Inspection Equipment

Abstract

To improve positioning accuracy of an end effector.SOLUTION: An inspection device has a lower arm part having a Roberval mechanism maintaining an angle of an arm tip to an angular variation of an arm, a joint part rotatably installed in the lower arm tip part around the first axis of the lower arm tip part being the arm tip of the lower arm part, an upper arm part rotatably installed in the joint part around the second axis different in the direction from the first axis of the joint part, an angle adjustment part changing a rotation angle of the joint part around the first axis to the lower arm tip part in response to the rotation angle of the upper arm part around the second axis to the joint part, a noncontact acoustic sensor supported via the upper arm part, and a sound recording part recording a sound.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an inspection device for maintenance of structures such as buildings and bridges, and plants. [Background technology]

[0002] Buildings, bridges, and other social infrastructure structures have traditionally been inspected using hammering to check for age-related deterioration. The Acoustic Emission (AE) method is a non-destructive inspection technique that detects the emission of elastic waves (AE) associated with crack propagation / crack initiation, and can detect the early stages of internal deterioration in concrete and other structures (see, for example, Patent Document 1). A method has also been proposed in which measuring instruments are levitated using the lift of a multicopter (see, for example, Patent Document 2). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-096113 [Patent Document 2] Japanese Patent Publication No. 2020-153844 Summary of the Invention [Problem to be solved by the invention]

[0004] The AE method traditionally uses contact sensors, but new methods using non-contact sensors are also available. When using the AE method with non-contact sensors, the position of the AE sensor must be held stable for a certain period of time. The position of the AE sensor can also be held by a robot device equipped with a non-contact sensor as an end effector. However, conventional techniques have had the problem of low positioning accuracy of end effectors (for example, non-contact sensors).

[0005] The present invention has been made to solve the above problems, and an object of the present invention is to provide an inspection apparatus that can improve the positioning accuracy of an end effector. [Means for solving the problem]

[0006] One embodiment of the present invention is an inspection device comprising: a lower arm portion having a Roberval mechanism that maintains the angle of the arm tip despite changes in the angle of the arm; a joint portion attached to the lower arm arm tip at the end of the lower arm so as to be rotatable about a first axis of the lower arm arm tip, which is the arm tip of the lower arm; an upper arm portion attached to the joint portion so as to be rotatable about a second axis that differs in direction from the first axis of the joint portion; an angle adjustment portion that changes the rotation angle of the joint portion about the first axis relative to the lower arm arm tip, in accordance with the rotation angle of the upper arm about the second axis relative to the joint portion; a non-contact acoustic sensor supported via the upper arm portion; and a sound pickup portion that picks up sound.

[0007] Moreover, in one embodiment of the present invention, in the above-mentioned inspection device, the angle adjustment unit includes a cam that rotates together with the upper arm around the second axis, and a cam follower that is positioned at the tip of the lower arm opposite the cam, and the rotation angle of the joint unit around the first axis relative to the tip of the lower arm is changed by the force that the cam receives from the cam follower.

[0008] Furthermore, in one embodiment of the present invention, in the above-mentioned inspection device, the cam is made detachable from the upper arm portion, or the cam follower is made detachable from the lower arm tip portion, so that at least one of the cam and the cam follower is replaceable.

[0009] Moreover, one embodiment of the present invention is the above-mentioned inspection device, further comprising: a detection unit that detects a rotation angle of the upper arm about the second axis; a drive unit that rotationally drives the joint about the first axis; and a control unit that controls the rotational drive amount of the drive unit based on control information that indicates a correspondence between the rotation angle and the rotation amount of the joint, which is stored in advance, and the rotation angle detected by the detection unit.

[0010] Moreover, one embodiment of the present invention is the above-mentioned inspection device, further comprising: a storage unit that stores the control information; and a rewrite control unit that rewrites the control information stored in the storage unit.

[0011] Moreover, according to one embodiment of the present invention, the inspection device further includes a thrust generating unit attached to the upper arm portion, which displaces the upper arm portion by a reaction force of the generated airflow.

[0012] Moreover, one embodiment of the present invention is the above-mentioned inspection device, wherein the thrust generating unit includes a first thrust generating unit that generates an airflow in a first direction, a second thrust generating unit that generates an airflow in a second direction, and a third thrust generating unit that generates an airflow in a third direction, among three mutually different directions.

[0013] Moreover, one embodiment of the present invention is the above-mentioned inspection device, wherein the thrust generating unit includes a fourth thrust generating unit that generates an airflow in the direction of gravity, a fifth thrust generating unit that generates an airflow in a direction different from the direction of gravity, and a direction changing unit that changes the direction in which the fifth thrust generating unit generates the airflow.

[0014] Moreover, one embodiment of the present invention is the above-described inspection device, wherein the upper arm portion is equipped with a Roberval mechanism that maintains the angle of the arm tip in response to changes in the angle of the arm, and further comprises: an extension arm that has a first end to which an end effector is attached and a second end to which a counterweight is attached, and that is attached at an attachment position between the first end and the second end so that its posture can be changed relative to the upper arm arm tip portion that is the arm tip of the upper arm; an extension arm drive unit that changes the angle between the first extension arm and the second extension arm that make up the extension arm; and a balance adjustment unit that changes the position of the counterweight relative to the attachment position in response to changes in the angle of both the first extension arm and the second extension arm. [Effects of the Invention]

[0015] According to the present invention, it is possible to provide an inspection device with improved positioning accuracy of the end effector. [Brief explanation of the drawings]

[0016] [Figure 1] FIG. 1 is a diagram showing an example of the appearance of an inspection apparatus according to an embodiment of the present invention. [Figure 2] FIG. 2 is a diagram showing an example of the configuration of an arm of the inspection device of the present embodiment. [Figure 3] FIG. 2 is a diagram illustrating an example of the configuration of a joint portion according to the present embodiment. [Figure 4] 10A and 10B are diagrams illustrating an example of a change in posture of a joint according to the present embodiment. [Figure 5] 10A and 10B are diagrams illustrating modified examples of the angle adjustment unit of the present embodiment. [Figure 6] FIG. 2 is a perspective view showing an example of the configuration of an extension arm of the present embodiment. [Figure 7] FIG. 2 is a plan view showing an example of the configuration of an extension arm of the present embodiment. [Figure 8] FIG. 2 is a diagram illustrating an example of the configuration of a balance adjustment unit according to the present embodiment. [Figure 9] 10A and 10B are diagrams illustrating a modified example of the balance adjustment unit of the present embodiment. [Figure 10] FIG. 2 is a diagram illustrating an example of the configuration of a thrust generating unit according to the present embodiment. [Figure 11] 10A and 10B are diagrams illustrating a modified example of the thrust generating unit of the present embodiment. [Figure 12] FIG. 2 is a diagram illustrating an example of a functional configuration of a control device according to the present embodiment. [Figure 13] FIG. 10 is a diagram illustrating an example of the operation of the noise removal unit of the present embodiment. [Figure 14] 10A and 10B are diagrams illustrating an example of noise removal by the noise removal unit of the present embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0017] [Configuration of inspection device 1] The configuration of the inspection device 1 will be described with reference to the drawings. 1 is a diagram showing an example of the appearance of an inspection device 1 of this embodiment. The inspection device 1 includes a base unit 100, a lower arm unit 110, an upper arm unit 120, an extension arm 145, a non-contact acoustic sensor 150, a sound collection unit 160, a joint unit 200, a thrust generation unit 300, a balance adjustment unit 400, and a control device 500. The lower arm 110 and the upper arm 120 are collectively referred to as an arm. The non-contact acoustic sensor 150 and the sound collection unit 160 are collectively referred to as an end effector.

[0018] In the following description, directions and the like are indicated using an xyz three-dimensional Cartesian coordinate system where necessary. The surface on which the base 100 is placed is defined as the plane formed by the x-axis and y-axis, i.e., the xy plane. The z-axis is the axis in the direction of gravity, i.e., the vertical axis.

[0019] [Arm configuration] 2A and 2B are diagrams showing an example of the configuration of an arm of the inspection device 1 of this embodiment. FIG. 2A shows an example of the arm as viewed from the y-axis direction. FIG. 2B shows an example of the arm as viewed from the x-axis direction. FIG. 2C shows an example of the arm as viewed from the z-axis direction. As described above, the arm includes the lower arm 110 and the upper arm 120. The lower end of the lower arm 110 is connected to the base 100, and the upper end is connected to one end of the upper arm 120 by the joint 200. The upper end of the lower arm 110 is also referred to as the lower arm arm tip 115. The upper end of the upper arm 120 can have an extension arm 145 connected to it. The upper end of the upper arm 120 is also referred to as the upper arm arm tip 126.

[0020] The lower arm 110 is equipped with a Roberval mechanism that maintains the angle of the arm tip even when the angle of the arm changes. In this embodiment, a parallel link is described as an example of the Roberval mechanism, but this is not limiting. For example, the lower arm 110 may be configured to have a pair of pulleys (not shown) at the lower and upper ends, and to maintain the angle of the arm tip even when the angle of the arm changes using a balancing mechanism using a belt or wire stretched between the pulleys.

[0021] The upper arm 120 may also be provided with a Roberval mechanism that maintains the angle of the arm tip in response to changes in the angle of the arm.

[0022] As shown in FIG. 2(C), in the inspection device 1, the upper arm portion 120 rotates around the z-axis relative to the lower arm portion 110 at the joint portion 200. When the upper arm portion 120 rotates around the z-axis relative to the lower arm portion 110, a torsional moment is generated in the lower arm portion 110 due to gravity acting on the upper arm portion 120. Here, the angle around the z-axis formed by the lower arm portion 110 and the upper arm portion 120 is expressed as 0° when the axial direction of the upper arm portion 120 and the axial direction of the lower arm portion 110 are the same (i.e., when viewed in the xy plane, the lower arm portion 110 and the upper arm portion 120 are in a straight line). In this case, the torsional moment generated in the lower arm portion 110 is smallest when the angle is 0°, and largest when the angle is 90° or −90°. In this way, when the upper arm 120 rotates around the z-axis, a torsional moment corresponding to the rotation angle of the upper arm 120 is generated in the lower arm 110. As a result of the twisting of the lower arm 110, the position of the upper arm 120 in the z-axis direction (i.e., the height of the upper arm 120) is lowered compared to when the lower arm 110 is not twisted. When the height of the upper arm 120 is lowered, the height of the end effector also decreases. This means that the height of the end effector changes due to a change in the posture of the upper arm 120. When attempting to position the end effector with high precision, it is undesirable for the height of the end effector to change due to a change in the posture of the upper arm 120.

[0023] To maintain the height of the upper arm 120 regardless of the rotation angle of the upper arm 120 and accurately position the end effector, it would be possible to, for example, extremely increase the rigidity of the lower arm 110, but this is not realistic. Also, it would be possible to detect the amount of lowering of the height of the upper arm 120 and use computer control to raise the lower arm 110 or the upper arm 120 by the amount of lowering, but this would make the control complex.

[0024] Therefore, the inspection device 1 of this embodiment maintains the height of the upper arm 120 regardless of the rotation angle of the upper arm 120 around the z-axis by using a joint unit 200 equipped with a mechanism that intentionally changes the angle of the upper arm 120 relative to the lower arm 110 depending on the rotation angle of the upper arm 120 around the z-axis. The configuration of this joint portion 200 will be described with reference to FIG.

[0025] [Configuration of joint portion 200] 3 is a diagram showing an example of the configuration of the joint unit 200 of this embodiment. The joint unit 200 is attached to the lower arm arm tip 115 and transmits the load of the upper arm unit 120 to the lower arm unit 110. The joint unit 200 is rotatable around a first axis AX1 of the lower arm arm tip 115. The upper arm unit 120 has an upper arm yaw axis 122 and is rotatable around the upper arm yaw axis 122. The upper arm yaw axis 122 coincides with a second axis AX2 of the joint unit 200. In other words, the upper arm unit 120 is rotatable around the second axis AX2. The first axis AX1 and the second axis AX2 will now be described.

[0026] The coordinates of the lower arm arm tip 115 are shown by a three-dimensional Cartesian coordinate system with the xj1-axis, yj1-axis, and zj1-axis. This three-dimensional Cartesian coordinate system with the xj1-axis, yj1-axis, and zj1-axis is also called the lower arm arm tip coordinate system. The coordinates of the joint 200 are shown by a three-dimensional orthogonal coordinate system with the xj2, yj2, and zj2 axes. This three-dimensional orthogonal coordinate system with the xj2, yj2, and zj2 axes is also called the joint coordinate system. Note that the figure shows the underside of the joint 200 as viewed from below (the negative side of the zj1 axis and the negative side of the zj2 axis). That is, the figure shows the plane (xj1-yj1 plane) formed by the xj1 axis and yj1 axis of the lower arm arm-tip coordinate system and the plane (xj2-yj2 plane) formed by the xj2 axis and yj2 axis of the joint coordinate system as viewed from the negative side of the zj1 axis and the negative side of the zj2 axis. In this example, the first axis AX1 coincides with the yj1 axis of the lower arm arm tip coordinate system, and the second axis AX2 coincides with the zj2 axis of the joint coordinate system. In a reference position where the joint 200 is not rotated around the first axis AX1, the direction of each axis in the lower arm arm tip coordinate system coincides with the direction of each axis in the joint coordinate system.

[0027] That is, the joint portion 200 is attached to the lower arm arm tip 115, which is the tip of the lower arm portion 110, so as to be rotatable around a first axis AX1 of the lower arm arm tip 115. The upper arm 120 is attached to the joint 200 so as to be rotatable about a second axis AX2 that is oriented in a different direction from the first axis AX1 of the joint 200.

[0028] The angle adjustment unit 210 changes the rotation angle of the joint unit 200 about the first axis AX1 relative to the lower arm tip 115, depending on the rotation angle of the upper arm 120 about the second axis AX2 relative to the joint unit 200. This angle adjustment unit 210 includes a driven-type angle adjustment unit that rotates the joint unit 200 around the first axis AX1 without using a driving force such as a motor, and a driven-type angle adjustment unit that rotates the joint unit 200 around the first axis AX1 using a driving force such as a motor.

[0029] [Following angle adjustment unit] The driven angle adjustment unit 210 includes a cam 121 and a cam follower 116. The cam 121 is attached to the upper arm yaw axis 122, and rotates together with the upper arm 120 around the second axis AX2. The cam follower 116 is disposed at a position of the lower arm tip 115 that faces the cam 121. The cam 121 and the cam follower 116 are in contact with each other at the cam follower surface. When the upper arm 120 rotates about the second axis AX2, the upper arm yaw axis 122 rotates, causing the cam 121 to rotate about the second axis AX2. The cam 121 is eccentric with respect to the upper arm yaw axis 122. When the cam 121 rotates about the second axis AX2, a force is generated that rotates the joint 200 about the first axis AX1, depending on the rotation angle of the cam 121 and the profile of the cam follower surface of the cam follower 116. In other words, the force that the cam 121 receives from the cam follower 116 changes the rotation angle of the joint 200 about the first axis AX1 relative to the lower arm tip 115.

[0030] FIG. 4 is a diagram showing an example of a change in posture of the joint portion 200 of this embodiment. Fig. 4(A) shows a state in which the upper arm 120 is not rotating. In the state shown in Fig. 4(A), the joint 200 is in a reference position and is not rotating around the first axis AX1 (i.e., around the yj1 axis), and the directions of the axes in the lower arm arm-tip coordinate system and the directions of the axes in the joint coordinate system are the same. When the upper arm 120 is not rotating relative to the lower arm 110, no torsional moment is generated in the lower arm 110.

[0031] FIG. 4B shows a state in which the upper arm 120 has rotated approximately 45° around the second axis AX2. In the state shown in FIG. 4B, a torsional moment is generated in the lower arm 110. This torsional moment causes the lower arm tip 115 to rotate clockwise about the yj1 axis compared to the state shown in FIG. 4A. On the other hand, when the upper arm 120 rotates approximately 45° around the second axis AX2 relative to the lower arm 110, the action of the cam 121 and the cam follower 116 causes the joint 200 to rotate counterclockwise about the yj1 axis. In other words, the joint 200 rotates in the opposite direction to the rotational displacement of the lower arm tip 115 due to the torsional moment. As a result, the rotational displacement of the lower arm tip 115 is cancelled out by the rotational displacement of the joint 200 in the opposite direction, and the change in position of the upper arm 120 caused by the torsional moment of the lower arm 110 is reduced.

[0032] FIG. 4C shows a state in which the upper arm 120 has rotated approximately 90° around the second axis AX2. In the state shown in FIG. 4C, a larger torsional moment is generated in the lower arm 110 than in the state shown in FIG. 4B. This torsional moment causes the lower arm tip 115 to undergo further rotational displacement in the clockwise direction about the yj1 axis compared to the state shown in FIG. 4B. In this case, the action of the cam 121 and the cam follower 116 causes the joint 200 to rotate counterclockwise about the yj1 axis. The amount of counterclockwise rotation of the joint 200 is greater than in the state shown in FIG. 4B. In other words, in response to the larger rotational displacement of the lower arm tip 115 due to the torsional moment, the joint 200 undergoes a larger rotational displacement in the opposite direction. As a result, the rotational displacement of the lower arm tip 115 is cancelled out by the rotational displacement of the joint 200 in the opposite direction, and the change in position of the upper arm 120 caused by the torsional moment of the lower arm 110 is reduced.

[0033] It is preferable that cam 121 be detachable from upper arm portion 120, or cam follower 116 be detachable from lower arm tip portion 115, so that at least one of cam 121 and cam follower 116 is replaceable. With the joint section 200 configured in this manner, when the mass of the upper arm section 120 changes due to, for example, replacement of the end effector, the change in the amount of torsional moment generated in the lower arm section 110 can be absorbed by changing the profiles of the cam 121 and the cam follower 116. In other words, with the joint section 200 configured in this manner, the positioning accuracy of the end effector can be further improved.

[0034] [Drive-type angle adjustment unit] The angle adjustment unit 210 may include a rotation angle sensor 123 and a drive unit 124 (neither of which are shown). The rotation angle sensor 123 is, for example, a rotary encoder, and detects the rotation angle of the upper arm 120 around the second axis AX2. The drive unit 124 is, for example, an electric motor, and drives the joint unit 200 to rotate around the first axis AX1.

[0035] The rotation angle sensor 123 and the drive unit 124 are connected to a control device 500, which will be described later. The control device 500 calculates the drive amount of the drive unit 124 based on the rotation angle of the upper arm 120 about the second axis AX2 detected by the rotation angle sensor 123, and drives the joint 200 to rotate about the first axis AX1. With the angle adjustment unit 210 configured in this manner, the rotational displacement of the lower arm tip 115 can be canceled out by the rotational displacement of the joint unit 200 in the opposite direction, thereby reducing the positional change of the upper arm 120 caused by the torsional moment of the lower arm 110.

[0036] [Modification of angle adjustment unit 210] FIG. 5 is a diagram showing a modified example of the angle adjustment unit 210 of this embodiment. The angle adjustment unit 210 described above includes a mechanism in which the cam 121 rotates around the upper arm yaw axis 122 and the cam 121 and the cam follower 116 act to rotate the joint unit 200 around the first axis AX1. The modified example shown in the same figure includes an upper arm eccentric cam 125 in addition to the mechanism that rotates the joint unit 200 around the first axis AX1. The upper arm eccentric cam 125 displaces the upper arm 120 depending on the angle of the upper arm 120 relative to the joint unit 200. That is, this modified example includes an angle correction mechanism using an eccentric cam and cam follower for the pitch axis of the upper arm 120 in addition to the angle correction mechanism using an eccentric cam and cam follower for the upper arm yaw axis 122. According to the angle adjustment section 210 configured in this manner, it is possible to reduce deterioration in positioning accuracy caused by bending of the upper arm section 120 due to the mass of the end effector and the like.

[0037] [Configuration of Extension Arm 145] Next, the configuration of the extension arm 145 will be described with reference to FIGS. FIG. 6 is a perspective view showing an example of the configuration of the extension arm 145 of this embodiment. FIG. 7 is a plan view showing an example of the configuration of the extension arm 145 of this embodiment. The extension arm 145 is attached to the upper arm tip 126 at an attachment position 144. The attachment position 144 is a reference position that serves as a reference for the posture of the extension arm 145. The position of the attachment position 144 changes depending on the posture of the lower arm 110 and the posture of the upper arm 120. The coordinates of the extension arm 145 are shown by a three-dimensional Cartesian coordinate system with xa, ya, and za axes based on the attachment position 144. This three-dimensional Cartesian coordinate system with xa, ya, and za axes is also called the extension arm coordinate system.

[0038] The extension arm 145 includes a first end 141, a second end 142, a counterweight 143, a first extension arm 145A, a second extension arm 145B, a first link 146A, a second link 146B, an extension arm drive unit 147, and a balance adjustment unit 400. An end effector is attached to the first end 141. The counterweight 143 is attached to the second end 142.

[0039] The extension arm drive unit 147 includes, for example, an electric motor. The extension arm drive unit 147 displaces the first extension arm 145A relative to the mounting position 144. The extension arm drive unit 147 also displaces the second extension arm 145B relative to the mounting position 144 by driving the second link 146B. As a result, the displacement of the first extension arm 145A and the displacement of the second extension arm 145B are combined, and the position of the first end 141 relative to the mounting position 144 changes.

[0040] That is, the extension arm 145 has a first end 141 to which an end effector is attached and a second end 142 to which a counterweight 143 is attached, and is attached at an attachment position 144 between the first end 141 and the second end 142 to the upper arm arm tip 126, which is the tip of the upper arm 120, so that its posture can be changed. Further, the extension arm driving section 147 changes the angle between the first extension arm 145A and the second extension arm 145B of the extension arm 145.

[0041] The balance adjustment unit 400 includes a 1A link 413 and a 2A link 423 . The 1A link 413 is connected to one end of the first link 146A. The other end of the first link 146A is connected to the first extension arm 145A. The first link 146A transmits the displacement of the first extension arm 145A to the 1A link 413. The 2A link 423 is connected to one end of the second link 146B. The other end of the second link 146B is connected to the second extension arm 145B. The second link 146B transmits the displacement of the second extension arm 145B to the 2A link 423. The balance adjustment unit 400 displaces the counterweight 143 in accordance with the displacement of the first end 141, thereby canceling the moment caused by the movement of the center of gravity that occurs in the extension arm 145 due to the displacement of the first end 141. The specific configuration of this balance adjustment unit 400 will be described with reference to FIG.

[0042] 8 is a diagram showing an example of the configuration of the balance adjustment unit 400 of this embodiment. The balance adjustment unit 400 displaces the counterweight 143 by combining the displacement of the first extension arm 145A transmitted to the 1A link 413 and the displacement of the second extension arm 145B transmitted to the 2A link 423. The balance adjustment unit 400 has a first system that transmits the displacement of the first extension arm 145A to the counterweight 143 and a second system that transmits the displacement of the second extension arm 145B to the counterweight 143.

[0043] The balance adjustment unit 400 includes a 1A gear 411, a 1A shaft 412, a 1A link 413, a 1B gear 414, a 1B shaft 415, and a 1B link 416 as components of the first system. As described above, the 1A link 413 is connected to the first link 146A, and receives the displacement of the first extension arm 145A. The 1A link 413 rotates around the 1A shaft 412. The 1A link 413 converts the displacement of the first extension arm 145A input from the first link 146A into a rotation angle around the 1A shaft 412 and transmits it to the 1A gear 411. The 1A gear 411 rotates around the 1A shaft 412. The 1A gear 411 rotates by a rotational force applied from the 1A link 413. The 1B gear 414 is connected to the 1B shaft 415 and rotates around the 1B shaft 415 as the center of rotation. The 1B link 416 rotates around the 1B shaft 415. The 1B link 416 rotates due to the rotational force applied from the 1B gear 414. That is, the displacement of the first extension arm 145A input to the 1A link 413 is transmitted to the 1B link 416 via the 1A gear 411 and the 1B gear 414.

[0044] The balance adjustment unit 400 includes a 2A gear 421, a 2A shaft 422, a 2A link 423, a 2B gear 424, a 2B shaft 425, and a 2B link 426 as components of the second system. As described above, the 2A link 423 is connected to the second link 146B, and receives the displacement of the second extension arm 145B. The 2A link 423 rotates around the 2A shaft 422. The 2A link 423 converts the displacement of the second extension arm 145B input from the second link 146B into a rotational displacement around the 2A shaft 422 and transmits it to the 2A gear 421. The 2A gear 421 rotates around the 2A shaft 422. The 2A gear 421 rotates by a rotational force applied from the 2A link 423. The 2B gear 424 rotates around the 2B shaft 425. The 2B shaft 425 is arranged coaxially in the xa-axis direction with the above-mentioned 1B shaft 415. Note that the 1B shaft 415 and the 2B shaft 425 are not connected, and the 1B gear 414 and the 2B gear 424 can rotate independently of each other. The 2B link 426 is not connected to the 2B shaft 425 and rotates around the 2B shaft 425 as the center of rotation, independently of the rotational displacement of the 2B gear 424 .

[0045] Next, a description will be given of a configuration for transmitting the displacement of the 1B link 416 to the counterweight 143. The balance adjustment unit 400 includes a 2C gear 427, a 2C shaft 428, a 2C link 429, a 2D shaft 431, a 2E shaft 432, and a 2D link 433. The 2C axis 428 is connected to the 1B link 416, and displaces around the 1B axis 415 as the center of rotation in response to the rotational displacement of the 1B link 416.

[0046] The rotational displacement of the 2C shaft 428 around the 2B shaft 425 is transmitted to the 2C link 429. The 2C link 429 is connected to the 2B link 426 via the 2D shaft 431, the 2D link 433, and the 2E shaft 432. In other words, the balance adjustment unit 400 configures a parallel link (or a four-bar link) with the 2B link 426 and the 2C link 429 as the first opposite side and the 1B link 416 and the 2D link 433 as the second opposite side. Through this parallel link, the displacement of the 1B link 416 is transmitted to the 2B link 426 at the 2E shaft 432. That is, the displacement of the first extension arm 145A input to the 1A link 413 is transmitted to the 2B link 426 via the 1A gear 411, the 1B gear 414, the 1B link 416, the 2C link 429, and the 2D link 433.

[0047] Next, a configuration for transmitting the rotational displacement of the 2B gear 424 to the counterweight 143 will be described. The 2C gear 427 meshes with the 2B gear 424, and rotates around the 2C shaft 428 as the center of rotation. The 2C gear 427 is connected to a 2C link 429. In response to the rotational displacement of the 2C gear 427, the 2C link 429 undergoes rotational displacement around the 2C shaft 428 as the center of rotation. The rotational displacement of the 2C link 429 is transmitted to the 2B link 426 via the 2D link 433.

[0048] The axis distance between the 2C gear 427 and the 2B gear 424 is the same as the axis distance between the 1B shaft 415 and the 2C shaft 428, and the axis distance between the 2B shaft 425 and the 2C shaft 428. In other words, the 2C gear 427 is a planet gear with the 2B gear 424 as the sun gear, and constitutes a planetary gear mechanism. The 2C gear 427 rotates on the circumference of the 2B gear 424 in response to the rotational displacement of the 1B link 416 around the 1B shaft 415 as its center of rotation.

[0049] A counterweight 143 is attached to one end of the 2B link 426. As the 2B link 426 rotates and displaces, the counterweight 143 displaces around the 2B shaft 425 as the center of rotation.

[0050] Note that a configuration may be adopted in which a 2B link 426B is connected to the counterweight 143 in addition to the 2B link 426. The 2B link 426B rotates around the 1B shaft 415. The 2B link 426B is not connected to the 1B shaft 415, and the 2B link 426B and the 1B shaft 415 can rotate independently of each other. In other words, the counterweight 143 undergoes rotational displacement according to the rotation angle of the 2B shaft 425, regardless of the rotation angle of the 1B shaft 415. According to the balance adjustment section 400 configured in this manner, the load of the counterweight 143 can be supported by two links, the 2B link 426 and the 2B link 426B.

[0051] That is, the displacement of the first extension arm 145A input to the 1A link 413 and the displacement of the second extension arm 145B input to the 2A link 423 are combined by the balance adjustment unit 400 to displace the counterweight 143. In other words, the balance adjustment section 400 changes the position of the counterweight 143 relative to the attachment position 144 in response to both the change in angle of the first extension arm 145A and the change in angle of the second extension arm 145B.

[0052] [Modification of the balance adjustment part] 9 is a diagram showing a modified example of the balance adjustment unit of this embodiment. In the example described above, the displacement of the first extension arm 145A and the displacement of the second extension arm 145B are combined by a parallelogram link (four-bar link), but this is not limiting. As shown in the figure, the balance adjustment unit may be configured to include a first rack 441, a second rack 442, and a pinion 443. The displacement of the first link 146A-1 is input to the first rack 441. The displacement of the second link 146B-1 is input to the second rack 442. The first rack 441 and the second rack 442 are arranged opposite each other with a pinion 443 in between. The pinion 443 is connected to the counterweight 143. The first rack 441 and the second rack 442 combine the displacement of the first extension arm 145A and the displacement of the second extension arm 145B by rotating and moving the pinion 443.

[0053] [Configuration of thrust generating unit 300] Next, the configuration of the thrust generating section 300 will be described with reference to FIG. FIG. 10 is a diagram showing an example of the configuration of the thrust generating unit 300 of this embodiment. The thrust generating unit 300 includes, for example, a ducted fan. The thrust generating unit 300 is attached to the upper arm 120 and displaces the upper arm 120 by the reaction force of the generated airflow. Note that the thrust generating unit 300 need not necessarily be attached to the upper arm 120 as long as it can transmit thrust to the upper arm tip 126. The thrust generating unit 300 may be attached to the attachment position 144 of the extension arm 145, for example.

[0054] The thrust generating unit 300 includes a first thrust generating unit 310 that generates an airflow in a first direction (e.g., the xa-axis direction), a second thrust generating unit 320 that generates an airflow in a second direction (e.g., the ya-axis direction), and a third thrust generating unit 330 that generates an airflow in a third direction (e.g., the za-axis direction). According to the thrust generating section 300 configured in this manner, a thrust can be applied to the upper arm 120 in any direction in three-dimensional space by combining the thrusts of the first thrust generating section 310 to the third thrust generating section 330.

[0055] 11 is a diagram showing a modification of the thrust generation unit of this embodiment. The thrust generation unit 300a may include a fourth thrust generation unit 340 that generates an airflow in the direction of gravity (e.g., the za axis direction), a fifth thrust generation unit 350 that generates an airflow in a direction different from the direction of gravity (e.g., any direction within the xa-ya plane), and a direction changer 360 that changes the direction in which the airflow is generated by the fifth thrust generation unit 350. The direction varying unit 360 includes, for example, an electric motor, and changes the direction in which the fifth thrust generating unit 350 generates thrust by driving the electric motor.

[0056] [Functional configuration of the control device 500] Next, an example of the functional configuration of the control device 500 will be described with reference to FIG.

[0057] 12 is a diagram showing an example of the functional configuration of the control device 500 of this embodiment. The control device 500 has a calculation function such as a central processing unit and a storage function such as a semiconductor memory, and includes a noise elimination unit 501, a signal output unit 502, a detection unit 511, a control unit 512, a rewrite control unit 513, and a storage unit 514 as its functional units.

[0058] The noise elimination unit 501 acquires the signal output by the non-contact acoustic sensor 150 and the signal output by the sound collection unit 160 . The non-contact acoustic sensor 150 is supported via the upper arm 120 and acquires acoustic information occurring in the object of inspection without coming into contact with the object of inspection. The sound collection unit 160 collects sounds occurring around the non-contact acoustic sensor 150 and outputs a sound signal. The noise elimination unit 501 eliminates the components of the sound collected by the sound collection unit 160 from the signal output by the non-contact acoustic sensor 150. The processing procedure by the noise elimination unit 501 will be described with reference to FIG.

[0059] [Operation of noise elimination unit 501] FIG. 13 is a diagram showing an example of the operation of the noise removal unit 501 of this embodiment. (Step S100) The noise elimination unit 501 acquires the output signal of the non-contact acoustic sensor 150. The noise elimination unit 501 acquires the output signal of the sound collection unit 160. (Step S110) The noise elimination unit 501 divides the acquired signal into frames in the time axis direction. (Step S120) The noise elimination unit 501 eliminates the frequency spectrum of the noise component contained in the output signal of the non-contact acoustic sensor 150. A known spectral subtraction method is used to eliminate the frequency spectrum of the noise component. (Step S130) The noise elimination unit 501 eliminates small-amplitude high frequencies using a known ε filter. (Step S140) The noise elimination unit 501 outputs the signal after noise elimination as an AE (Acoustic Emission) signal.

[0060] FIG. 14 is a diagram showing an example of noise removal by the noise removal unit 501 of this embodiment. 14(A) shows an example of a signal output by the non-contact acoustic sensor 150 when the thrust generating unit 300 is not operating. The waveform shown in the figure includes a noise component caused by the non-contact acoustic sensor 150. 14(B) shows an example of a signal output by non-contact acoustic sensor 150 when thrust generating unit 300 is operating. The waveform shown in the figure contains noise components due to the operation of thrust generating unit 300 in addition to noise components due to non-contact acoustic sensor 150. 14(C) shows an example of a signal after noise removal by the noise removal unit 501 from the signal output by the non-contact acoustic sensor 150 when the thrust generation unit 300 is operating. The waveform shown in the figure has noise components caused by the non-contact acoustic sensor 150 and noise components caused by the operation of the thrust generation unit 300 removed. In the above example, the noise elimination unit 501 performs noise elimination using the spectral subtraction method and an ε filter, but this is not limiting. The noise elimination unit 501 may employ any known method capable of eliminating noise components contained in the output signal of the non-contact acoustic sensor 150.

[0061] 12, the signal output unit 502 outputs the AE signal generated by the noise removal unit 501 to an external device (for example, a presentation device 560). The presentation device 560 may be a display device having a display unit such as a liquid crystal display, or may be a device having a printing function such as a printer.

[0062] Next, the posture control of the joint portion 200 by the control device 500 will be described. As described above, the angle adjustment unit 210 of the joint unit 200 may include a rotation angle sensor 123 and a drive unit 124 (neither of which are shown). Below, a case where the angle adjustment unit 210 includes the rotation angle sensor 123 and the drive unit 124 will be described.

[0063] The detector 511 acquires the output signal of the rotation angle sensor 123 and detects the rotation angle of the upper arm 120 around the second axis AX2. Control information is stored in advance in the storage unit 514. The control information is information indicating the correspondence relationship between the rotation angle of the upper arm 120 and the rotation amount of the joint 200. For example, when the rotation angle of the upper arm 120 is 0°, no twisting occurs in the lower arm 110, and therefore the rotation amount of the joint 200 is 0. As the rotation angle of the upper arm 120 increases (or decreases) from 0°, the amount of twisting of the lower arm 110 increases. Therefore, as the rotation angle of the upper arm 120 increases (or decreases) from 0°, the amount of rotation of the joint 200 increases. The control information indicating the correspondence relationship between the rotation angle of the upper arm 120 and the rotation amount of the joint 200 is stored in advance in the storage unit 514. The control unit 512 controls the rotational drive amount of the drive unit 124 based on the control information stored in the storage unit 514 and the rotation angle detected by the detection unit 511 .

[0064] Here, a change in the mass of a component (for example, an end effector) attached to the upper arm 120 changes the correspondence relationship between the rotation angle of the upper arm 120 and the rotation amount of the joint 200. A change in the rigidity of the lower arm 110 also changes the correspondence relationship between the rotation angle of the upper arm 120 and the rotation amount of the joint 200. Therefore, it is desirable that the control information stored in the memory unit 514 be configured to be rewritten when the end effector is replaced, for example. Therefore, the control device 500 may include a rewrite control unit 513.

[0065] The rewrite control unit 513 rewrites the control information stored in the storage unit 514. Specifically, the profile providing device 550 stores profile information in which a correspondence relationship between the rotation angle of the upper arm unit 120 and the rotation amount of the joint unit 200 is prepared in advance for each type of part (e.g., end effector) attached to the upper arm unit 120 or for each type of part constituting the lower arm unit 110. The profile providing device 550 provides the control device 500 with profile information corresponding to the specifications of the inspection device 1 (e.g., type of end effector) from among multiple pieces of profile information. When the rewrite control unit 513 acquires the profile information provided from the profile providing device 550, it rewrites the control information stored in the storage unit 514 with the acquired profile information as new control information. According to the control device 500 configured in this manner, even when the type of end effector is changed, the positioning accuracy of the end effector can be further improved regardless of the type of end effector.

[0066] An example of an end effector is the above-mentioned non-contact acoustic sensor 150. It is desirable that the non-contact acoustic sensor 150 faces the object to be inspected within a predetermined distance range and a predetermined angle range. For example, it is desirable that the non-contact acoustic sensor 150 faces the object to be inspected at a distance of about 25 mm and an angle of about 15.6°. Therefore, the inspection device 1 is required to have high positioning accuracy for the end effector.

[0067] As described above, the inspection device 1 of this embodiment can improve the positioning accuracy of the end effector by allowing the joint portion 200 to tilt in the direction opposite to the twisting direction of the lower arm portion 110 and absorb the twisting. Furthermore, the inspection device 1 of this embodiment can change the angle control of the joint portion 200 to a more appropriate profile depending on the type of end effector, etc. Therefore, according to the inspection device 1 of this embodiment, even when the end effector is replaced, the positioning accuracy of the end effector can be improved. Furthermore, the inspection device 1 of this embodiment moves the counterweight 143 to a position where the displacements of the first extension arm 145A and the second extension arm 145B are combined, thereby suppressing changes in the center of gravity of the extension arm 145 caused by changes in the posture of the first extension arm 145A and the second extension arm 145B. As a result, the inspection device 1 of this embodiment can improve the positioning accuracy of the end effector. The inspection device 1 of this embodiment also includes a thrust generating unit 300 that controls the position of the upper arm tip 126 using the thrust of a fan (for example, a ducted fan). The inspection device 1 of this embodiment configured in this manner can improve the positioning accuracy of the end effector.

[0068] Although the embodiments of the present invention have been described in detail above with reference to the drawings, the specific configuration is not limited to this embodiment and can be appropriately modified without departing from the spirit of the present invention. The configurations described in the above-described embodiments may be combined.

[0069] Each unit included in each device in the above-described embodiments may be realized by dedicated hardware, or may be realized by a memory and a microprocessor.

[0070] In addition, each part of each device may be composed of a memory and a CPU (central processing unit), and the functions of each part of each device may be realized by loading a program into memory and executing it.

[0071] In addition, a program for realizing the functions of each unit of each device may be recorded on a computer-readable recording medium, and the program recorded on the recording medium may be read into a computer system and executed to perform processing by each unit of the control unit. Note that the term "computer system" here includes hardware such as an OS and peripheral devices.

[0072] Furthermore, if a WWW system is used, the "computer system" also includes the homepage provision environment (or display environment). "Computer-readable recording media" refers to portable media such as flexible disks, optical magnetic disks, ROMs, and CD-ROMs, as well as storage devices such as hard disks built into computer systems. Furthermore, "computer-readable recording media" also includes devices that dynamically store programs for a short period of time, such as communication lines used when transmitting programs over networks like the Internet or over communication lines like telephone lines, and devices that store programs for a fixed period of time, such as volatile memory within computer systems that serve as servers or clients. Furthermore, the programs may be programs that implement some of the aforementioned functions, or may be programs that can realize the aforementioned functions in combination with programs already stored in the computer system. [Explanation of symbols]

[0073] 1...inspection device, 110...lower arm portion, 120...upper arm portion, 145...extension arm, 200...joint portion, 300...thrust generating portion, 500...control device

Claims

1. a lower arm portion equipped with a Roberval mechanism that maintains the angle of the arm tip in response to changes in the angle of the arm; a joint portion attached to the lower arm arm tip portion so as to be rotatable around a first axis of the lower arm arm tip portion, which is the arm tip of the lower arm portion; an upper arm attached to the joint portion so as to be rotatable about a second axis that is different in direction from the first axis of the joint portion; an angle adjustment unit that changes a rotation angle of the joint unit about the first axis relative to the lower arm arm tip in accordance with a rotation angle of the upper arm unit about the second axis relative to the joint unit; a non-contact acoustic sensor supported via the upper arm; a sound pickup unit that picks up sound; An inspection device comprising:

2. The angle adjustment unit is a cam that rotates together with the upper arm about the second axis; a cam follower disposed at a position of the lower arm tip facing the cam; Equipped with a rotation angle of the joint portion about the first axis with respect to the arm tip portion of the lower arm, by a force that the cam receives from the cam follower; The inspection device according to claim 1 .

3. The cam is detachably attached to the upper arm, or the cam follower is detachably attached to the lower arm, so that at least one of the cam and the cam follower is replaceable. The inspection device according to claim 2 .

4. a detection unit that detects a rotation angle of the upper arm about the second axis; a drive unit that drives the joint unit to rotate around the first axis; a control unit that controls the rotation drive amount of the drive unit based on control information that indicates a correspondence relationship between the rotation angle and the rotation amount of the joint unit, which is stored in advance, and the rotation angle detected by the detection unit; The inspection device according to claim 1 , further comprising:

5. a storage unit that stores the control information; a rewrite control unit that rewrites the control information stored in the storage unit; The inspection device according to claim 4 , further comprising:

6. a thrust generating unit attached to the upper arm and displacing the upper arm by the reaction force of the generated airflow; The inspection device according to claim 1 , further comprising:

7. The thrust generating unit includes: Of the three different directions, a first thrust generating unit that generates an airflow in a first direction; a second thrust generating unit that generates an airflow in a second direction; a third thrust generating unit that generates an airflow in a third direction; The inspection device according to claim 6 , comprising:

8. The thrust generating unit includes: a fourth thrust generating unit that generates an airflow in the direction of gravity; a fifth thrust generating unit that generates an airflow in a direction different from the direction of gravity; a direction varying unit that varies a direction in which the fifth thrust generating unit generates an airflow; The inspection device according to claim 6 , comprising:

9. the upper arm portion is provided with a Roberval mechanism that maintains the angle of the arm tip in response to changes in the angle of the arm, an extension arm having a first end to which an end effector is attached and a second end to which a counterweight is attached, the extension arm being attached to an upper arm arm tip portion at an attachment position between the first end and the second end so as to be able to change its posture; an extension arm drive unit that changes the angle between a first extension arm and a second extension arm that constitute the extension arm; a balance adjustment unit that changes the position of the counterweight relative to the mounting position in response to both an angle change of the first extension arm and an angle change of the second extension arm; The inspection device according to claim 1 , further comprising:

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