212 configured to allow only the second robot 20 to move.

[0096] In this case, the first rail 211 and the third rail 212 may at least partially overlap when viewed from above. For efficient use of area, the first rail 211 and the third rail 212 may preferably completely overlap when viewed from above. Therefore, by at least partially overlapping the first rail 211 and the third rail 212, the area occupied by the EFEM can be reduced. In order to at least partially overlap the first rail 211 and the third rail 212, the rail arrangement and moving body configuration shown in FIG. 5 or 6 may be applied.

[0097] 5, since the height of the first moving body 251 can be adjusted, even if the first moving body 251 and the second moving body 242 move left and right, the height adjustment allows the first moving body 251 to avoid collision with the second moving body 242. Therefore, the first robot 10 and the second robot 20 can move independently without colliding with each other or interfering with each other.

[0098] 6, the height of the first moving body 251 and the second moving body 252 can be adjusted, so that the first moving body 251 and the second moving body 252 can move left and right without colliding with each other due to the height adjustment. Therefore, the first robot 10 and the second robot 20 can move independently without colliding with each other or interfering with each other.

[0099] 5 or 6, collisions between the first moving body 251 and the second moving body 242 or 252 and collisions between the first robot 10 and the second robot 20 do not occur, so the first rail 211 and the third rail 212 do not need to be spaced apart when viewed from above and can be arranged so that they at least partially overlap. Therefore, since the first rail 211 and the third rail 212 at least partially overlap, the area occupied by the first rail 211 and the third rail 212 inside the EFEM is reduced, and the size of the EFEM can be reduced.

[0100] Specifically, when viewed from above in Fig. 4, the first rail 211 and the third rail 212 are spaced apart by a distance d, so the length of one side of the EFEM is a first length l1. However, when viewed from above in Fig. 7, the first rail 211 and the third rail 212 at least partially overlap, so the length of one side of the EFEM can be a second length l2 that is smaller than the first length l1. Therefore, as the size of the EFEM is reduced, the overall size of the substrate transfer device can be reduced.

[0101] Methods according to the embodiments may be embodied in the form of program instructions that can be executed by various computer means and recorded on a computer-readable medium. The computer-readable medium may include, alone or in combination, program instructions, data files, data structures, and the like. The program instructions recorded on the computer-readable medium may be specially designed and configured for the embodiments, or may be known and available to those skilled in the art of computer software. Examples of computer-readable mediums include magnetic media such as hard disks, flexible disks, and magnetic tapes, optical media such as CD-ROMs and DVDs, magneto-optical media such as floptical disks, and hardware devices specially configured to store and execute program instructions, such as ROM, RAM, flash memory, and the like. Examples of program instructions include not only machine language code, such as produced by a compiler, but also high-level language code that can be executed by a computer using an interpreter, etc. The hardware devices may be configured to operate as one or more software modules to perform the operations of the embodiments, or vice versa.

[0102] Although the embodiments have been described above with reference to limited examples and drawings, those skilled in the art will appreciate that various modifications and variations may be made to the foregoing description. For example, the techniques described may be performed in a different order than described, and / or the components of the described systems, structures, devices, circuits, etc. may be combined or combined in a different manner than described, or may be replaced or substituted by other components or equivalents, and still achieve suitable results.

[0103] Accordingly, other implementations, other embodiments, and equivalents of the claims are within the scope of the following claims. [Explanation of symbols]

[0104] 100 First moving plate 101 Second moving plate 150 Load Lock Chamber 200 EFEM

Claims

1. A first moving plate; a second moving plate located below the first moving plate; an EFEM including a first rail, a first moving body moving on the first rail, and a first robot connected to the first moving body to transport a substrate, and connected to the first moving plate and the second moving plate to provide a substrate to the first moving plate or the second moving plate through the first robot; the EFEM includes a second rail disposed on one surface of the first moving body; the first robot is configured to move on the second rail; the first rail and the second rail are arranged perpendicular to each other, the first moving body moves left and right on the first rail, and the first robot moves up and down on the second rail; the EFEM includes a third rail, a second moving body that moves on the third rail, a fourth rail disposed on one surface of the second moving body, and a second robot that moves on the fourth rail to transport a substrate; the third rail and the fourth rail are disposed perpendicular to each other, the second moving body moves left and right on the third rail, and the second robot moves up and down on the fourth rail; When viewed from above, the first rail and the third rail overlap each other, the first robot moves on the first rail along a first path; the second robot moves along a second path on the third rail; The substrate transfer apparatus, wherein the first path and the second path do not overlap each other when viewed from above.

2. When viewed from above, the first moving body moves while protruding in a U-shape on one side of the overlapping first and third rails in the horizontal direction, 2. The substrate transfer device of claim 1, wherein the second movable body is configured to move by protruding in a U-shape on the opposite side of the horizontal direction of the overlapping first and third rails when viewed from above.

3. 2. The substrate transfer apparatus of claim 1, wherein the first robot transfers the substrate to the second robot using a rotatable first robot arm.

4. further comprising a shuttle configured to move on the first moving plate or the second moving plate and to receive a substrate; The substrate transfer apparatus of claim 1 , wherein the first robot transports the substrate to the shuttle.

5. The substrate transfer device of claim 1 , wherein the height from the ground to the first rail is higher than the height from the ground to the third rail.

6. The substrate transfer device of claim 1 , wherein the EFEM includes a first auxiliary rail that is arranged parallel to the first rail to improve stability and that can move the first moving body.

7. 2. The substrate transfer device of claim 1, wherein the EFEM includes a fifth rail disposed on the other surface of the first movable body so that the first robot moves on the one surface of the first movable body and a third robot moves on the other surface opposite the one surface.

Images