Angle detection device and motor device

Abstract

To realize an angle detection device with a simple configuration.SOLUTION: An angle detection device 1 includes: an angle sensor 10 configured to detect a rotating magnetic field MF that changes periodically in response to a rotation angle θM of a motor 110 and output a first detection signal S1 and a second detection signal S2 having a phase difference whose value is not an integer multiple of 90°; and a logic signal generation section 20 configured to generate a first logic signal Su using the first detection signal S1, generate a second logic signal Sv having a phase different from that of the first logic signal Su using the second detection signal S2, and generate a third logic signal Sw having a phase different from those of the first logic signal Su and the second logic signal Sv using the first detection signal S1 and the second detection signal S2.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to an angle detection device configured to detect the rotation angle of a motor, a motor device including a motor and an angle detection device, and a logic signal generator. [Background technology]

[0002] Brushless motors (also known as brushless DC motors) use an angle detector to detect the rotation angle of the brushless motor. Known angle detectors include detectors that use magnetic detection elements such as Hall elements, and optical detectors that use light. The detection signal from the angle detector is used for feedback control of the rotation angle and rotation speed of the brushless motor.

[0003] Brushless motors are generally three-phase motors driven by three-phase AC voltage. Three-phase motors contain multiple coils that are controlled so that voltage is applied to each coil at different timings. When a three-phase motor contains three coils, the timing of voltage application can be controlled using three logic signals (signals that represent two states, "High" and "Low") that are 120° out of phase with each other. The detection signals from an angle detector are used to generate the three logic signals.

[0004] Patent Document 1 discloses a drive device that generates control signals for energizing three-phase coils of a motor from three-phase sinusoidal signals obtained from a magnetically sensitive element. Patent Document 2 discloses the application of a magnetic sensor that includes three magnetic detection elements whose sensitivity axis directions are shifted by 60 degrees and that is configured to output three-phase output signals to the rotation control of a brushless motor. Patent Document 3 discloses a motor control device that controls three-phase drive power using an angle detection output that is approximated to a linear function generated from four detection outputs obtained from the outputs of two magnetic detection units.

[0005] Patent document 4 discloses a sensor device having a bridge circuit including a pair of magnetoresistive sensor elements in which the magnetization directions of the bias layer portions are oriented parallel to a reference line and antiparallel to each other, and another magnetoresistive sensor element in which the magnetization direction of the bias layer portion forms an angle of 45° with respect to the reference line. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Publication No. 134792 / 1983 [Patent Document 2] International Publication No. 2011 / 111494 [Patent Document 3] Japanese Patent Application Laid-Open No. 2015-49047 [Patent Document 4] Japanese Patent Application Publication No. 10-70325 Summary of the Invention [Problem to be solved by the invention]

[0007] To reduce the cost of drive circuits for brushless motors, it is necessary to simplify the configuration of the drive circuits. However, in the past, the configuration of the angle detector and the logic signal generator that generates multiple logic signals from the detection signal of the angle detector were complicated, which resulted in a problem of preventing cost reduction of the entire drive circuit.

[0008] The present invention has been made in view of the above problems, and its object is to provide an angle detection device used in a drive circuit of a motor device, the angle detection device having a simple configuration, a motor device equipped with this angle detection device, and a logic signal generator used in this angle detection device. [Means for solving the problem]

[0009] The angle detection device of the present invention is used in a motor drive circuit and includes an angle sensor configured to detect a physical quantity that changes periodically in conjunction with the rotation angle of the motor and output first and second detection signals whose phase difference is a value excluding an integer multiple of 90°, and a logic signal generation unit configured to generate a first logic signal using the first detection signal, generate a second logic signal using the second detection signal and having a phase different from that of the first logic signal, and generate a third logic signal using the first and second detection signals and having a phase different from that of each of the first and second logic signals.

[0010] A motor device of the present invention includes the angle detection device of the present invention and a motor.

[0011] A logic signal generator of the present invention is configured to generate three logic signals of different phases from each other. The logic signal generator of the present invention is configured to acquire a first detection signal and a second detection signal whose phase difference is a value excluding an integer multiple of 90°, generate and output a first logic signal using the first detection signal, generate and output a second logic signal of a different phase from the first logic signal using the second detection signal, and generate and output a third logic signal of a different phase from each of the first logic signal and the second logic signal using the first detection signal and the second detection signal. [Effects of the Invention]

[0012] In the present invention, first to third logic signals having mutually different phases are generated using first and second detection signals whose phase difference is a value excluding an integer multiple of 90°. As a result, the present invention has the effect of realizing an angle detector with a simple configuration. [Brief explanation of the drawings]

[0013] [Figure 1] 1 is an explanatory diagram showing the configuration of a motor device according to a first embodiment of the present invention. [Figure 2]FIG. 1 is an explanatory diagram showing the inside of an angle detection device according to a first embodiment of the present invention. [Figure 3] 1 is a circuit diagram showing a circuit configuration of an angle detection device according to a first embodiment of the present invention. [Figure 4] FIG. 2 is an explanatory diagram showing definitions of directions and angles in the first embodiment of the present invention. [Figure 5] FIG. 2 is a perspective view showing a part of a resistor portion in the first embodiment of the present invention. [Figure 6] 3A to 3C are waveform diagrams showing waveforms of first and second detection signals in the first embodiment of the present invention. [Figure 7] 4 is a timing chart showing first to third logic signals in the first embodiment of the present invention. [Figure 8] FIG. 3 is an explanatory diagram for explaining the effect of the angle sensor according to the first embodiment of the present invention. [Figure 9] FIG. 6 is an explanatory diagram showing the configuration of a motor device according to a second embodiment of the present invention. [Figure 10] FIG. 10 is a characteristic diagram showing the relationship between the rotation angle and the rotating magnetic field angle of the motor in the second embodiment of the present invention. [Figure 11] 10A and 10B are waveform diagrams showing waveforms of first and second detection signals of a comparative example. [Figure 12] 10 is a timing chart showing first to third logic signals of a comparative example. [Figure 13] FIG. 10 is a waveform diagram showing waveforms of first and second detection signals in the second embodiment of the present invention. [Figure 14] 10 is a timing chart showing first to third logic signals in the second embodiment of the present invention. [Figure 15] FIG. 10 is an explanatory diagram showing the inside of an angle detection device according to a third embodiment of the present invention. [Figure 16] FIG. 10 is an explanatory diagram showing the inside of a first electronic component according to a fourth embodiment of the present invention. [Figure 17] FIG. 10 is an explanatory view showing the inside of a second electronic component according to a fourth embodiment of the present invention. [Figure 18] FIG. 11 is a circuit diagram showing a circuit configuration of an angle sensor according to a fifth embodiment of the present invention. [Figure 19] FIG. 10 is an explanatory diagram showing a first example of the configuration of an angle detection device according to a fifth embodiment of the present invention. [Figure 20] FIG. 13 is an explanatory diagram showing a second example of the configuration of the angle detection device according to the fifth embodiment of the present invention. [Figure 21] FIG. 10 is a circuit diagram showing a circuit configuration of an angle detection device according to a sixth embodiment of the present invention. [Figure 22] FIG. 20 is a waveform diagram showing waveforms of first and second detection signals in the sixth embodiment of the present invention. [Figure 23] 13 is a timing chart showing first to third logic signals in the sixth embodiment of the present invention. [Figure 24] FIG. 13 is a circuit diagram showing a circuit configuration of an angle detection device according to a seventh embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0014] [First embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. First, the general configuration of a motor device according to a first embodiment of the present invention will be described with reference to Fig. 1. Fig. 1 is an explanatory diagram showing the configuration of a motor device 100 according to this embodiment.

[0015] The motor device 100 according to this embodiment includes the angle detection device 1 according to this embodiment, a motor 110, and a drive circuit 120 that drives the motor 110. The motor 110 is, for example, a three-phase brushless motor (also called a brushless DC motor). The following description will be given taking as an example a case where the motor 110 is a three-phase brushless motor. In this case, the motor 110 includes a shaft (not shown) configured to rotate about a rotation axis C, a rotor 111 fixed to the shaft (not shown), a stator 112, and a plurality of coils.

[0016] 1 shows an example in which the number of slots in the stator 112 is three. In this example, the motor 110 includes a first coil 113u, a second coil 113v, and a third coil 113w as multiple coils. The first coil 113u, the second coil 113v, and the third coil 113w are also referred to as a U-phase coil, a V-phase coil, and a W-phase coil, respectively. The first coil 113u, the second coil 113v, and the third coil 113w are arranged at 120° intervals around the rotation axis C.

[0017] The rotor 111 is composed of a magnetic field generator 5 that generates a magnetic field. Fig. 1 shows a cylindrical magnet as an example of the magnetic field generator 5. This magnet is a two-pole magnet with a north pole and a south pole that are arranged symmetrically with respect to an imaginary plane that includes the rotation axis C.

[0018] The number of slots in the stator 112 is not limited to three, but may be a number greater than three, such as six or nine. Similarly, the number of poles in the magnetic field generator 5 is not limited to two, but may be multiple, such as four or eight poles.

[0019] The direction of the magnetic field generated by the magnetic field generator 5 rotates in conjunction with the rotation of the motor 110, i.e., the rotation of a shaft (not shown). Hereinafter, the magnetic field generated by the magnetic field generator 5 will be referred to as the rotating magnetic field MF. The rotating magnetic field MF is shown in FIG. 4, which will be described later. The angle detection device 1 is configured to detect the rotating magnetic field MF and generate three logic signals used to control the timing of voltages applied to the first to third coils 113u, 113v, and 113w. In this embodiment, in particular, the angle detection device 1 is disposed on the rotation axis C so as to face the end face of the magnetic field generator 5. The configuration of the angle detection device 1 will be described in detail later.

[0020] The drive circuit 120 includes a control circuit 121 and an output circuit 122. The control circuit 121 is configured to receive three logic signals generated by the angle detection device 1 and an external speed command Sc. The control circuit 121 controls the output circuit 122 based on the three logic signals and the speed command Sc. The output circuit 122 applies voltages to the first to third coils 113u, 113v, and 113w in accordance with commands from the control circuit 121.

[0021] The output circuit 122 includes six switching elements (not shown). Each of the six switching elements is formed, for example, by a transistor. The control circuit 121 controls the ON / OFF of the six switching elements to control the timing at which voltages are applied to the first to third coils 113u, 113v, and 113w so that a magnetic field (hereinafter referred to as a composite magnetic field) formed by combining the magnetic fields generated by the first to third coils 113u, 113v, and 113w rotates. This timing is controlled based on three logic signals. The rotor 111 rotates due to the interaction between the magnetic field (rotating magnetic field MF) generated by the magnetic field generator 5 and the composite magnetic field.

[0022] Furthermore, the control circuit 121 compares the speed command Sc with the rotation speed of the motor 110 obtained from the three logic signals, and controls the output circuit 122 so that the rotation speed of the motor 110 follows the speed command Sc.

[0023] Next, the angle detection device 1 will be described in detail with reference to Fig. 2 and Fig. 3. Fig. 2 is an explanatory diagram showing the inside of the angle detection device 1. Fig. 3 is a circuit diagram showing the circuit configuration of the angle detection device 1.

[0024] First, an outline of the configuration of the angle detection device 1 will be described. As described above, the angle detection device 1 is used in the drive circuit 120 of the motor 110. The angle detection device 1 includes an angle sensor 10 and a logic signal generation unit 20. The angle sensor 10 and the logic signal generation unit 20 may each be in the form of a rectangular parallelepiped chip. Hereinafter, the chip including the angle sensor 10 will be referred to as a first chip 2, and the chip including the logic signal generation unit 20 will be referred to as a second chip 3. The angle detection device 1 includes the first chip 2 and the second chip 3.

[0025] 2, one of the first chip 2 and the second chip 3 is mounted on the other of the first chip 2 and the second chip 3. The angle detection device 1 further includes a substrate 4. In this embodiment in particular, the second chip 3 is mounted on the substrate 4, and the first chip 2 is mounted on the second chip 3.

[0026] The angle detection device 1 further includes a plurality of wires 41 connecting the first chip 2 and the second chip 3, a plurality of leads 43, a plurality of wires 42 connecting the second chip 3 and the plurality of leads 43, and a sealing resin 44 sealing the first chip 2 and the second chip 3.

[0027] Next, the configuration of the angle sensor 10 will be described. The angle sensor 10 is configured to detect a physical quantity that changes periodically in conjunction with the rotation angle of the motor 110, and to output a first detection signal S1 and a second detection signal S2 whose phase difference is a value excluding an integer multiple of 90°. In this embodiment, the physical quantity is a rotating magnetic field MF generated by a magnetic field generator 5. The direction of the rotating magnetic field MF rotates in conjunction with the rotation angle of the motor 110.

[0028] Here, the definitions of directions and angles in this embodiment will be described with reference to FIGS. 1, 2, and 4. FIG. 4 is an explanatory diagram illustrating the definitions of directions and angles in this embodiment. First, a direction parallel to the rotation axis C shown in FIG. 1 is defined as the Z direction. In FIG. 2, the Z direction is represented as the upward direction. As shown in FIG. 2, the first chip 2 (angle sensor 10) and the second chip 3 (logic signal generating unit 20) are stacked in the Z direction. Next, two directions perpendicular to the Z direction and orthogonal to each other are defined as the X direction and the Y direction. In FIGS. 2 and 4, the X direction is represented as the direction toward the right. In FIG. 2, the Y direction is represented as the direction from the front to the back in FIG. 2, and in FIG. 4, the Y direction is represented as the upward direction. Furthermore, the direction opposite to the X direction is represented as the -X direction, the direction opposite to the Y direction is represented as the -Y direction, and the direction opposite to the Z direction is represented as the -Z direction.

[0029] In FIG. 4, the symbol PL denotes an imaginary plane perpendicular to the rotation axis C. Hereinafter, this imaginary plane will be referred to as the reference plane PL. In this embodiment, the angle sensor 10 is configured to detect a component of the rotating magnetic field MF at a reference position PR within the reference plane PL that is parallel to the reference plane PL. In the following description, the direction of the rotating magnetic field MF refers to a direction located within the reference plane PL. The reference position PR may be the position where the reference plane PL and the rotation axis C intersect.

[0030] In Fig. 4, the direction of the rotating magnetic field MF is represented by an arrow with the symbol MF. In this embodiment, the direction of the rotating magnetic field MF is represented by the angle θ (hereinafter referred to as the rotating magnetic field angle) formed with respect to the magnetic field reference direction DR. The magnetic field reference direction DR is the X direction. The direction of the rotating magnetic field MF rotates counterclockwise in Fig. 4. The rotating magnetic field angle θ is represented by a positive value when viewed counterclockwise from the magnetic field reference direction DR, and is represented by a negative value when viewed clockwise from the magnetic field reference direction DR.

[0031] The angle sensor 10 includes a power supply terminal 10a, a ground terminal 10b, a first output terminal 10c, a second output terminal 10d, a first resistor portion 11, a second resistor portion 12, a third resistor portion 13, a fourth resistor portion 14, and a plurality of magnetic detection elements that constitute the first to fourth resistor portions 11 to 14. Each of the plurality of magnetic detection elements is configured to detect a rotating magnetic field MF.

[0032] As shown in FIG. 3, the first resistor section 11 is provided between the power supply terminal 10a and the first output terminal 10c in the circuit configuration. The second resistor section 12 is provided between the ground terminal 10b and the first output terminal 10c in the circuit configuration. The third resistor section 13 is provided between the power supply terminal 10a and the second output terminal 10d in the circuit configuration. The fourth resistor section 14 is provided between the ground terminal 10b and the second output terminal 10d in the circuit configuration. In this application, the expression "in the circuit configuration" is used to refer to the arrangement on the circuit diagram, not the arrangement in the physical configuration.

[0033] A voltage or current of a predetermined magnitude is applied to the power supply terminal 10a, and the ground terminal 10b is connected to the ground.

[0034] The first output terminal 10c outputs a signal corresponding to the potential at the connection point between the first resistor element 11 and the second resistor element 12 as a first detection signal S1. The second output terminal 10d outputs a signal corresponding to the potential at the connection point between the third resistor element 13 and the fourth resistor element 14 as a second detection signal S2.

[0035] Here, the multiple magnetic detection elements will be described. Each of the multiple magnetic detection elements may be a magnetoresistive effect element. The magnetoresistive effect element may be a TMR (tunneling magnetoresistive effect) element, a GMR (giant magnetoresistive effect) element, or an AMR (anisotropic magnetoresistive effect) element. Alternatively, each of the multiple magnetic detection elements may be an element that detects a magnetic field other than a magnetoresistive effect element, such as a Hall element.

[0036] In this embodiment, each of the multiple magnetic detection elements is a spin-valve magnetoresistive effect element (hereinafter referred to as an MR element). The spin-valve MR element includes a magnetization pinned layer having a first magnetization whose direction is fixed, a free layer which is a magnetic layer having a second magnetization whose direction is variable in response to a rotating magnetic field MF, and a gap layer disposed between the magnetization pinned layer and the free layer. The spin-valve MR element may be a TMR element or a GMR element. In a TMR element, the gap layer is a tunnel barrier layer. In a GMR element, the gap layer is a nonmagnetic conductive layer. In a spin-valve MR element, the resistance value changes depending on the angle between the second magnetization direction of the free layer and the first magnetization direction of the magnetization pinned layer. When this angle is 0°, the resistance value is minimum, and when the angle is 180°, the resistance value is maximum. In FIG. 3, the solid arrow indicates the first magnetization direction of the magnetization pinned layer in the MR element.

[0037] FIG. 5 is a perspective view showing a portion of any one of the first to fourth resistors 11 to 14. Any one of the resistors includes a plurality of lower electrodes 61, a plurality of MR elements 50, and a plurality of upper electrodes 62. The plurality of lower electrodes 61 are disposed on a substrate (not shown). Each lower electrode 61 has an elongated shape. A gap is formed between two adjacent lower electrodes 61 in the longitudinal direction. As shown in FIG. 5, an MR element 50 is disposed on the upper surface of the lower electrode 61 near each end in the longitudinal direction. The MR element 50 includes an antiferromagnetic layer 51, a magnetization fixed layer 52, a gap layer 53, and a free layer 54, which are stacked in this order from the lower electrode 61 side. The antiferromagnetic layer 51 is electrically connected to the lower electrode 61. The antiferromagnetic layer 51 is made of an antiferromagnetic material and generates exchange coupling with the magnetization fixed layer 52 to fix the magnetization direction of the magnetization fixed layer 52. The plurality of upper electrodes 62 are disposed on the plurality of MR elements 50. Each upper electrode 62 has an elongated shape, and is disposed on two adjacent lower electrodes 61 in the longitudinal direction of the lower electrodes 61 to electrically connect the free layers 54 of the two adjacent MR elements 50. With this configuration, any resistor section shown in FIG. 5 includes a plurality of MR elements 50 connected in series by the plurality of lower electrodes 61 and the plurality of upper electrodes 62.

[0038] The magnetization fixed layer 52 may be a so-called self-pinned type fixed layer (synthetic ferri-pinned layer, SFP layer). The self-pinned type fixed layer has a laminated ferri-structure in which a ferromagnetic layer, a non-magnetic intermediate layer, and a ferromagnetic layer are stacked, and the two ferromagnetic layers are antiferromagnetically coupled. When the magnetization fixed layer 52 is a self-pinned type fixed layer, the antiferromagnetic layer 51 may be omitted.

[0039] Furthermore, the arrangement of the layers 51 to 54 in the MR element 50 may be upside down compared to the arrangement shown in FIG.

[0040] Next, with reference to FIGS. 3 and 4, the first magnetization direction of the magnetization fixed layer 52 in each of the first to fourth resistance units 11 to 14 will be described. In FIG. 4, symbol D1 indicates a first reference direction that is a direction parallel to the sensitivity axis of each of the first and second resistance units 11 and 12. In particular, in this embodiment, the first reference direction D1 is a direction that serves as a reference for the first magnetization direction of the magnetization fixed layer 52 in each of the multiple MR elements 50 in the first and second resistance units 11 and 12. Symbol D2 indicates a second reference direction that is a direction parallel to the sensitivity axis of each of the third and fourth resistance units 13 and 14. In particular, in this embodiment, the second reference direction D2 is a direction that serves as a reference for the first magnetization direction of the magnetization fixed layer 52 in each of the multiple MR elements 50 in the third and fourth resistance units 13 and 14.

[0041] In this embodiment, the first reference direction D1 and the second reference direction D2 satisfy the following first requirement. Here, the direction of the rotating magnetic field MF detected by each of the multiple MR elements 50 of the first and second resistance units 11 and 12 at a predetermined timing when the rotating magnetic field MF periodically changes is defined as the first magnetic field direction, and the direction of the rotating magnetic field MF detected by each of the multiple MR elements 50 of the third and fourth resistance units 13 and 14 at the same predetermined timing is defined as the second magnetic field direction. The first requirement is that the difference between the angle that the first magnetic field direction makes with respect to the first reference direction D1 and the angle that the second magnetic field direction makes with respect to the second reference direction D2 is an angle excluding an integer multiple of 90°.

[0042] In this embodiment, the first reference direction D1 and the second reference direction D2 further satisfy the following second requirement: The angle formed between the first reference direction D1 and the second reference direction D2 is an angle excluding an integral multiple of 90°.

[0043] In this embodiment, the first reference direction D1 is the Y direction, and the second reference direction D2 is a direction rotated 60° from the Y direction (first reference direction D1) toward the -X direction. In this case, the difference between the angle that the first magnetic field direction makes with the first reference direction D1 and the angle that the second magnetic field direction makes with the second reference direction D2 is 60°. The angle between the first reference direction D1 and the second reference direction D2 is also 60°.

[0044] The first magnetization of the magnetization fixed layer 52 of each of the MR elements 50 in the first resistance section 11 includes a component in the first reference direction D1 (Y direction). The first magnetization of the magnetization fixed layer 52 of each of the MR elements 50 in the second resistance section 12 includes a component in the direction opposite to the first reference direction D1 (-Y direction).

[0045] The first magnetization of the magnetization fixed layer 52 of each of the MR elements 50 in the third resistance section 13 includes a component in the second reference direction D2. The first magnetization of the magnetization fixed layer 52 of each of the MR elements 50 in the fourth resistance section 14 includes a component in the direction opposite to the second reference direction D2.

[0046] Note that when the first magnetization of the magnetization fixed layer 52 includes a component in the specific reference direction, the component in the specific reference direction may be the main component of the first magnetization of the magnetization fixed layer 52. Alternatively, the first magnetization of the magnetization fixed layer 52 may not include a component in a direction perpendicular to the specific reference direction. In this embodiment, when the first magnetization of the magnetization fixed layer 52 includes a component in the specific reference direction, the direction of the first magnetization of the magnetization fixed layer 52 is the specific reference direction or approximately the specific reference direction.

[0047] Next, the first detection signal S1 and the second detection signal S2 will be described. In the angle sensor 10, the potential at the connection point between the first resistor unit 11 and the second resistor unit 12 changes depending on the intensity of the component of the rotating magnetic field MF parallel to the first reference direction D1 (hereinafter referred to as the first component). Therefore, the angle sensor 10 detects the intensity of the first component and outputs a signal representing the intensity as the first detection signal S1. The first detection signal S1 corresponds to the intensity of the first component, which in turn corresponds to the rotating magnetic field angle θ (see FIG. 4). The intensity of the first component may be expressed as a positive value when the direction of the first component coincides with the first reference direction D1, and as a negative value when the direction of the first component coincides with the direction opposite to the first reference direction D1.

[0048] In the angle sensor 10, the potential at the connection point between the third resistor 13 and the fourth resistor 14 changes depending on the intensity of the component of the rotating magnetic field MF parallel to the second reference direction D2 (hereinafter referred to as the second component). Therefore, the angle sensor 10 detects the intensity of the second component and outputs a signal representing the intensity as a second detection signal S2. The second detection signal S2 corresponds to the intensity of the second component, which in turn corresponds to the rotating magnetic field angle θ (see FIG. 4). The intensity of the second component may be expressed as a positive value when the direction of the second component coincides with the second reference direction D2, and as a negative value when the direction of the second component coincides with the opposite direction to the second reference direction D2.

[0049] Fig. 6 is a waveform diagram showing the waveforms of the first and second detection signals S1 and S2. In Fig. 6, the horizontal axis represents the rotation angle θM of the motor 110, and the vertical axis represents the signal magnitude. The vertical axis is expressed in arbitrary units. In this embodiment, the value of the rotation angle θM coincides with or nearly coincides with the value of the rotating magnetic field angle θ.

[0050] 6, in this embodiment, the phase difference between the first detection signal S1 and the second detection signal S2 is 60°. That is, in this embodiment, the angle between the first reference direction D1 and the second reference direction D2 is equal to the angle corresponding to the phase difference between the first detection signal S1 and the second detection signal S2.

[0051] Next, a description will be given of the configuration of the logic signal generation unit 20. The logic signal generation unit 20 is configured to acquire the first detection signal S1 and the second detection signal S2, generate and output a first logic signal Su using the first detection signal S1, generate and output a second logic signal Sv having a phase different from that of the first logic signal Su using the second detection signal S2, and generate and output a third logic signal Sw having a phase different from that of each of the first logic signal Su and the second logic signal Sv using the first detection signal S1 and the second detection signal S2.

[0052] The logic signal generating unit 20 can be realized by, for example, an application specific integrated circuit (ASIC). Note that the logic signal generating unit 20 that can be configured to have the form of a chip, such as the logic signal generating unit 20 realized by an ASIC, is also particularly called a "logic signal generator."

[0053] The logic signal generating unit 20 includes a power supply terminal 20a, a ground terminal 20b, a first input terminal 20c, a second input terminal 20d, a first output terminal 20e, a second output terminal 20f, a third output terminal 20g, a first comparator 21, a second comparator 22, a third comparator 23, and two resistors 24 and 25. The first comparator 21 has a first input terminal 21a, a second input terminal 21b, and an output terminal 21c. The second comparator 22 has a first input terminal 22a, a second input terminal 22b, and an output terminal 22c. The third comparator 23 has a first input terminal 23a, a second input terminal 23b, and an output terminal 23c.

[0054] One end of resistor 24 is connected to power supply terminal 20a. One end of resistor 25 is connected to the other end of resistor 24. The other end of resistor 25 is connected to ground terminal 20b. A voltage of a predetermined magnitude is applied to power supply terminal 20a. Ground terminal 20b is connected to ground.

[0055] The first input terminal 21a of the first comparator 21 and the first input terminal 23a of the third comparator 23 are connected to the first input terminal 20c. The first input terminal 22a of the second comparator 22 and the second input terminal 23b of the third comparator 23 are connected to the second input terminal 20d. The second input terminal 21b of the first comparator 21 and the second input terminal 22b of the second comparator 22 are connected to the connection point of the resistor 24 and the resistor 25.

[0056] The first output terminal 10c of the angle sensor 10 is connected to the first input terminal 20c of the logic signal generating unit 20. Therefore, the first output terminal 10c is connected to the first input terminal 21a of the first comparator 21 and the first input terminal 23a of the third comparator 23 via the first input terminal 20c. The second output terminal 10d of the angle sensor 10 is connected to the second input terminal 20d of the logic signal generating unit 20. The second output terminal 10d is connected to the first input terminal 22a of the second comparator 22 and the second input terminal 23b of the third comparator 23 via the second input terminal 20d.

[0057] The output end 21c of the first comparator 21 is connected to the first output terminal 20e, which outputs the signal output from the output end 21c of the first comparator 21 as the first logic signal Su.

[0058] The output terminal 22c of the second comparator 22 is connected to the second output terminal 20f, which outputs the signal output from the output terminal 22c of the second comparator 22 as a second logic signal Sv.

[0059] The output end 23c of the third comparator 23 is connected to the third output terminal 20g, which outputs the signal output from the output end 23c of the third comparator 23 as a third logic signal Sw.

[0060] Next, the first to third logic signals Su, Sv, and Sw will be described with reference to Figures 6 and 7. Figure 7 is a timing chart showing the first to third logic signals Su, Sv, and Sw.

[0061] First, the first logic signal Su will be described. A first detection signal S1 is input to a first input terminal 21a of a first comparator 21. A reference voltage having a magnitude corresponding to the value of 0 on the vertical axis of FIG. 6 is input to a second input terminal 21b of the first comparator 21. The first comparator 21 compares the value of the first detection signal S1 with the value of the reference voltage and outputs a first logic signal Su. As shown in FIG. 6, the value of the first detection signal S1 is greater than the value of the reference voltage (0 on the vertical axis of FIG. 6) when the rotation angle θM is greater than 0° and less than 180°, and is smaller than the value of the reference voltage (0 on the vertical axis of FIG. 6) when the rotation angle θM is greater than 180° and less than 360°. Therefore, the first comparator 21 outputs a High level signal when the rotation angle θM is greater than 0° and less than 180°, and outputs a Low level signal when the rotation angle θM is greater than 180° and less than 360°.

[0062] Next, the second logic signal Sv will be described. The second detection signal S2 is input to the first input terminal 22a of the second comparator 22. A reference voltage having a magnitude corresponding to the value of 0 on the vertical axis of FIG. 6 is input to the second input terminal 22b of the second comparator 22. The second comparator 22 compares the value of the second detection signal S2 with the value of the reference voltage, and outputs the second logic signal Sv. As shown in FIG. 6, when the rotation angle θM is greater than 60° and less than 240°, the value of the second detection signal S2 becomes greater than the value of the reference voltage (0 on the vertical axis of FIG. 6), and becomes greater when the rotation angle θM is 0°. Above and When it is less than 60° and when it is greater than 240°, it is 360° below Therefore, the second comparator 22 outputs a High level signal when the rotation angle θM is greater than 60° and less than 240°, and Above and When it is less than 60° and when it is greater than 240°, it is 360° below In this case, a Low level signal is output.

[0063] Next, the third logic signal Sw will be described. The first detection signal S1 is input to the first input terminal 23a of the third comparator 23. The second detection signal S2 is input to the second input terminal 23b of the third comparator 23. The third comparator 23 compares the value of the first detection signal S1 with the value of the second detection signal S2, and outputs the third logic signal Sw. As shown in FIG. 6, the value of the first detection signal S1 is 0° when the rotation angle θM is 0°. Above and When it is less than 120° and when it is greater than 300°, it is 360° below When the rotation angle θM is greater than 120° and less than 300°, the value of the detection signal S2 is larger than that of the second detection signal S1. When the rotation angle θM is greater than 120° and less than 300°, the value of the detection signal S2 is smaller than that of the second detection signal S1. Therefore, the third comparator 23 detects the rotation angle θM as Above and When it is less than 120° and when it is greater than 300°, it is 360° below When the rotation angle θM is greater than 120° and smaller than 300°, a High level signal is output, and when the rotation angle θM is greater than 120° and smaller than 300°, a Low level signal is output.

[0064] In this embodiment, the control circuit 121 detects the rotation angle θM using the first to third logic signals Su, Sv, and Sw. Specifically, the control circuit 121 determines that the rotation angle θM is within a range of 0° to 60° when the first to third logic signals Su, Sv, and Sw are at a high level, a low level, and a high level, respectively. Furthermore, the control circuit 121 determines that the rotation angle θM is within a range of 60° to 120° when the first to third logic signals Su, Sv, and Sw are at a high level, a high level, and a high level, respectively. In this way, the control circuit 121 detects the rotation angle θM every 60° (every 1 / 6 rotation) based on the combination of the levels of the first to third logic signals Su, Sv, and Sw.

[0065] In this embodiment, the phase difference between the first logic signal Su and the second logic signal Sv is 60°, the phase difference between the first logic signal Su and the third logic signal Sw is 60°, and the phase difference between the second logic signal Sv and the third logic signal Sw is 120°.

[0066] Next, we will briefly explain a manufacturing method of the angle sensor 10. The manufacturing method of the angle sensor 10 includes the steps of forming a plurality of MR elements 50, forming a power supply terminal 10a, a ground terminal 10b, a first output terminal 10c, and a second output terminal 10d, and forming a plurality of wires that connect the plurality of MR elements 50 to the power supply terminal 10a, the ground terminal 10b, the first output terminal 10c, and the second output terminal 10d.

[0067] In the process of forming the plurality of MR elements 50, first, a plurality of initial MR elements are formed, which will later become the plurality of MR elements 50. Each of the plurality of initial MR elements includes at least an initial magnetization fixed layer, which will later become the magnetization fixed layer 52, a free layer 54, and a gap layer 53.

[0068] Next, the magnetization direction of the initial magnetization fixed layer is fixed in the predetermined direction using laser light and an external magnetic field in a predetermined direction. For example, for the initial MR elements that will later become the MR elements 50 of the first resistance unit 11, laser light is irradiated onto the initial MR elements while applying an external magnetic field in a first reference direction D1 (Y direction). When the irradiation of the laser light is completed, the magnetization direction of the initial magnetization fixed layer is fixed in the first reference direction D1. As a result, the initial magnetization fixed layer becomes the magnetization fixed layer 52, and the initial MR elements become the MR elements 50 of the first resistance unit 11.

[0069] Furthermore, in the other initial MR elements that will later become the MR elements 50 of the second resistance section 12, the direction of the external magnetic field is set to a direction opposite to the first reference direction D1 (-Y direction), thereby fixing the magnetization direction of the initial magnetization fixed layer of each of the other initial MR elements to a direction opposite to the first reference direction D1. In this way, the MR elements 50 of the second resistance section 12 are formed.

[0070] Similarly, in the other initial MR elements that will later become the MR elements 50 of the third resistance section 13, the direction of the external magnetic field is set to the second reference direction D2, thereby fixing the magnetization direction of the initial magnetization fixed layer of each of the other initial MR elements to the second reference direction D2. In this way, the MR elements 50 of the third resistance section 13 are formed.

[0071] Similarly, in the other initial MR elements that will later become the MR elements 50 of the fourth resistance section 14, the direction of the external magnetic field is set to be opposite to the second reference direction D2, thereby fixing the magnetization direction of the initial magnetization fixed layer of each of the other initial MR elements to the direction opposite to the second reference direction D2. In this way, the MR elements 50 of the fourth resistance section 14 are formed.

[0072] Next, the operation and effect of the angle detection device 1 according to this embodiment will be described. In this embodiment, the angle sensor 10 generates first and second detection signals S1 and S2 to generate first to third logic signals Su, Sv, and Sw. As a result, according to this embodiment, the configuration of the angle sensor 10 can be simplified compared to when three detection signals with different phases are generated to generate three logic signals. For example, according to this embodiment, it is possible to omit a magnetic detection element whose sensitivity axis is in a direction intersecting each of the first reference direction D1 and the second reference direction D2.

[0073] When a Hall element is used as the magnetic detection element, a temperature sensor is required to compensate for fluctuations in the output characteristics of the Hall element due to temperature. In contrast, when an MR element 50 is used as the magnetic detection element, the temperature sensor can be omitted. The effect of this will be described below with reference to FIG. 8.

[0074] FIG. 8 is an explanatory diagram (waveform diagram) for explaining the effect of the angle sensor 10. In FIG. 8, the horizontal axis represents the rotation angle θM of the motor 110, and the vertical axis represents the signal magnitude. The vertical axis is in arbitrary units. In FIG. 8, the curve labeled S1r represents the waveform of the first detection signal S1 at room temperature, the curve labeled S1h represents the waveform of the first detection signal S1 at high temperature, the curve labeled S2r represents the waveform of the second detection signal S2 at room temperature, and the curve labeled S2h represents the waveform of the second detection signal S2 at high temperature.

[0075] 8, the amplitude of each of the first and second detection signals S1 and S2 varies with temperature, but the phase of each of the first and second detection signals S1 and S2 does not vary with temperature. Therefore, the timing at which each of the first to third logic signals Su, Sv, and Sw switches between high and low levels does not vary, and the detection result of the rotation angle θM of the motor 110 does not vary either. Because the detection result of the rotation angle θM of the motor 110 does not vary with temperature, a temperature sensor can be omitted when the MR element 50 is used as the magnetic detection element.

[0076] Furthermore, in this embodiment, as described above, by forming a plurality of MR elements 50 using laser light and an external magnetic field in a predetermined direction, it is possible to form the angle sensor 10 on one chip. This also simplifies the configuration of the angle sensor 10.

[0077] [Second embodiment] Next, a second embodiment of the present invention will be described. First, a schematic configuration of the motor device according to the second embodiment of the present invention will be described with reference to Fig. 9. Fig. 9 is an explanatory diagram showing the configuration of the motor device according to this embodiment.

[0078] In this embodiment, the angle detection device 1 is disposed at a position away from the rotation axis C. For example, the angle detection device 1 is disposed outside the outer circumferential surface of the magnetic field generator 5. As described in the first embodiment, the angle sensor 10 is configured to detect the component of the rotating magnetic field MF at the reference position PR in the reference plane PL in a direction parallel to the reference plane PL (see FIG. 4). In this embodiment, the reference position PR is at a position away from the rotation axis C (for example, the position where the angle detection device 1 is disposed).

[0079] In this embodiment, at least one of the first reference direction D1 and the second reference direction D2 is different from that in the first embodiment. The other configurations of the motor device 100 according to this embodiment are the same as those in the first embodiment.

[0080] Next, the reason why at least one of the first reference direction D1 and the second reference direction D2 differs from that of the first embodiment will be explained. FIG. 10 is a characteristic diagram showing the relationship between the rotation angle θM of the motor 110 and the rotating magnetic field angle θ. In FIG. 10, the horizontal axis represents the rotation angle θM, and the vertical axis represents the rotating magnetic field angle θ. Ideally, the value of the rotating magnetic field angle θ that the direction of the rotating magnetic field MF makes with respect to the magnetic field reference direction DR coincides with the value of the rotation angle θM. However, in this embodiment, the value of the rotating magnetic field angle θ deviates from the value of the rotation angle θM, and the amount of deviation of the value of the rotating magnetic field angle θ varies depending on the value of the rotation angle θM. The reason for this is that at the reference position PR in this embodiment, the waveform indicating the change in the intensity of the component of the rotating magnetic field MF in one direction (hereinafter referred to as the magnetic field intensity waveform) is distorted from a sine curve.

[0081] Now, consider an angle detection device of a comparative example that is arranged in the same position as the angle detection device 1 according to the present embodiment. The angle detection device of the comparative example includes an angle sensor of the comparative example and a logic signal generation unit of the comparative example. The configuration of the angle sensor of the comparative example is the same as the configuration of the angle sensor 10 according to the first embodiment, including the directions of the first reference direction D1 and the second reference direction D2, i.e., the first magnetization direction of the magnetization fixed layer 52 of each of the multiple MR elements 50. The angle sensor of the comparative example is configured to output a first detection signal S101 and a second detection signal S102 that correspond to the first detection signal S1 and the second detection signal S2, respectively.

[0082] The configuration of the logic signal generation unit of the comparative example is the same as the configuration of the logic signal generation unit 20 in the first embodiment. The logic signal generation unit of the comparative example is configured to generate first to third logic signals Su, Sv, and Sw of the comparative example based on the first and second detection signals S101 and S102.

[0083] Fig. 11 is a waveform diagram showing the waveforms of the first and second detection signals S101 and S102 of the comparative example. In Fig. 11, the horizontal axis represents the rotation angle θM of the motor 110, and the vertical axis represents the signal magnitude. The vertical axis is expressed in arbitrary units.

[0084] The first detection signal S101 corresponds to the intensity of the component of the rotating magnetic field MF at the reference position PR in a direction parallel to the Y direction (the same direction as the first reference direction D1 in the first embodiment). The second detection signal S102 corresponds to the intensity of the component of the rotating magnetic field MF at the reference position PR in a direction rotated 60° from the Y direction toward the −X direction (the same direction as the second reference direction D2 in the first embodiment). As described above, since the magnetic field intensity waveform is distorted from a sine curve, the waveforms of the first and second detection signals S101, S102 also distort from a sine curve.

[0085] 12 is a timing chart showing the first to third logic signals Su, Sv, and Sw of the comparative example. In the comparative example, the timing (rotation angle θM) at which the second logic signal Sv switches between high and low levels is different from the timing shown in FIG. 7 of the first embodiment. Similarly, in the comparative example, the timing (rotation angle θM) at which the third logic signal Sw switches between high and low levels is different from the timing shown in FIG. 7 of the first embodiment.

[0086] As described above, in the comparative example, the timing at which each of the second and third logic signals Sv and Sw switches between High and Low levels is shifted from that in the first embodiment. This is because the waveforms of each of the first and second detection signals S101 and S102 are distorted from sine curves. As a result, the timing at which the waveform of the first detection signal S101 intersects with the waveform of the second detection signal S102 (rotation angle θM) is shifted from the timing at which the waveform of the first detection signal S1 intersects with the waveform of the second detection signal S2 shown in FIG. 6 in the first embodiment. As a result, the timing at which each of the second and third logic signals Sv and Sw switches between High and Low levels is shifted from that in the first embodiment.

[0087] The timing at which the first logic signal Su switches between high and low levels is almost the same as the timing shown in Fig. 7 in the first embodiment, because, for comparison, the phase of the first detection signal S1 and the phase of the first detection signal S101 are made to match.

[0088] 12, in the comparative example, the rotation angle θM cannot be detected every 60° (every 1 / 6 of a rotation). In contrast, in the present embodiment, the phase and amplitude of at least one of the first detection signal S1 and the second detection signal S2 are adjusted so that the rotation angle θM can be detected every 60° (every 1 / 6 of a rotation).

[0089] In this embodiment, at least one of the first reference direction D1 and the second reference direction D2 is set differently from that in the first embodiment, thereby adjusting the phase of at least one of the first detection signal S1 and the second detection signal S2. Below, an example will be described in which the phase and amplitude of the second detection signal S2 are adjusted.

[0090] The phase of the second detection signal S2 can be adjusted by a second reference direction D2 that serves as a reference for the first magnetization direction of the magnetization fixed layer 52 in each of the multiple MR elements 50 in the third and fourth resistance sections 13 and 14. In this embodiment, the second reference direction D2 is a direction rotated from the Y direction (first reference direction D1) toward the −X direction by an angle greater than 60°, or from the Y direction toward the −X direction by an angle less than 60°. The amplitude of the second detection signal S2 can be adjusted using, for example, an amplifier. The amplifier may be provided in the angle sensor 10 or the logic signal generation unit 20.

[0091] In this embodiment, the phase and amplitude of the second detection signal S2 are adjusted so that the timing (rotation angle θM) at which the waveform of the first detection signal S1 intersects with the waveform of the second detection signal S2 is the same as in the first embodiment. This makes it possible to make the timing at which each of the first to third logic signals Su, Sv, and Sw switches between High and Low levels the same as in the first embodiment.

[0092] FIG. 13 is a waveform diagram showing the waveforms of the first and second detection signals S1 and S2 in this embodiment. In FIG. 13, the horizontal axis represents the rotation angle θM of the motor 110, and the vertical axis represents the signal magnitude. The vertical axis is in arbitrary units. Note that the waveform of the first detection signal S1 shown in FIG. 13 matches the waveform of the first detection signal S101 of the comparative example shown in FIG. 11. FIG. 13 also shows the waveform of the second detection signal S102 of the comparative example shown in FIG. 11. The second detection signal S102 essentially corresponds to the second detection signal S2 before its phase and amplitude are adjusted.

[0093] 13, in this embodiment, the second detection signal S2 is adjusted so that the waveform of the first detection signal S1 and the waveform of the second detection signal S2 intersect when the rotation angle θM is 120° and 300°. Note that in this embodiment, the angle formed by the first reference direction D1 and the second reference direction D2 is different from the angle corresponding to the phase difference between the first detection signal S1 and the second detection signal S2.

[0094] Fig. 14 is a timing chart showing the first to third logic signals Su, Sv, and Sw. As shown in Fig. 14, the timing at which each of the first to third logic signals Su, Sv, and Sw switches between high and low levels is almost the same as the timing shown in Fig. 7 for the first embodiment. As a result, according to this embodiment, the rotation angle θM can be detected every 60° (every 1 / 6 rotation).

[0095] In this embodiment, instead of adjusting the phase and amplitude of the second detection signal S2, the phase and amplitude of the first detection signal S1 may be adjusted, or the phases and amplitudes of both the first detection signal S1 and the second detection signal S2 may be adjusted.

[0096] As described above, in this embodiment, in order to enable the rotation angle θM to be detected every 60° (every 1 / 6 of a rotation), at least one of the first reference direction D1 and the second reference direction D2 is made different from that in the first embodiment.

[0097] Other configurations, actions, and effects of this embodiment are the same as those of the first embodiment.

[0098] [Third embodiment] Next, a third embodiment of the present invention will be described with reference to Fig. 15. Fig. 15 is an explanatory diagram showing the inside of an angle detection device according to this embodiment.

[0099] The angle detection device 1 according to this embodiment includes a rectangular parallelepiped chip 6 instead of the first and second chips 2 and 3 in the first embodiment. The chip 6 is mounted on a substrate 4. The chip 6 includes an angle sensor 10 and a logic signal generation unit 20. In the chip 6, one of the angle sensor 10 and the logic signal generation unit 20 may be stacked on top of the other of the angle sensor 10 and the logic signal generation unit 20. Alternatively, the angle sensor 10 and the logic signal generation unit 20 may be disposed at different positions in a direction parallel to the XY plane.

[0100] Moreover, the angle detection device 1 according to this embodiment includes a plurality of wires 45 that connect the chip 6 and a plurality of leads 43, instead of the plurality of wires 41 and the plurality of wires 42 in the first embodiment.

[0101] Other configurations, actions, and effects of this embodiment are the same as those of the first or second embodiment.

[0102] [Fourth embodiment] Next, a fourth embodiment of the present invention will be described with reference to Fig. 16 and Fig. 17. Fig. 16 is an explanatory diagram showing the inside of a first electronic component in this embodiment. Fig. 17 is an explanatory diagram showing the inside of a second electronic component in this embodiment.

[0103] The angle detection device 1 according to this embodiment includes a first electronic component 1A and a second electronic component 1B instead of the substrate 4, the plurality of wires 41, the plurality of wires 42, the plurality of leads 43, and the sealing resin 44 of the first embodiment. The first electronic component 1A includes a first chip 2 including an angle sensor 10. The second electronic component 1B includes a second chip 3 including a logic signal generation unit 20.

[0104] The first electronic component 1A further includes a substrate 4A on which the first chip 2 (angle sensor 10) is mounted, a plurality of leads 43A, a plurality of wires 41A connecting the first chip 2 and the plurality of leads 43A, and a sealing resin 44A sealing the first chip 2.

[0105] The second electronic component 1B further includes a substrate 4B on which a second chip 3 (logic signal generating unit 20) is mounted, a plurality of leads 43B, a plurality of wires 42B connecting the second chip 3 and the plurality of leads 43B, and a sealing resin 44B that seals the second chip 3.

[0106] The first electronic component 1A may be arranged in the same position as the angle detection device 1 according to the first embodiment, or may be arranged in the same position as the angle detection device 1 according to the second embodiment. The second electronic component 1B may be arranged in the vicinity of the first electronic component 1A, or may be arranged in a position distant from the first electronic component 1A.

[0107] Other configurations, actions, and effects of this embodiment are the same as those of the first or second embodiment.

[0108] [Fifth embodiment] Next, a fifth embodiment of the present invention will be described. First, the configuration of angle sensor 10 in this embodiment will be described with reference to Fig. 18. Fig. 18 is a circuit diagram showing the circuit configuration of angle sensor 10 in this embodiment.

[0109] The angle sensor 10 in this embodiment includes a first detection circuit 10A and a second detection circuit 10B. The first detection circuit 10A includes a power supply terminal 10Aa, a ground terminal 10Ab, a first output terminal 10Ac, a first resistance unit 11, and a second resistance unit 12. The configurations of the first and second resistance units 11 and 12 are the same as those in the first embodiment.

[0110] In terms of the circuit configuration, the first resistor unit 11 is provided between the power supply terminal 10Aa and the first output terminal 10Ac. In terms of the circuit configuration, the second resistor unit 12 is provided between the ground terminal 10Ab and the first output terminal 10Ac. A voltage or current of a predetermined magnitude is applied to the power supply terminal 10Aa. The ground terminal 10Ab is connected to ground. The first output terminal 10Ac outputs a signal corresponding to the potential at the connection point between the first resistor unit 11 and the second resistor unit 12 as a first detection signal S1.

[0111] The second detection circuit 10B includes a power supply terminal 10Ba, a ground terminal 10Bb, a second output terminal 10Bc, a third resistor unit 13, and a fourth resistor unit 14. The configurations of the third and fourth resistor units 13 and 14 are the same as those in the first embodiment.

[0112] In terms of the circuit configuration, the third resistor unit 13 is provided between the power supply terminal 10Ba and the second output terminal 10Bc. In terms of the circuit configuration, the fourth resistor unit 14 is provided between the ground terminal 10Bb and the second output terminal 10Bc. A voltage or current of a predetermined magnitude is applied to the power supply terminal 10Ba. The ground terminal 10Bb is connected to ground. The second output terminal 10Bc outputs a signal corresponding to the potential at the connection point between the third resistor unit 13 and the fourth resistor unit 14 as a second detection signal S2.

[0113] A first output terminal 10Ac of the first detection circuit 10A is connected to a first input terminal 20c (see FIG. 3) of the logic signal generation unit 20. A second output terminal 10Bc of the second detection circuit 10B is connected to a second input terminal 20d (see FIG. 3) of the logic signal generation unit 20.

[0114] Next, a first example and a second example of the configuration of the angle detection device 1 according to this embodiment will be described. First, the first example will be described with reference to FIG. 19. FIG. 19 is an explanatory diagram showing the first example of the configuration of the angle detection device 1. In the first example, the angle detection device 1 includes rectangular parallelepiped chips 2A and 2B instead of the first chip 2 in the first embodiment. The chips 2A and 2B are each mounted on a second chip 3 (logic signal generation unit 20). The chip 2A includes a first detection circuit 10A. The chip 2B includes a second detection circuit 10B.

[0115] In addition, in the first example, instead of the multiple wires 41 in the first embodiment, multiple wires 41C connecting chip 2A and second chip 3 and multiple wires 41D connecting chip 2B and second chip 3 are provided.

[0116] Next, a second example will be described with reference to FIG. 20. FIG. 20 is an explanatory diagram showing a second example of the configuration of the angle detection device 1. In the second example, the angle detection device 1 includes chips 2A and 2B, similar to the first example. In particular, in the second example, the chips 2A and 2B are stacked on a second chip 3 (logic signal generation unit 20). In the example shown in FIG. 20, the chip 2B is mounted on the second chip 3, and the chip 2A is mounted on the chip 2B.

[0117] Moreover, in the second example, instead of the multiple wires 41 in the first embodiment, multiple wires 41E are provided to connect the chip 2A and the second chip 3. The second detection circuit 10B in the chip 2B may be connected to the logic signal generation unit 20 in the second chip 3 via the chip 2A and the multiple wires 41E. Alternatively, the second detection circuit 10B in the chip 2B may be connected to the logic signal generation unit 20 in the second chip 3 without going through the chip 2A and the multiple wires 41E.

[0118] Other configurations, actions, and effects of this embodiment are the same as those of the first or second embodiment.

[0119] [Sixth embodiment] Next, a sixth embodiment of the present invention will be described. First, the configuration of an angle detection device 1 according to this embodiment will be described with reference to Fig. 21. Fig. 21 is a circuit diagram showing the circuit configuration of the angle detection device 1.

[0120] In the present embodiment, the second reference direction D2 (see FIG. 4) is different from that in the first embodiment. As described in the first embodiment, the second reference direction D2 is a direction that serves as a reference for the first magnetization direction of the magnetization fixed layer 52 in each of the multiple MR elements 50 in the third and fourth resistor units 13 and 14 of the angle sensor 10. In the present embodiment, the second reference direction D2 is a direction rotated by 30° from the −X direction toward the −Y direction. The angle formed by the first reference direction D1 (Y direction) and the second reference direction D2 is 120°.

[0121] In this embodiment, the angle sensor 10 is configured to output a second detection signal S21 instead of the second detection signal S2 in the first embodiment. The second detection signal S21 is a signal corresponding to the potential at the connection point between the third resistor element 13 and the fourth resistor element 14, and is output from the second output terminal 10d of the angle sensor 10. The second detection signal S21 corresponds to the intensity of the component of the rotating magnetic field MF in a direction parallel to the second reference direction D2. The phase difference between the first detection signal S1 and the second detection signal S21 is 120°.

[0122] In this embodiment, logic signal generating unit 20 also includes another power supply terminal 20h, another ground terminal 20i, an inverting amplifier 26, and resistors 27 and 28. Inverting amplifier 26 has a first input terminal 26a, a second input terminal 26b, and an output terminal 26c.

[0123] One end of resistor 27 is connected to power supply terminal 20h. One end of resistor 28 is connected to the other end of resistor 27. The other end of resistor 28 is connected to ground terminal 20i. A voltage of a predetermined magnitude is applied to power supply terminal 20h. Ground terminal 20i is connected to ground.

[0124] A first input terminal 26a of the inverting amplifier 26 is connected to the connection point between the resistor 27 and the resistor 28. A second input terminal 26b of the inverting amplifier 26 is connected to a second input terminal 20d of the logic signal generating unit 20.

[0125] In this embodiment, the first input terminal 22a of the second comparator 22 and the second input terminal 23b of the third comparator 23 are connected to the output terminal 26c of the inverting amplifier 26 instead of the second input terminal 20d.

[0126] The inverting amplifier 26 is configured to output a signal obtained by inverting the phase of the second detection signal S21 by 180°. Hereinafter, the signal obtained by inverting the phase of the second detection signal S21 by 180° will be referred to as the second detection signal S22. The second detection signal S22 corresponds to the intensity of the component of the rotating magnetic field MF in a direction parallel to the second reference direction D2.

[0127] Other configurations of the angle detection device 1 according to this embodiment are the same as those of the first embodiment.

[0128] Next, the first detection signal S1, the second detection signals S21, S22, and the first to third logic signals Su, Sv, and Sw in this embodiment will be described. FIG. 22 is a waveform diagram showing the waveforms of the first detection signal S1 and the second detection signals S21, S22 in this embodiment. In FIG. 22, the horizontal axis represents the rotation angle θM of the motor 110, and the vertical axis represents the signal magnitude. The vertical axis is in arbitrary units. As shown in FIG. 22, the phase difference between the first detection signal S1 and the second detection signal S22 is 60°.

[0129] 23 is a timing chart showing the first to third logic signals Su, Sv, and Sw in this embodiment. In this embodiment, the first comparator 21, like the first embodiment, outputs a High-level signal when the rotation angle θM is greater than 0° and less than 180°, and outputs a Low-level signal when the rotation angle θM is greater than 180° and less than 360°.

[0130] In this embodiment, a second detection signal S22 is input to the first input terminal 22a of the second comparator 22. As shown in Fig. 22, the value of the second detection signal S22 is 0° when the rotation angle θM is 0°. Above and When it is less than 120° and when it is greater than 300°, it is 360° below When the rotation angle θM is greater than 120° and less than 300°, the value of the reference voltage (0 on the vertical axis in FIG. 22) is larger than the value of the reference voltage (0 on the vertical axis in FIG. 22). Above and When it is less than 120° and when it is greater than 300°, it is 360° below When the rotation angle θM is greater than 120° and smaller than 300°, a High level signal is output, and when the rotation angle θM is greater than 120° and smaller than 300°, a Low level signal is output.

[0131] In this embodiment, the second detection signal S22 is input to the second input terminal 23b of the third comparator 23. The third comparator 23 compares the value of the first detection signal S1 with the value of the second detection signal S22, and outputs a third logic signal Sw. As shown in FIG. 22, the value of the first detection signal S1 is greater than the second detection signal S22 when the rotation angle θM is greater than 60° and less than 240°, and the value of the first detection signal S1 is greater than the second detection signal S22 when the rotation angle θM is greater than 0°. Above and When it is less than 60° and when it is greater than 240°, it is 360° below Therefore, when the rotation angle θM of the motor 110 is greater than 60° and less than 240°, the third comparator 23 outputs a High level signal, and when the rotation angle θM of the motor 110 is less than 0°, the third comparator 23 outputs a High level signal. Above andWhen it is less than 60° and when it is greater than 240°, it is 360° below In this case, a Low level signal is output.

[0132] In this embodiment, the control circuit 121 of the logic signal generating unit 20 determines that the rotation angle is within a range of 0° to 60° when the first to third logic signals Su, Sv, and Sw are at a high level, a high level, and a low level, respectively. Furthermore, the control circuit 121 determines that the rotation angle of the motor 110 is within a range of 60° to 120° when the first to third logic signals Su, Sv, and Sw are at a high level, a high level, and a high level, respectively. In this way, the control circuit 121 detects the rotation angle θM of the motor 110 every 60° (every 1 / 6 rotation) based on the combination of the levels of the first to third logic signals Su, Sv, and Sw.

[0133] The inverting amplifier 26 may be provided in the angle sensor 10 instead of the logic signal generating unit 20. In this case, the second detection signal S22 is output from the second output terminal 10d of the angle sensor 10. In this case, the configuration and operation of the logic signal generating unit 20 are the same as those in the first embodiment.

[0134] Other configurations of the angle detection device 1 according to this embodiment are the same as those of the first or second embodiment.

[0135] [Seventh embodiment] Next, a seventh embodiment of the present invention will be described with reference to Fig. 24. Fig. 24 is a circuit diagram showing the circuit configuration of an angle detection device 1.

[0136] The angle detection device 1 according to this embodiment includes an angle sensor 200 instead of the angle sensor 10 in the first embodiment. The angle sensor 200 is configured to detect a rotating magnetic field MF and output a first detection signal S1 and a second detection signal S2.

[0137] The angle sensor 200 includes power supply terminals 200a1 and 200a2, ground terminals 200b1 and 200b2, a first output terminal 200c, a second output terminal 200d, a first bridge circuit 210, a second bridge circuit 220, a first differential amplifier 231, and a second differential amplifier 232.

[0138] The first bridge circuit 210 includes a first resistance section 211, a second resistance section 212, a third resistance section 213, a fourth resistance section 214, and a plurality of MR elements 50 that constitute the first to fourth resistance sections 211 to 214.

[0139] One end of each of the first and third resistor sections 211 and 213 is connected to a connection point P11. One end of each of the second and fourth resistor sections 212 and 214 is connected to a connection point P12. The other end of each of the first and second resistor sections 211 and 212 is connected to a connection point P13. The other end of each of the third and fourth resistor sections 213 and 214 is connected to a connection point P14.

[0140] The connection point P11 is connected to the power supply terminal 200a1. The connection point P12 is connected to the ground terminal 200b1. A voltage or current of a predetermined magnitude is applied to the power supply terminal 200a1. The ground terminal 200b1 is connected to the ground.

[0141] The output terminal of the first differential amplifier 231 is connected to the first output terminal 200c. The first differential amplifier 231 generates a signal corresponding to the potential difference between the connection points P13 and P14 as a first detection signal S1. The first output terminal 200c outputs the first detection signal S1.

[0142] In this embodiment, the first magnetization of the magnetization fixed layer 52 of each of the multiple MR elements 50 in the first and fourth resistance sections 211 and 214 includes a component in the first reference direction D1 (see FIG. 4). The first magnetization of the magnetization fixed layer 52 of each of the multiple MR elements 50 in the second and third resistance sections 212 and 213 includes a component in the direction opposite to the first reference direction D1. The first detection signal S1 corresponds to the intensity of the component of the rotating magnetic field MF in a direction parallel to the first reference direction D1.

[0143] The second bridge circuit 220 includes a first resistance section 221, a second resistance section 222, a third resistance section 223, a fourth resistance section 224, and a plurality of MR elements 50 that constitute the first to fourth resistance sections 221 to 224.

[0144] One end of each of the first and third resistor sections 221 and 223 is connected to a connection point P21. One end of each of the second and fourth resistor sections 222 and 224 is connected to a connection point P22. The other end of each of the first and second resistor sections 221 and 222 is connected to a connection point P23. The other end of each of the third and fourth resistor sections 223 and 224 is connected to a connection point P24.

[0145] The connection point P21 is connected to the power supply terminal 200a2. The connection point P22 is connected to the ground terminal 200b2. A voltage or current of a predetermined magnitude is applied to the power supply terminal 200a2. The ground terminal 200b2 is connected to the ground.

[0146] The output terminal of the second differential amplifier 232 is connected to the second output terminal 200d. The second differential amplifier 232 generates a signal corresponding to the potential difference between the connection points P23 and P24 as a second detection signal S2. The second output terminal 200d outputs the second detection signal S2.

[0147] In this embodiment, the first magnetization of the magnetization fixed layer 52 of each of the multiple MR elements 50 in the first and fourth resistance units 221 and 224 includes a component in the second reference direction D2 (see FIG. 4). The first magnetization of the magnetization fixed layer 52 of each of the multiple MR elements 50 in the second and third resistance units 222 and 223 includes a component in the direction opposite to the second reference direction D2. The second detection signal S2 corresponds to the intensity of the component of the rotating magnetic field MF in a direction parallel to the second reference direction D2.

[0148] The configuration of the logic signal generating unit 20 is the same as that of the first embodiment. A first output terminal 200c of the angle sensor 200 is connected to a first input terminal 20c of the logic signal generating unit 20. A second output terminal 200d of the angle sensor 200 is connected to a second input terminal 20d of the logic signal generating unit 20.

[0149] Other configurations of the angle detection device 1 according to this embodiment are the same as those of the first or second embodiment.

[0150] The present invention is not limited to the above-described embodiments and may be modified in various ways. For example, the configuration of the third and fourth resistor units 13 and 14 of the angle sensor 10 may be the same as the configuration of the first and second resistor units 11 and 12 of the angle sensor 10, including the first magnetization direction of the magnetization fixed layer 52. In this case, the pair of the first and second resistor units 11 and 12 and the pair of the third and fourth resistor units 13 and 14 are arranged at different positions from each other so that the phase difference between the first detection signal S1 and the second detection signal S2 is a value excluding an integer multiple of 90°.

[0151] Furthermore, at least a part of the control circuit 121 and the logic signal generating section 20 may be realized by an ASIC or a microcomputer.

[0152] Moreover, the angle detection device 1 may include an optical angle sensor instead of the angle sensor 10 or 200.

[0153] As described above, the angle detection device of the present invention is used in a motor drive circuit and includes an angle sensor configured to detect a physical quantity that changes periodically in conjunction with the rotation angle of the motor and output first and second detection signals whose phase difference is a value excluding an integer multiple of 90°, and a logic signal generation unit configured to generate a first logic signal using the first detection signal, generate a second logic signal using the second detection signal and having a phase different from that of the first logic signal, and generate a third logic signal using the first and second detection signals and having a phase different from that of each of the first and second logic signals.

[0154] In the angle detection device of the present invention, the logic signal generation unit may include a first comparator configured to generate a first logic signal, a second comparator configured to generate a second logic signal, and a third comparator configured to generate a third logic signal. The angle sensor may have a first output terminal that outputs the first detection signal and a second output terminal that outputs the second detection signal. Each of the first comparator, the second comparator, and the third comparator may have a first input terminal and a second input terminal. The first output terminal may be connected to the first input terminal of the first comparator and the first input terminal of the third comparator. The second output terminal may be connected to the first input terminal of the second comparator and the second input terminal of the third comparator.

[0155] In the angle detection device of the present invention, the physical quantity may be a magnetic field whose direction rotates in response to a change in the rotation angle. The angle sensor may include a plurality of magnetic detection elements each configured to detect the magnetic field. The plurality of magnetic detection elements may include a plurality of first magnetoresistive elements configured to generate a first detection signal and a plurality of second magnetoresistive elements configured to generate a second detection signal. Each of the plurality of first magnetoresistive elements and the plurality of second magnetoresistive elements may include a magnetization fixed layer having a first magnetization whose direction is fixed, a free layer having a second magnetization whose direction is changeable in response to a magnetic field, and a gap layer disposed between the magnetization fixed layer and the free layer. When the direction that serves as a reference for the first magnetization direction in each of the plurality of first magnetoresistive effect elements is defined as a first reference direction, the direction that serves as a reference for the first magnetization direction in each of the plurality of second magnetoresistive effect elements is defined as a second reference direction, the direction of the magnetic field detected by each of the plurality of first magnetoresistive effect elements at a predetermined timing when the magnetic field changes periodically is defined as a first magnetic field direction, and the direction of the magnetic field detected by each of the plurality of second magnetoresistive effect elements at the predetermined timing is defined as a second magnetic field direction, the difference between the angle that the first magnetic field direction makes with respect to the first reference direction and the angle that the second magnetic field direction makes with respect to the second reference direction may be an angle excluding an integer multiple of 90°.

[0156] When the multiple magnetic detection elements include multiple first magnetoresistance effect elements and multiple second magnetoresistance effect elements, the angle between the first reference direction and the second reference direction may be an angle other than an integer multiple of 90°. In this case, the angle between the first reference direction and the second reference direction may be equal to an angle corresponding to a phase difference between the first detection signal and the second detection signal, or may be different from the angle corresponding to the phase difference between the first detection signal and the second detection signal. The angle detection device of the present invention may further include a chip including multiple first magnetoresistance effect elements and multiple second magnetoresistance effect elements.

[0157] The angle detection device of the present invention may further include a first chip including an angle sensor and a second chip including a logic signal generation unit, and one of the first chip and the second chip may be mounted on the other of the first chip and the second chip.

[0158] The angle detection device of the present invention may further include a chip including an angle sensor and a logic signal generation unit.

[0159] A motor device of the present invention includes the angle detection device of the present invention and a motor.

[0160] The motor device of the present invention may further include a magnetic field generating unit configured to generate a magnetic field whose direction rotates in response to a change in the rotation angle. The physical quantity may be a magnetic field. The angle sensor may be configured to detect the magnetic field generated by the magnetic field generating unit.

[0161] A logic signal generator of the present invention is configured to generate three logic signals of different phases from each other. The logic signal generator of the present invention is configured to acquire a first detection signal and a second detection signal whose phase difference is a value excluding an integer multiple of 90°, generate and output a first logic signal using the first detection signal, generate and output a second logic signal of a different phase from the first logic signal using the second detection signal, and generate and output a third logic signal of a different phase from each of the first logic signal and the second logic signal using the first detection signal and the second detection signal. [Explanation of symbols]

[0162] REFERENCE SIGNS LIST 1...angle detection device, 2...first chip, 3...second chip, 4...substrate, 5...magnetic field generator, 10...angle sensor, 10a...power supply terminal, 10b...ground terminal, 10c...first output terminal, 10d...second output terminal, 11...first resistor section, 12...second resistor section, 13...third resistor section, 14...fourth resistor section, 20...logic signal generation section, 20a...power supply terminal, 20b...ground terminal, 20c...first Input terminal, 20d...second input terminal, 20e...first output terminal, 20f...second output terminal, 20g...third output terminal, 21...first comparator, 21a...first input terminal, 21b...second input terminal, 21c...output terminal, 22...second comparator, 22a...first input terminal, 22b...second input terminal, 22c...output terminal, 23...third comparator, 23a...first input terminal, 23b...second input terminal , 23c...output terminal, 24, 25...resistor, 41, 42...wire, 43...lead, 44...sealing resin, 50...MR element, 51...antiferromagnetic layer, 52...magnetization fixed layer, 53...gap layer, 54...free layer, 61...lower electrode, 62...upper electrode, 100...motor device, 110...motor, 111...rotor, 112...stator, 113u...first coil, 113v...second coil, 113w...third coil, 1 20...drive circuit, 121...control circuit, 122...output circuit, C...rotation axis, D1...first reference direction, D2...second reference direction, DR...magnetic field reference direction, MF...rotating magnetic field, PL...reference plane, PR...reference position, S1...first detection signal, S2...second detection signal, Sc...speed command, Su...first logic signal, Sv...second logic signal, Sw...third logic signal, θ...rotating magnetic field angle, θM...rotation angle.

Claims

1. An angle detection device used in a motor drive circuit, an angle sensor configured to detect a physical quantity that changes periodically in conjunction with the rotation angle of the motor, and to output a first detection signal and a second detection signal whose phase difference is a value excluding an integer multiple of 90°; a logic signal generating unit configured to generate a first logic signal using the first detection signal, generate a second logic signal having a phase different from that of the first logic signal using the second detection signal, and generate a third logic signal having a phase different from that of each of the first logic signal and the second logic signal using the first detection signal and the second detection signal; Equipped with the physical quantity is a rotating magnetic field whose direction rotates in response to a change in the rotation angle, the angle sensor includes a plurality of magnetic detection elements each configured to detect the rotating magnetic field; The angle detection device, wherein the angle sensor is configured to detect a component of the rotating magnetic field at one reference position in a reference plane in a direction parallel to the reference plane.

2. 2. The angle detection device according to claim 1, wherein the logic signal generation unit includes a first comparator configured to generate the first logic signal, a second comparator configured to generate the second logic signal, and a third comparator configured to generate the third logic signal.

3. the angle sensor has a first output terminal that outputs the first detection signal and a second output terminal that outputs the second detection signal; each of the first comparator, the second comparator, and the third comparator has a first input end and a second input end; the first output terminal is connected to the first input end of the first comparator and the first input end of the third comparator; 3. The angle detection device according to claim 2, wherein the second output terminal is connected to the first input terminal of the second comparator and the second input terminal of the third comparator.

4. the plurality of magnetic detection elements include a plurality of first magnetoresistive effect elements configured to generate the first detection signal and a plurality of second magnetoresistive effect elements configured to generate the second detection signal; each of the plurality of first magnetoresistive effect elements and the plurality of second magnetoresistive effect elements includes a magnetization fixed layer having a first magnetization whose direction is fixed, a free layer having a second magnetization whose direction is changeable in response to the rotating magnetic field, and a gap layer disposed between the magnetization fixed layer and the free layer; The angle detection device described in claim 1, characterized in that when a first reference direction is defined as a reference direction for the first magnetization direction in each of the plurality of first magnetoresistive effect elements, a second reference direction is defined as a reference direction for the first magnetization direction in each of the plurality of second magnetoresistive effect elements, a first magnetic field direction is defined as a direction of the rotating magnetic field detected by each of the plurality of first magnetoresistive effect elements at a predetermined timing when the rotating magnetic field changes periodically, and a second magnetic field direction is defined as a direction of the rotating magnetic field detected by each of the plurality of second magnetoresistive effect elements at the predetermined timing, the difference between an angle that the first magnetic field direction makes with respect to the first reference direction and an angle that the second magnetic field direction makes with respect to the second reference direction is an angle excluding an integer multiple of 90°.

5. 5. The angle detection device according to claim 4, wherein the angle formed between the first reference direction and the second reference direction is an angle excluding an integer multiple of 90 degrees.

6. 5. The angle detection device according to claim 4, wherein the angle formed between the first reference direction and the second reference direction is equal to an angle corresponding to a phase difference between the first detection signal and the second detection signal.

7. 5. The angle detection device according to claim 4, wherein the angle formed between the first reference direction and the second reference direction is different from an angle corresponding to a phase difference between the first detection signal and the second detection signal.

8. 5. The angle detection device according to claim 4, further comprising a chip including the plurality of first magnetoresistive effect elements and the plurality of second magnetoresistive effect elements.

9. further comprising a first chip including the angle sensor; a second chip including the logic signal generating unit; 2. The angle detection device according to claim 1, further comprising:

10. 10. The angle detection device according to claim 9, wherein one of the first chip and the second chip is mounted on the other of the first chip and the second chip.

11. 2. The angle detection device according to claim 1, further comprising a chip including the angle sensor and the logic signal generation unit.

12. An angle detection device according to any one of claims 1 to 11; the motor; A motor device comprising:

13. 13. The motor device according to claim 12, further comprising a magnetic field generating unit configured to generate the rotating magnetic field.

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