Robot for simultaneous substrate transfer

Abstract

To provide a substrate processing system and method to be used to efficiently direct substrates within cluster tool environments.SOLUTION: A substrate processing system 200 includes a transfer region housing 205 defining a transfer region fluidly coupled with a plurality of processing regions. A sidewall of the transfer region housing defines a sealable access for providing and receiving substrates. The system includes a plurality of substrate supports 210a to 210d disposed within the transfer region. The system also includes a transfer apparatus 220 having a central hub 225 including a first shaft and a second shaft counter-rotatable with the first shaft. The transfer apparatus includes: an eccentric hub 230 that extends at least partially through the central hub and is radially offset from the central axis of the central hub; and an end effector 235 coupled with the eccentric hub. The end effector includes a plurality of arms 237, the number of which is equal to the number of substrate supports of the plurality of substrate supports.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims the benefit of priority to U.S. Provisional Patent Application No. 62 / 873,400, filed July 12, 2019, the contents of which are incorporated herein by reference in their entirety for all purposes.

[0002] This technology is related to the following applications, filed concurrently on July 12, 2019, entitled "ROBOT FOR SIMULTANEOUS SUBSTRATE TRANSFER" (U.S. Provisional Application No. 62 / 873,400), "ROBOT FOR SIMULTANEOUS SUBSTRATE TRANSFER" (U.S. Provisional Application No. 62 / 873,432), "ROBOT FOR SIMULTANEOUS SUBSTRATE TRANSFER" (U.S. Provisional Application No. 62 / 873,480), "MULTI-LID STRUCTURE FOR SEMICONDUCTOR PROCESSING SYSTEMS" (U.S. Provisional Application No. 62 / 873,518), and "HIGH-DENSITY SUBSTRATE PROCESSING SYSTEMS AND METHODS" (U.S. Provisional Application No. 62 / 873,503), each of which is incorporated herein by reference in its entirety for all purposes.

[0003] TECHNICAL FIELD The present technology relates to semiconductor processes and equipment, and more particularly to substrate processing systems. [Background technology]

[0004] background Semiconductor processing systems often utilize cluster tools to integrate multiple process chambers. This configuration can facilitate the performance of several sequential processing operations without removing the substrate from the controlled processing environment, or can allow similar processes to be performed on multiple substrates at once in various chambers. These chambers may include, for example, degas chambers, pre-treatment chambers, transfer chambers, chemical vapor deposition chambers, physical vapor deposition chambers, etch chambers, metrology chambers, and other chambers. The combination of chambers in a cluster tool, and the operating conditions and parameters under which these chambers are run, are selected to produce specific structures using specific processing recipes and process flows.

[0005] Cluster tools often process large numbers of substrates by passing the substrates serially through a series of chambers for processing operations. Process recipes and sequences are typically programmed into a microprocessor controller that directs, controls, and monitors the processing of each substrate through the cluster tool. Once an entire cassette of wafers has been successfully processed through the cluster tool, the cassette can be sent to yet another cluster tool or a stand-alone tool, such as a chemical mechanical polisher, for further processing.

[0006] Robots are typically used to transfer wafers through the various processing and holding chambers. The time required for each process and processing operation directly affects the throughput of substrates per unit time. The substrate throughput of a cluster tool can be directly related to the speed of the substrate processing robot located within the transfer chamber. As processing chamber configurations become more developed, traditional wafer transfer systems may become insufficient.

[0007] Therefore, there is a need for improved systems and methods that can be used to efficiently orient substrates within a cluster tool environment. These and other needs are addressed by current technology. Summary of the Invention

[0008] An exemplary substrate processing system may include a transfer region housing defining a transfer region fluidly coupled to multiple processing regions. A sidewall of the transfer region housing may define a sealable access for providing and receiving substrates. The system may include multiple substrate supports disposed within the transfer region. The system may also include a transfer apparatus. The transfer apparatus may include a central hub including a first shaft and a second shaft extending around and concentric with the first shaft. The second shaft may be counter-rotatable relative to the first shaft. The central hub may be characterized by a central axis. The transfer apparatus may include an eccentric hub extending at least partially through the central hub. The eccentric hub may be radially offset from the central axis of the central hub. The eccentric hub may be coupled to the first shaft of the central hub. The transfer apparatus may also include an end effector coupled to the eccentric hub. The end effector may include multiple arms with a number of arms equal to the number of substrate supports of the multiple substrate supports.

[0009] In some embodiments, the multiple substrate supports may include at least four substrate supports. One or more linkages may couple the eccentric hub to the first shaft of the central hub. The one or more linkages may include one or more belts extending around the first shaft or the eccentric hub, or multiple gears coupled between the first shaft and the eccentric hub. The end effector may also include multiple end pieces configured to support the substrate. Each end piece may extend perpendicularly to a similar plane extending perpendicular to the central hub. Each arm may include a first end piece and a second end piece of the multiple end pieces. The first end piece and the second end piece may be configured to support the substrate during movement of the end effector. Each first end piece and each second end piece may define a recessed ledge and a shelf. The central hub may be vertically movable along the central axis of the central hub.

[0010] Some embodiments of the present technology may also include a method of transferring a substrate. The method may include receiving a substrate on a first substrate support in a transfer region of a substrate processing system. Some embodiments of the present technology may also include a method of transferring a substrate. The transfer apparatus may include a central hub including a first shaft and a second shaft extending around and concentric with the first shaft. The transfer apparatus may include an eccentric hub extending at least partially through the central hub. The eccentric hub may be radially offset from a central axis of the central hub. The eccentric hub may be coupled to the first shaft of the central hub. The transfer apparatus may include an end effector coupled to the eccentric hub, and the end effector may include multiple arms. The method may include engaging the substrate with an arm of the multiple arms. The method may include rotating the first shaft in a first direction about the central axis of the central hub. The method may include rotating the first shaft in a first direction about the central axis of the central hub at a fixed ratio with the second shaft to radially reposition the substrate about the central axis in the transfer region. The method may include delivering the substrate to a second substrate support in a transfer region of the substrate processing system.

[0011] In some embodiments, the method may include translating the transfer device by further rotating the first shaft about the central axis at an increased rate from a constant ratio speed in a first direction or a second direction opposite the first direction to laterally reposition the substrate along a radius extending from the central axis within the transfer zone. Following engaging the substrate, the method may include lifting the substrate from the first substrate support by vertically translating the transfer device within the transfer region of the substrate processing system. Following engaging the substrate, the method may also include retracting the first substrate support from the substrate. Each arm of the end effector may include a first end piece and a second end piece. Each first end piece and each second end piece may define a recessed ledge and a shelf. Engaging the substrate may include rotating the arm across the substrate to position the substrate between the arm and the shelf of the first end piece and the shelf of the second end piece. The substrate processing system may include at least four substrates, and engaging the substrates may include individually or simultaneously engaging the at least four substrates with the end effector. The method may also include delivering the substrates to an alignment hub disposed between the first substrate support and the second substrate support before delivering the substrates to the second substrate support.

[0012] Some embodiments of the present technology may include a substrate processing system including a transfer region housing defining a transfer region fluidly coupled to multiple processing regions. A sidewall of the transfer region housing may define a sealable access for providing and receiving substrates. The transfer region may include multiple substrate supports disposed within the transfer region. The system may include a transfer apparatus disposed within the transfer region. The transfer apparatus may include a central hub including a first shaft and a second shaft extending around the first shaft. The second shaft may be counter-rotatable relative to the first shaft. The central hub may be characterized by a central axis. The transfer apparatus may include an eccentric hub extending at least partially through the central hub. The eccentric hub may be radially offset from the central axis of the central hub. The eccentric hub may be coupled to the first shaft of the central hub by one or more linkages. The transfer apparatus may also include an end effector coupled to the eccentric hub. The end effector may include multiple arms with a number of arms equal to the number of substrate supports of the multiple substrate supports.

[0013] In some embodiments, the end effector may also include multiple end pieces configured to support a substrate. Each end piece may extend perpendicularly to a similar plane extending perpendicular to the central hub. Each arm may include a first end piece and a second end piece of the multiple end pieces. The first end piece and the second end piece may be configured to support the substrate during movement of the end effector. The central hub may be vertically translatable along a central axis of the central hub.

[0014] Such techniques may offer many advantages over conventional systems and techniques. For example, the transfer system may provide lateral transfer functionality in addition to rotational motion for substrate transfer. Furthermore, the transfer system may accommodate a transfer region of a substrate processing chamber having multiple rows of substrates. These and other embodiments, along with many of their advantages and features, are described in more detail in conjunction with the following description and accompanying figures.

[0015] A better understanding of the nature and advantages of the disclosed technology may be realized by reference to the remaining portions of the specification and the drawings. [Brief explanation of the drawings]

[0016] [Figure 1A] 1 shows a schematic top view of one embodiment of an exemplary processing system in accordance with some embodiments of the present technique; [Figure 1B] 1 shows a schematic partial cross-sectional view of an exemplary chamber system in accordance with some embodiments of the present technique; [Figure 2] FIG. 2 depicts a simplified isometric view of a transfer section of an exemplary substrate processing system in accordance with some embodiments of the present technique. [Figure 3A] 1 shows a schematic cross-sectional view of an exemplary transfer device in accordance with some embodiments of the present technology; [Figure 3B] 1A-1C show schematic top views of exemplary transfer device components in accordance with some embodiments of the present technology; [Figures 3C-3F] 1A-1C show schematic top views of exemplary transfer device components in accordance with some embodiments of the present technology; [Figure 4A] 1 shows a schematic cross-sectional view of an exemplary transfer device in accordance with some embodiments of the present technology; [Figure 4B] 1 shows a schematic cross-sectional view of an exemplary transfer device in accordance with some embodiments of the present technology; [Figure 4C] 1 shows a schematic cross-sectional view of an exemplary transfer device in accordance with some embodiments of the present technology; [Figure 4D] 1 shows a schematic cross-sectional view of an exemplary transfer device in accordance with some embodiments of the present technology; [Figure 5] 1 illustrates exemplary operations in a method of transferring a substrate in accordance with some embodiments of the present technique. [Figures 6A-6B] 6A and 6B show schematic top views of a substrate being transferred in accordance with some embodiments of the present technique. [Figure 6C-6D] 6C and 6D show schematic top views of a substrate being transferred in accordance with some embodiments of the present technique. [Figures 6E-6F]6E and 6F show schematic top views of a substrate being transferred in accordance with some embodiments of the present technique. [Figures 7A-7B] 7A and 7B show schematic diagrams of a substrate being translated in accordance with some embodiments of the present technique. [Figure 8] 1 depicts a schematic cross-sectional elevation view of a transfer section of an exemplary substrate processing system, in accordance with certain embodiments of the present technique; DETAILED DESCRIPTION OF THE INVENTION

[0017] Some of the figures are included as schematic diagrams. It is understood that these figures are for illustrative purposes and should not be considered to be to scale or to ratio unless specifically stated to be to scale or to ratio. Furthermore, as schematic diagrams, the drawings are provided to aid in understanding and may not include all aspects or information compared to realistic depictions and may include exaggerated material for illustrative purposes.

[0018] In the accompanying figures, similar components and / or features may have the same reference label. Furthermore, various components of the same type may be distinguished by tracing the reference number with a letter that distinguishes the similar components. When only a first reference number is used herein, the description is applicable to any one of the similar components having the same first reference number, regardless of the letter.

[0019] Substrate processing can involve time-consuming operations to add, remove, or otherwise modify material on wafers or semiconductor substrates. Efficient substrate movement can reduce queue times and increase substrate throughput. To improve the number of substrates processed within a cluster tool, additional chambers can be incorporated into the mainframe. While tool lengthening allows for the continued addition of transfer robots and processing chambers, space inefficiencies can result as the cluster tool's footprint expands. Therefore, the present technology can include cluster tools with an increased number of processing chambers within a defined footprint. To accommodate the limited footprint associated with the transfer robot, the present technology can increase the number of processing chambers laterally outward from the robot. For example, some conventional cluster tools may include one or two processing chambers arranged around a centrally located section of the transfer robot to maximize the number of chambers radially around the robot. The present technology can extend this concept by incorporating additional chambers laterally outward as separate rows or groups of chambers. For example, the techniques of the present invention may be applied to cluster tools that include three, four, five, six, or more processing chambers each accessible at one or more robot access locations.

[0020] However, as additional process locations are added, accessing these locations from a central robot may no longer be feasible without additional transfer capabilities at each location. Some conventional techniques may include a wafer carrier on which the substrate remains seated during transfer. However, the wafer carrier can contribute to thermal non-uniformities and particle contamination on the substrate. The present technology overcomes these problems by incorporating a transfer section vertically aligned with the processing chamber area and a carousel or transfer device that can operate in coordination with the central robot to access additional wafer locations. In some embodiments, the present technology does not use a conventional wafer carrier and can transfer a particular wafer from one substrate support to a different substrate support within the transfer area. While the remaining disclosure routinely identifies specific structures, such as a four-position transfer area, in which the present structure and method may be used, it will be readily understood that the system and method are equally applicable to any number of structures and devices that may benefit from the described transfer capabilities. Accordingly, the technology should not be considered limited to use with only specific structures. Furthermore, while an exemplary tool system is described to provide a foundation for the present technology, it should be understood that the present technology can be incorporated into any number of semiconductor processing chambers and tools that may benefit from some or all of the described operations and systems.

[0021] FIG. 1A illustrates a top view of one embodiment of a deposition, etch, bake, and cure chamber substrate processing tool or processing system 100 in accordance with some embodiments of the present technology. In this illustration, a set of front-opening unified pods 102 are received within a factory interface 103 by robot arms 104a and 104b and delivered to a load lock or low-pressure holding area 106 before being delivered to one of the substrate processing regions 108 arranged in chamber systems or quad sections 109a-c, each of which may be a substrate processing system having a transfer area fluidly coupled to multiple processing regions 108. While a quad system is shown, it should be understood that platforms incorporating standalone chambers, twin chambers, and other multi-chamber systems are equally encompassed by the present technology. A second robot arm 110 housed in a transfer chamber 112 may be used to transport substrate wafers from the holding area 106 to the quad section 109 and vice versa; the second robot arm 110 may be housed in a transfer chamber to which each of the quad sections or processing systems may be connected. Each substrate processing region 108 can be equipped to perform several substrate processing operations, including any number of deposition processes, including cyclic layer deposition, atomic layer deposition, chemical vapor deposition, physical vapor deposition, as well as etching, pre-cleaning, annealing, plasma treatment, degassing, alignment, and other substrate processes.

[0022] Each quad section 109 may include a transfer region capable of receiving and delivering substrates from the second robot arm 110. The transfer region of the chamber system may be aligned with the transfer chamber having the second robot arm 110. In some embodiments, the transfer region may be laterally accessible to the robot. For subsequent operations, components of the transfer section may vertically translate the substrate to the overlying processing region 108. Similarly, the transfer region may also be operable to rotate the substrate between positions within each transfer region. The substrate processing region 108 may include any number of system components for depositing, annealing, curing, and / or etching a film of material on a substrate or wafer. In one configuration, two sets of processing regions, such as the processing regions in quad sections 109a and 109b, may be used to deposit material on the substrate, and a third set of processing chambers, such as the processing chambers or region in quad section 109c, may be used to cure, anneal, or otherwise process the deposited film. In another configuration, all three sets of chambers, such as all 12 chambers shown, may be configured to deposit and / or cure a film on a substrate.

[0023] As shown, the second robot arm 110 may include two arms for simultaneously delivering and / or retrieving multiple substrates. For example, each quad section 109 may include two accesses 107 along a surface of the transfer region housing that may be laterally aligned with the second robot arm. The accesses may be defined along a surface adjacent to the transfer chamber 112. In some embodiments, as shown, the first access may be aligned with a first substrate support of the quad section's plurality of substrate supports. Additionally, the second access may be aligned with a second substrate support of the quad section's plurality of substrate supports. In some embodiments, the first substrate support may be adjacent to the second substrate support, and the two substrate supports may define a first row of substrate supports. As shown in the illustrated configuration, the second row of substrate supports may be positioned laterally outward from the transfer chamber 112 behind the first row of substrate supports. The two arms of the second robot arm 110 can be spaced apart so that both arms can simultaneously enter the quad section or chamber system to deliver or retrieve one or two substrates to a substrate support in the transfer region.

[0024] Any one or more of the described transfer regions may be incorporated with additional chambers separate from the fabrication system shown in different embodiments. It will be understood that additional configurations of deposition, etching, annealing, and curing chambers for material films are contemplated by processing system 100. Furthermore, any number of other processing systems may be utilized with the present technology, which may incorporate transfer systems for performing any of the specific operations, such as transferring substrates. In some embodiments, a processing system that may provide access to multiple processing chamber regions while maintaining a vacuum environment in various sections, such as the noted holding and transfer regions, may enable operations to be performed in multiple chambers while maintaining a specific vacuum environment between individual processes.

[0025] FIG. 1B illustrates a schematic cross-sectional elevation view of one embodiment of an exemplary processing tool, e.g., through a chamber system, in accordance with some embodiments of the present technique. FIG. 1B may illustrate a cross-sectional view of any two adjacent processing regions 108 within any quad section 109. The elevation view may illustrate the fluid coupling configuration between one or more processing regions 108 and the transfer region 120. For example, the continuous transfer region 120 may be defined by a transfer region housing 125. The housing may define an open interior volume within which multiple substrate supports 130 may be positioned. For example, as illustrated in FIG. 1A, the exemplary processing system may include four or more substrate supports 130 distributed within the housing around the transfer region. The substrate support may be a pedestal, as illustrated, although many other configurations may be used. In some embodiments, the pedestal may be vertically transportable between the transfer region 120 and a processing region overlying the transfer region. The substrate support may be vertically transportable along a central axis of the substrate support along a path between a first position and a second position within the chamber system. Thus, in some embodiments, each substrate support 130 may be axially aligned with an overlying processing region 108 defined by one or more chamber components.

[0026] The open transfer region can provide the ability for a transfer device 135, such as a carousel, to engage and move, e.g., rotate, a substrate between various substrate supports. The transfer device 135 can be rotatable about a central axis, thereby positioning a substrate for processing in any of the processing regions 108 within the processing system. The transfer device 135 can include one or more end effectors that can engage a substrate from above, below, or can engage the outer edge of a substrate to move around the substrate support. The transfer device can receive a substrate from a transfer chamber robot, such as the robot 110 described above. The transfer device can then rotate the substrate to an alternate substrate support to facilitate the delivery of additional substrates.

[0027] Once positioned and awaiting processing, the transfer apparatus can position an end effector or arm between the substrate supports, thereby raising the substrate support above the transfer apparatus 135 and delivering the substrate to the processing region 108, which may be vertically offset from the transfer region. For example, and as shown, substrate support 130a can deliver the substrate to processing region 108a, while substrate support 130b can deliver the substrate to processing region 108b. This can occur with two other substrate supports and processing regions, as well as additional substrate supports and processing regions in embodiments where additional processing regions are included. In this configuration, a substrate support, when operably engaged to process a substrate, such as in a second position, can at least partially define the processing region 108 from below, and the processing region can be axially aligned with the associated substrate support. The processing region can be defined from above by a face plate 140 as well as other lid stack components. In some embodiments, each processing region can have an individual lid stack component, while in some embodiments, a component can accommodate multiple processing regions 108. Based on this configuration, in some embodiments, each processing region 108 can be fluidly coupled to the transfer region while being fluidly isolated from above from other processing regions within the chamber system or quad section.

[0028] In some embodiments, face plate 140 can operate as a system electrode for generating a localized plasma within processing region 108. As shown, each processing region can utilize or incorporate a separate face plate. For example, face plate 140a can be included to define from overlying processing region 108a, and face plate 140b can be included to define from overlying processing region 108b. In some embodiments, the substrate support can operate as a companion electrode for generating a capacitively coupled plasma between the substrate support and the pumping liner 145. Depending on the region geometry, pumping liner 145 can at least partially define processing region 108 radially or laterally. Again, separate pump liners can be utilized for each processing region. For example, pumping liner 145a can at least partially define processing region 108a radially, and pumping liner 145b can at least partially define processing region 108b radially. In embodiments, blocker plate 150 may be disposed between lid 155 and faceplate 140, and separate blocker plates may be included to facilitate fluid distribution within each processing region. For example, blocker plate 150a may be included for distribution to processing region 108a, and blocker plate 150b may be included for distribution to processing region 108b.

[0029] The lid 155 may be a separate component for each processing region or may include one or more common features. In some embodiments, as shown, the lid 155 may be a single component defining multiple apertures 160 for fluid delivery to the individual processing regions. For example, the lid 155 may define a first aperture 160a for fluid delivery to processing region 108a, and the lid 155 may define a second aperture 160b for fluid delivery to processing region 108b. Additional apertures, if included, may be defined for additional processing regions within each section. In some embodiments, each quad section 109 or multi-processing region section capable of accommodating more or less than four substrates may include one or more remote plasma units 165 for delivering plasma effluent to the processing chambers. In some embodiments, individual plasma units may be incorporated into each chamber processing region, while in some embodiments, fewer remote plasma units may be used. For example, as described, a single remote plasma unit 165 may serve multiple chambers, be it two, three, four, or more, or all of the chambers for a particular quad section. Piping may extend from the remote plasma unit 165 to each aperture 160 for delivery of plasma effluent for processing or cleaning in embodiments of the present technology.

[0030] As previously mentioned, processing system 100, or more specifically, a quad section or chamber system incorporated with system 100 or other processing systems, may include a transfer section disposed below the illustrated processing chamber region. FIG. 2 shows a schematic isometric view of the transfer section of an exemplary substrate processing system 200 in accordance with some embodiments of the present technique. FIG. 2 may illustrate additional aspects or variations of aspects of the transfer region 120 described above, which may include any of the components or features described. The illustrated system may include a transfer region housing 205 defining a transfer region in which several components may be included. The transfer region may be further defined from above, at least in part, by a processing chamber or processing region fluidly coupled to the transfer region, such as the processing chamber region shown in quad section 109 of FIG. 1A. Sidewalls of the transfer region housing may define one or more access locations 205 where substrates may be delivered and retrieved, such as by the second robot arm 110, as described above. The access locations 205, in some embodiments, may be slit valves or other sealable access locations, including doors or other sealing mechanisms to provide an airtight environment within the transfer region housing 205. While shown with two such access locations 205, it should be understood that in some embodiments, only a single access location 205 may be included, as well as access locations on multiple sides of the transfer region housing. It should also be understood that the transfer section 200 may be sized to accommodate any substrate size, including larger or smaller substrates, including substrates characterized by 200 mm, 300 mm, 450 mm, or any number of geometries or shapes.

[0031] Within the transfer region housing 205, there can be multiple substrate supports 210 arranged around the transfer region volume. While four substrate supports are shown, it should be understood that any number of substrate supports is similarly encompassed by embodiments of the present technology. For example, according to embodiments of the present technology, approximately three, four, five, six, eight, or more substrate supports 210 can be housed in the transfer region. The second robot arm 110 can deliver substrates to either or both of the substrate supports 210a or 210b via the access 205. Similarly, the second robot arm 110 can retrieve substrates from these locations. Lift pins 212 can protrude from the substrate support 210, allowing the robot to access underneath the substrate. The lift pins can be fixed on the substrate support or where the substrate support can retract downward, or the lift pins can be further raised or lowered through the substrate support in some embodiments. The substrate support 210 may be vertically translatable and, in some embodiments, may extend to a processing chamber region of a substrate processing system, such as processing chamber region 108 disposed above the transfer region housing 205 .

[0032] The transfer region housing 205 may extend through apertures in the transfer region as shown and may operate in conjunction with lasers, cameras, or other monitoring devices projecting or transmitting through adjacent apertures to provide access to an alignment system 215 for properly positioning the translated substrate. The transfer region housing 205 may also include a transfer apparatus 220 that may be operated in several ways to position and move substrates between the various substrate supports. Exemplary operations are described below, but in one example, the transfer apparatus 220 may move substrates on substrate supports 210 a and 210 b to substrate supports 210 c and 210 d, allowing additional substrates to be delivered to the transfer chamber.

[0033] The transfer apparatus 220 may include a central hub 225, which may include one or more shafts extending into the transfer chamber. The transfer apparatus may further include an eccentric hub 230 extending at least partially through the central hub 225. The eccentric hub may be radially offset from the central axis through the central hub and may rotate independently of the central hub. These separate rotations and offsets of the eccentric hub 230 may facilitate multiple modes of translation, including rotational and lateral, as described further below. Coupled to the eccentric hub 230 may be an end effector 235. The end effector 235 may include multiple arms 237 extending radially or laterally outward from the central or eccentric hub. While shown with a central body from which arms extend, the end effector may further include separate arms, each coupled to the eccentric hub 230. Embodiments of the present technology may include any number of arms. In some embodiments, the number of arms 237 may be similar to or equal to the number of substrate supports 210 included in the chamber. Thus, for four substrate supports, as shown, the transfer apparatus 220 may include four arms extending from the end effector. The arms may be characterized by any number of shapes and profiles, such as straight or arcuate profiles, and may further include any number of distal profiles, including hooks, rings, forks, or other designs for supporting and / or providing access to a substrate.

[0034] The end effector 235 can further include multiple end pieces 240, as described further below, and can be configured to support a substrate. The end pieces 240 can be coupled to arms of the multiple arms 237. Each arm of the end effector can include any number of end pieces, such as two, three, four, or more end pieces, positioned on or coupled to the arm so that the end effector arm can swing under or over a substrate without contacting the substrate, and then seat the substrate for movement within the transfer region. The end pieces are described in more detail below and can be used to contact the substrate during transfer or movement. The end pieces and end effectors can be made of or include several materials, including conductive and / or insulating materials. In some embodiments, the materials can be coated or plated to withstand contact with precursors or other chemicals that may enter the transfer region from an overlying processing chamber.

[0035] Additionally, materials can be provided or selected to withstand other environmental characteristics, such as temperature. In some embodiments, the substrate support can be operable to heat a substrate disposed thereon. The substrate support can be configured to elevate the surface or substrate temperature to temperatures of about 100°C or higher, about 200°C or higher, about 300°C or higher, about 400°C or higher, about 500°C or higher, about 600°C or higher, about 700°C or higher, about 800°C or higher, or higher. Any of these temperatures can be maintained during operation, and thus components of the transfer apparatus 220 can be exposed to any of these listed or encompassed temperatures. Consequently, in some embodiments, any material can be selected to accommodate these temperature regimes and can include materials such as ceramics and metals, which can be characterized by relatively low coefficients of thermal expansion or other beneficial properties. Component couplings can also be adapted for operation in high-temperature and / or corrosive environments. For example, if the end effector and end piece are each ceramic, the coupling may include a press fitting, a snap fitting, or a fitting such as a bolt that may not include additional materials that expand and contract with temperature and potentially crack the ceramic. In some embodiments, the end piece may be continuous with or monolithically formed with the end effector. Any number of other materials that may facilitate movement or resistance during operation may be utilized and are also within the scope of the present technology.

[0036] The floor of the transfer region housing 205 may further define a space 250 into which the end effector may be retracted when not in use. As shown, the space 250 may be defined between the substrate supports and may be shaped to define the profile of the end effector 235 or components of the end effector. For example, a recess may be defined in the space to accommodate an end piece that may extend below the arm 237 of the end piece 235. Additionally, the space 250 may extend around the alignment system 215 in some embodiments, which may allow components of the alignment system to be covered in some embodiments, such as during substrate processing using the end effector 235, and may protect the aligner and other alignment components from processing effluents in the processing system.

[0037] The transfer device 220 can include several components and configurations that can facilitate movement of the end effector and / or eccentric hub independent of the central hub, as described further below. While Figures 3A-3B show schematic cross-sectional views of an exemplary transfer device 220 in accordance with some embodiments of the present technology, it should be understood that other configurations that provide the described independent rotational movement are also encompassed by the present technology.

[0038] The central hub 225 may include a first shaft 310 and a second shaft 320, which, in some embodiments, may be axially aligned with the first shaft 310. For example, the first shaft 310 and the second shaft 320 may be concentric about a central axis extending vertically through the central hub. In some embodiments, the first shaft 310 may extend through the second shaft 310 or through aspects of the second shaft 320. As shown in FIG. 3A , the first shaft 310 and the second shaft 320 may be coaxial, but the two shafts may be coupled to separate motors or drive systems. As shown, the first shaft 310 may be coupled to a first drive system 312, which may include a motor and enable rotation about the central axis. This rotation can rotate linkage 330 in a first direction or a second direction opposite the first, and that movement can rotate eccentric hub 230 in a first direction or a second direction opposite the first about a central axis through the eccentric hub. Similarly, second shaft 320 can be coupled to second drive system 314, which can independently rotate central hub 225 in a first direction or a second direction about the central axis.

[0039] As described further below, the eccentric hub 230 may be rotatable about a central axis of the central hub 225, which may be manipulated by controlled rotation of the first and second shafts to generate linear or substantially linear movement of the end effector 235. In some embodiments, a vertical translation drive 325 may be included, which may translate the transfer apparatus vertically along the central axis. This may facilitate lifting of the substrate from the substrate support or lift pins in some embodiments, although in some embodiments, the lift pins and / or substrate support may be used to raise and lower the substrate, and the transfer apparatus 220 may not include a vertical drive mechanism.

[0040] The eccentric hub 230 may be at least partially disposed within the central hub 225 and may extend through the central hub 225 housing to couple with the end effector 235, or may include an extension post or linkage for coupling with the end effector 235. The eccentric hub 230 may be at least partially separated from the central hub 225, which may facilitate rotation of the eccentric hub independently of rotation of the central hub 225. The eccentric hub 230 may be directly or indirectly coupled to the central hub's first shaft 310, which may enable rotation of the eccentric hub 230 when the first shaft 310 rotates. The eccentric hub 230 may be positioned offset from a central axis of the central hub and may be radially offset from the central axis. In some embodiments, the eccentric hub may be characterized by a corresponding eccentric hub axis extending through the eccentric hub 230 and defining a rotational axis of the eccentric hub as well as the end effector. Additionally, the end effector 235 can be centrally coupled to the eccentric hub 230, or the central axis of the end effector can be offset from the central axis through the eccentric hub. For example, the end effector 235 can be axially aligned with the central axis of the central hub 225 or offset from the central and eccentric hubs, respectively. These offsets can affect the outer radius of the sweep path of the end effector in some embodiments.

[0041] As mentioned above, the eccentric hub 230 need not be directly coupled to the central hub 225, but may be rotatably coupled via a housing, which can facilitate independent rotation between the eccentric hub and the central hub, can create multiple rotational aspects for the transfer device 220, and can cooperate to provide lateral movement in addition to rotational movement. The first shaft 310 can extend within the central hub 225, providing some access to the coupling mechanism 330 about the first shaft. As shown, a linkage can couple the eccentric hub 230 to the first shaft 310 within the central hub housing. As a result, when the first shaft 310 is rotated by the first drive system 312, the linkage coupling the shaft with the eccentric hub allows the hub to similarly rotate about an eccentric axis that is radially offset from the central axis of the transfer device or central hub, as described above. As the eccentric hub rotates with the rotation of the first shaft 310, the end effector 235 may also rotate in a direction corresponding to or related to the direction of rotation of the first shaft 310 and / or the eccentric hub 230.

[0042] 3B-3F show schematic top views of exemplary components of a transfer device 220, according to some embodiments of the present technology. While only some aspects of the transfer device as described above may be illustrated, it should be understood that the illustrations are not intended to be limiting and may include any of the components, materials, or characteristics of the transfer device 220 described above. Additionally, the figures may show linkages included in any of the transfer devices or embodiments of the present technology described above.

[0043] As shown, the transfer device 220 can include a central hub 225. The central hub 225 can include a covered lid portion as previously shown, although the lid is not shown in the figures to better illustrate the exemplary linkages involved in the present technology. A first shaft 310 can extend within the central hub 225 and can be coupled to the eccentric hub 230 as previously described. Linkage 330a is shown in one embodiment that can use one or more belt couplings and can extend around the eccentric hub 230 and the first shaft 310 in several ways. One or more belts can extend within grooves or trenches defined in each of the eccentric hub and the first shaft.

[0044] Additionally, twist belts can be incorporated to reverse rotation between components. While individual or multiple belts can be used in different embodiments, additional linkage systems can be used as well. For example, as shown in FIG. 3C, a gear set can be used to drive the eccentric hub as shown. For example, the first shaft 310 can define several gear teeth along a region extending into the central hub 225. The gear teeth can interconnect with teeth on a linkage gear 330b, such as a pinion gear, which can connect to or extend around the eccentric hub 230 of the transfer device. Additional gears can also be incorporated in any number of configurations to facilitate rotation of the eccentric hub from rotation of the first shaft 310. For example, as shown in FIG. 3D, a pinion gear can be fixedly coupled to the first shaft 310 and located within the inner radius of a planetary gear 330c. The planetary gear 330c can be coupled to or as the eccentric hub 230 and can rotate with the movement of the planetary gear.

[0045] 3E-3F illustrate an additional coupling that can incorporate a half pulley to reduce offset of the eccentric hub, according to some embodiments of the present technology. As shown, the first shaft 310 can extend upward through the central hub 225. The first shaft 310 can be characterized by a half pulley at the distal end of the first shaft proximate the end effector 235. The half pulley can couple with half pulley 330d of the eccentric hub 230. The eccentric hub 230 can extend at least partially around the first shaft 310 as shown and can include a protruding half pulley for coupling with the half pulley at the distal end of the first shaft. In some embodiments, one or more bands 335 or other coupling materials can be used to join the eccentric hub half pulley and the half pulley of the first shaft 310. FIGS. 3B-3F illustrate three possible linkage systems included in the present technology, but the illustrations are not intended to be limiting.

[0046] Couplings of any number of other system components configured to provide the described operation are similarly encompassed by the present technology. Additionally, it should be understood that the linkage connection may include several gears, twisted belts, and other components that may cause the eccentric hub 230 to rotate in the same direction as the first shaft 310 or in a different direction, and therefore any embodiment described throughout this disclosure may take this effect into account. For example, a first direction of rotation of a shaft may cause the associated eccentric hub to rotate in either direction, and therefore, where first and second directions are described, either direction may actually be included to correspond to the illustrated or described movement, which may describe any type of actual linkage coupling encompassed in any particular example.

[0047] 4A shows a schematic cross-sectional view of another exemplary transfer device 400 in accordance with some embodiments of the present technology, which may include any of the components, materials, or properties described above. FIG. 4A shows a pulley system that may be used to separately rotate the eccentric hub, which may be coupled to the end effector 235, as described above. The transfer device 400 may include a central hub 425 having a housing that can house several pulley components. As described above, the central hub 425 may include the first shaft 310 and the second shaft 320, which may be rotatable with separate drive systems as described above.

[0048] The first shaft 310 may be coupled to the eccentric hub 430 by a set of pulleys and linkages that allow the eccentric hub 430 to be radially offset from the first shaft 310. The second shaft 320 may be coupled to a central hub 425, the rotation of which may cause all components to rotate together, which may rotationally translate a substrate seated on the arm of the end effector 235. Rotating the first shaft 310 separately from the second shaft 310 may provide additional translational motion, which may be used in some embodiments to provide lateral translation of the substrate.

[0049] The first pulley 410a may be coupled around the first shaft 310 and may be coupled to a second pulley 410b with a first linkage 415a. The second pulley 410b may be laterally offset from the first pulley 410a and housed by a central hub 425. The second pulley 410b may include a fixed linkage 420, such as an additional shaft, connecting the second pulley to a third pulley 410c, which may be vertically offset from the second pulley 410b. The third pulley 410c may be coupled to a fourth pulley 410d with a second linkage 415b. The fourth pulley 410d may be coupled around an eccentric shaft 430, which may be offset from the first shaft 310 to provide a second axis of eccentric motion of the end effector 235. Pulleys 410 can be of similar or different sizes, and linkages 415 can include any number or combination of linkages described above or understood to be within the present technology to allow for rotation or manipulation of the pulley system.

[0050] FIG. 4B shows a schematic cross-sectional view of an exemplary transfer device 440 in accordance with some embodiments of the present technology, which may include any of the components, materials, or properties described above, and may include variations or modifications of aspects of the transfer device 400 described above. FIG. 4B shows a partial pulley system and swing arm that can be used to independently rotate the eccentric hubs, which can be coupled to the end effector 235 as described above. The transfer device 440 can include a central hub 442 having a housing that can house several pulley components. As described above, the central hub 442 can include the first shaft 310 and the second shaft 320, which can be rotatable with separate drive systems as described above.

[0051] The first shaft 310 may be coupled to an eccentric hub 449 with a set of pulleys and linkages, radially offset from the first shaft 310 and allowing it to swing across a central axis via the first shaft 310 in some embodiments. The second shaft 320 may be coupled to a central hub 442, the rotation of which may rotate all components together, which may rotationally translate a substrate seated on the arm of the end effector 235. Rotating the first shaft 310 separately from the second shaft 310 may provide additional translational motion, which may be used in some embodiments to provide lateral translation of the substrate.

[0052] The first pulley 444a may be coupled around the first shaft 310 and may be coupled to a second pulley 444b with a linkage 445. The second pulley 444b may be laterally offset from the first pulley 444a and housed by the housing of the central hub 442, as described above. The second pulley 444b may be coupled to a swing arm 446, which may be vertically offset from the second pulley 444b. The swing arm 446 may extend rearward toward the first pulley 444a within the housing of the central hub 442. While the swing arm 446 may be offset from the first shaft 310 to provide a second axis of eccentric motion for the end effector 235, in some embodiments, rotation of the swing arm 446 from the second pulley 444b may drive the swing arm 446 along an arcuate path within the housing, providing movement of the eccentric hub 449 and the end effector 235. The movement may be coordinated with the rotation of the second shaft 320 and components, as described above, to provide lateral movement of the end effector 235. The eccentric hub 449 may be fixedly coupled to the swing arm 446, or in some embodiments may be an extension of the swing arm 446. In some embodiments, a gap 448 or path may be defined within the housing to accommodate movement of the eccentric hub 449 from the swing of the swing arm 446. Again, the pulleys 444 may be of similar or different sizes, and the linkage 445 may include any number or combination of linkages described above or understood to be within the present technology to enable rotation or movement of the pulley system.

[0053] FIG. 4C shows a schematic cross-sectional view of an exemplary transfer device 450 in accordance with some embodiments of the present technology, which may include any of the components, materials, or properties described above, and may include variations or modifications of aspects of the transfer device 400 described above. FIG. 4C may show an additional offset transmission device that may be coupled to the end effector 235 as described above and may provide an amount of linear translation of the end effector in addition to rotational motion as described above. The transfer device 450 may include a central hub 452 with multiple arms 454 that provide linear stability during movement. As described above, the central hub 452 may include the first shaft 310 and the second shaft 320, which may be rotatable with separate drive systems as described above.

[0054] The first shaft 310 may be coupled to a flexible drive 456 at a proximal end of the first shaft 310 relative to an end effector 235 coupled to the distal end of the first shaft 310. The flexible drive 456 may drive the first shaft 310 to bend outward from a central axis through the transfer device. The second shaft 310 may include an enlarged opening through which the first shaft 310 may extend and within which the first shaft 310 may tilt radially, which may provide linear extension of the end effector 235. By positioning the flexible drive 456 along the length of the first shaft 310, it may be positioned further away from the end effector at the opposite end of the first shaft, and the shorter distance flexible drive 456 may drive the first shaft 310 to increase linear movement of the substrate in an eccentric manner. For example, if the flexible drive 456 is positioned near the end effector 235, driving or bending the first shaft 310 will only translate the end effector slightly, e.g., slightly more than 1:1. However, as shown, if the flexible drive 456 is positioned further away from the end effector 235, a relatively small offset bend can produce more than or about 2 times the travel distance from the central axis of the end of the first shaft 310 to which the end effector 235 may be coupled, and may produce about 3 times the travel distance or more, about 4 times the travel distance or more, about 5 times the travel distance or more, about 6 times the travel distance or more, about 7 times the travel distance or more, about 8 times the travel distance or more, about 9 times the travel distance or more, or about 10 times the travel distance or more. The flexible drive 456 can bend in any direction from the central axis.

[0055] When the first shaft 310 is driven by the flexible drive 456, tilt, which can beneficially provide lateral translation of the end effector 235, can also provide tilt on the wafer if not compensated for. In some embodiments, the arms 454 of the central hub 452 can provide a compensating force or tilt opposite to the tilt direction generated by the flexible drive 456. Thus, in some embodiments, the arms 454 can maintain a substrate seated on or with the end effector 235 substantially parallel to the surface of the substrate support, reducing or limiting the amount of tilt during lateral adjustment of the substrate position. For example, the first shaft 310 can tilt within the wheels of the central hub 452, but the arms 454 can bend to compensate for this tilt and maintain the planarity of the central hub 452, which can keep the substrate substantially parallel to the substrate support. In some embodiments, the arm 454 can compensate for about 90% or more of the tilt induced by movement of the flexible drive 456, can compensate for about 91% or more of the tilt, about 92% or more of the tilt, about 93% or more of the tilt, about 94% or more of the tilt, about 95% or more of the tilt, about 96% or more of the tilt, about 97% or more of the tilt, about 98% or more of the tilt, about 99% or more of the tilt, or in some embodiments can completely compensate for the tilt of the first shaft 310 generated by the flexible drive 456.

[0056] FIG. 4D shows a schematic cross-sectional view of an exemplary transfer apparatus 460 according to some embodiments of the present technology, which may include any of the components, materials, or properties described above, and may include variations or modifications of aspects of the transfer apparatus 400 described above. FIG. 4D may illustrate additional exemplary apparatus that, in some embodiments, provides linear movement of a substrate disposed on or with the transfer apparatus. The transfer apparatus 460 may include an end effector 235 having arms 462 coupled with flexures 464. The number of flexures 464 may equal the number of arms 462 in some embodiments, which may provide independent movement of each arm 462. While some of the configurations described above may provide offset for the entire end effector, the transfer apparatus 460 may operate only the flexures 464 to linearly move the associated arm 462. Thus, in some embodiments, only a single rotatable shaft 465 may be coupled to the end effector 235. The shaft 465 may allow wiring to extend therethrough, which may then be coupled to the flexure 464, allowing for manipulation. The flexure, in some embodiments, may be manipulated to extend linearly, such as by bowing, in one or both directions along an axis through the associated arm 462 to extend or retract the associated arm 462 and substrate a distance. The flexure may be any type of flexure or deformation material, and in some embodiments, may be a linear flexure. The flexure drive may also be any drive, and in some embodiments, may be a piezo drive motor, for example. When energized, the piezo or other drive may cause deformation of or within the flexure, causing outward or inward bending, and linear movement of the coupled arm.

[0057] FIG. 5 illustrates exemplary operations in a method 500 of transferring substrates in accordance with some embodiments of the present technique. Method 500 may be performed in one or more semiconductor processing systems having a transfer region, such as transfer section 200, which may be incorporated into processing system 100, for example. The method may include several optional operations, as illustrated in the figures, which may or may not be specifically associated with some embodiments of methods in accordance with the present technique. Method 500 describes operations shown generally in FIGS. 6A-6F, which are described in conjunction with the operations of method 500. It should be understood that FIG. 6 shows only a partial schematic view with limited detail, and that in some embodiments, a system may include more or less substrate support and other components, as well as alternative structural aspects that can still benefit from any aspect of the present technique.

[0058] FIG. 6A illustrates a transfer section 600 of a substrate processing system as described above, including any of the drive components previously described in FIG. 3 or FIG. 4 , as well as any other drive components as will be understood, as well as other drives similarly encompassed by the present technology, and may include any of the features and aspects of the transfer section 200 described above. Additionally, the system 600 may be illustrated with a substrate 601 positioned within the transfer section, such as seated on a substrate support 610 as shown. This figure may illustrate a configuration of the present technology following subsequent initial operations of the method 500, which may include receiving a substrate at a first substrate support 610a in operation 505, such as via robotic access from a transfer chamber as described above. A robot may deliver one, two, or more substrates to the transfer housing 605 on a substrate support proximate an access or slit valve. A transfer apparatus 620 may rotate one or more substrates to the opposing substrate support and deliver additional substrates. It should be understood that the same process, including delivering one substrate at a time to a processing chamber, may be performed with any number of substrates, as shown. FIG. 6A shows the substrate after it has been placed in the transfer chamber, and a transfer apparatus 620 is positioned above the substrate 601 to receive the substrate for transfer to a second substrate support.

[0059] The transfer process may include rotating the transfer apparatus in several ways. Method 500 may include engaging a substrate 601 in operation 510. Engagement may occur simultaneously or separately until one or more substrates are transferred from the substrate support 610, including the substrate support's lift pins 612, to the arm 637 of the transfer apparatus 620. Depending on whether vertical movement capability is present, engagement and movement may or may not include raising or lowering either the substrate or the transfer apparatus, or both. Once the substrate is engaged by the transfer apparatus, complete transfer of the substrate may occur between the substrate support and the transfer apparatus. For example, in some embodiments, the transfer apparatus may lift the substrate from the substrate support or may lift pins on which the substrate can sit. This may be performed, for example, by vertically translating the transfer apparatus. In some embodiments, the substrate support may retract away from the substrate to complete the transfer.

[0060] Engagement of the substrate may occur as a passive engagement in some embodiments of the present technology, where the transfer apparatus 620 may provide a shelf on which the substrate 601 may rest. For example, and as previously mentioned, each arm 637 of the end effector 635 on the transfer apparatus 620 may include several end pieces coupled with the end effector, which may include one or more first end pieces 640 and one or more second end pieces 642. The end pieces may be positioned opposite each other to maintain a distance across the arm 637 without an extension or end piece, which may allow the arm to be swept in either direction across the substrate to position the end pieces in close proximity to the substrate and facilitate transfer of the substrate from the substrate support or lift pins to the transfer apparatus.

[0061] Figure 6B shows a diagram of engagement that can be performed by the present technique. As shown in Figure 6A, the arm 637 of the transfer apparatus 620 can sweep across the substrate 601 positioned on the lift pins 612. The end pieces 640, 642 can be aligned across the substrate to engage it, and the substrate can then be lowered onto the end pieces for transfer. Alternatively, or simultaneously, the end pieces 640, 642 can be raised to engage the substrate and lift it off the substrate support or lift pins. In some embodiments, when multiple substrates are being transferred, offsetting of the lift pins, as described below, can be used to enable individual engagement and delivery of substrates.

[0062] As shown, the first end piece 640 can be coupled to the arm 637 at an end distal from the central hub and can face backward toward the central hub. Additionally, one or more second end pieces 642 can be coupled to the arm 637 and can face away from the central hub or toward the first end piece. The second end piece 642 can be positioned along the arm a distance from the first end piece 640 that is greater than the diameter of the substrate to be engaged. As shown in FIG. 6B, a support surface can be provided upon which a substrate can be seated. Each of the first end piece 640 and the second end piece 642 can define a recessed ledge including a shelf portion that extends toward the supported substrate. The first end piece 640 can define a shelf 641 that extends toward the associated second end piece 642, and the second end piece 642 can define a shelf 643 that extends toward the associated first end piece 640. Together, the shelves can create a wafer support surface around two or more outer or radial edges of the substrate 601. In some embodiments, the first and second end pieces can be distinct components or can extend into longer arcuate sections, where the first and second end pieces extend perpendicular to a similar horizontal plane through the central axis of the central hub to create a substantially planar surface for substrate support. Additionally, each end piece can be characterized by an arcuate profile, as shown, and in some embodiments, can accommodate the arcuate edge of the substrate.

[0063] After transfer to the transfer apparatus 620 is complete, the substrates can be rotated between the substrate supports for further processing in a different processing region or for delivery to a substrate support accessible by a transfer robot, such as the second robot arm 110 described above. Translation of the substrate(s) can occur by causing one or more rotations of the first shaft and the second shaft, which can cause rotation of the arms and housing, as shown in FIG.

[0064] The transfer apparatus 620 can facilitate both rotational translation of the substrate and substantially linear or lateral translation of the substrate by manipulating the rotation of the central hub and eccentric hub in one or more ways. As shown in FIG. 6C , the central hub 625 and eccentric hub 630 can co-rotate in either direction at a fixed rotational ratio, thereby rotating the end effector 635 and any engaged substrate. This can occur by rotating both the second shaft in operation 515 and the first shaft in operation 520 together at a fixed rotational ratio, or by rotating the second shaft and locking the first shaft with the second shaft, which can also rotate the first shaft in the same direction as the second shaft, thereby radially repositioning the substrate 601 about the central axis within the transfer region of the chamber in operation 525.

[0065] Additionally, operations 515-525 can include lateral adjustment of the substrate to reposition it to improve its centering on the substrate support. As shown in FIG. 6D , when the first shaft to which the eccentric hub 630 is coupled is further rotated, e.g., at a faster speed than the second shaft to which the central hub 625 is coupled, the eccentric hub can be rotated about the central axis of the central hub 625, which can laterally adjust the position of the substrate 601. The eccentric hub can be further rotated in a first direction or counter-rotated relative to the central hub in a second direction opposite the first rotational direction of the central hub. When the rotation of the eccentric hub, which may be coupled to an end effector, is coordinated with a corrective rotation, such as a slight rotation relative to the rotation of the eccentric hub, substantially linear translation of the substrate along a radius from the central axis of the central hub can be performed, as shown. Linear translation, when used in combination with rotational translation, can enable both movement of multiple substrates between substrate supports and centering of the substrate on the substrate support. As explained further below, if staggered lift pins are incorporated into the system, each substrate can be individually centered before being delivered onto the substrate support.

[0066] As previously described, a substrate processing system according to embodiments of the present technology may have a monitoring and alignment system, including an alignment hub 650 disposed between each pair of substrate supports, as shown in the cross-sectional view of FIG. 6E. Additional access ports 652, 654 may allow a camera or laser to impinge on the substrate to identify misalignment, which may be based on a notch or other identifier on the substrate. As shown in the figure and as previously described, one or more recesses may be defined in the floor of the housing of the transfer region 605. For example, recess 606 may be defined in the floor that can accommodate first end piece 640. Thus, the transfer apparatus 620 may be embedded on the alignment system and embedded within the transfer chamber housing while the substrate is being processed, e.g., in the overlying processing region. In some embodiments, the alignment hub 650 may not fully retract into the transfer region housing; therefore, each arm of the transfer apparatus may include an opening through the arm and a cap or protrusion on the opening, which may accommodate the alignment hub to limit or prevent contact between the components.

[0067] In some embodiments, an optional alignment operation may be performed on each substrate in optional operation 530. As shown in FIG. 6F , the substrate may be transferred to the alignment hub 650, which may be facilitated by the profile of the arm 637 or end effector 635, as well as the vertical length of the end pieces 640, 642. As shown, the end pieces 640, 642 may extend a vertical distance from the arm 637, allowing the substrate to be lifted and aligned between the shelf portion and the arm. Thus, the end effector may be maintained in place during the alignment operation. In different embodiments, the alignment hub 650 may be raised to transfer the substrate, or the substrate may be lowered and placed on the alignment hub 650. Regardless, depending on the number of substrates being transferred, one or more aligners may receive the substrate and support it between the end pieces and the arms of the end effector. Alignment adjustments may be performed, and the transfer device may re-engage the substrate.

[0068] Additionally, in some embodiments, the end effector may be laterally adjusted to perform centering operations during alignment. For example, after being transferred to the alignment hub 650, the transfer device may be adjusted to accommodate offset errors. In some embodiments, the alignment hubs may be vertically offset from one another to accommodate a single drop-off and pickup of substrates for alignment and centering. Thus, in some embodiments, the vertical distance between the shelf of the end effector end piece and the surface of the arm from which the end piece extends may correspond to staggered heights between the highest and lowest alignment hub positions during an alignment operation or movement. This can accommodate any number of substrates, which in some embodiments can facilitate centering during wafer pickup, although in some embodiments, centering may also be performed before delivery of each substrate.

[0069] After the alignment operation, or if alignment is not otherwise performed, the transfer apparatus can continue to rotate the substrate toward the second substrate support to which the substrate is delivered. Once the substrate is positioned on the second substrate support in the transfer region, the substrate can be delivered to the support or associated lift pins in operation 535 by reversing the previously performed engagement process. Once delivered, the transfer apparatus can decouple the substrate from the transfer apparatus. Again, the substrate can be lowered along with the transfer apparatus and / or substrate support, or the lift pins of the substrate support can engage with the substrate to accept it from the transfer apparatus. The end effector can then be rotated away from the substrate, which can then proceed with processing or transfer from the transfer region.

[0070] 7A-7B show schematic diagrams of a substrate being laterally translated with a transfer apparatus 700, in accordance with some embodiments of the present technology. The transfer apparatus 700 is included as a simplified illustration of the operation of one possible embodiment of the eccentric drive system of the present technology and is not intended to limit the present technology. The transfer apparatus 700 may exemplify any of the transfer apparatuses discussed elsewhere and may include any of the components as previously described. While the transfer apparatus 700 is shown with a single substrate, it should be understood that any number of substrates may be coupled with an end effector as previously described.

[0071] 7A, substrate 701 may be coupled to an end effector 735 which may be coupled to an eccentric hub 730 operable in cooperation with a central hub 725. When central hub 725 and eccentric hub 730 are rotated at a constant rotational ratio, for example, to maintain the position of eccentric hub 730 relative to central hub 725 with respect to substrate 701, substrate 701 may rotate about the central axis of central hub 725, such as by rotating about the transfer region as described above.

[0072] When the eccentric hub 730 is rotated at a faster or alternatively slower rotational speed or ratio relative to the central hub 725, the eccentric hub 730 can rotate along an eccentric axis about its central axis. Figure 7B shows a position where the eccentric hub has rotated to the opposite side of the central axis, which can produce a lateral translation of the substrate by an amount equal to twice the distance of the eccentric offset between the central axis of the eccentric hub and the central axis of the central hub. If a compensating amount of rotation by the central hub occurs during transfer of the eccentric hub, the rotational position of the substrate 701 can be maintained, and any distance along this eccentric length can be linearly accommodated by a reduction in eccentric motion.

[0073] FIG. 8 shows a schematic cross-sectional elevation view of an exemplary transfer region of a substrate processing system 800 in accordance with some embodiments of the present technique. FIG. 8 illustrates a staggered lift pin configuration, as described above and as may be included in any of the transfer chambers or substrate processing systems described above. For example, any of the lift pins described above may include staggered height lift pins as shown. The substrate processing system 800 may include any of the components, configurations, and features of any of the embodiments described above, and similarly, any of the systems described above may include the lift pin configuration shown. The system 800 may include multiple substrates 801 individually positioned on a set of lift pins 805 within a chamber, which may also include a transfer apparatus 820, which may include features of any of the transfer apparatus described above, including an arm 835 extending from the transfer apparatus.

[0074] The lift pins 805 can be sets of pins that extend from the substrate support 810 to provide accessibility for delivering or retrieving the substrate 801, and each set can include any number of pins to accommodate the substrate. As shown, the lift pin sets 805 are staggered at four different heights, which can allow for individual delivery and retrieval of substrates. For example, lift pin 805a can extend a first vertical length above the substrate support. Lift pin 805b can extend a second vertical length above the substrate support 810b, shown in cross section, to conceal the substrate support through which lift pin 805a can extend even when the substrate supports are aligned. As shown, the second vertical length can be shorter than the first vertical length.

[0075] Additionally, lift pin 805c can extend a third vertical length from substrate support 810c, which may be shorter than the second vertical length. Finally, lift pin 805d can extend a fourth vertical length from its associated substrate support, which may be hidden by and aligned with substrate support 810c. The fourth vertical length may be shorter than the third vertical length. By shifting the height of the lift tweezers, individual adjustments can be made to each substrate prior to delivery or retrieval. For example, when positioned on its associated lift pin, substrate 801a can be accessible above substrate 801b, which can be accessible above substrate 801c, which can be accessible above substrate 801d.

[0076] The present technology includes substrate processing systems that can accommodate additional substrate supports that may not otherwise be accessible by a centrally located transfer robot, as described above. By incorporating a transfer apparatus according to embodiments of the present technology, multiple substrate supports can be utilized and accessed during substrate processing. When the transfer apparatus includes an eccentric drive operating in conjunction with a central rotational drive, lateral translation can be provided in addition to rotational translation. Furthermore, when end effectors according to some embodiments of the present technology are utilized, motions for engaging, moving, and releasing the substrate can all be performed along the outer edge of the substrate, which can facilitate avoidance of lift pins along the interior of the substrate support.

[0077] In the foregoing description, for purposes of explanation, numerous details have been set forth in order to provide an understanding of various embodiments of the present technology. However, it will be apparent to one skilled in the art that particular embodiments may be practiced without some of these details or with additional details.

[0078] While several embodiments have been disclosed, those skilled in the art will recognize that various modifications, alternative structures, and equivalents may be used without departing from the spirit of the embodiments. Moreover, in order to avoid unnecessarily obscuring the present technology, some well-known processes and elements have not been described. Therefore, the above description should not be construed as limiting the scope of the present technology. In addition, while a method or process may be described as sequential or stepwise, it should be understood that these steps may be performed simultaneously or in a different order than described.

[0079] Where a range of values ​​is presented, unless the context clearly dictates otherwise, it is understood that each intervening value between the upper and lower limits of that range is also specifically disclosed to the smallest unit of the unit of the lower limit. Any narrower range between any stated or unstated intervening value in a stated range, and any other stated or intervening value in that stated range, is also encompassed. The upper and lower limits of these smaller ranges may be individually included or excluded from the range, and each range in which either, neither, or both limits are included in the smaller range is also encompassed within the technical scope, subject to any explicitly excluded limits in the stated range. When a stated range includes one or more limits, ranges excluding either or both of those included limits are also included.

[0080] As used in this specification and the appended claims, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to a "substrate" includes a plurality of such substrates, reference to an "arm" includes a reference to one or more arms and equivalents thereof known to those skilled in the art, and so forth.

[0081] Additionally, the terms "comprise(s)", "comprising", "contain(s)", "containing", "include(s)", and "including", when used in this specification and claims, are intended to specify the presence of stated features, integers, components, or steps, but do not exclude the presence or addition of one or more other features, integers, components, steps, operations, or groups.

Claims

1. 1. A substrate processing system, comprising: a transfer region housing defining a transfer region fluidly coupled to a plurality of processing regions disposed above the transfer region, a sidewall of the transfer region housing defining a sealable access for providing and receiving substrates; a plurality of substrate supports disposed within the transfer region; 1. A transfer device comprising: a central hub including a first shaft and a second shaft extending around and concentric with the first shaft, the second shaft being counter-rotatable with the first shaft, the central hub characterized by a central axis, and each of the plurality of substrate supports being in a fixed horizontal position relative to the central hub; a flexible drive coupled to the first shaft for bending the first shaft outward from the central axis; and an end effector coupled to the first shaft, the end effector including a body having a number of arms equal to the total number of substrate supports of the plurality of substrate supports; the transfer device including A substrate processing system comprising:

2. 10. The substrate processing system of claim 1, wherein the plurality of substrate supports comprises at least four substrate supports, and each processing region of the plurality of processing regions is vertically offset from the transfer region.

3. The substrate processing system of claim 1 , wherein the flexible drive is coupled to the first shaft near an end of the first shaft opposite the end effector.

4. The substrate processing system of claim 1 , wherein the flexible drive is capable of bending in any direction from the central axis.

5. The substrate processing system of claim 1 , wherein the end effector further comprises a plurality of end pieces configured to support a substrate.

6. The substrate processing system of claim 5 , wherein each end piece extends perpendicular to a similar plane that extends perpendicular to the central hub.

7. 6. The substrate processing system of claim 5, wherein each arm includes a first end piece and a second end piece of the plurality of end pieces, the first end piece and the second end piece configured to support a substrate during movement of the end effector.

8. The substrate processing system of claim 5 , wherein each first end piece and each second end piece defines a recessed ledge or shelf.

9. 10. The substrate processing system of claim 1, wherein each arm of the plurality of arms compensates for any tilt of the first shaft to maintain the substrate substantially parallel to a corresponding one of the plurality of substrate supports.

10. 1. A method of transferring a substrate, comprising: Receiving a substrate on a first substrate support in a transfer region of a substrate processing system, the transfer region being fluidly coupled to a plurality of processing regions disposed above the transfer region, the substrate processing system including a transfer apparatus disposed in the transfer region, the transfer apparatus comprising: a central hub including a first shaft and a second shaft extending around and concentric with the first shaft; a flexible drive coupled to the first shaft and bending the first shaft outward from a central axis of the central hub; and an end effector coupled to the first shaft and including a plurality of arms; said receiving comprising: engaging the substrate with one arm of the plurality of arms; bending the first shaft outward from the central axis of the central hub to linearly move the substrate within the transfer region.

11. 11. The method of transferring a substrate of claim 10, further comprising using the arm to provide at least one or both of a compensation force and a tilt opposite to a tilt direction created by the flexible drive so as to maintain the substrate substantially parallel to the first substrate support.

12. 12. The method of transferring a substrate of claim 11, wherein the one or both of the compensation force and the tilt compensates for at least 90% of the tilt induced by the movement of the flexible drive.

13. 11. The method of transferring a substrate of claim 10, further comprising, subsequent to engaging the substrate, lifting the substrate from the first substrate support by vertically translating the transfer apparatus within the transfer region of the substrate processing system.

14. 11. The method of claim 10, wherein each arm of the end effector includes a first end piece and a second end piece, each first end piece and each second end piece defining a recessed ledge and shelf.

15. 11. The method of transferring a substrate of claim 10, further comprising delivering the substrate to a second substrate support within the transfer region of the substrate processing system, wherein each of the first substrate support and the second substrate support is in a fixed horizontal position relative to the central hub.

16. 16. The method of transferring a substrate of claim 15, further comprising delivering the substrate to an alignment hub disposed between the first substrate support and the second substrate support prior to delivering the substrate to the second substrate support.

17. 11. The method of transferring substrates of claim 10, wherein the substrate processing system includes at least four substrates, and wherein engaging the substrates includes engaging the at least four substrates with the end effector individually or simultaneously.

18. 1. A transfer device comprising: a central hub including a first shaft and a second shaft extending around and concentric with the first shaft, the central hub characterized by a central axis, the second shaft being counter-rotatable with the first shaft; a flexible drive coupled to the first shaft for bending the first shaft outward from the central axis; and A transfer device including an end effector coupled to the first shaft and including a body having a plurality of arms.

19. The transfer device of claim 18 , wherein the flexible drive is coupled to the first shaft near an end of the first shaft opposite the end effector.

20. 20. The transfer apparatus of claim 18, wherein each arm of the plurality of arms compensates for any tilt of the first shaft to maintain the substrate substantially parallel to a corresponding one of a plurality of substrate supports.

Images