Method for manufacturing modified aluminum nitride raw material, modified aluminum nitride raw material, method for manufacturing aluminum nitride crystals, and method for suppressing downfall

Abstract

The purpose of the present is to provide a modified AlN raw material for suppressing downfall defects. This manufacturing method of a modified aluminum nitride raw material involves a heat treatment step for heat treating an aluminum nitride raw material and generating an aluminum nitride sintered body.

Description

[Technical Field]

[0001] The present invention relates to a method for producing a modified aluminum nitride raw material, a modified aluminum nitride raw material, a method for producing aluminum nitride crystals, and a method for suppressing downfall. [Background technology]

[0002] Aluminum nitride (AlN) has high thermal conductivity and excellent electrical insulation properties, and is widely used in a variety of applications, including semiconductor substrates and semiconductor package base materials.

[0003] In recent years, AlN has attracted attention due to its wide band gap (6.28 eV), and it is expected to be applied to light-emitting diodes (LEDs) that emit deep ultraviolet (UV-C) light.

[0004] However, because substrates made of AlN alone are small in diameter and expensive, heterogeneous substrates, in which an AlN film is formed on a substrate made of another material, are often used as large-diameter, inexpensive substrates.

[0005] For example, Patent Document 1 describes a substrate comprising a sapphire substrate, a first AlN film formed on a first main surface of the sapphire substrate, and an AlN film formed on a second main surface of the sapphire substrate opposite to the first main surface. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Publication No. 2019-151520 Summary of the Invention [Problem to be solved by the invention]

[0007] Because AlN has a high melting point, it is difficult to grow single crystals using the melt method, which is the same method used to grow large, high-quality single crystals as silicon. Therefore, it is necessary to grow single crystals mainly using the vapor phase method. However, at present, the maximum diameter of aluminum nitride single crystal wafers that are of sufficient quality for use as semiconductor substrates is 2 inches.

[0008] One of the reasons why it is not possible to produce high-quality, large-diameter AlN single crystals is the anisotropy in AlN crystal growth. Thermodynamically, AlN growth is dominated by the c-direction (the direction perpendicular to the growth surface) rather than the m-direction (the direction parallel to the growth surface), making it difficult to grow in the direction that widens the wafer diameter.

[0009] As described above, it has been difficult to increase the wafer diameter in the homo-growth of AlN single crystals, so a method has been considered in which SiC, which has a relatively large wafer diameter and a relatively small lattice mismatch with AlN, is used as the substrate, and AlN crystal is hetero-growthed on the SiC substrate.

[0010] However, as shown in Figure 1, there is a large difference in thermal expansion coefficient between the AlN growth layer 10 and the SiC substrate 20, and during the cooling process in the AlN crystal growth process, AlN has a higher contraction rate than SiC, which causes the problem of many cracks occurring in the AlN growth layer 10.

[0011] To address this issue, the inventors have proposed a method for alleviating the stress on AlN during cooling due to the difference in thermal expansion coefficients between AlN and SiC by using a SiC brittle processed substrate 21 in which the SiC substrate has been subjected to processing such as perforation processing to reduce the strength of the SiC substrate and improve its expansion and contraction coefficients (filed on the same day as this application, see Figure 2).

[0012] By processing the SiC substrate to improve its expansion and contraction rates, cracks occur in the SiC brittle processed substrate 21 during cooling, but it has become possible to suppress the occurrence of cracks in the AlN growth layer 10.

[0013] Thus, the present inventors have discovered a method for suppressing the occurrence of cracks during hetero-growth of AlN, but have encountered further problems in putting this method into practical use.

[0014] The mechanical strength of the above-mentioned SiC brittle processed substrate 21 is significantly reduced, so in the conventional face-down method (a method in which the growth surface of the substrate faces downward and the AlN growth raw material 40 is placed in a position opposite the growth surface), only the edge of the SiC brittle processed substrate 21 is supported, which causes bending due to the weight and leads to damage of the substrate (Figure 3).

[0015] To address this issue, the inventors considered changing from the conventional face-down method to a face-up method (a method in which the growth surface of the substrate faces upward and the AlN growth source material 40 is placed in a position opposite the growth surface) (Figure 4).

[0016] In the face-up method, since it is possible to support the entire SiC brittle processed substrate 21, even if the strength of the SiC brittle processed substrate 21 is significantly low, bending does not occur.

[0017] On the other hand, since the AlN growth source material 40 is located at the top, the source material adheres to the SiC substrate in a solid state (downfall), and this downfall can become the starting point of defects or a factor in the polycrystallization of the AlN growth crystal (Figure 4).

[0018] Therefore, an object of the present invention is to provide a modified AlN raw material for suppressing downfall. [Means for solving the problem]

[0019] The present invention, which solves the above problem, provides a granular material having a bulk density of 2.0 g / cm 3 The modified aluminum nitride raw material is an aluminum nitride sintered body having an open porosity of 10% or less. Such modified aluminum nitride raw material is suppressed from downfalling and is suitable as a source raw material for face-down crystal growth.

[0020] In a preferred embodiment of the present invention, the carbon content is 1000 ppm or less and the oxygen content is 10000 ppm or less.

[0021] In a preferred embodiment of the present invention, the modified aluminum nitride raw material is used as a source material for growing aluminum nitride crystals.

[0022] The present invention, which solves the above problems, is a method for producing a modified aluminum nitride raw material, which includes a heat treatment step of heat treating an aluminum nitride raw material to produce an aluminum nitride sintered body. By heat treating the aluminum nitride raw material, it is possible to produce a modified aluminum nitride raw material in which downfall is suppressed, even when AlN crystal growth is performed in a face-up arrangement.

[0023] In a preferred embodiment of the present invention, the method further comprises an etching step of etching the aluminum nitride sintered body. By etching the aluminum nitride sintered body, it is possible to produce a raw material that is more effective in suppressing downfall.

[0024] In a preferred embodiment of the present invention, the etching step is a step of performing chemical etching.

[0025] In a preferred embodiment of the present invention, the heat treatment step is a step of performing pressure sintering.

[0026] In a preferred embodiment of the present invention, the heat treatment step is a step of performing spark plasma sintering.

[0027] In a preferred embodiment of the present invention, the heat treatment step is a step of performing pressureless sintering, and includes a forming step, prior to the heat treatment step, of forming an aluminum nitride raw material to produce an aluminum nitride molded body.

[0028] In a preferred embodiment of the present invention, The modified aluminum nitride raw material is a source material for growing aluminum nitride crystals.

[0029] Further, the present invention, which solves the above-mentioned problems, The modified aluminum nitride raw material is produced by the above-mentioned production method.

[0030] Further, the present invention, which solves the above-mentioned problems, This is a method for producing aluminum nitride crystal, which comprises a crystal growth step in which a modified aluminum nitride raw material, produced by heat-treating an aluminum nitride raw material, is used as a source raw material for growing aluminum nitride crystal on a base substrate. According to the aluminum nitride crystal manufacturing method of the present invention, downfall during the manufacturing process is suppressed, making it possible to manufacture aluminum nitride crystal with few defects.

[0031] In a preferred embodiment of the present invention, the starting substrate and the modified aluminum nitride raw material are arranged face up.

[0032] In a preferred embodiment of the present invention, the modified aluminum nitride raw material has a bulk density of 2.0 g / cm 3 The aluminum nitride sintered body has the above-mentioned open porosity of 0 to 10%.

[0033] Furthermore, the present invention, which solves the above-mentioned problems, is an aluminum nitride crystal produced by the above-mentioned production method. The aluminum nitride crystal of the present invention has low defects, and in particular, has a low density of particles derived from downfall.

[0034] Further, the present invention, which solves the above-mentioned problems, A method for suppressing downfall of aluminum nitride raw material in an aluminum nitride crystal growth process, in which a modified aluminum nitride raw material produced by heat-treating the aluminum nitride raw material is used as a source raw material for growing aluminum nitride crystal on a base substrate.

[0035] In a preferred embodiment of the present invention, the starting substrate and the modified aluminum nitride raw material are arranged face up.

[0036] In a preferred embodiment of the present invention, the modified aluminum nitride raw material has a bulk density of 2.0 g / cm 3 The aluminum nitride sintered body has the above-mentioned open porosity of 0 to 10%. [Effects of the Invention]

[0037] According to the present invention, downfall during aluminum nitride crystal growth can be suppressed, and aluminum nitride single crystal with low defects can be produced. [Brief explanation of the drawings]

[0038] [Figure 1] 1 is a diagram showing the mechanism of crack generation in an AlN growth layer using SiC as a base substrate. [Figure 2] 1 is a diagram showing a mechanism for suppressing crack generation in an AlN growth layer using a SiC substrate with through holes as a base substrate. [Figure 3] This is a diagram showing the state in which a SiC substrate having through holes is placed using the face-down method. [Figure 4] 1 is a diagram showing the fall-down of AlN powder raw material using the face-up method. [Figure 5] FIG. 1 is an explanatory diagram illustrating the difference between apparent density and bulk density. [Figure 6] FIG. 2 is an explanatory diagram illustrating the crystal growth step in the method for manufacturing AlN crystal using a modified AlN raw material. [Figure 7] 1 is a diagram showing the apparent density and bulk density of each modified AlN raw material. [Figure 8] 1 is a diagram showing the configuration of an apparatus used in the AlN crystal growth process. [Figure 9] 1 is a graph showing particle density versus annealing treatment time on the growth surface of an AlN crystal, as well as an SEM image and an optical microscope image of the growth surface of an AlN crystal. DETAILED DESCRIPTION OF THE INVENTION

[0039] (1) AlN raw material The present invention is a method for producing modified aluminum nitride (AlN) raw material by heat treating AlN raw material. In the present invention, the AlN raw material refers to a raw material that can be heated to produce an AlN sintered body, and includes not only AlN powder, granules (powder-grain), and compacts, but also Al powder-grain and Al compacts. By heating the Al powder-grain and Al compacts in a nitrogen atmosphere, a nitriding reaction occurs, and an AlN sintered body can be produced.

[0040] When powder or granules are used as the AlN raw material, the median diameter (d50) of the powder or granules is preferably 50 μm or less, more preferably 30 μm or less, even more preferably 10 μm or less, particularly preferably 5 μm or less, more preferably 3 μm or less, and most preferably 1 μm or less. By using powder particles with a small median diameter as the AlN raw material, it is possible to efficiently produce modified AlN raw material that has an excellent downfall suppression effect.

[0041] The AlN raw material preferably has an impurity content of 10,000 ppm or less, more preferably 8,000 ppm or less, even more preferably 6,000 ppm or less, and particularly preferably 5,000 ppm or less. Furthermore, among the impurities contained in the AlN raw material, the content of carbon atoms (C) is preferably 1000 ppm or less, more preferably 800 ppm or less, even more preferably 600 ppm or less, particularly preferably 400 ppm or less, even more preferably 200 ppm or less, and most preferably 100 ppm or less. Furthermore, among the impurities contained in the AlN raw material, the content of oxygen atoms (O) is preferably 10,000 ppm or less, more preferably 8,000 ppm or less, even more preferably 6,000 ppm or less, and particularly preferably 5,000 ppm or less.

[0042] If an AlN raw material containing a large amount of impurities is used as a raw material for growing an AlN crystal, there is a risk that impurity-induced defects will be introduced into the AlN crystal. Therefore, it is preferable to use an AlN raw material with a low impurity content.

[0043] The AlN precursor is preferably produced by directly nitriding aluminum, since the AlN precursor produced in this way has a low impurity content.

[0044] (2) Heat treatment process The method of heat treating the AlN raw material is not particularly limited, and includes so-called pressureless sintering, pressure sintering, and heat treatment carried out under conditions that result in the production of an AlN sintered body.

[0045] Examples of pressureless sintering include atmospheric sintering, thermal plasma sintering, microwave / millimeter wave sintering, etc. When Al powder particles are used as the AlN raw material, reactive sintering can also be carried out. Examples of pressure sintering include hot press sintering (HP), vacuum hot press sintering (VHP), and spark plasma sintering (pulse current method, pulse current pressure sintering method, SPS). In the present invention, the AlN sintered body is preferably produced by pressure sintering, and more preferably by spark plasma sintering.

[0046] Spark plasma sintering is a method in which a pulse voltage and current are applied directly to a graphite sintering mold and the material to be sintered, and the self-heating and pressure are used as the driving force for sintering. Compared to atmospheric heating using an electric furnace, etc., this method allows for rapid heating and cooling. Therefore, it is possible to efficiently produce dense sintered bodies with suppressed grain growth.

[0047] In the production of the AlN sintered body, a sintering aid such as calcium oxide (CaO), aluminum oxide (Al2O3), or yttrium oxide (Y2O3) may be added as needed.

[0048] The sintering temperature for producing an AlN sintered body varies depending on the presence or absence of a sintering aid and the type of sintering aid, but sintering can be carried out at a temperature of 1400°C or higher and lower than 2400°C. The sintering temperature is more preferably 1600°C or higher, even more preferably 1700°C or higher, particularly preferably 1800°C or higher, and most preferably 1850°C or higher. The atmospheric temperature is more preferably 2100°C or less, further preferably 2000°C or less, and particularly preferably 1950°C or less.

[0049] The heat treatment time for the AlN raw material can be appropriately set depending on the sintering method. When pressure sintering is employed as the heat treatment method, the heat treatment time can be set to about 1 minute to 2 hours, and can be set to about 5 minutes to 1 hour. When pressureless sintering is adopted as the heat treatment method, the heat treatment time can be 1 hour or more, 3 hours or more, 5 hours or more, 10 hours or more, 20 hours or more, 30 hours or more, 40 hours or more, 50 hours or more, 60 hours or more, 70 hours or more, or 80 hours or more.

[0050] The heat treatment may be carried out in an inert gas atmosphere, for example, in a nitrogen gas atmosphere. In this case, the flow rate of the inert gas is not particularly limited, but is preferably 0.5 to 20 slm, more preferably 1 to 10 slm, even more preferably 1 to 5 slm, and particularly preferably 2 to 4 slm.

[0051] The jigs used in the heat treatment, specifically, the container for storing the AlN raw material, the setter, the press mold, the press rod, and other jigs, preferably have a carbon content of 1% by mass or less. The jigs more preferably have a carbon content of 0.5% by mass or less, even more preferably 0.1% by mass or less, particularly preferably 0.01% by mass or less, even more preferably 0.001% by mass or less, and most preferably contain no carbon.

[0052] If the jig used in the heat treatment contains carbon, the heat treatment may supply carbon from the jig to the AlN raw material, increasing the carbon content of the modified AlN raw material.By minimizing the carbon content of the jig material, it is possible to reduce the carbon content, or impurity level, in the modified AlN raw material.

[0053] Examples of materials used for the jig include heat-resistant materials such as boron nitride, tungsten, tungsten carbide, tantalum, tantalum carbide, molybdenum, and molybdenum carbide.

[0054] The AlN sintered body obtained by the heat treatment step is preferably subjected to an annealing treatment to remove oxygen and / or the sintering aid, if used. The annealing temperature is preferably 1800°C or higher, and more preferably 1900°C or higher. The annealing time is preferably 3 hours or more, more preferably 5 hours or more, even more preferably 7 hours or more, and particularly preferably 10 hours or more. The annealing treatment is preferably carried out in a non-oxidizing atmosphere, such as an inert gas atmosphere of nitrogen, argon, or He, or a vacuum atmosphere.

[0055] (3) Molding process When pressureless sintering is employed as the heat treatment method, a molding step of molding the AlN raw material to produce an AlN compact may be provided prior to the heat treatment step.

[0056] The method for forming the AlN compact is not particularly limited, and conventional ceramic forming methods can be used. Examples of molding methods include mechanical pressing, hydrostatic pressing, extrusion molding, injection molding, and casting.

[0057] (4) Etching process The AlN sintered body produced by the above-mentioned heat treatment step is preferably further etched, which results in a modified AlN raw material that is more effective in suppressing downfall. As the etching method, it is preferable to employ chemical etching. Examples of chemical etching include thermal etching in a reactive gas atmosphere and wet etching. Examples of thermal etching in a reactive gas atmosphere include hydrogen etching and etching using a halogenated gas. An example of wet etching is wet etching using KOH.

[0058] By etching the AlN sintered body, it becomes a modified AlN raw material with an even better downfall suppression effect.

[0059] (5) Modified AlN raw material The present invention also relates to a modified AlN raw material produced by the above production method.

[0060] The inventors have found that the AlN sintered bodies obtained by the above-mentioned heat treatment can be roughly classified into three groups. Table 1 summarizes the physical properties and characteristics of the three groups.

[0061] [Table 1]

[0062] FIG. 5 shows an explanatory diagram for explaining the difference between apparent density and bulk density. As shown in FIG. 5(a), the apparent density is a density obtained by adding the volume of the closed pores 41 to the volume occupied by the AlN growth source material 40 itself (the material itself) to obtain the volume for density calculation. On the other hand, the bulk density is a density obtained by adding the volume occupied by the AlN growth source material 40 itself, the volume of the closed pores 41, and the volume of the open pores 42 as a volume for density calculation.

[0063] The AlN sintered compacts of Groups I and II have almost no difference between apparent density and bulk density. In other words, the difference between apparent density and bulk density can be said to be a difference in open pores, and therefore the AlN sintered compacts of Groups I and II can be said to have few or almost no open pores.

[0064] On the other hand, Group I has relatively lower apparent density and absolute bulk density values ​​than Group II. Therefore, it can be seen that Group I has a relatively larger volume than Group II. As mentioned above, the AlN sintered bodies of Group I and Group II have a property of having few open pores, so this difference in volume can be said to be a difference in the volume of closed pores. In other words, Group I can be said to have a relatively larger proportion of closed pores than Group II. On the other hand, Group II has a relatively smaller volume than Group I, meaning that it has a relatively smaller proportion of closed pores.

[0065] Group III has a difference between the apparent density and the bulk density, specifically, the bulk density is lower than the apparent density. As mentioned above, the difference between apparent density and bulk density can be said to be the difference in the volume of open pores, and therefore the AlN sintered compacts of Group III can be said to have a large volume of open pores.

[0066] The physical properties of the AlN sintered bodies belonging to each group will be explained in more detail below. The AlN sintered bodies of groups I to III will be referred to as modified AlN raw materials I to III, respectively.

[0067] (Modified AlN raw material I) The apparent density of the modified AlN raw material I is preferably 3.2 g / cm 3 and more preferably less than 3.15 g / cm 3 The apparent density of modified AlN raw material I is less than 2.0 g / cm 3 More than 2.5g / cm is preferable. 3 More preferably, 2.7 g / cm 3 For example, the apparent density of the modified AlN raw material of Group I is 2.9 g / cm 3 It may be more than 3.0 g / cm 3 It may be more than that.

[0068] The bulk density of the modified AlN raw material I is preferably 3.2 g / cm 3 and more preferably less than 3.15 g / cm 3 The bulk density of the modified AlN raw material I is less than 2.0 g / cm 3 More than 2.5g / cm is preferable. 3 More preferably, 2.7 g / cm 3 The bulk density of the modified AlN raw material of Group I is more preferably 2.9 g / cm. 3 It may be more than 3.0 g / cm 3 It may be more than that.

[0069] The absolute value of the difference between the apparent density and the bulk density of the modified AlN raw material I is preferably 0 to 0.1, more preferably 0 to 0.05, and even more preferably 0 to 0.01.

[0070] The open porosity of the modified AlN raw material I is preferably 0 to 10%, more preferably 0 to 5%, even more preferably 0 to 3%, particularly preferably 0 to 1%, more preferably 0 to 0.5%, and most preferably 0 to 0.1%. The closed porosity of the modified AlN raw material I is preferably 0.8 to 25%, more preferably 1 to 20%, even more preferably 1 to 18%, particularly preferably 2 to 16%, and most preferably 4 to 14%.

[0071] Modified AlN raw material I is presumably produced by applying a large amount of thermal energy without applying too much pressure to the AlN powder particles, or by using coarse-grained AlN powder particles to keep the interparticle distance small. The specific pressure and energy required will vary depending on the particle size of the AlN powder particles and the production method used, but methods for producing modified AlN raw material I include spark plasma sintering using coarse-grained AlN powder particles and hot press sintering using coarse-grained AlN powder particles. Another method is to press-molde AlN granular material and then perform annealing.

[0072] Modified AlN raw material I has a high closed porosity, but as the AlN crystal growth reaction described below progresses, the closed pores become exposed and open pores, and it is possible that the modified AlN raw material I will have properties similar to those of modified AlN raw material III.

[0073] (Modified AlN Raw Material II) The apparent density of the modified AlN raw material II is preferably 3.2 g / cm 3 The apparent density of modified AlN raw material I is 3.26 g / cm 3 It is preferable that:

[0074] The bulk density of the modified AlN raw material II is 3.2 g / cm 3 The bulk density of the modified AlN raw material is 3.26 g / cm 3 It is preferable that:

[0075] The absolute value of the difference between the apparent density and the bulk density of the modified AlN raw material II is preferably 0 to 0.1, more preferably 0 to 0.05, and even more preferably 0 to 0.01.

[0076] The open porosity of the modified AlN raw material II is preferably 0 to 10%, more preferably 0 to 5%, even more preferably 0 to 3%, particularly preferably 0 to 1%, more preferably 0 to 0.5%, and most preferably 0 to 0.1%. Furthermore, the closed porosity of the modified AlN raw material II is preferably 0 to 4%, more preferably 0 to 3%, even more preferably 0 to 2%, particularly preferably 0 to 1%, more preferably 0 to 0.8%, and most preferably 0 to 0.7%.

[0077] It is believed that modified AlN raw material II can be produced by applying strong pressure or by using AlN powder particles with fine particle size to reduce the interparticle distance and by applying a large amount of thermal energy. The specific pressure and energy will vary depending on the particle size of the AlN powder and the manufacturing method used, but methods for manufacturing modified AlN raw material II include spark plasma sintering, vacuum hot pressing, and hot pressing to produce an AlN sintered body.

[0078] (Modified AlN raw material III) The apparent density of the modified AlN raw material III is preferably 3.26 g / cm 3 or less, more preferably 3.2 g / cm 3 or less, and more preferably 3.1 g / cm 3 The apparent density of the modified AlN raw material III is preferably 2.2 g / cm or less. 3 More preferably, it is 2.5 g / cm or more. 3 More preferably, it is 2.7 g / cm or more. 3 More preferably, it is 2.9 g / cm or more. 3 That's all.

[0079] The bulk density of the modified AlN raw material III is preferably 2.5 g / cm 3 More preferably, it is 2.3 g / cm or less. 3 More preferably, it is 2.2 g / cm or less. 3The bulk density of the modified AlN raw material III is preferably 1 g / cm or less. 3 More preferably, it is 1.2 g / cm or more. 3 More preferably, it is 1.5 g / cm 3 That's all. In another embodiment, the bulk density of the modified AlN raw material III is preferably 1.6 g / cm 3 More preferably, it is 1.8 g / cm or more. 3 More preferably, it is 2.0 g / cm or more. 3 That's all. The bulk density of the modified AlN material III is lower than the apparent density.

[0080] The difference between the apparent density and the bulk density of the modified AlN raw material III is preferably 0.5 to 2.5 g / cm 3 and more preferably 0.7 to 2 g / cm 3 and more preferably 1 to 1.5 g / cm 3 is.

[0081] The open porosity of the modified AlN raw material III is preferably 10 to 60%, more preferably 20 to 60%, even more preferably 25 to 60%, particularly preferably 25 to 55%, and most preferably 25 to 50%. The closed porosity of the modified AlN raw material III is preferably 2 to 10%, more preferably 2 to 8%, even more preferably 4 to 8%, and particularly preferably 4 to 6%.

[0082] As modified AlN raw materials with a low incidence of downfall, modified AlN raw material I and modified AlN raw material II are preferred, with modified AlN raw material II being more preferred. Therefore, it is preferable to use a modified AlN raw material that is classified as either modified AlN raw material I or modified AlN raw material II (modified AlN raw material I-II), and examples of such modified AlN raw materials include the following:

[0083] The apparent density of the modified AlN raw material I-II is preferably 2.5 g / cm3 More preferably, 2.6 g / cm 3 More preferably, 2.7 g / cm 3 More preferably, 2.8 g / cm 3 The apparent density of the modified AlN raw material I-II is preferably 3.26 g / cm 3 The following is the result.

[0084] The bulk density of the modified AlN raw material I-II is preferably 2.5 g / cm 3 More preferably, 2.6 g / cm 3 More preferably, 2.7 g / cm 3 More preferably, 2.8 g / cm 3 The bulk density of the modified AlN raw material I-II is preferably 3.26 g / cm 3 The following is the result.

[0085] The absolute value of the difference between the apparent density and the bulk density of the modified AlN raw material I-II is preferably 0 to 0.8, more preferably 0 to 0.6, even more preferably 0 to 0.4, particularly preferably 0 to 0.2, more preferably 0 to 0.1, and most preferably 0 to 0.01.

[0086] The open porosity of the modified AlN raw material I-II is preferably 0 to 10%, more preferably 0 to 5%, even more preferably 0 to 3%, particularly preferably 0 to 1%, more preferably 0 to 0.5%, and most preferably 0 to 0.1%. The closed porosity of the modified AlN raw material I-II is preferably 0 to 25%, more preferably 0 to 20%, even more preferably 0 to 18%, particularly preferably 0 to 16%, and most preferably 0 to 14%.

[0087] The apparent density and bulk density described above can be determined by Archimedes' method using distilled water. The open porosity and closed porosity can be calculated by the following formulas.

[0088]

number

[0089]

number

[0090]

number

[0091]

number

[0092]

number

[0093]

number

[0094]

number

[0095] The theoretical density of AlN is 3.26 g / cm 3 is.

[0096] The modified AlN raw material of the present invention is preferably used as a source material (supply source) for AlN crystal growth, and is also preferably used as a source material in crystal growth by the so-called face-up method, in which the growth surface of a crystal growth substrate faces upward and the source material for crystal growth is placed in a position opposite the growth surface. When the modified AlN raw material of the present invention is used as a source raw material in the face-up method, downfall hardly occurs, and AlN single crystals with low defects can be produced.

[0097] Furthermore, the preferred range of the impurity amount in the modified AlN raw material of the present invention can be directly applied to the preferred range of the impurity amount in the AlN raw material described above.

[0098] (6) Methods for preventing downfall of AlN raw materials The present invention also relates to a method for suppressing downfall of AlN raw material in the AlN crystal growth process. The downfall suppression method of the present invention uses the above-described modified AlN raw material as a source raw material (supply source).

[0099] The downfall suppression method of the present invention is particularly effective in growing AlN crystal by the face-up method described above.

[0100] The AlN crystal growth method to which the method of the present invention is applied is preferably vapor phase growth.

[0101] The growth temperature in the AlN crystal growth method can be set to a temperature known as the AlN crystal growth temperature, for example, about 1600 to 2200°C.

[0102] Furthermore, the method of the present invention is preferably applied when performing heteroepitaxial growth of AlN crystals. The heterosubstrate used for heteroepitaxial growth is not particularly limited, but semiconductor substrates commonly used in manufacturing semiconductor substrates can be used. Examples include sapphire substrates, Group IV semiconductor substrates such as Si, germanium (Ge), and diamond (C), II-VI semiconductor substrates such as zinc selenide (ZnSe), cadmium sulfide (CdS), and zinc oxide (ZnO), III-V semiconductor substrates such as GaAs, GaN, and AlN, Group IV compound semiconductor substrates such as SiC and silicon germanium (SiGe), and gallium oxide (Ga2O3) substrates. From the viewpoint of lattice mismatch and thermal expansion coefficient, it is preferable to use a SiC substrate. As the SiC substrate, it is preferable to use a SiC embrittlement processed substrate that has been subjected to embrittlement processing.

[0103] In this specification, the term "embrittlement treatment" refers to a treatment that reduces the strength of the base substrate. In other words, it is a process that processes the base substrate so that it is easily deformed or destroyed by an external force. In addition, in this specification, "strength" refers to the durability against physical external forces such as compression and tension, and includes the concept of mechanical strength. An example of a brittle processing method is to form through holes in the base substrate, which makes the base substrate more susceptible to deformation or destruction by external force.

[0104] (7) Manufacturing method of AlN crystal The present invention also relates to a method for producing AlN crystal using the modified AlN raw material. That is, the manufacturing method of the present invention makes it possible to manufacture AlN crystal with few defects by using a modified AlN raw material as the source material for growing AlN crystal.

[0105] The AlN crystal is preferably an AlN semiconductor substrate. The AlN crystal is preferably a single crystal.

[0106] The preferred method for producing AlN crystal according to the present invention is a method for producing AlN crystal by epitaxial growth using a base substrate, and it is particularly preferred to produce AlN crystal by heteroepitaxial growth.

[0107] In the manufacturing method of the present invention, the above-mentioned substrates can be used as the base substrate, and it is preferable to use a SiC substrate, and it is particularly preferable to use a SiC embrittlement substrate that has been subjected to embrittlement processing.

[0108] Furthermore, the AlN crystal manufacturing method of the present invention is preferably a method for manufacturing AlN crystal using the so-called face-up method, in which the crystal growth surface of the base substrate faces upward (the opposite direction to the direction of gravity) and the source material is placed in a direction opposing the crystal growth surface of said base substrate.

[0109] FIG. 6 shows an explanatory diagram illustrating the AlN crystal growth process. The AlN crystal growth step is a step of arranging and heating the SiC substrate 20 and the AlN growth source material 40 so that they face each other (face each other). The AlN growth source material 40 is the modified AlN source material described above.

[0110] By heating the SiC substrate 20 and the AlN growth source material 40 arranged in this manner, the source material is transported from the AlN growth source material 40 onto the SiC substrate 20 via the source material transport space 51 .

[0111] The driving force for transporting the source material can be a temperature gradient or a chemical potential difference between the SiC substrate 20 and the AlN growth source material 40.

[0112] Specifically, vapor made of elements sublimated from the AlN growth source material 40 is transported by diffusion in the source material transport space 51, and condenses in a supersaturated state on the SiC substrate 20, which is set at a lower temperature than the AlN growth source material 40. Alternatively, the vapor is supersaturated and condenses on the SiC substrate 20, which has a lower chemical potential than the AlN growth source material 40. As a result, an AlN growth layer 10 is formed on the SiC substrate 20.

[0113] In this crystal growth process, a doping gas may be used to adjust the doping concentration of the AlN growth layer 10. Alternatively, the doping concentration of the AlN growth layer 10 may be adjusted by using an AlN growth source material 40 having a doping concentration different from that of the SiC substrate 20.

[0114] While FIG. 6 shows a form in which AlN growth layer 10 is formed by the PVT method, the AlN crystal manufacturing method of the present invention can naturally be adopted as long as it is a technique that can form AlN growth layer 10.

[0115] As the substrate, it is preferable to use the above-mentioned SiC brittle processed substrate. By using a SiC brittle processed substrate, it is possible to prevent cracks from occurring in the AlN crystal when the temperature is lowered after crystal growth.

[0116] Furthermore, according to the present invention, because the modified AlN source material described above is used as the source material for growing AlN, even if the starting substrate and modified AlN source material are positioned face-up, the modified AlN source material can be prevented from falling down onto the growth surface of the starting substrate, making it possible to produce AlN crystal with extremely few defects. [Example]

[0117] (Test Example 1) Production of modified AlN raw material Two types of AlN powder particles (fine powder: median diameter (d50) = 1 μm, coarse powder: median diameter (d50) = 10 μm) were prepared, and 10 types of modified AlN raw materials were produced using the processing methods listed in Table 2. Details of each processing method are summarized in Table 3. The apparent density and bulk density of each modified AlN raw material were measured using the Archimedes method (liquid used: distilled water). The open porosity and closed porosity of each modified AlN raw material were also calculated. The results are shown in Table 4 and Figure 7.

[0118] [Table 2]

[0119] [Table 3]

[0120] [Table 4]

[0121] As shown in Table 4 and Figure 7, the apparent density and bulk density of raw materials 1, 2, 4, 5, 6, 7, and 8 are consistent. Among them, raw materials 1, 2, 5, and 7 all have a density of 3.20 g / cm. 3 As mentioned above, the density of raw materials 4, 6, and 8 is relatively high, and they belong to the above-mentioned group II. On the other hand, raw materials 4, 6, and 8 belong to the above-mentioned group I. Furthermore, raw materials 3, 9, and 10 have a bulk density lower than the apparent density and belong to the above-mentioned group III.

[0122] (Test Example 2) Downfall suppression effect verification test Figure 8 shows the configuration of the equipment used in the downfall suppression effectiveness verification test. Using a jig 50 (material: tantalum carbide, tungsten), a 10 mm SiC substrate 20 (4H—SiC, substrate size: 10 mm) was placed with the growth surface facing upward, as shown in FIG. Next, the AlN growth source material 40 (modified AlN source material 2 in Tables 1 to 4) was placed at a position facing the growth surface of the SiC substrate 20 .

[0123] The modified AlN raw material 2 was previously subjected to wet etching under the following conditions. (Etching conditions) Etching temperature: 500°C Etching time: 10 seconds Etching solution: KOH:NaOH = 1:1

[0124] Inside the assembled jig 50, a raw material transport space 51 exists between the SiC substrate 20 and the AlN growth raw material 40, and the growth raw material is transported from the AlN growth raw material 40 onto the SiC substrate 20 through the raw material transport space 51.

[0125] The SiC substrate and the AlN growth source material 40 arranged as described above were placed in a heating furnace, and a heat treatment was carried out under the following conditions (Example 1). (Heating conditions) Heating temperature: 1900℃ Heating time: 8h N2 gas pressure: 30kPa

[0126] In addition, AlN crystals were grown on SiC substrates 20 under the same conditions as in Example 1, except that the modified AlN raw material 2 was further heat-treated for 18 hours (1900°C, 50 kPa, N2 (3 slm), same below), the AlN powder granules (fine particles) were heat-treated for 23 hours, and the AlN powder granules (fine particles) were heat-treated for 80 hours, and these were used as AlN growth raw materials 40 (Examples 2 to 4).

[0127] The growth surfaces of the AlN crystals of Example 1 and Example 3 were observed using an optical microscope, and the growth surfaces of the AlN crystals of Example 3 and Example 4 were observed using a scanning electron microscope (FIG. 9). The number of particles was then counted across the entire surface of the growth region of each AlN crystal, and the particle density (particles / mm 2 ) was calculated. The results are shown in Table 5 and Figure 9.

[0128] [Table 5]

[0129] As shown in Table 5 and FIG. 9, it was confirmed that the AlN crystals of Examples 1 and 2 were completely free of particles (small pieces).

[0130] The particle density of the AlN crystal (FIG. 9) grown using the modified AlN raw material that had been heat treated for 23 hours in Example 3 was 53 particles / mm 2 In contrast, when the modified AlN raw material of Example 4, which was heat-treated for 80 hours, a longer time than Example 3, was used, the particle density of the AlN crystal was 11 particles / mm 2 It was found that the number had decreased to about one-fifth.

[0131] From these results, it was found that by using the modified AlN material produced by the production method of the present invention as the source material, downfall of the source material is suppressed, and AlN crystal with low defects can be produced.

[0132] (Test Example 3) Downfall Suppression Effect Verification Test 2 Of the raw materials 1 to 10 shown in Table 3, raw materials 1, 3 to 5, and 8 to 10 were used to grow AlN crystal using the same method as in Test Example 2. The number of particles was then counted across the entire surface of the growth region of each AlN crystal to determine the particle density (particles / mm 2 ) was calculated. Note that raw materials 1, 3 to 5, and 8 were previously etched by the same method as that shown in Test Example 2. The results are shown in Table 6.

[0133] [Table 6]

[0134] As shown in Table 6, it was confirmed that the AlN crystals grown using raw materials 1, 4, 5, and 8 contained few particles (small pieces). On the other hand, it was confirmed that needle-like crystals had formed on the crystal surface of the AlN crystals made using raw materials 3, 9, and 10. These needle-like crystals are thought to have been formed by many particles falling onto the AlN crystal surface.

[0135] From this result, the bulk density is 2.0 g / cm 3 From the above, it was found that modified aluminum nitride raw material consisting of an aluminum nitride sintered body with an open porosity of 0 to 10% has an excellent effect of suppressing downfall and is suitable as a source raw material for crystal growth using the face-up method. [Industrial Applicability]

[0136] The present invention can be applied to AlN crystal growth technology. [Explanation of symbols]

[0137] 10 AlN growth layer 20 SiC substrate 21 SiC brittle processed substrate 22 Through hole 30 Holder 40 Raw material for AlN growth 50 Jig 51 Raw material transportation space G gravity

Claims

1. Bulk density is 2.0 g / cm ３ The modified aluminum nitride raw material is used as a source raw material for growing aluminum nitride crystals, and comprises an aluminum nitride sintered body having an open porosity of 0 to 10% and a closed porosity of 0 to 25%.

2. 2. The modified aluminum nitride raw material according to claim 1, wherein the carbon content is 1000 ppm or less and the oxygen content is 10000 ppm or less.

3. 3. The modified aluminum nitride raw material according to claim 2, wherein the carbon content is 200 ppm or less and the oxygen content is 5000 ppm or less.

4. The bulk density of the modified aluminum nitride raw material is 2.8 g / cm ３ The modified aluminum nitride raw material according to any one of claims 1 to 3, wherein the open porosity is 0 to 0.1% and the closed porosity is 0 to 14%.

5. a heat treatment step of heat-treating an aluminum nitride raw material to produce an aluminum nitride sintered body; an etching step of etching the aluminum nitride sintered body, The aluminum nitride sintered body has a bulk density of 2.0 g / cm 3 or more, an open porosity of 0 to 10%, and a closed porosity of 0 to 25%.

6. The method for producing a modified aluminum nitride raw material according to claim 5, wherein the etching step is a step of performing chemical etching.

7. The method for producing a modified aluminum nitride raw material according to claim 5 or 6, wherein the heat treatment step is a step of performing pressure sintering.

8. The method for producing a modified aluminum nitride raw material according to claim 5 or 6, wherein the heat treatment step is a step of performing spark plasma sintering.

9. 7. The method for producing a modified aluminum nitride raw material according to claim 5 or 6, wherein the heat treatment step is a step of performing pressureless sintering, and a forming step of forming the aluminum nitride raw material to produce an aluminum nitride molded body is provided prior to the heat treatment step.

10. The method for producing a modified aluminum nitride raw material according to any one of claims 5 to 9, wherein the modified aluminum nitride raw material is a source raw material for growing aluminum nitride crystals.

11. A bulk density of 2.0 g / cm3 produced by sintering aluminum nitride raw material ３ and a crystal growth step of growing aluminum nitride crystal on a base substrate using the modified aluminum nitride raw material having an open porosity of 0 to 10% and a closed porosity of 0 to 25% as a source raw material for growing aluminum nitride crystal, a method for producing aluminum nitride crystal, wherein, in the crystal growth step, the starting substrate and modified aluminum nitride source material are arranged face-up.

12. The bulk density of the modified aluminum nitride raw material is 2.8 g / cm ３ The method for producing aluminum nitride crystals according to claim 11, wherein the aluminum nitride sintered body is an aluminum nitride sintered body having an open porosity of 0 to 0.1% and a closed porosity of 0 to 14%.

13. 13. The method for producing aluminum nitride crystals according to claim 11 or 12, wherein the modified aluminum nitride raw material has a carbon content of 200 ppm or less and an oxygen content of 5000 ppm or less.

14. A method for suppressing downfall of aluminum nitride raw material in an aluminum nitride crystal growth process, comprising: A bulk density of 2.0 g / cm3 produced by sintering an aluminum nitride raw material is used as a source raw material for growing aluminum nitride crystals on a base substrate. ３ The method as described above, wherein a modified aluminum nitride raw material having an open porosity of 0 to 10% and a closed porosity of 0 to 25% is used, and the base substrate and the modified aluminum nitride raw material are arranged face-up.

15. The modified aluminum nitride raw material has a bulk density of 2.8 g / cm ３ The method according to claim 14, wherein the aluminum nitride sintered body is an aluminum nitride sintered body having an open porosity of 0 to 0.1% and a closed porosity of 0 to 14%.

16. 16. The method of claim 14 or 15, wherein the modified aluminum nitride feedstock has a carbon content of 200 ppm or less and an oxygen content of 5000 ppm or less.

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