Sheet pasting device and sheet pasting method

Abstract

Provided are a sheet-affixing device and a sheet-affixing method with which it is possible to prevent an adhesive sheet from being affixed to an adherend in a state in which wrinkles or bubbles are formed at a feeding tip section. The sheet-affixing device EA has: a sheet-feeding means 10 for feeding an adhesive sheet AS; and a pressing means 20 having a pressing roller 22 for pressing the adhesive sheet AS against an adherend WK, the pressing means pressing the adhesive sheet AS against the adherend WK moving relative to the pressing roller 22 and affixing the adhesive sheet AS to the adherend WK. In the stage prior to pressing the adhesive sheet AS against the adherend WK by means of the pressing roller 22, the pressing means 20 brings the pressing roller 22 into contact with the adherend surface WK1 of the adherend WK, and causes the pressing roller 22 to rotate on the adherend surface WK1.

Description

[Technical Field]

[0001] The present invention relates to a sheet sticking device and a sheet sticking method. [Background technology]

[0002] BACKGROUND ART Sheet application devices for applying adhesive sheets to adherends are known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2013-74106 Summary of the Invention [Problem to be solved by the invention]

[0004] In the sheet application device 10 (sheet application device) described in Patent Document 1, when the unwinding means 14 (sheet supply means) supplies an adhesive sheet AS (adhesive sheet), if the leading end of the adhesive sheet in the supply direction (hereinafter, the "leading end of the adhesive sheet in the supply direction" will also be simply referred to as the "supply leading end") comes into contact with the pressure roller 19 (pressure roller), the progress of the adhesive sheet is temporarily hindered, causing the adhesive sheet to be applied to the ring frame RF (adherend) with wrinkles or air bubbles formed in the leading end of the supply.

[0005] An object of the present invention is to provide a sheet application device and a sheet application method that can prevent an adhesive sheet from being applied to an adherend with wrinkles or air bubbles formed at the supply tip. [Means for solving the problem]

[0006] The present invention employs the configurations described in the claims. [Effects of the Invention]

[0007] According to the present invention, even if the feeding tip comes into contact with the pressure roller, the pressure roller is rotating, so the advancement of the adhesive sheet is not temporarily impeded, and therefore it is possible to prevent the adhesive sheet from being applied to the adherend with wrinkles or air bubbles formed in the feeding tip. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1A is an explanatory diagram of a sheet sticking device according to one embodiment of the present invention, and FIGS. 1B to 1E are explanatory diagrams of the operation of the sheet sticking device. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are orthogonal to each other, and the X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. Furthermore, in this embodiment, the view from the front in Fig. 1 parallel to the Y-axis is used as the reference, and when directions are indicated without specifying the figure, "up" is the direction of the Z-axis arrow, "down" is the opposite direction, "left" is the direction of the X-axis arrow, "right" is the opposite direction, "front" is the front direction in Fig. 1 parallel to the Y-axis, and "rear" is the opposite direction.

[0010] The sheet application device EA of the present invention comprises a sheet supplying means 10 for supplying an adhesive sheet AS, and a pressing means 20 having a pressing roller 22 for pressing the adhesive sheet AS against an adherend WK, the pressing means 20 moving relative to the pressing roller 22 to press and apply the adhesive sheet AS to the adherend WK, and is arranged near an adherend conveying means 30 for conveying the adherend WK.

[0011] The sheet supply means 10 is provided so as to be able to peel off the adhesive sheet AS temporarily attached to the release sheet RL from the release sheet RL and supply it. That is, the sheet supply means 10 comprises a support roller 11 that supports the raw roll RS on which the adhesive sheet AS has been temporarily attached to a strip-shaped release sheet RL, a guide roller 12 that guides the raw roll RS, a release plate 13 as a release means that folds the release sheet RL at the release edge 13A and releases the adhesive sheet AS from the release sheet RL, a drive roller 14 that is supported by an output shaft (not shown) of a rotary motor 14A that serves as a drive device and that pinches the release sheet RL between itself and a pinch roller 14B, and a recovery roller 15 that is supported by an output shaft (not shown) of the drive device and that constantly applies a predetermined tension to the release sheet RL that is present between itself and the pinch roller 14B while the sheet application device EA is operating automatically, and that recovers the release sheet RL.

[0012] The pressing means 20 comprises a bracket 21 supported by the peeling plate 13, and a pressing roller 22 rotatably supported by the bracket 21 and pressing the adhesive sheet AS onto the adherend WK with a pressing surface 22A. Before the adhesive sheet AS is pressed onto the adherend WK by the pressing roller 22, the pressing roller 22 is brought into contact with the adherend surface WK1 of the adherend WK and is rotated on the adherend surface WK1. The pressure roller 22 in this embodiment is designed to be deformed when it comes into contact with the adherend WK.

[0013] The adherend transport means 30 is supported by a slider 31A of a linear motor 31 as a driving device, and is equipped with a support table 32 having a holding surface 32A that can be adsorbed and held by a pressure reducing means (holding means) such as a pressure reducing pump or vacuum ejector (not shown).

[0014] 1(B), the adherend WK has a surface WK1 that moves within a predetermined plane SF, and the plane SF is located between a first plane SF1 that is parallel to the plane SF and contacts the pressure roller 22 at a position closest to the plane SF, and a second plane SF2 that is parallel to the plane SF and contacts the release sheet RL at a position closest to the plane SF within the movement range AR of the adherend WK1. The pressure roller 22 rotates on the adherend WK1 as the contact portion 22B with the adherend WK1 deforms between the first plane SF1 and the second plane SF2. In addition, the contact portion 22B of the pressure roller 22 deforms between the first plane SF1 and a third plane SF3 that is parallel to the moving plane SF and is further away from the moving plane SF than the second plane SF2 by the thickness of the adhesive sheet AS, thereby pressing the adhesive sheet AS against the adherend WK to adhere it thereto.

[0015] The operation of the sheet sticking apparatus EA will now be described. First, a user of the sheet application apparatus EA (hereinafter simply referred to as "user") sets the raw web RS in the sheet application apparatus EA, with each component positioned in the initial position shown by the solid lines in Fig. 1(A), and then inputs a signal to start automatic operation via an operation means such as an operation panel or personal computer (not shown). The sheet supply means 10 then drives the rotary motor 14A to pay out the raw web RS, and when the leading edge of the leading adhesive sheet AS in the payout direction is peeled off a predetermined length by the peeling edge 13A of the peeling plate 13, the rotary motor 14A is stopped. Next, the user or a transport means (not shown), such as an articulated robot or belt conveyor, places the adherend WK on the support table 32, and the adherend transport means 30 drives the pressure-reducing means (not shown) to begin suction and holding the adherend WK on the support surface 32A.

[0016] Thereafter, the adherend conveying means 30 drives the linear motor 31 to move the support table 32 to the left, causing the adherend WK to come into contact with the pressure roller 22. The pressure roller 22 in contact with the adherend WK deforms and rotates on the adherend surface WK1 as the adherend WK moves, as shown in Fig. 1(C). At this time, the pressure roller 22 deforms between the first plane SF1 and the second plane SF2, as shown in Fig. 1(C), and rotates on the adherend surface WK1. Next, when the adherend WK reaches a predetermined position relative to the sheet supplying means 10, the sheet supplying means 10 drives the rotary motor 14A to pay out the raw web RS at the same speed as the conveying speed of the adherend WK, and the adhesive sheet AS is peeled off from the release sheet RL by the peeling plate 13 and supplied.

[0017] The adhesive sheet AS supplied by the sheet supply means 10 is pressed by the pressure roller 22 and adhered to the adherend WK, as shown in FIG. 1(D). At this time, the pressure roller 22 deforms by an amount corresponding to the thickness of the adhesive sheet AS, deforming between the first plane SF1 and the third plane SF3 and rotating on the adhesive sheet AS, as shown in FIG. 1(D). Next, the entire leading adhesive sheet AS is adhered to the adherend WK to form a united object UP. When the leading edge of the next adhesive sheet AS following the leading adhesive sheet AS in the payout direction is peeled off a predetermined length by the peeling edge 13A of the peeling plate 13, the sheet supply means 10 stops driving the rotary motor 14A. When the united object UP subsequently reaches a predetermined position to the left of the pressure roller 22, the adherend conveying means 30 stops driving the linear motor 31, stopping the leftward movement of the support table 32, and then stops driving the pressure-reducing means (not shown), releasing the adherend WK from suction and holding on the support surface 32A. Next, when the user or a conveying means (not shown) conveys the integrated object UP to the next process, the adherend conveying means 30 drives the linear motor 31 to return the support table 32 to its initial position, and the same operations as those described above are repeated thereafter.

[0018] According to the above embodiment, even if the feeding front end portion AS1 comes into contact with the pressure roller 22, the progress of the adhesive sheet AS is not temporarily impeded because the pressure roller 22 is rotating. Therefore, it is possible to prevent the adhesive sheet AS from being applied to the adherend WK with wrinkles or air bubbles formed in the feeding front end portion AS1.

[0019] The means and steps of the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps, and are in no way limited to the components and steps of a single embodiment shown in the above embodiment. For example, the sheet supplying means may be any means capable of supplying an adhesive sheet, and is not limited in any way as long as it is within the scope of the common general technical knowledge at the time of filing (the same applies to other means and steps).

[0020] The sheet supply means 10 may feed and supply a raw web in which a closed-loop slit or a slit extending over the entire short width direction is formed in a strip-shaped adhesive sheet base material temporarily attached to a release sheet RL, with the predetermined area partitioned by the slit serving as the adhesive sheet AS, or may use a raw web in which a strip-shaped adhesive sheet base material is temporarily attached to a release sheet RL, and a cutting means forms a closed-loop slit or a slit extending over the entire short width direction in the adhesive sheet base material, with the predetermined area partitioned by the slit serving as the adhesive sheet AS, or may be configured to supply a strip-shaped adhesive sheet, or may control the torque of the rotary motor 14A so that a predetermined tension is applied to the raw web RS when the adhesive sheet AS is peeled off from the release sheet RL ... Instead of rollers such as the guide roller 12, the raw roll RS and release sheet RL may be supported and guided by a plate-like member or a shaft member, or the raw roll RS may be supported so as to be pulled out from a fan-folded raw roll RS without being wound up, or a recovery means may be employed to recover the release sheet RL by fan-folding the release sheet RL, shredding it with a shredder or the like, or piling it up randomly, or no recovery means may be employed, or the adhesive sheet AS may be supplied by moving the support table 32 itself without moving or while moving, or the adhesive sheet AS to which the release sheet RL is not temporarily attached may be unwound and supplied. In the above embodiment, the sheet supply means 10 supplies the adhesive sheet AS by unwinding the raw sheet RS at the same speed as the conveying speed of the adherend WK, but the raw sheet RS may be unwound at a speed faster than the conveying speed of the adherend WK, or at a speed slower than the conveying speed of the adherend WK, as long as the adhesive sheet AS can be attached to the adherend WK without forming wrinkles or air bubbles at the supply tip AS1.

[0021] In the pressing means 20, the pressure roller 22 may not be in contact with the holding surface 32A, or the pressure roller 22 may be in contact with the holding surface 32A and rotate on the holding surface 32A, or the pressure roller 22 may be in contact with the adherend WK and elastically deform, or may be plastically deformed, or the pressure roller 22 may not be in contact with the holding surface 32A, the adherend WK, or the adhesive sheet AS and may not deform, or in the embodiment, the pressure roller 22 may be in contact with the adherend WK, which moves relative to the pressure roller 22, by moving the adherend WK relative to the immovable pressure roller 22. In the above example, the adhesive sheet AS is pressed and attached, but the adhesive sheet AS may be pressed and attached to the adherend WK that moves relative to the pressure roller 22 by moving the pressure roller 22 without moving the adherend WK or while moving the adherend WK, or a brush-like pressure roller 22 that uses a brush-like member to press and attach the adhesive sheet AS to the adherend WK may be used as the pressure roller 22, and the pressure roller 22 may be made of rubber, resin, sponge, metal, etc.

[0022] When the adherend WK is a semiconductor wafer and a ring frame, the Young's modulus of the pressure roller 22 is preferably 100 MPa to 2000 MPa. [Reason for selecting the lower limit value] In the sheet application apparatus EA of the present invention, a rubber roller with a Young's modulus of 100 MPa was used as the pressure roller 22, and an integrated object consisting of a semiconductor wafer placed in the opening of a ring frame was used as the adherend WK. When the adhesive sheet AS was pressed against the integrated object to be applied, no air bubbles were trapped between the integrated object and the adhesive sheet AS, and no wrinkles were formed in the adhesive sheet AS, and the adhesive sheet AS was applied satisfactorily. Furthermore, when the same application as above was performed using a polyethylene roller with a Young's modulus of 700 MPa as the pressure roller 22, the adhesive sheet AS was also applied satisfactorily. On the other hand, when an adhesive sheet AS was pressed and stuck to the above-mentioned object to be integrated using the sheet sticking apparatus EA of the present invention with a foam polyurethane roller having a Young's modulus of 60 MPa as the pressure roller 22, the pressure of the adhesive sheet was insufficient, causing air bubbles to get in between the object to be integrated and the adhesive sheet AS, and causing wrinkles in the adhesive sheet AS, resulting in poor adhesion of the adhesive sheet AS. Furthermore, when a rubber roller having a Young's modulus of 40 MPa was used as the pressure roller 22 and the same adhesion was attempted, good adhesion was also not achieved. The above phenomenon occurred similarly when the adherend WK was only a ring frame and when the adherend WK was only a semiconductor wafer. [Reason for selecting upper limit value] In the sheet application apparatus EA of the present invention, a polyester roller with a Young's modulus of 2000 MPa was used as the pressure roller 22, and an adhesive sheet AS was pressed against the above-mentioned integrated object to be applied. The adhesive sheet AS was applied satisfactorily without any air bubbles getting trapped between the integrated object and the adhesive sheet AS, or wrinkles forming in the adhesive sheet AS. Furthermore, when the same application as above was performed using an acrylic roller with a Young's modulus of 1600 MPa as the pressure roller 22, the adhesive sheet AS was also applied satisfactorily. On the other hand, when the sheet bonding apparatus EA of the present invention was used with an epoxy roller having a Young's modulus of 2600 MPa as the pressure roller 22 to press and bond an adhesive sheet AS to the above-mentioned integrated object, even a slight deviation in the parallelism between the adhesive sheet bonding surface of the integrated object and the pressing portion of the pressure roller 22 resulted in air bubbles being trapped between the integrated object and the adhesive sheet AS, or wrinkles being formed in the adhesive sheet AS, preventing good bonding of the adhesive sheet AS. Furthermore, distortion occurred in the ring frame, and damage such as cracks and chips occurred in the semiconductor wafer. Furthermore, when the same bonding was performed using a polystyrene roller having a Young's modulus of 3000 MPa as the pressure roller 22, good bonding was also not achieved, distortion occurred in the ring frame, and damage such as cracks and chips occurred in the semiconductor wafer. The above phenomenon occurred similarly when the adherend WK was only a ring frame and when the adherend WK was only a semiconductor wafer.

[0023] The substrate transport means 30 may employ a drive device that moves the support table 32 in the forward and backward directions, allowing the substrate WK to be moved in the forward and backward directions as well as the left and right directions within the working area of ​​each means, and may or may not be provided in the sheet application apparatus EA of the present invention.

[0024] The sheet application apparatus EA may use a semiconductor wafer as the adherend WK and apply a protective sheet to the circuit surface of the semiconductor wafer, or may use a ring frame as the adherend WK and apply an adhesive sheet AS to the ring frame, or may use a semiconductor wafer and a ring frame as the adherend WK and apply an adhesive sheet AS to the semiconductor wafer and ring frame to integrate them, and in these cases the adhesive sheet AS may be shaped to match the shape of the semiconductor wafer or the ring frame. As shown in FIG. 1(E), the adherend WK has a maximum thickness that can be adhered by the sheet adhering apparatus EA when the moving plane SF is at the same position as the second plane SF2.

[0025] The adhesive sheet AS and adherend WK of the present invention are not particularly limited in terms of material, type, shape, etc. For example, the adhesive sheet AS and adherend WK may be circular, oval, polygonal (e.g., triangular, rectangular), or other shapes. The adhesive sheet AS may be pressure-sensitive, heat-sensitive, or other adhesive. If a heat-sensitive adhesive sheet AS is used, the adhesive sheet AS may be adhered by an appropriate method, such as providing a heating means such as a coil heater or the heated side of a heat pipe. Furthermore, such adhesive sheets AS may be, for example, single-layer adhesive sheets, those with an intermediate layer between the substrate and the adhesive layer, those with three or more layers, such as those with a cover layer on top of the substrate, or even so-called double-sided adhesive sheets in which the substrate can be peeled from the adhesive layer. The double-sided adhesive sheet may be a single-layer or multi-layer adhesive sheet with a single or multi-layer intermediate layer, or a single-layer or multi-layer adhesive sheet without an intermediate layer. The adherend WK may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic plate, a wooden board, or a resin, or may be a composite formed from two or more of these, and may also be any type of member or article. The adhesive sheet AS may be interpreted in terms of its function or use, and may refer to any sheet, film, tape, etc., such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, or a recording layer-forming resin sheet.

[0026] The driving device in the above-described embodiments may be an electric device such as a rotary motor, a linear motor, a single-axis robot, or an articulated robot with two or more joints, or an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, or a rotary cylinder, or may be a direct or indirect combination of these. In the above-described embodiments, when a rotating member such as a roller is used, a driving device for rotating the rotating member may be provided, the surface of the rotating member or the rotating member itself may be made of a deformable member such as rubber or resin, or the surface of the rotating member or the rotating member itself may be made of a non-deformable member, or other members such as a rotating or non-rotating shaft or blade may be used instead of the roller, when a pressing means or pressing member such as a pressure roller or a pressure head that presses the object to be pressed is used, a member such as a roller, a round bar, a blade material, rubber, resin, or sponge may be used instead of or in combination with the above-described examples, or a configuration in which pressing is performed by spraying air or gas may be used, or the pressing means may be made of a deformable member such as rubber or resin, or may be made of a non-deformable member, or when a peeling means or peeling member such as a peeling plate or peeling roller that peels the object to be peeled is used, Alternatively, or in combination, members such as plate-shaped members, round bars, rollers, etc. may be used, and the peeling element may be made of a deformable material such as rubber or resin, or may be made of a non-deformable material. When a supporting (holding) means or a supporting (holding) member that supports (holds) the supported member (held member) is used, a configuration may be used to support (hold) the supported member using a gripping means such as a mechanical chuck or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), pressure-sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving equipment, etc. When a cutting means or cutting member that cuts the member to be cut or forms an incision or cutting line in the member to be cut is used, cutting elements such as a cutter blade, laser cutter, ion beam, fire, heat, water pressure, an electric heating wire, or spraying of gas or liquid may be used in place of or in combination with the above examples, or the cutting element may be moved and cut using a combination of appropriate driving equipment. [Explanation of symbols]

[0027] EA...Sheet attachment device 10...Sheet supply means 20...Pressing means 22...Pressing roller 22B… When connecting parts AR…mobile scope AS…then シート SF…moving plane SF1…Planet 1 SF2…Second Plane SF3…3rd plane RL…stripping シート WK…being covered WK1…covered

Claims

1. a sheet supplying means for supplying an adhesive sheet; a pressing means having a pressing roller that presses the adhesive sheet against an adherend, and that presses and affixes the adhesive sheet to the adherend while moving relatively to the pressing roller; the pressing means is configured to bring the pressing roller into contact with the adherend surface and rotate the pressing roller on the adherend surface at a stage before the adhesive sheet is pressed against the adherend by the pressing roller, the sheet supplying means is provided so as to be able to peel the adhesive sheet temporarily attached to the release sheet from the release sheet and supply the sheet; The adherend surface is moved within a predetermined movement plane, the moving plane is located between a first plane that is parallel to the moving plane and contacts the pressure roller at a position closest to the moving plane, and a second plane that is parallel to the moving plane and contacts the release sheet at a position closest to the moving plane within a moving range of the adherend surface; The pressing means is configured such that the contact portion of the pressure roller with the surface to be adhered deforms between the first plane and the second plane, and the pressure roller rotates on the surface to be adhered.

2. A sheet application device as described in claim 1, characterized in that the first plane is located below the moving plane and the second plane is located above the moving plane.

3. a sheet supplying step of supplying an adhesive sheet; a pressing step of using a pressure roller to press the adhesive sheet against the adherend, the adhesive sheet being pressed against the adherend while moving relative to the pressure roller, thereby affixing the adhesive sheet to the adherend; In the pressing step, before the adhesive sheet is pressed against the adherend by the pressure roller, a step is carried out in which the pressure roller is brought into contact with the adherend surface and the pressure roller is rotated on the adherend surface; In the sheet supplying step, the adhesive sheet temporarily attached to a release sheet is peeled off from the release sheet and supplied; The adherend surface is moved within a predetermined movement plane, the moving plane is located between a first plane that is parallel to the moving plane and contacts the pressure roller at a position closest to the moving plane, and a second plane that is parallel to the moving plane and contacts the release sheet at a position closest to the moving plane within a moving range of the adherend surface; A sheet-applying method characterized in that, in the pressing process, a process is carried out in which the contact portion of the pressing roller with the adherend surface is deformed between the first plane and the second plane, and the pressing roller rotates on the adherend surface.

Images