Processing equipment

Abstract

To provide a processing device for enabling an operator to easily reach a target screen.SOLUTION: A processing device is provided, including an input interface, a display device that can display a plurality of screen areas, and a control unit. The plurality of screen areas include a small screen area for character inputs, and a working screen area to be used for at least one display of setting of a processing condition, an operation instruction, and a recorded processing condition, and the control unit includes: a storage part for storing a plurality of operating screens each including a predetermined character string respectively displayable in the operating screen areas, and a predetermined title for each working screen while associating a character string included in one working screen with a title of the one working screen; a retrieval part for retrieving and extracting a character sting including characters inputted in the small screen area for character inputs in the storage part; and an output part for displaying the character sting extracted by the retrieval part and the title of a working screen including the character string in association with each other in the display device.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a processing apparatus including a holding table that holds a workpiece on a holding surface, and a processing unit that processes the workpiece held by the holding table. [Background technology]

[0002] When processing semiconductor wafers (workpieces) to manufacture chips such as semiconductor devices, various processing equipment is used, such as cutting equipment, grinding equipment, polishing equipment, laser processing equipment, etc. When operating the processing equipment, an operator must input processing conditions (recipe) and settings for controlling each component of the processing equipment into the processing equipment.

[0003] An operator inputs data to a processing device via an input display device such as a touch panel (see Patent Document 1). The content displayed on the input display device is usually in a hierarchical structure, and various contents are displayed on each layer.

[0004] The more complex the processing of workpieces in a processing device, the more items that need to be input into the processing device. Items that need to be input include not only processing conditions, but also confirmation of whether the processing device is operating properly and the execution of maintenance for the processing device.

[0005] The increase in the number of items that need to be input makes it difficult for an operator to input the desired items into the processing device. For example, when making a predetermined setting for the processing device, a screen for making the predetermined setting must first be displayed on the input display device, but for an operator with low proficiency, it may take an extremely long time to reach that screen. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2011-255472 Summary of the Invention [Problem to be solved by the invention]

[0007] The present invention has been made in view of the above problems, and has an object to provide a processing device that allows an operator to easily reach a target screen. [Means for solving the problem]

[0008] According to one aspect of the present invention, there is provided a processing apparatus having a holding table that holds a workpiece on a holding surface, and a processing unit that processes the workpiece held by the holding table, the processing apparatus including an input interface used by an operator to input characters via the input interface. 、 or , letters and The apparatus comprises a display device capable of displaying a plurality of screen areas into which instructions are input, and a control unit having a processor and controlling the holding table, the machining unit, the input interface and the display device, wherein the plurality of screen areas include a small character input screen area into which the characters are input, and a work screen area used for setting the machining conditions of the workpiece in the machining device, instructing the machining device to operate, and displaying at least one of the machining conditions recorded in the machining device, and the control unit controls a plurality of work screens each including a predetermined character string and capable of being displayed in the work screen area, and a predetermined character string for each work screen. a storage unit that stores a character string included in one work screen and a title of the one work screen in a state where the character string is associated with the title of the one work screen; a search unit that searches the storage unit for and extracts a character string including the character input in the small screen area for character input; and an output unit that causes the character string extracted by the search unit to be displayed on the display device in a linked state with the title of the work screen including the character string, and the control unit causes the character string including the input character to be displayed on the display device in a linked state with the title of the work screen including the character string, in accordance with the character input in the small screen area for character input.

[0009] Preferably, the control unit converts the alphabets input in the character input small screen area into Using It has a Japanese search function that can search for Japanese entered in Roman characters.

[0010] Preferably, the character string containing the input characters and the title of the work screen containing the character string are displayed in a linked state in a search screen area on a part of the display device, and when the search screen area is displayed, in response to the character string or the title being selected, the control unit displays the work screen corresponding to the selected character string or the title in the background of the search screen area. [Effects of the Invention]

[0011] In a processing device according to one embodiment of the present invention, when an operator searches for a target screen, the operator inputs characters (e.g., keywords) used on the target screen into a small screen area for character input, and the character string containing the input characters is linked to the title of the work screen containing the character string and displayed on the display device.

[0012] In this case, when the worker touches the character string or the title, the content of the work screen corresponding to the title is displayed on the display device, so the worker can reach the target screen by guessing and entering the characters contained in the target screen. Therefore, even if the worker has a low level of proficiency with the processing device, it is relatively easy for the worker to reach the target screen. [Brief explanation of the drawings]

[0013] [Figure 1] FIG. 2 is a perspective view of the laser processing device. [Figure 2] FIG. 10 is a functional block diagram illustrating how a control unit performs search and output. [Figure 3] FIG. 10 is a diagram illustrating an example of an entire display area displayed on a touch panel. [Figure 4] FIG. 10 is a diagram showing an example of the entire display area when a search button is touched. [Figure 5] FIG. 10 is a diagram showing an example of an entire display area when a character string is entered and a search is executed. [Figure 6] FIG. 10 is a diagram showing an example of the entire display area when a character string is selected. [Figure 7] FIG. 10 is a diagram showing an example of the entire display area when the search screen area is closed. DETAILED DESCRIPTION OF THE INVENTION

[0014] An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a perspective view of a laser processing device (processing device) 2. The X-axis direction (processing feed direction), Y-axis direction (indexing feed direction), and Z-axis direction (up-down direction) shown in Fig. 1 are perpendicular to one another.

[0015] The laser processing apparatus 2 has a housing 4 that covers the main body of the apparatus. A laser oscillator (not shown) is provided inside the housing 4. The laser oscillator includes a rod-shaped laser medium such as Nd:YAG or Nd:YVO4.

[0016] A laser beam (not shown) emitted from a laser oscillator passes through a predetermined optical system (not shown) and is emitted downward from the head unit 6. The head unit 6 has a condenser lens (not shown) for condensing the laser beam.

[0017] The head unit 6 irradiates, for example, a pulsed laser beam having a predetermined repetition frequency downward along the Z-axis direction. The laser oscillator, a predetermined optical system, and the head unit 6 constitute a laser processing unit (processing unit) 8 for performing laser processing (processing) on ​​the workpiece 11.

[0018] A microscope camera unit (not shown) capable of capturing images of the area located below the head unit 6 is provided near the head unit 6. The microscope camera unit can be moved along the Z-axis direction together with the head unit 6 by a ball screw type Z-axis direction moving unit (not shown).

[0019] The microscope camera unit includes, for example, an objective lens and an imaging element such as a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary Metal-Oxide-Semiconductor) image sensor that photoelectrically converts light captured through the objective lens.

[0020] Below the head unit 6 and the microscope camera unit, there is provided a disk-shaped chuck table (holding table) 10. The chuck table 10 has a disk-shaped frame made of metal. A disk-shaped recess (not shown) is formed in the upper part of the frame.

[0021] A disk-shaped porous plate made of porous ceramic is fixed in this recess. Negative pressure generated by a suction source (not shown) such as a vacuum pump can be transmitted to the porous plate via a predetermined flow path formed in the frame.

[0022] The upper surface of the porous plate and the upper surface of the frame form a holding surface 10a that is substantially flush with each other. In this embodiment, the holding surface 10a is a substantially flat surface that is disposed substantially parallel to the XY plane. A plurality of clamp units 12 are provided on the side of the chuck table 10 at substantially equal intervals along the circumferential direction of the chuck table 10.

[0023] A workpiece 11 is placed on the holding surface 10a. The workpiece 11 has, for example, a disk-shaped silicon single crystal substrate (i.e., a wafer), but the type of substrate constituting the workpiece 11 is not particularly limited. The workpiece 11 may also have a single crystal substrate made of other semiconductor materials, a resin substrate, a glass substrate, or the like.

[0024] In this embodiment, a plurality of devices are formed on the front surface 11a of the workpiece 11. The devices are, for example, ICs (Integrated Circuits), LEDs (Light Emitting Diodes), and MEMS (Micro Electro Mechanical Systems). The shapes, sizes, arrangements, etc. of the devices are not particularly limited. The workpiece 11 does not necessarily have any devices.

[0025] Resin tape 13 is attached to the back surface 11b of workpiece 11. Workpiece 11 is located in the center of tape 13, and one surface of metal ring frame 15 is attached to the outer periphery of tape 13. Depending on the type of processing, tape 13 may also be attached to the front surface 11a.

[0026] The workpiece 11 is carried onto the chuck table 10 as a workpiece unit 17 supported by the ring frame 15 via the tape 13. When negative pressure is transmitted to the upper surface of the porous plate, the workpiece 11 is sucked and held on the holding surface 10a via the tape 13. At this time, the ring frame 15 is clamped by each clamp unit 12.

[0027] A rotary drive source (not shown), such as a motor, that adjusts the orientation of the chuck table 10 in the XY plane is provided below the chuck table 10. The rotary drive source and the chuck table 10 are supported by ball screw type X-axis direction movement mechanisms and Y-axis direction movement mechanisms (neither of which are shown) so as to be movable along the X-axis and Y-axis directions, respectively.

[0028] The X-axis direction movement mechanism functions as a processing feed unit during laser processing, and the Y-axis direction movement mechanism functions as an indexing feed unit during laser processing. A touch panel 14 is provided on a part of the side surface of the housing 4 in the Y-axis direction. The touch panel 14 may be of any type, such as a capacitive type, a resistive film type, or an infrared type.

[0029] The touch panel 14 functions as an input interface used when an operator inputs instructions and the like to the laser processing device 2. When the operator touches a part of the screen, the instructions and the like from the operator are input to the laser processing device 2.

[0030] For example, an operator touches a part of the touch panel 14 to input characters, numbers, processing conditions, operation instructions, etc. into the laser processing device 2. The touch panel 14 functions as a display device in addition to an input interface.

[0031] The touch panel 14 can display, for example, a screen stored in advance in the laser processing device 2, characters and instructions input by the worker via the touch panel 14, an image acquired by the microscope camera unit, and the like.

[0032] 3, the touch panel 14 of this embodiment displays a plurality of screen areas 16 in an entire display area (i.e., full screen) 14a. The plurality of screen areas 16 includes a status area 16a located above the entire display area 14a.

[0033] The status area 16a is an area that displays the current date and time, a message to the operator, an emergency stop button, an alarm clear button, etc. The various buttons displayed on the touch panel 14 are displayed in the form of a GUI (Graphical User Interface).

[0034] The multiple screen areas 16 include a status area 16a as well as a work screen area 16b (sometimes referred to as a main area or a work area) located in the center of the entire display area 14a.

[0035] In the work screen area 16b, one of a plurality of different work screens 16b1 can be selectively displayed. The work screen 16b1 shown in Fig. 3 includes approximately square buttons each containing letters, numbers, pictograms, etc.

[0036] A predetermined title 16b2 for each work screen 16b1 is displayed in the upper area of ​​the work screen area 16b. The title 16b2 shown in Fig. 3 is "Top Menu," and the number in parentheses indicates its version information.

[0037] The plurality of screen areas 16 includes a status area 16a, a work screen area 16b, and a search button 16c. In the example shown in Fig. 3, the search button 16c is displayed superimposed on the work screen area 16b.

[0038] In the example shown in Fig. 3, the search button 16c is located in the lower left area of ​​the work screen area 16b, but the location of the search button 16c is not limited to the example shown in Fig. 3. The search button 16c is displayed as having two right-pointing angle brackets arranged in series.

[0039] The search button 16c is used to search for a predetermined character string 16b3 included in each work screen 16b1 using one or more alphabets (English characters). For example, when the worker touches the search button 16c, a small screen area for character input 16c1 is displayed superimposed on the work screen area 16b, as shown in FIG.

[0040] When the small screen area for character input 16c1 is displayed, the search button 16c changes to have two left-pointing angle brackets arranged in series and moves to the right edge of the small screen area for character input 16c1. The small screen area for character input 16c1 includes an input area 16c2 where characters are entered.

[0041] A "Search" button is located to the right of the input area 16c2. The worker uses the "Search" button to search for a character string that includes the input characters from among predetermined character strings 16b3 contained in the multiple work screen areas 16b.

[0042] Also, to the right of the "Search" button is a "Back" button that is used to return the screen displayed in the work screen area 16b to the previous screen.

[0043] The multiple screen areas 16 include a status area 16a, a work screen area 16b, a search button 16c, and a menu key area 16d. The menu key area 16d is located below the work screen area 16b, and includes a left area 16d1 where multiple buttons or a keyboard are selectively displayed, and a right area 16d2 where a switching button and the like are always displayed.

[0044] In the example of Fig. 4, a plurality of rectangular buttons each containing letters, numbers, pictograms, etc. (not shown) are displayed in the left area 16d1. However, the character input button 16d in the right area 16d2 2B When the operator touches the button, a plurality of buttons corresponding to character keys, arrow keys, special keys, etc. are displayed in the left area 16d1 as shown in FIG.

[0045] The operator presses the number input button 16d 2A When this button is touched, multiple buttons (not shown) corresponding to a so-called numeric keypad including the numbers 0 to 9, the decimal point, etc. are displayed in the left area 16d1 instead of buttons corresponding to letter keys, arrow keys, special keys, etc.

[0046] With the small screen area for character input 16c1 expanded, the character input button 16d 2B When touched, character input palette 16d3 shown in Fig. 5 is displayed. The operator can input characters into input area 16c2 via character input palette 16d3.

[0047] 5 shows an example in which the user enters the character string "kinou" and then touches the "Search" button to execute a search. When the search is executed, a character string / title table 16c3 for displaying the search results is displayed above the small screen area for character input 16c1.

[0048] The character string / title table 16c3 is a table including a "Search string" column and a "Title" column arranged in parallel. The "Search string" column displays character strings including Japanese words corresponding to "kinou" (for example, "function," "yesterday," etc.) from character strings 16b3 included in the work screen 16b1.

[0049] In the "Title" field, a predetermined title 16b2 is displayed corresponding to the work screen 16b1 having a character string 16b3 including Japanese characters corresponding to the input characters. In the example shown in Fig. 5, a predetermined title 16b2 is displayed corresponding to the work screen 16b1 having a character string 16b3 including Japanese characters corresponding to "kinou".

[0050] When the worker touches and selects one of the character strings or titles displayed in the character string / title table 16c3, the background display of the character string / title table 16c3 switches to the work screen 16b1 corresponding to the selected character string or title.

[0051] Between the character string / title table 16c3 and the input area 16c2, there is arranged a history area 16c4 in which the history of selected character strings and titles is displayed. The history area 16c4 includes a "history string" field in which character strings are displayed, and a "Title" field in which titles containing the character strings are displayed.

[0052] In this embodiment, the small screen area for character input 16c1, the character string / title table 16c3, and the history area 16c4 are collectively referred to as the search screen area 16c5. In other words, the character string / title table 16c3 is displayed as part of the search screen area 16c5. Note that the history area 16c4 is not essential to the search screen area 16c5 and may be omitted.

[0053] Incidentally, in this embodiment, the input interface and the display device are collectively configured as the touch panel 14, but the input interface and the display device may be configured as different devices.

[0054] Specifically, the input interface may be configured with a keyboard, a mouse, a joystick, a sensor, etc. Furthermore, the display device may be configured with a liquid crystal display, an OLED (Organic Light Emitting Diode) display, etc.

[0055] Now, returning to Fig. 1, a cassette placing table 18 on which a cassette (not shown) containing one or more workpiece units 17 is placed is provided at a position adjacent to the touch panel 14 in the X-axis direction. The cassette placing table 18 can be moved along the Z-axis direction by an elevator (not shown).

[0056] The workpiece unit 17, which is placed at a predetermined height by the cassette mounting table 18, is transported into the housing 4 by a transport device (not shown), held by suction on the holding surface 10a, and then processed with a laser beam.

[0057] 1, for convenience, the workpiece unit 17 is shown being transported from the cassette to the holding surface 10a by an arrow, but in reality, the workpiece unit 17 is transported to the chuck table 10 by a transport unit (not shown) or the like having a suction pad capable of suction-holding the ring frame 15.

[0058] The housing 4 accommodates a control unit 20 that controls the operations of the components of the laser processing device 2, such as the laser processing unit 8, the chuck table 10, the touch panel 14, and the cassette mounting table 18.

[0059] 1, the control unit 20 is shown by a functional block. The control unit 20 is usually disposed inside the housing 4, but for the sake of convenience, the control unit 20 is shown outside the housing 4 in FIG.

[0060] The control unit 20 is composed of a computer including, for example, a processor represented by a CPU (Central Processing Unit), a main memory device such as a DRAM (Dynamic Random Access Memory), an SRAM (Static Random Access Memory), or a ROM (Read Only Memory), and an auxiliary memory device such as a flash memory, a hard disk drive, or a solid state drive.

[0061] The auxiliary storage device stores software including a predetermined program. The functions of the control unit 20 are realized by operating the processing device and the like in accordance with this software. Next, the functions of the control unit 20 will be described with reference to Figures 2 to 6.

[0062] 2 is a functional block diagram illustrating how the control unit 20 performs a search and outputs search results. The control unit 20 has a storage unit 22. The storage unit 22 corresponds to, for example, a partial area of ​​an auxiliary storage device.

[0063] The memory unit 22 stores a plurality of work screens 16b1 and the titles 16b2 of each work screen 16b1, with a character string 16b3 included in one work screen 16b1 associated with a title 16b2 predetermined for that work screen 16b1.

[0064] For example, the work screen 16b1 shown in Figures 3 and 4 includes a plurality of character strings 16b3 such as "full automation," "manual operation," "device data," etc. The storage unit 22 stores these plurality of character strings 16b3 included in the work screen 16b1 shown in Figure 3 in association with one title 16b2 shown in Figure 3.

[0065] The storage unit 22 may update the correspondence between the plurality of character strings 16b3 included in the work screen 16b1 and the title 16b2 as appropriate, and may also delete correspondences that are no longer necessary.

[0066] The storage unit 22 is accessed by a search unit 24. The search unit 24 is realized, for example, by a processor executing a first program stored in a partial area of ​​the auxiliary storage device. The search unit 24 accesses the storage unit 22 and searches for and extracts, from the storage unit 22, a character string 16b3 that includes the characters input in the input field 16c2.

[0067] In the input area 16c2 of this embodiment, Japanese expressed in Roman letters using the alphabet and English expressed using the alphabet can be input.

[0068] The search unit 24 can search for the character string 16b3 after identifying appropriate expression candidates that correct errors in the input character string, by using a library (Regular Expression Library) (e.g., gregonig) that can generate regular expressions stored in an auxiliary storage device (arrow 24a).

[0069] For example, when searching for "power" in English, the operator should correctly enter "power" using the alphabet, but even if "powe" is entered, the search unit 24 can search for "power."

[0070] The search unit 24 includes a Japanese search unit 26. The Japanese search unit 26 is realized, for example, by causing a processor to execute a second program stored in a partial area of ​​the auxiliary storage device.

[0071] When characters including alphabets are entered into the input field 16c2, the Japanese search unit 26 generates a regular expression from the Japanese entered in Roman characters as it is, without converting the Japanese entered in Roman characters into kana, kanji, etc., and can search for the character string 16b3 based on the regular expression (arrow 26a).

[0072] For example, when searching for the Japanese word "function," if the operator inputs "kinou" using the alphabet, the input string can be searched for as Japanese entered in Roman letters (such as "function" or "yesterday") (see Figures 5 and 6). To perform such a search, the Japanese search unit 26 uses a library (e.g., migemo) that can generate regular expressions stored in the auxiliary storage device.

[0073] Furthermore, the Japanese search unit 26 can perform incremental search, which generates a new regular expression every time an alphabetic character is added. This allows predictive conversion based on the input character or character string, thereby reducing the effort required for character input.

[0074] By implementing such a Japanese search unit 26, it becomes possible to perform searches essentially in Japanese while omitting the function of converting Japanese into kana-kanji, etc. in the control unit 20. Omitting the function of converting Japanese into kana-kanji, etc. has the advantage of reducing the development costs of the software that constitutes the control unit 20 and facilitating software update work.

[0075] If the word "power" is entered using the alphabet, the Japanese search unit 26 may search for a character string 16b3 that includes "powa." However, since such a Japanese word does not exist, the number of search hits by the Japanese search unit 26 will be zero.

[0076] Furthermore, when "kinou" is entered using the alphabet, the search unit 24 may search for an English character string that includes "kinou", or may search for the character string 16b3 after identifying an appropriate expression candidate that corrects an input error or the like.

[0077] The search results by the search unit 24 are displayed on the touch panel 14 by the output unit 28. The output unit 28 is realized, for example, by causing a processor to execute a third program stored in a partial area of ​​the auxiliary storage device.

[0078] The output unit 28 displays the character string 16b3 and the title 16b2 on the touch panel 14 in a state in which the character string 16b3 extracted by the search unit 24 is linked to the title 16b2 of the work screen 16b1 that includes the character string 16b3.

[0079] In this embodiment, in the character string / title table 16c3, the character string 16b3 and the title 16b2 are arranged in the same row (that is, horizontally), thereby indicating the link (that is, the correspondence) between the character string 16b3 and the title 16b2.

[0080] Next, an example of inputting characters, executing a search, and displaying the desired work screen 16b1 will be described with reference to Figures 3 to 7. Figure 3 is a diagram showing an example of the entire display area 14a displayed on the touch panel 14 before a search is executed.

[0081] When the operator touches the search button 16c, a small screen area for character input 16c1 is displayed, and the "Search" and "Back" buttons are displayed together with the input area 16c2, as shown in Fig. 4. Fig. 4 is a diagram showing an example of the entire display area 14a when the search button 16c is touched.

[0082] In the state shown in FIG. 4, the operator presses the character input button 16d 2B When touched, a character input palette 16d3 is displayed as shown in Fig. 5. The operator can input characters into the input area 16c2 by appropriately touching the character input palette 16d3.

[0083] FIG. 5 is a diagram showing an example of the entire display area 14a when the operator executes a search by inputting the character string "kinou" and touching "Search."

[0084] In the example of Figure 5, the search unit 24 and the Japanese search unit 26 search for a character string 16b3 that includes the input characters, and the character string 16b3 that includes "function" is displayed in the "Search string" field of the character string / title table 16c3.

[0085] Furthermore, in "Title," a title 16b2 of the work screen 16b1 including a character string 16b3 including "function" is displayed. In this way, the character string 16b3 and the title 16b2 are displayed in association with each other in the character string / title table 16c3 (search screen area 16c5).

[0086] The character string / title table 16c3 shown in Fig. 5 is only a part of the search results. The operator can change the display area of ​​the search results by using the scroll bar, for example, as shown in Fig. 6.

[0087] FIG. 6 is a diagram showing an example of the entire display area 14a when the character string 16b3 including "function" is selected after scrolling down the character string / title table 16c3 shown in FIG.

[0088] When a character string 16b3 or a title 16b2 in the character string / title table 16c3 is selected while the search screen area 16c5 is displayed, the control unit 20 displays the work screen 16b1 corresponding to the selected character string 16b3 or title 16b2 in the background of the search screen area 16c5.

[0089] FIG. 6 shows a case where an operator touches the area where the character string "Function Setting" is displayed in the character string / title table 16c3, and a work screen 16b1 with a title 16b2 of "Function Data Maintenance" is displayed in the background of the search screen area 16c5.

[0090] Even when the background is displayed, it is possible to select buttons on the work screen 16b1 and input letters, numbers, etc. For example, as shown in Figure 6, with the search screen area 16c5 displayed, it is possible to check the "Alignment" checkbox on the work screen 16b1.

[0091] In this way, when the work screen 16b1 corresponding to the selected title, etc. is displayed in the background of the search screen area 16c5, the worker can easily check whether or not he or she has reached the desired screen, thereby improving the usability of the laser processing device 2.

[0092] In the example shown in FIG. 6, in response to the selection of "Function Settings" in "Search string," "Function Settings" is displayed in the "history string" field of the history area 16c4, and "Function Data Maintenance" is displayed in the "Title" field.

[0093] At this time, if the "Back" button is touched, the work screen 16b1 returns to the work screen 16b1 shown in Figures 3 and 4. Of course, the worker can also delete the input of "kinou" and input other characters.

[0094] Furthermore, when the search button 16c is touched in the state shown in Fig. 6, the search screen area 16c5 can be closed, as shown in Fig. 7. Fig. 7 is a diagram showing an example of a screen in which the search screen area 16c5 is closed. By closing the search screen area 16c5, almost the entire work screen 16b1 is displayed.

[0095] One of the work screens 16b1 is a setting input screen (not shown) used when setting processing conditions for the laser processing device 2. On the setting input screen, for example, the repetition frequency [kHz] of the pulsed laser beam, the set output power [W] of the laser beam, and the processing feed speed [mm / s] of the chuck table 10 are set.

[0096] Another example of the work screen 16b1 is an operation instruction screen (not shown) that is used to instruct an operation to the laser processing device 2. On the operation instruction screen, for example, maintenance of an attenuator for attenuating the output of a laser beam is performed. Specifically, it is confirmed whether the attenuator is operating normally.

[0097] Yet another example of the work screen 16b1 is a recorded condition display screen (not shown) that is used to display processing conditions that have been recorded in the laser processing device 2. The worker can refer to the processing conditions that have been recorded in the past on the recorded condition display screen. For example, by copying the recorded processing conditions, the worker can save the effort of inputting the processing conditions.

[0098] In this way, the work screen 16b1 includes at least one of a setting input screen, an operation instruction screen, and a recording condition display screen. The setting input screen and the recording condition display screen are frequently used when using the laser processing device 2, so even an operator with a low level of proficiency will usually not have much difficulty reaching these screens.

[0099] However, certain operational instructions such as attenuator maintenance are not frequently used. Moreover, the contents displayed on the touch panel 14 are usually hierarchical, with various contents displayed on each level. Therefore, an operator with low proficiency may not be able to reach the desired operational instruction screen.

[0100] In contrast to this, in this embodiment, the worker can reach the target screen by guessing and inputting the characters contained in the target screen. Therefore, it is relatively easy for the worker to reach the target screen regardless of the worker's level of proficiency with the laser processing device 2.

[0101] Second Embodiment Next, a second embodiment will be described. The processing device of the second embodiment is a grinding device (not shown). The grinding device has a disk-shaped chuck table (not shown) that suction-holds the surface 11a of the workpiece 11, which has tape 13 attached to the surface 11a.

[0102] When negative pressure is transmitted to the holding surface of the chuck table, the workpiece 11 is sucked and held with the back surface 11b exposed upward. The chuck table is configured to be rotatable by a rotary drive source such as a motor.

[0103] A grinding unit (processing unit) (not shown) is disposed above the chuck table. The grinding unit includes a cylindrical spindle whose longitudinal portion is disposed along the Z-axis direction. A portion of the spindle is rotatably housed in a spindle housing.

[0104] A motor is provided on a portion of the upper side of the spindle, and the lower end of the spindle protrudes downward from the spindle housing. A disk-shaped mount is fixed to the lower end of the spindle.

[0105] A grinding wheel is attached to the underside of the mount. The grinding wheel has a metal annular base. A plurality of block-shaped grinding stones are arranged on the underside of the base at approximately equal intervals around the periphery of the base.

[0106] The grinding device is also provided with a touch panel 14. The operations of the grinding unit, chuck table, touch panel 14, etc. are controlled by a control unit (not shown) having substantially the same functions as the control unit 20 described above.

[0107] A search button 16c is displayed in the work screen area 16b of the touch panel 14. Using the search button 16c, the desired work screen 16b1 can be displayed, similarly to the case of the laser processing device 2 described above.

[0108] One of the work screens 16b1 is a setting input screen (not shown) used when setting processing conditions for the grinding device. On the setting input screen, the operator sets, for example, the diameter [inch] or [mm] of the workpiece 11, the thickness before grinding [μm], the finished thickness [μm], the spindle rotation speed [rpm], the flow rate of grinding water [L / min], the warm-up time [min], etc.

[0109] Another example of the work screen 16b1 is an operation instruction screen (not shown) used to instruct the grinding device to perform an operation. On the operation instruction screen, the worker can, for example, perform air blowing on the chuck table placed on the turntable, and set the lighting conditions of the indicator lights and the sounding conditions of the buzzer provided on the processing device.

[0110] Another example of the work screen 16b1 is a recorded condition display screen (not shown) that is used to display the processing conditions recorded in the grinding machine. The worker can refer to the recorded processing conditions on the recorded condition display screen.

[0111] In this way, the work screen 16b1 includes at least one of a setting input screen, an operation instruction screen, and a recording condition display screen. The setting input screen and the recording condition display screen are frequently used when using the grinding machine, so even an operator with a low level of proficiency will not have much difficulty reaching these screens.

[0112] In addition, since the air blowing operation using the operation instruction screen is frequently performed, workers can reach the desired operation instruction screen without much difficulty. However, the settings for the indicator light illumination condition and the buzzer sound condition are not frequently used. Therefore, workers with low proficiency may not be able to reach the desired operation instruction screen.

[0113] In contrast, the operator can reach the target screen by searching for the operation instruction screen using the search button 16c described above. Therefore, it is relatively easy for the operator to reach the target screen regardless of the operator's level of proficiency with the grinding machine.

[0114] The grinding device may be a device that performs either in-feed grinding or creep feed grinding. The touch panel 14, the control unit 20, etc. can also be applied to the polishing device (processing device).

[0115] A polishing unit (processing unit) (not shown) is disposed above the chuck table (holding table) of the polishing device. The polishing unit has a spindle, spindle housing, motor, and mount, which are substantially the same as those of the grinding unit.

[0116] A grinding wheel is attached to the underside of the mount. The grinding wheel has a metal annular base that is fixed to the mount. A grinding pad is provided in an annular shape on the underside of the base.

[0117] (Third Embodiment) Next, a third embodiment will be described. The processing device of the third embodiment is a cutting device (not shown). The cutting device has a disk-shaped chuck table (not shown) that holds the workpiece unit 17 by suction.

[0118] When negative pressure is transmitted to the holding surface of the chuck table, the workpiece 11 is held by suction. A cutting unit (processing unit) (not shown) is disposed above the chuck table. The cutting unit includes a cylindrical spindle whose longitudinal portion is disposed along the Y-axis direction.

[0119] A portion of the spindle is rotatably accommodated in a spindle housing. A motor is provided in a portion of the area where the spindle is accommodated, and the other end of the spindle protrudes from the spindle housing.

[0120] A disk-shaped cutting blade is attached to one end of the spindle. The cutting blade is, for example, a hub-type blade in which an annular cutting edge is fixed to one surface of an annular base (hub) in a manner that protrudes radially outward from the base.

[0121] A receiving flange is fixed to one end of the spindle. The hub-shaped blade is fixed to the spindle by being clamped between the receiving flange and a nut that is screwed onto a male thread formed in a boss of the receiving flange.

[0122] The cutting blade may be a hubless blade having an annular cutting edge without an annular base. The hubless blade is clamped between an annular receiving surface of a receiving flange fixed to one end of the spindle and an annular pressing surface of a pressing flange.

[0123] The cutting device is also provided with a touch panel 14. The operations of the cutting unit, chuck table, and touch panel 14 are controlled by a control unit (not shown) having substantially the same functions as the control unit 20 described above.

[0124] A search button 16c is displayed in the work screen area 16b of the touch panel 14. Using the search button 16c, the desired work screen 16b1 can be displayed, similarly to the case of the laser processing device 2 described above.

[0125] One of the work screens 16b1 is a setting input screen (not shown) used to set machining conditions for the cutting device. On the setting input screen, the operator sets, for example, the machining feed rate [mm / s], the spindle rotation speed [rpm], the cutting water flow rate [L / min], etc.

[0126] Another example of the work screen 16b1 is an operation instruction screen (not shown) used to instruct the cutting device to operate. On the operation instruction screen, the worker can, for example, adjust the operation of the blade breakage detector that detects breakage in the cutting blade, and set end face corrections for the mount, holding flange, etc.

[0127] Another example of the work screen 16b1 is a recorded condition display screen (not shown) that is used to display the machining conditions recorded in the cutting device. The worker can refer to the recorded machining conditions on the recorded condition display screen.

[0128] In this way, the work screen 16b1 includes at least one of a setting input screen, an operation instruction screen, and a recording condition display screen. The setting input screen and the recording condition display screen are frequently used when using the cutting device, so even an operator with low proficiency will have little difficulty reaching these screens.

[0129] In addition, the operation of the blade breakage detector is frequently adjusted using the operation instruction screen, so the operator can reach it without much difficulty. However, the settings for end face correction of the mount, holding flange, etc. are not frequently used.

[0130] Therefore, a worker with a low level of proficiency may not be able to reach the desired operation instruction screen. In contrast, by searching for the operation instruction screen using the search button 16c, the worker can reach the desired screen.

[0131] Therefore, it is relatively easy for the operator to reach the target screen, regardless of the operator's level of proficiency with the cutting device. In addition, the structures, methods, etc. according to the above-described embodiments can be appropriately modified and implemented without departing from the scope of the present invention. [Explanation of symbols]

[0132] 2: Laser processing device (processing device), 4: Housing, 6: Head 8: Laser processing unit (processing unit) 10: chuck table (holding table), 10a: holding surface, 12: clamp unit 11: workpiece, 11a: front surface, 11b: back surface, 13: tape, 15: ring frame 14: Touch panel, 14a: Overall display area 16: Screen area, 16a: Status area 16b: Work screen area, 16b1: Work screen, 16b2: Title, 16b3: Character string 16c: Search button, 16c1: Small screen area for character input, 16c2: Input area 16c3: Text and title table, 16c4: History area, 16c5: Search screen area 16d: Menu key area, 16d1: Left area, 16d2: Right area 16d 2A : Number input button, 16d 2B :Character input button, 16d3:Character input palette 17: Workpiece unit 18: Cassette stand 20: control unit, 22: memory unit, 24: search unit, 24a: arrow 26: Japanese search section, 26a: Arrow, 28: Output section

Claims

1. A processing apparatus having a holding table that holds a workpiece on a holding surface, and a processing unit that processes the workpiece held by the holding table, an input interface used by a worker to input; a display device capable of displaying a plurality of screen areas into which characters or characters and instructions are input via the input interface; a control unit having a processor and controlling the holding table, the processing unit, the input interface, and the display device; The plurality of screen regions include: a small screen area for character input into which the character is input; a working screen area used for setting processing conditions for the workpiece in the processing device, instructing the processing device to operate, and displaying at least one of the processing conditions recorded in the processing device, The control unit a storage unit that stores a plurality of work screens each including a predetermined character string and each capable of being displayed in the work screen area, and a predetermined title for each work screen, in a state in which the character string included in one work screen corresponds to the title of the one work screen; a search unit that searches the storage unit for and extracts the character string that includes the character input in the small screen for character input; an output unit that causes the display device to display the character string extracted by the search unit and the title of the work screen containing the character string in a linked state; The processing device is characterized in that the control unit links the character string containing the input character to the title of the work screen containing the character string in accordance with the character input into the small screen area for character input, and displays them on the display device.

2. 2. The processing device according to claim 1, wherein the control unit has a Japanese search section that can search for Japanese characters entered in Roman characters using the alphabet entered in the small character input screen area.

3. The processing device according to claim 1 or 2, characterized in that the character string including the input character and the title of the work screen including the character string are displayed in a search screen area on a part of the display device in a linked state, and when the search screen area is displayed, in response to the character string or the title being selected, the control unit displays the work screen corresponding to the selected character string or the title in the background of the search screen area.

Images