High-dimensional flexible stamp with tiled reinforced areas

Abstract

1. A flexible stamp comprising at least one reinforcement layer and at least one textured layer having a relief area, wherein at least one portion of the at least one reinforcement layer is disposed below the at least one textured layer and at least partially supports the relief area and the textured layer, the combination of which forms an active area, the portion of the reinforcement layer, the textured layer and the relief area, and the flexible stamp also comprising a non-active area comprising at least one further portion of the at least one reinforcement layer or at least one further reinforcement layer that does not support the textured layer and the relief area, each reinforcement layer having a thermal expansion coefficient of 10 ppm / °C or less, a Young's modulus in the range of 10 GPa to 200 GPa and a layer thickness below 300 μm, and the active area and the non-active area of ​​the flexible stamp occupy at least 90% of the total area of ​​the flexible stamp.

Description

[Technical Field]

[0001] The present invention relates to a flexible stamp with high dimensional stability, which is used for imprinting micro- and nanostructures.

[0002] Micro- and nanostructures are used to improve product performance, for example this can be either improving solar panel efficiency using anti-reflection structures or creating optical 3D effects for displays using microlenses or nanogratings.

[0003] Structures can be added to products using imprinting techniques. Various imprinting techniques exist, such as wafer-scale UV-NIL, roll-to-roll imprinting, or roll-to-plate imprinting. In each case, a master structure, which has the inverse structure of what is required in the product, is pressed onto the product with a UV-curable or heat-curable resin between them. After curing, the resin hardens and the master is removed from the product.

[0004] Regarding imprint technology, the following reasons are given: 1) There is an opportunity to imprint textures on large products (i.e. solar panels or large displays), 2) Replicating multiple products in one replication cycle, which greatly increases throughput; Therefore, a large imprint area is desirable.

[0005] Large area replication requires a large area master, the price of which depends on the manufacturing time and therefore the size of the master. Large area masters are expensive.

[0006] A different solution is to create a larger extended master from a smaller base master. Using a step-and-repeat method, the master structure is replicated multiple times in a matrix structure. There are stitch or join lines between the replicated areas.

[0007] As one can imagine, for applications requiring specific and consistent optical behavior, the dimensional stability of the flexible stamp must be maintained. Prior art approaches have provided different solutions for the dimensional stability of the active area of ​​the imprint master, which is the area carrying the imprint pattern. For example, EP 3370250 A1 discloses transferring a pattern to a molding target material with good positional accuracy. This is achieved by using a glass substrate layer in contact with a resin layer. The glass substrate layer has a tensile stress of 50 MPa or less when bent to a curvature radius of 150 mm or less.

[0008] The prior art has the drawback that the dimensional stability of the stamp outside the effective area cannot be controlled to a greater or lesser extent. This also affects the positional accuracy of the effective area, especially for larger flexible stamps with handling areas outside the effective area. The larger the flexible stamp, the more complicated it becomes to obtain a larger area with high dimensional stability.

[0009] WO 2020 / 074709, for example, describes a flexible stamp with adjustable high dimensional stability. In this publication, a texturing layer is disposed under a reinforcing layer, and the reinforcing layer has a low coefficient of expansion. To protect the reinforcing layer from damage, the reinforcing layer is shielded by other layers. Due to the use and protection of the reinforcing layer, the flexible stamp has high dimensional stability in the region of the texturing layer.

[0010] It is therefore an object of the present invention to overcome or at least reduce the disadvantages of the prior art.

[0011] This problem is solved by a flexible stamp comprising at least one reinforcement layer and at least one textured layer having a relief area, wherein at least one portion of the at least one reinforcement layer is disposed below the at least one textured layer and at least partially supports the relief area and the textured layer. The combination of this portion of the reinforcement layer, the textured layer, and the relief area forms an active area of ​​the flexible stamp. The flexible stamp further comprises an inactive area comprising at least one further portion of the at least one reinforcement layer that is not covered by the textured layer and the relief area, or at least one further reinforcement layer that is not covered by the textured layer and the relief area. "Not covered" in this case means that the at least one further portion of the at least one reinforcement layer or the at least one further reinforcement layer does not support the textured layer and the relief area, and the textured layer and the relief area are not disposed on top of the at least one further portion of the at least one reinforcement layer or the at least one further reinforcement layer. Each reinforcement layer has a thermal expansion coefficient of 10 ppm / °C or less, a Young's modulus in the range of 10 GPa to 200 GPa, and a layer thickness of less than 300 μm. The active and inactive areas of the flexible stamp occupy at least 90% of the total area of ​​the flexible stamp.

[0012] This problem is also solved by a flexible stamp comprising at least one reinforcing layer, the at least one reinforcing layer having a thermal expansion coefficient of 10 ppm / °C or less, a Young's modulus in the range of 10 GPa to 200 GPa, and a layer thickness of less than 300 μm. The at least one reinforcing layer covers at least 90% of the total area of ​​the flexible stamp. In this alternative embodiment of the invention, the flexible stamp may also comprise multiple reinforcing layers, with at least one reinforcing layer covering only a portion of the active area and another reinforcing layer covering only a portion of the non-active area (see FIG. 1). According to this embodiment, all or at least one reinforcing layer is present in a tiled form.

[0013] It is true throughout the present application that each reinforcing layer may be present in tiled form: a plurality of tiled reinforcing tiles may constitute a reinforcing layer.

[0014] The dimensions of the tiles and reinforcement layer depend on the size of the flexible stamp and the master layout.

[0015] For flexible stamps of the order of 1 m to 2 m, the tiles preferably have dimensions of the order of 100 mm x 100 mm or 200 mm x 200 mm.

[0016] The reinforcement layer of the flexible stamp of approximately 1 m to 2 m also preferably has dimensions (length x width) of the order of 500 mm x 500 mm or 600 mm x 600 mm or 400 mm x 600 mm, preferably 1000 mm x 3000 mm to 300 mm x 1000 mm.

[0017] There are gaps between different reinforcing tiles. There are also preferably gaps between multiple reinforcing layers (non-tiled configurations). At least one reinforcing layer and at least one further reinforcing layer are arranged in the same plane. Also, due to the use of tiles (of the same or different reinforcing layers), the tiles are arranged in the same plane. The different reinforcing layers and tiles are not stacked on top of each other.

[0018] Even if only the term "reinforcing layer" is used, the following description applies to at least one reinforcing layer and at least one further reinforcing layer.

[0019] It should be noted that the flexible stamp can comprise more than one reinforcing layer. Therefore, the term "reinforcing layer" will be used below even when multiple reinforcing layers are encompassed. Furthermore, according to the present invention, it is also possible for the flexible stamp to comprise one reinforcing layer, which comprises multiple reinforcing tiles separated from each other by gaps. Multiple reinforcing layers, where one or more reinforcing layers comprise multiple reinforcing tiles, are also contemplated for the flexible stamp.

[0020] If a single reinforcing layer is used, the reinforcing layer is part of the active area and part of the inactive area. If multiple reinforcing layers are used, at least one reinforcing layer is part of the active area and at least another reinforcing layer is part of the inactive area. However, in this embodiment, each reinforcing layer can be part of both the active area and the inactive area.

[0021] Less than 10% of the area of ​​the flexible stamp is preferably not covered by the at least one reinforcing layer and / or the at least one further reinforcing layer.

[0022] The reinforcement layers according to the invention are made of a thermally stable material, and the dimensions of at least one reinforcement layer are selected in such a way that they influence the dimensional stability of the flexible stamp, thus extending the functionality of the reinforcement layers: they not only have the task of supporting the texturing layer, but also improve the dimensional stability of the entire flexible stamp.

[0023] In one embodiment, at least 95% or about 100% of the total area of ​​the flexible stamp is part of the active or inactive area, the term "about" meaning ±5%.

[0024] Preferably, the active area comprises 40%, more preferably 70%, and most preferably 90% of the total area of ​​the flexible stamp, and preferably, the inactive area comprises 60%, more preferably 30%, and most preferably 10% of the total area of ​​the flexible stamp.

[0025] The flexible stamp according to the present invention is particularly useful for roll-to-plate imprint technology, where, unlike wafer-scale handling, the flexible stamp has a large non-active area for handling.

[0026] For wafer-scale applications, the size of the imprint master and the size of the active area are comparable. In roll-to-plate imprinting, a larger flexible stamp is used. This flexible stamp has additional handling areas before and after the active area as non-active areas. In prior art, only the active area has one reinforcing layer, and the non-active area has no additional layer. This has the disadvantage that the handling area is usually thermally unstable. Therefore, at least a portion of the flexible stamp expands or contracts when, for example, temperature, humidity, or tension changes within the equipment or during processing. For most applications, the flexible stamp has a different expansion coefficient than the substrate, which is most often a separate, more or less rigid, metal, polymer, silicon, or glass plate. Therefore, fluctuations in temperature or humidity levels cause differences in the lateral dimensions of the imprinted texture on the substrate after the imprinting process. This can either change the optical properties or misalign the texture relative to the underlying structure or to the pattern applied in a post-processing step. For many applications, only very limited lateral dimensional variations are tolerated, such as a few microns over a meter.

[0027] Due to the use of the thermally stable reinforcement layer (at least one reinforcement layer and / or at least one further reinforcement layer) according to the invention, the entire flexible stamp has high dimensional stability and the imprinted product has excellent quality. The thermally stable reinforcement layer is also arranged in the non-active areas of the flexible stamp, thus avoiding dimensional variations.

[0028] In one embodiment, at least one reinforcing layer and / or at least one additional reinforcing layer are disposed on and in contact with the base layer of the flexible stamp, such that at least 90% of the base layer area (preferably at least 95% and more preferably about 100%) is covered by or in contact with the at least one reinforcing layer and / or at least one additional reinforcing layer. Also, the term "about" here means ±5%, and contacting means that the at least one reinforcing layer and / or at least one additional reinforcing layer is above the base layer, optionally with an intermediate adhesive layer therebetween. In one embodiment, the at least one reinforcing layer and / or at least one additional reinforcing layer is disposed below the base layer, which is above the at least one reinforcing layer and / or at least one additional reinforcing layer (with or without an intermediate adhesive layer therebetween). In one embodiment, multiple reinforcing layers or multiple tiles of a single reinforcing layer are disposed on the base layer in a single plane so that gaps or seams between different reinforcing layers or tiles are as small as possible. These gaps are much smaller than the overall size of the flexible stamp and therefore do not affect its dimensional stability. The gaps between different reinforced layers arranged next to each other, or between different adjacent tiles, or between a reinforced layer and a reinforced tile are preferably less than 1 cm, more preferably less than 2 mm, and most preferably less than 500 μm.

[0029] The use of multiple reinforcement layers, or at least one reinforcement layer divided into multiple reinforcement tiles, offers the advantage of dividing the base layer into dimensionally stable regions, and also provides the opportunity to divide the active area (reinforcement layer combined with the textured layer and relief area) into multiple smaller regions. Small gaps or seams between multiple reinforcement tiles have minimal effect on deviations in positional accuracy, while making it easier to fabricate large flexible stamps with high dimensional stability.

[0030] This invention focuses on thermal expansion, since the effect of lateral dimensional changes becomes more pronounced with temperature fluctuations. Humidity fluctuations have a similar effect. Strain or tension also deforms the flexible stamp. In the context of this description, when thermal expansion is mentioned, it can also be read and meant as humidity expansion or tension expansion, and contraction can be read as a kind of negative expansion.

[0031] In one embodiment of the present invention, the flexible stamp comprises two or more reinforcing tiles, each of which may have a portion of the textured layer thereon, either side by side or in a row, which makes it easier to manufacture large flexible stamps with high dimensional stability.

[0032] In one embodiment, less than 90% or less than 80% of the surface area of ​​at least one reinforcement layer supports the textured layer and relief areas. This means that more than 10% or more than 20% of the surface area of ​​the reinforcement layer is part of the inactive area, meaning that the textured layer and relief areas are not present on the surface area of ​​the reinforcement layer. The reinforcement layer is in contact with the base layer, preferably on the base layer (with or without additional layers in between) or the base layer is on the reinforcement layer (with or without additional layers in between). When multiple reinforcement tiles are used, the surface areas of the individual reinforcement tiles are added together to form the surface area of ​​the reinforcement layer. When more than one reinforcement layer is used, the minimum sum of the surface areas also results from the combination of the individual reinforcement surface areas. Because 90% of the total area of ​​the flexible stamp is covered by at least one reinforcement layer (which may or may not be in tiled form), thermally unstable materials can be used as the base layer. This reduces the cost of the flexible stamp.

[0033] In one embodiment, at least 70%, more preferably at least 80%, and most preferably at least 90% of the base layer area is in contact with at least one reinforcing layer and / or at least one additional reinforcing layer. Preferably, at least one reinforcing layer and / or at least one additional reinforcing layer overlies at least 70%, more preferably at least 80%, and most preferably at least 90% of the base layer area (with or without additional layers in between). In a further preferred embodiment, at least 70%, more preferably at least 80%, and most preferably at least 90% of the base layer area overlies at least one reinforcing layer and / or at least one additional reinforcing layer (with or without additional layers in between). In one embodiment, the entire surface area of ​​the base layer is in contact with at least one reinforcing layer and / or at least one additional reinforcing layer.

[0034] The term "in contact" means that when a reinforcing layer is placed on a base layer (based on a texturing layer), the reinforcing layer overlaps the base layer. The term "in contact" also means that when a reinforcing layer is placed below a base layer (based on a texturing layer), the reinforcing layer supports the base layer. If there are no further layers between the base layer and the reinforcing layer, the contact is direct. In either case, there is contact between the reinforcing layer and the base layer such that thermal expansion of the base layer is avoided by the reinforcing layer.

[0035] In one embodiment of the present invention, the flexible stamp comprises a plurality of reinforcing tiles. By a plurality of reinforcing tiles, we mean at least two, or at least three, or at least four, or at least five reinforcing tiles. The plurality of reinforcing tiles is preferably arranged on and in contact with a base layer, with gaps between the reinforcing tiles. In a further embodiment, a base layer is arranged on and in contact with the plurality of reinforcing tiles. In both embodiments, an additional layer (e.g., an adhesive layer) may be present between the plurality of reinforcing tiles and the base layer. The plurality of reinforcing tiles may be part of at least one reinforcing layer and / or part of at least one additional reinforcing layer. In fact, the portion of the base layer that does not have stabilizing tiles has low dimensional stability. This means that the gap area may expand or contract depending on environmental conditions. The portion of the base layer covered by the reinforcing tiles has high overall dimensional stability due to the dimensional stability of the reinforcing tiles (having features according to the present invention). However, the gap area in the flexible stamp is small compared to the area covered by the reinforcing tiles, thereby achieving high dimensional stability throughout the flexible stamp.

[0036] In one embodiment, at least one reinforcing layer and / or at least one further reinforcing layer has a width of less than 1.3 m and a length of less than 2.5 m. If multiple reinforcing tiles are used, the different reinforcing tiles can have the same or different dimensions (length, width, thickness).

[0037] The reinforcing tile preferably has the length of the initiation area and the width of the flexible stamp, or has several equal parts, for example 1 / 2, 1 / 3 or 1 / 4 of the length and / or width of the initiation area. The initiation area is the area of ​​the flexible stamp where the imprinting process begins. The initiation area is described in International Application PCT / EP2016 / 052873.

[0038] In a further embodiment of the present invention, the flexible stamp comprises an upper layer, which is at least partially disposed on at least one reinforcement layer (see FIG. 3) and / or on at least one further reinforcement layer (starting from the texturing layer). In one embodiment of the present invention, the upper layer comprises the same material as the texturing layer. This allows at least a portion of the upper layer to comprise a relief area (see FIG. 5a, left side). In another embodiment, the upper layer is a combination of different materials, for example, partially comprising a protective foil and partially comprising the same material as the texturing layer. In a further embodiment of the present invention, the flexible stamp comprises multiple upper layers (e.g., the texturing layer is tiled; see FIG. 4, right side). In one embodiment of this embodiment, the texturing layer is located in the same area as multiple upper layers (see FIG. 4, right side) or the upper layer and the texturing layer extend over different levels within the flexible stamp (see FIG. 5a, right side). In each embodiment, a further layer (e.g., an adhesive layer) may be present between the reinforcement layer and the upper layer.

[0039] In embodiments in which multiple texturing layers are part of a flexible stamp, each texturing layer preferably has a relief pattern that is the inverse of the imprint texture on the substrate. The multiple texturing layers may have the same or different relief patterns. Furthermore, the dimensions (length, width, and thickness) of the texturing layers may be the same or different. Preferably, the dimensions of the reinforcing layer are larger than the dimensions of the texturing layer so that the relief pattern is fully supported by the reinforcing layer.

[0040] In one embodiment, the base layer is overlaid with a plurality of reinforcing layers, with at least one textured layer centrally disposed thereamong (see FIG. 2). In another embodiment, the base layer is overlaid with a plurality of reinforcing tiles, with at least one textured layer centrally disposed thereamong (see FIG. 1).

[0041] In one embodiment, the base layer has a frame area, which is not part of the active area and the inactive area. The frame area is formed by less than 100%, preferably less than 10%, of the base layer area that is not in contact with at least one reinforcing layer and / or at least one further reinforcing layer. This means that the frame area is an area in the base layer that is free of reinforcing layers or reinforcing tiles. Preferably, the frame area is located in an edge area of ​​the base layer. Clamps can be attached to this edge area. A front clamp can be attached to one side of the base layer within the frame area, and a rear clamp can be located on the other side of the base layer within the frame area. The clamps hold the flexible stamp in place and allow it to move (see FIG. 6).

[0042] In another embodiment, the flexible stamp includes an outer frame region. In this embodiment, the outer frame region is additionally attached to a flexible stamp having either multiple reinforcing layers and / or multiple reinforcing tiles. By additionally attaching the outer frame region to this flexible stamp, which may or may not have a frame region, the flexible stamp can be clamped without damaging the reinforcing layers. Attachment may be performed by gluing, taping, or nailing the outer frame region to one or both outer edges of the flexible stamp (the base layer, which may or may not have a reinforcing layer). This further increases the design options for the flexible stamp, since the frame region is not a consideration within the flexible stamp. Furthermore, by varying the outer frame region, the same flexible stamp can be adapted to different clamps or imprinting devices (with different rollers).

[0043] In one embodiment, the top layer and / or base layer are foils. The foils are characterized by having a thickness of less than 500 μm and being foldable. Preferably, the foils are made of the same or different materials and / or have the same or different material properties. The dimensions (length, width, and thickness) of the foils (top layer and base layer) may be the same or different from each other. The use of foils has the advantage that they protect the at least one reinforcement layer and / or the at least one further reinforcement layer. Furthermore, the use of foils provides the flexible stamp with increased flexibility, making at least a portion of the flexible stamp foldable. In one embodiment, the top layer is composed of a curable resin. In this embodiment, the resin is UV-curable or heat-curable and has a viscosity of less than 10,000 mPa·s at room temperature. The cured resin can have a relief pattern that forms a relief area. The use of resin has the advantage that it protects the reinforcement layer. Furthermore, the resin can be applied easily and precisely and can be adapted to different shapes.

[0044] In one embodiment, the top layer and / or the base layer has a thickness of 25 to 500 μm, preferably 30 to 300 μm, or more preferably 100 to 250 μm.

[0045] In one embodiment, the upper layer has a portion with a relief pattern that is the inverse of the imprint texture on the substrate. This means that a portion of the upper layer may be a textured layer. The portions of the upper layer that do not have the imprint texture (non-textured portions) should not be assigned to the textured layer. Such portions of the upper layer may be arranged on at least one reinforcement layer and / or at least one further reinforcement layer.

[0046] According to the present invention, the at least one reinforcement layer and the at least one further reinforcement layer have a thermal expansion coefficient of 10 ppm / °C or less, a Young's modulus in the range of 10 GPa to 200 GPa, and a layer thickness of less than 300 μm. The at least one reinforcement layer has at least one region supporting the relief region of the at least one texturing layer. In one embodiment, the at least one reinforcement layer and / or the at least one further reinforcement layer is divided into reinforcement tiles. It should be noted that each reinforcement tile has a thermal expansion coefficient of 10 ppm / °C or less, a Young's modulus in the range of 10 GPa to 200 GPa, and a layer thickness of less than 300 μm. The use of more than one reinforcement layer, with each or a single reinforcement layer being divided into several reinforcement tiles, is also part of the present invention. The flexible stamp advantageously has several different layers, so that, for example, the thermal behavior of the flexible stamp can be well predetermined.

[0047] In a further embodiment, at least one reinforcing layer and / or at least one further reinforcing layer is at least partially shielded by at least one layer selected from the group consisting of at least one textured layer, a base layer, and one or more further layers. For example, a portion of the reinforcing layer (at least one reinforcing layer and / or at least one further reinforcing layer) can be embedded in the textured layer so that corners and / or edges of the reinforcing layer are at least partially shielded (see FIG. 5a). When at least one further reinforcing layer is shielded by the textured layer, the textured layer does not have a relief region and is therefore merely a top layer. To shield the corners and / or edges of the reinforcing layer, the reinforcing layer can also be embedded in the base layer. Furthermore, an adhesive layer can be used as an additional layer, which can at least partially shield the reinforcing layer (see FIG. 3, left side). In an embodiment, at least one corner, preferably at least two corners, more preferably at least three corners, even more preferably at least four corners, and most preferably all corners of one or more reinforcing layers are at least partially shielded by at least one layer. In a further embodiment, at least one edge portion of the reinforcement layer is at least partially obscured by at least one layer, preferably at least two edge portions, more preferably at least three edge portions, even more preferably at least four edge portions, and most preferably all edge portions. The number of obscured corners and edge portions can be the same or different. Preferably, all corners and edge portions of the reinforcement layer are at least partially obscured. It is believed that at least partially obscuring the corners and / or edge portions of the reinforcement layer eliminates or at least reduces the susceptibility of the reinforcement layer to breakage, thereby enabling repeated use of the reinforced flexible stamp. In one embodiment, the at least one layer obscuring the corners and / or edge portions of the reinforcement layer at least partially obscures the first major surface and the second major surface.Preferably, the at least one layer that at least partially shields the first major surface and the at least one layer that at least partially shields the second major surface are separate layers, as described in WO 2020 / 074709, at least Figure 2 and pages 13-15 of which are incorporated herein by reference.

[0048] In embodiments in which at least one reinforcing layer and / or at least one further reinforcing layer is divided into a plurality of reinforcing tiles, one or more or all reinforcing tiles can be shielded by at least one layer selected from the group consisting of at least one texturing layer, a base layer and one or more further layers. With regard to the different options for the shielding and shielded parts of the reinforcing tiles, the same applies as in the previous part described for the shielding of at least one reinforcing layer.

[0049] In one embodiment, the flexible stamp includes multiple reinforcement layers and a textured layer (with a relief area). The textured layer is disposed on top of, and preferably in contact with, the reinforcement layer. Each textured layer is combined with the reinforcement layer to form a master unit. Different master units are arranged like tiles within (and constitute) the effective area. The adjacent edges of adjacent master units are parallel to each other, and the master units forming the effective area are arranged so that the joint lines between the master units have intersections between master units where a maximum of three corners of adjacent master units meet. When the master units are assembled so that the joint lines between the assembled master units have intersections between master units where a maximum of three corners of adjacent master units meet, i.e., where a maximum of three master unit vertices meet, misalignment of the master units and the rotated tiles can be reduced or even avoided. This is described in unpublished European Patent Application No. 19202151.7.

[0050] In a further embodiment, the master units are arranged in rows within the active area perpendicular to the length of the active area, with the master units in one row exhibiting an offset from the master units in an adjacent row.

[0051] The present invention further relates to an imprinting apparatus for a flexible stamp according to the above description. The imprinting apparatus comprises a plurality of rollers for transporting the flexible stamp through a clamp. Each roller has the same radius r. As described above, the flexible stamp has a frame area where the reinforcing layer is not arranged, where a transport clamp can be attached to the flexible stamp. To ensure that the flexible stamp is transported smoothly and at a constant speed without rattle, the dimensions of the flexible stamp and the rollers must match each other. Otherwise, the clamps will come into contact with one or more rollers, and the imprinting process will be affected by friction between both parts of the apparatus. The first length E starts from the beginning of the (first) effective area in the direction opposite to the imprinting direction and ends at the first clamp (front clamp). The second length F of the frame area starts from the end of the (last) effective area in the imprinting direction and ends at the second clamp (rear clamp) in the imprinting direction. In one embodiment, the first length E and the second length F are equal. The minimum lengths of E and F are determined by the following formula:

number

[0052] If the length E and the length F are shorter, the pressure during imprinting of the active area may not be uniform.

[0053] The present invention will now be described in more detail with reference to the following figures, the scope of which is not limited by the figures. [Brief explanation of the drawings]

[0054] [Figure 1] FIG. 1 is a schematic diagram showing a flexible stamp with a tiled reinforcement layer and a further reinforcement layer. [Figure 2] 1 is a schematic diagram showing two versions of a flexible stamp, in each of which two reinforcing tiles are used with an active area in between. [Figure 3] 1 is a schematic diagram showing two different versions of a flexible stamp, in the first version an additional layer shields the reinforcement layer, and in the second version the reinforcement layer is tiled. [Figure 4] 1A-1C are schematic diagrams showing two different versions of a flexible stamp with a tiled reinforcing layer. [Figure 5a] 1A-1C are schematic diagrams showing two different versions of a flexible stamp in which a textured layer shields the reinforcing tiles. [Figure 5b] 1A-1C are schematic diagrams showing two different versions of a flexible stamp with a special position of the base layer relative to the reinforcement layer. [Figure 6] FIG. 1 is a schematic diagram illustrating an imprinting apparatus having a flexible stamp and a roller. [Figure 7] 7A and 7B are schematic diagrams illustrating variations of flexible stamps for the imprinting apparatus of FIG. 6;

[0055] FIG. 1 shows a top perspective view of a flexible stamp 1. The flexible stamp comprises at least one active area 2 and, in the embodiment according to FIG. 1, three reinforcing layers 4′, 4″. The reinforcing layers 4′, 4″ are arranged in contact with a base layer 5. Further layers between the reinforcing layers 4′, 4″ and the base layer 5 are not shown. These further layers are preferably adhesive layers. The active area 2 comprises a number of reinforcing tiles 4_1, 4_2 (part of the reinforcing layer 4′) and a number of texturing layers on the reinforcing tiles 4_1, 4_2. On the right side of FIG. 1, an enlarged side view of the active area 2 is shown in detail in a circle. The reinforcing tiles are arranged on the base layer 5, and a texturing layer 203 with a relief area 203B is arranged on top of the reinforcing tiles 4. The texturing layer 203 is therefore supported by the reinforcing tiles 4. In this embodiment, the texturing layer 203 shields the reinforcing tiles 4. The relief areas 203B may be the same or different for the different textured layers 203. As can be seen in FIG. 1 , the two further reinforcement layers 4" are outside the active area 2 and are not covered by the textured layer 203. The two further reinforcement layers 4" are part of the non-active area 12, which is essentially devoid of a textured layer. Furthermore, the frame area 6 on the base layer 5 does not have any reinforcement layers 4' and 4" and is thus not part of the active area 2 or the non-active area 12. Although not shown, it is also possible for reinforcement tiles to extend over the entire base layer 5. According to this embodiment, there is no frame area 6 on the flexible stamp 1. Furthermore, in one embodiment, the frame area 6 is only present in front of the reinforcement layers 4' and 4" and / or behind the reinforcement layers (or tiles) 4' and 4" in the imprint direction, while the reinforcement layers 4' and 4" extend to the side edges of the base layer 5.

[0056] 2 shows top perspective views of two different embodiments of a flexible stamp 1. In both embodiments, the flexible stamp 2 comprises two reinforcing tiles 4_1 and 4_2 with a textured layer 203 between them. In both embodiments, the base layer 5 is almost completely covered by the reinforcing tiles 4_1 and 4_2. This means that the reinforcing tiles 4_1 and 4_2 overlap almost the entire base layer area 5. Only the frame area 6 of the base layer 5 is free of the reinforcing layer 4. The reinforcing tiles 4_1 and 4_2 are part of the active area 2 and also part of the non-active area 12. The non-active area 12 is constituted by the parts of the reinforcing tiles 4_1 and 4_2 that are not covered by the textured layer 203.

[0057] Figure 3 shows side perspective views of two different embodiments of flexible stamp 1. In the first embodiment, on the left side of Figure 3, reinforcement layer 4 is shielded by additional layer 8. Textured layer 203, which comprises relief areas 203B, is disposed on top of top layer 7. Additional layer 8 and reinforcement layer 4 reside on base layer 5. Base layer 5 and top layer 7 have the same size in this embodiment.

[0058] On the right side of Figure 3, the flexible stamp 1 comprises a number of reinforcing tiles, which form a reinforcing layer 4. A textured layer 203 is disposed on top of the reinforcing layer 4 with a top layer 7 therebetween.

[0059] 4 shows side perspective views of two different embodiments of a flexible stamp 1. On the left, the flexible stamp 1 comprises a number of reinforcing tiles 4_1, 4_2, 4_3, which form a reinforcing layer 4. The reinforcing tiles 4_1, 4_2, 4_3 are arranged on a base layer 5 with gaps between them. A textured layer 203 is arranged on top of the reinforcing tile 4_2. In this embodiment, the textured layer 203 is on top of the top layer 7, which is on top of the reinforcing tiles 4_1, 4_2, 4_3. The reinforcing tile 4_2 and the textured layer 203 together form the active area 2. The non-active area 12 is provided by the other two reinforcing tiles 4_1, 4_3.

[0060] On the right side of Figure 4, the flexible stamp 1 comprises a number of reinforcing tiles 4_1, 4_2, 4_3 on top of a base layer 5. In this embodiment, the textured layer 203 is part of the top layer 7 and is located only on top of the reinforcing tile 4_2.

[0061] Figure 5a shows two different embodiments of a flexible stamp 1. On the left side of Figure 5, the flexible stamp 1 comprises a number of reinforcing tiles 4_1, 4_2, 4_3, which are shielded by a textured layer 203. In this embodiment, the textured layer is a top layer, and only a part of the top layer comprises a relief area.

[0062] On the right side of Fig. 5a, the flexible stamp comprises reinforcing tiles 4_1, 4_2, 4_3, and the top layer 7 is also divided into tiles 7_1 and 7_2. A textured layer 203 is disposed on top of and shields reinforcing tile 4_2. Reinforcing tiles 4_1 and 4_3 are covered by top layer tiles 7_1 and 7_2.

[0063] On the left side of FIG. 5b, the top layer 5 is arranged on top of the reinforcing layer 4, and an additional layer 8 shields the reinforcing layer. This additional layer 8 is, for example, an adhesive layer. A textured layer 203 (with a relief area) is arranged on top of the base layer 5, but is supported by the reinforcing layer 4. As long as the reinforcing layer 4 is arranged below the textured layer 203, the reinforcing layer 4 can support the textured layer 203. However, the reinforcing layer 4 also stabilizes the base layer 5. It is not critical whether the reinforcing layer 4 is arranged above or below the base layer 5. In either case, the reinforcing layer 4 thermally stabilizes the base layer 5, even if further layers are arranged between the reinforcing layer 4 and the base layer 5.

[0064] On the right side of Figure 5b, the positions of the base layer 5 and top layer 7 are reversed.

[0065] As can be seen at least in Figures 4, 5a, and 5b, the function of the reinforcing layer 4 is not only to support the textured layer 203 and the relief area 203B, but also to ensure the stability of the flexible stamp 1. The reinforcing layer 4 is located above the base layer 5 (e.g., as a reinforcing tile) or below the base layer 5, also outside the relief area 203B in the non-active area 12, thereby ensuring the stability of the base layer 5 and thus increasing the stability of the entire flexible stamp 1. Replacing one large reinforcing layer 4 with reinforcing tiles 4_1, 4_2, and 4_3 has the advantage of significantly reducing manufacturing costs while maintaining the flexibility of the flexible stamp 1. Furthermore, the use of reinforcing tiles 4_1, 4_2, and 4_3 improves the thermal stability of the base layer 5 while not interfering with the flexibility of the stamp 1. The reinforced tiles 4_1, 4_2, 4_3 are typically made of glass, which makes them easier to handle and less expensive than large sheets of thin glass.

[0066] 6 shows a schematic diagram (and simplified representation) of an apparatus for the imprint process. A flexible stamp 1 is transported via rollers R during the imprint process. A front clamp 9 and a rear clamp 10 are fixed to a frame area 6 of the flexible stamp 1. On the flexible stamp there is an active area 2. The distance of the active area 2 to the front clamp 9 in the direction opposite to the imprint direction 11 and to the rear clamp 10 in the imprint direction 11 are distances E and F, respectively. The total length G of the flexible stamp 1 is given by the length of the reinforcing layer 4 and the lengths E and F. The distance E or F must be adapted to the diameter of the rollers R. Otherwise, the clamps 9 and 10 will come into contact with one or more rollers R and the imprint process will be affected or no longer possible. The distance E or F is calculated using the following formula: E=F=1 / 4 of the circumference of roller R Circumference of roller R = 2*π*r [wherein r is the radius of the roller R] must be satisfied.

[0067] FIG. 7 shows a schematic diagram (and simplified representation) of two reinforcement layers 4_1 and 4_2 with active areas 2 and inactive areas 12, together with an apparatus for the imprint process.

Claims

1. A flexible stamp (1), at least one reinforcing layer (4); At least one textured layer (203) having a relief area (203B); Equipped with at least one portion of said at least one reinforcing layer (4) is arranged below said at least one textured layer (203) and at least partially supports said relief area (203B) and said textured layer (203); the combination of the portion of the reinforcing layer (4), the textured layer (203), and the relief area (203B) forms an effective area (2); the flexible stamp also comprises an inactive area (12) comprising at least one further part of the at least one reinforcement layer (4) that is not covered by the texturing layer (203) and the relief area (203B) or at least one further reinforcement layer that is not covered by the texturing layer (203) and the relief area (203B), Each reinforcing layer (4) has a thermal expansion coefficient of 10 ppm / °C or less, a Young's modulus in the range of 10 GPa to 200 GPa, and a layer thickness of less than 300 μm; In the flexible stamp (1), the active area (2) and the inactive area (12) of the flexible stamp (1) occupy at least 90% of the total area of ​​the flexible stamp (1); the at least one reinforcing layer (4) and / or the at least one further reinforcing layer are arranged on and in contact with a base layer (5), the at least one reinforcing layer (4) and / or the at least one further reinforcing layer are constituted by a plurality of reinforcing tiles (4_1, 4_2, 4_3), the different reinforcing tiles (4_1, 4_2, 4_3) having gaps between them and being arranged on and in contact with the base layer (5). Flexible stamp (1).

2. A flexible stamp (1), at least one reinforcing layer (4); At least one textured layer (203) having a relief area (203B); Equipped with at least one portion of said at least one reinforcing layer (4) is arranged below said at least one textured layer (203) and at least partially supports said relief area (203B) and said textured layer (203); the combination of the portion of the reinforcing layer (4), the textured layer (203), and the relief area (203B) forms an effective area (2); the flexible stamp also comprises an inactive area (12) comprising at least one further part of the at least one reinforcement layer (4) that is not covered by the texturing layer (203) and the relief area (203B) or at least one further reinforcement layer that is not covered by the texturing layer (203) and the relief area (203B), Each reinforcing layer (4) has a thermal expansion coefficient of 10 ppm / °C or less, a Young's modulus in the range of 10 GPa to 200 GPa, and a layer thickness of less than 300 μm; In the flexible stamp (1), the active area (2) and the inactive area (12) of the flexible stamp (1) occupy at least 90% of the total area of ​​the flexible stamp (1); the at least one reinforcing layer (4) and / or the at least one further reinforcing layer are arranged on and in contact with a base layer (5), the at least one reinforcing layer (4) and / or the at least one further reinforcing layer are constituted by a plurality of reinforcing tiles (4_1, 4_2, 4_3), the different reinforcing tiles (4_1, 4_2, 4_3) having seams between them and being arranged on and in contact with the base layer (5). Flexible stamp (1).

3. 3. The flexible stamp (1) according to claim 1 or 2, wherein the at least one reinforcing layer (4) and / or the at least one further reinforcing layer has a width of less than 1.3 m and a length of less than 2.50 m.

4. The flexible stamp (1) according to any one of claims 1 to 3, wherein the flexible stamp (1) has a frame area (6) that is free of a reinforcing layer (4).

5. 5. The flexible stamp (1) according to claim 1, wherein the flexible stamp (1) comprises an upper layer (7), the upper layer (7) being arranged on the at least one reinforcing layer (4).

6. 6. The flexible stamp (1) according to claim 5, wherein the texturing layer (203) is part of the upper layer (7) or the texturing layer (203) is on top of the upper layer (7).

7. the top layer (7) and / or the base layer (5) are made of foil and / or hardened resin, 7. The flexible stamp (1) according to claim 6, wherein the top layer (7) and the base layer (5) have the same or different sizes and / or the top layer (7) is made of the same or different material as the base layer (5).

8. The flexible stamp (1) according to any one of the preceding claims, wherein the flexible stamp (1) comprises two or more textured layers (203) with two or more relief areas (203B).

9. The flexible stamp (1) according to claim 6, wherein the top layer (7) and / or the base layer (5) has a thickness of 25 to 500 μm.

10. 10. The flexible stamp (1) according to any one of claims 1 to 9, wherein the at least one reinforcement layer (4) and / or the at least one further reinforcement layer is shielded by at least one layer selected from the group consisting of the at least one texturing layer (203), the base layer (5) and one or more further layers (8).

11. 11. The flexible stamp (1) according to claim 1, wherein each textured layer (203) having a relief area (203B) is combined with a reinforcement layer (4) to form a master unit, the adjacent edges of adjacent master units being parallel to each other, and the master units being arranged such that a joint line between the master units has only an intersection point between master units where a maximum of three corners of adjacent master units meet.

12. 12. The flexible stamp (1) of claim 11, wherein the master units are arranged in rows perpendicular to the length of the base layer (5), and the master units in one row exhibit an offset from the master units in an adjacent row.

13. 2. The flexible stamp (1) according to claim 1, wherein the flexible stamp (1) comprises an outer frame area, the outer frame area being reversibly connected to the flexible stamp (1) via a connecting means.

14. An imprint apparatus, A flexible stamp (1) according to any one of claims 1 to 13, a roller having a radius r; Equipped with The roller guides the flexible stamp (1), which has a first length E starting from the beginning of the (first) effective area in the direction opposite to the imprint direction and ending in a first clamp (front clamp), and a second length F starting from the end of the (last) effective area in the imprint direction and ending in a second clamp (rear clamp) in the imprint direction, and which satisfies the following formula: [Equation 1] wherein L is either the first length E or the second length F. Satisfies the following: Imprinting device.

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