Substrate Processing Equipment

Abstract

One illustrative embodiment of the present invention provides a substrate processing device. The substrate processing device comprises a first chamber and a second chamber. The second chamber is disposed in the first chamber. Together with a mounting table, the second chamber defines a process space for processing a substrate placed on the mounting table. The second chamber has a temperature adjustment mechanism that is provided on a wall body constituting the second chamber and adjusts the temperature of the second chamber.

Description

[Technical Field]

[0001] SUMMARY OF THE INVENTION An exemplary embodiment of the present disclosure relates to a substrate processing apparatus. [Background technology]

[0002] Patent Document 1 discloses a substrate processing apparatus. This substrate processing apparatus includes a first chamber, a movable part that is vertically movable within the first chamber, and a second chamber that is held by the movable part within the first chamber and defines a processing space together with a substrate support. The second chamber includes a ceiling part that extends above the processing space. The ceiling part has multiple gas holes for supplying gas to the processing space. The ceiling part is in contact with the movable part, and the multiple gas holes in the ceiling part are connected to the multiple gas holes in the movable part. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-66828 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique that can improve the temperature adjustment function of a second chamber disposed within a first chamber. [Means for solving the problem]

[0005] In one exemplary embodiment, a substrate processing apparatus is provided. The substrate processing apparatus includes a first chamber and a second chamber. A mounting table for mounting a substrate is disposed in the first chamber. The second chamber is disposed within the first chamber. The second chamber, together with the mounting table, defines a process space for processing the substrate placed on the mounting table. The second chamber has a temperature adjustment mechanism provided in a wall constituting the second chamber and for adjusting the temperature of the second chamber. [Effects of the Invention]

[0006] According to one exemplary embodiment, it is possible to improve the temperature regulation function of the second chamber disposed within the first chamber. [Brief explanation of the drawings]

[0007] [Figure 1] 1 illustrates a substrate processing system according to an exemplary embodiment. [Figure 2] 1 is a schematic diagram of a transfer module of a substrate processing system according to an exemplary embodiment; [Figure 3] 1 is a diagram illustrating a substrate processing apparatus according to an exemplary embodiment; [Figure 4] 1 is a partially enlarged cross-sectional view of a substrate processing apparatus according to an exemplary embodiment; [Figure 5] FIG. 10 is a partially enlarged cross-sectional view of a substrate processing apparatus according to another exemplary embodiment. [Figure 6] FIG. 10 is a partially enlarged cross-sectional view of a substrate processing apparatus according to yet another exemplary embodiment. [Figure 7] FIG. 10 is a partially enlarged cross-sectional view of a substrate processing apparatus according to yet another exemplary embodiment. [Figure 8] FIG. 10 is a schematic view illustrating a supply port in a second chamber of a substrate processing apparatus according to yet another exemplary embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] Various exemplary embodiments are described below.

[0009] In one exemplary embodiment, a substrate processing apparatus is provided. The substrate processing apparatus includes a first chamber and a second chamber. A mounting table for mounting a substrate is disposed in the first chamber. The second chamber is disposed within the first chamber. The second chamber, together with the mounting table, defines a process space for processing the substrate placed on the mounting table. The second chamber has a temperature adjustment mechanism provided in a wall constituting the second chamber and for adjusting the temperature of the second chamber.

[0010] In the substrate processing apparatus, a temperature adjustment mechanism is provided on a wall of the second chamber, and the temperature of the second chamber is adjusted by the temperature adjustment mechanism. Therefore, the temperature adjustment function of the second chamber can be improved compared to when the temperature of the second chamber is adjusted by heat conduction from the outside, for example.

[0011] In one exemplary embodiment, the temperature adjustment mechanism may include a flow space formed inside the wall body and through which a heat medium flows along the extending direction of the wall body. In this configuration, the temperature of the second chamber can be adjusted by flowing the heat medium through the flow space.

[0012] In one exemplary embodiment, the temperature adjustment mechanism may include a heater provided inside or on the outer surface of the wall along the extending direction of the wall. In this configuration, the temperature of the heater can be adjusted to adjust the temperature of the second chamber.

[0013] In one exemplary embodiment, the temperature adjustment mechanism may include a flow space formed inside the wall body and through which a heat medium flows along the extension direction of the wall body, and a heater provided inside or on the outer surface of the wall body along the extension direction of the wall body. In this configuration, the temperature of the second chamber can be adjusted by both the flow of the heat medium through the flow space and the temperature adjustment of the heater.

[0014] In one exemplary embodiment, the substrate processing apparatus may further include a movable part for vertically moving the second chamber within the first chamber, and a bellows connected to the movable part and separating the space within the first chamber from the outside of the first chamber. The heat medium may be supplied to the flow space through the inside of the space defined by the bellows. This configuration makes it easy to ensure a heat medium supply path.

[0015] Various exemplary embodiments will be described in detail below with reference to the drawings, in which the same or equivalent parts are designated by the same reference numerals.

[0016] 1 is a diagram showing a substrate processing system having an inner chamber according to an exemplary embodiment, which includes process modules PM1 to PM6, a transfer module CTM, and a controller MC.

[0017] The substrate processing system PS may further include stages 2a-2d, containers 4a-4d, an aligner AN, load lock modules LL1 and LL2, and a transfer module TM. The number of stages, containers, and load lock modules in the substrate processing system PS may be any number greater than or equal to one. The number of process modules in the substrate processing system PS may be any number greater than or equal to one.

[0018] The stages 2a to 2d are arranged along one edge of the loader module LM. The containers 4a to 4d are mounted on the stages 2a to 2d, respectively. Each of the containers 4a to 4d is, for example, a container called a FOUP (Front Opening Unified Pod). Each of the containers 4a to 4d is configured to accommodate a substrate W therein.

[0019] The loader module LM has a chamber. The pressure in the chamber of the loader module LM is set to atmospheric pressure. The loader module LM has a transport device TU1. The transport device TU1 is, for example, a transport robot, and is controlled by the controller MC. The transport device TU1 is configured to transport a substrate W through the chamber of the loader module LM. The transport device TU1 can transport the substrate W between each of the containers 4a to 4d and the aligner AN, between the aligner AN and each of the load lock modules LL1 and LL2, and between each of the load lock modules LL1 and LL2 and each of the containers 4a to 4d. The aligner AN is connected to the loader module LM. The aligner AN is configured to adjust the position of the substrate W (calibrate the position).

[0020] Each of the load lock modules LL1 and LL2 is provided between the loader module LM and the transfer module TM. Each of the load lock modules LL1 and LL2 serves as a preliminary decompression chamber. Each of the load lock modules LL1 and LL2 is connected to the loader module LM via a gate valve. Furthermore, each of the load lock modules LL1 and LL2 is connected to the transfer module TM via a gate valve.

[0021] The transfer module TM has a transfer chamber TC that can be decompressed. The transfer module TM has a transfer apparatus TU2. The transfer apparatus TU2 is, for example, a transfer robot, and is controlled by a controller MC. The transfer apparatus TU2 is configured to transfer a substrate W via the transfer chamber TC. The transfer apparatus TU2 can transfer the substrate W between each of the load lock modules LL1, LL2 and each of the process modules PM1 to PM6, and between any two of the process modules PM1 to PM6.

[0022] Each of the process modules PM1 to PM6 is connected to the transfer module TM via a gate valve. Each of the process modules PM1 to PM6 is an apparatus configured to perform dedicated substrate processing. At least one of the process modules PM1 to PM6 is a substrate processing apparatus according to an exemplary embodiment described below.

[0023] The transfer module CTM includes a chamber and a transfer device. The transfer module CTM is controlled by a controller MC. The transfer module CTM includes the transfer device. The transfer device of the transfer module CTM is configured to transfer a second chamber provided in a first chamber of the substrate processing apparatus into the chamber of the transfer module CTM.

[0024] 2 is a diagram schematically illustrating a transfer module of a substrate processing system according to an exemplary embodiment. The transfer module CTM includes a chamber 110. The chamber 110 provides an internal space 112 and an internal space 114. The internal space 112 is provided above the internal space 114 and is separated from the internal space 114. A sidewall 110s of the chamber 110 provides an opening 110o that communicates with the internal space 112. The opening 110o can be opened and closed by a gate valve 116.

[0025] In one embodiment, a portion of the sidewall 110s has a dual structure formed from an inner wall 110i and an outer wall 110e. The inner wall 110i and the outer wall 110e define a space 110q therebetween. An opening 110o is formed in the inner wall 110i and the outer wall 110e. A gate valve 116 is provided along the inner wall 110i to open and close the opening 110o.

[0026] The transfer module CTM further includes a transfer device 120. The transfer device 120 is a transfer robot and includes an arm 120a. The transfer device 120 is provided in the internal space 112.

[0027] The transfer module CTM further includes an exhaust device 122. The exhaust device 122 is provided in the internal space 114. The exhaust device 122 is connected to the internal space 112 via a valve 124 and to the space 110q via a valve 126. The exhaust device 122 is configured to reduce the pressure in the internal space 112 and the space 110q.

[0028] The transport module CTM further includes a moving mechanism 130. The moving mechanism 130 includes a main body 132 and a plurality of wheels 134. The main body 132 incorporates a power source such as a battery, a power source, and a steering mechanism. The wheels 134 are rotated by the power source within the main body 132, and move the transport module CTM in a direction controlled by the steering mechanism within the main body 132. Note that the moving mechanism 130 may be a mechanism employing a type other than wheels, such as a walking type, as long as it is capable of moving the transport module CTM.

[0029] The transfer module CTM further includes a sensor 138 and a controller 140. The sensor 138 is attached to the outer wall of the chamber 110. The controller 140 is provided in the internal space 114. The sensor 138 senses the environment around the transfer module CTM and outputs the sensing result to the controller 140. The sensor 138 is, for example, an image sensor, and outputs an image of the environment around the transfer module CTM to the controller 140. The controller 140 may be a computer including a processor, a storage device such as a memory, and a communication unit. The controller 140 is configured to control each component of the transfer module CTM. The controller 140 controls the movement mechanism 130 to move the transfer module CTM using the sensing result of the sensor 138 to connect the transfer module CTM to the substrate processing apparatus 1. The controller 140 also controls the exhaust device 122 and the valves 124 and 126.

[0030] The controller MC is configured to control each part of the substrate processing system PS. The controller MC may be a computer equipped with a processor, a storage device, an input device, a display device, etc. The controller MC executes a control program stored in the storage device and controls each part of the substrate processing system PS based on the recipe data stored in the storage device.

[0031] Hereinafter, a substrate processing apparatus according to an exemplary embodiment will be described. FIG. 3 is a diagram schematically illustrating a substrate processing apparatus according to an exemplary embodiment. FIG. 4 is a partially enlarged cross-sectional view of a substrate processing apparatus according to an exemplary embodiment. The substrate processing apparatus 1 shown in FIGS. 3 and 4 is a capacitively coupled plasma processing apparatus. The substrate processing apparatus 1 includes a first chamber 10, a second chamber 20 (inner chamber), and a substrate support 30.

[0032] The first chamber 10 provides an internal space. The first chamber 10 is made of a metal such as aluminum. The first chamber 10 is electrically grounded. A corrosion-resistant film may be formed on the surface of the first chamber 10. The corrosion-resistant film may be made of a material such as aluminum oxide or yttrium oxide.

[0033] The first chamber 10 includes a sidewall 10s. The sidewall 10s has a substantially cylindrical shape. A central axis of the sidewall 10s extends vertically and is shown as an axis AX in FIG. 3. The sidewall 10s provides a passage 10p. The internal space of the first chamber 10 is connected to the internal space of the transfer chamber TC of the transfer module TM via the passage 10p. The passage 10p can be opened and closed by a gate valve 10g. The substrate W passes through the passage 10p when being transferred between the internal space of the first chamber 10 and the outside of the first chamber 10.

[0034] The side wall 10s further provides an opening 10o. The opening 10o has a size that allows the second chamber 20 to pass through. The internal space of the first chamber 10 can be connected to the internal space of the transfer module CTM through the opening 10o. The opening 10o can be opened and closed by a gate valve 10v.

[0035] In one embodiment, a portion of the sidewall 10s has a double structure formed of an inner wall 10i and an outer wall 10e. The inner wall 10i and the outer wall 10e provide a space 10q therebetween. An opening 10o is formed in the inner wall 10i and the outer wall 10e. A gate valve 10v is provided along the inner wall 10i to open and close the opening 10o.

[0036] The first chamber 10 may further include an upper portion 10u. The upper portion 10u extends from the upper end of the side wall 10s in a direction intersecting with the axis line AX. The upper portion 10u provides an opening in a region intersecting with the axis line AX.

[0037] The first chamber 10 further includes a movable part 10m. The movable part 10m is provided below the upper part 10u of the first chamber 10 and inside the side wall 10s. The movable part 10m is configured to be movable upward and downward within the first chamber 10.

[0038] The substrate processing apparatus 1 further includes a lift mechanism 12. The lift mechanism 12 is configured to move the movable part 10m upward and downward. The lift mechanism 12 includes a drive device 12d and a shaft 12s. The movable part 10m is fixed to the shaft 12s. The shaft 12s extends upward from the movable part 10m through an opening in the upper part 10u. The drive device 12d is provided outside the first chamber 10. The drive device 12d is configured to move the shaft 12s upward and downward. The drive device 12d may include, for example, a motor for moving the shaft 12s. The upward and downward movement of the shaft 12s causes the movable part 10m to move upward and downward.

[0039] The substrate processing apparatus 1 may further include a bellows 14. The bellows 14 is provided between the movable part 10m and the upper part 10u. The bellows 14 separates the internal space of the first chamber 10 from the outside of the first chamber 10. The lower end of the bellows 14 is fixed to the movable part 10m. The upper end of the bellows 14 is fixed to the upper part 10u.

[0040] In one embodiment, the movable part 10m may include a first member 10a and a second member 10b. The first member 10a and the second member 10b are fixed to each other. The first member 10a has a substantially disk shape. The first member 10a may constitute an upper electrode in the substrate processing apparatus 1. The second member 10b has a substantially cylindrical shape. The second member 10b extends along the outer periphery of the first member 10a and above the first member 10a. The lower end of the bellows 14 is fixed to the upper end of the second member 10b. The first member 10a and the second member 10b are made of a conductor such as aluminum. The first member 10a and the second member 10b may be electrically connected to the first chamber 10.

[0041] In one embodiment, the movable part 10m may form a shower head together with the second chamber 20. That is, the movable part 10m may form a part of a shower head that supplies gas to the processing space S, which will be described later. In this embodiment, the movable part 10m provides a gas diffusion chamber 10d and a plurality of gas holes 10h.

[0042] The gas diffusion chamber 10d may be provided in the first member 10a. A gas supply unit 16 is connected to the gas diffusion chamber 10d. The gas supply unit 16 is provided outside the first chamber 10. The gas supply unit 16 includes one or more gas sources used in the substrate processing apparatus 1, one or more flow controllers, and one or more valves. Each of the one or more gas sources is connected to the gas diffusion chamber 10d via a corresponding flow controller and a corresponding valve. A plurality of gas holes 10h extend downward from the gas diffusion chamber 10d.

[0043] The substrate support 30 (mounting table) is disposed within the first chamber 10 and below the movable part 10m. The substrate support 30 is configured to support a substrate W placed thereon. The substrate support 30 may be supported by a support part 31. The support part 31 has a substantially cylindrical shape. The support part 31 is formed from an insulator such as quartz. The support part 31 may extend upward from a bottom plate 32. The bottom plate 32 may be formed from a metal such as aluminum.

[0044] The substrate support 30 may include a lower electrode 34 and an electrostatic chuck 36. The lower electrode 34 has a substantially disk shape. The central axis of the lower electrode 34 substantially coincides with the axis AX. The lower electrode 34 is formed from a conductor such as aluminum. The lower electrode 34 has a flow path 34f therein. The flow path 34f extends, for example, in a spiral shape. The flow path 34f is connected to a chiller unit 35. The chiller unit 35 is provided outside the first chamber 10. The chiller unit 35 supplies a coolant to the flow path 34f. The coolant supplied to the flow path 34f is returned to the chiller unit 35.

[0045] The substrate processing apparatus 1 may further include a first high-frequency power supply 41 and a second high-frequency power supply 42. The first high-frequency power supply 41 is a power supply that generates a first high-frequency power. The first high-frequency power has a frequency suitable for generating plasma. The frequency of the first high-frequency power is, for example, 27 MHz or higher. The first high-frequency power supply 41 is electrically connected to the lower electrode 34 via a matching device 41m. The matching device 41m has a matching circuit for matching the impedance of the load side (lower electrode 34 side) of the first high-frequency power supply 41 to the output impedance of the first high-frequency power supply 41. Note that the first high-frequency power supply 41 may be connected to the upper electrode via the matching device 41m, instead of the lower electrode 34.

[0046] The second high frequency power supply 42 is a power supply that generates second high frequency power. The second high frequency power has a frequency suitable for attracting ions to the substrate W. The frequency of the second high frequency power is, for example, 13.56 MHz or less. The second high frequency power supply 42 is electrically connected to the lower electrode 34 via a matching device 42m. The matching device 42m has a matching circuit for matching the impedance of the load side (lower electrode 34 side) of the second high frequency power supply 42 to the output impedance of the second high frequency power supply 42.

[0047] The electrostatic chuck 36 is disposed on the lower electrode 34. The electrostatic chuck 36 includes a body and an electrode 36a. The body of the electrostatic chuck 36 has a substantially disc shape. The central axis of the electrostatic chuck 36 substantially coincides with the axis AX. The body of the electrostatic chuck 36 is formed from ceramic. The substrate W is placed on the upper surface of the body of the electrostatic chuck 36. The electrode 36a is a film formed from a conductor. The electrode 36a is disposed within the body of the electrostatic chuck 36. The electrode 36a is connected to a DC power supply 36d via a switch 36s. When a voltage from the DC power supply 36d is applied to the electrode 36a, an electrostatic attractive force is generated between the electrostatic chuck 36 and the substrate W. The generated electrostatic attractive force attracts the substrate W to the electrostatic chuck 36 and the substrate W is held by the electrostatic chuck 36. The substrate processing apparatus 1 may be provided with a gas line for supplying a heat transfer gas (for example, helium gas) to the gap between the electrostatic chuck 36 and the rear surface of the substrate W.

[0048] The substrate support 30 may support an edge ring ER disposed thereon. The substrate W is placed on the electrostatic chuck 36 within a region surrounded by the edge ring ER. The edge ring ER is made of, for example, silicon, quartz, or silicon carbide.

[0049] The substrate processing apparatus 1 may further include an insulating portion 37. The insulating portion 37 is made of an insulator such as quartz. The insulating portion 37 may have a generally cylindrical shape. The insulating portion 37 extends along the outer periphery of the lower electrode 34 and the outer periphery of the electrostatic chuck 36.

[0050] The substrate processing apparatus 1 may further include a conductor 38. The conductor 38 is made of a conductor such as aluminum. The conductor 38 may have a generally cylindrical shape. The conductor 38 is provided along the outer periphery of the substrate support 30. Specifically, the conductor 38 extends circumferentially outside the insulating portion 37 in the radial direction. The radial direction and the circumferential direction are directions based on the axis AX. The conductor 38 is connected to ground. In one example, the conductor 38 is connected to ground via the bottom plate 32 and the first chamber 10.

[0051] The substrate processing apparatus 1 may further include a cover ring 39. The cover ring 39 is made of an insulator such as quartz. The cover ring 39 has an annular shape. The cover ring 39 is provided on the insulating portion 37 and the conductor portion 38 so as to be located radially outside the region in which the edge ring ER is disposed.

[0052] The second chamber 20 is an inner chamber disposed within the first chamber 10 of the substrate processing apparatus 1 and configured to define a processing space S together with the substrate support 30. The processing space S is a space in which the substrate W is processed. The second chamber 20 is removable from the first chamber 10 and can be transported between the interior space of the first chamber 10 and the outside of the first chamber 10 via the opening 10o.

[0053] In one exemplary embodiment, the second chamber 20 includes a temperature adjustment mechanism for adjusting the temperature of the second chamber 20. The temperature adjustment mechanism may be provided on a wall 21 constituting the second chamber. For example, the wall 21 constituting the second chamber 20 includes a ceiling portion 22 and a peripheral wall portion 23. The wall 21 may be formed of a material with low electrical conductivity, such as Si or SiC. The wall 21 may also have a multilayer structure, and for example, the surface of the wall 21 may be covered with a material that suppresses particle generation (a low-contamination material). In this case, the surface material may be aluminum oxide, yttrium oxide, silicon dioxide (SiO), silicon (Si), silicon carbide (SiC), or the like. The substrate covered with the surface material may be aluminum (Al), tungsten (W), molybdenum (Mo), titanium (Ti), carbon, ceramics, silicon dioxide, silicon, silicon carbide, or the like.

[0054] The ceiling portion 22 is a portion of the wall body 21 that faces the substrate support 30. The ceiling portion 22 is, for example, disk-shaped and can be supported by the movable portion 10m while abutting against the lower surface of the movable portion 10m. The ceiling portion 22 provides a plurality of gas holes 20h. The plurality of gas holes 20h penetrate the ceiling portion 22 and open toward the processing space S. The plurality of gas holes 20h are respectively connected to the plurality of gas holes 10h. A contact member 25 is provided on the upper surface of the ceiling portion 22. The contact member 25 is disposed between the upper surface of the ceiling portion 22 and the lower surface of the movable portion 10m and electrically connects the movable portion 10m and the ceiling portion 22. The contact member 25 is formed of a material having a volume resistivity equal to or lower than the volume resistivity of the material constituting the outer surface of the wall body 21. In one example, the plurality of contact members 25 may be uniformly disposed in the circumferential direction around the axis AX. By providing the contact member 25, the wall body 21 is electrically connected to the grounded movable portion 10m, and a high frequency return path is formed.

[0055] The substrate processing apparatus 1 further includes a clamp 50 and a release mechanism 60 to releasably fix the ceiling portion 22 of the second chamber 20 to the first chamber 10. The clamp 50 releasably fixes the connecting member 28 of the second chamber 20 to the movable portion 10m of the first chamber 10. The release mechanism 60 is configured to release the fixation of the second chamber 20 by the clamp 50.

[0056] 4, in one embodiment, the clamp 50 includes a plurality of support portions 52 and a plurality of springs 54. The clamp 50 may further include a plate 56. Note that the number of support portions 52 and the number of springs 54 of the clamp 50 may each be one.

[0057] Each of the plurality of support portions 52 has a lower end 52b. The lower ends 52b are formed so that the ceiling portion 22 is suspended therefrom. A plurality of springs 54 are provided to bias the ceiling portion 22 against the movable portion 10m of the first chamber 10.

[0058] In one embodiment, the movable portion 10m of the first chamber 10 provides a cavity 10c. The cavity 10c may extend circumferentially around the axis AX. The cavity 10c is closed by a lid 58. The lid 58 is provided on the movable portion 10m of the first chamber 10 to close the cavity 10c. The movable portion 10m further provides a plurality of holes 10t. The holes 10t may be arranged at equal intervals around the axis AX. The holes 10t extend downward from the cavity 10c and open toward the ceiling portion 22. The ceiling portion 22 provides a plurality of recesses 20r. The recesses 20r are respectively connected to the holes 10t when the second chamber 20 is fixed to the first chamber 10.

[0059] In one embodiment, each of the plurality of support portions 52 is rod-shaped. The lower end 52b of each of the plurality of support portions 52 protrudes horizontally. The bottom of each of the plurality of recesses 20r includes an extension 20e. The extension 20e is formed so that the lower end 52b of a corresponding one of the plurality of support portions 52 can be positioned therein. In one example, each of the plurality of support portions 52 may be a screw, and the lower end 52b of each of the plurality of support portions 52 may be a screw head.

[0060] The plurality of supports 52 extend downward from the cavity 10c through the plurality of holes 10t. When the ceiling portion 22 is suspended from the plurality of supports 52, the lower ends 52b of the plurality of supports 52 are respectively disposed within the plurality of recesses 20r and their extensions 20e.

[0061] The upper ends of the plurality of support portions 52 are fixed to a plate 56 within the cavity 10c. The plurality of springs 54 are disposed within the cavity 10c. The plurality of springs 54 are disposed between the plate 56 and a surface of the movable portion 10m that defines the cavity 10c from below. In one embodiment, each of the plurality of springs 54 is a coil spring. The plurality of springs 54 are disposed so as to surround the plurality of support portions 52 within the cavity 10c.

[0062] In one embodiment, the release mechanism 60 includes an air supplier. The air supplier applies air pressure to separate the lower ends 52 b of the support portions 52 from the second chamber 20 to release the ceiling portion 22 from the clamp 50. The air supplier of the release mechanism 60 can supply air to the gap between the lid body 58 and the plate 56. When air is supplied to the gap between the lid body 58 and the plate 56, the plate 56 and the support portions 52 move downward, and the lower ends 52 b of the support portions 52 are separated from the second chamber 20. In other words, the ceiling portion 22 is released from the clamp 50. With the ceiling portion 22 released from the clamp 50, the second chamber 20 is released from the first chamber 10, and the second chamber 20 can be transported from the interior space of the first chamber 10 to the outside of the first chamber 10.

[0063] The peripheral wall portion 23 is formed continuously with the ceiling portion 22 and is configured to surround the substrate support 30. For example, the peripheral wall portion 23 includes a side portion 23a and a bottom portion 23b. The side portion 23a is cylindrical. The upper end of the side portion 23a is connected to the periphery of the ceiling portion 22. The bottom portion 23b is annular. The outer edge of the bottom portion 23b is connected to the lower end of the side portion 23a. When viewed from the direction along the axis AX, the outer edge of the bottom portion 23b follows the outer edge of the side portion 23a, and the inner edge of the bottom portion 23b follows the outer edge of the conductor portion 38.

[0064] The bottom portion 23b may be electrically connected to a grounded portion that is provided to surround the substrate support 30. That is, the bottom portion 23b may be connected to the ground. In one exemplary embodiment, the bottom portion 23b is electrically connected to a conductor portion 38 that serves as the ground portion. In the illustrated example, the bottom portion 23b is electrically connected to the conductor portion 38 by a contact 40 provided in the substrate processing apparatus 1. This forms a high-frequency return path.

[0065] The contact 40 is electrically connected to the conductor portion 38. The bottom portion 23b abuts against the contact 40 while defining the processing space S together with the substrate support 30. In one embodiment, the contact 40 is disposed radially outside the cover ring 39 and extends upward from the conductor portion 38.

[0066] The contact 40 may be configured to resiliently contact the bottom portion 23b. As shown in FIG. 4, the contact 40 may have a spring 40s. The contact 40 may further have a contact portion 40c. The spring 40s and the contact portion 40c are conductive. The lower end of the spring 40s is fixed to the conductor portion 38. The spring 40s extends upward from the conductor portion 38. The contact portion 40c is fixed to the upper end of the spring 40s. The contact portion 40c is a portion that contacts the bottom portion 23b. In the illustrated example, a groove that accommodates the contact portion 40c is provided in the bottom portion 23b.

[0067] The temperature adjustment mechanism includes a flow space 20a formed inside the wall 21. The flow space 20a is configured to circulate a refrigerant (heat medium) along the extending direction of the wall 21. The extending direction of the wall 21 may be the direction of expansion of the inner or outer surface of the wall 21. In one exemplary embodiment, in the second chamber 20, the flow space 20a is formed in the ceiling portion 22 along the extending direction of the ceiling portion 22. The flow space 20a in the ceiling portion 22 has a substantially circular plate shape. The flow space 20a is formed in the side portion 23a along the extending direction of the side portion 23a. The flow space 20a in the side portion 23a has a substantially cylindrical shape. The flow space 20a is formed in the bottom portion 23b along the extending direction of the bottom portion 23b. The flow space 20a in the bottom portion 23b has a substantially annular shape.

[0068] As an example, the wall 21 of the second chamber 20 may have a double structure made up of an inner wall 21a and an outer wall 21b so that a flow space 20a is formed therein. In the ceiling portion 22, the flow space 20a extends while avoiding the gas holes 20h. Furthermore, a vent hole that connects the inside and outside of the second chamber 20 may be formed in the peripheral wall portion 23 of the second chamber 20. In this case, the flow space 20a may extend while avoiding the vent hole. Note that the flow space 20a in the illustrated example is a space that expands along the extension direction of the wall 21, but the flow space 20a may also be formed by a collection of tubular spaces.

[0069] The second chamber 20 has a supply port 20b for supplying the refrigerant to the flow space 20a and a discharge port 20c for discharging the refrigerant from the flow space 20a. The supply port 20b communicates with the flow space 20a and may be exposed to the outside of the second chamber 20. In one exemplary embodiment, when the second chamber 20 is supported by the movable part 10m, the supply port 20b of the second chamber 20 is connected to a medium flow path 150a provided in the movable part 10m. One or more supply ports 20b may be provided in the second chamber 20. For example, a plurality of supply ports 20b may be provided so as to be equally spaced circumferentially around the axis AX. In the illustrated example, the supply port 20b is provided at a position farther from the axis AX than the contact member 25 in the radial direction centered on the axis AX. In one example, the supply port 20b of the second chamber 20 and the medium flow path 150a provided in the movable part 10m may have corresponding fluid couplings (quick joints) and may be connected to each other by the fluid couplings.

[0070] The outlet 20c communicates with the flow space 20a and may be exposed to the outside of the second chamber 20. In one exemplary embodiment, when the bottom 23b of the second chamber 20 is in contact with the contact 40, the outlet 20c of the second chamber 20 is connected to the medium flow path 150b provided in the conductor portion 38. One or more outlets 20c may be provided in the second chamber 20. For example, a plurality of outlets 20c may be provided so as to be equally spaced circumferentially around the axis AX. In the illustrated example, the outlet 20c is provided at a position farther from the axis AX than the contact 40 in the radial direction around the axis AX. In one example, the outlet 20c of the second chamber 20 and the medium flow path 150b provided in the conductor portion 38 may have corresponding fluid couplings and communicate with each other via the fluid couplings.

[0071] The medium flow path 150a connected to the supply port 20b and the medium flow path 150b connected to the discharge port 20c are connected to a chiller unit 150 that controls the temperature of the refrigerant and circulates the refrigerant. For example, the medium flow path 150a is connected to the chiller unit 150 disposed outside the first chamber 10 via the inside of the space formed by the bellows 14. The chiller unit 150 supplies the refrigerant to the supply port 20b via the medium flow path 150a. The chiller unit 150 collects the refrigerant from the discharge port 20c via the medium flow path 150b.

[0072] The wall 21 of the second chamber 20 may have an air vent 20d. The air vent 20d connects the inside and outside of the second chamber 20. In one exemplary embodiment, the air vent 20d does not connect to the flow space 20a. That is, the air vent 20d and the flow space 20a are separated from each other by a partition wall 21c. The partition wall 21c has a cylindrical shape to define the air vent 20d and connects the inner wall 21a and the outer wall 21b.

[0073] The substrate processing apparatus 1 may further include an exhaust device 70. The exhaust device 70 includes a pressure regulator such as an automatic pressure control valve and a decompression pump such as a turbomolecular pump. The exhaust device 70 is connected to the bottom of the first chamber 10 below the bottom portion 23b.

[0074] A method for removing the second chamber 20 will be described. The second chamber 20 can be removed from the first chamber 10, for example, for maintenance, and transferred from the internal space of the first chamber 10 to the internal space of the chamber 110 of the transfer module CTM. The operation of the substrate processing apparatus 1 may be controlled by the controller MC. The operation of the transfer module CTM may be controlled by the controller 140. The controller 140 may control the transfer module CTM based on information such as commands transmitted from the controller MC.

[0075] In one example, first, the transfer module CTM is moved, and the chamber 110 of the transfer module CTM is connected to the first chamber 10 of the substrate processing apparatus 1. When the chamber 110 is connected to the first chamber 10, the sidewall 10s, the gate valve 10v, the sidewall 110s, and the gate valve 10v define a sealed space. The sealed space includes the space 10q and the space 110q. The pressure of this sealed space is reduced by the exhaust device 122. At the same time, the pressure of the internal space 112 of the chamber 110 of the transfer module CTM is also reduced by the exhaust device 122.

[0076] Next, the gate valves 10v and 116 are moved to connect the internal space of the first chamber 10 with the internal space 112 of the chamber 110 of the transfer module CTM. Next, the lift mechanism 12 moves the movable part 10m and the second chamber 20 upwardly away from the substrate support 30 within the first chamber 10. Next, the arm 120a of the transfer device 120 enters the internal space of the first chamber 10 so as to extend below the second chamber 20. The movable part 10m and the second chamber 20 are moved downward by the lift mechanism 12, and the second chamber 20 is placed on the arm 120a. Next, the release mechanism 60 releases the second chamber 20 from being fixed by the clamp 50. Next, the transfer device 120 moves the second chamber 20 horizontally, causing the lower ends 52b of the multiple supports 52 to retract from the extension part 20e. Next, the movable part 10m is moved upward by the lift mechanism 12 and separated from the second chamber 20. As a result, the lower end 52b of the support part 52 moves to the outside of the recessed part 20r. Next, the second chamber 20 is moved by the arm 120a of the transfer device 120 from the internal space of the first chamber 10 to the internal space 112 of the chamber 110 of the transfer module CTM via the openings 10o and 110o. Then, the gate valves 10v and 116 are moved to close the openings 10o and 110o.

[0077] 5 is a cross-sectional view illustrating a second chamber according to another exemplary embodiment. Configurations not specifically described below or omitted from the drawings may be similar to those of the second chamber 20 illustrated in FIG. 4 and the like. The second chamber 220 in one exemplary embodiment includes, as a temperature adjustment mechanism, a heater 220a provided inside the wall 221 along the extension direction of the wall 221. The wall 221 constituting the second chamber 220 includes a ceiling portion 22 and a peripheral wall portion 23, similar to the second chamber 20.

[0078] The heater 220a is arranged along the extension direction of the wall 221 so as to heat the wall 221 evenly. In one exemplary embodiment of the second chamber 220, the heater 220a is formed in the ceiling portion 22 along the extension direction of the ceiling portion 22. The heater 220a is formed in the side portion 23a along the extension direction of the side portion 23a. The heater 220a is formed in the bottom portion 23b along the extension direction of the bottom portion 23b. As an example, the wall 221 of the second chamber 220 may have a double structure made up of an inner wall 21a and an outer wall 21b so that the heater 220a is arranged inside. In the ceiling portion 22, the heater 220a extends while avoiding the gas holes 20h. Furthermore, a vent hole communicating the inside and outside of the second chamber 220 may be formed in the peripheral wall portion 23 of the second chamber 220. In this case, the heater 220a extends so as to avoid the air vents. In one exemplary embodiment, the heater 220a may be an electric heating element that generates heat when electricity is applied. For example, the heater 220a may be configured with an electric heating wire arranged in a planar (plate) shape. Note that the wall 21 of the second chamber 220 may have an air vent 20d, similar to the second chamber 20.

[0079] The second chamber 220 has electrical contacts 220b and 220c for energizing the heater 220a. The electrical contacts 220b and 220c are electrically connected to the heater 220a and may be exposed to the outside of the second chamber 220. In one exemplary embodiment, when the second chamber 220 is supported by the movable part 10m, the electrical contact 220b of the second chamber 220 is connected to an electrical wiring 250a provided on the movable part 10m. One or more electrical contacts 220b may be provided in the second chamber 220. For example, a plurality of electrical contacts 220b may be provided so as to be equally spaced circumferentially around the axis AX. In the illustrated example, the electrical contact 220b is provided at a position farther from the axis AX than the contact member 25 in the radial direction centered on the axis AX.

[0080] In one example, the electrical contact 220b of the second chamber 220 and the electrical wiring 250a provided on the movable part 10m may have corresponding power terminals, and may be electrically connected to each other through the power terminals. The power terminals may be a press-fit connector, a socket connector, or the like.

[0081] Furthermore, when the bottom 23b of the second chamber 220 is in contact with the contact 40, the electrical contact 220c is connected to the electrical wiring 250b provided on the conductor 38. One or more electrical contacts 220c may be provided in the second chamber 220. For example, a plurality of electrical contacts 220c may be provided so as to be equally spaced apart in the circumferential direction centered on the axis AX. In the illustrated example, the electrical contact 220c is provided at a position farther from the axis AX than the contact 40 in the radial direction centered on the axis AX.

[0082] In one example, the electrical contact 220c of the second chamber 220 and the electrical wiring 250b provided on the conductor portion 38 may have corresponding power terminals, and may be electrically connected to each other via the power terminals. The electrical wiring 250a connected to the electrical contact 220b and the electrical wiring 250b connected to the electrical contact 220c are connected to a power source 250. The heater 220a generates heat using power from the power source 250. The power output from the power source 250 may be controlled by a control unit MC. In the second chamber 220 having the heater 220a as a temperature adjustment mechanism, the entire second chamber 220 can be heated evenly by controlling the temperature of the heater 220a.

[0083] FIG. 6 is a cross-sectional view illustrating a second chamber according to yet another exemplary embodiment. The second chamber 320 shown in FIG. 6 includes a flow space 20a through which a refrigerant flows and a heater 220a as a temperature adjustment mechanism. The wall 321 constituting the second chamber 320 includes a ceiling portion 22 and a peripheral wall portion 23, similar to the second chamber 20. In one exemplary embodiment, the heater 220a and the flow space 20a are provided inside the wall 321. The heater 220a is embedded inside the flow space 20a. That is, the heater 220a is provided to surround the processing space S formed by the second chamber 320, and the flow space 20a is provided to surround the heater 220a and the processing space S. The second chamber 320 having the heater 220a and the flow space 20a as a temperature adjustment mechanism can uniformly heat or cool the entire second chamber 220. Furthermore, since the heater 220a is disposed inside the flow space 20a, the heat from the heater 220a is likely to act on the processing space S. Note that, like the second chamber 20, the wall 321 of the second chamber 320 may have an air vent 20d.

[0084] FIG. 7 is a cross-sectional view illustrating a second chamber according to yet another exemplary embodiment. The second chamber 420 shown in FIG. 7 includes a heater 420a that is heated by induction heating. In one exemplary embodiment, the second chamber 420 includes a heater 420a provided inside a wall 421 along the extension direction of the wall 421 as a temperature adjustment mechanism. The heater 420a is arranged along the extension direction of the wall 421 so as to heat the wall 421 evenly. As an example, the wall 421 of the second chamber 420 may have a double structure consisting of an inner wall and an outer wall so that the heater is arranged inside. The heater 420a is made of a conductor. For example, the heater 420a may be a plate-shaped conductor or an electric heating element similar to the heater 220a. The wall 421 of the second chamber 420 may have an air vent similar to the air vent 20d formed in the second chamber 20.

[0085] The substrate processing apparatus 1 has a ring-shaped coil (induction heating coil) for applying a magnetic field to the heater 420a. The substrate processing apparatus 1 in the illustrated example has a first coil 430 and a second coil 431. The first coil 430 and the second coil 431 are connected to an AC power supply (not shown). The power supply may be controllable by a control unit MC. The first coil 430 is disposed above the second chamber 420 and outside the first chamber 10. The second coil 431 is disposed below the second chamber 420 and outside the first chamber 10. When viewed along the axis AX, the second chamber 420 is disposed inside the first coil 430 and the second coil 431. The directions of the currents flowing through the first coil 430 and the second coil 431 may be the same so that the magnetic field lines generated by the first coil 430 and the second coil 431 do not cancel each other out. The substrate processing apparatus 1 may have only the first coil 430 or only the second coil 431 as a coil for heating the heater 420a. In a configuration in which the heater 420a is heated by an induction heating method, no wiring is required to energize the heater 420a.

[0086] FIG. 8 is a schematic diagram illustrating a supply port in a second chamber of a substrate processing apparatus according to yet another exemplary embodiment. FIG. 8 is a schematic plan view of the ceiling portion 22 constituting the wall body 21, viewed from above, illustrating the configuration of another exemplary embodiment of the supply port 20b and contact member 25 provided in the second chamber 20. As shown in FIG. 8, the supply ports 20b may each have an arc shape and be arranged on a circumference centered on the axis AX. Similarly, the contact members 25 may each have an arc shape and be arranged on a circumference centered on the axis AX. In the illustrated example, the contact members 25 are arranged radially inward of the supply ports 20b around the axis AX. For example, a sealing member such as an O-ring may seal the gap between the supply port 20b and the medium flow path 150a. Note that multiple supply ports 20b arranged on a circumference may be connected to each other to form a single annular supply port. Similarly, multiple contact members 25 arranged on a circumference may be connected to each other to form a single annular contact member. Furthermore, the electrical contacts 220b and 220c provided in the second chamber 220 may also be arranged on the circumference in an arc shape, or may be formed in an annular shape.

[0087] As described above, in one exemplary embodiment, a substrate processing apparatus 1 is provided. The substrate processing apparatus 1 includes a first chamber 10 and a second chamber 20. A substrate support 30 for placing a substrate W thereon is disposed in the first chamber 10. The second chamber 20, together with the substrate support 30, defines a processing space for processing the substrate W placed on the substrate support 30. The second chamber 20 has a temperature adjustment mechanism (e.g., a flow space 20a) provided in a wall 21 that constitutes the second chamber 20 and that adjusts the temperature of the second chamber 20.

[0088] For example, when the temperature of the second chamber is adjusted by heat conduction between the second chamber and the movable part 10m that supports the second chamber, the accuracy of the temperature adjustment of the second chamber decreases the farther the second chamber is from the movable part. In one exemplary embodiment, the substrate processing apparatus 1 is provided with a temperature adjustment mechanism (flow space 20a, heater 220a, heater 420a) in the wall that constitutes the second chamber, and this temperature adjustment mechanism adjusts the temperature of the second chamber. Therefore, the temperature adjustment function of the second chamber can be improved compared to when the temperature of the second chamber is adjusted by heat conduction from the outside.

[0089] In one exemplary embodiment, the temperature adjustment mechanism may include a flow space 20a formed inside the wall 21 and through which a heat transfer medium (refrigerant) flows along the extension direction of the wall 21. In this configuration, the temperature of the second chamber 20 can be adjusted by circulating the heat transfer medium through the flow space 20a. Because the flow space 20a is formed inside the wall 21, the temperature of the wall 21 can be adjusted evenly.

[0090] In one exemplary embodiment, the temperature adjustment mechanism may include a heater 220a provided inside the wall 221 along the extension direction of the wall 221. In this configuration, the temperature of the second chamber 220 can be adjusted by adjusting the temperature of the heater 220a. Because the heater 220a is formed inside the wall 221, the temperature of the wall 221 can be adjusted evenly.

[0091] In one exemplary embodiment, the temperature adjustment mechanism may include a flow space 20a formed inside the wall 321 and allowing a heat medium to flow along the extension direction of the wall 321, and a heater 220a provided inside the wall 321 along the extension direction of the wall 321. In this configuration, the temperature of the second chamber 320 can be adjusted by both the flow of the heat medium through the flow space 20a and the temperature adjustment by the heater 220a.

[0092] In one exemplary embodiment, the substrate processing apparatus 1 may include a movable part 10m for moving the second chamber 20 up and down within the first chamber 10, and a bellows 14 connected to the movable part 10m and separating the space within the first chamber 10 from the outside of the first chamber 10. The heat medium may be supplied to the flow space 20a through the inside of the space formed by the bellows 14. With this configuration, a supply path for the heat medium can be easily secured.

[0093] Although various exemplary embodiments have been described above, the present invention is not limited to the above-described exemplary embodiments, and various additions, omissions, substitutions, and modifications may be made. Furthermore, elements in different embodiments may be combined to form other embodiments.

[0094] For example, in other embodiments, the substrate processing apparatus may be another type of plasma processing apparatus, such as an inductively coupled plasma processing apparatus, an electron cyclotron resonance (ECR) plasma processing apparatus, or a plasma processing apparatus that generates plasma using microwaves. In still other embodiments, the substrate processing apparatus may be a substrate processing apparatus configured to perform substrate processing other than plasma processing.

[0095] Furthermore, although the embodiment in which the second chamber is supported by the clamp 50 has been shown, for example, a protrusion that protrudes upward may be provided on the second chamber, and the protrusion may be supported by the movable part 10m. Furthermore, the embodiment in which the contact 40 is in electrical contact with the second member has been shown, for example, the contact may be formed on the bottom part 23b of the second chamber 20, and a recess for accommodating the contact may be formed in the conductor part 38.

[0096] In addition, although the example in which the medium flow path 150a connecting the chiller unit 150 to the supply port 20b of the flow space 20a passes through the inside of the space formed by the bellows has been shown, the configuration of the flow path is not limited to this. For example, two bellows with different diameters may be arranged concentrically, and the space formed between the bellows may be used as a path for the refrigerant.

[0097] Furthermore, although an example has been shown in which the movable part 10m and the second chamber 20 are electrically connected by the contact member 25, for example, the clamp 50 may function as the contact member.

[0098] 6 shows an example in which the heater is disposed inside the flow space, but the heater may be disposed outside the flow space. Also, an example in which the heater is provided inside the wall as a temperature adjustment mechanism is shown, but the location of the heater is not particularly limited. The heater may be provided on the outer surface (external) of the wall as long as it can uniformly heat the second chamber.

[0099] From the foregoing, it will be understood that various embodiments of the present disclosure have been described herein for purposes of illustration, and that various modifications may be made without departing from the scope and spirit of the present disclosure. Accordingly, the various embodiments disclosed herein are not intended to be limiting, with the true scope and spirit being indicated by the appended claims. [Explanation of symbols]

[0100] 1...substrate processing apparatus, 10...first chamber, 20...second chamber (inner chamber), 20a...flow space (temperature adjustment mechanism), 21...wall, 30...substrate support (mounting table), 38...conductor portion (grounding portion), 220a...heater (temperature adjustment mechanism), W...substrate.

Claims

1. a first chamber in which a stage for placing a substrate is disposed; a second chamber disposed within the first chamber and defining, together with the stage, a processing space for processing the substrate placed on the stage; a clamp releasably securing the second chamber to the first chamber; a release mechanism configured to release the clamp from securing the second chamber; The second chamber comprises: a wall body including a peripheral wall portion surrounding the mounting table; a temperature adjustment mechanism provided on the wall and adjusting the temperature of the second chamber; The first chamber comprises: a movable part configured to be movable upward and downward; a lift mechanism configured to move the movable part upward and downward, The second chamber is releasably fixed to the movable part by the clamp.

2. The substrate processing apparatus according to claim 1 , wherein the temperature adjustment mechanism includes a circulation space formed inside the wall body and through which a heat medium flows along an extending direction of the wall body.

3. The substrate processing apparatus according to claim 1 , wherein the temperature adjustment mechanism includes a heater provided inside or on an outer surface of the wall along an extending direction of the wall.

4. 2. The substrate processing apparatus of claim 1, wherein the temperature adjustment mechanism includes a circulation space formed inside the wall body to circulate a heat medium along the extension direction of the wall body, and a heater provided inside or on an outer surface of the wall body along the extension direction of the wall body.

5. a movable part for moving the second chamber up and down within the first chamber; and a bellows connected to the movable part for separating a space within the first chamber from an outside of the first chamber, The substrate processing apparatus according to claim 2 , wherein the heat medium is supplied to the flow space through an inside of a space formed by the bellows.

6. The substrate processing apparatus of claim 1 , wherein the second chamber includes a ceiling portion extending above the processing space.

7. the second chamber includes a ceiling portion extending above the processing space; The substrate processing apparatus according to claim 1 , wherein the clamp releasably fixes the ceiling portion to the movable portion.

8. the second chamber includes a ceiling portion extending above the processing space; The substrate processing apparatus according to claim 2 , wherein the temperature adjustment mechanism further includes a circulation space formed inside the ceiling portion and circulating a heat medium along an extending direction of the ceiling portion.

9. the second chamber includes a ceiling portion extending above the processing space; The substrate processing apparatus according to claim 3 , wherein the temperature adjustment mechanism further includes a heater provided inside or on an outer surface of the ceiling portion along an extending direction of the ceiling portion.

10. The substrate processing apparatus of claim 6 , wherein the ceiling portion includes a showerhead.

11. The substrate processing apparatus of claim 6 , wherein the ceiling portion includes an upper electrode.

12. An inner chamber assembly provided in a chamber of a substrate processing apparatus, comprising: the chamber includes a movable part configured to be movable upward and downward, and a lift mechanism configured to move the movable part upward and downward, and a mounting table for mounting a substrate thereon is disposed in the chamber; the inner chamber assembly includes a connecting member connected to a clamp that releasably secures the inner chamber assembly to the movable portion of the chamber; an inner chamber assembly having a temperature adjustment mechanism provided on a wall including a peripheral wall portion surrounding the mounting table, for adjusting the temperature of the wall;

13. The inner chamber assembly according to claim 12 , further comprising a ceiling portion facing the stage.

14. The inner chamber assembly according to claim 12 , wherein the temperature adjustment mechanism includes a flow space formed inside the wall body and allowing a heat medium to flow along an extending direction of the wall body.

15. The inner chamber assembly according to claim 12 , wherein the temperature adjustment mechanism includes a heater provided inside or on an outer surface of the wall along an extension direction of the wall.

16. 13. The inner chamber assembly of claim 12, wherein the temperature adjustment mechanism includes a flow space formed inside the wall body to allow a heat medium to flow along the extension direction of the wall body, and a heater provided inside or on the outer surface of the wall body along the extension direction of the wall body.

17. the inner chamber assembly includes a ceiling portion facing the stage; The inner chamber assembly according to claim 14 , wherein the temperature adjustment mechanism further includes a flow space formed inside the ceiling portion and allowing a heat medium to flow along an extension direction of the ceiling portion.

18. the inner chamber assembly includes a ceiling portion facing the stage; The inner chamber assembly according to claim 15 , wherein the temperature adjustment mechanism further includes a heater provided inside or on an outer surface of the ceiling portion along an extension direction of the ceiling portion.

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