Quartz glass module and its manufacturing method

A simplified quartz glass module with a protected functional film integrated under controlled conditions addresses structural complexity and cost issues, ensuring high-quality bonding and void-free production.

JP7766311B1Active Publication Date: 2025-11-10TECHNO QUARTZ +1
View PDF 7 Cites -1 Cited by

Patent Information

Application Number
JP2025011783
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2025-01-27
Publication Date
2025-11-10
Estimated Expiration
2045-01-27

AI Technical Summary

Technical Problem

Existing quartz glass modules for semiconductor manufacturing, particularly gradient-force electrostatic chucks, face issues such as complex structures, high production costs, damage to metal materials, and the formation of voids due to excessive pressure during thermal bonding, which can lead to deformation and fractures.

Method used

A simplified quartz glass module design incorporating a functional film of metal or metal compound on a quartz glass substrate, protected by a quartz glass protective film, integrated via a quartz glass joining member under controlled pressure and temperature conditions, eliminating voids and reducing stress on the glass and metal components.

Benefits of technology

The solution simplifies the structure, reduces production costs, prevents damage to the functional film, and ensures high-quality bonding without voids, enabling efficient and cost-effective manufacturing of quartz glass modules.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure 0007766311000001_ABST
    Figure 0007766311000001_ABST
Patent Text Reader

Abstract

The present invention provides a quartz glass module that can be produced more efficiently and at lower cost by simplifying the structure and reducing the number of parts and manufacturing steps.The present invention provides a method for manufacturing a quartz glass module that can prevent deterioration or damage to the built-in functional film made of metal or metal compound, and that does not impose excessive load on the quartz glass substrate, functional film, quartz glass protective film, and quartz glass bonding member. [Solution] A quartz glass module 1 is provided, which comprises a film-forming member 5 consisting of a quartz glass substrate 2, a functional film 3 made of a metal or metal compound formed on a portion of at least one surface 20 of the front or back surface of the quartz glass substrate 2, and a quartz glass protective film 4 covering a portion or the entire surface of the functional film 3, and which is integrated with a quartz glass joining member 5 via the quartz glass protective film 4.
Need to check novelty before this filing date? Find Prior Art

Citation Information

Patent Citations

  • Electrostatic chuck

    JP2005012144A

  • Electrostatic chuck

    JP2008034496A

  • Glassy electrostatic chuck, and manufacturing method thereof

    JP2008294174A

  • Methods, systems, and devices for establishing an active subscription for services of a mobile network

    US20220014890A1

  • Method for joining quartz pieces and quartz electrodes and other devices of joined quartz

    US20220148904A1