Metal vapor pressure detection device and detection method

Abstract

A metal vapor pressure detection device and detection method includes a metal vapor pressure detection mechanism (3) arranged outside the metal vapor pressure detection chamber (1); the metal vapor pressure detection mechanism (3) includes a displacement generation system and a displacement detection system arranged in the displacement generation system; the displacement generation system includes a displacement slider sleeve (5), a displacement slider (4) arranged in the displacement slider sleeve (5), and a pressure balance spring (6) connected to the displacement slider (4). In the metal vapor pressure detection device, the metal vapor pressure can be directly obtained, providing a basis for the online control and adjustment of the metal vapor pressure.

Description

[Technical Field]

[0001] Technical Field The present invention relates to the technical field of metal vapor detection, and more particularly to an apparatus and method for detecting metal vapor pressure. [Background technology]

[0002] Background technology Physical vapor deposition (PVD) is a widely used material surface treatment technique that involves evaporating metals, alloys, or compounds in a vacuum environment, then condensing the resulting metal vapor and depositing it on a substrate. Using this technique to coat the surface of a material can result in a coating with excellent wear resistance, corrosion resistance, dry lubricity, and high hardness, significantly improving the performance and service life of the material. This environmentally friendly technique is widely used in fields such as machinery, electronics, hardware, aerospace, and the chemical industry, making it an important application technology for green manufacturing.

[0003] Physical vapor deposition techniques can be used with a variety of coating materials, including zinc, aluminum, magnesium, and chromium. Coating speeds are generally fast, typically 1-3 m / s. To achieve a good coating surface quality and spraying effect, it is necessary to maintain a relatively constant metal vapor flow rate and pressure during the spraying process. The metal vapor pressure is important for controlling the spraying process and is one of the key parameters that determine the adhesive strength between the coating and the substrate.

[0004] Currently, common pressure detection devices are mainly suitable for gases and water vapors. Metal vapor is a high-temperature airflow, so it is easy to condense in low-temperature regions, and some metals are relatively reactive and can easily react with other metals, resulting in corrosion. Therefore, existing pressure detection devices cannot directly measure the pressure of metal vapors. Currently, there are few reports on metal vapor pressure detection methods, and most of them use indirect methods for pressure measurement.

[0005] As a result of literature survey and patent search, there is currently no method or device for directly measuring metal vapor pressure. Therefore, there is a need to develop a measurement method and device that can directly obtain metal vapor pressure to provide a basis for on-line control and regulation of metal vapor. Summary of the Invention

[0006] Contents of the invention To address the above-mentioned shortcomings of the prior art, the present invention provides a metal vapor pressure detection device and method. By installing a displacement generating system and a displacement detecting system outside the metal evaporation chamber, the pressure of the metal vapor can be directly measured according to the displacement of the displacement slider detected in real time and the relationship curve between pressure and displacement obtained by gas calibration, providing a basis for online control and adjustment of the metal vapor.

[0007] To achieve the above objectives, the present invention adopts the following technical solutions: A first aspect of the present invention provides a metal vapor pressure detection device including a metal evaporation chamber and a pressure detection mechanism disposed outside the metal evaporation chamber, wherein the metal evaporation chamber is used to melt and vaporize metal to form metal vapor; and The pressure detection mechanism includes a displacement generating system and a displacement detection system disposed in the displacement generating system; the displacement generating system includes a displacement slider sleeve, a displacement slider disposed in the displacement slider sleeve, and a pressure balance spring connected to the displacement slider; the displacement slider sleeve is in communication with the metal evaporation chamber, and the displacement slider slides along the displacement slider sleeve under the pressure of the metal vapor; one end of the pressure balance spring is connected to the displacement slider and the other end is connected to the displacement detection system; and the pressure detection mechanism determines the pressure of the metal vapor according to the coordinate of the displacement slider detected by the displacement detection system.

[0008] Preferably, the displacement detection system further includes a fixing bracket and a displacement sensor; the fixing bracket is provided with a spring limiting block connected to the pressure balance spring, a fixing ring attached to the displacement slider sleeve, and a sensor fixing block for mounting the displacement sensor; and the spring limiting block is disposed between the fixing ring and the sensor fixing block, and the spring limiting block is provided with a light-transmitting hole corresponding to the displacement sensor.

[0009] Preferably, the displacement generating system further includes a heater disposed in the displacement slider sleeve.

[0010] Preferably, the pressure balance spring is made up of 1 to 10 springs with a wire diameter of 0.1 to 6 mm.

[0011] Preferably, the center of the displacement sensor, the center of the light transmitting hole, and the center of the pressure balance spring are on the same axis.

[0012] Preferably, the pressure detection mechanism further includes an intelligent processing module; and the intelligent processing module is used to receive the coordinates of the displacement slider detected by the displacement sensor and calculate the displacement of the displacement slider, and obtain the pressure of the metal vapor according to the displacement of the displacement slider and the relationship curve between the displacement and pressure obtained by calibration.

[0013] A second aspect of the present invention provides a method for detecting metal vapor pressure using the above-mentioned metal vapor pressure detection device, the detection method comprising the following steps: S1: Inject gases with different pressures into the metal vapor chamber of the metal vapor pressure detection device for repeated calibration, and obtain a relationship curve between the pressure and the displacement of the displacement slider; S2 melting and evaporating metal to form metal vapor in the metal evaporation chamber, in which the displacement slider slides along the displacement slider sleeve under the pressure of the metal vapor, and a pressure balance spring gradually contracts under the extrusion of the displacement slider until the displacement slider reaches force equilibrium and stops moving, and a displacement detection system detects the coordinates of the displacement slider in real time to obtain the displacement of the displacement slider; and S3 obtaining the pressure of the metal vapor according to the relationship curve between the pressure and the displacement of the displacement slider obtained in step S1 and the displacement of the displacement slider obtained in step S2. Includes:

[0014] Preferably, in step S1, the gas is 1×10 3 ~1×10 5 It has a pressure of 100 Pa.

[0015] Preferably, in step S2, the displacement ΔS of the displacement slider is ΔS=|S t -S0| where ΔS is the displacement of the displacement slider (mm); S t represents the coordinate (mm) of the displacement slider when it reaches force equilibrium after movement; and S0 represents the coordinate of the displacement slider at the zero position (initial coordinate of the displacement slider) (mm). is.

[0016] Preferably, in step S2, the displacement slider sleeve is heated to a temperature of 20 to 1000° C. by a heater while the displacement slider is moving.

[0017] The metal vapor pressure detection device and method provided by the present invention have the following beneficial effects: 1. The metal vapor pressure detection device and detection method of the present invention directly measure the pressure of the metal vapor based on the displacement of the displacement slider detected in real time through a displacement generating system and a displacement detecting system arranged outside the metal evaporation chamber and the relationship curve between pressure and displacement obtained by gas calibration, thereby providing a basis for online control and adjustment of the metal vapor. 2. The metal vapor pressure detection device and detection method of the present invention can monitor metal vapor pressure in the temperature range from room temperature to 1000°C in real time, providing a stable detection and adjustment basis for metal evaporation control. 3. The metal vapor pressure detection device and detection method of the present invention are suitable for directly obtaining the pressure of various metal vapors, and are characterized by good structural adaptability and process compatibility. 4. The metal vapor pressure detection device of the present invention has a simple structure, is suitable for various operating conditions and environments, is cost-effective, easy to operate and maintain, and facilitates automatic remote operation. [Brief explanation of the drawings]

[0018] [Figure 1] FIG. 1 is a schematic structural diagram of a metal vapor pressure detection device according to the present invention. [Figure 2a] FIG. 2a is a structural schematic diagram of the pressure detection mechanism of the present invention. [Figure 2b] FIG. 2b is a cross-sectional view taken along line AA in FIG. 2a. [Figure 3a] FIG. 3a is a schematic diagram showing the displacement slider of the pressure sensing mechanism of the present invention under the action of metal vapor pressure. [Figure 3b] FIG. 3b is a cross-sectional view taken along line BB in FIG. 3a. [Figure 4] FIG. 4 is a structural schematic diagram of the fixing bracket of the present invention. [Figure 5a] FIG. 5a is a structural schematic diagram of the displacement slider sleeve of the present invention. [Figure 5b] FIG. 5b is a cross-sectional view taken along line CC in FIG. 5a. [Figure 6]FIG. 6 is a schematic diagram of the structure of a pressure balance spring that is composed of multiple springs with different specifications such as wire diameter. [Explanation of symbols]

[0019] Reference sign: 1—metal evaporation chamber, 2—metal evaporation area, 3—pressure detection mechanism, 4—displacement slider, 5—displacement slider sleeve, 6—pressure balance spring, 7—fixing bracket (7-1 spring limit block; 7-2 sensor fixing block; 7-3 fixing ring), 8—displacement sensor, and 9—heater. DETAILED DESCRIPTION OF THE INVENTION

[0020] Specific Embodiments In order to better understand the above technical solution of the present invention, the technical solution of the present invention will be further described below in conjunction with the following embodiments.

[0021] As shown in FIG. 1, the present invention provides a metal vapor pressure detection device including a metal evaporation chamber 1 and a pressure detection mechanism 3 disposed outside the metal evaporation chamber 1. The metal evaporation chamber 1 is used to melt and evaporate metal to form metal vapor, and its interior is a metal evaporation region 2. As shown in FIGS. 2a and 2b, the pressure detection mechanism 3 includes a displacement generation system and a displacement detection system disposed in the displacement generation system. The displacement generation system includes a displacement slider sleeve 5 (as shown in FIGS. 5a and 5b), a displacement slider 4 disposed in the displacement slider sleeve 5, and a pressure balance spring 6 connected to the displacement slider 4. The displacement slider sleeve 5 communicates with the metal evaporation chamber 1, and the displacement slider 4 slides radially along the displacement slider sleeve 5 under the pressure of the metal vapor. One end (movable end) of the pressure balance spring 6 is connected to the displacement slider 4, and the other end (fixed end) of the pressure balance spring 6 is connected to the displacement detection system. The pressure detection mechanism 3 calculates the displacement of the displacement slider 4 based on the coordinates of the displacement slider 4 detected by the displacement detection system, and determines the pressure of the metal vapor.

[0022] As shown in Figures 2a and 2b, the displacement detection system of the present invention further includes a fixed bracket 7 and a displacement sensor 8. As shown in Figure 4, the fixed bracket 7 is provided with a spring limiting block 7-1 connected to the pressure balance spring 6, a fixed ring 7-3 attached to the displacement slider sleeve 5, and a sensor fixing block 7-2 for mounting the displacement sensor 8. Two fixing rings 7-3 are provided to make the fixed bracket more stable. The spring limiting block 7-1 is disposed between the fixing ring 7-3 and the sensor fixing block 7-2, and is provided with a light-transmitting hole corresponding to the displacement sensor 8. The fixing bracket 7 has three functions: first, it determines the position of the fixed end of the pressure balance spring 6 when it is deformed using the spring limiting block 7-1, and a light-transmitting hole corresponding to the displacement sensor 8 is designed in the spring limiting block 7-1, facilitating the displacement sensor 8 to measure the coordinates of the displacement slider 4 in real time; second, the displacement sensor 8 is mounted on the sensor fixing block 7-2 and can measure the displacement of the displacement slider 4 under the action of metal vapor; and third, the fixing bracket 7 is mounted on the displacement slider sleeve 5 via the fixing ring 7-3, making the fixing bracket 7 an important component connecting the displacement generation system and the displacement detection system.

[0023] In the present invention, to ensure that the displacement sensor 8 is not obstructed by other components during measurement, the center of the displacement sensor 8, the center of the pressure balance spring 6, and the center of the light-transmitting hole are essentially on the same axis.

[0024] 2a and 2b, to prevent metal vapor from condensing between the displacement slider 4 and the displacement slider sleeve 5 and on the inner wall of the displacement slider sleeve 5, which would affect the detection effect of the metal vapor pressure, the displacement generating system further includes a heater 9 disposed in the displacement slider sleeve 5, which can heat the displacement slider sleeve 5 to a temperature higher than the metal vapor temperature. In the present invention, the heater 9 employs resistance heating or induction heating, and the heating temperature range is 20 to 1000°C.

[0025] In practical applications, a suitable pressure balance spring 6 can be designed according to different pressure ranges, as shown in Figure 6. For example, if the detection range of metal vapor pressure is 1 x 10 3 ~10 5 In the case where the pressure balance spring 6 has a pressure of 10 Pa, it may be composed of a single spring or multiple springs, thereby enabling measurement of a wide range of metal vapor pressures. For example, in the present invention, the pressure balance spring 6 is composed of 1 to 10 springs. When measuring metal vapor pressure using a combination of multiple springs, multiple springs are connected in series to form the pressure balance spring 6. For example, in Figure 6, three springs (6-1, 6-2, and 6-3) with different wire diameters are connected in series to form the pressure balance spring 6. In the pressure balance spring 6, the wire diameter of each spring can be designed according to the pressure range to be measured, and the selectable wire diameters are between 0.1 mm and 6 mm.

[0026] In the present invention, the pressure detection mechanism 3 further includes an intelligent processing module. During the metal evaporation process, the intelligent processing module receives the coordinates of the displacement slider 4 measured in real time by the displacement sensor 8, calculates the displacement ΔS of the displacement slider 4, and obtains the pressure of the metal vapor according to the displacement ΔS and the relationship curve between the pressure and the displacement ΔS of the displacement slider 4 obtained by calibration, thereby obtaining the pressure of the metal vapor in real time.

[0027] The metal vapor pressure detection device of the present invention can be used to measure metal vapor pressure under both standard and vacuum conditions, making it suitable for measuring metal vapor pressure under a variety of operating conditions. The metal vapor pressure detection device of the present invention can directly obtain the pressure of the metal vapor while minimizing the influence of other factors, and has high interference resistance and relatively stable pressure measurement.

[0028] When the metal vapor pressure detection device of the present invention is used, in the absence of metal vapor, the displacement slider 4 leans against the metal evaporation chamber 1 under the compressive stress of the pressure balance spring 6 (the outer wall of the metal evaporation chamber 1 is provided with a limiting portion that holds the displacement slider 4 in the displacement slider sleeve 5), forming a force balance. This position represents the coordinate of the displacement slider 4 when it is not moving and is called the zero position S0. As shown in Figures 3a and 3b, when metal vapor is generated in the metal evaporation chamber 1 (or other gas is introduced), the metal vapor pressure in the metal evaporation chamber 1 increases as the evaporation process progresses. When the metal vapor pressure exceeds the initial compressive stress of the pressure balance spring 6, the net external force acting on the displacement slider 4 is directed outward away from the metal evaporation chamber 1. The displacement slider 4 moves along the wall of the displacement slider sleeve 5 away from the metal evaporation chamber 1. The pressure balance spring 6 gradually contracts under the extrusion of the displacement slider 4, and at the same time, the compressive stress on the displacement slider 4 gradually increases. When the compressive stress of the pressure balance spring 6 equals the metal vapor pressure, the displacement slider 4 reaches force equilibrium and stops moving. During the metal evaporation process, the pressure of the metal vapor generated inside the metal evaporation chamber 1 decreases. When the metal vapor pressure is smaller than the compressive stress of the pressure balance spring 6, the net external force of the displacement slider 4 is directed inward toward the metal evaporation chamber 1. The displacement slider 4 moves toward the metal evaporation chamber 1, and the compressive stress of the pressure balance spring 6 on the displacement slider 4 gradually decreases. When the compressive stress of the pressure balance spring 6 on the displacement slider 4 equals the metal vapor pressure, the displacement slider 4 stops moving. As the metal evaporation nears completion and the metal vapor pressure continues to decrease, the displacement slider 4 moves toward the metal evaporation chamber 1 under the internal stress of the pressure balance spring 6 until it leans against the metal evaporation chamber 1, indicating that the metal vapor pressure is lower than the minimum detection pressure of the metal vapor pressure detection device.As the displacement slider 4 moves from the time it leaves the metal evaporation chamber 1 until it reaches force equilibrium and stops, the coordinates of the displacement slider 4 are measured in real time by the displacement sensor 8 and transferred to the intelligent processing module, which calculates the displacement ΔS of the displacement slider 4 in real time and can determine the pressure of the metal vapor according to the displacement ΔS and the relationship curve between pressure and displacement obtained by gas calibration.

[0029] The pressure of the metal vapor is detected using the above-mentioned metal vapor pressure detection device, wherein the detection method includes the following steps: For repeated calibration, gases with different pressures are introduced into the metal vapor chamber of the metal vapor pressure detection device, and the relationship curve between pressure and displacement of the displacement slider is obtained.

[0030] The specific process is as follows: before obtaining the metal vapor pressure, the relationship between the pressure of the metal vapor pressure detection device and the displacement of the displacement slider is first calibrated. Gas of known pressure is introduced into the metal evaporation chamber. The displacement slider is then released from the metal evaporation chamber under the action of the gas, exerting an inward compressive stress on the displacement slider. The pressure balance spring gradually contracts under the displacement slider's extrusion until the displacement slider reaches force equilibrium and stops moving. The displacement detection system measures the displacement slider's coordinates in real time. When no gas is introduced into the metal evaporation chamber, the displacement slider leans against the limiting portion of the outer wall of the metal evaporation chamber under the action of the inward compressive stress of the pressure balance spring, forming force equilibrium. At this time, the position of the displacement slider is recorded as the zero position S0. Based on the above process, a relationship curve between pressure and displacement of the displacement slider is obtained. To ensure data accuracy, calibration must be repeated. Furthermore, the gas pressure must also be increased or decreased to obtain the relationship curve between pressure and displacement of the displacement slider by repeating the calibration of the relationship between pressure and displacement of the displacement slider multiple times. The gas used during the calibration is 1×10 3 ~1×10 5 It has a pressure of 100 Pa.

[0031] The metal is melted and evaporated to form metal vapor in the metal evaporation chamber (S2). The displacement slider slides along the displacement slider sleeve under the pressure of the metal vapor. The pressure balance spring gradually contracts under the extrusion of the displacement slider until the displacement slider reaches force equilibrium and stops moving. The displacement detection system detects the coordinates of the displacement slider in real time to obtain the displacement of the displacement slider.

[0032] The specific process is as follows: metal is melted and evaporated to form metal vapor in the metal evaporation chamber. When the pressure of the metal vapor exceeds the initial internal stress of the pressure balance spring, the displacement slider slides along the displacement slider sleeve under the pressure of the metal vapor. The pressure balance spring gradually contracts under the extrusion of the displacement slider. When the internal stress of the pressure balance spring against the displacement slider becomes equal to the pressure of the metal vapor, the displacement slider stops moving. The displacement detection system detects the coordinate S of the displacement slider at this time. t in real time and send them to the pressure detection system to obtain the displacement ΔS of the displacement slider: ΔS=|S t -S0| (where ΔS is the displacement of the displacement slider (mm); S t represents the coordinate (mm) of the displacement slider when it reaches equilibrium and stops after moving; and S0 represents the coordinate of the displacement slider at the zero position (mm).

[0033] When the pressure of the metal vapor changes, the displacement at this time can be recalculated based on the coordinates detected by the displacement detection system after the displacement slider reaches force equilibrium again.

[0034] In the above process, the displacement slider sleeve is heated to a temperature of 20 to 1000°C by a heater to prevent metal vapor from condensing between the displacement slider and the displacement slider sleeve and on the inner wall of the displacement slider sleeve, which would affect the detection effect of the metal vapor pressure.

[0035] S3: Obtain the pressure of the metal vapor according to the relationship curve between the pressure and the displacement of the displacement slider obtained in step S1 and the displacement of the displacement slider obtained in step S2.

[0036] The specific process is as follows: according to the relationship curve between the pressure and the displacement of the displacement slider obtained in step S1 and the displacement detected in step S2, the pressure of the metal vapor is obtained in real time. [Example]

[0037] The metal vapor pressure detection device and method of the present invention will be further described below with reference to specific examples.

[0038] Example 1 In this example, the measured metal vapor pressure is 5×10 3 ~1×10 5 The pressure balance spring 4 is composed of a single spring with a wire diameter of 4 to 6 mm. The implementation steps are as follows: First, calibrate the metal vapor pressure detection device as follows: In the initial state, the displacement sensor 8 records the coordinate S0 of the initial zero position of the displacement slider 4 and sends it to the intelligent processing module. Nitrogen gas is introduced into the metal evaporation chamber 1. As the pressure of the nitrogen gas in the metal evaporation chamber 1 increases, the displacement slider 4 moves outward under a net external force. The pressure of the nitrogen gas in the chamber can be measured by a pressure gauge, and the displacement sensor 8 detects the displacement of the displacement slider 4 in real time to obtain the relationship between the displacement and pressure during the increase of the gas pressure. The pressure of nitrogen gas in the metal evaporation chamber is 1×10 5 When the nitrogen pressure in the metal evaporation chamber reaches 5 x 10 Pa, gradually increase the pressure. 3 During this process, as the gas pressure acting on the displacement slider 4 decreases, the net external force becomes inward. The real-time displacement of the displacement slider 4 is measured, and the relationship between the displacement and pressure during the decrease in gas pressure is obtained. Throughout the calibration process, the displacement of the displacement slider 4 and the corresponding values ​​of the gas pressure in the metal evaporation chamber are sent to the intelligent processing module in real time. By repeating the measurements multiple times, a relationship curve between the displacement and the pressure is obtained.

[0039] The metal vapor pressure in the metal evaporation chamber is then obtained using the relationship curve between displacement and pressure from the above calibration.

[0040] The initial zero position of the displacement slider at the initial state of metal melting and evaporation is recorded and sent to the intelligent processing module. The metal in the metal evaporation chamber 1 is heated to achieve melting and evaporation, and the temperature of the metal melting and evaporation area is measured in real time and sent to the intelligent processing module. The intelligent processing module sends the real-time temperature inside the metal evaporation chamber 1 to the heater 9, which heats the displacement slider sleeve 5 to a target temperature (above the metal vapor temperature) to avoid condensation of the metal vapor on the pressure sensing device. The displacement sensor 8 detects in real time the displacement caused by the displacement slider 4. The real time pressure of the metal vapor in the metal evaporation chamber 1 is determined using the relationship curve between displacement and pressure obtained from the calibration.

[0041] By using the above method, 5 × 10 3 ~1×10 5 Stable measurements of metal vapor pressures in the Pa range can be achieved.

[0042] Example 2 In this example, the measured metal vapor pressure is 1×10 3 ~5×10 3 The pressure balance spring 4 is composed of a single spring with a wire diameter of 2 to 5 mm. The specific implementation method and steps are the same as those in the first embodiment.

[0043] Example 3 In this example, the measured metal vapor pressure is 1×10 3~5×10 3 The pressure balance spring 4 is configured by connecting two or more springs with different wire diameters of 0.1 to 5 mm in series, which enables highly accurate detection of metal vapor pressure.

[0044] In summary, in this invention, a displacement generating system and a displacement detecting system are placed outside the metal evaporation chamber, and the metal vapor pressure is directly obtained by detecting the displacement of the displacement slider in real time and using the relationship curve between pressure and displacement obtained through gas calibration, providing a basis for online control and adjustment of the metal vapor. The metal vapor pressure detecting device and method of this invention can monitor metal vapor pressure in real time over a temperature range from room temperature to 1000°C, providing a stable detection and adjustment basis for metal evaporation control. The metal vapor pressure detecting device and method of this invention are suitable for detecting the pressure of various metal vapors and have good structural flexibility and process compatibility. The metal vapor pressure detecting device of this invention has a simple structure and is suitable for various operating conditions and environments, especially for detecting metal vapor pressure under vacuum conditions. It is cost-effective, easy to operate and maintain, and facilitates automatic remote operation.

[0045] It will be appreciated by those skilled in the art that the above examples are merely illustrative of the present invention and are not intended to limit the present invention. Modifications and variations of the above examples that fall within the spirit of the present invention are intended to be encompassed by the claims of the present invention.

Claims

1. A device for detecting metal vapor pressure, the device including a metal evaporation chamber and a pressure detection mechanism disposed outside the metal evaporation chamber; The metal evaporation chamber is used to melt and vaporize metal to form metal vapor; and a pressure detection mechanism for detecting metal vapor pressure, the pressure detection mechanism including a displacement generating system and a displacement detection system disposed on the displacement generating system; the displacement generating system including a displacement slider sleeve, a displacement slider disposed in the displacement slider sleeve, and a pressure balance spring connected to the displacement slider; the displacement slider sleeve is in communication with the metal evaporation chamber, and the displacement slider slides along the displacement slider sleeve under the pressure of the metal vapor; one end of the pressure balance spring is connected to the displacement slider and the other end is connected to the displacement detection system; and the pressure detection mechanism determines the pressure of the metal vapor according to the coordinates of the displacement slider detected by the displacement detection system.

2. 2. The metal vapor pressure detection device according to claim 1, wherein the displacement detection system further includes a fixing bracket and a displacement sensor; the fixing bracket is provided with a spring limiting block connected to the pressure balance spring, a fixing ring attached to the displacement slider sleeve, and a sensor fixing block for mounting the displacement sensor; and the spring limiting block is disposed between the fixing ring and the sensor fixing block, and the spring limiting block is provided with a light-transmitting hole corresponding to the displacement sensor.

3. 2. The metal vapor pressure detection apparatus of claim 1, wherein the displacement generating system further comprises a heater disposed in the displacement slider sleeve.

4. 2. The metal vapor pressure detection device according to claim 1, wherein the pressure balance spring is composed of 1 to 10 springs with a wire diameter of 0.1 to 6 mm.

5. 3. The metal vapor pressure detection device according to claim 2, wherein the center of the displacement sensor, the center of the light-transmitting hole, and the center of the pressure balance spring are on the same axis.

6. 3. The metal vapor pressure detection device of claim 2, wherein the pressure detection mechanism further includes an intelligent processing module; and the intelligent processing module is used to receive the coordinates of the displacement slider detected by the displacement sensor and calculate the displacement of the displacement slider, and obtain the pressure of the metal vapor according to the displacement of the displacement slider and a relationship curve between the displacement and pressure obtained by calibration.

7. 10. A method for detecting metal vapor pressure, wherein the metal vapor pressure detection device according to claim 1 is used to detect metal vapor pressure, and the detection method includes the following steps: S1: Inject gases with different pressures into the metal vapor chamber of the metal vapor pressure detection device for repeated calibration, and obtain a relationship curve between the pressure and the displacement of the displacement slider; S2 melting and evaporating metal to form metal vapor in the metal evaporation chamber, in which the displacement slider slides along a displacement slider sleeve under the pressure of the metal vapor, and a pressure balance spring gradually contracts under the extrusion of the displacement slider until the displacement slider reaches force equilibrium and stops moving, and a displacement detection system detects the coordinates of the displacement slider in real time to obtain the displacement of the displacement slider; and S3 obtaining the pressure of the metal vapor according to the relationship curve between the pressure and the displacement of the displacement slider obtained in step S1 and the displacement of the displacement slider obtained in step S2. A method for detecting metal vapor pressure, comprising:

8. In step S1, the gas is 1×10 ３ ~1 x 10 ５ The method for detecting metal vapor pressure according to claim 7, wherein the metal vapor pressure is 0.01 Pa.

9. In step S2, the displacement ΔS of the displacement slider is ΔS=|S ｔ -S ０ | where ΔS is the displacement of the displacement slider (mm); S ｔ represents the coordinate (mm) of the displacement slider when it reaches force equilibrium after movement; and S ０ represents the coordinate (mm) of the displacement slider at the zero position. The method for detecting metal vapor pressure according to claim 7, wherein

10. 8. The metal vapor pressure detection method according to claim 7, wherein in step S2, the displacement slider sleeve is heated to a temperature of 20 to 1000° C. by a heater while the displacement slider is moving.

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