Measurement system and method of use

Abstract

1. A measurement system (11) comprising a sensor device (22) and an illumination system (IL1) configured to receive a radiation beam and illuminate the sensor device with radiation, the sensor device having a pattern area configured to form a plurality of diffracted beams separated in a shear direction, wherein the sensor device comprises a radiation detector (24), the pattern area is configured so that at least some of the diffracted beams form an interference pattern on the radiation detector, and the sensor device comprises a plurality of pattern areas (19a-19c, 20a, 20b), and the pitch of the pattern areas is different in adjacent pattern areas.

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims priority to European Application No. 20207351.6, filed November 13, 2020, the entire contents of which are incorporated herein by reference.

[0002]

[0002] The present invention relates to a measurement system and a method of use, more particularly the method may be for determining optical aberrations or measuring alignment of a projection system. [Background technology]

[0003] A lithographic apparatus is a machine constructed to apply a desired pattern onto a substrate. Lithographic apparatus can be used, for example, in the manufacture of integrated circuits (ICs). A lithographic apparatus can project a pattern (often referred to as a "design layout" or "design") in a patterning device (e.g., mask) onto a layer of radiation-sensitive material (resist) provided on a substrate (e.g., wafer).

[0004] As semiconductor manufacturing processes continue to advance, the dimensions of circuit elements have continually decreased, while the amount of functional elements, such as transistors, per device has steadily increased for decades, following a trend commonly referred to as "Moore's Law." To accommodate Moore's Law, the semiconductor industry pursues technologies that enable the creation of smaller and smaller features. To project a pattern onto a substrate, a lithography apparatus may use electromagnetic radiation. The wavelength of this radiation determines the minimum size of the features patterned on the substrate. Typical wavelengths currently in use are 365 nm (i-line), 248 nm, 193 nm, and 13.5 nm. To form smaller features on a substrate than lithography apparatuses using radiation having a wavelength of, for example, 193 nm, lithography apparatuses using extreme ultraviolet (EUV) radiation, having wavelengths in the range of 4 nm to 20 nm, e.g., 6.7 nm or 13.5 nm, may be used.

[0005]

[0005] Radiation patterned by a patterning device is focused onto a substrate using a projection system. The projection system can introduce optical aberrations that cause the image formed on the substrate to deviate from the desired image (e.g., a diffraction-limited image of the patterning device). Alignment in a lithographic apparatus is also an important aspect, for example to ensure that the desired image is positioned at the correct location.

[0006]

[0006] It may be desirable to provide a method and apparatus for accurately determining such aberrations caused by a projection system so that these aberrations can be better controlled. It may also be desirable to provide a method and apparatus for accurately determining alignment in a lithographic apparatus. Summary of the Invention

[0007]

[0007] According to a first aspect of the present invention, there is provided a measurement system comprising a sensor device and an illumination system configured to receive a radiation beam and illuminate the sensor device with radiation having a pattern area configured to form a plurality of diffracted beams separated in a shearing direction, wherein the sensor device comprises a radiation detector and the pattern area is configured so that at least a portion of the diffracted beams form an interference pattern on the radiation detector, and the sensor device comprises a plurality of pattern areas, and the pitch of the pattern areas is different in adjacent pattern areas.

[0008]

[0008] This has the advantage that the amount of data collected in a single measurement is increased. Advantageously, signals corresponding to adjacent pattern areas can be distinguished without requiring a particular spatial separation between the adjacent pattern areas.

[0009]

[0009] The measurement system may be configured so that interference patterns from adjacent pattern areas at least partially overlap at the radiation detector.

[0010]

[0010] The pitch of every other pattern area may be the same.

[0011]

[0011] The pitch of adjacent pattern areas may not be an integer multiple of an even number.

[0012]

[0012] The pitch of adjacent pattern areas may not be an integer multiple.

[0013] The plurality of pattern areas may include 13 pattern areas.

[0014]

[0014] Multiple pattern areas may be positioned at odd and even field point locations.

[0015] The plurality of pattern regions may extend in an x-direction and in a second direction orthogonal to the x-direction.

[0016]

[0016] The measurement system may further comprise a patterning device, wherein the illumination system is configured to illuminate with radiation a patterning device having a first pattern area configured to receive the radiation beam and form a plurality of first diffracted beams separated in a shearing direction, the pattern area of ​​the sensor device includes a second pattern area, and the projection system is configured to project the first diffracted beams onto the sensor device, the second pattern area is configured to receive the first diffracted beams from the projection system and form a plurality of second diffracted beams from each of the first diffracted beams so that the first and second pattern areas form a set, and the first and second pattern areas in the set are illuminated with the first diffracted beams. and matching the pitches of the first and second pattern areas in the shearing direction so that at least a portion of a second diffracted beam formed from at least one of the beams is spatially coherent with a second diffracted beam formed from at least one other of the first diffracted beams to form an interference pattern on the radiation detector, the patterning device comprising a plurality of first pattern areas and the sensor apparatus comprising a plurality of second pattern areas, whereby there are a plurality of sets each comprising one of the plurality of first pattern areas and one of the plurality of second pattern areas, the pitch of the first pattern areas being different in adjacent sets and / or the pitch of the second pattern areas being different in adjacent sets.

[0017]

[0017] The pitch of the first pattern area and the second pattern area in at least one of the plurality of sets may be the same.

[0018]

[0018] The measurement system may comprise a positioning device configured to move at least one of the patterning device and the sensor device in a shearing direction, and a controller configured to control the positioning device to move at least one of the first patterning device and the sensor device in a shearing direction so that the intensity of radiation received by each portion of the radiation detector varies as a function of movement in the shearing direction to form vibration signals corresponding to different pitches of first pattern areas in adjacent sets and / or different pitches of second pattern areas in adjacent sets, determine from the radiation detector the phases of harmonics of the vibration signal at multiple positions on the radiation detector, and determine a set of coefficients characterizing an aberration map of the projection system from the phases of harmonics of the vibration signal at multiple positions on the radiation detector.

[0019]

[0019] A set of coefficients characterizing the aberration map of the projection system may be determined by equating the phase of the harmonics of the vibration signal to the difference in the aberration map of positions in the pupil plane that are separated in the shearing direction by twice the shearing distance corresponding to the distance in the pupil plane between two adjacent first diffracted beams, and solving to obtain the set of coefficients.

[0020] A set of coefficients characterizing the aberration map of the projection system may be determined by simultaneously solving the shear direction constraint and the second orthogonal direction constraint.

[0021] The plurality of first pattern areas and the plurality of second pattern areas may be a grid.

[0022]

[0022] A lithographic apparatus comprising the above measurement system.

[0023]

[0023] According to a second aspect of the present invention, there is provided a method of measuring comprising illuminating with radiation a sensor device having a pattern area configured to receive at least a portion of the radiation and form a plurality of diffracted beams separated in a shearing direction, wherein the sensor device comprises a radiation detector configured to receive at least a portion of the diffracted beams, and the pattern area is configured so that at least a portion of the diffracted beams form an interference pattern on the radiation detector, and the sensor device comprises a plurality of pattern areas, and the pitch of the pattern areas is different in adjacent pattern areas.

[0024] The method may further include illuminating with the radiation a patterning device having a first pattern area configured to receive at least a portion of the radiation and form a plurality of first diffracted beams separated in a shear direction, projecting using the projection system at least a portion of the plurality of first diffracted beams onto a sensor arrangement comprising a pattern area including a second pattern area configured to receive the first diffracted beams from the projection system and form a plurality of second diffracted beams from each of the first diffracted beams, and a radiation detector configured to receive at least a portion of the second diffracted beams, and forming the first and second pattern areas in the set from at least one of the first diffracted beams. and matching the pitches in the shearing direction of the first and second pattern areas so that at least a portion of the second diffracted beam formed from the at least one other first diffracted beam is spatially coherent with a second diffracted beam formed from at least one other first diffracted beam to form an interference pattern on the radiation detector, wherein the patterning device comprises a plurality of first pattern areas and the sensor apparatus comprises a plurality of second pattern areas, such that there are a plurality of sets each comprising one of the plurality of first pattern areas and one of the plurality of second pattern areas, and the pitch of the first pattern areas differs in adjacent sets and / or the pitch of the second pattern areas differs in adjacent sets.

[0025]

[0025] The method may further include moving at least one of the patterning device and the sensor arrangement in a shearing direction so that the intensity of the radiation received by each portion of the radiation detector varies as a function of movement in the shearing direction to form a plurality of vibration signals corresponding to different pitches of first pattern areas in adjacent sets and / or different pitches of second pattern areas in adjacent sets, determining from the radiation detector the phases of harmonics of the vibration signals at a plurality of positions on the radiation detector, and determining a set of coefficients characterizing an aberration map of the projection system from the phases of harmonics of the vibration signals at a plurality of positions on the radiation detector.

[0026]

[0026] The method may further include determining a set of coefficients characterizing the aberration map of the projection system by equating the phase of the harmonics of the vibration signal to the difference in the aberration map at positions in the pupil plane that are separated in the shearing direction by twice the shearing distance corresponding to the distance in the pupil plane between two adjacent first diffracted beams, and solving to obtain the set of coefficients.

[0027] The method may further include determining a set of coefficients characterizing an aberration map of the projection system by simultaneously solving the shear direction constraint and the second orthogonal direction constraint.

[0028]

[0028] The method may further comprise moving at least one of the patterning device and the sensor arrangement in the shearing direction in phase steps in the range of 4 to 9 to form a plurality of vibration signals.

[0029] According to a third aspect of the present invention, there is provided a computer readable medium carrying a computer program comprising computer readable instructions configured to cause a computer to carry out the method set out above.

[0030]

[0030] According to a fourth aspect of the present invention, there is provided a computer apparatus comprising a memory for storing processor-readable instructions and a processor configured to read and execute the instructions stored in the memory, wherein the processor-readable instructions include instructions configured to control a computer to perform the above-mentioned method. [Brief explanation of the drawings]

[0031]

[0031] Embodiments of the present invention will now be described, by way of example only, with reference to the accompanying schematic drawings, in which:

[0032] [Figure 1] 1 depicts a schematic overview of a lithographic apparatus; [Figure 2] FIG. 1 is a schematic diagram of a measurement system according to an example. [Figure 3A-3B] 3 is a schematic diagram of a patterning device and sensor arrangement that may form part of the measurement system of FIG. 2; [Figure 4] 1 is a schematic diagram of an example measurement system including a first pattern area and a second pattern area configured to receive radiation and form a plurality of first diffracted beams; [Figures 5A-5C] 5A-5C show different sets of second diffracted beams formed by the second pattern area of ​​the measurement system shown in FIG. 4, each generated by a different first diffracted beam formed by the first pattern area. [Figure 6A] 5 shows the scattering efficiency of a one-dimensional diffraction grating that has a 50% duty cycle and may represent the first pattern area of ​​the measurement system shown in FIG. [Figure 6B] 5 shows the scattering efficiency of a two-dimensional diffraction grating in the form of a checkerboard with a 50% duty cycle, which may represent the second pattern area of ​​the measurement system shown in FIG. [Figure 6C]6A and 6B show interference intensity maps of the measurement system shown in FIG. 4 when employing the first pattern area shown in FIG. 6A and the second pattern area shown in FIG. 6B. Each of the interference intensities shown represents a second interfering beam that contributes to the first harmonic of the oscillating phase stepping signal and has a different overlap at the radiation detector with the circle representing the numerical aperture of the projection system PS. [Figure 7A-7C] 5 shows a portion of the numerical aperture of the projection system of the measurement system shown in FIG. 4 filled with the three different first diffracted beams shown in FIG. 4. [Figures 8A-8C] 7B shows a portion of the radiation detector of the measurement system shown in FIG. 4 filled with three second diffracted beams resulting from the first diffracted beam represented in FIG. 7B, corresponding to the numerical aperture of the projection system of the measurement system. [Figures 9A-9C] 7B shows a portion of the radiation detector of the measurement system shown in FIG. 4 filled with three second diffracted beams resulting from the first diffracted beam represented in FIG. 7A, corresponding to the numerical aperture of the projection system of the measurement system; [Figures 10A-10C] 7D shows a portion of the radiation detector of the measurement system shown in FIG. 4 filled with three second diffracted beams resulting from the first diffracted beam represented in FIG. 7C, corresponding to the numerical aperture of the projection system of the measurement system. [Figure 11A] 8A and 8B show a portion of the radiation detector of the measurement system shown in FIG. 4 corresponding to the numerical aperture of the projection system of the measurement system and illustrating the overlap of the second diffracted beams shown in FIGS. 8B and 9A and the overlap of the second diffracted beams shown in FIGS. 8A and 10B. [Figure 11B] 8B and 9B. FIG. 9C shows a portion of the radiation detector of the measurement system shown in FIG. 4, corresponding to the numerical aperture of the projection system of the measurement system, and illustrating the overlap of the second diffracted beams shown in FIGS. 8B and 10C and the overlap of the second diffracted beams shown in FIGS. 8C and 9B. [Figure 12] 1 is a schematic diagram of a measurement system according to an embodiment of the present invention. [Figures 13A-13B] FIG. 13 is a schematic diagram of a patterning device and sensor arrangement that may form part of the measurement system of FIG. 12; [Figure 14]1 shows a spatial intensity plot of measurements made by a measurement system according to an embodiment of the present invention. [Figure 15] 1 shows a graph of a phase curve of a measurement made by a measurement system according to an embodiment of the present invention. [Figure 16] 1 shows a graph of simulated measurement repeatability (hereinafter referred to as reproducibility) (Repro (nm)) of a measurement system according to an embodiment of the present invention. [Figure 17] 10 shows a graph of simulated expected position dependence of a measurement system according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0033]

[0032] In this document, the terms "radiation" and "beam" are used to encompass all types of electromagnetic radiation, including ultraviolet radiation (e.g., having wavelengths of 365 nm, 248 nm, 193 nm, 157 nm or 126 nm) and EUV (extreme ultraviolet radiation, e.g., having wavelengths in the range of about 5 to 100 nm).

[0034] The terms "reticle," "mask," or "patterning device," as used herein, may be broadly interpreted as referring to a general-purpose patterning device that can be used to impart a patterned cross-section to an incoming radiation beam, corresponding to the pattern to be created in a target portion of a substrate. The term "light valve" can also be used in this context. Besides the classic mask (transmissive or reflective mask, binary mask, phase-shifting mask, hybrid mask, etc.), examples of other such patterning devices include programmable mirror arrays and programmable LCD arrays.

[0035] 1 schematically depicts a lithographic apparatus LA. The lithographic apparatus LA comprises: an illumination system (also called an illuminator) IL configured to condition a radiation beam B (e.g. UV radiation, DUV radiation, or EUV radiation), a mask support (e.g. a mask table) MT constructed to support a patterning device (e.g. a mask) MA and coupled to a first positioner PM configured to accurately position the patterning device MA according to certain parameters, a substrate support (e.g. a wafer table) WT configured to hold a substrate (e.g. a resist-coated wafer) W and coupled to a second positioner PW constructed to accurately position the substrate support according to certain parameters, and a projection system (e.g. a refractive projection lens system) PS configured to project a pattern imparted to the radiation beam B by the patterning device MA onto a target portion C (e.g. comprising one or more dies) of the substrate W.

[0036]

[0035] In operation, the illumination system IL receives a radiation beam from the radiation source SO, for example via the beam delivery system BD. The illumination system IL may include various types of optical components, such as refractive, reflective, magnetic, electromagnetic, electrostatic and / or other types of optical components, or any combination thereof, for directing, shaping and / or controlling the radiation. The illuminator IL may be used to condition the radiation beam B, so that it has a desired spatial and angular intensity distribution across its cross-section in the plane of the patterning device MA.

[0037]

[0036] As used herein, the term "projection system" PS should be interpreted broadly as encompassing various types of projection systems, including refractive optical systems, catadioptric optical systems, anamorphic optical systems, magnetic optical systems, electromagnetic optical systems, and / or electrostatic optical systems, or any combination thereof, as appropriate to the exposure radiation used and / or other factors such as the use of an immersion liquid or a vacuum. Where the term "projection lens" is used herein, this may be considered as synonymous with the more general term "projection system" PS.

[0038]

[0037] The lithographic apparatus LA may be of a type in which at least a portion of the substrate W is covered by a liquid having a relatively high refractive index, such as water, so as to fill a space between the projection system PS and the substrate W. This is also known as immersion lithography. Further information about immersion techniques is given in U.S. Patent No. 6,952,253, which is incorporated herein by reference.

[0039] The lithographic apparatus LA may also be of a type having two or more substrate supports WT (also known as "dual stage"). In such a "multi-stage" machine, the substrate supports WT may be used in parallel and / or a substrate W on one substrate support WT may be used to expose a pattern thereon while a substrate W placed on another substrate support WT is being used to perform a preparatory step for a subsequent exposure of the substrate W.

[0040] In addition to the substrate support WT, the lithographic apparatus LA may include a measurement stage. The measurement stage is arranged to hold a sensor and / or a cleaning device. The sensor can be arranged to measure a property of the projection system PS or a property of the radiation beam B. The measurement stage can hold multiple sensors. The cleaning device can be arranged to clean part of the lithographic apparatus, for example part of the projection system PS or part of the system for providing immersion liquid. When the substrate support WT is remote from the projection system PS, the measurement stage can be moved below the projection system PS.

[0041] In operation, the radiation beam B is incident on the patterning device MA, e.g. a mask, which is held on the mask support MT and is patterned by a pattern (design layout) present on the patterning device MA. Having traversed the mask MA, the radiation beam B passes through the projection system PS, which focuses the beam onto a target portion C of the substrate W. The second positioner PW and position measurement system IF can be used to accurately move the substrate support WT, for example to position different target portions C at focused and aligned positions in the path of the radiation beam B. Similarly, the first positioner PM, and possibly further position sensors (not explicitly shown in FIG. 1 ), can be used to accurately position the patterning device MA with respect to the path of the radiation beam B. The patterning device MA and substrate W can be aligned using mask alignment marks M1, M2 and substrate alignment marks P1, P2. Although the illustrated substrate alignment marks P1, P2 occupy dedicated target portions, it is possible to position them in spaces between the target portions. When the substrate alignment marks P1, P2 are located between target portions C, they are known as scribe-lane alignment marks.

[0042] To clarify the invention, a Cartesian coordinate system is used. The Cartesian coordinate system has three axes: x, y, and z. Each of the three axes is orthogonal to the other two. Rotation about the x-axis is called Rx rotation. Rotation about the y-axis is called Ry rotation. Rotation about the z-axis is called Rz rotation. The x- and y-axes define a horizontal plane, while the z-axis is vertical. The Cartesian coordinate system is not limiting of the invention and is used for clarity only. Alternatively, another coordinate system, such as a cylindrical coordinate system, may be used to clarify the invention. The orientation of the Cartesian coordinate system may be different, for example, so that the z-axis has a component along the horizontal plane.

[0043] In general, the projection system PS has an optical transfer function that may be non-uniform, which may affect the pattern imaged onto the substrate W. For unpolarized radiation, such effects may be reasonably well described by two scalar maps that describe the transmission (apodization) and relative phase (aberrations) of radiation exiting the projection system PS as a function of position in its pupil plane. These scalar maps, which may be referred to as a transmission map and a relative phase map, may be expressed as a linear combination of a complete set of basis functions. A particularly convenient set are the Zernike polynomials, which form a set of orthogonal polynomials defined on the unit circle. Determining each scalar map may involve determining the coefficients of such an expansion. Because the Zernike polynomials are orthogonal on the unit circle, the Zernike coefficients may be obtained from the measured scalar map by computing the dot product of the measured scalar map with each Zernike polynomial in turn and dividing this by the square of the norm of that Zernike polynomial. Hereinafter, unless otherwise indicated, any reference to Zernike coefficients will be understood to mean the Zernike coefficients of the relative phase map (also referred to herein as the aberration map). It should be understood that in alternative examples, other sets of basis functions may be used. For example, some examples may use Tatian Zernike polynomials, e.g., for an obstructed aperture system.

[0044]

[0043] The wavefront aberration map represents the distortion of the wavefront of light approaching a point in the image plane of the projection system PS from a spherical wavefront (as a function of position in the pupil plane, or the angle at which the radiation approaches the image plane of the projection system PS). As discussed, this wavefront aberration map W(x,y) may be expressed as a linear combination of Zernike polynomials.

[0045]

number

[0046] where x and y are coordinates in the pupil plane, and Z n (x,y) is the nth Zernike polynomial, and c n are the coefficients. It should be understood that in the following, the Zernike polynomials and coefficients are labeled with indices commonly referred to as Noll indices. Thus, Z n (x,y) is a Zernike polynomial with Noll index n, and C n are coefficients with Noll index n. Here, the wavefront aberration map is a set of coefficients C, which in this expansion may be called Zernike coefficients. n may be characterized by a set of

[0047] It should be understood that only a finite number of Zernike orders are considered. Different Zernike coefficients of the phase map may provide information about different forms of aberration due to the projection system PS. The Zernike coefficient with a Noll index of 1 may be referred to as the first Zernike coefficient, the Zernike coefficient with a Noll index of 2 may be referred to as the second Zernike coefficient, and so on.

[0048] The first Zernike coefficient relates to the average value (which may be referred to as the piston) of the measured wavefront. The first Zernike coefficient may be unrelated to the performance of the projection system PS and therefore may not be determined using the methods described herein. The second Zernike coefficient relates to the tilt of the measured wavefront in the x direction. The tilt of the wavefront in the x direction is equal to the displacement in the x direction. The third Zernike coefficient relates to the tilt of the measured wavefront in the y direction. The tilt of the wavefront in the y direction is equal to the displacement in the y direction. The fourth Zernike coefficient relates to the defocus of the measured wavefront. The fourth Zernike coefficient is equal to the displacement in the z direction. Higher order Zernike coefficients relate to other forms of aberration due to the projection system (e.g. astigmatism, coma, spherical aberration and other effects).

[0049] Throughout this specification, the term "aberration" should be intended to include all forms of wavefront deviations from a perfect spherical wavefront. That is, the term "aberration" may relate to image geometry (e.g., second, third, and fourth Zernike coefficients) and / or higher order aberrations, such as those related to Zernike coefficients with Noll indices of 5 or greater. Furthermore, any reference to an aberration map of a projection system may include all forms of wavefront deviations from a perfect spherical wavefront, including those due to image geometry.

[0050]

[0047] The transmission map and relative phase map are field and system dependent, i.e., in general each projection system PS will have a different Zernike expansion for each field point (i.e. for each spatial location in its image plane).

[0051] As will be explained in more detail below, the relative phase in a pupil plane of the projection system PS may be determined by projecting radiation from an object plane of the projection system PS (i.e. the plane of the patterning device MA) through the projection system PS and measuring the wavefront (i.e. the locus of points of in phase) using a shearing interferometer. The shearing interferometer may comprise a diffraction grating, for example a two-dimensional grating, in the image plane of the projection system (i.e. the substrate table WT), and a detector configured to detect the interference pattern in a plane conjugate to the pupil plane of the projection system PS.

[0052] The projection system PS comprises a plurality of optical elements (including lenses). As already explained, the projection system PS may comprise several lenses (e.g. 1, 2, 6 or 8 lenses). The lithographic apparatus LA further comprises adjustment means PA for adjusting these optical elements in order to correct aberrations (any kind of phase variation across the pupil plane across the field). To achieve this, the adjustment means PA may be operable to manipulate the optical elements in the projection system PS in one or more different ways. The projection system may have a coordinate system whose optical axis extends in the z-direction (it should be understood that the direction of this z-axis varies along the optical path through the projection system, for example for each lens or optical element). The adjustment means PA may be operable to perform any combination of movement of one or more optical elements, tilt of one or more optical elements, and / or deformation of one or more optical elements. The movement of the optical elements may be in any direction (x, y, z or a combination thereof). The tilt of the optical element is typically out of plane perpendicular to the optical axis by rotating it about an axis in the x or y direction, although rotation about the z axis may be used for non-rotationally symmetric optical elements. The deformation of the optical element may be performed, for example, by applying a force to the side of the optical element using an actuator and / or by heating selected areas of the optical element using a heating element. In general, it may not be possible to adjust the projection system PS to correct for apodization (transmission variation across the pupil plane). A transmission map of the projection system PS may be used when designing a mask MA for the lithographic apparatus LA.

[0053] In some examples, the adjustment means PA may be operable to move the support structure MT and / or the substrate table WT. The adjustment means PA may be operable to translate (in either the x, y or z direction or a combination thereof) and / or tilt (by rotating about an axis in the x or y direction) the support structure MT and / or the substrate table WT.

[0054] The projection system PS, which constitutes part of the lithographic apparatus, may be periodically subjected to a calibration process. For example, when the lithographic apparatus is manufactured in a factory, the optical elements (e.g., lenses) that constitute the projection system PS may be set up by performing an initial calibration process. After the lithographic apparatus is installed at the location where it will be used, the projection system PS may be calibrated once again. Further calibrations of the projection system PS may be performed at regular intervals. For example, in normal use, the projection system PS may be calibrated every few months (e.g., every three months).

[0055] Calibrating the projection system PS may include passing radiation through the projection system PS and measuring the resulting projection radiation. The measurements of the projection radiation may be used to measure aberrations in the projection radiation due to the projection system PS. The aberrations due to the projection system PS may be measured using a measurement system. In response to the measured aberrations, optical elements comprising the projection system PS may be adjusted to correct for the aberrations due to the projection system PS.

[0056]

[0053] Figure 2 is a schematic diagram of a measurement system 10 that can be used to measure aberrations due to a projection system PS. The measurement system 10 comprises an illumination system IL, a measurement patterning device MA', a sensor arrangement 21 and a controller CN. The measurement system 10 may form part of a lithographic apparatus. For example, the illumination system IL and projection system PS shown in Figure 2 may be the illumination system IL and projection system PS of the lithographic apparatus shown in Figure 1. For ease of illustration, additional components of the lithographic apparatus are not shown in Figure 2.

[0057] The measurement patterning device MA′ is configured to receive radiation from the illumination system IL. The sensor apparatus 21 is configured to receive radiation from the projection system PS. During normal use of the lithographic apparatus, the measurement patterning device MA′ and the sensor apparatus 21 shown in FIG. 2 may be located at positions different from those shown in FIG. 2. For example, during normal use of the lithographic apparatus, the patterning device MA configured to form a pattern to be transferred onto the substrate W may be positioned to receive radiation from the illumination system IL, and the substrate W may be positioned to receive radiation from the projection system PS (e.g., as shown in FIG. 1). The measurement patterning device MA′ and the sensor apparatus 21 may be moved to the positions shown in FIG. 2 to measure aberrations caused by the projection system PS. The measurement patterning device MA′ may be supported by a support structure MT, such as the support structure shown in FIG. 1. The sensor apparatus 21 may be supported by a substrate table, such as the substrate table WT shown in FIG. 1. Alternatively, the sensor device 21 may be supported by a measurement table (not shown), which may be separate from the sensor table WT.

[0058]

[0055] The measurement patterning device MA' and the sensor arrangement 21 are shown in more detail in Figures 3A and 3B. Cartesian coordinates are used consistently in Figures 2, 3A and 3B. Figure 3A is a schematic diagram of the measurement patterning device MA' in the xy plane, and Figure 3B is a schematic diagram of the sensor arrangement 21 in the xy plane.

[0059] The measurement patterning device MA' comprises a plurality of patterned areas 15a-15c. In the example shown in Figures 2 and 3A, the measurement patterning device MA' is a transmissive patterning device MA'. The patterned areas 15a-15c each comprise a transmissive diffraction grating. Radiation incident on the patterned areas 15a-15c of the measurement patterning device MA' is at least partially scattered and received by the projection system PS. In contrast, radiation incident on the remainder of the measurement patterning device MA' is not transmitted or scattered towards the projection system PS (e.g., it may be absorbed by the measurement patterning device MA').

[0060]

[0057] The illumination system IL illuminates the measurement patterning device MA' with radiation. Although not shown in Figure 2, the illumination system IL may receive radiation from a radiation source SO and condition the radiation to illuminate the measurement patterning device MA'. For example, the illumination system IL may condition the radiation to provide radiation with a desired spatial and angular distribution. In the example shown in Figure 2, the illumination system IL is configured to form separate measurement beams 17a-17c. Each measurement beam 17a-17c illuminates a corresponding pattern area 15a-15c of the measurement patterning device MA'.

[0061] To perform a determination of aberrations due to the projection system PS, the mode of the illumination system IL may be changed to illuminate the measurement patterning device MA' with separate measurement beams 17a-17c. For example, during normal use of the lithographic apparatus, the illumination system IL may be configured to illuminate the patterning device MA with a slit of radiation. However, to perform a determination of aberrations due to the projection system PS, the mode of the illumination system IL may be changed such that the illumination system IL is configured to form separate measurement beams 17a-17c. In some examples, different pattern areas 15a-15c may be illuminated at different times. For example, a first subset of the pattern areas 15a-15c may be illuminated at a first time to form a first subset of measurement beams 17a-17c, and a second subset of the pattern areas 15a-15c may be illuminated at a second time to form a second subset of measurement beams 17a-17c.

[0062] In other examples, the mode of the illumination system IL may not be changed to perform the determination of aberrations due to the projection system PS. For example, the illumination system IL may be configured to illuminate the measurement patterning device MA' with a slit of radiation (e.g. substantially corresponding to the illumination area used during exposure of the substrate). Separate measurement beams 17a-17c may then be formed by the measurement patterning device MA', such that only pattern regions 15a-15c transmit or scatter radiation towards the projection system PS.

[0063] In the figures, the Cartesian coordinate system is shown as being preserved through the projection system PS. However, in some cases, characteristics of the projection system PS may result in a transformation of the coordinate system. For example, the projection system PS may form an image of the measurement patterning device MA′ that is magnified, rotated, and / or mirrored with respect to the measurement patterning device MA′. In some cases, the projection system PS may rotate the image of the measurement patterning device MA′ by approximately 180° about the z-axis. In such cases, the relative positions of the first measurement beam 17a and the third measurement beam 17c shown in FIG. 2 may be swapped. In other cases, the image may be mirrored about an axis that may lie in the x-y plane. For example, the image may be mirrored about the x-axis or the y-axis.

[0064] In embodiments in which the projection system PS rotates the image of the measurement patterning device MA′ and / or the image is mirrored by the projection system PS, the projection system is considered to transform the coordinate system. That is, the coordinate systems referred to herein are defined relative to the image projected by the projection system PS, and any rotation and / or mirroring of the image results in a corresponding rotation and / or mirroring of the coordinate system. For ease of explanation, the coordinate system is shown in the figures as being preserved by the projection system PS. However, in some examples, the coordinate system may be transformed by the projection system PS.

[0065]

[0062] The patterned regions 15a-15c modify the measurement beams 17a-17c. Specifically, the patterned regions 15a-15c spatially modulate the measurement beams 17a-17c, causing diffraction of the measurement beams 17a-17c. In the example shown in FIG. 3B, the patterned regions 15a-15c each include two distinct portions. For example, the first patterned region 15a includes a first portion 15a' and a second portion 15a''. The first portion 15a' includes a diffraction grating aligned parallel to the u direction, and the second portion 15a'' includes a diffraction grating aligned parallel to the v direction. The u and v directions are shown in FIG. 3A. The u and v directions are both aligned at approximately 45° with respect to both the x and y directions and are aligned perpendicular to each other. The second pattern region 15b and the third pattern region 15c shown in FIG. 3A are identical to the first pattern region 15a, and each include first and second portions whose diffraction gratings are aligned perpendicular to each other.

[0066] First and second portions of pattern areas 15a-15c may be illuminated by measurement beams 17a-17c at different times. For example, a first portion of each of pattern areas 15a-15c may be illuminated by measurement beams 17a-17c at a first time point. At a second time point, a second portion of each of pattern areas 15a-15c may be illuminated by measurement beams 17a-17c. As mentioned above, in some examples, different pattern areas 15a-15c may be illuminated at different times. For example, a first portion of a first subset of pattern areas 15a-15c may be illuminated at a first time point, and a first portion of a second subset of pattern areas 15a-15c may be illuminated at a second time point. The second portions of the first and second subsets of pattern areas may be illuminated at the same or different times. In general, any schedule for illuminating different portions of pattern areas 15a-15c may be used.

[0067] The modified measurement beams 17a-17c are received by the projection system PS. The projection system PS forms an image of the pattern areas 15a-15c on a sensor arrangement 21. The sensor arrangement 21 comprises a plurality of diffraction gratings 19a-19c and a radiation detector 23. The diffraction gratings 19a-19c are arranged such that each diffraction grating 19a-19c receives a corresponding modified measurement beam 17a-17c output from the projection system PS. The modified measurement beams 17a-17c incident on the diffraction gratings 19a-19c are further modified by the diffraction gratings 19a-19c. The modified measurement beams transmitted by the diffraction gratings 19a-19c are incident on the radiation detector 23.

[0068] The radiation detector 23 is configured to detect a spatial intensity profile of radiation incident on the radiation detector 23. The radiation detector 23 may, for example, comprise an array of individual detector elements or sensing elements. For example, the radiation detector 23 may comprise an active pixel sensor, such as a CMOS (Complementary Metal Oxide Semiconductor) sensor array. Alternatively, the radiation detector 23 may comprise a CCD (Charge Coupled Device) sensor array. The diffraction gratings 19a-19c and the portions of the radiation sensor 23 where the modified measurement beams 17a-17c are received form detector areas 25a-25c. For example, the first diffraction grating 19a and the first portion of the radiation sensor 23 where the first measurement beam 17a is received together form the first detector area 25a. Measurements of a given measurement beam 17a-17c may be made at corresponding detector areas 25a-25c (as shown). As mentioned above, in some cases the relative placement of the modified measurement beams 17a-17c and the coordinate system may be altered by the projection system PS.

[0069]

[0066] The modifications of the measurement beams 17a-17c made by the diffraction gratings 19a-19c in the pattern areas 15a-15c and detector areas 25a-25c result in the formation of an interference pattern on the radiation detector 23. The interference pattern is related to the derivative of the phase of the measurement beam and depends on the aberrations caused by the projection system PS. The interference pattern may therefore be used to determine the aberrations caused by the projection system PS.

[0070]

[0067] Typically, the diffraction gratings 19a-19c of each of the detector regions 25a-25c include two-dimensional transmission gratings. In the example shown in Figure 3B, the detector regions 25a-25c include diffraction gratings 19a-19c that are configured in a checkerboard shape.

[0071]

[0068] Illumination of a first portion of the pattern area 15a-15c may provide information about aberrations in a first direction, and illumination of a second portion of the pattern area 15a-15c may provide information about aberrations in a second direction.

[0072] In some examples, the measurement patterning device MA′ and / or the sensor apparatus 21 are scanned and / or stepped sequentially in two perpendicular directions. For example, the measurement patterning device MA′ and / or the sensor apparatus 21 may be stepped in the u and v directions relative to each other. While the second portions 15a″-15c″ of the pattern areas 15a-15c are illuminated, the measurement patterning device MA′ and / or the sensor apparatus 21 may be stepped in the u direction, and while the first portions 15a′-15c′ of the pattern areas 15a-15c are illuminated, the measurement patterning device MA′ and / or the sensor apparatus 21 may be stepped in the v direction. That is, the measurement patterning device MA′ and / or the sensor apparatus 21 may be stepped in a direction perpendicular to the alignment of the diffraction grating being illuminated.

[0073]

[0070] The measurement patterning device MA' and / or the sensor arrangement 21 may be stepped a distance corresponding to a fraction of the grating period of the diffraction grating. Measurements made at different stepping positions may be analyzed to obtain information about the wavefront in the stepping direction. For example, the phase of the first harmonic of the measured signal (sometimes referred to as a phase stepping signal) may contain information about the derivative of the wavefront in the stepping direction. Thus, by stepping the measurement patterning device MA' and / or the sensor arrangement 21 in both the u and v directions (which are perpendicular to each other), information about the wavefront can be obtained in two perpendicular directions (in particular providing information about the derivative of the wavefront in each of the two perpendicular directions), thereby making it possible to reconstruct the full wavefront.

[0074] In addition to stepping the measurement patterning device MA′ and / or the sensor arrangement 21 in a direction perpendicular to the alignment of the illuminated diffraction grating (as described above), the measurement patterning device MA′ and / or the sensor arrangement 21 may also be scanned relative to one another. Scanning of the measurement patterning device MA′ and / or the sensor arrangement 21 may be performed in a direction parallel to the alignment of the illuminated diffraction grating. For example, the measurement patterning device MA′ and / or the sensor arrangement 21 may be scanned in the u direction while a first portion 15a′-15c′ of the pattern area 15a-15c is illuminated, and the measurement patterning device MA′ and / or the sensor arrangement 21 may be scanned in the v direction while a second portion 15a″-15c″ of the pattern area 15a-15c is illuminated. Scanning the measurement patterning device MA' and / or sensor arrangement 21 in a direction parallel to the alignment of the illuminated diffraction grating allows measurements to be averaged over the diffraction grating, thereby accounting for any changes in the diffraction grating in the scan direction. The scanning of the measurement patterning device MA' and / or sensor arrangement 21 may be performed at a different time than the stepping of the measurement patterning device MA' and / or sensor arrangement 21 described above.

[0075] It should be understood that a variety of different arrangements of the pattern areas 15a-15c and the detector areas 25a-25c can be used to determine the aberrations due to the projection system PS. The pattern areas 15a-15c and / or the detector areas 25a-25c may include a diffraction grating. In some examples, the pattern areas 15a-15c and / or the detector areas 25a-25c may comprise components other than a diffraction grating. For example, in some examples, the pattern areas 15a-15c and / or the detector areas may comprise a single slit or pinhole aperture through which at least a portion of the measurement beams 17a-17c may propagate. In general, the pattern areas and / or the detector areas may comprise any configuration that serves to modify the measurement beams.

[0076] The controller CN receives results of measurements made by the sensor arrangement 21 and determines from the measurements the aberrations due to the projection system PS. The controller may be configured to control one or more components of the measurement system 10. For example, the controller CN may control a positioning device PW operable to move the sensor arrangement 21 and / or the measurement patterning device MA′ relative to each other. The controller may control adjusting means PA for adjusting components of the projection system PS. For example, the adjusting means PA may adjust optical elements of the projection system PS to correct for the aberrations due to the projection system PS and determined by the controller CN.

[0077] In some examples, the controller CN may be operable to control the adjusting means PA for adjusting the support structure MT and / or the substrate table WT. For example, the adjusting means PA may adjust the support structure MT and / or the substrate table WT to correct aberrations due to positioning errors of the patterning device MA and / or the substrate W (and as determined by the controller CN).

[0078] Determining the aberrations (which may be due to errors in the projection system PS or in the positioning of the patterning device MA or the substrate W) may involve fitting the results of the measurements made by the sensor arrangement 21 to Zernike polynomials to obtain Zernike coefficients. Different Zernike coefficients may provide information about different forms of aberrations due to the projection system PS. The Zernike coefficients may be determined separately at different positions in the x and / or y directions. For example, in the examples shown in Figures 2, 3A and 3B, Zernike coefficients may be determined for each measurement beam 17a-17c.

[0079]

[0076] In the examples shown in Figures 2, 3A and 3B, the measurement patterning device MA' has three pattern areas 15a to 15c and the sensor apparatus 21 has three detector areas 25a to 25c, but in other examples, the measurement patterning device MA' may have more or less than three pattern areas 15a to 15c and / or the sensor apparatus 21 may have more or less than three detector areas 25a to 25c.

[0080] A method for determining the aberrations due to the projection system PS will now be described with reference to FIG.

[0081]

[0078] In general, the measurement patterning device MA' comprises at least one first pattern area 15a-15c and the sensor arrangement 21 comprises at least one second pattern area 19a-19c.

[0082]

[0079] Figure 4 is a schematic diagram of a measurement system 30 that can be used to determine aberrations due to the projection system PS. The measurement system 30 may be identical to the measurement system 10 shown in Figure 2, but may have a different number of first pattern areas (on the measurement patterning device MA') and second pattern areas (on the sensor arrangement 21). The measurement system 30 shown in Figure 4 may therefore include any of the features of the measurement system 10 shown in Figure 2 above, which will not be described further below.

[0083] In FIG. 4, the measurement patterning device MA′ is provided with only a single first pattern area 31, and the sensor arrangement 21 is provided with a single second pattern area 32.

[0084] The measurement patterning device MA' is illuminated with radiation 33 from the illumination system IL. For ease of understanding, only a single line (which may represent a single ray, such as the chief ray of an incident radiation beam) is shown in Figure 4. However, it should be understood that the radiation 33 will include a range of angles incident on the first pattern area 31 of the measurement patterning device MA'. That is, each point on the first pattern area 31 of the measurement patterning device MA' may be illuminated by a cone of light. Typically, each point will be illuminated over approximately the same range of angles, which is characterised by the radiation intensity in a pupil plane (not shown) of the illumination system IL.

[0085] The first pattern area 31 is configured to receive radiation 33 and form a plurality of first diffracted beams 34, 35, 36. The central first diffracted beam 35 corresponds to the zeroth diffracted order beam of the first pattern area 31, and the other two first diffracted beams 34, 36 correspond to the ±1st diffracted order beams of the first pattern area 31. It should be understood that in general there will also be more, higher order diffracted beams. Again, for ease of understanding, only three first diffracted beams 34, 35, 36 are shown in Figure 4.

[0086]

[0083] It should also be understood that when the incident radiation 33 includes a cone of radiation converging at a point on the first pattern area 31, each of the first diffracted beams 34, 35, 36 also includes a cone of radiation diverging from that point on the first pattern area 31.

[0087] To achieve the generation of the first diffracted beams 34, 35, 36, the first pattern region 31 may be in the form of a diffraction grating. For example, the first pattern region 31 may be generally in the form of the pattern region 15a shown in FIG. 3A. Specifically, at least a portion of the first pattern region 31 may be in the form of a diffraction grating aligned parallel to the first portion 15a' of the pattern region 15a shown in FIG. 3A, i.e., the u direction (note that FIG. 4 is shown in the zv plane). Thus, the first diffracted beams 34-36 separate in the shearing direction, which is the v direction.

[0088] The first diffracted beams 34-36 are at least partially captured by the projection system PS as will now be explained. How much of the first diffracted beams 34-36 is captured by the projection system PS will depend on the pupil fill of the incident radiation 33 from the illumination system IL, the angular separation of the first diffracted beams 34-36 (which in turn depends on the pitch of the first pattern area 31 and the wavelength of the radiation 33), and the numerical aperture of the projection system PS.

[0089] The measurement system 30 may be configured such that the first diffracted beam 35 corresponding to the zeroth diffracted order substantially fills the numerical aperture of the projection system PS, which may be represented by a circular area of ​​a pupil plane 37 of the projection system PS, and such that the first diffracted beams 34, 36 corresponding to the ±1st diffracted order beams substantially overlap with the first diffracted beam 35 corresponding to the zeroth diffracted order. Such a configuration allows substantially all of the first diffracted beam 35 corresponding to the zeroth diffracted order and most of the first diffracted beams 34, 36 corresponding to the ±1st diffracted order beams to be captured by the projection system PS and projected onto the sensor arrangement 21. (Furthermore, such a configuration allows multiple diffracted beams generated by the first pattern area 31 to be at least partially projected onto the sensor arrangement 21.)

[0090]

[0087] The role of the first pattern region 31 is to introduce spatial coherence as will now be discussed.

[0091] Generally, two radiation rays 33 from the illumination system IL that are incident on the same point on the measurement patterning device MA′ at different angles of incidence are not coherent. By receiving radiation 33 and forming multiple first diffracted beams 34, 35, 36, the first pattern area 31 may be thought of as forming multiple copies (generally with different phases and intensities) of the incident radiation cone 33. These copies, or two radiation rays in any one of the first diffracted beams 34, 35, 36 that arise from the same point on the measurement patterning device MA′ at different scattering angles, are not coherent (due to the properties of the illumination system IL). However, for a given radiation ray in any one of the first diffracted beams 34, 35, 36, there is a corresponding radiation ray in each of the other first diffracted beams 34, 35, 36 that is spatially coherent with the given ray. For example, the chief rays of each of the first diffracted beams 34, 35, 36 (corresponding to the chief ray of the incident radiation 33) are coherent and may interfere at the amplitude level when combined.

[0092] This coherence is utilized by the measurement system 30 to determine the aberration map of the projection system PS.

[0093] The projection system PS projects parts of the first diffracted beams 34, 35, 36 (captured by the numerical aperture of the projection system) onto the sensor arrangement 21.

[0094] In Figure 4, the sensor arrangement 21 comprises a single second pattern area 32. As will be explained further below (with reference to Figures 5A to 5C), the second pattern area 32 is configured to receive these first diffracted beams 34-36 from the projection system PS and to form a plurality of second diffracted beams from each of the first diffracted beams. To achieve this, the second pattern area 32 comprises a two-dimensional transmission grating. In Figure 4, all radiation transmitted by the second pattern area 32 is represented as a single arrow 38. This radiation 38 is received by a detector area 39 of the radiation detector 23 and used to determine the aberration map.

[0095] Each of the first diffracted beams 34-36 incident on the patterned region 32 is diffracted into a plurality of second diffracted beams. Because the second patterned region 32 includes a two-dimensional diffraction grating, a two-dimensional array of second diffracted beams is generated from each incident first diffracted beam (the chief rays of these second diffracted beams are separated in both the shearing direction (v direction) and the direction perpendicular thereto (u direction)). Hereinafter, a diffraction order that is nth in the shearing direction (v direction) and mth in the non-shearing direction (u direction) is referred to as the (n,m)th diffraction order of the second patterned region 32. Hereinafter, if the order of the second diffracted beam in the non-shearing direction (u direction) is not important, the (n,m)th diffraction order of the second patterned region 32 may be simply referred to as the nth second diffracted beam.

[0096] 5A to 5C show a set of second diffracted beams generated by each of the first diffracted beams 34 to 36. FIG. 5A shows a set of second diffracted beams 35a to 35e generated by the first diffracted beam 35 corresponding to the 0th order diffracted beam of the first pattern area 31. FIG. 5B shows a set of second diffracted beams 36a to 36e generated by the first diffracted beam 36 corresponding to the −1st order diffracted beam of the first pattern area 31. FIG. 5C shows a set of second diffracted beams 34a to 34e generated by the first diffracted beam 34 corresponding to the +1st order diffracted beam of the first pattern area 31.

[0097] In Figure 5A, the second diffracted beam 35a corresponds to the zeroth diffracted order beam (in the shearing direction of the second pattern area 32), while the second diffracted beams 35b, 35c correspond to the ±1st diffracted order beams, and the second diffracted beams 35d, 35e correspond to the ±2nd diffracted order beams. It should be understood that Figures 5A-5C are shown in the vz plane, and the second diffracted beams shown may correspond, for example, to the zeroth diffracted order beam in the non-shearing direction (i.e., the u direction) of the second pattern area 32. It should further be understood that there will be multiple copies of these second diffracted beams representing higher diffracted order beams in the non-shearing direction, either into or out of the plane of Figures 5A-5C.

[0098]

[0095] In Figure 5B, the second diffracted beam 36a corresponds to the zeroth order diffracted beam (in the shearing direction of the second pattern area 32), while the second diffracted beams 36b, 36c correspond to the ±1st order diffracted beams, and the second diffracted beams 36d, 36e correspond to the ±2nd order diffracted beams.

[0099]

[0096] In Figure 5C, the second diffracted beam 34a corresponds to the zeroth order diffracted beam (in the shearing direction of the second pattern area 32), while the second diffracted beams 34b, 34c correspond to the ±1st order diffracted beams, and the second diffracted beams 34d, 34e correspond to the ±2nd order diffracted beams.

[0100] 5A to 5C, it can be seen that some of the second diffracted beams spatially overlap with each other. For example, second diffracted beam 35b, which arises from the zeroth diffracted order beam 35 of the first pattern area 31 and corresponds to the −1st diffracted order beam of the second pattern area 32, overlaps with second diffracted beam 36a, which arises from the −1st diffracted order beam 36 of the first pattern area 31 and corresponds to the zeroth diffracted order beam of the second pattern area 32. All lines in FIGS. 4 and 5A to 5C may be considered to represent a single radiation ray arising from a single input beam 33 from the illumination system IL. Therefore, as explained above, these lines represent spatially coherent rays that will generate an interference pattern when they spatially overlap at the radiation detector 23. Furthermore, the interference is between rays that have passed through different parts of the pupil plane 37 of the projection system PS (which are separated in the shear direction). Therefore, the interference of radiation arising from a single input beam 33 depends on the phase difference between two different parts of the pupil plane.

[0101] This spatial overlap and spatial coherence of the second diffracted beams at the radiation detector 23 is achieved by matching the first and second pattern areas 31, 32 such that the angular separation (in the shear direction) between the various second diffracted beams arising from a given first diffracted beam is the same as the angular separation (in the shear direction) between the various first diffracted beams when focused onto the second pattern area 32. This spatial overlap and spatial coherence of the second diffracted beams at the radiation detector 23 is achieved by matching the pitch in the shear direction of the first and second pattern areas 31, 32. It will be appreciated that this matching the pitch in the shear direction of the first and second pattern areas 31, 32 takes into account any demagnification factor applied by the projection system PS. As used herein, the pitch in a particular direction of a two-dimensional diffraction grating is defined as follows:

[0102] It should be understood that a one-dimensional diffraction grating comprises a series of lines formed from a repeating pattern (reflective or transmissive) in a direction perpendicular to the lines. The smallest non-repeating section along which the repeating pattern is formed in a direction perpendicular to the lines is referred to as a unit cell, and the length of this unit cell is referred to as the pitch of the one-dimensional diffraction grating. In general, such a one-dimensional diffraction grating will have a diffraction pattern that diffracts an incident radiation beam to form a one-dimensional array of angularly spaced (but potentially spatially overlapping) diffracted beams. The first pattern region 31 forms a one-dimensional array of angularly spaced first diffracted beams 34-36 that are offset (angularly spaced) in such a shearing direction.

[0103] [000100] It should be understood that a two-dimensional diffraction grating comprises a two-dimensional repeating pattern, either reflective or transmissive. The smallest non-repeating section along which this repeating pattern is formed may be referred to as a unit cell. The unit cell may be square, and the fundamental pitch of such a two-dimensional diffraction grating may be defined as the length of a square unit cell. In general, such a two-dimensional diffraction grating will have a diffraction pattern that will diffract an incident radiation beam to form a two-dimensional array of angularly spaced (but potentially spatially overlapping) diffracted beams. The axes of this two-dimensional (square) array of diffracted beams are parallel to the sides of the unit cell. The angular separation between adjacent diffracted beams in these two directions may be given by the ratio of the wavelength of the radiation to the pitch of the grating. Thus, the smaller the pitch, the greater the angular separation between adjacent diffracted beams.

[0104] [000101] In some examples, the axes of the unit cells of the two-dimensional second pattern area 32 may be oriented at a non-zero angle relative to the shearing and non-shearing directions defined by the first pattern area 31. For example, the axes of the unit cells of the two-dimensional second pattern area 32 may be oriented at 45° relative to the shearing and non-shearing directions defined by the first pattern area 31. As mentioned above, spatial overlap and spatial coherence of the second diffracted beams at the radiation detector 23, which enables measurement of the wavefront, is achieved by ensuring that the angular separation (in the shearing direction) between the various second diffracted beams arising from a given first diffracted beam is the same as the angular separation (in the shearing direction) between the various first diffracted beams when focused onto the second pattern area 32. In configurations where the axes of the unit cells of the two-dimensional second pattern region 32 are oriented at a non-zero angle (e.g., 45°) relative to the shear and non-shear directions, it may be useful to define the pseudo-unit cell and pseudo-pitch as follows: A pseudo-unit cell is defined as the smallest non-repeating square within which the repeating pattern of the diffraction grating is formed, with its sides oriented parallel to the shear and non-shear directions (defined by the first pattern region 31). The pseudo-pitch is sometimes defined as the length of a square pseudo-unit cell. This is sometimes referred to as the shear direction pitch of the two-dimensional diffraction grating. It is this pseudo-pitch that should match (an integer or fractional multiple of) the pitch of the first pattern region 31.

[0105] [000102] The diffraction pattern of a diffraction grating may be viewed as forming a two-dimensional array of angularly spaced (but potentially spatially overlapping) pseudo-diffracted beams, with the axes of this two-dimensional (square) array of pseudo-diffracted beams parallel to the sides of the pseudo-unit cell. Because this square is not a unit cell (defined as the smallest square in any orientation in which the repeating pattern of the diffraction grating can be formed), the pseudo-pitch is larger than the pitch (or fundamental pitch). Thus, the separation between adjacent pseudo-diffracted beams of the diffraction pattern (in directions parallel to the sides of the pseudo-unit cell) is smaller than between adjacent diffracted beams of the diffraction pattern (in directions parallel to the sides of the unit cell). This can be understood as follows: some of the pseudo-diffracted beams correspond to diffracted beams of the diffraction pattern, while other pseudo-diffracted beams are not physical and do not represent diffracted beams generated by the diffraction grating (and arise only due to the use of a pseudo-unit cell that is larger than a true unit cell).

[0106] [000103] Taking into account any demagnification (or magnification) factor applied by the projection system PS, the shear pitch of the second pattern areas 32 should be an integer multiple of the shear pitch of the first pattern areas 31, or vice versa. In the example shown in Figures 5A to 5C, the shear pitch of the first and second pattern areas 31, 32 are substantially equal (taking into account any demagnification factor).

[0107] 5A to 5C, each point on the detector area 39 of the radiation detector 23 will generally receive several contributions that sum coherently. For example, a point on the detector area 39 receiving a second diffracted beam 35b corresponding to the −1 order diffracted beam of the second pattern area 32 arising from the 0 order diffracted beam 35 of the first pattern area 31 will overlap with both (a) a second diffracted beam 36a corresponding to the 0 order diffracted beam of the second pattern area 32 arising from the −1 order diffracted beam 36 of the first pattern area 31, and (b) a second diffracted beam 34d corresponding to the −2 order diffracted beam of the second pattern area 32 arising from the +1 order diffracted beam 34 of the first pattern area 31. It should be understood that when considering higher order diffracted beams in the first pattern region 31, there will be more beams that must be coherently summed at each point on the detector region 39 to determine the intensity of radiation measured at that portion of the detector region 39 (e.g., a corresponding pixel in a two-dimensional array of sensing elements).

[0108] [000105] In general, a number of different second diffracted beams contribute to the radiation received at each part of the detector area 39. The intensity of the radiation from such a coherent sum is given by:

[0109]

number

[0110] where DC is a constant term (equal to the incoherent sum of the various diffracted beams), the summation is over all pairs of the various second diffracted beams, and γ i is the interference intensity of the second pair of diffracted beams, and Δφ i is the phase difference between the second pair of diffracted beams.

[0111] [000106] The phase difference Δφ between the second pair of diffracted beams idepends on two contributions: (a) the first contribution relates to the different parts of the pupil plane 37 of the projection system PS where the beams originate, and (b) the second contribution relates to the positions within the unit cell of the first and second pattern areas 31, 32, respectively, where the beams originate.

[0112] [000107] The first of these contributions may be understood to arise from the fact that different coherent radiation beams pass through different parts of the projection system PS and are therefore related to the aberration that it is desired to determine (indeed, related to the difference between two points in the aberration map that are separated in the shearing direction).

[0113] [000108] The second of these contributions may be understood to arise from the fact that the relative phases of multiple radiation beams resulting from a single beam incident on a diffraction grating will depend on which part of the unit cell of the grating the beam is incident on. It therefore does not include information about aberrations. As explained above, in some examples the measurement patterning device MA' and / or sensor arrangement 21 are continuously scanned and / or stepped in the shear direction. This changes the phase difference between every pair of interfering radiation beams received by the radiation detector 23. When the measurement patterning device MA' and / or sensor arrangement 21 are continuously stepped in the shear direction by an amount equal to a fractional multiple of the pitch (in the shear direction) of the first and second pattern areas 31, 32, in general the phase differences between every pair of second diffracted beams will change. When the measurement patterning device MA' and / or sensor arrangement 21 are stepped in the shear direction by an amount equal to an integer multiple of the pitch (in the shear direction) of the first and second pattern areas 31, 32, the phase difference between the pair of second diffracted beams will remain unchanged. Therefore, as the measurement patterning device MA' and / or sensor arrangement 21 are continuously scanned and / or stepped in the shear direction, the intensity experienced by each portion of the radiation detector 23 will oscillate. The first harmonic of this oscillating signal (which may be referred to as a phase-stepped signal) measured by the radiation detector 23 depends on the contributions to equation (1) arising from adjacent first diffracted beams 34-36, i.e., first diffracted beams differing by ±1 in order. The contributions arising from the first diffracted beams differing by different orders will contribute to higher harmonics of the signal measured by the radiation detector 23 due to this phase-stepping technique.

[0114] [000109] For example, of the three overlapping second diffracted beams (35b, 36a and 34d) considered above, only two of the three possible pairs of these diffracted beams, namely (a) second diffracted beams 35b and 36a (arising from the 0th and −1st diffracted beams 35 and 36 of the first pattern area 31, respectively), and (b) second diffracted beams 35a and 34d (arising from the 0th and +1st diffracted beams 34 of the first pattern area 31, respectively), will contribute to the first harmonic of the phase stepping signal.

[0115] [000110] Each pair of second diffracted beams will result in an interference term of the form shown in equation (2) that contributes to the first harmonic of the phase stepping signal, namely:

[0116]

number

[0117] where γ is the amplitude of the interference term, p is the pitch (in the shear direction) of the first and second pattern areas 31, 32, v parameterizes the relative positions of the first and second pattern areas 31, 32 in the shear direction, and ΔW is the difference between the values ​​of the aberration map at two positions in the pupil plane of the projection system PS corresponding to the positions where the two second diffracted beams arise. The amplitude γ of the interference term is proportional to the product of the combined scattering efficiencies of the two second diffracted beams, as discussed further below. The frequency of the first harmonic of the phase stepping signal is given by the reciprocal of the pitch p of the first and second pattern areas 31, 32 in the shear direction. The phase of the phase stepping signal is given by ΔW (the difference between the values ​​of the aberration map at two positions in the pupil plane of the projection system PS corresponding to the positions where the two second diffracted beams arise).

[0118] [000111] The interference intensity γ of the pair of second diffracted beams i is proportional to the product of the combined scattering efficiencies of the two second diffracted beams, as will be discussed below.

[0119] [000112] In general, the scattering efficiencies of the diffracted beams produced by a diffraction grating will depend on the geometry of the grating. These diffraction efficiencies, which may be normalized to the efficiency of the zeroth order diffracted beam, describe the relative intensities of the diffracted beams. As used herein, the combined scattering efficiency of a second diffracted beam is given by the product of the scattering efficiency of the originating first diffracted beam and the scattering efficiency of the corresponding diffraction order of the second pattern area 32.

[0120] 3A to 5C, when the first portion 15a' of the pattern area 15a shown in FIG. 3A is illuminated, the shearing direction coincides with the v direction, and the non-shearing direction coincides with the u direction. It should be understood that when the second portion 15a'' of the pattern area 15a shown in FIG. 3A is illuminated, the shearing direction coincides with the u direction, and the non-shearing direction coincides with the v direction. In these above examples, the u and v directions (which define the two shearing directions) are both aligned at approximately 45° with respect to both the x and y directions of the lithographic apparatus LA, but it should be understood that in alternative examples, the two shearing directions may be oriented at any angle with respect to the x and y directions of the lithographic apparatus LA (which may coincide with the non-scanning and scanning directions of the lithographic apparatus LA). In general, the two shearing directions will be perpendicular to each other. In the following, the two shearing directions will be referred to as the u and v directions. However, it should be understood that these shear directions may be oriented at any angle relative to both the x and y directions of the lithographic apparatus LA.

[0121] [000114] Figure 6A shows the scattering efficiency of a first pattern area 31, in the form of a first portion 15a' of pattern area 15a shown in Figure 3A, with a 50% duty cycle. The horizontal axis represents the diffraction order in the shear direction. The diffraction efficiency shown in Figure 6A is normalized to the efficiency of the zeroth diffraction order beam, so that the efficiency of the zeroth diffraction order beam is 100%. With this geometry (50% duty cycle), the efficiencies of the even diffraction orders (other than the zeroth diffraction order) are zero. The efficiency of the ±1st diffraction order beams is 63.7%.

[0122] [000115] Figure 6B shows the scattering efficiency of the second pattern region 32, which has the shape of the diffraction grating 19a shown in Figure 3B, i.e., a checkerboard shape, with a 50% duty cycle. The horizontal axis represents the diffraction orders in the shearing direction. The vertical axis represents the diffraction orders in the non-shearing direction. The diffraction efficiencies shown in Figure 6B are normalized to the efficiency of the (0,0) diffracted order beam, so that the efficiency of the (0,0) diffracted order beam is 100%.

[0123] [000116] As explained above, the first harmonic of the oscillating phase-stepping signal depends only on the contribution to equation (1) from the first diffracted beams whose orders differ by ±1. As can be seen from FIG. 6A, when a 50% duty cycle grating is used for the measurement patterning device MA', the only two pairs of first diffracted beams whose orders differ by ±1 are the zeroth order beams with either of the ±1st order beams. Furthermore, when this geometry is used for the first pattern area 31, the scattering efficiency is symmetric such that the efficiency of both ±1st order diffracted beams is the same (63.7%). Therefore, the interference intensity γ of all pairs of second diffracted beams that contribute to the first harmonic of the oscillating phase-stepping signal is i may be determined as follows: A second copy of the scattering efficiency plot of the second pattern area 32 shown in FIG. 6B is weighted by the scattering efficiencies of the ±1st order diffracted beams of the first pattern area 31, and then the scattering efficiency plot of the second pattern area 32 shown in FIG. 6B is superimposed but shifted in the shear direction by the distance of one pair of diffraction orders (of the first pattern area 31). Here, the pitch in the shear direction of the first and second pattern areas 31, 32 is equal (taking into account any demagnification factor applied by the projection system PS), and therefore, in this example, the second copy of the scattering efficiency plot of the second pattern area 32 is shifted in the shear direction by one diffraction order of the second pattern area 31. The product of the scattering efficiencies of these two superimposed scattering efficiency plots is then determined. The interference intensity γ of all pairs of second diffracted beams contributing to the first harmonic of such an oscillating phase stepping signal is i A plot of is shown in Figure 6C.

[0124] [000117] The interference intensity γ shown in FIG. i Note that each of the pixels actually represents two different pairs of second diffracted beams. For example, the left pixel shown in Figure 6C represents both (a) the interference between second diffracted beams 35a and 34b and (b) the interference between second diffracted beams 35b and 36a. Similarly, the right pixel shown in Figure 6C represents both (a) the interference between second diffracted beams 35a and 36c and (b) the interference between second diffracted beams 35c and 34a. Generally, each pixel of such a map represents two pairs of second diffracted beams, namely (a) a first pair of second diffracted beams including one second diffracted beam resulting from the first diffracted beam 35 corresponding to the 0th diffraction order of the first patterning device 31 and another second diffracted beam resulting from the first diffracted beam 34 corresponding to the +1st diffraction order of the first pattern area 31, and (b) a second pair of second diffracted beams including one second diffracted beam resulting from the first diffracted beam 35 corresponding to the 0th diffraction order of the first patterning device 31 and another second diffracted beam resulting from the first diffracted beam 36 corresponding to the -1st diffraction order of the first pattern area 31.

[0125] [000118] Generally, the interference intensity γ i Each of the interference intensities γ represents two different pairs of second diffracted beams: (a) one pair including the n-th order second diffracted beam generated by the first diffracted beam 35 (corresponding to the 0-th order diffracted beam of the first pattern area 31), and (b) another pair including the (n+1)-th order second diffracted beam generated by the first diffracted beam 35. Thus, each interference intensity γ i may be characterized by the two diffraction orders ((n,m) and (n+1,m)) of the contributing first diffracted beam 35, and γ n,n+1;m In the following, if it is clear that m=0, or if the value of m is not important, this interference intensity is expressed as γ n,n+1 It is sometimes expressed as:

[0126] [000119] The interference intensity γ shown in FIG. i (or γ n,n+1;m ) represent two different pairs of second diffracted beams, while the interference intensity γ i contributes to the first harmonic of the oscillating phase stepping signal and presents at the radiation detector 23 a second diffracted beam having a different overlap with the circle representing the numerical aperture of the projection system PS as will now be explained.

[0127] 7A, 7B, and 7C show the portions of the pupil plane 37 of the projection system PS that correspond to the numerical aperture of the projection system PS that are filled by the first diffracted beams 34, 35, and 36, respectively. In each of FIGS. 7A, 7B, and 7C, the numerical aperture of the projection system PS is represented by a circle 40, and the portions of the pupil plane 37 of the projection system PS that are filled by the first diffracted beams 34, 35, and 36 are shown by the shaded areas of this circle 40 in FIGS. 7A, 7B, and 7C, respectively. As can be seen from FIG. 7B, in the example shown, the central first diffracted beam 35, which corresponds to the zeroth diffracted order beam, substantially fills the numerical aperture of the projection system PS. As can be seen from FIGS. 7A and 7C, each of the two first diffracted beams 34, 36, which correspond to the ±1st diffracted order beams of the first pattern area 31, are shifted so that they only partially fill the numerical aperture. It should be understood that this shift in the numerical aperture of the first diffracted beams 34, 36 of the first order is actually very small and has been exaggerated here for clarity.

[0128] 8A to 10C show the portion of radiation detector 23 filled by various second diffracted beams. In each of Figures 8A to 10C, the numerical aperture of projection system PS is represented by circle 40, and the portion of this circle filled by the second diffracted beams is shown by the shaded area of ​​circle 40. Figures 8A to 8C show the portion of circle 40 filled by (-1,0), (0,0) and (1,0) order diffracted beams 35b, 35a, 35c arising from first diffracted beam 35, which corresponds to the 0th order diffracted beam of first pattern area 31. Figures 9A to 9C show the portion of circle 40 filled by (-1,0), (0,0) and (1,0) order diffracted beams 34b, 34a, 34c arising from first diffracted beam 34, which corresponds to the 1st order diffracted beam of first pattern area 31. 10A to 10C show the portion of the circle 40 filled with (-1,0), (0,0) and (1,0) order diffracted beams 36b, 36a, 36c resulting from the first diffracted beam 36 corresponding to the -1 order diffracted beam of the first pattern area 31.

[0129] [000122] It can be seen from Figures 8B, 9A, 8A and 10B that the region of the radiation detector that receives contributions from both (a) the interference of the second diffracted beams 35a and 34b and (b) the interference of the second diffracted beams 35b and 36a is region 41 shown in Figure 11 A. Similarly, it can be seen from Figures 8B, 10C, 8C and 9B that the region of the radiation detector that receives contributions from both (a) the interference of the second diffracted beams 35a and 36c and (b) the interference of the second diffracted beams 35c and 34a is region 42 shown in Figure 11B.

[0130] [000123] Generally, the interference intensity γ i may each be considered to represent a radiation beam formed by a plurality of interfering second interference beams, each of which propagates in a different direction, resulting in a different overlap of each such radiation beam at radiation detector 23 with the circle representing the numerical aperture of the projection system PS.

[0131] [000124] In general, the second diffracted beams may be considered to form a plurality of radiation beams, each such radiation beam being formed by a set of interfering second diffracted beams. Each such radiation beam may be referred to herein as an interference beam. Each such interference beam formed by the plurality of interfering second interference beams may be considered to propagate in a different direction, resulting in a different overlap of each interference beam at the radiation detector 23 with the circle representing the numerical aperture of the projection system PS. Although the interference beams propagate in different directions and may be considered to have different overlaps with the circle representing the numerical aperture of the projection system PS, there is a large overlap between the different interference beams at the radiation detector 23. The interference intensity γ shown in Figure 6C i may each be considered to represent a different interference beam (formed by multiple interfering second interference beams).

[0132] [000125] As already explained, the interference intensity γ i (or γ n,n+1;m ) represent two different pairs of second diffracted beams. However, for a given position on the radiation detector, both of these two pairs of contributing second diffracted beams comprise two interfering rays that originate from the same two points in the pupil plane 37 of the projection system PS. Specifically, for a position (x, y) on the radiation detector (these coordinates correspond to the coordinates in the pupil plane 37 of the projection system PS, and the x direction corresponds to the shear direction), the contributing and interfering intensities γ n,n+1;m Each of the two pairs of interfering second diffracted beams having a ray of the second diffracted beam originating from a position (x-ns, y-ms) in the pupil plane 37 and a ray of the second diffracted beam originating from a position (x-(n+1)s, y-ms) in the pupil plane 37, where s is the shearing distance. The shearing distance s corresponds to the distance between two coherent rays of adjacent first diffracted beams 34-36 in the pupil plane 37. Therefore, the two pairs of contributing second diffracted beams together give rise to an interference term of the form of equation (3), where ΔW is the difference between the values ​​of the aberration map at these two positions in the pupil plane 37.

[0133] [000126] From FIG. 6C, it can be seen that with the second pattern region 32 in the form of a 50% duty cycle checkerboard, there are 25.8% interference intensity (γ -1,0 ,γ 0,+1 ) are present. This is due to the checkerboard geometry that results in a diffraction efficiency plot where all other diffracted beams, except for the (-1,0), (0,0), and (1,0) diffracted beams moving in the shearing direction, have 0% diffraction efficiency, as can be seen in Figure 6A. That is, the grating efficiencies of the (n,m) diffraction orders are all zero except for the (0,0) diffraction order, when n±m is even. As a result of these zero grating efficiencies, all interference intensities contributing to the first harmonic of the phase stepping signal are suppressed by the interference intensity γ -1,0 and γ 0,+1 is 0 except for

[0134] [000127] For the overlap of the two regions 41, 42 shown in Figures 11A and 11B (which overlap region will make up most of the circle 40 for small shear angles), the first harmonic of the oscillatory phase stepping signal will be proportional to the sum of two cosines (see equations (2) and (3)).

[0135]

number

[0136] where the first cosine is for the difference in the aberration map of the first two points in the pupil plane, and the second cosine is for the difference in the aberration map of the second two points in the pupil plane (where the phase stepping term has been omitted for clarity). Specifically, for a given position (x,y) on the radiation detector (x refers to the shearing direction), the first two points are represented by a corresponding point (x,y) in the pupil plane (denoted as W in Equation (4)) and another point (x,y) that is shifted in a first direction along the shearing direction by the shearing distance (denoted as W in Equation (4)). -1Similarly, the second two points are represented as corresponding points (x,y) in the pupil plane. (denoted as W0 in equation (4)), and another point (x+s,y) (denoted as W in equation (4)) that is shifted in a second direction along the shearing direction by the shearing distance. +1 (expressed as

[0137] [000128] Existing wavefront reconstruction techniques use a trigonometric formula to calculate the cosine of the difference between the two interference intensities in equation (4) in the aberration map at two positions separated in the shearing direction by twice the shearing distance, i.e., cos(W -1 -W +1 ) can be rewritten as . Such known techniques therefore involve determining a set of Zernike coefficients by equating the phase of the first harmonic of the phase stepping signal to the difference in the aberration map for positions in the pupil plane that are separated in the shear direction by twice the shear distance. Recall that the aberration map depends on the Zernike coefficients (see equation (1)). This is done for multiple positions on the radiation sensor (e.g., at multiple pixels of an array or individual sensing elements), first in a first shear direction and then in a second, orthogonal direction. The constraints for these two orthogonal shear directions are solved simultaneously to find the set of Zernike coefficients.

[0138] [000129] As discussed above, the combination of a first patterned region 31 comprising a linear grating and a second patterned region 32 comprising a two-dimensional checkerboard is advantageous (because only two interfering beams contribute to the first harmonic of the phase-stepping signal). Due to the geometry of the checkerboard, checkerboard gratings typically include an optically transparent carrier or support layer.

[0139] [000130] Figure 12 is a schematic diagram of a measurement system 11 that can be used to determine aberrations due to a projection system PS'. The measurement system 11 comprises an illumination system IL', a measurement patterning device MA'', a sensor arrangement 22 and a controller CN'. The measurement system 11 may form part of a lithographic apparatus. For example, the illumination system IL' and projection system PS' shown in Figure 12 may be the illumination system IL and projection system PS of the lithographic apparatus shown in Figure 1. For simplicity of illustration, additional components of the lithographic apparatus are not shown in Figure 12. The measurement system 11 is similar to the measurement system 10 of Figure 2 except that the measurement patterning device MA'' comprises an additional first pattern area 16a and the sensor arrangement 22 comprises an additional second pattern area 20a-20b.

[0140] [000131] Figure 13A is a schematic illustration of the measurement patterning device MA'' in the xy-plane, and Figure 13B is a schematic illustration of the sensor arrangement 22 in the xy-plane.

[0141] [000132] The measurement patterning device MA" is similar to the measurement patterning device MA' of Figure 3A except that the measurement patterning device MA" comprises additional first pattern areas 16a-16b. The sensor arrangement 22 is similar to the sensor arrangement 21 of Figure 3B except that the sensor arrangement 22 comprises additional second pattern areas 20a-20b. The measurement patterning device MA" and sensor arrangement 22 function in the same way as the measurement patterning device MA" and sensor arrangement 21 of Figures 3A and 3B and to avoid repetition only the differences will be described here.

[0142] [000133] The measurement patterning device MA" still comprises a plurality of pattern areas 15a-15c. In the embodiment shown in Figures 12 and 13A, the measurement patterning device MA" is a transmissive patterning device MA". Pattern areas 15a-15c and additional pattern areas 16a-16b each comprise a transmissive diffraction grating.

[0143] [000134] The illumination system IL' illuminates the measurement patterning device MA'' with radiation. In the embodiment shown in Figure 12, the illumination system IL' is configured to form separate measurement beams 17a-17c and additional separate measurement beams 18a-18b. Each measurement beam 17a-17c illuminates a corresponding pattern area 15a-15c of the measurement patterning device MA'', and each measurement beam 18a-18b illuminates a corresponding additional pattern area 16a-16b of the measurement patterning device MA''.

[0144] [000135] Pattern regions 15a-15c modify measurement beams 17a-17c, and additional pattern regions 16a-16b modify additional measurement beams 18a-18b. Specifically, additional pattern regions 16a-16b cause spatial modulation of additional measurement beams 18a-18b, causing diffraction of additional measurement beams 18a-18b. In the embodiment shown in FIG. 13A, additional pattern regions 16a-16b each include two distinct portions. For example, first additional pattern region 16a includes first portion 16a' and second portion 16a''. First portion 16a' includes a diffraction grating aligned parallel to the u direction, and second portion 16a'' includes a diffraction grating aligned parallel to the v direction. The u and v directions are shown in FIG. 13A. Both the u and v directions are aligned at approximately 45° with respect to both the x and y directions and are aligned perpendicular to each other. The second additional pattern region 16b shown in FIG. 13A is identical to the first additional pattern region 16a, and its diffraction grating includes first and second portions aligned perpendicular to each other.

[0145] [000136] The modified additional measurement beams 18a-18b are received by the projection system PS'. The projection system PS' forms an image of the additional pattern areas 16a-16b on the sensor arrangement 22. The sensor arrangement 22 comprises a plurality of additional diffraction gratings 20a-20b (i.e. second pattern areas) and a radiation detector 24. The additional diffraction gratings 20a-20b are configured so that each additional grating 20a-20b receives a corresponding additional modified measurement beam 18a-18b output from the projection system PS'. The modified measurement beams 18a-18b incident on the additional diffraction gratings 20a-20b are further modified by the additional diffraction gratings 20a-20b. The modified measurement beams 18a-18b transmitted by the additional diffraction gratings 20a-20b are incident on the radiation detector 24.

[0146] [000137] Projection system PS' is configured to project a modified measurement beam 18a from the additional pattern area 16a, and additional diffraction grating 20a is configured to receive the modified measurement beam 18a (more generally, a first diffracted beam) from projection system PS'. The additional diffraction grating 20a further modifies the modified measurement beam 18a (i.e., more generally, from each first diffracted beam into a plurality of second diffracted beams) such that the additional pattern area 16a and the additional diffraction grating 20a form a set. It should be understood that there are multiple sets, i.e., five sets in this embodiment corresponding to each pair of pattern areas 15a-15c, 16a-16b (i.e., first pattern areas) and diffraction gratings 19a-19c, 20a-20b (second pattern areas). More generally, each set includes one of a plurality of first pattern regions 15a-15c, 16a-16b and one of a plurality of second pattern regions 19a-19c, 20a-20b. In some embodiments, the pitch of the first pattern regions and the pitch of the second pattern regions in the same set may be the same or may be an integer multiple, although in other embodiments, the pitch of the first pattern regions and the pitch of the second pattern regions in the same set may be different. Generally, the first and second pattern regions in a set may be matched by matching the pitch of the shear direction of the first and second pattern regions such that at least a portion of a second diffracted beam formed from at least one of the first diffracted beams is spatially coherent with a second diffracted beam formed from at least one other first diffracted beam to form an interference pattern on the radiation detector.

[0147] [000138] Patterned area 15a and additional patterned area 16a may be considered adjacent gratings. Grating 19a and additional grating 20a may be considered adjacent gratings. Similarly, additional patterned area 16a and patterned area 15b may be considered adjacent gratings. Additional grating 20a and grating 19b may be considered adjacent gratings.

[0148] [000139] It should be understood that adjacent gratings form adjacent sets. The set including patterned region 15a and diffraction grating 19a and the set including additional patterned region 16a and additional diffraction grating 20a may be considered adjacent sets. Similarly, the set including additional patterned region 16a and additional diffraction grating 20a and the set including patterned region 15b and diffraction grating 19b may be considered adjacent sets.

[0149] [000140] The additional diffraction gratings 20a-20b and the portions of radiation sensor 24 that receive the modified additional measurement beams 18a-18b form detector areas 26a-26b. Measurements of a given additional measurement beam 18a-18b may be made at corresponding detector areas 26a-26b (as shown).

[0150] [000141] Modifications of measurement beams 17a-17c made by gratings 19a-19c in pattern areas 15a-15c and detector areas 25a-25c result in an interference pattern being formed on radiation detector 24. Modifications of additional measurement beams 18a-18b made by additional gratings 20a-20b in additional pattern areas 16a-16b and additional detector areas 26a-26b also result in an interference pattern being formed on radiation detector 24. The interference pattern is related to the derivative of the phase of the measurement beam and depends on aberrations caused by the projection system PS'. Therefore, the interference pattern may be used to determine the aberrations caused by the projection system PS'.

[0151] [000142] Typically, each additional diffraction grating 20a-20b of detector regions 26a-26b comprises a two-dimensional transmission grating. In the embodiment shown in Figure 13B, each additional detector region 26a-26b comprises an additional diffraction grating 20a-20b that is configured in a checkerboard shape.

[0152] [000143] The controller CN' receives results of the measurements made by the sensor arrangement 22 and determines from the measurements the aberrations due to the projection system PS'. The controller CN' may be configured to control one or more components of the measurement system 11. For example, the controller CN' may control a positioning device PW' operable to move the sensor arrangement 22 and / or the measurement patterning device MA'' relative to each other. The controller CN' may control adjusting means PA' for adjusting components of the projection system PS'. For example, the adjusting means PA' may adjust optical elements of the projection system PS' to correct the aberrations due to the projection system PS' and determined by the controller CN'.

[0153] [000144] Determining the aberrations (which may be due to errors in the projection system PS or in the placement of the patterning device MA or substrate W) may involve fitting results of measurements made by sensor arrangement 22 to Zernike polynomials to obtain Zernike coefficients. Different Zernike coefficients may provide information about different forms of aberrations due to the projection system PS'. The Zernike coefficients may be determined separately at different positions in the x and / or y directions. For example, in the embodiment shown in Figures 12, 13A and 13B, Zernike coefficients may be determined for each measurement beam 17a-17c and for each additional measurement beam 18a-18b.

[0154] [000145] In this embodiment, the measurement patterning device MA" comprises five pattern areas 15a-15c, 16a-16b, the sensor arrangement 22 comprises five detector areas 25a-25c, 26a-26b, and five measurement beams 17a-17c, 18a-18b are formed. This allows the Zernike coefficients to be determined at more positions (i.e. more field points) than in the examples of Figures 2, 3A and 3B. In some embodiments, the measurement patterning device MA" may comprise more than five pattern areas, the sensor arrangement 22 may comprise more than five detector areas, and more than five measurement beams may be formed. In some embodiments, the pattern areas and detector areas may be distributed at various positions in both the x and y directions. This may allow the Zernike coefficients to be determined at positions that are spaced apart in both the x and y directions.

[0155] [000146] When more field points are measured, the possibility of correcting aberrations increases, for example, by inserting additional lenses to manipulate the wavefront. This may increase the degrees of freedom, and therefore may require a more densely sampled grid of measurements. Currently, for example, seven field points are measured by a measurement system, requiring separate measurements and integrating the results. On the other hand, if, for example, thirteen field points can be measured simultaneously, a single measurement may be sufficient to achieve the desired correctability without the need to integrate multiple measurements. Using an increased sampling of a larger number of field points, for example, thirteen field points, improves the reproducibility, i.e., measurement repeatability, of the measurement system for reticle alignment. Previously, seven field points were measured, and it may be assumed that previous measurements were made only at odd field point positions in the thirteen field point line, i.e., positions 1, 3, 5, 7, 9, 11, and 13.

[0156] [000147] The presence of additional pattern regions 16a-16b between pattern regions 15a-15c and additional diffraction gratings 20a-20b between diffraction gratings 19a-19c means that more field points can be measured using the same size measurement system (i.e., patterning device and sensor arrangement of the same width). The additional diffraction gratings may be considered to be included at even field point positions, e.g., positions 2, 4, 6, 8, 10, and 12 of the 13 field point line. However, due to the proximity of the diffraction gratings, a pixel on radiation detector 24 may receive a signal from more than one diffraction grating (i.e., more than one measurement beam). Thus, in the embodiment of Figures 13A and 13B, the interference patterns formed on radiation detector 24 may overlap to some extent. This is not specifically shown in Figure 12 for clarity.

[0157] [000148] To distinguish signals from pixels with overlapping radiation incident from two or more measurement beams from adjacent gratings, adjacent gratings have different pitches, which introduces coding of information from adjacent gratings.

[0158] 13A and 13B, the pitch of additional patterned regions 16a-16b is shown to be twice the pitch of patterned regions 15a-15c. That is, additional patterned regions 16a-16b are shown to have approximately twice the number of grating lines as patterned regions 15a-15c. The pitch of additional diffraction gratings 20a-20b is also shown to be twice the pitch of diffraction gratings 19a-19c. That is, additional diffraction gratings 20a-20b are shown to have approximately twice the number of checkerboard boxes as diffraction gratings 19a-19c. However, this is just one example, and in other embodiments, the pitch of additional patterned regions 16a-16b may be various multiples of patterned regions 15a-15c, and the pitch of additional diffraction gratings 20a-20b may be various multiples of diffraction gratings 19a-19c, for example, three times larger.

[0159] For example, the pitch of additional patterned regions 16a-16b may be a non-integer multiple of that of patterned regions 15a-15c, and the pitch of additional diffraction gratings 20a-20b may be a non-integer multiple of that of diffraction gratings 19a-19c. Software (e.g., an algorithm) may be programmed to disentangle signals from adjacent gratings without requiring them to have integer multiples of pitch. Furthermore, including non-integer multiples may provide more freedom in choosing a particular pitch difference, i.e., more options may exist for achieving desired performance. It may be preferable for the pitch of adjacent diffraction gratings (e.g., additional diffraction grating 20a and diffraction grating 19a) to be a non-even integer multiple because the gratings may have a 50% duty cycle (i.e., checkerboard design), and it may be difficult or impossible to distinguish between adjacent gratings using even diffraction orders, such as factors 2, 4, 6, etc.

[0160] [000151] In some embodiments, the first and second pattern regions extend only in the x-direction (i.e., a single direction) so as to be 1D, while in other embodiments the first and second pattern regions may extend in both the x-direction and the y-direction (i.e., two orthogonal directions) so as to be 2D. In the 2D case, adjacent pattern regions may have different pitches in both directions.

[0161] [000152] In some embodiments, the pitch of the first pattern regions (pattern regions 15a-15c and additional pattern regions 16a-16b) may differ in adjacent sets, and the pitch of the second pattern regions (diffraction gratings 19a-19c and additional diffraction gratings 20a-20b) may differ in adjacent sets. However, in other embodiments, the pitch of the first pattern regions or second pattern regions in adjacent sets may differ in adjacent sets, i.e., the first pattern regions or second pattern regions may have the same pitch for adjacent gratings. It may be preferable for the pitch of the second pattern regions in adjacent sets to differ, rather than the pitch of the first pattern regions in adjacent sets to differ.

[0162] [000153] In some embodiments, the pitch of every other pattern area may be the same. That is, the pitch of every other diffraction grating may be the same. For example, the pitch of each of the additional diffraction gratings 20a-20b may be the same, and the pitch of each of the diffraction gratings 19a-19c may be the same (with the pitch of adjacent diffraction gratings differing as a function of time). This may simply require computation to disentangle the signals. However, in some embodiments, the pitch of every other pattern area may be different, just as adjacent pattern areas may be different.

[0163] [000154] Figure 14 shows a spatial intensity plot of measurements made by measurement system 11 measuring exemplary 13 field points. The x and y axes show spatial position in bits, and the intensity bar on the right measures up to 1000. It can be seen that the intensity is highest at the center of the field point, but there is some overlap between the field points. The field points are spaced sufficiently to provide 13 field points on the sensor device 22 without saturating the radiation detector 24 (e.g., a camera). 13 field points may require 13 sets of first and second pattern areas.

[0164] [000155] Figure 15 shows various phase curves measured for various positions on the camera. More specifically, Figure 15 shows a forward graph of the camera's phase (pi) and a rearward graph showing the spatial position of the field points for the camera. For the rearward graph, the x- and y-axes again show the spatial position in bits.

[0165] [000156] In this embodiment, the pitch of the additional patterned regions 16a-16b is one-third the pitch of the patterned regions 15a-15c, and the pitch of the additional diffraction gratings 20a-20b is one-third the pitch of the diffraction gratings 19a-19c. That is, the pitch of the gratings at the even field point locations is one-third the pitch at the odd field point locations. For clarity, FIG. 15 shows only three of the thirteen field points, but it should be understood that the remaining ten could be shown as well. The even and odd field points may more generally be considered adjacent field points.

[0166] [000157] As can be seen from the position versus intensity graph in Figure 15, there are regions of overlap between the radiation detected for adjacent field points. Each field point may have multiple interfering diffracted beams (i.e., diffracted beams of different orders). Some of these diffracted beams may overlap as shown.

[0167] [000158] The phase and intensity graph of Figure 15 shows fits (i.e., measurement lines) of measurements made by measurement system 11 showing intensity peaks for field point locations. The phases and corresponding intensities may be fitted to distinguish between signals from odd and even field points. Lines may be fitted to the fitted A and fitted B points to provide resolution A and resolution B lines, respectively. As can be seen from the graph, resolution A has three times the period of resolution B (i.e., one sine wave in resolution A vs. three complete sine waves for resolution B), so resolution A maps to the even field points with a grating that has a pitch that is one-third of the pitch of the grating at the odd field points in this case.

[0168] [000159] More specifically, since the period is known (from the pitch of the grating), the phase may be determined at each pixel location, providing a phase map for each of the pixels. In this case, a total of nine phase steps are used to illustrate the situation. However, it should be understood that a different number of phase steps may be used in other embodiments. A minimum of four phase steps is required to fit a sine wave to a grating with a different pitch, since there are four unknowns: two phases and two amplitudes.

[0169] [000160] The phase map may then be linearly fitted to the Zernike coefficients to provide an aberration map, which provides the aberrations for the projection system PS'.

[0170] [000161] Figure 16 shows a graph illustrating simulated measurement repeatability (reproduc (nm)) for eight phase steps where one grating has one-third the pitch of the adjacent grating. The repeatability per field point may be comparable to the repeatability per field point currently achieved (black line at the top of Figure 16). This means that by introducing additional field points (e.g., at even field point positions), the amount of data collected in a single measurement may be increased from 7 to 13 field points with the same or comparable repeatability per field point. Repeatability may be considered an assessment of the noise in the measurement.

[0171] [000162] Figure 17 shows a graph illustrating simulated expected position dependence for one grating with eight phase steps and one-third the pitch of adjacent gratings. The misalignment (nm) may indicate what happens if the first and second pattern regions are not optimally aligned, i.e., if the patterning device is not in the expected position. It may be desirable to minimize the expected position dependence. This may be done in two ways: by increasing the number of phase steps or by choosing a different pitch. Increasing the number of phase steps has the disadvantage of increasing measurement time, so it may be desirable to optimize these variables for a particular implementation.

[0172] [000163] Repeatability and expected position dependence may be simulated using a specific camera nonlinearity. With this camera nonlinearity, for example, eight phase steps may be required. With a camera chip with less nonlinearity, fewer than eight phase steps may be used. Increasing the number of phase steps may reduce measurement error but increase measurement time. When the number of phase steps exceeds five, the periodic operation gain is small when comparing two measurements of seven field points with one measurement of thirteen field points. That is, 2 (separate measurements of odd and even field points) × 2 (u, v directions) × 5 (phase steps) is not much slower than 1 (one measurement of both odd and even field points) × 2 (u, v directions) × 8 (phase steps). In some embodiments, the number of phase steps used may be, for example, 4, 5, 6, 7, 8, or 9.

[0173] [000164] For a third-order polynomial fit that may be used with a seven-field-point measurement of the measurement system, a 13-field-point measurement may improve the repeatability of the measurement system by a factor of 1.5. For overlapping spots, the improvement that may be achieved with higher-order Zernikes may be small. However, for certain system control, one may be primarily interested in lower-order Zernikes, so the results for higher-order Zernikes may not be important. The measurement may also improve overlay accuracy.

[0174] [000165] In an embodiment, the measurement system may be an alignment sensor rather than a measurement system for measuring aberrations.

[0175] [000166] In the case of an alignment sensor, an alignment mark, typically a diffraction grating or other type of alignment mark, is provided on the substrate. The alignment sensor projects a light pulse onto the alignment mark (e.g., mask alignment marks M1, M2 or substrate alignment marks P1, P2) so that it is scattered by the alignment mark. The intensity of the scattered light pulse is measured by a detector, from which position information (e.g., indicative of the position of the alignment mark with respect to the alignment sensor) is obtained.

[0176] [000167] In this embodiment, the patterned areas (i.e., diffraction gratings) of the sensor device may be considered alignment marks. As above, adjacent diffraction gratings may have different pitches that allow for disentangling of overlapping radiation from adjacent diffraction gratings detected by the radiation detector. For example, using a measurement system to measure the alignment of a substrate, 13 field points may be measured instead of 7 field points.

[0177] [000168] In some embodiments, the alignment sensor may have a sensor device with a radiation detector. The alignment sensor may include an illumination system configured to illuminate the sensor device with radiation. The sensor device may include a plurality of pattern areas configured to receive a radiation beam and form a plurality of diffracted beams separated in a shear direction. The pattern areas may include, for example, a checkerboard-shaped diffraction grating with a 50% duty cycle. A patterning device may not be required for the alignment sensor, and therefore the first and second pattern areas may not be present, although the pattern area of ​​the alignment sensor may be considered to be in the same position as the second pattern area in the embodiment of FIG. 12.

[0178] [000169] In the alignment sensor, the pitch of the pattern areas is different for adjacent pattern areas, similar to the second pattern area in the embodiment of Figure 13B. The different pitch of adjacent pattern areas allows for the radiation detector to disentangle overlapping radiation to distinguish signals from adjacent pattern areas. This allows for more field points to be measured in a single measurement. This allows for more data to be used in measuring alignment, which may result in more accurate alignment measurements.

[0179] [000170] Although specific reference may be made in this text to the use of lithographic apparatus in the manufacture of ICs, it will be appreciated that the lithographic apparatus described herein have other applications, such as in the manufacture of integrated optical systems, guidance and detection patterns for magnetic domain memories, flat panel displays, liquid crystal displays (LCDs), thin film magnetic heads, etc.

[0180] [000171] Although specific reference is made herein to embodiments of the invention in relation to lithography apparatus, embodiments of the invention may also be used in other apparatus. Embodiments of the invention may form part of a mask inspection apparatus, a metrology apparatus, or any apparatus that measures or processes objects such as wafers (or other substrates) or masks (or other patterning devices). These apparatus are sometimes referred to generically as lithography tools. Such lithography tools may use vacuum conditions or ambient (non-vacuum) conditions.

[0181] [000172] Although particular reference has been made above to the use of embodiments of the present invention in connection with optical lithography, it will be understood that the present invention may be used in other applications, such as imprint lithography, and is not limited to optical lithography, where the context allows.

[0182] [000173] Where the context permits, embodiments of the present invention may be implemented in hardware, firmware, software, or any combination thereof. Embodiments of the present invention may also be implemented as instructions stored on a machine-readable medium, which may be read and executed by one or more processors. A machine-readable medium may include any mechanism for storing or transmitting information in a form readable by a machine (e.g., a computing device). For example, machine-readable media may include read-only memory (ROM), random-access memory (RAM), magnetic storage media, optical storage media, flash memory devices, electrical, optical, acoustic, or other forms of propagated signals (e.g., carrier waves, infrared signals, digital signals, etc.), and others. Furthermore, firmware, software, routines, and instructions may be described herein as performing particular actions. However, it should be understood that such description is merely for convenience and that such actions actually result from computing devices, processors, controllers, or other devices executing the firmware, software, routines, instructions, etc., and that in doing so, actuators or other devices may interact with the physical world.

[0183] [000174] While specific embodiments of the present invention have been described above, it should be understood that the invention may be practiced otherwise than as described. The foregoing description is intended to be illustrative and not limiting. Thus, it will be apparent to one skilled in the art that modifications may be made to the invention as described without departing from the scope of the claims set out below.

[0184] Other aspects of the invention are described in the following numbered clauses: 1. A sensor device; an illumination system for receiving a beam of radiation and illuminating with radiation a sensor device having a pattern area that forms a plurality of diffracted beams separated in a shear direction, the sensor device comprises a radiation detector; the pattern region is configured such that at least a portion of the diffracted beam forms an interference pattern on the radiation detector; the sensor device comprises a plurality of pattern areas; A measurement system in which the pitch of a patterned area is different from adjacent patterned areas. 2. The measurement system of clause 1, wherein the measurement system is configured such that interference patterns from adjacent pattern areas at least partially overlap at the radiation detector. 3. A measurement system of clause 1 or 2 in which the pitch of every other pattern area is the same. 4. Any measurement system of clauses 1 to 3 in which the pitch of adjacent pattern areas is not an even integer multiple. 5. A measurement system of clause 4 where the pitch of adjacent pattern areas is not an integer multiple. 6. The measurement system of any of clauses 1 to 5, wherein the plurality of pattern areas comprises 13 pattern areas. 7. The measurement system of any of clauses 1 to 6, wherein a plurality of pattern areas are positioned at odd and even field point locations. 8. The measurement system of any of clauses 1 to 7, wherein the plurality of pattern areas extend in an x-direction and a second direction orthogonal to the x-direction. 9. The measurement system further comprises a patterning device; an illumination system receiving the beam of radiation and illuminating with the radiation a patterning device having a first pattern area that forms a plurality of first diffracted beams separated in a shear direction; the pattern area of ​​the sensor device includes a second pattern area; a projection system projects the first diffracted beam onto the sensor device, a second pattern area receives the first diffracted beam from the projection system, and forms a plurality of second diffracted beams from each of the first diffracted beams such that the first and second pattern areas form a set; matching the first and second pattern areas in the set by matching the pitches of the first and second pattern areas in the shear direction such that at least a portion of a second diffracted beam formed from at least one of the first diffracted beams is spatially coherent with a second diffracted beam formed from at least one other first diffracted beam to form an interference pattern on the radiation detector; the patterning device comprises a plurality of first pattern areas and the sensor apparatus comprises a plurality of second pattern areas, such that there are a plurality of sets each comprising one of the plurality of first pattern areas and one of the plurality of second pattern areas; 9. The measurement system of any of clauses 1 to 8, wherein the pitch of adjacent sets of first pattern regions is different and / or the pitch of adjacent sets of second pattern regions is different. 10. The measurement system of clause 9, wherein the pitch of the first pattern area and the second pattern area in at least one of the plurality of sets is the same. 11. A positioning device for moving at least one of the patterning device and the sensor device in a shearing direction; controlling the positioning arrangement to move at least one of the first patterning device and the sensor arrangement in a shear direction such that the intensity of radiation received by each portion of the radiation detector varies as a function of movement in the shear direction to produce an oscillation signal corresponding to the varying pitch of the first pattern areas in the adjacent set and / or the varying pitch of the second pattern areas in the adjacent set; determining from the radiation detector phases of harmonics of the vibration signal at a plurality of locations on the radiation detector; 11. The measurement system of clause 9 or 10, comprising: a controller that determines a set of coefficients characterizing an aberration map of the projection system from phases of harmonics of the vibration signal at a plurality of positions on the radiation detector. 12. A measurement system according to clause 11, wherein the set of coefficients characterizing the aberration map of the projection system is determined by equating the phase of the harmonics of the vibration signal to the difference in the aberration map of positions in the pupil plane that are separated in the shearing direction by twice the shearing distance corresponding to the distance in the pupil plane between two adjacent first diffracted beams, and solving to obtain the set of coefficients. 13. A measurement system of clause 12, wherein the set of coefficients characterizing the aberration map of the projection system is determined by simultaneously solving a constraint in the shear direction and a constraint in a second orthogonal direction. 14. The measurement system of any of clauses 9 to 13, wherein the plurality of first pattern areas and the plurality of second pattern areas are gratings. 15. A lithographic apparatus comprising a measurement system according to any one of clauses 1 to 14. 16. A method of measuring illuminating a sensor device with radiation, the sensor device having a pattern area that receives at least a portion of the radiation and forms a plurality of diffracted beams that are separated in a shear direction; the sensor device includes a radiation detector that receives at least a portion of the diffracted beam; the pattern region is configured such that at least a portion of the diffracted beam forms an interference pattern on the radiation detector; the sensor device comprises a plurality of pattern areas; The method by which the pitch of a pattern area differs from adjacent pattern areas. 17. Illuminating with radiation a patterning device having a first pattern area that receives at least a portion of the radiation and forms a plurality of first diffracted beams separated in a shear direction; receiving the first diffracted beams from the projection system and projecting at least some of the plurality of first diffracted beams using the projection system onto a sensor arrangement including a pattern area including a second pattern area forming a plurality of second diffracted beams from each of the first diffracted beams, and a radiation detector receiving at least some of the second diffracted beams; matching the first and second pattern areas in the set by matching the pitches of the first and second pattern areas in the shear direction such that at least a portion of a second diffracted beam formed from at least one of the first diffracted beams is spatially coherent with a second diffracted beam formed from at least one other first diffracted beam to form an interference pattern on the radiation detector; the patterning device comprises a plurality of first pattern areas and the sensor apparatus comprises a plurality of second pattern areas, such that there are a plurality of sets each comprising one of the plurality of first pattern areas and one of the plurality of second pattern areas; 17. The method of clause 16, wherein the pitch of the first pattern regions varies in adjacent sets and / or the pitch of the second pattern regions varies in adjacent sets. 18. Moving at least one of the patterning device and the sensor arrangement in a shear direction such that the intensity of radiation received by each portion of the radiation detector varies as a function of movement in the shear direction to form a plurality of oscillation signals corresponding to different pitches of the first pattern areas in the adjacent set and / or different pitches of the second pattern areas in the adjacent set; determining from the radiation detector the phases of the harmonics of the vibration signal at a plurality of locations on the radiation detector; and 18. The method of clause 17, further comprising determining a set of coefficients characterizing an aberration map of the projection system from phases of harmonics of the vibration signal at a plurality of locations on the radiation detector. 19. The method of clause 17 or 18, further comprising determining a set of coefficients characterizing an aberration map of the projection system by equating the phase of harmonics of the oscillation signal to differences in the aberration map at positions in the pupil plane that are separated in the shearing direction by twice the shearing distance corresponding to the distance in the pupil plane between two adjacent first diffracted beams, and solving to determine the set of coefficients. 20. The method of any of clauses 17 to 19, further comprising determining the set of coefficients characterizing the aberration map of the projection system by simultaneously solving the shear direction constraint and the second orthogonal direction constraint. 21. The method of any of clauses 17 to 20, further comprising moving at least one of the patterning device and the sensor arrangement in the shearing direction in phase steps in the range of 4 to 9 to form a plurality of vibration signals. 22. A computer readable medium carrying a computer program comprising computer readable instructions to cause a computer to carry out the method of any one of clauses 16 to 21. 23. A memory for storing processor-readable instructions; 22. A computing apparatus comprising: a processor for reading and executing instructions stored in a memory, the processor readable instructions including instructions for controlling a computer to perform a method according to any one of clauses 16 to 21.

Claims

1. a sensor device; an illumination system configured to receive a beam of radiation and illuminate the sensor device with radiation, the illumination system comprising a pattern area that forms a plurality of diffracted beams separated in a shear direction, the sensor device comprises a radiation detector; the pattern area is configured so that at least a portion of the diffracted beam forms an interference pattern on the radiation detector; the sensor device comprises a plurality of pattern areas; A measurement system in which the pitch of the patterned areas is different in adjacent patterned areas.

2. The measurement system of claim 1 , wherein the measurement system is configured such that the interference patterns from adjacent pattern areas at least partially overlap at the radiation detector.

3. 3. The measurement system of claim 1, wherein the pitch of every other pattern area is the same.

4. The measurement system of claim 1 , wherein the pitch of the adjacent pattern regions is not an integer multiple of an even number.

5. The measurement system of claim 4 , wherein the pitch of the adjacent pattern areas is not an integer multiple.

6. The measurement system of claim 1 , wherein the plurality of pattern areas includes 13 pattern areas.

7. 7. The measurement system of claim 1, wherein the plurality of pattern areas are positioned at odd and even field point locations.

8. The measurement system of claim 1 , wherein the plurality of pattern areas extend in an x-direction and a second direction orthogonal to the x-direction.

9. the measurement system further comprising a patterning device and a projection system; the illumination system receiving the radiation beam and illuminating with radiation the patterning device having a first pattern area that forms a plurality of first diffracted beams separated in the shear direction; the pattern area of ​​the sensor device includes a second pattern area; the projection system projects the first diffracted beam onto the sensor device, the second pattern area receives the first diffracted beam from the projection system, and forms a plurality of second diffracted beams from each of the first diffracted beams such that the first and second pattern areas form a set; matching the first and second pattern areas in the set by matching the pitch in the shear direction of the first and second pattern areas such that at least a portion of the second diffracted beam formed from at least one of the first diffracted beams is spatially coherent with a second diffracted beam formed from at least one other first diffracted beam to form an interference pattern on the radiation detector; the patterning device comprises a plurality of first pattern areas and the sensor apparatus comprises a plurality of second pattern areas, whereby there are a plurality of sets each comprising one of the plurality of first pattern areas and one of the plurality of second pattern areas; 9. The measurement system of claim 1, wherein the pitch of the first pattern areas is different in adjacent sets and / or the pitch of the second pattern areas is different in adjacent sets.

10. The measurement system of claim 9 , wherein the pitch of the first pattern area and the second pattern area in at least one of the plurality of sets is the same.

11. a positioning device configured to move at least one of the patterning device and the sensor device in the shearing direction; controlling the positioning arrangement to move at least one of the patterning device and the sensor arrangement in the shear direction such that an intensity of radiation received by each portion of the radiation detector varies as a function of the movement in the shear direction to form an oscillation signal corresponding to the different pitches of the first pattern areas in adjacent sets and / or the different pitches of the second pattern areas in adjacent sets; determining from the radiation detector phases of harmonics of the vibration signal at a plurality of locations on the radiation detector; and a controller configured to determine a set of coefficients characterizing an aberration map of the projection system from the phases of the harmonics of the oscillation signal at the plurality of locations on the radiation detector.

12. 12. The measurement system of claim 11 , wherein the set of coefficients characterizing the aberration map of the projection system is determined by equating the phase of the harmonics of the vibration signal to a difference in the aberration map of positions in a pupil plane that are separated in the shearing direction by twice a shearing distance corresponding to a distance in a pupil plane between two adjacent first diffracted beams, and solving to obtain the set of coefficients.

13. 13. The measurement system of claim 12, wherein the set of coefficients characterizing the aberration map of the projection system is determined by simultaneously solving the shear direction constraint and a second orthogonal direction constraint.

14. 14. The measurement system of claim 9, wherein the first pattern areas and the second pattern areas are gratings.

15. A method of measuring, illuminating a sensor device with radiation, the sensor device having a pattern area that receives at least a portion of the radiation and forms a plurality of diffracted beams that are separated in a shear direction; the sensor device includes a radiation detector that receives at least a portion of the diffracted beam; the pattern area is configured so that at least a portion of the diffracted beam forms an interference pattern on the radiation detector; the sensor device comprises a plurality of pattern areas; The pitch of the patterned areas is different in adjacent patterned areas.