Actuator device and method for operating such an actuator device - Patents.com

Abstract

The invention relates to an actuator device (10) having two working chambers (12, 14) which are connected to one another in such a way that a volume expansion of a first of the working chambers (12, 14) is accompanied by a volume reduction of the second working chamber (14) and vice versa. A driven device (18) is provided which can be driven by the respective volume expansion of the working chambers (12, 14) and is thereby movable. A pump device (36) with a solid actuator (38) is provided for pumping a fluid. A first flow path (42) is provided through which the fluid pumped by the pump device (36) can flow, via which the fluid pumped by the pump device (36) and flowing through the first flow path (42) can be introduced into the first working chamber (12) in order to cause a volumetric expansion of the first working chamber (12).

Description

[Technical Field]

[0001] The present invention relates to an actuator device as well as a method for operating such an actuator device.

[0002] Actuator devices and methods for operating such actuator devices are already well known in the general prior art. Actuator devices are typically used to move, strain, deform, and / or compress an object. For this purpose, a fluid, in particular a liquid, is pumped, for example, by a pump, which thereby moves at least one driven element, and via the driven element, the object can be moved, strained, deformed, compressed, and / or modified. A transducer, in particular a fluid, very particularly a hydraulic transducer, is typically provided between the pump and the driven element. This transducer, for example, applies a first force to actuate the pump, which in turn causes the driven element to act on a second force greater or less than the first force, or the driven element provides a second force greater or less than the first force, thereby moving, straining, deforming, compressing, and / or modifying the object. In general, the actuator device can apply a force, in particular a second force, to the object, which can, for example, cause the object to move and / or be tensioned, i.e. fixed against movement.

[0003] SUMMARY OF THE INVENTION It is an object of the present invention to provide an actuator device and a method for operating such an actuator device, with which a particularly advantageous operation of the actuator device can be realized.

[0004] This problem is solved by an actuator device with the features of claim 1 and by a method with the features of claim 14. Advantageous configurations, including preferred developments of the invention, are set out in the further claims.

[0005] A first aspect of the present invention relates to an actuator device having at least two working chambers, also referred to as driven chambers. These working chambers are connected to one another in such a way that an increase in the volume of a first of the working chambers is accompanied, in particular simultaneously, by a decrease in the volume of a second working chamber, and vice versa. Vice versa means that an increase in the volume of a second working chamber is accompanied, in particular simultaneously, by a decrease in the volume of the first working chamber. The increase in volume does not necessarily have to correspond to a decrease in volume. In other words, the decrease in volume can be greater or less than the increase in volume. In other words, the decrease in volume can be greater or less than the increase in volume, and vice versa. This is particularly true when a particularly gaseous, but also liquid, and preferably incompressible, medium flows out of the first working chamber. This is because the expansion of the volume of the second working chamber is accompanied by a reduction in the volume of the first working chamber, resulting in a reduction in the volume of the first working chamber and a medium, or another medium, preferably gaseous or liquid, in particular an incompressible medium, flowing into the second chamber. In particular, a first amount of medium flows out of the first working chamber and a second amount of medium or a second amount of another medium flows into the second working chamber, where the first amount can correspond to the second amount or the two amounts can be different. The medium or amounts can be the same medium or the same medium.

[0006] The actuator device further includes a driven device that can be actuated and thereby moved by the respective volume expansion of the working chamber. This is to be understood in particular to mean that the respective volume expansion of the working chamber can or does cause a translational, rotational, and / or oscillatory movement of the driven device. The driven device can, for example, have at least one or exactly one driven element, which can, for example, be translated and / or rotated and / or oscillatory in a first direction of movement due to the volume expansion of the first working chamber and in a second direction of movement due to the volume expansion of the second working chamber, where, for example, the second direction of movement is opposite to the first direction of movement. It is also conceivable, for example, that the driven device can have at least two or exactly two driven elements. The volume expansion of the first working chamber can, for example, cause a first of the driven elements to be translated and / or rotated and / or oscillatory in the first element direction. The expansion of the volume of the second working chamber may, for example, cause a second of the driven elements to be able to move, in particular translationally and / or rotationally and / or oscillate, in a second element direction. The element directions may extend parallel to one another, at an angle to one another, or perpendicularly to one another. The element directions may be oriented in the same direction, or the element directions may be opposite to one another. In this case, for example, a reduction in the volume of the first working chamber may involve a movement of the first driven element, for example, in a third element direction opposite to the first element direction. Furthermore, a reduction in the volume of the second working chamber may involve a movement of the second driven element, for example, in a fourth element direction opposite to the second element direction.

[0007] The actuator device further comprises a pump device for pumping a fluid, for example one of the above-mentioned media, in particular another medium. The fluid may be a gas. However, very preferably, the fluid is in particular an incompressible liquid. In other words, the fluid is preferably an incompressible fluid, in particular an incompressible liquid, whose density is independent of pressure.

[0008] The actuator device further has a first flow path through which the fluid pumped by the pump device can flow, which preferably is arranged or extends upstream of the first working chamber and downstream of the pump device in the flow direction of the fluid pumped by the pump device, particularly as a result of the fluid flowing through the first flow path. Via the first flow path, the fluid pumped by the pump device, particularly as a result of the fluid flowing through the first flow path, can be introduced into the first working chamber to cause a volume expansion of the first working chamber. The actuator device further has a second flow path through which the fluid pumped by the pump device can flow, which preferably is arranged or extends upstream of the second working chamber and downstream of the pump device in the flow direction of the fluid pumped by the pump device, particularly as a result of the fluid flowing through the second flow path. Via the second flow path, the fluid pumped by the pump device, particularly as a result of the fluid flowing through the second flow path, can be introduced into the second working chamber. In other words, each flow path can guide or direct the fluid pumped by the pump device from the pump device to and into the respective working chamber. The flow paths can, for example, be at least partially, in particular fluidically, separated from one another.

[0009] The pump device includes at least one solid-state actuator. Within the scope of the present disclosure, a solid-state actuator may be understood, for example, as a piezoelectric actuator, which has at least one or more, particularly stacked, piezoelectric elements that, upon application of a voltage, perform a mechanical movement or are deformed, particularly lengthened or shortened, thereby performing a movement in at least a partial region. A solid-state actuator may also be understood, for example, as a magnetostrictive actuator, which has at least one solid body that is deformable or deformed upon application of a magnetic field, i.e., when the solid body is exposed to a magnetic field. A solid-state actuator may also be understood as an electrostrictive actuator, which in particular has a medium, particularly inductive, formed as a solid, which is deformable upon application of an electric field and is movable in at least a partial region. A solid-state actuator may also be understood as a solenoid actuator, also simply called a solenoid. A solenoid actuator includes at least one or just one coil through which an electric current can flow, thereby providing a magnetic field by which at least one motion element, also called a runner, particularly formed as a solid, can move, particularly relative to the coil and / or translationally, where the coil is also solid. Solenoid actuators are also called linear magnet drives. Furthermore, the solid actuator may be a polymer actuator, which has at least one electroactive polymer (EAP), which can be deformed by applying a voltage and thus can move at least within a partial area.

[0010] The actuator device further comprises a first outlet line assigned to the first working chamber, via which fluid can be discharged from the first working chamber to reduce the volume of the first working chamber, and a second outlet line assigned to the second working chamber, via which fluid can be discharged from the second working chamber to reduce the volume of the second working chamber.

[0011] A first valve element is disposed in the first outlet passage, the first valve element being movable between a first closed position that closes the first outlet passage and at least one first open position that opens the first outlet passage. In the first closed position, the first valve element opens the first outlet passage for fluid flow from the first working chamber through the first outlet passage, so that in the first open position, fluid can or is discharged from the first working chamber. However, in the first closed position, the first valve element closes the first outlet passage, so that in the first closed position, fluid cannot flow through the first outlet passage and therefore cannot exit the first working chamber via the first outlet passage.

[0012] A second valve element is disposed in the second outlet passage, movable between a second closed position that closes the second outlet passage and at least one second open position that opens the second outlet passage. The above and below descriptions of the first valve element are applicable to the second valve element, and vice versa. Thus, in the second open position, the second valve element opens the second outlet passage for fluid flow from the second working chamber through the second outlet passage, so that fluid can be or is discharged from the second working chamber via the second outlet passage. However, in the second closed position, the second valve element closes the second outlet passage, so that fluid cannot flow through the second outlet passage, and thus fluid cannot be discharged from the second working chamber via the second outlet passage.

[0013] The actuator device further has a first operating passage fluidly connected to the first flow passage at a first branch point arranged downstream of the pump device and upstream of the first working chamber, where a portion of the fluid pumped by the pump device and, in particular, flowing through the first flow passage, can be branched off from the first flow passage and introduced into the first operating passage, via which the second valve element can be operated by the fluid introduced into and flowing through the first operating passage, thereby moving the second valve element from a second closed position to a second open position.

[0014] The actuator device further has a second operating passage fluidly connected to the second flow passage at a second branch point located downstream of the pump device and upstream of the second working chamber. At the second branch point, a portion of the fluid pumped by the pump device and flowing through the second flow passage can be branched off from the second flow passage and introduced into the second operating passage. Via the second operating passage, the first valve element can be operated by the fluid introduced into and flowing through the second operating passage, and can be moved from the first closed position to the first open position. In particular, it is envisaged that moving the first valve element from the first closed position to the first open position allows fluid to be drawn from the first working chamber via the first outlet passage, thereby enabling fluid to be drawn from the first working chamber via the first outlet passage. Furthermore, it is conceivable that the movement of the second valve element from the second closed position to the second open position allows fluid to be discharged from the second working chamber via the second outlet path, thereby enabling discharge of fluid from the second working chamber via the second outlet path.

[0015] The present invention makes it possible to achieve so-called four-quadrant operation of the actuator device in a particularly simple manner, in this case without the use of active components, with the exception of a pump device, and in particular solely through the pumping of a fluid by the pump device. Four-quadrant operation is understood to mean, for example, that the above-mentioned driven element can be actively moved in a first direction of movement and in a second direction of movement, i.e., through the pumping of a fluid by the pump device, whereby the so-called active movement of the driven element in the first direction of movement is the first quadrant and the active movement of the driven element in the second direction of movement is the second quadrant, and passive movement of the driven element in the first and second directions of movement is permitted. Passive movement of the driven element is understood to mean the action of an external force on the driven element. For example, when an external force is applied in a first direction of movement, this force may be a pulling force, thereby pulling the driven element in the first direction of movement, thereby enabling particularly controlled movement of the driven element in the first direction of movement. For example, when an external force is applied to the driven element in a second direction of movement, this force may be a pushing force, thereby enabling particularly controlled movement of the driven element in the second direction of movement. Passive movement of the driven element in the first direction of movement is, for example, in the third quadrant, and passive movement of the driven element in the second direction of movement is, for example, in the fourth quadrant. In particular, each passive movement can be controlled and / or active braking of the driven element. In particular, active braking can provide particularly controlled throttling, where, for example, braking energy leads to heating of the fluid or kinetic energy is converted into thermal energy, thereby heating the fluid. In other words again, by or with active movement of the driven element in a first direction of movement, for example, the driven element provides a first force, in particular a first pushing force, acting in the first direction of movement, and by or with active movement of the driven element in a second direction of movement, for example, the driven element provides a second force, in particular a pulling force, acting in the second direction of movement.For example, when a third force, in particular a pulling force, acting in a first direction of movement is applied to the driven element, the actuator device can thereby enable a particularly passive, in particular controlled, movement of the driven element in the first direction of movement, whereby, for example, the driven element is moved, in particular pulled, in the first direction of movement. For example, when a fourth force, in particular a pushing force, acting in a second direction of movement is applied to the driven element, the actuator device can thereby enable a movement of the driven element in the second direction of movement, whereby the driven element is pushed, in particular pulled, in the second direction of movement. Such different movements or movement possibilities of the driven element can be realized particularly simply, in particular by simply pumping a fluid, in particular selectively, into the first or second working chamber by means of a pump device. In particular, the described movement of the driven element can be realized without any active, in particular actively switchable, elements, except for the pump device, so that the number of parts, the required construction space, weight, and costs of the actuator device can be kept particularly small. In this case, the pump device is preferably designed, in particular, only so that it can pump, i.e., discharge, fluid into the respective working chambers, so that it is preferably not able to actively pump fluid out of the respective working chambers. Despite this configuration of the pump device, the above-mentioned four-quadrant operation can be realized, in particular, by the working chambers being connected to one another in the above-mentioned manner.

[0016] Each valve element is preferably configured as a normally closed valve. By normally closed valve, it is meant that each valve element is always in the closed position when not operated by a fluid, and that each valve element always returns to the closed position, especially automatically or independently, when operation of the valve element by a fluid is terminated. It is therefore preferably envisaged that when the valve element is operated by a fluid, it is thereby, and most preferably only thereby, movable from the closed position to the open position and held in the open position.

[0017] In order to be able to realize a four-quadrant operation and thus a particularly advantageous mobility or maneuverability of the driven element or device in a particularly simple manner, in one embodiment of the invention, the first valve element is assigned a first operating area and a first operating chamber which is at least partially directly bounded by the first operating area, into which a fluid introduced into the second operating path and flowing through the second operating path can be introduced, so that the first operating area can be actuated, in particular directly, by a fluid introduced into the second operating path and flowing through the second operating path into the first operating chamber, so that the first valve element can be moved from the first closed position to the first open position.

[0018] It is particularly advantageous if a first flow restriction element is assigned to the first operating region and the first operating chamber, and this flow restriction element is connected or arranged, particularly flow-technically, in parallel with the first operating chamber and the first operating region in the flow direction of the fluid flowing through the second operating path into the first operating chamber. In this case, the fluid can be discharged from the first operating chamber via the first flow restriction element, thereby causing or enabling the first valve element to move from its first open position to its first closed position. For example, if the pumping device pumps fluid through the second flow path and thus into the second working chamber, the first operating region is loaded with the fluid pumped by the pumping device, thereby operating the first valve element. This is because, at the second branch point, a portion of the fluid pumped by the pumping device and flowing through the second flow path branches off from the second flow path and is used to operate the first valve element, thereby introducing this fluid into the first operating chamber. Now, when this pumping of the fluid is terminated, the fluid can flow out of the first operating chamber, in particular by bypassing the pump device, through the first flow limiting element, so that the first valve element, which was previously operated to its first open position and is therefore initially in the first open position, can return from the first open position to the first closed position. For example, the first flow limiting element is arranged in the first outlet passage through which the fluid can be drawn from the first operating chamber. The first flow limiting element has physical properties, or imparts physical properties to the first outlet passage, in particular with respect to the flow of fluid from the first operating chamber through the first outlet passage. In particular, the first flow limiting element is a functional element that allows pressure compensation between the first operating chamber and, for example, a receiving area into which fluid can be introduced from the first operating chamber via the first outlet passage.

[0019] For example, each flow-restricting element may be a non-linear or proportional flow-restricting element, in which case the flow or fluid flow through the flow-restricting element, i.e., the volumetric flow rate and / or mass flow rate of the fluid through the flow-restricting element, is pressure-dependent, i.e., related to the pressure of the fluid flowing through the flow-restricting element.

[0020] To achieve four-quadrant operation particularly easily, in a further embodiment of the invention, the second valve element is assigned a second operating area and a second operating chamber, at least partially directly bounded by the second operating area, which is additional to the first operating chamber and, in particular, arranged outside the first operating chamber; preferably, the first operating chamber is additional to the second operating chamber and arranged outside the second operating chamber. The fluid introduced into the first operating channel and flowing through it can be introduced into the second operating chamber, so that the second operating area can be actuated, in particular directly, by the fluid introduced into the first operating channel and flowing through it into the second operating chamber. This allows the second valve element to move from the second closed position to the second open position. The above and following descriptions of the first operating area and the first operating chamber can also be easily applied to the second operating area and the second operating chamber, and vice versa.

[0021] In this case, it is particularly advantageous if a second flow limiting element is assigned to the second operating area and the second operating chamber, the second flow limiting element being connected in parallel to the second operating chamber and the second operating area in the flow direction of the fluid flowing through the first operating path into the second operating chamber, and if the fluid can be drawn out of the second operating chamber via the second flow limiting element, thereby effecting or enabling the movement of the second valve element from the second open position to the second closed position.

[0022] For example, if the pump device pumps fluid through the first flow path and thus into the first working chamber via the first flow path, the second operating region is loaded with the fluid pumped by the pump device, thereby operating the second valve element. Because, at the first branch point, a portion of the fluid pumped by the pump device and flowing through the first flow path branches off from the first flow path and is used to operate the second valve element, thereby introducing the fluid into the second working chamber. Now, once this pumping of fluid has ended, the fluid can flow out of the second working chamber, particularly bypassing the pump device, via the second flow restriction element, so that the second valve element, which was previously moved to its second open position and is therefore initially in the second open position, can return from the second open position to its second closed position. For example, the second flow restriction element is arranged in the second outlet path, via which fluid can be discharged from the second working chamber. The second flow restricting element has or imparts physical properties to the second outlet passage, particularly with respect to the flow of fluid from the second operating chamber through the second outlet passage. In particular, the second flow restricting element is a functional element that allows for pressure compensation between the second operating chamber and, for example, a receiving area into which fluid can be introduced from the second operating chamber via the second outlet passage.

[0023] In order to be able to achieve four-quadrant operation without an excessive number of active elements, i.e. in particular actively switchable elements, and thus particularly simply and inexpensively, a further configuration of the invention provides for a first check valve being arranged in the first flow path downstream of the first branch point and upstream of the first working chamber, which prevents the flow of fluid through the first flow path in the direction of the first branch point, and is therefore closed in the direction of the first branch point, and allows the flow of fluid through the first flow path in the direction of the first working chamber, and is therefore open in the direction of the first working chamber.

[0024] It has also proven particularly advantageous if a second check valve is arranged in the second flow path downstream of the second branch point and upstream of the second working chamber, which prevents the fluid flow through the second flow path in the direction of the second branch point, and is therefore closed in the direction of the second branch point, and allows the fluid flow through the second flow path in the direction of the second working chamber, and is therefore open in the direction of the second working chamber, thereby avoiding an excessive number of active elements, in particular actively switchable elements, and thus making it possible to realize four-quadrant operation in a particularly simple and inexpensive manner.

[0025] In order to be able to realize particularly advantageous mobility of the driven device, in particular of the driven element, in a particularly inexpensive manner, in an embodiment of the invention the pump device comprises a solid-state actuator as a first solid-state actuator assigned to a first flow path, by means of which the fluid can flow through the first flow path, and furthermore the pump device comprises a second solid-state actuator assigned to a second flow path, by means of which the fluid can flow through the second flow path.

[0026] In order to keep the number of parts of the actuator device, and thus the cost, weight, and required construction space, particularly low, in a further embodiment of the invention, the pump device has a solid-state actuator common to the first and second flow paths, which can pump the fluid. In this case, the pump device has a valve device switchable between a first and a second switching state. For example, this valve device is arranged upstream of the flow paths and downstream of the solid-state actuator in the flow direction of the fluid flowing through each flow path. In particular, it is conceivable that the flow paths are connected, i.e., arranged, in parallel with one another in terms of flow technology.

[0027] In the first switching state, the fluid pumped by the solid-state actuator can be introduced into the first flow path via the valve device and can be pumped through the first flow path. Furthermore, in the first switching state, the valve device blocks the introduction of the fluid pumped by the solid-state actuator into the second flow path via the valve device. In other words, the solid-state actuator is configured only to pump fluid, in particular in just one pumping direction. Now, when a fluid is pumped by the solid-state actuator, in particular in a pumping direction, while the valve device is in the first switching state, the valve device introduces the fluid pumped by the solid-state actuator into the first flow path and the valve device prevents the fluid pumped by the solid-state actuator from flowing into the second flow path.

[0028] In the second switching state, a fluid pumped by the solid-state actuator, in particular in the pumping direction, can be introduced into the second flow path via the valve device and can be pumped through the second flow path, and in the second switching state, the valve device blocks the introduction of the fluid pumped by the solid-state actuator into the first flow path via the valve device. In other words, when a fluid is pumped by the solid-state actuator, in particular in the pumping direction, while the valve device is in the second switching state, the fluid pumped by the solid-state actuator, in particular in the pumping direction, is introduced into the second flow path by the valve device and the valve device prevents the fluid pumped by the solid-state actuator, in particular in the pumping direction, from flowing into the first flow path.

[0029] In this case, in order to keep the weight, cost and required construction space of the actuator device particularly low, a further configuration of the invention provides for a solid-state actuator to be arranged in a third flow path arranged upstream of the valve device, via which third flow path the fluid pumped by the solid-state actuator through the third flow path, in particular in the pumping direction, is guided to the valve device.

[0030] In a particularly advantageous further configuration of the invention, the operating device has the above-mentioned driven elements which directly and partially define the working chambers in each case. The feature that the driven elements directly define the working chambers, i.e. both working chambers, can be understood as meaning that the fluid introduced into each working chamber, and thus contained in each working chamber, comes into direct contact with the driven elements.

[0031] In this case, the driven element is preferably accommodated in a casing, each partially defining a working chamber, in particular so that it can move translationally and / or rotationally and / or oscillate. The driven element can be directly loaded by the fluid introduced into the first working chamber, thereby being able to move translationally and / or rotationally and / or oscillate relative to the casing in a first direction of movement. The driven element can be directly loaded by the fluid introduced into the second working chamber, thereby being able to move translationally and / or rotationally and / or oscillate relative to the casing in a second direction of movement opposite to the first direction of movement.

[0032] It has therefore proven to be particularly advantageous if the driven element is capable of translational and / or rotational and / or oscillatory movement relative to the casing in each direction of movement. The driven element thus comprises, for example, a piston and, in particular, a piston rod connected to the piston and movable therewith, which can provide or exert the aforementioned forces on the driven element.

[0033] It is further conceivable that the driven device has a first bellows, in particular a first bellows, which in particular directly defines a first driven chamber. It is further conceivable that the driven device has a second bellows, in particular a second bellows, which in particular directly defines a second driven chamber. In this case, each bellows has a folding region and in particular a respective bottom surface, which can be moved in each direction of movement, in particular translationally, for example, while changing the length of the respective folding region and thus the volume of the respective working chamber. Thus, for example, the first bottom surface is a first driven element, and the second bottom surface is, for example, a second driven element.

[0034] To achieve particularly advantageous mobility or movability of the driven device, in particular the driven element, in a further embodiment of the invention, a free-flow valve is assigned to one of the driven chambers, in particular to exactly one of the driven chambers, via which fluid can be introduced from the reservoir into one of the working chambers, bypassing the pump device, preferably also bypassing the other working chamber, preferably bypassing the check valve, very preferably bypassing the outlet, and particularly preferably bypassing the valve element, where the free-flow valve is intended to open in the direction of one of the working chambers and close in the direction of the reservoir. For example, the reservoir is the aforementioned receiving area. The feature that the free-flow valve opens in the direction of one of the working chambers and closes in the direction of the reservoir is understood to mean that the free-flow valve allows fluid to flow from the reservoir to and into one of the working chambers, but prevents fluid from flowing from one of the working chambers to the reservoir. The free flow valve therefore functions as a kind of check valve, which makes it possible to allow particularly rapid movements of the driven device, in particular of the driven element, in particular in one of the directions of movement.

[0035] The feature that fluid can be introduced from the reservoir into a working chamber via the free flow valve, bypassing the pump device and preferably bypassing the other working chamber, check valve, outlet passage and / or valve element, may be understood to mean that fluid flowing from the reservoir into one working chamber via the free flow valve bypasses the pump device and preferably the other working chamber, check valve, outlet passage and / or valve element, and therefore does not flow through the pump device, the other working chamber, the check valve, the outlet passage and the valve element.

[0036] A second aspect of the present invention relates to a method for operating an actuator device, particularly according to the first aspect of the present invention. In the method according to the second aspect of the present invention, the actuator device has at least two working chambers, also called driven chambers. These working chambers are connected to one another so that a volume expansion of a first one of the working chambers is, in particular, simultaneously accompanied by a volume reduction of the second working chamber, and vice versa. The actuator device has a driven device that is driven by the respective volume expansion of the working chambers and is thereby moved. The actuator device has a pump device with at least one solid-state actuator that pumps fluid, in particular in exactly one pumping direction. The actuator device has a first flow path through which the fluid pumped by the pump device can flow, in particular in the pumping direction, and via this first flow path, the fluid pumped by the pump device and flowing through the first flow path is introduced into the first working chamber to cause a volume expansion of the first working chamber. The actuator device further has a second flow path through which the fluid pumped by the pump device can flow, particularly in the pumping direction, and via which the fluid pumped by the pump device and flowing through the second flow path is introduced into the second working chamber to expand the volume of the second working chamber. The actuator device has a first outlet line assigned to the first working chamber, via which the fluid is removed from the first working chamber to reduce the volume of the first working chamber. The actuator device further has a second outlet line assigned to the second working chamber, via which the fluid is removed from the second working chamber to reduce the volume of the second working chamber.

[0037] The actuator device further includes a first valve element disposed in the first outlet passage, the first valve element being movable between a first closed position to close the first outlet passage and at least one first open position to open the first outlet passage, and a second valve element disposed in the second outlet passage, the second valve element being movable between a second closed position to close the second outlet passage and at least one second open position to open the second outlet passage.

[0038] The actuator device further includes a second valve element disposed in the second outlet passage, the second valve element being movable between a second closed position that closes the second outlet passage and at least one second open position that releases the second outlet passage. A first operating passage is also provided, the first operating passage being fluidly connected to the first flow passage at a first branch point that is disposed downstream of the pump device and upstream of the first working chamber. At the first branch point, a portion of the fluid pumped by the pump device and flowing through the first flow passage is branched from the first flow passage and introduced into the first operating passage. The second valve element is operated by the fluid introduced into and flowing through the first operating passage via the first operating passage, thereby moving from the second closed position to the second open position.

[0039] The actuator device further includes a second operating path fluidly connected to the second flow path at a second branch point located downstream of the pump device and upstream of the second working chamber. At the second branch point, a portion of the fluid pumped by the pump device and flowing through the second flow path is branched off from the second flow path and introduced into the second operating path. Via the second operating path, the first valve element is operated by the fluid introduced into and flowing through the second operating path, thereby moving the first valve element from the first closed position to the first open position. Advantages and advantageous features of the first aspect of the present invention are considered to be advantages and advantageous features of the second aspect of the present invention, and vice versa.

[0040] Further advantages, features and details of the present invention will become apparent from the following description of preferred embodiments and the drawings. The features and combinations of features mentioned in the above description and those mentioned in the following description of the drawings and / or shown only in the drawings can be used not only in the respective combinations described, but also in other combinations or alone without departing from the scope of the present invention. [Brief explanation of the drawings]

[0041] [Figure 1] 1 is a schematic diagram illustrating a first embodiment of an actuator device. [Figure 2] FIG. 4 is a schematic view partially illustrating a second embodiment of an actuator device. [Figure 3] FIG. 10 is a schematic diagram showing a third embodiment of the actuator device. [Figure 4] FIG. 10 is a schematic view partially illustrating a fourth embodiment of an actuator device.

[0042] In the drawings, the same elements or elements with the same functions are provided with the same reference numerals.

[0043] FIG. 1 shows a schematic diagram of a first embodiment of an actuator device 10, which can apply at least one force to an object. This can, for example, move the object, or can, for example, actively and / or controlledly brake or tension the object, thereby actively immobilizing it. Alternatively or additionally, the object can be moved and / or deformed and / or compressed. In the first embodiment, the actuator device 10 has exactly two working chambers 12 and 14, also referred to as driven chambers. The working chambers 12 and 14 are connected to each other so that a volume expansion of the working chamber 12 is simultaneously accompanied by a volume reduction of the working chamber 14, and vice versa. Particularly schematically, FIG. 1 shows a reservoir 16 that can contain or contains a fluid, preferably in the form of a liquid. The reservoir 16 is also referred to as a ground.

[0044] The actuator device 10 has a driven device 18 that can be driven and thereby moved by the respective volume expansion of the working chambers 12, 14. In a first embodiment, the driven device 18 has at least one, or in this case exactly one, driven element 20, which includes a piston 22, more specifically a piston rod 24. In this case, the actuator device 10 includes a casing 26 that movably accommodates the driven element 20, in particular the piston 22. In the first embodiment, the driven element 20, and thus the driven device 18, are translated relative to the casing 26 in a first direction of movement and a second direction of movement. The first direction of movement is indicated by an arrow 28, and the second direction of movement is indicated by an arrow 30. Arrows 28 and 30 indicate that the directions of movement run parallel to one another, with the second direction of movement being opposite to the first direction of movement. The driven element 20, in particular the piston 22, directly and partially defines both the working chamber 12 and the working chamber 14, which are each partially and directly defined by the casing 26. It can be seen that the working chamber 12 is in particular arranged on a first face 32 of the piston 22 or the driven element 20 along the respective direction of movement, and the working chamber 14 is arranged on a second face 34 of the piston 22 or the driven element 20, which second face 34 is opposite the first face 32 along the respective direction of movement, or vice versa. This means that in the first embodiment, the working chambers 12 and 14 are arranged on faces 32 and 34 of the driven element 20, in particular the piston 22, which are opposite each other along the direction of movement. In this case, face 32 partially and directly defines the working chamber 12, and face 34 partially and directly defines the working chamber 14. As can be seen from FIG. 1, the piston rod 24 is at least partially disposed within the working chamber 14, so that the volume of the working chamber 12 does not increase to the same extent as the volume of the working chamber 14 does not decrease to the same extent as the volume of the working chamber 12.Thus, for example, when the driven element 20 is translated a first distance in a second direction of movement relative to the casing 26, a first amount of fluid is expelled from the working chamber 12, and at the same time, a second amount of fluid, smaller than the first amount, is introduced into the working chamber 14. In other words, for example, the volume of the working chamber 12 is reduced by a first volume unit, and the volume of the working chamber 14 is enlarged by a second volume unit, smaller than the first volume unit. In this case, it should be understood that each working chamber 12 or 14 is an immaterial space that can contain a fluid and is surrounded or directly defined by the casing 26 and the driven element 20, respectively.

[0045] 1, the actuator device 10 further comprises a pumping device 36 having a solid-state actuator 38 as a first solid-state actuator and a second solid-state actuator 40, the solid-state actuators 38 and 40 being separate components spaced apart from one another. The pumping device 36 allows the fluid to be pumped from the reservoir 16 in particular in exactly one pumping direction. In other words, preferably, each solid-state actuator 38, 40 is configured to pump the fluid from the reservoir 16 in exactly one, i.e., only one, pumping direction.

[0046] It can be seen that the volume of each pump chamber is variable, in particular by the solid-state actuators 38, 40, such that the volume of each pump chamber can be alternately increased and decreased. An increase in the volume of each pump chamber causes fluid to be pumped, in particular sucked, from the reservoir 16 into the pump chamber, in particular via the check valve 43 or 47. The check valves 43, 47 allow fluid to flow from the reservoir 16 into the pump chamber, but prevent fluid from flowing back into the reservoir 16 via the check valve 43, 47, in particular when the volume of the pump chamber is decreased. When the volume of each pump chamber is decreased, this causes fluid to be pumped out of the pump chamber, in particular via the check valve 45 or 49.

[0047] The actuator device 10 has a first flow path 42 through which a fluid pumped by the pump device 36, in particular by the solid-state actuator 38, can flow, with the solid-state actuator 38 being assigned to the first flow path 42 and the first flow path 42 being assigned to the solid-state actuator 38. The first flow path 42 is arranged upstream of the first working chamber 12 and downstream of the pump device 36, and therefore downstream of the assigned solid-state actuator 38. Via the first flow path 42, the fluid pumped by the pump device 36, in particular by the solid-state actuator 38, and flowing through the first flow path 42, can be introduced into the first working chamber 12 in order to cause a volume expansion of the first working chamber 12. The actuator device 10 further has a second flow path 44 through which a fluid pumped by the pump device 36, in particular by the solid-state actuator 40, can flow. The solid-state actuator 40 is assigned to the flow path 44 and the flow path 44 is assigned to the solid-state actuator 40. The second flow path 44 is arranged upstream of the second working chamber 14 and downstream of the pumping device 36, in particular downstream of the solid-state actuator 40. Via the second flow path 44, a fluid pumped by the pumping device 36, in particular by the second solid-state actuator 40, and flowing through the second flow path 44, can be introduced into the second working chamber 14 in order to cause a volume expansion of the second working chamber 14.

[0048] When the volume of each pump chamber is reduced, fluid is forced out of the respective pump chamber, particularly through the respective check valve 45 or 49, into the respective flow path 42, 44, and is thereby forced through the respective flow path 42, 44. The respective check valves 45, 49 in this case allow fluid to flow from the respective pump chamber into the respective flow path 42, 44, but prevent fluid from flowing back into the respective pump chamber from the respective flow path 42, 44 via the respective check valve 45, 49, particularly when the volume of the respective pump chamber is reduced.

[0049] 1, in this case each pump chamber is in particular directly and / or partially defined by a respective pump piston 39 or 41 which is translationally movable relative to a respective pump casing which in part, preferably directly, defines the respective pump chamber, in particular by a respective solid state actuator 38, 40. By movement, in particular reciprocating movement, of each pump piston 39, 41 by the respective solid state actuator 38, 40, the respective volume of each pump chamber can be alternately reduced and increased.

[0050] A first outlet 46 is assigned to the first working chamber 12, via which fluid can be led out of the first working chamber 12, in order to reduce the volume of the first working chamber 12, and in particular into the reservoir 16. A second outlet 48 is assigned to the second working chamber 14, via which fluid can be led out of the second working chamber 14, in order to reduce the volume of the second working chamber 14, and in particular into the reservoir 16. It can be seen that each solid-state actuator 38, 40 can pump fluid from the reservoir 16 through a respectively assigned flow path 42, 44 and into the respectively assigned working chamber 12, 14 via the respectively assigned flow path 42, 44, with the working chamber 12 being assigned to the flow path 42 and vice versa, and the working chamber 14 being assigned to the flow path 44 and vice versa. Via the outlet passage 46, fluid can be led out of the working chamber 12, in particular back into the reservoir 16, and via the outlet passage 48, fluid can be led out of the working chamber 14, in particular back into the reservoir 16.

[0051] A first valve element 50 is arranged in the first outlet passage 46, the first valve element 50 being movable between a first closed position that closes the first outlet passage 46 and at least one first open position that opens the first outlet passage 46. A second valve element 52 is arranged in the second outlet passage 48, the second valve element 52 being movable between a second closed position that closes the second outlet passage 48 and at least one second open position that opens the second outlet passage 48. For example, each valve element 50, 52 is movable, in particular only translationally, between the respective closed and open positions, in particular relative to a valve casing not shown in detail in FIG.

[0052] The actuator device 10 has a first operating path 54 that is fluidly connected to the first flow path 42 at a first branch point A1 that is arranged downstream of the pump device 36, in particular downstream of the solid-state actuator 38, and upstream of the first working chamber 12. At the first branch point A1, a portion of the fluid that is pumped by the pump device 36, in particular by the solid-state actuator 38 and flows through the first flow path 42, can be branched off from the first flow path 42 and introduced into the first operating path 54. Via the first operating path 54, the second valve element 52 can be operated by the fluid introduced into and flowing through the first operating path 54, so that the second valve element 52 can be moved from a second closed position to a second open position, in particular, can be held in, for example, the second open position. Furthermore, the actuator device 10 has a second operating path 56 fluidly connected to the second flow path 44 at a second branch point A2 arranged downstream of the pump device 36, in particular downstream of the solid-state actuator 40, and upstream of the second working chamber 14. At the second branch point A2, a portion of the fluid pumped by the pump device 36, in particular by the solid-state actuator 40, and flowing through the second flow path 44 can be branched off from the second flow path 44 and introduced into the second operating path 56. Via the second operating path 56, the first valve element 50 can be operated by the fluid introduced into and flowing through the second operating path 56, thereby being movable from a first closed position to a first open position, in particular being able to be held in the first open position.

[0053] In the first embodiment, the first valve element 50 is assigned a first actuating piston 60 that is designed as a solid body, in particular a first actuating region 58 that is formed by the surface of the actuating piston 60. Furthermore, the valve element 50 is assigned a first actuating chamber 62 that is bounded by the actuating region 58 and thus directly by the actuating piston 60, the actuating chamber being bounded partly by the actuating region 58 and thus directly by the actuating piston 60 and partly by a first actuating casing 64. The first actuating piston 60 is accommodated in the first actuating casing 64, in particular so as to be translationally movable, and is connected to the first valve element 50, in particular via a first actuating piston rod 66. The actuating piston 60, the valve element 50, and in particular the actuating piston rod 66 are therefore movable together or simultaneously, preferably translationally, relative to the first actuating casing 64, in particular between a first open position and a first closed position. A fluid introduced into the second operating passage 56 and flowing through the second operating passage 56 can be introduced into the operating chamber 62 via the second operating passage 56, so that the first operating area 58 and thus the first operating piston 60 can be directly actuated by the fluid introduced into the second operating passage 56, flowing through the second operating passage 56 and introduced into the first operating chamber 62 via the second operating passage 56, so that the first valve element 50 can be moved relative to the operating casing 64, particularly in a translational manner, from a first closed position to a first open position.

[0054] A second operating region 68 is assigned to the second valve element 52, which is formed by a solid second operating piston 70, in particular by the surface of the second operating piston 70. A second operating chamber 72 is also assigned to the valve element 52, which is at least partially bounded directly by the second operating region 68 and thus by the second operating piston 70. The second operating chamber 72 is further partially bounded directly by a second operating casing 74, in which the second operating piston 70 is accommodated, in particular so as to be translationally movable. The second operating piston 70 is connected to the second valve element 52, in particular via a second operating piston rod 76, so that the second valve element 52, the second operating piston 70, and in particular the second operating piston rod 76 are movable, in particular together or simultaneously, relative to the second operating casing 74, in particular translationally, in particular between a second closed position and a second open position. The fluid introduced into the first operating passage 54 and flowing through the first operating passage 54 can be introduced into the second operating chamber 72 via the first operating passage 54, so that the second operating area 68 and therefore the second operating piston 70 can be directly acted upon by the fluid introduced into the first operating passage 54, flowing through the first operating passage 54 and introduced into the second operating chamber 72 via the first operating passage 54, so that the second valve element 52, for example together with the second operating piston 70 and in particular the second operating piston rod 76, can be moved, in particular relative to the operating casing 74 and / or in translation, from the second closed position to the second open position.

[0055] Alternatively, a bellows, in particular a bellows, can be used for each actuating piston 60 or 70, as well as for all other pistons disclosed herein.

[0056] The actuating area 58, and thus the actuating piston 60, actuating chamber 62, actuating casing 64, and actuating piston rod 66, are components of or form an actuating unit 78, via which the valve element 50 can be operated by a fluid flowing through the actuating passage 56 and thereby moved from a first closed position to a first open position. The actuating area 68, actuating piston 70, actuating chamber 72, actuating casing 74, and actuating piston rod 76 therefore constitute or form a second actuating unit 80, via which the valve element 52 can be operated by a fluid flowing through the first actuating passage 54 and thus moved from a second closed position to a second open position. Each valve element 50, 52 is a normally closed valve that automatically returns to or assumes its respective closed position when not actuated.

[0057] A first flow restriction element 82 is assigned to the operating unit 78, and thus to the first operating area 58 and the first operating chamber 62, and is arranged in a first outlet line 84. The first flow restriction element 82 and the first outlet line 84 are connected in parallel to the operating unit 78 in the flow direction of the fluid flowing through the second operating line 56 and into the first operating chamber 62. Via the first outlet line 84 and thus via the first flow restriction element 82, fluid can be drawn out of the first operating chamber 62, in particular into the reservoir 16, thereby effecting or enabling the movement of the first valve element 50 from the first open position to the first closed position. A second flow restriction element 86 is therefore assigned to the operating unit 80, and thus to the second operating area 68 and the second operating chamber 72, and is arranged in a second outlet line 88. The outlet channel 88 and the flow restricting element 86 are connected in parallel to the operating unit 80 in the flow direction of the fluid flowing through the first operating channel 54 and into the second operating chamber 72. Via the outlet channel 88, and thus via the second flow restricting element 86, fluid can be led out of the second operating chamber 72 and introduced into the reservoir 16, thereby effecting or enabling the movement of the second valve element 52 from the second open position to the second closed position.

[0058] Each flow-restricting element 82, 86 may be a restriction, for example a rigid, and therefore non-adjustable, restriction, or an adjustable, particularly controllable, restriction. The flow-restricting element 82, 86 may be an active or passive element for causing or enabling, for example a particularly controllable, controlled, or regulatable, flow of fluid from the respective operating chamber 62, 72, particularly into the reservoir 16. In particular, each flow-restricting element 82, 86 is a functional element that enables pressure compensation between the respective operating chamber 62, 72 and the reservoir 16 and / or, in particular, consequently, pressure compensation between the working chambers 12, 14.

[0059] The flow restricting elements 82, 86 may be linear elements, i.e., have a linear characteristic, and are particularly designed to cause a higher fluid flow through the respective flow restricting elements 82, 86 the higher the pressure formed in the respective outlet passages 84, 88, or the flow restricting elements 82, 86 are constant flow elements and / or flow controllers, particularly designed so that the fluid flow through the respective flow restricting elements 82, 86 remains constant or is constant, regardless of the fluid pressure formed in the respective outlet passages 84, 88. In particular, for example, if the flow restricting elements 82, 86 are restrictors, the flow restricting elements 82, 86 are linear elements and therefore have a proportional or tapered characteristic, i.e., a constantly proportional or tapered characteristic.

[0060] 1 further shows that a first check valve 90 is disposed in the first flow path 42 downstream of the first branch point A1 and upstream of the working chamber 12, which blocks the flow of fluid through the first flow path 42 in the direction of the first branch point A1 but allows the flow of fluid in the direction of the first working chamber 12. A second check valve 92 is disposed in the second flow path 44 downstream of the second branch point A2 and upstream of the second working chamber 14, which blocks the flow of fluid through the second flow path 44 in the direction of the second branch point A2 but allows the flow of fluid in the direction of the second working chamber 14.

[0061] The actuator device 10 is operable in four-quadrant operation, in other words, the actuator device 10 allows for four-quadrant operation as described below.

[0062] For example, in a first operating state, while the pumping of fluid into the working chamber 14 by the pump device 36, in particular by the solid-state actuator 40, is interrupted, and particularly while the pumping of fluid by the solid-state actuator 40 is completely interrupted, the pump device 36, in particular the solid-state actuator 38, pumps fluid, in particular from the reservoir 16, via the flow path 42 into the working chamber 12. This in turn causes an increase in the volume of the working chamber 12 and, therefore, a decrease in the volume of the working chamber 14, in particular, because, at the branch point A1, a portion of the fluid flowing through the flow path 42 and being pumped by the pump device 36, in particular by the solid-state actuator 38, branches off and is introduced into the operating path 54 and by the operating path 54 into the operating chamber 72. This operates the valve element 52, thereby moving it from the second closed position to the second open position, so that the volume of the working chamber 14 is reduced so that fluid can flow out of the working chamber 14 via the outlet 48 and thus via the valve element 52, in particular into the reservoir 16. This causes the driven element 20 to be moved in a first direction of movement indicated by the arrow 28, in particular translationally and / or relative to the casing 26. In particular, this causes, for example, the driven element 20 to be moved from a first position to a second position different from the first position. When the pumping of fluid into the working chamber 12 has ended and the pumping of fluid into the working chamber 14 has ceased, the valve element 52 is returned from the second open position to the second closed position, in particular independently, i.e. automatically, in particular by at least a portion of the fluid initially contained in the operating chamber 72 being led out of the operating chamber 72 via the outlet 88 and thus via the flow restriction element 86, in particular into the reservoir 16. As a result, the driven element 20 remains in the aforementioned second position.This means in particular that when no fluid is pumped into the working chambers 12 and 14 and the valve elements 50 and 52 are in their closed position, the actuator device 10, also called the system or the entire system, has a high impedance, i.e. a high stiffness, and is therefore rigid, so that the driven element 20 remains in the second position, i.e. the position to which it was previously moved.

[0063] For example, the driven element 20 provides a first force, indicated by the force arrow F1 in FIG. 1 , when the driven element is moved in a first direction of movement. The force F1 can, for example, move and / or tension an element, particularly an additional element to the driven element 20, also referred to as an object, on which the first force (force arrow F1) acts, particularly in the first direction of movement indicated by the arrow 28. In particular, the first force (force arrow F1) can be applied by the driven element 20 as a pressing force, so that, for example, in the first operating state, the driven element 20 can press against or onto the object. The first operating state is an active operating state, since in or by the first operating state the driven element 20 is actively moved in the first direction of movement, thereby actively pumping fluid into the working chamber 12 by the pumping device 36, particularly by the solid-state actuator 38. The first operating state, i.e., movement of the driven element 20 in a first direction of movement, is also referred to as first quadrant or movement in first quadrant.

[0064] In the second operating state, while the pumping of fluid into the working chamber 12, in particular by the pump device 36, in particular by the solid-state actuator 38, is interrupted, in particular while the pumping of fluid into the working chamber 12, in particular by the pump device 36, in particular by the solid-state actuator 38, in particular is interrupted as a whole, for example the pump device 36, in particular the solid-state actuator 40, pumps fluid, in particular from the reservoir 16, through the flow path 44 into the working chamber 14. This results in an expansion of the volume of the working chamber 14, which is accompanied by a reduction in the volume of the working chamber 12. The reduction in the volume of the working chamber 12 is made possible in particular by the fact that at the branch point A2 at least a portion of the fluid pumped by the pump device 36, in particular by the solid-state actuator 40 and flowing through the flow path 44, is branched off and introduced into the operating path 56 and by the operating path 56 into the operating chamber 62. This moves the valve element 50 from the first closed position to the first open position, so that at least a portion of the fluid contained in the working chamber 12 can flow through the outlet channel 46 and thus out of the working chamber 12 via the outlet channel 46 and thus via the valve element 50, in particular into the reservoir 16. It can be seen that in the first operating state, the valve element 50 is closed, so that in the first operating state no fluid can outflow from the working chamber 12 via the outlet channel 46, and in the second operating state, the valve element 52 is closed, so that in the second operating state no fluid can outflow from the working chamber 14 via the outlet channel 48.

[0065] In or due to the second operating state, the driven element 20 is moved, in particular translationally and / or relative to the casing 26, in a second direction of movement indicated by the arrow 30, so that, for example, the driven element 20 is moved from the second position back to the first position, or from the second position to a third position different from the first and second positions. When the pumping of fluid into the working chamber 14 has ended, and in particular while the pumping of fluid into the working chamber 12 is interrupted, the valve element 50 returns, in particular automatically or independently, from its first open position to its first closed position, so that the system again has a high impedance, i.e. a high stiffness, and the driven element 20 remains in the first or third position, i.e. the position to which the driven element 20 was previously moved. The feature that each valve element 50 or 52 independently or automatically returns from its open position to its closed position is understood to mean that each valve element 50 or 52 returns from its open position to its closed position without the need to actively control, i.e., operate, the valve element 50 or 52. Each valve element 50 or 52 can return from its open position to its closed position simply by terminating the pumping of fluid into the respective working chamber 14 or 12, in particular.

[0066] Furthermore, each valve element 50, 52 can be considered to be open or in an open position when no fluid is being pumped into the working chamber 12 or 14. In other words, it is considered that the valve elements 50, 52 will return or remain open, particularly automatically, to the open position when the pumping of fluid into the working chamber 12, 14 is terminated.

[0067] In particular, each valve element 50 or 52 independently or automatically returns from its respective open position to its respective closed position, i.e., without the need to actively operate each valve element 50 or 52, particularly based solely on the pressure and / or flow characteristics within the system.

[0068] The second operating state, i.e., the movement of the driven element 20 in the second direction of movement, is also referred to as the second quadrant or movement in the second quadrant. The first and second operating states are operating states of the motor of the actuator device 10, i.e., motor operation, since in these operating states the driven element 20 is moved by actively pumping fluid into the respective working chamber 12 or 14 by the pump device 36 in order to specifically actively cause an expansion of the volume of the respective working chamber 12 or 14.

[0069] For example, in or due to the second operating state, driven element 20 provides a second force, indicated by force arrow F2 in FIG. 1 , acting in a second direction of movement indicated by arrow 30, and driven element 20 is moved in the second direction of movement, particularly translationally and / or relative to casing 26, in or due to the second operating state. Since force F1 acts in the first direction of movement and force F2 acts in the second direction of movement, second force F2 acts in the opposite direction to the first force, which in turn acts in the opposite direction to the second force. For example, the second force may be, for example, a pulling force acting from driven element 20 on the object described above. Thus, for example, the object can be moved and / or tensioned by or in the second operating state by the driven element 20, in particular in the second direction of movement, or if the object is tensioned by the first operating state, the second operating state can be considered to relax or release the object. In particular, in the second operating state, a second force indicated by force arrow F2 can be exerted or acted on the object from the driven element 20.

[0070] In short, it can be seen that, for example, in a first operating state, a first force is provided by the driven element 20, in particular acting from the driven element 20 on the object, and in a second operating state, a second force is provided by the driven element 20, or a second force acts from the driven element 20 on the object.

[0071] For example, in the third operating state of the actuator device 10, a third external force, indicated by force arrow F3, acts on the driven element 20 in the first direction of movement (arrow 28). In particular, the third force acts as a pulling force on the driven element 20. For example, to enable the driven element 20 to be movable or moved in the first direction of movement, in particular translationally and / or relative to the casing 26, by the third force, the following may be assumed: the application of the third force to the driven element 20 in the first direction of movement at least temporarily or for a short time results in a pressure in the working chamber 12 that is particularly slightly reduced from the initial level and in the working chamber 14 that is higher than the initial level, which closes the check valve 92 and, in particular, also the valve element 52, in particular at least temporarily or for a short time. To allow the movement of the driven element 20, which is now caused by the third force, while the pumping of fluid into the working chamber 14 is interrupted, the pump device 36, particularly the solid-state actuator 38, pumps fluid from the reservoir 16 into the working chamber 12, causing an increasing pressure to build up in the working chamber 12 until the operating chamber 72 is fluidly connected to the flow path 42 at the branch point A1 and the valve element 52 is operated and thus opened, i.e., moved from its second closed position to its second open position. As a result, fluid can flow out of the working chamber 14 via the now-open outlet path 48, allowing the driven element 20 to move in the first direction of movement. This results in a pressure built up in the working chamber 12 that is lower than the initial level, at least temporarily or for a short time, causing fluid to be pumped out of the operating chamber 72 via the branch point A1 and the operating path 54, particularly sucked out, thereby closing the valve element 52 again. As a result, fluid can no longer flow out of the working chamber 14, so that the driven element 20 cannot move any further in the first direction of movement.As a result, the driven element 20 is moved in the first direction of movement exactly at the pump speed of the solid-state actuator 38, i.e., at the speed at which the fluid is pumped through the flow path 42 by the pumping device 36, in particular by the solid-state actuator 38. The flow of fluid through the operating path 54 and into the working chamber 12 via the branch point A1 is subjected to a lower pressure or a lower pressure difference than the flow of fluid through the pumping device 36. Due to the reduced pressure that occurs at least temporarily or for a short time in the working chamber 12, the fluid is pumped, in particular sucked, into the working chamber 12 via the branch point A1 and the operating path 54 and without passing through the first solid-state actuator 38, also referred to as the first pump, or without passing through the pumping device 36. In other words, a smaller reduced pressure occurs along the path of the fluid that passes through the operating path 54 and the branch point A1 into the working chamber 12 than along the path of the fluid that passes through the pumping device 36 into the working chamber 12. The movement of the driven element 20 in the first direction of movement caused by the third external force is also called the third quadrant or movement in the third quadrant, in which case the third operating state is, so to speak, a generator operation or a generator operating state, so to speak, due to the driven element 20 being moved by the third external force.

[0072] For example, in the fourth operating state of the actuator device, a fourth external force, indicated by force arrow F4, is applied to the driven element 20, which in this case acts in the second direction of movement (arrow 30) and is therefore opposite to the third force F3. Thus, for example, the fourth force (force arrow F4) acts as a pressure on the driven element 20, in particular from the above-mentioned object. The fourth operating state is essentially the second generator operation or second generator operating state of the actuator device 10, which corresponds to the first generator operation, but differs only in that in the first generator operation (third operating state), a third force acting in the first direction of movement is applied to the driven element 20 from the outside, while in the second generator operation, and therefore in the fourth operating state, a fourth force acting in the second direction of movement is applied to the driven element 20 from the outside. A fourth force applied from the outside to the driven element 20 in the second direction of movement (arrow 30) causes, at least temporarily or briefly, a pressure in the working chamber 14 that is reduced from the initial level and a pressure in the working chamber 12 that is higher or increased from the initial level, which initially closes the check valve 90 and the valve element 50. However, now, in the fourth operating state, the pumping device 36, in particular the solid-state actuator 40, pumps fluid, in particular from the reservoir 16, in particular into or towards the working chamber 14, so that the pressure of the fluid in the working chamber 14 increases via the branch point A2 and the operating path 56 until the valve element 50 is actuated by the fluid and thus moved into the first open position. As a result, fluid can flow out of the working chamber 12 via the outlet 46, and the driven element 20, as it were, resists or resists the fourth force and is therefore moved in the second direction of movement, in particular translationally and / or relative to the housing 26. As a result, a pressure lower than the initial level, i.e., reduced, is created in the working chamber 14 at least temporarily or for a short time, as a result of which fluid is sucked out of the operating chamber 62 via the branch point A2 and via the operating channel 56.This closes the valve element 50 and moves it to the first closed position, so that the driven element 20 can no longer move in the second direction of movement. The driven element 20 is therefore moved in the second direction of movement precisely at the pumping speed of the pumping device 36, in particular the solid actuator 40, thereby precisely at the speed at which the pumping device 36, in particular the solid actuator 40, pumps fluid, in particular through the flow path 44. The reduced pressure that builds up in the working chamber 14 draws fluid from the working chamber 62 via the branch point A2 and the operating path 56, but not via the pumping device 36, in particular the solid actuator 40. This is because a smaller pressure drop occurs along the path of the fluid from the operating chamber 62 via the operating path 56 and branch point A2 than along the path of the fluid from the reservoir 16 via the pumping device 36, in particular the solid actuator 40, towards or into the working chamber 14. The two motor operations and the two generator operations are therefore four-quadrant operations, or constitute four-quadrant operations, which exhibit particularly advantageous movement, mobility or movability of the driven element 20 and thus of the driven device 18.

[0073] FIG. 2 partially shows a schematic diagram of a second embodiment of the actuator device 10. In the second embodiment, the pump device 36 includes a solid-state actuator 38 as a common solid-state actuator for the first and second flow paths 42 and 44 for pumping a fluid. Furthermore, the pump device 36 includes a valve device 94 arranged upstream of the flow paths 42 and 44 and downstream of the pump device 36, and thus downstream of the solid-state actuator 38, in the direction of fluid flow through the respective flow path 42 or 44 and the pump device 36, particularly the solid-state actuator 38. The valve device 94 can be switched between a first and a second switching state. The solid-state actuator 38, and thus the pump device 36, can pump a fluid, particularly from a reservoir, in exactly one pumping direction, indicated by an arrow 96 in FIG. 2 . When the valve device 94 is in a first switching state, when a fluid is pumped by the pump device 36, i.e. by the solid actuator 38, particularly in the pumping direction, the fluid is pumped from the reservoir 16 to and into the valve device 94 by the solid actuator 38, and is caused to flow through the valve device 94, and in the first switching state of the valve device 94, the fluid flowing through the valve device 94, which is pumped by the solid actuator 38 and thereby pumped into the valve device 94, is introduced through the valve device 94, i.e. by the valve device 94, into the first flow path 42, so that in the first switching state of the valve device 94, the fluid is pumped through the flow path 42 by the solid actuator 38 through the valve device 94. However, in the first switching state, the fluid pumped by the solid-state actuator 38 and into the valve device 94 is prevented or blocked by the valve device 94 from flowing into and through the flow path 44, so that, for example, in the first switching state, the flow path 42 is fluidly connected to the solid-state actuator 38 via the valve device 94, and in the first switching state, the flow path 44 is fluidly isolated from the solid-state actuator 38 by the valve device 94.

[0074] When the valve device 94 is in the second switching state, when fluid is pumped by the solid-state actuator 38, particularly from the reservoir 16, particularly in the pumping direction (arrow 96), the solid-state actuator 38 causes the fluid to be pumped to and into the valve device 94, flow through the valve device 94, and the fluid pumped by the solid-state actuator 38 into the valve device 94 is introduced into the second flow path 44, such that the fluid pumped by the solid-state actuator 38 is forced through the flow path 44 by the solid-state actuator 38. In the second switching state, the valve device 94 prevents or interrupts the fluid pumped by the solid-state actuator 38 into the valve device 94 from reaching and flowing through the flow path 42. Thus, for example, in the second switching state, flow path 44 is fluidly connected to solid-state actuator 38 via valve device 94, and in the second switching state, flow path 42 is fluidly isolated from solid-state actuator 38 by valve device 94.

[0075] In the second embodiment, the solid-state actuator 38, and thus the pump device 36, is arranged in a third flow channel 98, through which the solid-state actuator 38 can pump fluid from the reservoir 16, particularly in a pumping direction. In the flow direction of the fluid pumped by the solid-state actuator 38 and thereby flowing through the flow channel 98, the flow channel 98 is arranged upstream of the valve device 94. Via the flow channel 98, the fluid pumped by the solid-state actuator 38 is pumped, particularly from the reservoir, to, and particularly into, the valve device 94. Thus, in particular, in a first switching state of the valve device 94, the flow channel 42 is fluidly connected to the flow channel 98 via the valve device 94, while the flow channel 44 is fluidly isolated from the flow channel 98 by the valve device 94. In a second switching state, for example, the flow channel 44 is fluidly connected to the flow channel 98 via the valve device 94, while the flow channel 42 is fluidly isolated from the flow channel 98 by the valve device 94.

[0076] FIG. 3 shows a schematic diagram of a third embodiment of the actuator device 10. In this third embodiment, a free-flow valve 100 is arranged in a free flow path 102 associated with the working chamber 14. The free flow path 102 is fluidly connectable to or connected to the working chamber 14. Furthermore, the free flow path 102 is fluidly connected to the reservoir 16, so that, as will be explained in more detail below, the free flow path 102 bypasses the pump device 36 and the working chamber 12, the check valves 90 and 92, and in this case, the outlet paths 46 and 48, and the valve elements 50 and 52, particularly with respect to the fluid flow from the reservoir 16 through the free flow path 102 and into the working chamber 14. The free-flow valve 100 may be a check valve or may be configured in the form of a check valve. In the third embodiment, it is assumed that the free-flow valve 100 is open in the direction of the working chamber 14 and closed in the direction of the reservoir 16. This is understood to mean that the free flow valve 100 allows fluid flow from the reservoir 16 through the free flow path 102 into the working chamber 14, while the free flow valve 100 prevents or blocks the reverse flow, i.e., the flow of fluid from the working chamber 14 through the free flow path 102 into the reservoir 16. The configurations described above and below for the working chamber 14, particularly with respect to the free flow valve 100, can easily be transferred to the working chamber 12, and vice versa.

[0077] Via the free-flow valve 100 and thus via the free flow path 102, fluid can be introduced from the reservoir 16 into the working chamber 14, bypassing the pump device 36, bypassing the working chamber 12, bypassing the check valves 90 and 92, bypassing the outlet paths 46 and 48, and bypassing the valve elements 50 and 52. In particular, via the free-flow valve 100 and thus via the free flow path 102, fluid can be introduced from the reservoir 16 into the working chamber 14 to which the free-flow valve 100 is assigned, without affecting the valve elements 50 and 52, i.e., without causing movement of the valve elements 50 or 52 from the respective open to the respective closed positions or from the respective closed to the respective open positions. 3, the free-flow valve 100 ensures free flow, i.e., rapid movement of the driven element 20 in the second direction of movement indicated by the arrow 30, particularly due to a fourth external force (force arrow F4) acting on the driven element 20. For example, the action of the fourth force on the driven element 20 causes a reduced, i.e., relatively low, pressure to form in the working chamber 14, at least temporarily or for a short time, compared to the initial level, such that fluid is pumped, particularly sucked, from the reservoir 16 into the working chamber 14 via the free flow path 102 and thus via the free-flow valve 100, particularly until pressure compensation between the working chamber 14 and the reservoir 16 occurs via the free flow path 102. The driven element 20 can therefore be moved particularly quickly in the second direction of movement due to the fourth force until pressure compensation between the working chamber 14 and the reservoir 16 occurs via the free flow path 102. For example, after pressure compensation has occurred between the working chamber 14 and the reservoir 16 via the free flow path 102, in order to further move the driven element 20 in the second direction of movement by a fourth force, as described above with respect to the fourth operating state, the pump device 36 pumps fluid from the reservoir 16 via the flow path 44 into or in the direction of the working chamber 14, thereby operating and thus opening the valve element 50 via the operating path 56, so that the fluid can flow from the working chamber 12 via the outlet path 46 to the outside, in particular into the reservoir 16.

[0078] Reduced pressure means that the pressure is reduced or lowered from an initial level. Increased pressure means that the pressure is increased from an initial level.

[0079] When the pumping of fluid by the pump device 36 is terminated, for example in the first or second operating state or after the first or second operating state, and thus the operation of the respective valve element 50 or 52 is terminated, a pressure compensation can occur or be implemented between the respective operating chamber 62 or 72 in the reservoir 16 via the respective flow restriction element 82 or 86 and thus via the respective outlet 84 or 88, in particular so that fluid can flow from the operating chamber 62 or 72 via the outlet 84 or 88 and thus via the respective flow restriction element 82 or 86 and into the reservoir 16. As a result, the respective valve element 50 or 52 moves again to the respective closed position. As shown in FIGS. 1 and 3, the flow restriction element 82 or 86 can be, for example, a throttle.

[0080] FIG. 4 shows a schematic partial view of a fourth embodiment of the actuator device 10, e.g., the valve element 50. The arrow 104 indicates that, as in the first, second, and third embodiments, the outlet channel 46 is or is fluidly connectable to the working chamber 12, so that fluid can be drawn from the working chamber 12 via the outlet channel 46 and guided into the reservoir 16. Furthermore, the arrow 106 indicates that the operating channel 56 is or is fluidly connectable to the flow channel 44 at the branch point A2. FIG. 4 also shows the outlet channel 84, in which the flow-restricting element 82 is arranged. However, the flow-restricting element 82 is no longer a simple throttle but a flow-controlling, force-compensating selector valve, which may optionally have a simple, in particular linear, throttle.

Claims

1. An actuator device (10), comprising: at least two working chambers (12, 14) connected to one another such that an increase in the volume of a first of the working chambers (12, 14) is accompanied by a decrease in the volume of a second of the working chambers (14), and an increase in the volume of the second of the working chambers is accompanied by a decrease in the volume of the first of the working chambers (12, 14); a driven device (18) that can be driven by the respective volume expansion of each of the working chambers (12, 14) and that is movable thereby; a pumping device (36) having at least one solid-state actuator (38) for pumping a fluid; a first flow path (42) through which the fluid pumped by the pump device (36) can flow, the fluid being pumped by the pump device (36) and flowing through the first flow path (42) being able to be introduced into the first working chamber (12) via the first flow path in order to cause a volume expansion of the first working chamber (12); a second flow path (44) through which the fluid pumped by the pump device (36) can flow, the fluid being pumped by the pump device (36) and flowing through the second flow path (44) being able to be introduced into the second working chamber (14) via the second flow path in order to cause an expansion of the volume of the second working chamber (14); a first outlet passage (46) connected to the first working chamber (12) separately from the first flow path (42), through which the fluid can be discharged from the first working chamber (12) due to a reduction in the volume of the first working chamber (12); a second outlet passage (48) connected to the second working chamber (14) separately from the second flow path (44), through which the fluid can be discharged from the second working chamber (14) due to a reduction in the volume of the second working chamber (14); a first valve element (50) disposed in the first outlet passage (46), the first valve element (50) being movable between a first closed position that closes the first outlet passage (46) and at least one first open position that releases the first outlet passage (46); a second valve element (52) disposed in the second outlet passage (48), the second valve element (52) being movable between a second closed position that closes the second outlet passage (48) and at least one second open position that releases the second outlet passage (48); a first operating path (54) fluidly connected to the first flow path (42) at a first branch point (A1) arranged downstream of the pumping device (36) and upstream of the first working chamber (12), wherein a portion of the fluid pumped by the pumping device (36) and flowing through the first flow path (42) can be branched off from the first flow path (42) and introduced into the first operating path (54), and via the first operating path, the second valve element (52) can be operated by the fluid introduced into and flowing through the first operating path (54), thereby moving the second valve element (52) from the second closed position to the second open position; and a second operating path (56) fluidly connected to the second flow path (44) at a second branch point (A2) arranged downstream of the pumping device (36) and upstream of the second working chamber (14), wherein at the second branch point, a portion of the fluid pumped by the pumping device (36) and flowing through the second flow path (44) can be branched off from the second flow path (44) and introduced into the second operating path (56), and via the second operating path, the first valve element (50) can be operated by the fluid introduced into and flowing through the second operating path (56), thereby moving the first valve element (50) from the first closed position to the first open position; An actuator device (10) having:

2. 2. The actuator device according to claim 1, wherein the first valve element is assigned a first operating area and a first operating chamber that is at least partially directly defined by the first operating area, into which the fluid introduced into the second operating path and flowing through the second operating path can be introduced, so that the first operating area can be loaded by the fluid introduced into the second operating path and flowing through the second operating path into the first operating chamber, so that the first valve element can be moved from the first closed position to the first open position.

3. 3. The actuator device according to claim 2, further comprising a first flow limiting element (82) assigned to the first operating area (58) and the first operating chamber (62), the first flow limiting element being connected in parallel to the first operating chamber (62) and the first operating area (58) in a flow direction of the fluid flowing through the second operating path (56) into the first operating chamber (62), and through which the fluid can be drawn out of the first operating chamber (62), thereby effecting or enabling movement of the first valve element (50) from the first open position to the first closed position.

4. 4. The actuator device according to claim 1, wherein the second valve element is assigned a second operating area and a second operating chamber that is at least partially directly bounded by the second operating area, into which the fluid introduced into the first operating path and flowing through the first operating path can be introduced, so that the second operating area can be loaded by the fluid introduced into the first operating path and flowing through the first operating path into the second operating chamber, so that the second valve element can be moved from the second closed position to the second open position.

5. 5. The actuator device according to claim 4, further comprising a second flow limiting element (86) assigned to the second operating area (68) and the second operating chamber (72), the second flow limiting element being connected in parallel to the second operating chamber (72) and the second operating area (68) in a flow direction of the fluid flowing through the first operating path (54) into the second operating chamber (72), and the fluid can be drawn out of the second operating chamber (72) via the second flow limiting element (86), thereby effecting or enabling movement of the second valve element (52) from the second open position to the second closed position.

6. 6. The actuator device (10) according to claim 1, wherein a first check valve (90) is arranged in the first flow path (42) downstream of the first branch point (A1) and upstream of the first working chamber (12), the check valve blocking the flow of the fluid through the first flow path (42) in the direction of the first branch point (A1) and allowing the flow of the fluid in the direction of the first working chamber (12).

7. 7. The actuator device (10) according to claim 1, wherein a second check valve (92) is arranged in the second flow path (44) downstream of the second branch point (A2) and upstream of the second working chamber (14), the second check valve blocking the flow of the fluid through the second flow path (44) in the direction of the second branch point (A2) and allowing the flow of the fluid in the direction of the second working chamber (14).

8. The pump device (36) a solid-state actuator (38) assigned to said first flow path (42) as a first solid-state actuator (38) for pumping said fluid through said first flow path (42); and a second solid-state actuator (40) assigned to said second flow path (44) for pumping said fluid through said second flow path (44); 8. The actuator device (10) according to any one of claims 1 to 7, comprising:

9. The pump device (36) a solid-state actuator (38) common to the first flow path (42) and the second flow path (44) for pumping the fluid; and A valve device (94) comprising: the fluid pumped by the solid-state actuator (38) is introducible to the first flow path (42) via the valve device (94) and is pumped through the first flow path (42); and the introduction of the fluid pumped by the solid-state actuator (38) into the second flow path (44) via the valve device (94) is blocked by the valve device (94); a first switching state; the fluid pumped by the solid-state actuator (38) is introducible to the second flow path (44) via the valve device (94) and is pumped through the second flow path (44); and the introduction of the fluid pumped by the solid-state actuator (38) into the first flow path (42) via the valve device (94) is blocked by the valve device (94); A valve device (94) switchable between a first and second switching state.

8. The actuator device (10) according to any one of claims 1 to 7, comprising:

10. 10. The actuator device (10) of claim 9, wherein the solid-state actuator (38) is disposed in a third flow path (98) disposed upstream of the valve device (94), and the fluid pumped through the third flow path (98) by the solid-state actuator (38) reaches the valve device (94) via the third flow path.

11. The driven device (18) has a driven element (20) that partially and directly defines each of the working chambers (12, 14), the driven element comprising: movably housed within a casing (26) that partially defines each of the working chambers (12, 14); upon introduction of the fluid into the first working chamber (12), it is directly loadable by the fluid introduced into the first working chamber (12) and is thereby movable relative to the casing (26) in a first direction of movement (28); and Upon introduction of the fluid into the second working chamber (14), the second working chamber (14) can be directly loaded by the fluid introduced therein, and thereby moveable relative to the casing (26) in a second direction (30) opposite to the first direction of movement (28). An actuator device (10) according to any one of claims 1 to 10.

12. 12. The actuator device (10) according to claim 11, wherein the driven element (20) is translationally and / or rotationally and / or oscillateably movable relative to the casing (26) in each of the directions of movement (28, 30).

13. 13. The actuator device (10) according to claim 1, wherein a free-flow valve (100) is assigned to one of the working chambers (12, 14), via which the fluid from a reservoir (16) can be introduced into the one working chamber (14), bypassing the pump device (36), the free-flow valve (100) being open in the direction of the one working chamber (14) and closed in the direction of the reservoir (16).

14. A method of operating an actuator device (10), the actuator device (10) comprising: at least two working chambers (12, 14) connected to one another such that an increase in the volume of a first of the working chambers (12, 14) is accompanied by a decrease in the volume of a second of the working chambers (14), and an increase in the volume of the second of the working chambers is accompanied by a decrease in the volume of the first of the working chambers (12, 14); a driven device (18) driven by the respective volume expansion of each of the working chambers (12, 14) and thereby moved; a pumping device (36) having at least one solid-state actuator (38) for pumping a fluid; a first flow path (42) through which the fluid pumped by the pump device (36) can flow, the first flow path (42) introducing the fluid pumped by the pump device (36) and flowing through the first flow path (42) into the first working chamber (12) to cause a volume expansion of the first working chamber (12) via the first flow path; a second flow path (44) through which the fluid pumped by the pump device (36) can flow, the second flow path (44) introducing the fluid pumped by the pump device (36) and flowing through the second flow path (44) into the second working chamber (14) to cause a volume expansion of the second working chamber (14) via the second flow path; a first outlet passage (46) connected to the first working chamber (12) separately from the first flow path (42), through which the fluid is led out of the first working chamber (12) due to a reduction in the volume of the first working chamber (12); a second outlet passage (48) connected to the second working chamber (14) separately from the second flow path (44), through which the fluid is led out of the second working chamber (14) due to a reduction in the volume of the second working chamber (14); a first valve element (50) disposed in the first outlet passage (46), the first valve element being movable between a first closed position that closes the first outlet passage (46) and at least one first open position that releases the first outlet passage (46); a second valve element (52) disposed in the second outlet passage (48), the second valve element (52) being movable between a second closed position that closes the second outlet passage (48) and at least one second open position that releases the second outlet passage (48); a first operating path (54) fluidly connected to the first flow path (42) at a first branch point (A1) arranged downstream of the pumping device (36) and upstream of the first working chamber (12), wherein at the first branch point, a portion of the fluid pumped by the pumping device (36) and flowing through the first flow path (42) is branched off from the first flow path (42) and introduced into the first operating path (54), and via the first operating path, the second valve element (52) is operated by the fluid introduced into and flowing through the first operating path (54), thereby moving the second valve element (52) from the second closed position to the second open position; and a second operating path (56) fluidly connected to the second flow path (44) at a second branch point (A2) arranged downstream of the pumping device (36) and upstream of the second working chamber (14), wherein at the second branch point, a portion of the fluid pumped by the pumping device (36) and flowing through the second flow path (44) is branched from the second flow path (44) and introduced into the second operating path (56), and via the second operating path, the first valve element (50) is operated by the fluid introduced into and flowing through the second operating path (56), thereby moving the first valve element (50) from the first closed position to the first open position; It has A method of operating an actuator device (10).

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