X-ray tube

Abstract

To provide an X-ray tube that operates stably over a long period of time.SOLUTION: An X-ray tube 1 includes a cathode 30, an anode 40, a cathode hood 50, a first X-ray transmission window (60), and an outer enclosure 10. The anode 40 has an anode target 45 on which a focus is formed to emit X-rays. The cathode hood 50 has a first aperture (50w) through which X-rays pass. The first X-ray transmission window blocks at least a portion of the first aperture. The outer enclosure 10 houses the cathode 30, the anode target 45, the cathode hood 50, and the first X-ray transmission window.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE INVENTION An embodiment of the present invention relates to an X-ray tube. [Background technology]

[0002] Fixed anode X-ray tubes are known as X-ray sources that are installed in non-destructive testing devices and generate X-rays continuously for long periods of time. These fixed anode X-ray tubes include an anode target that generates X-rays through electron collisions, a cathode with an electron emission source that emits electrons toward the anode target, and an envelope that maintains a predetermined degree of vacuum around at least the anode target and the electron emission source.

[0003] The envelope has a glass container to maintain high-voltage insulation of the X-ray tube. An opening is formed in the glass container, and the opening is airtightly closed by an X-ray transmission assembly. The X-ray transmission assembly has a window frame that faces the opening and is airtightly attached to the envelope, and an X-ray transmission window that is housed in the window frame and made of an X-ray transparent metal such as beryllium, and that allows X-rays to pass through.

[0004] Electrons emitted from the electron emitter are accelerated by the voltage (X-ray tube voltage) applied between the anode target and the cathode, and collide with the focal point on the target surface of the anode target. The electrons that collide with the anode target are converted into heat and X-rays on the anode target, and some of the generated X-rays are output through the X-ray transmission window.

[0005] Some of the electrons that collide with the anode target become recoil electrons and scatter without being converted into heat or X-rays. For example, the recoil electrons may collide with the envelope, causing the envelope to become charged, which may cause undesired discharges inside the X-ray tube, and other problems with the X-ray tube. Therefore, X-ray tubes equipped with a cathode hood to capture the recoil electrons heading toward the envelope are known. The cathode hood has an opening, and the X-rays generated by the anode target pass through the opening in the cathode hood and The light passes through the X-ray transparent window of the X-ray transparent assembly and is emitted outside the X-ray tube.

[0006] When focusing on capturing recoil electrons, it is desirable for the X-ray tube to have a structure that can capture recoil electrons at a position close to the target surface of the anode target. Therefore, the X-ray tube may have a hood structure provided on the anode target side instead of a cathode hood. However, such a hood structure is susceptible to adverse thermal effects from the anode target and is easily damaged. When focusing on thermal effects, it is desirable for the X-ray tube to have a cathode hood provided on the cathode side, which has a smaller thermal load than the anode target. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-33862 [Patent Document 2] Japanese Utility Model Application Publication No. 4-98254 Summary of the Invention [Problem to be solved by the invention]

[0008] This embodiment provides an X-ray tube that operates stably for a long period of time. [Means for solving the problem]

[0009] The X-ray tube according to one embodiment comprises: a cathode having an electron emission source that emits electrons; an anode having an anode target facing the cathode in a direction along the X-ray tube axis and having a focal point at which X-rays are emitted when electrons emitted from the electron emission source collide with the anode target; a cathode hood that surrounds the anode target and the trajectory of electrons from the electron emission source toward the focal point, and that has a first opening formed therein through which X-rays pass; a first X-ray transmissive window that covers at least a portion of the first opening and has an X-ray transmittance higher than an X-ray transmittance of the cathode hood; an envelope containing the cathode, the anode target, the cathode hood, and the first X-ray transmissive window; and, a first holding member; the first X-ray transmissive window has a first region facing the first opening, a frame-shaped second region surrounding the first region, and a first side surface overlapping an outer edge of the second region, the cathode hood has an inner circumferential surface surrounding the electron trajectory and the anode target, an outer circumferential surface opposite the inner circumferential surface, a first hole that opens to the outer circumferential surface and is recessed toward the inner circumferential surface and accommodates the first X-ray transmissive window, a first bottom surface of the first hole, and an inner wall surface of the first hole, the first openings are open to the inner circumferential surface and the first bottom surface, the first bottom surface has a frame-shaped overlap space facing the second region of the first X-ray transmissive window, the first side surface of the first X-ray transmissive window faces the inner wall surface; the first presser member faces the second region of the first X-ray transmissive window, sandwiches the second region of the first X-ray transmissive window together with the overlap, has a frame-like shape and a second side surface facing the inner wall surface, and is formed of a metal softer than a material forming the cathode hood, the second side surface has a contact surface that is pressed against the inner wall surface, The first X-ray transmission window is maintained in a state where it is pressed against the overlap by the first pressing member. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 is a cross-sectional view showing an X-ray tube according to an embodiment. [Figure 2] FIG. 2 is a front view showing the cathode hood assembly of the X-ray tube according to the embodiment. [Figure 3] FIG. 3 is a cross-sectional view of the cathode hood assembly of FIG. 2 taken along line III-III. [Figure 4] FIG. 4 is an exploded perspective view showing the cathode hood assembly according to the embodiment. [Figure 5] FIG. 5 is a cross-sectional view showing a cathode hood assembly of an X-ray tube according to a first modification of the above embodiment. [Figure 6] FIG. 6 is an exploded perspective view showing the cathode hood assembly according to the first modification. [Figure 7] FIG. 7 is an exploded perspective view showing a cathode hood assembly of an X-ray tube according to a second modification of the above embodiment. [Figure 8] FIG. 8 is a cross-sectional view of the cathode hood assembly of FIG. 7 taken along line VIII-VIII. [Figure 9] FIG. 9 is an enlarged perspective view of a portion of the cathode hood assembly according to the second modification. [Figure 10] FIG. 10 is an enlarged perspective view showing a part of the cathode hood assembly of the X-ray tube according to the third modification of the embodiment. [Figure 11]FIG. 11 is a perspective view showing a cathode hood assembly of an X-ray tube according to a fourth modification of the above embodiment. [Figure 12] FIG. 12 is an enlarged front view of a portion of the cathode hood assembly according to the fourth modification. [Figure 13] FIG. 13 is a perspective view showing a cathode hood assembly of an X-ray tube according to a fifth modification of the above embodiment. [Figure 14] FIG. 14 is a cross-sectional view of the cathode hood assembly of FIG. 13 taken along line XIV-XIV. [Figure 15] FIG. 15 is a perspective view showing a cathode hood assembly of an X-ray tube according to a sixth modification of the above embodiment. [Figure 16] FIG. 16 is a cross-sectional view of the cathode hood assembly of FIG. 15 taken along line XVI-XVI. DETAILED DESCRIPTION OF THE INVENTION

[0011] (One embodiment) An embodiment of the present invention will be described below with reference to the drawings. The disclosure is merely an example, and appropriate modifications that a person skilled in the art can easily conceive while maintaining the gist of the invention are naturally included within the scope of the present invention. Furthermore, the drawings may be schematic in terms of the width, thickness, shape, etc. of each part compared to the actual embodiment for clarity of explanation, but these are merely examples and are not intended to limit the interpretation of the present invention. Furthermore, in this specification and each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions may be omitted as appropriate.

[0012] Fig. 1 is a cross-sectional view showing an X-ray tube 1 according to this embodiment. As shown in Fig. 1, the X-ray tube 1 is a fixed anode type X-ray tube. The X-ray tube 1 includes an envelope 10, an X-ray transmission assembly 20, a cathode 30, an anode 40, and a cathode hood assembly 5.

[0013] The envelope 10 is made of glass and metal. In this embodiment, the envelope 10 is made of a first metal container 11, a second metal container 12, and a glass container 13. The glass container 13 is made of, for example, borosilicate glass. The glass container 13 can be formed, for example, by hermetically joining multiple glass members by welding. The glass container 13 is formed in a cylindrical shape with one end closed. The glass container 13 has a cylindrical portion 13a. The cylindrical portion 13a surrounds the cathode hood assembly 5 and the like. The cylindrical portion 13a (glass container 13) has an opening 13w as a second opening. In this embodiment, the opening 13w is circular. The opening 13w is located near a target surface 43, which will be described later. By forming the opening 13w, attenuation of X-rays by the glass container 13 can be prevented.

[0014] The first metal container 11 is located outside the glass container 13 and is provided so as to surround the opening 13w. The first metal container 11 is formed in an annular shape using, for example, Kovar (KOV). The first metal container 11 is airtightly connected to the glass container 13 by fusion. The first metal container 11 is formed with a flange for coupling with the X-ray transmission assembly 20. In this embodiment, the first metal container 11 (flange) is formed in a circular frame shape.

[0015] The second metal container 12 is airtightly connected to the other end of the glass container 13 and the anode 40. The second metal container 12 is formed into a ring shape using, for example, KOV. The second metal container 12 is airtightly connected to the glass container 13 by fusion bonding. The envelope 10 accommodates the cathode 30, the anode 40, the cathode hood assembly 5, etc., and is formed so that a portion of the anode 40 is exposed.

[0016] The X-ray transmission assembly 20 is attached to the first metal container 11 (envelope 10) and airtightly closes the opening 13w. This seals the envelope 10. A vacuum state is maintained inside the envelope 10.

[0017] X-ray transmission assembly 20 has a window frame 21, a window frame flange 21a, an X-ray transmission window 22 as a second X-ray transmission window, and a flange 23. The window frame 21 surrounds the opening 13w. A window frame flange 21a for connecting to the first metal casing 11 is airtightly attached to the window frame 21. In this embodiment, the window frame 21 is formed in a conical frame shape. The window frame 21 is airtightly attached to the first metal casing 11 (enclosure 10). The window frame 21 is made of a metal, for example, copper. The window frame 21 is electrically insulated from at least one of the cathode 30 and the anode 40. In this embodiment, the window frame 21 is electrically insulated from both the cathode 30 and the anode 40. The window frame 21 is designed to have sufficient voltage resistance characteristics to withstand the high voltage between the cathode 30 and the anode 40.

[0018] The window frame flange 21a is formed of a metal, such as iron. In this embodiment, the window frame 21 and the window frame flange 21a are fixed by brazing. In this embodiment, the window frame 21 is airtightly attached to the envelope 10 by welding the window frame flange 21a to the flange of the first metal container 11.

[0019] The window frame 21 has a through hole 21h and a mounting surface 21s. In this embodiment, the through hole 21h is circular, and the mounting surface 21s is circular frame-shaped. The mounting surface 21s is flat. By forming the through hole 21h, it is possible to prevent attenuation or blocking of X-rays by the window frame 21. The mounting surface 21s is formed outside the through hole 21h and forms part of the envelope 10.

[0020] The X-ray transparent window 22 allows X-rays to pass through and constitutes a part of the envelope. The X-ray transparent window 22 can be formed using a material that is X-ray transparent and has high mechanical strength. The X-ray transparent window 22 has a higher X-ray transmittance than that of the window frame 21. In this embodiment, the X-ray transparent window 22 is formed from a Be plate (beryllium thin plate: a thin plate using beryllium).

[0021] X-ray transparent window 22 is formed in a flat plate shape. In this embodiment, X-ray transparent window 22 is formed in a disk shape. X-ray transparent window 22 has an attachment region facing attachment surface 21s and attached to window frame 21, and an X-ray transparent region facing through hole 21h.

[0022] The mounting area of ​​X-ray transparent window 22 is airtightly mounted to mounting surface 21s. For example, X-ray transparent window 22 is mounted to window frame 21 by brazing it to mounting surface 21s using a brazing material (not shown). In this way, X-ray transparent window 22 is housed in window frame 21, and together with window frame 21, can airtightly close opening 13w of envelope 10. Window frame 21 is located between opening 13w and flange 23.

[0023] The flange 23 is located on the opposite side of the window frame 21 from the first metallic container 11 and is attached to the window frame 21. In this embodiment, the flange 23 is formed in a circular frame shape. The flange 23 is formed of a metal, such as stainless steel. The flange 23 and the window frame 21 are brazed together, thereby attaching the flange 23 to the window frame 21.

[0024] The flange 23 has a through-hole 23h. In this embodiment, the through-hole 23h is circular. By forming the through-hole 23h, it is possible to prevent the flange 23 from attenuating or blocking X-rays. As described above, the first metal container 11, the glass container 13, the window frame 21, and the flange 23 are not present on the emission path of X-rays that pass through the X-ray transmitting window 22.

[0025] The flange 23 also has a screw hole 23a and an annular housing groove 23b. For example, when the X-ray tube 1 is housed inside a housing (not shown) and fixed to the housing, the screw hole 23a can be used to screw the X-ray tube 1 to the housing. By housing an O-ring (not shown) in the housing groove 23b, the O-ring can seal the gap between the flange 23 and the housing. For example, if a coolant is present in the space between the housing and the X-ray tube 1, the O-ring can prevent the coolant from leaking. In addition, any locations where the coolant may leak may be sealed appropriately. For example, the window frame 21 is further attached liquid-tight to the first metal container 11, and the flange 23 is further attached liquid-tight to the window frame 21.

[0026] The cathode 30 is housed in the envelope 10. The cathode 30 is arranged at a distance from the anode 40 in the direction along the X-ray tube axis A. The cathode 30 has a filament 31 as an electron emission source, filament terminals 32a and 32b, cathode pins 33a, 33b, and 33c, insulating members 35a and 35b, a support member 36, and a focusing electrode 37.

[0027] The filament 31 emits electrons that irradiate the anode 40. In this embodiment, the filament 31 has a filament coil. The filament terminal 32a supports one extension of the filament 31 and is electrically connected to the filament 31. The filament terminal 32b supports the other extension of the filament 31 and is electrically connected to the filament 31.

[0028] The cathode pins 33a, 33b, and 33c are conductive. In this embodiment, the cathode pins 33a, 33b, and 33c are made of metal and formed into a rod shape. The cathode pins 33a, 33b, and 33c are attached to the glass container 13. The cathode pins 33a, 33b, and 33c are airtightly connected to the glass container 13 by fusion. The cathode pins 33a, 33b, and 33c each have one end located outside the envelope 10. The cathode pin 33a is electrically connected to the filament terminal 32a, the cathode pin 33b is electrically connected to the filament terminal 32b, and the cathode pin 33c is electrically connected to the focusing electrode 37.

[0029] The focusing electrode 37 is formed in a cylindrical shape. The focusing electrode 37 has a focusing groove 37a and a storage groove 37b. The focusing groove 37a opens on the anode 40 side and has the function of focusing electrons. The storage groove 37b is formed on the bottom surface of the focusing groove 37a, opens on the anode 40 side, and stores the filament 31. The focusing electrode 37 also has a through hole 37c for passing the filament terminal 32a therethrough, and a through hole 37d for passing the other extending portion of the filament 31 and the filament terminal 32b therethrough.

[0030] The insulating member 35a is provided in the through hole 37c and fixed to the focusing electrode 37. The insulating member 35a is formed in a cylindrical shape, and the filament terminal 32a is inserted inside the insulating member 35a. The filament terminal 32a is in contact with a connecting part (sleeve) 9a fixed to the insulating member 35a. The insulating member 35b is provided in the through-hole 37d and fixed to the focusing electrode 37. The insulating member 35b is formed in a cylindrical shape, and the filament terminal 32b is inserted inside the insulating member 35b. The filament terminal 32b is in contact with a connecting part (sleeve) 9b fixed to the insulating member 35b. From the above, the filament 31 is electrically insulated from the focusing electrode 37 .

[0031] The support member 36 is fixed to the envelope 10 and supports the focusing electrode 37. Therefore, the focusing electrode 37 is fixed to the envelope 10. The support member 36 is made of glass-sealed metal. The support member 36 is fixed to the glass container 13 by glass fusion. In this embodiment, the support member 36 is made of KOV.

[0032] The focusing electrode 37 surrounds the trajectory of electrons traveling from the filament 31 toward the anode 40. The focusing electrode 37 has a function of focusing the electrons. In this embodiment, the focusing electrode 37 extends in a direction parallel to the X-ray tube axis A.

[0033] The anode 40 is housed in the envelope 10. The anode 40 includes an anode target 45 and an anode extension 46 connected to the anode target 45. The anode target 45 faces the cathode 30 in the direction along the X-ray tube axis A. The anode target 45 includes an anode target body 41 and a target layer 42 provided on the end face of the anode target body 41 facing the cathode 30. The anode target body 41 is formed in a cylindrical shape. The anode target body 41 is formed of a highly thermally conductive metal such as copper or a copper alloy.

[0034] The target layer 42 is formed in a disk shape. The target layer 42 is made of a high-melting-point metal such as tungsten (W) or a tungsten alloy. The target layer 42 has a target surface 43 on the side facing the cathode 30. When electrons emitted from the filament 31 collide with the target surface 43, a focal point F is formed that emits X-rays.

[0035] The anode extension 46 is formed in a cylindrical shape from a highly thermally conductive metal such as copper or a copper alloy, similar to the anode target body 41. The anode extension 46 fixes the anode target body 41 and transfers the heat generated in the anode target 45 to the surroundings. The second metal container 12 is airtightly fixed to at least one of the anode target body 41 and the anode extension 46. Here, the second metal container 12 is airtightly connected to the anode extension 46 by brazing.

[0036] As shown in FIG. 1, the cathode hood assembly 5 includes a cathode hood 50 and an X-ray transmissive window 60 as a first X-ray transmissive window. The cathode hood 50 is formed in a cylindrical shape. The cathode hood 50 surrounds the anode target 45. A gap is provided between the cathode hood 50 and the outer peripheral surface of the anode target body 41 around the entire circumference. A gap is also provided between the cathode hood 50 and the glass container 13 around the entire circumference. The cathode hood 50 is formed of metal. The cathode hood 50 is set to the same potential as the cathode 30. In this embodiment, one end of the cathode hood 50 is fixed to the focusing electrode 37, and the cathode hood 50 is set to the same potential as the focusing electrode 37.

[0037] The cathode hood 50 surrounds the trajectory of electrons traveling from the filament 31 toward the focal point F and the anode target 45. The cathode hood 50 has an opening 50w formed therein as a first opening through which X-rays pass. The opening 50w is located between the target surface 43 and the X-ray transmissive window 22. In this embodiment, the opening 50w is located between the target surface 43 and the X-ray transmissive window 22 in a vertical direction d perpendicular to the X-ray tube axis A. By providing the opening 50w, the absorption rate of the utilized X-rays by the cathode hood 50 can be reduced to 0%. The cathode hood 50 is made of a metal such as stainless steel or nickel. The cathode hood 50 may also be made by plating an iron body with nickel.

[0038] The X-ray tube 1 includes an X-ray transmitting window 60. The X-ray transmitting window 60 has a higher X-ray transmittance than the cathode hood 50. In this embodiment, the X-ray transmitting window 60 is made of beryllium. The X-ray transmitting window 60 is a Be plate. The opening 13w of the envelope 10 faces the X-ray transmitting window 60.

[0039] Fig. 2 is a front view showing the cathode hood assembly 5 of the X-ray tube 1 according to this embodiment. Fig. 3 is a cross-sectional view showing the cathode hood assembly 5 of Fig. 2 along line III-III. Fig. 4 is an exploded perspective view showing the cathode hood assembly 5 according to this embodiment. 1 to 4, the X-ray transparent window 60 covers at least a portion of the opening 50w of the cathode hood 50. In this embodiment, the X-ray transparent window 60 covers the entire opening 50w of the cathode hood 50. The X-ray transparent window 60 has a first region 60a facing the opening 50w of the cathode hood 50, a frame-shaped second region 60b surrounding the first region, and a side surface 60s overlapping the outer edge of the second region. The side surface 60s functions as a first side surface.

[0040] The cathode hood 50 has an inner peripheral surface 50i, an outer peripheral surface 50o opposite the inner peripheral surface, a hole 50a, a bottom surface 50s1 of the hole 50a, and an inner wall surface 50s2 of the hole 50a. The inner peripheral surface 50i surrounds the electron trajectory and the anode target 45. The hole 50a functions as a first hole. The bottom surface 50s1 functions as a first bottom surface.

[0041] The hole 50a opens to the outer peripheral surface 50o, is recessed toward the inner peripheral surface 50i, and accommodates the X-ray transparent window 60. When viewed from the front, the hole 50a and the opening 50w each have a circular shape. The opening 50w opens to the inner peripheral surface 50i and a bottom surface 50s1. The bottom surface 50s1 has a frame-shaped overlap 50t that faces the second region 60b of the X-ray transparent window 60. The side surface 60s of the X-ray transparent window 60 faces the inner wall surface 50s2.

[0042] The cathode hood 50 has a first portion 51, a second portion 52, a third portion 53, and a fourth portion 54 aligned in a direction along the X-ray tube axis A. The first portion 51 has a thickness T1 and is formed in a cylindrical shape. The third portion 53 has a thickness T3 and is formed in a cylindrical shape. The second portion 52 has a thickness T2 that is larger than both the thicknesses T1 and T3 and is also formed in a cylindrical shape.

[0043] Here, the thickness T of the cathode hood 50 corresponds to the shortest distance from the inner peripheral surface 50i to the outer peripheral surface 50o of the cathode hood 50. In this embodiment, the thickness T of the cathode hood 50 corresponds to the linear distance from the inner peripheral surface 50i to the outer peripheral surface 50o of the cathode hood 50 in the vertical direction d. The fourth portion 54 has an outer surface formed by a curved surface. The outer surface of the fourth portion 54 is continuous with the inner circumferential surface 50i of the third portion 53. The fourth portion 54 is formed so as not to concentrate the electric field in a specific location. In the cathode hood 50, the opening 50w, the hole 50a, the bottom surface 50s1, the overlapping portion 50t, and the inner wall surface 50s2 are formed in the second portion 52.

[0044] The cathode hood assembly 5 further includes a presser member 70 serving as a first presser member. The presser member 70 has a frame-like shape. The presser member 70 faces the second region 60b of the X-ray transparent window 60 and, together with the overlap 50t, sandwiches the second region 60b of the X-ray transparent window 60. The presser member 70 has a side surface 70s facing the inner wall surface 50s2. The side surface 70s functions as a second side surface.

[0045] The retaining member 70 and the second portion 52 of the cathode hood 50 are welded together. In this embodiment, the retaining member 70 and the second portion 52 of the cathode hood 50 are welded together at four locations, and four weld marks WE are formed in the cathode hood assembly 5. The X-ray transmissive window 60 is maintained in a state where it is pressed down by the overlap margin 50t by the retaining member 70 fixed to the cathode hood 50. TIG (Tungsten Inert Gas) welding or laser welding can be used for the above welding. The X-ray tube 1 is configured as described above.

[0046] In operation of the X-ray tube 1, a high voltage (X-ray tube voltage) of several tens of kV to several hundreds of kV is applied between the cathode 30 and the anode target 45, generating a strong electric field between the cathode 30 and the anode target 45. In this embodiment, the X-ray tube 1 is a cathode-grounded type X-ray tube, in which the cathode 30 is grounded and a positive high voltage is applied to the anode target 45.

[0047] However, the X-ray tube 1 may be an anode-grounded X-ray tube in which the anode target 45 is grounded and a negative high voltage is applied to the cathode 30. Alternatively, the X-ray tube 1 may be a neutral-grounded X-ray tube in which a positive high voltage is applied to the anode target 45 and a negative high voltage is applied to the cathode 30.

[0048] Electrons emitted from the filament 31 are accelerated by the X-ray tube voltage to form an electron beam. At this time, the electron beam is focused by the focusing electrode 37. The electron beam collides with the target surface 43 of the target layer 42, forming a focal point F, and is converted into thermal energy and X-rays. Of the X-rays generated from the focal point F, the usable X-rays pass through the opening 50w of the cathode hood 50, transmit through the X-ray transmissive window 60, pass through the opening 13w of the envelope 10, transmit through the X-ray transmissive window 22, and are emitted to the outside of the X-ray tube 1.

[0049] The X-ray tube 1 according to one embodiment configured as described above includes the envelope 10, the cathode 30, the anode 40, and the cathode hood 50. Even if recoil electrons that are scattered without being converted into heat or X-rays are generated among the electrons that collide with the anode target, the cathode hood 50 can capture the recoil electrons.

[0050] Recoil electrons fly in all directions and are driven by the electric field toward a lower potential. Some of these recoil electrons may pass through the opening 50w of the cathode hood 50 and collide with the envelope 10. Positive or negative charging of the envelope 10 depending on the secondary electron emission coefficient may increase the likelihood of discharge, and electron impact may damage the envelope 10, potentially making it impossible to maintain the vacuum-tight state inside the envelope 10. The discharge referred to here is a discharge between the envelope 10 (glass vessel 13) and the cathode hood 50. Other examples of the discharge may include a discharge between the X-ray transmission window 22 and the cathode hood 50.

[0051] Therefore, the X-ray tube 1 further includes an X-ray transmissive window 60. The X-ray transmissive window 60 can block at least a portion of the opening 50w of the cathode hood 50. Even if recoil electrons pass through the opening 50w, the X-ray transmissive window 60 can capture the recoil electrons that have passed through the opening 50w. The X-ray transparent window 60 makes it difficult for the recoil electrons that have passed through the opening 50w to collide with the envelope 10 (glass container 13) and the X-ray transparent window 22. Alternatively, the X-ray transparent window 60 can prevent the recoil electrons that have passed through the opening 50w from colliding with the envelope 10 (glass container 13) and the X-ray transparent window 22.

[0052] The X-ray tube 1 equipped with the X-ray transmissive window 60 can improve the voltage resistance performance compared to the X-ray tube 1 not equipped with the X-ray transmissive window 60. Therefore, it is possible to obtain an X-ray tube 1 that operates stably for a long period of time.

[0053] (Variation 1) Next, a first modification of the above embodiment will be described. Fig. 5 is a cross-sectional view showing the cathode hood assembly 5 of the X-ray tube 1 according to this first modification. Fig. 6 is an exploded perspective view showing the cathode hood assembly 5 according to this first modification. Note that the brazing material 80 is not shown in Fig. 6. Furthermore, the X-ray tube 1 according to this first modification has the same configuration as the X-ray tube 1 according to the above embodiment, except for the configuration described in this first modification.

[0054] As shown in Figures 5 and 6, the X-ray transmissive window 60 may be fixed to the cathode hood 50 by brazing (vacuum brazing or hydrogen brazing) instead of welding. The cathode hood assembly 5 includes a brazing material 80 instead of a retaining member 70. The brazing material 80 is located between the cathode hood 50 and the X-ray transmissive window 60 and fixes the X-ray transmissive window 60 to the cathode hood 50. When the hole 50a and the opening 50w are viewed from the front, the hole 50a has a circular shape, and the opening 50w has a rectangular shape (rounded rectangle). The major axis direction of the opening 50w is perpendicular to a direction parallel to the X-ray tube axis A and is also perpendicular to a vertical direction d that is perpendicular to the X-ray tube axis A and points toward the center of the hole 50a.

[0055] The X-ray transmission window 60 has a first region 60a facing the opening 50w and a second region 60b located outside the first region 60a. In this first modification, the second region 60b is divided into two regions on either side of the first region 60a. The bottom surface 50s1 of the hole 50a of the cathode hood 50 has an overlapping portion 50t facing the second region 60b of the X-ray transmission window 60. In this first modification, the overlapping portion 50t is provided in two parts, one on each side of the opening 50w.

[0056] The brazing material 80 is located between the overlapping portion 50t and the second region 60b of the X-ray transparent window 60. The brazing material 80 fixes the second region 60b of the X-ray transparent window 60 to the overlapping portion 50t. In this first modification, the brazing material 80 is provided in each space between the overlapping portion 50t and the second region 60b.

[0057] Furthermore, the cathode hood 50 has grooves G. In this first modification, the cathode hood 50 has two grooves G located on both sides of the opening 50w. Each groove G is located between the opening 50w and the overlap 50t, opens to the bottom surface 50s1, and is recessed toward the inner circumferential surface 50i. Forming the grooves G in the cathode hood 50 makes it possible to accommodate excess brazing material 80 during the manufacturing process of the cathode hood assembly 5. The brazing material 80 is less likely to leak into the opening 50w.

[0058] In the present modified example 1, the groove G extends in the longitudinal direction of the opening 50w, and both ends of the groove G are connected to the inner wall surface 50s2. During the manufacturing process of the cathode hood assembly 5, excess brazing material 80 always passes through the groove G on its way from above the overlap 50t toward the opening 50w. This prevents the brazing material 80 from leaking into the opening 50w.

[0059] In this first modification, the same effects as those of the above embodiment can be obtained. The recoil electrons collide with the X-ray transmissive window 60 and are converted into thermal energy at the X-ray transmissive window 60. If the contact area between the X-ray transmissive window 60 and the cathode hood 50 is small, the heat transfer path between the X-ray transmissive window 60 and the cathode hood 50 is insufficient, resulting in insufficient heat transfer from the X-ray transmissive window 60 to the cathode hood 50. For example, the temperature of the X-ray transmissive window 60 may rise locally, potentially resulting in damage to the X-ray transmissive window 60. If the X-ray transmissive window 60 is damaged during operation of the X-ray tube 1, the amount of X-rays emitted by the X-ray tube 1 will become non-uniform. This will result in abnormalities in the X-ray images captured by the X-ray device including the X-ray tube 1. This may also result in malfunctions such as the X-ray device shutting down.

[0060] Therefore, in this first modification, the X-ray transparent window 60 is soldered to the cathode hood 50. The solder material 80 can ensure a sufficient heat transfer path from the X-ray transparent window 60 to the cathode hood 50. It is possible to suppress a temperature rise in the X-ray transparent window 60 when a recoil electron collides with the X-ray transparent window 60. The X-ray tube 1 of this first modification can suppress damage to the X-ray transparent window 60 compared to the X-ray tube 1 of the above embodiment. Alternatively, the X-ray tube 1 of this first modification can prevent damage to the X-ray transparent window 60.

[0061] The X-ray tube 1 is formed without a retaining member 70 welded to the cathode hood 50. There are no weld marks (WE) on the outer peripheral surface 50o of the cathode hood 50. No protrusions, which could cause electric field concentration and discharge, are formed on the outer peripheral surface 50o of the cathode hood 50. The X-ray tube 1 of this modified example 1 can achieve improved voltage resistance performance compared to the X-ray tube 1 of the above embodiment.

[0062] The cathode hood 50 has a groove G. This can prevent the brazing material 80 from leaking into the opening 50w, thereby preventing abnormalities from occurring in the X-ray image taken by the X-ray device.

[0063] The shape of the opening 50w of the cathode hood 50 is not limited to a rectangle, but may be a circle. For example, when the shape of the opening 50w is a circle, the overlap margin 50t and the groove G each have a circular ring shape, and the groove G extends continuously.

[0064] (Variation 2) Next, a second modification of the above embodiment will be described. Fig. 7 is an exploded perspective view showing the cathode hood assembly 5 of the X-ray tube 1 according to this second modification. Fig. 8 is a cross-sectional view showing the cathode hood assembly 5 of Fig. 7 taken along line VIII-VIII. Fig. 9 is an enlarged perspective view showing a portion of the cathode hood assembly 5 according to this second modification. Furthermore, the X-ray tube 1 according to this second modification has the same configuration as the X-ray tube 1 according to the above embodiment, except for the configuration described in this second modification.

[0065] 7 to 9, the X-ray transparent window 60 is not soldered to the cathode hood 50. The cathode hood assembly 5 further includes a presser member 90. In the present second modification, the cathode hood assembly 5 includes four presser members 90 as the plurality of presser members 90. Each presser member 90 functions as a second presser member. The X-ray transparent window 60 has a first region 60a facing the opening 50w, a frame-shaped second region 60b surrounding the first region 60a, and a side surface 60s overlapping the outer edge of the second region 60b.

[0066] The cathode hood 50 has an inner peripheral surface 50i, an outer peripheral surface 50o, a hole 50a, a bottom surface 50s1, an inner wall surface 50s2, and a concave surface 50c that opens into the inner wall surface. In the present modification 2, the cathode hood 50 has four concave surfaces 50c as the multiple concave surfaces 50c. Furthermore, each concave surface 50c opens not only into the inner wall surface 50s2 but also into the outer peripheral surface 50o.

[0067] The bottom surface 50s1 of the cathode hood 50 has a frame-shaped overlap 50t facing the second region 60b of the X-ray transparent window 60. The side surface 60s of the X-ray transparent window 60 faces the inner wall surface 50s2. The retaining member 70 has a frame-like shape. The retaining member 70 faces the second region 60b of the X-ray transparent window 60 and sandwiches the second region 60b of the X-ray transparent window 60 together with the overlap 50t. The retaining member 70 has a side surface 70s facing the inner wall surface 50s2.

[0068] The holding member 90 is located in a space surrounded by the concave surface 50c of the cathode hood 50 and the side surface 70s of the holding member 70. The holding member 90 is made of a metal that is softer than the material forming the cathode hood 50. In this second modification, the holding member 90 is made of copper. The holding member 90 has a contact surface 90c that is pressed against the side surface 70s of the holding member 70.

[0069] In the present modified example 2, the concave surface 50c is a round concave surface and a curved surface. The pressing member 90 is fixed to the cathode hood 50 with brazing material 100. The pressing member 90 has a round recess 90a that extends in a direction from the inner peripheral surface 50i toward the outer peripheral surface 50o of the cathode hood 50 and opens toward the side surface 70s. In the manufacturing process of the cathode hood assembly 5, after the X-ray transmissive window 60 is installed, the recess 90a is widened, thereby allowing the contact surface 90c of the pressing member 90 to be firmly adhered to the side surface 70s of the pressing member 70.

[0070] As described above, the pressing member 90 physically fixes the pressing member 70 by caulking. The X-ray transmission window 60 is maintained in a state where it is pressed down by the pressing members 70 and 90 at the overlapping portion 50t. The cathode hood assembly 5 may be formed without the brazing material 100. For example, the pressing member 90 may be fixed to the concave surface 50c of the cathode hood 50 by caulking.

[0071] In this second modification, the same effects as those of the above embodiment can be obtained. When fixing the relative position of the X-ray transmissive window 60 with respect to the cathode hood 50, the retaining member 90, which is made of a metal softer than the material forming the cathode hood 50, is plastically deformed instead of the cathode hood 50. In other words, the recess 90a of the retaining member 90 is widened. In the manufacturing process of the cathode hood assembly 5, stress applied to the cathode hood 50 can be suppressed, and plastic deformation of the cathode hood 50 can be suppressed or prevented.

[0072] As a result of the above, it is possible to suppress or prevent problems that may occur when the cathode hood 50 is plastically deformed. For example, it is possible to suppress or prevent problems such as discharge, abnormalities in the focal spot shape, and abnormalities in the focal spot size. As a result, it is possible to obtain an X-ray tube 1 with a high manufacturing yield. Furthermore, the copper retaining member 90 has excellent thermal conductivity, and therefore can transfer heat generated in the X-ray transmission window 60 to the cathode hood 50 well.

[0073] (Variation 3) Next, a third modification of the above embodiment will be described. Fig. 10 is an enlarged perspective view showing a part of the cathode hood assembly 5 of the X-ray tube 1 according to the third modification. 10, unlike the second modification, the concave surface 50c of the cathode hood 50 may be a rectangular concave surface. The retaining member 90 has an oval recess 90a. The third modification can also achieve the same effects as the second modification.

[0074] (Variation 4) Next, a fourth modification of the above embodiment will be described. Fig. 11 is a perspective view showing the cathode hood assembly 5 of the X-ray tube 1 according to this fourth modification. Fig. 12 is an enlarged front view showing a portion of the cathode hood assembly 5 according to this fourth modification. The X-ray tube 1 according to this fourth modification has the same configuration as the X-ray tube 1 according to the above embodiment, except for the configuration described in this fourth modification.

[0075] 11 and 12, the pressing member 70 and the cathode hood 50 are not welded together. The pressing member 70 is made of a metal that is softer than the material of the cathode hood 50. In the fourth modification, the pressing member 70 is made of copper. A side surface 70s of the pressing member 70 has a contact surface 70c that is pressed against the inner wall surface 50s2 of the cathode hood 50.

[0076] The pressing member 70 has a round through-hole 70h that extends in a direction from the inner peripheral surface 50i toward the outer peripheral surface 50o of the cathode hood 50. In the present fourth modification, the pressing member 70 has four through-holes 70h as the plurality of through-holes. In the manufacturing process of the cathode hood assembly 5, the X-ray transmissive window 60 is installed, the pressing member 70 is brazed to the cathode hood 50 with the brazing material 110, and then the through-hole 70h is widened. The contact surface 70c of the pressing member 70 can be firmly adhered to the inner wall surface 50s2 of the cathode hood 50.

[0077] As described above, the retaining member 70 is physically fixed to the cathode hood 50 by crimping. The X-ray transmissive window 60 is maintained in a state where it is pressed against the overlap 50t by the retaining member 70. In this fourth modification, too, plastic deformation of the cathode hood 50 can be suppressed or prevented, and the same effects as those of the second and third modifications can be obtained.

[0078] (Variation 5) Next, a fifth modification of the above embodiment will be described. Fig. 13 is a perspective view showing the cathode hood assembly 5 of an X-ray tube according to this fifth modification. Fig. 14 is a cross-sectional view showing the cathode hood assembly 5 of Fig. 13 taken along line XIV-XIV. The X-ray tube 1 of this fifth modification has the same configuration as the X-ray tube 1 of the above embodiment, except for the configuration described in this fifth modification.

[0079] 13 and 14, the cathode hood 50 further has a hole 50b and a bottom surface 50s3 of the hole 50b. The hole 50b functions as a second hole, and the bottom surface 50s3 functions as a second bottom surface. In this fifth modification, the cathode hood 50 has four holes 50b as the multiple holes. Each hole 50b is continuous with the hole 50a, opens to the outer peripheral surface 50o, and is recessed toward the inner peripheral surface 50i.

[0080] The retaining member 70 is welded to the bottom surface 50s3 of each cathode hood 50. The X-ray transmissive window 60 is maintained in a state where it is pressed down at the overlap 50t by the retaining member 70 fixed to the cathode hood 50. The weld mark WE between the retaining member 70 and the bottom surface 50s3 of each cathode hood 50 is located closer to the inner peripheral surface 50i than an imaginary extension plane E of the outer peripheral surface 50o.

[0081] Since the weld mark WE is formed at a position recessed by one step from the outer circumferential surface 50o, it is possible to alleviate the electric field concentration at the weld mark WE. In addition, in the vertical direction d, the distance L1 from the X-ray tube axis A to the extension plane E is the same as the distance L2 from the X-ray tube axis A to the outer circumferential surface 50o. Also, unlike the fifth modification, the weld mark WE may be formed at a position recessed by multiple steps from the outer circumferential surface 50o.

[0082] The same effects as those of the above embodiment can be obtained in Modification 5. Furthermore, the X-ray tube 1 of Modification 5 can achieve improved voltage resistance performance compared to the X-ray tube 1 of the above embodiment.

[0083] (Variation 6) Next, a sixth modification of the above embodiment will be described. Fig. 15 is a perspective view showing the cathode hood assembly 5 of the X-ray tube 1 according to this sixth modification. Fig. 16 is a cross-sectional view showing the cathode hood assembly 5 of Fig. 15 taken along line XVI-XVI.

[0084] 15 and 16 , the holes 50b of the cathode hood 50 may extend in a direction along the X-ray tube axis A. In this sixth modification, the cathode hood 50 has two holes 50b. Each hole 50b opens to the outer peripheral surface 50o and the inner wall surface 50s2. Furthermore, each hole 50b opens to an end face 52a of the second portion 52 on the first portion 51 side, or an end face 52b of the second portion 52 on the third portion 53 side.

[0085] In this sixth modification, too, the weld marks WE between the pressing member 70 and the bottom surface 50s3 of each cathode hood 50 are located closer to the inner peripheral surface 50i than the outer peripheral surface 50o and the imaginary extension plane E. In this sixth modification, too, the same effects as those of the fifth modification can be obtained.

[0086] Although the embodiments of the present invention have been described, the above embodiments are presented as examples and are not intended to limit the scope of the invention. The above novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. The above embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the inventions and their equivalents as defined in the claims. For example, the embodiments and variations of the present invention can be applied to various fixed anode type X-ray tubes. 。 The inventions described in the original claims of this application are set forth below. [1] A cathode having an electron emission source that emits electrons; an anode having an anode target facing the cathode in a direction along the X-ray tube axis and having a focal point at which X-rays are emitted when electrons emitted from the electron emission source collide with the anode target; a cathode hood that surrounds the anode target and the trajectory of electrons from the electron emission source toward the focal point, and that has a first opening formed therein through which X-rays pass; a first X-ray transmissive window that covers at least a portion of the first opening and has an X-ray transmittance higher than an X-ray transmittance of the cathode hood; an envelope containing the cathode, the anode target, the cathode hood, and the first X-ray transmissive window; X-ray tube. [2] Further comprising a brazing material positioned between the cathode hood and the first X-ray transmissive window and fixing the first X-ray transmissive window to the cathode hood. [1] The X-ray tube according to [1]. [3] The first X-ray transmissive window has a first region facing the first opening and a second region located outside the first region; the cathode hood has an inner circumferential surface surrounding the electron orbit and the anode target, an outer circumferential surface opposite the inner circumferential surface, a first hole that opens to the outer circumferential surface and is recessed toward the inner circumferential surface and accommodates the first X-ray transmissive window, and a first bottom surface of the first hole, the first openings are open to the inner circumferential surface and the first bottom surface, the first bottom surface has an overlap portion facing the second region of the first X-ray transmissive window, the brazing material is located between the overlap and the second region of the first X-ray transmissive window and fixes the second region of the first X-ray transmissive window to the overlap. [2] The X-ray tube according to [2]. [4] The cathode hood is located between the first opening and the overlapping portion and has a groove that opens to the first bottom surface and is recessed toward the inner circumferential surface. [3] The X-ray tube according to [3]. [5] Further comprising a first holding member; the first X-ray transmissive window has a first region facing the first opening, a frame-shaped second region surrounding the first region, and a first side surface overlapping an outer edge of the second region, the cathode hood has an inner circumferential surface surrounding the electron trajectory and the anode target, an outer circumferential surface opposite the inner circumferential surface, a first hole that opens to the outer circumferential surface and is recessed toward the inner circumferential surface and accommodates the first X-ray transmissive window, a first bottom surface of the first hole, and an inner wall surface of the first hole, the first openings are open to the inner circumferential surface and the first bottom surface, the first bottom surface has a frame-shaped overlap space facing the second region of the first X-ray transmissive window, the first side surface of the first X-ray transmissive window faces the inner wall surface; the first presser member faces the second region of the first X-ray transmissive window, sandwiches the second region of the first X-ray transmissive window together with the overlap, has a frame-like shape and a second side surface facing the inner wall surface, and is formed of a metal softer than a material forming the cathode hood, the second side surface has a contact surface that is pressed against the inner wall surface, the first X-ray transmissive window is maintained in a state pressed against the overlap by the first pressing member; [1] The X-ray tube according to [1]. [6] Further comprising a first holding member and a second holding member, the first X-ray transmissive window has a first region facing the first opening, a frame-shaped second region surrounding the first region, and a first side surface overlapping an outer edge of the second region, the cathode hood has an inner circumferential surface surrounding the electron orbit and the anode target, an outer circumferential surface opposite the inner circumferential surface, a first hole that opens into the outer circumferential surface and is recessed toward the inner circumferential surface and accommodates the first X-ray transmissive window, a first bottom surface of the first hole, an inner wall surface of the first hole, and a concave surface that opens into the inner wall surface, the first openings are open to the inner circumferential surface and the first bottom surface, the first bottom surface has a frame-shaped overlap space facing the second region of the first X-ray transmissive window, the first side surface of the first X-ray transmissive window faces the inner wall surface; the first presser member faces the second region of the first X-ray transmissive window, sandwiches the second region of the first X-ray transmissive window together with the overlap, and has a frame-like shape and a second side surface facing the inner wall surface, the second pressing member is located in a space surrounded by the concave surface and the second side surface, is made of a metal softer than a material forming the cathode hood, and has a contact surface pressed against the second side surface, the first X-ray transmissive window is maintained in a state pressed against the overlap by the first pressing member and the second pressing member. [1] The X-ray tube according to [1]. [7] Further comprising a first holding member, the first X-ray transmissive window has a first region facing the first opening, a frame-shaped second region surrounding the first region, and a first side surface overlapping an outer edge of the second region, the cathode hood has an inner circumferential surface surrounding the electron trajectory and the anode target, an outer circumferential surface opposite the inner circumferential surface, a first hole that opens into the outer circumferential surface and is recessed toward the inner circumferential surface and accommodates the first X-ray transmission window, a first bottom surface of the first hole, an inner wall surface of the first hole, a second hole that continues from the first hole, opens into the outer circumferential surface and is recessed toward the inner circumferential surface, and a second bottom surface of the second hole, the first openings are open to the inner circumferential surface and the first bottom surface, the first bottom surface has a frame-shaped overlap space facing the second region of the first X-ray transmissive window, the first side surface of the first X-ray transmissive window faces the inner wall surface; the first presser member faces the second region of the first X-ray transmissive window, sandwiches the second region of the first X-ray transmissive window together with the overlap, and has a frame-like shape and a second side surface facing the inner wall surface, The first pressing member and the second bottom surface are welded together, the first X-ray transmission window is maintained in a state of being pressed against the overlap by the first pressing member fixed to the cathode hood. [1] The X-ray tube according to [1]. [8] The welding mark between the first pressing member and the second bottom surface is located on the inner peripheral surface side of a virtual extension plane of the outer peripheral surface, [7] The X-ray tube according to the present invention. [9] The first X-ray transmissive window is formed of beryllium. [1] The X-ray tube according to [1].

[10] The envelope is made of glass. [1] The X-ray tube according to [1].

[11] further comprising an X-ray transmission assembly; the envelope has a second opening facing the first X-ray transmissive window; The x-ray transmission assembly includes: a window frame airtightly attached to the enclosure and surrounding the second opening; a second X-ray transmissive window that is housed in the window frame, that airtightly closes the second opening together with the window frame, and that has an X-ray transmittance higher than the X-ray transmittance of the window frame; [1] The X-ray tube according to [1]. [Explanation of symbols]

[0087] 1...X-ray tube, 5...cathode hood assembly, 10...envelope, 13...glass container, 20... X-ray transmission assembly, 21... window frame, 21h... through hole, 22... X-ray transmission window, 30...cathode, 31...filament, 40...anode, 41...anode target body, 42...target layer, 43...target surface, 45...anode target, 50...cathode hood, 50a, 50b...hole, 50c...concave surface, 50i...inner surface, 50o...outer surface, 50s1, 50s3...bottom surface, 50s2...inner wall surface, 50t...overlap, 51...first part, 52...second part, 52a, 52b...end face, 53...third part, 54...fourth part, 60...X-ray transmission window, 60a...first region, 60b...second region, 60s...side surface, 70, 90... Retaining member, 70c, 90c... Contact surface, 70h... Through hole, 70s... Side surface, 90a...recess, 80...soldering material, 13w, 50w...opening, 100, 110...soldering material, A...X-ray tube axis, E...extension plane, F...focus, G...groove, WE...weld mark, d...vertical direction.

Claims

1. A cathode having an electron emission source that emits electrons; an anode having an anode target facing the cathode in a direction along the X-ray tube axis and on which a focal point for emitting X-rays is formed when electrons emitted from the electron emission source collide; a cathode hood that surrounds the anode target and a trajectory of electrons from the electron emission source toward the focal point, and that has a first opening formed therein through which X-rays pass; a first X-ray transmissive window that covers at least a portion of the first opening and has an X-ray transmittance higher than an X-ray transmittance of the cathode hood; an envelope containing the cathode, the anode target, the cathode hood, and the first X-ray transmissive window; a first holding member, the first X-ray transmissive window has a first region facing the first opening, a frame-shaped second region surrounding the first region, and a first side surface overlapping an outer edge of the second region, the cathode hood has an inner circumferential surface surrounding the electron trajectory and the anode target, an outer circumferential surface opposite the inner circumferential surface, a first hole that opens to the outer circumferential surface and is recessed toward the inner circumferential surface and accommodates the first X-ray transmission window, a first bottom surface of the first hole, and an inner wall surface of the first hole, the first openings are open to the inner circumferential surface and the first bottom surface, the first bottom surface has a frame-shaped overlap space facing the second region of the first X-ray transmission window, the first side surface of the first X-ray transmissive window faces the inner wall surface; the first presser member faces the second region of the first X-ray transmissive window, sandwiches the second region of the first X-ray transmissive window together with the overlap, has a frame-like shape and a second side surface facing the inner wall surface, and is formed of a metal softer than a material forming the cathode hood, the second side surface has a contact surface that is in pressure contact with the inner wall surface, the first X-ray transmission window is maintained in a state pressed against the overlap by the first pressing member; X-ray tube.

2. A cathode having an electron emission source that emits electrons; an anode having an anode target facing the cathode in a direction along the X-ray tube axis and on which a focal point for emitting X-rays is formed when electrons emitted from the electron emission source collide; a cathode hood that surrounds the anode target and a trajectory of electrons from the electron emission source toward the focal point, and that has a first opening formed therein through which X-rays pass; a first X-ray transmissive window that covers at least a portion of the first opening and has an X-ray transmittance higher than an X-ray transmittance of the cathode hood; an envelope containing the cathode, the anode target, the cathode hood, and the first X-ray transmissive window; A first holding member and a second holding member are provided, the first X-ray transmissive window has a first region facing the first opening, a frame-shaped second region surrounding the first region, and a first side surface overlapping an outer edge of the second region, the cathode hood has an inner circumferential surface surrounding the electron trajectory and the anode target, an outer circumferential surface opposite the inner circumferential surface, a first hole that opens into the outer circumferential surface and is recessed toward the inner circumferential surface and accommodates the first X-ray transmission window, a first bottom surface of the first hole, an inner wall surface of the first hole, and a concave surface that opens into the inner wall surface, the first openings are open to the inner circumferential surface and the first bottom surface, the first bottom surface has a frame-shaped overlap space facing the second region of the first X-ray transmission window, the first side surface of the first X-ray transmissive window faces the inner wall surface; the first pressing member faces the second region of the first X-ray transmissive window, sandwiches the second region of the first X-ray transmissive window together with the overlap, and has a frame-like shape and a second side surface facing the inner wall surface, the second pressing member is located in a space surrounded by the concave surface and the second side surface, is made of a metal softer than a material forming the cathode hood, and has a contact surface pressed against the second side surface, the first X-ray transmission window is maintained in a state pressed against the overlap by the first pressing member and the second pressing member; X-ray tube.

3. A cathode having an electron emission source that emits electrons; an anode having an anode target facing the cathode in a direction along the X-ray tube axis and on which a focal point for emitting X-rays is formed when electrons emitted from the electron emission source collide; a cathode hood that surrounds the anode target and a trajectory of electrons from the electron emission source toward the focal point, and that has a first opening formed therein through which X-rays pass; a first X-ray transmissive window that covers at least a portion of the first opening and has an X-ray transmittance higher than an X-ray transmittance of the cathode hood; an envelope containing the cathode, the anode target, the cathode hood, and the first X-ray transmissive window; a first holding member, the first X-ray transmissive window has a first region facing the first opening, a frame-shaped second region surrounding the first region, and a first side surface overlapping an outer edge of the second region, the cathode hood has an inner circumferential surface surrounding the electron trajectory and the anode target, an outer circumferential surface opposite the inner circumferential surface, a first hole that opens into the outer circumferential surface and is recessed toward the inner circumferential surface and accommodates the first X-ray transmission window, a first bottom surface of the first hole, an inner wall surface of the first hole, a second hole that continues from the first hole, opens into the outer circumferential surface and is recessed toward the inner circumferential surface, and a second bottom surface of the second hole, the first openings are open to the inner circumferential surface and the first bottom surface, the first bottom surface has a frame-shaped overlap space facing the second region of the first X-ray transmission window, the first side surface of the first X-ray transmissive window faces the inner wall surface; the first pressing member faces the second region of the first X-ray transmissive window, sandwiches the second region of the first X-ray transmissive window together with the overlap, and has a frame-like shape and a second side surface facing the inner wall surface, the first pressing member and the second bottom surface are welded together, the first X-ray transmission window is maintained in a state of being pressed against the overlap by the first pressing member fixed to the cathode hood. X-ray tube.

4. a welding mark between the first pressing member and the second bottom surface is located closer to the inner circumferential surface than a virtual extension plane of the outer circumferential surface; 4. The X-ray tube according to claim 3.

Images