Ductless room pressure control system

Abstract

To provide a ductless room pressure control system that can regulate a clean room by a room pressure regulation mechanism.SOLUTION: A ductless room pressure control system 10 comprises: a clean room 40; a chamber 30 in which a ceiling and a wall of the clean room are formed as a double ceiling and a double wall, and made to integrally communicate with each other; an air supply unit 50 comprising a fan and a filter for supplying air to the clean room from the chamber; and a return air unit 53 comprising a room pressure regulation mechanism 53a arranged in a wall separating the clean room and the chamber, and a differential pressure sensor for detecting a difference in room pressure between the clean room and the chamber, and in which the room pressure regulation mechanism regulates the room pressure of the clean room on the basis of a detection value of the differential pressure sensor.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a ductless room pressure control system that enables room pressure in a clean room to be adjusted by a room pressure adjustment mechanism. [Background technology]

[0002] Clean rooms are used in cell culture processing facilities, medical facilities, regenerative medicine facilities, and manufacturing facilities for semiconductors, precision machinery, pharmaceuticals, food, etc.

[0003] For example, the clean room in Patent Document 1 has a double-layered ceiling and walls that communicate with each other to form an airtight chamber. The walls are provided with exhaust holes at the bottom, and an air supply unit is installed on the ceiling. An air conditioning unit for heat exchange and humidification is located in the chamber on the ceiling side. Air whose temperature and humidity have been adjusted by the air conditioning unit is supplied to the clean room from the air supply unit, and the air is also exhausted into the chamber from the exhaust holes. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 5-223280 Summary of the Invention [Problem to be solved by the invention]

[0005] Clean rooms must be kept under positive pressure (higher room pressure than the annexe) to prevent foreign matter from entering from the outside, and under negative pressure (lower room pressure than the annexe) to prevent harmful substances from diffusing from the clean room to the outside. Hereinafter, of the annexes adjacent to the clean room, the one with a more positive pressure than the clean room will be referred to as the first annexe, and the one with a more negative pressure than the clean room will be referred to as the second annexe.

[0006] However, when exhaust is performed through exhaust holes opened at the bottom of the wall as in Patent Document 1, the clean room, the first annex room, and the second annex room are directly connected to the double-walled chamber through the exhaust holes, resulting in the same room pressure.

[0007] 7, a room pressure control system 10 can be conceived that can independently control the room pressure of each room 90-92 by providing an independent supply air duct 93 and return air duct 94 in each of the clean room 90, the first annexe 91, and the second annexe 92, and connecting them to an air conditioning unit 95. However, the arrangement of the ducts 93 and 94 becomes complicated, leading to increased installation costs and maintenance.

[0008] An object of the present invention is to provide a ductless room pressure control system capable of adjusting the pressure in a clean room using a room pressure adjustment mechanism. [Means for solving the problem]

[0009] The ductless room pressure control system according to the present invention comprises: Clean rooms and a chamber in which the ceiling and walls of the clean room are double-layered and double-walled, and which are integrally connected to each other; an air supply unit having a fan and a filter for supplying air from the chamber to the clean room; a return air unit comprising: a room pressure adjustment mechanism disposed on a wall separating the clean room from the chamber; and a differential pressure sensor that detects a difference in room pressure between the clean room and the chamber, wherein the room pressure adjustment mechanism adjusts the room pressure of the clean room based on a value detected by the differential pressure sensor; It is equipped with.

[0010] a first annex room connected to the outside via a first door and connected to the clean room via a second door; a second annex room connected to the clean room via a third door and connected to the outside via a fourth door; a first air supply unit having a fan and a filter for supplying air from the chamber to the first annexe; a first return air unit comprising: a first room pressure adjustment mechanism disposed on a wall separating the first vestibule from the chamber; and a first differential pressure sensor that detects a difference in room pressure between the first vestibule and the chamber, wherein the first room pressure adjustment mechanism adjusts the room pressure of the first vestibule based on a value detected by the first differential pressure sensor; a second air supply unit having a fan and a filter for supplying air from the chamber to the second annexe; a second return air unit including a second room pressure adjustment mechanism disposed on a wall separating the second vestibule from the chamber, and a second differential pressure sensor that detects a difference in room pressure between the second vestibule and the chamber, wherein the second room pressure adjustment mechanism adjusts the room pressure of the second vestibule based on a value detected by the second differential pressure sensor; The configuration may include:

[0011] adjusting the pressure of the chamber to a positive pressure relative to the outside; The clean room can be controlled under positive pressure.

[0012] adjusting the pressure of the chamber to a positive pressure relative to the outside; The clean room, the first ancillary room and the second ancillary room can be controlled under positive pressure.

[0013] adjusting the pressure of the chamber to a negative pressure relative to the outside; The clean room can be controlled under negative pressure.

[0014] adjusting the pressure of the chamber to a negative pressure relative to the outside; The clean room, the first annex room and the second annex room can be controlled under negative pressure.

[0015] An air conditioning unit that is connected to the chamber and includes a cooling mechanism, a heating mechanism, a humidifying mechanism, and a blowing mechanism can be installed on the upper outer surface of the double ceiling.

[0016] The chamber pressure can be adjusted to be the highest in the first auxiliary chamber.

[0017] Further, the expanded ductless room pressure control system of the present invention comprises: Sub-clean room and a sub-chamber in which the ceiling and walls of the sub-clean room are double-layered and double-walled, and which are connected together; and a sub-air supply unit having a fan and a filter for supplying air from the sub-chamber to the sub-clean room. a sub-return air unit comprising: a sub-chamber pressure adjustment mechanism disposed on a wall separating the sub-clean room from the sub-chamber; and a sub-differential pressure sensor that detects a difference in room pressure between the sub-clean room and the sub-chamber, wherein the sub-chamber pressure adjustment mechanism adjusts the room pressure of the sub-clean room based on a value detected by the sub-differential pressure sensor; A subductless room pressure control system having The ductless room pressure control system described above; Including, The ductless room pressure control system and the sub-ductless room pressure control system are connected so that the clean room and the sub-clean room communicate with each other. [Effects of the Invention]

[0018] The ductless room pressure control system of the present invention is provided with a chamber consisting of a double ceiling and double walls in a clean room, and the clean room and chamber are connected by a return air unit equipped with a room pressure adjustment chamber. This allows the pressure inside the clean room to be adjusted to a positive or negative pressure within a predetermined set range.

[0019] Furthermore, the expandable ductless room pressure control system of the present invention is configured by connecting a second ductless room pressure control system to the above-mentioned ductless room pressure control system. By connecting different numbers of ductless room pressure control systems and second ductless room pressure control systems, the expandable ductless room pressure control system can provide a clean room with a high degree of flexibility to meet needs. [Brief explanation of the drawings]

[0020] [Figure 1] FIG. 1 is a perspective view of a ductless room pressure control system according to one embodiment of the present invention, showing walls and doors through which the system is seen. [Figure 2] FIG. 2 is a plan view including each room of the ductless room pressure control system. [Figure 3] FIG. 3 is a plan view of a double-ceiling space with a ductless room pressure control system. [Figure 4] FIG. 4 is a flow diagram showing the air flow in the ductless room pressure control system. [Figure 5] FIG. 5 is a perspective view of an expanded ductless room pressure control system, in which some walls are omitted and the view is transparent. [Figure 6] FIG. 6 is an exploded view showing a schematic configuration of the second ductless room pressure control system. [Figure 7] FIG. 7 is a perspective view of a room pressure control system in which an air conditioning unit is connected to each room by a duct, as described in the prior art. DETAILED DESCRIPTION OF THE INVENTION

[0021] The ductless room pressure control system 10 of the present invention will be described below with reference to the drawings. The ductless room pressure control system 10 of the present invention can be used in cell culture processing facilities, medical facilities, regenerative medicine facilities, and manufacturing facilities for semiconductors, precision machinery, pharmaceuticals, food, etc., but these are examples and are not intended to limit the uses.

[0022] 1, the ductless room pressure control system 10 can be configured by surrounding the area between the floor surface 20 and the outer ceiling surface 21 with an outer wall 24. For the sake of explanation, if the side of the first door 42a and the fourth door 43b through which people enter and exit the ductless room pressure control system 10 is defined as the "front," the outer wall 24 can have the doors 42a and 43b provided on the front wall 25 and a window 27 on the rear wall 26 through which the interior of the clean room 40 can be seen.

[0023] The ductless room pressure control system 10 includes a clean room 40, which is a cleanliness-controlled area, and two ancillary rooms 42 and 43 connected to the clean room 40. The clean room 40 is a space where cell culture and various other tasks are performed. One of the ancillary rooms, 42, is a dressing room where workers entering the clean room 40 change into clean room wear and is an example of a first ancillary room. The other ancillary room, 43, is a changing room where workers leaving the clean room 40 take off their clean room wear and is an example of a second ancillary room. Entry to the clean room 40 is via the dressing room 42, and exit via the changing room 43. In other words, the clean room 40 is a space that does not directly communicate with the outside, which is a cleanliness-controlled area. The uses and names of the first ancillary room 42 and the second ancillary room 43 are not limited to those mentioned above.

[0024] The first annexe 42 and the second annexe 43 are not essential, and the present invention may be configured with only the clean room 40, or with the clean room 40 and one annexe, or with more than three annexes. Furthermore, the first annexe and the second annexe are not limited to the dressing room 42 and the undressing room 43.

[0025] In the following description, the first annexe 42 is described as a space with a more positive pressure than the clean room 40, and the second annexe 43 is described as a space with a more negative pressure than the clean room 40, but this is one example of a combination of room pressures. For example, in the case of only the clean room 40, the clean room 40 can be adjusted to have a more positive or negative pressure than the outside. Furthermore, any two rooms may be configured to have the same pressure.

[0026] The ductless room pressure control system 10 is formed in a double ceiling with an inner ceiling surface 22 provided below an outer ceiling surface 21. The space between the outer ceiling surface 21 and the inner ceiling surface 22 is called a double ceiling space 31.

[0027] A partition wall 28 is disposed between the interior ceiling surface 22 and the floor surface 20. As shown in Fig. 2, the partition wall 28, together with the exterior wall 24, separates the clean room 40, the dressing room 42, and the undressing room 43, and further separates the double-walled space 32, which will be described later.

[0028] The clean room 40 is a space partitioned by the outer wall 24 and the partition wall 28. In this embodiment, the clean room 40 has a generally convex shape with a protruding portion 41 that protrudes forward, but the shape is not limited to this.

[0029] The dressing room 42 and the undressing room 43 are provided adjacent to the clean room 40. In this embodiment, the dressing room 42 and the undressing room 43 are provided on the left and right sides of the extending portion 41 of the clean room 40 and the front double-wall space 32a.

[0030] The dressing room 42 has a first door 42a on the outer wall 24 for entering the dressing room 42 from the outside, and a second door 42b on the partition wall 28 that leads to the clean room 40. The undressing room 43 has a third door 43a on the partition wall 28 that leads to the clean room 40, and a fourth door 43b on the outer wall 24 that leads from the undressing room 43 to the outside. In this embodiment, the first door 42a and the fourth door 43b are provided on the front side of the ductless room pressure control system 10, and the second door 42b and the third door 43a are provided on the partition wall 28 that separates the rooms 42, 43 from the extension portion 41.

[0031] The ductless room pressure control system 10 has a double-walled space 32 that connects the rooms 40, 42, and 43. The double-walled space 32 can be formed by partitioning the room with an exterior wall 24 and a partition wall 28. In the illustrated embodiment, two double-walled spaces 32 are formed. Reference numeral 32a denotes a front double-walled space provided in front of the extending portion 41, and reference numeral 32b denotes a rear double-walled space provided in the rear of the clean room 40. A window 29 is provided in the partition wall 28 of the rear double-walled space 32b, allowing it to be viewed from the outside through a window 27 in the rear wall 26. Note that the size and arrangement of the double-walled space 32 are not limited to this. For example, there may be only the front double-walled space 32a, or one double-walled space may be provided for each room.

[0032] The double ceiling space 31 and the double wall space 32 (32a and 32b) are connected by communication openings 33a and 33b opened in the inner ceiling surface 22, thereby forming an airtight chamber 30.

[0033] The chamber 30 functions as an air distribution path connecting each of the rooms 40, 42, 43 with the air conditioning unit 60. Therefore, in the ductless room pressure control system 10 of the present invention, no piping (ducts) is required to connect each of the rooms 40, 42, 43 together or to connect each room with the air conditioning unit 60, making the configuration extremely simple. Furthermore, because the chamber 30 can be formed with a relatively large volume, it also functions as a buffer space, preventing sudden changes in the room pressure of each room and stabilizing the pressure.

[0034] The ductless room pressure control system 10 includes air supply units (air supply unit 50, first air supply unit 51, second air supply unit 52) ​​that introduce air from the chamber 30 to each room 40, 42, 43, return air units 53-55 that return air from each room 40, 42, 43 to the chamber 30, and an air conditioning unit 60 that adjusts the temperature and humidity of the air within the chamber 30.

[0035] Specifically, in this embodiment, the pressure inside the ductless room pressure control system 10 is adjusted to be more positive than the outside. In other words, even if the doors 42a, 42b, 43a, and 43b are opened, outside air does not enter the ductless room pressure control system 10. Within the ductless room pressure control system 10, the room pressure is controlled so that the dressing room 42 has the highest pressure, followed by the clean room 40 and the changing room 43. In Figure 4, the level of room pressure is indicated by circled plus signs, with the dressing room 42 having three plus signs, the clean room 40 having two plus signs, and the changing room 43 having one plus sign.

[0036] On the other hand, in terms of cleanliness, the clean room 40 is controlled to the highest grade, followed by the dressing room 42 and the undressing room 43 in that order.

[0037] In one embodiment, the air supply units 50-52 can be a so-called fan filter system equipped with both a blowing function and a filtering function. The filter can be a HEPA filter, and the fan has a variable blowing capacity. The air supply units 50-52 operate while adjusting the fan output to achieve a preset room pressure, and introduce air from the chamber 30 into each room 40, 42, and 43. By changing the grade and airflow of the HEPA filter installed, air purification can be performed according to the cleanliness level required for each room 40, 42, and 43.

[0038] For example, the air supply units 50-52 can be provided on the interior ceiling surfaces 22 of the clean room 40, the dressing room 42, and the undressing room 43, as shown in FIG.

[0039] Meanwhile, the return air units 53-55 are equipped with a room pressure adjustment mechanism capable of adjusting the air volume. The room pressure adjustment mechanism can be, for example, a room pressure adjustment damper. The room pressure adjustment dampers 53a-55a can be installed on the partition wall 28 that separates each of the rooms 40, 42, and 43 from the double-walled space 32. The room pressure adjustment damper 53a (first room pressure adjustment damper 54, second room pressure adjustment damper 55a) is equipped with a differential pressure sensor (not shown: the room pressure adjustment damper 53a corresponds to a differential pressure sensor, the first room pressure adjustment damper 54 corresponds to a first differential pressure sensor, and the second room pressure adjustment damper corresponds to a second differential pressure sensor) that detects the difference in room pressure between each of the rooms 40, 42, and 43 and the chamber 30. The room pressure is controlled by adjusting the opening of movable vanes that can be opened and closed based on the differential pressure set by the differential pressure sensor to discharge air from each of the rooms 40, 42, and 43 to the chamber 30. The room pressure adjusting mechanism is not limited to the room pressure adjusting damper.

[0040] 1 and 2, one room pressure adjustment damper 53a in the clean room 40 is provided on the partition wall 28 that separates the extension portion 41 from the front double-walled space 32a, and three are provided on the partition wall 28 that separates the clean room 40 from the rear double-walled space 32b. In addition, one room pressure adjustment damper 54a, 55a in the dressing room 42 and the undressing room 43 is provided on the partition wall 28 between the double-walled space 32. Of course, the number and arrangement of the room pressure adjustment dampers 53a-55a are not limited to this.

[0041] The air conditioning unit 60 is a mechanism for adjusting the temperature, humidity, and pressure of the air in the chamber 30. The air in the chamber 30 flows into the air conditioning unit 60 through a return air duct 65 and is returned to the chamber 30 through a supply air duct 66. For example, as shown in FIG. 1, the air conditioning unit 60 can be placed above the double-ceiling space 31, i.e., on the upper surface of the exterior ceiling surface 21. By placing the air conditioning unit 60 outside the ductless room pressure control system 10, the thermal effects of each mechanism can be eliminated.

[0042] 4, the air conditioning unit 60 includes a cooling mechanism 61, a heating mechanism 62, a humidifying mechanism 63, and a blower mechanism 64. The air conditioning unit 60 is equipped with temperature sensors and humidity sensors at appropriate locations to measure the temperature and humidity of the circulating air as needed, and each mechanism controls the temperature and humidity to maintain an optimum temperature and humidity.

[0043] Cooling mechanism 61 is a mechanism that cools and dehumidifies the air that flows in from return air duct 65. For example, a so-called package air conditioner (PAC) that also functions as blower mechanism 64 can be used as cooling mechanism 61. Note that blower mechanism 64 can also be provided as an independent sirocco fan or the like.

[0044] The heating mechanism 62 is disposed downstream of the cooling mechanism 61, and heats up the air cooled and dehumidified by the cooling mechanism 61 to an appropriate temperature as needed. For example, the heating mechanism 62 can be an electric reheat heater.

[0045] The humidifying mechanism 63 is disposed downstream of the heating mechanism 62, and humidifies the air that has passed through the heating mechanism 62 to a desired humidity level. The humidifying mechanism 63 can be an electric steam humidifying system.

[0046] The air humidified by the humidifying mechanism 63 is made to flow into the chamber 30 through the air supply duct 66 by the air blowing mechanism 64 (provided in the cooling mechanism 61 in this embodiment).

[0047] 4, the air conditioning unit 60 preferably includes an outside air intake mechanism 67 that introduces outside air into the chamber 30 when the pressure inside the chamber 30 falls below a predetermined set range. The outside air intake mechanism 67 can be configured to include an outside air intake duct 67a that communicates with the outside air, an outside air intake fan 67b, and a check damper 67c, and the outside air intake duct 67a merges with the return air duct 65. Thus, when the pressure inside the chamber 30 falls below a predetermined set range, the outside air intake fan 67b is started and the check damper 67c is opened, and outside air is sent into the air conditioning unit 60 via the outside air intake duct 67a, thereby increasing the pressure inside the chamber 30.

[0048] 4, the air conditioning unit 60 preferably includes an air release mechanism 68 that releases air from the chamber 30 to the outside when the pressure in the chamber 30 exceeds a predetermined set range. In the illustrated embodiment, the air release mechanism 68 can be configured to include an air release duct 68a that communicates with the outside air and that is provided with a relief valve 68b, and the air release duct 68a branches off from the air supply duct 66. Thus, when the pressure in the chamber 30 exceeds a predetermined set range, the relief valve 68b is opened to release the air, thereby lowering the pressure in the chamber 30.

[0049] In the ductless room pressure control system 10 having the above configuration, each mechanism is activated by the user's operation.

[0050] Specifically, the air supply units 50-52 and the room pressure adjustment dampers 53a-55a operate in response to the room pressure in each room 40, 42, or 43, or the differential pressure between each room and chamber 30, as measured by a differential pressure sensor. When the room pressure falls below a preset range for each room, the air supply unit for that room increases the fan output and reduces the opening of the movable blades of the room pressure adjustment dampers 53a-55a. This increases the amount of air flowing into the corresponding room from chamber 30 and decreases the amount of air flowing out, thereby increasing the room pressure. On the other hand, when the room pressure exceeds the preset range, the air supply unit for that room decreases the fan output, and the room pressure adjustment dampers adjust the opening of their movable blades to increase based on the differential pressure with chamber 30, as detected by the differential pressure sensor. This decreases the amount of air flowing into chamber 30 from the corresponding room and increases the amount of air flowing out, thereby lowering the room pressure.

[0051] By employing the room pressure adjusting dampers 53a-55a as the return air units 53-55, the room pressure can be adjusted simply by adjusting the opening of the movable blades based on the pressure difference between each room 40, 42, 43 and the chamber 30.

[0052] In the air conditioning unit 60, a cooling mechanism 61, which also functions as a blower mechanism 64, draws air from the chamber 30 through a return air duct 65 and cools and dehumidifies it. The air is then heated to an appropriate temperature by a heating mechanism 62, and further humidified by a humidifying mechanism 63. Because the air conditioning unit 60 is located outside the chamber 30, the thermal impact on the inside of the ductless room pressure control system 10 can be reduced.

[0053] The air whose temperature and humidity have been adjusted by the air conditioning unit 60 is returned to the chamber 30 through the air supply duct 66 and is then supplied again to the rooms 40, 42, and 43 through the air supply units 50-52.

[0054] If the air conditioning unit 60 is provided with an outside air intake mechanism 67, when the pressure inside the chamber 30 falls below a predetermined set range, the outside air intake fan 67b is started, the check damper 67c is opened, and outside air is sent into the air conditioning unit 60 through the outside air intake duct 67a, thereby increasing the pressure inside the chamber 30.

[0055] Furthermore, if the air conditioning unit 60 is provided with an air release mechanism 68, when the pressure inside the chamber 30 exceeds a predetermined set range, the relief valve 68b is opened to release air, thereby lowering the pressure inside the chamber 30, and by maintaining the pressure inside the chamber 30 constant, hunting of the room pressure adjustment dampers 53a-55a can be prevented.

[0056] As described above, the ductless room pressure control system 10 of the present invention can independently control the room pressure in each of the rooms 40, 42, and 43. This prevents air from entering the clean room 40 from the undressing room 43, thereby maintaining cleanliness.

[0057] Furthermore, in the ductless room pressure control system 10 of the present invention, the chamber 30 is formed by the double-wall space 32 and the double-ceiling space 31. Therefore, the only ducts required are the return air duct 65 and the supply air duct 66 that connect the air conditioning unit 60 and the chamber 30, and the ducts that connect the various mechanisms of the air conditioning unit 60. This eliminates the need for complex ducts such as those shown in Figure 7, which reduces the use of resources such as duct materials and manpower savings due to reduced maintenance.

[0058] 5 is a perspective view of an expanded ductless room pressure control system 70 that mainly comprises the ductless room pressure control system 10 of the present invention. In the illustration, three sub-ductless room pressure control systems 80 are connected to the ductless room pressure control system 10.

[0059] The above-mentioned ductless room pressure control system 10 has a side wall of the clean room 40 that is partially made into a removable panel, and can be opened by removing a portion of the side wall to connect to the sub-ductless room pressure control system 80.

[0060] As shown in Figure 6, the subductless room pressure control system 80 can be configured by omitting the dressing room 42 and the undressing room 43 from the ductless room pressure control system 10, or more specifically, by omitting the extension portion 41 and the front double-wall space 32a connected to the dressing room 42 and the undressing room 43.

[0061] The sub-ductless room pressure control system 80 has a sub-double ceiling space 82 with a double ceiling above a sub-clean room 81, and a sub-double wall space 83 with a double wall on the rear side, which are connected to form a sub-chamber 84.

[0062] In the subductless room pressure control system 80 as well, a portion of the left and right side walls 85 is formed as a removable panel 86 .

[0063] The sub-ductless room pressure control system 80 comprises a sub-air supply unit 87 that connects the sub-double ceiling space 82 and the sub-clean room 81, and a sub-return air unit 88 that connects the sub-clean room 81 and the sub-double-wall space 83. The sub-return air unit 88 comprises a sub-room pressure adjustment damper 88a (sub-room pressure adjustment mechanism) and a sub-differential pressure sensor (not shown) that detects the difference in room pressure between the sub-clean room 81 and the sub-chamber 84, and similar to the ductless room pressure control system 10, the sub-room pressure adjustment damper 88a adjusts the room pressure in the sub-clean room 81 based on the value detected by the sub-differential pressure sensor.

[0064] In addition, a sub-air conditioning unit (not shown) can be placed on the upper outer surface of the sub-ductless room pressure control system 80. The sub-air supply unit 87, the sub-return air unit 88, and the sub-air conditioning unit can have the same configuration as the air supply unit 50, the return air unit 53, and the air conditioning unit 60 of the clean room 40.

[0065] Thus, by removing the side wall panels of the ductless room pressure control system 10 and airtightly connecting an adjacent sub-ductless room pressure control system 80 with the panel 86 similarly removed, an expanded ductless room pressure control system 70 can be provided. By connecting multiple sub-ductless room pressure control systems 80, an even larger expanded ductless room pressure control system 70 can be provided.

[0066] According to the expandable ductless room pressure control system 70 of the present invention, the number of ductless room pressure control systems 10 and sub-ductless room pressure control systems 80 can be changed according to needs and connected in a modular manner, allowing the clean room to be freely expanded in three dimensions, etc., providing a highly flexible layout.

[0067] Within the expanded ductless room pressure control system 70, users can move between the clean room 40 and the sub-clean room 81, and objects can also be moved, through the opening created by removing the panel 86. When carrying large equipment into or out of the clean room 40 or the sub-clean room 81, the panel 86 of the sub-clean room 81 at the end can be removed.

[0068] As a modified example, the ductless room pressure control system 10 may be inserted between the sub-ductless room pressure control systems 80, 80. Also, a configuration may be adopted in which a plurality of ductless room pressure control systems 10 are arranged for a plurality of sub-ductless room pressure control systems 80.

[0069] The above description of the embodiment is for the purpose of explaining the present invention, and should not be construed as limiting the invention described in the claims or narrowing its scope. Furthermore, the configuration of each part of the present invention is not limited to the above embodiment, and various modifications are possible within the technical scope described in the claims. [Explanation of symbols]

[0070] 10 Ductless room pressure control system 21 Exterior ceiling surface 22 Interior ceiling surface 24 Exterior Wall 28 Partition Wall 30 chambers 31 Double ceiling space 32 Double wall space 40 Clean Room 42 Clothing room (first annex) 43 Changing room (2nd annex) 50-52 Air supply unit 53-55 Return air unit 53a-55a Room pressure adjustment mechanism (room pressure adjustment damper) 60 Air Conditioning Unit 70 Expanded direct room pressure control system 80 Subdirect Room Pressure Control System

Claims

1. Clean rooms and a chamber in which the ceiling and walls of the clean room are double-layered and double-walled, and which are integrally connected to each other; an air supply unit having a fan and a filter for supplying air from the chamber to the clean room; a return air unit comprising: a room pressure adjustment mechanism disposed on a wall separating the clean room from the chamber; and a differential pressure sensor that detects a difference in room pressure between the clean room and the chamber, wherein the room pressure adjustment mechanism adjusts the room pressure of the clean room based on a value detected by the differential pressure sensor; A ductless room pressure control system comprising:

2. a first annex room connected to the outside via a first door and connected to the clean room via a second door; a second annex room connected to the clean room via a third door and connected to the outside via a fourth door; a first air supply unit having a fan and a filter for supplying air from the chamber to the first auxiliary room; a first return air unit comprising: a first room pressure adjustment mechanism disposed on a wall separating the first vestibule from the chamber; and a first differential pressure sensor that detects a difference in room pressure between the first vestibule and the chamber, wherein the first room pressure adjustment mechanism adjusts the room pressure of the first vestibule based on a value detected by the first differential pressure sensor; a second air supply unit having a fan and a filter for supplying air from the chamber to the second annexe; a second return air unit including a second room pressure adjustment mechanism disposed on a wall separating the second vestibule from the chamber, and a second differential pressure sensor that detects a difference in room pressure between the second vestibule and the chamber, wherein the second room pressure adjustment mechanism adjusts the room pressure of the second vestibule based on a value detected by the second differential pressure sensor; 10. The ductless room pressure control system of claim 1, comprising:

3. adjusting the pressure of the chamber to a positive pressure relative to the outside; The clean room is maintained under positive pressure. The ductless room pressure control system of claim 1 .

4. adjusting the pressure of the chamber to a positive pressure relative to the outside; The clean room, the first annex room, and the second annex room are controlled under positive pressure. The ductless room pressure control system according to claim 2 .

5. adjusting the pressure of the chamber to a negative pressure relative to the outside; The clean room is maintained under negative pressure. The ductless room pressure control system of claim 1 .

6. adjusting the pressure of the chamber to a negative pressure relative to the outside; The clean room, the first annex room, and the second annex room are kept under negative pressure control. The ductless room pressure control system according to claim 2 .

7. An air conditioning unit is installed on the upper outer surface of the double ceiling, which is in communication with the chamber and includes a cooling mechanism, a heating mechanism, a humidifying mechanism, and a blower mechanism. The ductless room pressure control system of claim 1 .

8. An air conditioning unit is installed on the upper outer surface of the double ceiling, which is in communication with the chamber and includes a cooling mechanism, a heating mechanism, a humidifying mechanism, and a blower mechanism. The ductless room pressure control system according to claim 2 .

9. The chamber pressure is adjusted to be the highest in the first annex chamber. The ductless room pressure control system according to claim 2 .

10. Sub-clean room and a sub-chamber in which the ceiling and walls of the sub-clean room are double-layered and double-walled, and which are connected together; and a sub-air supply unit having a fan and a filter for supplying air from the sub-chamber to the sub-clean room. a sub-return air unit comprising: a sub-chamber pressure adjustment mechanism disposed on a wall separating the sub-clean room from the sub-chamber; and a sub-differential pressure sensor that detects a difference in room pressure between the sub-clean room and the sub-chamber, wherein the sub-chamber pressure adjustment mechanism adjusts the room pressure of the sub-clean room based on a value detected by the sub-differential pressure sensor; A subductless room pressure control system having A ductless room pressure control system according to any one of claims 1 to 9; Including, the ductless room pressure control system and the sub-ductless room pressure control system are connected so that the clean room and the sub-clean room communicate with each other; Expandable ductless room pressure control system.

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