Sheet collection unit

Abstract

To provide a sheet recovery unit capable of being laminated while suppressing a rising of a sheet.SOLUTION: A sheet recovery unit 80 that laminates a plurality of rectangular sheets 210 and recovers them, comprises a mounting part 81, and a guide part 82 risen from the mounting part 81. The mounting part 81 is formed in a plate shape in which a cut end part 215 of the sheet 210 is mounted on a mounting surface 83 as an upper surface. In the mounting surface 83, that is, the mounting part 81, an angle 217 of the sheet 210 on which an angle area 84 corresponded to the angle 217 of the cut end part 215 of the sheet 210 is mounted is laminated positioned below a center 218 of the mounted sheet 210 in a center region 85 corresponded to a center 218 of the sheet 210. A guide part 82 is arranged in an inner periphery of an open 216 of the cut end part 215 of the sheet 210.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a sheet recovery unit that recovers sheets in a stack. [Background technology]

[0002] A resin coating device is used to attach a sheet to a substrate using a liquid resin (see, for example, Patent Document 1). The resin coating device includes a cutting unit that cuts the sheet attached to the substrate along the outer edge of the substrate, and a sheet recovery unit that recovers the cut ends of the sheet cut by the cutting unit. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2012-143724 Summary of the Invention [Problem to be solved by the invention]

[0004] When a sheet recovery unit recovers a stack of multiple sheets, for example, made of resin, friction between the sheet and the table or between the sheets can cause the sheets to be stacked in a bulging state. If the sheets are further stacked along the bulging portion, some of the stacked sheets will become even more bulged, making it impossible to stack the desired number of sheets.

[0005] In particular, if the corners of the sheet are fixed by friction, the sheet will not slide and will not be able to stay level, making it more likely to bulge.

[0006] An object of the present invention is to provide a sheet recovery unit that can stack sheets while suppressing the sheets from swelling up. [Means for solving the problem]

[0007] In order to solve the above-mentioned problems and achieve the object, the sheet collection unit of the present invention is And an opening was formed in the center A sheet collection unit for stacking and collecting sheets, the sheet collection unit having a loading surface on which the sheets are placed, the loading surface having corner areas corresponding to the corners of the sheets placed on the loading surface, and a center area corresponding to the center of the sheets placed on the loading surface. The inner edge of the opening Stacked at a lower position than At the same time, the corner region is formed by removing the corner of a member having the same shape as the outer edge of the sheet. It is characterized by the following.

[0011] In the sheet recovery unit , applicable A guide portion may be provided on the inner periphery of the opening.

[0012] In the sheet recovery unit, the sheet recovery unit may be set in a resin coating device, and the resin coating device may include a resin supply nozzle that supplies resin onto the sheet installed on a resin supply table, a substrate holding unit that presses the substrate against the supplied resin to coat the substrate with resin, a cutting unit that cuts the sheet along the outline of the resin-coated substrate and divides it into a central portion that is integral with the substrate and a cut portion surrounding the central portion, and a transport unit that transports the cut portion to the sheet recovery unit. [Effects of the Invention]

[0013] The present invention has an effect of enabling stacking of sheets while suppressing swelling of the sheets. [Brief explanation of the drawings]

[0014] [Figure 1] FIG. 1 is a perspective view showing an example of the configuration of a resin coating device including a sheet recovery unit according to the first embodiment. [Figure 2] FIG. 2 is a perspective view of the substrate after it has been coated with resin by the resin coating apparatus shown in FIG. 1 and after the sheet has been attached. [Figure 3] FIG. 3 is a perspective view illustrating an example of the configuration of the sheet recovery unit according to the first embodiment. [Figure 4]FIG. 4 is a perspective view showing a placement portion and the like of the sheet recovery unit shown in FIG. [Figure 5] FIG. 5 is a perspective view showing a state in which the loading section of the sheet recovery unit shown in FIG. 4 has recovered a plurality of sheets. [Figure 6] FIG. 6 is a perspective view showing a placement portion and the like of a sheet recovery unit according to a first modification of the first embodiment. [Figure 7] FIG. 7 is a perspective view showing a loading section and the like of a sheet recovery unit according to a second modification of the first embodiment. [Figure 8] FIG. 8 is a perspective view showing a placement portion and the like of a sheet recovery unit according to a third modification of the first embodiment. [Figure 9] FIG. 9 is a perspective view showing a placement portion and the like of a sheet recovery unit according to a fourth modification of the first embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0015] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by a person skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the configuration can be made within the scope of the gist of the present invention.

[0016] [Embodiment 1] A sheet recovery unit according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing an example of the configuration of a resin coating device including a sheet recovery unit according to the first embodiment. FIG. 2 is a perspective view of a substrate after it has been coated with resin by the resin coating device shown in FIG. 1 and a sheet has been attached. FIG. 3 is a perspective view showing an example of the configuration of the sheet recovery unit according to the first embodiment. FIG. 4 is a perspective view showing a loading section and the like of the sheet recovery unit shown in FIG. 5. FIG. 5 is a perspective view showing a state in which the loading section and the like of the sheet recovery unit shown in FIG. 4 have recovered a plurality of sheets.

[0017] The sheet recovery unit 80 according to the first embodiment constitutes (is configured to constitute) a resin coating apparatus 1 shown in Fig. 1. The resin coating apparatus 1 shown in Fig. 1 is an apparatus that coats a substrate 200 with resin 201, attaches a sheet 210 (shown in Fig. 1), and cuts the sheet 210 along the outer edge of the substrate 200, as shown in Fig. 2.

[0018] In the first embodiment, the substrate 200 to which the sheet 210 is attached by the resin coating apparatus 1 shown in FIG. 1 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, with a base material such as silicon, sapphire, gallium arsenide, or SiC (silicon carbide). In the first embodiment, the substrate 200 is a wafer before devices are formed on its surface, and is obtained by cutting a cylindrical ingot with a wire saw or the like. In the first embodiment, the bottom surface of the substrate 200 is a cut surface cut with a wire saw or the like, and has undulations, warping, or the like formed thereon. The bottom surface is coated with a resin 201, and the sheet 210 is attached thereto. The substrate 200 is carried into the resin coating apparatus 1 while being housed in a cassette 4.

[0019] In the present invention, the substrate 200 is not limited to a wafer such as a semiconductor wafer or an optical device wafer, but may also be a ceramic or glass-based inorganic material substrate, or a ductile material such as a metal plate or resin. The resin 201 is supplied in a liquid state onto the sheet 210, and the lower surface of the substrate 200 is pressed against the resin 201 to cover the entire lower surface of the substrate 200. After covering the entire lower surface of the substrate 200, the resin 201 is cured. In the first embodiment, the resin 201 is made of an ultraviolet-curable resin that cures when irradiated with ultraviolet light, or a photocurable resin that cures when irradiated with light. The resin 201 is supplied onto the sheet 210 in a liquid state having a viscosity of, for example, about 50 (MPa) to 30,000 (MPa).

[0020] The sheet 210 is formed of an elastic and flexible resin such as polyethylene terephthalate. The sheet 210 is formed into a strip shape by, for example, stretching heated resin along a first direction 211 and then stretching it in a second direction 212 that intersects with the first direction 211 (orthogonal in the first embodiment). In the first embodiment, the first direction 211 of the sheet 210 is a so-called machine direction (MD), and the second direction 212 is a so-called vertical direction (TD: transverse direction).

[0021] The length of the sheet 210 in a first direction 211 and the width of the sheet 210 in a second direction 212 are larger than the outer diameter of the substrate 200. In other words, the sheet 210 is larger in size than the substrate 200. The sheet 210 is wound into a roll to form a sheet roll 213, and is carried into the resin coating apparatus 1.

[0022] As shown in Figure 1, the resin coating device 1 includes an apparatus main body 2, a cassette storage section 3, a substrate detection section 10, a cutting unit 20, a first conveying section 30, a sheet supply section 40, a sheet conveying section 50, an adhering unit 60, a second conveying section 70 which is a conveying unit, a sheet recovery unit 80, and a control unit 100.

[0023] The cassette storage unit 3 is disposed at one end in the X-axis direction, which is parallel to the first direction 211 and the horizontal direction, of the device main body 2. The cassette storage unit 3 is provided with a cassette 4 that stores the substrate 200 before the sheet 210 is attached, and a cassette 5 that stores the substrate 200 after the sheet 210 has been attached.

[0024] The substrate detection unit 10 is disposed on the upper surface of a base stand 11 disposed adjacent in the X-axis direction to the cassette storage unit 3. The substrate detection unit 10 detects the position and orientation of the substrate 200 before the sheet 210 is attached.

[0025] The cutting unit 20 is disposed below the base table 11, and cuts the sheet 210 attached to the substrate 200 along the outer edge (corresponding to the outer shape) of the substrate 200 coated with the resin 201, thereby dividing the sheet 210 into a disk-shaped central portion 214 (shown in FIG. 2) that is integral with the substrate 200, and a cut portion 215 (shown in FIG. 4) that surrounds the central portion 214. The cut portion 215 has a rectangular outer edge in plan view, and an opening 216 in the center that has the same shape as the central portion 214, i.e., the substrate 200.

[0026] 3, the cutting unit 20 includes a holding table 21 that suction-holds the substrate 200 via the sheet 210 after the sheet 210 has been attached, a rotating arm 23 that moves a cutter 22 along the outer edge of the substrate 200 held on the holding table 21, an elevator unit (not shown) that raises and lowers the rotating arm 23 in the Z-axis direction that is orthogonal to both the X-axis direction and the Y-axis direction, and a motor 24 that rotates the rotating arm 23 to rotate the cutter 22 along the outer edge of the substrate 200 held on the holding table 21. The holding table 21 suction-holds the substrate 200 via the sheet 210 on a holding surface 25 that is its upper surface. The holding table 21 has a clearance groove 26 formed in the holding surface 25 into which the cutter 22 enters.

[0027] The cutting unit 20 suction-holds the substrate 200 on the holding surface 25 of the holding table 21 via the sheet 210, and while rotating the pivot arm 23 with the motor 24, lowers the pivot arm 23 with the lifting unit, causing the cutter 22 to cut into the sheet 210 and move the cutter 22 along the outer edge of the substrate 200, so that the cutter 22 cuts the sheet 210 along the outer edge of the substrate 200.

[0028] The first transport unit 30 transports the substrate 200 before the sheet 210 is attached from the cassette 4 to the substrate detection unit 10, and transports the substrate 200 after the sheet 210 has been attached from the cutting unit 20 to the cassette 5. The first transport unit 30 is supported on a pair of guide rails 31 arranged on the bottom wall of the apparatus body 2, which are parallel to the horizontal direction and parallel to the Y-axis direction perpendicular to the X-axis direction, and is configured to be movable in the Y-axis direction by a ball screw type movement mechanism. The first transport unit 30 also includes a support base 32 that is movable in the Z-axis direction, a multi-joint link mechanism 33 provided on the support base 32, and a substrate holder 34 provided at the tip of the multi-joint link mechanism 33 and that holds the substrate 200.

[0029] The sheet supply unit 40 is disposed at the other end in the X-axis direction of the device body 2. The sheet supply unit 40 supplies the sheet 210 to the bonding unit 60. The sheet supply unit 40 cuts the sheet 210 fed from the sheet roll 213 to a predetermined length. The sheet conveying unit 50 is disposed adjacent to the sheet supply unit 40 in the Y-axis direction of the device body 2. The sheet conveying unit 50 conveys the sheet 210, which has been cut to a predetermined length by the sheet supply unit 40 and has a rectangular planar shape, to the bonding unit 60.

[0030] The adhering unit 60 supplies liquid resin 201 to the sheet 210, presses the substrate 200 against the liquid resin 201 on the sheet 210, hardens the resin 201, and adheres the sheet 210 to the substrate 200 via the resin 201. The adhering unit 60 is disposed between the cutting unit 20 and the sheet supply section 40.

[0031] The bonding unit 60 includes a resin supply table 61 that suction-holds the rectangular sheet 210 transported by the sheet transport section 50, a resin supply nozzle 62 that supplies liquid resin 201 onto the sheet 210 placed on the resin supply table 61, a substrate holding unit 64 that holds the substrate 200 facing the resin supply table 61 in the Z-axis direction and is raised and lowered by a lifting unit 63 to press the held substrate 200 against the resin 201 on the sheet 210 and coat the substrate 200 with the resin 201, and a curing means (not shown) that hardens the resin 201 on the sheet 210 that is suction-held by the resin supply table 61.

[0032] The bonding unit 60 sucks and holds the rectangular sheet 210 transported by the sheet transport section 50 onto the resin supply table 61, and holds the substrate 200 with the substrate holding unit 64. The bonding unit 60 supplies liquid resin 201 from the resin supply nozzle 62 onto the sheet 210 held by suction on the resin supply table 61, and then lowers the substrate holding unit 64, which presses the substrate 200 against the resin on the sheet 210. After the bonding unit 60 hardens the liquid resin 201 with the hardening means, the substrate holding unit 64 stops holding the substrate 200 and raises the substrate holding unit 64.

[0033] The second transport section 70 transports the substrate 200 before the sheet 210 is attached from the substrate detection section 10 to the substrate holding unit 64 of the attaching unit 60, and transports the substrate 200 with the sheet 210 attached from the resin supply table 61 to the cutting unit 20. The second transport section 70 also transports the cut end 215 of the sheet 210 to the sheet recovery unit 80. The second transport section 70 is supported on a pair of guide rails 71 that are parallel to the X-axis direction and are arranged on the bottom wall of the apparatus main body 2, and is configured to be movable in the X-axis direction by a ball screw type movement mechanism. The second transport section 70 also includes a support base 72 that is movable in the Z-axis direction, a multi-joint link mechanism 73 arranged on the support base 72, and a substrate holding section 74 that is arranged at the tip of the multi-joint link mechanism 73 and holds the substrate 200.

[0034] The sheet collection unit 80 stacks and collects cut end portions 215 of multiple rectangular sheets 210. The sheet collection unit 80 is disposed between the cassette storage section 3 and the cutting unit 20. As shown in FIGS. 4 and 5, the sheet collection unit 80 includes a placing section 81 and a guide section 82 that stands upright from the placing section 81 along the Z-axis direction.

[0035] The placement section 81 is formed in the shape of a plate on which the cut end 215 of the sheet 210 is placed on a placement surface 83, which is the upper surface. That is, the sheet recovery unit 80 has the placement surface 83 on which the cut end 215 of the sheet 210 is placed. The placement surface 83, i.e., the placement section 81, stacks the sheet 210 such that a corner region 84 corresponding to a corner 217 of the cut end 215 of the sheet 210 is positioned below the center 218 of the sheet 210 placed in a center region 85 corresponding to the center 218 of the sheet 210.

[0036] The corner region 84 of the placement surface 83 is the region where the corner 217 of the cut end 215 of the sheet 210 placed on the placement surface 83 overlaps. The central region 85 of the placement surface 83 is the region where the center 218 of the cut end 215 of the sheet 210 placed on the placement surface 83 overlaps. The center 218 of the cut end 215 of the sheet 210 refers to the periphery of the opening 216 and the inside of the opening 216, and the corner 217 refers to the corner on the outer edge side of the center 218.

[0037] In the first embodiment, the corner region 84 is formed by removing a corner 86 (shown by a dotted line in FIG. 4) of a rectangular member having the same shape as the outer edge of the cut end portion 215 of the sheet 210. That is, in the first embodiment, the corner region 84 is the space around the placement portion 81 that corresponds to the corner 217 of the cut end portion 215 of the sheet 210.

[0038] The guide portion 82 is formed in a cylindrical shape standing upright from the central region 85 of the mounting portion 81. In the first embodiment, the guide portions 82 are formed in parallel cylindrical shapes spaced apart from each other, and two guide portions 82 are provided in the first embodiment. As shown in FIG. 5 , the guide portion 82 is passed through an opening 216 in a cut end portion 215 of a sheet 210 placed on the mounting surface 83 of the mounting portion 81, and is disposed on the inner periphery of the opening 216.

[0039] In the sheet recovery unit 80 according to the first embodiment, the second conveying section 70 passes the guide section 82 through the opening 216 of the scrap 215 of the sheet 210, and the scrap 215 of the sheet 210 is guided to a predetermined position by the guide section 82 and placed on the placement surface 83 of the placement section 81. At this time, in the sheet recovery unit 80 according to the first embodiment, the corner region 84 of the placement surface 83 is formed by removing the corner 86 of a member having the same shape as the outer edge of the scrap 215 of the sheet 210. This particularly prevents the corner 217 of the sheet 210 from coming into contact with the placement surface 83, thereby suppressing static electricity that occurs when the sheets are stacked on the placement surface 83. Furthermore, in the sheet recovery unit 80 of embodiment 1, when the cut ends 215 of multiple sheets 210 are stacked on the loading surface 83, the area where the corners 217 of the stacked sheets 210 come into contact with the corners 217 of the sheets 210 already stacked on the loading surface 83 is reduced, thereby suppressing static electricity that occurs when the cut ends 215 of the sheets 210 are stacked together.

[0040] For this reason, when a scrap 215 of a sheet 210 is placed on the placement surface 83 of the sheet collection unit 80, a corner 217 of the scrap 215 of the sheet 210 hangs down due to its own weight, which prevents the scrap 215 of the sheet 210 from rising up above the placement surface 83 and also prevents the scrap 215 of the sheet 210 from rising up above the scrap 215 of the sheet 210 below. Therefore, the sheet collection unit 80 can stack multiple sheets 210 on the placement surface 83 without causing any bulging. Note that while FIG. 3 simplifies the depiction of the scrap 215 of the sheet 210 on the placement section 81 of the sheet collection unit 80 as a flat plate, the corner 217 of the scrap 215 of the sheet 210 on the placement section 81 of the sheet collection unit 80 hangs down due to the corner region 84.

[0041] The control unit 100 controls each component of the resin coating apparatus 1 to cause the resin coating apparatus 1 to perform the operation of bonding the substrate 200 to the sheet 210. The control unit 100 is a computer having an arithmetic processing device with a microprocessor such as a CPU (central processing unit), a storage device with memory such as a ROM (read only memory) or RAM (random access memory), and an input / output interface device. The arithmetic processing device of the control unit 100 performs arithmetic processing in accordance with a computer program stored in the storage device, and outputs control signals for controlling the resin coating apparatus 1 to each component of the resin coating apparatus 1 via the input / output interface device.

[0042] The control unit 100 is also connected to a display unit configured with a liquid crystal display device or the like that displays various information and images, and an input unit that an operator uses to register processing content information, etc. The input unit is configured with at least one of a touch panel provided on the display unit and an external input device such as a keyboard.

[0043] In the resin coating device 1 of embodiment 1, the control unit 100 receives processing conditions input by an operator, for example, by operating an input unit, and a cassette 4 containing a substrate 200 and a cassette 5 containing the substrate 200 after the sheet 210 has been attached are installed in the cassette storage section 3.When an instruction to start the attachment operation of attaching the sheet 210 to the substrate 200, input by the operator, for example, by operating the input unit, is received, the control unit 100 controls each component of the resin coating device 1 to start the attachment operation.

[0044] In the bonding operation, in the resin coating apparatus 1, the control unit 100 controls the first transport section 30 to take out one substrate 200 from the cassette 4 and transport it to the substrate detection section 10, and causes the substrate detection section 10 to detect the position and orientation of the substrate 200. In the bonding operation, in the resin coating apparatus 1, the control unit 100 controls the second transport section 70 based on the detection result of the substrate detection section 10 to transport the substrate 200 from the substrate detection section 10 to the substrate holding unit 64 of the bonding unit 60, and causes the substrate 200 to be held by the substrate holding unit 64.

[0045] In the bonding operation, the control unit 100 of the resin coating apparatus 1 controls the sheet supply section 40 to cut the sheet 210 unwound from the sheet roll 213 to a predetermined length, and causes the sheet conveying section 50 to convey the rectangular sheet 210 of the predetermined length to the resin supply table 61. In the bonding operation, the control unit 100 of the resin coating apparatus 1 controls the bonding unit 60 to suck and hold the rectangular sheet 210 on the resin supply table 61, and causes the resin supply nozzle 62 to supply liquid resin 201 onto the sheet 210.

[0046] In the bonding operation, the control unit 100 of the resin coating apparatus 1 controls the bonding unit 60 to lower the substrate holding unit 64, press the substrate 200 against the resin 201 on the sheet 210, and harden the resin 201 on the sheet 210 with the hardening means. In the bonding operation, the control unit 100 of the resin coating apparatus 1 controls the bonding unit 60 to stop the substrate holding unit 64 from holding the substrate 200, and raises the substrate holding unit 64 to stop the resin supply table 61 from suction-holding the substrate 200.

[0047] In the bonding operation, the control unit 100 of the resin coating apparatus 1 controls the second transport section 70 to transport the substrate 200, on which the sheet 210 has been bonded, from the resin supply table 61 to the holding table 21 of the cutting unit 20, and causes the holding table 21 to hold the substrate 200 by suction. In the bonding operation, the control unit 100 of the resin coating apparatus 1 controls the cutting unit 20 to cut the sheet 210 along the outer edge of the substrate 200 held by suction on the holding table 21, and divide the sheet 210 into a center portion 214 and a cut edge portion 215.

[0048] In the bonding operation, the control unit 100 of the resin coating apparatus 1 controls the second conveying section 70 to convey the cut end 215 of the sheet 210 to the sheet recovery unit 80. Then, the cut end 215 of the sheet 210 is passed through the guide section 82 in the opening 216 and placed on the placement surface 83. In the bonding operation, the control unit 100 of the resin coating apparatus 1 controls the cutting unit 20 to stop the suction holding of the holding table 21, and controls the first conveying section 30 to convey the substrate 200 after the sheet 210 has been bonded to it to the cassette 5 and store it in the cassette 5. The resin coating apparatus 1 bonds the sheet 210 to the substrates 200 in the cassette 4 in order, and when the sheet 210 has been bonded to all of the substrates 200 in the cassette 4, the bonding operation ends.

[0049] In the sheet recovery unit 80 of the resin coating device 1 according to the embodiment 1 described above, the corner region 84 of the loading surface 83 on which the cut end 215 of the sheet 210 is placed is formed by removing the corner 217 of a member having the same diameter as the outer edge of the cut end 215 of the sheet 210. Therefore, when the sheet 210 is placed on the loading surface 83, the corner 217 of the sheet 210 sags under its own weight.

[0050] For this reason, in the sheet recovery unit 80 of the resin coating apparatus 1 according to the first embodiment, the corners 217 of the sheets 210 hang down from the central region 85 of the mounting surface 83, and the sheets 210 are pulled downward by the corners 217, so that the sheets 210 can be stacked on the mounting surface 83 without bulging. As a result, the sheet recovery unit 80 of the resin coating apparatus 1 according to the first embodiment has the effect of being able to stack multiple sheets 210 while suppressing the bulging of the cut end portions 215 of the sheets 210.

[0051] [Variation 1] A sheet recovery unit of a resin coating apparatus according to a first modified example of the first embodiment of the present invention will be described with reference to the drawings. Fig. 6 is a perspective view showing a loading section and the like of the sheet recovery unit according to the first modified example of the first embodiment. In Fig. 6, the same parts as those in the first embodiment are designated by the same reference numerals and will not be described again.

[0052] 6, in the sheet collection unit 80-1 according to the first modified example of the first embodiment, a corner region 84-1 of the loading surface 83 is formed as an inclined surface that widens downward, that is, an inclined surface that is inclined with respect to both the horizontal and vertical directions in a direction gradually downward as it approaches the outer periphery of the loading surface 83. The corner region 84-1 of the loading surface 83 of the sheet collection unit 80-1 according to the first modified example is configured such that a corner 86 (shown by a dotted line in FIG. 6) of a rectangular member that has the same shape as the outer edge of the torn end 215 of the sheet 210 is cut out in a direction inclined with respect to both the horizontal and vertical directions in a direction gradually downward as it approaches the outer periphery of the loading surface 83.

[0053] In the sheet recovery unit 80-1 relating to variant 1 of embodiment 1, when a scrap 215 of a sheet 210 is placed on the loading surface 83 of the loading section 81, the corner region 84-1 of the loading surface 83 is formed into the aforementioned inclined surface, so that in particular, when the corner 217 of the scrap 215 of the sheet 210 is placed on the loading surface 83 or an already placed scrap 215, it is placed in order starting from the position closer to the center 218, thereby suppressing static electricity that occurs when it comes into contact with the loading surface 83 or an already placed scrap 215.

[0054] For this reason, when the cut end 215 of the sheet 210 is placed on the placement surface 83, the corners 217 of the cut end 215 of the sheet 210 hang down under their own weight, and the sheet collection unit 80-1 can prevent the cut end 215 of the sheet 210 from rising up and becoming raised above the placement surface 83. Therefore, the sheet collection unit 80-1 can stack multiple sheets 210 on the placement surface 83 without causing the cut ends 215 of the sheets 210 to bulge.

[0055] As a result, the sheet recovery unit 80-1 of the resin coating device 1 according to the first modification of the first embodiment has the effect of being able to stack multiple sheets 210 while suppressing the bulging of the cut end portions 215 of the sheets 210, similar to the first embodiment.

[0056] [Variation 2] A sheet recovery unit of a resin coating apparatus according to Modification 2 of Embodiment 1 of the present invention will be described with reference to the drawings. Fig. 7 is a perspective view showing a loading section and the like of the sheet recovery unit according to Modification 2 of Embodiment 1. In Fig. 7, the same parts as those in Embodiment 1 are designated by the same reference numerals, and their description will be omitted.

[0057] 7, in the same manner as in Modification 1, the sheet collection unit 80-2 according to Modification 2 of Embodiment 1 has a corner region 84-2 of the loading surface 83 formed as an inclined surface that widens downward, that is, an inclined surface that is inclined with respect to both the horizontal and vertical directions in a direction gradually downward as it approaches the outer periphery of the loading surface 83. The corner region 84-2 of the loading surface 83 of the sheet collection unit 80-2 according to Modification 2 is configured by bending a corner 86-2 of a rectangular plate-like member that has the same shape as the outer edge of the torn end 215 of the sheet 210 in a direction inclined with respect to both the horizontal and vertical directions in a direction gradually downward as it approaches the outer periphery of the loading surface 83.

[0058] In the sheet recovery unit 80-2 according to the second variant of the first embodiment, when the cut end 215 of the sheet 210 is placed on the loading surface 83 of the loading section 81, the corner region 84-2 of the loading surface 83 is formed into the inclined surface described above. Therefore, when the corner 217 of the cut end 215 of the sheet 210 is loaded, it is loaded in order from the position closer to the center 218, and static electricity generated when the sheet is loaded can be suppressed.

[0059] For this reason, when a sheet 210 is placed on the placement surface 83, the corners 217 of the cut end 215 of the sheet 210 hang down under their own weight, and the sheet 210 can be prevented from rising up and protruding from the placement surface 83. Therefore, the sheet collection unit 80-2 can stack multiple sheets 210 on the placement surface 83 without causing any protrusions.

[0060] As a result, the sheet recovery unit 80-2 of the resin coating device 1 according to the second modification of the first embodiment has the effect of being able to stack multiple sheets 210 while suppressing the bulging of the cut end portions 215 of the sheets 210, similar to the first embodiment.

[0061] [Variation 3] A sheet recovery unit of a resin coating apparatus according to a third modification of the first embodiment of the present invention will be described with reference to the drawings. Fig. 8 is a perspective view showing a loading section and the like of the sheet recovery unit according to the third modification of the first embodiment. In Fig. 8, the same parts as those in the first embodiment are designated by the same reference numerals and will not be described again.

[0062] 8, in the same manner as in Modification 1, the sheet collection unit 80-3 according to Modification 3 of Embodiment 1 has a corner region 84-3 of the loading surface 83 formed as an inclined surface that widens downward, that is, an inclined surface that is inclined with respect to both the horizontal and vertical directions in a direction gradually downward as it approaches the outer periphery of the loading surface 83. The corner region 84-3 of the loading surface 83 of the sheet collection unit 80-3 according to Modification 3 is configured by cutting out a corner (not shown) of a rectangular member having the same shape as the outer edge of the torn end 215 of the sheet 210 in a direction inclined with respect to both the horizontal and vertical directions in a direction gradually downward as it approaches the outer periphery of the loading surface 83.

[0063] Furthermore, a second inclined surface 87 is formed between adjacent corner regions 84-3 on the outer edge of the loading surface 83 of the sheet recovery unit 80-3 according to Modification 3. The second inclined surface 87 is inclined with respect to both the horizontal and vertical directions in a direction gradually downward as it approaches the outer periphery of the loading surface 83. The second inclined surface 87 of the loading surface 83 of the sheet recovery unit 80-3 according to Modification 3 is configured by cutting out the outer edge (not shown) of a rectangular member having the same shape as the outer edge of the torn portion 215 of the sheet 210 in a direction gradually inclined with respect to both the horizontal and vertical directions in a direction gradually downward as it approaches the outer periphery of the loading surface 83.

[0064] In the sheet recovery unit 80-3 relating to the third variant of the first embodiment, when the cut end 215 of the sheet 210 is placed on the loading surface 83 of the loading section 81, the corner region 84-3 of the loading surface 83 is formed into the inclined surface described above, and further, a second inclined surface 87 is formed. Therefore, in particular, when the outer edge portion including the corner 217 of the sheet 210 is placed, it is placed in order from the position closer to the center 218, which further suppresses static electricity generated when the sheet is placed.

[0065] For this reason, when the sheet 210 is placed on the placement surface 83, the corners 217 of the cut end 215 of the sheet 210 hang down under their own weight, and the sheet collection unit 80-3 can prevent the cut end 215 of the sheet 210 from rising up and lifting from the placement surface 83. Therefore, similar to the first embodiment, the sheet collection unit 80-3 has the effect of preventing the cut end 215 of the sheet 210 from rising up and allowing multiple sheets to be stacked.

[0066] [Variation 4] A sheet recovery unit of a resin coating apparatus according to a fourth modified example of the first embodiment of the present invention will be described with reference to the drawings. Fig. 9 is a perspective view showing a loading section and the like of the sheet recovery unit according to the fourth modified example of the first embodiment. In Fig. 9, the same parts as those in the first embodiment are designated by the same reference numerals and will not be described again.

[0067] In a sheet collection unit 80-4 according to a fourth modification of the first embodiment, a corner region 84-4 of a loading surface 83 includes a curved portion 841 and a hanging portion 842, as shown in FIG. 9. The curved portion 841 is curved gradually downward as it approaches the outer periphery of the loading surface 83. The hanging portion 842 is continuous with the curved portion 841 and hangs downward from the curved portion 841. The corner region 84-4 of the loading surface 83 of the sheet collection unit 80-4 according to the fourth modification is configured such that a corner 86-4 of a rectangular plate-like member having the same shape as the outer edge of the torn portion 215 of the sheet 210 is bent in a direction gradually curving downward as it approaches the outer periphery of the loading surface 83. In the sheet recovery unit 80-4 of variant example 4, a curved portion 841 is formed at the boundary between the flat loading surface and the corner region 84-4, so that the region positioned above the boundary of the cut end 215 does not bend sharply, but bends in a rounded, curved state.Therefore, when the sheets are removed from the sheet recovery unit 80-4 and disposed of in a trash can, the bent region positioned above the boundary easily returns to flat, which has the effect of preventing the stacked sheets from becoming bulky.

[0068] In the sheet recovery unit 80-4 relating to the fourth variant of the first embodiment, when the cut end 215 of the sheet 210 is placed on the loading surface 83 of the loading section 81, the corner region 84-4 of the loading surface 83 has the curved portion 841 and the hanging portion 842 described above. Therefore, when the corner 217 of the cut end 215 of the sheet 210 is placed, the corners come into contact starting from the position closer to the center 218, and the static electricity generated when the sheet is placed can be further suppressed.

[0069] For this reason, when the sheet 210 is placed on the placement surface 83, the corners 217 of the cut end 215 of the sheet 210 hang down under their own weight, and the sheet collection unit 80-4 can prevent the cut end 215 of the sheet 210 from rising up and lifting from the placement surface 83. Therefore, similar to the first embodiment, the sheet collection unit 80-4 has the effect of preventing the cut end 215 of the sheet 210 from rising up and allowing multiple sheets to be stacked.

[0070] The present invention is not limited to the above-described embodiments, etc. In other words, various modifications can be made without departing from the gist of the present invention. [Explanation of symbols]

[0071] 1 Resin coating device 20 Cutting Unit 61 Resin supply table 62 Resin supply nozzle 64 Substrate holding unit 70 Second conveying section (conveying unit) 80, 80-1, 80-2, 80-3, 80-4 Sheet Collection Unit 82 Guide section 83 Placement surface 84,84-1,84-2,84-3,84-4 corner area 85 Central area 86 angle 200 boards 201 Resin 210 seats 214 Central part 215 Scraps 216 Opening 217 corners 218 Central

Claims

1. A sheet collection unit that collects a plurality of rectangular sheets each having an opening at the center in a stacked manner, a placement surface on which the sheet is placed, The mounting surface is The corners of the sheets on which the corner regions corresponding to the corners of the sheets are placed are positioned below the inner edge of the opening in the center of the sheet placed on the center region corresponding to the center of the sheets, and The corner region is The sheet recovery unit is characterized in that the corners of a member having the same shape as the outer edge of the sheet are removed.

2. A guide portion is provided on the inner periphery of the opening. The sheet recovery unit according to claim 1 .

3. The sheet recovery unit includes: Resin coating equipment is installed. The resin coating device comprises: a resin supply nozzle that is placed on a resin supply table and supplies resin onto the sheet; a substrate holding unit that presses the substrate against the supplied resin to coat the substrate with the resin; a cutting unit that cuts the sheet along the outline of the resin-coated substrate to separate it into a central portion that is integral with the substrate and a cut edge portion that surrounds the central portion; 3. The sheet recovery unit according to claim 1, further comprising: a transport unit that transports the scraps to the sheet recovery unit.

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