Substrate holding device and substrate processing system

Abstract

To provide a substrate holding device and a substrate processing system, achieving a simplified structure and a reduced weight.SOLUTION: A substrate holding device 2 includes: a spin base 13; holding pins 15 of six holding pins 15 installed in a ring shape on the spin base 13 around an axis AX1 of rotation, the holding pins including three fixed holding pins 19 and three movable holding pins 17; and a pin drive mechanism 41 rotating the movable pins 17 around a vertical axis AX2 to hold a substrate W by sandwiching a side face of the substrate W using the holding pins 15. Each of the movable holding pins 17 includes a rotatable pin body 27 and a force transformation mechanism transforming a tensile force transmitted from the pin drive mechanism 41 into a rotational force that rotates the pin body 27. The pin drive mechanism 41 includes a wire 43 that has a tip 47 connected to the force transformation mechanism and that transmits the tensile force to the force transformation mechanism, and a pulling section 59 pulling the proximal end of the wire 43.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a substrate holding device for holding a substrate and a substrate processing system including the same. Examples of the substrate include semiconductor substrates, FPD (Flat Panel Display) substrates, photomask glass substrates, optical disk substrates, magnetic disk substrates, ceramic substrates, and solar cell substrates. Examples of the FPD include liquid crystal display devices and organic EL (electroluminescence) display devices. [Background technology]

[0002] The substrate processing system includes a substrate holding device that holds a substrate. The substrate holding device includes a spin chuck and a rotation drive unit that rotates the spin chuck. The spin chuck includes a disk-shaped spin base, and a plurality of clamping members (clamping pins) are provided on the upper surface of the spin base. The plurality of clamping members are arranged at approximately equal angular intervals around the periphery of the spin base. The substrate holding device holds the substrate by clamping the edge surface (side surface) of the substrate between the plurality of clamping members (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2004-111902 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the conventional example has the following problems. Each clamping member is configured to rotate around a vertical axis passing through the inside of the clamping member by a link mechanism or the like. A drive system using a link mechanism or the like has a relatively complex structure, which may result in a large number of parts and poor assembly efficiency. Also, the weight of the spin chuck may be relatively large.

[0005] The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a substrate holding device and a substrate processing system that realize a simplified structure and a reduced weight. [Means for solving the problem]

[0006] In order to achieve the above object, the present invention has the following configuration: That is, a substrate holding device according to the present invention includes a spin base that rotates about a rotation axis that extends vertically, at least three holding pins that are erected on the spin base in a ring shape about the rotation axis, the holding pins including at least one fixed holding pin and at least one movable holding pin, and a pin drive mechanism that rotates the movable holding pins about the vertical axis to hold the substrate by clamping sides of the substrate with the holding pins including the fixed holding pin and the movable holding pin, the movable holding pin including a rotatable pin body and a force conversion mechanism that converts a pulling force transmitted from the pin drive mechanism into a rotational force that rotates the pin body, and the pin drive mechanism includes a wire whose tip end is connected to the force conversion mechanism and transmits the pulling force to the force conversion mechanism, and a pulling part that pulls a base end of the wire. The force conversion mechanism is a lever member extending horizontally from the pin body, and the tip of the wire is connected to the tip side of the lever member, and the lever member is configured to be adjustable in length. It is characterized by the following.

[0007] In the substrate holding device according to the present invention, a movable holding pin used to hold a substrate includes a rotatable pin body and a force conversion mechanism that converts a pulling force transmitted from a pin drive mechanism into a rotational force that rotates the pin body. The pin drive mechanism includes a wire whose tip is connected to the force conversion mechanism and transmits the pulling force to the force conversion mechanism, and a pulling unit that pulls the base end of the wire. In other words, the movable holding pin is rotated by pulling the wire. Therefore, compared to a link mechanism, the structure for rotating the movable holding pin is simplified, thereby reducing the number of parts and improving assembly efficiency. Furthermore, the weight of the spin chuck can be reduced. Therefore, for example, acceleration responsiveness can be improved when rotating the spin chuck.

[0008] Also , possible The torque required to rotate the movable holding pin can be easily obtained by the lever member.

[0009] Also , possible Since the movable holding pin is rotated, torque adjustment can be easily performed.

[0010] In the substrate holding device described above, it is preferable that the movable holding pins are provided in a plurality, the tensioning unit is single, and the tensioning unit pulls the base ends of the plurality of wires connected to the force conversion mechanisms of the plurality of movable holding pins, respectively. Since it is not necessary to provide a tensioning unit for each of the plurality of wires, the structure can be further simplified and the weight of the spin chuck can be reduced.

[0011] Also, The present invention Substrate holding device the device comprises a spin base that rotates around a rotation axis that extends vertically, at least three holding pins that are erected on the spin base in a ring shape around the rotation axis, the holding pins including at least one fixed holding pin and at least one movable holding pin, and a pin drive mechanism that rotates the movable holding pins around the vertical axis to hold the substrate by clamping the sides of the substrate using the holding pins including the fixed holding pin and the movable holding pin, the movable holding pin comprising a rotatable pin body and a force conversion mechanism that converts a pulling force transmitted from the pin drive mechanism into a rotational force that rotates the pin body, the pin drive mechanism comprising a wire whose tip end is connected to the force conversion mechanism and that transmits the pulling force to the force conversion mechanism, and a pulling portion that pulls the base end of the wire, The tensioning unit includes a rail attached to the spin base and extending horizontally, a slider supported by the rail and movable along the rail, and a driving unit for moving the slider, and the base end of the wire is connected to the slider. It is characterized by the following. In the substrate holding device according to the present invention, a movable holding pin used to hold a substrate includes a rotatable pin body and a force conversion mechanism that converts a pulling force transmitted from a pin drive mechanism into a rotational force that rotates the pin body. The pin drive mechanism includes a wire whose tip is connected to the force conversion mechanism and transmits the pulling force to the force conversion mechanism, and a pulling unit that pulls the base end of the wire. In other words, the movable holding pin is rotated by pulling the wire. Therefore, compared to a link mechanism, the structure for rotating the movable holding pin is simplified, thereby reducing the number of parts and improving assembly efficiency. Furthermore, the weight of the spin chuck can be reduced. Therefore, for example, acceleration responsiveness can be improved when rotating the spin chuck. Also, The proximal end of the wire can be pulled by a slider that is moved along a rail.

[0012] In the substrate holding device described above, it is preferable that the slider has a first magnet, the drive unit has a second magnet, the drive unit is provided at a position spaced apart from the spin base, and the drive unit moves the slider by bringing the second magnet closer to the first magnet when the spin base stops at a predetermined position. The slider can be moved by the second magnet of the drive unit provided at a position spaced apart from the spin base.

[0013] Also, The present invention Substrate holding device the device comprises a spin base that rotates around a rotation axis that extends vertically, at least three holding pins that are erected on the spin base in a ring shape around the rotation axis, the holding pins including at least one fixed holding pin and at least one movable holding pin, and a pin drive mechanism that rotates the movable holding pins around the vertical axis to hold the substrate by clamping the sides of the substrate using the holding pins including the fixed holding pin and the movable holding pin, the movable holding pin comprising a rotatable pin body and a force conversion mechanism that converts a pulling force transmitted from the pin drive mechanism into a rotational force that rotates the pin body, the pin drive mechanism comprising a wire whose tip end is connected to the force conversion mechanism and that transmits the pulling force to the force conversion mechanism, and a pulling portion that pulls the base end of the wire,The tensioning unit includes a rotor that can rotate around a horizontal axis, a rotor support unit that is attached to the spin base and rotatably supports the rotor, and a drive unit that rotates the rotor, and the base end of the wire is connected to the rotor that winds and tensions the wire. It is characterized by the following. In the substrate holding device according to the present invention, a movable holding pin used to hold a substrate includes a rotatable pin body and a force conversion mechanism that converts a pulling force transmitted from a pin drive mechanism into a rotational force that rotates the pin body. The pin drive mechanism includes a wire whose tip is connected to the force conversion mechanism and transmits the pulling force to the force conversion mechanism, and a pulling unit that pulls the base end of the wire. In other words, the movable holding pin is rotated by pulling the wire. Therefore, compared to a link mechanism, the structure for rotating the movable holding pin is simplified, thereby reducing the number of parts and improving assembly efficiency. Furthermore, the weight of the spin chuck can be reduced. Therefore, for example, acceleration responsiveness can be improved when rotating the spin chuck. Also, The proximal end of the wire can be pulled by a rotating body rotatably supported on the rotating body support portion.

[0014] In the substrate holding device described above, it is preferable that the rotating body has a first magnet, the driving unit has a second magnet, the driving unit is provided at a position spaced apart from the spin base, and the driving unit rotates the rotating body by moving the second magnet closer to the first magnet when the spin base stops at a predetermined position. The rotating body can be rotated by the second magnet of the driving unit provided at a position spaced apart from the spin base.

[0015] Also, The present invention Substrate holding device the device comprises a spin base that rotates around a rotation axis that extends vertically, at least three holding pins that are erected on the spin base in a ring shape around the rotation axis, the holding pins including at least one fixed holding pin and at least one movable holding pin, and a pin drive mechanism that rotates the movable holding pins around the vertical axis to hold the substrate by clamping the sides of the substrate using the holding pins including the fixed holding pin and the movable holding pin, the movable holding pin comprising a rotatable pin body and a force conversion mechanism that converts a pulling force transmitted from the pin drive mechanism into a rotational force that rotates the pin body, the pin drive mechanism comprising a wire whose tip end is connected to the force conversion mechanism and that transmits the pulling force to the force conversion mechanism, and a pulling portion that pulls the base end of the wire, The spinning base further includes an arc-shaped guide member that guides the wire. It is characterized by the following. In the substrate holding device according to the present invention, a movable holding pin used to hold a substrate includes a rotatable pin body and a force conversion mechanism that converts a pulling force transmitted from a pin drive mechanism into a rotational force that rotates the pin body. The pin drive mechanism includes a wire whose tip is connected to the force conversion mechanism and transmits the pulling force to the force conversion mechanism, and a pulling unit that pulls the base end of the wire. In other words, the movable holding pin is rotated by pulling the wire. Therefore, compared to a link mechanism, the structure for rotating the movable holding pin is simplified, thereby reducing the number of parts and improving assembly efficiency. Furthermore, the weight of the spin chuck can be reduced. Therefore, for example, acceleration responsiveness can be improved when rotating the spin chuck. Also, This prevents the wire from being bent below the minimum bending radius, which can make the wire more susceptible to breakage and reduce work efficiency.

[0016] Also, The present invention Substrate holding device the device comprises a spin base that rotates around a rotation axis that extends vertically, at least three holding pins that are erected on the spin base in a ring shape around the rotation axis, the holding pins including at least one fixed holding pin and at least one movable holding pin, and a pin drive mechanism that rotates the movable holding pins around the vertical axis to hold the substrate by clamping the sides of the substrate using the holding pins including the fixed holding pin and the movable holding pin, the movable holding pin comprising a rotatable pin body and a force conversion mechanism that converts a pulling force transmitted from the pin drive mechanism into a rotational force that rotates the pin body, the pin drive mechanism comprising a wire whose tip end is connected to the force conversion mechanism and that transmits the pulling force to the force conversion mechanism, and a pulling portion that pulls the base end of the wire, In the holding pins arranged in a ring shape, the plurality of movable holding pins are arranged continuously, and the pulling portion is arranged so that the pulling portion and the plurality of movable holding pins sandwich the rotation shaft in a plan view. It is characterized by the following. In the substrate holding device according to the present invention, a movable holding pin used to hold a substrate includes a rotatable pin body and a force conversion mechanism that converts a pulling force transmitted from a pin drive mechanism into a rotational force that rotates the pin body. The pin drive mechanism includes a wire whose tip is connected to the force conversion mechanism and transmits the pulling force to the force conversion mechanism, and a pulling unit that pulls the base end of the wire. In other words, the movable holding pin is rotated by pulling the wire. Therefore, compared to a link mechanism, the structure for rotating the movable holding pin is simplified, thereby reducing the number of parts and improving assembly efficiency. Furthermore, the weight of the spin chuck can be reduced. Therefore, for example, acceleration responsiveness can be improved when rotating the spin chuck. Also, The weight of the spin base can be balanced evenly.

[0017] A substrate processing system according to the present invention includes the substrate holding device described above and a nozzle that ejects a processing liquid onto the substrate held by the substrate holding device. [Effects of the Invention]

[0018] According to the substrate holding device and substrate processing system of the present invention, it is possible to simplify the structure and reduce the weight. [Brief explanation of the drawings]

[0019] [Figure 1] 1 is a schematic configuration diagram of a substrate processing apparatus according to an embodiment; [Figure 2] FIG. 1 is a plan view of the spin base and six holding pins. [Figure 3] 10 is a bottom view of the top cover of the spin base when the three movable holding pins are in a closed state. FIG. [Figure 4] 1A is a plan view showing the configuration of the tip of the lever and the tip of the wire, and FIG. 1B is a front view of FIG. [Figure 5] 10A and 10B are diagrams illustrating a configuration of three movable holding pins and a single tensioning portion. [Figure 6] 10 is a bottom view of the top cover of the spin base when the three movable holding pins are in the open state. FIG. [Figure 7] 10 is a bottom view of the movable holding pin when the movable holding pin is pressed against a side surface of the substrate. FIG. [Figure 8] 10A and 10B are diagrams illustrating a configuration for adjusting the length of a lever member according to a modified example. [Figure 9] 10A and 10B are diagrams showing another configuration for adjusting the length of the lever member according to the modified example. [Figure 10] 10A is a front view of a tensioning portion according to a modified example, and FIG. 10B is a left side view of FIG. [Figure 11] 10(a) and 10(b) are bottom views of a movable support pin according to a modified example. [Example]

[0020] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a schematic diagram showing a substrate processing apparatus 1 according to the embodiment. Fig. 2 is a plan view of a spin base 13 and six holding pins 15 as seen from above. The substrate processing apparatus 1 corresponds to the substrate processing system of the present invention. The substrate holding unit 2 corresponds to the substrate holding device of the present invention.

[0021] (1) Configuration of the substrate processing apparatus 1 1 and 2, the substrate processing apparatus 1 includes a substrate holder 2 that holds a substrate W, and a nozzle 3 that discharges a processing liquid onto the substrate W held by the substrate holder 2. A pipe 5 is connected to the nozzle 3. A base end of the pipe 5 is connected to a processing liquid supply source 6. The processing liquid is sent from the processing liquid supply source 6 to the nozzle 3 via the pipe 5. An on-off valve V is provided in the pipe 5. The on-off valve V is configured to discharge the processing liquid from the nozzle 3 and to stop the discharge of the processing liquid.

[0022] Examples of processing liquids include photoresist liquid, developer, pure water, etching liquid, and cleaning liquid. Examples of pure water include deionized water (DIW). Examples of etching liquids include hydrofluoric acid (HF), a mixture of hydrofluoric acid and nitric acid (HNO3), a mixture of hydrofluoric acid and hydrogen peroxide (H2O2), and TMAH (tetramethylammonium hydroxide). Examples of cleaning liquids include SC1, SC2, and SPM. SC1 is a mixture of ammonia, hydrogen peroxide, and water. SC2 is a mixture of hydrochloric acid (HCl), hydrogen peroxide, and water. SPM is a mixture of sulfuric acid (H2SO4) and hydrogen peroxide.

[0023] The substrate holding unit 2 includes a spin chuck 7, a rotating shaft 9, and a rotation drive unit 11. The spin chuck 7 holds (grabs) the substrate W. The spin chuck 7 includes a disk-shaped spin base 13 and six holding pins 15. As shown in Figures 1 and 2, a rotation axis AX1 passes through the center of the spin base 13. The tip of the rotating shaft 9 is connected to the spin base 13. The base end of the rotating shaft 9 is connected to a rotation output shaft (not shown) of the rotation drive unit 11. The rotation drive unit 11 rotates the spin base 13 around the rotation axis AX1 via the rotating shaft 9. The rotation drive unit 11 includes, for example, an electric motor.

[0024] As shown in FIG. 2, six holding pins 15 are arranged in a ring shape around the rotation axis AX1 on the spin base 13. The six holding pins 15 are arranged at approximately equal angular intervals. The six holding pins 15 consist of three movable holding pins 17A, 17B, and 17C and three fixed holding pins 19. When the three movable holding pins 17A, 17B, and 17C are not to be distinguished from one another, they are referred to as "movable holding pins 17."

[0025] Each movable support pin 17 can rotate around a vertical axis AX2 passing through the interior thereof. Unlike the movable support pins 17, the fixed support pins 19 are not configured to be rotatable. In this embodiment, as shown in FIG. 2, three movable support pins 17 are arranged in a right semicircular portion of the spin chuck 7, and three fixed support pins 19 are arranged in the remaining left semicircular portion of the spin chuck 7. That is, in the ring-shaped arrangement of support pins 15, the three movable support pins 17A, 17B, and 17C are arranged consecutively, and the three fixed support pins 19 are also arranged consecutively.

[0026] Each of the three fixed holding pins 19 includes an abutment portion 21, an inclined portion 23, and a columnar portion 25. The abutment portion 21, the inclined portion 23, and the columnar portion 25 are arranged in this order from top to bottom. The abutment portion 21 is a cylindrical member. The abutment portion 21 abuts against the side surface of the substrate W. The inclined portion 23 is the portion on which the substrate W is placed.

[0027] (1-1) Configuration for Rotating Each Movable Holding Pin 17 The spin base 13 has a space therein. The spin base 13 includes a top cover 13A and a bottom cover 13B. The bottom cover 13B is configured so that it can be separated from the top cover 13A. Six retaining pins 15 are provided on the top cover 13A. Each of the three movable retaining pins 17 includes a rotatable pin body 27 and a lever member 29 that extends linearly horizontally from the pin body 27. The lever member 29 corresponds to the force conversion mechanism of the present invention.

[0028] Like the fixed support pin 19, the pin body 27 includes a contact portion 21, an inclined portion 23, and a columnar portion 25. The contact portion 21 is eccentric with respect to the vertical axis AX2, and when the movable support pin 17 rotates about the vertical axis AX2, the contact portion 21 rotates about the vertical axis AX2 in an arc. This allows the contact portion 21 to be brought into contact with the side surface of the substrate W or moved away from the side surface of the substrate W. The pin body 27 is provided so as to protrude upward from the spin chuck 7 and the upper surface 13U of the top cover 13A.

[0029] FIG. 3 is a bottom view of the top cover 13A of the spin base 13. The lever member 29 is disposed on the side of the bottom surface 13D of the top cover 13A. That is, the lever member 29 is disposed inside the spin base 13 (spin chuck 7). The lever member 29 includes a protrusion 31 and a lever tip 33. The protrusion 31 protrudes horizontally from the pin body 27. The lever tip 33 holds a tip 47 of a wire 43, which will be described later. The lever tip 33 is attached to the protrusion 31 with, for example, a screw 35.

[0030] The substrate holder 2 includes a pin drive mechanism 41. The pin drive mechanism 41 rotates each of the three movable hold pins 17 around a vertical axis AX2 passing through the interior of each of the three movable hold pins 17.

[0031] The pin drive mechanism 41 includes three wires 43, 44, and 45 inside the spin base 13. A tip portion 47 of the first wire 43 is connected to the tip of the lever member 29 of the first movable retaining pin 17A. A tip portion 47 of the second wire 44 is connected to the tip of the lever member 29 of the second movable retaining pin 17B. A tip portion 47 of the third wire 45 is connected to the tip of the lever member 29 of the third movable retaining pin 17C.

[0032] As shown in Figures 4(a) and 4(b), the tip portion 47 of each of the three wires 43 to 45 is formed in a cylindrical shape. A linear wire body 48 is connected to the side of the cylindrical tip portion 47. Each of the wires 43 to 45 is made of a thin metal wire, such as a steel wire. However, each of the wires 43 to 45 may be made of a wire made of a material other than metal.

[0033] For example, the first wire 43 (wire main body 48) is passed through a slit 33B provided in the semi-cylindrical portion 33A of the lever tip portion 33. The slit 33B is formed to extend in an arc shape in the horizontal direction. Furthermore, the tip portion 47 of the first wire 43 is housed in the semi-cylindrical portion 33A of the lever tip portion 33. As a result, the tip portion 47 is supported by the semi-cylindrical portion 33A. With this configuration, the first wire 43 is rotatable around the tip portion 47 relative to the lever tip portion 33 (lever member 29) in a plan view. The other two wires 44, 45 are configured in the same manner as the first wire 43.

[0034] Returning to FIG. 3, the pin drive mechanism 41 includes a compression coil spring 49, a contact member 51, a spring receiving portion 53, a pin-side guide member 55, a central guide member 57, and a single tension member 59. The contact member 51 includes a through-hole 51A. The spring receiving portion 53 includes a through-hole 53A. The spring receiving portion 53 is attached to the top cover 13A of the spin base 13 with, for example, a screw. For example, the first wire 43 passes, starting from the tip end 47, through the slit 33B, the through-hole 51A of the contact member 51, the compression coil spring 49, and the through-hole 53A of the spring receiving portion 53, in that order.

[0035] The lever tip portion 33 and the spring receiving portion 53 are configured to sandwich the compression coil spring 49 and the contact member 51. In this configuration, the base end of the compression coil spring 49 is supported on the top cover 13A by the spring receiving portion 53. The tip of the compression coil spring 49 is configured to be connected to the lever tip portion 33 of the lever member 29 via the contact member 51.

[0036] The first wire 43 that has passed through the through hole 53A of the spring receiving portion 53 is guided by the pin side guide member 55 and the central guide member 57. The base end of the first wire 43 is connected to a slider 65 (described later) of the pulling portion 59. The base ends of the two wires 44 and 45 are also connected to the slider 65.

[0037] The pin side guide member 55 is provided on the top cover 13A downstream of the spring receiving portion 53. The pin side guide member 55 comes into contact with the tube 61 on the outer periphery of each of the three wires 43 to 45. The pin side guide member 55 is an arc-shaped member. The guide portions of the pin side guide member 55 and the central guide member 57 each have a shape like a strip-shaped plate bent into an arc. The central guide member 57 is provided on the top cover 13A and is disposed on the inner periphery of the six holding pins 15 arranged in a ring shape. The central guide member 57 is a semicircular (i.e., arc-shaped) member centered on the rotation axis AX1.

[0038] The pin-side guide member 55 and the central guide member 57 are each formed to have a predetermined bending radius (curvature radius) or greater. This prevents the wires 43 to 45 from bending less than the minimum bending radius. If the wires 43 to 45 bend less than the minimum bending radius, for example, the wires may be easily cut or work efficiency may decrease.

[0039] Each of the wires 43 to 45 is covered with a tube 61 between the through hole 53A of the spring receiving portion 53 and the portion of the tensioning portion 59 just before a slider 65 (described later). The tube 61 is made of, for example, resin. Each of the wires 43 to 45 is configured to be able to move within the respective tube 61. The three tubes 61 are separate from one another.

[0040] FIG. 5 is a diagram illustrating the configuration of three movable holding pins 17 and a single pulling unit 59. The pulling unit 59 pulls the base end of each of the three wires 43 to 45. The pulling unit 59 includes a rail 63, a slider 65, and a driving unit 67. The rail 63 and the slider 65 are provided inside the spin base 13. The rail 63 is attached to the lower surface 13D of the top cover 13A. The rail 63 extends horizontally and linearly. The slider 65 is supported by the rail 63. The slider 65 is configured to be movable along the rail 63. The driving unit 67 moves the slider 65.

[0041] The slider 65 has a first magnet 69. The drive unit 67 is provided at a position separated from the spin base 13. That is, the drive unit 67 is provided below the spin base 13 (see FIGS. 1 and 5). The drive unit 67 has a movable member 67A and an elevating unit (linear actuator) 67B. The movable member 67A has a second magnet 71. The elevating unit 67B elevates the second magnet 71 (movable member 67A). The elevating unit 67B has, for example, an air cylinder, an electromagnetic solenoid, or an electric motor.

[0042] When the spin base 13 stops at a predetermined position (predetermined rotation position), the drive unit 67 moves the slider 65 by bringing the second magnet 71 closer to the first magnet 69. This point will be explained in detail. The drive unit 67 is fixed and does not rotate together with the spin base 13. The spin base 13 is stopped at a predetermined position so that the first magnet 69 of the slider 65 faces the second magnet 71 of the drive unit 67.

[0043] As shown in FIG. 5, the first magnet 69 is arranged, for example, with its north pole and south pole positioned in that order from bottom to top. The second magnet 71 is arranged with its south and north poles horizontal. When the lifting unit 67B raises the second magnet 71, the north pole of the first magnet 69 and the north pole of the second magnet 71 repel each other, and the north pole of the first magnet 69 and the south pole of the second magnet 71 attract each other. Therefore, the slider 65 moves from the north pole of the second magnet 71 toward the south pole. This causes the slider 65 to pull the three base ends of the three wires 43 to 45. The arrangement of the north and south poles of the two magnets 69 and 71 is adjusted as appropriate.

[0044] In addition, the tensioning portion 59 is arranged so that the rotation axis AX1 is sandwiched between the tensioning portion 59 and the three movable holding pins 17 in a plan view (see FIGS. 2 and 3). This makes it possible to evenly balance the weight of the spin base 13.

[0045] Returning to FIG. 1, the substrate processing apparatus 1 includes a control unit 78 and a storage unit (not shown). The control unit 78 controls each component of the substrate processing apparatus 1. The control unit 78 includes one or more processors, such as a central processing unit (CPU). The storage unit includes at least one of a read-only memory (ROM), a random-access memory (RAM), and a hard disk. The storage unit stores computer programs required to control each component of the substrate processing apparatus 1. The control unit 78 may be included in the substrate holding unit 2. In this case, the control unit 78 of the substrate holding unit 2 controls each component of the substrate holding unit 2.

[0046] (2) Operation of the substrate processing apparatus 1 Next, the operation of the substrate processing apparatus 1 will be described. As shown in Figures 2 and 5, the spin base 13 is stopped at a predetermined position so that the first magnet 69 of the slider 65 is positioned opposite the second magnet 71 of the drive unit 67 in a plan view. Furthermore, when the substrate holder 2 is not holding a substrate W, the three movable holding pins 17 of the substrate holder 2 are normally in a closed state (fully closed state) due to the elastic force of the compression coil spring 49. Therefore, when the substrate W is to be received by the substrate holder 2, the three movable holding pins 17 of the substrate holder 2 must be opened.

[0047] Therefore, the lifting unit 67B of the driving unit 67 of the tensioning unit 59 lifts the second magnet 71 (movable member 67A) to bring the second magnet 71 closer to the second magnet 71 of the slider 65. This causes the slider 65 to move linearly along the rail 63, and thereby the slider 65 pulls the three base ends of the three wires 43 to 45.

[0048] Here, the three tip ends 47 of the three wires 43 to 45 are connected to the three lever members 29 of the three movable retaining pins 17, respectively. Therefore, the three lever members 29 are pulled by the three wires 43 to 45. As shown in FIG. 6, each of the three lever members 29 rotates counterclockwise about the vertical axis AX2. That is, the three movable retaining pins 17 rotate counterclockwise about the vertical axis AX2. Furthermore, with this rotation, the distance between the contact member 51 and the spring seat 53 becomes narrower, and the compression coil spring 49 is compressed and deformed.

[0049] Furthermore, for example, when the base end of the first wire 43 is pulled and the first movable retaining pin 17A is rotated, the abutment portion 21 (eccentric portion) of the first movable retaining pin 17A also rotates in an arc around the vertical axis AX2. The same applies to the remaining two movable retaining pins 17B and 17C. As a result, the three abutment portions 21 of the three movable retaining pins 17 spread out horizontally in a plan view. This causes the three movable retaining pins 17 to enter an open state (fully open state).

[0050] After the three movable holding pins 17 are in the open state, a substrate transport robot (not shown) transports the substrate W onto the six inclined portions 23 of the six holding pins 15. After the substrate W is placed on the six inclined portions 23, the lifting / lowering portion 67B of the driving portion 67 lowers the second magnet 71. This causes the slider 65 to no longer pull the three wires 43 to 45.

[0051] For example, when the tensioning portion 59 is not pulling the base end of the first wire 43, the elastic force (restoring force) of the compression coil spring 49 causes the pin body 27 of the first movable hold pin 17A to rotate clockwise (counterclockwise) about the vertical axis AX2 (see FIG. 3). As a result, the abutment portion 21, which is eccentric with respect to the vertical axis AX2, moves about the vertical axis AX2 and comes into contact with the side surface of the substrate W. Similarly, the two abutment portions 21 of the two movable hold pins 17B and 17C also come into contact with the side surface of the substrate W. As a result, the substrate holder 2 holds the substrate W by sandwiching the side surface of the substrate W using the six hold pins 15. Note that when the substrate holder 2 (six hold pins 15) holds the substrate W, each of the three movable hold pins 17 assumes a state between the closed state of FIG. 3 and the open state of FIG. 6 (see FIG. 7).

[0052] After the substrate holder 2 holds the substrate W, the substrate processing apparatus 1 operates the on-off valve V to discharge a preset amount of processing liquid from the nozzle 3 toward the substrate W. Furthermore, the rotation driver 11 rotates the spin base 13, which holds the substrate W, about the rotation axis AX1 via the rotation shaft 9 at any timing. As the substrate W is rotated, the processing liquid supplied onto the substrate W is spread over the substrate.

[0053] After discharging the processing liquid to perform a predetermined process on the substrate W, the substrate holder 2 stops the spin base 13 at a predetermined position (predetermined rotation position) so that the first magnet 69 of the slider 65 faces the second magnet 71 of the drive unit 67 in a plan view. Thereafter, the lifting unit 67B of the tensioning unit 59 lifts the second magnet 71 to bring it closer to the second magnet 71 of the slider 65. This pulls the three base ends of the three wires 43 to 45.

[0054] This causes the three movable hold pins 17 (pin bodies 27) to rotate counterclockwise about the vertical axis AX2 (see FIG. 6), causing the three contact portions 21 of the three movable hold pins 17 to move away from the side surfaces of the substrate W. This causes the six hold pins 15 to enter an open state in which they are not clamping the side surfaces of the substrate W.

[0055] A substrate transport robot (not shown) receives the substrate W from above the six inclined portions 23 of the six holding pins 15 of the substrate holder 2, and transports the substrate W to its next destination.

[0056] According to this embodiment, for example, the first movable support pin 17A used to support the substrate W includes a rotatable pin body 27 and a lever member 29 extending horizontally from the pin body 27. The pin drive mechanism 41 includes a first wire 43 connected to the distal end of the lever member 29 and a tensioning portion 59 that pulls the proximal end of the first wire 43 to rotate the pin body 27 around the vertical axis AX2. That is, the first movable support pin 17A is rotated by pulling the first wire 43. Therefore, compared with a link mechanism, the structure for rotating the first movable support pin 17A is simplified, thereby reducing the number of parts and improving assembly efficiency. Furthermore, the weight of the spin chuck 7 can be reduced. Therefore, for example, acceleration responsiveness when rotating the spin chuck 7 can be improved. Furthermore, the torque required to rotate the movable support pin 17 can be easily obtained by the lever member 29.

[0057] Furthermore, the substrate holding unit 2 includes three movable holding pins 17 and a single pulling unit 59. The pulling unit 59 pulls the base ends of the three wires 43 to 45. Therefore, it is not necessary to provide a pulling unit 59 for each of the three wires 43 to 45, which further simplifies the structure and reduces the weight of the spin chuck 7.

[0058] The tensioning unit 59 also includes a rail 63 attached to the spin base 13 and extending horizontally, a slider 65 supported by the rail 63 and movable along the rail 63, and a driving unit 67 that moves the slider 65. The base ends of the three wires 43 to 45 are connected to the slider 65. The base ends of the three wires 43 to 45 can be pulled by the slider 65 that moves along the rail 63.

[0059] Furthermore, slider 65 has a first magnet 69. Drive unit 67 has a second magnet 71. Drive unit 67 is provided at a position spaced apart from spin base 13. When spin base 13 stops at a predetermined position, drive unit 67 moves slider 65 by bringing second magnet 71 closer to first magnet 69. Slider 65 can be moved by second magnet 71 of drive unit 67, which is provided at a position spaced apart from spin base 13.

[0060] The present invention is not limited to the above-described embodiment, but can be modified as follows.

[0061] (1) In the above-described embodiment, each movable retaining pin 17 includes a lever member 29. The lever member 29 may be configured to be adjustable in length. For example, as shown in FIG. 8, the lever tip 33 may have one or more elongated holes 33D corresponding to the number of screws 35. In this case, the lever tip 33 can be extended relative to the protrusion 31. Also, as shown in FIG. 9, a plurality of lever tips 81A, 81B having different lengths in the radial direction may be prepared, and one of the plurality of lever tips 81A, 81B may be attached to the protrusion 31.

[0062] Since the length of the lever member 29 can be adjusted, it is possible to easily adjust the torque required to rotate the first movable hold pin 17A, for example. In addition, the torque of each of the three movable hold pins 17 can be easily adjusted individually.

[0063] (2) In the above-described embodiments and modified example (1), the tensioning unit 59 includes a rail 63 and a slider 65. The slider 65 moves horizontally linearly along the rail 63. In contrast to this configuration, the tensioning unit 59 may include a rotor 83 and a rotor support portion 85, as shown in FIGS. 10(a) and 10(b). The rotor 83 is rotatable about a horizontal axis AX4. The rotor 83 has a winding portion 83A around which the three wires 43 are wound. That is, the three base ends of the three wires 43 to 45 are connected to the winding portion 83A of the rotor 83, which winds and pulls the wires 43 to 45. The rotor support portion 85 is attached to the lower surface 13D of the top cover 13A and rotatably supports the rotor 83.

[0064] The drive unit 67 rotates the rotating body 83. The rotating body 83 has a first magnet 69. The drive unit 67 has a second magnet 71. The drive unit 67 is provided at a position separated from the spin base 13. In other words, the drive unit 67 is disposed below the bottom cover 13B of the spin base 13. The drive unit 67 is configured to rotate the rotating body 83 by bringing the second magnet 71 closer to the first magnet 69 when the spin base 13 stops at a predetermined position (predetermined rotation position).

[0065] In the rotor 83, the north and south poles of the first magnet 69 are arranged along the radial direction. In the drive unit 67, the north and south poles of the second magnet 71 are arranged along the vertical direction. The tension unit 59 of this modified example utilizes the repulsive force of the two magnets 69, 71, but may also utilize their attractive force. The arrangement of the north and south poles of each of the two magnets 69, 71 is adjusted as appropriate.

[0066] According to the configuration of this modification, the base ends of the three wires 43 to 45 can be pulled by the rotating body 83 that winds and pulls the three wires 43 to 45. In addition, the rotating body 83 can be rotated by the second magnet 71 of the driving unit 67 that is provided at a position separated from the spin base 13.

[0067] (3) In the above-described embodiment and each modified example, the pin drive mechanism 41 includes the compression coil spring 49. However, the pin drive mechanism 41 may include a tension coil spring. Furthermore, the spring is not limited to a coil spring. In other words, the pin drive mechanism 41 may include any elastic member that functions like the compression coil spring 49.

[0068] (4) In the above-described embodiment and each modified example, the three base ends of the three wires 43 to 45 are pulled by a single pulling unit 59. However, three pulling units 59 may be provided to pull the three wires 43 to 45, respectively. Alternatively, the first pulling unit 59 may be configured to pull the three wires 43 to 45, and the second pulling unit may be configured to pull the other three wires.

[0069] (5) In the above-described embodiment and each modified example, the nozzle 3 is disposed above the substrate W in order to discharge the processing liquid onto the upper surface of the substrate W. In this regard, the nozzle 3 may be provided on the spin base 13 in order to discharge the processing liquid onto the lower surface of the substrate W.

[0070] (6) In the above-described embodiment and each modified example, for example, the first movable retaining pin 17A includes a rod-shaped lever member 29, and the tip end portion 47 of the first wire 43 is connected to the tip side of the lever member 29. In this regard, as shown in FIG. 11(a), the first movable retaining pin 17A may include, instead of the lever member 29, a ring-shaped ring protrusion 87 that has a diameter larger than that of the pin main body 27 and protrudes horizontally from the outer circumferential surface of the pin main body 27. The tip end of the first wire 43 is attached to the ring protrusion 87, and the first wire 43 is configured to be able to be wound around the ring protrusion 87. The same applies to the other two wires 44, 45.

[0071] 11(b), the first movable holding pin 17 may include a pinion 91 and a rack 92 instead of the lever member 29. The pinion 91 has a number of teeth arranged along the outer circumferential surface of the pin body 27. The rack 92 has a number of teeth arranged in a line so as to mesh with the teeth of the pinion 91. The tip end of the first wire 43 is attached to the rack 92. When the base end of the first wire 43 is pulled, the rack 92 moves horizontally in a straight line, and the first movable holding pin 17A, which is provided with the pinion 91 that meshes with the rack 92, rotates around the vertical axis AX2. The other two wires 44, 45 operate in the same manner.

[0072] The above-mentioned ring protrusion 87 corresponds to the force conversion mechanism of the present invention. The force conversion mechanism converts the pulling force transmitted from the pin drive mechanism 41 into a rotational force that rotates the pin body 27. The above-mentioned pinion 91 and rack 92 also correspond to the force conversion mechanism of the present invention.

[0073] (7) In the above-described embodiment and each modified example, the substrate holder 2 includes six holding pins 15. However, the substrate holder 2 may include three or more holding pins 15.

[0074] (8) In the above-described embodiment and each modified example, the six holding pins 15 are composed of three movable holding pins 17 and three fixed holding pins 19. In this regard, the six holding pins 15 only need to include at least one movable holding pin 17.

[0075] For example, the substrate holder 2 may include two movable support pins 17 and four fixed support pins 19. In this case, the two movable support pins 17 and two of the four fixed support pins 19 may be configured to sandwich the side surfaces of the substrate W. The remaining two fixed support pins 19 may not participate in the operation of sandwiching the side surfaces of the substrate W.

[0076] (9) In the above-described embodiment and each modified example, the pulling unit 59 includes the first magnet 69 and the driving unit 67. In this regard, the pulling unit 59 may include, for example, an electric motor or an electromagnetic solenoid inside the spin base 13 in order to drive the slider 65 or the rotating body 83. [Explanation of symbols]

[0077] 1... Substrate processing equipment 2 … Board holding part 3... Nozzle 13...Spin Base 15... Retaining pin 17(17A,17B,17C) … Movable holding pin 19... Fixed retaining pin 21 … Contact part 27...Pin body 29 ... Lever member 31…Protrusion 33, 81A, 81B ... Lever tip 33D … Long hole 35...Screw 41 ... Pin drive mechanism 43, 44, 45 ... Wire 47 … Tip 55 ... Pin side guide member 57 ... Central guide member 59 ... Pulling part 63 ... Rail 65 ... slider 67 ... Drive unit 69... First magnet 71 ... Second magnet 78 ... Control section 83... Rotating body 85 ... Rotating body support part AX1: Rotation axis AX2: Vertical axis AX4…Horizontal axis

Claims

1. a spin base that rotates around a vertically extending rotation axis; At least three holding pins are provided on the spin base in a ring shape around the rotation axis, the holding pins including at least one fixed holding pin and at least one movable holding pin; a pin drive mechanism that rotates the movable holding pins around a vertical axis to hold the substrate by sandwiching the side surfaces of the substrate using the holding pins, including the fixed holding pins and the movable holding pins; The movable holding pin includes a rotatable pin body and a force conversion mechanism that converts the pulling force transmitted from the pin drive mechanism into a rotational force that rotates the pin body, the pin drive mechanism includes a wire whose tip is connected to the force conversion mechanism and which transmits the pulling force to the force conversion mechanism; a pulling portion that pulls the proximal end portion of the wire, the force conversion mechanism is a lever member extending horizontally from the pin body, The tip of the wire is connected to the tip side of the lever member, The substrate holding device is characterized in that the lever member is configured so that its length can be adjusted.

2. 2. The substrate holding device according to claim 1, The movable holding pin is provided in plurality, The tensioning portion is single, The substrate holding device is characterized in that the pulling section pulls base ends of the plurality of wires respectively connected to the force conversion mechanisms of the plurality of movable holding pins.

3. A spin base that rotates around a vertically extending rotation axis; At least three holding pins are provided on the spin base in a ring shape around the rotation axis, the holding pins including at least one fixed holding pin and at least one movable holding pin; a pin drive mechanism that rotates the movable holding pins around a vertical axis to hold the substrate by sandwiching the side surfaces of the substrate using the holding pins, including the fixed holding pins and the movable holding pins; The movable holding pin includes a rotatable pin body and a force conversion mechanism that converts the pulling force transmitted from the pin drive mechanism into a rotational force that rotates the pin body, the pin drive mechanism includes a wire whose tip is connected to the force conversion mechanism and which transmits the pulling force to the force conversion mechanism; a pulling portion that pulls the proximal end portion of the wire, the tensioning unit includes a rail attached to the spin base and extending horizontally, a slider supported by the rail and movable along the rail, and a drive unit that moves the slider; A substrate holding device, characterized in that a base end of the wire is connected to the slider.

4. 4. The substrate holding device according to claim 3, The slider has a first magnet, the drive unit has a second magnet, the drive unit is provided at a position spaced apart from the spin base, The substrate holding device, wherein the drive unit moves the slider by bringing the second magnet closer to the first magnet when the spin base stops at a predetermined position.

5. A spin base that rotates around a vertically extending rotation axis; At least three holding pins are provided on the spin base in a ring shape around the rotation axis, the holding pins including at least one fixed holding pin and at least one movable holding pin; a pin drive mechanism that rotates the movable holding pins around a vertical axis to hold the substrate by sandwiching the side surfaces of the substrate using the holding pins, including the fixed holding pins and the movable holding pins; The movable holding pin includes a rotatable pin body and a force conversion mechanism that converts the pulling force transmitted from the pin drive mechanism into a rotational force that rotates the pin body, the pin drive mechanism includes a wire whose tip is connected to the force conversion mechanism and which transmits the pulling force to the force conversion mechanism; a pulling portion that pulls the proximal end portion of the wire, the tensioning unit includes a rotating body that is rotatable around a horizontal axis, a rotating body support unit that is attached to the spin base and rotatably supports the rotating body, and a drive unit that rotates the rotating body; A substrate holding device, characterized in that the base end of the wire is connected to the rotating body for winding and pulling the wire.

6. 6. The substrate holding device according to claim 5, the rotating body has a first magnet, the drive unit has a second magnet, the drive unit is provided at a position spaced apart from the spin base, The substrate holding device according to claim 1, wherein the drive unit rotates the rotating body by bringing the second magnet closer to the first magnet when the spin base stops at a predetermined position.

7. A spin base that rotates around a vertically extending rotation axis; At least three holding pins are provided on the spin base in a ring shape around the rotation axis, the holding pins including at least one fixed holding pin and at least one movable holding pin; a pin drive mechanism that rotates the movable holding pins around a vertical axis to hold the substrate by sandwiching the side surfaces of the substrate using the holding pins, including the fixed holding pins and the movable holding pins; The movable holding pin includes a rotatable pin body and a force conversion mechanism that converts the pulling force transmitted from the pin drive mechanism into a rotational force that rotates the pin body, the pin drive mechanism includes a wire whose tip is connected to the force conversion mechanism and which transmits the pulling force to the force conversion mechanism; a pulling portion that pulls the proximal end portion of the wire, The substrate holding device further comprises an arc-shaped guide member provided on the spin base for guiding the wire.

8. A spin base that rotates around a vertically extending rotation axis; At least three holding pins are provided on the spin base in a ring shape around the rotation axis, the holding pins including at least one fixed holding pin and at least one movable holding pin; a pin drive mechanism that rotates the movable holding pins around a vertical axis to hold the substrate by sandwiching the side surfaces of the substrate using the holding pins, including the fixed holding pins and the movable holding pins; The movable holding pin includes a rotatable pin body and a force conversion mechanism that converts the pulling force transmitted from the pin drive mechanism into a rotational force that rotates the pin body, the pin drive mechanism includes a wire whose tip is connected to the force conversion mechanism and which transmits the pulling force to the force conversion mechanism; a pulling portion that pulls the proximal end portion of the wire, In the holding pins arranged in a ring shape, the plurality of movable holding pins are arranged continuously, The substrate holding device is characterized in that the tensioning section is arranged such that the tensioning section and the plurality of movable holding pins sandwich the rotation shaft in a plan view.

9. a substrate holding device according to any one of claims 1 to 8; a nozzle that ejects a processing liquid onto the substrate held by the substrate holding device; A substrate processing system comprising:

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