vacuum pump

Abstract

To provide a vacuum pump that has a high exhaust speed with respect to an intake port region despite a special requirement.SOLUTION: A vacuum pump 200, 300, in particular a turbo molecular pump, includes a rotor and an intake opening 212, 312. The rotor has a plurality of elements 124 providing pump action and a rotation axis 122. An element that provides pump action about the rotation axis rotates during operation of the vacuum pump, the rotation axis defining an axial direction. The intake opening is disposed in a housing of the vacuum pump, and the intake opening has an opening region 140 and an overlapping region 214, 314. The opening region extends on an outer side of the element providing pump action of the rotor and is adjacent to the element that provides a pump action in the axial direction. In the overlapping region, the intake opening extends over one of the elements that provide pump actions of the rotor at least partially in the axial direction.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a vacuum pump, in particular a turbomolecular pump, which comprises a rotor having a pumping element and an intake opening arranged in a housing of the vacuum pump. [Background technology]

[0002] Vacuum pumps often require a special configuration of the intake area of ​​the vacuum pump in order to integrate the vacuum pump into the vacuum installation as desired, which may impose limitations on the pumping speed of the vacuum pump.

[0003] Furthermore, in so-called differential pumping, both the main inlet of the vacuum pump and the side inlets or ports between the pump stages may be used. Such side inlets, located for example on the housing wall of the vacuum pump, may limit the pumping speed of the vacuum pump due to their limited open surface. Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE INVENTION The object of the present invention is to provide a vacuum pump which, despite special requirements, has a high pumping speed in relation to its inlet area. [Means for solving the problem]

[0005] This problem is solved by a vacuum pump having the features of claim 1. Advantageous developments of the invention are described in the dependent claims, the description and the drawings.

[0006] A vacuum pump, in particular configured as a turbomolecular pump, comprises a rotor and an inlet opening, the rotor having a plurality of pumping elements and a rotation axis about which the pumping elements rotate during operation of the vacuum pump, the rotation axis defining an axial direction, the inlet opening being arranged in a housing of the vacuum pump, the inlet opening having an open area and an overlap area, the open area extending outside the pumping elements of the rotor and axially adjacent to the pumping elements, and in the overlap area the inlet opening extends axially at least partially over one of the pumping elements of the rotor.

[0007] When the vacuum pump is configured as a turbomolecular pump, the pumping elements of the rotor may be, for example, rotor blades, and the axial direction may extend, for example, from the rough or fine vacuum side of the vacuum pump to the high vacuum or suction side of the vacuum pump.

[0008] The vacuum pump according to the invention is characterized in that the inlet opening has both an open area and an overlap area, the overlap area extending into the spatial area of ​​the pumping element, whereby the inlet opening is enlarged by the overlap area compared to conventional vacuum pumps, and the increased inlet opening compared to conventional vacuum pumps increases the pumping speed of the vacuum pump.

[0009] According to one embodiment, the inlet opening may extend axially within the overlap region over at least half the axial length of one of the rotor pumping elements. Such an extension of the inlet opening, i.e. over half the axial length of the first rotor pumping element, may therefore represent a lower limit for the extension of the inlet opening in order to achieve a practically relevant increase in the pumping speed of the vacuum pump.

[0010] Furthermore, the inlet opening may extend axially within the overlap region completely over the axial length of one of the rotor's pumping elements. Thus, the inlet opening may be extended axially over the entire rotor's first pumping element, or the first rotor blade in a turbomolecular pump. This allows for a maximum increase in pumping speed without significantly reducing the rotor's compression and without impairing the operation of the rotor or vacuum pump. Therefore, extending the inlet opening axially over the entire rotor's first pumping element sets an upper limit for the extension of the inlet opening axially. In such an embodiment, the edge of the inlet opening may be located axially near the first stator element of the vacuum pump, adjacent to the rotor's first pumping element.

[0011] In yet another alternative embodiment, the inlet opening may extend axially within the overlap region over less than the full axial length of one of the rotor's pumping elements. Such an embodiment improves the safety of the vacuum pump during operation, particularly in the event of a failure in which one of the rotor's pumping elements breaks away from the rotor, through which the inlet opening extends only partially. Since the inlet opening does not extend over the full axial length of the pumping element in this embodiment, there is a section of the vacuum pump housing through which the pumping element extends in the axial direction but the inlet opening does not. This section of the housing may form a shield for the broken pumping element, thereby at least partially preventing fragments of the pumping element from reaching the area of ​​the vacuum pump outside the inlet opening.

[0012] The axial length of the open region may be greater than the axial length of the overlap region. Furthermore, the open region of the inlet opening may have an axial length that is equal to or less than the diameter of the pumping element. If the pumping elements are configured, for example, as rotor blades of a turbomolecular pump, they may have the same diameter. Therefore, the axial length of the open region of the inlet opening may be smaller than the diameter of the pumping element or the first rotor blade, and the inlet opening extends over the pumping element or the first rotor blade in the overlap region. By limiting the axial length of the overlap region relative to the open region of the inlet opening and by limiting the axial length of the open region, the operational safety of the vacuum pump can be improved.

[0013] The intake opening may have an inner edge on the inside of the housing of the vacuum pump and an outer edge on the outside of the housing in the overlapping region. According to one embodiment, the inner edge and the outer edge may be arranged at the same height in the axial direction. Therefore, in this embodiment, the inner edge and the outer edge of the intake opening in the overlapping region may be arranged at approximately the same position in the axial direction. This simplifies the manufacture of the intake opening.

[0014] Moreover, in alternative embodiments, the inner and outer edges of the intake opening may be spaced apart in the axial direction in the overlap region, such that the overlap region has a greater axial length inside the housing than outside the housing. In other words, in the overlap region, the boundary surface of the intake opening may extend at an angle from the outer edge to the inner edge of the overlap region, in which case the inner edge may be further away from the open region than the outer edge. Such an arrangement allows the intake opening to extend into the overlap region even when the axial dimensions of, for example, the intake opening of the vacuum pump or the outer edge of the housing are set or must not be exceeded.

[0015] The outer edge of the intake opening may be located at the same axial height as the axial end of the pumping element adjacent to the open area of ​​the intake opening in the overlapping region, and the intake opening extends across the pumping element in the overlapping region. In other words, the outer edge of the intake opening may terminate approximately flush with the axial end of the pumping element in the overlapping region, while the inner edge of the intake opening is shifted axially into the region of the first pumping element in the overlapping region. In this way, the intake opening overlaps the pumping element only on the inside of the housing, and the extension of the intake opening into the overlapping region is not visible from outside the pump.

[0016] The inner edge of the intake opening may be connected to the outer edge in the overlap region via one or more surfaces that have a straight profile in axial cross section. Such surfaces with a straight profile can simplify the manufacture of the intake opening. Alternatively, the inner edge may be connected to the outer edge via one or more surfaces, at least one of which may be curved. Such a curved surface may have, for example, a predetermined diameter. The curvature of one or more surfaces between the inner and outer edges of the overlap region can optimize the extent of the overlap region.

[0017] Furthermore, the distance between the inner and outer axial edges may be greater than half the axial length of the pumping element, which in this embodiment is also one of the pumping elements through which the overlapping region of the intake opening at least partially extends. Thus, half the axial length of the pumping element may again set a lower limit for the expansion of the intake opening, which expansion is determined by the inner edge of the overlapping region, the distance of the inner edge relative to the outer edge of the overlapping region, and possibly a shift of the outer edge relative to the axial open region.

[0018] Thus, one or more surfaces between the inner and outer edges of the overlapping region may have one or more generally flat surfaces, one or more chamfers or bevels, one or more radii, or a combination thereof, which allows the expansion of the intake opening in the form of the overlapping region to be adapted to, for example, a dimensional requirement for the intake opening.

[0019] According to another embodiment, the inlet opening may be arranged laterally on the housing of the vacuum pump and extend axially parallel to the rotational axis of the rotor. In this embodiment, the gas flow through the inlet opening proceeds perpendicularly to the axial direction set by the rotational axis of the rotor. The inlet opening arranged laterally on the housing allows for special assembly situations of the vacuum pump, for example, in which the inlet opening of the vacuum pump can be arranged in a predetermined spatial region.

[0020] The vacuum pump may further have additional intake openings at the axial ends of the rotor on the low-pressure side of the rotor. Such vacuum pumps are also referred to as split-flow vacuum pumps. Split-flow pumps receive intake air flows at different locations on the housing, thereby achieving differential pumping.

[0021] The vacuum pump inlet opening may also be located at an axial end of the rotor. This axial end of the rotor may be located, for example, on the low-pressure or high-vacuum side of the rotor and vacuum pump. Alternatively or additionally, the inlet opening or another inlet opening may be located in an axial region of the housing between the axial ends of the rotor. Such an arrangement of inlet openings is also referred to as an interstage port, where the inlet opening is located between pump stages, i.e., at a predetermined position between the axial end on the low-pressure or high-vacuum side of the rotor and the opposite axial end on the high-pressure side of the rotor.

[0022] The invention will now be described on the basis of exemplary advantageous embodiments with reference to the accompanying drawings. [Brief explanation of the drawings]

[0023] [Figure 1] 1 shows a schematic cross-sectional view of a portion of a vacuum pump according to the prior art; [Figure 2] 1 shows a schematic cross-sectional view of a portion of a vacuum pump according to an embodiment of the present invention; [Figure 3] 2A and 2B show schematic cross-sectional views of a vacuum pump according to an alternative embodiment of the present invention; [Figure 4] 1 shows a schematic perspective view of a part of a vacuum pump according to the prior art; [Figure 5] 1 shows a schematic perspective view of a part of a vacuum pump according to the invention; DETAILED DESCRIPTION OF THE INVENTION

[0024] 1 shows a cross-sectional view of a portion of a vacuum pump 100 configured as a turbomolecular pump. The vacuum pump 100 comprises a housing 110 and a rotor 120, the housing 110 having an inlet opening 112 for the vacuum pump 100, the rotor 120 having an axis of rotation 122 and a plurality of pumping elements 124 configured as rotor blades of a turbomolecular pump. The vacuum pump 100 further comprises a stator 130 having pumping elements 132 in the form of stationary vanes.

[0025] The inlet opening 112 extends axially, i.e., parallel to the axis of rotation 122 of the rotor 120, which defines the axial direction, across an open area 140 free of pumping elements 124, 132. The open area 140 of the inlet opening 112 therefore extends outside the pumping elements or blades 124 of the rotor 120 and is adjacent to the axial pumping elements or blades 124, i.e., adjacent to the first one of the blades 124-1 or the pumping element 124 of the rotor 120. The first pumping element or first blade 124-1 of the rotor 120 further has an axial end or edge 125 adjacent to the open area 140 of the inlet opening 112. A corresponding edge of the intake opening 112 is aligned approximately flush with the axial end 125 of the first pumping element 124-1.

[0026] Thus, the inlet opening 112 of the prior art vacuum pump 100 terminates axially substantially flush with the edge of the first rotor blade 124-1. Thus, axially, the inlet opening 112 has an axial length or port height 142 that is set according to the circumstances and requirements when assembling the vacuum pump 100 into a vacuum installation. In the exemplary vacuum pump 100, the port height 142 or axial length is 17.75 mm.

[0027] Figure 2 shows a cross-sectional view of a portion of a vacuum pump 200 according to one embodiment of the present invention. Vacuum pump 200 similarly includes housing 110 and rotor 120 as described above in connection with Figure 1. All elements in Figure 2 that are numbered the same as those in Figure 1 are the same or similar to elements described in Figure 1 and will not be described again below.

[0028] 1, the vacuum pump 200 according to the present invention in FIG. 2 differs from the vacuum pump 100 shown in FIG. 1 in that the vacuum pump 200 has an inlet opening 212 which has an overlap region 214 beside the aforementioned open region 140, in which the inlet opening 212 extends axially over one of the pumping elements 124 of the rotor 120, namely the first rotor blade 124-1. In particular, the overlap region 214 extends completely over the axial length of the pumping region 124 of the rotor 120 or over the complete axial height of the first rotor blade 124-1, so that the axial length 216 of the overlap region 214 corresponds to the height of the first rotor blade 124-1 or the axial length of the first rotor blade 124-1.

[0029] The intake opening 212 has an inner edge 220 inside the housing 110 and an outer edge 230 outside the housing 110 in the overlap region 214. In the embodiment of FIG. 2, the inner edge 220 and the outer edge 230 are disposed at the same axial height. In other words, the inner edge 220 and the outer edge 230 are disposed in the same plane, or in the cross-sectional view of FIG. 2, on a line extending perpendicular to the rotational axis 122 of the rotor 120. This line extending across the inner edge 220 and the outer edge 230 of the overlap region 214 also extends along the aft end of the first rotor blade 124-1, which is located opposite the axial forward end 125, which is also adjacent the open region 140.

[0030] As will be described in more detail below in conjunction with Figures 4 and 5, the enlargement of the inlet opening 212 of Figure 2 based on the additional overlap area 214 compared to the inlet opening 112 of the vacuum pump 100 of Figure 1 increases the pumping speed of the vacuum pump 200. The enlargement of the inlet opening 212 results in a backflow of gas being pumped by the rotor 120 through the inlet opening 212 and being transferred out of a recipient (not shown) connected to the inlet opening 212. The backflow can cause compression losses in the rotor 120, and the pumping speed may not increase in some cases, but may decrease if the overlap area 214 extends too far across, for example, the first rotor blade 124-1. However, it has been found that when the axial length 216 of the overlap area 214 is the same as or smaller than the height or axial length of the first rotor blade 124-1, the expected backflow has little effect on the pumping speed, and acceptable compression losses occur.

[0031] Moreover, the axial length 142 of the open region 140 is greater than the axial length 216 of the overlap region 214. Furthermore, the axial length 142 of the open region 140 is less than the diameter D of the first pumping element of the rotor or the first rotor blade 124-1. In Figure 2, the radius R of the first rotor blade 124-1 is shown as half the size of the diameter D, as is known, to better illustrate the orientation. The aforementioned relationships between the axial length 142 and the axial length 216, and between the axial length 142 and the diameter D, ensure the stability and operational safety of the vacuum pump 200.

[0032] Figure 3 shows a cross-sectional view of a portion of a vacuum pump 300 according to another embodiment of the present invention. The embodiment of Figure 3 differs from the embodiment of Figure 2 in that the vacuum pump 300 includes an inlet opening 31 having an open region 140 and an overlap region 314 as previously described, but the overlap region 314, unlike the overlap region 214 of Figure 2, has a chamfer or beveled surface 315. Due to the beveled surface 315, the overlap region 314 of the inlet opening 312 has an axial length 316 that is less than the axial length 318 of the pumping element 124-1 of the rotor 120 or the height of the first rotor blade 124-1.

[0033] The ramp 315 has an inner edge 320 inside the housing 110 that is axially spaced from an outer edge 330 of the overlap region 314 outside the housing 110. The outer edge 330 is at the same axial height or location as the axial end 125 of the first pumping element or first rotor blade 124-1, which is adjacent the open region 140. The embodiment of Figure 3 allows for the expansion of the intake opening 312 by the overlap region 314, even if a predetermined dimension, such as the axial length or height 142 of the intake opening 312, is maintained outside the housing 110.

[0034] In order to achieve an effective increase in the pumping speed of the vacuum pump 200, 300 according to the present invention, the axial length 216, 316 of the overlapping region 214, 314 is selected so that this axial length 216, 316 is greater than half the axial length or height 318 of the first rotor blade 124-1. On the other hand, the axial length 216, 316 of the overlapping region 214, 314 must not be greater than the axial length or height 318 of the first rotor blade 124-1 in order not to impair the operational safety of the vacuum pump 200, 300.

[0035] In the embodiment of Figure 3, this means that the axial length of the chamfer 315, i.e., the axial distance between the inner edge 320 and the outer edge 330, is greater than half the axial length or height of the first rotor blade 124-1. As can be seen from Figure 3, the inner axial edge 320 and the outer axial edge 330 are interconnected by the chamfer or bevel 315 on the one hand and by another plane that extends perpendicular to the rotational axis 122 of the rotor 120 and thus perpendicular to the axial direction on the other hand.

[0036] Moreover, instead of the straight chamfer 315 shown in Figure 3, the overlap region 314 may be defined by a curved surface (not shown) having a predefined radius in alternative embodiments. When the inner and outer edges 320, 330 of the overlap region 314 are spaced apart as shown in Figure 3, any combination of flat and curved surfaces may further be established between the edges 320, 330 of the overlap region 314 to define the overlap region 320.

[0037] Figure 4 shows a perspective view of a portion of the vacuum pump 100 of Figure 1 according to the prior art, while Figure 5 shows a perspective view of a corresponding portion of the vacuum pump 200 of Figure 2 according to the present invention. Differently configured intake openings 112, 212 can be seen in the respective portions of the housing 110 of the vacuum pumps 100, 200. Additionally, a portion of the rotor 120 is shown, in this case the stator vane 132 between the first rotor blade 124-1 and the next rotor blade 124.

[0038] In the prior art vacuum pump 100, the intake opening 112 is axially aligned parallel to the axis of rotation 122 of the rotor 120. , suck The length 142 is such that the trailing edge 410 of the intake opening 112 is located in the region of the axial end 125 of the first rotor blade 124-1 (see also FIG. 1). In the example of FIG. 4, the axial length 412 in the region outside the intake opening 112 is 17.75 mm, which corresponds approximately to the axial length 142 of the intake opening 112 shown in FIG. 2.

[0039] The inlet opening 212 of the vacuum pump 200 is shown in a perspective view in Figure 5. In this vacuum pump 200, the inlet opening 212, unlike the inlet opening 112 of the vacuum pump of Figure 4, is enlarged in the axial direction by a length 216 of the overlap region 214 (see Figure 2), so that the overlap region 214 axially overlaps the first rotor blade 124-1 of the rotor 120. Conversely, in the vacuum pump 200 of Figure 5, the first rotor blade 124-1 of the rotor 120 protrudes axially into the area of ​​the inlet opening 212. In the embodiment of Figure 5, the axial length 216 of the overlap region 214 is approximately 6.9 mm, which results in an overall axial length 516 of approximately 24.65 mm in the area outside the enlarged inlet opening 212, as compared to Figure 4.

[0040] Using the aforementioned dimensions, a simulation calculation was performed on the pumping speed of each of the vacuum pumps 100 and 200, the respective parts of which are shown in Figure 4 or Figure 5. In the simulation calculation, nitrogen was assumed as the gas to be pumped, with a particle count of 20,000 at an ambient temperature of 20°C. Furthermore, a rotational speed of 1100 Hz was used for the rotor 120 of each of the vacuum pumps 100 and 200.

[0041] Furthermore, it was assumed that the vacuum pumps 100, 200 were configured as split-float turbomolecular pumps. This means that the vacuum pumps 100, 200 have, in addition to the respective inlet openings 112, 212, another inlet opening (not shown), which is arranged laterally in the housing 110 of the respective vacuum pumps 100, 200, similar to the inlet openings 112, 212. A protective grid (not shown) was located between the inlet openings 112, 212 and the first rotor blade 124-1, and a transmission rate of 82.6% was assumed for the protective grid. Therefore, the inlet opening 112 or 212 is arranged laterally in the region of the axial end 125 of the first rotor blade 124-1 in the housing 110 of the respective vacuum pumps 100, 200. Therefore, the inlet opening 112 or 212 may also be referred to as a Holweck vacuum port. Alternatively, the inlet opening 112 or 212 may be configured as an interstage port located between the pump stages of the vacuum pump 100 , 200 .

[0042] For vacuum pump 100 of Figure 4 with inlet opening 112, simulation calculations provided an effective pumping speed of 106 liters per second, whereas for vacuum pump 200 of Figure 5 with enlarged inlet opening 212, simulation calculations obtained an effective pumping speed of 136 liters per second. Thus, the approximately 7 mm enlargement of inlet opening 212 compared to inlet opening 112 of Figure 4 resulted in a significant increase in the effective pumping speed of vacuum pump 200 in accordance with the present invention. The present application relates to the invention described in the claims, but also includes the following as other aspects. 1. In vacuum pumps (200, 300), especially turbomolecular pumps, Rotor ( 120 ) and an intake opening (212, 312), 120) has a plurality of pumping elements (124) and a rotation axis (122) about which the pumping elements (124) rotate during operation of the vacuum pump (200, 300), and the rotation axis (122) defines an axial direction; The intake opening (212, 312) is disposed in a housing (100) of the vacuum pump (200, 300), A vacuum pump (200, 300) in which the intake opening (212, 312) has an open region (140) and an overlap region (214, 314), the open region (140) extending outside the pumping elements (124) of the rotor (120) and axially adjacent to the pumping elements (124), and in the overlap region (214, 314) the intake opening (212, 312) extends axially at least partially across one of the pumping elements (124) of the rotor (120). 2. The vacuum pump (200, 300) according to claim 1, wherein the intake opening (212, 312) extends axially within the overlapping region (214, 314) over at least half the axial length (318) of one of the pumping elements (124) of the rotor (120). The vacuum pump (200, 300) of claim 1 or 2, wherein the intake opening (212, 312) extends axially completely within the overlapping region (214, 314) over the axial length (318) of one of the pumping elements (124) of the rotor (120). 4. 4. The vacuum pump (200, 300) according to any one of 1 to 3 above, wherein the axial length (142) of the open region (140) is greater than the axial length (216, 316) of the overlap region (214, 314). 5. 5. The vacuum pump (200, 300) according to any one of claims 1 to 4, wherein the open area (140) of the intake opening (212, 312) has a length (142) that is less than or equal to the diameter (D) of the pumping element (124). 6. The intake opening (212) has an inner edge (220) on the inside of the housing (110) and an outer edge (230) on the outside of the housing (110) in the overlapping region (214), 6. The vacuum pump (200, 300) according to any one of 1 to 5 above, wherein the inner edge (220) and the outer edge (230) are disposed at the same height in the axial direction. 7. The intake opening (312) has an inner edge (320) on the inside of the housing (110) and an outer edge (330) on the outside of the housing (110) in the overlapping region (314), 6. The vacuum pump (200, 300) according to any one of 1 to 5 above, wherein the inner edge (320) and the outer edge (330) are spaced apart in the axial direction. 8. 7. The vacuum pump (200, 300) of claim 7, wherein the outer edge (330) of the intake opening (312) is located at the same axial height in the overlapping region (314) as the axial end (125) of the pumping element (124-1) adjacent to the open region (124) of the intake opening (312), and the intake opening (312) extends across the pumping element (124-1) in the overlapping region (314). 9. The vacuum pump (200, 300) of claim 7 or 8, wherein the inner edge (320) is connected to the outer edge (330) via one or more surfaces (315) having a straight axial cross section. 10. 9. The vacuum pump (200, 300) of claim 7 or 8, wherein the inner edge (320) is connected to the outer edge (330) over one or more faces, at least one of which faces is curved. 11. 11. The vacuum pump (200, 300) of any one of claims 7 to 10, wherein the distance (316) between the inner edge (320) and the outer edge (330) in the axial direction is greater than half the axial length (318) of the pumping element (124). 12. 12. The vacuum pump (200, 300) according to any one of claims 1 to 11, wherein the intake opening (212, 312) is arranged laterally in the housing (110) and extends axially parallel to the rotation axis (122) of the rotor (120). 13. 13. The vacuum pump (200, 300) of any one of 1 to 12 above, wherein the vacuum pump (200, 300) has an additional intake opening at an axial end of the rotor (120) on the low pressure side of the rotor (120). 14. 14. The vacuum pump (200, 300) according to any one of 1 to 13 above, wherein the intake opening (212, 312) is disposed at an axial end of the rotor (120). 15. 15. The vacuum pump (200, 300) according to any one of 1 to 14 above, wherein the intake opening (212, 312) is disposed between the axial ends of the rotor (120) in an axial region of the housing (110). [Explanation of symbols]

[0043] 100 Vacuum pump according to background art 110 Housing 112 Intake opening 120 rotor 122 Rotation axis 124 Rotor pumping element, rotor blade 124-1 First moving wing 125 Axial end of first rotor blade 130 Stator 132 Stator pumping element, stationary blade 140 Open area 142 Axial length of open area 200 Vacuum pump according to one embodiment of the present invention 212 Intake opening 214 overlapping area 216 Axial length of overlapping region 220 Inner edge of overlapping area 230 Outer edge of overlapping area 300 Vacuum pump according to another embodiment of the present invention 312 Intake opening 314 Overlapping Area 315 Slope 316 Axial length of overlapping region 318 Axial length or height of first rotor blade 320 Inner edge of overlapping area 330 Outer edge of overlapping area 410 Trailing edge of intake opening 412 Axial length of the outer area of ​​the intake opening 516 Overall axial length of expanded intake opening D rotor diameter R Rotor radius

Claims

1. In the vacuum pump (200, 300), a rotor (120), an intake opening (212, 312), rotor blades, and stator vanes, the rotor (120) having a plurality of pumping elements (124) and a rotation axis (122), the pumping elements (124) rotating about the rotation axis (122) during operation of the vacuum pump (200, 300), the rotation axis (122) defining an axial direction; The intake opening (212, 312) is disposed in a housing (110) of the vacuum pump (200, 300), a rotor blade having a first opening and a second opening, the first opening extending outside the first opening and axially adjacent the first opening; and a second overlapping region extending axially over at least half of an axial length of the rotor blade, the second overlapping region extending axially over at most the entire axial length of the rotor blade.

2. The vacuum pump (200, 300) of claim 1, wherein an axial length (142) of the open region (140) is greater than an axial length (216, 316) of the overlap region (214, 314).

3. 2. The vacuum pump of claim 1, wherein the open area of ​​the intake opening has an axial length that is less than or equal to a diameter of the pumping element.

4. The intake opening (212) has an inner edge (220) inside the housing (110) and an outer edge (230) outside the housing (110) in the overlapping region (214); The vacuum pump (200, 300) according to any one of claims 1 to 3, wherein the inner edge (220) and the outer edge (230) are arranged at the same height in the axial direction.

5. The intake opening (312) has an inner edge (320) inside the housing (110) and an outer edge (330) outside the housing (110) in the overlapping region (314); The vacuum pump (200, 300) of any one of claims 1 to 3, wherein the inner edge (320) and the outer edge (330) are axially spaced apart.

6. 6. The vacuum pump of claim 5, wherein the outer edge of the intake opening is positioned at the same axial height in the overlapping region as an axial end of the pumping element adjacent to the open region of the intake opening, and the intake opening extends across the pumping element in the overlapping region.

7. 6. The vacuum pump (200, 300) of claim 5, wherein the inner edge (320) is connected to the outer edge (330) via one or more surfaces (315) having a straight course in axial cross section.

8. 6. The vacuum pump (200, 300) of claim 5, wherein the inner edge (320) is connected to the outer edge (330) over one or more sides, at least one of the sides being curved.

9. 6. The vacuum pump of claim 5, wherein a distance (316) between the inner and outer axial edges (320, 330) is greater than half the axial length (318) of the pumping element (124).

10. 4. The vacuum pump (200, 300) according to claim 1, wherein the intake opening (212, 312) is arranged laterally in the housing (110) and extends axially parallel to the rotational axis (122) of the rotor (120).

11. 4. The vacuum pump (200, 300) according to claim 1, wherein the vacuum pump (200, 300) has an additional intake opening at an axial end of the rotor (120) on the low pressure side of the rotor (120).

12. The vacuum pump (200, 300) according to any one of claims 1 to 3, wherein the intake openings (212, 312) are located at axial ends of the rotor (120).

13. 4. The vacuum pump (200, 300) according to claim 1, wherein the intake opening (212, 312) is arranged between axial ends of the rotor (120) in an axial region of the housing (110).

Images