Adjusting the pedestal thermal profile using multiple heating zones and thermal voids

Abstract

The substrate support includes a body and a thermal void. The body is configured to support a substrate during processing of the substrate. The body includes plates including a top plate, a first middle plate, a second middle plate, and a bottom plate. The plates are arranged to form a stack. The first middle plate is disposed on the second middle plate. The thermal void is defined by an upper surface of the second middle plate and at least one of a lower surface of the first middle plate or a lower surface of the top plate. The thermal void is annular in shape.

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application is a PCT international application of U.S. Patent Application No. 63 / 036,650, filed June 9, 2020. The entire disclosure of the above application is incorporated herein by reference.

[0002] SUMMARY The present disclosure relates to a pedestal for supporting and heating a substrate during processing. [Background technology]

[0003] The background description provided herein is intended to present the contents of the present disclosure generally. Work by the presently named inventors within the scope of what is described in this Background section, as well as aspects of the description that may not otherwise be considered prior art at the time of filing, are not admitted, expressly or impliedly, as prior art against the present disclosure.

[0004] The substrate support (e.g., pedestal) includes a body on which a substrate can be held by a vacuum clamp. Heating elements can be disposed in the body to heat the pedestal, and therefore the substrate, during processing. Power is supplied to the heating elements through support columns of the substrate support. The body and heating elements are typically designed to provide uniform heating across the substrate. Summary of the Invention

[0005] A substrate support is provided that includes a body and a thermal void. The body is configured to support a substrate during processing of the substrate. The body includes plates including a top plate, a first middle plate, a second middle plate, and a bottom plate. The plates are arranged to form a stack. The first middle plate is disposed on the second middle plate. The thermal void is defined by an upper surface of the second middle plate and at least one of a lower surface of the first middle plate or a lower surface of the top plate. The thermal void is annular in shape.

[0006] In other features, each of the plates is coupled to one or more of the plates.

[0007] In other features, the plates are bonded together to form a unitary structure having at least a partially sealed passageway such that thermal conductivity exists between the plates.

[0008] In other features, the thermal void is defined by a lower surface of the first middle plate and an upper surface of the second middle plate.

[0009] In other features, the first intermediate plate includes a first channel including a first pair of opposing side surfaces. The lower surface of the first intermediate plate extends between the first pair of opposing side surfaces. The second intermediate plate includes a second channel including a second pair of opposing side surfaces. The upper surface of the second intermediate plate extends between the second pair of opposing side surfaces.

[0010] In other features, the thermal void is defined by a lower surface of the top plate and an upper surface of the second middle plate.

[0011] In other features, the first middle plate includes a first channel including a first pair of opposing side surfaces. The lower surface of the upper plate extends between the first pair of opposing side surfaces. The second middle plate includes a second channel including a second pair of opposing side surfaces. The upper surface of the second middle plate extends between the second pair of opposing side surfaces.

[0012] In other features, the thermal void is a first thermal void defined by a lower surface of the first middle plate and an upper surface of the second middle plate, and the body includes a second thermal void defined by a lower surface of the upper plate and an upper surface of the second middle plate.

[0013] In other features, the body includes a third thermal void, the third thermal void being annular in shape.

[0014] In other features, the thermal void is a first thermal void. The substrate support includes one or more thermal voids, including the first thermal void. Dimensions of the one or more thermal voids relative to at least some dimensions of the plate provide a temperature gradient of greater than 2° C. between the center of the body and the annular peripheral region.

[0015] In other features, the thermal void is a first thermal void. The substrate support includes one or more thermal voids, including the first thermal void. Dimensions of the one or more thermal voids relative to at least some dimensions of the plate provide a temperature gradient of 6° C. or greater between a center of the body and an annular peripheral region.

[0016] In other features, the thermal void is defined by three plates.

[0017] In other features, the thermal void is a first thermal void, and the body includes a second thermal void, the second thermal void being annular in shape and defined by two or more corresponding plates.

[0018] In other features, the plate includes a first radially extending channel and a second radially extending channel, and the thermal void transports abatement gas between the first radially extending channel and the second radially extending channel.

[0019] In other features, the body includes another thermal void, the another thermal void being annular in shape and transporting abatement gas between the second radially extending channel and at least one of the holes and abatement gas grooves in the plate.

[0020] In other features, the plate includes radially extending channels and radially extending grooves, and the thermal voids transport gas under vacuum between the radially extending channels and the radially extending grooves.

[0021] In other features, the body includes another thermal void, the another thermal void being annular in shape and transporting gas under vacuum between the radially extending channels and at least one of the holes and vacuum grooves in the plate.

[0022] In other features, the thermal void is a first thermal void. The body includes four annular-shaped thermal voids arranged in a concentric pattern. The four annular-shaped thermal voids include the first thermal void.

[0023] In other features, the plate includes two or more concentric heating coils.

[0024] In other features, the plate includes an inner heating element, a central heating element, and an outer heating element. The thermal void is a first thermal void. The body includes a second thermal void. The first thermal void is disposed over a region between the outer heating element and the central heating element. The second thermal void is disposed over a region between the central heating element and the inner heating element.

[0025] In another feature, the first thermal void and the second thermal void have different cross-sectional heights.

[0026] In other features, the first thermal void and the second thermal void have different cross-sectional widths.

[0027] In other features, the cross-sectional height of the first thermal void is defined by three plates, and the cross-sectional height of the second thermal void is defined by two plates.

[0028] In other features, a cross-sectional height of the first thermal void is greater than a cross-sectional height of the second thermal void.

[0029] In other features, the width of the second thermal void is greater than the width of the first thermal void.

[0030] In another feature, a system is provided that includes a substrate support and a control module. The substrate support includes two or more heating elements and one or more sensors. The one or more sensors are configured to generate one or more temperature signals. The control module is configured to control a supply of at least one of current or power to the two or more heating elements based on the one or more temperature signals and a relationship between at least some of the thermal voids and the plate.

[0031] In another feature, a substrate support is provided that includes a body and a thermal void. The body is configured to support a substrate during processing of the substrate. The body includes plates, including a top plate, one or more middle plates, and a bottom plate. The plates are arranged to form a stack. The thermal void is defined by two or more plates, including at least one of the one or more middle plates. The thermal void is annular in shape and concentric with the two or more plates.

[0032] In other features, each of the plates is coupled to one or more of the plates.

[0033] In other features, the plates are bonded together to form a unitary structure having at least a partially sealed passageway such that thermal conductivity exists between the plates.

[0034] In other features, the thermal void is a first thermal void, and the body includes a second thermal void, the second thermal void being concentric with the first thermal void.

[0035] In other features, the body includes a third thermal void, the third thermal void being concentric with the first thermal void and the second thermal void.

[0036] In other features, the thermal void is a first thermal void. The substrate support includes one or more thermal voids, including the first thermal void. Dimensions of the one or more thermal voids relative to at least some dimensions of the plate provide a temperature gradient of greater than 2° C. between the center of the body and the annular peripheral region.

[0037] In other features, the thermal void is a first thermal void. The substrate support includes one or more thermal voids, including the first thermal void. Dimensions of the one or more thermal voids relative to at least some dimensions of the plate provide a temperature gradient of 6° C. or greater between a center of the body and an annular peripheral region.

[0038] In other features, the thermal void is defined by three plates.

[0039] In other features, the thermal void is a first thermal void, and the body includes a second thermal void, the second thermal void being annular in shape and defined by two or more corresponding plates.

[0040] In other features, the plate includes a first radially extending channel and a second radially extending channel, and the thermal void transports abatement gas between the first radially extending channel and the second radially extending channel.

[0041] In other features, the body includes another thermal void, the another thermal void being annular in shape and transporting abatement gas between the second radially extending channel and at least one of the holes and abatement gas grooves in the plate.

[0042] In other features, the plate includes radially extending channels and radially extending grooves, and the thermal voids transport gas under vacuum between the radially extending channels and the radially extending grooves.

[0043] In other features, the body includes another thermal void, the another thermal void being annular in shape and transporting gas under vacuum between the radially extending channels and at least one of the holes and vacuum grooves in the plate.

[0044] In other features, the thermal void is a first thermal void. The body includes four annular-shaped thermal voids arranged in a concentric pattern. The four annular-shaped thermal voids include the first thermal void.

[0045] In other features, the plate includes two or more concentric heating coils.

[0046] In other features, the plate includes an inner heating element, a central heating element, and an outer heating element. The thermal void is a first thermal void. The body includes a second thermal void. The first thermal void is disposed over a region between the outer heating element and the central heating element. The second thermal void is disposed over a region between the central heating element and the inner heating element.

[0047] In another feature, the first thermal void and the second thermal void have different cross-sectional heights.

[0048] In other features, the first thermal void and the second thermal void have different cross-sectional widths.

[0049] In other features, the cross-sectional height of the first thermal void is defined by three plates, and the cross-sectional height of the second thermal void is defined by two plates.

[0050] In other features, a cross-sectional height of the first thermal void is greater than a cross-sectional height of the second thermal void.

[0051] In other features, the width of the second thermal void is greater than the width of the first thermal void.

[0052] In another feature, a system is provided that includes a substrate support and a control module. The substrate support includes two or more heating elements and one or more sensors. The one or more sensors are configured to generate one or more temperature signals. The control module is configured to control a supply of at least one of current or power to the two or more heating elements based on the one or more temperature signals and a relationship between at least some of the thermal voids and the plate.

[0053] In another feature, a substrate support is provided that includes a body and a thermal void. The body is configured to support a substrate during processing of the substrate. The body includes plate layers that include a top plate layer, one or more middle plate layers, and a bottom plate layer. The one or more middle plate layers include a first plate and a second plate. The second plate is concentric with the first plate. The plate layers are arranged to form a stack. The thermal void is at least partially defined by the first plate and the second plate. The thermal void is annular in shape.

[0054] In other features, each of the plates is bonded to one or more of the plate layers.

[0055] In other features, the plate layers are bonded together to form a unitary structure having at least partially sealed passages such that thermal conductivity exists between the plate layers.

[0056] In other features, the thermal void is further defined by a top plate layer.

[0057] In other features, the thermal void is further defined by a third plate. The one or more intermediate plate layers include the third plate.

[0058] In other features, the first plate and the second plate are disposed on and in contact with a third plate.

[0059] In other features, the thermal void is concentric with the first plate and the second plate.

[0060] In other features, the thermal void is a first thermal void. The substrate support includes one or more thermal voids, including the first thermal void. A dimension of the one or more thermal voids relative to at least some dimensions of the plate layer provides a temperature gradient of greater than 2° C. between the center of the body and the annular peripheral region.

[0061] In other features, the thermal void is a first thermal void. The substrate support includes one or more thermal voids, including the first thermal void. A dimension of the one or more thermal voids relative to at least some dimensions of the plate layer provides a temperature gradient of 6° C. or greater between a center of the body and an annular peripheral region.

[0062] In other features, the thermal void is defined by three plate layers.

[0063] In other features, the thermal void is a first thermal void, and the body includes a second thermal void, the second thermal void being annular in shape and defined by two or more corresponding plate layers.

[0064] In other features, the plate layer includes a first radially extending channel and a second radially extending channel, and the thermal void transports abatement gas between the first radially extending channel and the second radially extending channel.

[0065] In other features, the body includes another thermal void, the another thermal void being annular in shape and transporting abatement gas between the second radially extending channel and at least one of the holes and abatement gas grooves in the plate layer.

[0066] In other features, the plate layer includes radially extending channels and radially extending grooves, and the thermal voids transport gas under vacuum between the radially extending channels and the radially extending grooves.

[0067] In other features, the body includes another thermal void, the another thermal void being annular in shape and transporting gas under vacuum between the radially extending channels and at least one of the holes and vacuum grooves in the plate layer.

[0068] In other features, the thermal void is a first thermal void. The body includes four annular-shaped thermal voids arranged in a concentric pattern. The four annular-shaped thermal voids include the first thermal void.

[0069] In other features, the plate layer includes two or more concentric heating coils.

[0070] In other features, the plate layer includes an inner heating element, a central heating element, and an outer heating element. The thermal void is a first thermal void. The body includes a second thermal void. The first thermal void is disposed over a region between the outer heating element and the central heating element. The second thermal void is disposed over a region between the central heating element and the inner heating element.

[0071] In another feature, the first thermal void and the second thermal void have different cross-sectional heights.

[0072] In other features, the first thermal void and the second thermal void have different cross-sectional widths.

[0073] In other features, the cross-sectional height of the first thermal void is defined by three plate layers, and the cross-sectional height of the second thermal void is defined by two plate layers.

[0074] In other features, a cross-sectional height of the first thermal void is greater than a cross-sectional height of the second thermal void.

[0075] In other features, the width of the second thermal void is greater than the width of the first thermal void.

[0076] In another feature, a system is provided that includes a substrate support and a control module. The substrate support includes two or more heating elements and one or more sensors. The one or more sensors are configured to generate one or more temperature signals. The control module is configured to control a supply of at least one of current or power to the two or more heating elements based on the one or more temperature signals and a relationship between thermal voids and at least some of the plurality of plate layers.

[0077] Further areas of applicability of the present disclosure will become apparent from the detailed description, claims, and drawings. The detailed description and specific examples are for purposes of illustration only and are not intended to limit the scope of the present disclosure. [Brief explanation of the drawings]

[0078] The present disclosure will become more fully understood from the detailed description and the accompanying drawings, wherein:

[0079] [Figure 1] FIG. 1 is a functional block diagram of an exemplary substrate processing system including a substrate support including thermal voids, according to one example of the present disclosure.

[0080] [Figure 2] FIG. 2 is a top perspective view of the substrate support of FIG.

[0081] [Figure 3] FIG. 3 is a bottom perspective view of the substrate support of FIG.

[0082] [Figure 4] FIG. 4 is a bottom perspective view of a portion of the substrate support of FIG. 1 showing vacuum pipes, abatement gas inlet pipes, thermocouple pipes, and heating element ends according to an example of the present disclosure.

[0083] [Figure 5]FIG. 5 is a cross-sectional view of the substrate support of FIG. 1 illustrating thermal voids and exclusion zone gas paths according to an example of the present disclosure.

[0084] [Figure 6] FIG. 6 is a cross-sectional view of the substrate support of FIG. 1 showing thermal voids and portions of the exclusion zone gas and vacuum paths according to one example of the present disclosure.

[0085] [Figure 7] FIG. 7 is a cross-sectional view of the substrate support of FIG. 1 showing a portion of the vacuum path according to an example of the present disclosure.

[0086] [Figure 8A] FIG. 8A is a top perspective view of the bottom plate layer of the substrate support of FIG. 1 according to an example of the present disclosure.

[0087] [Figure 8B] FIG. 8B is a bottom perspective view of the bottom plate layer of FIG. 8A.

[0088] [Figure 9A] 9A is a top perspective view of a first middle plate layer of the substrate support of FIG. 1 according to an example of the present disclosure.

[0089] [Figure 9B] FIG. 9B is a bottom perspective view of the first middle plate layer of FIG. 9A.

[0090] [Figure 10A] FIG. 10A is a top perspective view of a second middle plate layer of the substrate support of FIG. 1 according to an example of the present disclosure.

[0091] [Figure 10B] FIG. 10B is a bottom perspective view of the second middle plate layer of FIG. 10A.

[0092] [Figure 11A]FIG. 11A is a top perspective view of the top plate layer of the substrate support of FIG. 1 according to an example of the present disclosure.

[0093] [Figure 11B] FIG. 11B is a bottom perspective view of the top plate layer of FIG. 11A.

[0094] [Figure 12] FIG. 12 shows an exemplary plot of temperature versus position along the diameter of a conventional substrate support including a single heating element.

[0095] [Figure 13] FIG. 13 illustrates an exemplary plot of temperature versus position along the diameter of the substrate support of FIG. 1 operating in edge hot mode, according to one example of the present disclosure.

[0096] [Figure 14] FIG. 14 illustrates an exemplary plot of temperature versus position along the diameter of the substrate support of FIG. 1 operating in edge cold mode, according to one example of the present disclosure.

[0097] [Figure 15] FIG. 15 shows another exemplary plot of temperature versus position along the diameter of a conventional substrate support including a single heating element.

[0098] [Figure 16] FIG. 16 illustrates another exemplary plot of temperature versus position along the diameter of the substrate support of FIG. 1 operating in hot edge mode in accordance with the present disclosure.

[0099] [Figure 17] FIG. 17 shows another exemplary plot of temperature versus position along the diameter of the substrate support of FIG. 1 operating in edge cool mode, according to one example of the present disclosure.

[0100] In the drawings, reference numbers may be reused to refer to similar and / or identical elements. DETAILED DESCRIPTION OF THE INVENTION

[0101] Certain substrate processes may exhibit excessive deposition at the outer periphery of a substrate. For example, an atomic layer deposition (ALD) process that includes repeated process operations to deposit a thin layer on a substrate may exhibit excessive deposition on the outer periphery of the substrate. The repeated process operations may include switching between (i) precursor and purge gas operations and (ii) hydrogen and purge gas operations. An ALD process may be used to fill features (e.g., vias, trenches, holes, etc.) within a substrate. The features may be, for example, three-dimensional (3D) NAND memory features. To uniformly fill the features, a thin layer must be uniformly deposited on the substrate from the center of the substrate to the outer periphery of the substrate. During an ALD process, gas dynamics, including vertical and radial flow of process gas near the periphery and capture from edge features, may result in partial chemical vapor deposition (CVD) reactions rather than ALD reactions. This may result in increased deposition at the periphery. To maintain deposition uniformity, the amount of deposition at the outer periphery can be reduced, for example, by lowering the temperature at the periphery, for example, by heating the periphery to a lesser extent than the region radially inward of the periphery.

[0102] Other substrate processes may not exhibit sufficient deposition at the outer periphery of the substrate. For example, during a CVD process, hydrogen and argon gases are used to protect the periphery of the substrate. The gases protect the periphery of the substrate from deposition and can affect bulk deposition on the substrate, reducing the amount of deposition near the periphery. This effect tends to indicate reduced deposition at the outer periphery, resulting in a reduced amount of deposition at the periphery. This effect can be compensated for by further heating the periphery. To maintain deposition uniformity, the amount of deposition at the periphery can be increased, for example, by heating the periphery more than the area radially inward of the periphery.

[0103] To better control the temperature of the entire substrate and allow the peripheral edge of the substrate to be heated differently from other areas of the substrate, the pedestal can include multiple heating elements. As an example, the pedestal can include a body (or platen) with multiple embedded heating elements used to heat respective zones of the body and, therefore, of the substrate supported by the body. The additional heating elements can be used to provide improved heating uniformity throughout the body, for example, compared to a pedestal including only a single heating element. One or more additional heating elements can be positioned and operated for edge conditioning purposes. For example, a first heating element positioned radially outward of the body can be used to provide a different amount of heat near the outer edge of the substrate compared to another heating element positioned radially inward of the first heating element.

[0104] To compensate for deposition imbalances during substrate processing, for example, a large temperature gradient may be required between the outer periphery of the substrate and the central region of the substrate, the central region being the region radially inward from the outer periphery. For example, a platen including a solid aluminum body with multiple embedded heating elements has limited ability to provide an adequate temperature gradient between the central region and the periphery.

[0105] Examples described herein include a substrate support including multiple heating elements and multiple thermal voids. The thermal voids include manifold-shaped voids (hereinafter referred to as "manifolds") defined by plates of the substrate support. The manifolds are annular open regions within the plates. Each manifold may be defined by one or more plates. The manifolds have corresponding main annular chambers with input and output channels, ports, and / or grooves. The thermal voids help increase the temperature gradient between different regions of the substrate support.

[0106] FIG. 1 illustrates a substrate processing system 100 including a substrate support 101, shown as a pedestal. The substrate support 101 may be configured the same as or similar to any of the substrate supports disclosed herein, including any of the features shown in FIGS. 2-11B. While FIG. 1 illustrates a capacitively coupled plasma (CCP) system, the embodiments disclosed herein are applicable to transformer coupled plasma (TCP) systems, inductively coupled plasma (ICP) systems, and / or other systems and plasma sources including a substrate support. The embodiments are applicable to chemical vapor deposition (CVD) processes, atomic layer deposition (ALD) processes, and / or other processes in which zone heating with large temperature gradients across the substrate support is applicable. CVD and ALD processes are mentioned by way of example only, and the embodiments disclosed herein are applicable to other processes involving large temperature gradients. In the illustrated example, the substrate support 101 includes a body 102 and a support column (or stem) 103. The body 102 includes multiple plates 102A-D, which may be formed, for example, from aluminum (Al). In one embodiment, the body 102 is a brazed aluminum platen including multiple plates. In the illustrated example, the body 102 includes plate layers 102A, 102B, 102C, and 102D. Each of the plate layers 102A, 102B, 102C, and 102D includes one or more plates. For example, in one embodiment, the plate layers 102A, 102B, and 102D include a single plate, and the plate layer 102C includes two plates, an inner plate and an outer plate. The plates of the plate layers 102A, 102B, 102C, and 102D are further shown and described with respect to FIGS. 8A-11B.

[0107] The substrate processing system 100 includes a processing chamber 104. A substrate support 101 is surrounded by the processing chamber 104. The processing chamber 104 also surrounds other components, such as an upper electrode 105, and contains an RF plasma. During operation, a substrate 107 is placed on and clamped to the substrate support 101. By way of example only, the upper electrode 105 may include a showerhead 109 for introducing and distributing gases. The showerhead 109 may include a stem portion 117 including one end connected to the top surface of the processing chamber 104. The showerhead 109 is generally cylindrical and extends radially outward from the opposite end of the stem portion 117 at a location spaced from the top surface of the processing chamber 104. The surface of the showerhead 109 facing the substrate includes holes through which process or purge gases flow. Alternatively, the upper electrode 105 may include a conductive plate, and gases may be introduced in another manner.

[0108] The substrate support 101 includes two or more heating elements (three are shown in FIG. 1 and designated 110, 111, and 112), which in the illustrated example are mounted on the bottom plate 102A. The heating elements may include concentric coils, each having multiple windings, each of which may be circular in shape. Each of the coils may be referred to as a heater. An example of a coil is shown in FIG. 8A. The heating elements receive power and heat the substrate support 101, as described further below. The substrate support further includes one or more thermal voids (two are shown in FIG. 1 and designated 113 and 114). Although not shown in FIG. 1, the substrate support 101 may include other thermal voids, as shown in FIGS. 5-7, 9A, 10A, and 11A. The thermal voids provide thermal breaks where the temperature drops, thereby increasing the temperature gradient radially across the substrate support.

[0109] Thermal voids 113, 114 are shown over the areas between heating elements 110, 111, 112. The heating elements may have different sizes, shapes, and provide corresponding heating patterns and be assigned to each heating zone of the substrate support 101. Although three heating elements and two thermal voids are shown in FIG. 1 , the substrate support may have a different number of heating elements and / or thermal voids. The thermal voids may have different sizes, shapes, and patterns. The thermal voids increase the temperature gradient between the outer periphery (or perimeter) 116 of the body 102 and the central region of the body 102.

[0110] The substrate support 101 includes channels, thermal voids, holes, and grooves for providing a vacuum between the backside of the substrate 107 and the top surface of the substrate support 101. One of the thermal voids is designated 113. Additional channels, thermal voids, holes, and grooves are also included and are used to supply abatement gas to the outer periphery of the substrate 107. One of the thermal voids used to supply abatement gas is designated 114. Examples of channels, thermal voids, holes, and grooves are shown in Figures 2-11B.

[0111] An RF generation system 120 generates and outputs an RF voltage to the upper electrode 105 and the lower electrode, which may be the body 102. One of the upper electrode 105 and the substrate support 101 may be DC grounded, AC grounded, or floating. By way of example only, the RF generation system 120 may include an RF generator 122 (e.g., a capacitively coupled plasma RF power generator) that generates an RF voltage supplied to the upper electrode 105 and / or the substrate support 101 by a matching and distribution network 124. The electrode that receives the RF signal, RF voltage, and / or RF power is referred to as an RF electrode.

[0112] The gas delivery system 130 includes one or more gas sources 132-1, 132-2, ..., and 132-N (collectively, gas sources 132), where N is an integer greater than zero. The gas sources 132 supply one or more precursors and their gas mixtures. The gas sources 132 can also supply etching gases, carrier gases, and / or purge gases. Vaporized precursors may also be used. The gas sources 132 are connected to a manifold and valve assembly 140 by valves 134-1, 134-2, ..., and 134-N (collectively, valves 134) and mass flow controllers 136-1, 136-2, ..., and 136-N (collectively, mass flow controllers 136). The output of the manifold and valve assembly 140 is supplied to the processing chamber 104. By way of example only, the output of the manifold and valve assembly 140 is supplied to a showerhead 109.

[0113] The substrate processing system 100 further includes a heating system 141 including a temperature controller 142 that can be connected to the heating elements 110. The temperature controller 142 controls a power supply 144 that supplies power to the heating elements 110. Although shown separately from the system controller 160, the temperature controller 142 may be implemented as part of the system controller 160. The substrate support 101 may include multiple temperature control zones. One or more of the zones may include a temperature sensor and a corresponding heating element. In one embodiment, a thermocouple is included in the central zone, but not in the central annular zone or the radially outermost zones. In another embodiment, a thermocouple is included in each of the three zones. The substrate support 101 may include more than one temperature control zone. An exemplary thermocouple 145 is also shown. The thermocouple 145 and / or other thermocouples incorporated into the substrate support 101 may be bayonet-type thermocouples.

[0114] The temperature controller 142 can monitor the temperature of the substrate support 101 as indicated by the temperature sensor and adjust the current, voltage, and / or power to the heating elements to adjust the temperature of the substrate support 101 to match a target temperature. The current, voltage, and / or power can be controlled based on the known size and location of thermal voids in the substrate support 101, including the size and location of the thermal voids 113, 114.

[0115] As an example, the substrate support 101 may include three heating elements 110, 111, 112, referred to as the central (or inner) heating element, the middle heating element, and the outer heating element. The heating elements 110, 111, 112 may be ring-shaped. The outer heating element 112 may surround the central heating element 111, which may surround the inner heating element 110. This provides a ring-shaped outer zone, a ring-shaped central zone, and a ring-shaped inner zone. The heating elements 110, 111, 112 may be circular in shape and / or have other geometric patterns.

[0116] In one embodiment, the temperature controller 142 monitors the temperature of a first zone (e.g., the central zone) and adjusts the current and / or power to the inner heating element 110 based on the target temperature for the first zone. The temperature controller 142 can adjust the current and / or power to other zones (e.g., the central annular zone and the radially outermost zones) based on the current and / or power to the first zone. The adjustments in current and power to the other zones may be, for example, the current and power supplied to the heating elements 111, 112. In one embodiment, the central zone and outer zones are slaved off from the central zone. The slaved values ​​(e.g., current and power) for the central zone and outer zones may be a predetermined percentage of the values ​​(e.g., current and power) of the middle zone and may be determined using an algorithm and / or formula, a lookup table, and / or other methods. The current and power values ​​for the zones may be determined based on a process recipe. The power supply 144 may be controlled by the temperature controller 142 and / or the system controller 160 .

[0117] The temperature controller 142 controls the operation, and therefore the temperature, of the heating elements, and consequently the temperature of the substrate (e.g., substrate 107). The current, voltage, and / or power provided to the heating elements 110, 111, 112 and / or other heating elements may be independently controlled and based on a temperature control algorithm. The temperature control algorithm may be executed by the temperature controller 142 to determine current, voltage, and / or power settings based on the size and location of the thermal voids to provide a target temperature gradient across the top plate 102D and, consequently, across the substrate 107. The temperature controller 142 controls the current supplied to the heating elements based on parameters detected from the aforementioned temperature sensors in the processing chamber 104 and / or temperature sensor 143. The current and / or power may be independently supplied to the heating elements. The temperature sensor 143 may include a resistive temperature device, a thermocouple, a digital temperature sensor, and / or other suitable temperature sensor. During the deposition process, the substrate 107 may be heated in the presence of a high-power plasma.

[0118] The substrate processing system 100 further includes a vacuum system 150 that includes a vacuum controller 152. Although shown separately from the temperature controller 142 and the system controller 160, the vacuum controller 152 may be implemented as part of the temperature controller 142 and / or the system controller 160. The vacuum controller 152 controls the operation of a valve 156 and a vacuum pump assembly 158. The vacuum pump assembly 158 includes one or more pumps and may be controlled to vacuum clamp the substrate 107 to the body 102 and / or evacuate the processing chamber 104. The valve 156 and the vacuum pump assembly 158 may be used to evacuate reactants from the processing chamber 104. The vacuum controller 152 and / or the system controller 160 can control the operation of a valve 159 and the vacuum pump assembly 158 to control the flow of a backside gas supplied to the backside of the substrate 107 to control the gas composition at the backside of the substrate 107 and to assist thermal conductivity between the substrate support 101 and the substrate 107.

[0119] The system controller 160 can control the components of the substrate processing system 100, including controlling the supplied RF power levels, the pressure and flow rates of supplied gases, RF matching, etc. The system controller 160 can control the states of the valves 156 and the vacuum pump assembly 158. A robot 164 can be used to deliver substrates onto and remove substrates from the substrate support 101. For example, the robot 164 can transfer substrates between the substrate support 101 and a load lock 166. The robot 164 can be controlled by the system controller 160. The system controller 160 can control the operation of the load lock 166.

[0120] Valves, gas pumps, power sources, RF generators, etc. referred to herein may be referred to as actuators. Heating elements, thermal voids, gas channels, gas grooves, etc. referred to herein may be referred to as temperature adjustment elements.

[0121] The substrate support 101 may further include a minimum overlap exclusion ring (MOER) 170. An exemplary minimum overlap exclusion zone ring is shown in U.S. Patent No. 5,882,417, filed December 31, 1996, entitled "Apparatus for Preventing Deposition on Frontside Peripheral Region and Edge of Wafer in Chemical Vapor Deposition Apparatus." An abatement gas (e.g., argon and optionally hydrogen) may be supplied to an annular open region between the MOER, the top plate 102D, and the outer peripheral edge of the substrate 107. Grooves 172 in the top plate 102D may receive the abatement gas from the manifold and valve assembly 140, for example, via the support column 103. The abatement gas is provided to prevent tungsten from depositing on the outer edge and / or backside of the substrate 107 during processing.

[0122] Although the substrate supports in Figures 1-11B are each shown as having certain features and not others, each of the substrate supports may be modified to include any of the features disclosed herein and in Figures 1-11B.

[0123] 2-3 show diagrams of a substrate support 101 including plate layers 102A, 102B, 102C, and 102D and support columns 103. Plate layers 102A, 102B, and 102D are also referred to hereinafter as "plates." Top plate 102D includes an inner circular vacuum groove 200, a first radially extending vacuum groove 202, a central circular vacuum groove 204, a second radially extending vacuum groove (some of which are designated 206), and an outer circular vacuum groove 208. Grooves 200, 202, 204, 206, and 208 are in a symmetrical, annular, and radial pattern, providing a symmetrical, annular, and radial vacuum clamping pattern. The substrate (represented by dashed circle 210) is vacuum clamped to the top plate 102D by applying a vacuum between the top plate 102D and the substrate via grooves 200, 202, 204, 206, and 208, thereby providing a vacuum clamping pattern. A first radially extending vacuum groove 202 extends from inner circular vacuum groove 200 to central circular vacuum groove 204. A second radially extending vacuum groove 206 extends from central circular vacuum groove 204 to outer circular vacuum groove 208.

[0124] Grooves 204 and 208 are closer together than grooves 200 and 204. Additionally, the number of vacuum grooves 206 extending in the second radial direction is greater than the number of vacuum grooves 202 extending in the first radial direction. Because the only leakage path into the vacuum clamping region is from the outer periphery of the substrate, the vacuum grooves 206 are shorter and more numerous. There are no leakage paths into the inner portion of the vacuum clamping pattern, which could refer to grooves 200 and 202. Therefore, there is little thermal conductivity associated with the passages in the inner portion. The passages appear as thermally non-uniform regions because they have no contact with the substrate. As a result, the number of passages (or grooves) is minimized. Furthermore, the leakage path from the outer periphery allows gas to be efficiently evacuated without creating pressure gradients below the substrate, which could also change thermal conductivity. These aforementioned groove relationships provide efficient pumping of gas within the outer annular region near the periphery of the substrate 210, pulling the outer annular region 220 of the substrate 210 toward the top plate 102D with increased force, ultimately flattening the substrate 210 for processing. This is accomplished without providing a pressure gradient below the substrate. Large diameter substrates, when placed on the top plate 102D, can have a concave (or curved) shape with a center that contacts the top plate 102D and a periphery that does not contact the top plate 102D. The vacuum groove pattern helps planarize the substrate 210 for improved processing.

[0125] The support column 103 includes channels for gas pipes and passages for heating elements. Three pipes 230, 232, and 234 are shown. The first pipe 230 can be used to provide the vacuum described above. The second pipe 232 can be used to provide the purge gas described above. The third pipe 234 can be used for a thermocouple. An exemplary thermocouple is shown in FIG. 6. The pipes are further shown in FIGS. 4-7. The input and output ends 236 of the inner heating element 110 of FIG. 1 are also shown. The heating element is further shown in FIGS. 4, 6, and 8A.

[0126] The top plate 102D further includes an outer circular abatement gas groove 172, which is used to supply abatement gas along the outer edge of the substrate 210. The substrate support 101 includes ears 240 that are used to position one or more abatement gas rings, such as the MOER 170 of Figure 1. The ears 240 have an associated heat loss that is accounted for by the protrusions in the outermost windings of the outermost heating elements shown in Figure 8A.

[0127] FIG. 4 shows a portion 400 of the substrate support 101 located within the support column 103 shown in FIGS. 1-3. The substrate support 101 includes three pipes 230, 232, and 234. The pipes 230, 232, and 234 are a vacuum pipe, an abatement gas inlet pipe, and a thermocouple pipe, respectively. The pipes 230, 232, and 234 extend from a central region 401 of the bottom plate layer 102A of FIGS. 1-3. The substrate support 101 further includes three heating elements 110, 111, and 112 of FIG. 1, each having an outer tube 402, 404, and 406 and input and output ends 236, 410, and 412. The input and output ends 236, 410, 412 include insulating tubes 420, 422, 424 and inner conductive elements 426, 428, 430, which receive power from and return power to the power supply 144 of FIG. 1 . The outer tubes 402, 404, 406 may be formed of aluminum and may include sealing portions 432, 434, 436. The outer tubes 402, 404, 406 extend from respective slots 440, 442, 444 in the central region 401. Each of the heating elements 110, 111, 112 has a single associated port (or hole) through which the input and output portions of the heating element 110, 111, 112 pass. For example, the input and output portions of the heating element 110 pass through the same slot 440 (or hole) in the bottom plate 102A, rather than two separate holes in the bottom plate 102A. This simplifies the design and minimizes the number of input and output ports while allowing the associated coils to have a more symmetrical and concentric relationship, which helps reduce and / or eliminate azimuthal non-uniformity in temperature.

[0128] 5 shows a cross section of a substrate support 101 including plate layers 102A-D. Plate layer 102C includes an outer plate 102C1 and an inner plate 102C2. Plate layers 102B-D include one or more thermal voids, which can be of various sizes, shapes, and patterns. Any number of thermal voids can be included. Each of the thermal voids is circular in shape and serves multiple purposes.

[0129] In the illustrated example, two large thermal voids 113, 114 and two small thermal voids 504, 506 are shown. Each of the thermal voids 113, 114, 504, 506 includes upper and lower surfaces, inner and outer surfaces, which are circular in shape and are defined by a corresponding one of the plates 102A-D. The thermal voids 113, 114, 504, 506 may be implemented as annular-shaped manifolds with corresponding inputs and outputs. In one embodiment, the thermal voids 113, 114, 504, 506 provide a temperature gradient of 2°C or greater. In another embodiment, the thermal voids 113, 114, 504, 506 are 2°C or greater.

[0130] The thermal voids 113, 114 are defined by multiple layers, for example, plate layers 102B-D. The inner thermal void 113 is defined by plates 102B, 102C2, and 102D. The outer thermal void 114 is defined by plates 102B, 102C1, and 102D. The thermal voids 113, 114 can have rectangular cross-sections or cross-sections of different shapes. The thermal void 113 is oriented horizontally, with the longer cross-sectional side of the thermal void 113 extending horizontally. The thermal void 114 is oriented vertically, with the longer cross-sectional side of the thermal void 114 extending vertically.

[0131] Thermal voids 114, 113 are disposed above annular regions 510, 512, respectively, of bottom plate 102A. Annular region 510 is disposed between heating elements 111, 112, and annular region 512 is between heating elements 110, 111. Thermal voids 113, 114 are configured and arranged to provide a larger thermal gradient between peripheral annular region 522 and central region 524 and of substrate support 101. Thermal voids 113, 114 can also provide a temperature gradient between central annular region 520 of substrate support 101 and annular regions 522 and 524.

[0132] The thermal voids 504, 506 are within a single plate layer, for example, plate layer 102C. The outer thermal void 504 is within outer plate 102C1, and the inner thermal void 506 is within inner plate 102C2. The thermal voids 504, 506 are defined by the two plate layers 102B and 102C. A gap exists between plates 102C1 and 102C2, which is part of the thermal void 114.

[0133] The outer thermal voids 114 and 504 can be used to supply abatement gas received via pipe 232 to abatement gas grooves 172 in Figure 2. The abatement gas path is shown and includes pipe 232, holes 528 in plates 102B and 102C2, grooves (or channels) 530, thermal voids 114, 504, holes 532 in plate 102C1, holes 534 in plate 102D, and abatement gas grooves 172. Gas flow along the abatement gas path is represented by arrows 550. While some of the arrows 550 are shown for a single radial gas flow, abatement gas flows radially outward from pipe 232 through channels 530 in multiple directions.

[0134] In the illustrated example, thermal voids 113 and 114 have specific cross-sectional dimensions. These dimensions have specific relationships to each other and to the dimensions of plates 102A-102D. These dimensions and relationships are provided by way of example and may differ from those shown. In the illustrated example, the cross-section of thermal void 113 has a height H1 and a width W1, and the cross-section of thermal void 114 has a height H2 and a width W2. Height H2 may be greater than width W2. Height H1 may be equal to width W1. Height H2 may be greater than height H1. Width W1 may be greater than width W2. Height H2 may be greater than the sum of thicknesses T1 and T2 of plates 102B and 102C. Height H1 may be greater than the thickness of one of plates 102B and 102C but less than the sum of thicknesses T1 and T2. In one embodiment, the sum of widths W1 and W2 is greater than 20% of the radius R of plates 102A-D. Radius R is measured from centerline 560 to the outer periphery of plates 102A-D. In another embodiment, the sum of widths W1 and W2 is greater than 25% of radius R. In one embodiment, width W1 is 5-15% of radius R and width W2 is 10-20% of radius R. In another embodiment, width W1 is 10% of radius R and width W2 is 15% of radius R. In another embodiment, thermal void 113 has cross-sectional dimensions H2, W2 and thermal void 114 has cross-sectional dimensions H1, W1.

[0135] The dimensions and locations of the thermal voids 113, 114, 504, and 506 are configured to provide a temperature distribution profile with a target temperature gradient across the top surface of the top plate 102D. Exemplary temperature gradients are shown in FIGS. 13-14 and 16-17. Varying the size and location of the thermal voids changes the temperature profile across the top surface of the top plate 102D. Increasing the volume of the thermal voids 113, 114, 504, and 506 can increase the temperature gradient radially across the top plate 102D. In the illustrated example, thermal void 113 has a wider and shorter height than thermal void 114, resulting in a gradual temperature drop in the corresponding region of the substrate support 101. Thermal void 114 has a taller height and narrower width than thermal void 113, resulting in a larger temperature drop in the corresponding region of the substrate support 101. These and other dimensional relationships can be provided to control the radial temperature gradient and the rate of radial temperature change relative to radial distance from the center of the substrate support 101.

[0136] Figure 6 shows another cross section of the substrate support 101, including the plate layers 102A-D, heating elements 110, 111, 112, tubes 402, 406, input and output ends 236, 412, and thermal voids 113, 114, 504, 506. Figure 6 shows a portion of the exclusion zone path represented by arrow 550. The exclusion zone path extends from thermal void 114 to thermal void 504 by radially extending channels (one of which is shown in Figure 6 and designated 600).

[0137] Figure 6 also shows a portion of the vacuum path represented by arrow 602. Figure 7 also provides an example of a vacuum path. The vacuum path begins at grooves 200, 202, 204, 206, and 208 in top plate 102D (best shown in Figures 2 and 11A) and includes holes 610, 612 in plates 102D, 102C2, and inner thermal void 506.

[0138] In the illustrated example, the substrate support 101 further includes a thermocouple 145 that extends within the pipe 234 to the center of the plate 102C2. The thermocouple 145 provides a temperature signal indicative of the temperature of the central region 622 of the plate 102C2. The temperature signal is provided to the temperature controller 142 of FIG.

[0139] Tubes 402, 406 extend vertically within support column 103 and then horizontally within bottom plate 102A to the windings of heating elements 110, 111, 112 located within bottom plate 102A and between plates 102A and 102B, such that heating elements 110, 111, 112 contact both plates 102A and 102B.

[0140] Tubes 402, 406 extend into bottom plate 102A and radially extend to corresponding coils 110, 112. Radially extending portion 624 of tube 406 is shown. In one embodiment, tubes 402, 406 and other tubes 404 (shown in FIG. 5) extend radially into winding portions and are then wound in a circular pattern to provide the coils.

[0141] During operation, the pressure within the support column 103 may be atmospheric, and the pressure outside the stem may be under vacuum. By bringing the pressure within the stem to atmospheric, the thermocouple 145 and the corresponding inner portion of the plate 102C2 are also at atmospheric pressure, which increases the thermal conductivity between the thermocouple and the plate 102C2. This helps ensure that the thermocouple 145 provides an accurate signal output. This is different from a vacuum situation, where the thermal conductivity between the thermocouple and the corresponding plate is reduced, which tends to introduce measurement errors.

[0142] Figure 7 shows another cross section of the substrate support 101, including the plate layers 102A-D, heating elements 110, 111, 112, pipe 230, and thermal voids 113, 114, 504, 506. Figure 7 shows a portion of the vacuum path represented by arrow 700. A vacuum is provided to draw gas from the thermal void 113 into the pipe 230 through radially extending grooves (or channels) 702.

[0143] The plates 102A-D are bonded together such that the plates 102A-D provide a solid, unitary body, which seals the disclosed channels, grooves, manifolds, and / or passages at least partially surrounded by the plates 102A-D and provides thermal conductivity between the plates 102A-D.

[0144] 8A and 8B show the bottom plate layer 102A of the substrate support 101. The bottom plate layer 102A includes channels 800, 802, and 804 for the windings 806, 808, and 810 of the heating elements 110, 111, and 112. Each set of corresponding windings of the same heater element is referred to as a coil. The coils provided by the windings 806, 808, and 810 are designated 820, 822, and 824. The coils 820, 822, and 824 may be circular in shape. In one embodiment, the windings 806, 808, and 810 and the coils 820, 822, and 824 are concentric. The inner coil 820 is surrounded by the central coil 822, which is surrounded by the outer coil 824.

[0145] Heating elements 110, 111, 112 include radially extending portions 812, 814, 624. Outer heating element 112 includes a protruding portion 818 that extends radially outward to provide additional heating near ears 240 in FIG. 2 to compensate for heat radiating from ears 240. This helps maintain the areas near the ears at the same temperature or within a predetermined temperature range as other areas along the perimeter of plate 102A.

[0146] Radially extending portions 812, 814, 624 provide minimal or no heating, unlike windings 806, 808, 810, which are configured to radiate heat. Radially extending portions 812, 814, 624 have a larger cross-section and lower resistance than windings 806, 808, 810, which causes radially extending portions 812, 814, 624 to not generate heat.

[0147] The portions of the conductive elements of the heating elements within the radially extending portions 812, 814, 624 may be formed of a different material than the portions of the conductive elements within the windings 806, 808, 810. By way of example, the portions of the conductive elements within the radially extending portions 812, 814, 624 may be formed of nickel (Ni), and the portions of the conductive elements within the windings 806, 808, 810 may be formed of nickel chromium (NiCr). Figure 8B shows slots 440, 442, 444 for the heating elements 110, 111, 112.

[0148] 9A and 9B show the plate layer 102B (referred to as the first middle plate layer) of the substrate support 101. The plate layer 102B includes three sections 900, 902, and 904 separated by two annular-shaped channels 910 and 912 that define the bottom portions of the thermal voids 113 and 114 of FIGS. 1 and 5-7. The outer portion 904 includes the bottom portion 920 of the ear 240 of FIG. 2. Section 900 is disk-shaped, and sections 902 and 904 are ring-shaped. Sections 900, 902, and 904 extend horizontally from a base portion 922. The annular-shaped channels 910 and 912 are defined by sections 900, 902, and 904 and the base portion 922. The annular-shaped channels 910 and 912 can be symmetrical and concentric, as shown.

[0149] 10A and 10B show plates 102C1 and 102C2 that are part of the second middle plate layer 102C of the substrate support 101. Plate 102C1 is a ring-shaped body that includes holes 532, a channel 1000 that defines a portion of the thermal void 504 of FIGS. 5-7, and a radially extending channel 600. Radially extending channel 600 extends along a bottom portion of a radially inner section 1001 of the ring-shaped body. Abatement gas passes from gap G between plates 102C1 and 102C2 through channel 600 to channel 1000 and then through hole 532.

[0150] Plate 102C2 includes a body 1002 including an outer section 1003, a central section 1004, holes 1005, channels 1006, radially extending channels 1007, channels 1008, and a central section 1010 having grooves 702. Gas is drawn by vacuum from holes 1005 through channels 1006, which define a portion of thermal void 506 in FIGS. 5-7, through channels 1007, and into channels 1008. Gas in channels 1008 can be drawn through grooves 702 into pipes 230 in FIGS. 2 and 7. The ends of pipes 230 can be located below the points where grooves 702 intersect. The vacuum path can accommodate supplying backside gas to the region between substrate support 101 and substrate 107 in FIG. 1. Channels 1008 define the upper portions of thermal voids 113 in FIGS. 1 and 5-7. Plate 102C1 may include an intermediate lug section 1020 that provides a portion of lug 240 of FIG.

[0151] The channels 600 and 1007 may be in a symmetrical radial pattern as shown. The channels 600 may be equally spaced apart from one another. The channels 1007 may also be equally spaced apart from one another. The gap G and channels 1000, 1006, 1008 may be in a symmetrical and concentric pattern as shown. The holes 532 are collectively arranged in a first circular pattern, and the holes 1005 are arranged in a second circular pattern. The holes 532 and 1005 may also be in a symmetrical and concentric pattern as shown. The groove 702 does not have to be in a symmetrical pattern to offset the pipe 230 from the center of the substrate support 101.

[0152] 11A and 11B show the top plate 102D of the substrate support 101. The top plate 102D includes (i) a main top section 1100 including grooves 172, 200, 202, 204, 206, and 208, (ii) a ring-shaped outer section 1102, and (iii) a central section 1104. The sections 1102 and 1104 extend downwardly from the main top section 1100 and define an annular-shaped channel 1110, which defines the upper portion of the thermal void 114 of FIGS. 1 and 5-7. The section 1102 includes a hole 534. The central section 1104 includes a hole 1112 and a groove 530. The holes 1112 are aligned with the holes 1005 of FIG. 10A. Gas drawn from groove 204, FIG. 11A, passes through holes 1112 and 1002. Groove 530 provides purge gas from pipe 232, FIGS. 2-5, to channel 1110. The end of pipe 232 may be below the point where groove 530 intersects. Top plate 102D may include upper ear section 1120 that provides the upper portion of ear 240, FIG. 2.

[0153] The grooves 202 can be equally spaced apart from one another. The grooves 206 can be equally spaced apart from one another. The holes 534 can be arranged in a first circular pattern. The holes 1112 can be arranged in a second circular pattern. The grooves 530 can be arranged in a symmetrical pattern providing a "pie" shaped section surface of equal size at the bottom of the central section 1104 as shown, or the grooves can be asymmetrical to offset the pipes 232 from the center of the substrate support 101.

[0154] 12 shows a plot of temperature versus position along the diameter of a conventional substrate support including a single heating element. In this example, the temperature gradient provided is approximately 2°C. In this example, the outer periphery of the substrate support 101 is cooler than the annular central section and the annular center section of the substrate support 101. The center section is cooler than the annular center section but hotter than the outer periphery.

[0155] The substrate support 101 of FIG. 1 includes multiple heating elements and thermal voids and can operate according to multiple different operating modes. In one embodiment, the substrate support 101 operates in an edge-hot mode or an edge-cool mode. While operating in the edge-hot mode, the outer periphery of the substrate support is hotter than the central section of the substrate support. FIG. 13 shows a plot of temperature versus position along the diameter of the substrate support 101 while operating in the edge-hot mode. As shown, the temperature gradient between the periphery and the center of the substrate support 101 is approximately 6° C. FIG. 14 shows a plot of temperature versus position along the diameter of the substrate support 101 while operating in the edge-cool mode. As shown, the temperature gradient between the periphery and the center of the substrate support is approximately 6° C.

[0156] 15 shows another plot of temperature versus position along the diameter of a conventional substrate support including a single heating element. In this example, the temperature gradient provided is approximately 2°C. In this example, the outer periphery of the substrate support 101 is cooler than the annular central section and the annular center section of the substrate support 101. The center section is cooler than the annular center section but hotter than the outer periphery.

[0157] Figure 16 shows a plot of temperature versus position along the diameter of the substrate support 101 while operating in edge-hot mode. As shown, the temperature gradient between the periphery and center of the substrate support 101 is approximately 6°C. Figure 17 shows a plot of temperature versus position along the diameter of the substrate support 101 while operating in edge-cool mode. As shown, the temperature gradient between the periphery and center of the substrate support is approximately 6°C.

[0158] The above example allows for tailoring of the temperature profiles shown in FIGS. 13-14 and 16-17. This involves controlling the rate of temperature increase and / or decrease in the radial direction from the center to the outer edge of the substrate support. This example allows for precise radial temperature gradients and uniform azimuthal temperatures across the substrate support. This allows for precise temperature profile adjustment, applicable to ALD processes where features (e.g., holes, vias, etc.) must be uniformly filled from the center to the outer edge across the substrate. By varying the temperature and altering the deposition rate, the outer edge can be made thicker or thinner relative to the center. This can be done to accommodate a subsequent chemical mechanical polishing (CMP) process.

[0159] The above example provides center-to-edge (radial) deposition profile adjustment by controlling the annular and radial temperature profiles of the top plate of the substrate support, and consequently the annular and radial temperature profiles of the substrate. This example provides a large positive or negative temperature gradient between the center and the outer edge. The gradient allows for compensation of other edge effects during processing, such as gas flow, diffusion, and showerhead temperature, which can affect the substrate deposition profile. This example includes an outer thermal void (or outer thermal shield) and abatement gas manifold, as well as an inner thermal void (or inner thermal shield) vacuum clamp manifold. This example provides a radial temperature gradient while providing azimuthal temperature uniformity. The radial temperature gradient can be azimuthally uniform.

[0160] The provided example allows for a smaller temperature change per radial distance across the top plate of the substrate support near the center of the top plate and a larger temperature change near the outer edge of the top plate. By providing a thermal void and using the thermal void as a gas distribution manifold for edge abatement gas and vacuum clamping, a thermal profile with improved gas flow uniformity for both abatement gas and vacuum clamping is provided. Using an inner thermal void as a vacuum clamp manifold allows for a vacuum clamp port that provides greater clamping force at the initial moment of clamping, for example, to flatten a curved substrate. The provided example includes a substrate support with plates and thermal voids formed of the same material, rather than including plates with regions of different materials that have different thermal expansion and contraction rates and can cause cracks.

[0161] The provided examples provide additional parameters (e.g., number, size, shape, placement of thermal voids) that can be set to provide a target temperature profile. The inclusion of thermal voids allows other parameters to remain unchanged and / or be changed in a different manner. For example, the amount of hydrogen provided to the outer periphery of the substrate can be maintained or decreased, rather than increased as would be the case when using a conventional substrate support. Increasing the amount of hydrogen can increase the deposition rate, but adversely affect the properties of the deposited film. The inclusion of thermal voids can provide a target temperature at the outer periphery that prevents the amount of hydrogen from increasing.

[0162] The foregoing description is merely exemplary in nature and is not intended to limit the disclosure, its application, or uses in any way. The broad teachings of the present disclosure can be embodied in a variety of forms. Accordingly, while the present disclosure includes specific examples, the true scope of the disclosure should not be limited to such examples, as other modifications will become apparent upon review of the drawings, the specification, and the following claims. It should be understood that one or more steps in a method may be performed in a different order (or simultaneously) without altering the principles of the disclosure. Furthermore, although each embodiment is described above as having specific features, any one or more of these features described with respect to any embodiment of the present disclosure may be implemented in other embodiments and / or combined with any features of the other embodiments (even if such combination is not explicitly described). In other words, the described embodiments are not mutually exclusive, and substituting one or more embodiments for one another is within the scope of the present disclosure.

[0163] Terms such as "first," "second," and "third" may be used herein to describe various plates, layers, thermal voids, heating elements, conductive elements, channels, grooves, and / or other elements; however, these plates, layers, thermal voids, heating elements, conductive elements, channels, grooves, and / or other elements should not be limited by these terms unless otherwise specified. These terms may be used only to distinguish one plate, layer, thermal void heating element, conductive element, channel, groove, and / or element from another plate, layer, thermal void heating element, conductive element, channel, groove, and / or element. Terms such as "first," "second," and other numerical terms used herein may not imply an order or sequence unless clearly indicated by context. Thus, a first plate, layer, thermal void heating element, conductive element, channel, groove, and / or element described herein could be referred to as a second plate, layer, thermal void heating element, conductive element, channel, groove, and / or element without departing from the teachings of the exemplary embodiments.

[0164] Spatial and functional relationships between elements (e.g., modules, circuit elements, semiconductor layers, etc.) are described using various terms such as "connected," "engaged," "coupled," "adjacent," "next to," "on," "above," "below," and "disposed." Also, when a relationship between a first element and a second element is described in the above disclosure, unless expressly described as "direct," the relationship may be a direct relationship where no other intervening elements exist between the first element and the second element, or an indirect relationship where one or more intervening elements (spatial or functional) exist between the first element and the second element. As used herein, the phrase "at least one of A, B, and C" should be interpreted in the sense of a logical (A or B or C) using a non-exclusive logical OR, and not in the sense of "at least one of A, at least one of B, and at least one of C."

[0165] In some embodiments, the controller is part of a system, and such a system may be part of the examples described above. Such systems may include semiconductor processing equipment, including one or more processing tools, one or more chambers, one or more processing platforms, and / or specific processing components (e.g., wafer pedestals, gas flow systems, etc.). These systems may be integrated with electronics for controlling system operation before, during, and after semiconductor wafer or substrate processing. Such electronics may be referred to as a "controller" and may control various components or subcomponents of one or more systems. The controller may be programmed to control any of the processes disclosed herein, depending on the processing requirements and / or type of system. Such processes may include process gas delivery, temperature settings (e.g., heating and / or cooling), pressure settings, vacuum settings, power settings, radio frequency (RF) generator settings, RF matching circuit settings, frequency settings, flow rate settings, fluid delivery settings, position and motion settings, wafer transfer to and from the tool, and wafer transfer to and from other transfer tools and / or load locks connected or interfaced with the particular system.

[0166] Broadly, a controller may be defined as an electronic device having various integrated circuits, logic, memory, and / or software that receive instructions, issue instructions, control operations, enable cleaning operations, enable endpoint measurements, etc. Integrated circuits may include chips in the form of firmware that store program instructions, digital signal processors (DSPs), chips defined as application-specific integrated circuits (ASICs), and / or one or more microprocessors, i.e., microcontrollers, that execute program instructions (e.g., software). Program instructions may be instructions communicated to the controller in the form of various individual settings (or program files) that define operational parameters for performing a particular process on or for a semiconductor wafer or for a system. The operational parameters, in some embodiments, may be part of a recipe defined by a process engineer to implement one or more processing steps in the fabrication of one or more layers, materials, metals, oxides, silicon, silicon dioxide, surfaces, circuits, and / or wafer dies.

[0167] In some embodiments, the controller may be part of, coupled to, or a combination of a computer integrated with, coupled to, or otherwise networked to the system. For example, the controller may be in the “cloud” or all or part of a fab host computer system. This allows for remote access of wafer processing. The computer may provide remote access to the system to monitor the current progress of a fabrication operation, review the history of past fabrication operations, review trends or performance criteria from multiple fabrication operations, modify parameters of a current process, configure processing steps following a current process, or initiate a new process. In some examples, a remote computer (e.g., a server) can provide process recipes to the system over a network. Such a network may include a local network or the Internet. The remote computer may include a user interface that allows entry or programming of parameters and / or settings, which are then communicated from the remote computer to the system. In some examples, the controller receives instructions in the form of data. Such data identifies parameters for each processing step performed during one or more operations. It should be understood that the parameters may be specific to the type of process being performed and the type of tool the controller is configured to interface with or control. Thus, as discussed above, the controller may be distributed, for example, by having one or more individual controllers networked together and working together toward a common purpose (such as the processes and controls described herein). An example of a distributed controller for such purposes would include one or more integrated circuits on the chamber in communication with one or more integrated circuits located remotely (e.g., at the platform level or as part of a remote computer) and coupled to control the process in the chamber.

[0168] Exemplary systems may include, but are not limited to, a plasma etch chamber or module, a deposition chamber or module, a spin rinse chamber or module, a metal plating chamber or module, a cleaning chamber or module, a bevel edge etch chamber or module, a physical vapor deposition (PVD) chamber or module, a chemical vapor deposition (CVD) chamber or module, an atomic layer deposition (ALD) chamber or module, an atomic layer etch (ALE) chamber or module, an ion implantation chamber or module, a tracking chamber or module, and any other semiconductor processing system that may be associated with or used in the fabrication and / or manufacturing of semiconductor wafers.

[0169] As described above, depending on the process step or steps being performed by the tool, the controller may communicate with one or more other tool circuits or modules, other tool components, cluster tools, other tool interfaces, adjacent tools, nearby tools, tools located throughout the factory, a main computer, another controller, or tools used in material transport to and from tool locations and / or load ports in a semiconductor fabrication factory. The present disclosure can be implemented as the following application examples. <Application example 1> A substrate support, a body configured to support a substrate during processing of the substrate, the body comprising a plurality of plates including a top plate, a first middle plate, a second middle plate, and a bottom plate, the plurality of plates arranged to form a stack, the first middle plate being positioned on the second middle plate; a thermal void defined by an upper surface of the second intermediate plate and at least one of a lower surface of the first intermediate plate or a lower surface of the upper plate, the thermal void being annular in shape; A substrate support comprising: <Application example 2> The substrate support according to Application Example 1, the plurality of plates are joined together to form a unitary structure having an at least partially sealed passageway; The integral structure allows thermal conductivity between the plates. Substrate support. <Application example 3> The substrate support according to Application Example 1, The substrate support, wherein the thermal void is defined by the lower surface of the first middle plate and the upper surface of the second middle plate. <Application Example 4> The substrate support according to Application Example 1, The substrate support, wherein the thermal void is defined by the lower surface of the top plate and the upper surface of the second middle plate. <Application example 5> The substrate support according to Application Example 1, the thermal void is a first thermal void; the first thermal void is defined by the lower surface of the first intermediate plate and the upper surface of the second intermediate plate; the body includes a second thermal void defined by the lower surface of the top plate and the upper surface of the second middle plate; Substrate support. <Application Example 6> The substrate support according to Application Example 1, the thermal void is a first thermal void; the substrate support comprises one or more thermal voids, including the first thermal void; wherein the dimensions of the one or more thermal voids relative to the dimensions of at least some of the plurality of plates provide a temperature gradient of greater than 2°C between a center of the body and an annular peripheral region. Substrate support. <Application Example 7> The substrate support according to Application Example 1, the thermal void is a first thermal void; the substrate support comprises one or more thermal voids, including the first thermal void; wherein the dimensions of the one or more thermal voids relative to the dimensions of at least some of the plurality of plates provide a temperature gradient of 6°C or greater between a center of the body and an annular peripheral region. Substrate support. <Application Example 8> The substrate support according to Application Example 1, The substrate support, wherein the thermal void is defined by three of the plurality of plates. <Application Example 9> The substrate support according to Application Example 1, the thermal void is a first thermal void; the body includes a second thermal void; the second thermal void is annular in shape and is defined by two or more corresponding plates of the plurality of plates; Substrate support. <Application Example 10> The substrate support according to Application Example 1, the plurality of plates comprising a first radially extending channel and a second radially extending channel; the thermal void transports exhaust gas between the first radially extending channels and the second radially extending channels. Substrate support. <Application Example 11> The substrate support according to Application Example 1, the plurality of plates include radially extending channels and radially extending grooves; the thermal voids transport gas under vacuum between the radially extending channels and the radially extending grooves; Substrate support. <Application Example 12> The substrate support according to Application Example 1, the thermal void is a first thermal void; the body comprising four annular-shaped thermal voids arranged in a concentric pattern; the four annular-shaped thermal voids include the first thermal void; Substrate support. <Application Example 13> The substrate support according to Application Example 1, The substrate support, wherein the plurality of plates comprises two or more concentric heating coils. <Application Example 14> The substrate support according to Application Example 1, the plurality of plates comprising an inner heating element, a central heating element, and an outer heating element; the thermal void is a first thermal void; the body includes a second thermal void; the first thermal void is disposed over an area between the outer heating element and the central heating element; the second thermal void is disposed over an area between the central heating element and the inner heating element; Substrate support. <Application Example 15> The substrate support according to Application Example 14, the first thermal void and the second thermal void have different cross-sectional heights; or The first thermal void and the second thermal void have different cross-sectional widths. a substrate support, <Application Example 16> The substrate support according to Application Example 14, a cross-sectional height of the first thermal void is defined by three of the plurality of plates; a cross-sectional height of the second thermal void is defined by two of the plurality of plates; Substrate support. <Application Example 17> The substrate support according to Application Example 14, a cross-sectional height of the first thermal void is greater than a cross-sectional height of the second thermal void; or The width of the second thermal void is greater than the width of the first thermal void. a substrate support, <Application Example 18> A substrate support according to Application Example 1, wherein the substrate support comprises two or more heating elements and one or more sensors, the one or more sensors being configured to generate one or more temperature signals; and a control module configured to control the supply of at least one of current or power to the two or more heating elements based on the one or more temperature signals and a relationship between the thermal voids and at least some of the plurality of plates; A system comprising: <Application Example 19> A substrate support, a body configured to support a substrate during processing of the substrate, the body comprising a plurality of plates including a top plate, one or more middle plates, and a bottom plate, the plurality of plates being arranged to form a stack; a thermal void defined by two or more of the plurality of plates including at least one of the one or more intermediate plates, the thermal void being annular in shape and concentric with two or more of the plurality of plates; A substrate support comprising: <Application Example 20> A substrate support, a body configured to support a substrate during processing of the substrate, the body comprising a plurality of plate layers including a top plate layer, one or more middle plate layers, and a bottom plate layer, the one or more middle plate layers comprising a first plate and a second plate, the second plate being concentric with the first plate, and the plurality of plate layers being arranged to form a stack; a thermal void at least partially defined by the first plate and the second plate, the thermal void being annular in shape; A substrate support comprising:

Claims

1. A substrate support, a body configured to support a substrate during processing of the substrate, the body comprising a plurality of plates including a top plate, a first middle plate, a second middle plate, and a bottom plate, the plurality of plates arranged to form a stack, the first middle plate being positioned on the second middle plate; a thermal void defined by an upper concave surface of the second intermediate plate and a lower concave surface of the first intermediate plate, or a thermal void defined by an upper concave surface of the second intermediate plate and a lower concave surface of the top plate, the thermal void being an annular shaped thermal void; A substrate support comprising:

2. 10. The substrate support of claim 1, the plurality of plates are joined together to form a unitary structure having an at least partially sealed passageway; The integral structure allows thermal conductivity between the plates. Substrate support.

3. 10. The substrate support of claim 1, The substrate support, wherein the thermal void is defined by the lower concave surface of the first middle plate and the upper concave surface of the second middle plate.

4. 10. The substrate support of claim 1, The substrate support, wherein the thermal void is defined by the lower concave surface of the top plate and the upper concave surface of the second middle plate.

5. A substrate support comprising: a body configured to support a substrate during processing of the substrate, the body comprising a plurality of plates including a top plate, a first middle plate, a second middle plate, and a bottom plate, the plurality of plates arranged to form a stack, the first middle plate being positioned on the second middle plate; a thermal void defined by an upper surface of the second intermediate plate and at least one of a lower surface of the first intermediate plate or a lower surface of the upper plate, the thermal void being annular in shape; Equipped with the thermal void is a first thermal void; the first thermal void is defined by the lower surface of the first intermediate plate and the upper surface of the second intermediate plate; the body includes a second thermal void defined by the lower surface of the top plate and the upper surface of the second middle plate; Substrate support.

6. 10. The substrate support of claim 1, the thermal void is a first thermal void; the substrate support comprises one or more thermal voids, including the first thermal void; wherein the dimensions of the one or more thermal voids relative to the dimensions of at least some of the plurality of plates provide a temperature gradient of greater than 2°C between a center of the body and an annular peripheral region. Substrate support.

7. 10. The substrate support of claim 1, the thermal void is a first thermal void; the substrate support comprises one or more thermal voids, including the first thermal void; wherein the dimensions of the one or more thermal voids relative to the dimensions of at least some of the plurality of plates provide a temperature gradient of 6°C or greater between a center of the body and an annular peripheral region. Substrate support.

8. 10. The substrate support of claim 1, The substrate support, wherein the thermal void is defined by three of the plurality of plates.

9. A substrate support comprising: a body configured to support a substrate during processing of the substrate, the body comprising a plurality of plates including a top plate, a first middle plate, a second middle plate, and a bottom plate, the plurality of plates arranged to form a stack, the first middle plate being positioned on the second middle plate; a thermal void defined by an upper surface of the second intermediate plate and at least one of a lower surface of the first intermediate plate or a lower surface of the upper plate, the thermal void being annular in shape; Equipped with the thermal void is a first thermal void; the body includes a second thermal void; the second thermal void is annular in shape and is defined by two or more corresponding plates of the plurality of plates; Substrate support.

10. A substrate support comprising: a body configured to support a substrate during processing of the substrate, the body comprising a plurality of plates including a top plate, a first middle plate, a second middle plate, and a bottom plate, the plurality of plates arranged to form a stack, the first middle plate being positioned on the second middle plate; a thermal void defined by an upper surface of the second intermediate plate and at least one of a lower surface of the first intermediate plate or a lower surface of the upper plate, the thermal void being annular in shape; Equipped with the plurality of plates comprising a first radially extending channel and a second radially extending channel; the thermal void transports exhaust gas between the first radially extending channels and the second radially extending channels. Substrate support.

11. A substrate support comprising: a body configured to support a substrate during processing of the substrate, the body comprising a plurality of plates including a top plate, a first middle plate, a second middle plate, and a bottom plate, the plurality of plates arranged to form a stack, the first middle plate being positioned on the second middle plate; a thermal void defined by an upper surface of the second intermediate plate and at least one of a lower surface of the first intermediate plate or a lower surface of the upper plate, the thermal void being annular in shape; Equipped with the plurality of plates include radially extending channels and radially extending grooves; the thermal voids transport gas under vacuum between the radially extending channels and the radially extending grooves; Substrate support.

12. A substrate support comprising: a body configured to support a substrate during processing of the substrate, the body comprising a plurality of plates including a top plate, a first middle plate, a second middle plate, and a bottom plate, the plurality of plates arranged to form a stack, the first middle plate being positioned on the second middle plate; a thermal void defined by an upper surface of the second intermediate plate and at least one of a lower surface of the first intermediate plate or a lower surface of the upper plate, the thermal void being annular in shape; Equipped with the thermal void is a first thermal void; the body comprising four annular-shaped thermal voids arranged in a concentric pattern; the four annular-shaped thermal voids include the first thermal void; Substrate support.

13. 10. The substrate support of claim 1, The substrate support, wherein the plurality of plates comprises two or more concentric heating coils.

14. A substrate support comprising: a body configured to support a substrate during processing of the substrate, the body comprising a plurality of plates including a top plate, a first middle plate, a second middle plate, and a bottom plate, the plurality of plates arranged to form a stack, the first middle plate being positioned on the second middle plate; a thermal void defined by an upper surface of the second intermediate plate and at least one of a lower surface of the first intermediate plate or a lower surface of the upper plate, the thermal void being annular in shape; Equipped with the plurality of plates comprising an inner heating element, a central heating element, and an outer heating element; the thermal void is a first thermal void; the body includes a second thermal void; the first thermal void is disposed over an area between the outer heating element and the central heating element; the second thermal void is disposed over a region between the central heating element and the inner heating element. Substrate support.

15. 15. The substrate support of claim 14, the first thermal void and the second thermal void have different cross-sectional heights; or The first thermal void and the second thermal void have different cross-sectional widths. a substrate support,

16. 15. The substrate support of claim 14, a cross-sectional height of the first thermal void is defined by three of the plurality of plates; a cross-sectional height of the second thermal void is defined by two of the plurality of plates; Substrate support.

17. 15. The substrate support of claim 14, a cross-sectional height of the first thermal void is greater than a cross-sectional height of the second thermal void; or The width of the second thermal void is greater than the width of the first thermal void. a substrate support,

18. 10. The substrate support of claim 1, comprising: two or more heating elements; and one or more sensors, the one or more sensors configured to generate one or more temperature signals; a control module configured to control the supply of at least one of current or power to the two or more heating elements based on the one or more temperature signals and a relationship between the thermal voids and at least some of the plurality of plates; A system comprising:

19. A substrate support, a body configured to support a substrate during processing of the substrate, the body comprising a plurality of plates including a top plate, a plurality of middle plates, and a bottom plate, the plurality of plates being arranged to form a stack; a thermal void defined by the plurality of intermediate plates, the thermal void being annular in shape and concentric with two or more of the plurality of plates, the thermal void extending into but not through one of the plurality of intermediate plates; A substrate support comprising:

20. A substrate support, a body configured to support a substrate during processing of the substrate, the body comprising a plurality of plate layers, the plurality of plate layers comprising a top plate layer, one or more middle plate layers, a bottom plate layer, an annular channel, and a plurality of radially extending channels, the one or more middle plate layers comprising a first plate and a second plate, the second plate being concentric with the first plate, the plurality of plate layers being arranged to form a stack, the annular channel and the plurality of radially extending channels extending at least partially within the one or more middle plate layers; a thermal void at least partially defined by the first plate and the second plate, the thermal void being annular in shape; Equipped with The substrate support, wherein the plurality of radially extending channels fluidly connect the annular channel to the thermal void.

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