Etched planarized VCSEL and method for fabricating same

Abstract

To provide a flattening vertical resonator type surface light emission laser (VCSEL) array.SOLUTION: A VCSEL array contains: a first material in which a separation region containing an active region and a blocking region on the active region and the blocking region define a plurality of apertures in an inner part, the plurality of apertures is arranged in a lateral direction in the blocking region, and the blocking region includes a first refraction factor and is not oxidized; and a second material that includes a plurality of conductive channel cores in the plurality of apertures of the blocking region, in which each channel core includes a second refraction factor, and is not oxidized. The first refraction factor is smaller than the second refraction factor, and a single conductive wing layer contacted to a top part of the plurality of conductive channel cores while being arranged, a bottom mirror region located under the active region and the plurality of channel cores, a top part mirror region located in the separation region and the plurality of channel cores, and a metal layer on the top part mirror region are included.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to an etched, planarized VCSEL. [Background technology]

[0002] Lasers are commonly used in many modern communications components for data transmission. One of the more popular uses is in data networks. Lasers are used in many fiber optic communication systems to transmit digital data over the network. In one exemplary configuration, a laser can be modulated with digital data to generate an optical signal containing periods of bright and dark output that represent a binary data stream. In effect, the laser outputs a high optical output representing a binary high and a lower optical output representing a binary low. To achieve a fast response time, the laser is always on but varies from a high optical output to a lower optical output.

[0003] Optical networks have various advantages over other types of networks, such as copper-wire-based networks. For example, many existing copper-wire networks operate at near-maximum data transmission rates and over near-maximum distances possible for copper-wire technology. On the other hand, many existing optical networks exceed the maximum possible for copper-wire networks in both data transmission rate and distance. That is, optical networks can reliably transmit data at higher speeds over longer distances than are possible with copper-wire networks.

[0004] One type of laser used for optical data transmission is the vertical-cavity surface-emitting laser (VCSEL). VCSELs have a laser cavity sandwiched between and defined by two mirror stacks. VCSELs are typically constructed on a semiconductor wafer, such as gallium arsenide (GaAs). VCSELs include a bottom mirror constructed on the semiconductor wafer. Typically, the bottom mirror contains several layers, with alternating high and low refractive index layers. As light passes from a layer with one refractive index to a layer with another refractive index, a portion of the light is reflected. By using a sufficient number of alternating layers, a high percentage of the light can be reflected by the mirror.

[0005] An active region containing multiple quantum wells is formed on the bottom mirror. The active region forms a PN junction sandwiched between the bottom and top mirrors, which are of opposite conductivity types (e.g., one p-type mirror and one n-type mirror). Notably, the concept of top and bottom mirrors can be somewhat arbitrary. In some configurations, light can be extracted from the wafer side of the VCSEL, in which case the "top" mirror is fully reflective and therefore opaque. However, for the purposes of this invention, the "top" mirror refers to the mirror from which light is extracted, regardless of its placement in the physical structure. When the PN junction is forward biased by current, carriers in the form of holes and electrons are injected into the quantum wells. At a sufficiently high bias current, the injected minority carriers form a population inversion in the quantum wells, which produces optical gain. Optical gain occurs when photons in the active region stimulate electrons to recombine with holes in the conduction band and reach the valence band, generating additional photons. When the optical gain exceeds the total losses in the two mirrors, lasing occurs.

[0006] The active region may also include an oxide aperture formed using one or more oxide layers formed on the top and / or bottom mirrors near the active region. The oxide aperture serves both to form the optical cavity and to direct the bias current through the central region of the formed cavity. Alternatively, other means, such as ion implantation, patterning followed by epitaxial regrowth, or other lithographic patterning, may be used to perform these functions.

[0007] A top mirror is formed over the active region. The top mirror is similar to the bottom mirror in that it generally includes several layers alternating between high and lower refractive index layers. The top mirror generally has fewer mirror periods of alternating high and low refractive index layers to enhance light emission from the top of the VCSEL.

[0008] Illustratively, a laser functions when current passes through a PN junction, injecting carriers into the active region. Recombination of the injected carriers from the conduction band to the valence band in the quantum well results in photons that begin to travel within the laser cavity defined by mirrors. The mirrors reflect the photons back and forth. When the bias current is sufficient to create a population inversion between quantum well states at the wavelength supported by the cavity, optical gain is generated in the quantum well. When the optical gain equals the cavity loss, lasing occurs, the laser is said to be at threshold bias, and the VCSEL begins to "lase" as optically coherent photons are emitted from the apex of the VCSEL.

[0009] U.S. Patent No. 5,999,623 describes a light-emitting device with a current-blocking region formed using a depleted semiconductor heterojunction interface. Using this type of heterojunction interface for blocking allows for the formation of a conductive channel by applying site-selective specific doping changes to either the blocking region or the central conductive region itself. In this approach, doping occurs via a diffusion mechanism.

[0010] Zou et al. (Non-Patent Document 1) describe a light-emitting device that uses a heterojunction current-blocking region and a centrally etched conductive channel; however, the subsequent regrowth used in this design is not planar and does not create an index-guided optical mode in the device's central channel. Instead, an anti-resonant device is formed with a larger optical mode that can leak into adjacent regions. While this may be useful for very large emitters or closely spaced arrays, the design approach is undesirable for a single high-optical-output-efficiency, high-modulation-bandwidth VCSEL.

[0011] In Kliovski et al. (2003) the current blocking region is formed by ion implantation damage, not by using a lightly doped heterojunction. An index-guided optical mode is formed via an etched mesa, as in U.S. Pat.

[0012] The subject matter claimed herein is not limited to embodiments that solve every disadvantage or that operate only in environments such as those described above. Rather, this background is provided merely to illustrate one example technology in which some embodiments described herein may be practiced. [Prior art documents] [Patent documents]

[0013] [Patent Document 1] U.S. Patent No. 8,774,246 [Non-patent literature]

[0014] [Non-Patent Document 1] Zhou and LJ Mawst, "High-Power Single-Mode Antiresonant Reflecting Optical Waveguide-Type Vertical-Cavity-Surface-Emitting Lasers," IEEE Journal of Quantum Electronics, Vol. 58, No. 12, pp. 1599-1606 (2002). [Non-patent document 2] L.M. F. Chriovsky, W.S. Hobson, R.E. Leibenguth, S.P. Hui, J. Lopata, G.J. Zydzik, G. Giaretta, K.W. Goossen, J.D. Wynn, A.V. Krishnamoorthy, B.J. Tseng, J.M. Vandenberg, and L.A. D'Asaro, "Implant-Apertured and Index-Guided Vertical-Cavity-Surface-Emitting Lasers (I2-VCSELs)," IEEE Photonics Technology Letters, Vol. 11, No. 5, pp. 500-502 (1999). Summary of the Invention [Problem to be solved by the invention]

[0015] It is an object of the present invention to provide an etched, planarized vertical cavity surface emitting laser (VCSEL). [Means for solving the problem]

[0016] In one embodiment, an etched, planarized vertical-cavity surface-emitting laser (VCSEL) includes an active region, a blocking region over the active region, the blocking region defining one or more apertures therein, and one or more conductive channel cores in the one or more apertures in the blocking region, the one or more conductive channel cores and the blocking region forming an isolation region. In one aspect, the VCSEL may include a bottom mirror region below the active region and a top mirror region above the isolation region. In one aspect, the blocking region has a thickness of 1 nm to 500 nm. In one aspect, the conductive channel core has a diameter of about 1 micron (μm) to about 10 microns (μm). In one aspect, the VCSEL includes multiple conductive channel cores within the blocking region. In one aspect, the conductive channel cores have a higher refractive index than the blocking region. In one aspect, the VCSEL lacks one or more of an oxide aperture, an oxidation, or a mesa. In one embodiment, the VCSEL may include a conductive wing layer that is integral with or in contact with the top of one or more conductive channel cores. In one embodiment, the one or more conductive channel cores are planarized. In one embodiment, the one or more conductive channel cores and the mirror layer in the top mirror region are planarized.

[0017] In one embodiment, a method for fabricating a VCSEL having a blocking region with one or more conductive channel cores within the blocking region is provided. Such a method for fabricating an embodiment of a VCSEL includes forming an active region on a substrate, forming a blocking region on the active region, etching one or more apertures in the blocking region, and forming one or more conductive channel cores in the one or more apertures in the blocking region. In one aspect, the method includes coating the top of the blocking region with an etch-blocking chemical while leaving one or more regions free of the chemical, and etching the one or more apertures in the blocking region in the one or more regions free of the chemical. In one aspect, the method can include filling the one or more apertures in the blocking region with one or more conductive channel cores by MOCVD. In one aspect, the method can include removing the etch-blocking chemical after etching to form the one or more apertures and before filling the one or more apertures with the one or more conductive channel cores. In one embodiment, the method may include forming a conductive channel core to extend through the blocking region and contact the active region or to contact a top spacer region above the active region. In one embodiment, the method may include forming multiple conductive channel cores within a common blocking region. In one embodiment, the method may include forming a conductive wing layer to be integral with or in contact with the top of one or more conductive channel cores. In one embodiment, the method may include planarizing the top surface of one or more conductive channel cores.

[0018] In one aspect, an etched, planarized vertical-cavity surface-emitting laser (VCSEL) includes an active region, a conductive region over the active region, the conductive region defining one or more apertures therein, and one or more blocking cores at the one or more apertures in the conductive region, the one or more blocking cores and the conductive region forming a separation region. Accordingly, all teachings and embodiments of a VCSEL having a blocking region with a conductive channel core can be reversed so that the conductive region has a blocking core therein. Accordingly, features described herein may be switched to provide an embodiment of a VCSEL with a conductive region having a blocking core therein.

[0019] In one embodiment, a method for fabricating a VCSEL having a conductive region with a blocking core is provided. Such a method includes forming an active region on a substrate, forming a conductive region on the active region, etching one or more apertures in the conductive region, and forming one or more blocking cores in the one or more apertures in the conductive region. Accordingly, all teachings and embodiments relating to fabricating a VCSEL having a blocking region with a conductive channel core therein can be reversed, whereby the method produces a conductive region with a blocking core therein. Accordingly, features of the method described herein can be switched to fabricate an embodiment of a VCSEL having a conductive region with a blocking core therein. [Effects of the Invention]

[0020] According to the present invention, an etched, planarized vertical cavity surface emitting laser (VCSEL) is provided. [Brief explanation of the drawings]

[0021] [Figure 1] FIG. 1 is a schematic diagram of one embodiment of a VCSEL operating environment. [Figure 2]FIG. 1 is a schematic diagram of one embodiment of a VCSEL layered semiconductor operating environment. [Figure 2A] A top view with a square cross section of the isolation region is shown. [Figure 2B] 1 shows a top view with a circular cross section of the isolation region with etching to form a mesa. [Figure 3] Schematic of initial growth showing the active region with QWs capped with an N-type DBR mirror and blocking region. [Figure 4] FIG. 10 shows openings etched into the blocking region. [Figure 5] FIG. 1 illustrates planarized regrowth to form an index guiding conductive channel. [Figure 5A] FIG. 10 illustrates planarized regrowth to form an index-guided conductive channel capped with a planar wing layer covering the blocking region. [Figure 6] FIG. 10 illustrates planarized regrowth to form an index-guided conductive channel capped with a planar wing layer overlying the blocking region and a P-type DBR mirror on the planar wing layer. [Figure 6A] FIG. 10 illustrates planarized regrowth to form an index-guided conductive channel (without the planar wing layers) and a P-type DBR mirror on top of the planar wing layers. [Figure 7] FIG. 1 illustrates multiple conductive channel cores within a common blocking layer. [Figure 7A] FIG. 1 illustrates multiple conductive channel cores with complex shapes within a common blocking layer. [Figure 8] FIG. 10 is a cross-sectional side view of an isolation region having a blocking region with multiple conductive channel cores therein. [Figure 8A] FIG. 10 is a cross-sectional side view of a separation region having a blocking region with a plurality of conductive channel cores therein and a planarizing wing layer covering the plurality of conductive channel cores and the blocking region. [Figure 9] FIG. 1 is a flow diagram of an embodiment of a method for manufacturing a VCSEL. DETAILED DESCRIPTION OF THE INVENTION

[0022] The above and below information and other features of the present disclosure will become more fully apparent from the following description and appended claims, taken in conjunction with the accompanying drawings. It should be understood that these drawings illustrate only some embodiments according to the present disclosure and therefore should not be considered limiting of its scope. The present disclosure is described with additional specificity and detail using the accompanying drawings.

[0023] In the following detailed description, reference is made to the accompanying drawings, which form a part hereof. In the drawings, like symbols generally identify like elements unless context dictates otherwise. The illustrative embodiments described in the detailed description, drawings, and claims are not meant to be limiting. Other embodiments may be utilized, and other changes may be made, without departing from the spirit or scope of the subject matter presented herein. It will be readily understood that the aspects of the present disclosure, as generally described herein and illustrated in the figures, can be arranged, substituted, combined, separated, and designed in a wide variety of different configurations, all of which are expressly contemplated herein.

[0024] Current advances in VCSEL technology generally involve a blocking region and a conductive region formed by etching a central region of the blocking region and depositing a conductive region therein. The conductive region may comprise a material that is more conductive than the material of the blocking region during VCSEL operation and light emission in the active region. Thus, the blocking region and the conductive region may form a heterojunction for selective current conduction. The conductive region may form a conductive channel through the blocking region. The conductive region may be planarized by forming a portion of the conductive region on the blocking region. A planarizing layer, such as a mirror layer, may be formed on the conductive region. VCSELs may otherwise be prepared as standard in the industry, as in the incorporated references, or as described herein.

[0025] The semiconductor device of the present invention can be fabricated from any type of semiconductor. Examples of suitable materials include III-V semiconductor materials (e.g., prepared from one or more group III materials (boron (B), aluminum (Al), gallium (Ga), indium (In), thallium (Tl), and ununtrium (Unt)) and one or more group V materials (nitrogen (N), phosphorus (P), arsenic (As), antimony (Sb), bismuth (Bi), and ununtrium (Uup) (unidentified))), and optionally some types of group IV materials.

[0026] The semiconductor device may include an active region having one or more quantum wells and one or more quantum well barriers. The quantum wells and quantum well barriers may be separated by one or more transition layers. The transition layers may also be referred to as interfacial layers because they are located at the interfaces between the quantum wells and the quantum well barriers. However, the active region may be configured as any known or developed in the VCSEL art.

[0027] Optionally, electrical confinement layers can sandwich the active region and provide optical gain efficiency by confining carriers to the active region. The confinement layers can have high-energy bandgap regions, which translate to high aluminum content in many III-V compounds (e.g., 70% to 100% Al for III-V materials). The aluminum content can be selected to give the material a relatively wide bandgap compared to the bandgap in the quantum well barriers of the active region. Wide bandgap materials can provide good carrier confinement in the confinement layers and increase efficiency in the active region. In exemplary embodiments, the high-aluminum regions can also include increased doping. The confinement layers can be doped with p-type or n-type dopants, depending on whether the confinement barrier is on the n- or p-side of the active region.

[0028] The heterojunction conductive channel configuration can provide improved fiber optic transceiver reliability, electro-optic bandwidth, and link distance by enabling the implementation of VCSEL devices with small apertures (e.g., 2-6 μm). In high-power VCSELs, the heterojunction conductive channel configuration allows for higher maximum power per VCSEL and more emitters per unit area in high-density arrays.

[0029] This heterojunction conductive channel configuration allows for more efficient mass production of guided-mode VCSELs by enabling the use of one or more MOCVD (metal-organic chemical vapor deposition) crystal growth steps in fabrication. As such, the process can omit lateral steam oxidation or the formation of any oxide apertures.

[0030] FIG. 1 shows a planar, current-guided VCSEL 100 with periodic layer pairs for the top mirror (124) and bottom mirror (116). A substrate 114 is formed on a bottom contact 112 and is doped with a first type of impurity (i.e., p-type or n-type dopant). A bottom mirror stack 116 is formed on the substrate 114, and an optional bottom confinement layer 118 is formed on the bottom mirror stack 116. An active region 122 is formed on the bottom mirror stack 116 or on the bottom confinement layer 118 (if present). An optional top confinement layer 120 is formed on the active region 122. In an optional embodiment, the bottom confinement layer 118 and the top confinement layer 120 sandwich the active region 122. An isolation region 128 is formed on the active region 112 or on the optional top confinement layer 120. The isolation region includes lateral region blocking regions 127 and a central conductive channel core 129. The bottom confinement layer 118 and / or the top confinement layer 120 can be spacer regions between the active region and the isolation region. Alternatively, the bottom confinement layer 118 and / or the top confinement layer 120 can be conductive regions. Thus, any spacer region bordering the active region can be a confinement region, a conductive region, or a non-confining, non-conducting semiconductor spacer.

[0031] A top mirror stack 124 is formed on isolation region 128. A metal layer 126 forms contacts on a portion of stack 124. However, other VCSEL configurations may also be utilized, and various other VCSEL layers or layer types may be used.

[0032] The isolation region 128 limits the area of ​​current flow 130 through the active region 122. The isolation region 128 may be formed by depositing the blocking region 127, forming an aperture therein, and then filling with the central conductive channel core 129, thereby including lateral blocking regions 127 and a central conductive channel core 129. The isolation region 128 may include a single layer of blocking region 127 or multiple blocking layers, and / or a single layer of central conductive channel core 129 or multiple central conductive channel core layers.

[0033] Mirror stacks 116 (bottom) and 124 (top) can be distributed Bragg reflector (DBR) stacks and can include periodic layers (e.g., 132 and 134, but may be switched from those shown). Periodic layers 132 and 134 are typically AlGaAs and AlAs, respectively, but can also be fabricated from other III-V semiconductor materials. Mirror stacks 116 and 124 can be doped or undoped, and can be n-type or p-type, depending on the specific VCSEL design. However, other types of VCSEL mirrors may also be used.

[0034] Metal contact layers 112 and 126 may be ohmic contacts that allow for proper electrical biasing of VCSEL 100. When VCSEL 100 is forward biased with a voltage on contact 126 that is different from the voltage on contact 112, active region 122 emits light 136, which passes through top mirror stack 124. Those skilled in the art will appreciate that other contact configurations can be used to create a voltage across active region 122 to produce light 136.

[0035] 2 shows active region 122 and confinement layers 118 and 120 below isolation region 128, which has blocking region 127 and central conductive channel core 129. Blocking region 127 forms outer current-blocking region 160, and central conductive channel core 129 forms central mode confinement region 162. Active region 122 is formed from one or more quantum wells 138 separated by quantum well barriers 140, and transition layers may be lines between quantum wells 138 and barriers 140. Confinement layers 118 and 120 may optionally include high aluminum content regions 142 and 144, respectively. The high aluminum content regions provide good carrier confinement within active region 122.

[0036] Confinement region 120 may include a ramp region 146 disposed between active region 122 and high aluminum content region 144. As described below, the combination of high aluminum content region 144 and ramp region 146 provides an injection structure with good carrier confinement and good electron injection.

[0037] Depending on the design of the VCSEL device and the thickness of the high aluminum content regions 142 and 144, the confinement regions 118 and 120, respectively, may optionally include spacer layers 148 and 150. The thickness of the spacer layers 148 and 150 may depend on the type of VCSEL device being fabricated. In vertical cavity resonant devices such as VCSELs or VCSELs, the spacer layers provide resonant spacing between the mirrors and, if desired, center the quantum wells of the active region over the peak of the optical field.

[0038] The confinement layers 118, 120 and the active region 122 may be formed from one or more types of semiconductor materials such as GaAs, AlAs, InP, AlGaAs, InGaAs, InAlAs, InGaP, AlGaAsP, AlGaInP, InGaAsP, InAlGaAs, SiGe, etc.

[0039] In one example, the lower electrical confinement layer is AlInP. In another example, the upper electrical confinement layer may be AlInGaP. Figure 2A shows a top view with a square cross section of isolation region 128. Figure 2B shows a top view with a circular cross section of isolation region 128 with etching to form mesas. A single chip can be planar, as in Figure 2A, or have multiple isolation regions 128 etched to have multiple mesas on a single chip, as in Figure 2B.

[0040] A VCSEL heterojunction conductive channel configuration can be formed to include a heterojunction current-blocking region having a conductive channel formed by etching an aperture in the blocking region and a high-index conductive channel core deposited within the etched aperture. The blocking region can have a lower refractive index perimeter. The lower refractive index of the blocking region can be compared to the higher refractive index of the conductive channel core. This enables the formation of a guided optical mode. Using a heterojunction conductive channel configuration, a VCSEL or VCSEL array can be more easily fabricated using standard MOCVD techniques and other standard manufacturing techniques currently used for high-volume VCSEL fabrication.

[0041] In one embodiment, a method for fabricating a VCSEL having a heterojunction conductive channel configuration may include forming a mirror region 116, forming an active region 122 on the mirror region 116, and forming a blocking region 127 on the active region 122, as shown in FIG. 3. The formation may be by MOCVD. In one example, the structure may include an undoped blocking layer 127 (e.g., In) that is lattice matched to GaAs and AlGaAs, as shown in FIG. 0.48 Ga 0.52 The blocking layer 127 may also include InGaP (e.g., InP). The blocking layer 127 does not undergo severe oxidation in air, which would prevent MOCVD-based re-growth. Therefore, the use of MOCVD can be beneficial for forming heterojunction conductive channel configurations.

[0042] The blocking layer 127 can be a central region that is selectively removed by wet chemical etching to transition from the structure of Figure 3 to the structure of Figure 4. After etching an aperture 410 in the blocking region (this aperture 410 is a recess having the active region 122 or top confinement region 120 as its bottom and the blocking region 127 as sidewalls extending from the bottom), the conductive channel core 129 is formed of, for example, Al 0.15 Ga 0.85 Planarizing regrowth is formed within the etched aperture 410, such as by using a material with a higher refractive index (compared to the blocking region), such as As, as shown in FIG. 5. Planarizing regrowth is performed to fill the etched aperture 410 with the conductive channel core 120, then any optional regions (e.g., conductive surfaces with wings 129a) as shown in FIG. 5A, and then to form the mirror region 124 on the etched region as shown in FIG. 6. Planarizing regrowth is performed by selecting MOCVD growth parameters to obtain a higher achievable growth rate within the aperture 410. Selective area regrowth followed by growth of a top P-doped mirror (e.g., a distributed Bragg reflector—DBR) may also be used to achieve planarization. When the bottom mirror is P-doped, the top mirror is N-doped, and the other layers of the VCSEL may be formulated accordingly.

[0043] Thus, FIG. 3 shows the initial growth of the DBR mirror 116, active region 122, and blocking region 127. FIG. 4 shows the etched aperture 410 in the blocking region 127. FIG. 5 shows the planarization regrowth to form the index-guided conductive channel core 129. FIG. 5A shows the planarization regrowth to form the index-guided conductive channel core 129 with a conductive plane with wings 129a over the conductive channel core 129. FIG. 6 shows the planarization layer of the top mirror 124. FIG. 6A shows the option where there is no conductive plane with wings 129a over the conductive channel core 129, but instead the top mirror 124 directly overlies the conductive channel core 129 and the lateral blocking region 127.

[0044] In one embodiment, the VCSEL of the present invention can be constructed to include a central conductive channel by etching away the blocking regions, filling the etched regions with conductive regions, and then having a subsequent series of planarizing layers deposited on top of the blocking and conductive regions to form an index-guided optical mode.

[0045] In one embodiment, the embodiment and process can be reversed so that a conductive layer is applied instead of the blocking layer, the conductive layer is then etched to form a cavity, and the cavity is then filled with the blocking layer to form a blocking core, however, in this embodiment the blocking core does not have a blocking surface with wings.

[0046] In one embodiment, a single substrate can contain multiple VCSEL emitters that can be formed into an array. A macro substrate with macro blocking regions can be selectively etched and refilled with conductive channel cores in some locations to form an array of VCSELs. Each conductive channel core can be an individual light-emitting device using a heterojunction current blocking region and a centrally etched conductive channel, and the entire conductive channel and blocking region can be subsequently regrowthed using a planarization layer. Figure 7 shows such a laser array of VCSEL emitters on a single substrate. Each VCSEL emitter can include a conductive channel core 129, and all VCSEL emitters are surrounded by a common blocking layer 127. Figure 7B shows the etching to result in conductive channel cores 129 with complex shapes, which can be achieved by selectively depositing a protective agent that leaves the complex shapes unprotected and then etching them into the complex etched shapes.

[0047] The inventive configuration allows for VCSELs lacking oxide apertures because the process does not use lateral oxidation, which can damage the semiconductor layers. The use of a blocking layer along with a conductive channel core allows for the use of semiconductor materials with better thermal connectivity. Thermal conductivity is better due to the aluminum arsenide layers in the top mirror, and the process does not oxidize them. The bottom mirror can use binary materials. VCSEL reliability can also be increased because the fabrication process does not involve cutting trenches near the active region and oxidizing into the semiconductor.

[0048] The reliability of VCSELs can be improved when the device operates at lower temperatures. In the current state-of-the-art, oxide-confined VCSELs heat up more due to the low thermal conductivity of the oxide layer. A trench is cut into the device to allow the oxide layer to form. Therefore, the VCSELs provided herein may lack such an oxide layer and / or trench that allows the oxide layer to form.

[0049] Most reliability issues in laser devices are related to some kind of chemical process operating at the tip of its oxide layer. Some reliability issues arise at the oxide tip due to stress caused by the oxide layer. Most reliability issues worsen at high temperatures. Oxide-confined lasers have reliability issues as a result of physical interactions with the oxide layer, where stress in the oxide layer drives defects to form in the semiconductor layer. With that in mind, it is expected that the lasers described herein, by lacking an oxide layer, should have fewer defects and less defect formation even at higher temperatures. The implanted VCSEL of the present invention can improve reliability by not having an oxide layer.

[0050] Current technology allows for very small apertures to be formed in the blocking layer to form one or more laser devices with improved reliability. Laser devices with very small apertures can now be placed very close together. For example, individual conductive channel cores can have diameters (or other cross-dimensions) of 1 micron (1 μm) to 10 microns (10 μm), 1.5 microns (1.5 μm) to 5 microns (5 μm), 2 microns (2 μm) to 4 microns (4 μm), or approximately 2.5 to 3 microns (2.5 to 3 μm). Individual conductive channel cores may be separated by distances (e.g., minimum separation distances) of 1 micron (1 μm) to 10 microns (10 μm), 1.5 microns (1.5 μm) to 5 microns (5 μm), 2 microns (2 μm) to 4 microns (4 μm), or approximately 2.5 to 3 microns (2.5 to 3 μm). This may include 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, or more lasers on a common chip, where one or more (e.g., 4 or 5) may be coupled to a common optical fiber.

[0051] Common to chemical etching, a mask may be used to define the etched and non-etched portions. A mask or other chemical blocking material can be placed on a blocking layer with apertures that define where the chemical etching will occur. In one example, MOCVD deposition is used to form the conductive channel core. In one example, the non-etched areas are defined by placing a SiO2 layer everywhere on the blocking layer except for one or more holes (circular or other shapes) that are the apertures. The SiO2 is then removed. After the SiO2 is removed, MOCVD fills the holes with a high-index material to form the conductive channel core. The conductive channel core is then flattened by adding a higher-index material to form a layer with wings. A mirror can then be formed on the insulating region.

[0052] In one embodiment, the temperature of the MOCVD process can be adjusted while filling the aperture during regrowth, resulting in more material growing in the hole, which then subsequently planarizes. The temperature of the regrowth process can determine how much planarization occurs.

[0053] In one aspect, the fabrication process omits etching or otherwise forming a mesa, so the laser device does not include a raised area in the center where the laser would be.

[0054] In one embodiment, the blocking region is InGaP, with the material being 48% I, 52% Ga, and P. This InGaP material is lattice matched to GaAs.

[0055] Selective etching can form various shaped apertures that can later be filled with shaped conductive channel cores 129, as shown in Figure 7A. FIG. 8 shows a cross-sectional side view of a semiconductor having a blocking 127 region with multiple apertures filled with conductive channel cores 129 .

[0056] FIG. 8A shows a cross-sectional side view of a semiconductor having a blocking region 127 with multiple apertures filled with conductive channel cores 129 and a single conductive wing layer 129a integrated with or disposed on top of it and in contact with some or all of the conductive channel cores 129.

[0057] 9 is a flow diagram of another process 900 of one embodiment of a method for fabricating a VCSEL described herein. The process includes growing a first mirror region having multiple first mirror layers with one or more refractive indices (block 910), and then (optionally) growing a first spacer region on the first mirror region (block 920). An active region is then grown on the first spacer region (or on the first mirror if the first spacer region is not grown) (block 930). An optional second spacer region is then grown on the active region (block 935). A blocking region is then grown on the second spacer region (or on the active region if the second spacer region is not grown) (block 940). One or more apertures are then etched in the blocking region (only the blocking region is etched, not the active region; optionally, some or all of the second blocking region may be etched) (block 945). The one or more apertures are then filled with a high refractive index material (e.g., a higher RI than the blocking layer) (block 950) to form a conductive channel core. Process 900 may also include planarizing the conductive channel core, for example by forming wings (block 960), and then growing a second mirror region having a plurality of second mirror layers having one or more refractive indices (block 970).

[0058] Alternatively, the active region or all semiconductor layers of a VCSEL can be fabricated using molecular beam epitaxy (MBE). During MBE, lower growth temperatures can be used to prepare the VCSEL semiconductor layers. Growth of these structures by MBE can be performed at temperatures below 500°C. By comparison, the temperatures for MOCVD can be above 600°C. Additionally, VCSELs can be prepared by methods similar to MBE, such as gas-source MBE (GSMBE) and metal-organic MBE (MOMBE), which can produce the regions described.

[0059] The chemical etch can be any that is useful and known in the art. In one embodiment, the orientation of the blocking and conductive regions can be swapped so that the blocking region is a core surrounded by the conductive region, where the conductive region comprises an aperture with a blocking core.

[0060] In one embodiment, the lack of trenches and oxidation can result in the conductive cores (or central blocking regions) being closer together than in conventional devices. In one example, conventional devices, due to the trenches and oxidation, may have cores (conductive or blocking) spaced approximately 21-25 microns (21-25 μm) apart. However, because current devices omit the trenches and oxidation, the cores (conductive or blocking) must be closer together, such as 4 microns (4 μm), or 2-6 microns (2-6 μm), or 1-8 microns (8 μm) apart (center-to-center).

[0061] Here, for example, high-density arrays can be achieved with a center-to-center core spacing of about four microns (4 μm). High density may allow for coherent arrays with cores having the same phase. It also allows for some control of the coherence of the beams in a phased array that can be focused to a small spot for use in scanning. Furthermore, more precise control of high-density arrays may enable laser weapons using high-density arrays than is achievable with current technology.

[0062] This technology enables coherent arrays, meaning that all cores are in phase or the phase between cores can be controlled, providing a laser beam that can be aimed at a desired location without physically rotating the laser. In one example, a fighter jet has a phased array in its nose shining on another fighter jet, allowing the phased array to be aimed anywhere. By controlling the coherence of the phased array's beam, the beam can be focused to a small spot. This control allows the invention to be used in scanning applications. This configuration can also be useful in laser weapons, as many cores can be distributed over a large area, which can control heat dissipation and allow them to be combined by controlling the phase of all of the cores, for example, through focusing, so that all the cores work together to combine their power so that when focused, a very large amount of power per unit area can be obtained.

[0063] In one embodiment, an etched, planarized vertical-cavity surface-emitting laser (VCSEL) includes an active region, a blocking region over the active region defining one or more apertures therein, and one or more conductive channel cores in the one or more apertures in the blocking region, with the one or more conductive channel cores and the blocking region forming an isolation region. In one aspect, the VCSEL can include a bottom mirror region below the active region and a top mirror region over the isolation region. In one aspect, the VCSEL can include a bottom spacer region between the bottom mirror region and the active region, and a top spacer region between the active region and the blocking region. In one aspect, the conductive channel cores extend through the blocking region and contact the active region. In one aspect, the conductive channel cores extend through the blocking region and contact the top spacer region. In one aspect, the blocking region has a thickness of 1 nm to 500 nm, 1 nm to 30 nm, 1 nm to 10 nm, or 1 nm to 3 nm. In one aspect, the conductive channel cores have the same thickness as the blocking region. In one embodiment, the conductive channel core has a diameter of about 1 micron (1 μm) to about 10 microns (10 μm). In one embodiment, the conductive channel core has a diameter of about 2 microns (2 μm) to about 6 microns (6 μm). In one embodiment, the blocking region or layer is InGaP. In one embodiment, the conductive channel core is AlGaAs. In one embodiment, the one or more conductive channel cores are planarized. In one embodiment, the one or more conductive channel cores and the top mirror are planarized.

[0064] In one embodiment, a VCSEL may include multiple conductive channel cores within a common blocking region, hi one aspect, a VCSEL may include up to five or more conductive channel cores within a common blocking region.

[0065] In one embodiment, the conductive channel core has a higher refractive index than the blocking region. In one aspect, the blocking region has a lower refractive index than the conductive channel core. In one aspect, the conductive channel core has a refractive index of about 3.7 to 3. In one aspect, the blocking region has a refractive index of about 3.7 to 3.

[0066] In one embodiment, the array of VCSELs may include a plurality of individual VCSELs described herein according to any embodiment. In one embodiment, the VCSEL can exclude certain features common to VCSELs. In one aspect, the VCSEL lacks an oxide aperture. In one aspect, the VCSEL is not oxidized. In one aspect, the VCSEL lacks a mesa.

[0067] In one embodiment, the VCSEL can include a conductive wing layer. In one aspect, the conductive wing layer is integral with the top of one or more conductive channel cores. In one aspect, the conductive wing layer is separate and in contact with the top of one or more conductive channel cores.

[0068] In one embodiment, a method for fabricating a VCSEL can include forming a VCSEL having an active region, a blocking region on the active region defining one or more apertures therein, and one or more conductive channel cores within the one or more apertures in the blocking region. In one aspect, the method can include forming the blocking region. In one aspect, the method can include forming the blocking region and etching one or more apertures in the blocking region. In one aspect, the method can include forming the blocking region, coating a top of the blocking region with a chemical that inhibits etching while leaving one or more regions free of the chemical, and etching one or more apertures in the blocking region in the one or more regions without the chemical. In one aspect, a method may include forming a blocking region, coating a top of the blocking region with a chemical that inhibits etching while leaving one or more regions free of the chemical, etching one or more apertures in the blocking region in the one or more regions without the chemical, and filling the one or more apertures in the blocking region with one or more conductive channel cores.

[0069] In one embodiment, the method can include removing the etch-blocking chemical after etching to form the aperture and before filling the aperture with one or more conductive channel cores. In one embodiment, the method can include removing the etch-blocking chemical after filling the aperture with one or more conductive channel cores.

[0070] In one embodiment, the method can include forming a bottom mirror region below the active region and forming a top mirror region over the active region, the blocking region, and the conductive channel core. In one aspect, the method can include forming a lower spacer region between the bottom mirror region and the active region and forming a top spacer region between the active region and the isolation region.

[0071] In one embodiment, the method may include forming a conductive channel core to extend through the blocking region and contact the active region. In one aspect, the method may include forming a conductive channel core to extend through the blocking region and contact the top spacer region. In one aspect, the method may include forming multiple conductive channel cores within a common blocking region. In one aspect, the method may include forming a conductive channel core having a higher refractive index than the blocking region. In one aspect, the method may include forming a blocking region having a lower refractive index than the conductive channel core.

[0072] In one embodiment, the method can include using MOCVD to form one or more conductive channel cores. In one aspect, the method can include forming one or more conductive channel cores using MOCVD and forming a conductive surface having a wing layer on the one or more conductive channel cores. In one embodiment, the method can include forming one or more conductive channel cores using MOCVD, forming a conductive surface having a wing layer on the one or more conductive channel cores, and forming a top mirror on the one or more conductive surfaces having the wing layer.

[0073] In one embodiment, various layers can be planarized. In one aspect, the method can include planarizing a top mirror. In one aspect, the method can include forming one or more conductive channel cores to be planarized. In one aspect, the method can include forming one or more conductive channel cores and a top mirror to be planarized.

[0074] In one embodiment, a method can include forming an array of VCSELs. In one embodiment, the method can include forming a conductive wing layer integral with the tops of one or more conductive channel cores. In one aspect, the method can include forming a conductive wing layer separate from and in contact with the tops of one or more conductive channel cores.

[0075] In one embodiment, an etched, planarized vertical-cavity surface-emitting laser (VCSEL) includes an active region, a conductive channel region over the active region, the conductive channel region defining one or more apertures therein, and one or more blocking cores at the one or more apertures in the conductive channel region, the one or more blocking cores and the conductive channel region forming a separation region. Therefore, the elements described herein can be applied to a VCSEL having a blocking member as a blocking core instead of a conductive member being a conductive core. Modifications according to this embodiment are included herein. Fabrication methods may be adapted so that the conductive member is a blocking member as a blocking core instead of a conductive core.

[0076] Those skilled in the art will understand that, for this and other processes and methods disclosed herein, the functions performed in the processes and methods may be performed in differing order. Furthermore, the outlined steps and operations are provided only as examples, and some of the steps and operations are optional and may be combined into fewer steps and operations or expanded into additional steps and operations without detracting from the essence of the disclosed embodiments.

[0077] The present disclosure should not be limited in terms of the specific embodiments described in this application, which are intended as illustrations of various aspects. As will be apparent to those skilled in the art, many modifications and variations can be made without departing from its spirit and scope. Functionally equivalent methods and apparatuses within the scope of the present disclosure, in addition to those enumerated herein, will be apparent to those skilled in the art from the foregoing description. Such modifications and variations are intended to be included within the scope of the appended claims. The present disclosure should be limited only by the terms of the appended claims, along with the full scope of equivalents to which such claims are entitled. It should also be understood that the terminology used herein is for the purpose of describing particular embodiments only, and is not intended to be limiting.

[0078] Those skilled in the art will understand that, in general, the terminology used herein, and particularly in the appended claims (e.g., the body of the appended claims), is generally intended to be “open” language (e.g., the term “comprising” should be interpreted as “including but not limited to,” the term “having” should be interpreted as “having at least,” the term “including” should be interpreted as “including but not limited to,” etc.). Those skilled in the art will further understand that if a specific number is intended with respect to an introduced claim recitation, such intention will be expressly recited in the claim; in the absence of such recitation, such intention is not present. For example, to aid in understanding, the appended claims below may include the use of the introductory phrases “at least one” and “one or more” to introduce claim recitations. However, the use of such language should not be construed as meaning that the introduction of a claim recitation by the indefinite article “a” or “an” will limit any particular claim that includes a claim recitation so introduced to embodiments that include only one such recitation. This is true even when the same claim uses the introductory phrase "one or more" or "at least one" with an indefinite article such as "a" or "an" (e.g., "a" and / or "an" should be interpreted to mean "at least one" or "one or more"). This also applies to the use of definite articles used to introduce claim recitations. Furthermore, even when a specific number is explicitly recited in connection with the introduction of a claim recitation, a person skilled in the art would understand that such recitation should be interpreted to mean at least the recited number (e.g., the literal recitation "two recitations" without any other modifiers means at least two recitations or two or more recitations).Furthermore, when idiomatic expressions such as "at least one of A, B, and C" or similar are used, a configuration in the sense that one of ordinary skill in the art would understand the idiomatic expression is generally intended (e.g., "a system having at least one of A, B, and C" includes, but is not limited to, systems having only A, only B, only C, both A and B, both A and C, both B and C, and / or all of A, B, and C). When idiomatic expressions such as "at least one of A, B, or C" are used, a configuration in the sense that one of ordinary skill in the art would understand the idiomatic expression is generally intended (e.g., "a system having at least one of A, B, or C" includes, but is not limited to, systems having only A, only B, only C, both A and B, both A and C, both B and C, and / or all of A, B, and C). Those skilled in the art will further understand that virtually any disjunctive word and / or phrase presenting two or more alternative terms, whether in the specification, claims, or drawings, should be understood to contemplate the possibility of including one of those terms, either of those terms, or both terms. For example, the phrase "A or B" would be understood to include the possibilities of "A" or "B" or "A and B."

[0079] Furthermore, where features or aspects of the present disclosure are described in terms of a Markush group, one skilled in the art will recognize that the disclosure is also thereby described in terms of any individual member or subgroup of members of the Markush group.

[0080] As will be understood by those skilled in the art, for any and all purposes, including providing a written description, all ranges disclosed herein encompass any and all possible subranges and combinations of those subranges. Any recited range can be readily recognized as fully describing and allowing for the same range to be divided into at least equal halves, thirds, quarters, fifths, tenths, etc. As a non-limiting example, each range discussed herein can be readily broken down into lower, middle, and upper thirds. As will be readily understood by those skilled in the art, all terms such as "up to," "at least," and the like, are inclusive of the recited number and refer to ranges that can be subsequently broken down into subranges, as described above. Finally, as will be understood by those skilled in the art, a range includes each individual number. Thus, for example, a group having 1 to 3 cells refers to groups having 1, 2, or 3 cells. Similarly, a group having 1 to 5 cells refers to groups having 1, 2, 3, 4, or 5 cells, etc.

[0081] From the foregoing, it will be understood that various embodiments of the present disclosure have been described herein for purposes of illustration, and that various modifications may be made without departing from the scope and spirit of the present disclosure. Accordingly, the various embodiments disclosed herein are not intended to be limiting, with the true scope and spirit being indicated by the appended claims.

[0082] All references cited herein are hereby incorporated by specific reference in their entirety. The technical concepts that can be understood from the above-described embodiment will be described below as supplementary notes.

[0083] [Appendix 1] 1. A planarized vertical cavity surface emitting laser (VCSEL) array, comprising: an active region; an isolation region on the active region, the isolation region including a blocking region; the blocking region defining a plurality of apertures therein, the plurality of apertures being laterally disposed within the blocking region, and the blocking region comprising a first material having a first refractive index and being free of oxidized material; a plurality of conductive channel cores in the plurality of apertures in the blocking region, each of the plurality of conductive channel cores comprising a second material having a second refractive index and being oxidized free, the first refractive index being less than the second refractive index; a single conductive wing layer disposed over the blocking region and the plurality of conductive channel cores, the single conductive wing layer being distinct from the plurality of conductive channel cores and comprising a material having a refractive index greater than the second refractive index; a bottom mirror region underlying the active region and the plurality of conductive channel cores; a top mirror region overlying the isolation region and the plurality of conductive channel cores; a top light emitting surface for the plurality of conductive channel cores; Including, The VCSEL array, wherein the plurality of conductive channel cores, the mirror layer of the top mirror region, and the light emitting surface are planarized.

[0084] [Appendix 2] 2. The VCSEL array of claim 1, wherein the blocking region has a thickness of 1 nm to 500 nm, and at least one of the conductive channel cores has a diameter of about 1 micron (μm) to about 10 microns (μm).

[0085] [Appendix 3] 2. The VCSEL array of claim 1, wherein the conductive channel cores are spaced apart from one another by about 1 micron (μm) to about 10 microns (μm).

[0086] [Appendix 4] 2. The VCSEL array of claim 1, wherein the blocking region is InGaP and the conductive channel core is AlGaAs.

[0087] [Appendix 5] 2. The VCSEL array of claim 1, wherein each conductive channel core has a center point, and the distance between each center point is about 2 microns (μm) to about 6 microns (μm).

[0088] [Appendix 6] 2. A method of fabricating a VCSEL array according to claim 1, comprising: forming the active region on a substrate; forming the blocking region over the active region; etching the plurality of apertures in the blocking region; forming the plurality of conductive channel cores in the plurality of apertures in the blocking region; forming the single conductive wing layer over the blocking region and the plurality of conductive channel cores; A method comprising:

[0089] [Appendix 7] coating the top of the blocking regions with an etch blocking chemical while leaving a plurality of regions free of the chemical; etching the plurality of apertures in the blocking region in the plurality of regions free of the chemical; 7. The method of claim 6, further comprising:

[0090] [Appendix 8] 8. The method of claim 7, further comprising filling the apertures in the blocking region with the conductive channel cores by MOCVD.

[0091] [Appendix 9] 8. The method of claim 7, further comprising removing the etch blocking chemical after the etching to form the plurality of apertures and before filling the plurality of apertures with the plurality of conductive channel cores.

[0092] [Appendix 10] 7. The method of claim 6, further comprising forming the conductive channel core to extend through the blocking region and to (i) contact the active region or (ii) contact a top spacer region overlying the active region.

[0093] [Appendix 11] 7. The method of claim 6, further comprising planarizing a top surface of the plurality of conductive channel cores.

Claims

1. 1. An etched, planarized vertical cavity surface emitting laser (VCSEL) array, comprising: an active region; an isolation region on the active region, the isolation region including a blocking region; the blocking region defining a plurality of apertures therein, the plurality of apertures being laterally disposed within the blocking region, and the blocking region comprising a first material having a first refractive index and being free of oxidized material; a plurality of conductive channel cores, each of the plurality of conductive channel cores disposed within a corresponding one of the plurality of apertures of the blocking region; each of the plurality of conductive channel cores being laterally separated from the other conductive channel cores and surrounded by the blocking region; each of the plurality of conductive channel cores comprising a second material having a second refractive index and being oxidized free, the first refractive index being less than the second refractive index; and the plurality of conductive channel cores having a lateral center-to-center spacing from an adjacent one of the plurality of conductive channel cores of 1 micron (μm) to 8 microns (μm); a flat single conductive wing layer disposed on top of and in contact with the plurality of conductive channel cores, the flat single conductive wing layer comprising the same material as the second material; a bottom mirror region underlying the active region and the plurality of conductive channel cores; a top mirror region overlying the isolation region and the plurality of conductive channel cores; a metal layer overlying the top mirror region; 1. A VCSEL array comprising:

2. 10. The VCSEL array of claim 1, wherein the blocking region has a thickness of 1 nm to 500 nm.

3. 10. The VCSEL array of claim 1, wherein each conductive channel core has a diameter of between 1 micron (μm) and 10 microns (μm).

4. 10. The VCSEL array of claim 1, wherein each conductive channel core has a diameter of between 1.5 microns (μm) and 5 microns (μm).

5. 10. The VCSEL array of claim 1, wherein each conductive channel core has a diameter of between 2 microns (μm) and 4 microns (μm).

6. 10. The VCSEL array of claim 1, wherein each conductive channel core has a diameter of between 2.5 microns (μm) and 3 microns (μm).

7. 10. The VCSEL array of claim 1, wherein the plurality of conductive channel cores have a lateral center-to-center spacing from adjacent ones of the plurality of conductive channel cores of between 2 microns (μm) and 6 microns (μm).

8. 10. The VCSEL array of claim 1, wherein the plurality of conductive channel cores have a lateral center-to-center spacing of 4 microns (μm) to adjacent ones of the plurality of conductive channel cores.

9. The VCSEL array of claim 1 , wherein the blocking regions are undoped.

10. 10. The VCSEL array of claim 9, wherein the blocking region comprises undoped InGaP.

11. 10. A method of fabricating the VCSEL array of claim 1, comprising: forming the active region on a substrate; forming the blocking region over the active region; etching the plurality of apertures in the blocking region; forming the plurality of conductive channel cores in the plurality of apertures in the blocking region; forming the single planar conductive wing layer over the blocking region and the plurality of conductive channel cores; A method comprising:

12. 12. The method of claim 11, wherein forming the blocking region over the active area comprises forming the blocking region over the active area without lateral oxidation.

13. 12. The method of claim 11, wherein forming the blocking region over the active area comprises forming the blocking region over the active area without cutting trenches adjacent the active area for oxidation.

14. The method of claim 11 further comprises: coating the top of the blocking regions with an etch blocking chemical while leaving a plurality of regions free of the chemical; etching the plurality of apertures in the blocking region in the plurality of regions free of the chemical; A method comprising:

15. 15. The method of claim 14, further comprising filling the plurality of apertures in the blocking region with the plurality of conductive channel cores by MOCVD.

16. 1. A method of fabricating an etched planarized vertical cavity surface emitting laser (VCSEL) array, the VCSEL array comprising: an active region; an isolation region on the active region, the isolation region including a blocking region; the blocking region defining a plurality of apertures therein, the plurality of apertures being laterally disposed within the blocking region, and the blocking region comprising a first material having a first refractive index and being free of oxidized material; a plurality of conductive channel cores, each of the plurality of conductive channel cores disposed within a corresponding one of the plurality of apertures of the blocking region; each of the plurality of conductive channel cores being laterally separated from the other conductive channel cores and surrounded by the blocking region; each of the plurality of conductive channel cores comprising a second material having a second refractive index and being oxidized free, the first refractive index being less than the second refractive index; and the plurality of conductive channel cores having a lateral center-to-center spacing from an adjacent one of the plurality of conductive channel cores of 1 micron (μm) to 8 microns (μm); a single conductive wing layer disposed on top of and in contact with the plurality of conductive channel cores; a bottom mirror region underlying the active region and the plurality of conductive channel cores; a top mirror region overlying the isolation region and the plurality of conductive channel cores; a metal layer overlying the top mirror region; Including, The method comprises: forming the active region on a substrate; forming the blocking region over the active region; etching the plurality of apertures in the blocking region; forming the plurality of conductive channel cores in the plurality of apertures in the blocking region; forming the single conductive wing layer over the blocking region and the plurality of conductive channel cores; Including, The etching step comprises: coating the top of the blocking regions with an etch blocking chemical while leaving a plurality of regions free of the chemical; etching the plurality of apertures in the blocking region in the plurality of regions free of the chemical; and said method further comprises: removing the etch blocking chemical after the etching to form the plurality of apertures and filling the plurality of apertures with the plurality of conductive channel cores; The method further comprises:

17. 12. The method of claim 11 , further comprising forming each of the plurality of conductive channel cores to extend through the blocking region and to either (i) contact the active region or (ii) contact a top spacer region overlying the active region.

18. The method of claim 11 , further comprising forming the plurality of conductive channel cores within the blocking region.

19. The method of claim 11 , further comprising planarizing a top surface of the plurality of conductive channel cores.

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