Surface texture measuring device and surface texture detection system

Abstract

To provide a surface texture measurement device which can achieve improvement of accuracy of estimation of a surface texture.SOLUTION: A surface texture measurement device 20 measures a surface texture of a workpiece W ground by an abrasive wheel 12 by a grinder. The surface texture measurement device 20 includes: a contact member 22 configured to contact with a surface of the workpiece W and slide relative to the surface; a spring 27 which biases the contact member 22 to the surface of the workpiece W; a sensor 25 which detects at least one of an acceleration of vibration of the contact member 22 and displacement of vibration of the contact member 22 which are caused by sliding motion between the contact member 22 and the workpiece W; and a damping component application member 29 which applies a damping component to the contact member 22.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a surface texture measuring device and a surface texture detection system. [Background technology]

[0002] As a conventional method for measuring the surface quality of a ground workpiece, Patent Document 1 discloses a system in which an acceleration sensor is attached to the contact of a sizing device of a grinding machine, and sizing displacement data and acceleration sensor data are frequency analyzed to quickly measure the surface quality of a workpiece in the grinding process. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-79534 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the configuration disclosed in Patent Document 1, when the natural vibration characteristics of the contact of the sizing device and the periodicity of chatter generated on the surface of the workpiece match, resonance occurs, generating noise that affects the measurement of displacement data and acceleration sensor data. This can reduce the accuracy of measuring surface texture, so there is room for improvement in order to improve measurement accuracy.

[0005] The present invention has been made in view of the above-mentioned problems, and aims to provide a surface texture measuring device that can improve the accuracy of estimating surface texture. [Means for solving the problem]

[0006] One aspect of the present invention is a surface texture measuring device for measuring the surface texture of a workpiece ground by a grinding wheel in a grinding device, a contact member configured to come into contact with the surface of the workpiece and slide relative to the surface; a spring that biases the contact member against the surface of the workpiece; The acceleration of the vibration of the contact member caused by sliding between the contact member and the workpiece and the vibration of the contact member amplitude a sensor for detecting at least one of the above; The natural vibration characteristics of the contact member and the periodicity of the chatter generated on the surface of the workpiece are not matched. a damping component imparting member that imparts a damping component to the contact member; The surface texture measuring device includes: [Effects of the Invention]

[0007] According to the surface texture measuring device of the above aspect, a damping component is imparted to the contact member that contacts the surface of the workpiece and slides relative to it by the damping component imparting member. This changes the frequency characteristics of the contact member, making it possible to prevent the natural vibration characteristics of the contact member from matching the periodicity of chatter generated on the surface of the workpiece, thereby suppressing noise in the sensor detection results. As a result, the accuracy of measuring surface texture can be improved.

[0008] As described above, according to the above aspect, it is possible to provide a surface texture measuring device that can improve the accuracy of estimating the surface texture. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a plan view showing the configuration of a surface texture detection system according to a first embodiment. [Figure 2] FIG. 1 is a cross-sectional conceptual diagram of a surface texture measuring device according to a first embodiment. [Figure 3] FIG. 2 is a cross-sectional conceptual diagram of a surface texture measuring device used in a vibration evaluation test according to the first embodiment. [Figure 4] 5A and 5B are diagrams showing the results of a vibration evaluation test in the first embodiment. [Figure 5] 4 is a flowchart showing the grinding process of the grinding device in the first embodiment. [Figure 6] FIG. 2 is a diagram for explaining the surface texture of a workpiece in the first embodiment. [Figure 7] FIG. 3 is a diagram for explaining the surface texture caused by the grindstone in the first embodiment. [Figure 8] FIG. 3 is a diagram for explaining the surface texture caused by the grindstone in the first embodiment. [Figure 9] 5A and 5B are diagrams for explaining surface texture caused by inter-center relative vibration in the first embodiment. [Figure 10] FIG. 1 is a block diagram showing the configuration of a surface texture detection system according to a first embodiment. [Figure 11] FIG. 4 is a diagram for explaining measurement of first measurement data in the first embodiment. [Figure 12] FIG. 4 is a diagram for explaining measurement of second measurement data in the first embodiment. [Figure 13] FIG. 2 is a block diagram showing the configuration of a first data analysis processing unit of the output device according to the first embodiment. [Figure 14] FIG. 3 is a block diagram showing the configuration of a second data analysis processing unit of the output device according to the first embodiment. [Figure 15] FIG. 2 is a block diagram showing the configuration of an output processing unit of the output device according to the first embodiment. [Figure 16] 5A to 5C are diagrams for explaining the analysis results of the shape of the workpiece by the output processing unit in the first embodiment. [Figure 17] 5A to 5C are diagrams for explaining the analysis results of the machine state by the output processing unit in the first embodiment. [Figure 18] 5 is a diagram for explaining an analysis result (map) regarding processing quality by an output processing unit in the first embodiment. FIG. [Figure 19] 5 is a diagram for explaining an analysis result (map) regarding processing quality by an output processing unit in the first embodiment. FIG. [Figure 20] 5 is a diagram for explaining an analysis result (map) regarding processing quality by an output processing unit in the first embodiment. FIG. [Figure 21] 5 is a diagram for explaining an analysis result (map) regarding processing quality by an output processing unit in the first embodiment. FIG. [Figure 22]5 is a diagram for explaining an analysis result (map) regarding processing quality by an output processing unit in the first embodiment. FIG. [Figure 23] FIG. 10 is a cross-sectional conceptual diagram of a surface texture measuring device in a first modified embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] (Embodiment 1) Hereinafter, the surface texture detection system H and the surface texture measuring device 20 of the present embodiment 1 will be described with reference to the drawings. As shown in Fig. 1, the surface texture detection system H includes a grinding device 10, a surface texture measuring device 20, an output device 30, and an image output device 40.

[0011] In the surface texture detection system H of this embodiment, the surface texture measuring device 20 measures the surface (ground surface) of the workpiece W during or after grinding by the grinding device 10, and the output device 30 performs various data analysis processes based on the measurement data measured by the surface texture measuring device 20 to output multiple analysis results related to the processing quality of the workpiece W. Then, the image output device 40 of this embodiment outputs the multiple analysis results output from the output device 30 as images.

[0012] Here, the measurement data detected by the surface texture measuring device 20 includes the acceleration and displacement (amplitude) of vibrations that occur in response to the surface state (surface texture) of the workpiece W. Note that the measurement data may also include other data.

[0013] 1. Configuration of Grinding Apparatus 10 As shown in FIGS. 1 and 2 , the grinding machine 10 includes a bed 11, a grinding wheel 12, a grinding wheel head 13, a headstock 14, a tailstock 15, a spindle table 16, and a control device 17, as well as a surface texture measuring device 20. The workpiece W rotates while both ends in the rotational axis direction are supported by the headstock 14 and the tailstock 15. The shape of the workpiece W is not limited and can be cylindrical or columnar, and the surface to be ground can be the outer peripheral surface or, in the case of a cylinder, the inner peripheral surface. Note that, in the first embodiment, the workpiece W is illustrated as being columnar. The grinding machine 10 forms the shape of the workpiece W by bringing the grinding wheel 12 into contact with the surface (outer peripheral surface) of the rotating workpiece W and grinding it.

[0014] The grinding wheel 12 is supported by a wheel head 13 so as to be rotatable about an axis parallel to the Z axis. A wheel head guide 11a is fixed on the bed 11, and the wheel head 13 is supported by the wheel head guide 11a so as to be movable in the X axis direction. A rotational driving force is applied to the grinding wheel 12 from a wheel rotation motor 12a controlled by a control device 17, causing the grinding wheel 12 to rotate about its rotation axis. As the wheel head 13 moves in the X axis direction, the grinding wheel 12 approaches a workpiece W placed at a distance in the X axis direction and grinds the workpiece W.

[0015] A spindle table guide 11b is fixed on the bed 11 at a position spaced apart from the wheel head guide 11a in the X-axis direction. The spindle table guide 11b supports a spindle table 16 so that it can move in the Z-axis direction. A headstock 14 and a tailstock 15 are arranged opposite each other on the spindle table 16. Both ends of the workpiece W are rotatably supported by the headstock 14 and the tailstock 15, and the workpiece W is rotated by a rotational driving force imparted by a spindle rotation motor 14a controlled by a control device 17.

[0016] 2. Configuration of surface texture measuring device 20 2, the surface texture measuring device 20 is equipped with a measurement feeler 22 as a contact member configured to come into contact with the surface of the workpiece W and slide relatively thereon. In the first embodiment, the measurement feeler 22 also functions as a contact of the sizing device 18 for detecting the diameter of the workpiece W. Therefore, in the first embodiment, the surface texture measuring device 20 is provided in the sizing device 18, and the two are integrally configured. The surface texture measuring device 20 is equipped with a housing 26 and a pair of measurement feelers 22 (22a, 22b), and the measurement feeler 22 has a probe 21 at its tip that comes into contact with the surface of the workpiece W.

[0017] The measuring feeler 22 has a shaft 221, and is supported by a support mechanism (not shown) at the shaft 221 so as to be rotatable about its axis. Furthermore, the measuring feeler 22 is biased by a spring 27 so that the probe 21 at the tip of the measuring feeler 22 is kept in contact with the surface of the workpiece W. The spring 27 imparts a spring constant k to the vibration component of the measuring feeler 22, and in the first embodiment, the spring 27 is made of a coil spring.

[0018] As shown in FIG. 2, the measuring stylus 21 is provided so as to contact the surface of the workpiece W at two points on either side of the rotation center O of the workpiece W. A pair of measuring feelers 22 is provided with the measuring stylus 21 at its tip portion and is replaceable by detaching its base end portion. As shown in FIG. 1, the surface texture measuring device 20 is supported by an axial movement device 23 and is movable in the axial direction of the workpiece W, i.e., in the Z-axis direction. The movement of the surface texture measuring device 20 in the Z-axis direction is controlled by an axial movement control unit 24. Note that the movement in the Z-axis direction is not limited to that performed by the axial movement device 23; for example, it is also possible to use the shift function of the spindle and tailstock spindle of the grinding machine 10.

[0019] The surface texture measuring device 20 measures the unevenness of the outer periphery of the workpiece W as the surface condition of the workpiece W by converting the mechanical displacement of the measuring feeler 22 into an electrical signal related to the displacement and acceleration. In the first embodiment, the mechanical displacement of the measuring feeler 22 is converted into an electrical signal by a differential transformer 28 provided in the housing 26. As shown in FIG. 2, the differential transformer 28 is provided on the base end side of the measuring feeler 22 opposite to the probe 21. Here, the surface texture measuring device 20 measures the outer diameter of the workpiece W, i.e., the surface condition of the workpiece W, in a frequency range of less than 60 Hz, for example. In other words, the surface texture measuring device 20 can measure the low-frequency component of the frequency characteristics of the surface condition of the workpiece W.

[0020] The surface texture measuring device 20 also has a sensor 25 attached to at least one of the pair of measuring feelers 22. The sensor 25 in this embodiment 1 is provided on the measuring feeler 22a located above in the direction of gravity. The sensor 25 in this embodiment 1 mainly functions as an acceleration sensor added by being attached to the measuring feeler 22 (22a), and measures acceleration related to a displacement value in the surface condition of the workpiece W, for example, in a frequency range of 60 Hz or higher, among the frequency characteristics of the surface condition of the workpiece W. That is, the sensor 25 measures the acceleration associated with the displacement (vibration) generated in the measuring feeler 22 when the measuring element 21 moves relative to the workpiece W while in contact with the surface of the workpiece W, as a high-frequency component in a range higher than the low-frequency components among the frequency characteristics of the surface condition of the workpiece W.

[0021] Here, in this embodiment, an example is shown in which an acceleration sensor is attached to (added to) the measurement feeler 22 as the sensor 25, but the sensor 25 is not limited to being an added acceleration sensor, and it is also possible to use, for example, an analog output amplifier without a low-pass filter, a high-frequency digital output amplifier, or the like provided in the sizing device 18. In this case, the surface texture measuring device 20 measures displacement rather than acceleration, and therefore the process of converting acceleration to displacement, which will be described later, is not necessary.

[0022] As shown in FIG. 2, the surface texture measuring device 20 includes a damping component imparting member 29 that imparts a damping component c to the measuring feeler 22 serving as a contact member. In the first embodiment, the damping component imparting member 29 is a viscous material interposed between the measuring feeler 22 and the housing 26. The viscous material constituting the damping component imparting member 29 is made of a viscous material that generates a damping force against the vibration of the measuring feeler 22, and examples of the viscous material include oil, grease, emulsion, rubber, and elastomer. Examples of oils include synthetic oils, mineral oils, animal oils, and vegetable oils. Examples of synthetic oils include silicone-based, ester-based, ether-based, fluorine-based, and hydrocarbon-based oils. The viscous material may be a fluid (liquid or gas), solid, or semi-solid, and is preferably made of a chemically stable material that does not invade other components.

[0023] In this first embodiment, an example is shown in which the viscous member constituting the damping component imparting member 29 is made of silicone oil, a type of chemically synthesized oil, as a viscous fluid. In this first embodiment, the housing 26 has an enclosed space 26a therein that contains the base end of the measuring feeler 22 opposite the probe 21, the shaft 221, the spring 27, and the differential transformer 28. The housing 26 is provided with a through-hole 261 through which the tip side of the measuring feeler 22 protrudes, and the gap between the through-hole 261 and the measuring feeler 22 is sealed with a deformable sealing material 262.

[0024] In the first embodiment, the sealed space 26a is filled with silicone oil as the damping component imparting member 29. The silicone oil as the damping component imparting member 29 is mainly composed of dimethylpolysiloxane and has a viscosity of 500 to 3000 mm. 2 / s range can be used. The filling rate of the silicone oil in the sealed space 26a is not limited, and can be 70% or more, 80% or more, or 90% or more of the sealed space 26a. The silicone oil can be filled through an inlet (not shown) provided in the housing 26. After the silicone oil is filled, the inlet is sealed with a predetermined sealant. The differential transformer 28 is also provided with a seal member (not shown) that prevents the silicone oil from entering.

[0025] 2-1. Vibration evaluation test of surface texture measuring device 20 The following vibration evaluation test was carried out on the surface texture measuring device 20 according to the first embodiment. In the vibration evaluation test, as shown in FIG. 3, a vibration stage 101 capable of changing the amplitude (displacement) of vibration was used. vibration A generator 100 was prepared, and the probe 21 of a measurement feeler 22a equipped with a sensor 25 was brought into contact with the vibration stage 101, and measurement data acquired by the sensor 25 was observed by a piezoelectric displacement monitor 102. As a test example, a device in which the sealed space 26a was filled with the above-mentioned silicone oil as the damping component imparting member 29 was prepared, and as a comparative example, a device in which the sealed space 26a was not filled with silicone oil was prepared. Two types of vibration amplitude (displacement) were used in the vibration stage: 0.500 μm and 0.100 μm.

[0026] The results of the vibration evaluation test are shown in Figures 4(a) and 4(b). As shown in Figures 4(a) and 4(b), in the high-frequency band of 100 Hz to 1000 Hz, the gain of the measurement data shown on the vertical axis showed peak values ​​significantly different from 1 in multiple frequency bands for the comparison example without silicone oil, regardless of whether the vibration amplitude (displacement) was 0.500 μm or 0.100 μm, resulting in a large gain range. This was particularly noticeable in high-frequency band A, indicated by the dashed line at 400 to 1000 Hz. This suggests that resonance between the measurement feeler 22a and the vibration stage 101 occurs in high-frequency band A, which exhibits a large peak value, resulting in noise.

[0027] In contrast to this, in the test example with silicone oil, the gain value was close to 1 over almost the entire high frequency band from 100 Hz to 1000 Hz, and the gain width was also small, with a significant difference from the comparative example, particularly in high frequency band A. From this, it could be inferred that the damping component c is imparted to the vibration of the measuring feeler 22a by the damping component imparting member 29, thereby suppressing the above-mentioned resonance and reducing noise.

[0028] 3. Grinding process of workpiece W by grinding device 10 The grinding apparatus 10 grinds the workpiece W through a plurality of steps shown in FIG. 5. The grinding steps are divided according to the grinding wheel feed speed, and are performed in the following order: rough grinding step St1, fine grinding step St2, fine grinding step St3, and spark-out step St4. The grinding wheel feed speed in each step is as follows: rough grinding step St1 > fine grinding step St2 > fine grinding step St3 > spark-out step St4. In the rough grinding step St1, the rough shape of the workpiece W is formed. In the subsequent fine grinding steps St2 and fine grinding step St3, the grinding wheel feed speed is reduced to refine the surface shape of the workpiece W. In the final spark-out step St4, the surface of the workpiece W is finished, and the workpiece W is completed.

[0029] Here, in the surface texture detection system H, it is preferable that the surface texture measuring device 20 measures the surface condition of the workpiece W from the rough grinding process St1 to the spark-out process St4 while the workpiece W is being ground, or after the spark-out process St4 when grinding is completed. Note that the on-machine measurement system H outputs a plurality of analysis results related to the processing quality, which will be described later, in-process, and the in-process period refers to the period until the workpiece W is removed from the grinding device 10, and also includes the period after the spark-out process St4.

[0030] 4. Overview of the output device 30 Next, an overview of the output device 30 will be described. As shown in Fig. 6, the surface texture S, which is one of the processing qualities of the workpiece W ground by the grinding apparatus 10, is determined by various factors. That is, the surface texture S of the workpiece W is a combination of a grinding wheel-induced surface texture S1, which is a transfer of the surface condition of the grinding surface of the grinding wheel 12, as shown by the solid line and the two-dot chain line in Fig. 6, and a surface texture S2, which is a transfer of vibrations generated by relative fluctuations between the grinding wheel 12 and the workpiece W, i.e., the center-to-center distance, as shown by the dashed line in Fig. 7.

[0031] The surface texture S, i.e., the surface texture S1 and the surface texture S2, is measured as measurement data by the surface texture measuring device 20. Here, the measurement data measured by the surface texture measuring device 20 includes low-frequency components measured by the differential transformer 28 via the measurement feeler 22 and high-frequency components measured by the sensor 25. Therefore, it can be said that the surface texture S is determined by combining the low-frequency components and the high-frequency components.

[0032] The surface texture S1 caused by the grinding wheel is the surface texture in the circumferential and axial directions of the workpiece W, and is a combination of a surface texture S11 of high-frequency components to which the grinding wheel surface irregularities have been transferred, and a surface texture S12 of a static workpiece reference radius that includes low-frequency components, as shown in Figures 7 and 6. Here, the surface texture S11 reflects machining accuracy, such as chatter vibrations (hereinafter referred to as "chatter degree"), which are irregularities caused by the grinding wheel in the circumferential direction of a cross section of the workpiece W, and the degree of variation in chatter degree in the axial direction of the workpiece W (hereinafter referred to as "scale degree").

[0033] Furthermore, the surface texture S2 caused by intercenter relative vibration is the surface texture in the circumferential direction of one cross section of the workpiece W, and is a combination of low-frequency components and high-frequency components, as shown in Fig. 9. That is, the surface texture S2 is a combination of the surface texture S21, which is a high-frequency component, and the surface texture S22, which is a low-frequency component. Here, the surface texture S2 reflects, for example, the shape of the workpiece W, which depends on the machining accuracy such as roundness, the amount of runout of the ground surface, and coaxiality, as well as the machine state and machining state, such as vibration of the grinding machine 10, self-excited vibration during machining, and the spark-out effect.

[0034] Therefore, the output device 30 of this embodiment extracts low-frequency components and high-frequency components from the measurement data measured by the surface texture measuring device 20. Then, the output device 30 performs various data analysis processes on the extracted (acquired) low-frequency components and high-frequency components, and outputs multiple analysis results obtained using the various data analysis processes.

[0035] 4-1. Configuration of output device 30 As shown in FIG. 10, the output device 30 includes a basic data acquisition unit 31, a first data analysis processing unit 32, a second data analysis processing unit 33, and an output processing unit .

[0036] 4-2. Basic Data Acquisition Section 31 The basic data acquiring unit 31 acquires measurement data (displacement and acceleration) detected by the surface texture measuring device 20 during or after grinding. Specifically, as shown in Fig. 10, the basic data acquiring unit 31 acquires the first measurement data K1 output from the surface texture measuring device 20 as first basic data D1, and acquires the second measurement data K2 as second basic data D2.

[0037] 11 , the surface texture measuring device 20 first detects first measurement data K1 when a measurement position for measuring displacement and acceleration corresponding to the surface condition of the workpiece W is moved spirally relative to the workpiece W in the circumferential and axial directions, and outputs the first measurement data K1 to the basic data acquiring unit 31. That is, to acquire the first basic data D1, the probe 21 of the surface texture measuring device 20 is brought into contact with the surface of the workpiece W while the workpiece W is being rotated, and the surface texture measuring device 20 is continuously moved in the axial direction of the workpiece W by the axial moving device 23. Here, the measurement position in this embodiment is the position where the probe 21 of the surface texture measuring device 20 contacts the surface of the workpiece W. The first measurement data K1 also includes measurement data (displacement) of low-frequency components measured by the differential transformer 28 and measurement data (acceleration) of high-frequency components measured by the sensor 25.

[0038] 12 , the surface texture measuring device 20 detects second measurement data K2 for one circumference of the outer peripheral surface of the workpiece W when the measurement position is moved to the same position in the axial direction (the same position in the axial direction) or moved spaced apart in the axial direction without moving the measurement position in a spiral, and outputs the second measurement data K2 to the basic data acquiring unit 31. That is, while the workpiece W is being rotated, the stylus 21 of the surface texture measuring device 20 is brought into contact with the surface of the workpiece W, and the axial moving device 23 stops the surface texture measuring device 20 at the same position in the axial direction of the workpiece W. Here, the second measurement data K2 includes measurement data (displacement) of low-frequency components and measurement data (acceleration) of high-frequency components measured by the sensor 25.

[0039] The basic data acquisition unit 31 acquires the first measurement data K1 detected in a spiral shape as first basic data D1. The basic data acquisition unit 31 also acquires the second measurement data K2 for one revolution acquired at the same axial position as second basic data D2. The basic data acquisition unit 31 then outputs the first basic data D1 and the second basic data D2 to the first data analysis processing unit 32 and the second data analysis processing unit 33, respectively.

[0040] Here, the first basic data D1 and the second basic data D2 are time-series data relating to displacement and acceleration. The first basic data D1 and the second basic data D2 are generally acquired as data based on a time axis, but may be converted into data based on the rotation angle of the workpiece W from the time and the rotation speed of the workpiece W.

[0041] 4-3. First data analysis processing unit 32 The first data analysis processing unit 32 extracts low-frequency components from the frequency characteristics of the first basic data D1 and the second basic data D2, and performs various data analysis processes (described later) on the extracted low-frequency components to calculate a plurality of first analysis results. To this end, the first data analysis processing unit 32 mainly includes a gain compensation unit 320, a low-frequency component extraction unit 321, a spiral low-frequency waveform generation unit 322, a low-frequency intercenter relative vibration waveform generation unit 323, and a workpiece reference radius calculation unit 324, as shown in Fig. 13 .

[0042] The gain compensation unit 320 performs gain compensation on the first basic data D1 and the second basic data D2 acquired from the basic data acquisition unit 31. The signal strength of the displacement data signal detected by the differential transformer 28 acting as a displacement sensor tends to attenuate when it exceeds a certain frequency. Therefore, in order to keep the output level constant, the gain compensation unit 320 compensates the signal strength of the first basic data D1 and the second basic data D2 for each frequency based on a pre-stored relationship between frequency and signal strength.

[0043] The low-frequency component extraction unit 321 performs a fast Fourier transform (hereinafter referred to as "FFT") on the gain-compensated first basic data D1, and extracts a low-frequency component D11 from the frequency characteristics of the first basic data D1. The low-frequency component extraction unit 321 also performs an FFT on the gain-compensated second basic data D2, and extracts a low-frequency component D21, which is the first analysis result, from the frequency characteristics of the second basic data D2. Here, the low-frequency component extraction unit 321 extracts, as the low-frequency component, low-frequency components from the first basic data D1 and the second basic data D2 that fall in a frequency range below 60 Hz (approximately 15 to 50 peaks in the waveform), for example.

[0044] The spiral low-frequency waveform generation unit 322 performs an inverse fast Fourier transform (hereinafter referred to as "inverse FFT") on the low-frequency components D11 of the first basic data D1 extracted by the low-frequency component extraction unit 321. Here, the first basic data D1 is the first measurement data K1 (displacement) detected in a spiral shape along the outer peripheral surface (surface) of the workpiece W by the surface texture measuring device 20. As a result, the spiral low-frequency waveform generation unit 322 calculates, as a first analysis result, a spiral low-frequency waveform SLW that represents the waveform of the low-frequency components D11 of the displacement fluctuation, i.e., vibration, in the spiral direction of the workpiece W.

[0045] The low-frequency intercore relative vibration waveform generating unit 323 performs an inverse FFT on the low-frequency component D21 of the second basic data D2 extracted by the low-frequency component extracting unit 321. Here, the second basic data D2 is the second measurement data K2 (displacement) detected at the same position in the axial direction of the workpiece W by the surface texture measuring device 20. As a result, when the inverse FFT is performed on the low-frequency component D21 of the second basic data D2, a single cross-section low-frequency waveform representing the displacement fluctuation in the circumferential direction (one revolution) of the workpiece W, i.e., the low-frequency component D21 of the vibration, is obtained.

[0046] The single cross-section low-frequency waveform represents relative vibration (low-frequency inter-center relative vibration) that occurs due to changes in the relative position, i.e., the center distance, between the grinding wheel 12 and the workpiece W, which does not change significantly during grinding of one workpiece W, such as pump pulsation in the grinding device 10 or the setting accuracy of the workpiece W, and can be considered to be the same for one workpiece W along the axial direction of the workpiece W. Therefore, the low-frequency inter-center relative vibration waveform generator 323 calculates the single cross-section low-frequency waveform obtained by performing inverse FFT as the low-frequency inter-center relative vibration waveform LDV, which is the first analysis result.

[0047] The workpiece reference radius calculation unit 324 uses the spiral low-frequency waveform SLW generated by the spiral low-frequency waveform generation unit 322 and the low-frequency intercenter relative vibration waveform LDV generated by the low-frequency intercenter relative vibration waveform generation unit 323 to calculate the workpiece reference radius R resulting from the transfer of the surface state of the grinding surface of the grinding wheel 12 to the surface of the ground workpiece W. Specifically, the workpiece reference radius calculation unit 324 calculates the workpiece reference radius R as the first analysis result by subtracting the low-frequency intercenter relative vibration waveform LDV from the spiral low-frequency waveform SLW.

[0048] Here, as described above, the low-frequency inter-core relative vibration waveform LDV is a single cross-sectional low-frequency waveform that is considered to be the same in the axial direction of the workpiece W. Therefore, the workpiece reference radius calculation unit 324 calculates the workpiece reference radius R by adding (copying) the low-frequency inter-core relative vibration waveform LDV a number of times that matches the number of spirals C of the spiral low-frequency waveform SLW, and subtracting it from the spiral low-frequency waveform SLW, according to the following equation 1. R=SLW-C×LDV…Formula 1

[0049] 4-4. Second data analysis processing unit 33 The second data analysis processing unit 33 extracts high-frequency components from the frequency characteristics of the first basic data D1 and the second basic data D2, and performs various data processing described below on the extracted high-frequency components to calculate multiple second analysis results. To this end, the second data analysis processing unit 33 mainly includes a gain compensation unit 330, a spiral high-frequency component extraction unit 331, a single-cross-section high-frequency component extraction unit 332, a spiral high-frequency waveform generation unit 333, a high-frequency inter-core relative vibration waveform generation unit 334, and a grinding wheel surface unevenness calculation unit 335, as shown in Fig. 14 .

[0050] The gain compensation unit 330 performs gain compensation on the first basic data D1 and the second basic data D2 in the same manner as the gain compensation unit 320 described above.

[0051] The spiral high-frequency component extraction unit 331 performs an FFT on the gain-compensated first basic data D1 and further converts the acceleration data into displacement data, thereby extracting high-frequency components from the frequency characteristics of the first basic data D1 as spiral high-frequency components D12. Here, the first basic data D1 is the first measurement data K1 (acceleration) detected in a spiral shape along the outer peripheral surface of the workpiece W by the surface texture measuring device 20. Furthermore, the spiral high-frequency component extraction unit 331 extracts, as the spiral high-frequency components D12, frequency characteristics in a frequency range of, for example, 60 Hz or higher and lower than the upper limit frequency of detection by the surface texture measuring device 20 (approximately 50 to 500 peaks in the waveform).

[0052] The single cross-section high-frequency component extracting unit 332 performs FFT on the gain-compensated second basic data D2 and further converts the acceleration data into displacement data to extract high-frequency components D22 from the frequency characteristics of the second basic data D2. Furthermore, the single cross-section high-frequency component extracting unit 332 extracts high-frequency components, excluding the grinding wheel rotation frequency component fg corresponding to the rotation speed of the grinding wheel 12 and its harmonics, from the extracted high-frequency components D22, as single cross-section high-frequency components D221.

[0053] Here, the second basic data D2 is the second measurement data K2 (acceleration) detected by the sensor 25 of the surface texture measuring device 20 at the same position in the axial direction of the workpiece W. As a result, the high-frequency components extracted from the second basic data D2 correspond to one circumference in the circumferential direction of the workpiece W, i.e., one cross section of the workpiece W. The single-cross section high-frequency component extractor 332 also extracts, as the high-frequency components D22, a frequency range, for example, equal to or higher than 60 Hz and equal to or lower than the upper limit frequency detectable by the surface texture measuring device 20 (approximately 50 to 500 peaks in the waveform).

[0054] The spiral high-frequency waveform generation unit 333 performs an inverse FFT on the spiral high-frequency components D12 of the first basic data D1 extracted by the spiral high-frequency component extraction unit 331. As a result, the spiral high-frequency waveform generation unit 333 calculates, as the second analysis result, a spiral high-frequency waveform SHW that represents the waveform of the spiral high-frequency components D12 of the displacement fluctuation, i.e., vibration, in the spiral direction of the workpiece W.

[0055] The high frequency intercore relative vibration waveform generating unit 334 performs an inverse FFT on the single cross section high frequency component D221 of the second basic data D2 extracted by the single cross section high frequency component extracting unit 332. As a result, when the inverse FFT is performed on the single cross section high frequency component D221 obtained by excluding the grinding wheel rotation frequency component fg and its harmonics from the high frequency component of the second basic data D2, a single cross section high frequency waveform representing the displacement fluctuation in the circumferential direction (one revolution) of the workpiece W, i.e., the single cross section high frequency component D221 of the vibration, is obtained.

[0056] The single cross-section high frequency component D221 does not include the grinding wheel rotation frequency component fg corresponding to the rotation speed of the grinding wheel 12 or its harmonics. Therefore, the single cross-section high frequency waveform represents vibrations that affect the surface texture S of the workpiece W (more specifically, the surface texture S22 in the surface texture S2 caused by intercenter relative vibration) other than the grinding wheel rotation frequency component fg corresponding to the rotation speed of the grinding wheel 12 and its harmonics. Here, examples of vibrations that affect the surface texture S22 of the workpiece W include the rotation of the servo motor that controls the movement of the wheel head 13 and the spindle table 16, externally applied vibrations, self-excited chatter, etc.

[0057] Therefore, the single cross-section high-frequency waveform represents the relative vibration (high-frequency inter-center relative vibration) that occurs due to a change in the relative position between the grinding wheel 12 and the workpiece W, i.e., the center distance, in the high-frequency region, and, like the single cross-section low-frequency waveform, can be considered to be the same for one workpiece W along the axial direction of the workpiece W. Therefore, the high-frequency inter-center relative vibration waveform generating unit 334 calculates the single cross-section high-frequency waveform obtained by performing the inverse FFT as the high-frequency inter-center relative vibration waveform HDV, which is the second analysis result.

[0058] The grinding wheel surface unevenness calculation unit 335 uses the spiral high-frequency waveform SHW generated by the spiral high-frequency waveform generation unit 333 and the high-frequency inter-center relative vibration waveform HDV generated by the high-frequency inter-center relative vibration waveform generation unit 334 to calculate the grinding wheel surface unevenness P caused by the surface state of the grinding surface of the grinding wheel 12 being transferred to the outer peripheral surface of the ground workpiece W. Specifically, the grinding wheel surface unevenness calculation unit 335 calculates the grinding wheel surface unevenness P as the second analysis result by subtracting the high-frequency inter-center relative vibration waveform HDV from the spiral high-frequency waveform SHW.

[0059] Here, as described above, the high-frequency inter-core relative vibration waveform HDV is a cross-sectional high-frequency waveform that is considered to be the same in the axial direction of the workpiece W. Therefore, the grinding wheel surface unevenness calculation unit 335 adds (copies) the high-frequency inter-core relative vibration waveform HDV a number of times that matches the number of spirals C of the spiral high-frequency waveform SHW, and subtracts it from the spiral high-frequency waveform SHW in accordance with the following equation 2 to calculate the grinding wheel surface unevenness P. P=SHW-C×HDV …Formula 2

[0060] 4-5. Output processing section 34 The output processing unit 34 is capable of processing and outputting a plurality of analysis results using a plurality of first calculation results calculated by the first data analysis processing unit 32 and a plurality of second calculation results calculated by the second data analysis processing unit 33. Below, an explanation will be given using examples of the plurality of analysis results that are output.

[0061] The multiple analysis results output by the output processing unit 34 relate to the processing quality of the workpiece W ground by the grinding device 10. Examples of processing quality include the shape of the workpiece W (processing accuracy), such as the roundness of the workpiece W, which is related to the surface texture S2 described above, the amount of runout of the ground surface, and the coaxiality of the workpiece W. In addition, examples of processing quality include the processing state of the grinding device 10 and the mechanical state of the grinding device 10. The processing state is included in the processing accuracy, and examples of the spark-out state and the sharpness state of the grinding wheel 12 are included. Examples of the mechanical state include vibrations of the grinding device 10 (mechanical vibrations).

[0062] The processing quality, processing state, and machine state are analysis results obtained using the second measurement data K2 (second basic data D2) measured by the surface texture measuring device 20 at the same axial position during grinding of the workpiece W. Therefore, these analysis results are output for each grinding of the workpiece W by the grinding device 10, i.e., for all workpieces W.

[0063] Examples of processing quality include the surface texture S (surface texture S1) and line roughness of the workpiece W, which are included in the processing accuracy. These processing qualities (processing accuracy) are analysis results obtained after the workpiece W is ground using first measurement data K1 (first basic data D1) measured by the surface texture measuring device 20 in the circumferential and axial directions of the workpiece W and second measurement data K2 (second basic data D2) measured at the same position in the axial direction. Therefore, these analysis results are output as needed, for example, after the workpiece W is ground.

[0064] As shown in FIG. 15, the output processing unit 34 of this embodiment includes a shape analysis output unit 341 that outputs analysis results related to machining quality, a machining state output unit 342 that outputs analysis results related to machining state, a machine state output unit 343 that outputs analysis results related to machine state, and a map generation output unit 344 that outputs analysis results related to machining quality.

[0065] Here, the shape analysis output unit 341, the machining state output unit 342, and the machine state output unit 343 use the low-frequency components and high-frequency components of the second measurement data K2 (second basic data D2) measured at the same axial position of the workpiece by the surface texture measuring device 20. On the other hand, the map generation output unit 344 uses the low-frequency components and high-frequency components of the first measurement data K1 (first basic data D1) measured in the circumferential and axial directions of the workpiece W by the surface texture measuring device 20, and the low-frequency components and high-frequency components of the second measurement data K2 (second basic data D2) measured at the same axial position of the workpiece.

[0066] The shape analysis output unit 341 acquires the low-frequency intercore relative vibration waveform LDV, which is the first analysis result, from the first data analysis processing unit 32 (low-frequency intercore relative vibration waveform generating unit 323), and acquires the high-frequency intercore relative vibration waveform HDV, which is the second analysis result, from the second data analysis processing unit 33 (high-frequency intercore relative vibration waveform generating unit 334). Then, the shape analysis output unit 341 combines (adds) the low-frequency intercore relative vibration waveform LDV and the high-frequency intercore relative vibration waveform HDV to output the roundness of one cross section of the workpiece W and the runout amount of the ground surface as the analysis result A1, as shown in Fig. 16. Note that, for example, if multiple roundnesses and runout amounts are analyzed in the axial direction of the workpiece W, the coaxiality of the workpiece W can also be output.

[0067] 5, the machining state output unit 342 outputs the state of the rotation speed ratio indicating the ratio between the rotation speeds of the grinding wheel 12 and the workpiece W as the analysis result A2. For this purpose, the machining state output unit 342 acquires the high-frequency component D22 of the second basic data D2 as the second analysis result from the second data analysis processing unit 33 (single cross-section high-frequency component extraction unit 332) for each grinding step.

[0068] For example, when evaluating the grinding effect of the spark-out process St4, the processing state output unit 342 outputs, as the analysis result A2, the ratio (fg2 / fg1) of the grinding wheel rotation frequency component fg2 in the spark-out process St4 to the grinding wheel rotation frequency component fg1 in the rough grinding process St1 shown in Fig. 5. In this case, it can be evaluated that the closer the output analysis result A2 (fg2 / fg1) is to "0", the higher the grinding effect of the spark-out process St4, and the closer it is to "1", the lower the grinding effect of the spark-out process St4.

[0069] The machine state output unit 343 acquires the low-frequency component D21 of the second basic data D2 as the first analysis result from the first data analysis processing unit 32 (low-frequency component extraction unit 321), and acquires the high-frequency component D22 of the second basic data D2 as the second analysis result from the second data analysis processing unit 33 (single cross-section high-frequency component extraction unit 332).The machine state output unit 343 then outputs the relationship between frequency change and amplitude as an analysis result A3, as shown in Fig. 17.In the graph shown in Fig. 17, the amplitudes indicated by black squares and the frequencies corresponding to these amplitudes indicate vibration states caused by the grinding wheel, and other amplitudes and frequencies corresponding to these amplitudes indicate mechanical vibrations.

[0070] The map generation and output unit 344 generates and outputs a map representing the surface texture S (surface texture S1) in the circumferential and axial directions of the workpiece W. To this end, the map generation and output unit 344 acquires the grinding wheel surface unevenness P, which is the second analysis result, from the second data analysis processing unit 33 (grinding wheel surface unevenness calculation unit 335). Then, as shown in FIG. 18 , the map generation and output unit 344 generates a map M1 representing the surface texture S11 due to the grinding wheel surface unevenness P, which is caused by the grinding wheel, and outputs this as the analysis result A4.

[0071] Furthermore, the map generation and output unit 344 acquires the workpiece reference radius R, which is the first analysis result, from the first data analysis processing unit 32 (workpiece reference radius calculation unit 324). Then, as shown in Fig. 19, the map generation and output unit 344 generates a map M2 that represents the surface texture S12 due to the workpiece reference radius R, which is caused by the grinding wheel, and outputs it as the analysis result A4.

[0072] Furthermore, the map generation and output unit 344 combines (adds) the maps M1 and M2, thereby generating a map M3 that represents the surface texture S1 caused by the grinding wheel, as shown in Fig. 20, and outputs the map M3 as an analysis result A4.

[0073] In this embodiment, a map M3 representing the surface texture S1 caused by the grinding wheel is generated by combining a map M1 representing the surface texture S11 and a map M2 representing the surface texture S12. However, the map generation and output unit 344 can also generate a map representing the surface texture S of the workpiece W by further combining the surface texture S2 caused by the intercenter relative vibration with the generated map M3.

[0074] In this case, the map generation output unit 344 acquires the high frequency intercore relative vibration waveform HDV from the second data analysis processing unit 33 (high frequency intercore relative vibration waveform generation unit 334), and generates a map representing the surface texture S21 due to the high frequency intercore relative vibration waveform HDV caused by the intercore relative vibration, as shown in FIG. The map generation output unit 344 also acquires the low frequency intercenter relative vibration waveform LDV from the first data analysis processing unit 32 (low frequency intercenter relative vibration waveform generation unit 323), and generates a map M5 that represents the surface texture S22 due to the low frequency intercenter relative vibration waveform LDV that is caused by the intercenter relative vibration, as shown in Fig. 22. The map generation output unit 344 can then further combine (add) maps M4 and M5 that represent the surface texture S2 caused by the intercenter relative vibration to map M3 that represents the surface texture S1 caused by the grinding wheel, thereby finally generating a map that represents the surface texture S of the workpiece W.

[0075] The map generation and output unit 344 is not limited to outputting the generated maps M1-M3 (and further the generated maps M4 and M5) as the analysis result A4, but can also output other analysis results A4 based on the generated maps M1-M5. For example, the map generation and output unit 344 can output the machining accuracy represented by the degree of chatter, the degree of scale, etc. as the analysis result A4 based on the map M1 representing the surface texture S11.

[0076] Then, the output processing unit 34 outputs the plurality of analysis results to the image output device 40. As a result, the image output device 40 displays each of the plurality of acquired analysis results on, for example, a display.

[0077] 5. Effects According to the surface texture measuring device 20 of the first embodiment, the damping component c is imparted by the damping component imparting member 29 to the measurement feeler 22, which serves as a contact member that comes into contact with and slides relatively against the surface of the workpiece W. This changes the frequency characteristics of the measurement feeler 22, making it possible to prevent the natural vibration characteristics of the measurement feeler 22 from matching the periodicity of chatter generated on the surface of the workpiece W, thereby suppressing noise from being generated in the detection results of the sensor 25. As a result, it is possible to improve the measurement accuracy of the surface texture.

[0078] Furthermore, in the first embodiment, the surface texture measuring device 20 is provided in a sizing device 18 that rotates the workpiece W to measure the diameter of the workpiece W while it is being ground by the grinding wheel 12, and the measuring feeler 22 as a contact member constitutes a contactor that comes into contact with the surface of the workpiece W in the sizing device 18. As a result, the measuring feeler 22 as a contact member in the surface texture measuring device 20 is used both to detect the diameter of the workpiece W in the sizing device 18 and to detect vibration displacement or acceleration by the sensor 25, which reduces the number of parts and simplifies the configuration compared to a case where a contact member with the sensor 25 is provided separately from the sizing device 18. Furthermore, the surface texture measuring device 20 can perform measurements in-process while the workpiece is being ground by the grinding wheel 12, allowing for quick measurement of the surface texture of the workpiece.

[0079] Moreover, in the first embodiment, the damping component imparting member 29 includes a viscous member that serves as a contact member and comes into contact with the measurement feeler 22. This makes it possible to easily impart a damping component to the measurement feeler 22 with a simple configuration due to the viscosity of the viscous member.

[0080] Moreover, in the first embodiment, a housing 26 is provided that holds the measurement feeler 22 as a contact member and the spring 27. The damping component imparting member 29 is interposed between the measurement feeler 22 and the housing 26. This makes it possible to easily impart a damping component to the measurement feeler 22 with a simple configuration.

[0081] Moreover, in the first embodiment, the housing 26 has therein a sealed space 26a that includes a part of the measurement feeler 22 as a contact member, and the sealed space 26a is filled with a viscous fluid as the damping component imparting member 29. As a result, the damping component imparting member 29 is a viscous fluid, which makes it easy to inject into the sealed space 26a and also to penetrate between the housing 26 and the measurement feeler 22, making it easy to provide the damping component imparting member 29.

[0082] In the first embodiment, the sensor 25 detects the acceleration of the vibration of the measuring feeler 22 serving as a contact member. This allows the sensor 25 to derive high-frequency components in the high-frequency range of the frequency components in the measurement result, making it easier for the damping component providing member 29 to exert its vibration damping effect.

[0083] Furthermore, in the first embodiment, the surface texture detection system H includes a surface texture measuring device 20 and an image output device 40 that outputs, as an image, a two-dimensional map of the surface texture of the workpiece W estimated based on the measurement results by the surface texture measuring device 20. This makes it possible to easily grasp the surface texture of the workpiece W from the measurement results of the surface texture measuring device 20.

[0084] Furthermore, in the first embodiment, the surface texture detection system H has the damping component imparting member 29 reduce the amplitude peaks of high frequency components in a higher frequency range than the low frequency components among the frequency components in the measurement results obtained by the surface texture measuring device 20. As a result, the damping component imparting member 29 can reduce the vibration amplitude peaks in the high frequency range where chatter is likely to occur, thereby further suppressing the occurrence of noise in the detection results of the sensor 25 and improving the measurement accuracy of the surface texture.

[0085] 6. Variations In the first embodiment, as shown in FIG. 3, silicone oil is injected into the sealed space 26a as the damping component imparting member 29. However, instead, as in modified embodiment 1 shown in FIG. 23, rubber, which is a viscous solid, may be interposed as the damping component imparting member 29 between the housing 26 and the measurement feeler 22, which serves as a contact member. Examples of viscous solids include rubber and elastomer. In modified embodiment 1, the damping component imparting member 29 is solid, so it does not leak even if the internal space 26b of the housing 26 is not sealed, making it easy to handle. Note that modified embodiment 1 can also achieve the same effects as those of the first embodiment, except for the effects achieved by the damping component imparting member 29 being a fluid.

[0086] In the first embodiment, the surface texture measuring device 20 uses a sizing device provided in the grinding device 10. Alternatively, as a modified embodiment, the surface texture measuring device 20 can use a linear gauge. In this case, the same effects as those of the present embodiment described above can be obtained.

[0087] The linear gauge includes a measuring element that contacts the workpiece W and an arm that supports the measuring element, and detects the displacement of the surface of the workpiece W with the measuring element in contact with the rotating workpiece W. Similarly to the sizing device, the linear gauge is supported by an axial movement device and is movable in the axial direction of the workpiece W, i.e., in the Z direction.

[0088] Furthermore, in the first embodiment, the sensor 25 of the surface texture measuring device 20 is primarily equipped with an acceleration sensor, and acceleration is detected as the first measurement data and the second measurement data. However, the sensor 25 is not limited to being primarily equipped with an acceleration sensor, and as a modified embodiment, it may be primarily equipped with a displacement sensor that detects displacement caused by unevenness on the surface of the workpiece W.

[0089] Furthermore, in the first embodiment, the low-frequency component extraction unit 321 of the first data analysis processing unit 32 performs FFT, and the spiral low-frequency waveform generation unit 322 and the low-frequency intercore relative vibration waveform generation unit 323 perform inverse FFT. Furthermore, the spiral high-frequency component extraction unit 331 and the single cross-section high-frequency component extraction unit 332 of the second data analysis processing unit 33 perform FFT, and the spiral high-frequency waveform generation unit 333 and the high-frequency intercore relative vibration waveform generation unit 334 perform inverse FFT. Alternatively, to omit performing FFT or inverse FFT, it is also possible to provide a filter capable of extracting desired frequency components in each of the above units as a modified embodiment. Examples of filters include a low-pass filter, a high-pass filter, a band-pass filter, and a Gaussian filter.

[0090] As described above, according to the above-described embodiment and modified form, it is possible to provide a surface texture measuring device that can improve the accuracy of estimating the surface texture.

[0091] The present invention is not limited to the above-described embodiment and modified forms, and can be applied to various embodiments without departing from the spirit of the present invention. [Explanation of symbols]

[0092] 10 Grinding equipment 12 Grinding Wheel 20 Surface texture measuring device 22 Measuring feeler (contact member) 25 sensors 26 Housing 26a Confined space 27 Spring 28 Differential transformer 29 Damping component 30 Output Devices 40 Image output device H Surface Texture Detection System

Claims

1. A surface texture measuring device for measuring the surface texture of a workpiece ground by a grinding wheel in a grinding device, a contact member configured to come into contact with the surface of the workpiece and slide relative to the surface; a spring that biases the contact member against the surface of the workpiece; a sensor for detecting at least one of the acceleration and amplitude of vibration of the contact member caused by sliding between the contact member and the workpiece; a damping component imparting member that imparts a damping component to the contact member so that the natural vibration characteristics of the contact member do not coincide with the periodicity of chatter generated on the surface of the workpiece; A surface texture measuring device comprising:

2. the surface texture measuring device is provided in a sizing device that rotates the workpiece during grinding by the grinding wheel to measure the diameter of the workpiece, 2. The surface texture measuring device according to claim 1, wherein said contact member is a contactor of said sizing device that comes into contact with the surface of said workpiece.

3. 3. The surface texture measuring device according to claim 1, wherein the damping component applying member includes a viscous member that abuts against the contact member.

4. a housing for holding the contact member and the spring; 4. The surface texture measuring device according to claim 3, wherein the attenuation component imparting member is interposed between the contact member and the housing.

5. 5. The surface texture measuring device according to claim 4, wherein the housing has an enclosed space therein that contains a part of the contact member, and the enclosed space is filled with a viscous fluid as the damping component imparting member.

6. 5. The surface texture measuring device according to claim 4, wherein the damping component imparting member is made of any one of oil, grease, emulsion, rubber, and elastomer.

7. 3. The surface texture measuring device according to claim 1, wherein the sensor detects the acceleration of the vibration of the contact member.

8. The surface texture measuring device according to claim 1 or 2, an image output device that outputs, as an image, a two-dimensional map of the surface texture of the workpiece estimated based on the measurement results by the surface texture measuring device; A surface texture detection system comprising:

9. The sensor detects the acceleration of the vibration of the contact member, 9. The surface texture detection system according to claim 8, wherein the damping component imparting member suppresses resonance between the contact member and the workpiece by reducing the amplitude peak of high-frequency components in a range higher than the low-frequency components among the frequency components of the acceleration of the vibration of the contact member detected by the sensor.

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