Holding jig and method for holding workpiece

Abstract

To provide a holding jig which compared to prior art facilitates change of positions where a plurality of support parts respectively are fixed, and to provide a workpiece holding method using the holding jig.SOLUTION: A holding jig 1A comprises: a plurality of support parts 20 for supporting a workpiece 40 by contacting places at determined positions of the workpiece 40; and a main body part 10 having an adsorption face 11a which magnetically adsorbs the plurality of support parts 20 respectively that are arranged at contact positions being positions for contacting the places at determined positions of the workpiece 40.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a holding jig and a method for holding a workpiece using the holding jig. [Background technology]

[0002] In the holding jig described in JP 2011-183520 A (Patent Document 1), a plurality of support parts used to hold the workpiece are guided by a guide rail, and each of the plurality of support parts is fixed to the guide rail at a desired position with a screw. The screw for fixing each of the plurality of support parts to the guide rail is attached to the guide rail from the side opposite the workpiece (the back side of the workpiece). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2011-183520 Summary of the Invention [Problem to be solved by the invention]

[0004] In the holding jig described in Patent Document 1, each of the multiple support parts is individually fixed to the guide rail with a screw, and the guide rail and screws are located on the back side of the workpiece, so changing the position of each of the multiple support parts and re-fixing them requires a relatively large amount of work. This type of holding jig is not suitable for holding a wide variety of workpieces.

[0005] A primary object of the present disclosure is to provide a holding jig that allows the positions at which each of a plurality of support portions is fixed to be changed more easily than conventional methods, and a method for holding a workpiece using the holding jig. [Means for solving the problem]

[0006] The holding jig according to the present disclosure comprises a plurality of support parts that contact predetermined positions on the workpiece to support the workpiece, and a main body having an attraction surface to which each of the plurality of support parts arranged at contact positions that contact the predetermined positions on the workpiece is magnetically attracted. [Effects of the Invention]

[0007] According to the present disclosure, it is possible to provide a holding jig that allows the positions at which each of a plurality of support parts is fixed to be changed more easily than before, and a method for holding a workpiece using the holding jig. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a plan view showing a holding jig according to the first embodiment. [Figure 2] FIG. 2 is a front view seen from the arrow II in FIG. [Figure 3] 3 is a cross-sectional view showing a support portion of the holding jig according to the first embodiment. FIG. [Figure 4] FIG. 4 is a plan view seen from the arrow IV in FIG. [Figure 5] FIG. 4 is a bottom view seen from the arrow V in FIG. 3. [Figure 6] 1 is a plan view showing a state in which a holding jig according to Embodiment 1 holds a workpiece. [Figure 7] FIG. 7 is a front view taken along the arrow VII in FIG. 6. [Figure 8] FIG. 8 is a cross-sectional view taken along the arrow VIII-VIII in FIG. 6. [Figure 9] 4 is a flowchart of a method for holding a workpiece by a holding jig according to the first embodiment. [Figure 10] 4 is a view for explaining one step of a method for holding a workpiece by a holding jig according to the first embodiment. FIG. [Figure 11] FIG. 10 is a plan view showing a modified example of the holding jig according to the first embodiment. [Figure 12] FIG. 12 is a front view taken along the arrow XII in FIG. [Figure 13]10 is a cross-sectional view showing a first modified example of a support portion of the holding jig according to the first embodiment. FIG. [Figure 14] FIG. 14 is a plan view seen from the arrow XIV in FIG. [Figure 15] FIG. 14 is a bottom view seen from the arrow XV in FIG. [Figure 16] 10 is a cross-sectional view showing a second modified example of the support portion of the holding jig according to the first embodiment. FIG. [Figure 17] FIG. 17 is a plan view seen from the arrow XVII in FIG. 16. [Figure 18] FIG. 17 is a bottom view seen from the arrow XVIII in FIG. 16. [Figure 19] FIG. 10 is a plan view showing a holding jig according to a second embodiment. [Figure 20] FIG. 20 is a front view taken along the arrow XX in FIG. 19. [Figure 21] 10 is a plan view illustrating one step of a method for holding a workpiece by a holding jig according to the second embodiment. FIG. [Figure 22] FIG. 22 is a front view taken along the arrow XXII in FIG. 21. [Figure 23] 23 is a plan view illustrating a step subsequent to the steps shown in FIGS. 21 and 22 in the method of holding a workpiece by a holding jig according to the second embodiment. FIG. [Figure 24] FIG. 24 is a front view as seen from the arrow XXIV in FIG. 23. [Figure 25] FIG. 10 is a plan view showing a first modified example of a positioning portion of the holding jig according to the second embodiment. [Figure 26] FIG. 26 is a front view seen from the arrow XXVI in FIG. 25. [Figure 27] FIG. 10 is a plan view showing a second modified example of the positioning portion of the holding jig according to the second embodiment. [Figure 28] FIG. 28 is a front view seen from the arrow XXVIII in FIG. 27. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings.

[0010] Embodiment 1

[0011] As shown in FIGS. 1 to 5, a holding jig 1A according to the first embodiment includes a main body 10 and a plurality of support members 20. As shown in FIGS. 6 to 8, the holding jig 1A is a jig for holding a workpiece 40. As an example, the holding jig 1A is a jig for positioning and supporting the workpiece 40 relative to a processing machine. The workpiece 40 is, for example, a printed circuit board, although not particularly limited thereto. FIGS. 1 and 2 show a state in which each of the plurality of support members 20 is positioned at a position where it can support the workpiece 40. FIGS. 6 to 8 show a state in which the workpiece 40 is supported by the plurality of support members 20 positioned relative to the main body 10.

[0012] <Configuration of holding jig>

[0013] 1 and 2, the main body 10 includes a magnetic portion 11, a first limiting portion 12, and a second limiting portion 13. The magnetic portion 11 includes a magnetic body. The material constituting the magnetic portion 11 is, for example, a soft magnetic material, and may include at least one selected from the group consisting of iron (Fe), nickel (Ni), cobalt (Co), ferritic stainless steel, and martensitic stainless steel.

[0014] The magnetic part 11 has an attraction surface 11a to which each of the multiple support parts 20 is magnetically attracted. The attraction surface 11a is, for example, the surface of a magnetic body or the surface of a thin film formed on the surface of the magnetic body. The attraction surface 11a is, for example, a single plane. Note that the attraction surface 11a may be composed of multiple planes. Hereinafter, for convenience of explanation, the X and Y directions extending along the attraction surface 11a and the outer edge of the workpiece 40, and the Z direction perpendicular to the attraction surface 11a are introduced. The X and Y directions are, for example, perpendicular to each other. When the attraction surface 11a is disposed horizontally, the Z direction is, for example, along the vertical direction and is opposite to the direction of gravity. In the following, a planar view means a view from the Z direction. The X direction is, for example, along the short-side direction of the attraction surface 11a. The Y direction is, for example, along the long-side direction of the attraction surface 11a.

[0015] As shown in FIGS. 1 and 2 , the first limiting portion 12 protrudes in the Z direction from the suction surface 11a. The first limiting portion 12 limits the movement of the workpiece 40 relative to the suction surface 11a in a direction along the suction surface 11a. The first limiting portion 12 limits the position of the workpiece 40 relative to the suction surface 11a in the X and Y directions. The first limiting portion 12 allows the workpiece 40 to be positioned on the suction surface 11a at the desired position. The first limiting portion 12 has a first-direction limiting portion 12a that contacts at least a portion of the end of the workpiece 40 in the X direction and a second-direction limiting portion 12b that contacts at least a portion of the end of the workpiece 40 in the Y direction. The first-direction limiting portion 12a limits the position of the workpiece 40 in the X direction. The second-direction limiting portion 12b limits the position of the workpiece 40 in the X direction. The first direction limiting portion 12a and the second direction limiting portion 12b are, for example, separate members. The planar shape of each of the first direction limiting portion 12a and the second direction limiting portion 12b is, for example, a circular shape. The planar shape of each of the first direction limiting portion 12a and the second direction limiting portion 12b is not particularly limited and may be an L-shape, a polygonal shape, or the like. The first direction limiting portion 12a and the second direction limiting portion 12b may be the same member. Each of the first direction limiting portion 12a and the second direction limiting portion 12b may be, for example, a part of the first limiting portion 12 having an L-shape.

[0016] 1, the first direction limiting portion 12a is disposed, for example, in the center of the main body 10 in the Y direction. The second direction limiting portion 12b is disposed, for example, in the center of the main body 10 in the X direction.

[0017] As shown in FIGS. 1 and 2, the magnetic portion 11 further has a back surface 11b located opposite the attraction surface 11a. The back surface 11b is a surface that contacts or faces a mounting surface of a mounting table 51 (see FIG. 2) of a processing machine with a gap therebetween. The second limiting portion 13 protrudes from the back surface 11b in the Z direction. The second limiting portion 13 contacts a side surface of the mounting table 51 of the processing machine to limit movement of the main body portion 10 relative to the mounting table 51. As shown in FIG. 2, in a plan view, the second limiting portion 13 is arranged to sandwich the mounting table 51 in, for example, the X and Y directions. The lengths of the second limiting portion 13 in the X and Y directions are longer than, for example, the lengths of a workpiece 40 in the X and Y directions, as described below. The cross-sectional shape of the second limiting portion 13 perpendicular to the extension direction is not particularly limited, and may be, for example, an L-shape or a rectangle. The rigidity of the magnetic part 11 including such second limiting parts 13 is higher than the rigidity of the magnetic part 11 not including the second limiting parts 13. Therefore, even if an external force is applied to the magnetic part 11 when processing the workpiece 40, the magnetic part 11 is less likely to bend. In a plan view, the second limiting parts 13 are arranged, for example, further outward than the first limiting parts 12.

[0018] Each of the first restricting portion 12 and the second restricting portion 13 is, for example, a separate member from the magnetic portion 11, and is fixed to the magnetic portion 11. There are no particular limitations on the method for fixing each of the first restricting portion 12 and the second restricting portion 13 to the magnetic portion 11, but they can be fixed to the magnetic portion 11 by, for example, screws, crimping, adhesive, adhesive tape, welding, or the like.

[0019] Each of the plurality of support parts 20 contacts a predetermined position on the workpiece 40 to support the workpiece 40. Each of the plurality of support parts 20 is held on the attraction surface 11a by the magnetic attraction force acting between it and the attraction surface 11a. Each of the plurality of support parts 20 is magnetically attracted to the attraction surface 11a while being disposed at a contact position where it contacts a predetermined position on the workpiece 40. The magnetic attraction force acting between the attraction surface 11a of the main body 10 and each of the plurality of support parts 20 is greater than the force acting on each of the plurality of support parts 20 when the workpiece 40 is processed using the holding jig 1A.

[0020] 1 and 2, the multiple support parts 20 are arranged at intervals in each of the X direction and the Y direction. As shown in Fig. 1, the interval between multiple adjacent support parts 20 in the X direction is longer than, for example, the interval between multiple adjacent support parts 20 in the Y direction. The interval between multiple support parts 20 arranged relatively inward in the Y direction and adjacent in the X direction is longer than, for example, the interval between multiple support parts 20 arranged relatively outward in the Y direction and adjacent in the X direction.

[0021] 1 and 2, each of the multiple support portions 20 includes an adsorption portion 21, a pillar portion 22, and a step portion 23. The adsorption portion 21 is magnetically attracted to the adsorption surface 11a. The pillar portion 22 is a cylindrical member extending from the adsorption portion 21 toward the side where the workpiece 40 is located. The step portion 23 is a portion where the diameter decreases toward the tip of the pillar portion 22. The step portion 23 is a contact portion that comes into contact with a predetermined position on the workpiece 40 to support the workpiece 40.

[0022] The attraction portion 21 includes a magnet 21a and a yoke 21b. The magnet 21a is, for example, a permanent magnet. The magnet 21a has a surface 21a1 that contacts the attraction surface 11a. The magnet 21a is magnetized in the Z direction. The yoke 21b is a magnetic material. The yoke 21b is provided on the side of the magnet 21a where the step portion 23 is located, and guides the magnetic flux generated by the magnet 21a to the attraction surface 11a. The yoke 21b has a surface 21b1 that contacts the attraction surface 11a. The magnetic flux passing through the surface 21a1 of the magnet 21a and the surface 21b1 of the yoke 21b intersects with the attraction surface 11a. The density of the magnetic flux generated between the attraction portion 21 and the attraction surface 11a is higher than the density of the magnetic flux generated between an attraction portion consisting only of the magnet 21a and not including the yoke 21b and the attraction surface 11a.

[0023] 3, the magnet 21a and the yoke 21b are fixed to the pillar portion 22. The magnet 21a and the yoke 21b are fixed to the pillar portion 22 by, for example, screws 24. Note that the means and method for fixing the magnet 21a and the yoke 21b to the pillar portion 22 are not particularly limited. Fixing means and methods other than those using the screws 24 will be described later.

[0024] The pillar portion 22 is provided so as to extend in the Z direction. One end portion (e.g., the lower end portion) of the pillar portion 22 in the Z direction is in contact with the yoke 21b. The other end portion (e.g., the upper end portion) of the pillar portion 22 in the Z direction forms a step portion 23.

[0025] The step portion 23 has a first surface 23a facing the opposite side to the suction portion 21 in the Z direction, and a second surface 23b protruding from the first surface 23a and facing a direction intersecting the Z direction. The first surface 23a is the end surface of the column portion 22 in the Z direction. As shown in FIG. 4, the planar shape of the first surface 23a is, for example, an annular shape. The second surface 23b is the outer peripheral surface of a cylindrical protrusion protruding from the first surface 23a. The central axis of the protrusion having the second surface 23b as its outer peripheral surface is arranged coaxially with the central axis of the column portion 22, for example.

[0026] As shown in Fig. 5, the centers of the surface 21a1 of the magnet 21a and the surface 21b1 of the yoke 21b are aligned on the central axis of, for example, the screw 24. The central axis of the screw 24 is aligned coaxially with the central axis of the column portion 22 and the central axis of the protrusion having the second surface 23b as its outer peripheral surface. Fig. 5 shows a flat head screw as an example of the screw 24, but the type of screw 24 is not particularly limited. The screw 24 may be, for example, a pan head screw, a hexagonal bolt, a hexagonal socket head cap screw, or the like.

[0027] The multiple support parts 20 have, for example, the same shapes and dimensions as one another. Note that the multiple support parts 20 may have different shapes and dimensions as long as they have the structures shown in Figures 3 to 5.

[0028] 6 to 8, the workpiece 40 has a third surface 40a, a fourth surface 40b located on the opposite side to the third surface 40a, and an outer peripheral surface 40c connecting the third surface 40a and the fourth surface 40b. When the workpiece 40 is held by the holding jig 1A, the third surface 40a and the fourth surface 40b extend along the X direction and the Y direction, respectively, and are perpendicular to the Z direction.

[0029] The planar shape of the workpiece 40 is, for example, rectangular. The third surface 40a and the fourth surface 40b have, for example, short sides extending along the X direction and long sides extending along the Y direction. Electronic components are mounted on a partial area of ​​each of the third surface 40a and the fourth surface 40b. The third surface 40a is disposed so as to face the suction surface 11a of the main body 10, which will be described later. The planar shape of the workpiece 40 is not particularly limited, and may be a polygonal shape such as a triangular or pentagonal shape, a circular shape, an elliptical shape, or the like.

[0030] The outer peripheral surface 40c simultaneously contacts the first direction limiting portion 12a and the second direction limiting portion 12b of the first limiting portion 12. The outer peripheral surface 40c has portions extending along the X direction and the Z direction and portions extending along the Y direction and the Z direction. The portions of the outer peripheral surface 40c extending along the Y direction and the Z direction form the X direction end of the workpiece 40 and can contact the first direction limiting portion 12a. The portions of the outer peripheral surface 40c extending along the X direction and the Z direction form the Y direction end of the workpiece 40 and can contact the second direction limiting portion 12b.

[0031] The workpiece 40 has a plurality of grooves 41 formed therein, each recessed relative to the third surface 40a. The grooves 41 are, for example, through holes extending from the third surface 40a to the fourth surface 40b. The grooves 41 are arranged, for example, on either side of an area of ​​the workpiece 40 on which electronic components are mounted, in the X and Y directions. The grooves 41 are formed spaced apart from one another in the X or Y direction. Each of the grooves 41 extends, for example, along the X or Y direction. The inner circumferential surfaces 41a of the grooves 41 extend along the Z direction and face the X or Y direction.

[0032] 6, in a plan view, the minimum width of the second surface 23b of the step portion 23 of each of the multiple support parts 20 is narrower than the minimum width of each of the multiple grooves 41. The second surface 23b of the step portion 23 of each of the multiple support parts 20 can be inserted into the interior of each of the multiple grooves 41 and come into contact with the inner circumferential surface 41a. In a plan view, the maximum width of the first surface 23a of the step portion 23 of each of the multiple support parts 20 is wider than the minimum width of each of the multiple grooves 41.

[0033] As shown in FIGS. 6 to 8 , when the workpiece 40 is held by the holding jig 1A, the outer peripheral surface 40c of the workpiece 40 contacts each of the first direction limiting portion 12a and the second direction limiting portion 12b of the first limiting portion 12, and the second surfaces 23b of the stepped portions 23 of the multiple support portions 20 are inserted into each of the multiple grooves 41. In this state, the first surface 23a of the stepped portion 23 of each of the multiple support portions 20 contacts a third surface 40a that is continuous with the groove 41 through which the second surface 23b of the stepped portion 23 passes. As a result, the workpiece 40 is positioned in the Z direction by the multiple support portions 20. Furthermore, in this state, the second surface 23b contacts the inner peripheral surface 41a of the groove 41. The second surface 23b1 (see FIG. 6) of the step portion 23 of the support portion 20 arranged at one end in the X direction contacts an inner circumferential surface 41a1 (see FIG. 6) of the groove 41 arranged at one end in the X direction among the plurality of grooves 41, which is located closer to the center of the workpiece 40 in the X direction. The second surface 23b of the step portion 23 of the support portion 20 arranged at the other end in the X direction contacts an inner circumferential surface 41a of the groove 41 arranged at the other end in the X direction among the plurality of grooves 41, which is located closer to the center of the workpiece 40 in the X direction. The second surface 23b2 (see FIG. 6) of the step portion 23 of the support portion 20 arranged at one end in the Y direction contacts an inner circumferential surface 41a2 (see FIG. 6) of the groove 41 arranged at one end in the Y direction among the plurality of grooves 41, which is located closer to the center of the workpiece 40 in the Y direction. The second surface 23b of the step portion 23 of the support portion 20 arranged at the other end in the Y direction among the plurality of support portions 20 comes into contact with the inner circumferential surface 41a of the groove 41 arranged at the other end in the Y direction among the plurality of grooves 41, which is located toward the center of the workpiece 40 in the Y direction. As a result, the workpiece 40 is positioned in the X and Y directions by the plurality of support portions 20.

[0034] During processing, a force is applied to the workpiece 40 pressing it in the direction of the holding jig 1A. Therefore, the workpiece 40 does not move during processing. The holding jig may have a mechanism for fixing the workpiece 40. The positioning of the workpiece 40 may be achieved by providing multiple protrusions at predetermined positions on the workpiece 40, and having multiple support parts each hold each of the multiple protrusions. The multiple support parts may be any type that comes into contact with the predetermined positions on the workpiece 40 and supports the workpiece 40.

[0035] The workpiece 40 has a processed region 42 that separates two adjacent grooves 41. The processed region 42 is an area to be processed by a processing machine. The processing performed on the workpiece 40 is not particularly limited, but may be, for example, cutting using a cutting tool 50. Figure 6 also shows a processed region 43 that is formed by cutting the processed region 42.

[0036] <Method of holding a workpiece using a holding jig>

[0037] Next, a method for holding the workpiece 40 by the holding jig 1A will be described with reference to Fig. 9. First, the holding jig 1A including the main body 10 and the plurality of support portions 20 is prepared (first step (S1)).

[0038] Second, each of the multiple supports 20 of the holding jig 1A is attracted to a predetermined position on the suction surface 11a of the main body 10 (second step (S2)). The predetermined position is a contact position where each of the multiple supports 20 comes into contact with a predetermined location on the workpiece 40. In the second step (S2), each of the multiple supports 20 arranged at the contact position is attracted to the suction surface 11a. Coordinate data (XY coordinates) defining the arrangement positions of the multiple supports 20 is prepared in advance. The coordinate data is set according to the shape and dimensions of each of the multiple supports 20 and the shape and dimensions of the workpiece 40. Each of the multiple supports 20 is arranged at a predetermined position on the suction surface 11a by an articulated robot or a three-axis robot based on the prepared coordinate data.

[0039] Third, the workpiece 40 is supported by each of the multiple supports 20 (third step (S3)). In the third step (S3), as shown in Fig. 10, a state is achieved in which the workpiece 40 is spaced apart from each of the multiple supports 20 in the Z direction and in contact with the first limiting portion 12. Thereafter, by moving the workpiece 40 toward the multiple supports 20 while maintaining this state, the workpiece 40 comes into contact with the step portions 23 of each of the multiple supports 20 and is held by the holding jig 1A, as shown in Figs. 6 to 8.

[0040] In the first step (S1), each of the plurality of supports 20 is arranged at an arbitrary position on the suction surface 11a, for example. If the shape and dimensions of the workpiece 40 currently held by the holding jig 1A are different from those of the workpiece 40 previously held by the holding jig 1A, in the first step (S1), each of the plurality of supports 20 may be arranged at the position where it previously supported the workpiece 40. In this case, in the second step (S2), each of the plurality of supports 20 is repositioned based on coordinate data corresponding to the workpiece 40 currently held by the holding jig 1A.

[0041] <Effects of holding jig>

[0042] In the holding jig 1A, each of the plurality of support parts 20 is magnetically attracted to the magnetic part 11 of the main body part 10, so the position where each of the plurality of support parts 20 is fixed can be changed more easily than before.

[0043] Furthermore, with the holding jig 1A, it is not necessary to use the workpiece 40 when positioning the multiple supports 20 relative to the main body 10. Therefore, in the method of holding the workpiece 40 with the holding jig 1A, the second step (S2) of adsorbing each of the multiple supports 20 of the holding jig 1A to a predetermined position on the adsorption surface 11a of the main body 10 can be performed before the third step (S3) of having each of the multiple supports 20 support the workpiece 40. Therefore, the time required for the method of machining the workpiece 40 held by the holding jig 1A can be reduced compared to machining a workpiece held by a holding jig such as the holding jig described in Patent Document 1, which requires the use of the actual workpiece to align the multiple supports.

[0044] Furthermore, in the holding jig described in Patent Document 1, each of the multiple support parts has a mechanism for rotating around a screw, so if, for example, the planar dimensions of the workpiece are large and the distance between the area to be supported by the support parts and the outer edge of the workpiece is long, the length of the support parts becomes long and the support parts are likely to become misaligned due to a moment of force.In contrast, in holding jig 1A, support parts 20 do not have the above-mentioned rotating mechanism, so the support parts 20 do not become misaligned due to a moment of force.

[0045] In the holding jig 1A, each of the multiple support parts 20 includes a magnet 21a, a step part 23 connected to the magnet 21a and in contact with a portion of the workpiece 40, and a yoke 21b that guides magnetic flux emitted from the magnet toward the step part 23 to the attraction surface 11a. Therefore, in the holding jig 1A, the magnetic attraction force acting between the magnet 21a and the attraction surface 11a of the magnetic part 11 of the main body 10 is stronger than when each of the multiple support parts 20 does not include the yoke 21b, and the positions of the multiple support parts 20 magnetically attracted to the attraction surface 11a are less likely to shift. In addition, the yoke 21b suppresses the magnetic field formed by the magnet 21a on the workpiece 40 side, so that electronic components and the like mounted on the workpiece 40 are less susceptible to the magnetic field formed by the magnet 21a.

[0046] In the holding jig 1A, the first limiting portion 12 limits movement of the workpiece 40 in the X and Y directions along the suction surface 11a, while allowing the workpiece 40 to move toward each of the pre-positioned supports 20, i.e., in a direction intersecting the X and Y directions (Z direction). Therefore, with the holding jig 1A, the third step (S3) of the holding method can be performed more easily than when the main body 10 does not include the first limiting portion 12.

[0047] <Modification>

[0048] The holding jig 1A may be modified as follows. In the holding jig 1A, the main body 10 may have a magnet. When the main body 10 has a magnet, each of the multiple support parts 20 does not have to have a magnet 21a as long as it has a magnetic body.

[0049] 11 and 12, the magnetic part 11 of the main body 10 may be formed with a plurality of through holes 11c extending from the adsorption surface 11a to the back surface 11b. The holding jig 1B shown in FIGS. 11 and 12 is suitable when the mounting table 51 is equipped with a suction mechanism (not shown). Dust generated during the machining of the workpiece 40 held by the holding jig 1B is sucked into the suction mechanism through the plurality of through holes 11c.

[0050] As shown in FIGS. 13 to 18 , in the multiple support members 20, the suction portion 21 may be fixed to the column portion 22 by adhesion using at least one of adhesive 25 and adhesive 26 instead of screws 24. As shown in FIGS. 13 to 15 , one end of the column portion 22 in the Z direction may be in direct contact with the yoke 21b of the suction portion 21, and the outer edge of the contact surface of the yoke 21b with the one end may be adhered to the outer circumferential surface of the one end of the column portion 22 with adhesive 25. As shown in FIGS. 16 to 18 , one end of the column portion 22 in the Z direction may be connected to the yoke 21b of the suction portion 21 via adhesive 26. The material of the adhesives 25 and 26 is not particularly limited, and may include, for example, at least one selected from the group consisting of an epoxy adhesive, a silicone adhesive, an acrylic adhesive, and a urethane adhesive.

[0051] Embodiment 2

[0052] 19 and 20, the holding jig 1C according to the second embodiment has basically the same configuration as the holding jig 1A according to the first embodiment, but differs from the holding jig 1A in that it further includes positioning portions 30 that can position each of the multiple support portions 20 relative to the main body portion 10 when the position relative to the suction surface 11a is restricted by the first restricting portion 12. FIGS. 19 and 20 show a state in which each of the multiple support portions 20 is positioned by the positioning portions 30 at a position where it can support a workpiece 40. The following mainly describes the differences between the holding jig 1C and the holding jig 1A.

[0053] 19 and 20, the positioning portion 30 has, for example, a fifth surface 30a, a sixth surface 30b located on the opposite side of the fifth surface 30a, and an outer peripheral surface 30c connecting the fifth surface 30a and the sixth surface 30b. In other words, the positioning portion 30 is plate-shaped.

[0054] In a plan view, the positioning portion 30 has a shape congruent with that of the workpiece 40, for example. The planar shape of the positioning portion 30 is, for example, rectangular. The fifth surface 30a and the sixth surface 30b have short sides extending along the X direction and long sides extending along the Y direction, for example. The fifth surface 30a is disposed so as to face the suction surface 11a of the main body 10. The planar shape of the positioning portion 30 is not particularly limited, and may be a polygonal shape such as a triangular or pentagonal shape, a circular shape, an elliptical shape, or the like. The planar shape of the positioning portion 30 needs to be a shape that allows the formation of multiple holes 31, which will be described later.

[0055] The outer peripheral surface 30c simultaneously contacts the first direction limiting portion 12a and the second direction limiting portion 12b of the first limiting portion 12. The outer peripheral surface 30c has portions that extend along the X and Z directions and portions that extend along the Y and Z directions. The portions of the outer peripheral surface 30c that extend along the Y and Z directions form the X-direction end portion of the positioning portion 30 and can contact the first direction limiting portion 12a. The portions of the outer peripheral surface 30c that extend along the X and Z directions form the Y-direction end portion of the positioning portion 30 and can contact the second direction limiting portion 12b.

[0056] 19 and 20 , the positioning unit 30 is formed with a plurality of holes 31 through which the plurality of support portions 20 are passed. In a first state in which the positioning unit 30 is aligned with the suction surface 11a by the first limiting portion 12, the positioning unit 30 positions each of the plurality of support portions 20 passed through the plurality of holes 31 at a position where the workpiece 40 can be supported in a second state in which the workpiece 40 is aligned with the suction surface 11a by the first limiting portion 12. The plurality of holes 31 are provided so that, in a state in which the positioning unit 30 is aligned with the suction surface 11a by the first limiting portion 12, each of the plurality of support portions 20 passed through the plurality of holes 31 is positioned at a contact position with the main body 10. The contact position is a position determined for each of the plurality of support portions 20 such that each of the plurality of support portions 20 (strictly speaking, each of the stepped portions 23) comes into contact with a predetermined location on the workpiece 40.

[0057] The multiple holes 31 are provided, for example, so as to pass through the pillar portion 22 and the step portion 23 without passing through the suction portion 21. The diameter of the multiple holes 31 is, for example, smaller than the outer diameter of the suction portion 21 and larger than the outer diameter of the pillar portion 22. The ratio of the diameter of the multiple holes 31 to the outer diameter of the pillar portion 22 is, for example, more than 100% and 105% or less. Preferably, the ratio of the diameter of the multiple holes 31 to the outer diameter of the pillar portion 22 is, for example, more than 100% and 102% or less. The closer this ratio is to 100%, the more likely it is that the central axis of the pillar portion 22 of the support portion 20 through which each of the multiple holes 31 passes is coaxial with the hole axis of the multiple holes 31, and each of the multiple support portions 20 can be positioned with higher precision relative to the main body portion 10 by the positioning unit 30. For example, the diameter of the multiple holes 31 is larger than the outer diameter of the pillar portion 22 by 0.02 mm or more and 0.20 mm or less. The peripheral portions of the holes 31 in the fifth surface 30a come into contact with the adsorption portions 21 of the support portion 20 that are passed through the holes 31, respectively.

[0058] In each of the multiple support portions 20, the dimensional tolerance and geometric tolerance between the pillar portion 22 that passes through the hole 31 of the positioning portion 30 and the step portion 23 that supports the workpiece 40 are set according to the alignment accuracy of the workpiece 40 required for the holding jig 1C.

[0059] The thickness of the positioning portion 30 (the distance in the Z direction between the fifth surface 30a and the sixth surface 30b) is shorter than, for example, the length in the Z direction of the pillar portions 22. The pillar portions 22 of the support portions 20 that are passed through each of the multiple holes 31 protrude in the Z direction from the sixth surface 30b, and the step portions 23 of the support portions 20 that are passed through each of the multiple holes 31 are exposed.

[0060] The material constituting the positioning portion 30 includes a magnetic substance. The positioning portion 30 is magnetically attracted to the attraction portions 21 of the multiple support portions 20. The material constituting the positioning portion 30 is, for example, a soft magnetic material, and may include at least one selected from the group consisting of iron (Fe), nickel (Ni), cobalt (Co), ferritic stainless steel, and martensitic stainless steel.

[0061] The holding jig 1C may include multiple types of positioning portions 30. The multiple types of positioning portions 30 differ from one another in at least one of the shape and size of the multiple holes 31 and the position of each of the multiple holes 31 relative to the portion that contacts the first limiting portion 12. In this way, the holding jig 1C can hold multiple types of workpieces 40.

[0062] <Method of holding a workpiece using a holding jig>

[0063] Next, a method for holding a workpiece 40 using a holding jig 1C will be described with reference to Figures 19 to 24. The holding method using the holding jig 1C is basically the same as the holding method using the holding jig 1A, but differs from the holding method using the holding jig 1A in that the holding jig 1C equipped with a positioning portion 30 is prepared in the first step (S1) and the positioning portion 30 is used in the second step (S2). The following mainly describes the differences between the holding method using the holding jig 1C and the holding method using the holding jig 1A. Note that the second limiting portion 14 is not shown in Figures 21 to 24.

[0064] In the first step (S1), the positioning part 30 is prepared. The multiple holes 31 of the positioning part 30 are formed based on coordinate data (XY coordinates) that define the arrangement positions of the multiple support parts 20. Each of the multiple support parts 20 passes through one hole 31 of the positioning part 30. Each of the multiple support parts 20 is magnetically attracted to the positioning part 30.

[0065] 21 and 22, in the second step (S2), first, a state is realized in which the positioning unit 30 and the plurality of support units 20 passed through the plurality of holes 31 of the positioning unit 30 are arranged at a distance from the adsorption surface 11a in the Z direction, and the positioning unit 30 is simultaneously in contact with each of the first direction limiting portion 12a and the second direction limiting portion 12b of the first limiting unit 12. In this state, each of the plurality of support units 20 is magnetically attracted to the positioning unit 30, but is not magnetically attracted to the main body unit 10. The second step (S2) up to this point is a step (referred to as a fourth step) in which the plurality of support units 20 are passed through the plurality of holes 31, respectively, and the positioning units 30, which are arranged at a distance from the adsorption surface 11a, are brought into contact with the first limiting unit 12, thereby aligning the positioning units with respect to the adsorption surface 11a in a plan view.

[0066] In the second step (S2), secondly, while maintaining the above state, the positioning unit 30 and the plurality of support units 20 are moved in the Z direction, thereby realizing a state in which the adsorption unit 21 of each of the plurality of support units 20 is magnetically attracted to the adsorption surface 11a, as shown in Figures 19 and 20. The second step (S2) that follows the fourth step and is performed up to this point is a step (referred to as a fifth step) in which the positioning unit 30 is moved in a direction intersecting the adsorption surface 11a while the first restricting unit 12 restricts the movement of the positioning unit 30 in the direction along the adsorption surface 11a, thereby adsorbing each of the plurality of support units 20 that are passed through each of the plurality of holes 31 to the adsorption surface.

[0067] Third, in the second step (S2), as shown in FIGS. 23 and 24, the positioning portion 30 is separated from the plurality of support portions 20. Specifically, only the positioning portion 30 is moved away from the main body portion 10 in the Z direction. Because each of the plurality of support portions 20 includes a yoke 21b, the magnetic attraction force acting between the attraction portion 21 and the magnetic portion 11 is stronger than the magnetic attraction force acting between the attraction portion 21 and the positioning portion 30. As a result, the plurality of support portions 20 remain magnetically attracted to the attraction surface 11a of the magnetic portion 11 and are separated from the positioning portion 30. This allows the holding jig 1C to hold the workpiece 40, similar to the holding jig 1A shown in FIGS. 1 and 2.

[0068] 19 and 20, the step portions 23 of the plurality of supports 20 protrude from the positioning portions 30, so the workpiece 40 can be held by the holding jig 1C even if the positioning portions 30 are not separated from the plurality of supports 20. Therefore, as long as the positioning portions 30 do not interfere with the processing of the workpiece 40 by the processing machine, the positioning portions 30 do not need to be separated from the plurality of supports 20 in the second step (S2).

[0069] <Effects of holding jig>

[0070] The holding jig 1C has basically the same configuration as the holding jig 1A, and therefore has the same effects as the holding jig 1A.

[0071] Furthermore, with the holding jig 1C, multiple support parts 20 can be positioned relative to the main body part 10 simultaneously by the positioning parts 30. Therefore, even when the workpiece 40 has multiple locations to be supported, with the holding jig 1C, it is not necessary to position each support part individually, as with the holding jig described in Patent Document 1. Therefore, with the holding jig 1C, the task of positioning multiple support parts 20 relative to the main body part 10 can be performed more easily and in a shorter time than conventionally possible.

[0072] Furthermore, with the holding jig 1C, multiple types of positioning parts 30 can be prepared in advance, each corresponding to a different type of workpiece 40. Therefore, even when the holding jig 1C holds a first type of workpiece 40 and then holds a different second type of workpiece 40, by using the positioning parts 30 corresponding to the second type of workpiece 40, the task of positioning the multiple support parts 20 relative to the main body 10 can be performed more easily and in a shorter time than before.

[0073] Furthermore, the positioning parts 30 can be reused. With the holding jig 1C, for example, when holding the first type of workpiece 40 and then holding another first type of workpiece 40, the same positioning parts 30 can be used repeatedly, thereby providing high reproducibility in the positioning of the multiple support parts 20.

[0074] <Modification>

[0075] The holding jig 1C can be modified as follows.

[0076] In the holding jig 1C, the plurality of holes 31 of the positioning portion 30 may be provided so as to pass through any part of each of the plurality of support portions 20 in the Z direction.

[0077] As shown in FIGS. 25 and 26 , the plurality of holes 31 may be provided to allow the adsorption portion 21 to pass therethrough. The diameter of the plurality of holes 31 is larger than the outer diameter of the adsorption portion 21. The ratio of the diameter of the plurality of holes 31 to the outer diameter of the adsorption portion 21 is, for example, more than 100% and not more than 105%. Preferably, the ratio of the diameter of the plurality of holes 31 to the outer diameter of the adsorption portion 21 is, for example, more than 100% and not more than 102%. For example, the diameter of the plurality of holes 31 is larger than the outer diameter of the adsorption portion 21 by 0.02 mm or more and 0.20 mm or less. In this case, the fifth surface 30a contacts the adsorption surface 11a of the magnetic portion 11.

[0078] As shown in FIGS. 27 and 28 , the holes 31 may be provided so as to pass only the protruding portions of the stepped portion 23. The diameters of the holes 31 are larger than the outer diameter of the second surface 23b and smaller than the outer diameter of the first surface 23a. The ratio of the diameters of the holes 31 to the outer diameter of the second surface 23b is, for example, more than 100% and not more than 105%. Preferably, the ratio of the diameters of the holes 31 to the outer diameter of the second surface 23b is, for example, more than 100% and not more than 102%. For example, the diameters of the holes 31 are larger than the outer diameter of the second surface 23b by 0.02 mm or more and not more than 0.20 mm. In this case, the peripheral portions of the holes 31 in the fifth surface 30a contact the first surface 23a of the stepped portion 23 of the support part 20 that is passed through each of the holes 31.

[0079] In each support portion 20 shown in Figures 25 to 28, the dimensional tolerances and geometric tolerances between the portion that passes through the hole 31 of the positioning portion 30 and the step portion 23 that supports the workpiece 40 are set according to the alignment accuracy of the workpiece 40 required for the holding jig 1C.

[0080] [Appendix 1] a plurality of support portions that contact predetermined positions of the workpiece to support the workpiece; a main body having an attraction surface that magnetically attracts each of the plurality of support parts arranged at contact positions that come into contact with the determined positions of the workpiece. [Appendix 2] each of the plurality of support parts includes a magnet that is magnetically attracted to the attraction surface, a contact part that contacts the workpiece at the predetermined position to support the workpiece, and a yoke that is provided on the side of the magnet where the contact part is located and that guides the magnetic flux generated by the magnet to the attraction surface; 2. The holding jig according to claim 1, wherein the main body portion includes a magnetic material. [Appendix 3] The holding jig described in Appendix 1 or Appendix 2, wherein the main body portion includes a first limiting portion that limits movement of the workpiece relative to the suction surface in a direction along the suction surface and allows movement of the workpiece in a direction intersecting the suction surface. [Appendix 4] a plate-shaped positioning portion that positions each of the plurality of support portions at the contact position with respect to the main body portion when the position with respect to the suction surface is restricted by the first restricting portion, a plurality of holes through which the plurality of support parts are passed, respectively, are formed in the positioning part; A holding jig as described in Appendix 3, wherein the plurality of holes are provided so that each of the plurality of support portions passing through each of the plurality of holes is positioned at the contact position with respect to the main body portion when the positioning portion is aligned with respect to the suction surface by the first limiting portion. [Appendix 5] The holding jig according to claim 4, wherein the positioning portion is a separate member from the plurality of support portions and the main body portion, and includes a magnetic body. [Appendix 6] In each of the plurality of support portions, the yoke covers a surface of the magnet other than the attracting surface and the surface that attracts the magnet, 6. The holding jig according to claim 2, 4, or 5, wherein an inner circumferential surface of each of the plurality of holes is arranged opposite an outer circumferential surface of the contact portion or the yoke. [Appendix 7] the holding jig is a jig for holding the workpiece on a mounting table of a processing machine, A holding jig described in any one of Appendix 1 to Appendix 6, wherein the main body portion further includes a second limiting portion that contacts a portion of the mounting table to limit movement of the main body portion relative to the mounting table. [Appendix 8] A method for holding a workpiece by a holding jig, comprising: a first step of preparing the holding jig, the holding jig including a plurality of support parts that contact predetermined positions of the workpiece to support the workpiece, and a main body having an attraction surface that magnetically attracts each of the plurality of support parts; a second step of adsorbing each of the plurality of support parts arranged at contact positions that come into contact with the determined positions of the workpiece onto the adsorption surface; and a third step of supporting the workpiece with each of the plurality of supporting portions. [Appendix 9] the main body includes a first limiting portion that limits the position of the workpiece relative to the suction surface in a plan view and allows the workpiece, the position of which is limited relative to the suction surface, to move in a direction intersecting the suction surface; the holding jig further includes a plate-shaped positioning portion that positions each of the plurality of support portions at the contact position with respect to the main body portion when the position of the support portion with respect to the suction surface is restricted by the first restricting portion, the positioning portion has a plurality of holes formed at positions through which the plurality of support portions are passed and at which the plurality of support portions are disposed at the contact positions with respect to the main body portion; The second step comprises: a fourth step of adjusting the position of the positioning portion relative to the suction surface in a plan view by bringing the positioning portion, in which each of the plurality of support portions is passed through each of the plurality of holes and is disposed at a distance from the suction surface, into contact with the first limiting portion; and a fifth step of moving the positioning part in the intersecting direction while restricting the movement of the positioning part in the direction along the suction surface by the first restricting part, thereby adsorbing each of the plurality of support parts passing through each of the plurality of holes to the suction surface. [Appendix 10] 9. The method for holding a workpiece described in Appendix 8, wherein in the second step, an articulated robot or a three-axis device positions each of the plurality of support parts relative to the main body part based on coordinate data that defines the position at which each of the plurality of support parts should be placed on the suction surface.

[0081] Although the embodiments of the present disclosure have been described above, the above-described embodiments can be modified in various ways. Furthermore, the scope of the present disclosure is not limited to the above-described embodiments. The scope of the present disclosure is defined by the claims, and is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0082] 1A, 1B, 1C holding jig, 10 main body portion, 11 magnetic portion, 11a suction surface, 11b back surface, 11c through hole, 12 first limiting portion, 12a first direction limiting portion, 12b second direction limiting portion, 13, 14 second limiting portion, 20 support portion, 21 suction portion, 21a magnet, 21b yoke, 22 column portion, 23 step portion (contact portion), 23a first surface, 23b1, 23b, 23b2 second surface, 24 screws, 25, 26 adhesive, 30 positioning portion, 30a fifth surface, 30b sixth surface, 30c outer peripheral surface, 31 hole, 40 workpiece, 40a third surface, 40b fourth surface, 40c outer peripheral surface, 41 groove, 41a1, 41a2, 41a inner peripheral surface, 42 Processed area, 43 processed area, 50 cutting tool, 51 mounting table.

Claims

1. A holding jig for holding a workpiece, the holding jig having a plurality of first groove portions arranged to sandwich an area where an electronic component is mounted in a first direction and extending along a second direction intersecting the first direction, and a plurality of second groove portions arranged to sandwich the area in the second direction and extending along the first direction, a plurality of support portions that contact predetermined positions of the workpiece to support the workpiece; a main body having an attraction surface to which each of the plurality of support parts arranged at contact positions that come into contact with the predetermined positions of the workpiece is magnetically attracted, the plurality of support portions are provided to position the workpiece in a direction along the suction surface and a direction intersecting the suction surface, Each of the plurality of support portions has a first surface facing away from the main body portion in a direction intersecting the suction surface, and a second surface protruding from the first surface and facing in a direction along the suction surface, The plurality of support portions include a plurality of first support portions whose second surfaces are inserted into the plurality of first groove portions respectively when supporting the workpiece, and a plurality of second support portions whose second surfaces are inserted into the plurality of second groove portions respectively when supporting the workpiece, and the holding jig is arranged to contact the workpiece when supporting the workpiece.

2. a plurality of support portions that contact predetermined positions of the workpiece to support the workpiece; a main body having an attraction surface to which each of the plurality of support parts arranged at contact positions that come into contact with the predetermined positions of the workpiece is magnetically attracted, each of the plurality of support parts has a magnet that is magnetically attracted to the attraction surface; The holding jig further includes a plate-shaped positioning portion having a plurality of holes formed therein through which the plurality of support portions are passed.

3. The holding jig according to claim 2 , wherein the positioning portion positions the plurality of support portions relative to the main body portion.

4. The holding jig according to claim 2 , further comprising a first limiting portion that protrudes from the suction surface of the main body portion and limits the position of the positioning portion relative to the suction surface.

5. When the positioning portion is aligned with the suction surface by the first limiting portion, each of the plurality of support portions that is passed through each of the plurality of holes is aligned with the main body portion. The holding jig according to claim 4 , which is disposed at the contact position.

6. each of the plurality of support parts includes an attraction part having the magnet and a pillar part extending from the attraction part toward a side on which the workpiece is placed; The holding jig according to claim 2 , wherein the diameter of the plurality of holes is larger than the outer diameter of the suction portion.

7. a plurality of support portions that contact predetermined positions of the workpiece to support the workpiece; a main body having an attraction surface to which each of the plurality of support parts arranged at contact positions that come into contact with the predetermined positions of the workpiece is magnetically attracted, each of the plurality of support parts includes a magnet that is magnetically attracted to the attraction surface, a contact part that contacts the workpiece at the predetermined position to support the workpiece, and a yoke that is provided on the side of the magnet where the contact part is located and that guides the magnetic flux generated by the magnet to the attraction surface; the main body portion includes a magnetic material, the main body portion includes a first limiting portion that limits movement of the workpiece relative to the suction surface in a direction along the suction surface and allows movement of the workpiece in a direction intersecting the suction surface, a plate-shaped positioning portion that positions each of the plurality of support portions at the contact position with respect to the main body portion when the position with respect to the suction surface is restricted by the first restricting portion, a plurality of holes through which the plurality of support parts are passed, respectively, are formed in the positioning part; A holding jig, wherein the plurality of holes are provided so that each of the plurality of support portions passing through each of the plurality of holes is positioned at the contact position with respect to the main body portion when the positioning portion is aligned with respect to the suction surface by the first limiting portion.

8. The holding jig according to claim 7 , wherein the positioning portion is a separate member from the plurality of support portions and the main body portion, and includes a magnetic material.

9. In each of the plurality of support portions, the yoke covers a surface of the magnet other than the attracting surface and the surface that attracts the magnet, The holding jig according to claim 8 , wherein an inner circumferential surface of each of the plurality of holes is disposed opposite an outer circumferential surface of the contact portion or the yoke.

10. a plurality of support portions that contact predetermined positions of the workpiece to support the workpiece; a main body having an attraction surface to which each of the plurality of support parts arranged at contact positions that come into contact with the predetermined positions of the workpiece is magnetically attracted, each of the plurality of support parts includes a magnet that is magnetically attracted to the attraction surface, a contact part that contacts the workpiece at the predetermined position to support the workpiece, and a yoke that is provided on the side of the magnet where the contact part is located and that guides the magnetic flux generated by the magnet to the attraction surface; the main body portion includes a magnetic material, a holding jig for holding the workpiece on a mounting table of a processing machine, The main body further includes a second limiting portion that contacts a portion of the stage to limit movement of the main body relative to the stage.

11. A method for holding a workpiece by a holding jig, comprising: The method includes the steps of: providing a plurality of support parts that contact predetermined positions of the workpiece to support the workpiece; and providing a main body having an attraction surface to which each of the plurality of support parts is magnetically attracted. A first step of preparing a holding jig is provided, the plurality of support portions are provided to position the workpiece in a direction along the suction surface and a direction intersecting the suction surface, a second step of adsorbing each of the plurality of support parts, which are arranged at contact positions where the support parts come into contact with the predetermined positions of the workpiece, onto the adsorption surface; a third step of supporting the workpiece with each of the plurality of support portions and positioning the workpiece in a direction along the suction surface and in a direction intersecting the suction surface.

12. the plurality of support portions each have a first surface facing away from the main body portion in a direction intersecting the suction surface, and a second surface protruding from the first surface and facing in a direction along the suction surface, the first surface and the second surface being provided so as to come into contact with the workpiece while supporting the workpiece; The method for holding a workpiece according to claim 11 , wherein the third step brings the workpiece into contact with the first surface and the second surface.

13. A method for holding a workpiece by a holding jig, comprising: a first step of preparing the holding jig, the holding jig including a plurality of support parts that contact predetermined positions of the workpiece to support the workpiece, and a main body having an attraction surface to which each of the plurality of support parts is magnetically attracted; a second step of adsorbing each of the plurality of support parts, which are arranged at contact positions where the support parts come into contact with the predetermined positions of the workpiece, onto the adsorption surface; a third step of supporting the workpiece by each of the plurality of supporting portions, the holding jig further includes a plate-shaped positioning portion having a plurality of holes formed therein through which the plurality of support portions are passed, The second step is a method for holding a workpiece, the method including a step of passing each of the plurality of support parts through each of the plurality of holes in the positioning part, and aligning the positions of the plurality of support parts relative to the suction surface in a planar view.

14. The method for holding a workpiece according to claim 13 , wherein in the second step, after aligning the positions of the plurality of support parts with the positioning part, the positioning part is separated from the plurality of support parts.

15. A method for holding a workpiece by a holding jig, comprising: a first step of preparing the holding jig, the holding jig including a plurality of support parts that contact predetermined positions of the workpiece to support the workpiece, and a main body having an attraction surface to which each of the plurality of support parts is magnetically attracted; a second step of adsorbing each of the plurality of support parts, which are arranged at contact positions where the support parts come into contact with the predetermined positions of the workpiece, onto the adsorption surface; a third step of supporting the workpiece by each of the plurality of supporting portions, the main body includes a first limiting portion that limits the position of the workpiece relative to the suction surface in a plan view and allows the workpiece, the position of which is limited relative to the suction surface, to move in a direction intersecting the suction surface, the holding jig further includes a plate-shaped positioning portion that positions each of the plurality of support portions at the contact position with respect to the main body portion when the position of the support portion with respect to the suction surface is restricted by the first restricting portion, the positioning portion has a plurality of holes formed at positions through which the plurality of support portions are passed and at which the plurality of support portions are disposed at the contact positions with respect to the main body portion; The second step comprises: Each of the plurality of support portions is passed through each of the plurality of holes, and is attached to the suction surface. a fourth step of bringing the positioning portions, which are spaced apart, into contact with the first limiting portion to align the positioning portions with respect to the suction surface in a plan view; and a fifth step of moving the positioning part in the intersecting direction while restricting the movement of the positioning part in the direction along the suction surface by the first restricting part, thereby adsorbing each of the plurality of support parts passing through each of the plurality of holes to the suction surface.

16. The method for holding a workpiece according to any one of claims 11 to 15, wherein in the second step, an articulated robot or a three-axis device positions each of the plurality of support parts relative to the main body part based on coordinate data that defines the position at which each of the plurality of support parts should be placed on the suction surface.

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