Conveyor

Abstract

To provide a conveyance device which detects an object passing through a detection surface when a conveyance object does not pass through the detection surface, and can appropriately mute an intrusion detection sensor so as not to detect the conveyance object when the conveyance object passes through the detection surface.SOLUTION: A conveyance device includes a conveyance vehicle, a cover member, an intrusion detection sensor, and a muting device for invalidating the intrusion detection sensor, wherein the conveyance vehicle includes a mounting part and a truck part traveling while supporting the mounting part, a detection surface is arranged so as to cross a moving trajectory of a conveyance object, the muting device invalidates the intrusion detection sensor when the detection result of a mounting sensor is positive and the detection result of a range detection sensor is positive, and validates the intrusion detection sensor when the detection result of the mounting sensor is negative or the detection result of the range detection sensor is negative.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to a conveying device that includes a conveying vehicle that conveys an object by moving back and forth along a predetermined moving path, a cover member that covers the moving path, an intrusion detection sensor that detects an object passing through a detection surface, and a muting device that temporarily disables the intrusion detection sensor. [Background technology]

[0002] An example of such a conveying device is disclosed in Japanese Patent Laid-Open Publication No. 2009-63362 (Patent Document 1). Hereinafter, in the description of this background art, reference numerals in Patent Document 1 will be cited in parentheses. The conveying device of Patent Document 1 includes an intrusion detection sensor (11) and multiple mute sensors (A1, A2, B1, B2). The mute sensors (A1, A2) are arranged upstream of the intrusion detection sensor (11) in a conveying path for an object to be conveyed (workpiece W), and the mute sensors (B1, B2) are arranged downstream of the intrusion detection sensor (11). When the mute sensors (A1, A2) detect an object to be conveyed, muting for the intrusion detection sensor (11) is initiated, and the object to be conveyed is no longer detected by the intrusion detection sensor (11). When the object to be conveyed is detected by the most downstream mute sensor (B2), muting for the intrusion detection sensor (11) is terminated. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2009-63362 Summary of the Invention [Problem to be solved by the invention]

[0004] The muting sensor disclosed in Patent Document 1 is an optical sensor equipped with a light-emitting unit and a light-receiving unit, and detects an object on the conveyance path by blocking the light emitted from the light-emitting unit. Therefore, for example, if the object is transparent, the emitted light passes through the object, and the muting sensor may not be able to detect the object. In such a case, the intrusion detection sensor may not be muted and may erroneously detect the object. In other words, depending on the material or color of the object, the intrusion detection sensor may not be muted properly, but Patent Document 1 does not mention this point.

[0005] Therefore, it is desirable to realize a conveying device that can appropriately mute the intrusion detection sensor so that it detects objects passing through the detection surface when the object to be conveyed does not pass through the detection surface, and does not detect the object to be conveyed when the object to be conveyed passes through the detection surface. [Means for solving the problem]

[0006] A conveying device according to the present disclosure is a conveying device including a conveying vehicle that conveys an object by reciprocating along a predetermined movement path, a cover member that covers the movement path, an intrusion detection sensor that detects an object passing through a detection surface, and a muting device that temporarily disables the intrusion detection sensor, the transport vehicle includes a placement unit on which the object to be transported is placed, and a carriage unit that travels while supporting the placement unit, The sensing surface is The object to be conveyed is not placed The conveying mechanism is disposed above the placement unit and intersects with a moving path of the object placed on the placement unit, a direction along the movement path is defined as a movement direction, and a detection range is defined as a range of positions of the transport vehicle in the movement direction where the transport object placed on the placement unit intersects with the detection surface, The muting device comprises: a placement sensor that detects whether the object to be transported is placed on the placement unit, and a range detection sensor that detects whether the transport vehicle is within a target range set based on the detection range, When the detection result of the placement sensor is positive and the detection result of the range detection sensor is positive, the intrusion detection sensor is disabled; If the detection result of the placement sensor is negative, or if the detection result of the range detection sensor is negative, the intrusion detection sensor is enabled.

[0007] According to this configuration, when the transport vehicle is transporting an object and the transport vehicle is within a detection range where the object placed on the loading section intersects with the detection surface, the intrusion detection sensor is disabled, and therefore, the intrusion detection sensor can be appropriately muted to avoid erroneously detecting the object being transported. Furthermore, with this configuration, when the transport vehicle is not transporting an object, the intrusion detection sensor remains active regardless of the position of the transport vehicle. By enabling the intrusion detection sensor when the transport vehicle is not transporting an object, it is possible to avoid a situation in which the intrusion detection sensor fails to detect an object, such as a human body, passing through a detection surface where no object is present. This increases the likelihood of properly detecting an object other than the transport object passing through the detection surface. In this way, with this configuration, when the object to be transported does not pass through the detection surface, the intrusion detection sensor can be appropriately muted so as to detect an object passing through the detection surface, and when the object to be transported passes through the detection surface, the intrusion detection sensor can be appropriately muted so as not to detect the object to be transported.

[0008] Further features and advantages of the transport device will become apparent from the following description of exemplary, non-limiting embodiments thereof, which is given with reference to the drawings. [Brief explanation of the drawings]

[0009] [Figure 1]Schematic diagram of a processing device equipped with a conveying device [Figure 2] Side cross-sectional view of the conveying device [Figure 3] Front cross-sectional view of the conveying device [Figure 4] Control Block Diagram [Figure 5] Control Flow Diagram DETAILED DESCRIPTION OF THE INVENTION

[0010] An example in which the conveying device 1 is applied to a processing device 10 will be described below with reference to the drawings. As shown in Fig. 1, in this embodiment, the conveying device 1 is provided in the processing device 10 and carries in and out the object to be conveyed W between the inside and outside of the processing device 10. In this example, the conveying device 1 is provided at a height equivalent to the waist of an operator above the floor on which the processing device 10 is installed.

[0011] In this embodiment, the transport object W is a container that contains an object to be directly processed by the processing device 10, and the processing device 10 processes the object contained in the transport object W. Specifically, the transport object W is a front-opening unified pod (FOUP) that contains wafers, and the processing device 10 processes the wafers contained in the transport object W (for example, cleaning processing, etching processing, etc.).

[0012] 2 and 3, the conveying device 1 includes a conveying vehicle 2 that conveys an object W to be conveyed by reciprocating along a predetermined movement path R, a cover member 3 that covers the movement path R, an intrusion detection sensor 5 that detects an object passing through a detection surface 4, and a muting device 6 that temporarily disables the intrusion detection sensor 5. In this embodiment, the conveying device 1 further includes a control device H. The specific configuration of the conveying device 1 will be described below.

[0013] In the following description, the direction along the movement path R is referred to as the movement direction X, and the direction perpendicular to the movement direction X when viewed from the up-down direction is referred to as the width direction Y. In addition, one side of the movement direction X is referred to as the movement direction first side X1, and the other side of the movement direction X is referred to as the movement direction second side X2.

[0014] As shown in FIGS. 1 and 2 , in this embodiment, the movement path R and the cover member 3 are arranged to penetrate the wall member 8. An opening 81 is formed in the wall member 8 at a portion where the wall member 8 intersects with the movement path 7 of the transport object W. In this example, the wall member 8 is a wall (here, an outer wall) that covers the interior of the processing device 10. The movement path R and the cover member 3 are inserted through the opening 81 formed in the wall member 8 to connect the interior and exterior of the processing device 10. The opening 81 is formed to penetrate the wall member 8 in the movement direction X so that the transport vehicle 2 and the transport object W transported by the transport vehicle 2 can pass through. In this embodiment, a travel surface F is formed on which the transport vehicle 2 can travel along the movement path R. That is, the transport vehicle 2 travels on the travel surface F to move along the movement path R. The cover member 3 is arranged to cover the travel path of the carriage unit 22 of the transport vehicle 2, which will be described later, and the travel surface F. This makes it possible to prevent, for example, the hands of an operator from entering the area where the carriage section 22 moves, and to improve the safety of the conveyance device 1.

[0015] In this example, as shown in FIGS. 1 and 2 , the transport device 1 includes a first support unit 11 and a second support unit 12. The first support unit 11 is provided on a first side X1 in the movement direction (i.e., outside the processing device 10) with respect to an opening 81 in the wall member 8. The second support unit 12 is provided on a second side X2 in the movement direction (i.e., inside the processing device 10) with respect to the opening 81 in the wall member 8. A travel surface F is disposed to connect the first support unit 11 and the second support unit 12. That is, a travel path R is a path connecting the first support unit 11 and the second support unit 12. The first support unit 11 and the second support unit 12 are configured to support an object W to be transported and to be able to deliver the object W to and from the transport vehicle 2 traveling on the travel surface F. The transport vehicle 2 travels on the travel surface F to reciprocate along the travel path R and deliver the object W to and from the first support unit 11 and the second support unit 12. In this example, the transport vehicle 2 transports the object W placed on the first support part 11 by an operator from outside the processing device 10 toward the second support part 12. The object W transported to the second support part 12 is then transported from the second support part 12 to a processing part (not shown) where, for example, a cleaning process is performed on the object by a transport mechanism or the like provided in the processing device 10. The object W after such processing is transported from the processing part to the second support part 12. The transport vehicle 2 then transports the object W from the second support part 12 toward the first support part 11. The processed object W transported to the first support part 11 is collected by an operator. Each of the first support part 11 and the second support part 12 is configured to be able to place the object W thereon, and is preferably equipped with, for example, a known presence sensor that detects that the object W has been placed thereon.

[0016] 1 and 2, the travel surface F is the upper surface of a plate-like member extending in the movement direction X. The travel surface F is arranged so that its vertical position is lower than the respective upper surfaces of the first support portion 11 and the second support portion 12. The starting end of the travel surface F (here, the end on the first side X1 of the movement direction) overlaps with the first support portion 11 when viewed in the vertical direction, and the ending end of the travel surface F (here, the end on the second side X2 of the movement direction) overlaps with the second support portion 12 when viewed in the vertical direction. The upper surfaces of the first support portion 11 and the second support portion 12 are arranged so that they are at the same height.

[0017] 1 and 2, the cover member 3 includes a first cover 31, a second cover 32, and a third cover 33, each of which is a plate-shaped member. The first cover 31 is provided to rise from the starting end of the travel surface F and is disposed outside the first side X1 in the movement direction with respect to the travel path of the bogie unit 22. Two second covers 32 are provided to rise from both ends of the travel surface F in the width direction Y and are disposed on both outer sides in the width direction Y with respect to the travel path of the bogie unit 22. The third cover 33 is disposed to cover the upper side of the travel path of the bogie unit 22 and is provided to be supported from below by the first cover 31 and the two second covers 32. In addition, the third cover 33 has a through hole 34 (in other words, a slit-shaped through hole extending along the movement direction X) that penetrates in the vertical direction along the movement direction X so that a lifting mechanism 23 (here, the lifting body 24) described below does not interfere with the third cover 33 due to travel of the transport vehicle 2, etc. In this manner, the cover member 3 covers the movement path R (here, the travel trajectory of the carriage unit 22). Specifically, in this embodiment, the cover member 3 that covers the movement path R partially covers the movement path R so that the through hole 34 is formed. In this specification, the term "cover" is used as a concept that includes both a case of covering entirely and a case of covering partially.

[0018] As shown in FIGS. 2 and 3 , the transport vehicle 2 includes a placement unit 21 on which the transport target object W is placed, and a carriage unit 22 that travels while supporting the placement unit 21. In this embodiment, the carriage unit 22 supports the placement unit 21 from below. The carriage unit 22 includes a plurality of wheels that roll on a travel surface F and a drive motor (not shown). The transport vehicle 2 can obtain a propulsion force for the carriage unit 22 to travel in the travel direction X by driving one or more wheels to rotate using the drive motor. Note that the travel surface F may be provided with, for example, a guide rail that guides one or more wheels in the travel direction X, or a guide wheel different from the wheel may be separately provided, for example, on the side of the carriage unit 22, and a guide rail that guides the guide wheel in the travel direction X may be provided. In this example, the carriage unit 22 is connected to a power supply line (not shown) for supplying power from a power supply unit (not shown) provided in the processing device 10, but power may be supplied via wireless power supply. In the illustrated example, a plurality of (here, three) positioning pins K for positioning the transport object W are provided on the upper surface of the placement unit 21, thereby positioning the transport object W transferred from the first support unit 11 or the second support unit 12 on the placement unit 21. In this way, the transport vehicle 2 travels while supporting the transport object W on the upper surface of the placement unit 21.

[0019] In this embodiment, the transport vehicle 2 further includes a lifting mechanism 23 that raises and lowers the placement unit 21 relative to the cart unit 22. As shown in FIGS. 2 and 3 , the lifting mechanism 23 is configured to position the placement unit 21 at a first height T1 when the object W to be transported is not placed on the placement unit 21, and to position the placement unit 21 at a second height T2 that is higher than the first height T1 when the object W to be transported is placed on the placement unit 21. In this example, the first height T1 is set to a position that is lower than the first support unit 11 and the second support unit 12 and higher than the cover member 3 (here, the third cover 33). The second height T2 is set to a position that is higher than the first support unit 11 and the second support unit 12. Furthermore, in this example, the lifting mechanism 23 includes a lifting body 24. The lifting body 24 is configured to be movable in the vertical direction and is provided to connect the placement unit 21 and the cart unit 22. As the lifting body 24 moves up and down, the mounting section 21 moves between the first height T1 and the second height T2. The lifting mechanism 23 may be configured to include a cylinder (for example, a pneumatic cylinder or an electric cylinder) for reciprocating the lifting body 24 in the up and down direction, a linear motion guide mechanism for guiding the lifting body 24 in the up and down direction, or the like.

[0020] In the example of FIG. 2 , by positioning the placement unit 21 at the first height T1, the transport vehicle 2 can move the placement unit 21 directly below the first support unit 11 and the second support unit 12. Furthermore, the first support unit 11 and the second support unit 12 are configured so as not to interfere with the lifting body 24 and the placement unit 21, which move in the vertical direction. Therefore, when receiving the transport object W placed on the first support unit 11 or the second support unit 12, the transport vehicle 2 can transfer the transport object W onto the placement unit 21 by raising the placement unit 21 from the first height T1 to the second height T2 while the transport vehicle 2 is located directly below the first support unit 11 or the second support unit 12. When the transport vehicle 2 places the transport object W from the placement unit 21 onto the first support unit 11 or the second support unit 12, the transport vehicle 2 simply performs the above-described procedure in reverse.

[0021] As shown in FIGS. 2 and 3 , in this embodiment, the intrusion detection sensor 5 is disposed so that the detection surface 4 is formed in the opening 81. In this example, the intrusion detection sensor 5 includes a light projector 51 and a light receiver 52. The light projector 51 is provided with a plurality of light projecting units that project light. The light receiver 52 is provided with a plurality of light receiving units that receive light projected from each of the plurality of light projecting units. In this example, the intrusion detection sensor 5 is disposed on the wall member 8. In the example of FIG. 3 , the light projector 51 and the light receiver 52 are formed so as to extend in the vertical direction. The light projector 51 and the light receiver 52 of the intrusion detection sensor 5 are disposed so as to be spaced apart in the width direction Y with the opening 81 interposed therebetween. The detection surface 4 (i.e., a light curtain) is formed by the light projector 51 emitting a plurality of light beams aligned in the vertical direction toward the light receiver 52. In the following description, the vertical position of the lower end 41 of the detection surface 4 is referred to as a third height T3.

[0022] 2 and 3, the detection surface 4 is disposed above the placement unit 21 and so as to intersect with the movement trajectory 7 of the transport target W placed on the placement unit 21. In this embodiment, the lower end 41 of the detection surface 4 is disposed above the placement unit 21 at the first height T1 and below the placement unit 21 at the second height T2. That is, when the placement unit 21 of the transport vehicle 2 moves up and down as in this embodiment, the first height T1 is the height of the placement unit 21 when no transport target W is placed thereon, and the third height T3 is disposed at a position higher than the first height T1 and lower than the second height T2. This allows the intrusion detection sensor 5 to avoid detecting the placement unit 21 when the transport vehicle 2 is not transporting the transport target W. Furthermore, for example, if the transport vehicle 2 does not include the lifting mechanism 23 and the placement unit 21 does not move up and down, the placement unit 21 is always disposed at the first height T1 regardless of whether a transport target object W is placed thereon, and the third height T3 is disposed at a position higher than the first height T1. Furthermore, in this embodiment, the detection surface 4 is disposed so as to cover the entire area above the detection boundary line L set above the placement unit 21 in the opening 81. The detection boundary line L is an imaginary line that defines the lower end 41 of the detection surface 4. In this example, the detection surface 4 is disposed so as to cover the entire area in the vertical direction and the width direction Y of the portion of the opening 81 above the detection boundary line L. When the placement unit 21 moves up and down as in this embodiment, the detection boundary line L is set above the placement unit 21 disposed at the first height T1. In this example, the detection boundary line L is set above the placement unit 21 disposed at the first height T1 and below the placement unit 21 disposed at the second height T2, specifically, at the third height T3. Note that objects that are detected by the intrusion detection sensor 5 by crossing the detection surface 4 include, for example, parts of the human body (such as an arm or a head), which are considered to be foreign objects that are not to be transported by the transport device 1, but the transport object W itself can also be detected by the intrusion detection sensor 5, and therefore the transport object W is also included as one such object. Therefore, if the intrusion detection sensor 5 is activated while the transport object W is being transported, it will detect the transport object W as an intrusion during transport, and therefore, when the transport object W is being transported, the intrusion detection sensor 5 needs to be muted so that it does not activate.Although details are omitted, when an object is detected by the intrusion detection sensor 5, the control device H described later will, for example, stop the operation of the conveying device 1 and the processing device 10, or alert the worker by sounding an alarm, etc.

[0023] The specific configuration of the muting device 6 will be described below. The range of positions of the transport vehicle 2 in the movement direction X where the transport object W placed on the placement unit 21 intersects with the detection surface 4 will be referred to as the detection range 9. In this example, as shown in FIG. 2 , the detection range 9 extends from the position of the cart unit 22 where the end of the transport object W placed on the placement unit 21 on the second side X2 in the movement direction overlaps with the detection surface 4 to the position of the cart unit 22 where the end of the transport object W placed on the placement unit 21 on the first side X1 in the movement direction overlaps with the detection surface 4. That is, when at least a portion of the cart unit 22 enters the detection range 9, the transport object W on the placement unit 21 intersects with the detection surface 4. By setting the detection range 9 in this manner, the detection range 9 can be made as short as possible. This makes it possible to minimize the period during which the intrusion detection sensor 5 is muted while the transport object W is being transported. When setting the detection range 9, it is not necessary that each end of the transport object W placed on the placement section 21 in the movement direction X exactly overlaps with the detection surface 4 in the movement direction X, and the detection range 9 may be set so that it is shifted by a specified length in the movement direction X.

[0024] 2 and 3, the muting device 6 includes a placement sensor 61 that detects whether an object W to be transported is placed on the placement unit 21, and a range detection sensor 62 that detects whether the transport vehicle 2 is within a target range set based on the detection range 9. The target range is set, for example, to the same range as the detection range 9, or to a range obtained by expanding the detection range 9 by a specified amount on either one side or both sides of the movement direction X. This specified amount is set to a value smaller than the size of the detection range 9. In this embodiment, the muting device 6 includes a muting control unit 65, a wired or wireless communication device (not shown) that connects the muting control unit 65 to the placement sensor 61 and the range detection sensor 62 provided on the transport vehicle 2, and another wired or wireless communication device (not shown) that connects the muting control unit 65 to the intrusion detection sensor 5. In this example, the muting control unit 65 is provided in a control device H, which will be described later. Therefore, the muting control unit 65 enables communication between the placement sensor 61 and the range detection sensor 62 and the intrusion detection sensor 5 via the control device H. In this example, an on-board sensor 64 (described later) equipped with the placement sensor 61 and the range detection sensor 62 is provided on the transport vehicle 2. The transport vehicle 2 is capable of communicating with the control device H via a wire (communication cable). This allows the muting control unit 65 to acquire detection information detected by the placement sensor 61 and the on-board sensor 64 via the control device H. It is preferable that the communication cable described above, together with a power supply line connecting the transport vehicle 2 and a power supply unit (not shown), be housed in a Cableveyor (registered trademark) or the like. It is also possible for the communication between the transport vehicle 2 and the control device H to be performed wirelessly.

[0025] As shown in Figures 2 and 3, the placement sensor 61 is provided on the placement section 21. In this example, a plurality of (here, two) placement sensors 61 are provided on the placement section 21, and each placement sensor 61 detects the transport object W, thereby recognizing that the transport object W is placed on the placement section 21. In the example of Figures 2 and 3, the placement sensor 61 is a reflective optical sensor in which a light-emitting section and a light-receiving section are integrated, and detects the transport object W when light emitted upward is blocked and reflected. However, the placement sensor 61 may be configured as a known sensor such as a limit switch, in addition to such an optical sensor.

[0026] In this embodiment, the range detection sensor 62 includes a detectable object 63 arranged along the movement route R and an on-board sensor 64 that is mounted on the transport vehicle 2 and detects the detectable object 63. The detectable object 63 is detected by the on-board sensor 64 when the transport vehicle 2 is within the target range set based on the detection coverage range 9, but is not detected by the on-board sensor 64 when the transport vehicle 2 is outside the target range. Specifically, the on-board sensor 64 is provided on the carriage unit 22 of the transport vehicle 2 (here, on the side of the carriage unit 22). When the target range is set to the same range as the detection coverage range 9, the detectable object 63 is detected by the on-board sensor 64 when at least a part of the carriage unit 22 enters the detection coverage range 9 and the transport target object W intersects with the detection surface 4, but is not detected by the on-board sensor 64 when the carriage unit 22 completely leaves the detection coverage range 9 and the transport target object W does not intersect with the detection surface 4. In this case, the range detection sensor 62 detects that at least a part of the bogie unit 22 is present within the detection range 9. However, for example, a target range may be set that is wider than the detection range 9 by a specified amount, and the range detection sensor 62 may detect that at least a part of the bogie unit 22 is present within the target range. Note that the range detection sensor 62 may be a laser rangefinder provided on one end of the travel path R in the travel direction X or on the bogie unit 22, or an encoder may be provided on the wheels of the bogie unit 22. In the example of FIG. 2 , the on-board sensor 64 is provided on one side surface of the bogie unit 22 in the width direction Y, and the detected object 63 is provided on that one side of the bogie unit 22 in the width direction Y corresponding to the on-board sensor 64. However, the on-board sensor 64 may be provided on both side surfaces of the bogie unit 22 in the width direction Y, and the detected object 63 may be provided on both sides of the bogie unit 22 in the width direction Y corresponding to the on-board sensor 64.

[0027] As shown in FIG. 5 , the muting device 6 disables the intrusion detection sensor 5 when the detection result of the placement sensor 61 is positive and the detection result of the range detection sensor 62 is positive. In this embodiment, the muting control unit 65 disables the intrusion detection sensor 5 when the placement sensor 61 detects the transport target object W placed on the placement unit 21 and the on-board sensor 64 determines that the object to be detected 63 has been detected. In this example, when the muting control unit 65 determines to disable the intrusion detection sensor 5, the control device H cuts off the supply of power to the intrusion detection sensor 5 to prevent the detection surface 4 from being formed by the light projector 51 and the light receiver 52. Note that the intrusion detection sensor 5 may be disabled by ignoring the detection result of the intrusion detection sensor 5 while the detection surface 4 remains formed by the light projector 51 and the light receiver 52. Furthermore, the muting device 6 enables the intrusion detection sensor 5 when the detection result of the placement sensor 61 is negative or when the detection result of the range detection sensor 62 is negative. In this embodiment, the muting control unit 65 enables the intrusion detection sensor 5 when the placement sensor 61 does not detect the transport target object W or when the on-board sensor 64 does not detect the detection target 63. When the muting control unit 65 determines to enable the intrusion detection sensor 5 while the intrusion detection sensor 5 is disabled by muting, the control device H cancels the muting state of the intrusion detection sensor 5. In other words, the control device H resumes supplying power to the intrusion detection sensor 5 so that the detection surface 4 is formed by the light emitter 51 and the light receiver 52.

[0028] As shown in FIG. 4, the control device H controls the guided vehicle 2, the intrusion detection sensor 5, and the muting device 6. The control device H is also provided with a muting control section 65 as described above. In this example, such a control device H is provided in the processing device 10. The control device H includes an arithmetic processing device such as a CPU, as well as peripheral circuits such as a memory, and each function of the control device H is realized by cooperation between these pieces of hardware and a program executed on the hardware such as the arithmetic processing device. The control device H may be configured not as a single piece of hardware, but as a collection of multiple pieces of hardware (multiple separate pieces of hardware) that can communicate with each other.

[0029] In this embodiment, the control device H controls the transport vehicle 2 to transport the transport object W. Specifically, when the transport object W is placed on the first support part 11, the control device H moves the transport vehicle 2 toward the first support part 11. Then, the control device H controls the lifting mechanism 23 to move the placement part 21 from the first height T1 to the second height T2, and places the transport object W on the placement part 21. Thereafter, the control device H moves the transport vehicle 2 toward the second support part 12. Then, the control device H controls the lifting mechanism 23 to move the placement part 21 from the second height T2 to the first height T1, and places the transport object W on the second support part 12.

[0030] Furthermore, when the processed transport object W is placed on the second support part 12, the control device H directs the transport vehicle 2 toward the second support part 12. Then, the control device H controls the lifting mechanism 23 to move the placement part 21 from the first height T1 to the second height T2, and places the transport object W on the placement part 21. Thereafter, the control device H directs the transport vehicle 2 toward the first support part 11. Then, the control device H controls the lifting mechanism 23 to move the placement part 21 from the second height T2 to the first height T1, and places the transport object W on the second support part 12.

[0031] Next, control regarding muting for the intrusion detection sensor 5 will be described in accordance with the control flow shown in Fig. 5. In this embodiment, as described above, the determination as to whether or not to enable muting for the intrusion detection sensor 5 is made by the muting control unit 65.

[0032] In this embodiment, when the muting control unit 65 determines that the detection result of the placement sensor 61 is positive (S01: Yes), it determines whether the detection result of the range detection sensor 62 is positive (S02). When the muting control unit 65 determines that the detection result of the range detection sensor 62 is positive (S02: Yes), it disables the intrusion detection sensor 5 (S03). When the muting control unit 65 determines that the detection result of the range detection sensor 62 is negative (S02: No), it enables the intrusion detection sensor 5 (S04). When the muting control unit 65 determines that the detection result of the placement sensor 61 is negative (S01: No), it also enables the intrusion detection sensor 5 (S04). Unlike the example shown in FIG. 5 , the process of step S02 may be performed before the process of step S01, or the processes of step S01 and step S02 may be performed in parallel.

[0033] In this way, when the transport vehicle 2 is transporting the object W and the transport vehicle 2 is present within the detection coverage range 9, the intrusion detection sensor 5 is disabled. This prevents the intrusion detection sensor 5 from erroneously detecting the transport object W during transport, regardless of the material or color of the transport object W. Furthermore, when the transport vehicle 2 is not transporting the object W, the intrusion detection sensor 5 is maintained in an enabled state regardless of the position of the transport vehicle 2. In this way, by enabling the intrusion detection sensor 5 when the transport vehicle 2 is not transporting the object W, it is possible to prevent a situation in which the intrusion detection sensor 5 is unable to detect an object such as a human body passing through the detection surface 4 where no object W is present. Furthermore, even when the transport vehicle 2 is transporting the object W, the intrusion detection sensor 5 is enabled when the transport vehicle 2 is not present within the detection coverage range 9. This makes it possible to set the period during which the intrusion detection sensor 5 is disabled to the minimum necessary period.

[0034] Other Embodiments (1) In the above embodiment, the conveying device 1 is applied to the processing device 10, but the present invention is not limited to this. For example, the conveying device 1 can also be applied to an article storage facility or the like that stores the objects W to be conveyed.

[0035] (2) In the above embodiment, the range detection sensor 62 detects the detectable object 63 when the transport vehicle 2 is within the target range set based on the detection coverage range 9. However, the present invention is not limited to this. For example, the range detection sensor 62 may detect the detectable object 63 when the transport vehicle 2 is outside the target range. In this case, the range detection sensor 62 determines that the transport vehicle 2 is within the target range when it does not detect the detectable object 63. In other words, when the range detection sensor 62 does not detect the detectable object 63, the detection result of the range detection sensor 62 is positive. In this case, even if the range detection sensor 62 malfunctions and is no longer able to detect the detectable object 63, as long as the transport object W is placed on the placement unit 21, the intrusion detection sensor 5 is always muted, allowing the transport vehicle 2 to continue transporting the transport object W.

[0036] (3) In the above embodiment, the range detection sensor 62 is described as including a detectable object 63 arranged along the travel path R and an on-board sensor 64 that is mounted on the transport vehicle 2 and detects the detectable object 63, but this is not limiting. For example, the range detection sensor 62 may be configured such that a single or multiple sensors are provided along the travel path R, and the detectable object 63 that is detected by the sensor is mounted on the transport vehicle 2.

[0037] (4) In the above embodiment, when the transport vehicle 2 is equipped with the lifting mechanism 23 that raises and lowers the placement unit 21 relative to the cart unit 22, the lower end 41 of the detection surface 4 is configured to be located above the placement unit 21 at the first height T1 and below the placement unit 21 at the second height T2. However, the present invention is not limited to this. For example, the lower end 41 of the detection surface 4 may be located above the second height T2.

[0038] (5) In the above embodiment, the detection surface 4 is arranged to cover the entire area above the detection boundary line L in the opening 81, but this is not limiting. In this case, the detection surface 4 does not necessarily have to be arranged to cover the entire area above the detection boundary line L in the opening 81. For example, the detection surface 4 may be arranged to cover only the area where an object other than the transport target W may be present if the object enters the opening 81.

[0039] (6) Note that the configurations disclosed in the above-described embodiments can be applied in combination with configurations disclosed in other embodiments (including combinations of embodiments described as other embodiments) as long as no contradictions arise. Regarding other configurations, the embodiments disclosed in this specification are merely examples in all respects. Therefore, various modifications can be made as appropriate within the scope of the present disclosure.

[0040] [Summary of the above embodiment] The above-described transport device will now be outlined.

[0041] A conveying device according to the present disclosure is a conveying device including a conveying vehicle that conveys an object by reciprocating along a predetermined movement path, a cover member that covers the movement path, an intrusion detection sensor that detects an object passing through a detection surface, and a muting device that temporarily disables the intrusion detection sensor, the transport vehicle includes a placement unit on which the object to be transported is placed, and a carriage unit that travels while supporting the placement unit, the detection surface is disposed above the placement unit and intersects with a movement trajectory of the object to be transported placed on the placement unit, a direction along the movement path is defined as a movement direction, and a detection range is defined as a range of positions of the transport vehicle in the movement direction where the transport object placed on the placement unit intersects with the detection surface, The muting device comprises: a placement sensor that detects whether the object to be transported is placed on the placement unit, and a range detection sensor that detects whether the transport vehicle is within a target range set based on the detection range, When the detection result of the placement sensor is positive and the detection result of the range detection sensor is positive, the intrusion detection sensor is disabled; If the detection result of the placement sensor is negative, or if the detection result of the range detection sensor is negative, the intrusion detection sensor is enabled.

[0042] According to this configuration, when the transport vehicle is transporting an object and the transport vehicle is within a detection range where the object placed on the loading section intersects with the detection surface, the intrusion detection sensor is disabled, and therefore, the intrusion detection sensor can be appropriately muted to avoid erroneously detecting the object being transported. Furthermore, with this configuration, when the transport vehicle is not transporting an object, the intrusion detection sensor remains active regardless of the position of the transport vehicle. By enabling the intrusion detection sensor when the transport vehicle is not transporting an object, it is possible to avoid a situation in which the intrusion detection sensor fails to detect an object, such as a human body, passing through a detection surface where no object is present. This increases the likelihood of properly detecting an object other than the transport object passing through the detection surface. In this way, with this configuration, when the object to be transported does not pass through the detection surface, the intrusion detection sensor can be appropriately muted so as to detect an object passing through the detection surface, and when the object to be transported passes through the detection surface, the intrusion detection sensor can be appropriately muted so as not to detect the object to be transported.

[0043] wherein the range detection sensor includes a detection target arranged along the movement path, and an on-board sensor that is mounted on the transport vehicle and detects the detection target, It is preferable that the detectable object is arranged so that it is detected by the on-board sensor when the transport vehicle is within the target range, and is not detected by the on-board sensor when the transport vehicle is outside the target range.

[0044] According to this configuration, it is possible to appropriately detect whether or not the transport vehicle is within the target range based on the detection coverage range with a relatively simple configuration. Furthermore, with this configuration, instead of detecting the transported object, the on-board sensor mounted on the transport vehicle detects the object to be detected placed along the travel route, so it is possible to avoid fluctuations in detection results depending on the type and state of the transported object, thereby ensuring stable muting of the intrusion detection sensor.

[0045] The transport vehicle further includes a lifting mechanism for lifting the placement unit relative to the carriage unit, the lifting mechanism is configured to position the placement unit at a first height when the object to be transported is not placed on the placement unit, and to position the placement unit at a second height higher than the first height when the object to be transported is placed on the placement unit; It is preferable that the lower end of the detection surface is disposed above the placement portion at the first height and below the placement portion at the second height.

[0046] With this configuration, when the transport vehicle is not transporting an object to be transported, the intrusion detection sensor is prevented from detecting the loading section, while the gap between the loading section and the lower end of the detection surface is reduced, thereby reducing the possibility of an object such as a human body passing through the gap.

[0047] The movement path and the cover member are disposed so as to penetrate the wall member, an opening is formed in the wall member at a portion where the wall member intersects with the movement trajectory of the transport object; The detection surface is preferably disposed so as to cover the entire upper side of the detection boundary line set above the placement portion in the opening.

[0048] This configuration can prevent objects such as a human body from entering from outside the detection surface of the intrusion detection sensor. Therefore, even if there is a dangerous device beyond the detection surface, the safety of the worker can be easily ensured.

[0049] It is sufficient for the transport device according to the present disclosure to achieve at least one of the above-described effects. [Explanation of symbols]

[0050] 1:Transportation device 2: Transport vehicle 3: Cover material 4: Detection surface 5: Intrusion detection sensor 6: Muting device 7: Movement trajectory of the transported object 8:Wall components 9: Detection range 21: Placement section 22: Cart section 23: Lifting mechanism 41: Lower edge of the detection surface 61: Mounted sensor 62: Range detection sensor 63: Object to be detected 64: In-vehicle sensors 81 :Aperture R: Travel route T1: First height T2: Second height W: Object to be conveyed X:Moving direction

Claims

1. A transport device comprising: a transport vehicle that transports an object by reciprocating along a predetermined travel path; a cover member that covers the travel path; an intrusion detection sensor that detects an object passing through a detection surface; and a muting device that temporarily disables the intrusion detection sensor, the transport vehicle includes a placement unit on which the object to be transported is placed, and a carriage unit that travels while supporting the placement unit, the detection surface is disposed above the placement section on which the object to be transported is not placed and so as to intersect with a movement trajectory of the object to be transported placed on the placement section, a direction along the movement path is defined as a movement direction, and a detection range is defined as a range of positions of the transport vehicle in the movement direction where the transport object placed on the placement unit intersects with the detection surface, The muting device comprises: a placement sensor that detects whether the object to be transported is placed on the placement unit, and a range detection sensor that detects whether the transport vehicle is within a target range set based on the detection range, When the detection result of the placement sensor is positive and the detection result of the range detection sensor is positive, the intrusion detection sensor is disabled; The transport device enables the intrusion detection sensor when the detection result of the placement sensor is negative or when the detection result of the range detection sensor is negative.

2. the range detection sensor includes a detection target arranged along the movement path, and an on-board sensor that is mounted on the transport vehicle and detects the detection target; The transport device according to claim 1, wherein the object to be detected is detected by the on-board sensor when the transport vehicle is within the target range, and is not detected by the on-board sensor when the transport vehicle is outside the target range.

3. the transport vehicle further includes a lifting mechanism that raises and lowers the placement unit relative to the carriage unit, the lifting mechanism is configured to position the placement unit at a first height when the object to be transported is not placed on the placement unit, and to position the placement unit at a second height higher than the first height when the object to be transported is placed on the placement unit; The transport device according to claim 1 or 2, wherein a lower end of the detection surface is disposed above the placement unit at the first height and below the placement unit at the second height.

4. the movement path and the cover member are disposed so as to penetrate the wall member; an opening is formed in the wall member at a portion where the wall member intersects with the movement trajectory of the transport object; The transport device according to claim 1 or 2, wherein the detection surface is disposed so as to cover the entire upper side of the opening above a detection boundary line set above the placement section.

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