Cutting blade fixing mechanism

Abstract

To fix a hub-less type cutting blade to a blade mount without using a fixing nut.SOLUTION: A cutting blade fixing mechanism is used to fix a hub-less type cutting blade to a spindle and has: a blade mount having a cylindrical boss part, and a receiving flange part protruding from a base end part of the boss part to the radial outer side of the boss part and including an annular first contact surface, the blade mount fixed to the spindle; and an annular fixing flange part which has annular rear and front surfaces and may sandwich the cutting blade with the receiving flange part. The blade mount further includes fixing members which protrude to the radial outer side of the boss part from an outer periphery side surface of the boss part, press the fixing flange part from the front surface side to the rear surface side, and sandwich the cutting blade between the receiving flange part and the fixing flange part to fix the cutting blade to the blade mount when the cutting blade is fixed to the blade mount with the fixing flange part.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a cutting blade fixing mechanism for fixing a hubless, annular cutting blade having a cutting edge on its outer periphery and a through opening in its radial center to a spindle. [Background technology]

[0002] Device chips are mounted on electronic devices such as mobile phones and personal computers. Device chips are manufactured, for example, by processing a disk-shaped wafer. A plurality of planned division lines (streets) are set on the front surface of the wafer, and devices such as ICs (Integrated Circuits) are formed in each rectangular area defined by the plurality of planned division lines.

[0003] For example, the device chips are manufactured by cutting the wafer along the division lines using a cutting device, which includes a cutting unit having a spindle that can rotate at high speed.

[0004] A cylindrical blade mount is fixed to the tip of the spindle. The blade mount has a cylindrical boss. The base end of the boss is provided with a receiving flange that is larger in diameter than the boss and that receives the cutting blade.

[0005] A hubless (i.e., washer) cutting blade, for example, is fixed to the blade mount. The hubless cutting blade has an annular cutting edge and is fixed to the blade mount in a state where it is sandwiched between an annular pressing flange that corresponds to the receiving flange and the receiving flange.

[0006] When a hubless cutting blade is fixed to a blade mount, an annular fixing nut is usually used (see, for example, Patent Document 1). The fixing nut has a through opening in the radial center, and a female thread is formed on the inner peripheral side of this through opening. Also, a male thread is formed on the outer peripheral side of the boss portion of the blade mount.

[0007] When a hubless cutting blade is brought into contact with the receiving flange portion and the boss portion is inserted into the holding flange, and an annular fixing nut is tightened to the tip of the boss portion, the cutting blade is fixed to the blade mount while being clamped between the receiving flange portion and the holding flange. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-179520 Summary of the Invention [Problem to be solved by the invention]

[0009] However, when using a fixing nut, a special tool may be required to rotate the fixing nut to attach and detach it from the boss. Also, when fastening the fixing nut to the boss, a torque sensor may be required to rotate the fixing nut with a torque above a predetermined value, and a certain level of skill may be required from the worker.

[0010] The present invention has been made in consideration of the above problems, and has an object to fix a hubless type cutting blade to a blade mount without using a fixing nut. [Means for solving the problem]

[0011] According to one aspect of the present invention, there is provided a cutting blade fixing mechanism for fixing a hubless cutting blade including an annular cutting edge having a first through opening at a radial center portion to a spindle, the cutting blade fixing mechanism comprising: a cylindrical boss portion inserted into the first through opening; a receiving flange portion protruding from a base end of the boss portion in the length direction of the boss portion to the radially outer side of the boss portion and including an annular first contact surface capable of contacting one side of the cutting blade; a blade mount fixed to a tip end portion of the spindle; an annular back surface having an annular second contact surface capable of contacting the other side of the cutting blade located opposite to the one side; and an annular fixing flange portion having an annular surface located on the opposite side to the back surface in the thickness direction, and a second through opening located in the center in the radial direction, the boss portion being inserted into the second through opening so as to be able to sandwich the cutting blade together with the receiving flange portion, the blade mount being a fixing member that fixes the cutting blade to the blade mount by protruding radially outward from the outer peripheral side surface of the boss portion and pressing the fixing flange portion from the front surface side to the back surface side when the cutting blade is fixed to the blade mount together with the fixing flange portion. and an inward / outward moving mechanism provided inside the boss portion, which causes a portion of the fixing member to protrude radially outward from the outer peripheral side surface of the boss portion when fixing the cutting blade to the blade mount, and which allows the fixing member to move radially inward from the outer peripheral side surface of the boss portion when removing the cutting blade from the blade mount, the fixing member having a plurality of spheres arranged at a distance from one another in the circumferential direction of the boss portion, and the side surface of the boss portion is provided with a plurality of through holes each having a diameter that allows a portion of one sphere to protrude, the inward / outward moving mechanism including a movable body movable along the length direction of the boss portion inside the boss portion, The moving body has a recessed area on its outer periphery that becomes smaller in diameter as it moves from the tip end of the boss portion to the base end thereof, and when the moving body moves toward the base end of the boss portion, a part of each sphere is pushed out of the recessed area and protrudes radially outward from the outer circumferential side surface of the boss portion through a through hole at a corresponding position, and when the moving body moves toward the tip end of the boss portion, each sphere becomes movable radially inward from the outer circumferential side surface of the boss portion, and as a result of each sphere protruding radially outward from the outer circumferential side surface of the boss portion, each sphere presses the fixed flange portion, and the cutting blade is clamped between the fixed flange portion and the receiving flange portion, and the cutting blade is fixed to the blade mount. A cutting blade fixing mechanism is provided.

[0015] Preferably, the blade mount includes a gas supply passage therein that can communicate with a gas supply source, and the gas supply passage has a gas supply passage extending from the boss portion of the blade mount. Applicable An ejection port capable of ejecting gas is connected to an inner peripheral side surface of the second through-opening of the fixing flange portion that is provided in an annular shape on the outer peripheral side surface and is disposed on the boss portion. [Effects of the Invention]

[0016] A blade mount according to one aspect of the present invention includes a fixing member that fixes a hubless cutting blade to the blade mount. The fixing member protrudes radially outward from the outer peripheral side surface of the boss portion and presses the fixing flange portion from the front side to the back side of the fixing flange portion.

[0017] Therefore, the hubless cutting blade can be fixed to the blade mount without using a fixing nut, which eliminates the need for a torque sensor and reduces the level of skill required from the operator compared to when using a fixing nut. [Brief explanation of the drawings]

[0018] [Figure 1] FIG. [Figure 2] FIG. [Figure 3] FIG. 10 is a partial cross-sectional side view of the moving body and the like in a pushed-out state. [Figure 4] FIG. 2 is a partial cross-sectional side view of a moving body and the like in a retracted state. [Figure 5] FIG. 10 is a partial cross-sectional side view of the blade mount and other components during cutting. [Figure 6] FIG. 10 is a partial cross-sectional side view of a blade mount and the like according to a second embodiment. [Figure 7] FIG. 10 is a cross-sectional view of a cutting blade and a fixing flange portion according to a third embodiment. [Figure 8] FIG. 10 is a partial cross-sectional side view of a blade mount and the like according to a third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0019] An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a perspective view of a cutting device 2. Note that the X-axis direction (processing feed direction), Y-axis direction (indexing feed direction), and Z-axis direction (cutting feed direction) shown in Fig. 1 are perpendicular to one another.

[0020] The cutting device 2 includes a base 4 that supports each of the components. A rectangular opening 4a is formed in the front corner of the base 4 (one corner in the Y-axis direction), and an elevator 6 that moves up and down by a lifting mechanism (not shown) is provided within this opening 4a.

[0021] A cassette 8 for accommodating a plurality of workpieces 11 is placed on the upper surface of the elevator 6. The workpieces 11 are, for example, disk-shaped wafers made of a semiconductor material such as silicon, but the wafers may be made of semiconductor materials other than silicon.

[0022] A plurality of planned division lines (streets) are set in a grid pattern on the front surface of the workpiece 11, and devices such as ICs are formed in each rectangular area partitioned by the plurality of planned division lines.

[0023] An annular metal frame 15 is disposed radially outside the workpiece 11. The frame 15 has an opening 15a with a diameter larger than that of the workpiece 11, and the workpiece 11 is disposed in this opening 15a.

[0024] By attaching dicing tape 13 to the back surface of workpiece 11 and one surface of frame 15, workpiece unit 17 is formed in which workpiece 11 is supported by frame 15 via dicing tape 13.

[0025] Each of the plurality of workpieces 11 is housed in the above-mentioned cassette 8 in the form of a workpiece unit 17. A rectangular opening 4b having a longitudinal portion in the X-axis direction is formed on the rear side (the other side in the Y-axis direction) of the opening 4a.

[0026] A ball screw type processing feed mechanism (X-axis direction moving mechanism) (not shown) having a moving plate (not shown) that is movable in the X-axis direction is disposed in the opening 4b. The moving plate supports a disk-shaped chuck table 10.

[0027] The chuck table 10 can be rotated around a rotation axis that is approximately parallel to the Z-axis direction (vertical direction) by a rotary drive source (not shown) such as a motor. The chuck table 10 has a holding surface 10a on its upper surface that is approximately flat and has a circular outer periphery.

[0028] The chuck table 10 has a circular porous plate. Negative pressure is transmitted to the porous plate from a suction source (not shown) such as an ejector via a predetermined pipe (not shown). This negative pressure causes the workpiece 11 to be suction-held on the holding surface 10a via the dicing tape 13.

[0029] A rectangular table cover 12 is provided on the underside of the chuck table 10. On both sides of the table cover 12 in the X-axis direction, bellows-shaped cover members 14 that are expandable and contractible in the X-axis direction are provided.

[0030] A first transport unit (not shown) is provided above the opening 4b to transport the workpiece unit 17 to the chuck table 10. The first transport unit places the workpiece unit 17, which has been pulled out of the cassette 8, on the holding surface 10a.

[0031] At this time, the workpiece 11 is placed on the holding surface 10a with its front surface facing upward, and then the back surface of the workpiece 11 is suction-held by the holding surface 10a. Next, the workpiece 11 is cut by the cutting unit 16.

[0032] The cutting unit 16 has a cylindrical spindle housing 20 whose longitudinal direction is arranged along the Y-axis direction. A portion of a columnar spindle 22 (see FIG. 2) is rotatably housed in the spindle housing 20. The structure of the cutting unit 16 will now be described with reference to FIGS. 2 and 3.

[0033] 2 is an exploded perspective view of the cutting unit 16. Note that a blade cover, a cutting water supply nozzle, etc. are omitted in FIG. 2. The tip of the spindle 22 protrudes from the tip of the spindle housing 20.

[0034] The spindle 22 has a large diameter portion 22a at its tip end. An annular groove 22c for accommodating an O-ring 24 (see FIG. 3) is formed on the outer peripheral side surface of the large diameter portion 22a. A small diameter portion 22b is provided closer to the tip end of the spindle 22 than the large diameter portion 22a.

[0035] Small diameter portion 22b has a smaller diameter than large diameter portion 22a and is arranged concentrically with large diameter portion 22a, so that an annular step is formed at the boundary between small diameter portion 22b and large diameter portion 22a.

[0036] 3, through-holes 22d are formed in the radial centers of the large diameter portion 22a and the small diameter portion 22b. Air (gas) 26a is supplied to the through-holes 22d from an air supply source (gas supply source) 26 via a pipe portion 26b.

[0037] The through-hole 22d and the air supply source 26 are connected by a pipe 26b, and the pipe 26b is provided with a solenoid valve 26c. The solenoid valve 26c is normally closed, but as shown in Figure 3, by opening the solenoid valve 26c, air 26a is supplied to the through-hole 22d.

[0038] The through-hole 22d serves as a flow path for air 26a supplied from an air supply source 26. The air 26a is used to move a moving body 38, which will be described later. The air supply source 26 is, for example, a compressed air supply device having an air compressor, a filter, an air tank, etc.

[0039] 2, a male thread is formed on the outer circumferential side surface of the small diameter portion 22b. A cylindrical blade mount 28 is fixed to the large diameter portion 22a and the small diameter portion 22b of the spindle 22 using this male thread.

[0040] The blade mount 28 has a first cylindrical portion 28a that is disposed outside the large diameter portion 22a in the radial direction of the spindle 22. An annular ring 28b having a female thread formed on its inner peripheral side surface is fixed inside the first cylindrical portion 28a.

[0041] By fastening the ring 28b to the small diameter portion 22b of the spindle 22, the blade mount 28 is fixed to the spindle 22. At this time, a part of the ring 28b is disposed in a step portion formed by the large diameter portion 22a and the small diameter portion 22b.

[0042] A second cylindrical portion (boss portion) 28c having an outer diameter smaller than that of first cylindrical portion 28a is provided on the opposite side of first cylindrical portion 28a in the longitudinal direction of blade mount 28. Second cylindrical portion 28c has a base end portion 28c1 having a predetermined outer diameter.

[0043] A plurality of through holes 28d are formed in the outer peripheral side surface of second cylindrical portion 28c between tip end 28c2, which is located on the opposite side of base end 28c1 in the length direction of second cylindrical portion 28c, and base end 28c1.

[0044] The plurality of through holes 28d are arranged at approximately equal intervals apart from one another along the circumferential direction of second cylindrical portion 28c. A plurality of spheres (fixing members) 30 are arranged inside second cylindrical portion 28c in a manner that prevents them from scattering from second cylindrical portion 28c. Spheres 30 are made of metal (e.g., stainless steel).

[0045] In this embodiment, one sphere 30 is disposed per through-hole 28d, and the diameter of each sphere 30 is larger than the diameter of through-hole 28d. Therefore, a portion of sphere 30 (for example, an area less than half the volume of sphere 30) can protrude from through-hole 28d.

[0046] In other words, the sphere 30 does not completely protrude outside the outer peripheral side surface of the second cylindrical portion 28c in the radial direction 28c3 of the second cylindrical portion 28c, and at least another portion of the sphere 30 is always located inside the outer peripheral side surface of the second cylindrical portion 28c.

[0047] An annular receiving flange portion 28e is provided between the second cylindrical portion 28c and the first cylindrical portion 28a. The receiving flange portion 28e has an annular blade mounting portion 28e1 that protrudes outward in the radial direction 28c3 from a base end portion 28c1 of the second cylindrical portion 28c.

[0048] A hubless cutting blade 50 (described later) is placed on the outer peripheral side surface of the blade placement portion 28e1. An annular contact surface (first contact surface) 28e2 is provided on the receiving flange portion 28e radially outward of the blade placement portion 28e1. The contact surface 28e2 is substantially flat and can come into contact with the substantially flat surface 50a of the cutting blade 50.

[0049] Note that receiving flange portion 28e has a generally truncated cone-like outer shape, and its diameter gradually decreases in the direction from tip end 28c2 to base end 28c1 of second cylindrical portion 28c. In this embodiment, the direction from tip end 28c2 to base end 28c1 corresponds to the length direction of second cylindrical portion 28c and is generally parallel to the Y-axis direction.

[0050] A circular ring-shaped first movable body 32 is disposed in a cylindrical hollow portion 28f located inside the second cylindrical portion 28c. The first movable body 32 has, on the outer periphery on the tip end side, a cylindrical side surface region 32a whose diameter is smaller than the inner periphery of the second cylindrical portion 28c.

[0051] In addition, the tip end of the first movable body 32 means the end that is located farther from the spindle 22 when the blade mount 28 is fixed to the spindle 22, and the base end of the first movable body 32 means the end that is located closer to the spindle 22 than the tip end in the same case.

[0052] A curved recessed area 32b is formed on the outer periphery located closer to the base end of the first movable body 32 than the cylindrical side surface area 32a. The recessed area 32b is formed in an annular shape along the circumferential direction of the first movable body 32, and has an outer diameter equal to or smaller than that of the cylindrical side surface area 32a.

[0053] In the recessed region 32b, the diameter decreases from the tip end to the base end of the first movable body 32 (i.e., as shown in FIG. 3, from the tip end 28c2 to the base end 28c1 of the second cylindrical portion 28c). Note that the recessed region 32b includes a region where the outer diameter of the first movable body 32 is locally minimum (see FIG. 3).

[0054] A plurality of spheres 30 are arranged in the recessed region 32b. The plurality of spheres 30 are arranged at approximately equal intervals along the circumferential direction of the first moving body 32. Note that a plurality of recessed regions 32b may be formed at approximately equal intervals along the circumferential direction of the first moving body 32. In this case, one sphere 30 is arranged per recessed region 32b.

[0055] A through-hole 32c for inserting a male screw 34 is formed in the radial center of the first moving body 32. On the base end 28c1 side of the first moving body 32, there is arranged a substantially conical second moving body 36 whose diameter gradually increases in the direction from the tip end 28c2 to the base end 28c1.

[0056] A female screw 36a is formed on the tip end side of the radial center of the second moving body 36, and the male screw 34 inserted into the through hole 32c of the first moving body 32 is fastened to the female screw 36a.

[0057] By being pressed by the head of the male screw 34, the first moving body 32 is fixed to the second moving body 36, forming a moving body 38. At this time, the base end side of the first moving body 32 is located on the outer periphery of the tip end side of the second moving body 36.

[0058] In addition, the tip end of the second movable body 36 means the end that is located farther from the spindle 22 when the blade mount 28 is fixed to the spindle 22, and the base end of the second movable body 36 means the end that is located closer to the spindle 22 than the tip end in the same case.

[0059] Meanwhile, a fixed ring 40 is provided on the inner peripheral side surface of the second cylindrical portion 28c. The fixed ring 40 has an opening of a predetermined diameter through which a part of the movable body 38 can advance and retreat. In addition, a coil spring 42 is arranged on the base end portion 28c1 side of the fixed ring 40.

[0060] The coil spring 42 biases the annular surface 36b of the second movable body 36, which faces the fixed ring 40, in a direction (the direction indicated by arrow A in FIG. 3) from the tip end 28c2 to the base end 28c1. A plurality of recesses 36c are formed at approximately equal intervals along the circumferential direction of the second movable body 36 on the outer periphery on the base end side of the second movable body 36.

[0061] Each recess 36c is recessed in the radial direction of the second movable body 36. A bearing ball 36d is disposed in each recess 36c. Each bearing ball 36d contacts the inner peripheral side surface of the receiving flange portion 28e. The movable body 38 is slidable within the hollow portion 28f by the biasing force of the coil spring 42.

[0062] At the center of the second moving body 36 in the radial direction, on the opposite side to the female screw 36a, a cylindrical protrusion 36e having a smaller diameter than the through hole 22d of the spindle 22 is provided.

[0063] 3, when air 26a is injected into through-hole 22d at a predetermined pressure, moving body 38 is pushed toward tip end 28c2 against the biasing force of coil spring 42. Note that while moving body 38 is being pushed out, injection of air 26a at the predetermined pressure continues.

[0064] The air 26a is injected at a predetermined pressure of, for example, 0.2 MPa or more and 0.5 MPa or less and at a predetermined flow rate of 1.0 L / min or more and 1.5 L / min or less. Figure 3 is a partial cross-sectional side view of the movable body 38, etc., which has moved toward the tip end 28c2 and is in a pushing state.

[0065] When the movable body 38 is in the extruded state, each sphere 30 can move inward in the radial direction 28c3 from the outer peripheral side surface of the second cylindrical portion 28c. Specifically, a sphere 30 located above the halfway point in the height direction falls due to gravity into the small diameter portion of the recessed region 32b located on the base end side of the first movable body 32.

[0066] On the other hand, the spheres 30 located below the halfway point in the height direction fall into the through-holes 28d due to gravity. However, the spheres 30 located at the bottom do not fall out of the second cylindrical portion 28c.

[0067] When the spraying of air 26a is stopped, or when the spraying of air 26a is stopped and an operator or robot pushes the moving body 38 toward the base end 28c1, the spring force of the coil spring 42 causes the moving body 38 to move toward the base end 28c1 and enter a retracted state (see Figures 4 and 5).

[0068] Furthermore, when the movable body 38 is in a retracted state, the large diameter portion of the recessed region 32b comes into contact with the sphere 30, a portion of which is fixed within the through-hole 28d, thereby restricting the movement of the movable body 38 in the Y-axis direction and determining the position of the movable body 38.

[0069] In this way, the movable body 38 of this embodiment is movable along the length direction of the second cylindrical portion 28c (in this example, the Y-axis direction). Figure 4 is a partial cross-sectional side view of the movable body 38 in the retracted state. After the movable body 38 enters the retracted state, the retracted state of the movable body 38 is maintained by the biasing force of the coil spring 42 until the next ejection of air 26a.

[0070] Next, the structure of the cutting blade 50 will be described with reference to Figure 3. The cutting blade 50 of this embodiment is a hubless type, and does not have a circular base (i.e., a hub) made of metal, but has a circular cutting edge. In other words, the cutting blade 50 is the cutting edge itself.

[0071] The cutting blade 50 is formed by, for example, fixing diamond abrasive grains or the like with nickel plating. The cutting blade 50 has an annular first surface 50a and an annular second surface 50b. The annular second surface 50b is located on the opposite side of the cutting blade 50 in the thickness direction from the annular first surface 50a.

[0072] A cylindrical through-opening (first through-opening) 50c that penetrates from one surface 50a to the other surface 50b is formed in the radial center of the cutting blade 50. The cutting blade 50 is fixed to the blade mount 28 using an annular fixing flange portion 52. The fixing flange portion 52 has an annular front surface 52a and a back surface 52b.

[0073] The front surface 52a and the back surface 52b are located on opposite sides in a thickness direction 52d of the fixed flange portion 52. A through opening (second through opening) 52e that penetrates from the front surface 52a to the back surface 52b is formed in the center of the fixed flange portion 52 in the radial direction 52c along the thickness direction 52d of the fixed flange portion 52.

[0074] The surface 52a of the fixing flange portion 52 has an annular small-diameter region 52a1 located near the center in the radial direction 52c and relatively thick in the thickness direction 52d. A large-diameter region 52a2 is provided outside the small-diameter region 52a1 in the radial direction 52c and is thinner than the small-diameter region 52a1 in the thickness direction 52d. Both the small-diameter region 52a1 and the large-diameter region 52a2 are approximately flat.

[0075] At the boundary between the small diameter region 52a1 and the large diameter region 52a2 in the radial direction 52c, an annular groove 52a3 is formed that is recessed in the radial direction 52c as it progresses from the front surface 52a to the back surface 52b. The groove 52a3 in this embodiment has an acute angle in cross section as shown in Fig. 3, and is used, for example, when an operator or a transport robot (not shown) grips the fixing flange portion 52.

[0076] An edge 52a4 of the through opening 52e on the small diameter region 52a1 side has a convex curved surface, and the edge 52a4 smoothly connects the inner peripheral side surface (cylindrical side surface) of the through opening 52e to the small diameter region 52a1 that is perpendicular to the inner peripheral side surface.

[0077] The edge portion 52a4 comes into contact with the sphere 30 when the cutting blade 50 is clamped between the fixed flange portion 52 and the blade mount 28. Therefore, by making the edge portion 52a4 a convex curved surface, damage to the sphere 30 can be reduced compared to when the edge portion 52a4 is sharp (for example, when the inner peripheral side surface of the through opening 52e and the small diameter region 52a1 are perpendicular to each other).

[0078] A substantially flat, annular contact surface (second contact surface) 52b1 is formed on the outer periphery of the back surface 52b. The contact surface 52b1 can come into contact with the other surface 50b of the cutting blade 50 when the cutting blade 50 is clamped between the fixing flange portion 52 and the receiving flange portion 28e.

[0079] The area inside the contact surface 52b1 in the radial direction 52c is recessed in the direction from the back surface 52b to the front surface 52a, and does not come into contact with the other surface 50b of the cutting blade 50 when the cutting blade 50 is clamped.

[0080] The cutting blade 50 is removably secured to the spindle 22 by utilizing the blade mount 28 and the fixing flange portion 52. A method for securing the cutting blade 50 to the spindle 22 will now be described with reference to Figures 3 and 4.

[0081] First, air 26a is sprayed into the through-hole 22d to push out the moving body 38 (see FIG. 3). Next, the second cylindrical portion 28c and the blade mounting portion 28e1 are inserted into the through-opening 50c so that the one surface 50a faces the contact surface 28e2.

[0082] Then, the cutting blade 50 is placed on the blade mounting portion 28e1 so that the inner peripheral side surface of the cutting blade 50 contacts part of the outer peripheral side surface of the blade mounting portion 28e1. Next, the second cylindrical portion 28c is inserted into the through opening 52e of the fixing flange portion 52 (see FIG. 4).

[0083] At this time, the fixed flange portion 52 is pushed toward the base end portion 28c1 until the contact surface 52b1 comes into contact with the other surface 50b of the cutting blade 50. In response to the movement of the fixed flange portion 52, the lower half of the sphere 30 rises once and then returns to its original position.

[0084] Thereafter, the injection of air 26a is stopped, and the movable body 38 is retracted using the biasing force of the coil spring 42. As a result, a portion of each sphere 30 is pushed out from the large diameter portion of the recessed region 32b located on the tip end side of the first movable body 32, and protrudes outward in the radial direction 28c3 beyond the outer peripheral side surface of the second cylindrical portion 28c through the corresponding through-hole 28d.

[0085] In this way, each sphere 30 presses the edge 52a4 on the front surface 52a side of the fixing flange portion 52 from the front surface 52a side to the back surface 52b side, thereby sandwiching the cutting blade 50 between the contact surface 52b1 of the fixing flange portion 52 and the contact surface 28e2 of the receiving flange portion 28e. This fixes the cutting blade 50 to the blade mount 28.

[0086] In this embodiment, the movable body 38, coil spring 42, etc. constitute an in / out mechanism 56 that causes a portion of each sphere 30 to protrude radially outward 28c3 from the outer peripheral side surface of the second cylindrical portion 28c, and enables each sphere 30 to move radially inward 28c3.

[0087] Additionally, the plurality of spheres 30, the ingress / egress mechanism 56, etc., constitute a cutting blade fixing mechanism 58 for removably fixing the cutting blade 50 to the spindle 22.

[0088] In this embodiment, the cutting blade 50 can be clamped between the fixing flange portion 52 and the receiving flange portion 28e using the sphere 30, so the hubless cutting blade 50 can be fixed to the blade mount 28 without using a fixing nut. This eliminates the need for a torque sensor, and requires less skill from the operator than when using a fixing nut.

[0089] When removing the cutting blade 50 from the blade mount 28, the movable body 38 is pushed out by injecting air 26a as shown in Fig. 3. Then, the fixed flange portion 52 and the cutting blade 50 are sequentially pulled out so as to separate from the contact surface 28e2.

[0090] When the fixing flange portion 52 is pulled out, each sphere 30 can move inside the second cylindrical portion 28c, and therefore does not prevent the removal of the cutting blade 50. Returning to Figure 1, other elements of the cutting device 2 will now be described.

[0091] The cutting unit 16 is fixed to the lower end of a Z-axis direction moving plate 60. The Z-axis direction moving plate 60 is slidably attached to a pair of guide rails 62 arranged along the Z-axis direction.

[0092] A ball screw 64, whose longitudinal direction is arranged along the Z-axis direction, is provided between the pair of guide rails 62. A nut portion (not shown) provided on the back side of the Z-axis direction moving plate 60 is rotatably connected to the ball screw 64.

[0093] A drive source 66 such as a stepping motor is provided at the upper end of the ball screw 64. When the drive source 66 is operated, the Z-axis direction moving plate 60 moves along the Z-axis. The Z-axis direction moving plate 60, the pair of guide rails 62, the nut portion, the ball screw 64, the drive source 66, etc. constitute a cutting feed mechanism (Z-axis direction moving mechanism) 68.

[0094] The pair of guide rails 62 of the cutting feed mechanism 68 are fixed to a Y-axis direction moving plate 70. The Y-axis direction moving plate 70 is slidably attached to a pair of guide rails 72 arranged along the Y-axis direction.

[0095] A ball screw 74, whose longitudinal direction is arranged along the Y-axis direction, is provided between the pair of guide rails 72. A nut portion (not shown) provided on the back side of the Y-axis direction moving plate 70 is rotatably connected to the ball screw 74.

[0096] A drive source (not shown), such as a stepping motor, is provided at one end of the ball screw 74. When this drive source is operated, the Y-axis direction moving plate 70 moves along the Y-axis. The Y-axis direction moving plate 70, the pair of guide rails 72, the nut portion, the ball screw 74, the drive source, etc. constitute an indexing feed mechanism (Y-axis direction moving mechanism) 76.

[0097] The pair of guide rails 72 of the indexing mechanism 76 are fixed to one side of a cantilever-shaped support structure 78. The base of the support structure 78 is fixed to the rear of the opening 4b.

[0098] When cutting the workpiece 11 with the cutting unit 16, the spindle 22 is rotated and the cutting blade 50 is cut into the workpiece 11 while supplying cutting fluid such as pure water (not shown) to the workpiece 11 held by suction on the holding surface 10a.

[0099] When the spindle 22 is rotated, each sphere 30 is pushed outward in the radial direction 28c3 by centrifugal force (see FIG. 5), so the cutting blade 50 is fixed to the spindle 22 more firmly than when the spindle 22 is not rotating.

[0100] Figure 5 is a partial cross-sectional side view of the blade mount 28 etc. during cutting. In Figure 5, the centrifugal force acting on each sphere 30 is indicated by arrow B. During cutting, the chuck table 10 is fed for processing by a processing feed mechanism (not shown).

[0101] An indexing feed mechanism 76 is used for indexing the cutting blade 50, and a cutting feed mechanism 68 is used for adjusting the cutting feed position of the cutting blade 50. After cutting, the workpiece unit 17 is transported to a cleaning unit 80 (see FIG. 1) by a second transport unit (not shown).

[0102] The cleaning unit 80 is provided in a circular opening 4c located behind the opening 4b. Each device chip (i.e., workpiece 11 separated by cutting) cleaned by the cleaning unit 80 is transported to a cassette 8 by a first transport unit.

[0103] The operation of the cutting device 2 is controlled by a control unit (not shown). The control unit is configured by a computer including, for example, a processor (processing device) represented by a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory.

[0104] The auxiliary storage device stores software including a predetermined program. The functions of the control unit are realized by operating the processing device and the like in accordance with this software.

[0105] In this embodiment, the hubless cutting blade 50 can be fixed to the blade mount 28 without using a fixing nut. This eliminates the need for a torque sensor, and requires less skill from the operator than when using a fixing nut.

[0106] Next, a second embodiment will be described. Fig. 6 is a partial cross-sectional side view of a blade mount 28 and other components according to the second embodiment. The blade mount 28 of the second embodiment includes a gas supply passage 28g, which can communicate with the air supply source 26, inside the second cylindrical portion 28c and the receiving flange portion 28e.

[0107] Gas supply passage 28g has, at one end thereof, opening 28g1 formed on the inner circumferential surface of receiving flange 28e. Opening 28g1 is not blocked by second movable body 36 even when movable body 38 is in the retracted state, and is located in a position exposed to cavity 28f.

[0108] Therefore, even when the movable body 38 is in the retracted state, the air 26a supplied from the through-hole 22d of the spindle 22 can enter the gas supply passage 28g from the hollow portion 28f via the opening 28g1.

[0109] The other end of the gas supply passage 28g is connected to an annular groove (ejection port) 28g2. The groove 28g2 is formed annularly on the outer circumferential side surface of the second cylindrical portion 28c, extending around the entire circumference of the second cylindrical portion 28c.

[0110] Groove portion 28g2 is located between through hole 28d and base end portion 28c1 in the longitudinal direction of second cylindrical portion 28c, and when fixed flange portion 52 is positioned on second cylindrical portion 28c, it faces the inner side surface of through opening 52e of fixed flange portion 52 in radial direction 28c3.

[0111] In this state, air 26a can be ejected from groove 28g2 onto the inner peripheral side surface of through-opening 52e to move fixed flange 52 in radial direction 28c3, thereby correcting the inclination of fixed flange 52 relative to second cylindrical portion 28c.

[0112] For example, when the edge of the through-opening 52e of the fixed flange portion 52 on the back surface 52b side is wedged into the second cylindrical portion 28c, the air 26a is ejected from the groove portion 28g2, thereby allowing the fixed flange portion 52 to swing while being placed on the second cylindrical portion 28c.

[0113] As a result, for example, the inclination of the back surface 52b of the fixed flange portion 52 can be corrected so that the contact surface 52b1 becomes approximately parallel to the contact surface 28e2. Next, a third embodiment will be described. Figure 7 is a cross-sectional view of a cutting blade 50 and a fixed flange portion 52 according to the third embodiment.

[0114] In the third embodiment, an annular contact surface 52b2 having an outer diameter smaller than the inner diameter of the contact surface 52b1 is formed on the back surface 52b of the fixing flange portion 52. The positions of the contact surfaces 52b1 and 52b2 in the thickness direction 52d are approximately the same.

[0115] An annular blade mounting portion 52f having an outer diameter smaller than the inner diameter of the contact surface 52b2 is provided on the rear surface 52b side of the fixing flange portion 52 so as to protrude further toward the rear surface 52b than the contact surface 52b2.

[0116] The cutting blade 50 is placed on the blade placing portion 52f so that the inner peripheral side surface of the cutting blade 50 contacts the outer peripheral side surface of the blade placing portion 52f. In addition, a groove portion 52g recessed to a predetermined depth in the radial direction 52c is formed around the entire circumference of the outer peripheral side surface of the blade placing portion 52f.

[0117] A resin O-ring 52h is provided in the groove 52g. The inner diameter of the O-ring 52h when no load is applied is set to be slightly smaller than the inner diameter of the groove 52g, and when the O-ring 52h is fitted in the groove 52g, the O-ring 52h is bound to the outer peripheral side surface of the blade mounting portion 52f by a restoring force acting inward in the radial direction 52c.

[0118] The cutting blade 50 placed on the blade placement portion 52f is sandwiched between the contact surface 52b2 and the O-ring 52h in the thickness direction 52d. As a result, the hubless cutting blade 50 is integrated with the fixing flange portion 52.

[0119] Generally, the thickness of the hubless cutting blade 50 is very thin, about 100 μm to 200 μm, and it is relatively easy to break when subjected to stress in the thickness direction, so that the worker may need to be skilled in handling it.

[0120] However, by integrating the cutting blade 50 and the fixed flange portion 52, the cutting blade 50 becomes easier to handle (e.g., transport), and the level of skill required of the worker can be reduced compared to when the cutting blade 50 and the fixed flange portion 52 are not integrated.

[0121] In the third embodiment, the structure of the receiving flange portion 28e is also changed from that of the first and second embodiments to match the structure of the fixing flange portion 52. Fig. 8 is a partial cross-sectional side view of the blade mount 28 etc. according to the third embodiment.

[0122] The receiving flange portion 28e according to the third embodiment has an annular fitting portion 28e3 formed in place of the blade mounting portion 28e1, into which the inner periphery of the blade mounting portion 52f fits. In addition, an annular recess 28e4 is formed on the outer periphery of the fitting portion 28e3 to accommodate the blade mounting portion 52f and the O-ring 52h.

[0123] In the third embodiment, as in the first and second embodiments, the hubless cutting blade 50 can be fixed to the blade mount 28 without using a fixing nut.

[0124] In addition, the structures, methods, etc. according to the above-described embodiments may be modified as appropriate without departing from the scope of the present invention. For example, the gas supply passage 28g may be applied to the blade mount 28 according to the third embodiment. [Explanation of symbols]

[0125] 2: cutting device, 4: base, 4a, 4b, 4c: opening, 6: elevator, 8: cassette 10: chuck table, 10a: holding surface, 12: table cover, 14: cover member 11: workpiece, 13: dicing tape, 15: frame, 15a: opening 16: Cutting unit 17: Workpiece unit 20: Spindle housing, 22: Spindle 22a: large diameter portion, 22b: small diameter portion, 22c: groove portion, 22d: through hole 24: O-ring, 26: air supply source (gas supply source) 26a: Air (gas), 26b: Pipe section, 26c: Solenoid valve 28: Blade mount, 28a: First cylindrical portion, 28b: Ring 28c: second cylindrical portion (boss portion), 28c1: base end portion, 28c2: tip end portion, 28c3: radial direction 28d: through hole, 28e: receiving flange portion, 28e1: blade mounting portion 28e2: contact surface (first contact surface), 28e3: fitting portion, 28e4: recess, 28f: cavity portion 28g: Gas supply passage, 28g1: Opening, 28g2: Groove (spout) 30: Sphere (fixed part) 32: first moving body, 32a: cylindrical side surface area, 32b: recessed area, 32c: through hole 34: Male thread 36: second moving body, 36a: female thread, 36b: annular surface, 36c: recess 36d: bearing ball, 36e: protrusion, 38: moving body 40: Fixing ring, 42: Coil spring 50: cutting blade, 50a: one surface, 50b: other surface, 50c: through opening 52: fixed flange portion, 52a: surface, 52a1: small diameter region, 52a2: large diameter region 52a3: groove, 52a4: edge 52b: rear surface, 52b1, 52b2: contact surface, 52c: radial direction, 52d: thickness direction 52e: through-hole, 52f: blade mounting portion, 52g: groove portion, 52h: O-ring 56: Ingress / egress mechanism, 58: Cutting blade fixing mechanism 60: Z-axis direction moving plate, 62, 72: guide rail, 64, 74: ball screw 66: driving source, 68: cutting feed mechanism, 70: Y-axis direction moving plate 76: Indexing feed mechanism, 78: Support structure, 80: Cleaning unit, A, B: Arrows

Claims

1. A cutting blade fixing mechanism for fixing a hubless cutting blade including an annular cutting edge having a first through opening at a radial center portion to a spindle, a blade mount fixed to the tip end of the spindle, the blade mount having a cylindrical boss portion inserted into the first through opening, and a receiving flange portion including a first annular contact surface that protrudes radially outward from a base end of the boss portion in the length direction of the boss portion and is capable of contacting one side of the cutting blade; an annular fixing flange portion having an annular back surface having an annular second contact surface capable of contacting the other side of the cutting blade located opposite to the one surface, an annular front surface located opposite to the back surface in the thickness direction, and a second through opening located in the center in the radial direction, and capable of clamping the cutting blade together with the receiving flange portion by inserting the boss portion into the second through opening; Equipped with The blade mount is a fixing member that protrudes radially outward from the outer peripheral side surface of the boss portion and presses the fixing flange portion from the front surface side to the back surface side when fixing the cutting blade together with the fixing flange portion to the blade mount, thereby clamping the cutting blade between the receiving flange portion and the fixing flange portion, thereby fixing the cutting blade to the blade mount; an inserting / retracting mechanism that is provided inside the boss portion and that causes a part of the fixing member to protrude radially outward from the outer peripheral side surface of the boss portion when fixing the cutting blade to the blade mount, and that allows the fixing member to move radially inward from the outer peripheral side surface of the boss portion when removing the cutting blade from the blade mount, the fixing member has a plurality of spheres spaced apart from one another in the circumferential direction of the boss portion, A side surface of the boss portion is provided with a plurality of through holes, each having a diameter that allows a portion of one sphere to protrude therethrough, the insertion / removal mechanism includes a moving body that is movable along a length direction of the boss portion on the inner side of the boss portion, the movable body has a recessed area on its outer periphery, the diameter of which decreases from the tip end of the boss portion to the base end thereof; when the movable body moves toward the base end of the boss portion, a portion of each sphere is pushed out of the recessed region and protrudes radially outward beyond the outer circumferential surface of the boss portion through a through hole at a corresponding position, When the movable body moves toward the tip end of the boss portion, each sphere can move radially inward from the outer peripheral side surface of the boss portion, A cutting blade fixing mechanism characterized in that a portion of each sphere protrudes radially outward beyond the outer peripheral side surface of the boss portion, causing each sphere to press against the fixing flange portion, and the cutting blade is clamped between the fixing flange portion and the receiving flange portion, thereby fixing the cutting blade to the blade mount.

2. The blade mount includes a gas supply passage therein that can communicate with a gas supply source; 2. The cutting blade fixing mechanism according to claim 1, characterized in that the gas supply passage is provided in an annular shape on the outer peripheral side surface of the boss portion of the blade mount, and an outlet capable of ejecting gas is connected to the inner peripheral side surface of the second through opening of the fixing flange portion arranged on the boss portion.

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