Grinding support device, grinding machine control device, and workpiece deformation prediction method

Abstract

To provide a grinding support device that can enhance flatness and suppress an increase in grinding time.SOLUTION: Information regarding a workpiece to be ground and information designating grinding conditions are input to an input unit. A calculation unit obtains the magnitude of warpage of the workpiece due to heat generated during grinding of the workpiece based on the information regarding the workpiece and the information designating the grinding conditions which are input to the input unit. An output unit outputs information representing the magnitude of warpage of the workpiece obtained by the calculation unit.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a grinding support device, a grinding machine control device, and a method for predicting deformation of a workpiece. [Background technology]

[0002] A grinding device that improves the flatness of a workpiece surface ground with a rotary grinding wheel is known (see Patent Document 1). In this grinding device, after grinding of the workpiece surface is completed, the flatness of the workpiece surface is measured, and a re-grinding position and grinding amount are determined based on the measurement results. Corrective grinding is then performed to improve the flatness according to the determined re-grinding position and grinding amount. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2008-30172 Summary of the Invention [Problem to be solved by the invention]

[0004] In a method in which corrective grinding is performed to improve flatness after the initial grinding, the grinding takes a long time. An object of the present invention is to provide a grinding support device and a grinding machine control device that can improve flatness and prevent the grinding time from becoming too long. Another object of the present invention is to provide a method for predicting the deformation amount of a workpiece that can improve flatness and can be used to prevent the grinding time from becoming too long. [Means for solving the problem]

[0005] According to one aspect of the present invention, an input unit into which information relating to the workpiece to be ground and information specifying the grinding conditions are input; a calculation unit that calculates the magnitude of warpage of the workpiece due to heat generated when grinding the workpiece, based on information about the workpiece and information specifying grinding conditions inputted to the input unit; and an output unit that outputs information indicating the magnitude of warpage of the workpiece calculated by the calculation unit; Equipped with 、 the information about the workpiece includes information necessary to calculate the bending rigidity of the workpiece, The calculation unit determining a heat flux flowing into the workpiece from the processed surface of the workpiece due to grinding; calculating a temperature distribution inside the workpiece based on a heat flux flowing into the workpiece from the processed surface; Calculating thermal stress generated in the workpiece from the temperature distribution inside the workpiece; The magnitude of warpage of the workpiece is calculated from the thermal stress generated in the workpiece and the bending rigidity of the workpiece. A grinding assist device is provided.

[0006] According to another aspect of the present invention, the grinding support device; a grinding wheel head motion straightness correction device for controlling a trajectory of movement of the grinding wheel relative to the workpiece in a grinding device that performs grinding by moving the grinding wheel while rotating the grinding wheel in a state where the grinding wheel is in contact with the workpiece; Equipped with The grinding wheel head movement straightness correction device is provided with a grinding machine control device that acquires information indicating the magnitude of warpage of the workpiece from the grinding support device and determines the trajectory of movement of the grinding wheel according to the magnitude of warpage of the workpiece.

[0007] According to yet another aspect of the present invention, Grinding target Contains information necessary to calculate the bending stiffness of the workpiece Information about the workpiece and information specifying the grinding conditions are input to the calculation unit; A method for predicting a deformation amount of a workpiece, in which the calculation unit calculates the magnitude of warpage of the workpiece due to heat generated during grinding of the workpiece based on input information about the workpiece and information specifying grinding conditions. And, The calculation unit determining a heat flux flowing into the workpiece from the processed surface of the workpiece due to grinding; calculating a temperature distribution inside the workpiece based on a heat flux flowing into the workpiece from the processed surface; Calculating thermal stress generated in the workpiece from the temperature distribution inside the workpiece; A method for predicting the amount of deformation of a workpiece, which calculates the magnitude of warpage of the workpiece from the thermal stress generated in the workpiece and the bending rigidity of the workpiece. is provided. [Effects of the Invention]

[0008] By calculating the magnitude of the warpage of the workpiece using the calculation unit, the trajectory of the grinding wheel movement during grinding can be determined to reflect the magnitude of the warpage, making it possible to perform grinding in a way that increases the flatness of the workpiece's processed surface after cooling. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a block diagram of a grinding machine control device according to an embodiment, and a perspective view of a surface grinding machine controlled by the grinding machine control device. [Figure 2] 2A to 2D are schematic diagrams showing the path along which the grinding wheel moves relative to the workpiece. [Figure 3] FIG. 3 is a flowchart showing the procedure of grinding support executed by the grinding support device (FIG. 1) according to this embodiment. [Figure 4] FIG. 4 is a graph showing an example of the change in temperature over time inside the workpiece obtained by calculation. [Figure 5] FIG. 5 is a graph showing the temperature distribution in the depth direction of the workpiece. [Figure 6] FIG. 6 is a graph showing an example of the calculation results of thermal stress. [Figure 7] FIG. 7 is a graph showing an example of bending moment and warpage amount. [Figure 8] FIG. 8 is a flowchart showing the procedure by which the grinding wheel head motion straightness correcting device controls the movement of the grinding wheel. [Figure 9] FIG. 9 is a schematic diagram showing the calculation results of the grindstone trajectory. DETAILED DESCRIPTION OF THE INVENTION

[0010] A grinding support device, a grinding machine control device, and a workpiece deformation prediction method according to an embodiment will be described with reference to FIGS.

[0011] 1 is a block diagram of a grinding machine control device 20 according to this embodiment and a perspective view of a surface grinding machine 10 controlled by the grinding machine control device 20. The grinding machine control device 20 includes a grinding support device 30 and a grinding wheel head motion straightness correction device 21.

[0012] First, we will explain the configuration of the surface grinding machine 10. The surface grinding machine 10 includes a movable table 12, a table guide mechanism 11, a grinding wheel head 13, a grinding wheel 14, and a guide rail 15. The movable table 12 moves back and forth in one direction in a horizontal plane by the table guide mechanism 11. A workpiece 18, which is the object to be ground, is supported on the movable table 12.

[0013] The grinding wheel head 13 is supported by guide rails 15 above the workpiece 18 held on the movable table 12 so as to be able to move up and down. The grinding wheel head 13 is movable within a horizontal plane in a direction perpendicular to the direction of movement of the movable table 12. An xyz Cartesian coordinate system is defined in which the direction of movement of the movable table 12 is the x-axis direction, the direction of movement of the grinding wheel head 13 is the y-axis direction, and the vertical downward direction is the positive direction of the z-axis.

[0014] A grinding wheel 14 is attached to the lower end of the grinding wheel head 13. The grinding wheel 14 has a cylindrical shape, and its central axis is parallel to the y-axis direction. The grinding wheel head 13 is lowered until the grinding wheel 14 comes into contact with the workpiece 18, and the workpiece 18 is moved in the x-axis direction while the grinding wheel 14 is rotating, thereby grinding the workpiece 18. By moving the grinding wheel head 13 in the y-axis direction and repeating the same process, the entire upper surface (machined surface) of the workpiece 18 can be ground. The procedure of moving the grinding wheel 14 in contact with the workpiece 18 in the x-axis direction from one end to the other is called a "pass."

[0015] The grinding wheel head motion straightness correcting device 21 controls the movement of the grinding wheel 14 during grinding. For example, while the movable table 12 is moving in the x-axis direction, the grinding wheel head 13 is raised and lowered in the z-axis direction according to the position in the x-axis direction, thereby controlling the movement of the grinding wheel 14 in the cutting direction. In other words, the grinding wheel head motion straightness correcting device 21 controls the movement trajectory of the grinding wheel 14 within the xz plane.

[0016] The grinding support device 30 generates information necessary for the grinding wheel head motion straightness correction device 21 to control the movement of the grinding wheel 14, and transmits the information to the grinding wheel head motion straightness correction device 21. The grinding support device 30 includes an input unit 31, a calculation unit 32, an output unit 33, and a memory unit 34. The memory unit 34 stores programs executed by the calculation unit 32 and various data.

[0017] Information about the workpiece 18 to be ground and information specifying the grinding conditions are input to the input unit 31. The input unit 31 is composed of, for example, a keyboard, a pointing device, a removable media reader, a communication device, etc. The calculation unit 32 calculates the magnitude of warpage of the workpiece 18 due to heat generated when grinding the workpiece 18, based on the information about the workpiece 18 and the information specifying the grinding conditions input to the input unit 31. The output unit 33 outputs information indicating the magnitude of warpage of the workpiece 18 calculated by the calculation unit 32 to a screen display or to the grinding wheel head motion straightness correction device 21. The output unit 33 is composed of, for example, a communication device, etc.

[0018] It is preferable that the surface of the workpiece 18 after grinding with the surface grinding apparatus 10 be a geometrically ideal plane. However, in reality, due to various factors, the center of the processed surface in the x-axis direction after processing may be lower or higher than the end portions. Next, various factors that cause the processed surface to deviate from the plane will be described with reference to Figures 2A to 2D.

[0019] 2A to 2D are schematic diagrams showing a trajectory 19 of movement of grinding wheel 14 relative to workpiece 18. During grinding, grinding wheel 14 is brought into contact with workpiece surface 18A of workpiece 18, and is moved relatively to workpiece 18 in a direction parallel to the x-axis while rotating. The outer peripheral surface of grinding wheel 14 is positioned slightly lower than workpiece surface 18A of workpiece 18 to cause spatial interference, thereby grinding the surface layer of workpiece 18. The amount of interference between the outer peripheral surface of grinding wheel 14 and workpiece surface 18A of workpiece 18 is called the cutting depth. In practice, workpiece 18 is moved relative to grinding wheel 14 in a direction parallel to the x-axis, as shown in FIG. 1.

[0020] As shown in FIG. 2A , if the trajectory 19 of the movement of the center of rotation of the grinding wheel 14 relative to the workpiece 18 in the xz plane (hereinafter, sometimes simply referred to as the "trajectory 19 of the grinding wheel 14") is a straight line and no distortion occurs in the workpiece 18, the processed surface 18A after grinding will be an ideal flat surface. Specifically, the straightness of the intersection line between the processed surface 18A and a plane parallel to the xz plane (hereinafter, sometimes simply referred to as the "straightness of the processed surface 18A") will be sufficiently high. However, due to various factors, the straightness of the actual processed surface 18A will decrease, as shown by the dashed line.

[0021] 2B, if the trajectory 19 of the grinding wheel 14 relative to the workpiece 18 deviates from the ideal straight line indicated by the dashed line, the error from the straight line of the trajectory 19 is reflected in the shape of the surface 18A to be machined, reducing the straightness of the surface 18A to be machined. Depending on the deviation of the trajectory 19 of the grinding wheel 14 from the straight line, the central portion of the surface 18A to be machined may become relatively lower or higher.

[0022] It is expected that the heat generated during grinding will cause thermal expansion of the workpiece 18, as shown in FIG. 2C. Furthermore, if a temperature gradient occurs within the workpiece 18, it is expected that warping will occur in the workpiece 18, as shown in FIG. 2D. In either case, deformation will occur in the workpiece surface 18A before machining. If grinding is performed in this state, even if the trajectory 19 of the grinding wheel 14 is straight, unevenness will occur in the amount of removal of the surface layer of the workpiece 18. Therefore, when the workpiece 18 cools and the thermal deformation of the workpiece 18 is eliminated, the straightness of the workpiece surface 18A will decrease.

[0023] Next, the influence of the straightness error of the trajectory 19 of the grinding wheel 14 (FIG. 2B), the thermal expansion of the workpiece 18 (FIG. 2C), and the warpage of the workpiece 18 (FIG. 2D) will be considered.

[0024] Empirically, the straightness error of the locus 19 of the grinding wheel 14 of the grinding machine is about several μm per meter, and the locus 19 has a high degree of straightness. In contrast, the amount of warping (straightness error) of the workpiece surface 18A is a value that far exceeds the straightness error of the locus 19. Therefore, in order to improve the straightness of the workpiece surface 18A after machining, it is necessary to reduce the effects of thermal deformation of the workpiece 18.

[0025] The linear expansion coefficient of steel is approximately 12 x 10 -6 / °C. Assuming that the thickness of the workpiece 18 is 100 mm, when the temperature variation in the x-axis direction within the workpiece 18 is 10°C, the height of the workpiece surface 18A will vary by about 12 μm. However, in reality, the temperature rise on the bottom side of the workpiece 18 is smaller than the temperature rise on the workpiece surface 18A, so the variation in the amount of thermal expansion of the workpiece 18 in the x-axis direction will be even smaller.

[0026] Furthermore, empirically, it is unlikely that the temperature inside the workpiece 18 will vary by approximately 10°C in the x-axis direction. Therefore, it is predicted that the main cause of the decrease in straightness of the workpiece surface 18A after machining is warpage of the workpiece 18 (FIG. 2D). In the present embodiment described below, the influence of warpage of the workpiece 18 can be reduced, and the straightness of the workpiece surface 18A can be increased.

[0027] 3 is a flowchart showing the procedure of grinding support executed by the grinding support device 30 (FIG. 1) according to this embodiment. When a user inputs information about the workpiece 18 and information specifying the grinding conditions to the input unit 31 (FIG. 1), the calculation unit 32 acquires the information about the workpiece 18 and the information specifying the grinding conditions input to the input unit 31 (step S1).

[0028] The information about the workpiece 18 includes information that identifies the material and dimensions of the workpiece 18. The information that identifies the material of the workpiece 18 includes various physical property values ​​of the workpiece 18, such as Young's modulus, density, specific heat, linear expansion coefficient, thermal conductivity, and thermal conductivity (thermal diffusivity). The information that identifies the dimensions of the workpiece 18 includes the length (dimension in the x-axis direction), width (dimension in the y-axis direction), and thickness (dimension in the z-axis direction) of the workpiece 18. The physical property values ​​and dimensions of the workpiece 18 include information necessary to calculate the bending rigidity of the workpiece 18.

[0029] The information specifying the grinding conditions includes information about the grinding wheel 14, information about the grinding fluid (coolant), the initial temperature of the workpiece 18, the movement speed of the workpiece 18, the rotation speed of the grinding wheel 14, the cutting depth, the number of grinding passes, etc. The information about the grinding wheel 14 includes the material and dimensions of the abrasive grains in the grinding wheel 14, the material of the binder for the abrasive grains, the diameter and width (dimension in the y direction) of the grinding wheel 14, and the dressing conditions of the grinding wheel 14 (the depth and pitch of the grooves formed on the outer surface of the grinding wheel 14). The information about the grinding fluid includes the components of the grinding fluid (whether it is water-based, oil-based, emulsion-based, etc.), the temperature, etc.

[0030] Next, the calculation unit 32 calculates the amount of heat (thermal energy) generated during grinding (step S2). The amount of heat generated during grinding depends on the physical properties of the workpiece 18, information about the grinding wheel 14, grinding conditions, etc. The amount of heat generated during grinding may be determined, for example, by various evaluation experiments or simulations. Next, the heat flux flowing into the workpiece 18 is calculated (step S3). From various evaluation experiments and empirical rules, it is believed that approximately 70% to 80% of the thermal energy generated during grinding flows into the workpiece 18.

[0031] Next, the calculation unit 32 calculates the temperature distribution within the workpiece 18 based on the heat flux flowing into the workpiece (step S4). In typical surface grinding, the moving speed of the contact point between the grinding wheel 14, which serves as the heat source, and the workpiece 18 is approximately 500 mm / s. The thermal conductivity of the workpiece 18, which has the dimension of areal velocity, is sufficiently small compared to the moving speed of the heat source. Therefore, the movement of the heat source can be ignored when calculating the temperature distribution within the workpiece 18. It can be approximated that the heat generated during grinding flows uniformly into the workpiece 18 from the entire longitudinal range of the workpiece surface 18A of the workpiece 18. Therefore, it can be assumed that the temperature within the workpiece 18 is distributed one-dimensionally in the thickness direction only.

[0032] Next, the calculation unit 32 calculates the temperature distribution inside the workpiece 18 based on the heat flux flowing into the workpiece 18 (step S4).

[0033] FIG. 4 is a graph showing an example of the change in temperature over time inside the workpiece 18 obtained by calculation. The horizontal axis represents time in units of seconds, and the vertical axis represents temperature in units of degrees Celsius. The length of the workpiece 18 was assumed to be 1000 mm, and the moving speed of the grinding wheel 14 relative to the workpiece 18 was assumed to be 500 mm / s. In this case, the time required to perform one pass was 2 seconds. The time from the end of one pass to the start of the next pass was assumed to be 0.5 seconds. The number of passes was set to 5.

[0034] Each curve in Figure 4 shows the temperature at a depth of 1 mm from the workpiece surface 18A of the workpiece 18. The temperature in shallow areas up to a depth of about 5 mm rises during the 2 seconds it takes for the pass to be executed, and then falls during the 0.5 seconds from the end of one pass to the start of the next. The temperature in areas deeper than about 5 mm rises slowly due to heat conduction from the workpiece surface 18A.

[0035] FIG. 5 is a graph showing the temperature distribution in the depth direction of the workpiece 18. The horizontal axis represents the depth from the workpiece surface 18A in units of mm, and the vertical axis represents the temperature in units of °C. The graph in FIG. 5 shows the temperature distribution from the initial state to the end of the first pass, the end of the second pass, ..., and the end of the fifth pass. It can be seen that a negative temperature gradient occurs in the depth direction at the end of each of the multiple passes. It can be seen that this temperature gradient causes differences in thermal expansion depending on the depth.

[0036] Once the temperature distribution within the workpiece 18 is determined, the calculation unit 32 calculates the thermal stress generated within the workpiece 18 (step S5).

[0037] Figure 6 is a graph showing an example of the calculation results of thermal stress. The horizontal axis represents time in units of [s], and the vertical axis represents stress in units of [MPa]. Each curve in Figure 6 represents the x-axis component of stress generated at depth positions in 1 mm increments from the workpiece surface 18A of the workpiece 18.

[0038] It can be seen that the stress on the workpiece surface 18A (depth 0 mm) is negative, and compressive stress is applied to the workpiece surface 18A. Tensile stress occurs in areas 1 mm deep or deeper for most of the time. Furthermore, compressive stress A temporarily occurs in the 1 mm deep area during the period when there is no heat inflow from the end of one pass to the start of the next. This is because the workpiece 18 is cooled by the grinding fluid, causing the temperature of the 1 mm deep area to become lower than the temperature of the 2 mm deep area.

[0039] Once the stress generated within the workpiece 18 has been determined, the calculation unit 32 calculates the bending moment acting on the workpiece 18 (step S6). Then, based on the bending moment, the magnitude of the warpage of the workpiece 18 is calculated (step S7). The central height of the workpiece 18A is used as an index representing the magnitude of the warpage, relative to the heights of both ends of the workpiece 18A. When the workpiece 18A is convex as shown in FIG. 2D, the index representing the magnitude of the warpage (warpage amount) is positive. The calculation unit 32 outputs information representing the magnitude of the warpage of the workpiece 18, for example, the warpage amount (step S8).

[0040] Figure 7 is a graph showing an example of bending moment and warpage. The horizontal axis represents time in units of [s], and the vertical axis represents bending moment in units of [Nm] and warpage in units of [μm]. In the graph of Figure 6, the lower curve represents bending moment, and the upper curve represents warpage. At the end of the third pass and thereafter, the bending moment reaches approximately -10 MPa, and the warpage reaches approximately 13 μm. The warpage remains approximately the same at the end of the third pass and thereafter.

[0041] If the trajectory 19 (FIG. 2D) of the grinding wheel 14 is made straight, the straightness of the processed surface 18A after processing is increased even when the workpiece 18 is warped. When the workpiece 18 is cooled and the warp is eliminated, the processed surface 18A has a concave shape in the center, with the depth of the concave reaching approximately 13 μm.

[0042] FIG. 8 is a flowchart showing the procedure by which the grinding wheel head motion straightness correcting device 21 (FIG. 1) controls the movement of the grinding wheel 14.

[0043] The grinding wheel head motion straightness correction device 21 acquires information indicating the magnitude of warpage of the workpiece 18, such as the amount of warpage, from the grinding support device 30 (step S10). Based on the acquired amount of warpage, the grinding wheel head motion straightness correction device 21 calculates the trajectory 19 of the motion of the grinding wheel 14 to correct the amount of warpage of the workpiece surface 18A (step S11).

[0044] 9 is a schematic diagram showing the calculation results of the trajectory 19 of the grinding wheel 14. The grinding wheel head motion straightness correcting device 21 determines the trajectory 19 so that the central portion of the trajectory 19 has an upwardly convex shape by an amount equal to the amount of warpage at the end of a target number of passes (this trajectory 19 is sometimes referred to as the corrected trajectory 19). Note that, as shown in FIG. 5, the magnitude of warpage of the workpiece 18 immediately after each of multiple passes is different for each pass. For example, the trajectory 19 of the grinding wheel 14 when performing the nth pass may be determined based on the magnitude of warpage immediately after the nth pass is performed.

[0045] The grinding wheel head motion straightness correcting device 21 performs grinding while controlling the height of the grinding wheel 14 so that the grinding wheel 14 moves along the determined trajectory 19 (step S12). The workpiece surface 18A immediately after grinding is curved in a convex shape, as shown in FIG. 9. When the workpiece 18 is cooled and the warpage is eliminated, the workpiece surface 18A becomes approximately flat. This makes it possible to improve the straightness of the workpiece surface 18A.

[0046] Next, the excellent effects of this embodiment will be described. Conventionally, grinding is performed by moving the grinding wheel 14 in a substantially straight line, resulting in a concavely curved processed surface 18A of the workpiece 18 after cooling. After cooling, the straightness of the processed surface 18A is measured, and correction grinding is performed on relatively high areas to ensure that the straightness falls within an acceptable range. In this embodiment, there is no need to perform correction grinding, and a highly straight processed surface 18A can be obtained.

[0047] Furthermore, because the amount of warpage is affected by the material and dimensions of the workpiece 18 and the grinding conditions, it is difficult to determine the trajectory 19 of the grinding wheel 14 by estimating the amount of warpage in advance. In order to determine an appropriate trajectory 19, it is necessary to use the workpiece 18 to be actually machined and conduct trial and error under the same grinding conditions, or to conduct evaluation experiments using an appropriate experimental design method. Therefore, it takes a long time to determine an appropriate trajectory 19. By using the grinding support device 30 according to this embodiment, it is possible to determine an appropriate trajectory 19 in a short time.

[0048] Next, a modification of the above embodiment will be described. In the above embodiment, the height of the center of the workpiece surface 18A (FIG. 2D) in the x-axis direction is used as an index representing the degree of warpage of the workpiece 18. Alternatively, the heights of the workpiece surface 18A at multiple positions in the x-axis direction may be used as an index representing the degree of warpage. Alternatively, the curve of the corrected trajectory 19 shown in FIG. 9 may be expressed as a function z(x) of the x-coordinate, and the coordinate point (x, z) of the corrected trajectory 19 may be used as an index representing the degree of warpage of the workpiece 18. In this way, by calculating the trajectory 19 of the grinding wheel 14 according to the heights of the workpiece surface 18A obtained at multiple locations, it is possible to control the straightness of the workpiece surface 18A with higher precision.

[0049] In the above embodiment, information indicating the magnitude of warpage of the workpiece 18 obtained by the grinding support device 30 is transmitted to the grinding head motion straightness correction device 21 via a communication device. As another configuration, the information indicating the magnitude of warpage of the workpiece 18 obtained by the grinding support device 30 may be input to the grinding head motion straightness correction device 21 via removable media or the like. Alternatively, the grinding support device 30 may display the information indicating the magnitude of warpage of the workpiece 18 on a display device, and the user may read the display device and input the information to the grinding head motion straightness correction device 21.

[0050] The above-described embodiments are merely examples, and the present invention is not limited to the above-described embodiments. For example, it will be obvious to those skilled in the art that various modifications, improvements, combinations, etc. are possible. [Explanation of symbols]

[0051] 10 Surface grinding equipment 11 Table guide mechanism 12 Movable table 13 Grindstone head 14 Grindstone 15 Guide rail 18 Work 18A Processed surface 19 Trajectory of the center of rotation of the grinding wheel 20 Grinding machine control device 21 Grinding wheel head motion straightness correction device 30 Grinding support device 31 Input section 32 Arithmetic section 33 Output section 34 Storage section

Claims

1. an input unit into which information relating to the workpiece to be ground and information specifying the grinding conditions are input; a calculation unit that calculates the magnitude of warpage of the workpiece due to heat generated when grinding the workpiece, based on information about the workpiece and information specifying grinding conditions inputted to the input unit; and an output unit that outputs information indicating the magnitude of warpage of the workpiece calculated by the calculation unit; Equipped with the information about the workpiece includes information necessary to calculate the bending rigidity of the workpiece, The calculation unit determining a heat flux flowing into the workpiece from the processed surface of the workpiece due to grinding; calculating a temperature distribution inside the workpiece based on a heat flux flowing into the workpiece from the processed surface; Calculating thermal stress generated in the workpiece from the temperature distribution inside the workpiece; A grinding support device that calculates the magnitude of warpage of the workpiece from the thermal stress generated in the workpiece and the bending rigidity of the workpiece.

2. The calculation unit 2. The grinding support device according to claim 1, wherein the temperature distribution inside the workpiece is calculated as the temperature distribution in the depth direction from the surface to be machined.

3. The grinding support device according to claim 1 or 2; a grinding wheel head motion straightness correction device for controlling a trajectory of movement of the grinding wheel relative to the workpiece in a grinding device that performs grinding by moving the grinding wheel while rotating the grinding wheel in a state where the grinding wheel is in contact with the workpiece; Equipped with The grinding wheel head motion straightness correction device is a grinding machine control device that acquires information indicating the magnitude of warpage of the workpiece from the grinding support device and determines the trajectory of movement of the grinding wheel according to the magnitude of warpage of the workpiece.

4. Inputting information about the workpiece, including information necessary to calculate the bending rigidity of the workpiece to be ground, and information specifying the grinding conditions into a calculation unit; A workpiece deformation amount prediction method in which the calculation unit calculates the magnitude of warpage of the workpiece due to heat generated when grinding the workpiece based on input information about the workpiece and information specifying grinding conditions, The calculation unit determining a heat flux flowing into the workpiece from the processed surface of the workpiece due to grinding; calculating a temperature distribution inside the workpiece based on a heat flux flowing into the workpiece from the processed surface; Calculating thermal stress generated in the workpiece from the temperature distribution inside the workpiece; A workpiece deformation prediction method for calculating the magnitude of warpage of the workpiece from the thermal stress generated in the workpiece and the bending rigidity of the workpiece.

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