Particle Counter

The particle counter adjusts optical path and light conditions using filters and beam splitters to ensure accurate counting by matching irradiation light to the characteristics of each sample fluid and particle type, addressing inaccuracies in existing multi-flow cell counters.

JP7798562B2Active Publication Date: 2026-01-14RION COMPANY
View PDF 8 Cites 0 Cited by

Patent Information

Application Number
JP2021211860
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2021-12-27
Publication Date
2026-01-14
Estimated Expiration
2041-12-27

AI Technical Summary

Technical Problem

Existing particle counters using a common light source for different sample fluids and particles may produce inaccurate counting results due to mismatched irradiation light conditions, which can be too strong or too weak for certain samples, leading to unreliable particle counting.

Method used

A particle counter with a multi-flow cell system that adjusts the optical path and irradiation light conditions, such as intensity, wavelength, and polarization, using optical devices like filters and beam splitters, to match the characteristics of each sample fluid and particle type, ensuring accurate counting.

Benefits of technology

The system provides reliable and convenient particle counting by optimizing irradiation light conditions for each flow path, preventing defects in counting results and maintaining high reliability across varying sample fluids and particles.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure 0007798562000001
    Figure 0007798562000001
  • Figure 0007798562000002
    Figure 0007798562000002
  • Figure 0007798562000003
    Figure 0007798562000003
Patent Text Reader

Abstract

To provide a particle counter with improved convenience.SOLUTION: A particle counter 1 that counts particles contained in a sample fluid flowing in a channel using irradiation light La, includes: a multi-flow cell 80 having a plurality of flow cells 10a-10j; an X-axis actuator 62 for adjusting the position of the optical path of the irradiation light La in accordance with selected flow cells 10a to 10j for the multi-flow cell 80; and adjusting units 100, 200 and 300 for adjusting the conditions of the irradiation light La irradiated into channels of the selected flow cells 10a to 10j.SELECTED DRAWING: Figure 1
Need to check novelty before this filing date? Find Prior Art

Description

[Technical Field]

[0001] The present invention relates to a particle counter that counts the number of particles contained in a sample fluid. [Background technology]

[0002] One example of this type of counting technology is a multi-flow cell particle counter (see, for example, Patent Document 1). This device is characterized by a movable optical system that forms an optical path from a fixed multi-flow cell until light emitted from a common light source is irradiated onto each flow cell (inside the flow path). This prevents excessive load from being placed on the piping connected to each flow cell, providing a significant advantage in that it can reliably prevent loosening or cracks from occurring, resulting in leakage of the sample fluid. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2020-118549 Summary of the Invention [Problem to be solved by the invention]

[0004] Furthermore, there is a demand for greater convenience for this type of particle counter. For example, although a common light source is used for the optical system, the appropriate irradiation light conditions may differ depending on the sample fluid (chemical solution) and type of particle flowing through the flow cell. Therefore, there is a demand for the ability to use appropriate irradiation light conditions for each sample fluid (or for each flow cell for which the light path position is adjusted, in the case of a multi-flow cell). This is based on the concern that if irradiation light with the same conditions is used for all sample fluids and particles, the power of the irradiation light may be too strong for some counting target particles (selected flow cells, in the case of a multi-flow cell) and for the sample fluid or the particle itself, or conversely, the power of the irradiation light may be too weak for some counting targets, which could result in inaccurate particle counting results.

[0005] Therefore, the present invention provides a particle counter that is more convenient to use. [Means for solving the problem]

[0006] In order to solve the above problems, the present invention employs the following solutions. Note that the following words in parentheses are merely examples, and the present invention is not limited thereto.

[0007] [First Invention] The present invention provides a particle counter. The particle counter counts particles contained in a sample fluid flowing through a flow path using irradiation light irradiated into the flow path, and includes a flow cell. The flow cell has a flow path, through which a sample fluid (chemical solution) flows via connecting piping or the like. Particles are measured for each particle size by aligning the optical path (optical axis) of the irradiation light within the flow path, and based on the intensity of light emitted from particles passing through a detection region within the flow path. The particle counter also includes a condition adjustment means. As an example, the condition adjustment means can adjust the conditions (e.g., power, wavelength, density distribution, polarization state, etc.) of the irradiation light irradiated into the flow path.

[0008] This allows the particle counter to be used after adjusting the irradiation light conditions to suit the sample fluid flowing in the flow path and the characteristics of the particles, thereby reliably preventing defects in the counting results and maintaining a high level of reliability in the counting results.

[0009] [Second Invention] The present invention also provides a particle counter. The particle counter counts particles contained in a sample fluid flowing through a flow path using irradiation light irradiated into the flow path, and includes a multi-flow cell. The multi-flow cell, for example, has multiple flow paths, and a sample fluid (chemical solution) flows through each flow path via connecting piping or the like. The particle count is performed for each particle size by adjusting the position of the optical path (optical axis) of the irradiation light within the flow path selected to be counted, based on the intensity of the emitted light generated from particles passing through a detection region within the flow path.

[0010] The particle counter includes a position adjusting means. The position adjusting means adjusts the position of the optical path of the irradiated light relative to the multi-flow cell to match the flow path selected from among the plurality of flow paths as described above. The particle counter also includes a condition adjusting means. As an example, the condition adjusting means can adjust the conditions (e.g., power, wavelength, density distribution, polarization state, etc.) of the irradiated light irradiated into the flow path when the position of the optical path is adjusted to match the selected flow path.

[0011] This allows the particle counting device to be used after adjusting the irradiation light conditions to suit the characteristics of the sample fluid and particles flowing in the flow path selected for counting, thereby reliably preventing defects in the counting results and maintaining a high level of reliability in the counting results.

[0012] The condition adjusting means includes an optical device. The optical device can be composed of, for example, an optical filter, a beam splitter, etc., and by being arranged on the optical path, the intensity of the irradiated light emitted from the light source can be adjusted as desired. This makes it possible to adjust the condition of the irradiated light to an intensity that matches the characteristics of the sample fluid or particles flowing in each flow path, even if a common light source is used. The optical filter may be an ND filter, a polarizing filter, or other type of optical filter.

[0013] When adjusting the intensity of the irradiated light using an optical device, for example, if the characteristics of the sample fluid or particles flowing through each flow path are known, an optical device capable of optimally adjusting the intensity of the irradiated light to suit each flow path can be prepared for each flow path. The optical device is preferably disposed on an optical path whose position is adjusted by a position adjustment means. The optical device may use only an optical filter, only a beam splitter, or both an optical filter and a beam splitter. Furthermore, if the optical filter or beam splitter is an individual product device, it can be used individually or in combination with multiple products.

[0014] This allows the intensity of the irradiated light to be adjusted by the optical device simply by adjusting the position of the light path to the flow path selected as the target, thereby maintaining a high level of convenience for the particle counting device.

[0015] The optical device may be disposed on only the optical paths corresponding to some of the multiple flow paths, or may be disposed on all of them. When the optical device is disposed on only some of the flow paths, a light-transmitting member (e.g., a glass plate) may be disposed on the optical paths corresponding to the other flow paths. The light-transmitting member synchronizes the irradiated light with the change in the optical axis that accompanies the passage of the irradiated light through the optical device, thereby matching the optical axis conditions between the flow path where the optical device is disposed and the other flow paths.

[0016] In addition, in the particle counting device of the present invention, the condition adjustment means may have a function of displacing the position of the optical device. The condition adjustment means can displace the position of the optical device between a passing position on the optical path through which the irradiated light passes and a non-passing position off the optical path. Furthermore, when multiple optical devices with different characteristics for adjusting the intensity of the irradiated light are used, it is possible to selectively dispose on the optical path an optical device with characteristics corresponding to the flow path selected as the target for adjusting the position of the optical path. Furthermore, the adjustment operation by the condition adjustment means may be automatically controlled.

[0017] This makes it possible to adjust or not adjust the intensity using an optical device according to the characteristics of the flow path (sample fluid or particles flowing within the flow path) selected for adjusting the position of the optical path, and to adjust the intensity individually for each flow path, thereby contributing to further maintaining and improving convenience. [Effects of the Invention]

[0018] As described above, according to the present invention, it is possible to provide a particle counter that is more convenient to use. [Brief explanation of the drawings]

[0019] [Figure 1] FIG. 1 is a perspective view showing a particle counter 1 according to an embodiment of the present invention. [Figure 2] 1 is a diagram illustrating a first configuration example of a post-stage power adjustment unit 100. FIG. [Figure 3] 1 is a diagram illustrating a first configuration example of a post-stage power adjustment unit 100. FIG. [Figure 4] FIG. 10 is a diagram illustrating a second configuration example of the post-stage power adjustment unit 100. [Figure 5] 1 is a diagram illustrating a first configuration example of a pre-stage power adjustment unit 200. FIG. [Figure 6] FIG. 10 is a diagram illustrating a second configuration example of the pre-power adjustment unit 200. [Figure 7] 2 is a diagram illustrating an example of the configuration of a middle stage power adjustment unit 300. FIG. [Figure 8]1 is a block diagram showing an example of a control configuration of a particle counter 1 according to an embodiment. [Figure 9] FIG. 4 is a perspective view showing a particle counter 401 according to another embodiment. [Figure 10] FIG. 1 is a diagram showing an example of a configuration in which a trap device 124 is used in a particle counter 1 according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0020] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. Note that the following preferred embodiments are preferred examples, and the present invention is not limited to these examples.

[0021] [Configuration of particle counter] Fig. 1 is a perspective view showing a particle counter 1 according to one embodiment. Note that some components are not shown in Fig. 1. The particle counter 1 is one form of particle counting device, and whether it is a counter or a counting device is merely a matter of name, and does not result in any technical difference.

[0022] Each of the components constituting the particle counter 1, such as the light source 20, mirror 30, illumination lens 40, multi-flow cell (flow cell unit) 80, and light-receiving unit 50, is supported directly or indirectly on the sensor base 2 by a jig or the like (not shown). A plurality of legs 3 are provided on the bottom surface of the sensor base 2, and the legs 3 are made of an elastic material such as vibration-isolating rubber that can absorb vibrations. The particle counter 1 is housed in a housing (not shown).

[0023] In this embodiment, as an example, a multi-flow cell 80 is provided. The multi-flow cell 80 has, for example, ten flow cells 10a to 10j, which are arranged in the width direction. Each of the flow cells 10a to 10j is formed of a transparent material such as quartz or sapphire, and has a substantially U-shaped flow path (not shown) therein. The flow path has two openings, one above and one below, on the front side of each of the flow cells 10a to 10j, and pipes for circulating the sample fluid are connected to these openings. Note that the number of flow cells 10a to 10j provided in the multi-flow cell 80 is not limited.

[0024] When the particle counter 1 is installed or in use, the longitudinal direction of the sensor base 2 is the width direction of the counter body, and the direction perpendicular to this is the front-to-back (depth) direction, and the multiple flow cells 80 are arranged in the width direction. Each of the flow cells 10a-10j has an inlet and an outlet for the sample fluid on its front side, and each inlet and each outlet is connected to a pipe. Although not shown in FIG. 1, each of the flow cells 10a-10j is fixed inside a flow cell holder. In the following description, the direction in which the multiple flow cells 10a-10j are arranged will be referred to as the "X direction," and the axis extending in the X direction will be referred to as the "X axis."

[0025] The light source 20 is fixed to the sensor base 2 and emits irradiating light La (e.g., laser light) with a predetermined intensity and wavelength in the X direction at a divergence angle within a range that can be considered parallel. The sensor base 2 also serves as a heat sink for the light source 20. The mirror 30 reflects the irradiating light La emitted from the light source 20 toward the detection region in the flow cells 10a to 10j. An illumination lens 40 is provided on the optical path of the reflected irradiating light La, and the irradiating light La passes through the illumination lens 40.

[0026] A light-receiving unit 50 is provided behind the multi-flow cell 80. The light-receiving unit 50 includes multiple light-receiving lenses, light-receiving elements, amplifiers, A / D converters, etc. The multiple light-receiving lenses are housed in a cylindrical light-receiving tube 52 to prevent reception of background noise. In the flow cells 10a-10j, into which the illumination light La is incident, when particles contained in the sample fluid pass through the detection region, scattered light is generated from the particles. This scattered light is collected by the light-receiving lenses and collected on a light-receiving element (e.g., a photodiode), where it is converted into an electrical signal, and the particles are counted by particle size based on the intensity of the scattered light. Note that if the particles contain fluorescent substances, the fluorescence emitted from the particles can be received and counted in the same way as in the case of scattered light.

[0027] In the following explanation, the central axis of the light-receiving lens (hereinafter referred to as the "light-receiving axis") will be referred to as the "Y axis," and the direction in which the Y axis extends (the front-to-back direction of the counter body) will be referred to as the "Y direction." If the vertical direction is referred to as the "Z direction," then the X direction, Y direction, and Z direction are all perpendicular to each other.

[0028] [Optical system movement configuration (position adjustment)] In the particle counter 1, the multi-flow cell 80 is fixed, and the optical path (optical axis) of the illumination light La emitted from the common light source 20 can be moved to a position corresponding to each of the flow cells 10a to 10j. That is, the light source 20 and the multi-flow cell 80 are fixed to the sensor base 2, but the optical path of the illumination light La after reflection by the mirror 30 can be moved in the arrangement direction of the flow cells 10a to 10j.

[0029] Such movement of the optical system is achieved, for example, by using an X-axis actuator 62. When the X-axis actuator 62 moves the slider, the X-axis stage 60 moves the mirror 30 and the illumination lens 40 in the X direction together with the vertical bracket 65 and holder 66, thereby adjusting the position of the optical path of the illumination light La to match each of the flow cells 10a to 10j.

[0030] For example, in FIG. 1, the optical path position is aligned with the flow cell 10a located at one end of the multi-flow cell 80, but by driving the X-axis actuator 62 as described above, the optical path position of the irradiation light La can also be adjusted for each of the other flow cells 10b to 10j.

[0031] Furthermore, the position of the light-receiving optical system including the light-receiving unit 50 can be adjusted in the Y direction. That is, a Y-axis actuator 72 is provided on the X-axis stage 60, and components of the light-receiving optical system including the light-receiving unit 50 are supported on the slider via the Y-axis stage 70.

[0032] [Adjustment of irradiation light conditions] As in this embodiment, the particle counter 1 equipped with the multi-flow cell 80 has multiple channels for particle counting. That is, by flowing different types of sample fluids through the ten flow cells 10a-10j, particles can be counted using the multiple channels. In this case, the position of the optical path of the illumination light La can be adjusted to suit each of the flow cells 10a-10j. However, since the light source 20 is single (common), the conditions (intensity) of the illumination light La would be uniform for all sample fluids. Therefore, the conditions of the illumination light La are adjusted for each channel to suit the characteristics of the sample fluids and particles flowing through each of the flow cells 10a-10j.

[0033] For this reason, in this embodiment, a plurality of units 100, 200, and 300 can be used to adjust the conditions of the irradiation light La, and preferred examples include a rear-stage power adjustment unit 100, a front-stage power adjustment unit 200, and a middle-stage power adjustment unit 300. Of these, the rear-stage power adjustment unit 100 is disposed on the optical path of the irradiation light La between the illumination lens 40 and the multi-flow cell 80 in the optical system. The front-stage power adjustment unit 200 is disposed on the optical path between the light source 20 and the mirror 30, and the middle-stage power adjustment unit 300 is disposed on the optical path within the holder 66. The middle-stage power adjustment units 300 are divided into those disposed on the incident side of the mirror 30 within the holder 66 and those disposed on the exit side (between the mirror 30 and the illumination lens 40). These units 100, 200, and 300 will be described further below with reference to other drawings.

[0034] [Optical equipment (optical elements)] In this embodiment, the conditions of the irradiated light La, particularly its intensity (power, density distribution), are adjusted using, for example, an optical filter or a beam splitter. The optical filter may be a neutral density (ND) filter, a polarizing filter, or any other type of optical filter. Hereinafter, the optical filter and beam splitter used in this embodiment will be referred to as an "optical instrument," but this term is merely an example, and they may also be referred to as "optical elements" or "optical filters."

[0035] [Variable optical properties] Furthermore, in this embodiment, a substance capable of changing optical properties can be used in an optical device. The electro-optic effect (a collective term for several effects) is one example of an effect that can change optical properties. Each electro-optic effect can variably control properties such as the refractive index, absorbance (≒transmittance), focal length, and polarization of an optical device such as an optical filter or beam splitter.

[0036] Examples of materials that produce an electro-optical effect include liquid crystals and crystals (electro-optical crystals). Electro-optical crystals are crystals that have an electro-optical effect, and there are a variety of them, so in this embodiment, an appropriate crystal can be used.

[0037] In this way, an optical device is constructed using a material that produces an electro-optic effect, and the properties of the material can be changed by an external electrical signal (external electrical influence). This allows the properties of the optical device to be changed without physically changing the optical device or changing its position.

[0038] [Rear-stage power adjustment unit] Figures 2 and 3 are diagrams showing a first configuration example of the rear-stage power adjustment unit 100. The particle counter 1 of Figure 1 is shown as a front view in Figure 2, and as a side view in Figure 3. In Figure 2, the front openings of each of the flow cells 10a to 10j are shown as circles.

[0039] The post-stage power adjustment unit 100 includes, for example, optical instruments 104, 106, 108, In this configuration, optical devices 104, 110, 112, 114, etc. are arranged below the multi-flow cell 80. As an example, plate-shaped optical devices 104, etc. are used, and these are arranged so as to be located on the optical path of the irradiation light La. In order to hold the optical devices 104, etc., a plurality of brackets 102 are formed on the underside of the multi-flow cell 80 so as to protrude downward, and the brackets 102 are arranged at equal intervals in the X direction corresponding to each of the flow cells 10a to 10j. The optical devices 104, etc. are held in a state where they are inserted between adjacent brackets 102.

[0040] The multi-flow cell 80 is fixed to the sensor base 2 using, for example, a flow cell base 5, which is composed of a U-shaped plate member that is erected vertically on the upper surface of the sensor base 2. The flow cell bases 5 are arranged in pairs on both ends of the multi-flow cell 80. Therefore, the multi-flow cell 80 is fixed to the sensor base 2 with its lower side open.

[0041] In terms of individual arrangements, for example, two optical devices 104 and 106 are arranged on the optical path of illumination light La corresponding to flow cell 10a located at the far right in Fig. 2. Furthermore, for example, one optical device 108 is arranged on the optical path corresponding to flow cell 10d, which is the fourth from the right, and for example, two optical devices 110 and 112 are arranged on the optical path corresponding to flow cell 10g, which is the seventh from the right. And for example, one optical device 114 is arranged on the optical path corresponding to flow cell 10h, which is the eighth from the right.

[0042] 2, the state in which the optical path (optical axis) of the illumination light La is aligned with the rightmost flow cell 10a is shown by a solid line, but for example, as shown by a two-dot chain line in Fig. 2, by driving the X-axis actuator 62 to move the holder 66 together with the X-axis stage 60 in the X direction, the optical path can be adjusted to a position corresponding to another flow cell 10h, and the positions of the optical paths can also be adjusted individually for the other flow cells 10b to 10j. Therefore, the optical device 104 and the like are arranged so as to be located on each optical path of the illumination light La when the position is individually adjusted for each of the flow cells 10a to 10j.

[0043] optical instruments 104,106, 108,The optical devices 110, 112, 114, etc. are different in type and optical characteristics, or have some in common. Also, although an example in which two optical devices 104, etc. are arranged one on top of the other is given here, three or more optical devices 104, etc. may be arranged on one optical path. Note that although some of the flow cells 10b, 10c, 10e, 10f, 10i, and 10j do not have optical devices 104, etc., they may also have optical devices 104, etc., arranged as appropriate.

[0044] In either case, by placing an optical device 104 or the like on the light path, the intensity of the irradiated light La can be adjusted to match the characteristics of the sample fluid or particles flowing through each of the flow cells 10a to 10j. When the optical device 104 or the like is placed, the irradiated light La passes through the optical device 104 or the like, and is adjusted to an appropriate intensity. When the optical device 104 or the like is not placed, the irradiated light La is adjusted to the intensity of the irradiated light La emitted from the light source 20, and then irradiated into the flow path of each of the flow cells 10a to 10j.

[0045] 4 is a diagram showing a second configuration example of the rear-stage power adjustment unit 100. In the first configuration example described above, the areas where the optical devices 104 and the like are not placed are simply empty spaces (air), but in the second configuration example, a light-transmitting member 120 is placed in the areas where the optical devices 104 and the like are not placed. Furthermore, in the flow cell 10d, a light-transmitting member 120 is placed in addition to one optical device 108, and in the flow cell 10h, a light-transmitting member 120 is placed in addition to one optical device 114.

[0046] Therefore, in configuration example 1, the medium through which the irradiation light La passes within the subsequent power adjustment unit 100 differs for each flow cell 10a to 10j depending on whether or not optical devices 104, etc. are arranged, but in configuration example 2, for all flow cells 10a to 10j, the irradiation light La passes through either the optical devices 104, etc. or the light-transmitting members 120 (for example, two of each).

[0047] The light-transmitting member 120 is, for example, a transparent glass plate or a transparent acrylic resin plate, and does not have any particular intensity adjustment function. However, by transmitting the irradiation light La through the light-transmitting member 120, it can synchronize with the change in the optical axis that accompanies the passage of the optical devices 104 and the like. Therefore, in Configuration Example 2, the optical axis change for all of the flow cells 10a to 10j can be made uniform regardless of the presence or absence of the optical devices 104 and the like, making it easy to adjust the position of the optical path using the X-axis actuator 62. In contrast, in Configuration Example 1, it is necessary to adjust the position of the optical path using the X-axis actuator 62, taking into account that the optical axis of the irradiation light La does not change in areas where the optical devices 104 and the like are not installed.

[0048] The post-stage power adjustment unit 100 provides the following benefits. (1) When an ND filter, for example, is used in the optical device 104 for adjusting the intensity, the intensity of the illumination light La irradiated into the flow path is reduced compared to when an ND filter is not provided. This reduces the intensity of the illumination light La irradiated onto the sample fluid flowing through the corresponding flow cells 10a, 10d, 10g, and 10h. Therefore, it becomes possible to irradiate the sample fluid and particles flowing through the flow path with illumination light La of a more appropriate intensity, enabling more accurate particle counting.

[0049] (2) The optical characteristics (e.g., attenuation) of the ND filter can be selected to be appropriate for particle counting depending on the intensity of the illumination light La emitted by the light source 20, the type of sample fluid and particles, etc. For example, under the condition that the intensity of the illumination light La emitted by the light source 20 is constant, when sample fluid A flows through a certain channel, ND filter α is applied to the optical device 104, etc., and when sample fluid B flows through a certain channel, ND filter β is applied, thereby making it possible to adjust the intensity according to the type and characteristics of the particles to be counted and the sample fluid containing them.

[0050] (3) By arranging the optical device 104 etc. on the optical path in advance, even if the channel (flow cells 10a to 10j) to be counted in the particle counter 1 is switched, no special operation is required, and the intensity of the irradiated light La can be adjusted to be suitable for the characteristics of the sample fluid and particles flowing in the target channel.

[0051] (4) The optical device 104 to be used is not limited to an ND filter, and any optical element that acts on the illumination light La when placed on the optical path of the illumination light La may be used, such as an optical filter such as a polarizing filter or a wavelength-selective filter, or a beam splitter such as a nonpolar beam splitter or a polarizing beam splitter, or other optical filters or beam splitters with different performance and types.

[0052] (5) Furthermore, even if the type of sample fluid or particles flowing through each flow cell 10a to 10j changes, the intensity can be adjusted quickly and easily by appropriately replacing, adding, or removing the optical device 104, etc.

[0053] [Other configuration examples] The post-stage power adjustment unit 100 may also have the following configuration example. The number of optical devices 104 and the like to be arranged on the optical path corresponding to each of the flow cells 10a to 10j is arbitrary, and may be one or more, or may be three or more.

[0054] Furthermore, when a plurality of optical devices 104 or the like are arranged to form a filter set, the filters in the filter set may be arranged such that they have the same function and performance, or such that they have different function and performance. The optical devices 104 or the like may have different thicknesses in the optical path direction.

[0055] The optical device 104 etc. may be configured such that a different filter (filter set) is arranged for each optical path to each of the flow cells 10a to 10j.

[0056] The optical devices 104, etc. may be configured so that they can be easily attached and detached to the bracket 102 as in configuration example 1, so that their placement can be switched (applied / not applied) for each optical path to each of the flow cells 10a to 10j.

[0057] Furthermore, the optical devices 104 etc. are not fixedly arranged, and for example, even within the same flow cell 10a to 10j, when the object to be flowed is sample fluid A, an optical filter α may be applied to the optical devices 104 etc., and when the object to be flowed is sample fluid B, the optical filter α may be removed and replaced with another optical filter β.

[0058] The presence or absence (applied / unapplied) of the optical device 104 or the like on the optical path to each of the flow cells 10a to 10j may be switched manually by an operator or automatically using a driving mechanism or the like.

[0059] When the configuration is such that the presence or absence of the optical devices 104 and the like is automatically switched, it is possible to select an appropriate optical device 104 and place it or change its placement depending on, for example, the sample fluid and other conditions preset in the particle counter 1. Alternatively, the configuration may be such that the sample fluid flowing through the flow cells 10a to 10j of the channel selected for counting and other conditions are detected, and the appropriate optical device 104 and the like are automatically selected and placed based on the detection results.

[0060] [Front-stage power adjustment unit] Next, a description will be given of the pre-power adjustment unit 200. Fig. 5 is a diagram showing a first configuration example of the pre-power adjustment unit 200. Fig. 5(A) shows a front view of the light source 20 and a portion thereof, and Fig. 5(B) shows a side view of the light source 20.

[0061] 5A: The pre-power adjustment unit 200 has a configuration in which an optical device 208 is arranged on the optical path of the irradiation light La immediately before it when viewed in the irradiation direction of the light source 20. The pre-power adjustment unit 200 is disposed in a position where it does not interfere with the range of movement of the holder 66 (irradiation optical system) by the X-axis actuator 62 or with the flow cell base 5, etc. Here, the optical device 208 can be an optical filter, a beam splitter, etc. The pre-power adjustment unit 200 has a box-shaped housing 201 erected on the sensor base 2, and this housing 201 has an opening formed in a window 202 that allows the irradiation light La to pass through. A rotary actuator 204 is also provided inside the housing 201 together with the optical device 208, and the output shaft of the rotary actuator 204 is rotatable around the X-axis in FIG.

[0062] 5(B): Optical device 208 is supported on the output shaft of rotary actuator 204 via bracket 206. Although optical device 208 of configuration example 1 has a single configuration, it can be displaced by driving rotary actuator 204 between a position on the optical path where irradiated light La passes (passing position) as shown by the two-dot chain line and a position off the optical path (non-passing position) as shown by the solid line.

[0063] Therefore, according to configuration example 1 of the front-stage power adjustment unit 200, when the optical device 208 is displaced to the non-passing position, the intensity of the irradiated light La is adjusted to the intensity emitted by the light source 20, and conversely, when it is displaced to the passing position, the intensity is adjusted to the intensity associated with the passage of the optical device 208.

[0064] Next, Fig. 6 is a diagram showing a second configuration example of the pre-stage power adjustment unit 200. Fig. 6 shows a part of the vicinity of the light source 20, including the light source 20, in a side view.

[0065] In configuration example 2, pre-stage power adjustment unit 200 also has housing 201 similar to that in configuration example 1, and housing 201 has window 202 formed therein. In configuration example 2, rotary disk 210 is attached to the output shaft of rotary actuator 204. This rotary disk 210 has a plurality of holes 210a formed on the same pitch circle at equal intervals in the circumferential direction, and optical devices 208, 212, 214, 216, 218, and 220 are fitted into each of holes 210a.

[0066] Therefore, in configuration example 2, by driving rotary actuator 204 to change the angle of rotary disk 210 in the rotational direction, the arrangement of optical devices 208, 212, 214, 216, 218, and 220 on the optical path of illumination light La can be switched and used. For example, at the angle shown in FIG. 6, optical device 208 is arranged on the optical path. In this case, the intensity of illumination light La can be adjusted according to the function and performance of optical device 208. The intensity-adjusted illumination light La is irradiated onto the flow path of each of flow cells 10a to 10j via mirror 30 and illumination lens 40.

[0067] 6 in increments of 60 degrees, other optical devices 212, 214, 216, 218, and 220 can be sequentially placed on the optical path and used. Therefore, the intensity of the irradiated light La can be adjusted in accordance with the functions and performance of the optical devices 212, 214, 216, 218, and 220 placed on the optical path.

[0068] Furthermore, by configuring the rotating disk 210 with a light-transmitting member (such as a transparent glass plate or a transparent acrylic plate), the rotating disk 210 can be displaced to an angle where the area where the holes 210a are not formed is positioned on the optical path, thereby making it possible to place none of the optical devices 208, 212, 214, 216, 218, and 220 on the optical path. In this case, the illumination light La is irradiated onto the flow paths of the flow cells 10a to 10j via the mirror 30 and the illumination lens 40 at the intensity emitted from the light source 20.

[0069] The pre-stage power adjustment unit 200 provides the following benefits. (1) As with the post-stage power adjusting unit 100, the intensity of the irradiated light La can be adjusted using the optical device 208 or the like. (2) Furthermore, in the case of configuration example 1, unlike the case where filters (filter sets) are prepared as individual optical devices 104 or the like on the optical path to each corresponding flow cell 10a to 10j, as in the case of the downstream power adjustment unit 100, a single optical device 208 is placed on the optical path just before the light source 20, so the same filter (filter set) is applied to all flow cells 10a to 10j, and the number of optical devices 208 can be minimized, thereby simplifying the configuration. (3) On the other hand, in the case of configuration example 2, by preparing the number of optical devices 208, etc. corresponding to the flow cells 10a to 10j to be applied and placing the appropriate optical devices 208, etc. on the optical path according to the selected channel, it becomes possible to adjust the intensity of the irradiation light La to match the characteristics of the sample fluid and particles flowing through each of the flow cells 10a to 10j.

[0070] [Other configuration examples] The pre-stage power adjustment unit 200 may also have the following configuration example. In the configuration example 1 of Fig. 5, multiple optical devices 208 may be arranged in a stacked manner on the optical path. For example, by preparing multiple sets of multiple rotary actuators 204, brackets 206, and optical devices 208 and arranging them so that their ranges of motion do not interfere with each other, it is possible to arrange one optical device 208 or multiple optical devices 208 on the optical path. This makes it possible to adjust the intensity of the irradiation light La in stages according to the number of optical devices 208 arranged on the optical path.

[0071] 6, multiple sets of the rotary actuator 204, the rotary disk 210, the optical device 208, etc. can be prepared and arranged so that their ranges of motion do not interfere with each other. This allows for fine adjustment of the strength for each of the applied flow cells 10a to 10j, further increasing usability.

[0072] The upstream power adjustment unit 200 may also be configured to detect the sample fluid flowing through the flow cells 10a to 10j of the channel selected for counting and other conditions, and automatically select and position appropriate optical devices 208, etc. based on the detection results.

[0073] [Middle power adjustment unit] Next, we will explain the middle stage power adjustment unit 300. Fig. 7 is a diagram showing an example of the configuration of the middle stage power adjustment unit 300. Fig. 7(A) shows the vicinity of a part of the holder 66 including the mirror 30 and the illumination lens 40 of Fig. 1, and Fig. 7(B) shows the internal structure of the holder 66 as seen from the front (partially in cross section).

[0074] 7(A): As described above, the middle stage power adjustment unit 300 can be configured to be divided into one that is arranged on the optical path on the incident side of the mirror 30 within the holder 66, and one that is arranged on the optical path on the output side (between the mirror 30 and the illumination lens 40). Note that the middle stage power adjustment unit 300 may be arranged on only one side.

[0075] 7B: In the middle-stage power adjustment unit 300, the intensity of the illumination light La can also be adjusted using optical devices 302 and 304. In this configuration example, one optical device 302 is arranged on the optical path on the incident side of the mirror 30, and the other optical device 304 is arranged on the optical path on the reflecting side of the mirror 30. Here, the optical devices 302 and 304 can also be optical filters, beam splitters, or the like. Furthermore, the optical devices 302 and 304 can also be individually displaced on the optical path between a position where the illumination light La passes (passing position: indicated by a two-dot chain line in the figure) and a position off the optical path (non-passing position: indicated by a solid line in the figure) by driving a linear actuator (not shown).

[0076] The mid-stage power adjustment unit 300 provides the following benefits. (1) As with the post-stage power adjusting unit 100, the intensity of the irradiated light La can be adjusted using the optical devices 302 and 304. (2) Furthermore, unlike the rear-stage power adjustment unit 100 and the front-stage power adjustment unit 200, in the middle-stage power adjustment unit 300, the filters (filter sets) of the optical devices 302, 304 are arranged inside the holder 66 and are arranged to move together with the entire holder 66 including the mirror 30 and the illumination lens 40. This eliminates the need to reserve additional space for arranging the filters (filter sets) as in the rear-stage power adjustment unit 100 and the front-stage power adjustment unit 200, and reduces the density of components inside the particle counter 1, thereby improving heat dissipation and maintenance workability.

[0077] (3) By individually displacing the two optical devices 302 and 304, it is possible to position either the optical device 302 or the optical device 304 on the optical path depending on the flow cell 10a to 10j to be applied, or to position both optical devices 302 and 304 simultaneously. This makes it possible to adjust the intensity of the irradiated light La to match the characteristics of the sample fluid or particles flowing through each of the flow cells 10a to 10j by positioning the appropriate optical device 302 or 304 on the optical path depending on the selected channel.

[0078] [Other configuration examples] The middle stage power adjustment unit 300 may have the following configuration example. Only one of the optical devices 302, 304 may be disposed within the holder 66. In this case, the optical device 302 on the incident side may be disposed at a position where it can move together with the holder 66 between the light source 20 and the mirror 30. The optical device 304 on the output side may also be disposed at a position where it can move together with the holder 66 between the illumination lens 40 and each of the flow cells 10a to 10j.

[0079] Alternatively, even when both optical devices 302 and 304 are disposed, the optical device 302 on the incident side may be disposed in a position where it can move together with the holder 66 between the light source 20 and the mirror 30, and the optical device 304 on the output side may be disposed in a position where it can move together with the holder 66 between the illumination lens 40 and each of the flow cells 10a to 10j. In this case, the filters (filter sets) of the optical devices 302 and 304 may occupy approximately equal spaces near the holder 66 at both positions, or one may occupy more space than the other.

[0080] The middle stage power adjustment unit 300 may also be configured to detect the sample fluid flowing through the flow cells 10a to 10j of the channel selected for counting and other conditions, and automatically select and position appropriate optical devices 302, 304 based on the detection results.

[0081] [Control configuration example] 8 is a block diagram showing an example of the control configuration of the particle counter 1 in one embodiment. For convenience of explanation, an example configuration is shown in which all of the rear-stage power adjustment unit 100, the front-stage power adjustment unit 200, and the middle-stage power adjustment unit 300 are incorporated into the particle counter 1, but any one or more of the three units 100, 200, and 300 can be selectively incorporated and used.

[0082] In addition to the above-mentioned components, the particle counter 1 includes a control unit 90 that controls particle detection and counting. The control unit 90 includes, for example, an operation input unit 91, a memory unit 92, a position adjustment unit 93, a detection management unit 94, a counting unit 95, a data output unit 96, and a power adjustment unit 150.

[0083] The operation input unit 91 provides an operation screen to the user and accepts operations performed by the user via the operation screen. On the operation screen, the user can perform operations to instruct the selection of a channel to be counted, the start and end of detection, the storage of counting results, and the adjustment of the intensity of the irradiated light La. The operation input unit 91 not only issues instructions to the other functional units 93, 94, 96, and 150 according to the content of the accepted operation, but also switches the operation screen according to the content of input from the other functional units 93, 94, 96, and 150.

[0084] The memory unit 92 is a so-called storage area that stores information related to particle detection and counting. The memory unit 92 pre-stores X and Y coordinates corresponding to the flow cells 10a-10j of each channel, as well as an appropriate intensity level of the irradiated light La according to the characteristics of the sample fluid and particles for each of the flow cells 10a-10j of each channel. The information stored in the memory unit 92 may be rewritable as needed.

[0085] When a specific channel is specified by the operation input unit 91, the position adjustment unit 93 first reads out the X-coordinate and Y-coordinate corresponding to the flow cells 10a-10j of that channel from the memory unit 92. Then, the position adjustment unit 93 operates the X-axis actuator 62 to drive the X-axis motor 64 and slide the X-axis stage 60 to the X-coordinate, and further operates the Y-axis actuator 72 to drive the Y-axis motor 74 and slide the Y-axis stage 70 to the Y-coordinate. Once the X-axis motor 64 and Y-axis motor 74 have finished driving (when the adjustment of the positions of the X-axis stage 60 and Y-axis stage 70 has been completed), detection can begin. The position adjustment unit 93 notifies the operation input unit 91 that detection can begin.

[0086] [When the rear stage power adjustment unit 100 is not applicable] If the particle counter 1 does not use the rear-stage power adjustment unit 100, but uses either the front-stage power adjustment unit 200 or the middle-stage power adjustment unit 300, or both, the power adjustment unit 150 issues the following instructions. That is, when a specific channel is designated by the operation input unit 91, the power adjustment unit 150 reads information on the intensity level of the irradiation light La to be applied to the flow cells 10a to 10j of the corresponding channel from the storage unit 92, and outputs a drive signal to each actuator of the front-stage power adjustment unit 200 or the middle-stage power adjustment unit 300. Based on this drive signal, an appropriate filter (filter set) is placed at a passing position on the optical path or a non-passing position in the front-stage power adjustment unit 200 or the middle-stage power adjustment unit 300, respectively.

[0087] [When rear-stage power adjustment unit 100 is applied] On the other hand, if the particle counter 1 is equipped with the rear-stage power adjustment unit 100 and the front-stage power adjustment unit 200 and the middle-stage power adjustment unit 300 are not, the following occurs: the power adjustment unit 150 does not issue any special instructions and enters a standby state. This is because the rear-stage power adjustment unit 100 uses a fixed optical device 208 or the like.

[0088] [Other configuration examples when the rear-stage power adjustment unit 100 is applied] However, as already mentioned, the rear-stage power adjustment unit 100 can also be configured to automatically attach and detach the optical devices 208, etc. In this case, when a specific channel is designated by the operation input unit 91, the power adjustment unit 150 reads information on the intensity level of the irradiation light La to be applied to the flow cells 10a-10j of the corresponding channel from the storage unit 92, and instructs the rear-stage power adjustment unit 100 to place the appropriate optical devices 208, etc. on the brackets 102 at the corresponding positions of each of the flow cells 10a-10j. As a result, the appropriate optical devices 208 (light-transmitting members 120) etc. are placed on the optical path for each of the flow cells 10a-10j, as shown in FIGS. 2-4.

[0089] When the operation input unit 91 issues an instruction to start detection for a specific channel, the detection management unit 94 switches the light source 20 and the light receiving unit 50 to an operating state. Also, when the operation input unit 91 issues an instruction to end detection for a specific channel, the detection management unit 94 switches the light source 20 and the light receiving unit 50 to a non-operating state. When the light source 20 and the light receiving unit 50 are switched to a non-operating state, the channel to be counted can be changed. The detection management unit 94 notifies the operation input unit 91 that it is now possible to change the channel.

[0090] The operating state of the light source 20 does not have to be switched every time detection is started or ended, but may remain in the operating state while the particle counter 1 is running. Also, the start and end of detection may be configured to be performed without intervention of the operation input unit 91 (operation by the user). For example, detection may be automatically started when the position adjustment unit 93 completes adjustment of the positions of the stages 60 and 70, and may be automatically ended after a predetermined time has elapsed since detection started.

[0091] When the light source 20 and the light-receiving unit 50 are activated by the detection control unit 94, the illumination light La emitted by the light source 20 is reflected by the mirror 30, passes through the illumination lens 40, and is focused into the flow cells 10a-10j, forming a detection region at a predetermined position within the flow path of the sample fluid. When particles contained in the sample fluid pass through the detection region, scattered light is generated from the particles, and this side-scattered light is collected by the light-receiving lens 53 and incident on and received by the light-receiving element 54. The side-scattered light received by the light-receiving element 54 is converted into an electrical signal according to its intensity, amplified by an amplifier 55 with a predetermined gain, and then converted into a digital signal by an A / D converter 56. The light-receiving unit 50 then outputs the final digital signal obtained to the counter.

[0092] The counting unit 95 determines the particle size of the detected particles based on the size of the digital signal output by the light-receiving unit 50, i.e., the intensity of the scattered light, and counts the particles for each particle size. The counting unit 95 outputs the counting results to the data output unit 96.

[0093] The data output unit 96 outputs data based on the counting results output by the counting unit 95. The data may be output by displaying it on a result display screen, outputting it to a printer, or transmitting it to another device via a network. When the final counting result data is ready following the completion of detection, the final data can be saved. The data output unit 96 notifies the operation input unit 91 that the final data can now be saved.

[0094] The control unit 90 may be provided integrally inside the particle counter 1, or may be provided separately outside the particle counter 1 and connected via a cable, a network, or the like.

[0095] The control unit 90 may also include a detection unit, which includes a detection element capable of detecting the type of sample fluid or particles flowing through each of the flow cells 10a to 10j. In this case, when an instruction to start detection for a specific channel is given by the operation input unit 91, the detection unit detects the sample fluid or particles flowing through the specified channel and transmits the detection results to the power adjustment unit 150. The power adjustment unit 150 then reads information on an appropriate intensity level from the memory unit 92 based on the detection results of the detection unit, and issues instructions to the applicable units 100, 200, and 300.

[0096] [Variable control of characteristics] Furthermore, when optical devices with variable characteristics are used for at least one of the rear-stage power adjustment unit 100, the front-stage power adjustment unit 200, and the middle-stage power adjustment unit 300, the power adjustment section 150 can appropriately change the characteristics of the optical devices when each unit 100, 200, or 300 is used, depending on the characteristics of the sample fluid or particles flowing through the flow cells 10a-10j of the channel to be counted and the intensity level of the irradiation light La being applied at that time. In this case, for example, the rear-stage power adjustment unit 100 can be used by varying its optical characteristics through control depending on the characteristics of the sample fluid or particles for each channel, without replacing the optical device 104, etc. Similarly, the front-stage power adjustment unit 200 can be used by varying the characteristics of the fixedly arranged optical devices 208, etc., without changing the placement of the optical devices 208, etc. Similarly, the middle-stage power adjustment unit 300 can be used by varying the characteristics of the optical devices 302, 304 depending on the channel to be counted.

[0097] [Configuration of particle counter in other embodiments] 9 is a perspective view showing a particle counter 401 according to another embodiment of the present invention. In FIG. 9, like FIG. 1, some components are not shown.

[0098] In the particle counter 401, a fiber laser is used as the light source of the irradiation light La, and in this case, the light source is arranged outside the housing (not shown). A head 422 is provided at the tip of an optical fiber extending from the light source (not shown), and this head 422 is fixed to a holder 466. Therefore, the head 422 moves in the X direction in conjunction with the X-axis stage 60 according to the selected channel. Unlike the above-mentioned embodiment, no mirror is provided here.

[0099] [Configuration example using trap equipment] 10 is a diagram showing an example of a configuration in which a trap device 124 is used in a particle counter 1 according to an embodiment. In this example, the particle counter 1 includes a trap device 124 in addition to a post-stage power adjustment unit 100. Note that although the particle counter 1 according to an embodiment is shown here, the trap device 124 can also be applied to a particle counter 401 according to another embodiment.

[0100] In this configuration example, a reflective optical device (a beam splitter 122, for example) is used in the post-stage power adjustment unit 100. Therefore, the beam splitter 122 splits the illumination light La into incident light that enters each of the flow cells 10a to 10j and excess light La' that is incident in a direction different from that of the incident light, thereby reducing the amount of light incident on each of the flow cells 10a to 10j.

[0101] Here, beam splitters 122 are provided for all flow cells 10a to 10j, but as in the previous configuration examples 1 and 2, there may be locations where beam splitters 122 are not placed, or the optical characteristics of beam splitters 122 may differ depending on the placement location, or there may be locations where ND filters or the like are placed in addition to beam splitters 122. Furthermore, the angle at which beam splitters 122 are placed may be appropriate, and they may be placed horizontally, and beam splitters 122 may be cube-shaped rather than plate-shaped.

[0102] The trap device 124 used in this configuration example is disposed, for example, on the upper surface of the holder 66 in a position where it does not interfere with the illumination lens 40. By being disposed on the upper surface of the holder 66, the trap device 124 moves in the X direction in conjunction with the position adjustment of the optical path by the X-axis actuator 62, and is disposed in the separation direction of the excess light La' relative to each beam splitter 122, as shown by the solid line and the two-dot chain line in Fig. 10. This allows the number of trap devices 124 used to be reduced to a minimum of one, eliminating the need to dispose trap devices 124 in multiple locations for each of the flow cells 10a to 10j.

[0103] In any case, such a trap device 124 can eliminate its adverse effects (such as the generation of noise) by capturing the excess light La' split (reflected) by the beam splitter 122. Note that various optical devices (products called beam traps, beam dampers, beam blocks, beam diffusers, etc.) that have the function of terminating a light beam by absorbing laser light and converting it to heat are preferably used as the trap device 124. Furthermore, the trap device 124 may be disposed in a location other than the top surface of the holder 66, or in multiple locations (for each of the flow cells 10a to 10j).

[0104] As described above, according to the above-described embodiment, the following effects can be obtained. (1) Regardless of whether the rear-stage power adjustment unit 100, the front-stage power adjustment unit 200, or the middle-stage power adjustment unit 300 is applied, in a multi-flow cell particle counter that uses a common light source, it becomes possible to use the counter under appropriate irradiation light conditions for each type of sample fluid or particle, thereby making it possible to obtain more accurate measurement results.

[0105] (2) When the downstream power adjustment unit 100 is applied, if the optical devices 208 and the like are fixedly positioned in advance on the optical path of each of the flow cells 10a to 10j, then the particle counter 1 simply selects the channel to be counted, and then the optical path of the irradiation light La is simply moved to adjust the conditions (intensity) of the irradiation light La to an appropriate level. This reduces the number of moving parts in the mechanism and reduces the hassle of malfunctions and adjustments.

[0106] (3) When the front-stage power adjustment unit 200 or the middle-stage power adjustment unit 300 is applied, the optical device 208 or the like is placed on the optical path only when intensity adjustment of the irradiated light La is required, so that the entire optical path can be kept clear when no adjustment is required. Furthermore, when no adjustment is required, no special mechanical operation is required, which can reduce operating noise and energy consumption.

[0107] (4) When the trap device 124 is applied, other influences of light reflected by reflective optical devices (such as excess light La' from the beam splitter 122) can be eliminated, thereby further improving the accuracy of the measurement results.

[0108] (5) Furthermore, by constructing the optical device using a material with variable characteristics, it is possible to change the characteristics of the optical device through electrical control without physically changing, repositioning, or replacing the optical device itself, thereby adjusting the conditions to suit the channel to be counted and performing counting.

[0109] The present invention is not limited to the above-described embodiment, and can be practiced in various modified forms.

[0110] In the above-described embodiment, the intensity (power) is adjusted as a condition of the irradiated light La, but the condition to be adjusted is not limited to the intensity (power, density distribution) and may be other conditions (for example, wavelength, polarization state, etc.). Furthermore, various optical elements capable of adjusting the conditions of the irradiated light La may be used instead of optical filters and beam splitters.

[0111] In the above-described embodiment, the particle counter 1 employs multiple flow cells 80, but may have a single flow cell configuration. In this case, there is no need to move the optical system, but by applying the rear-stage power adjusting unit 100 or the front-stage power adjusting unit 200, when the type of sample fluid or particles flowing through the flow cell changes, the intensity of the irradiated light La can be adjusted according to the changed characteristics.

[0112] 8, a mechanism may be applied that allows the entire post-stage power adjusting unit 100 to be displaced relative to the multi-flow cell 80. In this case, the power adjusting section 150 can displace the entire post-stage power adjusting unit 100 based on the designation of a specific channel, and place it on the optical path from the illumination lens 40 to the multi-flow cell 80, or move it to a position off the optical path.

[0113] The trap device 124 can be applied not only to the rear-stage power adjusting unit 100, but also to a location where the reflected light can be trapped when a reflective optical device is used. Furthermore, depending on the angle with respect to the optical axis and the relationship with the optical device being used, the trap device 124 can also be applied to the front-stage power adjusting unit 200 or the middle-stage power adjusting unit 300 as necessary.

[0114] Furthermore, the materials and values ​​given as examples of the components of the particle counter 1 are merely examples, and it goes without saying that they can be modified as appropriate when implementing the present invention. [Explanation of symbols]

[0115] 1 Particle Counter 2 Sensor-based 5 Flow cell base 6 Flow cell holder 10a~10j Flow Cell 20 light source 30 Mirror 40 Lighting lenses 50 Light receiving unit 60 X-axis stage 70 Y-axis stage 80 Multi-Flow Cell 100 Rear stage power adjustment unit 104,106,110,112,114 Optical instruments 120 Light-transmitting member 122 Beam splitter (optical device) 124 Trap Equipment 200 Front stage power adjustment unit 208,212,214,216,218,220 Optical instruments 300 mid-stage power adjustment unit 302,304 Optical instruments

Claims

1. 1. A particle counter that counts particles contained in a sample fluid flowing through a flow path using irradiation light irradiated into the flow path, a multi-flow cell having a plurality of the flow channels; a position adjusting means for adjusting the position of the optical path of the irradiation light in accordance with the flow path selected from among a plurality of flow paths with respect to the multi-flow cell; a condition adjusting means for adjusting the condition of the irradiation light to be irradiated into the flow path selected by the position adjusting means on the optical path at a position different for each of the plurality of flow paths; A particle counter comprising:

2. 2. The particle counter according to claim 1, The condition adjusting means A particle counting device comprising an optical device arranged on the optical path and configured as at least one of an optical filter and a beam splitter for adjusting the intensity of the irradiation light emitted from a predetermined light source.

3. 3. The particle counter according to claim 2, The condition adjusting means A particle counting device characterized by including an optical device that is arranged on the optical path whose position is adjusted for each of the flow paths and has a characteristic that allows the intensity of the irradiated light to be adjusted according to each of the flow paths.

4. 4. The particle counter according to claim 3, The condition adjusting means A particle counter, characterized in that the optical device is disposed only on the optical path corresponding to a portion of the plurality of flow paths.

5. 5. The particle counter according to claim 4, A particle counting device characterized in that a light-transmitting member that synchronizes the irradiation light with a change in the optical axis that occurs as the optical device passes through is arranged on the optical path corresponding to the other flow path in which the optical device is not arranged.

6. 6. The particle counter according to claim 2, The condition adjusting means A particle counter characterized in that the position of the optical device can be displaced between a passing position on the optical path through which the irradiated light passes and a non-passing position outside the optical path.

7. 7. The particle counter according to claim 6, The condition adjusting means A particle counting device further comprising a displacement mechanism for displacing the arrangement of the optical device between the passing position and the non-passing position.

8. 7. The particle counter according to claim 2, The condition adjusting means A particle counting device characterized in that, among a plurality of optical devices having different characteristics for adjusting the intensity of the irradiated light, an optical device having a characteristic corresponding to the flow path whose position on the optical path is adjusted by the position adjustment means can be selectively positioned on the optical path.

9. 9. The particle counter according to claim 1, a control unit that controls the condition adjustment operation by the condition adjustment unit based on a sample fluid flowing in the flow path to be selected, the position of which is adjusted by the position adjustment unit.

10. 9. The particle counter according to claim 2, wherein: The optical device comprises: a beam splitter that attenuates the incident light by separating the irradiation light into incident light that enters the flow path and excess light in a direction different from the incident light, A particle counter further comprising a trapping device that is disposed in a direction in which the excess light is split by the beam splitter and that absorbs the excess light.

11. 9. The particle counter according to claim 2, wherein: The optical device comprises: A particle counting device characterized by being made of a material with variable optical properties.

Citation Information

Patent Citations

  • Grain size distribution measuring device

    JP1995294410A

  • Method and instrument for measuring concentration of component, etc., of liquid sample

    JP1995306139A

  • Optical device

    JP2000147660A

  • Method and device for measuring dissolved inorganic material concentration in liquid, and etching liquid regeneration system with the same device

    JP2009058306A

  • Substrate processing device, and substrate processing method

    JP2018121075A