Processing equipment

Abstract

To provide a processing device which can resolve a problem that an operator operates a grinding device without knowing an occurrence of a failure to damage a workpiece or break other means.SOLUTION: A processing device includes: a housing 52 which covers each means 4; an openable and closable panel 54 which is formed at the housing 52 and enables access to each means 4; and a monitor 56 which at least displays a pattern diagram S including the panel 54 and each means 4. Control means shows the panel 54 which is opened or closed in the pattern diagram S when the panel 54 is opened or closed and shows each means 4, in which a failure occurs, in the pattern diagram S when the failure occurs in each means 4.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a processing apparatus including various means including holding means for holding a workpiece and processing means for processing the workpiece held by the holding means, and control means for controlling the various means. [Background technology]

[0002] A wafer with multiple devices such as ICs and LSIs formed on its surface along planned dividing lines is cut to the desired thickness using a grinding machine, and then divided into individual device chips using a dicing machine and laser processing machine. Each of the divided device chips is used in electrical equipment such as mobile phones and personal computers.

[0003] The grinding apparatus includes a holding means for holding the wafer, a thickness measuring means disposed adjacent to the holding means for measuring the thickness of the wafer, a processing means having a rotatable grinding wheel with a ring-shaped arrangement of grinding stones for grinding the wafer held by the holding means, a cassette table on which a cassette containing a plurality of wafers is placed, a carrying-in / out means for carrying wafers in and out of the cassette placed on the cassette table, a temporary receiving table for temporarily receiving the wafers carried out by the carrying-in / out means, a first transport means for transporting the wafer from the temporary receiving table to the holding means, and a second transport means for carrying the wafer out of the holding means and to a cleaning means, and can process the wafer to the desired thickness fully automatically (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2006-237333 Summary of the Invention [Problem to be solved by the invention]

[0005] However, if a malfunction (trouble) occurs in any of the various means, such as the loading / unloading means, first and second transport means, or thickness measurement means, the operator must open the panels on the housings that cover the various means, access the malfunctioning means, confirm the nature of the malfunction, and then leave the grinding equipment to retrieve the tools and parts necessary for repair or replacement.

[0006] In such a case, there is a problem that the operator who has reserved the next use of the grinding device may operate the grinding device without knowing that a malfunction has occurred, damaging the wafers or even causing other means to malfunction.

[0007] Such problems can occur not only in grinding machines, but also in various processing machines including dicing machines and laser processing machines.

[0008] An object of the present invention is to provide a processing apparatus that can eliminate the problem of an operator operating the processing apparatus without being aware of the occurrence of a malfunction, resulting in damage to a workpiece such as a wafer or causing a malfunction in other means. [Means for solving the problem]

[0009] According to the present invention, there is provided the following processing device that solves the above-mentioned problems. "A processing device comprising various means including a holding means for holding a workpiece and a processing means for processing the workpiece held by the holding means, and a control means for controlling the various means, a housing that covers the various means; a panel that is formed on the housing and that can be opened and closed to enable access to the various means; and a monitor that displays at least a schematic diagram including the panel and the various means; When the panel is opened or closed, the control means shows the opened or closed panel in the schematic diagram, and when a malfunction occurs in the various means, shows the various means in which the malfunction occurs in the schematic diagram. death, The schematic diagram is: If the panel is not opened or closed and there is no malfunction in the various means, it is displayed in one color. When the panel is opened or closed, the color of the panel is changed and displayed. If a malfunction occurs in any of the various means, the color of the malfunctioning means is changed and displayed. A processing device is provided.

[0011] It is desirable to provide a reset button to return the schematic diagram to the state it was in before the panel was opened or closed and the various means had no malfunctions. [Effects of the Invention]

[0012] The processing device of the present invention comprises: A processing apparatus including various means including a holding means for holding a workpiece and a processing means for processing the workpiece held by the holding means, and a control means for controlling the various means, a housing that covers the various means; a panel that is formed on the housing and that can be opened and closed to enable access to the various means; and a monitor that displays at least a schematic diagram including the panel and the various means; When the panel is opened or closed, the control means shows the opened or closed panel in the schematic diagram, and when a malfunction occurs in the various means, shows the various means in which the malfunction occurs in the schematic diagram. death, The schematic diagram is: If the panel is not opened or closed and there is no malfunction in the various means, it is displayed in one color. When the panel is opened or closed, the color of the panel is changed and displayed. If a malfunction occurs in any of the various means, the color of the malfunctioning means is changed and displayed. Therefore, it is possible to eliminate the problem that an operator operates the processing device without knowing that a malfunction has occurred, which may result in damage to the workpiece or breakdown of other means. [Brief explanation of the drawings]

[0013] [Figure 1] 1 is a perspective view of a processing apparatus (grinding apparatus) configured according to the present invention; [Figure 2] Schematic diagram displayed on the monitor shown in Figure 1. [Figure 3] A schematic diagram that appears on the monitor when a malfunction occurs. DETAILED DESCRIPTION OF THE INVENTION

[0014] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a processing apparatus constructed according to the present invention will now be described with reference to the drawings.

[0015] (Grinding device 2) 1 shows a grinding device 2 as an example of a processing device configured according to the present invention. Note that the processing device of the present invention is not limited to the grinding device 2, and may be, for example, a dicing device equipped with a rotatable cutting blade that performs cutting processing on a workpiece, or a laser processing device that performs laser processing on a workpiece, etc.

[0016] The grinding device 2 of the illustrated embodiment includes various means 4 for carrying out various operations such as conveying, grinding, and cleaning of the workpiece, and a control means 6 for controlling the various means 4.

[0017] (Various means 4) As shown in FIG. 1, the various means 4 include a holding means 8 for holding a workpiece, and a processing means 10 for processing the workpiece held by the holding means 8.

[0018] (Holding means 8) The holding means 8 has a circular turntable 14 rotatably supported on the upper surface of the base 12, and three chuck tables 16 arranged at equal intervals in the circumferential direction around the periphery of the upper surface of the turntable 14. Each chuck table 16 is sequentially positioned at an attachment / detachment position indicated by the symbol A, a rough grinding position indicated by the symbol B, and a finish grinding position indicated by the symbol C by the rotation of the turntable 14.

[0019] A circular porous suction chuck 18 connected to suction means (not shown) is disposed at the upper end of each chuck table 16. The suction means generates a suction force on the upper surface of the suction chuck 18 in the chuck table 16, thereby suction-holding a workpiece placed on the upper surface of the suction chuck 18. The chuck table 16 is rotated around its vertical axis by a chuck table motor (not shown).

[0020] (Processing means 10) The processing device of the illustrated embodiment is a grinding device 2 as an example of the processing device of the present invention, and processing means 10 of the illustrated embodiment is configured as grinding means for grinding the upper surface of a workpiece held on a chuck table 16. Processing means 10 is disposed at an end of base 12 (the rear end in FIG. 1).

[0021] The processing means 10 of the illustrated embodiment includes a rough grinding unit 22 having a grinding wheel 20 for rough grinding, and a finish grinding unit 26 having a grinding wheel 24 for finish grinding.

[0022] When the workpiece held on the chuck table 16 is positioned at rough grinding position B by the rotation of the turntable 14, it is subjected to rough grinding by the rough grinding unit 22, and then when the workpiece is positioned at finish grinding position C by the rotation of the turntable 14, it is subjected to finish grinding by the finish grinding unit 26.

[0023] The various means 4 in the illustrated embodiment include a first cassette table 30 on which a first cassette 28 is placed, a second cassette table 34 on which a second cassette 32 is placed, and a loading / unloading means 36 arranged between the first cassette table 30 and the second cassette table 34. The first cassette 28 contains a plurality of workpieces W before grinding. The second cassette 32 contains a plurality of workpieces W after grinding. The workpieces W may be, for example, disk-shaped wafers made of a semiconductor material such as silicon.

[0024] The carry-in / out means 36 includes an articulated arm 38 and a U-shaped suction piece 40 attached to the tip of the articulated arm 38. In the carry-in / out means 36, the workpiece W before grinding is held by suction with the suction piece 40 and carried out from the first cassette 28, and the workpiece W after grinding is held by suction with the suction piece 40 and carried into the second cassette 32.

[0025] The various means 4 also include a temporary placement table 42 on which the workpiece W before grinding, which is transported from the first cassette 28 by the transport means 36, is temporarily placed, and a cleaning water spray nozzle 44 which sprays cleaning water toward the upper surface (grinding surface) of the workpiece W positioned at the attachment / detachment position A after finish grinding.

[0026] Furthermore, the various means 4 include a first conveying means 46 that conveys the workpiece W from the temporary receiving table 42 to the holding means 8, a cleaning means 48 that sprays cleaning water onto the workpiece W after grinding to further clean the workpiece W and sprays dry air onto the cleaned workpiece W to dry the workpiece W, and a second conveying means 50 that conveys the workpiece W from the holding means 8 to the cleaning means 48.

[0027] The first transport means 46 transports the workpiece W before grinding, which is temporarily placed on the temporary placement table 42, to the chuck table 16 positioned at the attachment / detachment position A. The second transport means 50 transports the workpiece W after grinding, which is positioned at the attachment / detachment position A, to the cleaning means 48. The workpiece W cleaned by the cleaning means 48 is carried into the second cassette 32 by the carry-in / out means 36.

[0028] (Control means 6) The control means 6 is composed of a computer including a central processing unit (CPU) that performs calculations according to a control program, a read-only memory (ROM) that stores the control program, etc., and a readable and writable random access memory (RAM) that stores the calculation results, etc.

[0029] As shown in FIG. 1, the grinding apparatus 2 of the illustrated embodiment includes a housing 52 that covers the various means 4, a panel 54 formed on the housing 52 that can be opened and closed to allow access to the various means 4, and a monitor 56 that displays at least a schematic diagram S (see FIGS. 2 and 3) including the panel 54 and the various means 4.

[0030] (Case 52) The housing 52 is formed by combining a plurality of plate materials into a rectangular parallelepiped shape. The housing 52, which covers the various means 4, isolates the space inside the housing 52 from the outside, thereby preventing the intrusion of dust and the like from the outside and preventing the scattering of grinding chips generated from the workpiece W from inside the housing 52 to the outside. The housing 52 also plays a role in ensuring the safety of the operator while the workpiece W is being ground by the grinding device 2.

[0031] (Panel 54) The panels 54 are attached to the housing 52 via hinges (not shown) so as to be able to open and close freely. As can be understood by referring to Fig. 1, the panels 54 in the illustrated embodiment are provided in four locations. Each of the four panels 54 is made up of a pair of double doors.

[0032] Each panel 54 is provided with an open / close detection means (not shown) that detects whether each panel 54 is open or closed. When the open / close detection means detects that a panel 54 is open or closed, information about the open / closed panel 54 is sent from the open / close detection means to the control means 5.

[0033] (Monitor 56) As shown in Fig. 1, the monitor 56 is attached to the outer surface of the housing 52. In the illustrated embodiment, when the panel 54 is not opened or closed and no malfunction occurs in the various means 4, the monitor 56 displays a schematic diagram S as shown in Fig. 2. On the other hand, when the panel 54 is opened or closed, the opened or closed panel 54 is shown in the schematic diagram S, and when a malfunction occurs in the various means 4, the malfunctioning means 4 is shown in the schematic diagram S (see Fig. 3).

[0034] The monitor 56 displays the schematic diagram S including the panel 54 and the various means 4, as well as the processing conditions of the grinding device 2. The monitor 56 may be a touch panel type, in which case an input screen for inputting the processing conditions, etc. is also displayed on the monitor 56. The grinding device 2 may be provided with input means 58 (for example, a keyboard) for inputting the processing conditions, etc.

[0035] (Reset button) The grinding device 2 also has a reset button (not shown) for returning the schematic diagram S to the state in which the panel 54 was not opened or closed and the various means 4 were not malfunctioning after the opened or closed panel 54 or the various means 4 in which a malfunction has occurred is shown in the schematic diagram S.

[0036] If the monitor 56 is a touch panel type, the reset button may be provided on the monitor 56. Alternatively, the reset button may be provided separately from the monitor 56, for example, on the input means 58.

[0037] Next, the operation of the grinding device 2 will be described.

[0038] When grinding the workpiece W, first, the panel 54 close to the first cassette table 30 is opened, and the first cassette 28 containing the workpiece W before grinding is placed on the first cassette table 30. Next, the panel 54 close to the second cassette table 34 is opened, and the empty second cassette 32 for containing the workpiece W after grinding is placed on the second cassette table 34.

[0039] Also, since the panel 54 has been opened, the reset button is pressed to return the display of the schematic diagram S to the state it was in before the panel 54 was opened or closed. Then, processing conditions are appropriately input and the grinding device 2 is operated.

[0040] Then, the control means 6 sequentially executes the following steps: a temporary placement process in which the workpiece W is removed from the first cassette 28 by the carry-in / out means 36 and temporarily placed on the temporary placement table 42; a first transport process in which the workpiece W temporarily placed on the temporary placement table 42 is transported by the first transport means 46 to the chuck table 16 at the attachment / detachment position A; a grinding process in which the processing means 10 performs rough grinding and finish grinding on the upper surface of the workpiece W held on the chuck table 16; a cleaning water spraying process in which cleaning water is sprayed from the cleaning water spray nozzle 44 onto the upper surface of the ground workpiece W; a second transport process in which the ground workpiece W is transported from the chuck table 16 to the cleaning means 48 by the second transport means 50; a cleaning / drying process in which the ground workpiece W is cleaned and dried by the cleaning means 48; and a cassette carrying-in process in which the cleaned workpiece W is carried from the cleaning means 48 to the second cassette 32 by the carry-in / out means 36.

[0041] Furthermore, when the panel 54 is not opened or closed and there is no malfunction in the various means 4, the control means 6 causes a schematic diagram S including the panel 54 and the various means 4, as shown in Fig. 2, to be displayed on the monitor 56 when the schematic diagram display is selected. When the panel 54 is not opened or closed and there is no malfunction in the various means 4, the schematic diagram S can be displayed in one color.

[0042] On the other hand, when the panel 54 is opened or closed, the control means 6 shows the opened or closed panel 54 in schematic diagram S, and when a malfunction occurs in any of the various means 4, the various means 4 in which the malfunction occurs are shown in schematic diagram S.

[0043] For example, as shown in Fig. 3, the various means 4 in which a malfunction has occurred (in the example shown in Fig. 3, the temporary placement table 42) is highlighted in the schematic diagram S. In this case, the various means 4 in which a malfunction has occurred may be displayed in a different color. Alternatively, the various means 4 in which a malfunction has occurred may be displayed in a flashing manner.

[0044] When the schematic diagram S on the monitor 56 indicates that a problem has occurred with the temporary table 42, the operator opens the panel 54 closest to the temporary table 42 to check the nature of the problem. The open / close detection means then detects that the panel 54 has been opened, and a message to that effect is output to the control means 6. As a result, as shown in FIG. 3, the open panel 54 is highlighted in the schematic diagram S along with the temporary table 42.

[0045] As a result, even if an operator who has confirmed that a malfunction has occurred in the temporary placement table 42 leaves the grinding device 2 to retrieve tools and parts necessary for repair or replacement, the operator can still notify other operators that a malfunction has occurred in the temporary placement table 42 of the grinding device 2. This eliminates the problem of other operators operating the grinding device 2 in which a malfunction has occurred, damaging the workpiece W or causing malfunctions in the various other means 4.

[0046] As described above, in the grinding apparatus 2, when a panel 54 is opened or closed, the opened or closed panel 54 is shown in the schematic diagram S, and when a malfunction occurs in any of the various means 4, the malfunctioning means 4 is shown in the schematic diagram S. Therefore, when the operator returns to the grinding apparatus 2, he or she can check from the schematic diagram S whether any of the panels 54 other than the panel 54 close to the temporary placement table 42 has been opened or closed, and whether any of the various means 4 other than the temporary placement table 42 has malfunctioned. [Explanation of symbols]

[0047] 2: Grinding equipment (processing equipment) 4:Various means 6: Control means 8: Holding means 10: Processing means 52: Cabinet 54: Panel 56: Monitor S: Schematic diagram W: Workpiece

Claims

1. A processing apparatus including various means including a holding means for holding a workpiece and a processing means for processing the workpiece held by the holding means, and a control means for controlling the various means, a housing that covers the various means; a panel that is formed on the housing and that can be opened and closed to enable access to the various means; and a monitor that displays at least a schematic diagram including the panel and the various means; the control means, when the panel is opened or closed, indicates the opened or closed panel in the schematic diagram, and when a malfunction occurs in the various means, indicates the various means in which the malfunction occurs in the schematic diagram; The schematic diagram is: If the panel is not opened or closed and there is no malfunction in the various means, it is displayed in one color. When the panel is opened or closed, the color of the panel is changed and displayed. When a malfunction occurs in any of the various means, the color of the malfunctioning means is changed and displayed in the processing device.

2. 2. The processing apparatus according to claim 1, further comprising a reset button for returning the schematic diagram to a state in which there were no problems with the opening and closing of the panel and the various means.

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