Adsorption type transport device

Abstract

To provide an adsorption type transport device which can reduce a size of a lock mechanism, reduce slide resistance in adsorption, and suppress particle generation.SOLUTION: An adsorption type transport device 100 comprises: a partition wall member 15; a first piston 23 which can reciprocate along an axial direction of an adsorption part 90, along an outer surface of the partition wall member 15; a lock member 24 having a second inner peripheral face 24b; a lock steel ball 28 which is held between the second inner peripheral face 24b and an outer surface of the adsorption part 90, for regulating movement of the adsorption part 90; an energizing member 29 for energizing the lock steel ball 28; and a second piston 26 for pressing the lock steel ball 28 to the other side of an axial direction against energization force of an energizing member 29, in linkage with movement of the first piston 23 in the other side of the axial direction.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a suction-type transport device. [Background technology]

[0002] Patent Document 1 describes a holding device capable of holding objects with a wide variety of surface shapes. The holding device has a cylinder with multiple suction parts that suction the object, support parts that support each of the multiple suction parts so that they can move back and forth in the direction in which the suction parts extend, and a holding part that serves as a locking mechanism that can hold the multiple suction parts by restricting the movement of the suction parts relative to the support parts.

[0003] The support portion has an insertion hole through which the suction portion is inserted. The support portion has a packing. The packing closes the gap between the suction portion and the insertion hole. The holding portion presses the suction portion from the side to clamp the suction portion together with the support portion, thereby restricting movement of the suction portion relative to the support portion. The holding device can hold the object by aligning the multiple suction portions with the object, and then using the suction portions to suction the object and the holding portions to restrict movement of the suction portions. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-107351 Summary of the Invention [Problem to be solved by the invention]

[0005] When the holding device transports the object that it has picked up, it is necessary to restrict the movement of the suction part, and it is desirable to make the holding part that restricts the movement of the suction part compact. Furthermore, in the holding device, when the suction part reciprocates relative to the support part, sliding resistance occurs due to sliding contact between the suction part and the packing, and there is a risk of particles being generated. For example, when the holding device is used to transport electronic substrates, it is desirable to suppress the generation of particles and to reduce sliding resistance in order to suppress deformation of the electronic substrates. [Means for solving the problem]

[0006] The suction-type conveying device for solving the above problems includes a rod-shaped suction part capable of suctioning an article at an end in an axial direction, a housing that supports the suction part so that it can reciprocate, with an end of the suction part protruding from one axial side, and a locking mechanism that can restrict and release the restriction on the reciprocating movement of the suction part, wherein the locking mechanism includes: a partition member that surrounds the suction part at a distance from the outer surface of the suction part and is held by the housing; a piston that is arranged between the inner surface of the housing and the outer surface of the suction part and is reciprocable in the axial direction of the housing along the outer surface of the partition member; a first seal that seals between the outer surface of the piston and the inner surface of the housing and allows air to flow from the other side of the axial direction of the housing to one side; a piston chamber formed by the partition member, the housing, and the piston; and a supply / discharge port that communicates with the piston chamber. a locking member provided on the other side of the housing in the axial direction of the piston, spaced apart from the outer surface of the suction portion and surrounding the suction portion, and having an inclined surface whose inner diameter decreases from the other side of the axial direction of the housing to one side; a retaining member that is reciprocal between the inclined surface and the outer surface of the suction portion and moves in the direction in which the inner diameter of the inclined surface decreases to be sandwiched between the inclined surface and the outer surface of the suction portion, thereby restricting the reciprocal movement of the suction portion; a biasing member that biases the retaining member from the other side of the axial direction of the housing to one side; and a linking member that is provided on the other side of the housing in the axial direction of the piston, between the locking member and the outer surface of the suction portion, and is provided between the piston and the retaining member in the axial direction of the housing, and that moves the retaining member to the other side of the axial direction of the housing against the biasing force of the biasing member in conjunction with movement of the piston to the other side of the axial direction of the housing due to supply of air to the piston chamber via the supply / discharge port.

[0007] In the above-mentioned suction-type conveying device, the piston may be a first piston, and a second piston may be provided between the locking member and the outer surface of the suction portion and positioned between the first piston and the retaining member in the axial direction of the housing, and the interlocking member may be the second piston.

[0008] The above-described suction-type transfer device may further include a passage communicating with a gap formed between the inner surface of the partition member and the outer surface of the suction portion, and a particle discharge port communicating with the passage.

[0009] In the above-mentioned suction-type conveying device, the interlocking member has an interlocking member hole that opens on the inner and outer surfaces of the interlocking member, the interlocking member hole accommodates the holding member so that it can move back and forth radially of the interlocking member, and the particle discharge port may be connected to the interlocking member hole through the gap between the inner surface of the interlocking member and the outer surface of the suction portion, between the inner surface of the piston and the outer surface of the suction portion, and through the passage.

[0010] In the above suction-type conveying device, the housing may be formed by integrating a plurality of housing forming members, and the partition member may be inserted through two of the housing forming members. [Effects of the Invention]

[0011] The present invention can reduce the size of the locking mechanism, reduce the sliding resistance during suction, and suppress the generation of particles. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. 1 is a cross-sectional view showing a suction-type conveying device according to an embodiment. [Figure 2] FIG. 2 is an enlarged cross-sectional view showing the locking mechanism and the suction portion when unlocked. [Figure 3] FIG. 3 is an enlarged cross-sectional view showing the locking mechanism and the suction portion in the locked state. [Figure 4] FIG. 4 is an enlarged cross-sectional view of the particle removal mechanism. [Figure 5] FIG. 5 is a diagram showing the initial position. [Figure 6] FIG. 6 is a diagram showing a state in which the suction part is made to conform to the surface shape of the article. DETAILED DESCRIPTION OF THE INVENTION

[0013] An embodiment of the suction-type transport device will be described below with reference to FIGS. <Overall image of the suction-type transport device> As shown in FIGS. 1 to 4, the suction-type transfer device 100 includes a rectangular block-shaped housing 80, three cylindrical suction portions 90, and a locking mechanism 200. The housing 80 has a rectangular block-shaped suction portion 90, and the locking mechanism 200 is a locking mechanism.

[0014] <Adsorption part> Each suction part 90 has a cylindrical rod shape. Each suction part 90 has an adapter 93, a first suction part forming part 94, a return piston 95, a second suction part forming part 96, and a bolt 97 with a through hole. The first suction part forming part 94, the return piston 95, and the second suction part forming part 96 are integrated by the bolt 97 with a through hole. The return piston 95 is sandwiched between the first suction part forming part 94 and the second suction part forming part 96. The outer peripheral surface of the return piston 95 protrudes radially from the suction part 90 beyond the outer peripheral surfaces of the first suction part forming part 94 and the second suction part forming part 96. Of the axial ends of the suction part 90, one end on the adapter 93 side is referred to as a first end 91, and the other end on the bolt 97 side is referred to as a second end 92. The suction part 90 can suction an article A to the adapter 93, which is one of the axial ends.

[0015] The return piston 95 includes a third lip packing 951. The third lip packing 951 allows air to flow from the first end 91 toward the second end 92, while preventing air from flowing from the second end 92 toward the first end 91.

[0016] Each suction portion 90 has an inner circumferential surface 90b that defines a passage 90a. The passage 90a opens at a first end 91 and a second end 92 and penetrates the entire axial direction of the suction portion 90. The first end 91 side of the passage 90a in the axial direction communicates with the interior of the adapter 93.

[0017] <Housing> The housing 80 supports the suction portion 90 so that it can reciprocate. The housing 80 includes a first housing-forming member 10, a second housing-forming member 20, a third housing-forming member 30, a fourth housing-forming member 40, a fifth housing-forming member 50, and a sixth housing-forming member 60. The first housing-forming member 10, the second housing-forming member 20, the third housing-forming member 30, the fourth housing-forming member 40, the fifth housing-forming member 50, and the sixth housing-forming member 60 are aligned in one direction and integrated together. The direction in which the first to sixth housing-forming members 10, 20, 30, 40, 50, and 60 are aligned is the axial direction Z of the housing 80. The axial direction Z of the housing 80 coincides with the axial direction of the suction portion 90.

[0018] In the housing 80, the end where the first housing forming member 10 is located is defined as a first end 82, and the end where the sixth housing forming member 60 is located is defined as a second end 83. The housing 80 also has an inner circumferential surface 81a that defines three insertion holes 81. The three insertion holes 81 are arranged in one direction of the housing 80. Of the directions perpendicular to the axial direction Z of the housing 80, the direction in which the three insertion holes 81 are arranged is defined as the width direction W.

[0019] The inner circumferential surface 81a is formed by the inner circumferential surfaces that define the insertion holes 81 in the first to fifth housing forming members 10, 20, 30, 40, and 50 and the inner surface that defines the insertion hole 81 in the sixth housing forming member 60.

[0020] Each insertion hole 81 extends in the axial direction Z of the housing 80. Each insertion hole 81 is parallel to one another. Each suction portion 90 is inserted into the first to sixth housing-forming members 10, 20, 30, 40, 50, and 60, i.e., the insertion hole 81. A first end 91 of each suction portion 90 protrudes from the first housing-forming member 10, and a second end 92 of each suction portion 90 is inserted into the sixth housing-forming member 60. Therefore, the first end 91 of each suction portion 90 protrudes from one side of the housing 80 in the axial direction Z.

[0021] The first housing forming material 10 of the housing 80 has a first inner circumferential surface 11a that defines the first passage 11, and the second housing forming material 20 has a second inner circumferential surface 21a that defines the second passage 21. The fourth housing forming material 40 of the housing 80 has a third inner circumferential surface 41a that defines the third passage 41, and the sixth housing forming material 60 has a fourth inner circumferential surface 61a that defines the fourth passage 61.

[0022] The first to fourth passages 11, 21, 41, and 61 each extend in the width direction W of the housing 80, and both axial ends of the first to fourth passages 11, 21, 41, and 61 are closed. Each insertion hole 81 communicates with the first to fourth passages 11, 21, 41, and 61. The housing 80 includes a first port 12, a second port 22, a third port 42, and a fourth port 62. The first port 12, which serves as a particle discharge port, is provided in the first housing-forming member 10 and communicates with the first passage 11. The second port 22 is provided in the second housing-forming member 20 and communicates with the second passage 21. The third port 42 is provided in the fourth housing-forming member 40 and communicates with the third passage 41. The fourth port 62 is provided in the sixth housing-forming member 60 and communicates with the fourth passage 61. The first port 12 and the fourth port 62 are each connected to a negative pressure source through a pipe and a selector valve (not shown). The second port 22 and the third port 42 are each connected to a pressure source through a pipe and a selector valve (not shown). An external selector valve (not shown) allows the first port 12 and the fourth port 62 to supply and discharge negative pressure to the interior of the housing 80 through the first passage 11 and the fourth passage 61 that communicate with them, respectively. In addition, an external selector valve (not shown) allows the second port 22 and the third port 42 to supply and discharge air to the interior of the housing 80 through the second passage 21 and the third passage 41 that communicate with them, respectively.

[0023] The following description focuses on one of the three insertion holes 81. However, the components of the inner circumferential surface 81a that defines the insertion hole 81 do not depend on the selection of the insertion hole 81. Therefore, the same description applies to each insertion hole 81.

[0024] The housing 80 includes a first bearing 14. The first bearing 14 is held by a portion of an inner circumferential surface 81a that defines the insertion hole 81, the portion being formed by the first housing forming material 10. The housing 80 also includes a second bearing 31. The second bearing 31 is held by a portion of the inner circumferential surface 81a of the insertion hole 81 that is formed by the third housing forming material 30.

[0025] The housing 80 includes a scraper 13. The scraper 13 is provided on a portion of the inner circumferential surface 81a of the insertion hole 81 that is formed by the first housing forming material 10, and is disposed closer to the first end 82 than the first passage 11. The scraper 13 prevents foreign matter generated inside the housing 80 from being discharged to the outside when the suction part 90 reciprocates.

[0026] The housing 80 includes a first inner circumferential surface 20a, a second inner circumferential surface 20b, and a third inner circumferential surface 20c on the inner circumferential surface of the second housing-forming member 20, which form a locking mechanism 200 (described later). The first inner circumferential surface 20a is located on the first end 82 side of the second housing-forming member 20 in the axial direction Z. The second inner circumferential surface 20b is located on the second end 83 side of the first inner circumferential surface 20a in the axial direction Z, and has a larger inner diameter than the first inner circumferential surface 20a. The third inner circumferential surface 20c is located on the second housing-forming member 20 on the second end 83 side of the second inner circumferential surface 20b in the axial direction Z, and has a larger inner diameter than the second inner circumferential surface 20b.

[0027] The inner circumferential surface of the third housing forming member 30 is formed by a first inner circumferential surface 30a, a second inner circumferential surface 30b, and a third inner circumferential surface 30c. The first inner circumferential surface 30a is located on the first end portion 82 side of the inner circumferential surface of the third housing forming member 30. The first inner circumferential surface 30a contacts the outer circumferential surface of the second bearing 31. The second inner circumferential surface 30b is located closer to the second end portion 83 than the first inner circumferential surface 30a. The inner diameter of the second inner circumferential surface 30b is larger than the inner diameter of the second bearing 31 and smaller than the outer diameter of the second bearing 31. The third inner circumferential surface 30c is located closer to the second end portion 83 than the second inner circumferential surface 30b. The inner diameter of the third inner circumferential surface 30c is larger than the outer diameter of the second bearing 31.

[0028] The inner circumferential surface of the fourth housing-forming member 40 is formed by a first inner circumferential surface 40a and a second inner circumferential surface 40b. The first inner circumferential surface 40a is located closer to the first end 82 than the third passage 41, and the insertion hole 81 defined by the first inner circumferential surface 40a communicates with the third passage 41. The inner diameter of the first inner circumferential surface 40a is the same as the inner diameter of the third inner circumferential surface 30c of the third housing-forming member 30. The inner diameter of the second inner circumferential surface 40b is smaller than the inner diameter of the first inner circumferential surface 40a.

[0029] The housing 80 also includes a guide member 32. The axial direction of the guide member 32 coincides with the axial direction Z. The guide member 32 is located closer to the second end 83 than the second bearing 31. The outer peripheral surface of the guide member 32 contacts the third inner peripheral surface 30c of the third housing-forming member 30 and the first inner peripheral surface 40a of the fourth housing-forming member 40. The guide member 32 is fitted into the third housing-forming member 30 and the fourth housing-forming member 40. The guide member 32 has an inner diameter larger than the inner diameter of the second bearing 31. The guide member 32 communicates with the third passage 41.

[0030] The fourth housing forming member 40 includes a fourth lip packing 43. The fourth lip packing 43 allows air to flow from the second end 83 side toward the first end 82 side. The first gasket 71 seals between the first housing-forming member 10 and the second housing-forming member 20. The second gasket 72 seals between the third housing-forming member 30 and the fourth housing-forming member 40. The third gasket 73 seals between the fourth housing-forming member 40 and the fifth housing-forming member 50. The fourth gasket 74 seals between the fifth housing-forming member 50 and the sixth housing-forming member 60.

[0031] <Lock mechanism configuration> 2, a locking mechanism 200 is provided for each suction portion 90. Each locking mechanism 200 allows the reciprocating movement of the suction portion 90 to be restricted or released.

[0032] Each locking mechanism 200 includes a partition member 15 , a first piston 23 , a locking member 24 , a second piston 26 , a locking steel ball 28 , and a biasing member 29 . The partition member 15 is located closer to the second end 83 than the first bearing 14 and contacts the first bearing 14. The partition member 15 is cylindrical. The partition member 15 has an inner diameter larger than the inner diameter of the first bearing 14 and an outer diameter equal to the outer diameter of the first bearing 14. The partition member 15 also has an inner diameter larger than the outer diameter of the suction portion 90. As a result, the partition member 15 is spaced apart from the outer surface of the suction portion 90 and surrounds a portion of the axial direction of the suction portion 90. The axial direction of the partition member 15 coincides with the axial direction Z. A portion of the outer peripheral surface of the partition member 15 on the first end 82 side contacts a portion of the inner peripheral surface 81a that defines the insertion hole 81 and is formed by the first housing-forming material 10. Specifically, the partition member 15 is fitted into the first housing-forming material 10. As a result, the partition member 15 is held in the housing 80. The partition member 15 is inserted inside the second housing forming member 20. As a result, the partition member 15 determines the positioning of the axial centers of the first housing forming member 10 and the second housing forming member 20.

[0033] A portion of the outer peripheral surface of the partition member 15 that does not come into contact with the first housing-forming material 10 and the second housing-forming material 20 is called a non-retaining portion 15a. The axial length of this non-retaining portion 15a is shorter than the axial length of the second inner peripheral surface 20b of the second housing-forming material 20. Note that the axial length of the non-retaining portion 15a does not have to be shorter than the axial length of the second inner peripheral surface 20b of the second housing-forming material 20.

[0034] The first piston 23 serving as a piston is disposed between the inner surface of the housing 80 and the outer surface of the adsorption portion 90. Specifically, the first piston 23 is disposed inside the second inner circumferential surface 20b of the second housing forming member 20. The first piston 23 is capable of reciprocating in the axial direction of the adsorption portion 90 along the outer circumferential surface of the partition wall member 15. The axial direction of the first piston 23 coincides with the axial direction Z.

[0035] The first piston 23 has a first inner circumferential surface 23a, a second inner circumferential surface 23b, and an outer circumferential surface 23c. The first inner circumferential surface 23a is located on the first end 82 side of the inner circumferential surface of the first piston 23. The second inner circumferential surface 23b is located on the second end 83 side of the inner circumferential surface of the first piston 23. The axial length of the second inner circumferential surface 23b is determined so that the total axial length of the first piston 23 is shorter than the axial length of the second inner circumferential surface 20b of the second housing forming member 20.

[0036] The axial length of the first inner circumferential surface 23a is smaller than the axial length of the non-retaining portion 15a of the outer circumferential surface of the partition member 15. The first inner circumferential surface 23a faces the outer circumferential surface of the partition member 15 at the non-retaining portion 15a. The second inner circumferential surface 23b has an inner diameter smaller than the outer diameter of the partition member 15. The second inner circumferential surface 23b has an inner diameter smaller than the inner diameter of the first inner circumferential surface 23a. In other words, the first piston 23 is arranged so that the first inner circumferential surface 23a faces the non-retaining portion 15a of the outer circumferential surface of the partition member 15, and the second inner circumferential surface 23b is located closer to the second end 83 than the non-retaining portion 15a. The outer circumferential surface 23c faces the second inner circumferential surface 20b of the second housing-forming member 20.

[0037] The outer peripheral surface 23c of the first piston 23 has a surface that forms a first recessed portion 23d. The first inner peripheral surface 23a has a surface that faces the outer peripheral surface of the partition wall member 15 and forms a second recessed portion 23e.

[0038] The first piston 23 includes a first lip packing 231 and a second lip packing 232. The first lip packing 231 is attached to the first recessed portion 23d. The first lip packing 231 serves as a first seal that seals between the outer peripheral surface 23c of the first piston 23 and the second inner peripheral surface 23b of the second housing forming member 20, which serves as the inner surface of the housing 80, and allows air to flow from the second end 83 side toward the first end 82 side of the housing 80. The second lip packing 232 is attached to the second recessed portion 23e. The second lip packing 232 serves as a second seal that seals between the first inner peripheral surface 23a of the first piston 23 and the outer peripheral surface of the partition member 15, and allows air to flow from the second end 83 side toward the first end 82 side of the housing 80. The first lip packing 231 and the second lip packing 232 reciprocate together with the first piston 23.

[0039] The first piston 23, the second housing member 20, and the partition member 15 form a first piston chamber 25. The first piston chamber 25 is located closer to the first end 82 than the first piston 23 and communicates with the second passage 21. The first piston chamber 25 also communicates with a second port 22 via the second passage 21. Therefore, the second port 22 is a supply / discharge port that communicates with the first piston chamber 25. A gap 15b formed between the inner surface of the partition member 15 and the outer surface of the adsorption unit 90 communicates with the first passage 11 via the first bearing 14. The first port 12 also communicates with the first passage 11. Therefore, the adsorption-type transfer device 100 has the first passage 11 that communicates with the gap 15b formed between the inner surface of the partition member 15 and the outer surface of the adsorption unit 90, and the first port 12 that serves as a particle discharge port that communicates with the first passage 11. A gap 15b formed between the inner surface of the partition member 15 and the outer surface of the adsorption portion 90 and the first piston chamber 25 are separated by the second lip packing 232 and the partition member 15.

[0040] The locking member 24 is disposed inside the third inner circumferential surface 20c of the second housing forming member 20. Specifically, the locking member 24 is provided closer to the second end 83 in the axial direction than the first piston 23. The locking member 24 is supported by the second housing forming member 20. The axial direction of the locking member 24 coincides with the axial direction Z.

[0041] The outer peripheral surface 24d of the locking member 24 contacts the third inner peripheral surface 20c of the second housing forming member 20. The locking member 24 is fitted inside the second housing forming member 20. The inner peripheral surface of the locking member 24 is formed by a first inner peripheral surface 24a, a second inner peripheral surface 24b, and a third inner peripheral surface 24c. The first inner peripheral surface 24a is located on the first end 82 side of the inner peripheral surface of the locking member 24. The inner diameter of the first inner peripheral surface 24a is the smallest among the inner diameters of the locking member 24. The third inner peripheral surface 24c is located on the second end 83 side of the inner peripheral surface of the locking member 24. The inner diameter of the third inner peripheral surface 24c is the largest among the inner diameters of the locking member 24. The second inner peripheral surface 24b is located between the first inner peripheral surface 24a and the third inner peripheral surface 24c. The second inner circumferential surface 24b has a slope that connects the first inner circumferential surface 24a and the third inner circumferential surface 24c. That is, the second inner circumferential surface 24b has a shape in which the inner diameter increases from the first end 82 to the second end 83 in the axial direction Z of the housing 80. In other words, the locking member 24 has a sloped surface in which the inner diameter decreases from the second end 83 side to the first end 82 side in the axial direction Z of the housing 80. Furthermore, the inner circumferential surface of the locking member 24 is spaced apart from the outer surface of the suction portion 90 and surrounds the suction portion 90.

[0042] The second piston 26 as an interlocking member is disposed in the second housing forming member 20 closer to the second end 83 than the first piston 23, and disposed more inward than the locking member 24. The axial direction of the second piston 26 coincides with the axial direction Z.

[0043] The second piston 26 has an inner circumferential surface that defines an insertion hole 26a. The second piston 26 has an inner surface that defines four interlocking member holes 26d (two are shown in FIGS. 2 and 3) in the radial direction of the second piston 26. The interlocking member holes 26d extend in the radial direction of the second piston 26 and communicate with the insertion hole 26a. The interlocking member holes 26d open on the inner and outer surfaces of the second piston 26. The four interlocking member holes 26d are perpendicular to the axis of the second piston 26 and are provided to surround the insertion hole 26a. The four interlocking member holes 26d are preferably arranged so that interlocking member holes 26d that are not adjacent to each other in the circumferential direction of the second piston 26 face each other in the radial direction of the second piston 26. The interlocking member holes 26d are provided on the second end 83 side of the second piston 26. The inner diameter of the inner circumferential surface that defines the insertion hole 26a of the second piston 26 is the same as the inner diameter of the second inner circumferential surface 23b of the first piston 23. The second piston 26 is provided on the second end 83 side of the first piston 23, and such that the surface of the second piston 26 on the first end 82 side is in contact with the surface of the first piston 23 on the second end 83 side. The second piston 26 moves in conjunction with the first piston 23.

[0044] The second piston 26 is provided between the outer surface of the suction portion 90 and the first inner circumferential surface 24a of the locking member 24 so as to be able to slide against each circumferential surface. The second piston 26 is provided between the locking member 24 and the outer surface of the suction portion 90, closer to the second end 83 of the housing 80 in the axial direction Z than the first piston 23, and is also provided between the first piston 23 and the third housing-forming member 30 in the axial direction Z. The axial length of the second piston 26 is longer than the axial length of the first inner circumferential surface 24a of the locking member 24. The first inner circumferential surface 24a, the second inner circumferential surface 24b, and the third inner circumferential surface 24c of the locking member 24 define a locking insertion hole 27. The locking through-hole 27 communicates with the first passage 11 via a gap between the inner circumferential surface of the second piston 26 and the outer surface of the adsorption portion 90, a gap between the second inner circumferential surface 23b of the first piston 23 and the outer surface of the adsorption portion 90, a gap 15b between the inner circumferential surface of the partition member 15 and the outer surface of the adsorption portion 90, and the first bearing 14. The locking through-hole 27 also communicates with a return piston chamber 33 defined by the inner circumferential surface of the guide member 32 via the second bearing 31 and the second inner circumferential surface 30b of the third housing-forming member 30.

[0045] The biasing member 29 is made of a spring. A first end of the biasing member 29 is connected to the second piston 26, and a second end of the biasing member 29 is connected to the second bearing 31. The biasing member 29 biases the second piston 26 from the second end 83 side to the first end 82 side in the axial direction Z of the housing 80.

[0046] The four locking steel balls 28 serving as retaining members are steel balls having a diameter larger than the radial length of the interlocking member holes 26d of the second piston 26. Each locking steel ball 28 is retained in one of the four interlocking member holes 26d provided in the second piston 26. The four locking steel balls 28 are capable of reciprocating radially within the interlocking member holes 26d.

[0047] The four locking steel balls 28 are arranged inside the second inner circumferential surface 24b of the locking member 24. The locking steel ball 28 is capable of reciprocating in the axial direction Z together with the second piston 26. The second piston 26 is biased by the biasing member 29 from the second end 83 side toward the first end 82 side of the housing 80. Therefore, the locking steel ball 28 is also biased by the biasing member 29 from the second end 83 side toward the first end 82 side of the housing 80.

[0048] <Positional relationship between the suction part and the housing> 1, each suction portion 90 is inserted into each insertion hole 81. Each suction portion 90 is provided such that a first end 91 of the suction portion 90 is located on the first end 82 side of the housing 80, and a second end 92 of the suction portion 90 is located on the second end 83 side of the housing 80.

[0049] The first suction-portion-forming portion 94 of each suction portion 90 is inserted through the first bearing 14 and the second bearing 31. Each suction portion 90 is supported by the housing 80 so as to be reciprocatable by the first bearing 14 and the second bearing 31. The first suction-portion-forming portion 94 of each suction portion 90 is also inserted through the scraper 13, the partition member 15, the first piston 23, the locking member 24, and the second piston 26. A portion of each first suction-portion-forming portion 94 on the first end 91 side protrudes from the housing 80 and is equipped with an adapter 93. The end of the first suction-portion-forming portion 94 located on the second end 92 side is inserted through the insertion hole 32d of the guide member 32.

[0050] The return piston 95 provided in each suction portion 90 is housed inside the guide member 32. The outer peripheral surface of the return piston 95 faces the inner peripheral surface of the guide member 32. The return piston 95 is capable of reciprocating along the inner peripheral surface of the guide member 32.

[0051] The return piston 95 is housed in a return piston chamber 33 formed between the inner surfaces of the third housing-forming member 30 and the inner surfaces of the fourth housing-forming member 40 constituting the housing 80 and the outer surface of the adsorption portion 90. A first end 91 of the return piston chamber 33 communicates with a first passage 11 via the second bearing 31, the lock member 24, the partition member 15, and the first bearing 14. The first passage 11 communicates with a first port 12 serving as a particle discharge port. Therefore, the first port 12 communicates with the return piston chamber 33 via a gap 15b between the inner surface of the housing 80 and the adsorption portion 90 on one side of the return piston chamber 33 in the axial direction Z of the housing 80, a gap 15b between the second piston 26 and the first piston 23 and the outer surface of the adsorption portion 90, and the first passage 11. In addition, there is communication between the inner surface of the housing 80 and the adsorption portion 90 on one side of the housing 80 in the axial direction Z from the return piston chamber 33, and between the first piston 23 and the second piston 26 and the outer surface of the adsorption portion 90 via the second bearing 31.

[0052] The second end 92 side of the return piston chamber 33 is in communication with the third port 42 via the third passage 41. The third port 42 is a return port that is in communication with the return piston chamber 33.

[0053] The second suction portion forming portion 96 of each suction portion 90 is inserted through the fourth housing forming member 40, the fourth lip packing 43, the fifth housing forming member 50, and the sixth housing forming member 60. On the second end portion 92 side, the second suction portion forming portion 96 is reciprocatable in a portion of the insertion hole 81 of the housing 80 that is defined by the inner circumferential surfaces of the fifth housing forming member 50 and the sixth housing forming member 60.

[0054] In the through-hole bolt 97 provided in each suction portion 90, an insertion hole 97a defined by the inner circumferential surface of the through-hole bolt 97 communicates with the fourth passage 61. The insertion hole 97a defined by the inner circumferential surface of the through-hole bolt 97 forms a passage 90a defined by the inner circumferential surface 90b of each suction portion 90. As a result, the passage 90a defined by the inner circumferential surface 90b of each suction portion 90 communicates with the fourth passage 61.

[0055] <Operation and Function of Adsorption-Type Conveyance Device> The operation and function of the suction-type transfer device 100 will be described with reference to FIGS. As shown in FIG. 5, the suction-type conveying device 100 and the article A are in their initial positions.

[0056] The initial position is a position where the suction-type transfer device 100 is spaced upward along the axial direction Z from the article A. The article A faces the lower end surfaces of the adapters 93 of the three suction units 90. In the initial position, air is discharged from the locking insertion hole 27 and the return piston chamber 33 to the outside of the housing 80 via the first port 12 and the first passage 11 by driving a switching valve connected to a negative pressure source (not shown).

[0057] In the initial position, air is supplied to the first piston chamber 25 via the second port 22 and the second passage 21 by driving a switching valve connected to a pressure source (not shown). The first lip packing 231 and the second lip packing 232 prevent air from flowing from the first piston chamber 25 toward the second end 83, so the first piston chamber 25 is pressurized.

[0058] As shown in FIG. 2, pressurization of the first piston chamber 25 causes the first piston 23 and the second piston 26, which moves in conjunction with the first piston 23, to move in a direction from the first end 82 to the second end 83, and maintains this state. At this time, the second lip packing 232 of the first piston 23 slides on the outer peripheral surface of the partition wall member 15. Each locking steel ball 28 held by the second piston 26 is disposed in a hole defined by the second inner peripheral surface 24b and the third inner peripheral surface 24c of the locking member 24. In the initial position, each locking steel ball 28 is movable in the radial direction of the insertion hole 81 and is spaced apart from the suction portion 90 in the radial direction. In other words, each suction portion 90 is not restricted in its reciprocating movement along the axial direction Z relative to the housing 80.

[0059] In the initial position, air is supplied to the third passage 41 via the third port 42 by driving a switching valve connected to a pressure source (not shown). The third lip packing 951 blocks the flow of air from the return piston chamber 33 toward the first end 91. The return piston 95 is guided by the guide member 32 to move in the direction from the second end 83 toward the first end 82 in the axial direction Z of the housing 80.

[0060] In the initial position, the end of the return piston 95 on the first end 91 side coincides with the end of the guide member 32 on the first end 91 side in the axial direction. That is, in the initial position, the return piston 95 is located at a position on the inner circumferential surface of the guide member 32 that is farthest from the third passage 41. In the initial position, each suction portion 90 is movable relative to the housing 80 from the first end 82 toward the second end 83.

[0061] In the initial position, negative pressure is not supplied to or discharged from the fourth port 62. When the suction-type conveying device 100 suctions an article A, it starts operating from its initial position. At this time, air is discharged from the third port 42 by driving a switching valve connected to a pressure source (not shown). Then, due to the reduced pressure in the return piston chamber 33, the return piston 95 becomes able to move by the guide member 32 in the direction from the first end 82 to the second end 83 in the axial direction Z of the housing 80. This allows the suction part 90 to move relative to the housing 80. Note that a state in which a negative pressure is supplied to the first port 12 and air is supplied to the second port 22 is maintained.

[0062] The suction-type transfer device 100 is moved downward to bring the adapters 93 closer to the article A. As shown in FIG. 6 , when the surface of the article A has come into contact with all of the adapters 93, the suction-type transfer device 100 stops moving downward. As the suction-type transfer device 100 moves downward, the suction part 90 that has come into contact with the surface of the article A moves from the first end 82 toward the second end 83 of the housing 80. During this movement of the suction part 90, the suction part 90 moves while being separated from the inner circumferential surface of the partition member 15, so the second lip packing 232 of the first piston 23 on the outer circumferential side of the suction part 90 does not slide against the suction part 90.

[0063] When all the adapters 93 are in contact with the surface of the article A, the uneven shape formed in the width direction W by the three suction portions 90 follows the surface shape of the article A. With each suction part 90 in contact with the surface of the article A, a switching valve connected to a negative pressure source (not shown) is driven to discharge the negative pressure in the passage 90a of each suction part 90 to the outside of the housing 80 via the fourth port 62 and the fourth passage 61, thereby reducing the pressure in the passage 90a. Then, each suction part 90 suctions the article A to the first end 91.

[0064] When each suction portion 90 is holding article A by suction, a switching valve connected to a pressure source (not shown) is driven to discharge air from the first piston chamber 25 to the outside of the housing 80 via the second port 22 and the second passage 21. The third port 42 is open to the atmosphere. As a result, the first piston chamber 25 is depressurized, and the first piston 23 moves in a direction from the second end 83 toward the first end 82 due to the weight of the first piston 23, the weight of the second piston 26, and the biasing force of the biasing member 29. At this time, the second lip packing 232 of the first piston 23 slides against the outer peripheral surface of the partition member 15.

[0065] The second piston 26 moves in a direction from the second end 83 toward the first end 82 in order to move in conjunction with the first piston 23. As the second piston 26 moves, each locking steel ball 28 moves in a direction from the second end 83 toward the first end 82 along the inner circumferential surface of the locking member 24. When each locking steel ball 28 moves along the second inner circumferential surface 24b of the locking member 24, each locking steel ball 28 moves inside the interlocking member hole 26d in the radial direction of the second piston 26 and in a direction approaching the corresponding suction portion 90. In the process of moving the second piston 26, the locking steel ball 28 comes into sliding contact with the outer surface of the corresponding suction portion 90 and the second inner circumferential surface 24b of the locking member 24.

[0066] As shown in FIG. 3, each locking steel ball 28 is sandwiched between the outer surface of the corresponding suction portion 90 and the second inner circumferential surface 24b of the locking member 24. This limits the reciprocating movement of each suction portion 90 relative to the housing 80. In other words, the suction portion 90 is locked. As a result, the suction-type conveying device 100 can hold the article A via each suction portion 90. Therefore, the locking steel ball 28 is a holding member that limits the reciprocating movement of the suction portion 90 by being sandwiched between the second inner circumferential surface 24b, which serves as an inclined surface, and the outer surface of the suction portion 90.

[0067] When each suction portion 90 holds the article A, the second port 22 is open to the atmosphere, and therefore the first piston 23 does not release the lock. When the adapter 93 is in contact with the surface of the item A, the operation of the suction-type conveying device 100 holding the item A through each suction section 90 may be performed before the operation of the suction-type conveying device 100 adsorbing the item A to each suction section 90.

[0068] The suction-type conveying device 100 holds the article A and conveys the article A from an initial position to a different location, for example, by an arm (not shown) or the like attached to the outside of the second end 83 of the housing 80.

[0069] When releasing the suction of the item A, the suction-type conveying device 100 can release the suction of the item A by releasing the negative pressure from the passage 90a of each suction section 90 to the atmosphere via the fourth port 62 and the fourth passage 61.

[0070] After the suction of the article A is released, the suction unit 90 is unlocked. The suction-type conveying device 100 pressurizes the first piston chamber 25 by supplying air to the first piston chamber 25 via the second port 22 and the second passage 21. The first piston 23 then moves from the first end 82 toward the second end 83 against the biasing force of the biasing member 29. At this time, the second lip packing 232 of the first piston 23 slides against the outer circumferential surface of the partition member 15. The second piston 26 moves in conjunction with the first piston 23 in the direction from the first end 82 toward the second end 83. The locking steel balls 28 move together with the second piston 26 in the direction from the first end 82 toward the second end 83. As the second piston 26 moves, the locking steel balls 28 move toward the inside of the first inner circumferential surface 24a or the second inner circumferential surface 24b. Each locking steel ball 28 becomes reciprocable in the radial direction of the second piston 26. Each locking steel ball 28 moves away from the outer surface of the corresponding suction portion 90 at a position where it can reciprocate in the radial direction of the second piston 26. This allows each suction portion 90 to reciprocate in the axial direction Z relative to the housing 80. In other words, the locking of the suction portion 90 by the locking mechanism 200 is released.

[0071] When the adapter 93 is in contact with the surface of the article A, the operation of the suction-type conveying device 100 to enable each suction portion 90 to move back and forth relative to the housing 80 may be performed before the operation of the suction-type conveying device 100 to release the suction of the article A from each suction portion 90.

[0072] When the suction-type transfer device 100 moves away from the article A in the axial direction Z, the suction-type transfer device 100 supplies air from the third port 42 through the third passage 41 to the insertion hole 32d defined by the inner circumferential surface of the guide member 32 by driving a switching valve connected to a pressure source (not shown). The air supplied from the third port 42 moves the return piston 95 in a direction from the second end 83 toward the first end 82. As a result, the suction-type transfer device 100 eliminates the uneven shape of each suction portion 90 in the width direction W relative to the housing 80 that occurred in the process of making the suction portions 90 conform to the surface shape of the article A, and returns each suction portion 90 to its initial position.

[0073] According to the above embodiment, the following effects can be obtained. (1) The first piston 23, locking member 24, and second piston 26 that form the locking mechanism 200 in the suction-type conveying device 100 are arranged in the axial direction of each suction part 90 that adsorbs and holds the article A, and thus in the axial direction Z of the housing 80. The locking mechanism 200 restricts the reciprocating movement of the suction part 90 by movement of each part in the axial direction Z. For example, compared to restricting the reciprocating movement of the suction part 90 by movement in the radial direction relative to each suction part 90, the locking mechanism 200 can be made smaller, which allows the suction-type conveying device 100 to be made smaller.

[0074] (2) The locking mechanism 200 moves the first piston 23 from the first end 82 side to the second end 83 side to release the restriction on the reciprocating movement of each suction part 90. The locking mechanism 200 includes a partition member 15 and has the first piston 23 located outside the partition member 15 and away from each suction part 90. Because the first piston 23 is located outside the partition member 15 and away from each suction part 90, the locking mechanism 200 does not apply sliding resistance caused by the reciprocating movement of the first piston 23 to the article A via the suction part 90. Therefore, the suction-type conveying device 100 does not apply force to the article A when restricting and releasing the restriction on the reciprocating movement of each suction part 90. The suction-type conveying device 100 also includes the first piston 23 and the second piston 26 located away from each suction part 90. Therefore, the suction-type transfer device 100 reduces the generation of particles on the outer surface of each suction part 90 when restricting the reciprocating movement of each suction part 90 and when releasing the restriction.

[0075] (3) The locking mechanism 200 restricts the reciprocating movement of the suction portions 90 that have adsorbed the article A using the second inner circumferential surface 24b of the locking member 24 and the four locking steel balls 28. Therefore, the load of the article A moves each of the four locking steel balls 28, via each suction portion 90, along the second inner circumferential surface 24b of the locking member 24 in a direction that reduces the inner diameter. As a result, the four locking steel balls 28 corresponding to each suction portion 90 can restrict the reciprocating movement of each suction portion 90 with a force corresponding to the load of the article A.

[0076] (4) Each locking steel ball 28 is urged from the second end 83 toward the first end 82 by the urging member 29 via the second piston 26. Even if the axial direction of each suction portion 90 does not coincide with the direction of gravity, as long as the first piston chamber 25 is not pressurized, each locking steel ball 28 can move in the direction of the smaller inner diameter of the second inner circumferential surface 24b of the locking member 24. Therefore, the suction-type conveying device 100 can restrict the reciprocating movement of each suction portion 90 that has adsorbed the article A, even if the axial direction of each suction portion 90 does not coincide with the direction of gravity.

[0077] (5) The locking mechanism 200 uses four locking steel balls 28 to restrict the reciprocating movement of each suction portion 90. When restricting the reciprocating movement of each suction portion 90, the area of ​​sliding contact with each suction portion 90 is limited to the surface where the spherical surface of each locking steel ball 28 contacts the outer surface of each suction portion 90. As a result, the area of ​​sliding contact between each suction portion 90 and the corresponding locking mechanism 200 is reduced.

[0078] (6) In the locking insertion hole 27, each suction portion 90 and the locking steel ball 28 are in sliding contact. The inner peripheral surface of the guide member 32 and the outer peripheral surface of the return piston 95 are in sliding contact. The suction portion 90 is in sliding contact with the second bearing 31. Additionally, the second piston 26 is in sliding contact with the locking member 24. The return piston chamber 33 and the first port 12 are in communication with each other via the gap between the second inner peripheral surface 30b of the third housing-forming member 30 and the outer surface of the suction portion 90, the locking insertion hole 27, the gap 15b, and the first passage 11. Therefore, particles generated by this sliding contact can be discharged to the outside of the housing 80 via the first passage 11 and the first port 12. Therefore, particles generated in the gap between the third lip packing 951 and the outer surface of the suction portion 90 can be removed before they reach the article A.

[0079] (7) The gap 15b between the inner diameter side of the partition member 15 and the suction portion 90 is configured as a discharge path, and the gap 15b is connected to the first passage 11 and the first port 12. The gap 15b is also connected to the locking insertion hole 27 via the gap between the inner surface of the second piston 26 and the outer surface of the suction portion 90 and the gap between the inner surface of the first piston 23 and the outer surface of the suction portion 90. By using the gap 15b between the inner diameter side of the partition member 15 and the suction portion 90 as a discharge path, it is possible to prevent the suction-type transfer device 100 from becoming larger, which would be caused by providing a separate discharge path.

[0080] (8) The partition member 15 determines the positioning of the axial centers of the first housing forming member 10 and the second housing forming member 20. By using the partition member 15 for multiple purposes, the number of structural parts of the suction-type conveying device 100 can be reduced and the size of the suction-type conveying device 100 can be prevented from increasing.

[0081] (9) The suction units 90 that have moved relative to the housing 80 to conform to the shape of the article A are returned to their initial positions together with the return pistons 95 provided in each suction unit 90 by air supplied from the third port 42. At this time, the return pistons 95 are guided by the guide member 32 to move in the axial direction Z. Therefore, even if the axial direction of each suction unit 90 does not coincide with the direction of gravity, each suction unit 90 can be returned to its initial position by the air supplied from the third port 42 and the return pistons 95. Therefore, even if the axial direction of each suction unit 90 does not coincide with the direction of gravity, the suction-type conveying device 100 can return each suction unit 90 to its initial position.

[0082] This embodiment can be modified as follows: This embodiment and the following modifications can be combined and implemented within the scope of technical compatibility. In this embodiment, each suction portion 90 does not necessarily have to include an adapter 93.

[0083] In the embodiment, the suction portion 90 does not have to be formed by the first suction portion forming portion 94, the return piston 95, and the second suction portion forming portion 96. For example, the suction portion 90 may be formed by processing a single piece of metal material.

[0084] The guide member 32 may be omitted. In this case, the return piston 95 slides against the inner circumferential surface of the housing 80. The first port 12 may be omitted.

[0085] The second piston 26 may be omitted. In this case, the first piston 23 is provided integrally with a pressing portion that presses the locking steel ball 28 instead of the second piston 26. In this embodiment, the scraper 13 provided in the housing 80 does not need to be used.

[0086] In an embodiment, the locking member 24 may not have the first inner circumferential surface 24a, the second inner circumferential surface 24b, and the third inner circumferential surface 24c, but may have a single inner circumferential surface whose inner diameter monotonically decreases in the direction from the second end 83 to the first end 82.

[0087] In the embodiment, instead of providing an inclined surface by the locking member 24, an inclined surface having the same shape as the inner peripheral surface of the locking member 24 may be provided on the third inner peripheral surface 20c of the second housing forming member 20.

[0088] In an embodiment, the biasing member 29 may be an elastic material other than a spring that biases the second piston 26 in a direction from the second end 83 toward the first end 82. In the embodiment, the inner diameter of the inner circumferential surface defining the interlocking member hole 26d may increase in the radial direction.

[0089] The technical ideas that can be understood from the above-described embodiment and modified examples will be described. (i) An adsorption-type conveying device characterized by having a return piston that can reciprocate integrally with the adsorption portion and is provided on the other side of the interlocking member in the axial direction, a return piston chamber that is formed between the inner surface of the housing and the outer surface of the adsorption portion and that accommodates the return piston, and a return port that communicates with the return piston chamber.

[0090] (ii) The suction-type conveying device described in (i), characterized in that the particle discharge port is in communication with the return piston chamber through the gap between the inner surface of the housing and the suction portion on one axial side of the housing relative to the return piston chamber, the gap between the first piston and the second piston and the outer surface of the suction portion, and the passage.

[0091] (c) The suction-type conveying device described in (b) is characterized in that the suction portion is supported on the housing via a bearing on one side of the axial direction of the housing relative to the return piston and on the other side of the axial direction of the housing relative to the second piston, and the inner surface of the housing on one side of the axial direction of the housing relative to the return piston chamber and the suction portion are connected via the bearing, and the first piston, the second piston and the outer surface of the suction portion are connected via the bearing. [Explanation of symbols]

[0092] 11...first passage as a passage, 12...first port as a particle discharge port, 15...partition member, 15b...gap, 10-60...first to sixth housing forming members, 22...second port as a supply / discharge port, 23...first piston as a piston, 24...locking member, 24b...second inner circumferential surface 24b as an inclined surface, 25...first piston chamber as a piston chamber, 26...second piston as an interlocking member, 26d...interlocking member hole, 28...locking steel ball as a retaining member, 29...urging member, 80...housing, 90...suction portion, 100...suction-type conveying device, 200...locking mechanism, 231...first lip packing as a first seal, 232...second lip packing as a second seal.

Claims

1. a rod-shaped suction portion capable of suctioning an article at an end in an axial direction; a housing that supports the suction portion so that the suction portion can move back and forth, and from which an end of the suction portion protrudes in an axial direction; a locking mechanism that allows restriction and release of the reciprocating movement of the suction part, The locking mechanism is a partition member that is spaced apart from an outer surface of the suction portion and surrounds the suction portion, and that is held by the housing; a piston disposed between the inner surface of the housing and the outer surface of the adsorption portion, the piston being reciprocable in the axial direction of the housing along the outer surface of the partition member; a first seal that seals between an outer surface of the piston and an inner surface of the housing and allows air to flow from the other side to the one side in the axial direction of the housing; a second seal that seals between the inner surface of the piston and the outer surface of the partition member and allows air to flow from the other side to the one side in the axial direction of the housing; a piston chamber formed by the partition member, the housing, and the piston; a supply / discharge port communicating with the piston chamber; a locking member that is provided on the other side of the housing in the axial direction relative to the piston, that surrounds the suction portion while being spaced apart from an outer surface of the suction portion, and that has an inclined surface whose inner diameter decreases from the other side toward the one side in the axial direction of the housing; a holding member that is reciprocatable between the inclined surface and the outer surface of the suction portion, and that moves in a direction in which the inner diameter of the inclined surface decreases to be sandwiched between the inclined surface and the outer surface of the suction portion, thereby limiting the reciprocating movement of the suction portion; a biasing member that biases the holding member from the other side to one side in the axial direction of the housing; an interlocking member that is provided on the other axial side of the housing relative to the piston, between the locking member and the outer surface of the suction portion, and between the piston and the holding member in the axial direction of the housing, and that moves the holding member to the other axial side of the housing against the biasing force of the biasing member in conjunction with movement of the piston to the other axial side of the housing due to supply of air to the piston chamber via the supply / discharge port; An adsorption type transport device comprising:

2. 2. The suction-type conveying device according to claim 1, wherein the piston is a first piston, and a second piston is provided between the locking member and the outer surface of the suction portion and positioned between the first piston and the holding member in the axial direction of the housing, and the interlocking member is the second piston.

3. 3. The suction-type transport device according to claim 1, further comprising a passage communicating with a gap formed between the inner surface of the partition member and the outer surface of the suction portion, and a particle discharge port communicating with the passage.

4. 4. The suction-type conveying device according to claim 3, wherein the interlocking member has an interlocking member hole that opens on the inner and outer surfaces of the interlocking member, the interlocking member hole accommodates the holding member so as to be able to move back and forth radially of the interlocking member, and the particle discharge port is connected to the interlocking member hole through the gap between the inner surface of the interlocking member and the outer surface of the suction portion, the gap between the inner surface of the piston and the outer surface of the suction portion, and the passage.

5. 3. The suction-type conveying device according to claim 1, wherein the housing is formed by integrating a plurality of housing forming members, and the partition member is inserted through two of the housing forming members.

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