Processing liquid supply device and substrate processing device

Abstract

To reduce energy required for driving a treatment liquid supply device.SOLUTION: In a treatment liquid supply device 6, after finishing delivering treatment liquid from a first pump part 601, the first pump part 601 and a second pump part 602 are made to communicate with each other by a pump connection switching part 603, and air in the first pump part 601 used for delivering treatment liquid is made to flow into the second pump part 602 whose internal pressure is lower than that of the first pump part 601, so that the delivery of the treatment liquid from the second pump part 602 is started. Then, an air supply source 72 and the second pump part 602 are made to communicate with each other by an air supply switching part 604, and air is supplied from the air supply source 72 to the second pump part 602 to continue the delivery of the treatment liquid from the second pump part 602. Consequently, it is possible to reduce energy required for driving the treatment liquid supply device 6.SELECTED DRAWING: Figure 12

Description

[Technical Field]

[0001] The present invention relates to an air-driven processing liquid supply device that continuously delivers a processing liquid, and to a technique for supplying a processing liquid to a substrate for processing. [Background technology]

[0002] Conventionally, in the manufacturing process of semiconductor substrates (hereinafter simply referred to as "substrates"), various processes are performed on the substrates. For example, in a substrate processing apparatus, a processing liquid such as an etching liquid is supplied to the surface of the substrate to perform the processing. In such substrate processing apparatus, a bellows pump is sometimes used as a pump for supplying the processing liquid (see Patent Documents 1 to 7).

[0003] In the bellows pump of Patent Document 1, pump cases are connected to the left and right sides of a pump head to form two air chambers, and bellows that can expand and contract in the left-right direction are provided inside each air chamber. Compressed air is supplied alternately to the left and right air chambers, causing the two bellows connected by a connecting shaft to repeatedly contract and expand alternately, thereby continuously supplying treatment liquid.

[0004] Specifically, when compressed air is supplied from the air supply device to the left air chamber, the left bellows is compressed, and the processing liquid stored in the bellows is discharged from the pump head. The right bellows, which is connected to the left bellows by the connecting shaft, expands in parallel with the compression of the left bellows. This causes the processing liquid to be sucked into and stored in the right bellows. When the processing liquid is no longer being discharged from the left bellows, the compressed air in the left air chamber is released into the atmosphere outside the bellows pump, and compressed air is supplied from the air supply device to the right air chamber. This causes the right bellows to compress, and the processing liquid stored in the bellows is discharged from the pump head. The left bellows is expanded in parallel with the compression of the right bellows, and the processing liquid is sucked into and stored in the right bellows. When the processing liquid is no longer being discharged from the right bellows, the compressed air in the right air chamber is released into the atmosphere outside the bellows pump, and compressed air is supplied from the air supply device to the left air chamber. In a bellows pump, this operation is repeated. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2011-256830 [Patent Document 2] Japanese Patent Application Laid-Open No. 2007-51563 [Patent Document 3] Japanese Patent Application Laid-Open No. 2006-207410 [Patent Document 4] Japanese Patent Application Laid-Open No. 2004-84486 [Patent Document 5] Japanese Patent Application Laid-Open No. 2001-317449 [Patent Document 6] Japanese Patent Application Publication No. 10-196521 [Patent Document 7] Japanese Patent Application Publication No. 9-170560 Summary of the Invention [Problem to be solved by the invention]

[0006] In the substrate processing apparatus described above, the energy consumed for driving the apparatus includes electricity, water, air, etc. Air accounts for a relatively large proportion of the consumed energy, and in particular, a large amount of air is used to supply the processing liquid by a processing liquid supply device such as a bellows pump. From the viewpoint of reducing energy consumption, the processing liquid supply device is required to reduce the amount of air used.

[0007] The present invention has been made in view of the above-mentioned problems, and has as its object to reduce the energy required to drive a processing liquid supply device. [Means for solving the problem]

[0008] The invention of claim 1 is an air-driven processing liquid supply device that continuously delivers processing liquid, comprising: a first pump unit that alternately sucks in and delivers processing liquid; a second pump unit that, in conjunction with the first pump unit, delivers processing liquid when the first pump unit sucks in processing liquid and sucks in processing liquid when the first pump unit delivers processing liquid; an air supply switching unit that switches the communication destination of an air supply source between the first pump unit and the second pump unit; and a connection state of the first pump unit that can be switched between a pump communication state in which the first pump unit is connected to the second pump unit and an exhaust state in which the first pump unit is connected to an exhaust unit. and a pump connection switching unit that switches a connection state of the second pump unit between the pump connection state in which the second pump unit is connected to the first pump unit and an exhaust state in which the second pump unit is connected to the exhaust unit, and a switching control unit that controls the air supply switching unit and the pump connection switching unit, and after the first pump unit has finished sending out the processing liquid, the air supply switching unit closes the communication between the air supply source and the first pump unit and stops the supply of air from the air supply source to the first pump unit, and the pump connection switching unit connects the first pump unit to the second pump unit, The air in the first pump unit used for discharging the liquid is caused to flow into the second pump unit, which has an internal pressure lower than that of the first pump unit, thereby starting to discharge the treatment liquid from the second pump unit, the air supply switching unit connects the air supply source to the second pump unit, air is supplied from the air supply source to the second pump unit to continue discharging the treatment liquid from the second pump unit, and while the discharging of the treatment liquid from the second pump unit continues, the pump connection switching unit switches the connection state of the first pump unit from the pump connection state to the exhaust state, After the second pump unit has finished discharging the processing liquid, the air supply switching unit closes the communication between the air supply source and the second pump unit, and stops the supply of air from the air supply source to the second pump unit. The pump connection switching unit connects the first pump unit and the second pump unit, and causes the air in the second pump unit used for discharging the processing liquid to flow into the first pump unit, which has an internal pressure lower than that of the second pump unit, thereby starting the discharging of the processing liquid from the first pump unit. The air supply switching unit connects the air supply source and the first pump unit.Air is supplied from the air supply source to the first pump unit to continue the delivery of the treatment liquid from the first pump unit, and the connection state of the second pump unit is switched from the pump communication state to the exhaust state by the pump connection switching unit while the delivery of the treatment liquid from the first pump unit continues. The pump connection switching unit includes a first common pipe extending from the first pump unit, a first inflow / outflow pipe and a first inflow pipe extending in parallel from an end of the first common pipe opposite to the first pump unit, a switching valve to which the first inflow / outflow pipe and the first inflow pipe are respectively connected, a second common pipe extending from the second pump unit, a second inflow / outflow pipe and a second inflow pipe extending in parallel from an end of the second common pipe opposite to the second pump unit and connected to the switching valve, and a valve disposed on the first inflow / outflow pipe and connected to the first common pipe. a first outflow check valve that passes only a flow directed toward the switching valve; a first inflow check valve that is disposed on the first inflow pipe and passes only a flow directed from the switching valve to the first common pipe; a second outflow check valve that is disposed on the second outflow pipe and passes only a flow directed from the second common pipe to the switching valve; a second inflow check valve that is disposed on the second inflow pipe and passes only a flow directed from the switching valve to the second common pipe; and an exhaust pipe that connects the switching valve and the exhaust unit, The switching unit shares the switching valve, the first inflow / outflow pipe, the first common pipe, the second inflow / outflow pipe, and the second common pipe with the pump connection switching unit, and the air supply switching unit further includes a supply source pipe connecting the switching valve and the air supply source, a first supply valve arranged in parallel with the first outflow check valve on the first inflow / outflow pipe, and a second supply valve arranged in parallel with the second outflow check valve on the second inflow / outflow pipe, and after the delivery of the processing liquid from the first pump unit is completed, the communication between the supply source pipe and the first common pipe is established. is closed, the communication between the air supply source and the first pump unit is closed, the supply of air from the air supply source to the first pump unit is stopped, the first inflow / outflow piping and the second inflow piping are communicated by the switching valve, the first pump unit and the second pump unit are communicated via the first common piping, the first inflow / outflow piping, the first outflow check valve, the second inflow piping, the second inflow check valve and the second common piping, and the air in the first pump unit flows into the second pump unit, which has an internal pressure lower than that of the first pump unit,The supply source piping and the second inflow / outflow piping are connected by the switching valve, so that the air supply source and the second pump unit are connected via the supply source piping, the second inflow / outflow piping, the second supply valve, and the second common piping, and air is supplied from the air supply source to the second pump unit, the first inflow / outflow piping and the exhaust piping are connected by the switching valve, so that the first pump unit and the exhaust unit are connected via the first common piping, the first inflow / outflow piping, the first outflow check valve, and the exhaust piping, and air in the first pump unit is discharged to the outside from the exhaust unit, and after the second pump unit has finished sending out the processing liquid, the connection between the supply source piping and the second common piping is closed, so that the connection between the air supply source and the second pump unit is closed and the supply of air from the air supply source to the second pump unit is stopped, and the second inflow / outflow piping and the first inflow piping are connected by the switching valve. By connecting the second pump unit and the first pump unit, the second common pipe, the second inflow / outflow pipe, the second outflow check valve, the first inflow pipe, the first inflow check valve, and the first common pipe, air in the second pump unit flows into the first pump unit, which has a lower internal pressure than the second pump unit, by connecting the supply source pipe and the first inflow / outflow pipe by the switching valve, the air supply source and the first pump unit communicate with each other via the supply source pipe, the first inflow / outflow pipe, the first supply valve, and the first common pipe, air is supplied from the air supply source to the first pump unit, by connecting the second inflow / outflow pipe and the exhaust pipe by the switching valve, the second pump unit and the exhaust unit communicate with each other via the second common pipe, the second inflow / outflow pipe, the second outflow check valve, and the exhaust pipe, and air in the second pump unit is discharged to the outside from the exhaust unit.

[0009] The invention described in claim 2 is the processing liquid supply device described in claim 1, wherein, after the processing liquid has been discharged from the first pump unit, the air supply switching unit connects the air supply source to the second pump unit in parallel with the communication between the first pump unit and the second pump unit by the pump connection switching unit, and after the processing liquid has been discharged from the second pump unit, the air supply switching unit connects the air supply source to the first pump unit in parallel with the communication between the first pump unit and the second pump unit by the pump connection switching unit.

[0011] Claim 3 The invention described in Air-driven system that continuously delivers processing liquid A processing liquid supply device, a first pump unit that alternately sucks and delivers the processing liquid; a second pump unit that, in conjunction with the first pump unit, delivers the processing liquid when the first pump unit sucks the processing liquid and sucks the processing liquid when the first pump unit delivers the processing liquid; an air supply switching unit that switches the communication destination of an air supply source between the first pump unit and the second pump unit; and an air supply switching unit that switches the connection state of the first pump unit between a pump communication state in which the first pump unit is connected to the second pump unit and an exhaust state in which the second pump unit is connected to an exhaust unit, and switches the connection state of the second pump unit between the pump communication state in which the first pump unit is connected to the pump communication state in which the second pump unit is connected to the first pump unit. and a switching control unit that controls the air supply switching unit and the pump connection switching unit, and after the first pump unit has finished delivering the treatment liquid, the air supply switching unit closes the communication between the air supply source and the first pump unit, stops the supply of air from the air supply source to the first pump unit, and the pump connection switching unit connects the first pump unit and the second pump unit, and the air in the first pump unit that has been used to deliver the treatment liquid is supplied to the second pump unit, which has an internal pressure lower than that of the first pump unit. the second pump unit starts to discharge the treatment liquid, the air supply switching unit connects the air supply source to the second pump unit, air is supplied from the air supply source to the second pump unit to continue the discharge of the treatment liquid from the second pump unit, the pump connection switching unit switches the connection state of the first pump unit from the pump connected state to the exhaust state while the discharge of the treatment liquid from the second pump unit continues, and after the discharge of the treatment liquid from the second pump unit is completed, the air supply switching unit connects the air supply source to the second pump unit the communication between the first pump unit and the second pump unit is closed, the supply of air from the air supply source to the second pump unit is stopped, the first pump unit and the second pump unit are connected by the pump connection switching unit, and the air in the second pump unit used for delivering the treatment liquid is caused to flow into the first pump unit, which has an internal pressure lower than that of the second pump unit, thereby starting to deliver the treatment liquid from the first pump unit, the air supply switching unit is connected between the air supply source and the first pump unit, and air is supplied from the air supply source to the first pump unit to continue the delivery of the treatment liquid from the first pump unit,The pump connection switching unit switches the connection state of the second pump unit from the pump communication state to the exhaust state while the first pump unit continues to send out the treatment liquid.The pump connection switching unit includes a first common pipe extending from the first pump unit, a first inflow / outflow pipe and a first inflow pipe extending in parallel from an end of the first common pipe opposite to the first pump unit, a switching valve to which the first inflow / outflow pipe and the first inflow pipe are respectively connected, a second common pipe extending from the second pump unit, a second inflow / outflow pipe and a second inflow pipe extending in parallel from an end of the second common pipe opposite to the second pump unit and connected to the switching valve, a first inflow / outflow valve disposed on the first inflow / outflow pipe, and a switching valve on the first inflow pipe. the first pump section includes a first inlet valve disposed on the second inlet / outlet pipe, a second inlet / outlet valve disposed on the second inlet pipe, and an exhaust pipe connecting the switching valve and the exhaust section; the air supply switching section shares the switching valve, the first inlet / outlet pipe, the first inlet / outlet valve, the first common pipe, the second inlet / outlet pipe, the second inlet / outlet valve, and the second common pipe with the pump connection switching section; the air supply switching section further includes a supply source pipe connecting the switching valve and the air supply source; After the discharge is completed, the communication between the supply source pipe and the first inflow / outflow pipe is closed, thereby closing the communication between the air supply source and the first pump unit, and the supply of air from the air supply source to the first pump unit is stopped. The first inflow / outflow pipe and the second inflow pipe are connected by the switching valve, and the first pump unit and the second pump unit are connected via the first common pipe, the first inflow / outflow pipe, the first inflow / outflow valve, the second inflow pipe, the second inflow valve, and the second common pipe, and the air in the first pump unit is supplied to the first pump unit when the internal pressure is higher than that of the first pump unit. air flows into the second pump section, which is lower than the first pump section; the supply source piping and the second inflow / outflow piping are connected by the switching valve, so that the air supply source and the second pump section are connected via the supply source piping, the second inflow / outflow piping, the second inflow / outflow valve, and the second common piping; air is supplied from the air supply source to the second pump section; the first inflow / outflow piping and the exhaust piping are connected by the switching valve, so that the first pump section and the exhaust section are connected via the first common piping, the first inflow / outflow piping, the first inflow / outflow valve, and the exhaust piping;After the air in the first pump unit is discharged through the exhaust unit and the delivery of the treatment liquid from the second pump unit is completed, the communication between the supply source pipe and the second inflow / outflow pipe is closed, thereby closing the communication between the air supply source and the second pump unit, and the supply of air from the air supply source to the second pump unit is stopped. The second inflow / outflow pipe is communicated with the first inflow pipe by the switching valve, and the second pump unit and the first pump unit are communicated with each other via the second common pipe, the second inflow / outflow pipe, the second inflow / outflow valve, the first inflow pipe, the first inflow valve and the first common pipe, and the air in the second pump unit is discharged through the second pump unit. air flows into the first pump section, which has an internal pressure lower than that of the first pump section, and the supply source piping and the first inflow / outflow piping are connected by the switching valve, so that the air supply source and the first pump section are connected via the supply source piping, the first inflow / outflow piping, the first inflow / outflow valve, and the first common piping, and air is supplied from the air supply source to the first pump section, and the second inflow / outflow piping and the exhaust piping are connected by the switching valve, so that the second pump section and the exhaust section are connected via the second common piping, the second inflow / outflow piping, the second inflow / outflow valve, and the exhaust piping, and the air in the second pump section is discharged via the exhaust section. The invention described in claim 4 is the processing liquid supply device described in claim 3, wherein, after the processing liquid has been discharged from the first pump unit, the air supply switching unit connects the air supply source to the second pump unit in parallel with the communication between the first pump unit and the second pump unit by the pump connection switching unit, and after the processing liquid has been discharged from the second pump unit, the air supply switching unit connects the air supply source to the first pump unit in parallel with the communication between the first pump unit and the second pump unit by the pump connection switching unit.

[0012] The invention described in claim 5 is a substrate processing apparatus for processing a substrate, comprising a substrate holding part for holding a substrate, and a processing liquid supply device described in any one of claims 1 to 4 for supplying a processing liquid to the substrate. [Effects of the Invention]

[0015] In the present invention, the energy required to drive the processing liquid supply device can be reduced. [Brief explanation of the drawings]

[0016] [Figure 1] 1 is a plan view of a substrate processing system including a substrate processing apparatus according to a first embodiment. [Figure 2] FIG. 2 is a side view of the substrate processing apparatus. [Figure 3] FIG. 2 is a diagram illustrating a configuration of a control unit. [Figure 4] FIG. 2 is a block diagram showing the functions of a control unit. [Figure 5] FIG. 2 is a block diagram showing a processing liquid supply unit. [Figure 6] 1 is a flowchart showing a flow of substrate processing. [Figure 7] FIG. 2 is a cross-sectional view showing a processing liquid supply device. [Figure 8] FIG. 3 is a diagram showing a configuration relating to air supply of the processing liquid supply device. [Figure 9] 4 is a flowchart showing the operation of the processing liquid supply device. [Figure 10] 4 is a flowchart showing the operation of the processing liquid supply device. [Figure 11] 4 is a flowchart showing the operation of the processing liquid supply device. [Figure 12] FIG. 10 is a diagram showing the state of the processing liquid supply device during the delivery of the processing liquid. [Figure 13] FIG. 10 is a diagram showing the state of the processing liquid supply device during the delivery of the processing liquid. [Figure 14] FIG. 10 is a diagram showing the state of the processing liquid supply device during the delivery of the processing liquid. [Figure 15] FIG. 10 is a diagram showing the state of the processing liquid supply device during the delivery of the processing liquid. [Figure 16] FIG. 10 is a diagram showing the state of the processing liquid supply device during the delivery of the processing liquid. [Figure 17] FIG. 10 is a diagram showing the state of the processing liquid supply device during the delivery of the processing liquid. [Figure 18] FIG. 4 is a diagram showing the flow rate of air supplied in the processing liquid supply device. [Figure 19] FIG. 10 is a diagram showing the flow rate of air supplied in a treatment liquid supply device of a comparative example. [Figure 20] FIG. 10 is a diagram showing a configuration relating to air supply of a treatment liquid supply device according to a second embodiment. [Figure 21] 4 is a flowchart showing the operation of the processing liquid supply device. [Figure 22] 4 is a flowchart showing the operation of the processing liquid supply device. [Figure 23] 4 is a flowchart showing the operation of the processing liquid supply device. [Figure 24] FIG. 10 is a diagram showing the state of the processing liquid supply device during the delivery of the processing liquid. [Figure 25] FIG. 10 is a diagram showing the state of the processing liquid supply device during the delivery of the processing liquid. [Figure 26] FIG. 10 is a diagram showing the state of the processing liquid supply device during the delivery of the processing liquid. [Figure 27] FIG. 10 is a diagram showing the state of the processing liquid supply device during the delivery of the processing liquid. [Figure 28] FIG. 10 is a diagram showing the state of the processing liquid supply device during the delivery of the processing liquid. [Figure 29] FIG. 10 is a diagram showing the state of the processing liquid supply device during the delivery of the processing liquid. DETAILED DESCRIPTION OF THE INVENTION

[0017] 1 is a schematic plan view showing the layout of a substrate processing system 10 including a substrate processing apparatus according to a first embodiment of the present invention. The substrate processing system 10 processes semiconductor substrates 9 (hereinafter simply referred to as "substrates 9"). The substrate processing system 10 includes an indexer block 101 and a processing block 102 coupled to the indexer block 101.

[0018] The indexer block 101 includes a carrier holding unit 104, an indexer robot 105 (i.e., substrate transport means), and an IR movement mechanism 106. The carrier holding unit 104 holds a plurality of carriers 107, each capable of accommodating a plurality of substrates 9. The plurality of carriers 107 (e.g., FOUPs) are held by the carrier holding unit 104 in a state where they are arranged horizontally in the carrier arrangement direction (i.e., the up-and-down direction in FIG. 1). The IR movement mechanism 106 moves the indexer robot 105 in the carrier arrangement direction. The indexer robot 105 performs an unloading operation to unload the substrates 9 from the carriers 107, and a loading operation to load the substrates 9 into the carriers 107 held by the carrier holding unit 104. The substrates 9 are transported by the indexer robot 105 in a horizontal position.

[0019] On the other hand, the processing block 102 includes a plurality of (e.g., four or more) processing units 108 that process the substrates 9, and a center robot 109 (i.e., substrate transport means). The plurality of processing units 108 are arranged to surround the center robot 109 in a plan view. The plurality of processing units 108 perform various processes on the substrates 9. A substrate processing apparatus, which will be described later, is one of the plurality of processing units 108. The center robot 109 performs a load operation to load the substrates 9 into the processing units 108 and an unload operation to unload the substrates 9 from the processing units 108. Furthermore, the center robot 109 transports the substrates 9 between the plurality of processing units 108. The substrates 9 are transported in a horizontal position by the center robot 109. The center robot 109 receives the substrates 9 from the indexer robot 105 and passes the substrates 9 to the indexer robot 105.

[0020] Fig. 2 is a side view showing the configuration of the substrate processing apparatus 1. The substrate processing apparatus 1 is a single-wafer type apparatus that processes substrates 9 one by one. The substrate processing apparatus 1 performs liquid processing by supplying a processing liquid to the substrates 9. Fig. 2 shows a cross section of part of the configuration of the substrate processing apparatus 1.

[0021] The substrate processing apparatus 1 includes a substrate holding unit 31, a substrate rotation mechanism 33, a cup unit 4, a processing liquid supply unit 5, a control unit 8, and a chamber 11. The substrate holding unit 31, the substrate rotation mechanism 33, the cup unit 4, etc. are housed in the internal space of the chamber 11. An airflow forming unit 12 is provided in the canopy of the chamber 11, and supplies gas to the internal space to form a downward airflow (so-called downflow). For example, an FFU (fan filter unit) is used as the airflow forming unit 12. The control unit 8 is disposed outside the chamber 11 and controls the substrate holding unit 31, the substrate rotation mechanism 33, the processing liquid supply unit 5, etc.

[0022] As shown in FIG. 3 , the control unit 8 is, for example, a typical computer system including a processor 81, a memory 82, an input / output unit 83, and a bus 84. The bus 84 is a signal circuit connecting the processor 81, the memory 82, and the input / output unit 83. The memory 82 stores programs and various information. The processor 81 executes various processes (e.g., numerical calculations) using the memory 82 and other components in accordance with the programs and other components stored in the memory 82. The input / output unit 83 includes a keyboard 85 and a mouse 86 for receiving input from an operator, a display 87 for displaying output and other components from the processor 81, and a transmitter for transmitting output and other components from the processor 81. The control unit 8 may be a programmable logic controller (PLC), a circuit board, or the like. The control unit 8 may include any two or more components of a computer system, a PLC, a circuit board, or the like.

[0023] 4 is a block diagram showing functions realized by the control unit 8. The control unit 8 includes a storage unit 801 and a switching control unit 802. The storage unit 801 is mainly realized by a memory 82 (see FIG. 3), and stores various information related to the substrate processing apparatus 1. The switching control unit 802 is mainly realized by a processor 81 (see FIG. 3), and controls various components such as the valves of the processing liquid supply unit 5.

[0024] The substrate holding unit 31 and substrate rotation mechanism 33 shown in FIG. 2 are each part of a spin chuck that holds and rotates the substrate 9. The substrate holding unit 31 holds the substrate 9 in a horizontal position from below. The substrate holding unit 31 is, for example, a mechanical chuck that mechanically supports the substrate 9. The substrate holding unit 31 includes a base unit 311 and a plurality of chucks 312. The base unit 311 is a substantially disk-shaped member centered on a central axis J1 that faces the up-down direction. The substrate 9 is disposed above the base unit 311 at a distance from the base unit 311.

[0025] The multiple chucks 312 are arranged on the outer periphery of the upper surface of the base portion 311 in a circumferential direction (hereinafter simply referred to as the "circumferential direction") centered on the central axis J1. The multiple chucks 312 are arranged, for example, at approximately equal angular intervals in the circumferential direction. In the substrate holding portion 31, the multiple chucks 312 hold the outer edge of the substrate 9. Note that the substrate holding portion 31 may be a chuck with another structure, such as a vacuum chuck.

[0026] The substrate rotation mechanism 33 is disposed below the substrate holding unit 31. The substrate rotation mechanism 33 rotates the substrate 9 together with the substrate holding unit 31 around the central axis J1. The substrate rotation mechanism 33 includes a shaft 331 and a motor 332. The shaft 331 is a substantially columnar or cylindrical member centered on the central axis J1. The shaft 331 extends in the vertical direction and is connected to the center of the lower surface of the base unit 311 of the substrate holding unit 31. The motor 332 is an electric rotary motor that rotates the shaft 331. The substrate rotation mechanism 33 may be a motor having another structure (for example, a hollow motor, etc.).

[0027] The processing liquid supply unit 5 supplies a processing liquid to the substrate 9 to perform liquid processing on the substrate 9. The processing liquid supply unit 5 includes a nozzle 51. The nozzle 51 ejects the processing liquid from above the substrate 9 toward the upper main surface (hereinafter also referred to as "upper surface 91") of the substrate 9. The processing liquid is, for example, an etching liquid used in etching the substrate 9. The supply of the etching liquid to the nozzle 51 is controlled with high precision, for example, so that the etching liquid is supplied to the substrate 9 at a predetermined supply amount. Note that the nozzle 51 may eject a chemical liquid other than the etching liquid, or various types of processing liquids other than the chemical liquid (for example, a rinse liquid) may be ejected.

[0028] The processing liquid supply unit 5 may include a nozzle movement mechanism that moves the nozzle 51. The nozzle movement mechanism moves the nozzle 51 approximately horizontally, for example, between a supply position above the substrate 9 and a retracted position that is further outward from the outer edge of the substrate 9 in a radial direction (hereinafter simply referred to as the "radial direction") about the central axis J1. The nozzle movement mechanism includes, for example, an electric linear motor, an air cylinder, or a ball screw and an electric rotary motor. Furthermore, in addition to the nozzle 51, the processing liquid supply unit 5 may include another nozzle that ejects onto the substrate 9 a processing liquid of a different type from the processing liquid ejected from the nozzle 51.

[0029] 5 is a block diagram schematically illustrating the configuration of the processing liquid supply unit 5 of the substrate processing apparatus 1. In addition to the nozzle 51 described above, the processing liquid supply unit 5 includes a pipe 52 and a processing liquid supply device 6. The pipe 52 connects the nozzle 51, the processing liquid supply device 6, and a processing liquid supply source 71. The processing liquid supply device 6 is disposed on the pipe 52 between the nozzle 51 and the processing liquid supply source 71. The processing liquid supply device 6 is an air-driven pump device that sucks the processing liquid stored in the processing liquid supply source 71 and continuously delivers it to the nozzle 51. The processing liquid delivered from the processing liquid supply device 6 to the nozzle 51 is supplied to the upper surface 91 of the substrate 9, as described above.

[0030] 6 is a flowchart showing the flow of processing of a substrate 9 in the substrate processing apparatus 1 shown in FIG. In the substrate processing apparatus 1, first, the substrate 9 is loaded and held substantially horizontally by the substrate holder 31 (step S11). Next, the processing liquid is continuously delivered from the processing liquid supply device 6 and supplied to the upper surface 91 of the substrate 9 via the nozzle 51 (step S12). In this way, the liquid processing of the substrate 9 is performed. Note that in step S12, the processing liquid may be supplied to the substrate 9 while it is being rotated by the substrate rotation mechanism 33, or may be supplied to the substrate 9 which is stationary and not rotating.

[0031] FIG. 7 is a cross-sectional view showing the configuration of the processing liquid supply device 6. The processing liquid supply device 6 is a bellows pump having a pair of interlocking bellows. FIG. 7 shows the processing liquid supply device 6 in a stopped state. In the following description, the up-down direction and the left-right direction in FIG. 7 will also be simply referred to as the "up-down direction" and the "left-right direction." The up-down direction in FIG. 7 may or may not coincide with the direction of gravity in the actual substrate processing apparatus 1. Furthermore, the left-right direction in FIG. 7 may or may not coincide with the horizontal direction in the actual substrate processing apparatus 1.

[0032] The treatment liquid supplying device 6 includes a first bellows 61 , a second bellows 62 , a pump head 63 , a first pump case 64 , a second pump case 65 , a connecting member 66 , a suction valve unit 67 , and a delivery valve unit 68 .

[0033] The pump head 63 is a generally cylindrical member extending vertically. The pump head 63 is formed of a fluororesin, such as PTFE (polytetrafluoroethylene) or PFA (perfluoroalkoxyalcan). A suction port 631 is provided at the bottom of the pump head 63. The suction port 631 is connected to the processing liquid supply source 71 via piping 52 (see FIG. 5). A suction flow path 633 extending from the suction port 631 is provided inside the pump head 63. The suction flow path 633 is connected to the first bellows 61 and the second bellows 62 via suction valve units 67 on both the left and right sides of the pump head 63. A delivery port 632 is provided at the top end of the pump head 63. The delivery port 632 is connected to the nozzle 51 via piping 52 (see FIG. 5). A delivery flow path 634 extending from the delivery port 632 is provided inside the pump head 63. The suction passage 643 is connected to the first bellows 61 and the second bellows 62 via the delivery valve units 68 on both the left and right sides of the pump head 63 .

[0034] The first pump case 64 and the second pump case 65 are attached to both left and right sides of the pump head 63. The first pump case 64 and the second pump case 65 each have an internal space. The internal space of the first pump case 64 houses the first bellows 61, and the internal space of the second pump case 65 houses the second bellows 62. The first pump case 64 and the second pump case 65 have substantially the same shape and are arranged substantially symmetrically with respect to a center line extending in the up-down direction of the pump head 63 in a plan view. The first bellows 61 and the second bellows 62 have substantially the same shape and are arranged substantially symmetrically with respect to the center line of the pump head 63 in a plan view. The first pump case 64 and the second pump case 65 may be separate components or may be a continuous component.

[0035] The first pump case 64 includes a case body 641, a case lid 642, and an actuation plate 643. The case body 641 is a generally cylindrical member extending in the left-right direction and is fixed to the left side of the pump head 63 in FIG. 7. The case lid 642 is a generally flat member extending generally perpendicular to the left-right direction and closes the opening at the left end of the case body 641 (i.e., the end opposite the pump head 63). The joints between the case body 641 and the pump head 63 and between the case body 641 and the case lid 642 are airtightly sealed. As a result, the space surrounded by the case body 641, the case lid 642, and the pump head 63 forms an airtight first air chamber 640.

[0036] The actuating plate 643 is a generally flat plate-shaped member that extends generally perpendicular to the left-right direction, and is disposed inside the first air chamber 640 so as to be movable in the left-right direction. The actuating plate 643 divides the internal space of the first air chamber 640 into two spaces, left and right. In the following description, the space on the left side of the actuating plate 643 (i.e., the space between the actuating plate 643 and the case lid 642) will be referred to as the "actuating gas chamber 644," and the space on the right side of the actuating plate 643 will be referred to as the "pump chamber 645." The actuating gas chamber 644 and the pump chamber 645 are separated by the actuating plate 643.

[0037] An air supply / exhaust port 646 is provided in the case lid 642, and air is supplied to and exhausted from the working gas chamber 644 of the first air chamber 640 via the air supply / exhaust port 646. The case lid 642 is also provided with a proximity sensor 647, which detects the operating plate 643, thereby detecting the expansion / contraction state of the first bellows 61.

[0038] The first bellows 61 is housed in the pump chamber 645 of the first air chamber 640. The first bellows 61 is a generally cylindrical member that extends in the left-right direction and has a bottom and a closed left end. The first bellows 61 is formed of, for example, a fluororesin such as PTFE or PFA. The right end (i.e., the opening) of the first bellows 61 is connected to the pump head 63. The side wall of the first bellows 61 has a bellows structure, and the first bellows 61 expands and contracts in the left-right direction from the right end fixed to the pump head 63 as a base point. The above-mentioned operating plate 643 is fixed to the left end of the first bellows 61.

[0039] When compressed air is supplied to the working gas chamber 644 from the above-mentioned supply / exhaust port 646, the working plate 643 moves rightward and the first bellows 61 is compressed in the left-right direction. As a result, the processing liquid in the first bellows 61 is sent to the pump head 63. In the processing liquid supplying device 6, the first bellows 61 and the first pump case 64 form a first pump section 601 that sends out the processing liquid.

[0040] The second pump case 65 includes a case body 651, a case lid 652, and an actuation plate 653. The case body 651 is a generally cylindrical member extending in the left-right direction and is fixed to the right side of the pump head 63 in FIG. 7. The case lid 652 is a generally flat member extending generally perpendicular to the left-right direction and closes the opening at the right end of the case body 651 (i.e., the end opposite the pump head 63). The joints between the case body 651 and the pump head 63 and between the case body 651 and the case lid 652 are hermetically sealed. As a result, the space surrounded by the case body 651, the case lid 652, and the pump head 63 forms an airtight second air chamber 650.

[0041] The actuating plate 653 is a generally flat plate-shaped member that extends generally perpendicular to the left-right direction, and is disposed inside the second air chamber 650 so as to be movable in the left-right direction. The actuating plate 653 divides the internal space of the second air chamber 650 into two spaces, left and right. In the following description, the space to the right of the actuating plate 653 (i.e., the space between the actuating plate 653 and the case lid 652) will be referred to as the "actuating gas chamber 654," and the space to the left of the actuating plate 653 will be referred to as the "pump chamber 655." The actuating gas chamber 654 and the pump chamber 655 are separated by the actuating plate 653.

[0042] An air supply / exhaust port 656 is provided in the case lid 652, and air is supplied to and exhausted from the working gas chamber 654 of the second air chamber 650 via the air supply / exhaust port 656. A proximity sensor 657 is also provided in the case lid 652, and the expansion / contraction state of the second bellows 62 is detected by detecting the operating plate 653 with the proximity sensor 657.

[0043] The second bellows 62 is housed in the pump chamber 655 of the second air chamber 650. The second bellows 62 is a generally cylindrical member that extends in the left-right direction and has a bottom and a closed right end. The second bellows 62 is formed of, for example, a fluororesin such as PTFE or PFA. The left end (i.e., the opening) of the second bellows 62 is connected to the pump head 63. The side wall of the second bellows 62 has a bellows structure, and the second bellows 62 expands and contracts in the left-right direction from the left end fixed to the pump head 63 as a base point. The above-mentioned operating plate 653 is fixed to the right end of the second bellows 62.

[0044] When compressed air is supplied to the working gas chamber 654 from the above-mentioned supply / exhaust port 656, the working plate 653 moves leftward and the second bellows 62 is compressed in the left-right direction. As a result, the processing liquid in the second bellows 62 is delivered to the pump head 63. In the processing liquid supplying device 6, the second bellows 62 and the second pump case 65 form a second pump section 602 that delivers the processing liquid.

[0045] In the treatment liquid supplying apparatus 6, the operating plate 643 of the first pump section 601 and the operating plate 653 of the second pump section 602 are connected by a connecting member 66. The connecting member 66 is, for example, a substantially rod-shaped tie rod extending substantially parallel to the left and right directions. The first bellows 61 and the second bellows 62 are linked by the connecting member 66 so that when one of the first bellows 61 and the second bellows 62 expands, the other bellows contracts, and when one bellows contracts, the other bellows expands.

[0046] The suction valve unit 67 includes two check valves 671 and 672. The check valve 671 is located on the left side of the pump head 63 and connects the suction passage 633 inside the pump head 63 to the internal space of the first bellows 61. The check valve 672 is located on the right side of the pump head 63 and connects the suction passage 633 inside the pump head 63 to the internal space of the second bellows 62. When the first bellows 61 is expanded, the check valve 671 opens, connecting the internal space of the first bellows 61 to the suction passage 633, allowing the treatment liquid to be sucked into the first bellows 61. When the first bellows 61 is compressed, the check valve 671 closes, isolating the internal space of the first bellows 61 from the suction passage 633 and preventing backflow of the treatment liquid from the first bellows 61 to the suction passage 633. Furthermore, when the second bellows 62 is expanded, the check valve 672 is opened, and the internal space of the second bellows 62 is connected to the suction flow path 633, allowing the processing liquid to be sucked into the second bellows 62. When the second bellows 62 is compressed, the check valve 672 is closed, and the internal space of the second bellows 62 is isolated from the suction flow path 633, preventing the processing liquid from flowing back from the second bellows 62 to the suction flow path 633.

[0047] The delivery valve unit 68 includes two check valves 681 and 682. The check valve 681 is located on the left side of the pump head 63 and connects the delivery flow path 634 inside the pump head 63 to the internal space of the first bellows 61. The check valve 682 is located on the right side of the pump head 63 and connects the delivery flow path 634 inside the pump head 63 to the internal space of the second bellows 62. When the first bellows 61 is compressed, the check valve 681 opens, connecting the internal space of the first bellows 61 to the delivery flow path 634, allowing the treatment liquid to be delivered from the first bellows 61 to the delivery flow path 634. When the first bellows 61 is expanded, the check valve 681 closes, isolating the internal space of the first bellows 61 from the delivery flow path 634 and preventing backflow of the treatment liquid from the delivery flow path 634 into the first bellows 61. Furthermore, when the second bellows 62 is compressed, the check valve 682 is opened, and the internal space of the second bellows 62 is connected to the delivery flow path 634, allowing the processing liquid to be delivered from the second bellows 62 to the delivery flow path 634. When the second bellows 62 is expanded, the check valve 682 is closed, and the internal space of the second bellows 62 is isolated from the delivery flow path 634, preventing the processing liquid from flowing back from the delivery flow path 634 into the second bellows 62.

[0048] In the processing liquid supplying apparatus 6, when compressed air is supplied to the working gas chamber 644 of the first pump section 601, the working plate 643 moves rightward to compress the first bellows 61, and the working plate 653 in the second pump section 602 also moves rightward to expand the second bellows 62. As a result, the processing liquid previously stored in the first bellows 61 is delivered to the delivery flow path 634 of the pump head 63 via the check valve 681 of the delivery valve unit 68, and is delivered from the delivery port 632 toward the nozzle 51 (see FIG. 5). In addition, the processing liquid supplied from the processing liquid supply source 71 to the suction flow path 633 via the suction port 631 of the pump head 63 is sucked into the second bellows 62 via the check valve 672 of the suction valve unit 67 and stored therein. In the second pump section 602, when the working plate 653 moving to the right is detected by the proximity sensor 657, the supply of compressed air to the first pump section 601 is stopped and compressed air is supplied to the working gas chamber 654 of the second pump section 602.

[0049] Then, the actuating plate 653 moves leftward to compress the second bellows 62, and the actuating plate 643 also moves leftward in the first pump section 601 to expand the first bellows 61. As a result, the treatment liquid stored in the second bellows 62 is delivered to the delivery flow path 634 of the pump head 63 via the check valve 682 of the delivery valve unit 68 and delivered from the delivery port 632 toward the nozzle 51. In addition, the treatment liquid supplied from the treatment liquid supply source 71 to the suction flow path 633 via the suction port 631 of the pump head 63 is sucked into the first bellows 61 via the check valve 671 of the suction valve unit 67 and stored therein. In the first pump section 601, when the proximity sensor 647 detects that the actuating plate 643 has moved leftward, the supply of compressed air to the second pump section 602 is stopped and compressed air is supplied to the working gas chamber 644 of the first pump section 601.

[0050] As described above, in the processing liquid supplying device 6, the first pump unit 601 alternately sucks and delivers the processing liquid. Furthermore, the second pump unit 602, in conjunction with the first pump unit 601, delivers the processing liquid when the first pump unit 601 sucks the processing liquid, and sucks the processing liquid when the first pump unit 601 delivers the processing liquid. This allows the processing liquid to be continuously supplied from the processing liquid supplying device 6 to the nozzle 51.

[0051] FIG. 8 is a diagram showing a configuration for supplying compressed air (hereinafter also simply referred to as "air") to the first air chamber 640 and the second air chamber 650 in the processing liquid supplying apparatus 6. FIG. 8 schematically shows the structure of the processing liquid supplying apparatus 6 (the same applies to FIGS. 12 to 17, 20, and 24 to 29). The processing liquid supplying apparatus 6 further includes a first common pipe 611, a first inflow / outflow pipe 612, a first outflow check valve 613, a first supply valve 614, a first inflow pipe 615, and a first inflow check valve 616. The processing liquid supplying apparatus 6 further includes a second common pipe 621, a second inflow / outflow pipe 622, a second outflow check valve 623, a second supply valve 624, a second inflow pipe 625, and a second inflow check valve 626. The processing liquid supply device 6 further includes a switching valve 691 , a supply source pipe 692 , an exhaust pipe 693 , and an exhaust valve 694 .

[0052] The first outflow check valve 613, the first inflow check valve 616, the second outflow check valve 623, and the second inflow check valve 626 are, for example, normal check valves. The first supply valve 614 and the second supply valve 624 are, for example, needle valves. The switching valve 691 is, for example, an electromagnetic valve, and the switching valve 691 connects and isolates a plurality of pipes (i.e., flow paths). The exhaust valve 694 is, for example, an electromagnetic valve. The switching valve 691 and the exhaust valve 694 may each be an air-driven valve.

[0053] In the processing liquid supplying apparatus 6, a pump connection switching unit 603 that switches the connection states (to be described later) of the first pump unit 601 and the second pump unit 602 is configured by the first common pipe 611, the first inflow / outflow pipe 612, the first outflow check valve 613, the first inflow pipe 615, the first inflow check valve 616, the second common pipe 621, the second inflow / outflow pipe 622, the second outflow check valve 623, the second inflow pipe 625, the second inflow check valve 626, the switching valve 691, the exhaust pipe 693, and the exhaust valve 694. The switching valve 691 and the exhaust valve 694 are controlled by a switching control unit 802 (see FIG. 4) of the control unit 8.

[0054] In the processing liquid supply apparatus 6, the first common pipe 611, the first inflow / outflow pipe 612, the first supply valve 614, the second common pipe 621, the second inflow / outflow pipe 622, the second supply valve 624, the switching valve 691, and the supply source pipe 692 constitute an air supply switching unit 604 that switches the communication destination of the air supply source 72 between the first pump unit 601 and the second pump unit 602. In other words, the air supply switching unit 604 shares the first common pipe 611, the first inflow / outflow pipe 612, the second common pipe 621, the second inflow / outflow pipe 622, and the switching valve 691 with the pump connection switching unit 603.

[0055] The first common pipe 611 is connected to the supply / exhaust port 646 of the first pump case 64, and extends from the first pump unit 601 toward the switching valve 691. The first inlet / outlet pipe 612 and the first inlet pipe 615 extend in parallel from the end of the first common pipe 611 opposite the first pump unit 601, and are each connected to the switching valve 691. The first outlet check valve 613 is disposed on the first inlet / outlet pipe 612. The first outlet check valve 613 allows only the processing liquid flowing from the first common pipe 611 toward the switching valve 691 to pass on the first inlet / outlet pipe 612, and prevents the processing liquid flowing from the switching valve 691 toward the first common pipe 611 from passing through. The first supply valve 614 is disposed on the first inlet / outlet pipe 612 in parallel with the first outlet check valve 613. The first inlet check valve 616 is disposed on the first inlet pipe 615. The first inlet check valve 616 allows only the processing liquid flowing from the switching valve 691 toward the first common pipe 611 to pass through on the first inlet pipe 615, and prevents the processing liquid flowing from the first common pipe 611 toward the switching valve 691 from passing through.

[0056] The second common pipe 621 is connected to the supply / exhaust port 656 of the second pump case 65, and extends from the second pump unit 602 toward the switching valve 691. The second inlet / outlet pipe 622 and the second inlet pipe 625 extend in parallel from the end of the second common pipe 621 opposite the second pump unit 602, and are each connected to the switching valve 691. The second outlet check valve 623 is disposed on the second inlet / outlet pipe 622. The second outlet check valve 623 allows only the processing liquid flowing from the second common pipe 621 toward the switching valve 691 to pass on the second inlet / outlet pipe 622, and prevents the processing liquid flowing from the switching valve 691 toward the second common pipe 621 from passing through. The second supply valve 624 is disposed on the second inlet / outlet pipe 622 in parallel with the second outlet check valve 623. The second inlet check valve 626 is disposed on the second inlet pipe 625. The second inlet check valve 626 allows only the processing liquid flowing from the switching valve 691 toward the second common pipe 621 to pass through on the second inlet pipe 625, and prevents the processing liquid flowing from the second common pipe 621 toward the switching valve 691 from passing through.

[0057] The supply source pipe 692 connects the switching valve 691 and the air supply source 72. The air supply source 72 selectively supplies air, which powers the processing liquid supply device 6, to the first air chamber 640 and the second air chamber 650. The destination of the air supplied from the air supply source 72 is determined by a switching control unit 802 (see FIG. 4 ) controlling the switching valve 691 and the like. The exhaust pipe 693 connects the switching valve 691 and an exhaust unit 695 via an exhaust valve 694. The exhaust unit 695 is, for example, a pipe connected to the exhaust valve 694 from the opposite side of the exhaust pipe 693. When the exhaust valve 694 is opened, the air used to drive the processing liquid supply device 6 can be exhausted from the exhaust unit 695 to the outside of the processing liquid supply device 6. The outside of the processing liquid supply device 6 is a space having a pressure equal to or higher than atmospheric pressure, such as the air atmosphere. Furthermore, when the exhaust valve 694 is closed, the air cannot be discharged to the outside from the processing liquid supplying device 6. The structure of the exhaust part 695 is not limited to the above example, and may be modified in various ways.

[0058] Next, detailed operations of the processing liquid supply apparatus 6 when discharging the processing liquid will be described. FIG. 9 is a flowchart showing the flow of operations of the processing liquid supply apparatus 6. FIG. 9 shows operations of the processing liquid supply apparatus 6 during processing of the substrate 9 in the above-mentioned step S12 (see FIG. 6). In the processing liquid supply apparatus 6, after the first pump unit 601 has finished discharging the processing liquid, the second pump unit 602 discharges the processing liquid (step S21). Subsequently, after the second pump unit 602 has finished discharging the processing liquid, the first pump unit 601 discharges the processing liquid (step S22). Then, steps S21 and S22 are alternately repeated until processing of the substrate 9 is completed (step S23). In this way, the processing liquid is continuously supplied from the processing liquid supply apparatus 6 to the substrate 9. That is, the above-mentioned step S12 comprises steps S21 to S23. In the processing of the substrate 9 in the substrate processing apparatus 1, between steps S21 and S22, it is determined whether the processing of the substrate 9 has been completed, and if it has not been completed, step S22 is executed, and if it has been completed, the processing operation in the substrate processing apparatus 1 may be stopped.

[0059] FIG. 10 is a diagram showing a detailed operational flow of the processing liquid supply apparatus 6 in the above-mentioned step S21. That is, steps S211 to S214 shown in FIG. 10 are included in step S21. FIG. 11 is a diagram showing a detailed operational flow of the processing liquid supply apparatus 6 in the above-mentioned step S22. That is, steps S221 to S224 shown in FIG. 11 are included in step S22. FIGS. 12 to 17 are diagrams showing the processing liquid supply apparatus 6 while it is discharging the processing liquid. In FIGS. 12 to 17, the flow of processing liquid and the flow of air are indicated by thick arrows. In addition, in FIGS. 12 to 17, when the exhaust valve 694 is open, the triangular part of the valve is shown filled in, and when it is closed, the triangular part of the valve is shown white.

[0060] 12 shows a state immediately after the first pump unit 601 has finished discharging the processing liquid. When the first pump unit 601 has finished discharging the processing liquid, the switching valve 691 is controlled by the switching control unit 802 (see FIG. 4) to close the communication between the first common pipe 611, the first inflow / outflow pipe 612, and the first inflow pipe 615 and the supply source pipe 692. This closes the communication between the air supply source 72 and the first pump unit 601, and stops the supply of air from the air supply source 72 to the first pump unit 601 (step S211). In step S211, the switching valve 691 functions as a part of the air supply switching unit 604.

[0061] Next, the switching valve 691 is controlled by the switching control unit 802 to connect the first inflow / outflow pipe 612 and the second inflow pipe 625. This connects the first pump unit 601 and the second pump unit 602. As shown in FIG. 12 , air in the working gas chamber 644 of the first pump unit 601 (i.e., the air used to deliver the processing liquid from the first bellows 61) flows into the working gas chamber 654 of the second pump unit 602, which has a lower internal pressure than the working gas chamber 644 of the first pump unit 601, via the first common pipe 611, the first inflow / outflow pipe 612, the first outflow check valve 613, the switching valve 691, the second inflow pipe 625, the second inflow check valve 626, and the second common pipe 621. This compresses the second bellows 62, and starts delivering the processing liquid stored in the second bellows 62 (step S212). In step S212, the switching valve 691 functions as a part of the pump connection switching unit 603.

[0062] The processing liquid delivered from the second bellows 62 is delivered to the pump head 63 via the check valve 682 of the delivery valve unit 68 (see FIG. 7), and is delivered from the delivery port 632 to the nozzle 51 (see FIG. 1). Meanwhile, in the first pump section 601, the first bellows 61 is expanded in conjunction with the compression of the second bellows 62, and the processing liquid is sucked into the first bellows 61 via the check valve 671 of the suction valve unit 67 (see FIG. 7) and stored therein.

[0063] In the processing liquid supply apparatus 6, after step S212, while the processing liquid is being delivered from the second bellows 62 (i.e., while the second bellows 62 is being compressed), the switching valve 691 is controlled by the switching control unit 802, and the supply source piping 692 and the second inflow / outflow piping 622 are connected to each other, as shown in FIG. 13 . This connects the air supply source 72 and the second pump unit 602. Air delivered from the air supply source 72 is supplied to the working gas chamber 654 of the second pump unit 602 via the supply source piping 692, the second inflow / outflow piping 622, the second supply valve 624, and the second common piping 621. As described above, the air in the working gas chamber 644 of the first pump unit 601 is also supplied to the working gas chamber 654. This allows the second bellows 62 to continue to be compressed, and the processing liquid to be continuously delivered from the second pump unit 602 (step S213). In step S213, the switching valve 691 functions as a part of the air supply switching unit 604.

[0064] In the processing liquid supplying device 6, when the internal pressure of the working gas chamber 644 of the first pump section 601 becomes equal to or lower than the internal pressure of the working gas chamber 654 of the second pump section 602, the inflow of air from the first pump section 601 to the second pump section 602 stops. Even after the inflow of air from the first pump section 601 to the second pump section 602 stops, the supply of air from the air supply source 72 to the second pump section 602 continues, and the compression of the second bellows 62 and the delivery of the processing liquid from the second pump section 602, as well as the expansion of the first bellows 61 and the suction of the processing liquid by the first pump section 601, continue. Note that the second inlet check valve 626 prevents backflow of air from the second common pipe 621 to the second inlet pipe 625.

[0065] When the inflow of air from the first pump unit 601 to the second pump unit 602 stops, the switching control unit 802 controls the switching valve 691 to connect the first inflow / outflow piping 612 and the exhaust piping 693, as shown in Fig. 14. The switching control unit 802 also controls the exhaust valve 694 to open it. This connects the first pump unit 601 and the exhaust unit 695. That is, the connection state of the first pump unit 601 is switched from a pump connection state in which the first pump unit 601 is connected to the second pump unit 602 to an exhaust state in which the first pump unit 601 is connected to the exhaust unit 695.

[0066] The air in the working gas chamber 644 of the first pump unit 601 flows through the first common pipe 611, the first inlet / outlet pipe 612, the first outlet check valve 613, the switching valve 691, the exhaust pipe 693, and the exhaust valve 694 to the exhaust unit 695, and is discharged from the exhaust unit 695 to the outside (i.e., to the atmosphere outside the processing liquid supplying apparatus 6) (step S214). In step S214, the switching valve 691 functions as a part of the pump connection switching unit 603.

[0067] In the processing liquid supply device 6, the connection state of the first pump section 601 may be switched from a pump connection state in which it is connected to the second pump section 602 to an exhaust state in which it is connected to the exhaust section 695, and the air in the first pump section 601 may be discharged to the outside, before the internal pressure of the working gas chamber 644 of the first pump section 601 becomes equal to or lower than the internal pressure of the working gas chamber 654 of the second pump section 602.

[0068] When the delivery of the processing liquid from the second pump unit 602 is completed, the switching valve 691 is controlled by the switching control unit 802 (see FIG. 4), and as shown in FIG. 15, the communication between the second common pipe 621, the second inflow / outflow pipe 622, and the second inflow pipe 625 and the supply source pipe 692 is closed. This closes the communication between the air supply source 72 and the second pump unit 602, and stops the supply of air from the air supply source 72 to the second pump unit 602 (step S221). In step S221, the switching valve 691 functions as a part of the air supply switching unit 604.

[0069] Next, the switching valve 691 is controlled by the switching control unit 802 to connect the second inflow / outflow pipe 622 and the first inflow pipe 615. This connects the second pump unit 602 and the first pump unit 601. The air in the working gas chamber 654 of the second pump unit 602 (i.e., the air used to send out the processing liquid from the second bellows 62) flows into the working gas chamber 644 of the first pump unit 601, which has an internal pressure lower than that of the working gas chamber 654 of the second pump unit 602, via the second common pipe 621, the second inflow / outflow pipe 622, the second outflow check valve 623, the switching valve 691, the first inflow pipe 615, the first inflow check valve 616, and the first common pipe 611. This compresses the first bellows 61, and starts sending out the processing liquid stored in the first bellows 61 (step S222). In step S222, the switching valve 691 functions as a part of the pump connection switching unit 603.

[0070] The processing liquid delivered from the first bellows 61 is delivered to the pump head 63 via the check valve 681 of the delivery valve unit 68 (see FIG. 7), and is then delivered from the delivery port 632 to the nozzle 51 (see FIG. 1). Meanwhile, in the second pump section 602, the second bellows 62 is expanded in conjunction with the compression of the first bellows 61, and the processing liquid is sucked into the second bellows 62 via the check valve 672 of the suction valve unit 67 (see FIG. 7) and stored therein.

[0071] In the processing liquid supply apparatus 6, after step S222, and while the processing liquid is being delivered from the first bellows 61 (i.e., while the first bellows 61 is being compressed), the switching valve 691 is controlled by the switching control unit 802, and the supply source piping 692 and the first inflow / outflow piping 612 are connected to each other, as shown in FIG. 16 . This connects the air supply source 72 and the first pump unit 601. Air delivered from the air supply source 72 is supplied to the working gas chamber 644 of the first pump unit 601 via the supply source piping 692, the first inflow / outflow piping 612, the first supply valve 614, and the first common piping 611. As described above, the air in the working gas chamber 654 of the second pump unit 602 is also supplied to the working gas chamber 644. This continues the compression of the first bellows 61, and the delivery of the processing liquid from the first pump unit 601 continues (step S223). In step S223, the switching valve 691 functions as a part of the air supply switching unit 604.

[0072] In the processing liquid supplying device 6, when the internal pressure of the working gas chamber 654 of the second pump section 602 becomes equal to or lower than the internal pressure of the working gas chamber 644 of the first pump section 601, the inflow of air from the second pump section 602 to the first pump section 601 stops. Even after the inflow of air from the second pump section 602 to the first pump section 601 stops, the supply of air from the air supply source 72 to the first pump section 601 continues, and the compression of the first bellows 61, the delivery of the processing liquid from the first pump section 601, and the expansion of the second bellows 62, and the suction of the processing liquid by the second pump section 602 continue. Note that the first inlet check valve 616 prevents backflow of air from the first common pipe 611 to the first inlet pipe 615.

[0073] When the inflow of air from the second pump unit 602 to the first pump unit 601 stops, the switching control unit 802 controls the switching valve 691 to connect the second inflow / outflow piping 622 and the exhaust piping 693, as shown in Fig. 17 . The switching control unit 802 also controls and opens the exhaust valve 694. This connects the second pump unit 602 and the exhaust unit 695. That is, the connection state of the second pump unit 602 is switched from a pump connection state in which the second pump unit 602 is connected to the first pump unit 601 to an exhaust state in which the second pump unit 602 is connected to the exhaust unit 695.

[0074] The air in the working gas chamber 654 of the second pump section 602 flows through the second common pipe 621, the second inlet / outlet pipe 622, the second outlet check valve 623, the switching valve 691, the exhaust pipe 693, and the exhaust valve 694 to the exhaust section 695, and is exhausted from the exhaust section 695 to the outside (i.e., to the atmosphere outside the processing liquid supplying apparatus 6) (step S224). In step S224, the switching valve 691 functions as a part of the pump connection switching section 603.

[0075] In the processing liquid supply device 6, the connection state of the second pump section 602 may be switched from a pump connection state in which it is connected to the first pump section 601 to an exhaust state in which it is connected to the exhaust section 695, and the air in the second pump section 602 may be discharged to the outside before the internal pressure of the working gas chamber 654 of the second pump section 602 becomes lower than the internal pressure of the working gas chamber 644 of the first pump section 601.

[0076] FIG. 18 is a diagram schematically illustrating the supply flow rate of air in the processing liquid supply apparatus 6. The horizontal axis of the graph in FIG. 18 represents the passage of time (i.e., the above-described steps S211 to S214 and S221 to S224), and the vertical axis of the graph represents the supply flow rate of air per unit time. Line 94 in the graph represents the supply flow rate of air supplied from the first pump unit 601 to the second pump unit 602, and line 95 represents the supply flow rate of air supplied from the air supply source 72 to the second pump unit 602. Line 96 in the graph represents the supply flow rate of air supplied from the second pump unit 602 to the first pump unit 601, and line 97 represents the supply flow rate of air supplied from the air supply source 72 to the first pump unit 601. Note that the slopes of lines 94 to 97 in the graph in FIG. 18 do not necessarily coincide with the slopes of the actual supply flow rates. Furthermore, although lines 94 to 97 increase and decrease linearly, this is not limiting.

[0077] 18, during steps S211 to S213, air is supplied from the first pump unit 601 to the second pump unit 602, but air is not supplied from the air supply source 72 to the second pump unit 602. Furthermore, during steps S213 to S214, air is supplied from the air supply source 72 to the second pump unit 602, but air is also supplied from the first pump unit 601 to the second pump unit 602, so the flow rate of air supplied from the air supply source 72 to the second pump unit 602 is relatively small. Then, during steps S214 to S221, air is supplied to the second pump unit 602 only from the air supply source 72.

[0078] Between steps S221 and S223, air is supplied from second pump unit 602 to first pump unit 601, but not from air supply source 72 to first pump unit 601. Between steps S223 and S224, air is supplied from air supply source 72 to first pump unit 601, but air is also supplied from second pump unit 602 to first pump unit 601, so the flow rate of air supplied from air supply source 72 to first pump unit 601 is relatively small. Between steps S224 and S211, air is supplied to first pump unit 601 only from air supply source 72.

[0079] FIG. 19 is a diagram schematically illustrating the flow rate of air supplied in the comparative example of the processing liquid supply apparatus. The horizontal and vertical axes of the graph in FIG. 19 are the same as those of the graph in FIG. 18. In the comparative example of the processing liquid supply apparatus, when the first pump unit 601 finishes discharging the processing liquid, the supply of air from the air supply source 72 to the first pump unit 601 is stopped, and the air in the first pump unit 601 is discharged to the outside of the processing liquid supply apparatus. Then, as indicated by line 98, air is supplied from the air supply source 72 to the second pump unit 602, and the second pump unit 602 discharges the processing liquid. Furthermore, when the second pump unit 602 finishes discharging the processing liquid, the supply of air from the air supply source 72 to the second pump unit 602 is stopped, and the air in the second pump unit 602 is discharged to the outside of the processing liquid supply apparatus. Then, as indicated by line 99, air is supplied from the air supply source 72 to the first pump section 601, and the processing liquid is sent out from the first pump section 601. In the processing liquid supplying apparatus of the comparative example, air is not supplied from the first pump section 601 to the second pump section 602, and air is not supplied from the second pump section 602 to the first pump section 601.

[0080] 18 and 19 , in the processing liquid supplying apparatus 6 according to this embodiment, the air used to compress the first bellows 61 in the first pump section 601 is reused to compress the second bellows 62 in the second pump section 602. Furthermore, in the processing liquid supplying apparatus 6, the air used to compress the second bellows 62 in the second pump section 602 is reused to compress the first bellows 61 in the first pump section 601. Therefore, in the processing liquid supplying apparatus 6, the flow rate of air supplied from the air supply source 72 can be reduced compared to the processing liquid supplying apparatus of the comparative example described above.

[0081] In the processing liquid supplying apparatus 6, the supply of air from the air supply source 72 to the second pump unit 602 in step S213 may be started approximately simultaneously with the start of the supply of air from the first pump unit 601 to the second pump unit 602 in step S212. Here, "approximately simultaneously" refers to timing that allows a delay of about 0.5 seconds (the same applies below). In the processing liquid supplying apparatus 6, step S213 may be started approximately simultaneously with the internal pressure of the working gas chamber 644 of the first pump unit 601 becoming approximately the same as the internal pressure of the working gas chamber 654 of the second pump unit 602, and the supply of air from the first pump unit 601 to the second pump unit 602 being stopped.

[0082] In the processing liquid supply apparatus 6, the supply of air from the air supply source 72 to the first pump unit 601 in step S223 may be started approximately simultaneously with the start of the supply of air from the second pump unit 602 to the first pump unit 601 in step S222. Alternatively, step S223 may be started approximately simultaneously with the internal pressure of the working gas chamber 654 of the second pump unit 602 becoming approximately the same as the internal pressure of the working gas chamber 644 of the first pump unit 601, and the supply of air from the second pump unit 602 to the first pump unit 601 being stopped.

[0083] Next, a processing liquid supplying apparatus 6a according to a second embodiment of the present invention will be described. Fig. 20 is a diagram showing the configuration related to air supply of the processing liquid supplying apparatus 6a. Like the above-mentioned processing liquid supplying apparatus 6, the processing liquid supplying apparatus 6a is provided in the substrate processing apparatus 1 (see Fig. 2) of the substrate processing system 10, and supplies a processing liquid to a substrate 9. The processing liquid supplying apparatus 6a has substantially the same structure as the processing liquid supplying apparatus 6 shown in Fig. 8, except for differences in the piping structure and the types of valves. In the following description, the same components of the processing liquid supplying apparatus 6a as those of the processing liquid supplying apparatus 6 will be denoted by the same reference numerals.

[0084] 20, a first inlet / outlet valve 617 is provided on a first inlet / outlet pipe 612 of the processing liquid supply apparatus 6a, instead of the first outlet check valve 613 and the first supply valve 614 (e.g., needle valves) shown in FIG. 8. A first inlet valve 618 is provided on a first inlet pipe 615, instead of the first inlet check valve 616 shown in FIG. 8. Furthermore, a second inlet / outlet valve 627 is provided on a second inlet / outlet pipe 622, instead of the second outlet check valve 623 and the second supply valve 624 (e.g., needle valves) shown in FIG. 8. A second inlet valve 628 is provided on a second inlet pipe 625, instead of the second inlet check valve 626 shown in FIG. 8.

[0085] The first inlet / outlet valve 617, the first inlet valve 618, the second inlet / outlet valve 627, and the second inlet valve 628 are included in the pump connection switching unit 603 and are controlled by the switching control unit 802 (see FIG. 4). The first inlet / outlet valve 617 and the second inlet / outlet valve 627 are also included in the air supply switching unit 604. The first inlet / outlet valve 617, the first inlet valve 618, the second inlet / outlet valve 627, and the second inlet valve 628 are, for example, electromagnetic valves that can be opened and closed under the control of the switching control unit 802.

[0086] Next, detailed operations of the processing liquid supply apparatus 6a when the processing liquid is delivered will be described. FIG. 21 is a flowchart showing the flow of operations of the processing liquid supply apparatus 6a. FIG. 21 shows operations of the processing liquid supply apparatus 6a during processing of the substrate 9 in the above-mentioned step S12 (see FIG. 6). In the processing liquid supply apparatus 6a, after delivery of the processing liquid from the first pump unit 601 is completed, the processing liquid is delivered from the second pump unit 602 (step S31). Subsequently, after delivery of the processing liquid from the second pump unit 602 is completed, the processing liquid is delivered from the first pump unit 601 (step S32). Then, steps S31 and S22 are alternately repeated until processing of the substrate 9 is completed (step S33). In this way, the processing liquid is continuously supplied from the processing liquid supply apparatus 6a to the substrate 9. That is, the above-mentioned step S12 comprises steps S31 to S33. In the processing of the substrate 9 in the substrate processing apparatus 1, between steps S31 and S32, it is determined whether the processing of the substrate 9 has been completed, and if it has not been completed, step S32 is executed, and if it has been completed, the processing operation in the substrate processing apparatus 1 may be stopped.

[0087] FIG. 22 shows a detailed operational flow of the processing liquid supply apparatus 6a in step S31 described above. That is, steps S311 to S314 shown in FIG. 22 are included in step S31. FIG. 23 shows a detailed operational flow of the processing liquid supply apparatus 6a in step S32 described above. That is, steps S321 to S324 shown in FIG. 23 are included in step S32. FIGS. 24 to 29 show the processing liquid supply apparatus 6a during processing liquid delivery. In FIGS. 24 to 29, the flow of processing liquid and the flow of air are indicated by thick arrows. In addition, in FIGS. 24 to 29, among the first inflow / outflow valve 617, the first inflow valve 618, the second inflow / outflow valve 627, the second inflow valve 628, and the exhaust valve 694, the triangles of open valves are indicated by solid black, and the triangles of closed valves are indicated by hollow.

[0088] 24 shows a state immediately after the first pump unit 601 has finished delivering the processing liquid. When the first pump unit 601 has finished delivering the processing liquid, the switching control unit 802 (see FIG. 4) controls the switching valve 691 to close the communication between the first common pipe 611, the first inflow / outflow pipe 612, and the first inflow pipe 615 and the supply source pipe 692. This closes the communication between the air supply source 72 and the first pump unit 601, and stops the supply of air from the air supply source 72 to the first pump unit 601 (step S311). In step S311, the switching valve 691 functions as a part of the air supply switching unit 604. Note that the above-mentioned communication may be closed by closing the first inflow / outflow valve 617 by the switching control unit 802.

[0089] Next, the switching control unit 802 controls the switching valve 691, the first inflow / outflow valve 617, and the second inflow valve 628, so that the first inflow / outflow piping 612 and the second inflow piping 625 are connected to each other. The first inflow / outflow valve 617 and the second inflow valve 628 are opened by the switching control unit 802. The first inflow valve 618 and the second inflow / outflow valve 627 are closed. This allows the first pump unit 601 and the second pump unit 602 to be connected to each other. The air in the working gas chamber 644 of the first pump section 601 (i.e., the air used to send out the processing liquid from the first bellows 61) flows into the working gas chamber 654 of the second pump section 602, which has a lower internal pressure than the working gas chamber 644 of the first pump section 601, via the first common pipe 611, the first inlet / outlet pipe 612, the first inlet / outlet valve 617, the switching valve 691, the second inlet pipe 625, the second inlet valve 628, and the second common pipe 621. This compresses the second bellows 62, and starts sending out the processing liquid stored in the second bellows 62 (step S312). In step S312, the switching valve 691 functions as a part of the pump connection switching section 603.

[0090] The processing liquid delivered from the second bellows 62 is delivered to the pump head 63 via the check valve 682 of the delivery valve unit 68 (see FIG. 7), and is delivered from the delivery port 632 to the nozzle 51 (see FIG. 1). Meanwhile, in the first pump section 601, the first bellows 61 is expanded in conjunction with the compression of the second bellows 62, and the processing liquid is sucked into the first bellows 61 via the check valve 671 of the suction valve unit 67 (see FIG. 7) and stored therein.

[0091] In the processing liquid supply apparatus 6a, after step S312, and while the processing liquid is being discharged from the second bellows 62 (i.e., while the second bellows 62 is being compressed), the switching control unit 802 controls the switching valve 691 and the second inflow / outflow valve 627, and the supply source piping 692 and the second inflow / outflow piping 622 are connected to each other, as shown in FIG. 25 . The second inflow / outflow valve 627 is opened by the switching control unit 802. This connects the air supply source 72 and the second pump unit 602 to each other. Air discharged from the air supply source 72 is supplied to the working gas chamber 654 of the second pump unit 602 via the supply source piping 692, the second inflow / outflow piping 622, the second inflow / outflow valve 627, and the second common piping 621. As described above, air from the working gas chamber 644 of the first pump unit 601 is also supplied to the working gas chamber 654. As a result, the second bellows 62 continues to be compressed, and the processing liquid continues to be sent out from the second pump unit 602 (step S313). In step S313, the switching valve 691 functions as a part of the air supply switching unit 604.

[0092] In the processing liquid supplying device 6a, when the internal pressure of the working gas chamber 644 of the first pump section 601 becomes equal to or lower than the internal pressure of the working gas chamber 654 of the second pump section 602, the inflow of air from the first pump section 601 to the second pump section 602 stops. Even after the inflow of air from the first pump section 601 to the second pump section 602 stops, the supply of air from the air supply source 72 to the second pump section 602 continues, and the compression of the second bellows 62, the delivery of the processing liquid from the second pump section 602, the expansion of the first bellows 61, and the suction of the processing liquid by the first pump section 601 continue.

[0093] When the inflow of air from the first pump unit 601 to the second pump unit 602 stops, the switching control unit 802 controls the switching valve 691 and the second inflow valve 628, and as shown in FIG. 26 , the first inflow / outflow piping 612 and the exhaust piping 693 are connected to each other. The second inflow valve 628 is closed by the switching control unit 802. The switching control unit 802 also controls the exhaust valve 694 to open it. This connects the first pump unit 601 to the exhaust unit 695. That is, the connection state of the first pump unit 601 is switched from a pump connection state in which the first pump unit 601 is connected to the second pump unit 602 to an exhaust state in which the first pump unit 601 is connected to the exhaust unit 695. At this time, the backflow of air from the second common piping 621 to the second inflow piping 625 is prevented by the closed second inflow valve 628.

[0094] The air in the working gas chamber 644 of the first pump unit 601 flows through the first common pipe 611, the first inlet / outlet pipe 612, the first inlet / outlet valve 617, the switching valve 691, the exhaust pipe 693, and the exhaust valve 694 to the exhaust unit 695, and is exhausted from the exhaust unit 695 to the outside (i.e., to the atmosphere outside the processing liquid supplying apparatus 6) (step S314). In step S314, the switching valve 691 functions as a part of the pump connection switching unit 603.

[0095] In the processing liquid supply device 6a, the connection state of the first pump section 601 may be switched from a pump connection state in which it is connected to the second pump section 602 to an exhaust state in which it is connected to the exhaust section 695, and the air in the first pump section 601 may be discharged to the outside, before the internal pressure of the working gas chamber 644 of the first pump section 601 becomes equal to or lower than the internal pressure of the working gas chamber 654 of the second pump section 602.

[0096] When the delivery of the processing liquid from the second pump unit 602 is completed, the switching valve 691 is controlled by the switching control unit 802 (see FIG. 4), and as shown in FIG. 27, the communication between the second common pipe 621, the second inflow / outflow pipe 622, and the second inflow pipe 625 and the supply source pipe 692 is closed. This closes the communication between the air supply source 72 and the second pump unit 602, and stops the supply of air from the air supply source 72 to the second pump unit 602 (step S321). In step S321, the switching valve 691 functions as a part of the air supply switching unit 604. Note that the closure of the communication may be performed by closing the second inflow / outflow valve 627 by the switching control unit 802.

[0097] Next, the switching control unit 802 controls the switching valve 691, the second inflow / outflow valve 627, and the first inflow valve 618, so that the second inflow / outflow piping 622 and the first inflow piping 615 are connected to each other. The second inflow / outflow valve 627 and the first inflow valve 618 are opened by the switching control unit 802. The second inflow valve 628 and the first inflow / outflow valve 617 are closed. This allows the second pump unit 602 and the first pump unit 601 to be connected to each other. The air in the working gas chamber 654 of the second pump section 602 (i.e., the air used to send out the processing liquid from the second bellows 62) flows into the working gas chamber 644 of the first pump section 601, which has a lower internal pressure than the working gas chamber 654 of the second pump section 602, via the second common pipe 621, the second inlet / outlet pipe 622, the second inlet / outlet valve 627, the switching valve 691, the first inlet pipe 615, the first inlet valve 618, and the first common pipe 611. This compresses the first bellows 61, and starts sending out the processing liquid stored in the first bellows 61 (step S322). In step S322, the switching valve 691 functions as a part of the pump connection switching section 603.

[0098] The processing liquid delivered from the first bellows 61 is delivered to the pump head 63 via the check valve 681 of the delivery valve unit 68 (see FIG. 7), and is then delivered from the delivery port 632 to the nozzle 51 (see FIG. 1). Meanwhile, in the second pump section 602, the second bellows 62 is expanded in conjunction with the compression of the first bellows 61, and the processing liquid is sucked into the second bellows 62 via the check valve 672 of the suction valve unit 67 (see FIG. 7) and stored therein.

[0099] In the processing liquid supply apparatus 6a, after step S322, and while the processing liquid is being discharged from the first bellows 61 (i.e., while the first bellows 61 is being compressed), the switching control unit 802 controls the switching valve 691 and the first inflow / outflow valve 617, and the supply source piping 692 and the first inflow / outflow piping 612 are connected to each other, as shown in FIG. 28 . The first inflow / outflow valve 617 is opened by the switching control unit 802. This connects the air supply source 72 and the first pump unit 601 to each other. Air discharged from the air supply source 72 is supplied to the working gas chamber 644 of the first pump unit 601 via the supply source piping 692, the first inflow / outflow piping 612, the first inflow / outflow valve 617, and the first common piping 611. As described above, air in the working gas chamber 654 of the second pump unit 602 is also supplied to the working gas chamber 644. As a result, the first bellows 61 continues to be compressed, and the processing liquid continues to be sent out from the first pump unit 601 (step S323). In step S323, the switching valve 691 functions as a part of the air supply switching unit 604.

[0100] In the processing liquid supplying device 6a, when the internal pressure of the working gas chamber 654 of the second pump section 602 becomes equal to or lower than the internal pressure of the working gas chamber 644 of the first pump section 601, the inflow of air from the second pump section 602 to the first pump section 601 stops. Even after the inflow of air from the second pump section 602 to the first pump section 601 stops, the supply of air from the air supply source 72 to the first pump section 601 continues, and the compression of the first bellows 61, the delivery of the processing liquid from the first pump section 601, the expansion of the second bellows 62, and the suction of the processing liquid by the second pump section 602 continue.

[0101] When the inflow of air from the second pump unit 602 to the first pump unit 601 stops, the switching control unit 802 controls the switching valve 691 and the first inflow valve 618, and as shown in FIG. 29 , the second inflow / outflow piping 622 and the exhaust piping 693 are connected to each other. The first inflow valve 618 is closed by the switching control unit 802. The switching control unit 802 also controls the exhaust valve 694 to open it. This connects the second pump unit 602 to the exhaust unit 695. That is, the connection state of the second pump unit 602 is switched from a pump connection state in which the second pump unit 602 is connected to the first pump unit 601 to an exhaust state in which the second pump unit 602 is connected to the exhaust unit 695. At this time, the backflow of air from the first common piping 611 to the first inflow piping 615 is prevented by the closed first inflow valve 618.

[0102] The air in the working gas chamber 654 of the second pump unit 602 flows through the second common pipe 621, the second inlet / outlet pipe 622, the second inlet / outlet valve 627, the switching valve 691, the exhaust pipe 693, and the exhaust valve 694 to the exhaust unit 695, and is exhausted from the exhaust unit 695 to the outside (i.e., to the atmosphere outside the processing liquid supplying apparatus 6) (step S324). In step S324, the switching valve 691 functions as a part of the pump connection switching unit 603.

[0103] In the processing liquid supply device 6a, the connection state of the second pump section 602 may be switched from a pump connection state in which it is connected to the first pump section 601 to an exhaust state in which it is connected to the exhaust section 695, and the air in the second pump section 602 may be discharged to the outside before the internal pressure of the working gas chamber 654 of the second pump section 602 becomes equal to or lower than the internal pressure of the working gas chamber 644 of the first pump section 601.

[0104] In the processing liquid supplying apparatus 6a, similar to the processing liquid supplying apparatus 6, the air used to compress the first bellows 61 in the first pump section 601 is reused to compress the second bellows 62 in the second pump section 602. Furthermore, in the processing liquid supplying apparatus 6a, the air used to compress the second bellows 62 in the second pump section 602 is reused to compress the first bellows 61 in the first pump section 601. Therefore, in the processing liquid supplying apparatus 6a, the flow rate of air supplied from the air supply source 72 can be reduced compared to the processing liquid supplying apparatus of the comparative example described above.

[0105] In the processing liquid supply apparatus 6a, the supply of air from the air supply source 72 to the second pump unit 602 in step S313 may be started approximately simultaneously with the start of the supply of air from the first pump unit 601 to the second pump unit 602 in step S312. Alternatively, step S313 may be started approximately simultaneously with the internal pressure of the working gas chamber 644 of the first pump unit 601 becoming approximately the same as the internal pressure of the working gas chamber 654 of the second pump unit 602, and the supply of air from the first pump unit 601 to the second pump unit 602 being stopped.

[0106] In the processing liquid supply apparatus 6a, the supply of air from the air supply source 72 to the first pump unit 601 in step S323 may be started approximately simultaneously with the start of the supply of air from the second pump unit 602 to the first pump unit 601 in step S322. Alternatively, step S323 may be started approximately simultaneously with the internal pressure of the working gas chamber 654 of the second pump unit 602 becoming approximately the same as the internal pressure of the working gas chamber 644 of the first pump unit 601, and the supply of air from the second pump unit 602 to the first pump unit 601 being stopped.

[0107] As described above, the air-driven processing liquid supply device 6, 6a that continuously delivers the processing liquid includes a first pump unit 601, a second pump unit 602, an air supply switching unit 604, a pump connection switching unit 603, and a switching control unit 802. The first pump unit 601 alternately sucks in and delivers the processing liquid. The second pump unit 602, in conjunction with the first pump unit 601, delivers the processing liquid when the first pump unit 601 sucks in the processing liquid and sucks in the processing liquid when the first pump unit 601 delivers the processing liquid. The air supply switching unit 604 switches the connection destination of the air supply source 72 between the first pump unit 601 and the second pump unit 602. The pump connection switching unit 603 switches the connection state of the first pump unit 601 between a pump connection state in which the first pump unit 601 is connected to the second pump unit 602 and an exhaust state in which the first pump unit 601 is connected to the exhaust unit 695. Furthermore, the pump connection switching unit 603 switches the connection state of the second pump unit 602 between the pump connection state in which the second pump unit 602 is connected to the first pump unit 601 and an exhaust state in which the second pump unit 602 is connected to the exhaust unit 695. The switching control unit 802 controls the air supply switching unit 604 and the pump connection switching unit 603.

[0108] In the processing liquid supply device 6, 6a, after the first pump unit 601 has finished discharging the processing liquid, the air supply switching unit 604 closes the communication between the air supply source 72 and the first pump unit 601, thereby stopping the supply of air from the air supply source 72 to the first pump unit 601. Then, the pump connection switching unit 603 connects the first pump unit 601 to the second pump unit 602, and the air in the first pump unit 601 used to discharge the processing liquid flows into the second pump unit 602, which has a lower internal pressure than the first pump unit 601, thereby starting the discharge of the processing liquid from the second pump unit 602. The air supply switching unit 604 also connects the air supply source 72 to the second pump unit 602, and supplies air from the air supply source 72 to the second pump unit 602, allowing the second pump unit 602 to continue discharging the processing liquid. Furthermore, while the second pump unit 602 continues to pump out the treatment liquid, the pump connection switching unit 603 switches the connection state of the first pump unit 601 from the pump communication state to the exhaust state.

[0109] In the processing liquid supply device 6, 6a, after the second pump unit 602 has finished discharging the processing liquid, the air supply switching unit 604 closes the communication between the air supply source 72 and the second pump unit 602, thereby stopping the supply of air from the air supply source 72 to the second pump unit 602. Then, the pump connection switching unit 603 connects the first pump unit 601 and the second pump unit 602, and causes the air in the second pump unit 602, which was used to discharge the processing liquid, to flow into the first pump unit 601, which has a lower internal pressure than the second pump unit 602, thereby starting the discharge of the processing liquid from the first pump unit 601. The air supply switching unit 604 also connects the air supply source 72 and the first pump unit 601, and supplies air from the air supply source 72 to the first pump unit 601, allowing the first pump unit 601 to continue discharging the processing liquid. Furthermore, while the first pump unit 601 continues to pump out the treatment liquid, the pump connection switching unit 603 switches the connection state of the second pump unit 602 from the pump communication state to the exhaust state.

[0110] In this way, in the processing liquid supplying apparatus 6, 6a, the compressed air used to deliver the processing liquid from one of the first pump unit 601 and the second pump unit 602 can be reused to deliver the processing liquid from the other pump unit. This reduces the energy required to drive the processing liquid supplying apparatus 6, 6a. As a result, the running costs of the substrate processing apparatus 1 and the substrate processing system 10 can be reduced.

[0111] As described above, in the processing liquid supplying apparatus 6, 6a, after the first pump unit 601 has finished delivering the processing liquid, it is also preferable to connect the air supply source 72 to the second pump unit 602 by the air supply switching unit 604 in parallel with the communication between the first pump unit 601 and the second pump unit 602 by the pump connection switching unit 603. This allows the second pump unit 602 to quickly start delivering the processing liquid and improves the stability of the processing liquid delivery from the second pump unit 602. It is also preferable to connect the air supply source 72 to the first pump unit 601 by the air supply switching unit 604 in parallel with the communication between the first pump unit 601 and the second pump unit 602 by the pump connection switching unit 603 in parallel with the communication between the first pump unit 601 and the second pump unit 602 by the pump connection switching unit 603. This allows the first pump unit 601 to quickly start delivering the processing liquid and improves the stability of the processing liquid delivery from the first pump unit 601.

[0112] As described above, in the processing liquid supplying apparatus 6, it is preferable that the pump connection switching unit 603 includes the first common pipe 611, the first inflow / outflow pipe 612, the first inflow pipe 615, the switching valve 691, the second common pipe 621, the second inflow / outflow pipe 622, the second inflow pipe 625, the first outflow check valve 613, the first inflow check valve 616, the second outflow check valve 623, the second inflow check valve 626, and the exhaust pipe 693. This simplifies the structure of the processing liquid supplying apparatus 6.

[0113] The above-mentioned first common pipe 611 extends from the first pump unit 601. The first inlet / outlet pipe 612 and the first inlet pipe 615 extend in parallel from the end of the first common pipe 611 opposite the first pump unit 601. The first inlet / outlet pipe 612 and the first inlet pipe 615 are each connected to the switching valve 691. The second common pipe 621 extends from the second pump unit 602. The second inlet / outlet pipe 622 and the second inlet pipe 625 extend in parallel from the end of the second common pipe 621 opposite the second pump unit 602, and are each connected to the switching valve 691. The first outlet check valve 613 is disposed on the first inlet / outlet pipe 612, and allows only the flow from the first common pipe 611 to the switching valve 691 to pass. The first inlet check valve 616 is disposed on the first inlet pipe 615 and allows only the flow from the switching valve 691 to the first common pipe 611 to pass. The second outlet check valve 623 is disposed on the second inlet / outlet pipe 622 and allows only the flow from the second common pipe 621 to the switching valve 691 to pass. The second inlet check valve 626 is disposed on the second inlet pipe 625 and allows only the flow from the switching valve 691 to the second common pipe 621 to pass. The exhaust pipe 693 connects the switching valve 691 and the exhaust unit 695.

[0114] Furthermore, it is preferable that the air supply switching unit 604 share the switching valve 691, the first inflow / outflow piping 612, the first common piping 611, the second inflow / outflow piping 622, and the second common piping 621 with the pump connection switching unit 603. Furthermore, it is preferable that the air supply switching unit 604 further includes a supply source piping 692, a first supply valve 614, and a second supply valve 624. The supply source piping 692 connects the switching valve 691 and the air supply source 72. The first supply valve 614 is disposed on the first inflow / outflow piping 612 in parallel with the first outflow check valve 613. The second supply valve 624 is disposed on the second inflow / outflow piping 622 in parallel with the second outflow check valve 623.

[0115] Preferably, after the first pump unit 601 has finished sending out the processing liquid, the supply source pipe 692 is disconnected from the first common pipe 611, thereby closing the communication between the air supply source 72 and the first pump unit 601 and stopping the supply of air from the air supply source 72 to the first pump unit 601. Furthermore, the switching valve 691 connects the first inflow / outflow pipe 612 to the second inflow pipe 625, thereby connecting the first pump unit 601 and the second pump unit 602 via the first common pipe 611, the first inflow / outflow pipe 612, the first outflow check valve 613, the second inflow pipe 625, the second inflow check valve 626, and the second common pipe 621, and the air in the first pump unit 601 flows into the second pump unit 602, which has an internal pressure lower than that of the first pump unit 601. Then, by switching valve 691 connecting supply source piping 692 and second inflow / outflow piping 622, air supply source 72 and second pump unit 602 are connected via supply source piping 692, second inflow / outflow piping 622, second supply valve 624, and second common piping 621, and air is supplied from air supply source 72 to second pump unit 602. Furthermore, by switching valve 691 connecting first inflow / outflow piping 612 and exhaust piping 693, first pump unit 601 and exhaust unit 695 are connected via first common piping 611, first inflow / outflow piping 612, first outflow check valve 613, and exhaust piping 693, and air inside first pump unit 601 is discharged from exhaust unit 695 to the outside.

[0116] Preferably, after the second pump unit 602 has finished sending out the processing liquid, the communication between the supply source pipe 692 and the second common pipe 621 is closed, thereby closing the communication between the air supply source 72 and the second pump unit 602 and stopping the supply of air from the air supply source 72 to the second pump unit 602. Furthermore, the switching valve 691 connects the second inflow / outflow pipe 622 to the first inflow pipe 615, thereby connecting the second pump unit 602 and the first pump unit 601 via the second common pipe 621, the second inflow / outflow pipe 622, the second outflow check valve 623, the first inflow pipe 615, the first inflow check valve 616, and the first common pipe 611, and the air in the second pump unit 602 flows into the first pump unit 601, which has an internal pressure lower than that of the second pump unit 602. Then, by switching valve 691 connecting supply source piping 692 and first inflow / outflow piping 612, air supply source 72 and first pump unit 601 are connected via supply source piping 692, first inflow / outflow piping 612, first supply valve 614, and first common piping 611, and air is supplied from air supply source 72 to first pump unit 601. Furthermore, by switching valve 691 connecting second inflow / outflow piping 622 and exhaust piping 693, second pump unit 602 and exhaust unit 695 are connected via second common piping 621, second inflow / outflow piping 622, second outflow check valve 623, and exhaust piping 693, and air inside second pump unit 602 is discharged from exhaust unit 695 to the outside.

[0117] As described above, in the processing liquid supplying apparatus 6a, it is preferable that the pump connection switching unit 603 includes the first common pipe 611, the first inflow / outflow pipe 612, the first inflow pipe 615, the switching valve 691, the second common pipe 621, the second inflow / outflow pipe 622, the second inflow pipe 625, the first inflow / outflow valve 617, the first inflow valve 618, the second inflow / outflow valve 627, the second inflow valve 628, and the exhaust pipe 693. This simplifies the structure of the processing liquid supplying apparatus 6a.

[0118] The first common pipe 611 described above extends from the first pump unit 601. The first inlet / outlet pipe 612 and the first inlet pipe 615 extend in parallel from an end of the first common pipe 611 opposite the first pump unit 601. The first inlet / outlet pipe 612 and the first inlet pipe 615 are each connected to the switching valve 691. The second common pipe 621 extends from the second pump unit 602. The second inlet / outlet pipe 622 and the second inlet pipe 625 extend in parallel from an end of the second common pipe 621 opposite the second pump unit 602, and are each connected to the switching valve 691. The first inlet / outlet valve 617 is disposed on the first inlet / outlet pipe 612. The first inlet valve 618 is disposed on the first inlet pipe 615. The second inlet / outlet valve 627 is disposed on the second inlet / outlet pipe 622. The second inlet valve 628 is disposed on the second inlet pipe 625. The exhaust pipe 693 connects the switching valve 691 and the exhaust unit 695.

[0119] It is also preferable that the air supply switching unit 604 shares the switching valve 691, the first inflow / outflow piping 612, the first inflow / outflow valve 617, the first common piping 611, the second inflow / outflow piping 622, the second inflow / outflow valve 627, and the second common piping 621 with the pump connection switching unit 603. It is also preferable that the air supply switching unit 604 further includes a supply source piping 692 that connects the switching valve 691 and the air supply source 72.

[0120] Preferably, after the first pump unit 601 has finished sending out the processing liquid, the communication between the supply source pipe 692 and the first inflow / outflow pipe 612 is closed, thereby closing the communication between the air supply source 72 and the first pump unit 601 and stopping the supply of air from the air supply source 72 to the first pump unit 601. Then, the switching valve 691 connects the first inflow / outflow pipe 612 and the second inflow pipe 625, thereby connecting the first pump unit 601 and the second pump unit 602 via the first common pipe 611, the first inflow / outflow pipe 612, the first inflow / outflow valve 617, the second inflow pipe 625, the second inflow valve 628, and the second common pipe 621, and the air in the first pump unit 601 flows into the second pump unit 602, which has an internal pressure lower than that of the first pump unit 601. Furthermore, by switching valve 691 connecting supply source piping 692 and second inflow / outflow piping 622, air supply source 72 and second pump unit 602 are connected via supply source piping 692, second inflow / outflow piping 622, second inflow / outflow valve 627, and second common piping 621, and air is supplied from air supply source 72 to second pump unit 602. Furthermore, by switching valve 691 connecting first inflow / outflow piping 612 and exhaust piping 693, first pump unit 601 and exhaust unit 695 are connected via first common piping 611, first inflow / outflow piping 612, first inflow / outflow valve 617, and exhaust piping 693, and air inside first pump unit 601 is discharged via exhaust unit 695.

[0121] Preferably, after the second pump unit 602 has finished sending out the processing liquid, the communication between the supply source pipe 692 and the second inflow / outflow pipe 622 is closed, thereby closing the communication between the air supply source 72 and the second pump unit 602 and stopping the supply of air from the air supply source 72 to the second pump unit 602. Then, the switching valve 691 connects the second inflow / outflow pipe 622 to the first inflow pipe 615, thereby connecting the second pump unit 602 and the first pump unit 601 via the second common pipe 621, the second inflow / outflow pipe 622, the second inflow / outflow valve 627, the first inflow pipe 615, the first inflow valve 618, and the first common pipe 611, and the air in the second pump unit 602 flows into the first pump unit 601, which has a lower internal pressure than the second pump unit 602. Furthermore, by switching valve 691 connecting supply source piping 692 and first inflow / outflow piping 612, air supply source 72 and first pump unit 601 are connected via supply source piping 692, first inflow / outflow piping 612, first inflow / outflow valve 617, and first common piping 611, and air is supplied from air supply source 72 to first pump unit 601. Furthermore, by switching valve 691 connecting second inflow / outflow piping 622 and exhaust piping 693, second pump unit 602 and exhaust unit 695 are connected via second common piping 621, second inflow / outflow piping 622, second inflow / outflow valve 627, and exhaust piping 693, and air in second pump unit 602 is discharged via exhaust unit 695.

[0122] As described above, the substrate processing apparatus 1 preferably includes the substrate holder 31 that holds the substrate 9, and the processing liquid supply device 6 or the processing liquid supply device 6a that supplies the processing liquid to the substrate 9. This allows the substrate processing apparatus 1 to reduce the energy required to supply the processing liquid to the substrate 9.

[0123] The substrate processing method described above includes a step of holding a substrate 9 (step S11) and a step of supplying a processing liquid to the substrate 9 from an air-driven processing liquid supply device 6, 6a that continuously delivers the processing liquid (step S12). The processing liquid supply device 6, 6a includes a first pump unit 601, a second pump unit 602, an air supply switching unit 604, and a pump connection switching unit 603. The first pump unit 601 alternately sucks and delivers the processing liquid. The second pump unit 602, in conjunction with the first pump unit 601, delivers the processing liquid when the first pump unit 601 sucks the processing liquid, and sucks the processing liquid when the first pump unit 601 delivers the processing liquid. The air supply switching unit 604 switches the communication destination of the air supply source 72 between the first pump unit 601 and the second pump unit 602. The pump connection switching unit 603 switches the connection state of the first pump unit 601 between a pump connection state in which the first pump unit 601 is connected to the second pump unit 602 and an exhaust state in which the first pump unit 601 is connected to the exhaust unit 695. The pump connection switching unit 603 also switches the connection state of the second pump unit 602 between the pump connection state in which the second pump unit 602 is connected to the first pump unit 601 and an exhaust state in which the second pump unit 602 is connected to the exhaust unit 695.

[0124] The above step S12 includes steps (steps S21, S31) of discharging the processing liquid from the second pump section 602 after the processing liquid has been discharged from the first pump section 601, steps (steps S22, S32) of discharging the processing liquid from the first pump section 601 after the processing liquid has been discharged from the second pump section 602, and steps (steps S23, S33) of alternately repeating steps S21, S31 and steps S22, S32.

[0125] The steps S21 and S31 include steps S211 and S311 in which the air supply switching unit 604 closes the communication between the air supply source 72 and the first pump unit 601 and stops the supply of air from the air supply source 72 to the first pump unit 601, and steps S211 and S311 in which the pump connection switching unit 603 connects the first pump unit 601 and the second pump unit 602, and causes the air in the first pump unit 601 used to deliver the treatment liquid to flow into the second pump unit 602, which has an internal pressure lower than that of the first pump unit 601, thereby preventing the delivery of the treatment liquid from the second pump unit 602. The method includes a step of starting the discharge of the treatment liquid from the first pump section 601 (steps S212, S312), a step of connecting the air supply source 72 and the second pump section 602 by the air supply switching section 604 and supplying air from the air supply source 72 to the second pump section 602 to continue the discharge of the treatment liquid from the second pump section 602 (steps S213, S313), and a step of switching the connection state of the first pump section 601 from a pump connection state to an exhaust state by the pump connection switching section 603 after steps S212, S312 and in parallel with steps S213, S313 (steps S214, S314).

[0126] The steps S22 and S32 include steps S221 and S321 in which the air supply switching unit 604 closes the communication between the air supply source 72 and the second pump unit 602 and stops the supply of air from the air supply source 72 to the second pump unit 602, and steps S221 and S321 in which the pump connection switching unit 603 connects the first pump unit 601 and the second pump unit 602 and causes the air in the second pump unit 602 used to deliver the treatment liquid to flow into the first pump unit 601, which has an internal pressure lower than that of the second pump unit 602, thereby preventing the delivery of the treatment liquid from the first pump unit 601. The method includes a step of starting the discharge of the treatment liquid from the first pump section 601 (steps S222, S322), a step of connecting the air supply source 72 and the first pump section 601 by the air supply switching section 604 and supplying air from the air supply source 72 to the first pump section 601 to continue the discharge of the treatment liquid from the first pump section 601 (steps S223, S323), and a step of switching the connection state of the second pump section 602 from a pump connection state to an exhaust state by the pump connection switching section 603 after steps S222, S322, and in parallel with steps S223, S323 (steps S224, S324).

[0127] In this substrate processing method, compressed air used to send out processing liquid from one of the first pump unit 601 and the second pump unit 602 can be reused to send out processing liquid from the other pump unit. This reduces the energy required to supply processing liquid to the substrate 9. As a result, the running costs associated with substrate processing can be reduced.

[0128] As described above, it is also preferable that the communication between the air supply source 72 and the second pump unit 602 in steps S213 and S313 be initiated simultaneously with steps S212 and S312. This allows the second pump unit 602 to quickly start discharging the treatment liquid, and improves the stability of the treatment liquid discharge from the second pump unit 602. It is also preferable that the communication between the air supply source 72 and the first pump unit 601 in steps S223 and S323 be initiated simultaneously with steps S222 and S322. This allows the first pump unit 601 to quickly start discharging the treatment liquid, and improves the stability of the treatment liquid discharge from the first pump unit 601.

[0129] The above-described processing liquid supply devices 6, 6a, substrate processing apparatus 1, and substrate processing method can be modified in various ways.

[0130] For example, the piping structure and the types of valves in the processing liquid supply devices 6, 6a are not limited to those described above and may be modified in various ways. For example, the first supply valve 614 and the second supply valve 624 of the processing liquid supply device 6 may be motor needle valves that can be remotely controlled to set the flow rate.

[0131] The processing liquid supply devices 6, 6a do not necessarily have to be bellows pumps, but may be other types of pumps (for example, diaphragm pumps).

[0132] In the substrate processing apparatus 1, the processing liquid delivered from the processing liquid supply devices 6, 6a does not necessarily have to be supplied to the upper surface 91 of the substrate 9, but may be supplied, for example, to the lower surface of the substrate 9 or to both the upper and lower surfaces of the substrate 9.

[0133] The processing liquid supply devices 6, 6a do not necessarily have to be provided in the single-wafer substrate processing apparatus 1, but may be provided in a substrate processing apparatus that performs batch processing on a plurality of substrates 9.

[0134] The processing liquid supplying apparatus 6, 6a may be used in a substrate processing apparatus that processes glass substrates used in flat panel displays such as liquid crystal displays or organic EL (Electro Luminescence) displays, or glass substrates used in other display devices. The processing liquid supplying apparatus 6, 6a may also be used in a substrate processing apparatus that processes substrates for optical disks, magnetic disks, magneto-optical disks, photomasks, ceramic substrates, and solar cell substrates. Alternatively, the processing liquid supplying apparatus 6, 6a may be used in an apparatus other than a substrate processing apparatus.

[0135] The configurations in the above-described embodiment and each modification may be combined as appropriate as long as they are not mutually contradictory. [Explanation of symbols]

[0136] 1. Substrate processing equipment 6, 6a Processing liquid supply device 9 Substrate 31 Board holding part 72 Air supply source 601 First pump section 602 Second pump section 603 Pump connection switch 604 Air supply switching unit 611 First common piping 612 1st inflow and outflow piping 613 First outflow check valve 614 First supply valve 615 1st inflow pipe 616 First inflow check valve 617 First inlet / outlet valve 618 First inlet valve 621 Second common piping 622 2nd inlet / outlet piping 623 Second Outlet Check Valve 624 Second supply valve 625 2nd inflow pipe 626 Second inflow check valve 627 Second inlet / outlet valve 628 Second inlet valve 691 Switching valve 692 Supply piping 693 Exhaust piping 695 Exhaust section 802 Switching control unit S11~S12, S21~S23, S31~S33, S211~S214, S221~S224, S311~S314, S321~S324 steps

Claims

1. An air-driven processing liquid supply device that continuously delivers processing liquid, a first pump unit that alternately sucks and delivers the treatment liquid; a second pump unit that operates in conjunction with the first pump unit to deliver the treatment liquid when the first pump unit is suctioning the treatment liquid and to suction the treatment liquid when the first pump unit is delivering the treatment liquid; an air supply switching unit that switches a communication destination of an air supply source between the first pump unit and the second pump unit; a pump connection switching unit that switches a connection state of the first pump unit between a pump connection state in which the first pump unit is connected to the second pump unit and an exhaust state in which the first pump unit is connected to an exhaust unit, and that switches a connection state of the second pump unit between the pump connection state in which the second pump unit is connected to the first pump unit and an exhaust state in which the second pump unit is connected to the exhaust unit; a switching control unit that controls the air supply switching unit and the pump connection switching unit; Equipped with after completion of the delivery of the treatment liquid from the first pump unit, the air supply switching unit closes the communication between the air supply source and the first pump unit and stops the supply of air from the air supply source to the first pump unit; the pump connection switching unit connects the first pump unit and the second pump unit; the air in the first pump unit used for the delivery of the treatment liquid flows into the second pump unit, which has an internal pressure lower than that of the first pump unit, thereby starting the delivery of the treatment liquid from the second pump unit; the air supply switching unit connects the air supply source and the second pump unit; air is supplied from the air supply source to the second pump unit to continue the delivery of the treatment liquid from the second pump unit; and while the delivery of the treatment liquid from the second pump unit continues, the pump connection switching unit switches the connection state of the first pump unit from the pump connection state to the exhaust state; after completion of the delivery of the treatment liquid from the second pump unit, the air supply switching unit closes the communication between the air supply source and the second pump unit and stops the supply of air from the air supply source to the second pump unit; the pump connection switching unit connects the first pump unit and the second pump unit; the air in the second pump unit used for the delivery of the treatment liquid flows into the first pump unit, which has an internal pressure lower than that of the second pump unit, thereby starting the delivery of the treatment liquid from the first pump unit; the air supply switching unit connects the air supply source and the first pump unit; air is supplied from the air supply source to the first pump unit to continue the delivery of the treatment liquid from the first pump unit; and while the delivery of the treatment liquid from the first pump unit continues, the pump connection switching unit switches the connection state of the second pump unit from the pump connection state to the exhaust state; The pump connection switching unit a first common pipe extending from the first pump unit; a first inflow / outflow pipe and a first inflow pipe extending in parallel from an end of the first common pipe opposite to the first pump unit; a switching valve to which the first inflow / outflow pipe and the first inflow pipe are respectively connected; a second common pipe extending from the second pump section; a second inflow / outflow pipe and a second inflow pipe extending in parallel from an end of the second common pipe opposite to the second pump unit and connected to the switching valve, respectively; a first outflow check valve disposed on the first inflow / outflow pipe and allowing only a flow from the first common pipe toward the switching valve to pass; a first inlet check valve disposed on the first inlet pipe and allowing only a flow from the switching valve to the first common pipe to pass; a second outflow check valve disposed on the second inflow / outflow pipe and allowing only a flow from the second common pipe toward the switching valve to pass; a second inlet check valve disposed on the second inlet pipe and allowing only a flow from the switching valve to the second common pipe to pass; an exhaust pipe connecting the switching valve and the exhaust unit; Equipped with the air supply switching unit shares the switching valve, the first inflow / outflow pipe, the first common pipe, the second inflow / outflow pipe, and the second common pipe with the pump connection switching unit; The air supply switching unit is a supply source pipe connecting the switching valve and the air supply source; a first supply valve disposed in parallel with the first outflow check valve on the first inflow / outflow pipe; a second supply valve disposed in parallel with the second outflow check valve on the second inflow / outflow pipe; Furthermore, After the first pump section has finished sending out the treatment liquid, By closing the communication between the supply source pipe and the first common pipe, the communication between the air supply source and the first pump unit is closed, and the supply of air from the air supply source to the first pump unit is stopped; The first inflow / outflow piping and the second inflow piping are connected by the switching valve, so that the first pump unit and the second pump unit are connected via the first common piping, the first inflow / outflow piping, the first outflow check valve, the second inflow piping, the second inflow check valve, and the second common piping, and air in the first pump unit flows into the second pump unit, which has an internal pressure lower than that of the first pump unit, the switching valve connects the supply source pipe and the second inflow / outflow pipe, whereby the air supply source and the second pump unit communicate with each other via the supply source pipe, the second inflow / outflow pipe, the second supply valve, and the second common pipe, and air is supplied from the air supply source to the second pump unit; the first inflow / outflow piping and the exhaust piping are connected by the switching valve, so that the first pump unit and the exhaust unit are connected via the first common piping, the first inflow / outflow piping, the first outflow check valve, and the exhaust piping, and air in the first pump unit is discharged to the outside through the exhaust unit, After the second pump section has finished sending out the treatment liquid, By closing the communication between the supply source pipe and the second common pipe, the communication between the air supply source and the second pump unit is closed, and the supply of air from the air supply source to the second pump unit is stopped. The second inflow / outflow piping and the first inflow piping are connected by the switching valve, so that the second pump unit and the first pump unit are connected via the second common piping, the second inflow / outflow piping, the second outflow check valve, the first inflow piping, the first inflow check valve, and the first common piping, and air in the second pump unit flows into the first pump unit, which has an internal pressure lower than that of the second pump unit, the switching valve connects the supply source piping and the first inflow / outflow piping, whereby the air supply source and the first pump unit communicate with each other via the supply source piping, the first inflow / outflow piping, the first supply valve, and the first common piping, and air is supplied from the air supply source to the first pump unit; a second pump unit configured to discharge air from the second pump unit to the exhaust unit through the second common pipe, the second inlet / outlet pipe, the second outlet check valve, and the exhaust pipe;

2. 2. The processing liquid supply device according to claim 1, after completion of the delivery of the treatment liquid from the first pump unit, in parallel with the communication between the first pump unit and the second pump unit by the pump connection switching unit, the air supply switching unit connects the air supply source to the second pump unit; a pump connection switching unit that connects the first pump unit to the second pump unit, and a processing liquid supply switching unit that connects the first pump unit to the air supply source, after the second pump unit has finished delivering the processing liquid.

3. An air-driven processing liquid supply device that continuously delivers processing liquid, comprising: a first pump unit that alternately sucks and delivers the treatment liquid; a second pump unit that operates in conjunction with the first pump unit to deliver the treatment liquid when the first pump unit is suctioning the treatment liquid and to suction the treatment liquid when the first pump unit is delivering the treatment liquid; an air supply switching unit that switches a communication destination of an air supply source between the first pump unit and the second pump unit; a pump connection switching unit that switches a connection state of the first pump unit between a pump connection state in which the first pump unit is connected to the second pump unit and an exhaust state in which the first pump unit is connected to an exhaust unit, and that switches a connection state of the second pump unit between the pump connection state in which the second pump unit is connected to the first pump unit and an exhaust state in which the second pump unit is connected to the exhaust unit; a switching control unit that controls the air supply switching unit and the pump connection switching unit; Equipped with after completion of the delivery of the treatment liquid from the first pump unit, the air supply switching unit closes the communication between the air supply source and the first pump unit and stops the supply of air from the air supply source to the first pump unit; the pump connection switching unit connects the first pump unit and the second pump unit; the air in the first pump unit used for the delivery of the treatment liquid flows into the second pump unit, which has an internal pressure lower than that of the first pump unit, thereby starting the delivery of the treatment liquid from the second pump unit; the air supply switching unit connects the air supply source and the second pump unit; air is supplied from the air supply source to the second pump unit to continue the delivery of the treatment liquid from the second pump unit; and while the delivery of the treatment liquid from the second pump unit continues, the pump connection switching unit switches the connection state of the first pump unit from the pump connection state to the exhaust state; after completion of the delivery of the treatment liquid from the second pump unit, the air supply switching unit closes the communication between the air supply source and the second pump unit and stops the supply of air from the air supply source to the second pump unit; the pump connection switching unit connects the first pump unit and the second pump unit; the air in the second pump unit used for the delivery of the treatment liquid flows into the first pump unit, which has an internal pressure lower than that of the second pump unit, thereby starting the delivery of the treatment liquid from the first pump unit; the air supply switching unit connects the air supply source and the first pump unit; air is supplied from the air supply source to the first pump unit to continue the delivery of the treatment liquid from the first pump unit; and while the delivery of the treatment liquid from the first pump unit continues, the pump connection switching unit switches the connection state of the second pump unit from the pump connection state to the exhaust state; The pump connection switching unit a first common pipe extending from the first pump unit; a first inflow / outflow pipe and a first inflow pipe extending in parallel from an end of the first common pipe opposite to the first pump unit; a switching valve to which the first inflow / outflow pipe and the first inflow pipe are respectively connected; a second common pipe extending from the second pump section; a second inflow / outflow pipe and a second inflow pipe extending in parallel from an end of the second common pipe opposite to the second pump unit and connected to the switching valve, respectively; a first inflow / outflow valve disposed on the first inflow / outflow pipe; a first inlet valve disposed on the first inlet pipe; a second inflow / outflow valve disposed on the second inflow / outflow pipe; a second inlet valve disposed on the second inlet pipe; an exhaust pipe connecting the switching valve and the exhaust unit; Equipped with the air supply switching unit shares the switching valve, the first inflow / outflow piping, the first inflow / outflow valve, the first common piping, the second inflow / outflow piping, the second inflow / outflow valve, and the second common piping with the pump connection switching unit; the air supply switching unit further includes a supply source pipe connecting the switching valve and the air supply source, After the first pump section has finished sending out the treatment liquid, By closing the communication between the supply source pipe and the first inflow / outflow pipe, the communication between the air supply source and the first pump unit is closed, and the supply of air from the air supply source to the first pump unit is stopped, The first inflow / outflow piping and the second inflow piping are connected by the switching valve, so that the first pump unit and the second pump unit are connected via the first common piping, the first inflow / outflow piping, the first inflow / outflow valve, the second inflow piping, the second inflow valve, and the second common piping, and air in the first pump unit flows into the second pump unit, which has an internal pressure lower than that of the first pump unit, the switching valve connects the supply source pipe and the second inflow / outflow pipe, whereby the air supply source and the second pump unit communicate with each other via the supply source pipe, the second inflow / outflow pipe, the second inflow / outflow valve, and the second common pipe, and air is supplied from the air supply source to the second pump unit; the first inflow / outflow piping and the exhaust piping are connected by the switching valve, so that the first pump unit and the exhaust unit are connected via the first common piping, the first inflow / outflow piping, the first inflow / outflow valve, and the exhaust piping, and air in the first pump unit is discharged via the exhaust unit; After the second pump section has finished sending out the treatment liquid, When the communication between the supply source pipe and the second inflow / outflow pipe is closed, the communication between the air supply source and the second pump unit is closed, and the supply of air from the air supply source to the second pump unit is stopped. The second inflow / outflow piping and the first inflow piping are connected by the switching valve, so that the second pump unit and the first pump unit are connected via the second common piping, the second inflow / outflow piping, the second inflow / outflow valve, the first inflow piping, the first inflow valve, and the first common piping, and air in the second pump unit flows into the first pump unit, which has an internal pressure lower than that of the second pump unit, the switching valve connects the supply source piping and the first inflow / outflow piping, whereby the air supply source and the first pump unit communicate with each other via the supply source piping, the first inflow / outflow piping, the first inflow / outflow valve, and the first common piping, and air is supplied from the air supply source to the first pump unit; a processing liquid supply device characterized in that the second inlet / outlet pipe and the exhaust pipe are connected by the switching valve, so that the second pump unit and the exhaust unit are connected via the second common pipe, the second inlet / outlet pipe, the second inlet / outlet valve, and the exhaust pipe, and air inside the second pump unit is discharged via the exhaust unit.

4. A processing liquid supply device according to claim 3, after completion of the delivery of the treatment liquid from the first pump unit, in parallel with the communication between the first pump unit and the second pump unit by the pump connection switching unit, the air supply switching unit connects the air supply source to the second pump unit; a pump connection switching unit that connects the first pump unit to the second pump unit, and a processing liquid supply switching unit that connects the first pump unit to the air supply source, after the second pump unit has finished delivering the processing liquid.

5. A substrate processing apparatus for processing a substrate, a substrate holder that holds a substrate; a processing liquid supplying device according to any one of claims 1 to 4, which supplies a processing liquid to the substrate; A substrate processing apparatus comprising:

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