Film peeling device and film peeling method

Abstract

To easily peel off a film closely contacted to a workpiece with a simple structure.SOLUTION: A film peeling device 100 includes: a support plate 20 disposed above a tray 300 on which a workpiece is placed, and is movable in a vertical direction between a first position and a second position higher than the first position; a suction rod extending downward from the support plate 20 toward the tray 300 and having, at a lower end, a suction pad that contacts an upper surface of a film when the support plate 20 is in the first position; a first pressing rod extending downward from the support plate 20 toward the tray 300 and having, at a lower end, a first pressure pad that contacts the upper surface of the film when the support plate 20 is in the first position; and a support part that supports the suction rod and the first pressing rod so that, when the support plate 20 moves from the first position to the second position, the first pressing rod starts to rise after the suction rod starts to rise.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a film peeling device and a film peeling method for peeling off a film that has been adhered to a workpiece. [Background technology]

[0002] As an example of this type of device, a device that peels off a protective sheet from a prepreg sheet to which the protective sheet has been attached is known (see, for example, Patent Document 1). In the device described in Patent Document 1, air is sprayed onto the end face of the prepreg sheet to peel off the protective sheet from the prepreg sheet. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2020-109046 Summary of the Invention [Problem to be solved by the invention]

[0004] However, with a configuration that jets air, such as the device described in Patent Document 1, it is difficult to peel off a film that has adhered to a workpiece. [Means for solving the problem]

[0005] One aspect of the present invention is a film peeling device that peels a film from a workpiece to which the film is adhered, and includes: a movable body arranged above a mounting section on which the workpiece is placed, capable of moving vertically between a first position and a second position higher than the first position; a first rod extending downward from the movable body toward the mounting section and having a first abutment at its lower end that abuts against the upper surface of the film when the movable body is located at the first position; and a second rod extending downward from the movable body toward the mounting section and having a second abutment at its lower end that abuts against the upper surface of the film when the movable body is located at the first position. a third rod extending downward from the movable body toward the placement portion and having a third contact portion at a lower end thereof that contacts the upper surface of the film when the movable body is located at the first position;and a support portion that supports the first rod and the second rod from the moving body so that the first rod and the second rod move up and down in accordance with the up and down movement of the moving body. The first contact portion has an adsorption portion that adsorbs the film, and the second contact portion has a sliding portion that allows the film to move horizontally while being pressed by the second rod. The third contact portion has an elastic body so that the film can be displaced while being pressed by the third rod. The support portion supports the first rod and the second rod so that, when the moving body moves from the first position to the second position, the first rod starts to rise and then the second rod starts to rise. The third rod is further supported so that it starts to rise before the second rod starts to rise. do.

[0006] Another aspect of the present invention is a film peeling method for peeling a film from a workpiece to which the film is adhered, comprising: a first step of positioning a movable body above the mounting section, the movable body supporting a first rod extending downward toward a mounting section on which the workpiece is placed and having a first abutment portion at its lower end, and a second rod extending downward toward the mounting section and having a second abutment portion at its lower end; a second step of lowering the movable body to a first position where the first abutment portion and the second abutment portion abut against the upper surface of the film; and a third step of raising the movable body while adsorbing the film with the first abutment portion. In the first step, a moving body that further supports a third rod that extends downward toward the mounting part and has a third contact part at its lower end is disposed above the mounting part. The second contact portion has a sliding portion that allows the film to move horizontally while being pressed by the second rod. The third contact portion has an elastic body so that the film can be displaced while being pressed by the third rod. In the third step, the first rod No. 1 The second rod rises until it reaches the specified height. The third rod is raised until the first rod is raised by a second predetermined amount that is smaller than the first predetermined amount. do not. [Effects of the Invention]

[0007] According to the present invention, a film adhered to a workpiece can be easily peeled off with a simple configuration. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a diagram schematically illustrating the overall configuration of a film peeling device according to an embodiment of the present invention. [Figure 2A] Arrow view IIA of Figure 1. [Figure 2B] View of Figure 2A from the opposite side. [Figure 3] 2 is a plan view showing the arrangement of a plurality of pads included in the film peeling device of FIG. 1. FIG. [Figure 4A] 2A and 2B are diagrams showing a schematic configuration of a suction rod and a first pressing rod included in the film peeling device of FIG. 1, and illustrating an example of the operation of the suction rod and the first pressing rod. [Figure 4B] FIG. 4B is a diagram showing an example of the operation following FIG. 4A. [Figure 4C] FIG. 4C is a diagram showing an example of the operation following FIG. 4B. [Figure 4D] FIG. 4D is a diagram showing an example of the operation following FIG. 4C. [Figure 5A] 2A and 2B are diagrams showing a schematic configuration of a suction rod and a second pressing rod included in the film peeling device of FIG. 1, and illustrating an example of the operation of the suction rod and the second pressing rod. [Figure 5B] FIG. 5B is a diagram showing an example of the operation following FIG. 5A. [Figure 5C] FIG. 5C is a diagram showing an example of the operation subsequent to FIG. 5B. [Figure 6] FIG. 5D is a plan view showing the operation corresponding to FIG. 5C on a protective film. [Figure 7] 10A and 10B are diagrams showing the amount of movement of the pad over time in the lifting process in the film peeling method according to the embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, an embodiment of the present invention will be described with reference to Figures 1 to 7. A film peeling device according to an embodiment of the present invention is configured to peel and remove a protective film from the surface of a workpiece to which the protective film has been previously attached. The workpiece may be, for example, a resin frame to be incorporated into a fuel cell stack, which is a component of a fuel cell.

[0010] This frame, also known as a subgasket, supports the membrane electrode assembly (MEA), which is an assembly of an electrolyte membrane and anode and cathode electrodes arranged on either side of the electrolyte membrane. A fuel cell stack containing multiple power-generating cells is constructed by alternately stacking a predetermined number of frames integrated with such an assembly and metal separators.

[0011] Fig. 1 is a diagram showing a schematic diagram of the overall configuration of a film peeling device 100 according to an embodiment of the present invention. As shown in Fig. 1, the film peeling device 100 includes an industrial robot 10 having articulated arms 11 and 12 and a hand 13 provided at the tip of the arm 12, a support plate 20 attached to the hand 13, and a plurality of rods 30 supported by the support plate 20.

[0012] The arms 11 and 12 are rotatably connected via a rotation axis 10a, and the arm 12 and hand 13 are rotatably connected via a rotation axis 10b. The configuration of the robot 10 (such as the number of arms) is not limited to that shown in the figure. The arms 11 and 12 and the hand 13 are rotated by the drive of an actuator 14, such as a servo motor, provided on the rotation axes 10a and 10b, thereby changing the position and posture of the hand 13. The actuator 14 is controlled by an ECU 15. The ECU 15 is an electronic control unit including a computer having a CPU, ROM, RAM, and other peripheral circuits.

[0013] The support plate 20 is fixed to a plate 13a at the tip of the hand 13 via a spacer 13b. Therefore, the support plate 20 is provided approximately parallel to the plate 13a and spaced a predetermined distance from the plate 13a, and moves integrally with the hand 13. Therefore, the position and attitude of the support plate 20 can be controlled by the ECU 15. Specifically, while the support plate 20 is held in the horizontal attitude shown in FIG. 1, the support plate 20 can be moved in the direction of arrow Z, i.e., raised and lowered in the vertical direction.

[0014] The rod 30 extends in a direction substantially perpendicular to the support plate 20, in other words, in the up-and-down direction relative to the horizontally oriented support plate 20. A pad 40 is provided at the lower end of the rod 30. The pad 40 includes a suction pad that adsorbs an object 200, such as a workpiece 201 or a protective film 202. The rod 30 of the suction pad is configured in a cylindrical shape, and an internal passage is connected to a vacuum generator. By generating a negative pressure (vacuum pressure) in the suction pad via the vacuum generator, the object 200 can be adsorbed. FIG. 1 shows the support plate 20 in a horizontal position with the protective film 202 adsorbed thereto.

[0015] The support plate 20 moves up and down above a tray 300 with an open top. Workpieces 201 are stored in a stacked state in the tray 300, and the tray 300 serves as a platform for the workpieces 201. Protective films 202 are attached between the workpieces 201, and the workpieces 201 and the protective films 202 are stacked alternately. The protective films 202 are thin, flexible resin films such as polyethylene naphthalate. Inside the tray 300, the protective films 202 are in close contact with the surfaces of the workpieces 201.

[0016] FIG. 2A is a plan view (view along arrow IIA in FIG. 1) showing the state inside the tray after the protective film 202 has been separated from the surface of the workpiece 201. As shown in FIG. 2A, the workpiece 201 is placed on the top of the tray 300. As described above, the workpiece 201 is a substantially rectangular resin frame that supports a membrane electrode assembly of a fuel cell. A substantially rectangular opening 204 is provided in the center of the workpiece 201. After the workpiece 201 is removed from the tray 300, a membrane electrode assembly is formed to cover the opening 204. The workpiece 201 also has a plurality of through-holes 205 that form flow paths for supplying and discharging the fuel gas, oxidant gas, and coolant.

[0017] In this way, the workpiece 201 is provided with the opening 204 and the through-hole 205. Therefore, when the workpiece 201 is positioned at the top of the tray 300 (FIG. 2A), the protective film 202 below the workpiece 201 can be pressed down from above by a pressure pad (not shown) via the opening 204 or the through-hole 205. Then, by adsorbing the workpiece 201 with a suction pad while pressing the protective film 202 with the pressure pad, the vacuum can be broken at the interface between the workpiece 201 and the protective film 202, and the workpiece 201 and the protective film 202 can be separated. Note that the through-hole 205 does not need to be provided in the workpiece 201 when the workpiece 201 is placed on the tray 300.

[0018] In contrast, when the protective film 202 is located at the top of the tray 300 (FIG. 2B), the protective film 202 does not have any through holes, so the press pad cannot press down on the workpiece 201 below the protective film 202 from above. This makes it difficult to peel the protective film 202, which is in a tight contact state, from the workpiece 201, and if the protective film 202 is raised via a suction pad, there is a risk that the workpiece 201 will also be raised together with the protective film 202. Therefore, in this embodiment, the film peeling device 100 is configured as follows so that the protective film 202 can be easily peeled off even in the case shown in FIG. 2B.

[0019] The film peeling device 100 according to this embodiment has three types of rods and pads that operate differently from one another. Hereinafter, for convenience, the three types of rods will be referred to as suction rods, first pressure rods, and second pressure rods, and the pads provided at the tips of these suction rods, first pressure rods, and second pressure rods will be referred to as suction pads, first pressure pads, and second pressure pads, respectively.

[0020] 3 is a diagram showing the positions of pads 40 (suction pad 41, first pressure pad 42, second pressure pad 43) that are brought into contact with the upper surface of protective film 202. In the diagram, suction pad 41 is indicated by a circle, first pressure pad 42 by a double circle, and second pressure pad 43 by a triple circle.

[0021] First, the relationship between the suction rod 31 and the first presser rod 32 will be described. As shown in Fig. 3, the protective film 202 has four corners 202a and four sides (edges 202b). A first presser pad 42 is arranged inside each of the four corners 202a. More specifically, the first presser pad 42 is arranged on a diagonal line (not shown) connecting the corners 202a, 202a, and adjacent to the edge 202b of the protective film 202. A suction pad 41 is arranged adjacent to each first presser pad 42 inside the first presser pad 42 (on the opposite side of the corner 202a).

[0022] Fig. 4A is a diagram showing a schematic configuration of the suction rod 31 and the first pressing rod 32, i.e., a side view of region IV in Fig. 3. Fig. 4A shows the support plate 20 in the middle of its downward movement, and illustrates the point at which the first pressing pad 42 begins to contact the protective film 202.

[0023] As shown in FIG. 4A , the suction rod 31 extends vertically through the support plate 20 and is supported by the support plate 20 via the support portion 21. The support portion 21 is a fixing portion that fixedly supports the suction rod 31 on the support plate 20, and is configured, for example, so that a flange portion extending horizontally from the outer circumferential surface of the suction rod 31 is fixed to the upper surface of the support plate 20 via bolts. The support portion 21 may be formed by a joining means such as welding, and the suction rod 31 may be fixed to the support plate 20 via the joining means. The suction rod 31 is formed in a cylindrical shape and has an internal passage that extends vertically. The internal passage is connected to a vacuum generator (not shown).

[0024] The suction pad 41 is made of an elastic material such as rubber or resin. The suction pad 41 has a through-hole extending from its upper end surface to its lower end surface, which is connected to the vacuum generator via the internal passage of the suction rod 31. The lower end surface of the suction pad 41 is an adsorption surface that adsorbs an object 200, such as a workpiece 201 or a protective film 202. When the vacuum generator is turned on and a vacuum is created inside the through-hole, an adsorption force acts on the object 200, allowing the object 200 to be adsorbed. When the vacuum generator is turned off, the adsorption force is removed, allowing the object 200 to be released from the adsorption surface. The vacuum generator is turned on and off by opening and closing a solenoid valve located in the flow path connecting the vacuum generator and the internal passage of the suction rod 31. The on and off of the vacuum generator (e.g., opening and closing of the solenoid valve) is controlled by the ECU 15 (FIG. 1).

[0025] The first presser rod 32 extends in the vertical direction, penetrating the support plate 20, and is supported by the support plate 20 via a support portion 22. The support portion 22 has a spring 221, and supports the first presser rod 32 via the spring 221 so that the first presser rod 32 can move in the vertical direction relative to the support plate 20. The spring 221 is, for example, a tension coil spring that is arranged around the first presser rod 32 above the support plate 20. The upper end of the spring 221 is connected to the upper end of the first presser rod 32, and the lower end is connected to the upper surface of the support plate 20. FIG. 4A shows the initial state in which no biasing force is acting on the spring 221, and the length of the spring 221 is its free length.

[0026] The first presser pad 42 has a sliding portion 421 that allows the protective film 202 to move (slide) horizontally along the upper surface of the workpiece 201 while the protective film 202 remains pressed by the first presser rod 32. The sliding portion 421 is made up of a ball or roller that is rotatably supported by a case portion 420 at the tip of the first presser pad 42 via a rotation shaft that extends horizontally. In the initial state of FIG. 4A , the lower end of the first presser pad 42 (sliding portion 421) is positioned a predetermined length Z1 below the lower end of the suction pad 41.

[0027] 4A to 4D, the operation of film peeling device 100 via suction rod 31 and first pressure rod 32 will be described. Support plate 20 is lowered from the initial state shown in Fig. 4A. At this time, the lower end of first pressure rod 32 is already in contact with the upper surface of protective film 202, so that suction rod 31 descends together with support plate 20 while the position of first pressure rod 32 remains constant.

[0028] When the support plate 20 is lowered by a predetermined distance Z1 from the state shown in Fig. 4A, the suction pad 41 comes into contact with the upper surface of the protective film 202, as shown in Fig. 4B. At this time, the spring 221 is pulled by the predetermined distance Z1, and a downward pressing force acts on the first presser rod 32 via the spring 221. As a result, the protective film 202 is pressed downward via the first presser pad 42. In this state, the vacuum generator is turned on, and the suction pad 41 begins to adsorb the protective film 202.

[0029] When the support plate 20 is raised from the state shown in FIG. 4B, the suction pad 41 rises. Until the support plate 20 is raised by the predetermined distance Z1, the first press pad 42 remains in contact with the protective film 202 due to the biasing force of the spring 221. As a result, as shown in FIG. 4C, with the end (corner 202a) of the protective film 202 pressed by the first press pad 42, a part of the protective film 202 (the side opposite the corner 202a) is sucked by the suction pad 41 and rises. Because the end of the protective film 202 is pressed by the first press pad 42, it is possible to prevent the workpiece 201 from being sucked by the protective film 202 and rising together with the protective film 202.

[0030] At this time, a tensile force is applied to the protective film 202 from the suction pad 41, so the protective film 202 moves horizontally (towards the suction pad) while sliding along the upper surface of the workpiece 201 below the sliding portion 421. In this case, the ball or roller of the sliding portion 421 rotates, so the protective film 202 can easily move while being pressed by the first pressing pad 42. When the support plate 20 is raised by the predetermined length Z1, the end (corner 202a) of the protective film 202 is located below the first pressing pad 42.

[0031] 4C, the first presser rod 32 rises together with the support plate 20, and the first presser pad 42 separates from the protective film 202, as shown in FIG. 4D. This causes the protective film 202 below the first presser pad 42 to be peeled off from the top surface of the workpiece 201.

[0032] Next, the relationship between the suction rod 31 and the second pressure rod 33 will be described. As shown in Fig. 3, inside the middle parts of the four sides (edges 202b) of the protective film 202, the suction pad 41 and the second pressure pad 43 are arranged side by side along the edges 202b. Therefore, as shown in region V, a pair of suction pads 41 are arranged on both sides of the second pressure pad 43, and the second pressure pad 43 is located outside (on the edge side of the protective film 202) the imaginary line L1 connecting the pair of suction pads 41.

[0033] Fig. 5A is a diagram showing a schematic configuration of the suction rod 31 and the second pressure rod 33, i.e., a side view of region V in Fig. 3. Like Fig. 4A, Fig. 5A is a diagram showing the support plate 20 in the middle of its downward movement, and shows the point at which the second pressure pad 43 begins to contact the protective film 202. Note that while Fig. 3 shows the second pressure pad 43 as being closer to one of the pair of suction pads 41, Fig. 5A shows the second pressure pad 43 as being positioned midway between the pair of suction pads 41 for the sake of convenience.

[0034] As shown in FIG. 5A, the second presser rod 33 extends in the vertical direction, penetrating the support plate 20, and is supported by the support plate 20 via a support portion 23. The support portion 23 has a spring 231, and supports the second presser rod 33 via the spring 231 so that the second presser rod 33 can move in the vertical direction relative to the support plate 20. The spring 231 is, for example, a tension coil spring that is arranged around the second presser rod 33 above the support plate 20. The upper end of the spring 231 is connected to the upper end of the second presser rod 33, and the lower end is connected to the upper surface of the support plate 20. FIG. 5A shows the initial state in which no biasing force is acting on the spring 231, and the length of the spring 231 is its free length.

[0035] The second pressing pad 43 has an elastic body 431 that allows the protective film 202 to be displaced while being pressed by the second pressing rod 33. The elastic body 431 is made of rubber, resin, or the like. In the state shown in FIG. 5A, the lower end of the second pressing pad 43 is positioned a predetermined length Z2 below the lower end of the suction pad 41. The predetermined length Z2 is shorter than the predetermined length Z1 (FIG. 4A). Note that Z2 may be equal to Z1.

[0036] 5A to 5C, the operation of film peeling device 100 via suction rod 31 and second pressure rod 33 will be described. Support plate 20 is lowered from the initial state shown in Fig. 5A. At this time, the lower end of second pressure rod 33 is already in contact with the upper surface of protective film 202, so that suction rod 31 descends together with support plate 20 while the position of second pressure rod 33 remains constant.

[0037] 5A, when the support plate 20 is lowered by a predetermined amount (predetermined length Z2), the suction pad 41 comes into contact with the upper surface of the protective film 202, as shown in FIG. 5B. At this time, the spring 231 is pulled by the predetermined length Z2, and a downward pressing force acts on the second pressing rod 33 via the spring 231. As a result, the protective film 202 is pressed downward via the second pressing pad 43.

[0038] 5B, the suction pad 41 rises. Until the support plate 20 rises by the predetermined distance Z2, the second press pad 43 remains in contact with the protective film 202 due to the biasing force of the spring 231. At this time, the elastic body 431 of the second press pad 43 elastically deforms and applies a tensile force to the protective film 202, causing a vacuum break at the interface between the workpiece 201 and the protective film 202, and air enters the interface.

[0039] In this case, as shown by arrow A in Fig. 6, air enters from the outside into area AR1 connecting second press pad 43 and suction pad 41, causing wrinkles in area AR1. This promotes peeling of protective film 202, and when protective film 202 is pulled upward by suction pad 41, protective film 202 can be easily peeled off workpiece 201.

[0040] The operations of the film peeling device 100 according to this embodiment can be summarized as follows. The following operations represent the steps of peeling the protective film 202 by the film peeling method according to this embodiment. First, the robot 10 is driven by a command from the ECU 15, and the support plate 20 is moved to an initial position above the tray 300 with the support plate 20 in a horizontal position (initial movement step). Next, the robot 10 is driven to lower the support plate 20 until the suction pad 41, the first pressure pad 42, and the second pressure pad 43 each come into contact with the upper surface of the protective film 202 (lowering step). At this time, the first pressure pad 42 comes into contact with the protective film 202 first, then the second pressure pad 43 comes into contact, and finally the suction pad 41 comes into contact.

[0041] The position of the support plate 20 when all the pads 41 to 43 are in contact with the protective film 202 (FIGS. 4B and 5B) may be referred to as the first position. The initial position of the support plate 20 before it is lowered may be referred to as the second position. The support plate 20 is provided so as to be movable between the first position and the second position.

[0042] Next, the vacuum generator is turned on by a command from the ECU 15, and the suction pads begin to suction the protective film 202. Then, the robot 10 is driven to raise the support plate 20 at a predetermined speed (raising process). FIG. 7 is a diagram showing the movement amount of the pad 40 over time from the start of the raising process. In the figure, characteristic f0 corresponds to the movement amount of the suction pad 41, characteristic f1 corresponds to the movement amount of the first pressure pad 42, and characteristic f2 corresponds to the movement amount of the second pressure pad 43.

[0043] 7, until time t1, only the suction pad 41 rises while the first pressure pad 42 and the second pressure pad 43 press the protective film 202 due to the biasing forces of the springs 221, 231. The first pressure pad 42 starts to rise later than the suction pad 41, so the first pressure pad 42 prevents the workpiece 201 from rising. On the other hand, the protective film 202 can move relative to the first pressure pad 42 via the sliding portion 421, and therefore the protective film 202 can rise.

[0044] At this time, the protective film 202 rises while being pressed by the second pressure pad 43, causing a vacuum break in the area AR1 between the suction pad 41 and the second pressure pad 43, and air entering the area AR1 (FIG. 6). At time t1, when the amount of movement of the suction pad 41 reaches a predetermined value (predetermined length Z2), the second pressure pad 43 begins to rise (FIG. 5C). Thereafter, until time t2, the suction pad 41 and the second pressure pad 43 rise while the first pressure pad 42 continues to press the protective film 202 due to the biasing force of the spring 221. At time t2, when the amount of movement of the suction pad 41 reaches a predetermined value (predetermined length Z1), the first pressure pad 42 begins to rise (FIG. 4C). As a result, the protective film 202 can be easily peeled off from the workpiece 201.

[0045] According to this embodiment, the following effects can be achieved. (1) The film peeling device 100 peels off the protective film 202 from the workpiece 201 to which the protective film 202 is adhered, and includes a support plate 20 that is arranged above a tray 300 on which the workpiece 201 is placed and is movable in the vertical direction between a first position and a second position higher than the first position, and a suction pad 41 at its lower end that extends downward from the support plate 20 toward the tray 300 and comes into contact with the upper surface of the protective film 202 when the support plate 20 is located at the first position. The device includes a suction rod 31, a first pressure rod 32 that extends downward from the support plate 20 toward the tray 300 and has a first pressure pad 42 at its lower end that abuts against the upper surface of the protective film 202 when the support plate 20 is located at the first position, and support portions 21 and 22 that support the suction rod 31 and the first pressure rod 32 from the support plate 20 so that the suction rod 31 and the first pressure rod 32 move up and down as the support plate 20 moves up and down (FIGS. 1 and 4A). The suction pad 41 functions as a suction portion that suctions the protective film 202. The first pressure pad 42 has a sliding portion 421 that allows the protective film 202 to move horizontally while being pressed by the first pressure rod 32 (FIG. 4A). The support portions 21, 22 support the suction rod 31 and the first pressure rod 32 so that when the support plate 20 moves from the first position to the second position, the suction rod 31 starts to rise, and then the first pressure rod 32 starts to rise (Figures 4A to 4D, Figure 7).

[0046] With this configuration, the point at which the first press pad 42 starts to rise is delayed from the point at which the suction pad 41 starts to rise, so that the first press pad 42 prevents the workpiece 201 from rising together with the protective film 202 when the protective film 202 is adsorbed by the suction pad 41. Furthermore, the protective film 202 is movable relative to the first press pad 42 via the sliding portion 421, so the protective film 202 can rise while sliding on the upper surface of the workpiece 201. This makes it possible to easily peel off the protective film 202 that has been adhered to the workpiece 201. (2) Slide portion 421 has a rotatable ball or roller (FIG. 4A), which allows protective film 202 to easily move horizontally relative to first press pad 42 while being pressed by first press pad 42. (3) Support portion 21 is a fixed portion that fixes suction rod 31 to support plate 20, and support portion 22 is a movable support portion that supports first presser rod 32 so that it can move up and down relative to support plate 20. The movable support portion supports first presser rod 32 via spring 231 so that the downward biasing force of first presser rod 32 increases as the amount of downward projection of first presser rod 32 from support plate 20 decreases ( FIG. 4A ). This allows, with a simple configuration, to lift suction pad 41 while first presser pad 42 presses protective film 202. (4) The suction rod 31 and the first pressing rod 32 are arranged so that the first pressing pad 42 is located between the suction pad 41 and the edge 202b of the protective film 202 when the support plate 20 is located at the first position (FIG. 3). This causes the protective film 202 to be pulled horizontally inward, making it possible to easily peel the protective film 202 from the workpiece 201. (5) The film peeling device 100 further includes a second pressure rod 33 that extends downward from the support plate 20 toward the tray 300 and has a second pressure pad 43 at its lower end that abuts against the upper surface of the protective film 202 when the support plate 20 is located at the first position ( FIG. 5A ). The second pressure pad 43 has an elastic body 431 that allows the protective film 202 to be displaced while being pressed by the second pressure rod 33 ( FIG. 5A ). The support units 21 to 23 further support the second pressure rod 33 so that, when the support plate 20 moves from the first position to the second position, the second pressure rod 33 begins to rise after the suction rod 31 begins to rise but before the first pressure rod 32 begins to rise ( FIGS. 5A to 5C , FIG. 7 ). This facilitates vacuum breakdown at the interface between the workpiece 201 and the protective film 202, facilitating peeling of the protective film 202. (6) The support portion 23 is a movable support portion that supports the second presser rod 33 so that it can move up and down relative to the support plate 20. The support portion 23 is configured to support the second presser rod 33 via a spring 231 so that the downward biasing force of the second presser rod 33 increases as the amount of downward projection of the second presser rod 33 from the support plate 20 decreases (FIG. 5A). The downward projection amount (length Z1) at which the biasing force of the first presser rod 32 becomes zero is greater than the downward projection amount (length Z2) at which the biasing force of the second presser rod 33 becomes zero (FIGS. 4A and 5A). This allows the suction pad 41 to be raised while the second presser pad 43 presses the protective film 202 with a simple configuration. Furthermore, since the relationship between lengths Z1 and Z2 is Z1 > Z2, the first presser pad 42 separates from the protective film 202 after the second presser pad 43 separates from the protective film 202. That is, in a state where air is introduced into the area AR1 (FIG. 6) connecting the second press pad 43 and the suction pad 41 to promote peeling of the protective film 202, the protective film 202 is peeled off while pressing the workpiece 201 with the first press pad 42. This makes peeling of the protective film 202 even easier. (7) The film peeling device 100 includes a pair of suction rods 31 on both sides of the second pressure rod 33 (FIG. 5A). The pair of suction rods 31 and the second pressure rod 33 are arranged such that, when the support plate 20 is located in the first position, one of the pair of suction pads 41 and the second pressure pad 43 are positioned adjacent to each other, and the second pressure pad 43 is positioned between the imaginary line L1 connecting the pair of suction pads 41 and the edge 22b of the protective film 202 (FIG. 3). This allows air to enter the area AR1 on both sides of the second pressure pad 43, making it easier to peel off the protective film 202. (8) The protective film 202 has a generally rectangular shape in a plan view (FIG. 3). The pair of suction rods 31, the first pressure rod 32, and the second pressure rod 33 are arranged such that, when the support plate 20 is in the first position, one of the pair of suction pads 41 and the second pressure pad 43 are positioned side by side along the edge 202b of the protective film 202, the first pressure pad 42 is positioned at a corner 202a of the protective film 202, and the other of the pair of suction pads 41 is positioned side by side with the first pressure pad 42 on the opposite side of the corner 202a (FIG. 3). This allows the first pressure pad 42 and the second pressure pad 43 to interact effectively with each other, making it possible to easily peel off the entire protective film 202. (9) A film peeling method for peeling the protective film 202 from the workpiece 201 to which the protective film 202 is adhered includes an initial movement step (first step) of placing a support plate 20 above the tray 300, the support plate 20 supporting an suction rod 31 extending downward toward the tray 300 on which the workpiece 201 is placed and having an suction pad 41 at its lower end, and a first pressure rod 32 extending downward toward the tray 300 and having a first pressure pad 42 at its lower end; a lowering step (second step) of lowering the support plate 20 to a first position where the suction pad 41 and the first pressure pad 42 abut against the upper surface of the protective film 202; and an ascent step (third step) of raising the support plate 20 while the protective film 202 is adsorbed by the suction pad 41 (Figures 4A to 4D). The first press pad 42 has a sliding portion 421 that allows the protective film 202 to move horizontally while being pressed by the first press rod 32 (FIG. 4A). In the ascending step, the first press rod 32 does not ascend until the suction rod 31 ascends a predetermined amount (length Z1) (FIGS. 4A to 4D). This allows the protective film 202 that is in close contact with the workpiece 201 to be easily peeled off from the workpiece surface. (10) In the initial movement step, the support plate 20, which extends downward toward the tray 300 and further supports the second pressure rod 33 having a second pressure pad 43 at its lower end, is positioned above the tray 300 (FIG. 5A). The second pressure pad 43 has an elastic body 431 so that the protective film 202 can be displaced while being pressed by the second pressure rod 33 (FIG. 5A). In the rising step, the second pressure rod 33 does not rise until the suction rod 31 has risen a predetermined amount (length Z2, which is smaller than length Z1) (FIGS. 5A to 5C). The action of the second pressure pad 43 promotes vacuum breakdown at the interface between the workpiece 201 and the protective film 202, making it even easier to peel off the protective film 202.

[0047] In the above embodiment, the support plate 20 (moving body) is raised and lowered above the tray 300 (mounting portion) using an articulated robot 10. However, the moving body may be supported so as to be movable up and down using something other than a robot. For example, the moving body may be supported so as to be movable up and down along a frame installed in a vertical direction. In the above embodiment, the moving body is configured as the support plate 20, but the moving body may be something other than a plate. The film peeling device 100 is provided with a suction rod 31 (first rod) having a suction pad 41 (first contact portion) at its lower end, a first pressure rod 32 (second rod) having a first pressure pad 42 (second contact portion) at its lower end, and a second pressure rod 33 (third rod) having a second pressure pad 43 (third contact portion) at its lower end. However, the third rod may be omitted.

[0048] In the above embodiment, a vacuum generator is connected to the suction pad 41 to suction the protective film 202, but the configuration of the suction portion is not limited to the above. In the above embodiment, the sliding portion 421 of the first pressing pad 42 is formed by a rotatable ball or roller, but the configuration of the sliding portion is not limited to the above. A highly conductive roller or ionizer may be used in the sliding portion to provide a static electricity removal function. In the above embodiment, the support portion 22 supports the first pressing rod 32 on the support plate 20 via the spring 221 (first spring) so that it can move up and down, but the configuration of the movable support portion (first movable support portion) is not limited to the above. In the above embodiment, the support portion 23 supports the second pressing rod 33 on the support plate 20 via the spring 231 (second spring) so that it can move up and down, but the configuration of the second movable support portion is not limited to the above.

[0049] In the above embodiment, an example was described in which a resin frame constituting a membrane electrode assembly of a fuel cell was used as the workpiece 201, and a protective film 202 adhered to the surface of the workpiece 201 was peeled off. However, the present invention can also be applied to peeling off a film from another workpiece to which the film is adhered.

[0050] Although the present invention has been described in connection with its preferred embodiments, those skilled in the art will recognize that various modifications and changes can be made thereto without departing from the scope of the disclosure set forth in the claims below. [Explanation of symbols]

[0051] 20 support plate, 21, 22 support portion, 31 suction rod, 32 first pressure rod, 33 second pressure rod, 41 suction pad, 42 first pressure pad, 43 second pressure pad, 100 film peeling device, 300 tray, 421 sliding portion

Claims

1. A film peeling device that peels a film from a workpiece to which the film is adhered, a movable body arranged above a placement portion on which the workpiece is placed, and movable in the up-down direction between a first position and a second position higher than the first position; a first rod extending downward from the movable body toward the placement section and having a first contact portion at a lower end thereof that contacts an upper surface of the film when the movable body is located at the first position; a second rod extending downward from the movable body toward the placement section and having a second contact portion at a lower end thereof that contacts the upper surface of the film when the movable body is located at the first position; a third rod extending downward from the movable body toward the placement section and having a third contact portion at a lower end thereof that contacts the upper surface of the film when the movable body is located at the first position; a support portion that supports the first rod and the second rod from the movable body so that the first rod and the second rod move in the up and down direction in accordance with the up and down movement of the movable body, the first contact portion has an adsorption portion that adsorbs the film, the second contact portion has a sliding portion that allows the film to move in a horizontal direction while the film is pressed by the second rod, the third contact portion has an elastic body so that the film can be displaced while being pressed by the third rod, The support portion supports the first rod and the second rod so that the second rod starts to rise after the first rod starts to rise when the movable body moves from the first position to the second position, and further supports the third rod so that the third rod starts to rise before the second rod starts to rise.

2. The film peeling device according to claim 1, A film peeling device characterized in that the sliding portion has a rotatable ball or roller.

3. The film peeling device according to claim 1, the support portion includes a fixed portion that fixes the first rod to the movable body, and a movable support portion that supports the second rod so as to be movable up and down relative to the movable body, A film peeling device characterized in that the movable support part supports the second rod via a spring so that the downward biasing force of the second rod increases as the amount of protrusion of the second rod downward from the movable body decreases.

4. The film peeling device according to claim 1, A film peeling device characterized in that the first rod and the second rod are arranged so that when the movable body is located at the first position, the second abutment portion is located between the first abutment portion and the edge of the film.

5. In the film peeling device described in claim 4, the support portion includes a fixed portion that fixes the first rod to the movable body, a first movable support portion that supports the second rod so as to be vertically movable relative to the movable body, and a second movable support portion that supports the third rod so as to be vertically movable relative to the movable body, the first movable support portion supports the second rod via a first spring such that a downward biasing force of the second rod increases as the amount of protrusion of the second rod downward from the moving body decreases; the second movable support portion supports the third rod via a second spring so that a downward biasing force of the third rod increases as the amount of protrusion of the third rod downward from the movable body decreases; A film peeling device, characterized in that the downward protrusion amount at which the biasing force of the second rod becomes zero is greater than the downward protrusion amount at which the biasing force of the third rod becomes zero.

6. In the film peeling device described in claim 4, a pair of the first rods are provided on both sides of the third rod; The pair of first rods and the third rod are arranged so that when the movable body is located at the first position, one of the pair of first abutment portions and the third abutment portion are located adjacent to each other, and the third abutment portion is located between an imaginary line connecting the pair of first abutment portions and the edge of the film.

7. In the film peeling device described in claim 6, The film has a generally rectangular shape in a plan view, The pair of first rods, second rods, and third rods are arranged so that when the movable body is located at the first position, one of the pair of first abutment portions and the third abutment portion are positioned side by side along the edge of the film, the second abutment portion is positioned at a corner of the film, and the other of the pair of first abutment portions is positioned side by side with the second abutment portion on the opposite side of the corner.

8. A film peeling device according to any one of claims 1 to 7, The film peeling device is characterized in that the workpiece is a resin frame that constitutes a membrane electrode assembly of a fuel cell.

9. A film peeling method for peeling a film from a workpiece to which the film is adhered, comprising: a first step of disposing a movable body above the workpiece placement section, the movable body supporting a first rod extending downward toward the placement section on which the workpiece is placed and having a first abutment portion at its lower end, and a second rod extending downward toward the placement section and having a second abutment portion at its lower end; a second step of lowering the moving body to a first position where the first contact portion and the second contact portion contact the upper surface of the film; a third step of lifting the moving body while the film is being sucked by the first contact portion, In the first step, the movable body further supports a third rod extending downward toward the mounting portion and having a third contact portion at a lower end thereof, and the movable body is disposed above the mounting portion; the second contact portion has a sliding portion that allows the film to move in a horizontal direction while the film is pressed by the second rod, the third contact portion has an elastic body so that the film can be displaced while being pressed by the third rod, A film peeling method characterized in that in the third step, the second rod does not rise until the first rod rises a first predetermined amount, and the third rod does not rise until the first rod rises a second predetermined amount that is smaller than the first predetermined amount.

10. In the film peeling method described in claim 9, A film peeling method characterized in that the workpiece is a resin frame that constitutes a membrane electrode assembly of a fuel cell.

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