Chemical Liquid Supply System

Abstract

Conventional liquid supply lines tend to cause unstable chemical supply when performing maintenance on equipment. [Solution] A chemical liquid supply system including a liquid supply line, a pre-filled bypass, and a detection bypass, wherein the liquid supply line includes one or more filtration units, a plurality of pipes, and at least two supply valves, each located at both ends of the liquid supply line and connected to the plurality of pipes, the plurality of supply valves jointly determining whether the liquid supply line is in communication, and when the plurality of supply valves are simultaneously closed, the liquid supply line is in a maintenance-ready state. The pre-filled bypass is connected to a chemical liquid supply source, and the chemical liquid provided by the chemical liquid supply source is the same as that transported in the liquid supply line. The detection bypass has a one-way exhaust valve and a detection unit, which detects the chemical liquid in the liquid supply line, and when the liquid supply line is full, the detection unit notifies or controls the plurality of supply valves to be open.

Description

[Technical Field]

[0001] The present invention relates to the technical field of chemical liquid supply systems, and in particular to chemical liquid supply systems with pre-filled bypasses. [Background technology]

[0002] In conventional high-tech equipment manufacturing plants, when maintenance is required on equipment in a liquid supply line in chemical handling equipment, the supply valves on both ends of the liquid supply line are closed before replacing the corresponding part. However, during such maintenance work, the interior of the newly replaced part is hollow, causing a discontinuity in the chemical in the liquid supply line, resulting in a drop in liquid supply pressure at the outlet end of the liquid supply line. In severe cases, this can even cause the acid supply to stop at the outlet end, thereby affecting the operation of the process performed using the liquid supply line. Summary of the Invention [Problem to be solved by the invention]

[0003] A main object of the present invention is to solve the problem that the supply of chemicals tends to become unstable when maintenance of the equipment is performed using conventional liquid supply lines. [Means for solving the problem]

[0004] To achieve the above-mentioned objectives, the present invention provides a chemical liquid supply system including a liquid supply line, a pre-filled bypass connected to the liquid supply line, and a detection bypass connected to the liquid supply line. The liquid supply line includes one or more filtration units, a plurality of pipes, and at least two supply valves located at both ends of the liquid supply line and connected to the plurality of pipes, respectively. The plurality of supply valves jointly determine whether the liquid supply line is in communication, and when the plurality of supply valves are simultaneously closed, the liquid supply line is in a maintenance-ready state. The pre-filled bypass is connected to a chemical liquid supply source, and the chemical liquid provided by the chemical liquid source is the same as that transported through the liquid supply line. The detection bypass has a one-way exhaust valve and a detection unit. The detection unit detects the chemical liquid in the liquid supply line, and when the liquid supply line is full, the detection unit notifies or controls the plurality of supply valves to open.

[0005] In one embodiment, the supply valves are opened sequentially.

[0006] In one embodiment, a plurality of said filtration units are arranged in parallel, and said pre-filled bypass is connected to the parallel node of said plurality of said filtration units.

[0007] In one embodiment, the chemical liquid supply system includes a purge bypass connected to the liquid supply line, the purge bypass providing a purge gas before the prefilled bypass communicates with the liquid supply line.

[0008] In one embodiment, the chemical liquid supply system has at least one waste bypass connected to the liquid supply line, and the waste bypass is in communication with the liquid supply line when the liquid supply line is in the maintenance-enabled state.

[0009] In one embodiment, the chemical liquid supply system includes a sampling bypass connected to the liquid supply line and located after the filtration unit.

[0010] In one embodiment, the pre-filled bypass is connected before the filtration unit.

[0011] In one embodiment, the detection bypass is connected to the filtration unit.

[0012] In one embodiment, the chemical liquid supply system includes a sampling bypass connected to the liquid supply line and located after the filtration unit. [Effects of the Invention]

[0013] The present invention, as implemented above, has the following advantages over the prior art: The chemical liquid supply system of the present invention has a prefilled bypass and a detection bypass, and when replacing components of the liquid supply line as needed, the prefilled bypass can replenish the chemical liquid into the liquid supply line replaced with the new component. The detection unit detects the presence of chemical liquid in the liquid supply line and notifies or controls the multiple supply valves to open when the liquid supply line is full, thereby alleviating the problems of unstable liquid supply or acid supply stoppage during equipment maintenance in conventional liquid supply lines. [Brief explanation of the drawings]

[0014] [Figure 1] 1 is a schematic diagram of a chemical liquid delivery system according to one embodiment of the present invention; [Figure 2] 1 is a partial structural schematic diagram of a chemical liquid supply system according to an embodiment of the present invention; DETAILED DESCRIPTION OF THE INVENTION

[0015] The quantifiers "one" or "one" used throughout this specification to describe parts and components are used for ease of description and to provide a general understanding of the scope of the invention, which should be understood to include one or at least one, and the singular includes the plural unless the context clearly indicates otherwise.

[0016] 1 and 2, the present invention provides a chemical liquid supply system 20 including a liquid supply line 21, a prefilled bypass 22, and a detection bypass 24. The liquid supply line 21 transports liquid in the chemical liquid supply system 20 and can transport chemical liquid required for work to at least one work facility. The liquid supply line 21 includes one or more filtration units 211, a plurality of pipes 212, and at least two supply valves 213. The plurality of pipes 212 transport chemical liquid in the liquid supply line 21, and the filtration unit 211 is connected to one of the pipes 212 and filters the chemical liquid transported by the connected pipe 212. In one embodiment, the filtration unit 211 is a filter that allows the chemical liquid to flow in one direction. The plurality of supply valves 213 are located at both ends of the liquid supply line 21 and are connected to the plurality of pipes 212, respectively. One of the supply valves 213 is located upstream of the liquid supply line 21, and another of the supply valves 213 is located downstream of the liquid supply line 21, and the multiple supply valves 213 collectively determine whether the liquid supply line 21 is connected, and when the multiple supply valves 213 are simultaneously open, the liquid supply line 21 can supply chemical liquid, and when the multiple supply valves 213 are simultaneously closed, the liquid supply line 21 is independent and does not communicate with other liquid lines, and the liquid supply line 21 is in a maintainable state. In this maintainable state, at least one pipe 212 and / or filtration unit 211 for the liquid supply line 21 can be replaced according to needs.

[0017] The pre-filled bypass 22 is connected to the liquid supply line 21, and the pre-filled bypass 22 is connected to a chemical liquid supply source 23, and the chemical liquid supply source 23 supplies the chemical liquid to the pre-filled bypass 22, and the chemical liquid provided by the chemical liquid supply source 23 is the same as that transported in the liquid supply line 21. In one embodiment, the chemical liquid supply source 23 is also connected to the liquid supply line 21, and the chemical liquid transported in the pre-filled bypass 22 and the liquid supply line 21 originates from the same chemical liquid supply source 23.

[0018] The detection bypass 24 is connected to the liquid supply path 21 and includes a one-way exhaust valve 241 and a detection unit 242. The one-way exhaust valve 241 can exhaust gas from the liquid supply path 21, and the detection unit 242 detects the chemical liquid in the liquid supply path 21. The detection unit 242 can detect the liquid in various ways, such as determining the liquid level using an image. In another example, the detection unit 242 is a liquid detector, and since the detection bypass 24 and the liquid supply path 21 are connected, when the chemical liquid in the liquid supply path 21 overflows and contacts the liquid detector, the liquid detector is triggered to produce a signal change according to the principle of a connecting pipe. Furthermore, when the liquid supply path 21 is full of liquid, the detection unit 242 performs one of the following corresponding controls: One is that the detection unit 242 generates a notification, which must attract the attention of people in the factory, for example, a visual change (such as a change in the number of indicator lights) and / or an audible change (such as a beep) that causes the people in the factory to control and open the multiple supply valves 213 in response to the notification. The other is that the detection unit 242 directly controls and opens the multiple supply valves 213, and the detection unit 242 returns the detection result to the control unit in the chemical liquid supply system 20, which then drives and opens the multiple supply valves 213.

[0019] 1 and 2, the implementation of the chemical liquid supply system 20 will be described. Initially, all of the supply valves 213 are open, allowing the liquid supply line 21 to supply chemical liquid to the outside. When all of the supply valves 213 are closed at the same time, the liquid supply line 21 is in a maintenance-ready state, and a factory worker replaces at least one pipe 212 and / or filtration unit 211 in the liquid supply line 21 according to needs. After the replacement is completed, the pre-filled bypass 22 supplies the liquid supply line 21 with chemical liquid from the chemical liquid supply source 23, and the chemical liquid provided by the chemical liquid supply source 23 is the same as that transported in the liquid supply line 21. At this time, since the inside of the replaced pipe 212 and / or filtration unit 211 is hollow, the one-way exhaust valve 241 can discharge the gas accumulated inside the replaced pipe 212 and / or filtration unit 211 and fill the liquid supply path 21 with the chemical liquid supplied by the pre-filled bypass 22, and the detection unit 242 notifies or controls the multiple supply valves 213 to be able to open when the liquid supply path 21 is full, thereby allowing the liquid supply path 21 to supply the chemical liquid to the outside again.

[0020] As can be seen from the above, the chemical liquid supply system 20 of the present invention is provided with the pre-filled bypass 22 and the detection bypass 24. After at least one pipe 212 and / or filtration unit 211 is replaced in the liquid supply line 21, the pre-filled bypass 22 supplies the same chemical liquid to the liquid supply line 21, and the detection unit 242 notifies or controls the plurality of supply valves 213 to be opened only when the liquid supply line 21 is filled with liquid, thereby alleviating the problem of unstable liquid supply or stoppage of acid supply in the conventional liquid supply line 21 due to the hollow interior of the newly replaced pipe 212 and / or filtration unit 211.

[0021] Furthermore, in the present invention, in order to stabilize the pressure of the chemical liquid at both ends of the liquid supply path 21, in one embodiment, the multiple supply valves 213 are opened sequentially, and the supply valves 213 located at the front stage of the liquid supply path 21 are opened earlier than the supply valves 213 located at the rear stage of the liquid supply path 21.

[0022] 1 and 2, in another embodiment, the prefill bypass 22 includes one or more pipes 221 and a control valve 222 connected to the pipes 221, and the control valve 222 determines whether the prefill bypass 22 is connected to the liquid supply line 21. The control valve 222 is closed when the liquid supply line 21 is connected and is opened when the liquid supply line 21 is in the maintenance-ready state. In another embodiment, multiple filtration units 211 are arranged in parallel, and the prefill bypass 22 is connected to the parallel nodes 214 of the multiple filtration units 211, so that the prefill bypass 22 can simultaneously supply chemical liquid to the multiple filtration units 211. In another embodiment, the prefill bypass 22 is connected to the front stage of the filtration unit 211, so that the chemical liquid in the prefill bypass 22 can efficiently fill the liquid supply line 21, which is again in the maintenance-ready state. In another embodiment, the detection bypass 24 is connected to the filtration unit 211.

[0023] 1 and 2, the chemical liquid supply system 20 of the present invention has at least one waste liquid bypass 25, which is connected to the liquid supply line 21 and communicates with the liquid supply line 21 when the liquid supply line 21 is in a state where maintenance is possible, thereby discharging the chemical liquid in the liquid supply line 21. In one embodiment, the waste liquid bypass 25 includes one or more pipes 251 and a waste discharge control valve 252 connected to the pipe 251, and the waste discharge control valve 252 determines the communication between the waste liquid bypass 25 and the liquid supply line 21. The waste discharge control valve 252 is closed when the liquid supply line 21 is in communication, and is opened when the liquid supply line 21 is in a state where maintenance is possible. In another embodiment, the waste liquid bypass 25 communicates with the liquid supply line 21 earlier than the prefilled bypass 22, and the waste liquid bypass 25 cuts off communication with the liquid supply line 21 before the prefilled bypass 22 communicates with the liquid supply line 21. In another embodiment, a plurality of waste liquid bypasses 25 are provided, and the plurality of waste liquid bypasses 25 are connected to different positions of the liquid supply path 21 .

[0024] The chemical liquid supply system 20 of the present invention also includes a purge bypass 26, which is connected to the liquid supply line 21 and provides a purge gas to the liquid supply line 21, the purge gas being different from the chemical liquid provided by the chemical liquid supply source 23, such as nitrogen. In one embodiment, the purge bypass 26 is located upstream of the liquid supply line 21 and includes one or more pipes 261 and a purge control valve 262 connected to the pipes 261. The purge control valve 262 determines the communication between the purge bypass 26 and the liquid supply line 21. The purge control valve 262 is closed when the liquid supply line 21 is in communication, and is opened when the liquid supply line 21 is in a state where maintenance is possible and the waste liquid bypass 25 is in communication with the liquid supply line 21. In another embodiment, the purge bypass 26 communicates with the liquid supply line 21 earlier than the prefilled bypass 22 and later than the waste bypass 25, and the purge bypass 26 provides purge gas before the prefilled bypass 22 communicates with the liquid supply line 21.

[0025] 1 and 2, the chemical liquid supply system 20 also includes a sampling bypass 27, which is connected to the liquid supply line 21 and is located downstream of the filtration unit 211. In one embodiment, the sampling bypass 27 includes one or more pipes 271 and a sampling control valve 272 connected to the pipe 271, and the sampling control valve 272 determines communication between the sampling bypass 27 and the liquid supply line 21. The sampling control valve 272 is closed when the liquid supply line 21 is in communication, and is opened after the liquid supply line 21 enters a maintenance-ready state and the chemical liquid in the prefill bypass 22 fills the liquid supply line 21. In another embodiment, the sampling bypass 27 communicates with the liquid supply line 21 earlier than the liquid supply line 21 is recommunicated and later than the prefill bypass 22 is recommunicated with the liquid supply line 21, and the sampling bypass 27 cuts off communication with the liquid supply line 21 before the liquid supply line 21 is recommunicated.

[0026] As can be seen from the above implementation, suppose that the plurality of supply valves 213 in the liquid supply line 21 are opened, and the pipe 212 and / or the filtration unit 211 belonging to the liquid supply line 21 are replaced. In this case, the operation flow of the chemical liquid supply system 20 is as follows: the plurality of supply valves 213 are closed, and the waste liquid bypass 25 is opened to discharge the chemical liquid from the liquid supply line 21. After that, the purge bypass 26 is opened to deliver purge gas to the liquid supply line 21 to help discharge the chemical liquid from the liquid supply line 21. After that, the waste liquid bypass 25 and the purge bypass 26 are closed, and the pipe 212 and / or the filtration unit 211 in the liquid supply line 21 are replaced. Once the replacement is complete, the one-way exhaust valve 241 in the detection bypass 24 is opened and later connected to the prefilled bypass 22. When the prefilled bypass 22 supplies the chemical liquid to the liquid supply line 21, gas accumulated inside the replaced pipe 212 and / or filtration unit 211 can be discharged through the one-way exhaust valve 241. Next, the detection unit 242 in the detection bypass 24 notifies or controls the multiple supply valves 213 to be open when the liquid supply line 21 is full, and the sampling bypass 27 is opened to perform sampling before the liquid supply line 21 is connected again. Once the sampling and detection are complete, the multiple supply valves 213 in the liquid supply line 21 are opened sequentially, and the liquid supply line 21 resumes liquid supply. [Explanation of symbols]

[0027] 20 Chemical Liquid Supply System 21 Liquid supply path 211 Filtration Unit 212 Pipe 213 Supply valve 214 parallel nodes 22 Prefilled Bypass 221 Pipe 222 Control valve 23 Chemical Liquid Source 24 Detection Bypass 241 One-way exhaust valve 242 Detection Unit 25 Waste liquid bypass 251 Pipe 252 Waste discharge control valve 26 Purge Bypass 261 Pipe 262 Purge control valve 27 Sampling Bypass 271 Pipe 272 Sampling Control Valve

Claims

1. 1. A chemical liquid delivery system comprising: a liquid supply line including one or more filtration units, a plurality of pipes, and at least two supply valves located at both ends of the liquid supply line and connected to the plurality of pipes, the plurality of supply valves jointly determining whether the liquid supply line is in communication, and when the plurality of supply valves are simultaneously closed, the liquid supply line is in a maintenance-ready state; a pre-filled bypass connected to the liquid supply line, the pre-filled bypass being connected to a chemical liquid supply source, the chemical liquid provided by the chemical liquid supply source being the same as that transported in the liquid supply line; a detection bypass connected to the liquid supply line, the detection bypass having a one-way exhaust valve and a detection unit, the detection unit detecting the chemical liquid in the liquid supply line, and the detection unit notifying or controlling the plurality of supply valves to be able to open when the liquid supply line is full of liquid; A chemical liquid supply system comprising:

2. 2. The chemical liquid supply system of claim 1, wherein the plurality of supply valves are opened sequentially.

3. 3. The chemical liquid supply system according to claim 2, wherein a plurality of said filtration units are provided in parallel, and said pre-filled bypass is connected to a parallel node of said plurality of said filtration units.

4. 4. The chemical liquid supply system of claim 1, further comprising a purge bypass connected to the liquid supply line, the purge bypass providing a purge gas before the pre-filled bypass communicates with the liquid supply line.

5. 5. The chemical liquid supply system of claim 4, wherein the chemical liquid supply system has at least one waste bypass connected to the liquid supply line, the waste bypass communicating with the liquid supply line when the liquid supply line is in the maintenance-enabled state.

6. 6. The chemical liquid supply system of claim 5, further comprising a sampling bypass connected to the liquid supply line and positioned after the filtration unit.

7. The chemical liquid supply system according to claim 1 , wherein the pre-filled bypass is connected to a stage preceding the filtration unit.

8. The chemical liquid delivery system of claim 7 , wherein the detection bypass is connected to the filtration unit.

9. 9. The chemical liquid supply system of claim 8, further comprising a sampling bypass connected to the liquid supply line and positioned after the filtration unit.

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