Wire guide module and ultrasonic wire bonder having the same

Abstract

The wire guide module is developed for its heat resistance. [Solution] The wire guide module includes a main body made of a heat-resistant metal material and / or ceramic material, and the main body 1 has a longitudinally extending wire guide passage 2 having a wire inlet opening 3 and a wire outlet opening 4, and a guide hose 5 provided in the wire guide passage 2.

Description

[Technical Field]

[0001] The present invention relates to a wire guide module for an ultrasonic wire bonder, which is used in a wire bonder to guide a bonding wire through a movable bonding head of the wire bonder to a bonding tool and position it below the bonding tool of the wire bonder to form a conductive bond. The present invention also relates to an ultrasonic wire bonder having the wire guide module. [Background technology]

[0002] Today's common wire guide modules for wire bonders are made primarily of synthetic resins, especially polyoxymethylene (POM), due to their relatively low cost and good sliding properties. Wire guide modules are used to deflect the wire, which is usually fed vertically from above, and guide it downward into the bonding tool. Wire guide modules made of POM are made of a single piece and are usually manufactured using a molded process. Wire guide modules melt at approximately 175°C and are suitable for continuous use only up to temperatures just above 100°C.

[0003] In particular, in thermosonic wire bonding, where the bonding tool and / or the bonding wire and / or the substrate are preheated to be able to bond, for example, copper wires or to reduce the process time in bonding, the supplied thermal energy also heats the wire guide module, which at its hottest point can reach temperatures in the range of 175-425°C. Summary of the Invention [Problem to be solved by the invention]

[0004] The object of the present invention is to develop a wire guide module with respect to its heat resistance. [Means for solving the problem]

[0005] To achieve this object, the present invention has the features of claim 1. The wire guide module therefore comprises a body made of a heat-resistant metallic and / or ceramic material, the body being provided with a longitudinally extending wire guide passage having a wire inlet opening and a wire outlet opening, a guide hose provided in the wire guide passage, and a receiving part for engagingly mounting the wire guide module on a mounting element of a bonding head of an ultrasonic wire bonder.

[0006] A particular advantage of the present invention is that the body made of a heat-resistant metallic or ceramic material can be used at temperatures up to 425°C. Unacceptably high heating is not possible. The guide hose, which guides the bonding wire during bonding and is provided in the wire guide channel, protects the body of the wire guide module according to the present invention from mechanical damage caused by the wire, which is also made of metal. In this respect, the guide hose is configured as a wear part and is much cheaper than the body. The provision of the bonding wire significantly reduces friction, so the guide hose can be guided and deflected with less resistance through the wire guide module.

[0007] For example, the body of the wire guide module according to the present invention can be made of an aluminum-cast iron alloy or a cobalt-chromium-tungsten alloy, each of which has good heat resistance. For example, a body made of a cobalt-chromium-tungsten alloy can be manufactured by additive manufacturing, i.e., 3D printing. For example, a body made of aluminum oxide can be manufactured.

[0008] The guide hose of the wire guide module according to the invention can be made, for example, of polytetrafluoroethylene (PTFE) or of other heat-resistant synthetic resins having a melting temperature above 175° C., preferably above 240° C., particularly preferably above 280° C. For example, the guide hose can be made of silicone.

[0009] The wire guide module or body may, for example, include two essentially parallel, opposing flat sides and a peripheral joining surface joining the flat sides, and the wire entrance and / or exit openings may be formed in the joining surface.

[0010] The wire entry opening can be provided as part of the housing or directly adjacent to the housing, and the wire exit opening can be provided spaced apart from the housing.

[0011] The wire guide module or body can be wedge-shaped with respect to the flat side and / or bonding surface and / or can be tapered toward the wire exit surface, allowing the wire exit opening to be positioned near the tip of the bonding tool and feeding the bonding wire directly underneath the bonding tool.

[0012] According to a preferred embodiment of the invention, the guide hose can be installed in the wire channel with play. Advantageously, this makes it easier to install or replace the guide hose. In addition, the gap between the main body and the guide hose contributes to the guide hose not heating up much more than the main body. Alternatively, the guide hose can be adjusted with respect to its outer diameter relative to the inner diameter of the wire channel so that the guide hose is installed in the wire channel with essentially no play.

[0013] According to one development of the invention, the wire guide channel can be tapered in the direction of the wire exit opening, so that during bonding the bonding wire is fed through the wire entrance opening and pulled through the wire guide channel in the direction of the wire exit opening, and the guide hose is protected by the tapered portion of the wire guide channel against displacement in the direction of the wire exit opening or against accidental detachment.

[0014] According to one development of the invention, the body is provided with a preferably pocket- and / or trough-shaped mounting recess that extends into the wire channel, which facilitates the insertion or replacement of the guide hose and makes it particularly easy to visually check its correct position in the wire channel by visual inspection.

[0015] According to one development of the invention, a clamping body is provided, which is fitted into the mounting recess and fixed so that the clamping body contacts the guide hose. The clamping body thus holds the guide hose. In particular, the clamping body can be configured to be releasably connected to the main body via fastening means. In this way, the clamping body can be loosened and removed, making it easy to replace the guide hose, and the correct position of the guide hose in the wire channel can be visually checked before fitting the clamping body again.

[0016] According to one embodiment of the invention, the body is provided with a protective gas channel having a protective gas inlet opening, in particular the protective gas channel opens into the wire channel, and advantageously a gas used as an oxidation inhibitor, in particular an inert gas or an inert gas mixture, can be supplied through the protective gas channel.

[0017] The supply of protective gas can be effected, for example, in such a way that the protective gas is supplied via the protective gas channel and flows around a guide hose provided in the wire channel with play, and then the protective gas leaves the wire channel via the wire outlet opening.

[0018] For example, the guide hose can be provided with a through-opening on the jacket side, and the guide hose with the through-opening can be arranged in the wire channel and assigned to (integrated into) the protective gas channel, so that the protective gas supplied through the protective gas channel can reach the guide hose through the flow recess. Providing a through-opening is advantageous, especially if the guide hose is arranged in the wire channel with essentially no play.

[0019] According to one development of the invention, the body is provided with longitudinal guides and preferably swallow-tail guides. The longitudinal guides are used to mount the body of the wire guide module according to the invention on a mounting element with a correspondingly shaped receiving portion of the bonding head of a wire bonder. Advantageously, the provision of the longitudinal guides makes it very easy to replace the body. Furthermore, if the body is displaceably held on the bonding head via the longitudinal guides, replacing the bonding tool is easy.

[0020] According to claim 15, the heat-resistant wire guide module is provided, for example, interchangeably, in the bonding head of a translationally movable and rotatable ultrasonic wire bonder, which comprises a heat generator for heating the bonding tool and / or the bonding wire and / or the substrate, and an ultrasonic transducer for exciting ultrasonic vibrations in the bonding tool. Such ultrasonic wire bonders are also called thermosonic wire bonders. The heat generator can be, for example, an electrically operated heating cartridge, a substrate heater, or a laser generator.

[0021] Further advantages, features and details of the invention emerge from the further dependent claims and the following description. The features mentioned therein may be essential to the invention individually and separately or in any suitable combination. The described features and details of the wire guide module according to the invention naturally also apply in relation to the ultrasonic wire bonder according to the invention, and vice versa. Therefore, the disclosures of the individual aspects of the invention can always be cross-referenced. The drawings merely serve to clarify the invention in an exemplary manner and are not of a limiting nature. [Brief explanation of the drawings]

[0022] [Figure 1] 1 is a flat side view of a wire guide module according to the present invention in a first embodiment; [Figure 2] FIG. 2 is a cross-sectional view of the wire guide module according to FIG. [Figure 3] 3 shows a wire guide module according to FIGS. 1 and 2 with an internally guided bonding wire; FIG. [Figure 4] FIG. 4 is an end view of the wire guide module according to FIGS. 1 to 3; [Figure 5] FIG. 2 shows a second embodiment of a wire guide module according to the invention in a flattened side view. [Figure 6] FIG. 10 shows a third embodiment of a wire guide module according to the invention in a flattened side view. [Figure 7] FIG. 7 is a cross-sectional view of the wire guide module according to FIG. 6. [Figure 8] 8 shows a wire guide module according to FIGS. 6 and 7 with an internally guided bonding wire; FIG. [Figure 9] FIG. 10 shows a fourth embodiment of a wire guide module according to the invention in a flat side view. [Figure 10] FIG. 10 is a cross-sectional view of the wire guide module according to FIG. 9. [Figure 11]11 shows a wire guide module according to FIGS. 9 and 10 with an internally guided bonding wire; FIG. [Figure 12] FIG. 12 is an end view of the wire guide module according to FIGS. 9 to 11; [Figure 13] FIG. 10 shows a fifth embodiment of a wire guide module according to the present invention in a flat side view. [Figure 14] FIG. 14 is a cross-sectional view of the wire guide module according to FIG. [Figure 15] 15 shows a wire guide module according to FIGS. 13 and 14 with an internally guided bonding wire; FIG. [Figure 16] 10 shows a sixth embodiment of a wire guide module according to the present invention in a perspective exploded view. [Figure 17] 17 is a perspective view showing the main body of the wire guide module according to FIG. 16. FIG. [Figure 18] 18 is a flat side view of the body according to FIG. 17 with a guide hose provided therein. [Figure 19] 17 is a planar side view of the clamp body of the wire guide module according to FIG. 16. FIG. [Figure 20] 17 is a flat side view of the wire guide module according to FIG. 16 with a wire guided therein. DETAILED DESCRIPTION OF THE INVENTION

[0023] 1 to 4 includes a main body 1 made of a heat-resistant metallic or ceramic material, such as an aluminum-cast iron alloy, a cobalt-chromium-tungsten alloy, or aluminum oxide. The main body 1 has two opposing flat side surfaces 7, 8 and a peripheral joining surface 9 joining the flat side surfaces 7, 8.

[0024] The body 1 is provided with a wire conduction channel 2 for a bonding wire 11. The wire conduction channel 2 comprises a wire inlet opening 3 located in the area of ​​the bonding surface 9 and a wire outlet opening 4. As part of the bonding surface 9, a groove-shaped outlet contour 6 is provided, into which the wire conduction channel 2 opens and which is connected to the wire outlet opening 4.

[0025] A guide hose 5 is provided in the wire guide channel 2. The guide hose 5 is made of a synthetic resin having a melting temperature of more than 175°C, preferably more than 240°C, particularly preferably more than 280°C. In this case, the guide hose 5 is made of PTFE. The guide hose 5 is provided in the wire guide channel 2 essentially without play.

[0026] In order to guide the bonding wire 11 towards a bonding tool (not shown) and position it below the tip of the bonding tool, the bonding wire 11, which is fed in, in particular vertically, through the wire inlet opening 3, is deflected towards the bonding tool in the wire channel 2. The bonding wire 11 leaves the wire channel 2 via the wire outlet opening 4, which is arranged obliquely towards the bonding tool (not shown), and leads to a groove-shaped outlet contour 6 of the wire guide module, which opens towards the bonding tool (not shown).

[0027] In order to mount the wire guide module according to the invention on the bonding head of a wire bonder, the wire guide module comprises a swallow-tailed longitudinal guide section as a receiving section 10. The longitudinal guide section 10 is provided on the body 1 of the wire guide module 1. The longitudinal guide section extends in the region of the opposite flat side surfaces 7, 8 and at the same time surrounds the wire inlet opening 3 of the wire channel 2.

[0028] 5 shows a second embodiment of the invention with a body 1 which, in the first flat side 7, includes an attachment recess 12 which extends to the wire channel 2. The attachment recess 12 is provided, on the one hand, to facilitate the attachment of the guide hose 5 in the wire channel 2. On the other hand, the correct positioning of the guide hose 5 in the wire channel 2 can be visually checked by visual inspection, where the guide hose 5 is preferably arranged essentially without play in the wire channel 2. The attachment recess 12 can be formed as a through recess or in the form of a pocket or valley.

[0029] According to a third embodiment of the present invention shown in FIGS. 6 to 8, the body 1 of the wire guide module according to the present invention has a mounting recess 12 formed in the area of ​​the first flat side surface 7, which extends to the wire guide channel 2. A clamping body 13 is fitted into the pocket- or valley-shaped mounting recess 12. The clamping body 13 is fixed via a bolt 14 that engages with a bolt receiving portion 15 formed in the body 1. When the wire guide module is mounted, the clamping body 13 serves to hold, fix, or position, for example, the guide hose 5 provided in the wire guide channel 2. Similarly, the clamping body 13 can be removed. This facilitates the mounting or removal of the guide hose 5, since the correct positioning of the guide hose 5 in the wire guide channel 2 of the body 1 can be visually checked in the mounting recess 12 formed in the body 1. The mounting recess 12 has a dual function. The mounting recess 12 contributes, on the one hand, to facilitating the mounting and removal of the guide hose 5, and, on the other hand, to accommodating a clamping body 13 provided for holding the guide hose 5.

[0030] 9 to 12 show a fourth embodiment of the wire guide module according to the present invention. In addition to the wire channel 2 and the mounting recess 12, the body 1 is formed with a protective gas channel 16, which has a protective gas inlet opening 17 and extends to the wire channel 2. The protective gas inlet opening 17 is part of a connecting pipe 18, which is provided on the joining surface 9 and serves for connection to a protective gas supply line (not shown). A gas used for oxidation prevention, in particular an inert gas or an inert gas mixture, can be supplied via the protective gas channel 16. In this embodiment of the present invention, the guide hose 5 is arranged with play in the wire channel 2. The protective gas supplied via the protective gas channel 16 reaches the wire channel 2 and flows around the guide hose 5 on the jacket side. The protective gas partially, and preferably, escapes through the wire outlet opening 4 and prevents the bonding wire 11 and / or the substrate (weld partner) from reacting with oxygen in the surrounding air or in the atmosphere during processing of the bonding wire 11, i.e., during the formation of a friction welded bond.

[0031] The protective gas passage 16 extends at an acute angle to the wire guide passage 2 and the inclination of the protective gas passage 16 in the area of ​​the opening causes the protective gas to flow in the direction of the wire outlet opening 4, resulting in a favorable outflow of the protective gas via the wire outlet opening 4.

[0032] In the fifth embodiment of the invention shown in Figures 13 to 15, the wire guide module also includes a protective gas channel 16. Similarly, the guide hose 5 is held essentially without play in the wire guide channel 2. In order to allow the protective gas supplied through the protective gas channel 16 to escape via the wire outlet opening 4, the guide hose 5 is provided with a flow recess 19 on the jacket side. The guide hose 5 with the flow recess 19 is arranged in the wire guide channel 2 and assigned to the protective gas channel 16 so that the protective gas supplied through the protective gas channel 16 can pass through the flow recess 19 to the guide hose 5 and escape via the wire outlet opening 4.

[0033] 16 to 20, the wire guide module includes a main body 1 having a wire guide passage 2 formed therein and a clamping body 13, which is fitted into a mounting recess 12 formed in the main body 1. In the sixth embodiment of the present invention, the mounting recess 12 is realized in such a way that it extends from the first flat side surface 7 to the coupling surface 9. In this respect, the mounting recess 12 allows for even easier removal or installation of the guide hose 5. Furthermore, the clamping body 13 is fixed to the main body 1 of the wire guide module via a bolt 14 as usual.

[0034] In the second to sixth embodiments of the present invention, new structural or functional features of each wire guide module are described, but functional or structural features already described and adopted in the previous embodiments of the present invention are not described anew, and like components and component functions are designated by like reference numerals.

[0035] The invention is not limited to the illustrated embodiment: for example, the mounting recesses can be provided only in the area of ​​the coupling surface and / or can extend longitudinally in the direction of extension of the wire duct. The present invention may also include the following aspects: 1. A wire guide module for an ultrasonic wire bonder, comprising: a body (1) made of a heat-resistant metallic material and / or ceramic material, the body (1) having a longitudinally extending wire guide passage (2) with a wire inlet opening (3) and a wire outlet opening (4); and a guide hose (5) provided in the wire guide passage (2). 2. A wire guide module as described in 1. above, characterized in that the main body (1) contains an aluminum-cast iron alloy and / or a cobalt-chromium-tungsten alloy as a heat-resistant material, and / or the main body (1) is formed of aluminum oxide. 3. A wire guide module according to 1. or 2. above, characterized in that the guide hose (5) is flexible and / or is made of a synthetic resin having a melting temperature above 175°C, preferably above 240°C, particularly preferably above 280°C, and / or the guide hose (5) is preferably made of PTFE. 4. A wire guide module described in any one of 1. to 3. above, characterized in that a pocket-shaped and / or valley-shaped mounting recess (12) is provided in the main body portion (1), and the mounting recess (12) extends to the wire guide passage (2). 5. A wire guide module as described in 4. above, characterized in that it is provided with a clamp body (13) that is fitted into the mounting recess (12) and fixed to the mounting recess (12), and the clamp body (13) is in contact with the guide hose (5) for holding and / or fixing and / or positioning the guide hose (5) in the wire guide passage (2). 6. The wire guide module according to any one of 1. to 5. above, characterized in that the guide hose (5) is provided in the wire guide path (2) with some play. 7. The wire guide module according to any one of 1. to 6. above, characterized in that the wire guide path (4) tapers toward the wire exit opening (4). 8. A wire guide module according to any one of 1. to 7. above, characterized in that a protective gas passage (16) having a protective gas inlet opening (17) for supplying a protective gas is provided in the main body (1). 9. A wire guide module as described in paragraph 8 above, characterized in that the protective gas passage (16) opens into the wire passage (2) and / or that the protective gas passage (16) extends at an acute angle to the wire passage (2) so that the inclination of the protective gas passage (16) in the area of ​​the opening causes the protective gas to flow preferably in the direction of the wire outlet opening (4). 10. A wire guide module as described in 8. or 9. above, characterized in that the guide hose (5) includes a flow recess (19) on the jacket side, and the guide hose (5) having the flow recess (19) is arranged in the wire guide passage (2) and assigned to the protective gas passage (16) so that the protective gas supplied through the protective gas passage (16) passes through the flow recess (19) and reaches the guide hose (5). 11. A wire guide module according to any one of 1. to 10. above, characterized in that a receiving portion (10) is provided for engagingly mounting the wire guide module on an attachment element of the bonding head of the ultrasonic wire bonder, and / or that as the receiving portion (10), a longitudinal guide portion is provided on the main body portion (1) for mounting the main body portion (1) on a correspondingly shaped attachment element of the bonding head of the wire bonder, the longitudinal guide portion being preferably formed as a swallow-tailed guide portion. 12. A wire guide module described in any one of 1. to 11. above, characterized in that the wire exit opening (3) is provided within the accommodating portion (10) and / or is surrounded by the accommodating portion, and / or the wire exit opening (4) is located on the opposite side of the accommodating portion (10). 13. The main body (1) includes a first flat side surface (7), a second flat side surface (8) facing the first flat side surface (7), and a peripheral joining surface (9) joining the first flat side surface (7) and the second flat side surface (8), - the mounting recess (12) is formed in the first flat side (7) or in the area between the first flat side (7) and the connecting surface (9), and / or - the wire inlet opening (3) and / or the wire outlet opening (4) and / or the protective gas inlet opening (17) are provided on the joining surface (9) The wire guide module according to any one of 1. to 12. above, characterized in that: 14. A wire guide module as described in 13. above, characterized in that a groove-shaped outlet contour (6) is provided as part of the coupling surface (9), into which the wire conducting passage (2) opens and / or the outlet contour is connected to the wire outlet opening (4). 15. An ultrasonic wire bonder having a linearly and / or rotationally movable bonding head, wherein a bonding tool excitable to ultrasonic vibrations via an ultrasonic transducer is exchangeably held in the bonding head, and the ultrasonic wire bonder has a heat generator for heating the bonding tool and / or the bonding wire and / or the substrate, and a wire guide module configured as part of the bonding head for feeding the bonding wire to the bonding tool, An ultrasonic wire bonder characterized in that the wire guide module is provided with any one of the wire guide modules described in 1. to 14. above.

Claims

1. 1. A wire guide module for an ultrasonic wire bonder, comprising: a body (1) made of a heat-resistant metallic material and / or ceramic material, the body (1) being provided with a longitudinally extending wire guide passage (2) having a wire inlet opening (3) and a wire outlet opening (4); and a guide hose (5) provided in the wire guide passage (2), the guide hose being made of a synthetic resin having a melting temperature of more than 175°C, the guide hose having a groove-shaped outlet profile (6) formed in the vicinity of the wire outlet opening (4), the wire guide passage (2) opening into the outlet profile (6), and / or the outlet profile (6) being connected to the wire outlet opening (4) upstream of a tip of the outlet profile (6) in the wire feed direction in the wire guide passage (2), and the downstream tip of the guide hose (5) in the wire feed direction in the wire guide passage (2) being discontinued upstream of the wire outlet opening (4).

2. 2. The wire guide module according to claim 1, characterized in that the body (1) contains an aluminum-cast iron alloy and / or a cobalt-chromium-tungsten alloy as heat-resistant material and / or the body (1) is made of aluminum oxide.

3. 3. Wire guide module according to claim 1 or 2, characterized in that the guide hose (5) is flexible and / or is made of PTFE.

4. A wire guide module described in any one of claims 1 to 3, characterized in that a pocket-shaped and / or valley-shaped mounting recess (12) is provided in the main body portion (1), and the mounting recess (12) extends to the wire conduction passage (2).

5. 5. The wire guide module according to claim 4, further comprising a clamping body (13) fitted into the mounting recess (12) and fixed to the mounting recess (12), the clamping body (13) being in contact with the guide hose (5) for holding and / or fixing and / or positioning the guide hose (5) in the wire guide passage (2).

6. 6. The wire guide module according to claim 1, wherein the guide hose (5) is provided with play in the wire guide channel (2).

7. Wire guide module according to any one of the preceding claims, characterized in that the wire-conducting passage (4) is tapered in the direction of the wire-exit opening (4).

8. 8. The wire guide module according to claim 1, wherein the body (1) is provided with a protective gas channel (16) having a protective gas inlet opening (17) for supplying a protective gas.

9. 9. The wire guide module according to claim 8, characterized in that the protective gas channel (16) opens into the wire channel (2) and / or runs at an acute angle to the wire channel (2) in such a way that the inclination of the protective gas channel (16) in the region of the opening causes the protective gas to flow in the direction of the wire outlet opening (4).

10. 10. The wire guide module according to claim 8 or 9, characterized in that the guide hose (5) includes a flow recess (19) on the jacket side, and the guide hose (5) with the flow recess (19) is arranged in the wire channel (2) and assigned to the protective gas channel (16) so that the protective gas supplied through the protective gas channel (16) passes through the flow recess (19) and reaches the guide hose (5).

11. 11. The wire guide module according to claim 1, wherein a receiving portion (10) is provided for engagingly mounting the wire guide module on a mounting element of the bonding head of the ultrasonic wire bonder, and / or wherein the receiving portion (10) comprises a longitudinal guide portion provided on the main body portion (1) for mounting the main body portion (1) on a correspondingly shaped mounting element of the bonding head of the wire bonder, the longitudinal guide portion being formed as a swallow-tail guide portion.

12. 12. The wire guide module according to claim 11, characterized in that the wire outlet opening (3) is provided in the area of ​​the receiving part (10) and / or is surrounded by the receiving part, and / or the wire outlet opening (4) is located on the opposite side of the receiving part (10).

13. The main body (1) includes a first flat side surface (7), a second flat side surface (8) opposite to the first flat side surface (7), and a peripheral joining surface (9) joining the first flat side surface (7) and the second flat side surface (8), - the mounting recess (12) is formed in the first flat side (7) or in the area of ​​the first flat side (7) and the connecting surface (9), and / or - the wire inlet opening (3) and / or the wire outlet opening (4) and / or the protective gas inlet opening (17) are provided on the joining surface (9) 13. A wire guide module according to any one of claims 1 to 12.

14. 1. An ultrasonic wire bonder having a linearly and / or rotationally movable bonding head, wherein a bonding tool that can be excited to ultrasonic vibrations via an ultrasonic transducer is exchangeably held in the bonding head, and wherein the ultrasonic wire bonder has a heat generator for heating the bonding tool and / or the bonding wire and / or the substrate, and a wire guide module configured as part of the bonding head for supplying the bonding wire to the bonding tool, An ultrasonic wire bonder comprising the wire guide module according to any one of claims 1 to 13 as a wire guide module.

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