Carrier ring for floating the gas plate in the TCP chamber

Abstract

A gas distribution assembly for a processing chamber of a substrate processing system includes a gas plate having a plurality of holes configured to supply a gas mixture to an interior of the processing chamber and a carrier ring configured to support the gas plate. The carrier ring has an annular body and a radially inward protrusion. The radially inward protrusion has a first inner diameter, the annular body has a second inner diameter larger than the first inner diameter, the radially inward protrusion defines a shelf, and the gas plate is disposed on the shelf of the carrier ring. A dielectric window is disposed on the gas plate above the gas plate and the carrier ring such that the gas plate is supported between the carrier ring and the dielectric window.

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims the benefit of U.S. Provisional Application No. 63 / 081,252, filed September 21, 2020, the entire disclosure of which is incorporated herein by reference.

[0002] FIELD OF THE DISCLOSURE The present disclosure relates to a gas distribution apparatus for a substrate processing system. [Background technology]

[0003] The background discussion provided herein is intended to generally present the context for the present disclosure. To the extent provided in this background section, aspects of the inventors' currently disclosed work and description that may not have qualified as prior art at the time of filing are not admitted expressly or impliedly to be prior art against the present disclosure.

[0004] During the manufacturing of substrates such as semiconductor wafers, etching and deposition processes may occur in a processing chamber where the substrate is placed on a substrate support such as an electrostatic chuck (ESC) or a pedestal. Process gases are introduced through a gas distribution system and a plasma is ignited in the processing chamber.

[0005] Some substrate processing systems may be configured to perform deep silicon etch (DSiE) processes and / or rapid alternating processes (RAP) that involve rapid switching between etch and deposition processes. For example, RAP may be used in microelectromechanical systems (MEMS) etching, DSiE processing, etc. Summary of the Invention

[0006] A gas distribution assembly for a processing chamber of a substrate processing system includes a gas plate having a plurality of holes configured to supply a gas mixture to an interior of the processing chamber and a carrier ring configured to support the gas plate. The carrier ring has an annular body and a radially inward protrusion. The radially inward protrusion has a first inner diameter, the annular body has a second inner diameter larger than the first inner diameter, the radially inward protrusion defines a ledge, and the gas plate is disposed on the ledge of the carrier ring. A dielectric window is disposed on the gas plate above the gas plate and the carrier ring such that the gas plate is supported between the carrier ring and the dielectric window.

[0007] In other features, the second inner diameter of the annulus is greater than the diameter of the gas plate. The second inner diameter of the annulus corresponds to a vertical surface of the radially inner periphery of the shelf, and the thickness of the gas plate is greater than the height of this vertical surface. The carrier ring includes ceramic. The carrier ring includes alumina. The carrier ring includes the same material as the gas plate. The carrier ring is made of a material having the same CTE as the gas plate. The carrier ring has a coating of yttrium oxide.

[0008] In another feature, the outer periphery of the carrier ring has an annular groove. The gas distribution assembly further includes a lifter ring disposed around the outer periphery of the carrier ring, the lifter ring having an annular protrusion extending inward into the annular groove of the carrier ring. The gas plate is not in direct contact with the lifter ring. The processing chamber includes a gas distribution assembly, an upper portion of the processing chamber has a recess, the gas distribution assembly is disposed in the recess, and the gas plate is not in direct contact with the processing chamber.

[0009] A processing chamber of a substrate processing system configured to perform transformer-coupled plasma processing includes a recess defined in an upper portion of the processing chamber and a carrier ring disposed in the recess. The carrier ring has an annular body and a radially inward protrusion, the radially inward protrusion having a first inner diameter, the annular body having a second inner diameter larger than the first inner diameter, and the protrusion defining a shelf. A gas plate is disposed on the shelf of the carrier ring, the gas plate having a plurality of holes configured to supply a gas mixture into the interior of the processing chamber. A dielectric window is disposed on the gas plate above the gas plate and carrier ring such that the gas plate is supported between the carrier ring and the dielectric window. The gas plate is not in direct contact with the upper portion of the processing chamber.

[0010] In another feature, the second inner diameter of the annular body is larger than the diameter of the gas plate. The second inner diameter of the annular body corresponds to the vertical surface of the radially inner periphery of the shelf. The thickness of the gas plate is larger than the height of the vertical surface. The outer periphery of the carrier ring has an annular groove. The processing chamber further includes a lifter ring disposed around the outer periphery of the carrier ring. The lifter ring has an annular protrusion extending inward within the annular groove of the carrier ring. The gas plate is not in direct contact with the lifter ring.

[0011] Further areas of applicability of the present disclosure will become apparent from the detailed description, the claims, and the drawings. The detailed description and specific examples are intended for purposes of illustration only and are not intended to limit the scope of the present disclosure.

[0012] The present disclosure will become more fully understood from the detailed description and the accompanying drawings, wherein: [Brief explanation of the drawings]

[0013] [Figure 1A] 1 is a functional block diagram of a substrate processing system including an exemplary carrier ring for a gas distribution apparatus according to the present disclosure.

[0014] [Figure 1B] 1 illustrates an exemplary gas distribution assembly including a carrier ring in accordance with certain embodiments of the present disclosure.

[0015] [Figure 1C] FIG. 1C is an enlarged view of the example carrier ring and gas plate of FIG. 1B.

[0016] [Figure 2] 1 is an isometric view of an exemplary gas distribution assembly including a carrier ring in accordance with certain embodiments of the present disclosure.

[0017] [Figure 3] FIG. 1 is an exploded view of a gas distribution assembly including a carrier ring according to certain embodiments of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0018] In the drawings, numbers may be reused to identify similar and / or identical elements.

[0019] The substrate processing system may include a gas distribution device (e.g., a showerhead) disposed on a lid or top surface of the processing chamber. In a processing chamber configured to perform transformer coupled plasma (TCP) processing, the gas distribution device may correspond to an assembly including a gas plate (e.g., a showerhead plate) disposed facing the interior of the processing chamber and a dielectric window disposed above the gas plate. In some examples, a plenum is defined between the gas plate and the dielectric window. Process gases are supplied to the processing chamber through the gas distribution device, and a plasma is generated within the processing chamber. For example, an RF signal is transmitted from a TCP coil through the dielectric window into the interior of the processing chamber.

[0020] High-power and high-temperature processing can cause damage and wear to gas distribution system components over time. For example, the gas plate is held between the dielectric window and the body of the processing chamber (e.g., the top edge of the wall). This limits the thermal expansion caused by high-power processes. Furthermore, surface temperature gradients create stresses across the gas plate (e.g., hoop or cylinder stresses that increase with radial distance from the center of the gas plate). Thermal expansion and stresses associated with increased TCP power can result in damage (e.g., cracks) to the gas plate and / or dielectric window. Furthermore, gas plate heat can be transferred to the body of the processing chamber and / or other components of the substrate processing system, potentially resulting in increased wear and / or other malfunctions (e.g., interlocking device tripping due to overtemperature conditions). Damage to the gas plate surface and / or edge (e.g., abrasion or chipping) can also occur with repeated removal and reassembly.

[0021] A gas distribution assembly according to certain embodiments of the present disclosure includes a carrier ring positioned below the gas plate and between the gas plate and the processing chamber. The gas plate is mounted within the carrier ring, and a dielectric window is positioned above the gas plate and the carrier ring. The gas plate is not in direct contact with the processing chamber. The dielectric window is not fixedly attached to the gas plate or the carrier ring, but is instead loosely supported on the gas plate. Additionally, a small lateral gap is provided between the outer periphery of the gas plate and the carrier ring. For example, this gap is approximately 0.001" or 0.025 mm (e.g., 0.00075" to 0.00125", or 0.019 mm to 0.032 mm). Therefore, lateral thermal expansion of the gas plate is not restricted. In some embodiments, the outer periphery of the carrier ring has grooves configured to interface with a lifter ring.

[0022] The carrier ring may be composed of the same material as the gas plate or a different material. For example, the carrier ring may be composed of a ceramic such as alumina, aluminum oxide (Al2O3), or aluminum nitride (AlN). The material of the carrier ring may be selected to have the same or approximately the same coefficient of thermal expansion (CTE) as the gas plate. The carrier ring may be coated with a material, such as yttrium oxide, that is resistant to etching materials and by-product materials in the processing chamber. Thus, the carrier ring is resistant to erosion caused by the reactive plasma environment.

[0023] The carrier ring acts as a thermal break (e.g., a heat sink) at the periphery of the gas plate. Because thermal gradients are most severe at the periphery of the gas plate, the carrier ring significantly reduces the potential for damage due to thermal expansion. Additionally, the carrier ring reduces the amount of heat transfer from the gas ring to the body of the processing chamber, thereby reducing wear (and increasing the service life) of surrounding components and reducing the potential for interlocking device tripping. In embodiments that include a lifter ring, the lifter ring interacts with the carrier ring instead of the gas plate. Thus, the carrier ring functions as a load-bearing contact for the gas plate, dielectric plate, and other components of the assembly. In this way, the potential for damage to the gas plate and dielectric plate during removal and reassembly is minimized. If the carrier ring becomes worn or damaged, it can be replaced without replacing the gas plate or other components of the assembly.

[0024] Referring now to FIG. 1A, an example of a substrate processing system 10 according to certain embodiments of the present disclosure is shown. The substrate processing system 10 includes a coil driver circuit 11. As shown, the coil driver circuit 11 includes an RF source 12 and a tuning circuit 13. The tuning circuit 13 may be directly connected to one or more inductive transformer-coupled plasma (TCP) coils 16. Alternatively, the tuning circuit 13 may be connected to one or more of the coils 16 via an optional inverter circuit 15. The tuning circuit 13 tunes the output of the RF source 12 to a desired frequency and / or a desired phase, matches the impedance of the coils 16, and divides power among the TCP coils 16. The inverter circuit 15 is used to selectively switch the polarity of the current through one or more of the TCP coils 16. In some examples, the coil driver circuit 11 implements a transformer-coupled capacitively tuned (TCCT) matching network to drive the TCP coils 16.

[0025] The gas distribution apparatus or assembly 18 includes a showerhead (e.g., gas plate) 20 and a dielectric window 24. In some embodiments, a plenum may be defined between the gas plate 20 and the dielectric window 24. The gas plate 20 is disposed between the dielectric window 24 and the processing chamber 28. In some embodiments, the dielectric window 24 contains ceramic. In some embodiments, the gas plate 20 comprises ceramic or another dielectric material. The processing chamber 28 further includes a substrate support (or pedestal) 32. The substrate support 32 may include an electrostatic chuck (ESC), a mechanical chuck, or other types of chucks.

[0026] During operation, process gas is supplied to the process chamber 28 through the gas plate 20 (e.g., a plurality of holes extending through the gas plate), and a plasma 40 is generated inside the process chamber 28. For example, an RF signal is transmitted from the TCP coil through the dielectric window 24 into the interior of the process chamber 28. The RF signal excites gas molecules within the process chamber 28, generating the plasma 40. The plasma 40 etches the exposed surface of the substrate 34. An RF source 50 and a bias matching circuit 52 may be used to bias the substrate support 32 and control ion energy during operation.

[0027] A gas delivery system 56 may be used to supply the process gas mixture to the process chamber 28. The gas delivery system 56 includes process gas and inert gas sources 57 (e.g., including deposition gases, etching gases, carrier gases, inert gases, etc.), gas metering systems 58-1 and 58-2, such as valves and flow ratio controllers (e.g., mass flow controllers (MFCs)), and the like. -2 , and corresponding manifolds 59-1 and 59-2. For example, gas metering system 58-1 and manifold 59-1 may be configured to provide an etching gas mixture to processing chamber 28 during an etching process, while gas metering system 58-2 and manifold 59-2 may be configured to provide a deposition gas mixture to processing chamber 28 during a deposition process. For example, etching gas and deposition gas mixtures may be provided through coil 16 and into the plenum of gas plate 20 via respective passages in dielectric window 24. Heater / cooler 64 may be used to heat / cool substrate support 32 to a predetermined temperature. An exhaust system 65 has valves 66 and pumps 67 to purge or evacuate reactants from processing chamber 28.

[0028] A controller 54 may be used to control the etching process. The controller 54 monitors system parameters and controls the delivery of the gas mixture, ignition, maintenance, and extinguishing of the plasma, removal of reactants, etc. The controller 54 may also control various aspects, such as the coil driver circuit 11, the RF source 50, and the bias matching circuit 52. In some embodiments, the substrate support 32 is temperature adjustable. In certain embodiments, a temperature controller 68 may be connected to multiple heating elements 70, such as thermal control elements (TCEs), configured on the substrate support 32. The temperature controller 68 may be used to control the multiple heating elements 70 to control the temperature of the substrate support 32 and the substrate 34.

[0029] The gas distribution assembly 18 according to certain embodiments of the present disclosure includes a carrier ring 100 disposed between the gas plate 20 and the body of the processing chamber 28, as will be described in more detail below.

[0030] 1B and 1C, and with continued reference to FIG. 1A, the gas distribution assembly 18, which includes a carrier ring 100, will be described in further detail. The carrier ring 100 is positioned below the gas plate 20 and between the gas plate 20 and the top 104 of the processing chamber 28. For example, the top 104 of the processing chamber 28 may include an outer wall, a lid, and The recess 108 may correspond to a top surface of the processing chamber 28, which defines a recess or pocket 108 configured to receive the gas distribution assembly 18. In some embodiments, the carrier ring 100 is supported on a step or ledge 112 within the recess 108, and the gas plate 20 is mounted within the carrier ring 100. For example, a radially inward protrusion 114 has a first inner diameter 116. The protrusion 114 protrudes inward from an annular body 118 having a second inner diameter 120 that is larger than the first inner diameter 116. The first inner diameter 116, the second inner diameter 120, and the protrusion 114 of the carrier ring 100 define a step or ledge 124, and the gas plate 20 is positioned on the ledge 124.

[0031] A small lateral gap 128 is provided between the second inner diameter 120 of the carrier ring 100 (i.e., the vertical surface located at the radially inner periphery of the shelf 124) and the outer periphery 132 of the gas plate 20. In other words, the second inner diameter 120 of the carrier ring 100 is larger than the diameter of the gas plate 20. In some embodiments, the gap 128 is approximately 0.025" or 0.635 mm (e.g., 0.020" to 0.030", i.e., 0.508 mm to 0.762 mm). Thus, the gas plate 20 "floats" between the carrier ring 100 and the dielectric window 24, and lateral thermal expansion of the gas plate 20 is unrestricted. The dielectric window 24 is disposed above the gas plate 20 and the carrier ring 100. In some embodiments, the dielectric window 24 is not fixedly attached to the gas plate 20 or the carrier ring 100, but instead is loosely supported on the gas plate 20. In other words, the dielectric window 24 is not bonded (e.g., with adhesives, mechanical fasteners, etc.) and therefore does not impede the thermal expansion of the gas plate 20.

[0032] 1B , in some embodiments, sealing members 136 and 140 (e.g., O-rings 136 and 140) are disposed between the carrier ring 100 and the upper portion 104 of the processing chamber 28 and between the carrier ring 100 and the dielectric window 24, respectively. For example, the sealing members 136 and 140 are disposed in grooves 144 in the surfaces of the carrier ring 100, the upper portion 104 of the processing chamber 28, and the dielectric window 24. The sealing members 136 and 140 seal the processing chamber 28 to maintain vacuum integrity. While one of the grooves 144 is shown on the lower surface of the carrier ring 100, in other embodiments (not shown), the groove 144 may be located on the upper surface of the upper portion 104 (not shown). Similarly, while one of the grooves 144 is shown on the lower surface of the dielectric window 24, in other embodiments (not shown), the groove 144 may be located on the upper surface of the carrier ring 100 (not shown).

[0033] In some embodiments, the outer periphery of the carrier ring 100 has an annular groove 148 configured to interface with a lifter ring 152. The lifter ring 152 has an annular protrusion 156 that extends into the groove 148 and holds the carrier ring 100 and gas distribution assembly 18 within the lifter ring 152. The gas distribution assembly 18 can be installed in and removed from the processing chamber 28 by raising or lowering the lifter ring 152. The gas plate 20 is not in direct contact with the lifter ring 152 or the walls / extensions of the processing chamber 28. Instead, the carrier ring 100 is in direct contact with the lifter ring 152 and the walls / extensions of the processing chamber 28. Thus, the carrier ring 100 serves as a load-bearing contact for the gas plate 20 and the dielectric window 24 when the lifter ring 152 is used to remove the gas distribution assembly 18.

[0034] The carrier ring 100 may be composed of the same material as the gas plate 20, or may be composed of a different material. In some embodiments, the carrier ring 100 may be composed of a ceramic, such as alumina, aluminum oxide (Al2O3), or aluminum nitride (AlN). In some embodiments, the material of the carrier ring 100 may have a coefficient of thermal expansion (CTE) that is the same or approximately the same (e.g., less than 5%) as the CTE of the gas plate 20. In some embodiments, the carrier ring 100 may be coated with a material, such as yttrium oxide, that is resistant to etching and by-product materials in the processing chamber. Thus, the carrier ring 100 is resistant to erosion caused by a reactive plasma environment.

[0035] 2 is an isometric view of an exemplary gas distribution assembly 200 including a carrier ring 204 in accordance with certain embodiments of the present disclosure. The carrier ring 204 is configured to support a gas plate 208, as previously described in FIGS. 1A, 1B, and 1C. A dielectric window 212 is positioned above the carrier ring 204 and the gas plate 208 such that the gas plate 208 is supported between the carrier ring 204 and the dielectric window 212.

[0036] In some embodiments, the dielectric window 212 has an inlet or opening 216. During a plasma processing process, a gas mixture is supplied to the processing chamber through the gas distribution assembly 200 and through the opening 216 in the dielectric window 212. For example, a plenum 220 is defined between the dielectric window 212 and the gas plate 208. The gas mixture supplied through the opening 216 is distributed throughout the plenum 220 and into the processing chamber through a plurality of holes 224.

[0037] 3 is an exploded view of a gas distribution assembly 300 including a carrier ring 304, a gas plate 308, and a dielectric window 312 in accordance with certain embodiments of the present disclosure. A top 316 of a processing chamber defines a recess 320 configured to receive the gas distribution assembly 300. The carrier ring 304 is configured to support the gas plate 308, as previously described in FIGS. 1A, 1B, and 1C. The dielectric window 312 is positioned above the carrier ring 304 and the gas plate 308 such that the gas plate 308 is supported between the carrier ring 304 and the dielectric window 312.

[0038] A lifter ring 324 is disposed around the outer periphery of the carrier ring 304. For example, the lifter ring 324 has an annular protrusion (e.g., annular protrusion 156 as shown in FIG. 1C ) that extends inward within an annular groove in the outer periphery of the carrier ring 304. The gas plate 308 does not directly contact either the processing chamber top 316 or the lifter ring 324 when assembled and installed within the recess 320 in the processing chamber top 316.

[0039] The foregoing description is merely illustrative and is not intended to limit the disclosure, its application, or uses in any way. The broad teachings of the present disclosure can be embodied in a variety of forms. Accordingly, while the present disclosure includes specific examples, the actual scope of the disclosure should not be so limited, as other modifications will become apparent from a study of the drawings, the specification, and the following claims. It should be understood that one or more steps of a method may be performed in a different order (or simultaneously) without altering the principles of the disclosure. Furthermore, although each embodiment has been described above as having particular features, any one or more of such features described with respect to any embodiment of the present disclosure can be implemented in any other embodiment and / or combined with features of any other embodiment, even if the combination is not explicitly set forth. In other words, the described embodiments are not mutually exclusive, and one or more embodiments may be substituted for one another and still be within the scope of the present disclosure.

[0040] Spatial and functional relationships between elements (e.g., between modules, between circuit elements, between semiconductor layers, etc.) are described using various terms such as "connected," "engaged," "coupled," "adjacent," "next to," "on top of," "above," "below," and "disposed." Unless expressly described as "direct," when a relationship between a first element and a second element is described in the above disclosure, the relationship may be a direct relationship with no other intervening elements between the first element and the second element, or it may be an indirect relationship with one or more intervening elements (spatially or functionally) between the first element and the second element. As used herein, the phrase at least one of A, B, and C should be interpreted in the logical sense of (A or B or C), using a non-exclusive logical OR, and not as "at least one of A, at least one of B, and at least one of C."

[0041] In some embodiments, the controller is part of a system, which may be part of the examples described above. Such systems may include semiconductor processing equipment, including one or more processing tools, one or more chambers, one or more platforms for processing, and / or specific processing components (such as wafer pedestals and gas flow systems). These systems may be integrated with electronics that control the operation of the system before, during, and after semiconductor wafer or substrate processing. The electronics may be referred to as a "controller" and may control various components or subparts of one or more systems. The controller may be programmed to control any of the processes disclosed herein, such as process gas delivery, temperature settings (e.g., heating and / or cooling), pressure settings, vacuum settings, power settings, radio frequency (RF) generator settings, RF matching circuit settings, frequency settings, flow rate settings, fluid delivery settings, position and operation settings, wafer transfer into or out of the tool and other transfer tools and / or load locks connected to or bounding a particular system, depending on the processing requirements and / or type of system.

[0042] Generally, a controller may be defined as an electronic device having various integrated circuits, logic circuits, memory, and / or software that receives instructions, issues instructions, controls operations, enables cleaning operations, enables endpoint measurements, etc. The integrated circuits may include chips in firmware format that store program instructions, digital signal processors (DSPs), chips defined as application-specific integrated circuits (ASICs), and / or one or more microprocessors or microcontrollers that execute program instructions (e.g., software). The program instructions may be instructions communicated to the controller in the form of various individual settings (or program files) that define operational parameters for performing specific processes on or for a semiconductor wafer or for a system. The operational parameters, in some embodiments, may be part of a recipe defined by a process engineer to accomplish one or more process steps in the manufacture of one or more layers, materials, metals, oxides, silicon, silicon dioxide, surfaces, circuits, and / or dies of a wafer.

[0043] In some embodiments, the controller may be part of or connected to a computer that is integral with, networked to, or a combination of the system. For example, the controller may be in the “cloud” or may be all or part of a fab host computer system that can enable remote access to wafer processing. The computer may enable remote access to the system to monitor the current progress of a manufacturing operation, examine the history of past manufacturing operations, examine trends or performance metrics from multiple manufacturing operations, modify parameters of a current process, and set processing steps to follow a current process or begin a new process. In some examples, a remote computer (e.g., a server) can provide process recipes to the system over a network, which may include a local network or the Internet. The remote computer may include a user interface that allows entry or programming of parameters and / or settings, which are then communicated from the remote computer to the system. In some examples, the controller receives instructions in the form of data specifying parameters for each processing step performed during one or more operations. It should be understood that the parameters may be specific to the type of process being performed and the type of tool the controller is configured to interface with or control. Thus, as previously discussed, the controller may be distributed, such as by having one or more separate controllers networked together and functioning toward a common purpose, such as the processing and control described herein. An example of a distributed controller for this purpose would be one or more integrated circuits on a chamber that communicate with one or more integrated circuits located remotely (e.g., at the platform level or as part of a remote computer) that in combination control processing on the chamber.

[0044] Without limitation, example systems may include a plasma etch chamber or module, a deposition chamber or module, a spin rinse chamber or module, a metal plating chamber or module, a cleaning chamber or module, a bevel edge etch chamber or module, a physical vapor deposition (PVD) chamber or module, a chemical vapor deposition (CVD) chamber or module, an atomic layer deposition (ALD) chamber or module, an atomic layer etch (ALE) chamber or module, an ion implantation chamber or module, a track chamber or module, and any other semiconductor processing system that may be associated with or used in the fabrication and / or production of semiconductor wafers.

[0045] As noted above, depending on the processing step or steps being performed by the tool, the controller may communicate with one or more of other tool circuits or modules, other tool components, cluster tools, other tool interfaces, adjacent tools, nearby tools, tools located throughout the factory, a main computer, another controller, or tools used in material transport to and from tool locations and / or load ports within a semiconductor fabrication factory. The present invention can be realized, for example, in the following manner. Application example 1: 1. A gas distribution assembly for a processing chamber of a substrate processing system, the gas distribution assembly comprising: a gas plate having a plurality of holes configured to supply a gas mixture to the interior of the processing chamber; a carrier ring configured to support the gas plate, the carrier ring having an annular body and a radially inward protrusion, the radially inward protrusion having a first inner diameter, the annular body having a second inner diameter greater than the first inner diameter, the radially inward protrusion defining a ledge, the gas plate being disposed on the ledge of the carrier ring; and a dielectric window disposed on the gas plate above the gas plate and the carrier ring, the gas plate being supported between the carrier ring and the dielectric window; and a gas distribution assembly including: Application example 2: A gas distribution assembly according to Application Example 1, wherein the second inner diameter of the annular body is larger than the diameter of the gas plate. Application example 3: A gas distribution assembly as described in Application Example 1, wherein the second inner diameter of the annular body corresponds to the vertical surface of the radially inner periphery of the shelf portion, and the thickness of the gas plate is greater than the height of the vertical surface. Application example 4: A gas distribution assembly according to Application Example 1, wherein the carrier ring comprises ceramic. Application example 5: 2. The gas distribution assembly of claim 1, wherein the carrier ring comprises alumina. Application example 6: A gas distribution assembly according to Application Example 1, wherein the carrier ring comprises the same material as the gas plate. Application example 7: A gas distribution assembly according to Application Example 1, wherein the carrier ring is made of a material having the same CTE as the gas plate. Application example 8: 2. The gas distribution assembly of claim 1, wherein the carrier ring has a coating of yttrium oxide. Application example 9: A gas distribution assembly according to Application Example 1, wherein the outer periphery of the carrier ring has an annular groove. Application example 10: A gas distribution assembly as described in Application Example 9, further comprising a lifter ring disposed around the outer periphery of the carrier ring, the lifter ring having an annular protrusion extending inward within the annular groove of the carrier ring. Application example 11: 11. The gas distribution assembly of claim 10, wherein the gas plate is not in direct contact with the lifter ring. Application example 12: A processing chamber including the gas distribution assembly described in Application Example 11, wherein the top of the processing chamber has a recess, the gas distribution assembly is positioned in the recess, and the gas plate is not in direct contact with the processing chamber. Application example 13: 1. A process chamber of a substrate processing system configured to perform transformer coupled plasma processing, the process chamber comprising: a recess defined in an upper portion of the processing chamber; a carrier ring disposed in the recess, the carrier ring having an annular body and a radially inward protrusion, the radially inward protrusion having a first inner diameter, the annular body having a second inner diameter greater than the first inner diameter, the protrusion defining a ledge; and a gas plate disposed on the shelf of the carrier ring, the gas plate having a plurality of holes configured to supply a gas mixture into the interior of the processing chamber; a dielectric window disposed on the gas plate above the gas plate and the carrier ring, the gas plate being supported between the carrier ring and the dielectric window; and Including, the gas plate is not in direct contact with the top of the processing chamber; Processing chamber. Application 14: 14. The processing chamber according to claim 13, wherein the second inner diameter of the annular body is greater than a diameter of the gas plate. Example 15: A processing chamber according to Application Example 13, wherein the second inner diameter of the annular body corresponds to a vertical surface of the radially inner periphery of the shelf portion, and the thickness of the gas plate is greater than the height of the vertical surface. Application 16: 14. The processing chamber according to claim 13, wherein the outer periphery of the carrier ring has an annular groove. Application 17: A processing chamber as described in Application Example 16, further comprising a lifter ring disposed around the outer periphery of the carrier ring, the lifter ring having an annular protrusion extending inward within the annular groove of the carrier ring. Application 18: 18. The processing chamber of claim 17, wherein the gas plate is not in direct contact with the lifter ring.

Claims

1. 1. A gas distribution assembly for a processing chamber of a substrate processing system, the gas distribution assembly comprising: a gas plate having a plurality of holes configured to supply a gas mixture to the interior of the processing chamber; a carrier ring configured to support the gas plate, the carrier ring having an annular body and a radially inward protrusion, the radially inward protrusion having a first inner diameter, the annular body having a second inner diameter greater than the first inner diameter, the radially inward protrusion defining a ledge, the gas plate being disposed on the ledge of the carrier ring; and a dielectric window disposed on the gas plate above the gas plate and the carrier ring, the dielectric window being disposed between the second inner diameter of the carrier ring and an outer periphery of the gas plate with a lateral gap therebetween such that the gas plate is suspended between the carrier ring and the dielectric window; a gas distribution assembly including:

2. The gas distribution assembly of claim 1 , wherein the second inner diameter of the annulus is greater than a diameter of the gas plate.

3. 2. The gas distribution assembly of claim 1, wherein the second inner diameter of the annulus corresponds to a vertical surface of a radially inner periphery of the shelf, and wherein a thickness of the gas plate is greater than a height of the vertical surface.

4. The gas distribution assembly of claim 1 , wherein the carrier ring comprises a ceramic.

5. The gas distribution assembly of claim 1 , wherein the carrier ring comprises alumina.

6. The gas distribution assembly of claim 1 , wherein the carrier ring comprises the same material as the gas plate.

7. The gas distribution assembly of claim 1 , wherein the carrier ring is made of a material having the same CTE as the gas plate.

8. The gas distribution assembly of claim 1 , wherein the carrier ring has a coating of yttrium oxide.

9. The gas distribution assembly of claim 1 , wherein the outer periphery of the carrier ring has an annular groove.

10. 10. The gas distribution assembly of claim 9, further comprising a lifter ring disposed around the outer periphery of the carrier ring, the lifter ring having an annular protrusion extending inwardly within the annular groove of the carrier ring.

11. The gas distribution assembly of claim 10 , wherein the gas plate is not in direct contact with the lifter ring.

12. 12. A processing chamber including the gas distribution assembly of claim 11, wherein an upper portion of the processing chamber has a recess, the gas distribution assembly is disposed in the recess, and the gas plate is not in direct contact with the processing chamber.

13. 1. A process chamber of a substrate processing system configured to perform transformer coupled plasma processing, the process chamber comprising: a recess defined in an upper portion of the processing chamber; a carrier ring disposed in the recess, the carrier ring having an annular body and a radially inward protrusion, the radially inward protrusion having a first inner diameter, the annular body having a second inner diameter greater than the first inner diameter, the protrusion defining a ledge; and a gas plate disposed on the shelf of the carrier ring, the gas plate having a plurality of holes configured to supply a gas mixture into the interior of the processing chamber; a dielectric window disposed on the gas plate above the gas plate and the carrier ring; a lateral gap between the second inner diameter of the carrier ring and an outer periphery of the gas plate such that the gas plate is suspended between the carrier ring and the dielectric window; Including, the gas plate is not in direct contact with the top of the processing chamber; Processing chamber.

14. 14. The processing chamber of claim 13, wherein the second inner diameter of the annulus is greater than a diameter of the gas plate.

15. 14. The processing chamber of claim 13, wherein the second inner diameter of the annular body corresponds to a vertical surface of a radially inner periphery of the shelf, and wherein a thickness of the gas plate is greater than a height of the vertical surface.

16. 14. The processing chamber of claim 13, wherein the outer periphery of the carrier ring comprises an annular groove.

17. 17. The processing chamber of claim 16, further comprising a lifter ring disposed around the outer periphery of the carrier ring, the lifter ring having an annular protrusion extending inward within the annular groove of the carrier ring.

18. 20. The processing chamber of claim 17, wherein the gas plate is not in direct contact with the lifter ring.

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